JP2016200378A - Heating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a condominium-type heating device suitable for energy-saving and miniaturization by achieving ventilation of high reliability.SOLUTION: A heating device includes a heating furnace 20 in which a plurality of accommodation spaces 21 as spaces defined into the box shape opened at one end side, by heating or heat-transferring wall bodies 22, 23, 24, 25, and accommodating heated objects K1, and conveying means 10 for charging and recovering the heated objects K1 to the accommodation spaces 21 through opening portions of the accommodation spaces 21. The conveying means 10 includes an arm portion 11 for loading the heated object K1, and a gas pipe 14 disposed on the arm portion 11 for discharging a purge gas to the accommodation spaces 21 or sucking the gas in the accommodation spaces 21.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a heating apparatus having a heating furnace in which a plurality of storage spaces for storing and heating an object to be heated are arranged, that is, a so-called condominium type heating apparatus.

  Conventionally, as this type of apartment-type heating device, for example, a heating device described in Patent Document 1 has been proposed. This comprises a box-shaped storage space that opens to one end side by a heating or heat transfer wall, and a plurality of such storage spaces are arranged inside a heating furnace surrounded by a heat insulating material. It is made. In addition, this device further includes a conveying means for loading and collecting the object to be heated with respect to the accommodation space.

  Here, the storage space in Patent Document 1 is configured by a wall body that is vertically opposed to each other at a distance, and a plurality of wall bodies that are disposed in a shelf shape between the vertical wall bodies. The individual accommodation spaces are arranged in multiple stages in the vertical direction.

  A hole is provided in the wall, and an electric heater is inserted into the hole, and the heating furnace is heated by the electric heater. In general, the conveying means is composed of an arm portion such as a robot, and the object to be heated is charged and collected through the opening of the accommodation space.

JP-A-2005-352306

  By the way, in the above-mentioned conventional heating apparatus, exhaust gas generated from an object to be heated (for example, adhesive or gel in the object to be heated), that is, so-called outgas, fills and accumulates in the accommodation space during continuous use. Heated products are easily contaminated.

  In order to prevent this, in the thing of the said patent document 1, although ventilation is always performed by providing a gas piping in a wall body and supplying purge gas to an accommodation space, since ventilation is always performed, energy Consumption can be large.

  Moreover, since it is necessary to provide the said gas piping in each wall body, the physique (especially furnace width) of a heating furnace enlarges and it becomes high cost. In addition, the heat capacity and heat dissipation area of the heating furnace increase, which also increases energy consumption.

  Further, in the conventional case, there is a drawback that it is difficult to uniformly adjust the ventilation amount for each accommodation space, and it takes time and effort to fine-tune the actual design of the blower hole diameter balance. Alternatively, when it is necessary to set the overall flow rate so that the accommodation space with the smallest amount of blowout becomes the predetermined amount of blowout, the energy consumption increases.

  The present invention has been made in view of the above problems, and an object of the present invention is to realize an apartment-type heating device that enables highly reliable ventilation and is suitable for energy saving and downsizing.

  In the present invention, as long as the housing space is actually ventilated every time it is used, the exhaust gas concentration in the housing space is changed to a subsequent process (for example, wire bonding, resistance welding, electrical connector) It is made by paying attention to the fact that it often does not reach the trouble level of electrical connection etc.).

In order to achieve the above object, in the first aspect of the present invention, the space is a box-shaped space opened to one end by the heating or heat transfer wall (22, 23, 24, 25). Through the heating furnace (20) in which a plurality of storage spaces (21) for storing the target object (K1) are arranged, and through the opening of the storage space, the input and recovery of the target object to the storage space is performed. Conveying means (10) for performing
The conveying means includes an arm part (11) for placing an object to be heated, and a gas pipe (14) provided in the arm part for discharging purge gas into the accommodation space or sucking gas in the accommodation space. It is characterized by being provided with.

  According to this, when the object to be heated is put in or recovered from the accommodation space, the inside of the accommodation space may be ventilated through the gas pipe of the conveying means, and the conventional constant ventilation is not necessary. The energy consumption required is reduced. Moreover, since the gas pipe for ventilation is not provided on the heating furnace side as in the conventional case, but is provided on the arm part side of the conveying means, the heating furnace can be reduced in size.

  Further, in the heating device of the present invention, it is not difficult to uniformly adjust the flow rate of each storage space as in the past, and the gas pipe is only provided in the arm portion, so that the flow rate adjustment and each time It is easy to monitor the flow rate, and it can ventilate reliably.

  Therefore, according to the present invention, it is possible to realize a condominium type heating apparatus that enables highly reliable ventilation and is suitable for energy saving and downsizing.

  In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a schematic perspective view which shows the heating apparatus concerning 1st Embodiment of this invention. It is a schematic sectional drawing which shows the arm part and to-be-heated material in FIG. (A) is a schematic perspective view which shows the to-be-heated object in FIG. 1, (b) is a schematic perspective view which shows the arm part in FIG. It is a schematic sectional drawing which expands and shows the accommodation space and its vicinity part in the heating apparatus in FIG. It is a schematic sectional drawing which expands and shows the accommodation space which is the principal part in the heating apparatus concerning 2nd Embodiment of this invention, and its vicinity part. It is a schematic sectional drawing which expands and shows the accommodation space which is the principal part in the heating apparatus concerning 3rd Embodiment of this invention, and its vicinity part. It is a schematic sectional drawing which expands and shows the accommodation space which is the principal part in the heating apparatus concerning 3rd Embodiment of this invention, and its vicinity part. It is a schematic sectional drawing which expands and shows the accommodation space which is the principal part in the heating apparatus concerning 4th Embodiment of this invention, and its vicinity part. It is a schematic sectional drawing which expands and shows the accommodation space which is the principal part in the heating apparatus concerning 5th Embodiment of this invention, and its vicinity part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other are given the same reference numerals in the drawings in order to simplify the description.

(First embodiment)
The heating device S1 according to the first embodiment of the present invention will be described with reference to FIGS. The heating device S1 is applied as a device for performing a heating process when manufacturing various electronic devices mounted on a vehicle such as an automobile.

  In the present embodiment, S1 is largely a heating furnace 20 in which a plurality of storage spaces 21 for storing the object to be heated K1 are arranged, and conveyance for loading and collecting the object to be heated K1 with respect to the storage space 21. And means 10.

  The accommodation space 21 is a space partitioned in a box shape opened to one end side by heating or heat transfer wall bodies 22, 23, 24, 25. The transport means 10 includes an arm portion 11 on which the article to be heated K1 is placed and a drive portion 12 that drives the arm portion 11.

  The arm unit 11 is connected to a drive unit 12 formed of a computer-controlled robot or the like, and as shown by an arrow Y1 in FIG. Each storage space 21 can be inserted and removed.

  The direction of this arrow Y1 is the direction of insertion of the arm portion 11 into the accommodation space 21, and is hereinafter simply referred to as the insertion direction Y1. Furthermore, this insertion direction Y1 corresponds to the direction from the front side to the back side of the heating furnace 20, and the direction opposite to the insertion direction Y1 is the extraction direction from the accommodation space 21 of the arm portion 11.

  Here, the article to be heated K1 includes a member to be heated K2 and a transport carrier K3 that mounts and supports the member to be heated. Although not particularly limited, the heated member K2 is made of, for example, a wiring board or a case. Here, a plurality of heated members K2 are mounted on the transport carrier K3.

  Further, the transport carrier K3 is locked in the holding groove 28 of the storage space 21 and fixed in the storage space 21 together with the heated member K2, and is made of a metal plate having excellent thermal conductivity such as Al.

  Here, the heated member K2 has a size and shape that allows the heated member K2 alone to be engaged with the holding groove 28 of the accommodation space 21 (for example, the same size and the same as the transport carrier K3 shown in FIGS. 1 to 3). Shape), the transport carrier K3 is unnecessary. In this case, the object to be heated K1 is constituted by the member to be heated K2 alone.

  The heating furnace 20 keeps the entire plurality of storage spaces 21 at a desired heating temperature at all times. And the conveyance means 10 throws in the next to-be-heated material K1 after collect | recovering the to-be-heated material K1 in the accommodation space 21 which completed heating.

  The heating furnace 20 has an outer shape partitioned by heat insulating plates 26a, 26b, 26c, and 26d, and has a rectangular parallelepiped box shape surrounded by the heat insulating plates 26a to 26d and having an open front side. The heat insulating plate includes an upper heat insulating plate 26a, a lower heat insulating plate 26b, a side heat insulating plate 26c, and a back heat insulating plate 26d (see FIG. 4), and is formed of a normal heat insulating material having excellent heat resistance and heat insulating properties.

  The wall bodies 22 to 25 are plates made of a metal such as Al having excellent thermal conductivity, and are opposed to each other in the vertical direction at a distance in the space surrounded by the heat insulating plates 26 a to 26 d in the heating furnace 20. A plurality of first wall bodies 22, a plurality of second wall bodies 23 arranged in a horizontal shelf at a distance between the first wall bodies 22, and the back side of the heating furnace 20 It consists of a third wall body 24 (see FIG. 4) that closes and a fourth wall body 25 that closes the upper surface side and the lower surface side of the heating furnace 20.

  Thereby, each accommodation space 21 is divided by each wall body 22-25, and is formed as a rectangular parallelepiped box-shaped space which the front side opened and the back side was obstruct | occluded. As shown in FIG. 1, the plurality of storage spaces 21 form a lattice-like array arranged in the vertical direction (up and down direction in FIG. 1) and the horizontal direction (left and right direction in FIG. 1). In FIG. 1, the plurality of storage spaces 21 form a 4 × 3 lattice-like array of four in the vertical direction and three in the horizontal direction.

  Further, the holding groove 28 described above is provided on the inner surface of the accommodation space 21. Specifically, as shown in FIGS. 1 and 4, the holding groove 28 is a groove extending along the insertion direction Y <b> 1 on the inner surface of the first wall body 22.

  As shown in FIG. 1, an electric heater 27 is provided in the wall body, here, in the first wall body 22. This electric heater 27 is for maintaining each accommodation space 21 in the heating furnace 20 at a desired heating temperature.

  As for the conveying means 10, as shown in FIGS. 2 and 3, the arm portion 11 has a plate shape in which the front and back plate surfaces are along the insertion direction Y1, and here, the arm portion 11 is formed. The object to be heated K1 is placed on one side of the front and back plate surfaces.

  Further, here, the object to be heated K1 (here, the transport carrier K3 of the object to be heated K1) is supported on the mounting surface 11a of the object to be heated K1 in the arm portion 11 to suppress misalignment and the like. A protruding portion 13 is provided. Such an arm part 11 consists of materials, such as a metal and ceramic excellent in heat resistance.

  And about the injection | throwing-in of the to-be-heated material K1, by inserting the arm part 11 which mounted the to-be-heated material K1 (here to-be-heated member K2 + conveyance carrier K3) in the accommodation space 21 used as desired heating temperature. Done.

  At this time, the object to be heated K1 (here, the transport carrier K3 of the object to be heated K1) is inserted while being slid in a state of being fitted in the holding groove. And after fixing the to-be-heated material K1 to the holding groove 28, the arm part 11 is removed from the to-be-heated material K1, and the arm part 11 is extracted from the accommodation space 21. Thus, the object to be heated K1 is charged.

  And the to-be-heated material K1 heated and completed for a predetermined time is collect | recovered from the storage space 21. FIG. In this recovery, the arm part 11 is inserted into the accommodation space 21, the arm part 11 is brought into contact with the object to be heated K1, the object to be heated K1 is placed on the arm part 11, and then the arm part 11 together with the object to be heated K1. Is extracted from the storage space 21.

  Here, in this embodiment, as shown in FIGS. 2 and 4, the arm portion 11 includes a gas pipe 14 for discharging the purge gas into the accommodation space 21, that is, a gas pipe 14 for discharge. Yes. The gas pipe 14 is integrally fixed to the arm portion 11 by welding, bonding, fastening, or the like. As the purge gas, a clean gas such as industrial air or nitrogen gas is used.

  Then, at the time of the above-described charging and collection, that is, when the arm portion 11 is located in the accommodation space 21, as indicated by the broken line arrow in FIG. Discharged.

  Here, in the state where the arm portion 11 is inserted together with the article to be heated K1 from the opening side of the accommodation space 21, as shown in FIG. 4, the arm portion 11 and the inner wall (that is, the wall) of the accommodation space 21 inside the accommodation space 21. A U-shaped gas flow path partitioned by a body is formed.

  Specifically, the opening of the accommodation space 21 is partitioned into one surface side and the other surface side of the front and back plate surfaces of the arm portion 11 with the arm portion 11 as a boundary. Thereby, the gas flow path becomes a U-shaped one-way flow path from one surface side of the arm portion 11 to the other end surface of the arm portion 11 around the insertion tip end side of the arm portion 11.

  By this purge gas, the outgas generated from the article to be heated K1 and filling the accommodation space 21 is exhausted from the accommodation space 21, and the accommodation space 21 is ventilated. The gas pipe 14 may be provided with a heater (not shown) for preheating the discharged purge gas. According to this, the temperature fall of the heating furnace 20 by purge can be suppressed, which is preferable.

  Further, the purge gas may be preheated by using the temperature of the heating furnace 20 in addition to the heater. In this case, for example, by providing a purge gas flow path (pipe) from the purge gas supply source through the walls 22 to 25 to the gas pipe 14, the purge gas supplied from the purge gas supply source is at the temperature of the heating furnace 20. It may be heated and discharged from the gas pipe 14.

  In the present embodiment, the gas pipe 14 shown in FIGS. 2 and 4 may be a pipe for sucking the gas in the accommodation space 21, that is, a pipe for suction. The gas in the accommodation space 21 is the outgas generated from the heated object K1 described above, and this suction may be performed by a suction pump or the like connected to the gas pipe 14. In this case, the gas flow is in the direction opposite to the dashed arrow in FIG.

  That is, the gas pipe 14 of the present embodiment may be for discharge or for suction, and may be said to be a pipe for ventilation for ventilating the accommodation space 21 by discharge or suction. Here, the timing of discharge or suction, that is, the timing of ventilation can be arbitrarily set from the start of the above-mentioned input to the completion of collection. That is, the timing may be after charging is completed, during charging, or at the time of collection.

  The time of collection is a period in which the arm portion 11 is inserted into the accommodation space 21 where the heating of the article to be heated K1 is completed and extracted together with the article to be heated K1, and ventilation is performed when the arm portion 11 is inserted and extracted at the time of collection. May be performed. Here, as the timing of ventilation, since the temperature of the object to be heated K1 is low and the outgas tends to condense on the surface of the object to be heated K1 at the time of ventilation, the time of recovery is preferable.

  Furthermore, after heating the to-be-heated material K1 for a while and the outgas concentration increases, ventilation may be performed, and then the arm part 11 may be extracted. Moreover, you may ventilate with respect to the one accommodation space 21 several times intermittently. For example, the arm 11 may be inserted once during the heating, and the ventilation may be performed once without charging and collecting the heated object K1, and once and three times during the recovery.

  By the way, according to the present embodiment, when the object to be heated K1 is put in or collected in the accommodation space 21, the inside of the accommodation space 21 may be ventilated via the gas pipe 14 of the transport means 10, as in the conventional case. Since constant ventilation is not required, energy consumption required for ventilation is reduced. Moreover, since the gas pipe 14 for ventilation is not provided on the heating furnace side as in the prior art, but is provided on the arm portion 11 side of the conveying means 10, the heating furnace 20 can be reduced in size.

  Further, in the heating device S1 of the present embodiment, since the gas pipe 14 is only provided on the arm portion 11, it is not necessary to uniformly adjust the flow rate of each storage space 21 as in the prior art. Therefore, according to this embodiment, it is easy to adjust the flow rate and monitor the flow rate every time, and it is possible to ventilate reliably.

  Therefore, according to the present embodiment, it is possible to realize an apartment-type heating device S1 that enables highly reliable ventilation and is suitable for energy saving and downsizing.

  In the illustrated example, the gas pipe 14 is provided on the opposite side of the mounting surface 11a of the front and back plate surfaces of the arm unit 11, but on the contrary, the mounting of the arm unit 11 is performed. Needless to say, the gas pipe 14 may be provided on the surface 11a side.

(Second Embodiment)
The heating device according to the second embodiment of the present invention will be described with a focus on differences from the first embodiment with reference to FIG. In the first embodiment, one discharge or suction gas pipe 14 is provided for the arm portion 11.

  On the other hand, as shown in FIG. 5, in this embodiment, the gas pipe 14 includes a discharge pipe 141 that discharges the purge gas into the storage space 21 and a suction pipe 142 that sucks the gas in the storage space 21. It is assumed that the two are configured.

  Also in the present embodiment, the arm portion 11 has a plate shape in which the front and back plate surfaces are along the insertion direction Y1. And in this embodiment, the one surface side obstruction | occlusion part 15 and the other surface side obstruction | occlusion part 16 which protrude in the insertion direction Y1 and the orthogonal | vertical direction are provided in the one surface side and other surface side of the board surface of the front and back in the arm part 11, respectively. It has been.

  Thereby, when the arm part 11 is inserted into the accommodation space 21, the part on the one surface side of the arm part 11 in the opening part of the accommodation space 21 is closed by the one-side blocking part 15, and the part on the other surface side of the arm part 11 Is closed by the other surface side closing portion 16.

  For example, each of the closing portions 15 and 16 is a plate-like one that protrudes from the plate surface of the arm portion 11 in a direction orthogonal to the insertion direction Y1, and the opening portion of the accommodation space 21 on each plate surface side of the arm portion 11 is formed. It has an area to cover. Thereby, the opening part of the accommodation space 21 is obstruct | occluded by each obstruction | occlusion part 15 and 16. FIG.

  In the present embodiment, the discharge pipe 141 is provided in one of the one-surface-side blocking portion 15 and the other-surface-side blocking portion 16, and the suction piping 142 is provided in the other. In FIG. 5, the suction pipe 142 is provided in the one-surface-side closing portion 15 and the discharge pipe 141 is provided in the other-surface-side closing portion 16.

  The pipes 141 and 142 are provided through the blocking parts 15 and 16 and are fixed to the arm part 11 by welding, fastening, or the like, as described above. In the present embodiment, the discharge pipe 141 and the suction pipe 142 form a one-way gas flow that can be ventilated in the accommodation space 21, as indicated by the broken line arrow in FIG. It is like that.

  Furthermore, since the accommodating space 21 can be sealed by the closed portions 15 and 16, it is easy to reliably form a one-way gas flow that can be ventilated by preventing leakage of pressure from both the pipes 141 and 142 as much as possible.

  For example, even if the unevenness existing on the object to be heated K1 or the inner wall of the accommodation space 21 is large, the inside of the accommodation space 21 is made a sealed space, so that inhibition of gas flow due to the unevenness can be suppressed and good Easy to form a good ventilation flow. Therefore, ventilation can be performed with a small purge gas amount, or a small discharge pressure or suction pressure, which is advantageous for energy saving.

  Further, in this case, since ventilation can be performed in the almost enclosed storage space 21, outgas can be reliably collected in the suction pipe 142. Therefore, compared to the case where the outgas is discharged from the opening of the storage space 21, contamination prevention can be achieved. Desirable in terms.

  In the second embodiment, the configuration may be such that the one-surface-side blocking portion 15 and the other-surface-side blocking portion 16 shown in FIG. 5 are omitted. Also in this case, an effect that it is easy to form an appropriate ventilation flow can be expected as compared with the case where only one of the discharge pipe 141 and the suction pipe 142 is provided.

  As described above, the heating device of the present embodiment also enables highly reliable ventilation as in the first embodiment, realizes a configuration suitable for energy saving and downsizing, and further, the present embodiment described above. Form-specific effects can be expected.

(Third embodiment)
A heating apparatus according to a third embodiment of the present invention will be described with reference to FIGS. The present embodiment is a modification of the second embodiment, and the differences from the second embodiment will be mainly described.

  Here, FIG. 6 shows a state in which the object to be heated K1 and the surface of the arm part 11 are separated from each other in the accommodation space 21, and FIG. 7 shows a state in which they are in contact with each other. Specifically, the state in which the arm portion 11 is inserted into the accommodation space 21 at the time of recovery is the state of FIG. 6, and the heated portion K1 is placed on the arm portion 11 by raising the arm portion 11 from this state. Is the state of FIG.

  As shown in FIGS. 6 and 7, also in the present embodiment, the gas pipe 14 is configured to include two pipes, a discharge pipe 141 and a suction pipe 142, as in the second embodiment. . Further, similarly to the second embodiment, the one-surface side blocking portion 15 and the other-surface-side blocking portion 16 are provided on the one surface side and the other surface side of the front and back plate surfaces of the arm portion 11, respectively.

  Here, in this embodiment, as shown in FIGS. 6 and 7, the suction pipe 142 of the gas pipe 14 is a pipe that leads from the surface of the arm portion 11 (that is, the placement surface described above) to the inside. Has been. That is, the suction pipe 142 according to the present embodiment is formed by a hole provided in the plate material constituting the arm portion 11.

  Then, as shown in FIG. 7, when the object to be heated K <b> 1 and the surface of the arm portion 11 are in contact with each other, the suction force of the suction pipe 142 (see the broken line arrow in FIG. 7) The heated object K1 is fixed. Thereby, it becomes easy to make the to-be-heated object K1 mounted in the arm part 11 fixed firmly, and prevention of the position shift of the to-be-heated object K1 can be expected.

  Further, in the state where the object to be heated K1 and the surface of the arm portion 11 are separated from each other in the accommodation space 21 shown in FIG. 6, as shown by the broken line arrow in the drawing, the surface for suction on the surface of the arm portion 11 is used. The gas in the accommodation space 21 is sucked from the opening of the pipe 142. Here, a plurality (five in FIG. 6) of openings of the suction pipe 142 are provided on the surface of the arm portion 11.

  Thus, also by the heating device of the present embodiment, highly reliable ventilation is possible and a configuration suitable for energy saving and miniaturization can be realized as in the second embodiment. The same effect as that of the second embodiment can be expected by the configuration including both the discharge piping 141 and the suction piping 142 and the configuration including both the blocking portions 15 and 16.

  Also in the third embodiment, as in the second embodiment, it is needless to say that the one-side blocking portion 15 and the other-side blocking portion 16 may be omitted.

  At the time of charging, the arm part 11 on which the object to be heated K1 is placed is inserted into the accommodation space 21 to bring it into the state shown in FIG. 7, and then the arm part 11 is lowered so that the surface of the object to be heated K1 and the arm part 11 6 is in the state of FIG. Needless to say, the present embodiment can be applied even at the time of charging, and the same effect as described above can be expected.

(Fourth embodiment)
The heating apparatus according to the fourth embodiment of the present invention will be described with reference to FIG. 8, focusing on the differences from the first embodiment. In the present embodiment, similarly to the first embodiment, one gas pipe 14 for discharge or suction is provided on the arm portion 11.

  Also in the present embodiment, as shown in FIG. 8, the arm portion 11 has a plate shape in which the front and back plate surfaces are along the insertion direction Y1. And in this embodiment, the obstruction | occlusion part 17 which protrudes in the orthogonal | vertical direction with respect to the insertion direction Y1 is provided in either one surface side of the board surface of the front and back in the arm part 11. As shown in FIG.

  In the example of FIG. 8, the closing portion 17 is provided on the surface opposite to the mounting surface of the arm portion 11, but the closing portion 17 may be provided on the mounting surface side of the arm portion 11. As in the second embodiment, the closing portion 17 is, for example, a plate-like one projecting from the plate surface of the arm portion 11 in the direction orthogonal to the insertion direction Y1.

  Thereby, when the arm part 11 is inserted into the accommodation space 21, the part on the one surface side of the arm part 11 in the opening part of the accommodation space 21 is closed by the closing part 17, and the part on the other surface side of the arm part 11 is opened. It has come to be.

  In the present embodiment, a gas pipe 14 is provided for the closing portion 17. The installation of the gas pipe 14 with respect to the blocking portion 17 is the same as in the second embodiment. Here, the gas pipe 14 may be used for discharge or suction, but is used for discharge in FIG. Furthermore, this embodiment adopts a configuration in which the closing portion 17 is added to the side where the gas pipe 14 is arranged on the front and back plate surfaces of the arm portion 11 in the first embodiment. I can say that.

  Thereby, in this embodiment, the gas flow which can be ventilated in the accommodation space 21 is formed as shown by the broken-line arrow in FIG. Here, in this embodiment, since the closing part 17 closes a part of the opening part of the accommodation space 21, compared with the said 1st Embodiment, it is easy to form the one-way gas flow which can be ventilated reliably.

  Thus, the heating device of the present embodiment also enables highly reliable ventilation as in the first embodiment, and realizes a configuration suitable for energy saving and miniaturization. Can be expected.

(Fifth embodiment)
A heating apparatus according to a fifth embodiment of the present invention will be described. The present embodiment can be used in combination with each of the above-described embodiments. However, the difference from the first embodiment will be mainly described with reference to FIG.

  In each said embodiment, the gas piping 14 with which the arm part 11 was equipped respond | corresponded to the one accommodation space 21 in which the arm part 11 is inserted with the to-be-heated material K1. On the other hand, in this embodiment, a plurality of gas pipes 14 are provided for the arm portion 11 so that the gas pipes 14 can be simultaneously inserted into different accommodation spaces 21.

  That is, some of the gas pipes 14 among the plurality of gas pipes 14 are inserted together with the arm part 11 in the accommodation space 21 in which the arm part 11 is inserted. On the other hand, the remaining gas pipe 14 is inserted into an accommodation space 21 other than the accommodation space 21 into which the arm portion 11 is inserted.

  As described above, the heating furnace 20 always maintains the entire plurality of storage spaces 21 at a desired heating temperature. And the conveyance means 10 throws in the next to-be-heated material K1 after collect | recovering the to-be-heated material K1 in the accommodation space 21 in which heating was completed.

  Here, in this embodiment, the plurality of gas pipes 14 provided on the arm portion 11 can be inserted into different storage spaces 21 respectively. However, in FIG. 9, the gas pipe 14 is replaced with the first pipe. Two of 14a and 2nd piping 14b are provided. The first pipe 14a and the second pipe 14b may be for discharge or for suction.

  FIG. 9 shows a state in which the next object to be heated K1 is put in, for example, the storage space 21 that has been heated (the lower storage space 21 in the figure). At this time, in the accommodation space 21 that has been heated, discharge or suction is performed by the first pipe 14a to perform ventilation.

  At the same time, the second pipe 14b is inserted into the heating storage space 21 (upper storage space 21 in FIG. 9) other than the heating-completed storage space 21. In the accommodation space 21 during heating, since the heating progresses and the outgas concentration becomes high, ventilation by the second pipe 14b is efficiently performed.

  In the present embodiment, the second pipe 14b is not limited to be inserted into the storage space 21 adjacent to the storage space 21 into which the first pipe 14a is inserted. For example, the second pipe 14b may be inserted into the adjacent storage space 21 by skipping one or more of the storage spaces 21 into which the first pipe 14a is inserted.

  Furthermore, there may be a plurality of second pipes 14b, and the second pipes 14b are simultaneously inserted into a plurality of storage spaces 21 other than the storage space 21 into which the first pipes 14a are inserted. You may make it do.

  Further, each of the first pipe 14a and the second pipe 14b may be configured to include both the discharge pipe 141 and the suction pipe 142, as in the second embodiment. That is, the first pipe 14a and the second pipe 14b are different from each other in that they are inserted into different housing spaces 21, and each of the first pipe 14a and the second pipe 14b includes a plurality of pipes. It may be an aggregate of.

  Also in the present embodiment, the arm portion 11 may be provided with the one-surface-side blocking portion 15, the other-surface-side blocking portion 16, and the blocking portion 17 as shown in the respective drawings. In this case, it is assumed that these closed parts are extended from the opening part where the arm part 11 is inserted together with the first pipe 14a to the opening part of another accommodating space 21 where the second pipe 14b is inserted, A part of the opening of the other accommodation space 21 may be closed.

  Thus, according to this embodiment, by applying in combination with each of the above-described embodiments, a highly reliable ventilation can be achieved as described above, and a heating device suitable for energy saving and miniaturization can be realized. Furthermore, in the accommodation space 21 other than the accommodation space 21 into which the arm portion 11 is inserted when the arm portion 11 is inserted, an effect that ventilation can be easily performed at an appropriate timing can be expected.

(Other embodiments)
Note that the one-surface-side blocking portion 15, the other-surface-side blocking portion 16 (see FIG. 5), the blocking portion 17 (see FIG. 8), and the suction pipe 142 as shown in the third embodiment are opened. The surface (see FIGS. 6 and 7) of the arm portion 11 to be sealed is in contact with the other side and sealed. Therefore, these may be provided with a structure that is sealed with a member made of a rubber elastic material or the like in order to prevent pressure leakage.

  Further, a lid-like structure that protects the object to be heated K1 on, for example, the arm portion 11 so that foreign matter does not roll up and adhere to the object to be heated K1 when gas is discharged or sucked in the accommodation space 21. May be provided.

  Further, with respect to the gas pipe 14, the discharge pipe 141, and the suction pipe 142, the discharge port and the suction port may be provided at one location or may be provided at a plurality of locations by branching. Moreover, the opening cross section of these piping can select shapes, such as a round shape, a square shape, and a horizontally long flat shape, and it does not specifically limit it.

  When the gas pipe 14 is used for discharge or the discharge pipe 141, the purge gas is preheated to a temperature higher than the heating temperature of the heating furnace 20, and the high-temperature gas is discharged into the storage space 21. Also good. In this case, an effect of volatilizing or decomposing and removing outgas adhering to the inner wall of the accommodation space 21 can be expected.

  Further, when the gas pipe 14 is for discharge or the discharge pipe 141, cleaning is performed by blowing off a high flow rate of purge gas to blow off particles or fibrous foreign matters adhering to the accommodation space 21. You may do it.

  Of course, the various timings related to ventilation described in the first embodiment can be appropriately adopted for the second and subsequent embodiments.

  Further, the present invention is not limited to the above-described embodiment, and can be appropriately changed within the scope described in the claims. The above embodiments are not irrelevant to each other, and can be combined as appropriate unless the combination is clearly impossible, and the above embodiments are not limited to the illustrated examples. Absent. In each of the above-described embodiments, it is needless to say that elements constituting the embodiment are not necessarily essential unless explicitly stated as essential and clearly considered essential in principle. Yes. Further, in each of the above embodiments, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is clearly limited to a specific number when clearly indicated as essential and in principle. The number is not limited to the specific number except for the case. Further, in each of the above embodiments, when referring to the shape, positional relationship, etc. of the component, etc., the shape, unless otherwise specified and in principle limited to a specific shape, positional relationship, etc. It is not limited to the positional relationship or the like.

DESCRIPTION OF SYMBOLS 10 Conveyance means 11 Arm part of conveyance means 14 Gas piping of conveyance means 20 Heating furnace 21 Storage space 22 1st wall body 23 2nd wall body 24 3rd wall body 25 4th wall body K1 To-be-heated object

Claims (6)

A storage space (21) that is a box-shaped space that opens to one end side by a wall body (22, 23, 24, 25) for heating or heat transfer and stores an object to be heated (K1). A plurality of heating furnaces (20) arranged;
Conveying means (10) for charging and collecting the object to be heated with respect to the accommodation space through the opening of the accommodation space;
The transport means includes an arm portion (11) for placing the object to be heated,
A heating apparatus, comprising: a gas pipe (14) provided in the arm portion for discharging a purge gas into the storage space or for sucking a gas in the storage space.   The gas pipe is configured to include both a discharge pipe (141) for discharging the purge gas into the storage space and a suction pipe (142) for sucking the gas in the storage space. The heating device according to claim 1. The arm portion has a plate shape in which the front and back plate surfaces are along the insertion direction (Y1) of the arm portion into the accommodation space,
On one surface side and the other surface side of the front and back plate surfaces of the arm portion, a one-surface-side blocking portion (15) and an other-surface-side blocking portion (16) projecting in a direction orthogonal to the insertion direction are provided, respectively. ,
When the arm portion is inserted into the accommodation space, a portion of the arm portion on one side of the opening portion of the accommodation space is closed by the one-surface-side blocking portion, and a portion on the other surface side of the arm portion is the other portion. It is designed to be blocked by the surface-side blocking part,
The discharge pipe is provided on one of the one-surface-side blocking portion and the other-surface-side blocking portion, and the suction piping is provided on the other.
The purge gas discharged from the discharge pipe is sucked by the suction pipe in the housing space sealed by the one-surface-side closed part and the other-surface-side closed part. The heating apparatus according to claim 2. Of the gas pipes, the suction pipe is a pipe that leads from the surface of the arm portion to the inside,
The object to be heated is fixed to the surface of the arm portion by the suction force of the suction pipe,
Further, in the state where the object to be heated and the surface of the arm part are separated from each other in the accommodation space, the gas in the accommodation space is sucked from the opening of the suction pipe on the surface. The heating apparatus according to claim 2 or 3, wherein The arm portion has a plate shape in which the front and back plate surfaces are along the insertion direction (Y1) of the arm portion into the accommodation space,
On either one of the front and back plate surfaces of the arm portion, a closing portion (17) protruding in a direction orthogonal to the insertion direction of the arm portion into the accommodation space is provided,
When the arm portion is inserted into the housing space, a portion of the opening portion of the housing space on the one surface side of the arm portion is closed by the closing portion, and the other surface of the arm portion among the opening portions of the housing space. The side part is designed to be opened,
The heating apparatus according to claim 1, wherein the gas pipe is provided on the closed portion side. A plurality of the gas pipes are provided for the arm part,
The heating device according to any one of claims 1 to 5, wherein the plurality of gas pipes can be inserted into the different accommodation spaces.

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