JP2017096864A - Test specimen holding mechanism - Google Patents

Abstract

A test object pressing mechanism capable of uniformly applying a pressing pressure to an object to be inspected and suppressing charging of the test object pressing is obtained. A support part 3 supports an inspection body presser 2 made of a hard material. The inspection object holder 2 is provided with a conical protrusion 5 on the surface opposite to the surface that holds the object 4 to be inspected. In the support portion 3, a V-shaped groove 6 is provided at a portion where the tip of the conical protrusion 5 contacts (a center point of the support portion 3). The angle of the V-shaped groove 6 is larger than the tip angle of the conical protrusion 5. [Selection] Figure 1

Description

  The present invention relates to an inspection object pressing mechanism in an electric characteristic inspection jig of an electronic device.

  Currently, LDMOS, GaN-HEMT, and GaAs-HBT are widely used as power amplifiers for mobile phone base stations such as CDMA. Generally, an output power of several W to several hundred W is required for a power amplifier for a base station depending on the size of the base station, but the amount of heat generated by the power amplifier increases in proportion to the output power. For this reason, when inspecting the electrical characteristics of the power amplifier, it is indispensable to efficiently dissipate heat generated when the inspected object operates as a countermeasure against destruction of the inspected object due to heat.

  In the electric characteristic inspection of the power amplifier for base station, there are a method of fixing the object to be inspected with screws or a method of pressing the object to be inspected against the heat radiating body depending on the package shape of the power amplifier. Of these, in order to efficiently dissipate the heat generated by the inspection object in the method of pressing the inspection object against the evaluation board, which is a heat dissipation body, generally increase the adhesion between the inspection object and the heat dissipation body. Is considered effective (see, for example, Patent Document 1).

  One way to increase the degree of adhesion between the object to be inspected and the radiator is to press the object to be inspected from the vertical direction with respect to the heat radiator. When the inspection object holder comes into contact with the inspection object due to inclination, warpage of the inspection object, etc., poor contact occurs between the inspection object and the connection terminals for measuring the electrical characteristics. For this reason, when inspecting the electrical characteristics of the object to be inspected, it is necessary to consider the warpage of the object to be inspected. In addition, since the object to be inspected is a high frequency / electronic device, countermeasures against electrostatic discharge (ESD) are also important.

  5 and 6 are cross-sectional views showing a conventional test body pressing mechanism. The inspection object holder 100 is pressed against the evaluation substrate 102 by the inspection object holder 100 and brought into contact with the evaluation terminal 103 to measure the electrical characteristics. In FIG. 5, the test body holder 100 is made of a soft material such as rubber or urethane. In FIG. 6, the test object holder 104 is made of a hard material such as a conductive resin.

JP-A-6-28764

  As shown in FIG. 5, by using a soft material for the inspection object holder 100, the pressing pressure from the inspection object holder 100 is uniformly transmitted to the inspection object 101 even when the inspection object 101 is warped. For this reason, the contact property between the device under test 101 and the evaluation terminal 103 is good. However, since soft materials such as rubber and urethane are easily charged, caution is required for use in high frequency and electronic devices due to ESD problems.

  On the other hand, the ESD problem can be solved by using a conductive material for the specimen holder 104 as shown in FIG. However, since the inspection object holder 104 is hard, when the amount of warping of the device is large or the inclination of the inspection object holder 104 with respect to the inspection object 101 occurs, the contact of the inspection object 101 with the evaluation terminal 103 occurs and is stable. It becomes a factor that hinders the inspected object.

  The present invention has been made in order to solve the above-described problems. The object of the present invention is to apply a pressing pressure to the object to be inspected uniformly and to suppress the charging of the object to be inspected. Get the mechanism.

  A test body pressing mechanism according to the present invention includes a test body press made of a conductive hard material and a support portion that supports the test body press, and the test body press includes a surface that presses the test target. A conical protrusion is provided on the opposite surface, and the support portion is provided with a V-shaped groove at a portion where the tip of the conical protrusion contacts, and the angle of the V-shaped groove is the tip of the conical protrusion. It is characterized by being larger than the angle.

  In the present invention, the inspection object holder is provided with a conical protrusion on the surface opposite to the surface for pressing the object to be inspected, and the support portion is provided with a V-shaped groove at a portion where the tip of the conical protrusion contacts. The angle of the groove is larger than the tip angle of the conical protrusion. For this reason, when the inspection object is warped, the inspection object holder is flexibly inclined from the apex of the conical protrusion by the inclination of the inspection object and hits the inspection object vertically. Thereby, the pressing pressure from the test body presser can be uniformly applied to the test object. Moreover, electrification of a test body presser can be suppressed by configuring the test body presser with a conductive hard material.

It is sectional drawing which shows the test body pressing mechanism which concerns on Embodiment 1 of this invention. FIG. 2 is a perspective view in which a side wall portion of the inspection object pressing mechanism in FIG. 1 is partially opened. It is sectional drawing which shows the test body pressing mechanism which concerns on Embodiment 2 of this invention. FIG. 4 is a perspective view in which a side wall portion of the inspection object pressing mechanism in FIG. 3 is partially opened. It is sectional drawing which shows the conventional test body holding | suppressing mechanism. It is sectional drawing which shows the conventional test body holding | suppressing mechanism.

  A test body pressing mechanism according to an embodiment of the present invention will be described with reference to the drawings. The same or corresponding components are denoted by the same reference numerals, and repeated description may be omitted.

Embodiment 1 FIG.
FIG. 1 is a cross-sectional view showing a test body pressing mechanism according to Embodiment 1 of the present invention. FIG. 2 is a perspective view in which a side wall portion of the test body pressing mechanism in FIG. 1 is partially opened. This mechanism is an inspection object pressing mechanism in an electric characteristic inspection jig of an electronic device.

  In the inspection object pressing mechanism 1, the support part 3 supports the inspection object holder 2 made of a conductive hard material. The flat surface at the lower end of the inspection object holder 2 is a surface that holds the inspection object 4. The inspection object holder 2 is provided with a conical protrusion 5 on the surface opposite to the surface that holds the object 4 to be inspected. In the support portion 3, a V-shaped groove 6 is provided at a portion where the tip of the conical protrusion 5 contacts (a center point of the support portion 3). The angle of the V-shaped groove 6 is larger than the tip angle of the conical protrusion 5.

  Subsequently, the operation of the specimen holding mechanism according to the present embodiment will be described. An evaluation substrate 8 is placed on the heat radiating body 7, and the object to be inspected 4 is placed thereon. The inspection object pressing mechanism 1 is pressed against the inspection object 4 from the vertical direction.

  At this time, if the inspection object 4 is warped, the inspection object holder 2 is inclined flexibly by the inclination of the inspection object 4 from the apex of the conical protrusion 5 and hits the inspection object 4 vertically. Thereby, the pressing pressure from the test body presser 2 can be uniformly applied to the test subject 4. As a result, the device under test 4 can be brought into close contact with the evaluation terminal 9 of the evaluation board 8 on the heat radiating body 7 to improve the heat dissipation. In addition, by configuring the test object holder 2 with a conductive hard material, charging of the test object holder 2 can be suppressed. In addition, it is preferable that the support part 3 is also comprised with the electroconductive hard material.

Embodiment 2. FIG.
FIG. 3 is a cross-sectional view showing a test body pressing mechanism according to Embodiment 2 of the present invention. FIG. 4 is a perspective view in which a side wall portion of the test body pressing mechanism in FIG. 3 is partially opened. The threaded rod 10 is fixed by being screwed into the support portion 3. A conical protrusion 11 is provided at the tip of the threaded rod 10. The inspection object holder 2 is provided with a V-shaped groove 12 at a portion where the tip of the conical protrusion 11 contacts on the surface opposite to the surface that holds the inspection object 4. The angle of the V-shaped groove 12 is larger than the tip angle of the conical protrusion 11.

  Since the present embodiment has a structure in which the positions of the conical protrusion and the V-shaped groove in the first embodiment are interchanged, the same effect as in the first embodiment can be obtained. Further, even when the conical protrusion 5 is deteriorated, since the entire threaded rod 10 provided with the conical protrusion 5 may be replaced, the maintainability is high. Furthermore, by adjusting the screwing amount of the threaded rod 10 into the support portion 3, the tilt correction amount of the test object holder 2 can be adjusted.

DESCRIPTION OF SYMBOLS 1 Inspection body holding | suppressing mechanism, 2 Inspection body holding | maintenance, 3 Support part, 4 to-be-inspected object, 5 Conical protrusion, 6 V-shaped groove, 8 Evaluation board, 10 Threaded rod, 11 Conical protrusion, 12 V-shaped groove

Claims (2)

Inspection body presser made of conductive hard material,
A support portion for supporting the inspection object holder,
The inspection object holder is provided with a conical protrusion on the surface opposite to the surface holding the object to be inspected,
The support portion is provided with a V-shaped groove at a portion where the tip of the conical protrusion contacts.
The specimen holding mechanism, wherein the angle of the V-shaped groove is larger than the tip angle of the conical protrusion. Inspection body presser made of conductive hard material,
A support portion for supporting the inspection object holder;
A threaded rod fixed by being screwed into the support portion;
A conical protrusion is provided at the tip of the threaded rod,
The inspection body presser is provided with a V-shaped groove at a portion where the tip of the conical protrusion contacts with the surface opposite to the surface pressing the object to be inspected,
The specimen holding mechanism, wherein the angle of the V-shaped groove is larger than the tip angle of the conical protrusion.

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