JP2016514050A - Synthetic jet with non-metallic blade structure - Google Patents

Abstract

Disclosed are systems and methods for lowering the resonant frequency of synthetic jet devices for lower noise and lowering vibration. The synthetic jet device is coupled and disposed between a first plate, a second plate spaced from the first plate, and a first plate and a second plate to form a chamber. A spacing component including an orifice therein and an actuator element coupled to at least one of the first plate or the second plate for selectively deflecting at least one of the first plate or the second plate. The first plate and the second plate are at least partially formed from a non-metallic material. [Selection] Figure 5

Description

  The present invention relates to a synthetic jet having a non-metallic blade structure.

  Synthetic jet actuators are a widely used technique for generating a synthetic jet of fluid to affect the flow of fluid to the surface to diffuse heat from the surface. A typical synthetic jet actuator includes a housing that defines an internal chamber. There is an orifice in the wall of the housing. Actuators provide a mechanism for periodically changing the volume in the internal chamber so that a series of fluid vortices are generated and fired out of the orifice of the housing toward the external environment. In addition. Examples of volume changing mechanisms may include, for example, a flexible diaphragm as a piston or housing wall disposed within the jet housing to move fluid into and out of the orifice during reciprocation of the piston. The flexible diaphragm is typically driven by a piezoelectric actuator or other suitable means.

  Typically, a control system is used to generate the time-harmonic motion of the volume change mechanism. When this mechanism reduces the chamber volume, fluid is ejected from the chamber through the orifice. As the fluid passes through the orifice, the sharp edge of the orifice separates the flow to create a vortex layer that vortexes and vortexes. These vortices leave the orifice edge under their own self-induced speed. As the mechanism increases the chamber volume, ambient fluid is drawn into the chamber from a location that is far away from the orifice. Since the vortices have already moved far from the edge of the orifice, they are not affected by the surrounding fluid entering the chamber. As the vortex leaves the orifice, it synthesizes a jet of fluid, or “synthetic jet”.

  It has been recognized that acoustic noise is one bad aspect of the operation of a synthetic jet including a dual cooling jet (DCJ) that uses actuators (ie, piezoelectric actuators) on each side of the device. DCJs typically use their mechanical resonance mode or its to optimize electrical energy to mechanical energy conversion and to achieve maximum deflection with minimal mechanical energy input. Excited in the vicinity. While the operation of the DCJ is optimized when operated at or near their mechanical resonance mode, operating the DCJ at a particular frequency can cause the device's acoustic properties to be partially driven by the device. It is recognized that a significant amount of acoustic noise can be generated because it is determined by frequency.

  Many variations of synthetic jets, including DCJs, are typically constructed using a metallized piezoelectric actuator that is adhered to a metal plate or blade by a conductive adhesive. Electrical connection with the piezoelectric actuator is achieved by connection to the metallized exposed piezo side and to the plate material. Typically, solder or conductive adhesive is used. These two plates are then bonded together along the outer periphery, leaving the orifice opening forming the jet. By driving the piezoelectric actuator, air is sucked in and out through the orifice, thereby generating a net positive air flow.

  One drawback of metal plates or blades is that they are expensive and their rigidity generates higher resonant frequencies that increase the operating noise of the DCJ. In addition, the mass of the metal can increase vibration. Still further, the resonant frequency of the DCJ can be increased due to the metal plate.

  Therefore, it would be desirable to provide a synthetic jet (such as a DCJ) having a plate made to have a very low resonant frequency for smaller noise. It is also desirable for the plate to have a reduced mass that can achieve lower vibrations.

US Patent Application Publication No. 20130020403

  According to one aspect of the present invention, a synthetic jet device includes a first plate, a second plate spaced from the first plate, a first plate and a second plate so as to form a chamber. A spacing component coupled and disposed between the spacing component including an orifice therein and at least one for selectively deflecting at least one of the first plate or the second plate The first plate and the second plate are at least partially formed from a non-metallic material.

  In accordance with another aspect of the present invention, a method of making a synthetic jet device includes the steps of constructing a first plate and a second plate at least partially from a non-metallic material, and a first plate and a second plate. Attaching an actuator element to at least one of the plates to selectively deflect at least one of the plates, and positioning the first plate relative to the second plate via the spacing component, the spacing configuration The element includes securing the first plate to the second plate in a spaced arrangement to form a chamber and including an orifice therein. The invention further includes attaching an electrical connection to the actuator element and each of the first and second plates to which the actuator element is attached to allow selective application of voltage to the actuator element. .

  According to yet another aspect of the present invention, a synthetic jet device includes a first plate, a second plate spaced from the first plate to form a chamber, and a purpose of changing the volume of the chamber. An actuator element coupled to at least one of the first plate or the second plate for selectively deflecting at least one of the first plate and the second plate. Each of the first plate and the second plate is a first material including an electrically insulating non-metallic material and a second material including a conductive material, and includes a filler material, a metallized layer, and a second material. And a second material formed as one of the leads formed internally or externally on one material or in the first material.

  These and other advantages and features will be more readily understood from the following detailed description of preferred embodiments of the invention provided in connection with the accompanying drawings.

  The drawings illustrate embodiments presently contemplated for carrying out the invention.

1 is a view of a synthetic jet assembly that can be used with embodiments of the present invention. FIG. FIG. 5 is another view of a synthetic jet assembly that can be used in embodiments of the present invention. FIG. 3 is a cross-sectional view of the synthetic jet of FIGS. 1 and 2 depicting the jet leaving the orifice as the control system moves the diaphragm inward. FIG. 3 is a cross-sectional view of the synthetic jet of FIGS. 1 and 2 depicting the jet toward the orifice as the control system moves the diaphragm outward. 1 shows a manufacturing process for producing a synthetic jet according to an embodiment of the present invention, which includes a non-metallic plate therein. 1 shows a manufacturing process for producing a synthetic jet according to an embodiment of the present invention, which includes a non-metallic plate therein. 4 illustrates a manufacturing process for producing a non-metallic plate of a synthetic jet according to an embodiment of the present invention. 4 illustrates a manufacturing process for producing a non-metallic plate of a synthetic jet according to an embodiment of the present invention. FIG. 6 illustrates a manufacturing process for producing a doubly folded non-metallic plate structure of a synthetic jet according to an embodiment of the present invention. FIG. FIG. 6 illustrates a manufacturing process for producing a doubly folded non-metallic plate structure of a synthetic jet according to an embodiment of the present invention. FIG. 4 illustrates a manufacturing process for producing a non-metallic plate of a synthetic jet according to an embodiment of the present invention.

  Embodiments of the present invention relate to a synthetic jet device having a non-metallic plate that achieves a lower resonant frequency and lower vibration for smaller noise.

  1-4 illustrate the general structure of a synthetic jet assembly 10 that can be used in embodiments of the present invention for purposes of better understanding of the present invention, along with the operation of various components during its operation. ing. Although a particular synthetic jet assembly 10 is shown in FIGS. 1-4, embodiments of the present invention can be incorporated into various configurations of synthetic jet assemblies, and thus the synthetic jet assembly 10 can be It should be appreciated that it is not intended to limit the scope of the invention. By way of example, a synthetic jet assembly that does not include a mounting bracket for fixed placement of the synthetic jet is considered to be within the scope of the present invention.

  Referring initially to FIG. 1, a synthetic jet assembly 10 is shown that includes a synthetic jet 12 (whose cross-section is shown in FIG. 2) and a mounting bracket 14. In one embodiment, the mounting bracket 14 is a U-shaped mounting bracket that is secured to the body or housing 16 of the synthetic jet 12 at one or more positions. However, it should be appreciated that the mounting bracket may be configured as a bracket having a different shape / outline (such as a semi-circular bracket configured to receive a circular synthetic jet 12 therein). The circuit driver 18 may be disposed externally or may be fixed to the mounting bracket 14. Alternatively, the circuit driver 18 may be located far from the synthetic jet assembly 10.

  Referring now to FIGS. 1 and 2 together, as shown, the housing 16 of the synthetic jet 12 defines an internal chamber or cavity 20 having a gas or fluid 22 therein, It partially surrounds it. The housing 16 and inner chamber 20 may actually take any geometric configuration in accordance with various embodiments of the invention, but for purposes of explanation and understanding, the first plate 24 and the second plate A housing 16 including a plurality of plates 26 (also referred to as blades or wings), which are held in spaced relationship by spacer elements 28 disposed therebetween, is shown in the cross-sectional view of FIG. Yes. In one embodiment, the spacer element 28 maintains a spacing of about 1 mm between the first plate 24 and the second plate 26. One or more orifices 30 are formed between the sidewalls of the first plate 24, the second plate 26, and the spacer element 28 to fluidly communicate the internal chamber 20 to the surrounding external environment 32. In an alternative embodiment, the spacer element 28 includes a front surface (not shown) in which one or more orifices 30 are formed.

  Depending on various embodiments, the first plate 24 and the second plate 26 may be formed from metal, plastic, glass, and / or ceramic. Similarly, the spacer element 28 may be formed from metal, plastic, glass, and / or ceramic. Suitable metals include materials such as nickel, aluminum, copper, and molybdenum or alloys such as stainless steel, brass, and bronze. Suitable polymers and plastics include thermoplastics (polyolefins, polycarbonates, etc.), thermosets, resins, urethanes, acrylics, silicones, polyimides, and photoresist-capable materials, as well as other elastic plastics. . Suitable ceramics include, for example, titanates (such as lanthanum titanate, bismuth titanate, and lead zirconate titanate) and molybdates. In addition, various other components of the synthetic jet 12 may be formed from metal as well.

  According to an exemplary embodiment, the actuators 34, 36 include first and second plates 24 and 2 to form a first composite structure and a second composite structure, ie, flexible diaphragms 38, 40. Coupled to each of the plates 26, the flexible diaphragms 38, 40 are controlled by the controller assembly or control unit system 42 via the driver 18. Thus, the synthetic jet 12 is configured as a DCJ. In order to control the diaphragms 38, 40, each of the flexible diaphragms 38, 40 has a metal layer so that the diaphragms 38, 40 can be moved by an electrical bias applied between the electrode and the metal layer. The metal electrode may be disposed adjacent to the metal layer. As shown in FIG. 1, in one embodiment, the controller assembly 42 is electronically coupled to the driver 18, which is directly coupled to the mounting bracket 14 of the synthetic jet 12. In an alternative embodiment, the control unit system 42 is incorporated into the driver 18 that is located remote from the synthetic jet 12. Further, the control system 42 may be configured to generate the electrical bias by any suitable device (eg, a computer, logic processor, signal generator, etc.).

  In one embodiment, the actuators 34, 36 are piezoelectric drive devices (piezomotive) devices that are driven by the application of harmonic alternating voltages that rapidly expand and contract the piezoelectric drive device. obtain. In operation, the control system 42 sends charge through the driver 18 to the piezoelectric actuators 34, 36 that are subjected to mechanical stress and / or deformation in response to the charge. The stress / deformation of the piezoelectric drive actuators 34, 36 causes the first plate 24 and the second plate 26 to achieve a time-harmonic or periodic motion that changes the volume of the internal chamber 20 between the plates 24, 26. Bend each one. According to one embodiment, the spacer element 28 may be similarly flexible and deformed to change the volume of the internal chamber 20. The resulting volume change in the inner chamber 20 results in the exchange of gas or other fluid between the inner chamber 20 and the outer volume 32 as described in detail with respect to FIGS.

  The piezoelectric drive actuators 34, 36 may be monomorph devices or bimorph devices, depending on various embodiments of the present invention. In a monomorph embodiment, the piezoelectric drive actuators 34, 36 may be coupled to plates 24, 26 formed from materials including metal, plastic, glass, or ceramic. In a bimorph embodiment, one or both piezoelectric drive actuators 34, 36 may be bimorph actuators coupled to plates 24, 26 formed from piezoelectric material. In an alternative embodiment, the bimorph may include a single actuator 34, 36 and the plates 24, 26 may be second actuators.

  The components of the synthetic jet 12 may be adhered to each other or otherwise attached to each other using adhesives, solder, and the like. In one embodiment, a thermoset adhesive or conductive adhesive causes the actuators 34, 36 to be connected to the first plate 24 and the second plate for the purpose of forming the first composite structure 38 and the second composite structure 40. 26 to be used for bonding to 26. In the case of a conductive adhesive, a conductive filler such as silver and gold may be mixed with the adhesive in order to attach a lead wire (not shown) to the synthetic jet 12. Suitable adhesives may have a hardness within the range of Shore A hardness of 100 or less, and examples include silicone, polyurethane, and thermoplastic rubber so that an operating temperature of 120 degrees or higher can be achieved. May be included.

  In the embodiment of the present invention, the actuators 34 and 36 may include devices (such as a hydraulic component, a pneumatic component, a magnetic component, and an ultrasonic component) other than the piezoelectric drive device. Accordingly, in such an embodiment, the control system 42 is configured to actuate each of the actuators 34, 36 in a corresponding manner. For example, if an electrostatic material is used, the control system 42 may apply an electrostatic voltage to the actuators 34, 36 that rapidly alternates to actuate and curve each of the first plate 24 and the second plate 26. It may be configured to supply.

  The operation of the synthetic jet 12 will be described with reference to FIGS. Referring initially to FIG. 3, the actuators 34, 36 are controlled to move the first plate 24 and the second plate 26 outward relative to the inner chamber 20 as depicted by arrows 44. A synthetic jet 12 is shown. As the first plate 24 and the second plate 26 curve outward, the internal volume of the internal chamber 20 increases and the surrounding fluid or gas 46 is depicted as depicted by a set of arrows 48 in the internal chamber 20. Flow into. The actuators 34, 36 are such that when the first plate 24 and the second plate 26 move outward from the inner chamber 20, the vortex is already away from the edge of the orifice 30 and is therefore sucked into the inner chamber 20. Is controlled by the control system 42 so that it is not affected by the surrounding fluid 46. On the other hand, the jet of ambient fluid 46 is synthesized by vortices that create a strong entrainment of ambient fluid 46 that is drawn from a large distance away from orifice 30.

  FIG. 4 shows the synthetic jet 12 when the actuators 34, 36 are controlled to bend the first plate 24 and the second plate 26 inward toward the inner chamber 20 as depicted by the arrow 50. Is drawn. The internal volume of the internal chamber 20 decreases and the fluid 22 passes as a cooling jet through the orifice 30 in the direction indicated by a set of arrows 52 towards the device 54 to be cooled (eg, a light emitting diode). It is injected. As fluid 22 exits internal chamber 20 through orifice 30, the flow separates at the sharp edge of orifice 30, creating a vortex layer that vortexes and vortexes, and begins to move away from the edge of orifice 30.

  While the synthetic jets of FIGS. 1-4 are shown and described as having a single orifice therein, embodiments of the present invention may include multiple orifice synthetic jet actuators. Further thought. Furthermore, although the synthetic jet actuators of FIGS. 1-4 are shown and described as having actuator elements included on each of the first plate and the second plate, implementation of the present invention It is further envisioned that the configuration may include only a single actuator element disposed on one of the plates. Further, it is further contemplated that the synthetic jet plate may be prepared in a circular configuration, a rectangular configuration, or an alternative shape configuration other than the square configuration as shown herein.

  In accordance with an embodiment of the present invention, a synthetic jet apparatus is provided that includes a plate or blade (and hence in the following generally referred to as a “non-metallic plate”) formed partially or wholly from a non-metallic material. . The plate may be formed from any of a number of suitable non-metallic materials that can be selected and adapted to set stiffness and consequently adjust the resonant frequency of the synthetic jet. By selecting a specific non-metallic material in which the plate is partially or wholly formed, the plate will have a reduced mass that can achieve a very low resonant frequency for lower noise and lower vibrations. Can be made.

  According to embodiments of the present invention, the non-metallic material from which the plate is partially or wholly formed is polyethylene, polypropylene, polystyrene, polyvinyl chloride, and polytetrafluoroethylene (PTFE), polyethylene terephthalate (PET). , Polyethylene (PE), high density polyethylene (HDPE), polyvinyl chloride (PVC), polyvinylidene chloride (PVDC), low density polyethylene (LDPE), polypropylene (PP), polystyrene (PS), high impact polystyrene (HIPS) , Polyamide (PA), acrylonitrile butadiene styrene (ABS), polycarbonate (PC), polycarbonate / acrylonitrile butadiene styrene (PC / ABS), polyurethane (PU), resin, and combinations thereof (various Thermoplastic materials, thermoset materials, and combinations of the filler) and the like in the form of a thermoplastic or thermosetting material (but not limited to) multiple may be a suitable non-metallic material. The filler mixed with the plastic may include conductive fillers such as silver particles, ceramics, and glass, and electrically insulating fillers. In forming the plate, common ordinary techniques such as casting or injection molding may be used.

  In some embodiments of the invention, a metal coating is applied to a plate formed from a non-metallic material. In other embodiments of the invention, the plate may be made sufficiently conductive (by the use of fillers) so that no metal coating is required.

  Referring to FIG. 5, a manufacturing process for making a non-metallic plate 60 (and synthetic jet 12) is shown according to one embodiment of the present invention. In the first step of the process, a non-metallic and electrically insulating material or substrate 60 (such as a substrate formed from any of the thermoplastic or thermosetting materials described above) is provided. In the next step, the non-metallic substrate 62 is immersed in a catalyst (eg, a palladium catalyst) as shown at 64 to provide plate front / back protection. Next, a conductive metallic material (such as copper or nickel) is applied by the next step of electroless plating as shown at 66 to form the final structure of the non-metallic plate 60. On the plating, a conductive epoxy (eg, Ag epoxy) is utilized to secure the piezoelectric drive actuators 34, 36 to the plate 60. Finally, an electrical conduit 68 (such as a wire or flex circuit material) is attached to the piezoelectric drive actuators 34, 36 and the plate 60. Next, an adhesive (such as silicon) may be used to join the two plates 60 of the synthetic jet together (wherein the silicon is a spacer element between the two plates of the synthetic jet 12 to be formed). 28).

  With respect to the process shown and described in FIG. 5, an alternative to electroless plating (such as vapor deposition techniques or sputtering techniques) may be used to deposit the metal. At this time, if a thicker metal is desired, electroplating may continue. Typical metallization schemes are electroless copper or nickel activated by palladium, followed by thicker plating of Cu, sputtered or vapor deposited Ti, Cr, TiW, Cu, Ni, Au, Al, or thin Ni may be included (to prevent oxidation if necessary) covered by the Au layer. The sputtering or evaporation process typically begins with the deposition of Ti, Cr, or TiW to promote metal adhesion. The finished metal may be patterned using shadow masking or general lithographic pattern and etch steps as needed. In another embodiment, the plate may be a cast from a piezoelectric polymer material that is metallized and polarized on both sides to form an integral actuator plate.

  Referring now to FIG. 6, another example of a non-metallic plate 70 (and manufacturing process for making the synthetic jet 12) is shown in accordance with an embodiment of the present invention. The non-metal plate 70 of FIG. 6 is formed as a thin glass fiber reinforced epoxy laminated sheet (for example, FR4 PCB blank) (or hereinafter referred to as a copper coated PCB blank) coated on one side with copper. During the fabrication of the synthetic jet 12, a copper-coated PCB blank 70 is provided, followed by a conductive epoxy (eg, Ag epoxy) and piezoelectric actuators 34, 36 on the copper-coated PCB blank 70. An epoxy is applied to secure the piezoelectric actuators 34, 36 to the copper coating of the non-metallic plate 70. Next, an electrical conduit 68 (such as a wire coated with urethane) is attached to the piezoelectric element and copper-coated PCB blank 70 (eg, soldered, glued with a conductive epoxy, or machine An adhesive such as silicon 28, applied along the outer periphery of the plate 70, is used to join the two plates of the synthetic jet 12 together (the silicon 28 is The plate 70 is sealed together, leaving an aperture or orifice in it).

  In other embodiments of the present invention, the non-metallic plate of synthetic jet 12 may be formed from Kapton® or another suitable dielectric material. One embodiment in which a Kapton plate is utilized to form a non-metallic plate is presented in FIG. 7, where a manufacturing process for making the plate is shown. As shown in the manufacturing process of FIG. 7, for each non-metallic plate, a bare Kapton plate 72 is first prepared, and then conductive leads 74 are formed (sputtered) on its upper surface 76. Lead, Kapton connector, wire, conductive epoxy wire form). In the next step of the manufacturing process, the piezoelectric actuators 34, 36 are placed on each of the Kapton plates 72 so as to be electrically coupled to the conductive leads 74. Finally, an electrical connection 68 is provided for connection with the piezoelectric actuators 34, 36 and the conductive leads 68. Next, an adhesive (such as silicon) may be used to join the two plates of the synthetic jet together (wherein the silicon forms a spacer element between the two plates of the synthetic jet).

  In another embodiment in which a Kapton plate is utilized, as shown in the manufacturing process of FIG. 8, non-metal plates 78 each configured as a Kapton circuit, where a thicker layer of Kapton is a piezoelectric actuator 34. , 36 is provided with a non-metallic plate 78 with internal wiring 80 that can be connected to it. The internal wiring 80 is completely covered by Kapton and may be locally exposed at the location of the piezoelectric actuators 34, 36 and lead contacts (for electrical conduit 68 connection) or entirely exposed. Also good.

  Referring now to FIGS. 9 and 10, in a further embodiment of the present invention, the non-metallic plate of the synthetic jet is made from a piece of non-metallic material that is doubly folded at the bridge portion to form a pair of plates. Made. Referring initially to the manufacturing process of FIG. 9, a double-folded plate is a piece of non-metallic material that is first double-folded at a bridge portion 84 to form a pair of plate portions 86,88. (For example, Kapton) 82 is prepared. As shown in FIG. 9, the bridge portion 84 is formed as a thin strip of material disposed in the middle of the width of the plates 86,88. However, the bridge portion 84 may instead be formed to extend across the entire width of the plates 86, 88, but so as to generally form separate first and second plates 86, 88. It will be appreciated that it is configured to allow folding. According to an exemplary embodiment, doubly folded plate 82 is an internal electrical connection or lead formed therein and is covered and locally at the location of the piezoelectric actuator and lead contact. Includes exposed internal electrical connections or leads.

  In the embodiment of FIG. 9, the internal wiring extends between two piezoelectric actuators 34, 36 disposed on each of the plates 86, 88 and is a continuous lead 90 connected to each of the piezoelectric actuators 34, 36. This reduces the number of internal leads formed on the double folded plate. The electrical connection provided for connection to the synthetic jet, since the connection 68 is required only for each of the two piezoelectric actuators 34, 36 and the conductive continuous lead 90 extending across the bridge 84. The number of parts 68 is also reduced (the total number of electrical connections 68 with the synthetic jet is three).

  In the alternative embodiment of the doubly folded plate of FIG. 9 (and the continuous leads shown there extending across the bridge), FIG. A double folded plate 82 with leads is shown (in this case two separate leads 92 are formed). A separate lead 92 is connected to the two piezoelectric actuators 34, 36 located on each of the plates 86, 88, and the electrical connection 68 is for connection with the two piezoelectric actuators 34, 36 and is conductive. Provided for lead 92. Thus, in the embodiment of FIG. 10, a total of four electrical connections 68 are provided for the synthetic jet.

  Referring now to FIG. 11, another example of a non-metallic plate 94 (and manufacturing process for making it) is shown in accordance with an embodiment of the present invention. A plate 94 formed from a non-metallic non-conductive material (Kapton or the like) is prepared. Each of the prepared plates 94 is disposed under each of the piezoelectric actuators 34, 36 to be disposed on the plate 94, as shown on the front surface 98 and the back surface 100 of the plate in FIG. Arranged is a metal hole 96 formed therein. The holes 96 may be filled with metal inserts or conductive epoxies to form electrical connections with the back surfaces of the piezoelectric actuators 34, 36 disposed on the respective surfaces 98 of the plate 94. An electrical flex circuit or sputtered wire contact 102 is formed on the back surface 100 of the plate 94 to send an electrical signal to a position where the wire or flex circuit lead 68 can be attached to the synthetic jet 12.

  Thus, beneficially, embodiments of the present invention provide a synthetic jet assembly that incorporates a non-metallic plate to reduce the level of acoustic noise during operation of the synthetic jet. Non-metal plates are made to have lower stiffness than metal plates to achieve a lower resonant frequency that generates less noise, but in this case, the plates achieve lower vibration during operation It further has a reduced mass. The non-metal plate can be formed from an inexpensive material so that its cost is reduced compared to the metal plate.

  Thus, according to one embodiment of the present invention, a synthetic jet device includes a first plate, a second plate spaced from the first plate, a first plate and a second plate so as to form a chamber. A spacing component coupled and disposed between the first and second plates to selectively deflect at least one of the first and second plates. An actuator element coupled to the at least one, wherein the first plate and the second plate are at least partially formed from a non-metallic material.

According to another aspect of the present invention, a method of making a synthetic jet device comprises the steps of constructing a first plate and a second plate at least partially from a non-metallic material;
Attaching an actuator element to at least one of the first plate and the second plate to selectively deflect the first plate, and disposing the first plate relative to the second plate via a spacing component The spacing component includes securing the first plate to the second plate in a spaced apart arrangement to form a chamber and including an orifice therein. The invention further includes attaching an electrical connection to the actuator element and each of the first and second plates to which the actuator element is attached to allow selective application of voltage to the actuator element. .

  According to yet another aspect of the present invention, a synthetic jet device includes a first plate, a second plate spaced from the first plate to form a chamber, and a purpose of changing the volume of the chamber. An actuator element coupled to at least one of the first plate or the second plate for selectively deflecting at least one of the first plate and the second plate. Each of the first plate and the second plate is a first material including an electrically insulating non-metallic material and a second material including a conductive material, and includes a filler material, a metallized layer, and a second material. And a second material formed as one of the leads formed internally or externally on one material or in the first material.

  Although the invention has been described in detail in connection with only a limited number of embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. On the contrary, the invention has not been described so far but may be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements commensurate with the spirit and scope of the invention. Furthermore, while various embodiments of the invention have been described, it is to be understood that aspects of the invention may include only some of the described embodiments. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.

10 Synthetic Jet Assembly 12 Synthetic Jet 14 Mounting Bracket 16 Housing 18 Circuit Driver 20 Internal Chamber, Internal Cavity 22 Fluid 24 First Plate 26 Second Plate 28 Spacer Element 30 Orifice 32 External Environment, External Volume 34, 36 Actuator 38 First 1 composite structure, flexible diaphragm 40 second composite structure, flexible diaphragm 42 controller assembly, control unit system, control system 44, 48, 50, 52 arrow 46 ambient fluid, gas 54 cooled device 60 78, 94 Non-metal plate 62 Non-metal substrate 64 Catalyst 66 Electroless plating 68 Electrical connection, conductive lead, flex circuit lead, electrical conduit 70 Copper-coated PCB blank 72 Kapton plate 74 Conductive lead 7 Top 80 internal wiring 82 double folded plate 84 bridge portion 86 first plate 88 second plate 90 consecutive leads 92 separate leads 96 metal hole 98 surface 100 rear surface 102 electrical flex circuit or sputtered line contact

Claims (22)

A synthetic jet device (12) comprising:
A first plate (24);
A second plate (26) spaced from the first plate (24);
A spacing component (28) disposed coupled between the first plate (24) and the second plate (26) to form a chamber (20), wherein an orifice is disposed therein A spacing component (28) comprising (30);
An actuator element (34, 36) coupled to at least one of the first plate (24) or the second plate (26) to selectively deflect at least one of the first plate (24) or the second plate (26);
A synthetic jet device (12), wherein the first plate (24) and the second plate (26) are at least partially formed from a non-metallic material.   The synthetic jet device (12) of claim 1, wherein the non-metallic material comprises a non-conductive material.   The synthetic jet device (12) of claim 2, wherein the non-metallic material comprises at least one of a thermoplastic material, a thermosetting material, and a filler material.   Each of the first plate (24) and the second plate (26) includes a conductive metal material, and the conductive metal material is formed on the filler material, the metallized layer, and the inside or the outside. The synthetic jet device (12) according to claim 2, comprising one of the leads. Each of the first plate (24) and the second plate (26)
A non-conductive non-metallic substrate (62);
A synthetic jet device (12) according to claim 4, comprising a conductive metallization layer (66) applied on the non-conductive non-metallic substrate (62).   The synthetic jet device (12) of claim 4, wherein each of the first plate (24) and the second plate (26) comprises a copper-plated printed circuit board (PCB) blank (70). Each of the first plate (24) and the second plate (26)
A flexible dielectric layer;
A synthetic jet device (12) according to claim 4, comprising a conductive lead formed on an outer surface of the flexible dielectric layer or inside the flexible dielectric layer.   The first plate (24) and the second plate (26) are a piece of non-metallic material (82), forming the first plate (24) and the second plate (26). The synthetic jet device (12) of claim 1, comprising a piece of non-metallic material (82) folded along its bridge (84) to achieve.   A continuous conductive lead (90) is formed inside the piece of non-metallic material (82) and passes through the bridge (84) to the first plate (24) and the second plate (26). A synthetic jet device (12) according to claim 8, extending to the actuator element (34, 36) on each of the.   Discontinuous conductive leads (92) are formed within the piece of non-metallic material (82) and pass through the bridge (84) to the first plate (24) and the second plate (26). The synthetic jet device (12) according to claim 8, which extends to the actuator element (34, 36) above. A method of making a synthetic jet device (12) comprising:
Constructing the first plate (24) and the second plate (26) at least partially from a non-metallic material;
Attaching an actuator element (34, 36) to at least one of the first plate (24) and the second plate (26) to selectively deflect at least one of the first plate (24) and the second plate (26);
Positioning the first plate (24) relative to the second plate (26) via a spacing component (28), wherein the spacing component (28) encloses the chamber (20). Securing the first plate (24) to the second plate (26) in a spaced apart arrangement to form an orifice (30) therein;
The actuator element (34, 36) and the first plate (24) to which the actuator element (34, 36) is attached to allow selective application of voltage to the actuator element (34, 36) And attaching an electrical connection (68) to each of the second plates (26).   For the purpose of adjusting the resonance frequency of the synthetic jet device (12) to a desired level, the steps constituting the first plate (24) and the second plate (26) respectively Selecting the material composition of the first plate (24) and the second plate (26) to set the stiffness of (24) and the second plate (26) to a desired amount, The method of claim 11. The step of configuring each of the first plate (24) and the second plate (26) comprises:
Providing a non-conductive non-metallic substrate (62);
Applying a conductive metallization layer (66) on the non-conductive non-metallic substrate (62).   12. The method of claim 11, wherein the step of configuring each of the first plate (24) and the second plate (26) includes providing a copper plated printed circuit board (PCB) blank (70). The method described.   The step of constituting each of the first plate (24) and the second plate (26) is a non-conductive non-metallic material having a non-conductive filler material mixed therein. The method of claim 11, comprising providing a conductive non-metallic material.   The step of constituting each of the first plate (24) and the second plate (26) is to prepare a flexible dielectric layer including a conductive lead, and the conductive lead The electrical leads formed on or within the flexible dielectric layer, wherein the conductive leads are connected to the actuator elements (34, 36) and the conductive leads. 12. The method of claim 11, comprising enabling electrical coupling with the connection (68). The step of configuring the first plate (24) and the second plate (26) comprises:
Providing a piece of non-conductive non-metallic material (82) comprising a first plate portion, a second plate portion, and a bridge portion (84);
The bridge portion so as to arrange the first plate portion in a substantially parallel arrangement with the second plate portion to form the first plate (24) and the second plate (26). Folding the piece of non-conductive non-metallic material (82) at (84),
The piece of non-conductive non-metallic material (82) is one of the leads formed therein, and passes through the bridge portion (84) to pass through the first plate (24) and the first plate. 12. A method according to claim 11, comprising one of the leads extending to the actuator element (34, 36) on the at least one of the two plates (26).   The method of claim 17, wherein the leads formed within the piece of non-conductive non-metallic material (82) include one of a continuous lead (90) and a discontinuous lead (92). A synthetic jet device (12) comprising:
A first plate (24);
A second plate (26) spaced from the first plate (24) to form a chamber (20);
An actuator element coupled to at least one of the first plate (24) or the second plate (26) for selectively deflecting the first plate (24) or the second plate (26) for the purpose of changing the volume of the chamber (20). 34, 36) and
Each of the first plate (24) and the second plate (26)
A first material comprising an electrically insulating non-metallic material;
A second material comprising a conductive material, one of a filler material, a metallization layer, and a lead formed on or in the first material or inside or outside the first material A synthetic jet device (12) comprising: a second material formed as one.   The first plate (24) and the second plate (26) are coupled and arranged between the first plate (24) and the second plate (26) so as to keep the first plate (24) and the second plate (26) in a spaced relationship. The first plate (24), the second plate (26), and the spacing component (28) as a whole form the chamber (20). The synthetic jet device (12) of claim 19, wherein the spacing component (28) includes an orifice (30) therein. The first plate (24) and the second plate (26) comprise a folded plate structure formed from a piece of non-conductive non-metallic material (82), the folded plate structure ,
A first plate part;
A second plate part;
A bridge portion (84) connecting the first plate portion and the second plate portion;
Leads formed inside the folded plate structure, over the at least one of the first plate (24) and the second plate (26) through the bridge portion (84). A lead extending to the actuator element (34, 36),
The folded plate structure arranges the first plate portion substantially parallel to the second plate portion to form the first plate (24) and the second plate (26). The synthetic jet device (12) according to claim 19, wherein the synthetic jet device (12) is folded at the bridge portion (84) so as to be disposed at the same time.   The composition of the first material and the second material in each of the first plate (24) and the second plate (26) brings the resonant frequency of the synthetic jet device (12) to a desired level. The synthetic jet device (12) according to claim 19, wherein the rigidity of the first plate (24) and the second plate (26) is set to a predetermined amount so as to be set.