JP2016111325A - Method for generating drawing data - Google Patents

Abstract

An object of the present invention is to provide a drawing data creation method using a data format capable of reducing the data amount even when the dose amount needs to be defined in a fine size. The drawing data creating method according to one aspect of the present invention is a drawing data creating method for inputting to a drawing apparatus for drawing a figure pattern on a sample using a charged particle beam. The drawing data is created in accordance with a data format in which the dose information indicating the dose amount or the dose modulation rate at each corner position of the graphic pattern is continuously defined before or after the graphic information is defined. It is characterized by that. [Selection] Figure 3

Description

  The present invention relates to a drawing data creation method, for example, a drawing data creation method input to a drawing apparatus.

  In recent years, with the high integration of LSI, the circuit line width of a semiconductor device has been further miniaturized. As a method for forming an exposure mask (also referred to as a reticle) for forming a circuit pattern on these semiconductor devices, an electron beam (EB) drawing technique having excellent resolution is used.

  For example, there is a drawing apparatus using a multi-beam. Compared with the case of drawing with one electron beam, the use of multi-beams enables irradiation with many beams at a time, so that the throughput can be significantly improved. In such a multi-beam type drawing apparatus, for example, an electron beam emitted from an electron gun is passed through a mask having a plurality of holes to form a multi-beam, and each of the unshielded beams is blanked. The image is reduced by an optical system, deflected by a deflector, and irradiated to a desired position on the sample.

  In the multi-beam drawing apparatus, pattern data (drawing data) converted from CAD data is input. Then, a data conversion process is performed on the input pattern data, and the process proceeds to a drawing process. In that case, it is needless to say that the amount of pattern data input to the drawing apparatus is preferably small. Accordingly, pattern data defining a plurality of graphic patterns is defined in a data-compressed format (see, for example, Patent Document 1).

  Conventionally, in the drawing apparatus, the pattern dimension CD is corrected for the dimensional variation caused by the proximity effect due to the backscattering whose influence range is about 10 μm, the fogging effect whose influence range is mm order, and the chrome loading effect whose influence range is mm order. Processing to do. In order to correct the dimensional variation caused by the phenomenon of the influence range smaller than the influence range of about 10 μm, for example, it is conceivable to define the dose modulation amount in the graphic pattern itself of the drawing data input to the drawing apparatus. However, since the size of the graphic pattern itself is too large for correcting such a small influence range, in order to use this method, the graphic pattern is divided into a plurality of small graphic patterns, and one small graphic pattern is provided. It becomes necessary to define a dose modulation amount. Therefore, there is a problem that the amount of drawing data becomes enormous.

Japanese Patent Application Laid-Open No. 2005-079115

FIG. 17 is a diagram illustrating an example of a data format of pattern data of a graphic pattern including information on a dose modulation amount. In FIG. 17, a rectangular pattern having an x-direction size of w and a y-direction size of h is shown as an example. In the data format shown in FIG. 17, a 1-byte code (code _DOSE ) indicating a dose modulation amount, a 2-byte dose modulation amount, a 1-byte code (code _FIG ) indicating a graphic type, and coordinates of a graphic pattern of 3 bytes each. (X, Y) and the size (W, H) in the x and y directions of 2 bytes each are defined. Therefore, when pattern data of such a graphic pattern is created in the data format shown in FIG. 17, it can be defined with a data amount of 1 + 2 + 1 + 3 × 2 + 2 × 2 = 14 bytes.

FIG. 18 is a diagram for explaining the data amount of pattern data when dividing into small figure patterns having a required dose modulation amount. In the example of FIG. 18, for example, a 200 nm × 200 nm rectangular pattern is shown. When the dose modulation amount is not defined, a 1-byte code (code _DOSE ) and a 2-byte dose modulation amount are not required in the data format shown in FIG. However, for example, when defining the dose modulation amount with a size of 10 nm, it is necessary to divide the rectangular pattern shown in FIG. 18 into 20 parts in the x and y directions. Therefore, pattern data with a dose modulation amount of 1 to 20 × 20 = 400 figures is required. When the data format described in FIG. 17 is used, a data amount of 400 × 14 = 5600 bytes is required. Thus, for the correction of the above-mentioned small influence range, for example, there is a problem that the data amount of 11 bytes increases to the data amount of 5600 bytes.

  FIG. 19 is a diagram for explaining the data amount of pattern data in units of samples when dividing into small figure patterns having a required dose modulation amount. The example of FIG. 19 shows a case where a chip area (drawing area) of 80 mm × 120 mm is formed on the exposure mask substrate. Assume that a dose modulation amount map is created for such a chip area. In the dose modulation amount map, for example, the dose modulation amount is defined by 10 bits. For example, when defining a dose modulation amount for each mesh region of 10 nm size, a data amount of (80000000/10) nm × (120000000/10) nm × 10 bits / 8 bits = 109 TB (terabytes) in the dose modulation amount map It becomes necessary. According to a report of ITRS (International Technology Roadmap for Semiconductors) 2012, a pattern with a half pitch HP of 28 nm to 10 nm is 2.2 TB to 2.9 TB per mask. It can be seen that the amount of data shown in is enormous.

  Therefore, the present invention has an object to provide a drawing data creation method using a data format capable of reducing the data amount even when the dose amount needs to be defined in a fine size, overcoming the above-described problems. To do.

A method for creating drawing data according to an aspect of the present invention includes:
In a method for creating drawing data to be input to a drawing apparatus that draws a graphic pattern on a sample using a charged particle beam,
According to a data format in which graphic information of a graphic pattern and dose information indicating a dose amount or a dose modulation rate at each corner position of the graphic pattern are continuously defined before or after the graphic information is defined. The drawing data is created.

  The dose amount information further indicates a dose amount or a dose modulation rate at the intersection of a dividing line that divides the figure pattern in at least one of the x direction and the y direction and either side of the figure pattern. Such a configuration is preferable.

A method for creating drawing data according to another aspect of the present invention includes:
In a method for creating drawing data to be input to a drawing apparatus that draws at least one figure pattern on a sample using a charged particle beam,
Inputting graphic information of at least one graphic pattern and setting a rectangular frame surrounding at least one graphic pattern;
Setting each dose amount or dose modulation rate at the positions of the four corners of the rectangular frame;
The graphic information of at least one graphic pattern and the dose information indicating the set dose or dose modulation rate at the positions of the four corners of the rectangular frame continuously before or after the graphic information is defined. Creating drawing data according to a defined data format;
It is provided with.

In addition, the graphic information defines graphic information of a plurality of graphic patterns,
Further comprising the step of inputting graphic information of a plurality of graphic patterns and grouping the plurality of graphic patterns into at least one group for each continuous graphic pattern group;
When setting a rectangular frame, for each group, set a rectangular frame surrounding the group of graphic patterns,
When setting the dose amount or dose modulation rate, for each group, set the respective dose amounts or dose modulation rates at the positions of the four corners of the rectangular frame,
For each group, according to a data format in which graphic information of the graphic pattern group of the group and dose information at the positions of the four corners of the rectangular frame are continuously defined before or after the graphic information is defined It is preferable to create the drawing data.

  The dose amount information further indicates a dose amount or a dose modulation rate at an intersection of a dividing line that divides the rectangular frame in at least one of the x direction and the y direction and either side of the rectangular frame. Such a configuration is preferable.

In addition, the method further includes a step of setting a plurality of mesh areas having a fixed size in an area outside the rectangular frame,
It is preferable that the data format is configured so that, in addition to the dose amount information, second dose amount information indicating a dose amount or a dose modulation rate is defined for each fixed-size mesh region.

A method for creating drawing data according to another aspect of the present invention includes:
In a method for creating drawing data to be input to a drawing apparatus that draws a graphic pattern on a sample using a charged particle beam,
Inputting graphic information of the graphic pattern, setting a rectangular frame in a part of the graphic pattern,
Setting a plurality of mesh regions of fixed size in the region including the remainder of the graphic pattern;
Setting each dose amount or dose modulation rate at the positions of the four corners of the rectangular frame;
Setting each dose amount or dose modulation rate in a plurality of mesh regions;
The graphic information of the graphic pattern, the first dose information indicating the set dose or dose modulation rate at the positions of the four corners of the rectangular frame before or after the graphic information is defined, and the fixed size A step of creating drawing data in accordance with a data format in which second dose information indicating a dose amount or a dose modulation rate set in a plurality of mesh regions is continuously defined;
It is provided with.

  According to one aspect of the present invention, it is possible to eliminate the need to define dose amount information for each minute size. Furthermore, drawing data can be created regardless of the dose correction size. Therefore, the data amount can be reduced.

1 is a conceptual diagram illustrating a configuration of a drawing system according to Embodiment 1. FIG. 1 is a conceptual diagram illustrating a configuration of a drawing data conversion apparatus according to Embodiment 1. FIG. 6 is a diagram illustrating an example of a data format with a dose modulation amount in Embodiment 1. FIG. 6 is a diagram showing another example of a data format with a dose modulation amount in the first embodiment. FIG. 6 is a diagram showing another example of a data format with a dose modulation amount in the first embodiment. FIG. It is a figure which shows the evaluation pattern for demonstrating the effect of Embodiment 1. FIG. 6 is a diagram illustrating an example of the number of divisions of an evaluation pattern for explaining the effect of the first embodiment. FIG. It is a figure which shows another example of the division number of the evaluation pattern for demonstrating the effect of Embodiment 1. FIG. 6 is a diagram illustrating the relationship between the number of divisions and the amount of data according to Embodiment 1. FIG. 6 is a conceptual diagram illustrating a configuration of a drawing data conversion apparatus according to Embodiment 2. FIG. FIG. 10 is a diagram for explaining a graphic pattern group and a dose amount defining position in the second embodiment. 10 is a diagram illustrating another example of a data format with a dose modulation amount according to Embodiment 2. FIG. FIG. 10 is a diagram showing an example of grouping of graphic pattern groups in the second embodiment. FIG. 10 is a conceptual diagram illustrating a configuration of a drawing data conversion apparatus according to a third embodiment. 10 is a diagram for describing an example of a dose amount defining position in Embodiment 3. FIG. FIG. 10 is a diagram for explaining another example of the dose amount defining position in the third embodiment. It is a figure which shows an example of the data format of the pattern data of the figure pattern containing the information of a dose modulation amount. It is a figure for demonstrating the data amount of the pattern data in the case of dividing | segmenting into the small figure pattern of required dose modulation amount. It is a figure for demonstrating the data amount of the pattern data in a sample unit in the case of dividing | segmenting into the small figure pattern of required dose modulation amount. FIG. 10 is a diagram showing an example of a graphic pattern in the fourth embodiment. FIG. 10 is a conceptual diagram illustrating a configuration of a drawing data conversion apparatus according to a fourth embodiment. FIG. 16 is a diagram illustrating an example of a graphic pattern having a rotation angle and a data format with a dose modulation amount in the fourth embodiment. FIG. 10 is a conceptual diagram illustrating a configuration of a drawing data conversion apparatus according to a fifth embodiment. FIG. 16 is a diagram for explaining an example of a graphic pattern group, a dose amount definition position, and a data format with a dose modulation amount in the fifth embodiment. FIG. 17 is a conceptual diagram illustrating a configuration of a drawing data conversion apparatus according to a sixth embodiment. FIG. 20 is a diagram for describing an example of cells, graphic pattern groups, and dose amount definition positions in the sixth embodiment. FIG. 25 is a diagram illustrating an example of a data format with a dose modulation amount in the sixth embodiment. FIG. 25 is a diagram for explaining an example of a cell, a graphic pattern group, and a data format with a dose modulation amount in the seventh embodiment.

  Hereinafter, in the embodiment, a configuration using an electron beam will be described as an example of a charged particle beam. However, the charged particle beam is not limited to an electron beam, and a beam using charged particles such as an ion beam may be used.

Embodiment 1 FIG.
FIG. 1 is a conceptual diagram illustrating a configuration of a drawing system according to the first embodiment. In FIG. 1, the drawing system includes a drawing apparatus 100 and a drawing data conversion apparatus 300.

  In FIG. 1, the drawing apparatus 100 includes a drawing unit 150 and a control unit 160. The drawing apparatus 100 is an example of a multi charged particle beam drawing apparatus. The drawing unit 150 includes an electron column 102 and a drawing chamber 103. In the electron column 102, an electron gun 201, an illumination lens 202, a multi-beam shaping plate 203, a blanking plate 204, a reduction lens 205, a limiting aperture member 206, an objective lens 207, and a deflector 208 are arranged. An XY stage 105 is disposed in the drawing chamber 103. On the XY stage 105, a sample 101 such as a mask to be a drawing target substrate at the time of drawing is arranged. The sample 101 includes an exposure mask for manufacturing a semiconductor device, or a semiconductor substrate (silicon wafer) on which the semiconductor device is manufactured. Further, the sample 101 includes mask blanks to which a resist is applied and nothing is drawn yet.

  The control unit 160 includes a control computer 110, a memory 111, a control circuit 120, and storage devices 140 and 142 such as a magnetic disk device. The control computer 110, the memory 111, the control circuit 120, and the storage devices 140 and 142 are connected via a bus (not shown). In the control computer 110, a shot data generation unit 112, an irradiation amount calculation unit 113, and a drawing control unit 114 are arranged. Functions such as the shot data generation unit 112, the dose calculation unit 113, and the drawing control unit 114 may be configured by hardware such as an electric circuit, or may be configured by software such as a program that executes these functions. Good. Alternatively, it may be configured by a combination of hardware and software. Information input / output to / from the shot data generation unit 112, the dose calculation unit 113, and the drawing control unit 114 and information being calculated are stored in the memory 111 each time.

  Storage devices 340 and 342 such as a magnetic disk device are connected to the drawing data conversion device 300 via a bus (not shown).

  Further, the control computer 110 of the drawing apparatus 100 is connected to the drawing data conversion apparatus 300 and the storage devices 340 and 342 via a network (not shown). The storage device 340 stores layout data (CAD data) that is design data. Then, data conversion is performed in the drawing data conversion apparatus 300, and drawing data that can be input to the drawing apparatus 100 is created. The created drawing data is stored in the storage device 342.

  Here, FIG. 1 shows a configuration necessary for explaining the first embodiment. The drawing apparatus 100 may normally have other necessary configurations. Further, the drawing apparatus 100 may be connected to an input device such as a mouse and a keyboard, a monitor device, an external interface circuit, and the like.

  In order to perform drawing processing by the drawing apparatus 100, it is necessary to convert the layout data into drawing data that can be input to the drawing apparatus 100. In the drawing apparatus 100, although not shown in the drawing, generally, a proximity effect due to backscattering having an influence range of about 10 μm, a fogging effect having an influence range of mm order, and a chrome loading effect having an influence range of mm order. A process of correcting the pattern dimension CD for the dimensional variation caused is performed. However, there are cases where a correction residual or the like remains even if the calculated dose amount in the drawing apparatus is used. As a factor of the correction residual, there is a dimensional variation caused by a phenomenon in an influence range smaller than the influence range of about 10 μm. For example, a dimensional variation caused by a phenomenon having an influence range of about 100 nm can be considered. In order to correct a dimensional variation caused by a phenomenon in which the influence range is, for example, about 100 nm, it is necessary to define a dose amount or a dose modulation amount for each mesh size of, for example, 10 nm, which is about 1/10 of the influence range. For this reason, the user sets the dose modulation amount for each minute size before inputting to the drawing apparatus. However, as described above, for example, if the definition is made for each mesh size of 10 nm, the amount of drawing data becomes enormous.

  Here, the change in the dimensional variation due to the above-described phenomenon in the same graphic pattern and in the adjacent graphic pattern group does not change sharply but gradually changes. Therefore, the information on the required dose amount or dose modulation amount (rate) does not change steeply, but may change gradually. Therefore, in the first embodiment, instead of defining the dose amount or dose modulation amount (rate) for each micro size described above, a data format that defines the dose amount or dose modulation amount (rate) at a plurality of representative points is used. Use.

  FIG. 2 is a conceptual diagram showing a configuration of the drawing data conversion apparatus according to the first embodiment. In FIG. 2, a division setting unit 10, a dose amount setting unit 12, a drawing data creation unit 14, a control unit 16, and a memory 18 are arranged in the drawing data conversion apparatus 300. Functions such as the division setting unit 10, the dose amount setting unit 12, the drawing data creation unit 14, and the control unit 16 may be configured by hardware such as an electric circuit, or by software such as a program that executes these functions. It may be configured. Alternatively, it may be configured by a combination of hardware and software. Information input to and output from the division setting unit 10, dose amount setting unit 12, drawing data creation unit 14, and control unit 16 and information being calculated are stored in the memory 18 each time.

  Here, FIG. 2 shows a configuration necessary for explaining the first embodiment. The drawing data conversion apparatus 300 may normally have other necessary configurations. For example, an input device such as a mouse or a keyboard, a monitor device, and an external interface circuit may be connected.

FIG. 3 is a diagram illustrating an example of a data format with a dose modulation amount according to the first embodiment. Here, as shown in FIG. 3B, a rectangular graphic pattern 30 having an x-direction size w and a y-direction size h is defined. In the example of FIG. 3B, the dose amount or the dose modulation rate at each position of the four corners P ₀₀ , P ₁₀ , P ₀₁ , and P ₁₁ of the graphic pattern 30 is defined. Here, the index (00) indicates the lower left corner of the graphic pattern 30 having a rectangular shape. The index (10) indicates the lower right corner of the graphic pattern 30 having a rectangular shape. The index (01) indicates the upper left corner of the graphic pattern 30 having a rectangular shape. The index (11) indicates the upper right corner of the graphic pattern 30 having a rectangular shape. The coordinates of the lower left corner of the graphic pattern 30 are indicated by (x ₀ , y ₀ ).

In the data format shown in FIG. 3A, a 1-byte expression code (code _D0 ) indicating a dose amount or a dose modulation amount (rate), four corners P ₀₀ , P ₁₀ , P ₀₁ , and P ₁₁ , dose amounts (or dose modulation factors) d ₀₀ , d ₁₀ , d ₁₁ , and d ₀₁ at each position are defined. Then, following the dose amount information, a 1-byte graphic type code (code _FIG ) indicating the graphic type, a 3-byte graphic pattern coordinate (X, Y), and a 2-byte size in the x and y directions. (W, H) is defined. The figure type code (code _FIG ) of 1 byte indicating the figure type, the coordinates (X, Y) of each 3-byte figure pattern of the figure pattern, and the sizes (W, H) in the x and y directions of each 2 bytes Indicates the graphic information of the pattern. Representation code (code _D0), and each dose (or dose modulation _{index) d 00, d 10, d} 11, d 01 represents the dose information. The dose amount information may be defined after the graphic information of the graphic pattern. Therefore, in the data format shown in FIG. 3A, one rectangular pattern can be defined as 1 + 2 × 4 + 1 + 3 × 2 + 2 × 2 = 20 bytes.

  As described above, the drawing data conversion apparatus 300 includes the graphic information of the graphic pattern 30 and the dose amount or the dose modulation rate at each corner position of the graphic pattern 30 before or after the graphic information is defined. Drawing data is created in accordance with a data format in which quantity information is continuously defined.

In the drawing apparatus 100, the amount of dose for each required size may be calculated using such drawing data. The dose amount (or dose modulation amount) d (x, y) at the coordinates (x, y) shown in FIG. 3C is calculated by, for example, primary interpolation (bilinear interpolation method) shown in Equation (1). do it. With this calculation, the dose amount at each position (x, y) in the graphic pattern 30 can be calculated.
(1) d (x, y) = (1 / w · h) {d ₀₀ (x ₀ + w−x) (y ₀ + hy)
+ D ₁₀ (x−x ₀ ) (y ₀ + hy)
+ D ₀₁ (x ₀ + w−x) (y−y ₀ )
+ D ₁₁ (x−x ₀ ) (y−y ₀ )}

FIG. 4 is a diagram illustrating another example of a data format with a dose modulation amount according to the first embodiment. Here, as shown in FIG. 4B, in addition to the four corners P ₀₀ , P ₁₀ , P ₀₂ , and P ₁₂ of the same graphic pattern 30 as in FIG. The addition amount P ₀₁ and P ₁₁ define the dose amount (or dose modulation amount (rate)). In the example of FIG. 4B, the dose amount information further includes an intersection of a dividing line that divides the graphic pattern 30 in the y direction at the position of the y-direction coordinate y ₁ (division y coordinate) and the left side of the graphic pattern 30. A dose amount (or dose modulation amount (rate)) at an intersection point P ₁₁ between P ₀₁ , the dividing line, and the right side of the graphic pattern 30 is defined. In the example of FIG. 4B, the case where the graphic pattern 30 is divided in the y direction is shown, but the present invention is not limited to this. The figure pattern 30 may be divided in the x direction. In such a case, the dose amount (or dose modulation amount (rate)) at the intersection of the dividing line dividing the graphic pattern 30 in the x direction and the upper side of the graphic pattern 30 and the intersection of the dividing line and the lower side of the graphic pattern 30. Should be defined. In FIG. 4B, the lower left corner of the graphic pattern 30 whose index (00) is rectangular is shown. The index (10) indicates the lower right corner of the graphic pattern 30 having a rectangular shape. The index (02) indicates the upper left corner of the graphic pattern 30 having a rectangular shape. The index (12) indicates the upper right corner of the graphic pattern 30 having a rectangular shape. The index (01) indicates the intersection of the dividing line that divides the graphic pattern 30 in the y direction and the left side of the graphic pattern 30. The index (11) indicates the intersection of the dividing line that divides the graphic pattern 30 in the y direction and the right side of the graphic pattern 30. The coordinates of the lower left corner of the graphic pattern 30 are indicated by (x ₀ , y ₀ ). As shown in FIG. 4C, the dose amount (or dose modulation amount (rate)) of the coordinates (x, y) to be calculated is the dose amount (or dose modulation amount (or dose modulation amount) around the coordinates (x, y)). It is only necessary to calculate with the formula (1) using the data of the four corners of the rectangular frame surrounded by the latest four points where the rate)) is defined.

In the data format shown in FIG. 4A, a 1-byte expression code (code _DD ) indicating a dose amount (or dose modulation amount (rate)), and a 2-byte division number ndivx of a graphic pattern. The number ndiv of 2 bytes in the y direction of the graphic pattern, 3 bytes of the divided y coordinate y ₁ , four corners P ₀₀ , P ₁₀ , P ₀₁ , P ₁₁ and intermediate additional points P ₀₁ , P ₁₁ A 2-byte dose amount (or dose modulation factor) d ₀₀ , d ₁₀ , d ₀₁ , d ₁₁ , d ₀₂ , and d ₁₂ at each position is defined. Then, following the dose amount information, a 1-byte graphic type code (code _FIG ) indicating the graphic type, a 3-byte graphic pattern coordinate (X, Y), and a 2-byte size in the x and y directions. (W, H) is defined. The figure type code (code _FIG ) of 1 byte indicating the figure type, the coordinates (X, Y) of each 3-byte figure pattern of the figure pattern, and the sizes (W, H) in the x and y directions of each 2 bytes Indicates the graphic information of the pattern. The expression code (code _DD ), the division number ndivx, the division number ndivy, the division height y ₁ , and each dose amount (or dose modulation factor) d ₀₀ , d ₁₀ , d ₀₁ , d ₁₁ , d ₀₂ , d ₁₂ are: Indicates dose information. The dose amount information may be defined after the graphic information of the graphic pattern. Therefore, in the data format with one y-direction division shown in FIG. 4A, one rectangular pattern can be defined as 1 + 2 × 2 + 3 + 2 × 6 + 1 + 3 × 2 + 2 × 2 = 31 bytes.

FIG. 5 is a diagram illustrating another example of a data format with a dose modulation amount according to the first embodiment. Here, as shown in FIG. 5B, in addition to the four corners of the rectangular graphic pattern 30, each dividing line for dividing the graphic pattern 30 in the x and y directions and each side of the graphic pattern 30 are also provided. And the dose amount (or dose modulation amount (rate)) at each intersection point between and the dividing lines. In the example shown in FIG. 5B, the figure pattern 30 is divided m times in the x direction and n times in the y direction. In the example of FIG. 5 (b), with dividing the graphic pattern 30 in the x direction of the coordinate _{x 1} ~ coordinate _{x m} (divided x-coordinate), divided by the y-direction of the coordinate _{y 1} ~ coordinate _{y n} (divided y-coordinate) To do. When the coordinates of the lower left corner of the graphic pattern 30 are (x ₀ , y ₀ ), the x coordinate of each position where the dose amount (or dose modulation amount (rate)) is defined is x in order toward the x direction. ₀ , x ₁ ,..., X _m , x _{m + 1} , and the y coordinate of each position is sequentially y ₀ , y ₁ ,..., Y _n , y _{n + 1 in the} y direction. Therefore, the index is similarly represented by a combination of values in the order of 0, 1,..., M + 1 in the x direction and in the order of 0, 1,.

In the data format shown in FIG. 5A, a 1-byte expression code (code _DD ) indicating a dose amount (or dose modulation amount (rate)), and a 2-byte division number ndivx of a graphic pattern. The number ndivy of 2 bytes of the graphic pattern in the y direction, the divided x coordinates x _{1 to} x _m of each 3 bytes, the divided y coordinates y _{1 to} y _{n of} each 3 bytes, and the four corners of the graphic pattern 30 In addition, the dose amount (or dose modulation amount) at each intersection point between each dividing line dividing the graphic pattern 30 in the x and y directions and each side of the graphic pattern 30 and each intersection point between the dividing lines. (Rate)) d ₀₀ , d ₁₀ , d ₂₀ , d _m0 , d _{(m + 1) 0} ,... D _{0 (n + 1)} , d _{1 (n + 1)} , d _{2 (n + 1)} , d _{m (n + 1)} , d _{(m + 1) (n +} 1) It is defined. Then, following the dose amount information, a 1-byte graphic type code (code _FIG ) indicating the graphic type, a 3-byte graphic pattern coordinate (X, Y), and a 2-byte size in the x and y directions. (W, H) is defined.

The figure type code (code _FIG ) of 1 byte indicating the figure type, the coordinates (X, Y) of each 3-byte figure pattern of the figure pattern, and the sizes (W, H) in the x and y directions of each 2 bytes Indicates the graphic information of the pattern. An expression code (code _DD ), a division number ndivx, a division number ndivy, a division x coordinate x _{1 to} x _m , a division y coordinate y _{1 to} y _n , four corners, each division line, and each side of the graphic pattern 30 Dose amount (or dose modulation amount (rate)) d ₀₀ , d ₁₀ , d ₂₀ , d _m0 , d _{(m + 1) 0} ,... D _{0 ( n + 1)} , d1 _{(n + 1)} , d2 _{(n + 1)} , dm _{(n + 1)} , and d _{(m + 1) (n + 1)} indicate dose amount information. The dose amount information may be defined after the graphic information of the graphic pattern. Therefore, in the data format of m times in the x direction and n times in the y direction shown in FIG. 5A, 1 + 2 × 2 + 3 × (m + n) + 2 × (m + 2) (n + 2) + 1 + 3 × 2 + 2 × for one rectangular pattern. 2 = (24 + 2mn + 7m + 7n) bytes can be defined.

  As described above, the drawing data conversion apparatus 300 uses the graphic pattern 30 as the dose information, in addition to the respective dose amounts (or dose modulation amounts (rates)) at the positions of the corners of the graphic pattern 30. Is a dose amount (or dose modulation amount (rate)) at an intersection of a dividing line that divides X in at least one of the x direction and the y direction and any side of the graphic pattern.

  In the drawing method for drawing data in such a data format, the division setting step, the dose amount setting step, and the drawing data creation step are performed.

As the division setting step, the division setting unit 10 reads CAD data from the storage device 340 and sets the division number ndivx in the x direction and the division number ndivy in the y direction for each graphic pattern. Also, each division coordinate is set. When the number of divisions ndivx = m, coordinates in the x direction x ₁ to coordinates x _m (division x coordinates) are set. Similarly, when the division number ndivy = n, the coordinates y ₁ to the coordinates y _n (division y coordinates) in the y direction are set. When not dividing, the division number ndivx and the division number ndivy in the y direction may be set to zero. Alternatively, when not dividing, the division setting step may be omitted.

As the dose setting process, the dose setting unit 12, for each figure pattern, the x-coordinate _{x 0,} x 1, including the x coordinate _{x 0, x m + 1} of the four corners of the graphic pattern, · · ·, _{x m} , X _{m + 1} and the dose amount (or dose modulation amount) at each position by a combination of the x coordinates y ₀ , y ₁ ,..., Y _n , yn _{+ 1} including the y coordinates y ₀ , y _{n + 1} of the four corners. (Rate)). When not dividing, the dose amount (or dose modulation amount (rate)) at each position of the four corners may be set.

  As the drawing data creation step, the drawing data creation unit 14 is set at each position including the four corners before or after the graphic information of the graphic pattern and the graphic information are defined for each graphic pattern. Pattern data (drawing data) is generated in accordance with a data format in which dose amount information indicating a dose amount (or dose modulation amount (rate)) is continuously defined.

  Then, the control unit 16 outputs drawing data in which the pattern data of each created graphic pattern is collected to the storage device 342 and stores it. As described above, drawing data to be input to the drawing apparatus 100 for drawing a graphic pattern on the sample 101 using the electron beam 200 is created.

  FIG. 6 is a diagram showing an evaluation pattern for explaining the effect of the first embodiment. FIG. 6 shows an array arrangement in which a plurality of squares each having a side of 200 nm are arranged, for example. Further, the graphic patterns are arranged with a gap (space portion) of 200 nm. Here, the center square (A) in the array arrangement shown in FIG. For example, when a dose amount (or dose modulation amount (rate)) is required every 10 nm, the conventional method requires a data amount of 5600 bytes as described above. Further, when creating a dose map separately from the pattern data, it is calculated in a 400 nm × 400 nm region for one pitch of the square (A), and (400/10) × (400/10) × (10/8). ) = 2000 bytes of data is required. On the other hand, in the first embodiment, the following data amount can be suppressed.

  FIG. 7 is a diagram illustrating an example of the number of divisions of the evaluation pattern for explaining the effect of the first embodiment. FIG. 7 shows a case where the position defining the dose amount (or the dose modulation amount (rate)) is divided into two in the x direction and two in the y direction. Therefore, the pattern data of the graphic pattern 30 defines the dose amount (or dose modulation amount (rate)) at 12 positions in addition to the corners of the four corners. Therefore, if pattern data is created in accordance with such a data format, the data amount can be reduced to a total of 60 bytes, 11 bytes for graphic information and 49 bytes for dose information.

  FIG. 8 is a diagram showing another example of the number of divisions of the evaluation pattern for explaining the effect of the first embodiment. FIG. 7 shows a case of dividing into 5 parts in the x direction and 5 parts in the y direction in order to set the position that defines the dose amount (or dose modulation amount (rate)). Therefore, the pattern data of the graphic pattern 30 defines the dose amount (or dose modulation amount (rate)) at 45 points in addition to the four corners. Therefore, when pattern data is created in accordance with such a data format, it is possible to reduce the data amount to 144 bytes in total, that is, 11 bytes for graphic information and 133 bytes for dose information.

  FIG. 9 is a diagram illustrating the relationship between the number of divisions and the data amount according to the first embodiment. As shown in FIG. 9, in order to set a position for defining a dose amount (or dose modulation amount (rate)), pattern data of one figure pattern is divided into two parts in the x direction and two parts in the y direction. Can be reduced to a data amount of 60 bytes. When the data is divided into three in the x direction and three in the y direction, the pattern data of one graphic pattern can be suppressed to a data amount of 84 bytes. In the case of four divisions in the x direction and four divisions in the y direction, the pattern data of one graphic pattern can be suppressed to a data amount of 112 bytes. When the data is divided into 5 parts in the x direction and 5 parts in the y direction, the pattern data of one graphic pattern can be suppressed to a data amount of 144 bytes.

  As described above, according to the first embodiment, the amount of pattern data (drawing data) can be significantly reduced.

  Next, the drawing apparatus 100 inputs (transfers) the drawing data from the storage device 342 and stores it in the storage device 140. Then, a drawing process is performed in the drawing apparatus 100.

  As a shot data generation step, the shot data generation unit 112 reads drawing data from the storage device 140 and generates device-specific shot data. The shot data generation unit 112 reads the drawing data from the storage device 140, and for each pixel area of a plurality of pixel areas (mesh areas) in which the drawing area of the sample 101 or the chip area to be drawn is virtually divided into a mesh shape. The area density of the pattern arranged inside is calculated. For example, first, the drawing area of the sample 101 or the chip area to be drawn is divided into striped areas on a strip with a predetermined width. Each stripe region is virtually divided into the plurality of pixel regions described above. The size of the pixel region is preferably, for example, a beam size or smaller. For example, a size of about 10 nm is preferable. For example, corresponding drawing data is read from the storage device 140 for each stripe region, and a plurality of graphic patterns defined in the drawing data are assigned to pixels. Then, the area density of the graphic pattern arranged for each pixel may be calculated.

As the dose calculation step, first, the dose calculation unit 113 uses the dose amount information defined in the drawing data and uses the dose amount (or dose modulation amount (rate)) d at a desired position (x, y). Calculate (x, y). The calculation method of the dose amount (or dose modulation amount (rate)) d (x, y) may be obtained by, for example, calculation of linear interpolation similar to the equation (1). However, the coordinates (x ₀ , y ₀ ) in the equation (1) are the four nearest points where the dose amount (or dose modulation amount (rate)) around the coordinate (x, y) to be calculated is defined. The coordinates of the lower left corner of the surrounding rectangular frame are used. In addition, the width dimension w of the rectangular frame surrounded by the four nearest points is used as the width dimension w in the equation (1). Moreover, the height dimension h in Formula (1) uses the height dimension of the rectangular frame enclosed by these four nearest points. Also, the dose amount (or dose modulation amount (rate)) d ₀₀ in the equation (1) is the dose amount (or dose modulation amount (rate)) at the position of the lower left corner of the rectangular frame surrounded by the four nearest points. ) Is used. Also, the dose in the formula (1) (or dose modulation amount (rate)) d ₁₀ is the dose at the position of the lower right corner of the rectangular frame surrounding in such last four (or dose modulation amount (rate )). Further, the dose amount (or dose modulation amount (rate)) d ₀₁ in the equation (1) is the dose amount (or dose modulation amount (rate)) at the position of the upper left corner of the rectangular frame surrounded by the four nearest points. ) Is used. Also, the dose in the formula (1) (or dose modulation amount (rate)) d ₁₁ is the dose at the position of the upper right corner of the rectangular frame surrounding in such last four (or dose modulation amount (percentage) ) Is used.

  Here, as an example, the dose amount (or dose modulation amount (rate)) d (x, y) is obtained by primary interpolation, but the present invention is not limited to this. The dose amount (or dose modulation amount (rate)) at each defined point may be approximated by a predetermined polynomial. For example, it may be approximated by a second or higher order polynomial. Then, the dose (or dose modulation amount (rate)) d (x, y) at a desired position (x, y) may be calculated from the obtained approximate expression.

  The dose calculation unit 113 calculates the dose D (x, y) at each pixel position (x, y) using the obtained d (x, y). The dose D (x, y) can be calculated by multiplying the reference dose Dbase by the dose (or dose modulation amount (rate)) d (x, y) and the area density. When the proximity effect correction is not considered in the dose amount (dose modulation amount) defined in the drawing data, it is preferable to further multiply the proximity effect correction irradiation coefficient for correcting the proximity effect. Alternatively, it is also preferable to multiply by a correction coefficient such as a fogging effect correction irradiation coefficient for correcting the fogging effect or a loading effect correction irradiation coefficient for correcting the loading effect. The correction calculation for each phenomenon such as the proximity effect correction may be performed by a method similar to the conventional method.

  As a drawing process, the drawing control unit 114 outputs a control signal to the control circuit 120 so as to perform a drawing process. The control circuit 120 inputs data of each corrected dose for each pixel, and controls the drawing unit 150 according to the control signal from the drawing control unit 114. The drawing unit 150 uses the multi-beam 20 to sample the graphic pattern. Draw at 100. Specifically, it operates as follows.

The electron beam 200 emitted from the electron gun 201 (emission part) illuminates the entire multi-beam shaping plate 203 almost vertically by the illumination lens 202. In the multi-beam forming plate 203, holes (openings) of vertical (y direction) m rows × horizontal (x direction) n rows (m, n ≧ 2) are formed in a matrix at a predetermined arrangement pitch. For example, 512 × 8 rows of holes are formed. Each hole is formed of a rectangle having the same size and shape. Alternatively, it may be a circle having the same outer diameter. The electron beam 200 illuminates a region that includes all of the plurality of holes. Each part of the electron beam 200 irradiated to the positions of the plurality of holes passes through the plurality of holes of the multi-beam shaping plate 203, for example, a plurality of rectangular electron beams (multi-beams) 20a to 20e. Is formed. The multi-beams 20a to 20e pass through the corresponding blankers of the blanking plate 204, respectively. In the blanking plate 204, passage holes (openings) for passing the beams of the multi-beams are opened at positions corresponding to the holes of the multi-beam shaping plate 203. Two pairs of electrodes (blankers) forming a pair for blanking deflection are arranged in the vicinity of each passing hole with the corresponding passing hole interposed therebetween. That is, a plurality of blankers according to the number of beams is arranged. Each of these blankers deflects the electron beam 20 that individually passes (performs blanking deflection).
The multi-beams 20 a to 20 e that have passed through the blanking plate 204 are reduced by the reduction lens 205 and travel toward a central hole formed in the limiting aperture member 206. Here, the position of the electron beam 20 deflected by the corresponding blanker of the blanking plate 204 is shifted from the hole at the center of the limiting aperture member 206 (blanking aperture member) and is blocked by the limiting aperture member 206. On the other hand, the electron beam 20 that has not been deflected by the corresponding blanker of the blanking plate 204 passes through the center hole of the limiting aperture member 206 as shown in FIG. Blanking control is performed by ON / OFF of the individual blanking mechanism, and ON / OFF of the beam is controlled. As described above, the limiting aperture member 206 blocks each beam deflected so as to be in the beam OFF state by the individual blanking mechanism. A beam of one shot is formed by the beam that has passed through the limiting aperture member 206 formed from when the beam is turned on to when the beam is turned off. The multi-beam 20 that has passed through the limiting aperture member 206 is focused by the objective lens 207 to form a pattern image with a desired reduction ratio, and each beam that has passed through the limiting aperture member 206 (the entire multi-beam 20) is deflected by the deflector 208. The beams are deflected together in the same direction, and irradiated to the respective irradiation positions on the sample 101 of each beam. For example, when the XY stage 105 is continuously moving, the beam irradiation position is controlled by the deflector 208 so as to follow the movement of the XY stage 105. The multi-beams 20 irradiated at a time are ideally arranged at a pitch obtained by multiplying the arrangement pitch of the plurality of holes of the multi-beam shaping plate 203 by the desired reduction ratio described above. The drawing apparatus 100 performs a drawing operation by continuously irradiating shot beams in order, and when drawing a desired pattern, a necessary beam is controlled to be turned on by blanking control according to the pattern.

  As described above, according to the first embodiment, it is possible to eliminate the need to define dose amount information for each minute size. Furthermore, drawing data can be created regardless of the dose correction size. Therefore, the data amount can be reduced. Also, since a map of dose (or dose modulation amount (rate)) is created at a location where a figure exists, it is not necessary to create an area without a figure as in the conventional dose amount map. Data volume can be reduced. Further, since the position of the dividing line can be set variably, it is easy to create a lattice having a variable mesh size. Therefore, it becomes easier to create a more compressed dose amount (or dose modulation amount (rate)) map.

Embodiment 2. FIG.
In the first embodiment, a data format in which a dose amount (or a dose modulation amount (rate)) is defined at a position such as a corner of the graphic pattern for one graphic pattern is shown. In other words, the data format is shown in which the shape of each graphic pattern itself is used in the dose amount (or dose modulation amount (rate)) map. However, it is not limited to this. In the second embodiment, a data format in which a dose amount (or dose modulation amount (rate)) is defined for each group with at least one graphic pattern as a group will be described. In the second embodiment, the configuration of the drawing apparatus 100 is the same as that in FIG. The contents other than the points described below are the same as those in the first embodiment.

  FIG. 10 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the second embodiment. 10 is the same as FIG. 2 except that a group processing unit 19 and a rectangular frame setting unit 20 are further added to the drawing data conversion apparatus 300. Functions such as the division setting unit 10, the dose amount setting unit 12, the drawing data creation unit 14, the control unit 16, the group processing unit 19, and the rectangular frame setting unit 20 may be configured by hardware such as an electric circuit. You may comprise with software, such as a program which performs these functions. Alternatively, it may be configured by a combination of hardware and software. Information input / output to / from the division setting unit 10, dose amount setting unit 12, drawing data creation unit 14, control unit 16, group processing unit 19, and rectangular frame setting unit 20 and information being calculated are stored in the memory 18 each time. Is done.

  Here, FIG. 10 shows a configuration necessary for explaining the second embodiment. The drawing data conversion apparatus 300 may normally have other necessary configurations. For example, an input device such as a mouse and a keyboard, a monitor device, an external interface circuit, and the like may be connected as in the first embodiment.

  FIG. 11 is a diagram for explaining a graphic pattern group and a dose amount defining position in the second embodiment. FIGS. 11A to 11F each show an example of a continuous graphic pattern group. Here, graphic pattern groups each having a continuous rectangular pattern are shown. In the second embodiment, a dose amount (or dose modulation amount (rate)) map is created for each group, with the continuous graphic pattern group as one group.

  As the group processing step, the group processing unit 19 reads out CAD data in which graphic information of a plurality of graphic patterns is defined from the storage device 340, and at least for each graphic pattern group in which the plurality of graphic patterns defined in the CAD data are continuous. Group into one group. If there is only one continuous graphic pattern group, one group is created. If a plurality of continuous graphic pattern groups are defined, a plurality of groups may be created. For example, a group of continuous graphic patterns shown in FIG. 11C are grouped as one group. 11A to 11F, the remaining continuous graphic pattern groups may be grouped.

As the rectangular frame setting step, the rectangular frame setting unit 20 sets a rectangular frame surrounding the group of graphic patterns for each group. As the rectangular frame, for example, a circumscribed rectangle of a graphic pattern group is preferably used. However, the present invention is not limited to this, and the rectangular frame 40 may be a frame slightly larger than the circumscribed rectangle as shown in FIG. For example, when setting the dividing line mentioned later according to a predetermined grid, you may set the rectangular frame 40 itself according to this grid. In the second embodiment, the rectangular frame 40 is used as a dose amount (or dose modulation amount (rate)) map. As shown in FIG. 11G, the rectangular frame setting unit 20 defines the x-direction size of the rectangular frame 40 (map) as Wm and the y-direction size as hm. In addition, the rectangular frame setting unit 20 determines the reference position of the rectangular frame 40 (map) from the reference position (for example, the lower left corner) of the first (for example, the left end) graphic pattern in the group of graphic patterns of the group surrounded by the rectangular frame 40. An offset amount (x _off , y _off ) up to (for example, the lower left corner) is defined. Therefore, the pattern data (drawing data) of the graphic pattern group with the rectangular frame 40 shown in FIG. 11G is the graphic information of the graphic pattern group and the dose amount (or dose modulation amount (rate)) map of the rectangular frame 40. The dose amount information of 32 is defined.

As the division setting step, the division setting unit 10 sets the division number ndivx in the x direction and the division number ndiv in the y direction of the rectangular frame 40 for each group. Also, each division coordinate is set. When the number of divisions ndivx = m, coordinates in the x direction x ₁ to coordinates x _m (division x coordinates) are set. Similarly, when the division number ndivy = n, the coordinates y ₁ to the coordinates y _n (division y coordinates) in the y direction are set. When not dividing, the division number ndivx and the division number ndivy in the y direction may be set to zero. Alternatively, when not dividing, the division setting step may be omitted. The method of division may be the same as the content described with reference to FIGS. At this time, the graphic pattern may be read as the rectangular frame 40.

As the dose setting process, the dose setting unit 12, for each group, x-coordinate _{x 0,} x 1, including the x coordinate _{x 0, x m + 1} of the four corners of the rectangular frame 40, · · ·, _{x m} , X _{m + 1} and the dose amount (or dose modulation amount) at each position by a combination of the x coordinates y ₀ , y ₁ ,..., Y _n , yn _{+ 1} including the y coordinates y ₀ , y _{n + 1} of the four corners. (Rate)). When not dividing, the dose amount (or dose modulation amount (rate)) at each position of the four corners may be set.

FIG. 12 is a diagram illustrating another example of a data format with a dose modulation amount according to the second embodiment. Here, in addition to the four corners of the rectangular frame 40, each intersection of each dividing line that divides the rectangular frame 40 in the x and y directions and each side of the rectangular frame 40, and each intersection of the dividing lines. The dose amount (or dose modulation amount (rate)) is defined. In the example of FIG. 12, the rectangular frame 40 is divided m times in the x direction and n times in the y direction. In the example of FIG. 12, the rectangular frame 40 is divided by coordinates x ₁ to coordinates x _m (division x coordinates) in the x direction, and is divided by coordinates y ₁ to coordinates y _n (division y coordinates) in the y direction. When the coordinates of the lower left corner of the rectangular frame 40 are (x ₀ , y ₀ ), the x coordinate of each position where the dose amount (or dose modulation amount (rate)) is defined is x in order toward the x direction. ₀ , x ₁ ,..., X _m , x _{m + 1} , and the y coordinate of each position is sequentially y ₀ , y ₁ ,..., Y _n , y _{n + 1 in the} y direction. Therefore, the index is similarly represented by a combination of values in the order of 0, 1,..., M + 1 in the x direction and in the order of 0, 1,.

  As the drawing data creation process, the drawing data creation unit 14 determines, for each group, the graphic information of the graphic pattern group constituting the group and the positions of the four corners of the rectangular frame 40 before or after the graphic information is defined. Pattern data (drawing data) is created in accordance with a data format in which dose amount information indicating the set dose amount (or dose modulation amount (rate)) is continuously defined. The created pattern data (drawing data) is output to the storage device 342 and stored.

In the data format shown in FIG. 12, a 1-byte expression code (code _DD2 ) indicating a dose amount (or dose modulation amount (rate)), a 2-byte division number ndivx of the rectangular frame 40, a rectangle The division number ndivy of 2 bytes of the frame 40 in the y direction, the offset amount (x _off , y _off ) of each 3 bytes, the size of the rectangular frame 40 of each 2 bytes in the x and y directions (Wm, hm), 3 each In addition to the divided x-coordinates x _{1 to} x _m of bytes, the divided y-coordinates y _{1 to} y _{n of} 3 bytes each, and the four corners of the rectangular frame 40, each rectangular frame 40 is further divided in the x and y directions. Dose amounts (or dose modulation amounts (rates)) d ₀₀ , d ₁₀ , d ₂₀ , d _m0 , d at the respective intersections between the dividing line and each side of the rectangular frame 40 and at the respective intersections between the dividing lines. _{(M + 1) 0} , ... d0 _{(n +1)} , d1 _{(n + 1)} , d2 _{(n + 1)} , dm _{(n + 1)} , d _{(m + 1) (n + 1)} are defined. Then, following the dose amount information, a 1-byte expression code (code _NR ) indicating normal expression that simply repeats each graphic information, a 1-byte graphic type code (code _FIG ) indicating a graphic type, and a 2-byte graphic pattern group , The coordinates (X, Y) of each 3-byte graphic pattern repeated in order for the graphic patterns 1 to N constituting the graphic pattern group, and the sizes (W, H) in the x and y directions of each 2 bytes are defined. The

1-byte expression code (code _NR ), 1-byte graphic type code (code _FIG ) indicating the graphic type, 2-byte graphic pattern group number, and graphic patterns 1 to N constituting the graphic pattern group are sequentially repeated. The coordinates (X, Y) of the 3-byte graphic pattern and the sizes (W, H) in the x and y directions of each 2 bytes indicate graphic information of the graphic pattern group. Representation code (code _DD), the division number Ndivx, division number Ndivy, offset _{(x off, y off),} x of the rectangular frame 40, the size in the y direction (Wm, hm), split x coordinate _x 1 _~x m, The divided y coordinates y _{1 to} y _n , the four corners, the respective intersection points of each dividing line and each side of the graphic pattern 30, and the dose amount (or the dose modulation amount (rate) at each position of each intersection point of the dividing lines. )) D ₀₀ , d ₁₀ , d ₂₀ , d _m0 , d _{(m + 1) 0} ,... D _{0 (n + 1)} , d _{1 (n + 1)} , d _{2 (n + 1)} , d _{m (n + 1)} , d _{(m + 1) ) (N + 1)} indicates dose amount information. The dose amount information may be defined after the graphic information of the graphic pattern. Therefore, in the data format of x-direction division m times and y-direction division n times shown in FIG. 12, 1 + 2 × 2 + 3 × 2 + 2 × 2 + 3 × (m + n) for one rectangular pattern (group: figure pattern group connected continuously) + 2 × (m + 2) (n + 2) + 1 + 1 + 2 + N · (3 × 2 + 2 × 2) = (27 + 2mn + 7m + 7n + 10N) bytes.

  As described above, the drawing data conversion apparatus 300 further includes the rectangular frame 40 as the dose amount information in addition to the respective dose amounts (or dose modulation amounts (rates)) at the respective corners of the rectangular frame 40. Is a dose amount (or dose modulation amount (rate)) at an intersection of a dividing line that divides X in at least one of the x direction and the y direction and either side of the rectangular frame 40.

  FIG. 13 is a diagram showing an example of grouping of graphic pattern groups in the second embodiment. In the example described above, the case where one group is formed by the entire continuous graphic pattern group is shown, but the present invention is not limited to this. As shown in FIG. 13, continuous graphic pattern groups may be set in a plurality of groups. In the example of FIG. 13, the case where the continuous graphic pattern group is divided into groups 1 to 4 is shown. The grouping should be set so that the rectangular frame does not become too large. In the example of FIG. 13, the graphic pattern group is divided at a position where the connecting direction changes by 90 degrees (between groups 1 and 2). For example, the graphic pattern group is divided at a position where the width size greatly changes (between groups 2, 3 and 4).

  In the example described above, one group is configured by a plurality of continuous graphic patterns (graphic pattern group), but the present invention is not limited to this. One group may be constituted by one graphic pattern. When such one figure pattern is rectangular, it is assumed that the rectangular frame and the figure pattern have the same shape. However, when such one figure pattern is not rectangular, for example, a triangle, a trapezoid, and the like. In the case of the figure or the like, it may be easier to create a dose amount (or dose modulation amount (rate)) map when the rectangular frame 40 is set. In such a case, it is particularly preferable to form one group with one graphic pattern.

  Therefore, as the above-described group processing step, the group processing unit 19 reads out CAD data in which graphic information of at least one graphic pattern is defined from the storage device 340, and at least one graphic pattern defined in the CAD data is read out. What is necessary is just to group into one group. Similarly, as the rectangular frame setting step, the rectangular frame setting unit 20 may input graphic information of at least one graphic pattern and set a rectangular frame surrounding at least one graphic pattern. Similarly, as the drawing data creation process, the drawing data creation unit 14 is set at the positions of the four corners of the rectangular frame before or after the graphic information of at least one graphic pattern and the graphic information are defined. Drawing data may be created in accordance with a data format in which dose information indicating dose amount or dose modulation rate is continuously defined.

  As described above, in the second embodiment, a rectangular frame 40 is set for each group including at least one graphic pattern, and corners such as four corners, intersections between dividing lines and sides, and dividing lines are set for the rectangular frame. Create a data format that defines the dose information at the intersection of each other. Then, the drawing apparatus 100 inputs the created drawing data. In the drawing apparatus 100, information on a plurality of points defined using the rectangular frame 40 is converted into dose amounts (or dose modulation amounts (rates) at desired positions other than the plurality of points by, for example, linear interpolation. )). The calculation method may be the same as in the first embodiment.

  As described above, according to the second embodiment, dose amount information can be defined for each group composed of at least one graphic pattern. Therefore, it is possible to eliminate the need to define dose amount information for each minute size. Furthermore, drawing data can be created regardless of the dose correction size. Therefore, the data amount can be reduced. Furthermore, according to the second embodiment, the graphic information and the dose information of a plurality of graphic patterns are defined together, so that the data amount can be further reduced. Further, it is not necessary to create an area without a graphic unlike the conventional dose amount map, and the data amount can be reduced from this point. In addition, since a dose amount map (or dose modulation amount (rate)) map is created for each neighborhood of a figure group, it is not necessary to create an area without a figure as in the conventional dose amount map. Data volume can be reduced. Further, since the position of the dividing line can be set variably, it is easy to create a lattice having a variable mesh size. Therefore, it becomes easier to create a more compressed dose amount (or dose modulation amount (rate)) map.

Embodiment 3 FIG.
In the first and second embodiments, the dose amount (or dose modulation amount) at a desired position using the dose amount (or dose modulation amount (rate)) of a plurality of points defined using a graphic pattern or a rectangular frame. Explained the data format that allows (rate) to be calculated. However, the present invention is not limited to this. In the third embodiment, in addition to the map in which, for example, the data for primary interpolation described in the first and second embodiments is defined, a plurality of mesh areas having a fixed size are set, and the dose amount (or A configuration that defines a dose modulation amount (rate) will be described. In the third embodiment, the configuration of the drawing apparatus 100 is the same as that in FIG. The contents other than the points described below are the same as those in the first or second embodiment.

  FIG. 14 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the third embodiment. 14 is the same as FIG. 10 except that a fixed size mesh setting unit 22 and a dose amount setting unit 13 are further added to the drawing data conversion apparatus 300. Functions such as the division setting unit 10, the dose amount setting unit 12, the dose amount setting unit 13, the drawing data creating unit 14, the control unit 16, the group processing unit 19, the rectangular frame setting unit 20, and the fixed size mesh setting unit 22 It may be configured by hardware such as a circuit, or may be configured by software such as a program that executes these functions. Alternatively, it may be configured by a combination of hardware and software. Input / output to the division setting unit 10, the dose amount setting unit 12, the dose amount setting unit 13, the drawing data creation unit 14, the control unit 16, the group processing unit 19, the rectangular frame setting unit 20, and the fixed size mesh setting unit 22. Information and information being calculated are stored in the memory 18 each time.

  Here, FIG. 14 shows a configuration necessary for describing the third embodiment. The drawing data conversion apparatus 300 may normally have other necessary configurations. For example, an input device such as a mouse or a keyboard, a monitor device, an external interface circuit, and the like may be connected as in the first and second embodiments.

  The contents of each process from the group processing process to the rectangular frame setting process are the same as those in the second embodiment. When the shape of the graphic pattern is used as it is for each graphic pattern without using the rectangular frame, each process from the group processing step to the rectangular frame setting step may not be performed as in the first embodiment.

  As a fixed size mesh setting step, the fixed size mesh setting unit 22 sets a plurality of mesh regions 44 having a fixed size in a region outside the rectangular frame 40 (or one graphic pattern 30).

  FIG. 15 is a diagram for explaining an example of a dose amount defining position in the third embodiment. FIG. 15 shows a portion of a rectangular frame 40 (or one graphic pattern 30) surrounding a group of graphic patterns constituting one group divided by a dividing line, and the outside of the rectangular frame 40 (or one graphic pattern 30). An example of a plurality of mesh regions 44 having a fixed size in the region is shown. A dose amount (or dose modulation amount (rate)) map is created by the rectangular frame 40 (or one graphic pattern 30) and a plurality of mesh regions 44.

As the division setting step, the division setting unit 10 sets the division number ndivx in the x direction and the division number ndivy in the y direction of the rectangular frame 40 (or one graphic pattern 30) for each group (or each graphic pattern). . Also, each division coordinate is set. When the number of divisions ndivx = m, coordinates in the x direction x ₁ to coordinates x _m (division x coordinates) are set. Similarly, when the division number ndivy = n, the coordinates y ₁ to the coordinates y _n (division y coordinates) in the y direction are set. When not dividing, the division number ndivx and the division number ndivy in the y direction may be set to zero. Alternatively, when not dividing, the division setting step may be omitted. The method of division may be the same as the content described with reference to FIGS. At this time, the graphic pattern may be read as the rectangular frame 40.

As the dose amount setting (1) step, the dose amount setting unit 12 is configured to set the x coordinates x ₀ , x of the four corners of the rectangular frame 40 (or the graphic pattern 30) for each group (or for each graphic pattern). x-coordinate _{x 0,} x 1 comprising _{m + 1, ···, x m} , x m + 1 and, x coordinate _y 0 containing y-coordinate _{y 0, y n + 1} of the four _{corners, y 1, ···,} y _n , Yn _{+ 1} , a dose amount (or dose modulation amount (rate)) at each position is set. When not dividing, the dose amount (or dose modulation amount (rate)) at each position of the four corners may be set.

  As a dose amount setting (2) step, the dose amount setting unit 13 sets a dose amount (or dose modulation amount (rate)) for each mesh region 44 having a fixed size. For example, if a calculation such as linear interpolation is performed using data of a plurality of points set in the rectangular frame 40 (or the graphic pattern 30), it is difficult to cope with a local dose change. In such a case, a local dose amount (or dose modulation amount (rate)) applied to the fixed-size mesh region 44 may be set.

  As the drawing data creation process, the drawing data creation unit 14 defines, for each group (or each graphic pattern), graphic information (or graphic information of the graphic pattern) of the graphic pattern group constituting the group and graphic information. Before or after exposure, dose amount information (first dose amount) indicating set dose amounts (or dose modulation amounts (rates)) at the positions of the four corners of the rectangular frame 40 (or the graphic pattern 30). Pattern data (drawing data) is created in accordance with a data format in which information) is continuously defined. In this data format, in addition to the dose amount information of a plurality of points using the rectangular frame 40 (or the graphic pattern 30), the dose amount (or dose) for each fixed-size mesh region 44 is continuously added. Dose amount information (second dose amount information) indicating modulation amount (rate)) is defined. The created pattern data (drawing data) is output to the storage device 342 and stored.

  Here, in the above-described example, the case where a plurality of mesh regions 44 are set in the rectangular frame 40 surrounding the graphic pattern group constituting the group or the region outside the graphic pattern 30 has been described, but the present invention is not limited to this.

  FIG. 16 is a diagram for explaining another example of the dose amount defining position in the third embodiment. In FIG. 16, a rectangular frame 41 is set in a part of the graphic pattern 33. Then, a plurality of mesh regions 44 having a fixed size are set in the region including the remaining part of the graphic pattern 33. And about the rectangular frame 41, it divides | segments with the dividing line mentioned above, and dose amount (or dose modulation amount (rate)) is set at the corners of the four corners of the rectangular frame, the intersection of the dividing line and the side, and the intersection of the dividing lines. ) Should be set. It is preferable that a dose amount (or dose modulation amount (rate)) map for the graphic pattern 33 is created by the rectangular frame 40 and the plurality of mesh regions 44. In the example of FIG. 16, one graphic pattern 33 is divided into a rectangular frame portion and a fixed size mesh portion. However, a group composed of a plurality of graphic patterns may be divided into a rectangular frame portion and a fixed size mesh portion. .

  As described above, according to the third embodiment, a local dose amount (or dose modulation amount (rate)) that cannot be obtained by function calculation such as linear interpolation can be defined. The amount of data can be reduced compared to the case of creating a map only with a fixed size mesh area. For example, it is possible to eliminate the need to define dose information for each minute size for a region sufficient for function calculation such as linear interpolation.

  Then, the drawing apparatus 100 inputs the created drawing data. In the drawing apparatus 100, information on a plurality of points defined using the rectangular frame 40 is converted into dose amounts (or dose modulation amounts (rates) at desired positions other than the plurality of points by, for example, linear interpolation. )). The calculation method may be the same as in the first embodiment. If the desired position corresponds to the fixed size mesh region 44, the dose amount (or dose modulation amount (rate)) defined in the fixed size mesh region 44 may be used.

  In multi-beam drawing, it is necessary to obtain a dose amount (or dose modulation amount (rate)) for each pixel. In order to correct a dimensional variation caused by a phenomenon in an influence range smaller than the influence range of about 10 μm, It is necessary to define the dose amount for each fine size. On the other hand, by using the first to third embodiments, a dose amount (or dose modulation amount (rate)) is defined for each fine size or each pixel at the stage of drawing data input by the multi-beam drawing apparatus. The need to do this can be eliminated. As described above, the dose amount (or dose modulation amount (rate)) defined at the corners of the four corners of the rectangular frame (or graphic pattern), the intersection of the dividing line and the side, and the intersection of the dividing lines is used. Thus, the dose amount (or dose modulation amount (rate)) of the desired pixel region may be calculated by primary interpolation or the like in the multi-beam drawing apparatus. Thus, the amount of data can be reduced as the drawing data for multi-beam drawing.

Embodiment 4 FIG.
In the first embodiment described above, a case has been described in which division positions and the like are set along the coordinate axis directions of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions, but the present invention is not limited to this. . In the fourth embodiment, a graphic pattern or the like that is not parallel to the coordinate axis direction of the orthogonal coordinate system will be described. Hereinafter, the contents other than those specifically described are the same as those of the first embodiment.

  FIG. 20 is a diagram illustrating an example of a graphic pattern in the fourth embodiment. In FIG. 20, for example, a pattern used for a memory may use a graphic pattern rotated with respect to the coordinate axis direction of the orthogonal coordinate system in the x and y directions. With such a two-dimensional dose amount map along the coordinate axis direction of the orthogonal coordinate system in the x and y directions described above, it may be difficult to optimally compress data by primary interpolation. In the fourth embodiment, a format that can be defined for drawing data of a graphic pattern rotated at a rotation angle θ as shown in FIG. 20 will be described.

  FIG. 21 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the fourth embodiment. In FIG. 21, a rotation angle setting unit 11 is further arranged in the drawing data conversion apparatus 300. Functions such as the rotation angle setting unit 11, the division setting unit 10, the dose amount setting unit 12, the drawing data creation unit 14, and the control unit 16 may be configured by hardware such as an electric circuit, or execute these functions. It may be configured by software such as a program to be executed. Alternatively, it may be configured by a combination of hardware and software. Information input / output to / from the rotation angle setting unit 11, division setting unit 10, dose amount setting unit 12, drawing data creation unit 14, and control unit 16 and information being calculated are stored in the memory 18 each time.

  Here, FIG. 21 shows a configuration necessary for explaining the fourth embodiment. The drawing data conversion apparatus 300 may normally have other necessary configurations. For example, an input device such as a mouse and a keyboard, a monitor device, an external interface circuit, and the like may be connected as in the first embodiment.

FIG. 22 is a diagram illustrating an example of a graphic pattern having a rotation angle and a data format with a dose modulation amount according to the fourth embodiment. In the example of FIG. 22A, a rectangular figure pattern 30 is shown rotated by an angle θ counterclockwise with respect to the x direction. Here, as in FIG. 5B, as shown in FIG. 22C, a rectangular figure with respect to the x ′, y ′ coordinate system obtained by rotating the x, y coordinate system counterclockwise by an angle θ. In addition to the four corners of the pattern 30, each of the dividing lines that divide the graphic pattern 30 in the x ′ and y ′ directions and each side of the graphic pattern 30, and the respective intersections of the dividing lines. A dose amount (or dose modulation amount (rate)) is defined. In the example of FIG. 22C, the figure pattern 30 is divided m times in the x ′ direction and n times in the y ′ direction. In the example of FIG. 22C, the graphic pattern 30 is divided by coordinates x ₁ to coordinates x _m (division x coordinates) in the x ′ direction, and coordinates y ₁ to coordinates y _n (division y coordinates) in the y ′ direction. Divide by. When the coordinates of the lower left corner of the graphic pattern 30 are (x ₀ , y ₀ ), the x coordinate of each position where the dose amount (or dose modulation amount (rate)) is defined is sequentially directed toward the x ′ direction. x ₀ , x ₁ ,..., x _m , x _{m + 1} , and the y coordinate of each position becomes y ₀ , y ₁ ,..., y _n , y _{n + 1 in} order in the y ′ direction. Therefore, the index is similarly represented by a combination of values in the order of 0, 1,..., M + 1 in the x ′ direction and in the order of 0, 1,. It is.

In the data format shown in FIG. 22B, a 1-byte expression code (code _rot ) indicating a rotation angle, a 4-byte rotation angle θ of a graphic pattern, and a dose amount (or a dose modulation amount (rate)). A 1-byte expression code (code _DD ) indicating that there is a number, a division number ndivx of 2 bytes of the graphic pattern in the x ′ direction, a division number ndivy of 2 bytes of the graphic pattern in the y ′ direction, and a division x of 3 bytes each In addition to the coordinates x _{1 to} x _m , each 3-byte divided y coordinate y _{1 to} y _n , and the four corners of the graphic pattern 30, each dividing line that further divides the graphic pattern 30 in the x ′ and y ′ directions Dose amount (or dose modulation amount (rate)) d ₀₀ , d ₁₀ , d ₂₀ , d _m0 , d _{(m + 1} ) at each position of each intersection of the pattern pattern 30 and each side of the graphic pattern 30 and each intersection of the dividing lines. _{) 0} ,..., D _{0 (n + 1)} , d _{1 (n + 1)} , d _{2 (n + 1)} , dm _{(n + 1)} , d _{(m + 1) (n + 1)} are defined. Subsequently to the dose amount information, a 1-byte graphic type code (code _FIG ) indicating a graphic type, coordinates (X, Y) of each 3-byte graphic pattern of the graphic pattern, and x ′ and y ′ directions of 2 bytes each Size (W, H) is defined. The actual coordinate values are not defined in the x ′, y ′ coordinate system, but in the x, y coordinate system that is not rotated by the angle θ.

A 1-byte expression code (code _rot ) indicating a rotation angle, a 4-byte rotation angle θ of a graphic pattern, a 1-byte graphic type code (code _FIG ) indicating a graphic type, and a 3-byte graphic of each graphic pattern The coordinate (X, Y) of the pattern and the size (W, H) in the x ′ and y ′ directions of each 2 bytes indicate graphic information of the graphic pattern. An expression code (code _DD ), a division number ndivx, a division number ndivy, a division x coordinate x _{1 to} x _m , a division y coordinate y _{1 to} y _n , four corners, each division line, and each side of the graphic pattern 30 Dose amount (or dose modulation amount (rate)) d ₀₀ , d ₁₀ , d ₂₀ , d _m0 , d _{(m + 1) 0} ,... D _{0 ( n + 1)} , d1 _{(n + 1)} , d2 _{(n + 1)} , dm _{(n + 1)} , and d _{(m + 1) (n + 1)} indicate dose amount information. The dose amount information may be defined after the graphic information of the graphic pattern. Therefore, in the data format of m times of x ′ direction division and n times of y ′ direction division shown in FIG. 22A, 1 + 4 + 1 + 2 × 2 + 3 × (m + n) + 2 × (m + 2) (n + 2) + 1 + 3 × for one rectangular pattern. 2 + 2 × 2 = (29 + 2mn + 7m + 7n) bytes can be defined.

  The drawing data creation method of such a data format carries out the rotation angle setting step, the division setting step, the dose amount setting step, and the drawing data creation step.

  As the rotation angle setting step, the rotation angle setting unit 11 reads the CAD data from the storage device 340 and sets the rotation angle θ of the graphic pattern for each graphic pattern.

As the division setting step, the division setting unit 10 reads CAD data from the storage device 340, and for each figure pattern, the x, y coordinate system is rotated counterclockwise by an angle θ according to the set rotation angle θ. Converting to the ', y' coordinate system, the division number ndivx in the x ′ direction and the division number ndivy in the y ′ direction are set. Also, each division coordinate is set. When the division number ndivx = m, the x-direction coordinate x ₁ to the coordinate x _m (division x-coordinate) converted from the x ′ coordinate in the x ′, y ′ coordinate system to the x coordinate in the x, y coordinate system. ) Is set. Similarly, when the division number ndivy = n, coordinates y ₁ to coordinates y _n (y direction) converted from y ′ coordinates in the x ′, y ′ coordinate system to y coordinates in the x, y coordinate system. (Division y coordinate) is set. When not dividing, the division number ndivx and the division number ndivy in the y direction may be set to zero. Alternatively, when not dividing, the division setting step may be omitted.

As the dose setting process, the dose setting unit 12, for each figure pattern, the x-coordinate _{x 0,} x 1, including the x coordinate _{x 0, x m + 1} of the four corners of the graphic pattern, · · ·, _{x m} , X _{m + 1} and the dose amount (or dose modulation amount) at each position by a combination of the x coordinates y ₀ , y ₁ ,..., Y _n , yn _{+ 1} including the y coordinates y ₀ , y _{n + 1} of the four corners. (Rate)). When not dividing, the dose amount (or dose modulation amount (rate)) at each position of the four corners may be set.

As the drawing data creation step, the drawing data creation unit 14 for each figure pattern, rotation information indicating the rotation angle of the figure pattern that becomes a part of the figure information of the figure pattern, the remaining figure information of the figure pattern, and the rotation information. Before or after graphic information other than is defined, dose amount information indicating the set dose amount (or dose modulation amount (rate)) at each of the above-described positions including the four corners is continuously defined. Pattern data (drawing data) is created according to the data format. In the example of FIG. 22B, the expression code (code _rot ) indicating the rotation information and the rotation angle θ are separated from other graphic information and defined before the dose amount information. The rotation information may be defined continuously with other graphic information before or after the dose information.

  Then, the control unit 16 outputs drawing data in which the pattern data of each created graphic pattern is collected to the storage device 342 and stores it. As described above, drawing data to be input to the drawing apparatus 100 for drawing a graphic pattern on the sample 101 using the electron beam 200 is created.

  Further, in the dose calculation step of the fourth embodiment, first, the dose calculation unit 113 uses the rotation angle θ to rotate the x, y coordinate system counterclockwise by the angle θ and the x ′, y ′ coordinates. The coordinates of the position (x, y) where the dose amount (or dose modulation amount (rate)) is set in the system are converted to obtain the coordinates (x ′, y ′). Then, the dose amount (or dose modulation amount (rate)) d (x ′, y ′) at the desired position (x ′, y ′) is calculated using the dose amount information defined in the drawing data. To do. The calculation method of the dose amount (or dose modulation amount (rate)) d (x ′, y ′) is the same as (x, y) in equation (1) is read as (x ′, y ′). For example, it may be obtained by calculation of primary interpolation. Then, after the calculation, the coordinates (x ′, y ′) of d (x ′, y ′) may be converted into (x, y).

  In the above-described example, the position where the dose amount (or dose modulation amount (rate)) is set is defined by the position (x, y) converted into the x, y coordinate system that is not rotated at the rotation angle θ. However, it is not limited to this. The x, y coordinate system may be defined by coordinates (x ', y') in the x ', y' coordinate system obtained by rotating the angle θ counterclockwise. In such a case, in the dose calculation step, (x, y) in equation (1) is replaced with (x ′, y ′), and then, for example, calculated by linear interpolation similar to the first embodiment. That's fine. Then, after the calculation, the coordinates (x ′, y ′) of d (x ′, y ′) may be converted into (x, y).

  As described above, according to the fourth embodiment, the same effect as in the first embodiment can be obtained. Furthermore, even when the graphic pattern is rotated, it is possible to eliminate the need to define dose amount information for each minute size.

Embodiment 5 FIG.
In the second embodiment described above, the case where the division position of the rectangular frame 40 is set along the coordinate axis directions of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions has been described. It is not limited. In the fifth embodiment, a case will be described in which at least one graphic pattern that is not parallel to the coordinate axis direction of the orthogonal coordinate system is used as a group of groups. Hereinafter, the contents other than those specifically described are the same as those of the second embodiment.

  FIG. 23 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the fifth embodiment. 23 is the same as FIG. 10 except that a rotation angle setting unit 11 is further added to the drawing data conversion apparatus 300. Functions such as the rotation angle setting unit 11, the division setting unit 10, the dose amount setting unit 12, the drawing data creation unit 14, the control unit 16, the group processing unit 19, and the rectangular frame setting unit 20 are configured by hardware such as an electric circuit. It may be configured by software such as a program for executing these functions. Alternatively, it may be configured by a combination of hardware and software. Information input to and output from the rotation angle setting unit 11, division setting unit 10, dose amount setting unit 12, drawing data creation unit 14, control unit 16, group processing unit 19, and rectangular frame setting unit 20 It is stored in the memory 18 each time.

  Here, FIG. 23 shows a configuration necessary for explaining the fifth embodiment. The drawing data conversion apparatus 300 may normally have other necessary configurations. For example, an input device such as a mouse and a keyboard, a monitor device, an external interface circuit, and the like may be connected as in the second embodiment.

  FIG. 24 is a diagram for explaining an example of a graphic pattern group, a dose amount definition position, and a data format with a dose modulation amount in the fifth embodiment. FIG. 24A shows an example of a graphic pattern group that is continuously connected. The example of FIG. 24A shows the same configuration as the state where the continuously connected graphic pattern group shown in FIG. 11C is rotated by an angle θ. In the fifth embodiment, such a continuous pattern pattern group is regarded as one group, and a dose amount (or dose modulation amount (rate)) map is created for each group.

  As a group processing step, the group processing unit 19 reads out CAD data in which graphic information of a plurality of graphic patterns is defined from the storage device 340, and for each graphic pattern group continuously connecting the plurality of graphic patterns defined in the CAD data. Group into at least one group. If there is only one figure pattern group connected continuously, one group is created. For example, a group of graphic patterns connected in series shown in FIG. 24A are grouped as one group.

As the rectangular frame setting step, the rectangular frame setting unit 20 sets a rectangular frame surrounding the group of graphic patterns for each group. As the rectangular frame, for example, a circumscribed rectangle of a graphic pattern group is preferably used. However, the present invention is not limited to this, and the rectangular frame 40 may be a frame that is slightly larger than the circumscribed rectangle, as shown in FIG. For example, when setting the dividing line mentioned later according to a predetermined grid, you may set the rectangular frame 40 itself according to this grid. In the fifth embodiment, as in the second embodiment, the rectangular frame 40 is used as a dose amount (or dose modulation amount (rate)) map 32 as shown in FIG. The rectangular frame setting unit 20 defines the x ′ direction size of the rectangular frame 40 (map) as Wm and the y ′ direction size as hm. In addition, the rectangular frame setting unit 20 determines the reference position of the rectangular frame 40 (map) from the reference position (for example, the lower left corner) of the first (for example, the left end) graphic pattern in the group of graphic patterns of the group surrounded by the rectangular frame 40. An offset amount (x _off , y _off ) up to (for example, the lower left corner) is defined.

  As the rotation angle setting step, the rotation angle setting unit 11 sets the rotation angle θ of the rectangular frame 40 after the rectangular frame 40 is set. Therefore, the pattern data (drawing data) of the graphic pattern group with the rectangular frame 40 shown in FIG. 24A is the graphic information of the graphic pattern group and the dose amount (or dose modulation amount (rate)) map of the rectangular frame 40. A dose amount information of 32 and a rotation angle θ are defined.

As a division setting step, the division setting unit 10 converts, for each group, an x ′, y ′ coordinate system obtained by rotating the x, y coordinate system counterclockwise by the angle θ according to the set rotation angle θ, The division number ndivx in the x ′ direction and the division number ndivy in the y ′ direction of the rectangular frame 40 are set. Also, each division coordinate is set. When the division number ndivx = m, the x-direction coordinate x ₁ to the coordinate x _m (division x-coordinate) converted from the x ′ coordinate in the x ′, y ′ coordinate system to the x coordinate in the x, y coordinate system. ) Is set. Similarly, when the division number ndivy = n, coordinates y ₁ to coordinates y _n (y direction) converted from y ′ coordinates in the x ′, y ′ coordinate system to y coordinates in the x, y coordinate system. (Division y coordinate) is set. When not dividing, the division number ndivx and the division number ndivy in the y direction may be set to zero. Alternatively, when not dividing, the division setting step may be omitted. The method of division may be the same as the content described with reference to FIGS. At this time, the graphic pattern may be read as the rectangular frame 40.

As the dose setting process, the dose setting unit 12, for each group, x-coordinate _{x 0,} x 1, including the x coordinate _{x 0, x m + 1} of the four corners of the rectangular frame 40, · · ·, _{x m} , X _{m + 1} and the dose amount (or dose modulation amount) at each position by a combination of the x coordinates y ₀ , y ₁ ,..., Y _n , yn _{+ 1} including the y coordinates y ₀ , y _{n + 1} of the four corners. (Rate)). When not dividing, the dose amount (or dose modulation amount (rate)) at each position of the four corners may be set.

In the example of FIG. 24C, as in FIG. 12, in addition to the four corners of the rectangular frame 40, each dividing line that divides the rectangular frame 40 in the x and y directions and each side of the rectangular frame 40 The dose amount (or dose modulation amount (rate)) at each intersection point and each intersection point of the dividing lines is defined. The data format with a dose modulation amount shown in FIG. _24C is the same as FIG. 12 except that an expression code (code _rot ) indicating rotation information and a rotation angle θ are added.

As the drawing data creation step, the drawing data creation unit 14 configures, for each group, rotation information indicating the rotation angle of the graphic pattern group that is a part of the graphic information of the graphic pattern group constituting the group, and the group. Graphic information of the graphic pattern group, and dose information indicating the set dose (or dose modulation amount (rate)) at the positions of the four corners of the rectangular frame 40 before or after the graphic information is defined. Pattern data (drawing data) is created in accordance with a data format in which is continuously defined. In the example of FIG. _{24C, the} expression code (code _rot ) indicating the rotation information and the rotation angle θ are separated from other graphic information and defined before the dose amount information. The rotation information may be defined continuously with other graphic information before or after the dose information. The created pattern data (drawing data) is output to the storage device 342 and stored.

As described above, in the fifth embodiment, for one rectangular pattern (group: figure pattern group connected continuously), a 1-byte expression code (code _rot ) indicating the rotation angle, and 4 bytes of the figure pattern Is added to the configuration of FIG. Therefore, in the data format of the x direction division m times and the y direction division n times shown in FIG. 24C, 1 + 4 + 1 + 2 × 2 + 3 × 2 + 2 × 2 + 3 × (m + n) + 2 × (m + 2) (n + 2) + 1 + 1 + 2 + N · (3 × 2 + 2) X2) = (32 + 2mn + 7m + 7n + 10N) bytes can be defined.

  In the dose calculation step of the fifth embodiment, first, the dose calculation unit 113 uses the rotation angle θ to rotate the x, y coordinate system counterclockwise by the angle θ and the x ′, y ′ coordinates. The coordinates of the position (x, y) where the dose amount (or dose modulation amount (rate)) is set in the system are converted to obtain the coordinates (x ′, y ′). Then, the dose amount (or dose modulation amount (rate)) d (x ′, y ′) at the desired position (x ′, y ′) is calculated using the dose amount information defined in the drawing data. To do. The calculation method of the dose amount (or dose modulation amount (rate)) d (x ′, y ′) is the same as (x, y) in equation (1) is read as (x ′, y ′). For example, it may be obtained by calculation of primary interpolation. Then, after the calculation, the coordinates (x ′, y ′) of d (x ′, y ′) may be converted into (x, y).

  In the above-described example, the position where the dose amount (or dose modulation amount (rate)) is set is defined by the position (x, y) converted into the x, y coordinate system that is not rotated at the rotation angle θ. However, it is not limited to this. The x, y coordinate system may be defined by coordinates (x ', y') in the x ', y' coordinate system obtained by rotating the angle θ counterclockwise. In such a case, in the dose calculation step, (x, y) in equation (1) is replaced with (x ′, y ′), and then obtained by, for example, linear interpolation calculation similar to the second embodiment. That's fine. Then, after the calculation, the coordinates (x ′, y ′) of d (x ′, y ′) may be converted into (x, y).

  As described above, according to the fifth embodiment, the same effect as in the second embodiment can be obtained. Furthermore, even when the figure pattern group (group) is rotated, it is possible to eliminate the need to define dose amount information for each minute size.

Embodiment 6 FIG.
In the second embodiment described above, a case has been described in which a continuous pattern pattern group is surrounded by the rectangular frame 40 and a dose amount (or dose modulation amount (rate)) map is created as one group. It is not a thing. In the sixth embodiment, a dose amount (or dose modulation amount (rate)) map for each internal graphic pattern group (group) is created in a cell unit including at least one continuous graphic pattern group (group). To do. At the same time, a case will be described in which drawing data having a data format in which dose amount information indicating a dose amount (or dose modulation amount (rate)) arranged for each internal graphic pattern group (group) is defined in cell units is created. . Hereinafter, the contents other than those specifically described are the same as those of the second embodiment.

  FIG. 25 is a conceptual diagram showing a configuration of a drawing data conversion apparatus according to the sixth embodiment. 25 is the same as FIG. 10 except that a cell setting unit 21 and a rotation angle setting unit 11 are further added to the drawing data conversion apparatus 300. Functions such as the cell setting unit 21, the rotation angle setting unit 11, the division setting unit 10, the dose amount setting unit 12, the drawing data creation unit 14, the control unit 16, the group processing unit 19, and the rectangular frame setting unit 20 are electric circuits and the like. It may be comprised with the hardware of these, and may be comprised with software, such as a program which performs these functions. Alternatively, it may be configured by a combination of hardware and software. Information input / output to / from the cell setting unit 21, the rotation angle setting unit 11, the division setting unit 10, the dose amount setting unit 12, the drawing data creation unit 14, the control unit 16, the group processing unit 19, and the rectangular frame setting unit 20 Information being calculated is stored in the memory 18 each time.

  Here, FIG. 25 shows a configuration necessary for explaining the sixth embodiment. The drawing data conversion apparatus 300 may normally have other necessary configurations. For example, an input device such as a mouse and a keyboard, a monitor device, an external interface circuit, and the like may be connected as in the second embodiment.

  FIG. 26 is a diagram for explaining an example of a cell, a graphic pattern group, and a dose amount definition position in the sixth embodiment. FIG. 26 shows an example of a graphic pattern group that is continuously connected. The example of FIG. 26 shows a cell 42 including the group of graphic patterns connected in series as shown in FIG. 11C as a group surrounded by a rectangular frame 40. In the sixth embodiment, the dose amount (or dose modulation amount (rate)) map 32 of the group in the cell 42 is created for each cell including the group (and the rectangular frame 40 surrounding the group).

  In the example of FIG. 26, since the rectangular frame 40 is set along the coordinate axis directions of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions, the rotation information is not necessarily required. Therefore, when creating drawing data for the example of FIG. 26, the rotation angle setting unit 11 shown in FIG. 25 may be omitted.

The contents of the group processing step and the rectangular frame setting step are the same as those in the second embodiment. However, the rectangular frame setting unit 20 does not need to define the offset amount (x _off , y _off ).

As the cell setting step, the cell setting unit 21 sets a cell 42 (cell region) including the entire figure to be captured in the rectangular frame 40 after the rectangular frame 40 is set. The cell 42 is preferably configured as a rectangular area. Also, an offset amount from the origin of the cell area to the origin of the rectangular frame is defined. Specifically, the cell setting unit 21 sets the offset amount (x _off ) from the reference position (for example, the lower left corner) of the rectangular frame 40 surrounded by the cell 42 to the reference position (for example, the lower left corner) of the cell 42 (map). , Y _off ). Therefore, the pattern data (drawing data) of the graphic pattern group in the cell 42 includes the graphic information of the graphic pattern group and the rectangular frame 40 for each rectangular frame 40 (group in the cell) and the dose amount (or dose modulation amount ( Rate)) The dose amount information as the map 32 is defined.

  As the division setting step, the division setting unit 10 sets the division number ndivx in the x direction and the division number ndivy in the y direction of the rectangular frame 40 for each cell 42 and for each rectangular frame 40. Also, each division coordinate is set. The contents of the subsequent division setting process are the same as those in the second embodiment. The contents of the dose amount setting step are the same as those in the second embodiment.

FIG. 27 is a diagram illustrating an example of a data format with a dose modulation amount according to the sixth embodiment. In the data format shown in FIG. 27, 1-byte representation code indicating that it is within the same cell _{(code Cellstart)} that is first added, the offset amount of each of the three bytes _{(x off, y} off) the graphic pattern group In addition to the offset amount between the rectangular frame 40 and the rectangular frame 40, the offset amount between the rectangular frame 40 and the cell 42 is added, and a 1-byte expression code (code _Cellend ) indicating the end in the same cell is added at the end. For the graphic patterns 1 to N constituting the graphic pattern group in the same cell, the coordinates (X, Y) of the 3-byte graphic pattern and the 2-byte x and y-direction sizes (W, H) )) As one group, the same as _FIG . 12 except that a 1-byte expression code (code _FIG ) is first added to each group. .

  As the drawing data creation step, the drawing data creation unit 14 determines, for each cell, the graphic information of the graphic pattern group constituting the cell and the positions of the four corners of the rectangular frame 40 before or after the graphic information is defined. Pattern data (drawing data) is created in accordance with a data format in which dose amount information indicating the set dose amount (or dose modulation amount (rate)) is continuously defined. The created pattern data (drawing data) is output to the storage device 342 and stored.

  Therefore, one group is arranged in the cell shown in FIG. 27, and the group is 1 + 1 + 2 × 2 + 3 × 2 + 2 × 2 + 3 × for one cell in the data format of x-direction division m times and y-direction division n times. (M + n) + 2 × (m + 2) (n + 2) + N · (1 + 3 × 2 + 2 × 2) + 1 = (25 + 2mn + 7m + 7n + 11N) bytes.

  As described above, according to the sixth embodiment, dose information can be defined for each cell in which a group composed of at least one graphic pattern is arranged. In addition, the same effects as those of the second embodiment can be exhibited.

Embodiment 7 FIG.
In the above-described sixth embodiment, the case where the cell 42 is set along the coordinate axis directions of the orthogonal coordinate system in the horizontal (x direction) and vertical (y direction) directions has been described, but the present invention is not limited to this. In the seventh embodiment, a case where a cell that is not parallel to the coordinate axis direction of the orthogonal coordinate system is set will be described. The configuration of the drawing data conversion apparatus 300 is the same as that shown in FIG. Hereinafter, the contents other than those specifically described are the same as those of the sixth embodiment.

  FIG. 28 is a diagram for explaining an example of a cell, a graphic pattern group, and a data format with a dose modulation amount in the seventh embodiment. FIG. 28A shows the same configuration as the state shown in FIG. 26 in which the cell 40, the rectangular frame 40 inside the cell 42, and the graphic pattern group surrounded by the rectangular frame 40 are rotated by an angle θ. In the seventh embodiment, a dose amount (or dose modulation amount (rate)) map is created for each cell 42.

  A group processing step and a rectangular frame setting step are performed. The contents of the group processing step and the rectangular frame setting step are the same as those in the sixth embodiment (second embodiment). Next, a cell setting process is performed. The contents of the cell setting process are the same as in the sixth embodiment. When the cell 42 is set, the cell is set using a rectangle rotated at a rotation angle similar to the rotation angle of the rectangular frame 40 inside the cell.

  As the rotation angle setting step, the rotation angle setting unit 11 sets the rotation angle θ of the cell 42 after the cell 42 is set. Accordingly, the pattern data (drawing data) of the graphic pattern group in the cell 42 shown in FIG. 28A is the graphic information of the graphic pattern group and the rectangular frame 40 as the dose amount (or dose modulation amount (rate)) map 32. The dose amount information and the rotation angle θ of the cell 42 are defined.

As the division setting step, the division setting unit 10 performs x ′, y-coordinate rotation of the x, y coordinate system counterclockwise by the angle θ according to the set rotation angle θ for each group inside the cell in units of cells 42. Converting to the y ′ coordinate system, the division number ndivx in the x ′ direction and the division number ndivy in the y ′ direction of the rectangular frame 40 are set. Also, each division coordinate is set. When the division number ndivx = m, the x-direction coordinate x ₁ to the coordinate x _m (division x-coordinate) converted from the x ′ coordinate in the x ′, y ′ coordinate system to the x coordinate in the x, y coordinate system. ) Is set. Similarly, when the division number ndivy = n, coordinates y ₁ to coordinates y _n (y direction) converted from y ′ coordinates in the x ′, y ′ coordinate system to y coordinates in the x, y coordinate system. (Division y coordinate) is set. When not dividing, the division number ndivx and the division number ndivy in the y direction may be set to zero. Alternatively, when not dividing, the division setting step may be omitted. The method of division may be the same as the content described with reference to FIGS. At this time, the graphic pattern may be read as the rectangular frame 40.

  The contents of the dose amount setting step are the same as in the sixth embodiment (second embodiment).

In the example of FIG. 28, in addition to the four corners of the rectangular frame 40, in addition to the four corners of the rectangular frame 40, each dividing line that divides the rectangular frame 40 in the x and y directions and each side of the rectangular frame 40 are also shown. A dose amount (or dose modulation amount (rate)) at each intersection point and each intersection point of the dividing lines is defined. The data format with dose modulation shown in FIG. 28 is the same as FIG. 27 except that an expression code (code _rot ) indicating rotation information and a rotation angle θ are added.

As the drawing data creation step, the drawing data creation unit 14 creates a graphic pattern group that becomes a part of graphic information of the graphic pattern group that constitutes the group for each cell (for each cell) and for each group inside the cell. The rotation information indicating the rotation angle, the graphic information of the graphic pattern group constituting the group, and the dose amount set at the positions of the four corners of the rectangular frame 40 (or before or after the graphic information is defined) (or Pattern data (drawing data) is created in accordance with a data format in which dose amount information indicating dose modulation amount (rate)) is continuously defined. In the example of FIG. 28, the expression code (code _rot ) indicating the rotation information and the rotation angle θ are separated from other graphic information and defined before the dose amount information. However, the present invention is not limited to this. Instead, the rotation information may be defined continuously with other graphic information before or after the dose information. The created pattern data (drawing data) is output to the storage device 342 and stored.

As described above, in the seventh embodiment, for one rectangular pattern (group: figure pattern group connected continuously), a 1-byte expression code (code _rot ) indicating the rotation angle, and 4 bytes of the figure pattern Is added to the configuration of FIG. Therefore, in the data format of x direction division m times and y direction division n times shown in FIG. 28, 1 + 1 + 4 + 1 + 2 × 2 + 3 × 2 + 2 × 2 + 3 × (m + n) + 2 × (m + 2) (n + 2) + N · (1 + 3) X2 + 2x2) + 1 = (30 + 2mn + 7m + 7n + 11N) bytes.

  In the dose calculation step of the seventh embodiment, first, the dose calculation unit 113 uses the rotation angle θ to rotate the x, y coordinate system counterclockwise by the angle θ and the x ′, y ′ coordinates. The coordinates of the position (x, y) where the dose amount (or dose modulation amount (rate)) is set in the system are converted to obtain the coordinates (x ′, y ′). Then, the dose amount (or dose modulation amount (rate)) d (x ′, y ′) at the desired position (x ′, y ′) is calculated using the dose amount information defined in the drawing data. To do. The calculation method of the dose amount (or dose modulation amount (rate)) d (x ′, y ′) is the same as (x, y) in equation (1) is read as (x ′, y ′). For example, it may be obtained by calculation of primary interpolation. Then, after the calculation, the coordinates (x ′, y ′) of d (x ′, y ′) may be converted into (x, y).

  In the above-described example, the position where the dose amount (or dose modulation amount (rate)) is set is defined by the position (x, y) converted into the x, y coordinate system that is not rotated at the rotation angle θ. However, it is not limited to this. The x, y coordinate system may be defined by coordinates (x ', y') in the x ', y' coordinate system obtained by rotating the angle θ counterclockwise. In such a case, in the dose calculation step, (x, y) in equation (1) is replaced with (x ′, y ′), and then obtained by, for example, linear interpolation calculation similar to the second embodiment. That's fine. Then, after the calculation, the coordinates (x ′, y ′) of d (x ′, y ′) may be converted into (x, y).

  As described above, according to the seventh embodiment, the same effect as in the sixth embodiment can be obtained. Furthermore, even when the figure pattern group (group) is rotated, it is possible to eliminate the need to define dose amount information for each minute size.

  The embodiments have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. In the above-described example, the multi-beam type drawing apparatus 100 has been described. However, the present invention is not limited to this. The present invention can also be applied to drawing data for a raster (Gaussian beam) type drawing apparatus using a single beam.

  In addition, although descriptions are omitted for parts and the like that are not directly required for the description of the present invention, such as a device configuration and a control method, a required device configuration and a control method can be appropriately selected and used. For example, although the description of the control unit configuration for controlling the drawing apparatus 100 is omitted, it goes without saying that the required control unit configuration is appropriately selected and used.

  In addition, all drawing data creation methods, drawing apparatuses, and methods that include elements of the present invention and that can be appropriately modified by those skilled in the art are included in the scope of the present invention.

10 division setting unit 11 rotation angle setting unit 12 dose amount setting unit 13 dose amount setting unit 14 drawing data creation unit 16 control unit 18 memory 19 group processing unit 20 rectangular frame setting unit 21 cell setting unit 22 fixed size mesh setting unit 30 33 Graphic pattern 32 Map 40, 41 Rectangular frame 42 Cell 44 Mesh area 100 Drawing apparatus 101, 340 Sample 102 Electron barrel 103 Drawing chamber 105 XY stage 110 Control computer 111 Memory 112 Shot data generation unit 113 Irradiation amount calculation unit 114 Drawing control Unit 120 control circuit 140, 142, 340, 342 storage device 150 drawing unit 160 control unit 200 electron beam 201 electron gun 202 illumination lens 203 multi-beam shaping plate 204 blanking plate 205 reduction lens 206 limiting aperture member 207 Object lens 208 deflector 300 drawing data converter

Claims (10)

In a method for creating drawing data to be input to a drawing apparatus that draws a graphic pattern on a sample using a charged particle beam,
Data in which graphic information of a graphic pattern and dose information indicating each dose amount or dose modulation rate at each corner position of the graphic pattern are continuously defined before or after the graphic information is defined A drawing data creating method, wherein the drawing data is created according to a format. In a method for creating drawing data to be input to a drawing apparatus that draws at least one figure pattern on a sample using a charged particle beam,
Inputting graphic information of at least one graphic pattern and setting a rectangular frame surrounding the at least one graphic pattern;
Setting each dose amount or dose modulation rate at the positions of the four corners of the rectangular frame;
Graphic information of the at least one graphic pattern, and dose information indicating a set dose amount or dose modulation rate at positions of four corners of the rectangular frame before or after the graphic information is defined. Creating the drawing data according to a continuously defined data format;
A drawing data creation method characterized by comprising: In the graphic information, graphic information of a plurality of graphic patterns is defined,
Further comprising the step of inputting graphic information of the plurality of graphic patterns and grouping the plurality of graphic patterns into at least one group for each continuous graphic pattern group;
When setting the rectangular frame, for each group, set a rectangular frame surrounding the group of graphic patterns,
When setting the dose amount or dose modulation rate, for each group, set the respective dose amounts or dose modulation rates at the positions of the four corners of the rectangular frame,
Data format in which, for each group, graphic information of the graphic pattern group of the group and dose information at the positions of the four corners of the rectangular frame are continuously defined before or after the graphic information is defined The drawing data creating method according to claim 2, wherein the drawing data is created according to:   The dose amount information further includes a dose amount or a dose modulation rate at an intersection of a dividing line that divides the rectangular frame in at least one of the x direction and the y direction and either side of the rectangular frame. The drawing data creating method according to claim 2 or 3, wherein: In a method for creating drawing data to be input to a drawing apparatus that draws a graphic pattern on a sample using a charged particle beam,
Inputting graphic information of a graphic pattern and setting a rectangular frame in a part of the graphic pattern;
Setting a plurality of mesh regions of a fixed size in a region including the remainder of the graphic pattern;
Setting each dose amount or dose modulation rate at the positions of the four corners of the rectangular frame;
Setting a dose amount or a dose modulation rate for each of the plurality of mesh regions;
Graphic information of the graphic pattern, and before or after the graphic information is defined, first dose information indicating a set dose or dose modulation rate at the positions of the four corners of the rectangular frame; Creating the drawing data according to a data format in which second dose information indicating a dose amount or a dose modulation rate set in a plurality of mesh regions of the fixed size is continuously defined;
A drawing data creation method characterized by comprising:   2. The drawing data creation method according to claim 1, wherein the data format further defines rotation information indicating a rotation angle of the graphic pattern.   The drawing data creation method according to claim 2, further comprising a step of setting a rotation angle of the rectangular frame after the rectangular frame is set.   The drawing data creation method according to claim 7, wherein the data format further defines rotation information indicating a rotation angle of the rectangular frame. After the rectangular frame is set, the method further includes a step of setting a cell region including the entire figure captured in the rectangular frame,
5. The drawing data creation method according to claim 2, wherein an offset amount from the origin of the cell area to the origin of the rectangular frame is further defined in the data format. After the cell region is set, further comprising the step of setting a rotation angle of the cell region,
The drawing data creation method according to claim 9, wherein the data format further defines rotation information indicating a rotation angle of the cell area.