JP2017062945A - Heater chip, joining device and joining method - Google Patents
Heater chip, joining device and joining method Download PDFInfo
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- JP2017062945A JP2017062945A JP2015187708A JP2015187708A JP2017062945A JP 2017062945 A JP2017062945 A JP 2017062945A JP 2015187708 A JP2015187708 A JP 2015187708A JP 2015187708 A JP2015187708 A JP 2015187708A JP 2017062945 A JP2017062945 A JP 2017062945A
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Abstract
【課題】ヒータチップにおいて、偏在的酸化を起こり難くして長寿命化を図り、コテ部の温度測定のために熱電対を取り付ける場合はその温度モニタリングの精度・信頼性を向上させること。【解決手段】ヒータチップ10は、コテ部12に近い位置にて片側(図示の例では右側)の接続端子部14Rのアーム部20Rに熱電対22を取り付けている。コテ部12と両接続端子部14L,14Rのアーム部20L,20Rとの境界付近にそれぞれ位置する左側および右側コテ周辺部24L,24Rの通電時の発熱量をJL,JRとし、右側接続端子部14Rのアーム部20R上で熱電対22から見て右側コテ周辺部24Rと反対側(右側)に位置する右側コテ遠隔部24Pの通電時の発熱量をJPとすると、JP<JL<JRの関係または条件が成り立つようにしている。【選択図】 図1An object of the present invention is to improve the temperature monitoring accuracy and reliability when a thermocouple is attached to a heater chip to prevent uneven oxidization from occurring and to prolong its service life and to measure the temperature of the iron part. A heater chip 10 has a thermocouple 22 attached to an arm portion 20R of a connection terminal portion 14R on one side (right side in the illustrated example) at a position close to the iron portion 12. The left and right iron peripheral portions 24L and 24R located near the boundary between the iron portion 12 and the arm portions 20L and 20R of the both connection terminal portions 14L and 14R are JL and JR, respectively. Assuming that the amount of heat generated when the right iron remote portion 24P located on the opposite side (right side) of the right iron peripheral portion 24R as viewed from the thermocouple 22 on the 14R arm portion 20R is JP, JP <JL <JR Or the condition is satisfied. [Selection] Figure 1
Description
本発明は、導線と端子部材との接合に用いるヒータチップ、接合装置および接合方法に関する。 The present invention relates to a heater chip, a bonding apparatus, and a bonding method used for bonding a conductive wire and a terminal member.
一般に、自動式の接合装置において、数100μm以下の線径(太さ)を有する導線(たとえば電気部品または外部回路からの導線)100を回路基板102上の端子部材(たとえば配線導体または接続パッド)104に熱圧着で接合する場合は、図12に示すようなヒータチップ106が接合ツールに用いられている(たとえば特許文献1参照)。 In general, in an automatic joining apparatus, a lead wire (for example, a lead wire from an electrical component or an external circuit) 100 having a wire diameter (thickness) of several hundreds μm or less is connected to a terminal member (eg, a wiring conductor or a connection pad) on the circuit board 102. When joining to 104 by thermocompression bonding, a heater chip 106 as shown in FIG. 12 is used as a joining tool (see, for example, Patent Document 1).
このタイプのヒータチップ106は、たとえばタングステンあるいはモリブデン等の高融点金属を母材とする略U字状または略V字状の板体として形成され、直方体形状のコテ部108から左右の斜め上方に延びる一対の接続端子部110L,110Rをヒータヘッド112に取り付けている。図示のヒータヘッド112は、ヒータ電源(図示せず)の出力端子に通じる一対の給電用導体114L,114Rの一側面にボルト116L,116Rでヒータチップ106の両接続端子部110L,110Rを物理的かつ電気的にそれぞれ結合しており、給電用導体114L,114Rを介してヒータチップ106を上下に移動させる昇降機構や被接合物に向けて押圧する加圧機構(図示せず)を有している。給電用導体114L,114Rの間には両者を電気的に分離するための絶縁体118が挟まれている。 This type of heater chip 106 is formed as a substantially U-shaped or V-shaped plate body having a refractory metal such as tungsten or molybdenum as a base material, and is diagonally upward and laterally from a rectangular parallelepiped shaped iron part 108. A pair of extending connection terminal portions 110 </ b> L and 110 </ b> R are attached to the heater head 112. The illustrated heater head 112 physically connects both connection terminal portions 110L and 110R of the heater chip 106 with bolts 116L and 116R on one side of a pair of power supply conductors 114L and 114R that communicate with an output terminal of a heater power source (not shown). In addition, they are electrically coupled to each other, and have an elevating mechanism for moving the heater chip 106 up and down via the power feeding conductors 114L and 114R, and a pressurizing mechanism (not shown) for pressing toward the object to be joined. Yes. An insulator 118 is electrically sandwiched between the power supply conductors 114L and 114R to electrically separate them.
図12において、回路基板102は図示しない作業台(たとえばXYテーブル)または治具等で水平に支持されており、導線100の一端部が端子部材104の上に載せられる。ヒータヘッド112がヒータチップ106を下ろすと、図13に示すように、ヒータチップ106のコテ部108のコテ先面108aが直下の被接合部Wつまり回路基板102上で重なっている端子部材104および導線100に適度な加圧力で接触する。このようにヒータチップ106のコテ部108を被接合部W(100,104)に押し当てた状態の下で、ヒータ電源がオンしてヒータチップ106に電流を流すと、ヒータチップ106が抵抗発熱して、被接合部W(100,104)を通常750℃以上の高い温度で加熱する。これによって、導線100が被覆線である場合はその絶縁被膜が熱で溶けて剥がれ、導線100の露出した導体がヒータチップ106からの加圧と加熱を同時に受け塑性変形して端子部材104に熱圧着で接合される。 In FIG. 12, the circuit board 102 is horizontally supported by a work table (for example, an XY table) or a jig (not shown), and one end of the conducting wire 100 is placed on the terminal member 104. When the heater head 112 lowers the heater chip 106, as shown in FIG. 13, the terminal member 104 in which the iron tip surface 108 a of the iron part 108 of the heater chip 106 overlaps the part W to be joined, that is, the circuit board 102, and The conductor 100 is brought into contact with an appropriate pressure. When the heater power supply is turned on and a current is passed through the heater chip 106 in a state where the iron part 108 of the heater chip 106 is pressed against the bonded part W (100, 104), the heater chip 106 generates resistance heat. And the to-be-joined part W (100,104) is heated at high temperature normally 750 degreeC or more. As a result, when the conductive wire 100 is a covered wire, the insulating coating melts and peels off by heat, and the exposed conductor of the conductive wire 100 is simultaneously subjected to pressure and heating from the heater chip 106 and is plastically deformed to heat the terminal member 104. Bonded by crimping.
この種のヒータチップ106は、コテ部108の温度を測定または監視するために、通常はコテ部108のコテ先面108aと反対側の背面108bに温度センサとして熱電対120を取り付けている。通電時には、コテ部108およびその回りで発生したジュール熱の多くがコテ先面108aを介して被接合部W(100,104)に供給される一方で、一部の熱が熱電対120を介して外部へ逃げる。通常、熱電対120によって検出されるコテ部108の温度と被接合部W(100,104)に当たるコテ先面108aの温度は一致しないが、それぞれの時間的な変化の特性(温度波形)の間に一定の対応関係があればよく、熱電対120の出力信号に基づいてコテ部108のコテ先面108aの温度(加熱温度)をモニタリングすることができる。 In order to measure or monitor the temperature of the iron part 108, this type of heater chip 106 is usually provided with a thermocouple 120 as a temperature sensor on a back surface 108b opposite to the iron tip surface 108a. At the time of energization, much of the Joule heat generated around the iron part 108 and its periphery is supplied to the joined part W (100, 104) via the iron tip surface 108a, while part of the heat is supplied via the thermocouple 120. Escape to the outside. Normally, the temperature of the iron part 108 detected by the thermocouple 120 and the temperature of the iron tip surface 108a corresponding to the bonded part W (100, 104) do not coincide with each other, but between the characteristics of change with time (temperature waveform). The temperature of the tip surface 108a of the iron part 108 (heating temperature) can be monitored based on the output signal of the thermocouple 120.
従来のヒータチップ106においては、上記のような熱圧着のための高温(750℃以上)の通電発熱動作を繰り返すうちに、チップ表面に生じる酸化(ヒータチップの材質がタングステンの場合は酸化タングステンへの変質)が、左右両側の接続端子部110L,110Rのいずれか片方とコテ部108との境界付近に際立って多く偏在し、そのような偏在的な酸化によってヒータチップ106が短寿命になるだけでなく、熱電対120を用いたコテ先温度モニタリングの精度および信頼性の低下を招くことが問題になっている。 In the conventional heater chip 106, oxidation that occurs on the chip surface while repeating the high-temperature (750 ° C. or higher) energization heating operation for thermocompression bonding as described above (if the heater chip material is tungsten, it is changed to tungsten oxide). In the vicinity of the boundary between one of the left and right connecting terminal portions 110L and 110R and the iron portion 108, and the uneven oxidization only shortens the life of the heater chip 106. In addition, there is a problem in that the accuracy and reliability of the tip temperature monitoring using the thermocouple 120 is reduced.
図14Aおよび図14Bにつき、従来のヒータチップ106における偏在的酸化のメカニズムを説明する。なお、この明細書において、偏在的酸化とは、ヒータチップの電流経路上で一部の部位の酸化が他の部位の酸化よりも際立って多く現出ないし進行することを意味する。 14A and 14B, the mechanism of ubiquitous oxidation in the conventional heater chip 106 will be described. In this specification, the ubiquitous oxidation means that the oxidation of some parts appears or proceeds significantly more than the oxidation of other parts on the current path of the heater chip.
図14Aに示すように、通電中のヒータチップ106においては、左側の接続端子部110L→コテ部108→右側の接続端子部110Rの経路上またはその逆向きの経路上でヒータ電源からの電流Iが流れ、電流Iが流れる各部で電流Iの実効値の自乗に比例してジュール熱が発生する。この場合、ヒータチップ106の各部の材質は同じで電気抵抗率は一定であるから、電流経路上で断面積の小さい箇所ほど、電流が集中して、ジュール熱が多く発生する。 As shown in FIG. 14A, in the heater chip 106 being energized, the current I from the heater power source is on the path of the left connection terminal portion 110L → the iron portion 108 → the right connection terminal portion 110R or the opposite direction. And Joule heat is generated in proportion to the square of the effective value of the current I in each part through which the current I flows. In this case, since the material of each part of the heater chip 106 is the same and the electrical resistivity is constant, the current is concentrated and the more Joule heat is generated at the portion having a smaller cross-sectional area on the current path.
図示のように、ヒータチップ106内で電流経路上の断面積が一見して最も小さい部位は、左右両側の接続端子部110L,110Rとコテ部108との境界付近の部位(以下「コテ周辺部」という。)122L,122Rである。コテ部108自体は、左右両側のコテ周辺部122L,122Rの間で下方に突出していて、電流経路上の断面積が両側コテ周辺部122L,122Rよりも一段と大きいため、そこで(特にコテ先面108a付近で)発生するジュール熱はそれほど多くない。このため、通電中のヒータチップ106内では、熱伝導に関して、左右両側のコテ周辺部122L,122Rからコテ部108の中間部およびコテ先面108aを通って被接合部Wへ熱が移動するコテ下部の熱伝導h1L,h1Rと、両コテ周辺部122L,122Rからコテ部106の背面108b側を通って熱電対120へ熱が移動するコテ上部の熱伝導h2L,h2Rとの2つのルートが並存する。 As shown in the drawing, the smallest portion of the heater chip 106 having a cross-sectional area on the current path at first glance is a portion in the vicinity of the boundary between the connecting terminal portions 110L, 110R on the left and right sides and the iron portion 108 (hereinafter referred to as “the iron peripheral portion”). ”) 122L and 122R. Since the iron part 108 protrudes downward between the iron peripheral parts 122L and 122R on both the left and right sides, and the cross-sectional area on the current path is much larger than both the iron peripheral parts 122L and 122R (particularly, the iron tip surface). There is not much Joule heat generated (near 108a). For this reason, in the heater chip 106 that is energized, with respect to heat conduction, the iron moves from the iron peripheral portions 122L and 122R on the left and right sides to the bonded portion W through the intermediate portion of the iron portion 108 and the iron tip surface 108a. Lower heat conduction h 1L , h 1R and heat conduction h 2L , h 2R at the upper part of the iron where heat is transferred from both iron peripheral parts 122L, 122R to the thermocouple 120 through the back surface 108b side of the iron part 106 Two routes coexist.
ここで、左右両側のコテ周辺部122L,122Rで発生するジュール熱が互いに均衡している限り、そのいずれか片側の偏在的酸化は起こらず、コテ部108内で下部の熱伝導h1L,h1Rおよび上部の熱伝導h2L,h2Rはいずれも左右で均衡し、熱電対120を用いるコテ先温度のモニタリングも安定に機能する。 Here, as long as the Joule heats generated in the left and right iron peripheral portions 122L and 122R are balanced with each other, uneven oxidization on either one side does not occur, and the lower heat conduction h 1L , h in the iron portion 108 occurs. 1R and the upper heat conduction h 2L and h 2R are both balanced on the left and right sides, and the monitoring of the tip temperature using the thermocouple 120 functions stably.
しかしながら、実際には、ヒータチップ106の両接続端子部110L,110Rを左右対称に製作しても、両者の寸法(特に電流経路上の断面積)には誤差がつきものであり、この寸法誤差がわずかであっても、両側コテ周辺部122L,122Rで発生するジュール熱の不均衡が1回の通電発熱動作の中で加熱温度が高くなるほど拡大し、かつ通電発熱動作を繰り返す度にもその不均衡の度合いを強め、これによって偏在的酸化の現象が生起し、コテ先温度のモニタリングも不安定になる。 However, actually, even if both the connection terminal portions 110L and 110R of the heater chip 106 are manufactured symmetrically, there is an error in their dimensions (especially the cross-sectional area on the current path). Even if it is slight, the Joule heat imbalance generated in the peripheral portions 122L and 122R on both sides of the iron increases as the heating temperature becomes higher in one energizing heat generating operation, and the imbalance is repeated each time the energizing heat generating operation is repeated. This increases the degree of equilibrium, which causes the phenomenon of ubiquitous oxidation and makes the tip temperature monitoring unstable.
たとえば、両接続端子部110L,110Rの間に、右側コテ周辺部122Rの断面積が左側コテ周辺部122Lの断面積よりも幾らか小さい関係(寸法誤差)があるとする。この場合、ヒータチップ106を通電させると、通電開始時に左側コテ周辺部122Lと右側コテ周辺部122Rでそれぞれ発生する抵抗発熱は同じではなく、断面積の相対的に小さい右側コテ周辺部122Rの発熱が断面積の相対的に大きい左側コテ周辺部122Lの発熱に勝る。これによって、発熱により一定の温度係数で上昇する右側コテ周辺部122Rの抵抗が同一の温度係数で上昇する左側コテ周辺部122Lの抵抗よりも高くなり、通電時間中に電流を大きくするほど両側のコテ周辺部122L,122の発熱量の不均衡ひいては発熱温度の不均衡が拡大する。 For example, it is assumed that there is a relationship (dimensional error) between the connecting terminal portions 110L and 110R in which the cross-sectional area of the right iron peripheral portion 122R is somewhat smaller than the cross-sectional area of the left iron peripheral portion 122L. In this case, when the heater chip 106 is energized, the resistance heat generated in the left iron peripheral portion 122L and the right iron peripheral portion 122R at the start of energization is not the same, and the heat generation in the right iron peripheral portion 122R having a relatively small cross-sectional area. Is superior to the heat generation in the left iron peripheral portion 122L having a relatively large cross-sectional area. As a result, the resistance of the right iron peripheral portion 122R that rises with a constant temperature coefficient due to heat generation is higher than the resistance of the left iron peripheral portion 122L that rises with the same temperature coefficient. The imbalance of the heat generation amounts of the iron peripheral portions 122L and 122, and hence the imbalance of the heat generation temperature, is enlarged.
こうして、通電時にヒータチップ106内で右側コテ周辺部122Rが他の部位(特に左側コテ周辺部122L)よりも際立って高い温度で発熱することにより、図14Bに示すように右側コテ周辺部122Rにおける酸化124が局所的に大きな成長率で厚くなる。そして、右側コテ周辺部122Rにおける酸化124の偏在的な増大により、この付近の導電路の有効断面積(酸化124を除く部分の断面積)がさらに減少することで、通電発熱動作を繰り返す度に右側コテ周辺部22Rの突出した発熱ひいては酸化124の偏在が一層顕著になり、終にはコテ周辺部122R付近が破損または折損する。 In this way, the right iron peripheral portion 122R generates heat at a significantly higher temperature in the heater chip 106 than other parts (particularly the left iron peripheral portion 122L) during energization, so that as shown in FIG. The oxide 124 is locally thick with a large growth rate. Each time the energization heat generation operation is repeated, the effective cross-sectional area (cross-sectional area of the portion excluding the oxidation 124) of the conductive path in the vicinity thereof is further reduced due to the uneven increase of the oxidation 124 in the right iron peripheral portion 122R. The protruding heat generation in the right iron peripheral portion 22R, and hence the uneven distribution of the oxidation 124 becomes more prominent, and eventually the vicinity of the iron peripheral portion 122R is broken or broken.
また、ヒータチップ106の破損に至らなくても、通電中にコテ部108内で生じるコテ下部の熱伝導h1L,h1Rおよびコテ上部の熱伝導h2L,h2Rが左右でバランスせず、このアンバランスが通電時間中に拡大し、通電発熱動作を繰り返す度にも拡大するので、熱電対120を用いるコテ先温度モニタリングの精度および信頼性が大きく損なわれる。 Even if the heater chip 106 is not damaged, the heat conduction h 1L , h 1R at the bottom of the iron and the heat conduction h 2L , h 2R at the top of the iron generated in the iron part 108 during energization are not balanced left and right, Since this imbalance increases during the energization time and increases each time the energization heat generation operation is repeated, the accuracy and reliability of the tip temperature monitoring using the thermocouple 120 is greatly impaired.
本発明は、上記のような従来技術の問題点を解決するものであり、偏在的酸化を起こり難くして長寿命化を図るとともに、コテ部の温度測定のために熱電対を取り付ける場合はその温度モニタリングの精度・信頼性を向上させるヒータチップおよびこれを用いる接合装置ならびに接合方法を提供する。 The present invention solves the problems of the prior art as described above, and makes it difficult to cause uneven oxidization, thereby prolonging the life, and when attaching a thermocouple for measuring the temperature of the iron part, Provided are a heater chip, a bonding apparatus using the same, and a bonding method that improve the accuracy and reliability of temperature monitoring.
本発明の第1の観点におけるヒータチップは、導線を端子部材に接合するためのヒータチップであって、前記端子部材上に配置された前記導線の一端部に当接ないし接触する抵抗発熱体からなるコテ部と、ヒータ電源からの給電用導体との物理的かつ電気的な接続をとるために、前記コテ部と同一の抵抗発熱体からなり、前記コテ部と一体的にその左右両端から対称または非対称に延びる第1および第2の接続端子部と、前記コテ部寄りの適当な位置で前記第1の接続端子部に取り付けられる熱電対とを有し、通電時に前記コテ部および前記第1および第2の接続端子部でそれぞれ発生する抵抗発熱に関して、前記コテ部と前記第1の接続端子部との境界付近に位置する第1の部位の発熱量をJ1,前記コテ部と前記第2の接続端子部との境界付近に位置する第2の部位の発熱量をJ2、前記第1の接続端子部上で前記熱電対を基準として前記第1の部位と反対側に位置する第3の部位の発熱量をJ3とすると、J3<J2<J1の関係があることを特徴とする。 A heater chip according to a first aspect of the present invention is a heater chip for joining a conductive wire to a terminal member, from a resistance heating element that contacts or contacts one end of the conductive wire disposed on the terminal member. In order to make a physical and electrical connection between the iron part and the power supply conductor from the heater power source, it is made of the same resistance heating element as the iron part, and is symmetrical with the iron part integrally from the left and right ends thereof Alternatively, the first and second connection terminal portions extending asymmetrically, and a thermocouple attached to the first connection terminal portion at an appropriate position close to the iron portion, the iron portion and the first portion when energized. With respect to the resistance heat generated in the second connection terminal portion and the second connection terminal portion, the amount of heat generated in the first portion located near the boundary between the iron portion and the first connection terminal portion is represented by J1, the iron portion and the second connection portion. Boundary with the connection terminal The heat value of the second part located in the vicinity is J2, and the heat value of the third part located on the opposite side of the first part with respect to the thermocouple on the first connection terminal is J3. Then, there is a relationship that J3 <J2 <J1.
本発明の第2の観点におけるヒータチップは、導線を端子部材に接合するためのヒータチップであって、前記端子部材上に配置された前記導線の一端部に当接ないし接触する抵抗発熱体からなるコテ部と、ヒータ電源からの給電用導体との物理的かつ電気的な接続をとるために、前記コテ部と同一の抵抗発熱体からなり、前記コテ部と一体的にその左右両端から対称または非対称に延びる第1および第2の接続端子部と、前記コテ部の近くで前記第1の接続端子部に取り付けられる突出した放熱体とを有し、通電時に前記コテ部および前記第1および第2の接続端子部でそれぞれ発生する抵抗発熱に関して、前記コテ部と前記第1の接続端子部との境界付近に位置する第1の部位の発熱量をJ1,前記コテ部と前記第2の接続端子部との境界付近に位置する第2の部位の発熱量をJ2、前記第1の接続端子部上で前記放熱体から見て前記第1の部位と反対側に位置する第3の部位の発熱量をJ3とすると、J3<J2<J1の関係があることを特徴とする。 A heater chip according to a second aspect of the present invention is a heater chip for joining a conductive wire to a terminal member, from a resistance heating element that contacts or contacts one end of the conductive wire disposed on the terminal member. In order to make a physical and electrical connection between the iron part and the power supply conductor from the heater power source, it is made of the same resistance heating element as the iron part, and is symmetrical with the iron part integrally from the left and right ends thereof Alternatively, the first and second connection terminal portions extending asymmetrically, and a projecting heat radiating body attached to the first connection terminal portion near the iron portion, the iron portion and the first and Regarding the resistance heat generated in each of the second connection terminal portions, the amount of heat generated in the first portion located near the boundary between the iron portion and the first connection terminal portion is represented by J1, the iron portion and the second portion. Boundary with connection terminal The amount of heat generated in the second part located nearby is J2, and the amount of heat generated in the third part located on the opposite side of the first part when viewed from the radiator on the first connection terminal is J3. Then, there is a relationship that J3 <J2 <J1.
上記構成のヒータチップにおいては、コテ部の近くで片側の接続端子部に熱電対(または放熱体)を取り付けるとともに、コテ部と第1の接続端子部との境界付近に位置する第1の部位(第1のコテ周辺部)の通電時の発熱量J1,コテ部と第2の接続端子部との境界付近に位置する第2の部位(第2のコテ周辺部)の通電時の発熱量J2、第1の接続端子部上で熱電対(または放熱体)から見て第1の部位と反対側に位置する第3の部位(コテ遠隔部)の通電時の発熱量J3の間にJ3<J2<J1の関係を持たせることにより、通電時に他の部位よりも高温に発熱する第1および第2のコテ周辺部が両者の電流経路上の断面積が違っていても自律的に発熱温度をバランスさせるので、両コテ周辺部のいずれか片方で生じる偏在的酸化が起こり難い。 In the heater chip having the above-described configuration, a thermocouple (or a heat radiating body) is attached to the connection terminal part on one side near the iron part, and the first part located near the boundary between the iron part and the first connection terminal part Heat generation amount during energization of the (first iron peripheral portion) J1, heat generation amount during energization of the second portion (second iron peripheral portion) located near the boundary between the iron portion and the second connection terminal portion J2, J3 between the amount of generated heat J3 during energization of the third part (iron remote part) located on the opposite side of the first part when viewed from the thermocouple (or radiator) on the first connection terminal part By providing the relationship <J2 <J1, the peripheral portions of the first and second irons, which generate heat at a higher temperature than other parts when energized, generate heat autonomously even if the cross-sectional areas of both current paths are different. Since the temperature is balanced, ubiquitous oxidation occurs on either side of both irons. Difficult Ri.
また、コテ部の温度測定のために熱電対を取り付けた場合は、コテ部内で左右両方向の熱伝導が均衡状態で安定することで、熱電対寄りのコテ周辺部から熱電対への熱伝導も安定し、熱電対の検出する温度とコテ部の温度(特にコテ先面付近の温度)との間の対応関係が一定に保たれるので、温度モニタリングの精度および信頼性が安定に維持される。 In addition, when a thermocouple is attached to measure the temperature of the iron part, the heat conduction in the left and right directions in the iron part is stabilized in a balanced state, so that heat conduction from the iron peripheral part near the thermocouple to the thermocouple is also possible. It is stable and the correspondence between the temperature detected by the thermocouple and the temperature of the iron part (particularly the temperature near the tip of the iron) is kept constant, so the accuracy and reliability of temperature monitoring is maintained stably. .
本発明の好適な一態様においては、通電時に流れる電流の経路上で第1、第2、第3の部位の断面積をそれぞれS1,S2,S3とすると、S1<S2<S3の関係を持たせる。また、通電時に流れる電流の経路上でコテ部の左右両端間の中間部の断面積をS4とすると、S3<S4の関係をもたせる。 In a preferred aspect of the present invention, assuming that the cross-sectional areas of the first, second, and third portions on the path of the current that flows during energization are S1, S2, and S3, respectively, there is a relationship of S1 <S2 <S3. Make it. Further, assuming that the cross-sectional area of the intermediate part between the left and right ends of the iron part on the path of the current flowing when energized is S4, the relationship of S3 <S4 is established.
本発明の接合装置は、本発明のヒータチップと、このヒータチップを支持し、導線を端子部材に接合する際に、前記コテ部のコテ先面を前記端子部材上の前記導線に加圧接触させるヒータヘッドと、前記ヒータチップに抵抗発熱用の電流を供給するヒータ電源とを有する。 The joining device of the present invention supports the heater chip of the present invention and the heater chip, and presses the tip surface of the iron part to the conductor on the terminal member when joining the conductor to the terminal member. And a heater power supply for supplying a resistance heating current to the heater chip.
本発明の第1の観点における接合方法は、本発明の接合装置を用いて端子部材に接合する接合方法であって、前記端子部材上に前記導線を載せる第1の工程と、前記ヒータヘッドを制御して前記ヒータチップのコテ部を前記端子部材上の前記導線に当て所定の加圧力を加える第2の工程と、前記ヒータ電源を制御して前記ヒータチップを通電し、前記コテ部からの加熱と加圧により前記導線を前記端子部材に密着させて拡散接合を促す第3の工程と、前記ヒータ電源を制御して前記ヒータチップの通電を所定のタイミングで停止し、所定時間後に前記ヒータヘッドを制御して前記コテ部を前記導体細線から引き離す第4の工程とを有する。 The joining method in the 1st viewpoint of this invention is a joining method joined to a terminal member using the joining apparatus of this invention, Comprising: The 1st process of mounting the said conducting wire on the said terminal member, The said heater head is used. A second step of controlling and applying a predetermined pressing force to the lead wire on the terminal member by applying the iron part of the heater chip to the terminal member, and energizing the heater chip by controlling the heater power source, A third step of promoting diffusion bonding by bringing the conductive wire into close contact with the terminal member by heating and pressurization; and controlling the heater power supply to stop energization of the heater chip at a predetermined timing; And a fourth step of controlling the head to separate the iron part from the thin conductor wire.
本発明の第2の観点における接合方法は、前記端子部材上にハンダを介して前記導体細線を載せる第1の工程と、前記ヒータヘッドを制御して前記ヒータチップのコテ部を前記端子部材上の前記導体細線に当て所定の加圧力を加える第2の工程と、前記ヒータチップを制御して前記ヒータチップを通電し、前記コテ部からの加熱により前記ハンダを溶かす第3の工程と、前記ヒータ電源を制御して前記ヒータチップの通電を所定のタイミングで停止し、所定時間後に前記ヒータヘッドを制御して前記コテ部を前記導体細線から引き離す第4の工程とを有する。 In the bonding method according to the second aspect of the present invention, a first step of placing the thin conductor wire on the terminal member via solder, and a solder head of the heater chip is controlled on the terminal member by controlling the heater head. A second step of applying a predetermined pressing force to the thin conductor wire, a third step of controlling the heater chip to energize the heater chip, and melting the solder by heating from the iron part, And a fourth step of controlling the heater power supply to stop energization of the heater chip at a predetermined timing, and controlling the heater head after a predetermined time to separate the iron part from the thin conductor wire.
本発明のヒータチップによれば、上記のような構成および作用により、偏在的酸化現象を起こり難くして長寿命化を図り、かつコテ部の温度測定のために熱電対を取り付ける場合はその温度モニタリングの精度・信頼性を向上させることができる。 According to the heater chip of the present invention, due to the above-described configuration and operation, the uneven oxidation phenomenon is unlikely to occur and the life is extended, and when a thermocouple is attached to measure the temperature of the iron part, the temperature Monitoring accuracy and reliability can be improved.
また、本発明の接合装置または接合方法によれば、本発明のヒータチップを用いることにより、導線と端子部材との接合加工の品質および生産性を向上させることができる。 Moreover, according to the joining apparatus or joining method of this invention, the quality and productivity of joining processing of a conducting wire and a terminal member can be improved by using the heater chip of this invention.
以下、図1〜図11を参照して本発明の好適な実施形態を説明する。
[実施形態におけるヒータチップの構成]
Hereinafter, a preferred embodiment of the present invention will be described with reference to FIGS.
[Configuration of Heater Chip in Embodiment]
図1に、本発明の一実施形態におけるヒータチップの構成を示す。この実施形態におけるヒータチップ10は、たとえば3mm程度の厚さを有する硬い板状の高融点金属たとえば圧延加工タングステンまたは焼結タングステンからなり、たとえばワイヤ放電加工により図示のような正面視で略U字形または略V字状に製作されている。 FIG. 1 shows a configuration of a heater chip in an embodiment of the present invention. The heater chip 10 in this embodiment is made of a hard plate-like refractory metal having a thickness of about 3 mm, for example, rolled tungsten or sintered tungsten, and is substantially U-shaped in front view as shown in the figure by wire electric discharge machining, for example. Or it is manufactured in a substantially V shape.
このヒータチップ10は、通常使用形態の姿勢において最下端に位置するコテ部12と、このコテ部12と一体的にその上部の左右両端から上方に対称(または非対称)に延びる一対の接続端子部14L,14Rとを有している。 The heater chip 10 has a iron part 12 positioned at the lowermost end in a posture of normal use, and a pair of connection terminal parts integrally extending with the iron part 12 and extending symmetrically (or asymmetrically) from the left and right ends of the upper part. 14L, 14R.
コテ部12は、略直方体の形状を有し、左右両側の接続端子部14L,14Rの下端から下方に突出して延びている。両接続端子部14L,14Rは、固定用のボルト通し穴16L,16Rが設けられる幅広の平板部18L,18Rと、これらの平板部18L,18Rとコテ部12との間で斜めに延びるアーム部20L,20Rとを有している。 The iron part 12 has a substantially rectangular parallelepiped shape, and protrudes downward from the lower ends of the connection terminal parts 14L and 14R on the left and right sides. Both connection terminal portions 14L and 14R are wide flat plate portions 18L and 18R provided with fixing bolt through holes 16L and 16R, and arm portions extending obliquely between the flat plate portions 18L and 18R and the iron portion 12. 20L, 20R.
このヒータチップ10は、コテ部12に近い位置にて片側(図示の例では右側)の接続端子部14Rのアーム部20Rに熱電対22を取り付けている。そして、コテ部12と両接続端子部14L,14Rのアーム部20L,20Rとの境界付近にそれぞれ位置する第1および第2の部位つまり左側および右側のコテ周辺部24L,24Rの通電時の抵抗発熱量をJL,JRとし、右側接続端子部14Rのアーム部20R上で熱電対22から見て右側コテ周辺部24Rと反対側(右側)に位置する第3の部位つまり右側コテ遠隔部24Pの通電時の抵抗発熱量をJPとすると、JP<JL<JRの関係または条件が成り立つようにしている。 In the heater chip 10, a thermocouple 22 is attached to the arm portion 20 </ b> R of the connection terminal portion 14 </ b> R on one side (right side in the illustrated example) at a position close to the iron portion 12. And the resistance at the time of electricity supply of the 1st and 2nd site | part located in the vicinity of the boundary of the iron part 12 and the arm parts 20L and 20R of both connection terminal parts 14L and 14R, that is, the left and right iron peripheral parts 24L and 24R, respectively. the calorific value J L, and J R, the third part, namely the right trowel remote unit located on the right side trowel periphery 24R opposite side when viewed from the thermocouple 22 on the arm portion 20R of the right connecting terminal portion 14R (right) When the resistance heating value during energization of 24P is J P , the relationship or condition of J P <J L <J R is established.
この実施形態では、JP<JL<JRの関係(条件)を満たすために、左側コテ周辺部24L、右側コテ周辺部24R、右側コテ遠隔部24Pの電流経路上の面積をそれぞれSL,SR,SPとすると、SR<SL<SPの関係(条件)が満たされるように、ヒータチップ10を製作する。すなわち、両接続端子部14L,14Rのアーム部20L,20Rをそれぞれ平板部18L,18Rからコテ部12に向って断面積が次第に小さくなるようにテーパ状に形成し(これによって、SR<SP,SL<SPの条件が満たされる)、右側コテ周辺部24Rにその付近の電流経路上の断面積を適度に縮小するためのノッチ(または括れ部)26を設けている(これによって、SR<SLの条件が満たされる)。 In this embodiment, J P <J L <J in order to satisfy the relationship of R (Condition), left iron periphery 24L, right trowel periphery 24R, S respectively the area of the current path of the right trowel remote unit 24P L , S R , S P , the heater chip 10 is manufactured so that the relationship (condition) of S R <S L <S P is satisfied. That is, the arm portions 20L and 20R of the connection terminal portions 14L and 14R are formed in a tapered shape so that the cross-sectional area gradually decreases from the flat plate portions 18L and 18R toward the iron portion 12 (thereby, S R <S P, conditions S L <S P is satisfied) is provided with a notch (or constriction) 26 for moderately reducing the cross-sectional area of the current path near the right trowel periphery 24R (This , S R <S L is satisfied).
熱電対22は、より詳細には、右側接続端子部14Rのアーム部20Rの背面(コテ部12の背面12bと同じ側の面)に形成される突部28に取り付けられる。熱電対22の端部(測温端)は、たとえばアーク溶接により突部28に接合されている。 More specifically, the thermocouple 22 is attached to a protrusion 28 formed on the back surface of the arm portion 20R of the right connection terminal portion 14R (the surface on the same side as the back surface 12b of the iron portion 12). The end (temperature measuring end) of the thermocouple 22 is joined to the protrusion 28 by, for example, arc welding.
このヒータチップ10も、従来のヒータチップ106(図12,図13)と同様に、ヒータヘッド112(図12)にボルト116L,116Rで取り付けられ、所与の被接合物に対して予め設定された手順および加工条件で所定の加圧動作および通電発熱動作を行うようになっている。
[実施形態における接合装置の全体構成]
Similarly to the conventional heater chip 106 (FIGS. 12 and 13), the heater chip 10 is attached to the heater head 112 (FIG. 12) with bolts 116L and 116R, and is preset for a given object to be joined. The predetermined pressurization operation and energization heat generation operation are performed according to the procedure and processing conditions.
[Overall Configuration of Joining Device in Embodiment]
図2に、この実施形態における接合装置30の全体構成を示す。この接合装置30は、上述した構成を有するヒータチップ10と、このヒータチップ10を支持し、被接合物を接合する際にコテ部12を上から被接合物に加圧接触させるヒータヘッド112と、ヒータチップ10に抵抗発熱用の電流を供給するヒータ電源32と、装置内の各部および全体の動作を制御する制御部46とを備えている。 In FIG. 2, the whole structure of the joining apparatus 30 in this embodiment is shown. The joining device 30 includes a heater chip 10 having the above-described configuration, and a heater head 112 that supports the heater chip 10 and presses and contacts the iron part 12 to the workpiece from above when joining the workpiece. The heater power supply 32 that supplies a current for resistance heating to the heater chip 10 and a control unit 46 that controls each part in the apparatus and the overall operation are provided.
ヒータ電源32は、交流波形インバータ式の電源回路を用いている。この電源回路におけるインバータ34は、GTR(ジャイアント・トランジスタ)またはIGBT(絶縁ゲート・バイポーラ・トランジスタ)等からなる4つのトランジスタ・スイッチング素子36,38,40,42を有している。 The heater power supply 32 uses an AC waveform inverter type power supply circuit. The inverter 34 in this power supply circuit has four transistor switching elements 36, 38, 40, 42 made of GTR (giant transistor) or IGBT (insulated gate bipolar transistor).
これら4つのスイッチング素子36〜42のうち、第1組(正極側)のスイッチング素子36,40はドライブ回路44を介して制御部46からの同相の駆動パルスG1,G3 により所定のインバータ周波数(たとえば4kHz)で同時にスイッチング(オン・オフ)制御され、第2組(負極側)のスイッチング素子38,42はドライブ回路44を介して制御部46からの同相の駆動パルスG2,G4 により上記インバータ周波数で同時にスイッチング制御されるようになっている。 Among these four switching elements 36 to 42, the first set (positive electrode side) switching elements 36 and 40 have a predetermined inverter frequency by in-phase drive pulses G 1 and G 3 from the control unit 46 via the drive circuit 44. Switching (on / off) is simultaneously controlled (for example, 4 kHz), and the second set (negative side) switching elements 38 and 42 are driven by in-phase drive pulses G 2 and G 4 from the control unit 46 via the drive circuit 44. Switching control is performed simultaneously with the inverter frequency.
インバータ34の入力端子(L0 ,L1)は三相整流回路48の出力端子に接続されている。三相整流回路48は、たとえば6個のダイオードを三相ブリッジ結線してなり、三相交流電源端子(R,S,T)より入力する商用周波数の三相交流電圧を全波整流して直流電圧に変換する。三相整流回路48より出力された直流電圧は、コンデンサ50で平滑されてからインバータ34の入力端子[L0 ,L1]に与えられる。 The input terminals (L 0 , L 1 ) of the inverter 34 are connected to the output terminal of the three-phase rectifier circuit 48. The three-phase rectifier circuit 48 is formed by connecting, for example, six diodes in a three-phase bridge, and full-wave rectifies the commercial-frequency three-phase AC voltage input from the three-phase AC power supply terminals (R, S, T) to generate a direct current. Convert to voltage. The DC voltage output from the three-phase rectifier circuit 48 is smoothed by the capacitor 50 and then applied to the input terminals [L 0 , L 1 ] of the inverter 34.
インバータ34の出力端子(M0 ,M1)は、溶接トランス52の一次側コイルの両端にそれぞれ接続されている。溶接トランス52の二次側コイルの両端は、整流回路を介さずに二次側導体114L,114Rを介してヒータチップ10の接続端子部14L,14Rにそれぞれ接続されている。 Output terminals (M 0 , M 1 ) of the inverter 34 are respectively connected to both ends of the primary coil of the welding transformer 52. Both ends of the secondary side coil of the welding transformer 52 are connected to the connection terminal portions 14L and 14R of the heater chip 10 via the secondary side conductors 114L and 114R without passing through the rectifier circuit.
制御部46は、マイクロコンピュータを含んでおり、ヒータ電源32内の一切の制御たとえば通電制御(特にインバータ制御)や各種ヒート条件の設定ないし表示処理等を行うほか、ヒータヘッド112に対しても所要の制御を行う。 The control unit 46 includes a microcomputer, and performs all the controls in the heater power source 32, such as energization control (particularly inverter control), various heat condition setting and display processing, etc., and is also required for the heater head 112. Control.
このヒータ電源32では、ヒータチップ10の右側接続端子部14Rに取り付けられている熱電対22より、ヒータチップ10のコテ部12の温度を表す電気信号(コテ温度測定信号)がケーブル25を介して制御部46に与えられる。電流フィードバック制御を行う場合は、一次側回路の導体にたとえばカレント・トランスからなる電流センサ54が取り付けられる。この電流センサ54の出力信号から電流測定回路56において一次電流または二次電流の測定値(たとえば実効値、平均値またはピーク値)が求められ、その電流測定信号が制御部46に与えられる。
[熱圧着加工に関する実施例]
In the heater power source 32, an electric signal (iron temperature measurement signal) indicating the temperature of the iron portion 12 of the heater chip 10 is transmitted via the cable 25 from the thermocouple 22 attached to the right connection terminal portion 14 </ b> R of the heater chip 10. This is given to the control unit 46. When performing current feedback control, a current sensor 54 made of, for example, a current transformer is attached to the conductor of the primary circuit. A measured value (for example, effective value, average value, or peak value) of the primary current or the secondary current is obtained from the output signal of the current sensor 54 in the current measurement circuit 56, and the current measurement signal is given to the control unit 46.
[Examples related to thermocompression bonding]
次に、図3〜図7を参照して、上記構成の接合装置30を用いて導線を端子部材に熱圧着加工で接合する一実施例を説明する。 Next, with reference to FIG. 3 to FIG. 7, an embodiment will be described in which a conducting wire is joined to a terminal member by thermocompression processing using the joining device 30 having the above configuration.
図3に示すように、この実施例は、上述した従来例(図12、図13)と同様に、図示しない電気部品または外部回路からの導線100を回路基板102上の端子部材(たとえば配線導体)104に熱圧着で接合する。導線100は、たとえば、線径が300μm以下の銅線またはアルミ線であり、被覆線または裸線のいずれであってもよい。回路基板102の材質はセラミック(たとえばアルミナ)であり、端子部材104の材質はたとえば銀系または金系の導体である。 As shown in FIG. 3, in this embodiment, similarly to the conventional example (FIGS. 12 and 13) described above, a lead member 100 (for example, a wiring conductor) on an electric component (not shown) or a lead wire 100 from an external circuit is connected. ) Bonded to 104 by thermocompression bonding. The conducting wire 100 is, for example, a copper wire or an aluminum wire having a wire diameter of 300 μm or less, and may be either a covered wire or a bare wire. The material of the circuit board 102 is ceramic (for example, alumina), and the material of the terminal member 104 is, for example, a silver-based or gold-based conductor.
先ず、接合装置30を起動させる前に、作業台または支持治具(図示せず)上で回路基板102の端子部材104の上に所定の向きで導線100の一端部を水平に配置し、ヒータヘッド112(図2)に取り付けられているヒータチップ10の直下に被接合部W(100,104)を位置合わせする。 First, before starting the joining apparatus 30, one end part of the conducting wire 100 is horizontally arranged in a predetermined direction on the terminal member 104 of the circuit board 102 on a work table or a supporting jig (not shown), and the heater The joined portion W (100, 104) is positioned immediately below the heater chip 10 attached to the head 112 (FIG. 2).
接合装置30(図2)を起動させると、最初にヒータヘッド112が作動する。ヒータヘッド112は、ヒータチップ10を降ろして、図4Aに示すようにコテ部12のコテ先面12aを導線100の頂部に当てる。次に、ヒータ電源32(図2)が作動してヒータチップ10の通電を開始するとともに、ヒータヘッド112がヒータチップ10を通じて被接合部W(100,104)に所定の圧力または荷重を加える。そうすると、導線100が被覆線である場合はその絶縁被膜がヒータチップ10からの熱で溶けて剥がれ、導線100の露出した導体がヒータチップ106からの加圧と通常750℃以上の高温の加熱により図4Bに示すように潰れて塑性変形し、導線100と端子部材104とが拡散接合によって結合される。通電開始から所定時間が経過すると、ヒータ電源32が通電を停止し、ヒータチップ10の抵抗発熱を止めて、被接合部W(100,104)を加圧したまま一定時間保持する。そして、保持時間の経過後に、ヒータヘッド112が図4Cに示すようにヒータチップ10を上方へ引き上げる。
[実施形態におけるヒータチップ内の熱伝導の作用]
When the joining device 30 (FIG. 2) is activated, the heater head 112 is first activated. The heater head 112 lowers the heater chip 10 so that the tip surface 12a of the tip portion 12 touches the top of the conductor 100 as shown in FIG. 4A. Next, the heater power source 32 (FIG. 2) is activated to start energization of the heater chip 10, and the heater head 112 applies a predetermined pressure or load to the bonded portion W (100, 104) through the heater chip 10. Then, when the lead wire 100 is a covered wire, the insulating coating is melted and peeled off by the heat from the heater chip 10, and the exposed conductor of the lead wire 100 is pressed by the heater chip 106 and heated at a high temperature of usually 750 ° C. or higher. As shown in FIG. 4B, it is crushed and plastically deformed, and the conducting wire 100 and the terminal member 104 are joined by diffusion bonding. When a predetermined time has elapsed from the start of energization, the heater power supply 32 stops energization, stops the resistance heat generation of the heater chip 10, and holds the bonded portion W (100, 104) for a certain period of time. Then, after the holding time elapses, the heater head 112 pulls the heater chip 10 upward as shown in FIG. 4C.
[Operation of Heat Conduction in Heater Chip in Embodiment]
この実施形態におけるヒータチップ10は、図5を参照して以下に説明するようなコテ部回りの熱伝導の作用により、上記のような熱圧着のための高温の通電発熱動作を多数回行っても、偏在的酸化が起こりにくいうえ、熱電対22を用いるコテ先温度モニタリングの精度および信頼性を安定に維持できるようになっている。 The heater chip 10 in this embodiment performs a high-temperature energization heat generation operation for thermocompression bonding as described above many times by the action of heat conduction around the iron part as described below with reference to FIG. However, uneven oxidation is less likely to occur, and the accuracy and reliability of the tip temperature monitoring using the thermocouple 22 can be stably maintained.
このヒータチップ10は、上記のように、コテ部12の近く(右側コテ周辺部24Rと右側コテ遠隔部24Pとの間)で右側の接続端子部14Rのアーム部20Rに熱電対22を取り付けるとともに、左側コテ周辺部24L,右側コテ周辺部24Rおよび右側コテ遠隔部24Pの電流経路上の断面積SL,SR,SPの間にSR<SL<SPの関係をもたせている。 As described above, the heater chip 10 has a thermocouple 22 attached to the arm portion 20R of the right connection terminal portion 14R near the iron portion 12 (between the right iron peripheral portion 24R and the right iron remote portion 24P). The relationship S R <S L <S P is established among the cross-sectional areas S L , S R , S P on the current path of the left iron peripheral portion 24L, the right iron peripheral portion 24R, and the right iron remote portion 24P. .
図5に示すように、通電時には、左側の接続端子部14L→コテ部12→右側の接続端子部14Rの経路上またはその逆向きの経路上でヒータ電源からの電流Iが流れ、電流Iが流れる各部で電流Iの実効値の自乗に比例してジュール熱が発生する。この場合、ヒータチップ10の各部の材質は同じで電気抵抗率は一定であるから、電流経路上の断面積(電流Iの経路と直交する面積)の小さい箇所ほど、電流が集中して、ジュール熱が多く発生する。 As shown in FIG. 5, during energization, the current I from the heater power source flows on the path of the left connection terminal portion 14L → the iron portion 12 → the right connection terminal portion 14R or the opposite direction, and the current I Joule heat is generated in proportion to the square of the effective value of the current I in each flowing part. In this case, since the material of each part of the heater chip 10 is the same and the electric resistivity is constant, the current is concentrated in the portion where the cross-sectional area on the current path (area perpendicular to the path of the current I) is smaller, A lot of heat is generated.
このヒータチップ10においては、電流経路上で断面積が最も小さい部位は右側コテ周辺部24Rであり、左側コテ周辺部24Lの断面積SLは右側コテ周辺部24Rの断面積SRより幾らか大きく、右側コテ遠隔部24Pの断面積SPは左側コテ周辺部24Lの断面積SLより幾らか大きい。つまり、SR<SL<SPの関係がある。したがって、通電中のヒータチップ10の左側コテ周辺部24L、右側コテ周辺部24Rおよび右側コテ遠隔部24Pにおける発熱量JL,JR,JPの間にはJP<JL<JRの関係が成り立つ。コテ部12は、左右両側のコテ周辺部24L,24Rから下方に突出していて、電流Iの経路上の断面積が両側コテ周辺部24L,24Rよりも一段と大きいため、通電時に発生するジュール熱はそれほど多くはなく、コテ先面12a付近の発熱量をJKとすると、JK<JPである。 In the heater chip 10, the smallest portion sectional area on the current path is a right iron periphery 24R, the cross-sectional area S L of the left trowel periphery 24L is somewhat than the cross-sectional area S R of the right iron periphery 24R Large, the cross-sectional area S P of the right iron remote portion 24P is somewhat larger than the cross-sectional area S L of the left iron peripheral portion 24L. That is, there is a relationship of S R <S L <S P. Therefore, the left trowel periphery 24L of the heater chip 10 during conduction, the heating value J L on the right iron periphery 24R and the right iron remote unit 24P, J R, between the J P J P <of J L <J R A relationship is established. The iron part 12 protrudes downward from the iron peripheral parts 24L and 24R on the left and right sides, and the cross-sectional area on the path of the current I is much larger than the both iron peripheral parts 24L and 24R. not so much, the amount of heat generated near the tip surface 12a when the J K, is a J K <J P.
このため、通電中は、コテ部12内で、左側コテ周辺部24Lで発生したジュール熱の一部(大部分)がコテ部12の中間部およびコテ先面12aを通って被溶接部Wへ移動する右向きの熱伝導H1Lと、右側コテ周辺部24Rで発生したジュール熱の一部がコテ部12の中間部およびコテ先面12aを通って被溶接部Wへ移動する左向きの熱伝導H1Rとが並存する。 For this reason, during energization, a part (most part) of the Joule heat generated in the left iron peripheral part 24L in the iron part 12 passes through the intermediate part of the iron part 12 and the iron tip surface 12a to the welded part W. The rightward heat conduction H 1L that moves and the leftward heat conduction H in which a part of the Joule heat generated in the right iron peripheral portion 24R moves to the welded portion W through the intermediate portion of the iron portion 12 and the iron tip surface 12a. 1R coexists.
一方で、右側接続端子部14Rのアーム部20R内では、右側コテ周辺部24Rと右側コテ遠隔部24Pとの間に熱電対22が取り付けられているので、通電中は、右側コテ周辺部24Rで発生したジュール熱の他の一部が熱電対22へ移動する右向きの熱伝導H2Lと、右側コテ遠隔部24Pで発生したジュール熱の一部が熱電対22へ移動する左向きの熱伝導H2Rとが並存する。 On the other hand, in the arm portion 20R of the right connection terminal portion 14R, the thermocouple 22 is attached between the right iron peripheral portion 24R and the right iron remote portion 24P. The rightward heat conduction H 2L in which another part of the generated Joule heat moves to the thermocouple 22 and the leftward heat conduction H 2R in which a part of the Joule heat generated in the right iron remote portion 24P moves to the thermocouple 22 And coexist.
ここで、発熱量の最も多い右側コテ周辺部24Rから、コテ部12側への左向きの熱伝導H1Rと、熱電対22側への右向きの熱伝導H2Lとが左右二手に分かれて並存することが重要である。このように発熱量の最も多い右側コテ周辺部24Rから熱が左右二手に分かれて伝導する条件と上記のJP<JL<JRの条件とが相俟って、コテ部12内では左側コテ周辺部24Lからの右向きの熱伝導H1Lに対して右側コテ周辺部24Rからの反対向き(左向き)の熱伝導H1Rが無理に優越するのではなくて互いに均衡し、右側コテ周辺部24Rで余った熱が熱電対22へ流れることになる。 Here, left-handed heat conduction H 1R toward the iron part 12 side and right-handed heat conduction H 2L toward the thermocouple 22 side from the right-hand iron peripheral part 24R with the largest amount of heat generation coexist in two left and right hands. This is very important. As described above, the condition that the heat is divided into the left and right hands from the right iron peripheral portion 24R that generates the largest amount of heat and the above-described condition of J P <J L <J R is combined. The heat conduction H 1R in the opposite direction (leftward) from the right iron peripheral portion 24R is balanced with each other rather than forcibly superior to the heat conduction H 1L in the right direction from the iron peripheral portion 24L. Therefore, excess heat flows to the thermocouple 22.
こうして、ヒータチップ10において通電時に他の部位よりも高温に発熱する左右両側のコテ周辺部24L,24Rが両者の電流経路上の断面積が違っていても自律的に発熱温度をバランスさせるので、両コテ周辺部24L,24Rのいずれか片方で生じる偏在的酸化が起こり難い。また、コテ部12内で左右両方向の熱伝導が均衡状態で安定することで、右側コテ周辺部24Rから熱電対22への熱伝導も安定し、熱電対22の検出する温度とコテ部12の温度(特にコテ先面12a付近の温度)との間の対応関係が一定に保たれる。これによって、熱電対22を用いるコテ先温度モニタリングの精度および信頼性が安定に維持される。
[他の実施形態又は変形例]
In this way, both the left and right iron peripheral portions 24L and 24R that generate heat at a higher temperature than other parts when energized in the heater chip 10 autonomously balances the heat generation temperature even if the cross-sectional areas on the current paths of both are different. The ubiquitous oxidation that occurs in either one of the iron peripheral portions 24L and 24R hardly occurs. In addition, by stabilizing the heat conduction in the left and right directions in the iron part 12 in a balanced state, the heat conduction from the right iron peripheral part 24R to the thermocouple 22 is also stabilized, and the temperature detected by the thermocouple 22 and the iron part 12 Correspondence between temperature (particularly the temperature near the tip 12a) is kept constant. As a result, the accuracy and reliability of the tip temperature monitoring using the thermocouple 22 is stably maintained.
[Other Embodiments or Modifications]
図6および図7に、上記実施形態のヒータチップ10におけるコテ部12回りの構成に関する変形例を示す。 6 and 7 show a modified example of the configuration around the iron part 12 in the heater chip 10 of the above embodiment.
図6に示す第1の変形例は、ヒータチップ10において、略直方体形状のコテ部12の一側面(図の正面)12cにコテ先面12aに通じるくぼみまたはコテ先凹部30を設けている。より詳細には、コテ先凹部30は、コテ部12の側面12cの中心部にて下に向かって逆テーパ状に横に広がりながら、かつ内奥に深度を拡大しながらコテ部12を上端から底(コテ先面12a)まで湾曲に削ぎ落したような構造を有している。このくぼみ構造においては、コテ先凹部30の天井には側面12cから内奥に向かって次第に低くなり、入口から内奥の終端まで底が切り欠かれている。 In the first modification shown in FIG. 6, the heater chip 10 is provided with a recess or a tip recess 30 leading to the tip end surface 12a on one side surface (front side in the figure) 12c of the tip portion 12 having a substantially rectangular parallelepiped shape. More specifically, the iron tip recessed portion 30 extends from the upper end while expanding the depth inward while expanding laterally in an inversely tapered manner toward the bottom at the center of the side surface 12c of the iron portion 12. It has a structure that is scraped down to the bottom (the tip surface 12a). In this hollow structure, the ceiling of the iron tip recess 30 is gradually lowered from the side surface 12c toward the inner depth, and the bottom is notched from the entrance to the inner depth.
この第1変形例のヒータチップ10を用いて上記のような熱圧着加工を行う場合は、図8に示すように、コテ先面12aが導線100の先端部に加圧接触しても、軸方向で導線100と対向するコテ先凹部30は導線100に接触しないで覆い被さる。この変形例では、コテ部12がコテ先凹部30によってコテ先面12a付近でテーパ状に括れているので、導線100に与える加圧および加熱の集中が増して、熱圧着の接合強度が向上する。 When performing the thermocompression bonding as described above using the heater chip 10 of the first modified example, as shown in FIG. 8, even if the tip surface 12a is in pressure contact with the tip of the conductor 100, the shaft The tip recess 30 facing the conductive wire 100 in the direction is covered without contacting the conductive wire 100. In this modification, since the iron part 12 is constricted in the vicinity of the iron tip surface 12a by the iron tip recess 30, the concentration of pressurization and heating applied to the conductive wire 100 is increased, and the bonding strength of thermocompression bonding is improved. .
この第1変形例のヒータチップ10は、図9A〜図9Cに示すように、リフローのハンダ付けにも好適に使用することができる。リフローのハンダ付けにおいては、図9Aに示すように、端子部材104の表面には予めクリームハンダ32が塗られていて、クリームハンダ32の上に載置された導線100に対してその上方からヒータチップ10が加圧接触する。なお、導線100は、被覆線または裸線のいずれであってもよいが、銅メッキアルミ線または銅クラッドアルミ線が特に好適である。また、回路基板102は樹脂であってもよく、端子部材104は銅系の導体であってもよい。 As shown in FIGS. 9A to 9C, the heater chip 10 of the first modification can be suitably used for reflow soldering. In reflow soldering, as shown in FIG. 9A, the surface of the terminal member 104 is preliminarily coated with cream solder 32, and the lead wire 100 placed on the cream solder 32 is heated from above. The chip 10 comes into pressure contact. The conducting wire 100 may be either a covered wire or a bare wire, but a copper plated aluminum wire or a copper clad aluminum wire is particularly suitable. Further, the circuit board 102 may be a resin, and the terminal member 104 may be a copper-based conductor.
この場合、コテ部12がコテ先面12aにて導線100の先端部100aを端子部材104に押し付けると、コテ先凹部30の直下では導線100が端子部材104の表面に密着しない状態になり、あるいは両者(100,104)の間に隙間が形成される状態となる。そして、通電が開始されると、ヒータチップ10の各部が抵抗発熱し、コテ部12(特にコテ先面12a)より加圧と加熱を受ける導線100の先端部分100aで表面の絶縁被膜(たとえばウレタン)が剥がれて、図9Bに示すように導線100の先端部分100aが扁平に潰れて端子部材104の表面に熱圧着で結合し、熱圧着部34が形成される。そうすると、導線100の先端部100aおよび熱圧着部34を介して端子部材104にコテ部12の熱が伝わり、さらには導線100のコテ先凹部30内に延在する部分100b(以下、「先端近接部」と称する。)にもコテ部12の熱が伝わり、この導線100の先端近接部100bでも絶縁被覆が溶けて剥がれる。 In this case, when the iron part 12 presses the tip part 100a of the conducting wire 100 against the terminal member 104 with the iron tip surface 12a, the conducting wire 100 is not in close contact with the surface of the terminal member 104 directly under the iron tip recessed part 30, or A gap is formed between the two (100, 104). When energization is started, each part of the heater chip 10 generates resistance heat, and an insulating coating (for example, urethane) is formed on the front end portion 100a of the conducting wire 100 that is pressurized and heated by the iron portion 12 (particularly the iron tip surface 12a). 9) is peeled off, and as shown in FIG. 9B, the leading end portion 100a of the conducting wire 100 is flattened and joined to the surface of the terminal member 104 by thermocompression bonding, whereby the thermocompression bonding portion 34 is formed. Then, the heat of the iron part 12 is transmitted to the terminal member 104 via the tip part 100a and the thermocompression bonding part 34 of the conductive wire 100, and further, a portion 100b (hereinafter referred to as “proximal tip end”) extending into the solder tip recess 30 of the conductive wire 100. Also, the heat of the iron part 12 is transmitted to the tip part 12), and the insulating coating melts and peels even at the tip vicinity part 100b of the conductive wire 100.
こうしてコテ先凹部30内では、導線100の先端近接部100bの絶縁被覆が剥がれると、内側の銅メッキ層(または銅クラッド層)がピュアな状態で露出し、フラックスが使われていなくても、この露出した銅メッキ層を溶融状態のハンダ<32>がぬれによって包み込む。この場合、コテ部12と端子部材104との間のスペース(隙間)においては、端子部材104上の溶けたハンダ<32>の多くがぬれと表面張力によってコテ先凹部30の中に寄せ集まってきて、導線100の先端近接部100bの銅メッキ層(または銅クラッド層)を覆った状態になる。 Thus, when the insulation coating of the tip proximity portion 100b of the conductive wire 100 is peeled off in the iron tip recess 30, the inner copper plating layer (or copper clad layer) is exposed in a pure state, and even if the flux is not used, The exposed copper plating layer wraps the molten solder <32> by wetting. In this case, in the space (gap) between the iron part 12 and the terminal member 104, most of the melted solder <32> on the terminal member 104 gathers in the iron tip recess 30 due to wetting and surface tension. Thus, the copper plated layer (or copper clad layer) of the tip proximity portion 100b of the conductive wire 100 is covered.
そして、通電開始から所定時間が経過して、接合装置30がコテ部12をハンダ凝固点よりも低い温度(ベース温度または常温)に冷やすと、端子104上で全ての溶融ハンダ<32>がそれぞれの位置で固化する。すなわち、図9Cに示すようにコテ先凹部30内の溶融ハンダ部<32M>は導線100の先端近接部100bの銅メッキ層(または銅クラッド層)を覆う固体ハンダ部[32M]に変わり、コテ先面12aの下に残っている溶融ハンダ部<32K>は熱圧着部34の周囲に広がる低層の固体ハンダ部[32K]に変わる。 When a predetermined time elapses from the start of energization and the joining device 30 cools the iron part 12 to a temperature (base temperature or room temperature) lower than the solder freezing point, all the molten solders <32> are connected to the terminals 104, respectively. Solidify in position. That is, as shown in FIG. 9C, the molten solder portion <32M> in the solder tip recess 30 is changed to a solid solder portion [32M] that covers the copper plating layer (or copper clad layer) of the tip proximity portion 100b of the conductive wire 100. The molten solder portion <32K> remaining under the front surface 12a is changed to a low-layer solid solder portion [32K] extending around the thermocompression bonding portion 34.
図7に示す第2の変形例は、ヒータチップ10においてコテ部12のコテ先面12aに、各々がチップ幅方向に縦断して延びる複数(図示の例は2つ)の溝部36A,36Bをチップ厚み方向に並べて設けている。この第2変形例のヒータチップ10をリフローのハンダ付けに用いる場合も、端子部材104の表面には予めクリームハンダを塗布しておく。たとえば、図10Aに示すように、溝部36A,36Bと対向する位置に予め枕木形のクリームハンダ32A,32Bを塗布してもよい。 In the second modified example shown in FIG. 7, a plurality of (two in the illustrated example) groove portions 36 </ b> A and 36 </ b> B each extending vertically in the chip width direction are formed on the tip surface 12 a of the iron portion 12 in the heater chip 10. They are arranged side by side in the chip thickness direction. Even when the heater chip 10 of the second modification is used for reflow soldering, cream solder is applied to the surface of the terminal member 104 in advance. For example, as shown in FIG. 10A, sleeper-shaped cream solders 32A and 32B may be applied in advance to positions facing the grooves 36A and 36B.
この場合も、上記第1変形例と同様の作用が奏されるが、図10B,図10Cに示すように、溝部32A,32B内に溶融ハンダ<32A>,<32B>ひいては固体ハンダ部[32A],[32B]が作られ、中間に熱圧着部34が形成される。 In this case as well, the same effect as in the first modified example can be obtained. However, as shown in FIGS. 10B and 10C, the melted solder <32A> and <32B> and thus the solid solder portion [32A] are provided in the grooves 32A and 32B. ] And [32B] are formed, and the thermocompression bonding part 34 is formed in the middle.
図11に、上記実施形態のヒータチップ10において、片側(図示の例は右側)の接続端子部14Rのアーム部20Rに、熱電対(22)の代わりに放熱体40を取り付ける構成例を示す。この放熱体40は、ヒータチップ10と同じ材質で一体に形成されてよく、大気中への放熱性を高めるために好ましくは図示のようなフィン状(あるいはブロック状)に形成されてよく、表面に金メッキを施してもよい。ヒータチップ10が通電すると、右側コテ周辺部24Rおよび右側コテ遠隔部24Pでそれぞれ発生したジュール熱の一部が放熱体40を介して大気中に放出される。つまり、同じ位置に熱電対(22)を取り付けた場合と同様の熱放出効果が奏される。 In the heater chip 10 of the said embodiment, the structural example which attaches the thermal radiation body 40 instead of the thermocouple (22) to the arm part 20R of the connection terminal part 14R of the one side (illustration example right side) is shown in FIG. The heat radiating body 40 may be integrally formed of the same material as the heater chip 10, and may be preferably formed in a fin shape (or block shape) as shown in the drawing in order to improve heat dissipation to the atmosphere. May be plated with gold. When the heater chip 10 is energized, part of the Joule heat generated in the right iron peripheral portion 24R and the right iron remote portion 24P is released into the atmosphere via the radiator 40. That is, the same heat release effect as the case where the thermocouple (22) is attached to the same position is exhibited.
10 ヒータチップ
12 コテ部
12a コテ先面
12b (コテ部)背面
12c (コテ部)側面
14L,14R 接続端子部
20L,20R アーム部
22 熱電対
24L 左側コテ周辺部
24R 右側コテ周辺部
24P 右側コテ遠隔部
30 接合装置
32 ヒータ電源
40 放熱体
100 導線
102 回路基板
104 端子部材
DESCRIPTION OF SYMBOLS 10 Heater chip 12 Iron part 12a Iron tip surface 12b (Iron part) Back surface 12c (Iron part) Side surface 14L, 14R Connection terminal part 20L, 20R Arm part 22 Thermocouple 24L Left iron peripheral part 24R Right iron peripheral part 24P Right iron remote Part 30 Bonding device 32 Heater power supply 40 Heat dissipator 100 Conductor 102 Circuit board
104 Terminal material
Claims (7)
前記端子部材上に配置された前記導線の一端部に当接ないし接触する抵抗発熱体からなるコテ部と、
ヒータ電源からの給電用導体との物理的かつ電気的な接続をとるために、前記コテ部と同一の抵抗発熱体からなり、前記コテ部と一体的にその左右両端から対称または非対称に延びる第1および第2の接続端子部と、
前記コテ部の近くで前記第1の接続端子部に取り付けられる熱電対と
を有し、
通電時に前記コテ部および前記第1および第2の接続端子部でそれぞれ発生する抵抗発熱に関して、前記コテ部と前記第1の接続端子部との境界付近に位置する第1の部位の発熱量をJ1,前記コテ部と前記第2の接続端子部との境界付近に位置する第2の部位の発熱量をJ2、前記第1の接続端子部上で前記熱電対から見て前記第1の部位と反対側に位置する第3の部位の発熱量をJ3とすると、J3<J2<J1の関係があることを特徴とするヒータチップ。 A heater chip for joining a lead wire to a terminal member,
A trowel portion made of a resistance heating element that comes into contact with or contacts one end of the conducting wire disposed on the terminal member;
In order to make a physical and electrical connection with a power supply conductor from a heater power supply, the resistance heating element is the same as the iron part, and extends symmetrically or asymmetrically from the left and right ends integrally with the iron part. First and second connection terminal portions;
A thermocouple attached to the first connection terminal part near the iron part,
Regarding the resistance heat generated in the iron part and the first and second connection terminal parts when energized, the amount of heat generated in the first part located near the boundary between the iron part and the first connection terminal part is calculated. J1, the amount of heat generated in the second part located in the vicinity of the boundary between the iron part and the second connection terminal part is J2, and the first part when viewed from the thermocouple on the first connection terminal part A heater chip characterized in that there is a relationship of J3 <J2 <J1, where J3 is the amount of heat generated in the third part located on the opposite side of J3.
前記端子部材上に配置された前記導線の一端部に当接ないし接触する抵抗発熱体からなるコテ部と、
ヒータ電源からの給電用導体との物理的かつ電気的な接続をとるために、前記コテ部と同一の抵抗発熱体からなり、前記コテ部と一体的にその左右両端から対称または非対称に延びる第1および第2の接続端子部と、
前記コテ部の近くで前記第1の接続端子部に取り付けられる突出した放熱体と
を有し、
通電時に前記コテ部および前記第1および第2の接続端子部でそれぞれ発生する抵抗発熱に関して、前記コテ部と前記第1の接続端子部との境界付近に位置する第1の部位の発熱量をJ1,前記コテ部と前記第2の接続端子部との境界付近に位置する第2の部位の発熱量をJ2、前記第1の接続端子部上で前記放熱体から見て前記第1の部位と反対側に位置する第3の部位の発熱量をJ3とすると、J3<J2<J1の関係があることを特徴とするヒータチップ。 A heater chip for joining a lead wire to a terminal member,
A trowel portion made of a resistance heating element that comes into contact with or contacts one end of the conducting wire disposed on the terminal member;
In order to make a physical and electrical connection with a power supply conductor from a heater power supply, the resistance heating element is the same as the iron part, and extends symmetrically or asymmetrically from the left and right ends integrally with the iron part. First and second connection terminal portions;
A projecting heat dissipating body attached to the first connection terminal portion near the iron portion;
Regarding the resistance heat generated in the iron part and the first and second connection terminal parts when energized, the amount of heat generated in the first part located near the boundary between the iron part and the first connection terminal part is calculated. J1, the amount of heat generated in the second part located near the boundary between the iron part and the second connection terminal part is J2, and the first part when viewed from the radiator on the first connection terminal part A heater chip characterized in that there is a relationship of J3 <J2 <J1, where J3 is the amount of heat generated in the third part located on the opposite side of J3.
前記ヒータチップを支持し、導線を端子部材に接合する際に、前記コテ部のコテ先面を前記端子部材上の前記導線に加圧接触させるヒータヘッドと、
前記ヒータチップに抵抗発熱用の電流を供給するヒータ電源と
を有する接合装置。 The heater chip according to any one of claims 1 to 4,
A heater head that supports the heater chip and pressurizes and contacts the iron tip surface of the iron part to the conductor on the terminal member when joining the conductor to the terminal member;
And a heater power supply for supplying a current for resistance heating to the heater chip.
前記端子部材上に前記導線を載せる第1の工程と、
前記ヒータヘッドを制御して前記ヒータチップのコテ部を前記端子部材上の前記導線に当て所定の加圧力を加える第2の工程と、
前記ヒータ電源を制御して前記ヒータチップを通電し、前記コテ部からの加熱と加圧により前記導線を前記端子部材に密着させて拡散接合を促す第3の工程と、
前記ヒータ電源を制御して前記ヒータチップの通電を所定のタイミングで停止し、所定時間後に前記ヒータヘッドを制御して前記コテ部を前記導体細線から引き離す第4の工程と
を有する接合方法。 A joining method for joining to a terminal member using the joining device according to claim 5,
A first step of placing the conducting wire on the terminal member;
A second step of controlling the heater head to apply a predetermined pressing force by applying a soldering portion of the heater chip to the conductive wire on the terminal member;
A third step of energizing the heater chip by controlling the heater power supply, and promoting diffusion bonding by bringing the conductor into close contact with the terminal member by heating and pressing from the iron part;
And a fourth step of controlling the heater power supply to stop energization of the heater chip at a predetermined timing, and controlling the heater head after a predetermined time to separate the iron part from the thin conductor wire.
前記端子部材上にハンダを介して前記導体細線を載せる第1の工程と、
前記ヒータヘッドを制御して前記ヒータチップのコテ部を前記端子部材上の前記導体細線に当て所定の加圧力を加える第2の工程と、
前記ヒータチップを制御して前記ヒータチップを通電し、前記コテ部からの加熱により前記ハンダを溶かす第3の工程と、
前記ヒータ電源を制御して前記ヒータチップの通電を所定のタイミングで停止し、所定時間後に前記ヒータヘッドを制御して前記コテ部を前記導体細線から引き離す第4の工程と
を有する接合方法。 A joining method for joining to a terminal member using the joining device according to claim 5,
A first step of placing the conductor fine wire on the terminal member via solder;
A second step of controlling the heater head to apply a predetermined pressing force by applying the iron portion of the heater chip to the conductor thin wire on the terminal member;
A third step of controlling the heater chip to energize the heater chip and melting the solder by heating from the iron part;
And a fourth step of controlling the heater power supply to stop energization of the heater chip at a predetermined timing, and controlling the heater head after a predetermined time to separate the iron part from the thin conductor wire.
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| CN115379917A (en) * | 2020-09-09 | 2022-11-22 | 株式会社阿波罗技研 | Heating nozzle unit |
| CN115443202A (en) * | 2020-09-09 | 2022-12-06 | 株式会社阿波罗技研 | Heating nozzle and heating nozzle unit |
| CN115461180A (en) * | 2020-09-09 | 2022-12-09 | 株式会社阿波罗技研 | Heating nozzle unit |
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