JP2016151623A - Thermal lens forming element and method for manufacturing the same - Google Patents
Thermal lens forming element and method for manufacturing the same Download PDFInfo
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Abstract
【課題】溶液化が困難かつ液体中にコロイド分散させても沈降し易い無機色素を熱レンズ形成素子へ使用できるようにする。【解決手段】信号光の波長の光を吸収せず、制御光の波長の光を吸収する色素を内包した無機多孔質粒子から成る無機多孔質粒子層6に、前記無機多孔質粒子と屈折率が同一になるよう調整された混合有機溶剤10を含浸させた制御光吸収領域を有する熱レンズ形成素子100である。【選択図】図2cAn inorganic dye which is difficult to be made into a solution and easily settles even when colloidally dispersed in a liquid is made available for a thermal lens forming element. SOLUTION: The inorganic porous particles and the refractive index are formed on an inorganic porous particle layer 6 made of inorganic porous particles including a dye that does not absorb light having a signal light wavelength but absorbs light having a control light wavelength. Is a thermal lens forming element 100 having a control light absorption region impregnated with a mixed organic solvent 10 adjusted to be the same. [Selection] Figure 2c
Description
本発明は、光通信、光情報処理などの光エレクトロニクスおよびフォトニクスの分野において有用な光路切替装置および光路切替方法に用いられる熱レンズ形成素子およびその製造方法に関するものである。 The present invention relates to an optical path switching device and a thermal lens forming element used in an optical path switching method useful in the fields of optoelectronics and photonics such as optical communication and optical information processing, and a manufacturing method thereof.
本発明者らは、全く新しい原理に基づく光路切替方法および装置として、熱レンズ形成素子中の制御光吸収領域に、制御光吸収領域が吸収する波長帯域の制御光、および、制御光吸収領域が吸収しない波長帯域の信号光を各々の光軸が一致するよう収束させて照射し、制御光が照射されていない場合は信号光が鏡の穴を通して直進するようにし、一方、制御光が照射される場合は、信号光の進行方向に対して傾けて設けた穴付ミラーを用いて反射することによって光路を偏光させる方法およびそのための装置を発明した(特許文献1参照)。この発明以前の背景技術については、特許文献1に詳しく記載されている。 As an optical path switching method and apparatus based on a completely new principle, the inventors of the present invention have a control light absorption region in a thermal lens forming element, a control light in a wavelength band absorbed by the control light absorption region, and a control light absorption region. The signal light in the wavelength band that is not absorbed is converged and irradiated so that the optical axes coincide with each other. When the control light is not irradiated, the signal light travels straight through the hole in the mirror, while the control light is irradiated. In this case, the inventors invented a method of polarizing an optical path by reflecting using a mirror with a hole provided to be inclined with respect to the traveling direction of the signal light (see Patent Document 1). The background art prior to the present invention is described in detail in Patent Document 1.
本発明者らは、また、熱レンズ形成素子および穴付ミラーを複数組み合わせて用いる光制御式光路切替型光信号伝送装置および光信号光路切替方法を発明した(特許文献2参照)。なお、特許文献1および特許文献2に記載の光路切替方式において制御光を照射した場合、熱レンズ効果によって信号光のビーム断面形状はリング状になる。そこでこの方式を以下「リングビーム方式」と呼ぶ。 The inventors have also invented an optical control type optical path switching type optical signal transmission device and an optical signal optical path switching method using a combination of a plurality of thermal lens forming elements and mirrors with holes (see Patent Document 2). When the control light is irradiated in the optical path switching methods described in Patent Document 1 and Patent Document 2, the beam cross-sectional shape of the signal light becomes a ring shape due to the thermal lens effect. Therefore, this method is hereinafter referred to as “ring beam method”.
本発明者らは、以下に説明する発明も、出願している。熱レンズ形成光素子中の制御光吸収領域に、制御光吸収領域が吸収する波長帯域の制御光、および、制御光吸収領域が吸収しない波長帯域の信号光とを入射させ、その際、前記制御光および前記信号光が、前記制御光吸収領域にて収束するように照射されかつ前記制御光および前記信号光の各々の収束点の位置が相異なるように照射され、これにより、前記制御光と前記信号光は、光の進行方向で前記制御光吸収領域の入射面またはその近辺において収束したのち拡散される。これにより、前記制御光吸収領域内における前記制御光を吸収した領域およびその周辺領域に起こる温度上昇に起因し可逆的に熱レンズが形成され、形成された熱レンズによって、屈折率が変化し、前記信号光の進行方向を変えることを特徴とする光偏光方法および光路切替装置を開示した(特許文献3〜5参照)。特許文献3〜5において、熱レンズ形成光素子の制御光吸収領域としては、色素を溶剤に溶解したものをガラス容器に封じたものが開示されており、溶剤としては、少なくとも使用する色素を溶解するものであって、熱レンズ形成時の温度上昇に際し、熱分解することなく、かつ、沸騰する温度(沸点)が100℃以上、好ましくは200℃以上、更に好ましくは300℃以上のものを好適に用いることができると記載されている。なお、特許文献3〜5に記載の光路切替方式においては制御光を照射しても信号光のビーム断面形状はほぼ円形に保たれる。そこでこの方式を以下「丸ビーム方式」と呼ぶ。 The inventors have also filed the invention described below. The control light in the wavelength band that is absorbed by the control light absorption region and the signal light in the wavelength band that is not absorbed by the control light absorption region are incident on the control light absorption region in the thermal lens forming optical element. The light and the signal light are irradiated so as to converge in the control light absorption region, and the control light and the signal light are irradiated such that the positions of the convergence points of the control light and the signal light are different from each other. The signal light is diffused after converging at or near the incident surface of the control light absorption region in the light traveling direction. Thereby, a thermal lens is formed reversibly due to the temperature rise occurring in the control light absorption region and the peripheral region thereof, and the refractive index is changed by the formed thermal lens, An optical polarization method and an optical path switching device characterized by changing the traveling direction of the signal light have been disclosed (see Patent Documents 3 to 5). In Patent Documents 3 to 5, the control light absorption region of the thermal lens forming optical element is disclosed in which a pigment is dissolved in a solvent and sealed in a glass container, and as the solvent, at least the pigment to be used is dissolved. Suitable when the temperature rises at the time of forming the thermal lens without being thermally decomposed and having a boiling temperature (boiling point) of 100 ° C. or higher, preferably 200 ° C. or higher, more preferably 300 ° C. or higher. It is described that it can be used. In the optical path switching methods described in Patent Documents 3 to 5, the beam cross-sectional shape of the signal light is kept substantially circular even when the control light is irradiated. Therefore, this method is hereinafter referred to as “round beam method”.
本発明者らは、液状の光応答性組成物を充填した光学セルを熱レンズ形成素子と呼び、前記光応答性組成物が感応する波長の制御光を吸収する色素溶液の溶剤として、160℃以上における粘度が0ないし3mPa・sであり、かつ、160℃における粘度の値で、40℃における粘度の値を除した値が1以上、6以下である溶剤を用い、更に、光学セルの形態として前記色素溶液を入射信号光の光軸を中心軸とする円柱またはその円柱に外接するN角柱(Nは4以上の整数)の形状の第1の空間内に充填して制御光吸収領域とし、前記第1の空間を溶液導入路および堰を介して第2の空間に接続させ、この第2の空間には前記色素溶液および不活性気体の気泡14が充填されている構造を開示した(特許文献6参照)。 The present inventors refer to an optical cell filled with a liquid photoresponsive composition as a thermal lens forming element, and as a solvent for a dye solution that absorbs control light having a wavelength to which the photoresponsive composition is sensitive, 160 ° C. Using a solvent having a viscosity of 0 to 3 mPa · s as described above, a viscosity value at 160 ° C., and a value obtained by dividing the viscosity value at 40 ° C. of 1 or more and 6 or less; As a control light absorption region, the dye solution is filled into a first space in the shape of a cylinder having an optical axis of incident signal light as a central axis or an N prism (N is an integer of 4 or more) circumscribing the cylinder. A structure is disclosed in which the first space is connected to the second space via a solution introduction path and a weir, and the second space is filled with the dye solution and an inert gas bubble 14 ( (See Patent Document 6).
本発明者らは、また、素子の向きに依存せず広い使用温度範囲で高速に熱レンズを形成・消滅させることを目的に、熱レンズ形成素子として、信号光の波長の光を吸収せず、制御光の光を吸収する色素を溶剤に溶解させた色素溶液を収納する容器の形態が、合計4つの当該平面について互いに平行な、2つの外側平面および2つの内側平面を有する、両端が溶融封止された角型断面中空管であって、前記互いに平行な2つの外側平面および2つの内側平面はともに、制御光が照射されず信号光が直進する場合の光軸に対して垂直であり、前記互いに平行な2つの外側平面および2つの内側平面の大きさは、制御光および信号光の入射する領域および直進または光路切替されて出射する信号光が通過する領域において平面である大きさであり、色素溶液部分に近接して1つの気泡が存在する構造を開示した(特許文献7参照)。 The present inventors also do not absorb light of the wavelength of signal light as a thermal lens forming element for the purpose of forming and extinguishing a thermal lens at high speed in a wide use temperature range without depending on the direction of the element. A container containing a dye solution in which a dye that absorbs light of control light is dissolved in a solvent has two outer planes and two inner planes that are parallel to each other for a total of four planes. A sealed rectangular cross-section hollow tube, wherein the two outer planes and the two inner planes that are parallel to each other are both perpendicular to the optical axis when signal light travels straight without being irradiated with control light The two outer planes and the two inner planes that are parallel to each other have a size that is a plane in a region where the control light and the signal light are incident and a region where the signal light that goes straight or is switched by an optical path passes. And Close to the iodine solution portion was disclosed a structure in which one bubbles exist (see Patent Document 7).
特許文献6および7には、制御光の光を吸収する有機色素の光および熱による分解を防ぐためには、色素溶液から酸素および水を徹底的に除去することが効果的であること、また、特許文献7には、色素溶液を不活性気体とともに、例えば石英ガラス製セルに溶融封止することで色素の分解を防止できることが記載されている。 In Patent Documents 6 and 7, it is effective to thoroughly remove oxygen and water from a dye solution in order to prevent decomposition by light and heat of an organic dye that absorbs control light, Patent Document 7 describes that the dye solution can be prevented from being decomposed by melt-sealing the dye solution together with an inert gas, for example, in a quartz glass cell.
本発明者らは、また、少なくとも光吸収層膜を含む薄膜光素子中の光吸収層膜に、互いに波長の異なる制御光および信号光を各々収束させて照射し、前記制御光の波長は前記光吸収層膜が吸収する波長帯域から選ばれるものとし、少なくとも前記制御光が前記光吸収層膜内において焦点を結ぶものとし、前記光吸収層膜が前記制御光を吸収した領域およびその周辺領域に起こる温度上昇に起因して可逆的に生ずる屈折率の分布に基づいた熱レンズを用いることによって、前記信号光の強度変調および/または光束密度変調を行う薄膜光素子において、前記光吸収層膜の厚さが、収束された前記制御光の共焦点距離の2倍を越えないことが好ましいことを見いだした(特許文献8参照)。 The present inventors also irradiate the control light and the signal light having different wavelengths by converging the light absorption layer film in the thin film optical element including at least the light absorption layer film, and the wavelength of the control light is The light absorption layer film is selected from the wavelength band to be absorbed, at least the control light is focused in the light absorption layer film, and the light absorption layer film absorbs the control light and its peripheral area In the thin-film optical element that performs intensity modulation and / or light beam density modulation of the signal light by using a thermal lens based on a refractive index distribution that occurs reversibly due to a temperature rise occurring in the light absorption layer film, It has been found that it is preferable that the thickness of the light does not exceed twice the confocal distance of the converged control light (see Patent Document 8).
一方、特許文献9には、十分な光触媒性能を示し、有機バインダーなどの媒体が劣化し難く、耐候性に優れた光半導体微粒子を提供する手段として、0.5nm〜10nmの細孔直径を有する多孔質シリカ膜で被覆された光半導体微粒子を製造する為の方法であって、少なくとも界面活性剤水溶液と、水溶性有機溶剤とを1〜10℃で混合して混合溶液を調製する工程と、1〜10℃で、光半導体微粒子およびアルコキシシランを前記混合溶液に添加し、撹拌することにより、該光半導体微粒子の表面に膜を形成する工程と、該膜で被覆された光半導体微粒子を焼成することにより、多孔質シリカ膜を形成する工程とを含むことを特徴とする光半導体微粒子の製造方法、多孔質シリカ膜の厚さが1nm〜300nmである前記光半導体微粒子の製造方法が開示されている。 On the other hand, Patent Document 9 has a pore diameter of 0.5 nm to 10 nm as a means for providing photo-semiconductor fine particles that exhibit sufficient photocatalytic performance, are resistant to deterioration of a medium such as an organic binder, and have excellent weather resistance. A method for producing photo-semiconductor fine particles coated with a porous silica film, comprising at least a surfactant aqueous solution and a water-soluble organic solvent mixed at 1 to 10 ° C. to prepare a mixed solution; The step of forming a film on the surface of the photo-semiconductor fine particles by adding the photo-semiconductor fine particles and the alkoxysilane to the mixed solution and stirring at 1 to 10 ° C., and firing the photo-semiconductor fine particles coated with the film A process for forming a porous silica film, and a method for producing the optical semiconductor fine particle, wherein the thickness of the porous silica film is 1 nm to 300 nm. A manufacturing method is disclosed.
本発明は、熱レンズ形成素子に用いられる巨大芳香族化合物を溶剤可溶化した赤外線吸収・有機色素が数年間の時間を経て結晶化し、析出する現象を避けること、および、熱レンズ形成素子の製造プロセスの不備によって混入した酸素または水の影響で有機色素が数年間の経時で劣化する現象を避けることを目的とする。本発明は、また、耐久性の点では優れるものの、溶液化が困難かつ液体中にコロイド分散させても沈降し易い無機色素を熱レンズ形成素子へ使用できるようにすることを目的とする。 The present invention avoids the phenomenon that infrared absorbing organic dyes obtained by solubilizing giant aromatic compounds used in thermal lens forming elements are crystallized and deposited over a period of several years, and manufacture of thermal lens forming elements The purpose is to avoid the phenomenon that organic dyes deteriorate over time due to oxygen or water mixed in due to process defects. Another object of the present invention is to make it possible to use, for a thermal lens-forming element, an inorganic dye that is excellent in durability but is difficult to be made into a solution and easily settles even when colloidally dispersed in a liquid.
本発明は、以下の特徴を有する。
(1)信号光の波長の光を吸収せず、制御光の波長の光を吸収する色素が内包された無機多孔質粒子から成る多孔質層に、前記無機多孔質粒子と屈折率が同一になるよう調整された混合有機溶剤を含浸させた制御光吸収領域を有する熱レンズ形成素子である。
The present invention has the following features.
(1) A porous layer composed of inorganic porous particles that do not absorb light of the wavelength of signal light and that contains a dye that absorbs light of the wavelength of control light has the same refractive index as that of the inorganic porous particles. This is a thermal lens forming element having a control light absorption region impregnated with a mixed organic solvent adjusted to be.
(2)前記制御光吸収領域が角型断面中空管の内壁の1つの面に形成され、前記内壁の対向面との間に空房を挟んで前記制御光吸収領域が形成されていることを特徴とする。 (2) The control light absorption region is formed on one surface of the inner wall of the square cross-section hollow tube, and the control light absorption region is formed with an air gap between the opposite surface of the inner wall. Features.
(3)前記制御光吸収領域が形成された前記角型断面中空管の一端が溶融封止され、前記空房の一端には前記混合有機溶剤が充填され、前記空房の他端には1気圧以下の圧力で前記混合有機溶剤の蒸気および不活性気体が充填され、前記角型断面中空管の他端が溶融封止されていることを特徴とする。 (3) One end of the rectangular cross-section hollow tube in which the control light absorption region is formed is melt-sealed, one end of the empty chamber is filled with the mixed organic solvent, and the other end of the empty chamber is 1 atm. The mixed organic solvent vapor and inert gas are filled at the following pressure, and the other end of the square cross-section hollow tube is melt-sealed.
(4)前記制御光吸収領域が形成された前記角型断面中空管の断面形状は4つの平面について互いに平行な2つの外側平面および2つの内側平面を有する角型断面中空管であって、前記互いに平行な2つの外側平面および2つの内側平面はともに、前記制御光が照射されず前記信号光が直進する場合の光軸に対して垂直であり、前記互いに平行な2つの外側平面および2つの内側平面の大きさは、前記制御光および信号光の入射する領域および直進または光路切替されて出射する信号光が通過する領域において平面である大きさであり、前記角型断面中空管の両端はその素材の融点において溶融封止されており、前記制御光吸収領域には、前記制御光吸収領域が吸収する波長帯域から選ばれる波長の制御光と、前記制御光吸収領域が吸収しない波長帯域から選ばれる波長の信号光とが各々収束されて照射され、かつ前記制御光および前記信号光の各々の収束点の位置が同一または相異なるように照射され、前記制御光吸収領域が前記制御光を吸収した領域およびその周辺領域に起こる温度上昇に起因して可逆的に形成される屈折率の分布に基づいた熱レンズが形成され、前記制御光が照射されず熱レンズが形成されていない場合は前記収束された信号光が通常の開き角度と直進方向で出射する状態と、前記制御光および前記信号光の各々の収束点の位置が同一になるよう制御光が照射されて熱レンズが形成される場合は前記収束された信号光が通常の開き角度よりも大きい開き角度で出射する状態、または、前記制御光および前記信号光の各々の収束点の位置が相異なるよう制御光が照射されて熱レンズが形成される場合は前記収束された信号光が通常の開き角度と異なる開き角度と直進方向とは異なる方向で出射する状態とを、前記制御光の照射の有無に対応させて実現させることを特徴とする。 (4) A cross-sectional shape of the square cross-section hollow tube in which the control light absorption region is formed is a square cross-section hollow tube having two outer planes and two inner planes parallel to each other with respect to four planes. The two outer planes parallel to each other and the two inner planes are both perpendicular to the optical axis when the control light is not irradiated and the signal light travels straight, and the two outer planes parallel to each other and The size of the two inner planes is a size that is a plane in a region where the control light and the signal light are incident and a region where the signal light that goes straight or whose optical path is switched passes, and the rectangular cross-section hollow tube Both ends of the substrate are melt-sealed at the melting point of the material, and the control light absorption region absorbs the control light having a wavelength selected from the wavelength band absorbed by the control light absorption region and the control light absorption region. Na The signal light having a wavelength selected from a wavelength band is converged and irradiated, and the control light and the signal light are irradiated such that the positions of the convergence points of the control light and the signal light are the same or different, and the control light absorption region is A thermal lens is formed based on a refractive index distribution formed reversibly due to a temperature rise that occurs in the control light-absorbing region and its surrounding region, and the thermal lens is not irradiated with the control light. If not, the converged signal light is emitted in the normal opening angle and straight direction, and the control light is irradiated so that the positions of the convergence points of the control light and the signal light are the same, and the thermal lens In the state where the converged signal light is emitted at an opening angle larger than a normal opening angle, or the control light and the signal light have different convergence points. When a thermal lens is formed by irradiation, a state in which the converged signal light is emitted in an opening angle different from a normal opening angle and in a direction different from the straight traveling direction is made to correspond to the presence or absence of the control light irradiation. It is characterized by being realized.
(5)水平に載置された角型断面中空管の内部に、信号光の波長の光を吸収せず制御光の波長の光を吸収する色素が内包された無機多孔質粒子を高分子バインダー溶液に分散させた液を注入した後、100℃以下の温度の気体を前記角型断面中空管の内部に送風して乾燥させ、前記角型断面中空管の底面に前記無機多孔質粒子の水溶性高分子バインダー塗工膜を形成する工程、前記塗工膜形成工程を繰り返し行い、所望の厚さの前記塗工膜を、前記底面の対向面との間に空房を挟んで形成する工程、前記角型断面中空管に乾燥気体を送風し前記塗工膜中の水分を除去する工程、前記角型断面中空管を500〜600℃に加熱し、前記角型断面中空管に500〜600℃の空気を送風して、前記水溶性高分子バインダーを焼成除去し、前記無機多孔質粒子から成る多孔質層を形成する工程、前記角型断面中空管の一端を溶融封止する工程、前記角型断面中空管の前記空房に、この空房を残して前記無機多孔質粒子と屈折率が同一になるよう調整された混合有機溶剤を充填し、前記多孔質層に前記混合有機溶剤を含浸させる工程、前記空房を減圧しこの空房内に前記混合有機溶剤の蒸気を充満させる工程、前記空房内に前記混合有機溶剤の蒸気および不活性気体を1気圧未満で充満させた状態で、前記角型断面中空管の他端を溶融封止する工程を有することを特徴とする。 (5) A polymer of inorganic porous particles in which a dye that absorbs light of the wavelength of the control light and does not absorb the light of the wavelength of the signal light is contained inside the horizontally mounted square cross-section hollow tube After injecting the liquid dispersed in the binder solution, a gas having a temperature of 100 ° C. or less is blown into the square cross-section hollow tube and dried, and the inorganic porous material is formed on the bottom of the square cross-section hollow tube. Steps of forming a water-soluble polymer binder coating film of particles and the coating film forming step are repeated, and the coating film having a desired thickness is formed with vacancies between the opposing surface of the bottom surface A step of blowing dry gas to the square cross-section hollow tube to remove moisture in the coating film, and heating the square cross-section hollow tube to 500 to 600 ° C. Blowing and removing the water-soluble polymer binder by blowing air at 500 to 600 ° C. to the tube, the inorganic A step of forming a porous layer made of porous particles, a step of melt-sealing one end of the square cross-section hollow tube, and the inorganic porous structure leaving the vacancies in the vacancies of the square cross-section hollow tube Filling the porous layer with a mixed organic solvent adjusted to have the same refractive index as that of the particles, impregnating the porous organic layer with the mixed organic solvent, decompressing the vacancies and filling the vacancies with the vapor of the mixed organic solvent And a step of melt-sealing the other end of the square cross-section hollow tube in a state where the vapor of the mixed organic solvent and an inert gas are filled at less than 1 atm in the empty chamber. To do.
本発明により、無機多孔質粒子から成る多孔質層に、信号光の波長の光を吸収せず、制御光の波長の光を吸収する色素を内包したので、経時変化によって結晶化し、析出する可能性のある、巨大芳香族化合物を溶剤可溶化した赤外線吸収・有機色素の使用を避けることができる。また、熱レンズ形成素子の製造プロセスの不備によって混入した酸素または水の影響で経時劣化する可能性のある有機色素の使用を避けることができる。更に、耐久性の点では優れるものの、溶液化が困難かつコロイド分散させても沈降し易い無機色素を熱レンズ形成素子の制御光吸収層として使用することが可能になる。 According to the present invention, the porous layer composed of inorganic porous particles contains a pigment that absorbs light of the control light wavelength without absorbing the signal light wavelength, so that it can be crystallized and deposited over time. Therefore, it is possible to avoid the use of infrared absorbing organic dyes which are soluble solubilized macroaromatic compounds. In addition, it is possible to avoid the use of an organic dye that may deteriorate over time due to the influence of oxygen or water mixed due to incomplete manufacturing process of the thermal lens forming element. Furthermore, although it is excellent in terms of durability, it is possible to use an inorganic dye that is difficult to be made into a solution and easily settles even when colloidally dispersed as a control light absorbing layer of a thermal lens forming element.
以下、図1a〜図7の図面を参照して本発明の実施の形態を説明する。
(実施の形態1)
熱レンズ形成素子の構成:
まず、熱レンズ形成素子100の概略構成について説明し、その後、熱レンズ形成素子100を構成する各構成要素及びその製造方法について詳しく説明する。図2cに示すように、熱レンズ形成素子100は、内部が中空の直方体であり、内部に内側平面16,17を含む4つの平面を備える角型断面中空管1と、そのうちの1つの平面である内側平面16に形成された無機多孔質粒子層6と、角型断面中空管1の内部に所定量充填される屈折率が調整された混合有機溶剤10と、角型断面中空管1の内部に封入される不活性気体からなる1つの気泡11とを備えている。角型断面中空管1の内部は、混合有機溶剤10及び気泡11によって満たされている。角型断面中空管1の一端7が溶融封止された後に混合有機溶剤10が充填されて、さらに、気泡11が封入された後に角型断面中空管1の他端12が溶融封止される。また、角型断面中空管1の内側平面16,17に対応する外側平面14,15には無反射コートが施される。
Embodiments of the present invention will be described below with reference to the drawings of FIGS.
(Embodiment 1)
Configuration of thermal lens forming element:
First, a schematic configuration of the thermal lens forming element 100 will be described, and then each component constituting the thermal lens forming element 100 and a manufacturing method thereof will be described in detail. As shown in FIG. 2c, the thermal lens forming element 100 is a rectangular parallelepiped hollow tube 1 having a hollow rectangular parallelepiped shape and including four planes including inner planes 16 and 17, and one of the planes. The inorganic porous particle layer 6 formed on the inner flat surface 16, the mixed organic solvent 10 with the refractive index adjusted to be filled in the square cross-section hollow tube 1 by a predetermined amount, and the square cross-section hollow tube 1 and one bubble 11 made of an inert gas sealed inside. The inside of the square cross-section hollow tube 1 is filled with the mixed organic solvent 10 and the bubbles 11. After one end 7 of the square cross-section hollow tube 1 is melt-sealed, the mixed organic solvent 10 is filled, and after the bubbles 11 are sealed, the other end 12 of the square cross-section hollow tube 1 is melt-sealed. Is done. Further, a non-reflective coating is applied to the outer flat surfaces 14 and 15 corresponding to the inner flat surfaces 16 and 17 of the square cross-section hollow tube 1.
[角型断面中空管]
図2c、図3a等に示すように、本発明の熱レンズ形成素子100に用いられる、合計4つの当該平面について互いに平行な、2つの外側平面14,15および2つの内側平面16,17を有する角型断面中空管1の材質は石英ガラスが好適に用いられる。
[Square cross-section hollow tube]
As shown in FIG. 2c, FIG. 3a, etc., there are two outer planes 14, 15 and two inner planes 16, 17 that are used in the thermal lens forming element 100 of the present invention and are parallel to each other for a total of four planes. Quartz glass is preferably used as the material of the square cross-section hollow tube 1.
角型断面中空管1の管壁を構成する石英ガラスの板材の厚さSは100μmないし500μmが好適である。石英ガラスの板材の厚さSが100μmよりも薄いと、強度不足で加工時に破損し易くなる。一方、石英ガラスの板材の厚さが500μmよりも厚いと、収束しながら入射する信号光あるいは拡散・偏光しながら出射する信号光のビーム形状が屈折の影響で劣化する度合い、すなわち、ビーム断面形状の円からの乖離が大きくなり好ましくない。 The thickness S of the quartz glass plate constituting the tube wall of the square cross-section hollow tube 1 is preferably 100 μm to 500 μm. If the thickness S of the quartz glass plate material is thinner than 100 μm, the quartz glass plate is easily damaged due to insufficient strength. On the other hand, if the thickness of the quartz glass plate is greater than 500 μm, the degree to which the beam shape of the signal light that is incident while converging or the signal light that is emitted while being diffused and polarized is deteriorated due to refraction, that is, the beam cross-sectional shape The deviation from the circle becomes large, which is not preferable.
角型断面中空管1の寸法は加工上の制約、内部に注入される混合有機溶剤10の液柱の長さの制約、および、熱レンズ効果の大きさ、との関係で最適な大きさが決定される。
まず、加工上の制約として、外側平面の幅1mm以下の角型断面中空管1の末端を石英ガラスの融点約1700℃において加熱溶融によって封止する場合、内部の色素溶液の端部と溶融封止部分の距離Hは最小10mmであり、上限については加工上の制限はなく、産業上の利用の観点からはできるだけ短いことが好ましく、15mm以内であれば好適である。一方、角型断面中空管1の寸法は加工上の制約、内部に注入される色素溶液の液柱の長さMは、最小1mm、最長15mm程度であることが好ましい。液柱の長さMが1mmよりも短いと、信号光および制御光の通過する平面部分が、角型断面中空管1の溶融封止端面の形状の影響を受けるおそれがある。液柱の長さMには特に上限はないが、色素溶液充填操作上、最長15mmよりも短いことが好ましい。したがって、角型断面中空管1の一方の端に色素溶液の液柱を一端に寄せて5ないし10mmの長さで充填した場合、角型断面中空管1の全長は20ないし25mmである。
The dimensions of the rectangular cross-section hollow tube 1 are optimal in relation to processing restrictions, restrictions on the length of the liquid column of the mixed organic solvent 10 injected into the inside, and the thermal lens effect. Is determined.
First, as a processing restriction, when the end of a square cross-section hollow tube 1 having a width of 1 mm or less on the outer plane is sealed by heating and melting at a melting point of quartz glass of about 1700 ° C., the end of the internal dye solution and the melt The distance H of the sealing portion is a minimum of 10 mm, the upper limit is not limited in processing, and is preferably as short as possible from the viewpoint of industrial use, and is preferably within 15 mm. On the other hand, it is preferable that the dimensions of the square cross-section hollow tube 1 are processing restrictions, and the length M of the liquid column of the dye solution injected into the interior is a minimum of about 1 mm and a maximum of about 15 mm. When the length M of the liquid column is shorter than 1 mm, the plane portion through which the signal light and the control light pass may be affected by the shape of the end face of the melt-sealed hollow tube 1. There is no particular upper limit on the length M of the liquid column, but it is preferably shorter than 15 mm at the longest in the dye solution filling operation. Accordingly, when the liquid column of the dye solution is brought to one end of the square cross-section hollow tube 1 and filled with a length of 5 to 10 mm, the total length of the square cross-section hollow tube 1 is 20 to 25 mm. .
一方、熱レンズ形成素子100に用いられる角型断面中空管1の内側平面2つ(内側平面16および17)の間隔、すなわち、無機多孔質粒子層6の厚さd1に、屈折率が調整された混合有機溶剤の厚さd2を加えた光路長d0は、熱レンズ形成および消滅の応答速度の観点から最適な大きさが決定される(図2c参照)。すなわち、制御光吸収領域における熱レンズ形成をできるだけ効果的に行うには、特定の領域にある程度の熱エネルギーが蓄積される必要がある。例えば、一例として、ガラス基板に色素薄膜を真空蒸着によって直接形成した場合には、制御光を収束照射しても発生した熱は瞬時に拡散してしまうため、検知できるような熱レンズ効果は起こらない。無機多孔質粒子層6の厚さd1および屈折率が調整された混合有機溶剤10の厚さd2を各々変えて、熱レンズ効果の大きさを調べた結果、無機多孔質粒子層6の厚さd1は100μmから200μmが好ましいこと、また、屈折率が調整された混合有機溶剤10の厚さd2については、熱レンズ効果の大きさよりも無機多孔質粒子層6を製造する際の空房4の厚さが、作業上、200μmないし500μmであることが好ましいことから、厚さd1にd2を加えた光路長dは400μmから700μmが好ましいことが判った。無機多孔質粒子層6の厚さd1が100μm未満であると、無機多孔質粒子層6を構成する無機多孔質粒子に内包された無機色素が制御光を吸収したときの熱が角型断面中空管1の内側平面16に逃げてしまい、熱レンズの形成が妨げられる。一方、無機多孔質粒子層6の厚さd1が200μmを超えると、色素が制御光を吸収したときの熱が無機多孔質粒子層6に止まり、近接した混合有機溶剤10における熱レンズ形成に有効に利用されない。屈折率が調整された混合有機溶剤10の厚さd2は無機多孔質粒子層6を製造する際の空房4の厚さに相当するが、これが200μm未満であると、多孔質粒子の分散液の注入抵抗が大きくなり、作業に支障をきたす。一方、厚さd2が500μmを超えると、厚さd1にd2を加えた光路長dが700μmを超えることとなり、熱レンズ効果によって光路が偏光される信号光の偏向角度を考慮すると、角型断面中空管1の信号光入射面および出射面の幅を、相応に大きくする必要が生じる。その結果、角型断面中空管1の断面サイズが外寸で1.2mm以上となり、有機溶剤注入後の溶融封止に大きな炎が必要となり、溶融封止に失敗する可能性が高くなってしまう。 On the other hand, the refractive index is adjusted to the distance between the two inner planes (inner planes 16 and 17) of the square cross-section hollow tube 1 used in the thermal lens forming element 100, that is, the thickness d1 of the inorganic porous particle layer 6. The optical path length d0 to which the thickness d2 of the mixed organic solvent is added is determined to be optimal from the viewpoint of the response speed of thermal lens formation and extinction (see FIG. 2c). That is, in order to form the thermal lens in the control light absorption region as effectively as possible, a certain amount of thermal energy needs to be accumulated in a specific region. For example, as an example, when a dye thin film is directly formed on a glass substrate by vacuum deposition, the generated heat is diffused instantaneously even when the control light is convergently irradiated, so that a detectable thermal lens effect does not occur. Absent. The thickness d1 of the inorganic porous particle layer 6 and the thickness d2 of the mixed organic solvent 10 in which the refractive index was adjusted were changed to examine the magnitude of the thermal lens effect. As a result, the thickness of the inorganic porous particle layer 6 was determined. d1 is preferably 100 μm to 200 μm, and the thickness d2 of the mixed organic solvent 10 whose refractive index has been adjusted is greater than the thickness of the thermal lens effect, and the thickness of the empty chamber 4 when the inorganic porous particle layer 6 is produced. However, from the viewpoint of work, it is preferable that the thickness is 200 μm to 500 μm. Therefore, it was found that the optical path length d obtained by adding d2 to the thickness d1 is preferably 400 μm to 700 μm. When the thickness d1 of the inorganic porous particle layer 6 is less than 100 μm, the heat when the inorganic dye contained in the inorganic porous particles constituting the inorganic porous particle layer 6 absorbs the control light is in the square cross section. It escapes to the inner plane 16 of the empty tube 1, and the formation of the thermal lens is hindered. On the other hand, when the thickness d1 of the inorganic porous particle layer 6 exceeds 200 μm, the heat when the dye absorbs the control light stops at the inorganic porous particle layer 6 and is effective for forming a thermal lens in the adjacent mixed organic solvent 10. Not used for. The thickness d2 of the mixed organic solvent 10 with the adjusted refractive index corresponds to the thickness of the vacancies 4 when the inorganic porous particle layer 6 is produced. If this is less than 200 μm, the dispersion of the porous particles The injection resistance increases, which hinders work. On the other hand, when the thickness d2 exceeds 500 μm, the optical path length d obtained by adding d2 to the thickness d1 exceeds 700 μm. Considering the deflection angle of the signal light whose optical path is polarized by the thermal lens effect, the square cross section The widths of the signal light incident surface and the output surface of the hollow tube 1 need to be increased accordingly. As a result, the cross-sectional size of the square cross-section hollow tube 1 is 1.2 mm or more in outer dimension, and a large flame is required for melt sealing after injecting the organic solvent, which increases the possibility of failure of melt sealing. End up.
また、熱レンズ形成素子100に用いられる角型断面中空管1の内側平面16,17の幅Dは、平面部分に収束されて入射する制御光および信号光のビーム径、および、広がりながら出射する信号光のビーム径、および、光路が偏光されて出射する信号光のビーム径と出射位置から規定される。なお、信号光は角型断面中空管1の内側平面16または17に内接する円(その直径Q=D)の中心を通過するものとする。具体的には、熱レンズ形成素子100に入射する前記信号光および制御光のビーム直径の大きい方をRとしたとき、角型断面中空管1の内側平面16,17の幅Dの最小値は、前記大きい方のビーム直径Rの2倍程度であれば良い。幅Dの最小値または長さMの最小値が2Rよりも小さいと、広がりながら出射する信号光が、角型断面中空管1の内側平面16,17に直交する内側側面16,17に遮られる可能性がある。ビーム直径Rが最も大きくなるのは、マルチモードファイバーからの出射光をコリメートした平行光を信号光または制御光として入射させる場合であって、Rは100μm前後である。すなわち、2RすなわちDの最小値は200μmである。 Further, the width D of the inner flat surfaces 16 and 17 of the square cross-section hollow tube 1 used for the thermal lens forming element 100 is converged on the plane portion and incident on the beam diameters of the control light and the signal light, and is emitted while spreading. The beam diameter of the signal light to be transmitted, the beam diameter of the signal light that is output after the optical path is polarized, and the emission position are defined. It is assumed that the signal light passes through the center of a circle (its diameter Q = D) inscribed in the inner plane 16 or 17 of the square cross-section hollow tube 1. Specifically, the minimum value of the width D of the inner planes 16, 17 of the square cross-section hollow tube 1, where R is the larger beam diameter of the signal light and control light incident on the thermal lens forming element 100. May be about twice the larger beam diameter R. When the minimum value of the width D or the minimum value of the length M is smaller than 2R, the signal light emitted while spreading spreads on the inner side surfaces 16 and 17 orthogonal to the inner planes 16 and 17 of the rectangular cross-section hollow tube 1. There is a possibility that. The beam diameter R is the largest when collimated collimated light from the multimode fiber is incident as signal light or control light, and R is around 100 μm. That is, the minimum value of 2R, that is, D is 200 μm.
角型断面中空管1の内側平面16,17の幅Dは、角型断面中空管1の管壁を構成する石英ガラスの強度上の制約を受け、当該石英ガラスの板材の厚さSの2倍を超えると破損し易くなる。厚さSが100μmの場合、信号光または制御光ビームの制約、すなわちDは200μmとすると前記2つの制約を同時に満足する。厚さSが200〜250μmの場合、Dの最大値は400〜700μmであり、強度的にも信号光または制御光ビームの透過上にも好適である。 The width D of the inner flat surfaces 16 and 17 of the square cross-section hollow tube 1 is limited by the strength of the quartz glass constituting the tube wall of the square cross-section hollow tube 1, and the thickness S of the quartz glass plate material When it exceeds 2 times, it becomes easy to break. When the thickness S is 100 μm, the restriction of the signal light or the control light beam, that is, D is 200 μm, the two restrictions are satisfied simultaneously. When the thickness S is 200 to 250 μm, the maximum value of D is 400 to 700 μm, which is suitable in terms of intensity and transmission of signal light or control light beam.
以上まとめると、熱レンズ形成素子100に用いられる角型断面中空管1の寸法上の好ましい実施の形態は次の通りである。 In summary, the preferred embodiments of the dimensions of the square cross-section hollow tube 1 used for the thermal lens forming element 100 are as follows.
(1)角型断面中空管1の管壁の厚さS:200〜250μm。 (1) The tube wall thickness S of the square cross-section hollow tube 1 is 200 to 250 μm.
(2)角型断面中空管1の内側平面の幅D:500〜700μm。 (2) The width D of the inner plane of the square cross-section hollow tube 1 is 500 to 700 μm.
(3)角型断面中空管1の外側平面の幅D:1000〜1200μm。 (3) The width D of the outer plane of the square cross-section hollow tube 1 is 1000 to 1200 μm.
(4)角型断面中空管1の内側平面2つの間隔d0:500〜700μm。 (4) The distance d0 between the two inner planes of the square cross-section hollow tube 1: 500 to 700 μm.
(5)角型断面中空管1の内部の一端に注入される混合有機溶剤の液柱の長さM:1〜15mm。 (5) The length M of the liquid column of the mixed organic solvent injected into one end inside the square cross-section hollow tube 1: 1 to 15 mm.
(6)内部の混合有機溶剤10の端部と溶融封止部分の距離H:10〜15mm。 (6) Distance H between the end portion of the mixed organic solvent 10 inside and the melt-sealed portion: 10 to 15 mm.
[角型断面中空管の製造]
公知の方法によって製造された角型断面中空管1のプリフォームを公知の方法によって溶融延伸・冷却することによって、本発明の熱レンズ形成素子100に用いられる角型断面中空管1を製造することができる。角型断面中空管1の寸法上の好ましい実施の形態は前述の通りである。
[Manufacture of square cross-section hollow tubes]
A square cross-section hollow tube 1 used in the thermal lens forming element 100 of the present invention is manufactured by melt-drawing and cooling a preform of the square cross-section hollow tube 1 manufactured by a known method by a known method. can do. A preferred embodiment in terms of the dimensions of the square cross-section hollow tube 1 is as described above.
信号光が通過する角型断面中空管1の4つの面(2つの外側平面14,15および2つの内側平面16,17)の平行度および平滑性については、次のような公差を満足することが好ましい。なお、X,Y,Z軸は以下のように定義する。 The parallelism and smoothness of the four surfaces (two outer planes 14 and 15 and two inner planes 16 and 17) of the rectangular cross-section hollow tube 1 through which the signal light passes satisfy the following tolerances. It is preferable. The X, Y, and Z axes are defined as follows.
X軸:角型断面中空管1の長軸方向。 X axis: Long axis direction of the square cross-section hollow tube 1.
Y軸:信号光が通過する角型断面中空管1の4つの面14〜17に平行で、角型断面中空管の長軸に直交。 Y axis: parallel to the four surfaces 14 to 17 of the rectangular cross-section hollow tube 1 through which signal light passes, and perpendicular to the long axis of the square cross-section hollow tube.
Z軸:角型断面中空管1の4つの面14〜17を垂直に通過する信号光の方向。 Z-axis: direction of signal light passing perpendicularly through the four surfaces 14 to 17 of the square cross-section hollow tube 1.
(1)平滑性:波長(λ)400〜1600nmの光についてλ/4。 (1) Smoothness: λ / 4 for light having a wavelength (λ) of 400 to 1600 nm.
(2)Z軸に対するX軸方向の角度ずれ:1度以下、好ましくは0.5度以下。 (2) Angular deviation in the X axis direction with respect to the Z axis: 1 degree or less, preferably 0.5 degrees or less.
(3)Z軸に対するY軸方向の角度ずれ:1度以下、好ましくは0.5度以下。 (3) Angular deviation in the Y-axis direction with respect to the Z-axis: 1 degree or less, preferably 0.5 degrees or less.
[角型断面中空管1の切断および洗浄]
熱レンズ形成素子100の長軸方向の長さ(H+M)は、例えば、混合有機溶剤10の液柱の長さMが10mmの場合、20〜25mmである。この長さの熱レンズ形成素子100を製造するためには、後述の工程で失われる部分の長さを補って、予め、長さ(H+M)の2ないし3倍の長さ(具体的には50〜80mm)に、角型断面中空管1の切断を行うことが好ましい。角型断面中空管1の切断は公知の方法で行うことができる。
[Cutting and cleaning of square cross-section hollow tube 1]
The length (H + M) in the major axis direction of the thermal lens forming element 100 is, for example, 20 to 25 mm when the length M of the liquid column of the mixed organic solvent 10 is 10 mm. In order to manufacture the thermal lens forming element 100 having this length, a length (specifically, two to three times as long as the length (H + M) is compensated in advance by making up for the length of a portion lost in a process described later. It is preferable to cut the square cross-section hollow tube 1 at 50 to 80 mm). The square cross-section hollow tube 1 can be cut by a known method.
[有機色素は使用不可]
本発明の熱レンズ素子において多孔質層を構成する、色素を内包した無機多孔質粒子は500〜600℃における焼成行程の高温に曝されるため、有機色素を使用することは困難である。
[Organic dyes cannot be used]
Since the inorganic porous particles encapsulating the dye constituting the porous layer in the thermal lens element of the present invention are exposed to a high temperature during the firing process at 500 to 600 ° C., it is difficult to use an organic dye.
[無機色素]
本発明の熱レンズ素子において多孔質層を構成する無機多孔質粒子に内包させるのに好適な無機色素を以下に列挙する。
[Inorganic dye]
Inorganic lenses suitable for inclusion in the inorganic porous particles constituting the porous layer in the thermal lens element of the present invention are listed below.
〔a〕金属塩(例、塩化コバルト、臭化銅など) [A] Metal salt (eg, cobalt chloride, copper bromide, etc.)
〔b〕金属酸化物、複合酸化物顔料(例、大日精化工業株式会社製、ダイピロキサイド(登録商標)各種) [B] Metal oxides and composite oxide pigments (eg, Daiichi Seika Kogyo Co., Ltd., various types of Dipyroxide (registered trademark))
〔c〕金属硫化物(例、硫化カドミウム、硫化銅) [C] Metal sulfides (eg, cadmium sulfide, copper sulfide)
〔d〕金属微粒子およびコロイド(例、金、銀、ケイ素、ゲルマニウム) [D] Metal fine particles and colloids (eg, gold, silver, silicon, germanium)
〔e〕化合物半導体(例、テルル化カドミウム、ヒ化ガリウム、リン化インジウム、セレン化銅インジウム) [E] Compound semiconductor (eg, cadmium telluride, gallium arsenide, indium phosphide, copper indium selenide)
なお、表1に掲げるような無機色素の吸収波長は、微粒子とした場合、粒子径と周辺環境によって変化するため、表1に記載する波長は、あくまで「一例」である。 In addition, since the absorption wavelength of inorganic pigments listed in Table 1 varies depending on the particle diameter and the surrounding environment when fine particles are used, the wavelength described in Table 1 is merely an example.
[無機多孔質粒子からなる無機多孔質粒子層の作成]
図1b〜1eに示すように、本発明の熱レンズ形成素子100の無機多孔質粒子層6は、無機色素を内包した無機多孔質粒子からなり、水平に載置された角型断面中空管1へ高分子バインダー溶液に分散させた無機多孔質粒子分散液2を注入した後、この無機多孔質粒子分散液2の大部分を流し出した後に角型断面中空管1の内側平面16の上に残留した残留無機多孔質粒子分散液3を、100℃以下の温度の送風空気8を角型断面中空管1の内部に送風して乾燥させる操作を繰り返し実施し、所望の厚さの無機多孔質粒子塗工膜5を形成し、これを完全に乾燥してから500〜600℃の送風空気9によって焼成し、高分子バインダーを除去することで作成される。
[Creation of an inorganic porous particle layer composed of inorganic porous particles]
As shown in FIGS. 1b to 1e, the inorganic porous particle layer 6 of the thermal lens forming element 100 of the present invention is composed of inorganic porous particles containing an inorganic dye, and is a square section hollow tube placed horizontally. After injecting the inorganic porous particle dispersion 2 dispersed in the polymer binder solution into 1, the majority of the inorganic porous particle dispersion 2 is poured out, and then the inner flat surface 16 of the square cross-section hollow tube 1 is poured. The residual inorganic porous particle dispersion 3 remaining on the top is repeatedly subjected to an operation of blowing the air 8 at a temperature of 100 ° C. or less into the hollow tube 1 and drying it to obtain a desired thickness. The inorganic porous particle coating film 5 is formed, dried completely, and then baked with blown air 9 at 500 to 600 ° C. to remove the polymer binder.
[無機多孔質粒子]
本発明の熱レンズ形成素子100の無機多孔質粒子層6を形成する無機多孔質粒子としては、後述の混合有機溶剤10との屈折率の適合性の点から、酸化ケイ素(シリカゲル;波長588nmにおける石英ガラスの屈折率の例、1.5168)が好適である。酸化ケイ素からなる多孔質粒子は公知のゾルゲル法で好適に製造でき、その製造工程において、無機色素微粒子を内包させる。
[Inorganic porous particles]
As the inorganic porous particles forming the inorganic porous particle layer 6 of the thermal lens forming element 100 of the present invention, silicon oxide (silica gel; at a wavelength of 588 nm) from the viewpoint of compatibility of the refractive index with the mixed organic solvent 10 described later. An example of the refractive index of quartz glass, 1.5168) is preferred. Porous particles made of silicon oxide can be suitably produced by a known sol-gel method, and inorganic pigment fine particles are included in the production process.
本発明の熱レンズ形成素子100の無機多孔質粒子層6を形成する無機多孔質粒子の粒度分布を制御することで、内包させた色素の吸収スペクトルの形、特に最長吸収波長(吸収端)をシャープに整えることができる。これは、制御光波長と信号光波長を、できるだけ近づける必要がある場合、重要である。 By controlling the particle size distribution of the inorganic porous particles forming the inorganic porous particle layer 6 of the thermal lens forming element 100 of the present invention, the shape of the absorption spectrum of the encapsulated dye, particularly the longest absorption wavelength (absorption edge) can be obtained. Can be sharpened. This is important when the control light wavelength and the signal light wavelength need to be as close as possible.
本発明の熱レンズ形成素子100の無機多孔質粒子層6を形成する無機多孔質粒子の平均粒子径は、1次粒子として1〜100nm、1次粒子の凝集体として10〜1000nmが好適である。これらの粒径を外れた場合、粒度分布をシャープに制御することが困難になるおそれがある。 The average particle diameter of the inorganic porous particles forming the inorganic porous particle layer 6 of the thermal lens forming element 100 of the present invention is preferably 1 to 100 nm as primary particles and 10 to 1000 nm as aggregates of primary particles. . When these particle diameters are deviated, it may be difficult to sharply control the particle size distribution.
[無機多孔質粒子の分散液]
無機多孔質粒子としてシリカゲルを用いる場合、分散液の溶剤としては水が好適である。高分子バインダーとしてはポリビニルアルコールが好ましく、特に分散剤を使用することなく、安定かつ低粘度の分散液(塗工液)を調整することができる。
[Dispersion of inorganic porous particles]
When silica gel is used as the inorganic porous particles, water is suitable as a solvent for the dispersion. Polyvinyl alcohol is preferable as the polymer binder, and a stable and low-viscosity dispersion liquid (coating liquid) can be prepared without using a dispersant.
無機多孔質粒子としてシリカゲルを用いる場合の分散液の好適な具体的実施の形態は、例えば、シリカゲルの1次粒子径7nm、凝集体としての粒子径100nmを8重量%で水に超音波分散した液とポリビニルアルコールの8重量%水溶液を1:4重量部で混合したものである。 A preferred specific embodiment of the dispersion when silica gel is used as the inorganic porous particles is, for example, that the primary particle diameter of silica gel is 7 nm and the particle diameter of 100 nm as an aggregate is ultrasonically dispersed in water at 8 wt%. A liquid and an 8% by weight aqueous solution of polyvinyl alcohol are mixed at 1: 4 parts by weight.
[無機多孔質粒子塗工膜の作成]
図1aに示すように、角型断面中空管1を例えば長さ300mmに切断し、その一端を保温・加熱炉35の内部に載置された注入ヘッダー20の挿入孔21へ差し込む。注入ヘッダー20に取り付けられた空気導入バルブ22を閉じ、分散液導入バルブ23を開き、無機多孔質分散液25を角型断面中空管1へ注入し、廃液受器30に余剰分散液が流れ出るまで注入を続けた後、分散液導入バルブ23を閉じる。次いで、空気導入バルブ22を開き、空気余熱器26で室温以上、100℃未満に加熱された空気を、水平に載置された角型断面中空管1へ穏やかに注入する。空気の流速は、毎秒10〜30mmになるように流量を制御する。こうして、角型断面中空管1の内側平面16の上面へ、無機多孔質粒子塗工膜5を形成する。この分散液注入及び乾燥の手順を繰り返して行い、角型断面中空管1の内壁17の上面に、所望の厚さの無機多孔質粒子塗工膜5を形成する。加温した空気を注入により水分を除去し、無機多孔質粒子塗工膜5を完全に乾燥する。次いで、保温・加熱炉35の内部温度を500〜600℃に加熱し、空気導入バルブ22を開き、送風空気24を空気余熱器26で加熱して500〜600℃に加熱された空気を角型断面中空管1へ注入する。空気の流速は、毎秒100〜500mmになるよう、流量を制御する。こうして無機多孔質粒子塗工膜5に含まれる高分子バインダーを燃焼・除去し、無機多孔質粒子層6を角型断面中空管1の内側平面16の上面に形成する。以上の行程で、空気の注入速度が高すぎると、無機多孔質粒子層6にヒビが入ったり、表面が波打ったりする。また、焼成温度が600℃を超えると、シリカゲルの孔が融着するおそれが出る。
[Creation of inorganic porous particle coating film]
As shown in FIG. 1 a, the rectangular cross-section hollow tube 1 is cut into, for example, a length of 300 mm, and one end thereof is inserted into the insertion hole 21 of the injection header 20 placed inside the heat insulation / heating furnace 35. The air introduction valve 22 attached to the injection header 20 is closed, the dispersion introduction valve 23 is opened, the inorganic porous dispersion 25 is injected into the square cross-section hollow tube 1, and the excess dispersion flows out to the waste liquid receiver 30. Then, the dispersion introduction valve 23 is closed. Next, the air introduction valve 22 is opened, and the air heated to the room temperature or higher and lower than 100 ° C. by the air residual heater 26 is gently injected into the horizontally disposed square section hollow tube 1. The flow rate is controlled so that the air flow rate is 10 to 30 mm per second. In this way, the inorganic porous particle coating film 5 is formed on the upper surface of the inner flat surface 16 of the square cross-section hollow tube 1. This procedure of pouring and drying the dispersion is repeated to form an inorganic porous particle coating film 5 having a desired thickness on the upper surface of the inner wall 17 of the square cross-section hollow tube 1. Water is removed by injecting heated air to completely dry the inorganic porous particle coating film 5. Next, the internal temperature of the heat retaining / heating furnace 35 is heated to 500 to 600 ° C., the air introduction valve 22 is opened, and the air heated to 500 to 600 ° C. by heating the blown air 24 with the air residual heater 26 is square. Injection into the cross-section hollow tube 1. The flow rate is controlled so that the air flow rate is 100 to 500 mm per second. In this way, the polymer binder contained in the inorganic porous particle coating film 5 is burned and removed, and the inorganic porous particle layer 6 is formed on the upper surface of the inner flat surface 16 of the square cross-section hollow tube 1. In the above process, if the air injection speed is too high, the inorganic porous particle layer 6 is cracked or the surface is wavy. On the other hand, if the firing temperature exceeds 600 ° C., the silica gel holes may be fused.
[無機色素を内包した無機多孔質粒子の作成]
本発明の熱レンズ形成素子100の製造プロセスにおいて、無機多孔質粒子層6を構成する無機多孔質粒子に無機色素を内包させる手順は、無機多孔質粒子層6の焼成工程の前に行うことが好ましい。無機多孔質粒子層6を構成する無機多孔質粒子に無機色素を内包させる手法は以下に列挙する方法が好適に利用できる。
[Preparation of inorganic porous particles containing inorganic pigment]
In the manufacturing process of the thermal lens forming element 100 of the present invention, the procedure for encapsulating the inorganic dye in the inorganic porous particles constituting the inorganic porous particle layer 6 is performed before the firing step of the inorganic porous particle layer 6. preferable. As a method for encapsulating an inorganic dye in the inorganic porous particles constituting the inorganic porous particle layer 6, the methods listed below can be suitably used.
〔A〕必要に応じて界面活性剤を用い、水と、水溶性有機溶剤と、無機色素微粒子と、アルコキシシランとを含む溶液を、温度調整下で撹拌することにより該無機色素微粒子の表面にシリカゲル膜を形成し、無機顔料微粒子を内包した無機多孔質粒子を作成する。 [A] If necessary, a surfactant is used, and a solution containing water, a water-soluble organic solvent, inorganic pigment fine particles, and alkoxysilane is stirred on the surface of the inorganic pigment fine particles by adjusting the temperature. A silica gel film is formed, and inorganic porous particles containing inorganic pigment fine particles are prepared.
〔B〕必要に応じて界面活性剤を用い、水と、水溶性有機溶剤と、アルコキシシランとを含む溶液を、温度調整下で撹拌することによりシリカゲル微粒子の核を形成させ、そこへ無機色素微粒子の分散液を追加して、温度調整下で撹拌を続けることによって無機顔料微粒子を内包した無機多孔質粒子を作成する。 [B] If necessary, a surfactant is used, and a solution containing water, a water-soluble organic solvent, and an alkoxysilane is stirred under temperature adjustment to form nuclei of silica gel fine particles. By adding a dispersion of fine particles and continuing stirring under temperature adjustment, inorganic porous particles containing inorganic pigment fine particles are prepared.
いずれの場合も、アルコキシシランの反応温度は20℃以下、好ましくは0℃ないし10℃に保つことが好ましい。前記の温度範囲以下では水が凍結するおそれがある。一方、反応温度が高いと粗大なシリカゲル粒子が形成され、無機多孔質粒子層6を構成する無機多孔質粒子としては不適切となる。 In any case, the reaction temperature of the alkoxysilane is preferably kept at 20 ° C. or lower, preferably 0 ° C. to 10 ° C. Below the above temperature range, water may freeze. On the other hand, when the reaction temperature is high, coarse silica gel particles are formed, which is inappropriate as the inorganic porous particles constituting the inorganic porous particle layer 6.
[好適な色素濃度]
本発明の熱レンズ形成素子100において、無機多孔質粒子層6の厚さd1および屈折率が調整された後述の混合有機溶剤10の厚さd2を各々変えて、熱レンズ効果の大きさを調べた結果、無機多孔質粒子層6の厚さd1は100μmから200μmが好ましいことを見いだした。ここで、無機多孔質粒子層6を構成する無機多孔質粒子に内包される色素の濃度は、使用される制御光の波長において、透過率が0.1%から10%になるよう、調整することが好ましい。前記透過率が0.1%未満になるよう、色素の濃度を高めると、信号光の波長領域まで裾を引いた吸収の影響や散乱の影響が大きくなり、熱レンズ形成素子100を透過する信号光の減衰が増すおそれがある。また、前記透過率が10%を超えると、制御光照射時、充分な大きさの熱レンズの形成が困難となるおそれがある。
[Preferable dye concentration]
In the thermal lens forming element 100 of the present invention, the thickness d1 of the inorganic porous particle layer 6 and the thickness d2 of the mixed organic solvent 10 to be described later in which the refractive index is adjusted are changed to investigate the magnitude of the thermal lens effect. As a result, it was found that the thickness d1 of the inorganic porous particle layer 6 is preferably 100 μm to 200 μm. Here, the density | concentration of the pigment | dye included in the inorganic porous particle which comprises the inorganic porous particle layer 6 is adjusted so that the transmittance | permeability may be 0.1 to 10% in the wavelength of the control light used. It is preferable. When the concentration of the dye is increased so that the transmittance is less than 0.1%, the influence of absorption or scattering that extends to the wavelength region of the signal light is increased, and the signal transmitted through the thermal lens forming element 100 is increased. There is a risk that light attenuation will increase. On the other hand, if the transmittance exceeds 10%, it may be difficult to form a sufficiently large thermal lens during control light irradiation.
言うまでもなく、使用する色素の吸収係数が大きいほど、無機多孔質粒子に内包させたときの色素濃度の調整が容易になる。 Needless to say, the greater the absorption coefficient of the dye used, the easier it is to adjust the dye concentration when encapsulated in the inorganic porous particles.
[混合有機溶剤]
熱レンズ形成素子100に好適に用いられる有機溶剤の一般的諸物性は特許文献7に詳細に記載されている。本発明の熱レンズ形成素子100に用いられる混合有機溶剤10は、これらの諸物性を満足する上に、制御光が照射されない場合の信号光透過率を最大にするよう、無機多孔質粒子層6と屈折率を等価にする必要がある。
[Mixed organic solvent]
General physical properties of the organic solvent suitably used for the thermal lens forming element 100 are described in detail in Patent Document 7. The mixed organic solvent 10 used in the thermal lens forming element 100 of the present invention satisfies these various properties, and in addition, maximizes the signal light transmittance when the control light is not irradiated. And the refractive index should be equivalent.
石英ガラスないしシリカゲルの屈折率は石英ガラスの組成、特に水酸基の含有量に応じて異なるが、一例として、波長588nmにおいて1.51680、波長1060nmにおいて1.50669である。これに対して、下記の4成分混合溶剤の市販品(これを「溶剤#1」と呼ぶ。)の波長588nmにおける屈折率は1.563と、石英ガラスよりも若干大きい。因みに、有機溶剤分子中のフェニル基など芳香族残基の含有量が大きいほど、屈折率は高くなる。一方、脂肪族系有機溶剤の屈折率は比較的低い。
・第1成分:1−フェニル−1−(2,5−キシリル)エタン
・第2成分:1−フェニル−1−(2,4−キシリル)エタン
・第3成分:1−フェニル−1−(3,4−キシリル)エタン
・第4成分:1−フェニル−1−(4−エチルフェニル)エタン
The refractive index of quartz glass or silica gel varies depending on the composition of quartz glass, particularly the hydroxyl group content, but as an example, it is 1.51680 at a wavelength of 588 nm and 1.50669 at a wavelength of 1060 nm. On the other hand, the refractive index at a wavelength of 588 nm of a commercial product of the following four-component mixed solvent (referred to as “solvent # 1”) is 1.563, which is slightly larger than that of quartz glass. Incidentally, the refractive index increases as the content of an aromatic residue such as a phenyl group in the organic solvent molecule increases. On the other hand, the refractive index of the aliphatic organic solvent is relatively low.
First component: 1-phenyl-1- (2,5-xylyl) ethane Second component: 1-phenyl-1- (2,4-xylyl) ethane Third component: 1-phenyl-1- ( 3,4-Xylyl) ethane Fourth component: 1-phenyl-1- (4-ethylphenyl) ethane
溶剤#1の諸物性は以下の通りである。
・外観:無色透明液体
・臭気:弱い芳香臭
・沸点:290〜305℃
・融点:−47.5℃
・蒸気圧:0.067Pa (25℃)
・蒸気密度:7.2(空気=1)
・比重(水=1):0.987
・水溶解度(20℃):水に溶けない。
・体積熱膨張率(25℃から85℃):約5%
Various physical properties of the solvent # 1 are as follows.
Appearance: colorless and transparent liquid Odor: weak aromatic odor Boiling point: 290-305 ° C
Melting point: -47.5 ° C
・ Vapor pressure: 0.067Pa (25 ℃)
Vapor density: 7.2 (air = 1)
Specific gravity (water = 1): 0.987
-Water solubility (20 ° C): Insoluble in water.
Volume thermal expansion coefficient (25 ° C to 85 ° C): about 5%
溶剤#1に第5の成分として、屈折率の低い脂肪族系有機溶剤として、n−パラフィンを混合することで、混合有機溶剤としての諸物性、特に粘度−温度特性を熱レンズ形成素子用有機溶剤として好適に保ったまま、屈折率の値を石英ガラスないしシリカゲルの値に近づけることが可能となる。 By mixing n-paraffin as an aliphatic organic solvent having a low refractive index as the fifth component in the solvent # 1, various physical properties as a mixed organic solvent, in particular, viscosity-temperature characteristics can be obtained. It is possible to make the value of the refractive index close to that of quartz glass or silica gel while suitably maintaining as a solvent.
n−パラフィンとしては、沸点が溶剤#1に近いものとして、n−ヘプタデカンを好適に用いることができる。 As n-paraffin, n-heptadecane can be suitably used as its boiling point is close to that of solvent # 1.
n−ヘプタデカンの諸物性は以下の通りである。
・外観:無色透明液体
・臭気:弱い灯油臭
・沸点:302℃
・融点:22〜24℃
・屈折率:1.436(20℃、波長588nm)
・比重(水=1):0.77
・水溶解度(20℃):水に溶けない。
Various physical properties of n-heptadecane are as follows.
・ Appearance: Colorless transparent liquid ・ Odor: Weak kerosene odor ・ Boiling point: 302 ℃
Melting point: 22-24 ° C
Refractive index: 1.436 (20 ° C., wavelength 588 nm)
Specific gravity (water = 1): 0.77
-Water solubility (20 ° C): Insoluble in water.
溶剤#1に種々の割合でn−ヘプタデカンを混合した場合の屈折率および信号光透過率の測定例を表2に掲げる。なお、屈折率の測定はナトリウムのD線(波長588nm)を光源とするアッベ式屈折率計を用い、赤外線波長の信号光透過率の測定は、外寸1mmスクエア(正方形)、内寸500μmスクエア(正方形)の角型断面中空管1の内側平面16に厚さ200μmのシリカゲル焼成層(シリカゲルの見かけの粒子径100nm)を設け、一端のみ封止した熱レンズ形成素子100に混合有機溶剤試料を注入し、シリカゲル焼成層に混合有機溶剤を充分含浸させた後、熱レンズ効果測定用テストベンチ(図4)に取り付け、信号光として赤外線レーザーを強度1mWで照射し、当該混合有機溶剤のみを注入した、シリカゲル焼成層を有さない、角形断面中空管・素管を参照試料として、透過信号光の強度を比較する方法で実施した。なお、透過率測定の場合、図4における直進出力側信号光・光ファイバー420の代わりに光パワーメーターのセンサーを設置した。本測定の場合、一端のみ封止した熱レンズ形成素子の外側平面にARコートを行っていないため、信号光の透過率は最良でも90%前後である。 Table 2 lists measurement examples of the refractive index and the signal light transmittance when n-heptadecane is mixed with the solvent # 1 at various ratios. The refractive index was measured using an Abbe refractometer using sodium D-line (wavelength 588 nm) as the light source, and the signal wavelength transmittance of infrared wavelength was measured with an outer dimension of 1 mm square (square) and an inner dimension of 500 μm square. (Square) square cross-section hollow tube 1 is provided with a 200 μm thick silica gel fired layer (silica gel apparent particle diameter of 100 nm) on the inner flat surface 16, and a mixed organic solvent sample in the thermal lens forming element 100 sealed only at one end. After the silica gel fired layer is sufficiently impregnated with a mixed organic solvent, it is attached to a thermal lens effect measurement test bench (FIG. 4), irradiated with an infrared laser as signal light at an intensity of 1 mW, and only the mixed organic solvent is applied. This was carried out by a method of comparing the intensity of transmitted signal light using the injected square-section hollow tube / element tube without a silica gel fired layer as a reference sample. In the case of transmittance measurement, a sensor of an optical power meter was installed instead of the straight output side signal light / optical fiber 420 in FIG. In the case of this measurement, the AR coating is not performed on the outer plane of the thermal lens forming element that is sealed only at one end, so that the signal light transmittance is about 90% at the best.
[角型断面中空管の一端封止と真空乾燥]
図2a〜図3cに示すように、角型断面中空管1の一端7をバーナーで加熱溶融し、封止する。封止部分を光学顕微鏡で拡大して観察し、ピンホールが残っていないことを確認することが好ましい。バーナーの燃焼ガス中の水分が溶融封止した角型断面中空管1の内部に結露することがあるので、一端封止した角型断面中空管1を、適当な密閉可能な真空容器(図示せず)に入れ、例えば80℃以上に加熱しながら真空乾燥する。真空乾燥チャンバー内部の圧力が3×10-4Pa未満に到達すれば、乾燥は充分である。
[One-end sealing and vacuum drying of square cross-section hollow tube]
As shown in FIGS. 2a to 3c, one end 7 of the square cross-section hollow tube 1 is heated and melted with a burner and sealed. It is preferable to confirm that the pinhole does not remain by magnifying and observing the sealed portion with an optical microscope. Since moisture in the combustion gas of the burner may condense inside the melted and sealed square cross-section hollow tube 1, the square cross-section hollow tube 1 that has been sealed once is sealed in a suitable vacuum container ( (Not shown) and vacuum-dried while heating to 80 ° C. or higher, for example. If the pressure inside the vacuum drying chamber reaches less than 3 × 10 −4 Pa, the drying is sufficient.
[角型断面中空管への溶液注入]
混合有機溶剤10への水分および酸素の悪影響を避けるため、混合有機溶剤10の調整および以下の注入工程は、次のような条件を満足するグローブボックス(図示せず)内で実施することが好ましい。
[Solution injection into hollow tube with square cross section]
In order to avoid the adverse effects of moisture and oxygen on the mixed organic solvent 10, the adjustment of the mixed organic solvent 10 and the following injection process are preferably performed in a glove box (not shown) that satisfies the following conditions. .
(1)酸素濃度0.5ppm未満 (1) Oxygen concentration less than 0.5 ppm
(2)水分濃度0.5ppm未満(露点温度−80℃以下) (2) Moisture concentration less than 0.5 ppm (dew point temperature -80 ° C or less)
前記密閉可能な真空容器(図示せず)をパスボックスを通じて前記グローブボックス内部へ入れてから、真空乾燥が済んだ一端封止済みの角型断面中空管1を取り出す。図2bに示すように、一端封止済みの角型断面中空管1の内部へ混合有機溶剤注入管19を、その先端が一端封止済みの角型断面中空管1の封止端に届くまで挿入し、混合有機溶剤注入管19を通じて混合有機溶剤10を注入する。混合有機溶剤10の注入量は、混合有機溶剤注入管19を引き抜いた後で、混合有機溶剤10の液柱の長さが1〜15mmになるように調整する。 The sealable vacuum vessel (not shown) is put into the glove box through a pass box, and then the square-shaped hollow tube 1 with one end sealed after vacuum drying is taken out. As shown in FIG. 2b, the mixed organic solvent injection pipe 19 is inserted into the inside of the square cross-section hollow tube 1 that has been sealed at one end, and the tip of the mixed organic solvent injection pipe 19 is sealed at the end of the square cross-section hollow tube 1 that has been sealed at one end The mixed organic solvent 10 is injected through the mixed organic solvent injection tube 19 until it reaches. The injection amount of the mixed organic solvent 10 is adjusted so that the length of the liquid column of the mixed organic solvent 10 becomes 1 to 15 mm after the mixed organic solvent injection tube 19 is pulled out.
[角型断面中空管の他端仮封止]
溶融封止端側に混合有機溶剤10が注入された一端封止済の角型断面中空管1を、硬化に1時間以上を要する接着剤であって、後述の圧力まで減圧した際に揮発する成分のない接着剤を入れた容器の中に入れ、これを適当な真空チャンバー(例、前記パスボックス)に入れて、例えば圧力を0.01気圧に保ち、接着剤が硬化するのを待つ。接着剤としては、例えば、揮発成分のないエポキシ接着剤を好適に用いることができる。接着剤の使用量は一端封止済みの角型断面中空管1の開放端(他端)を仮封止するに最小限の量、例えば50〜100mgが好ましく、接着剤を入れる容器の大きさは、例えば、高さ10〜20mmで、一端封止済みの角型断面中空管1を縦に支えるのに充分な大きさであり、断面は、一端封止済みの角型断面中空管1を挿入するのに必要最小限な大きさ、例えば、直径2〜3mmの円形であれば良い。
[Temporal sealing of the other end of the square tube]
An adhesive that requires one hour or more for curing the square cross-section hollow tube 1 that has been mixed with the mixed organic solvent 10 on the melt-sealed end side, and is volatilized when the pressure is reduced to the pressure described later. Put in a container with adhesive that does not contain ingredients, put it in a suitable vacuum chamber (eg, the pass box), for example, keep the pressure at 0.01 atm and wait for the adhesive to cure . As the adhesive, for example, an epoxy adhesive having no volatile component can be suitably used. The amount of the adhesive used is preferably a minimum amount for temporarily sealing the open end (the other end) of the square cross-section hollow tube 1 that has been sealed at one end, for example, 50 to 100 mg. The height is, for example, 10 to 20 mm in height and is large enough to vertically support the square cross-section hollow tube 1 that has been sealed at one end. What is necessary is just to be the minimum size necessary for inserting the tube 1, for example, a circle having a diameter of 2 to 3 mm.
[不活性気体の気泡]
角型断面中空管1の他端の仮封止を行う前に、一端封止済みの角型断面中空管1の内部に不活性気体を充填して1つの気泡11を形成する。本発明の熱レンズ形成素子100は図2(c)に示すように、角型断面中空管1の一端には混合有機溶剤10が1本の液柱として気泡無しに存在し、他端には後述の不活性気体からなる1つの気泡11が混合有機溶剤10の液柱に接して存在することを特徴とする。混合有機溶剤10が1本の液中として存在しているため、角型断面中空管1の壁面と溶液の摩擦力によって、熱レンズ形成素子100に外部から衝撃を受けても、液中は分断されにくくなっている。不活性気体からなる1つの気泡11の好適な長さHは、前述のように10〜15mmである。不活性気体としては窒素、アルゴン、ヘリウムを好適に使用できる。なお、気泡11の好ましい圧力については特許文献7に詳細に記述されている。
[Inert gas bubbles]
Before temporarily sealing the other end of the square cross-section hollow tube 1, one bubble 11 is formed by filling the inside of the square cross-section hollow tube 1 already sealed with one end. In the thermal lens forming element 100 of the present invention, as shown in FIG. 2C, the mixed organic solvent 10 is present as one liquid column without bubbles at one end of the square cross-section hollow tube 1 and at the other end. Is characterized in that one bubble 11 made of an inert gas described later exists in contact with the liquid column of the mixed organic solvent 10. Since the mixed organic solvent 10 exists as a single liquid, even if the thermal lens forming element 100 is impacted from the outside by the frictional force of the wall of the rectangular cross-section hollow tube 1 and the solution, It is hard to be divided. A suitable length H of one bubble 11 made of an inert gas is 10 to 15 mm as described above. Nitrogen, argon, and helium can be suitably used as the inert gas. The preferable pressure of the bubbles 11 is described in detail in Patent Document 7.
[角型断面中空管の他端封止]
前記接着剤が硬化し、一端封止済みの角型断面中空管1の仮封止が完了した後、一端封止済みの角型断面中空管1をグローブボックス・前記真空チャンバーから取り出し、混合有機溶剤充填部分を上にしてつり下げ、混合有機溶剤10の存在しない部分をガスバーナーで溶融封止する。溶融封止を必要最小限の大きさのバーナー炎を用い、1秒以内で行うことで、内部の混合有機溶剤10に影響を与えること無しに、石英ガラスの溶融封止を完了することができる。両端が封止されて完成した本発明の熱レンズ形成素子100の封止状態の完全性を確認するため、熱レンズ形成素子100の重量(10〜数十ミリグラム)をμg単位で精密に測定した後、例えば、85℃において1000時間、加熱を継続した後、重量を精密に測定した。その結果、重量変化が±2μg以内であることが確認され、封止が完全であることが判った。
[Sealing the other end of the square tube]
After the adhesive is cured and temporary sealing of the square cross-section hollow tube 1 that has been sealed once is completed, the square cross-section hollow tube 1 that has been sealed once is taken out of the glove box and the vacuum chamber, The portion filled with the mixed organic solvent is suspended and the portion where the mixed organic solvent 10 does not exist is melt-sealed with a gas burner. By using a burner flame of the minimum size necessary for melting and sealing within 1 second, melting and sealing of quartz glass can be completed without affecting the mixed organic solvent 10 inside. . In order to confirm the completeness of the sealed state of the thermal lens forming element 100 of the present invention completed by sealing both ends, the weight (10 to several tens of milligrams) of the thermal lens forming element 100 was precisely measured in μg units. Thereafter, for example, after heating was continued at 85 ° C. for 1000 hours, the weight was accurately measured. As a result, it was confirmed that the weight change was within ± 2 μg, and it was found that the sealing was complete.
[無反射コート]
空気の屈折率1.00に対し本発明の熱レンズ形成素子100の角型断面中空管1の材質・石英ガラスの屈折率は可視光領域から波長1.5μmの赤外線領域において1.56ないし1.50である。したがって、無反射コートを行わないと、平面部分14または15へ垂直入射する信号光または制御光について4〜5%の反射ロスが発生するため、使用する信号光および制御光の波長に対応した無反射(AR)コートを行うことが推奨される。ARコートとしては公知のものを使用することができる。例えば、使用する信号光および制御光の波長に対応した誘電体多層膜や空気と石英ガラスの屈折率の中間の値の屈折率を有する透明有機高分子膜を使用することができる。ただし、透明有機高分子膜を熱レンズ形成素子100の表面に形成する真空プロセスは通常、バッチ処理で生産性が低く、また、高温に曝されるため、混合有機溶剤10を充填する前にARコートを行う必要があり、その際、熱レンズ形成素子100の角型断面中空管1の内部が汚染されないよう、例えば、角型断面中空管1の両端を仮に溶融封止し、混合有機溶剤10を注入する前に一端を開放する、などの工程を追加する必要が生ずる。これに対し、透明有機高分子を適当な揮発性溶剤に溶解した溶液を熱レンズ形成素子100の表面にディッピング法などで塗工、乾燥してARコート層を形成する方法は、熱レンズ形成素子100の角型断面中空管1の内部に混合有機溶剤10を注入し、両端を溶融封止してからARコートが可能であり、製造プロセスを合理化可能である。透明有機高分子の屈折率は可視光領域から波長1.5μmの赤外線領域において1.2ないし1.4であることが好ましい。更に好ましくは屈折率1.35程度が好適である。屈折率が前記の範囲よりも小さくても、大きくても、反射ロスの低減効果が小さくなる。透明有機高分子溶液の具体例としては、有機フッ素樹脂「サイトップ(CYTOP)」(登録商標)(旭硝子株式会社製)をフッ素系溶剤に溶解した溶液を好適に使用することができる。この高分子膜の屈折率は1.34である。塗工によるARコート膜の膜厚は10nmないし200μmであることが好ましい。これよりも薄いと塗膜にピンホールができるおそれがある。また、これよりも厚い膜を塗工法で作成すると、膜厚のムラが発生し易くなる。なお、ARコート膜の厚さを100μmないし200μmとすると、非常に薄い石英ガラスからなる、本発明の熱レンズ形成素子100の平面部分を補強し、耐衝撃性を高めることもできる。
[Non-reflective coating]
The refractive index of quartz glass, which is the material of the square cross-section hollow tube 1 of the thermal lens forming element 100 of the present invention, is 1.56 to 1.56 in the infrared region with a wavelength of 1.5 μm from the refractive index of air of 1.00. 1.50. Therefore, if the non-reflective coating is not performed, a reflection loss of 4 to 5% occurs with respect to the signal light or control light perpendicularly incident on the flat portion 14 or 15, and therefore no reflection corresponding to the wavelength of the signal light and control light to be used. It is recommended to apply a reflective (AR) coat. As the AR coat, a known one can be used. For example, a dielectric multilayer film corresponding to the wavelength of signal light and control light to be used, or a transparent organic polymer film having a refractive index intermediate between the refractive indices of air and quartz glass can be used. However, the vacuum process for forming the transparent organic polymer film on the surface of the thermal lens forming element 100 is usually low in productivity by batch processing and exposed to high temperature, so that the AR before filling with the mixed organic solvent 10 is performed. In order to prevent the inside of the square cross-section hollow tube 1 of the thermal lens forming element 100 from being contaminated, for example, both ends of the square cross-section hollow tube 1 are temporarily melt-sealed and mixed organically. It is necessary to add a process such as opening one end before injecting the solvent 10. On the other hand, a method in which a solution in which a transparent organic polymer is dissolved in an appropriate volatile solvent is applied to the surface of the thermal lens forming element 100 by dipping or the like and dried to form an AR coating layer includes a thermal lens forming element. AR coating is possible after injecting mixed organic solvent 10 into 100 square cross-section hollow tubes 1 and melting and sealing both ends, and the manufacturing process can be streamlined. The refractive index of the transparent organic polymer is preferably 1.2 to 1.4 in the infrared region having a wavelength of 1.5 μm from the visible light region. A refractive index of about 1.35 is more preferable. Even if the refractive index is smaller or larger than the above range, the effect of reducing the reflection loss is small. As a specific example of the transparent organic polymer solution, a solution obtained by dissolving an organic fluororesin “CYTOP” (registered trademark) (manufactured by Asahi Glass Co., Ltd.) in a fluorine-based solvent can be preferably used. The refractive index of this polymer film is 1.34. The thickness of the AR coating film by coating is preferably 10 nm to 200 μm. If it is thinner than this, a pinhole may be formed in the coating film. Moreover, when a film thicker than this is formed by a coating method, unevenness in film thickness tends to occur. If the thickness of the AR coating film is 100 μm to 200 μm, the planar portion of the thermal lens forming element 100 of the present invention made of very thin quartz glass can be reinforced to improve impact resistance.
[リングビーム方式光路切替への応用]
図4は本発明の熱レンズ形成素子100を用いた、リングビーム方式光路切替装置の一例の概略構成図である。本実施形態の本発明の熱レンズ形成素子100として、外寸1mmスクエア(正方形)、内寸500μmスクエア(正方形)の角型断面中空管1の内側平面16に厚さ200μmのシリカゲル焼成層(シリカゲルの見かけの粒子径100nm)として、公知の太陽電池製造方法を適用して製造したリン化インジウムの微粒子を内包したシリカゲル微粒子を焼成して作成した無機多孔質粒子層6を設けたものを用い、無機多孔質粒子層6を成すシリカゲル微粒子の粒子間および孔内に、混合有機溶剤試料を充分含浸させた後、空房4にアルゴンを0.01気圧で封入、密閉封止したものを用いた。信号光光源として波長1550nmのレーザーおよび制御光光源として波長850nmのレーザーを用いた場合の本実施形態の本発明の熱レンズ形成素子100の透過率は、各々、90%以上および5%以下であった。
[Application to ring beam optical path switching]
FIG. 4 is a schematic configuration diagram of an example of a ring beam type optical path switching device using the thermal lens forming element 100 of the present invention. As the thermal lens forming element 100 of the present embodiment of the present embodiment, a silica gel fired layer having a thickness of 200 μm is formed on the inner plane 16 of the square cross-section hollow tube 1 having an outer dimension of 1 mm square and an inner dimension of 500 μm square (square). As the apparent particle diameter of silica gel (100 nm), an inorganic porous particle layer 6 prepared by firing silica gel particles encapsulating indium phosphide particles manufactured by applying a known solar cell manufacturing method is used. In addition, the mixed organic solvent sample was sufficiently impregnated between the pores of the silica gel fine particles constituting the inorganic porous particle layer 6 and in the pores, and then the argon was sealed in the air chamber 4 at 0.01 atm and hermetically sealed. . When the laser having a wavelength of 1550 nm is used as the signal light source and the laser having a wavelength of 850 nm is used as the control light source, the transmittance of the thermal lens forming element 100 of the present embodiment of the present embodiment is 90% or more and 5% or less, respectively. It was.
なお、リングビーム方式光路切替装置の詳細は特許文献1に記載されている。概要として、入力側信号光・光ファイバー400から出射した入射信号光をコリメートレンズ40にてほぼ平行なビーム401に変換してダイクロミックミラー42を透過させ、更に集光レンズ43にて収束させ、収束光として熱レンズ形成素子100に入射させる。一方、制御光・光ファイバー410から出射した制御光をコリメートレンズ41にてほぼ平行なビーム411としてダイクロミックミラー42にて反射させ、信号光ビーム401と光軸を一致させ、更に集光レンズ43にて収束させ、収束光として熱レンズ形成素子100に入射させる。リングビーム方式光路切替装置および方法においては、制御光と信号光を同一光軸で熱レンズ形成素子の制御光吸収領域へ収束入射させ、更に、制御光および信号光双方の収束領域が重なり合い、前記制御光吸収領域の信号光入射側近傍に位置するよう、光学系が微調整される。こうすると、熱レンズ形成素子・制御光吸収領域の信号光入射側近傍へ収束入射した制御光は、前記制御光吸収領域において光吸収されながら進行し、吸収された光エネルギーは熱に変わり、混合有機溶剤の熱膨張に伴う密度減少および屈折率の低下を引き起こし、光の進行方向に特定の形状の熱レンズを形成させる。このように前記制御光吸収領域に形成された熱レンズ内部に収束入射された信号光が広がりながら進行すると、入射時にはガウス分布であった信号光のビーム断面のエネルギー分布は、リング状に変換され、制御光が照射されていない場合の角度よりも大きな開き角度で、熱レンズ形成素子100から出射する。この出射信号光を、集光レンズ43よりも大きな開口数の受光レンズ44にて受光し、ほぼ平行なビームに変換してから、制御光が照射されず直進する場合の信号光・光路に45度の角度で設置され、制御光が照射されず直進する場合の信号光ビームが通過するのに充分な大きさの穴が設けられた穴付ミラー45に入射させると、制御光が照射されていない場合、信号光421は直進し、結合レンズ46に入射し、収束され、直進出力側信号光・光ファイバー420に入射していく。一方、制御光が照射された場合は、熱レンズ効果によってリングビームに変換された信号光は、穴付ミラー45の穴の周辺で反射され、結合レンズ47にて収束され、光路切替信号光431として光路切替出力側信号光・光ファイバー430に入射していく。 The details of the ring beam type optical path switching device are described in Patent Document 1. As an outline, the input signal light / incident signal light emitted from the optical fiber 400 is converted into a substantially parallel beam 401 by the collimator lens 40, transmitted through the dichroic mirror 42, and further converged by the condenser lens 43. The light is incident on the thermal lens forming element 100 as light. On the other hand, the control light emitted from the control light / optical fiber 410 is reflected by the dichroic mirror 42 as a substantially parallel beam 411 by the collimator lens 41, and the optical axis of the signal light beam 401 is made coincident. And converged to enter the thermal lens forming element 100 as convergent light. In the ring beam type optical path switching device and method, the control light and the signal light are converged and incident on the control light absorption area of the thermal lens forming element with the same optical axis, and the convergence areas of both the control light and the signal light overlap, The optical system is finely adjusted so as to be positioned near the signal light incident side of the control light absorption region. In this way, the control light that converges and enters the vicinity of the signal light incident side of the thermal lens forming element / control light absorption region travels while being absorbed in the control light absorption region, and the absorbed light energy is changed to heat, and mixed. A density decrease and a refractive index decrease due to the thermal expansion of the organic solvent cause a thermal lens having a specific shape in the light traveling direction. Thus, when the signal light converged and incident inside the thermal lens formed in the control light absorption region travels while spreading, the energy distribution of the beam cross section of the signal light that was Gaussian at the time of incidence is converted into a ring shape. Then, the light is emitted from the thermal lens forming element 100 at an opening angle larger than the angle when the control light is not irradiated. The outgoing signal light is received by a light receiving lens 44 having a numerical aperture larger than that of the condenser lens 43, converted into a substantially parallel beam, and then is sent to a signal light / optical path 45 when traveling straight without being irradiated with control light. When the light is incident on the mirror 45 with a hole provided with a hole of a size large enough to allow the signal light beam to travel straight without being irradiated with the control light, the control light is irradiated. If not, the signal light 421 goes straight, enters the coupling lens 46, is converged, and enters the straight output-side signal light / optical fiber 420. On the other hand, when the control light is irradiated, the signal light converted into the ring beam by the thermal lens effect is reflected around the hole of the holed mirror 45, converged by the coupling lens 47, and the optical path switching signal light 431. Then, it enters the optical path switching output side signal light / optical fiber 430.
図6a〜図6dに、信号光光源として波長1550nm、制御光光源として波長850nmのレーザーを用い、本実施形態の熱レンズ形成素子100に照射した場合の出射信号光ビームの断面形状と制御光パワーの対応を示す。なお、図4における穴付ミラー45に代えて、ビームプロファイラーの受光面を載置した。制御光を照射しない場合、図6aのように信号光のビーム断面はエネルギーがガウス分布の丸ビームである。制御光パワーを2.0、4.0mw、8.0mWと大きくすると、信号光のビーム断面は、各々図6b,図6c,図6dのように変化する。この場合、制御光パワーが4.0mWのとき、リングの形状および大きさが最適になり、同2.0mwではパワーが足りず「リングの開き具合」が不充分であり、同8.0mWでは制御光が強すぎて熱レンズの形状が乱れ、リングが多重に形成される。 6a to 6d, the laser light having a wavelength of 1550 nm as the signal light source and the laser light having a wavelength of 850 nm as the control light source are used to irradiate the thermal lens forming element 100 of the present embodiment, and the cross-sectional shape and control light power of the emitted signal light beam The correspondence of is shown. In addition, it replaced with the mirror 45 with a hole in FIG. 4, and the light-receiving surface of the beam profiler was mounted. When the control light is not irradiated, the beam cross section of the signal light is a round beam having a Gaussian distribution as shown in FIG. When the control light power is increased to 2.0, 4.0 mw, and 8.0 mW, the beam cross section of the signal light changes as shown in FIGS. 6b, 6c, and 6d, respectively. In this case, when the control light power is 4.0 mW, the shape and size of the ring are optimal. When 2.0 mw is the same, the power is insufficient and the “opening degree of the ring” is insufficient. The control light is too strong, the shape of the thermal lens is disturbed, and multiple rings are formed.
本発明の熱レンズ形成素子100を用いた、リングビーム方式光路切替装置は、4ないし5mWという小さい制御光パワーで、制御光を照射しない場合のガウス分布・丸ビームと、制御光を照射した場合のリングビームの変換を行うことができる。本発明の熱レンズ形成素子100の制御光吸収領域すなわち制御光の波長の光を吸収する色素が内包された無機多孔質粒子から成る多孔質層が収束照射された制御光のビームウエスト近傍において吸収して発生した熱が、効率良く混合有機溶剤10に伝達され、混合有機溶剤10が熱膨張して収束照射された制御光のビームウエスト近傍において熱レンズを形成し、高い効率で信号光のリングビームへの変換を実現することができた。 The ring beam type optical path switching device using the thermal lens forming element 100 of the present invention is a case where the control light power is as small as 4 to 5 mW and the control light is irradiated with a Gaussian distribution / round beam and no control light. The ring beam can be converted. Absorption of the control light absorption region of the thermal lens forming element 100 of the present invention, that is, in the vicinity of the beam waist of the control light irradiated with convergent porous layers composed of inorganic porous particles containing a dye that absorbs light having the wavelength of the control light. The generated heat is efficiently transferred to the mixed organic solvent 10, and the mixed organic solvent 10 is thermally expanded to form a thermal lens in the vicinity of the beam waist of the control light that has been converged and irradiated. Conversion to a beam could be realized.
本実施形態の熱レンズ形成素子100を用いた、リングビーム方式光路切替装置は、3年以上の繰り返し使用に耐えることが確認された。 It was confirmed that the ring beam type optical path switching device using the thermal lens forming element 100 of this embodiment can withstand repeated use for 3 years or more.
[比較実施形態1]
本発明の熱レンズ形成素子100に替えて、テトラ−ターシャリーブチル銅フタロシアニンの溶剤#1溶液(色素濃度0.2重量%)を充填した、従来型の熱レンズ形成素子を用い、制御光光源として波長660nmのレーザーを用い、図4のリングビーム方式光路切替装置にて、熱レンズ効果による光路切り替えを完結的に、繰り返し実施したところ、初期の性能を2年間は発揮できた。ところが、3年以上の経過で熱レンズ形成素子の色素溶液内に青色の固体が析出してきた。固体が析出しても、色素溶液は有効に作用するため、熱レンズ効果による光路切り替えは実施可能であったが、析出した固体が信号光の光路をよぎる際、信号光が一時的に遮られ、ノイズとして検出された。すなわち、光通信における光路切替用としての耐用年数は2年程度であることが確認された。
[Comparative Embodiment 1]
Instead of the thermal lens forming element 100 of the present invention, a conventional thermal lens forming element filled with a solvent # 1 solution of tetra-tertiary butyl copper phthalocyanine (pigment concentration 0.2 wt%) was used, and a control light source As a result, when the laser beam with a wavelength of 660 nm was used and the optical path switching by the thermal lens effect was repeatedly performed with the ring beam type optical path switching apparatus of FIG. 4, the initial performance could be exhibited for two years. However, a blue solid has been deposited in the dye solution of the thermal lens forming element over the course of 3 years. Even if a solid is deposited, the dye solution still works effectively, so it is possible to switch the optical path by the thermal lens effect.However, when the deposited solid crosses the optical path of the signal light, the signal light is temporarily blocked. , Detected as noise. That is, it has been confirmed that the service life for switching optical paths in optical communication is about two years.
[丸ビーム方式光路切替への応用]
図5は本発明の熱レンズ形成素子100を用いた、丸ビーム方式光路切替装置の一例の概略構成図である。丸ビーム方式光路切替装置の詳細は特許文献3〜5に記載されている。本実施形態の本発明の熱レンズ形成素子100として、外寸1mmスクエア(正方形)、内寸500μmスクエア(正方形)の角型断面中空管1の内側平面16に厚さ200μmのシリカゲル焼成層(シリカゲルの見かけの粒子径100nm)として、公知の太陽電池製造方法を適用して製造したセレン化銅インジウムの微粒子を内包したシリカゲル微粒子を焼成して作成した無機多孔質粒子層6を設けたものを用い、無機多孔質粒子層6を成すシリカゲル微粒子の粒子間および孔内に、混合有機溶剤試料を充分含浸させた後、空房4にアルゴンを0.01気圧で封入、密閉封止したものを用いた。信号光光源として波長1550nmのレーザーおよび制御光光源として波長980nmのレーザーを用いた場合の本実施形態の本発明の熱レンズ形成素子100の透過率は、各々、90%以上および5%以下であった。
[Application to round beam optical path switching]
FIG. 5 is a schematic configuration diagram of an example of a round beam type optical path switching device using the thermal lens forming element 100 of the present invention. Details of the round beam type optical path switching device are described in Patent Documents 3 to 5. As the thermal lens forming element 100 of the present embodiment of the present embodiment, a silica gel fired layer having a thickness of 200 μm is formed on the inner plane 16 of the square cross-section hollow tube 1 having an outer dimension of 1 mm square and an inner dimension of 500 μm square (square). As an apparent particle diameter of silica gel (100 nm), an inorganic porous particle layer 6 prepared by firing silica gel fine particles encapsulating fine particles of copper indium selenide produced by applying a known solar cell production method is provided. Used after thoroughly impregnating the mixed organic solvent sample between the particles of silica gel fine particles constituting the inorganic porous particle layer 6 and in the pores, and sealing the hermetically sealed argon 4 at 0.01 atm. It was. When the laser having a wavelength of 1550 nm is used as the signal light source and the laser having a wavelength of 980 nm is used as the control light source, the transmittance of the thermal lens forming element 100 of the present embodiment of the present embodiment is 90% or more and 5% or less, respectively. It was.
概要として、入力側信号光・光ファイバー500から出射した入射信号光をコリメートレンズ50にてほぼ平行なビーム501に変換してダイクロミックミラー52を透過させ、更に集光レンズ53にて収束させ、収束光として熱レンズ形成素子100に入射させる。一方、制御光・光ファイバー510から出射した制御光をコリメートレンズ51にてほぼ平行なビーム511としてダイクロミックミラー52にて反射させ、更に集光レンズ53にて収束させ、収束光として熱レンズ形成素子100に入射させる。丸ビーム方式光路切替装置および方法においては、制御光と信号光を熱レンズ形成素子100の制御光吸収領域へ収束入射させ、更に、制御光および信号光双方の収束領域中心点が30μm程度離れて重なり合い、前記制御光吸収領域の信号光入射側近傍に位置するよう、光学系が微調整される。こうすると、熱レンズ形成素子・制御光吸収領域の信号光入射側近傍へ、僅かに離れて収束入射した制御光は、前記制御光吸収領域において光吸収されながら進行し、吸収された光エネルギーは熱に変わり、混合有機溶剤の熱膨張に伴う密度減少および屈折率の低下を引き起こし、光の進行方向に特定の形状の熱レンズを形成させる。このように前記制御光吸収領域に形成された熱レンズ内部に、異なる収束位置で収束入射された信号光が広がりながら進行すると、入射時のガウス分布の丸ビーム断面のエネルギー分布を保ちながら進行方向が偏光され、制御光が照射されていない場合の直進方向から数度、光路が偏光されて、熱レンズ形成素子100から出射する。この出射信号光を、受光レンズ54にて受光し、ほぼ平行なビームに変換し、制御光が照射されていない場合、信号光521は直進し、結合レンズ56に入射し、収束され、直進出力側信号光・光ファイバー520に入射していく。一方、制御光が照射された場合は、熱レンズ効果によって丸ビームのまま光路が偏光された信号光531はミラー58を経由して、信号光532として結合レンズ57に入射し、収束され、光路切替出力側信号光・光ファイバー530に入射していく。 As an outline, input signal light / incident signal light emitted from the optical fiber 500 is converted into a substantially parallel beam 501 by the collimator lens 50, transmitted through the dichroic mirror 52, further converged by the condenser lens 53, and converged. The light is incident on the thermal lens forming element 100 as light. On the other hand, the control light emitted from the control light / optical fiber 510 is reflected by the dichroic mirror 52 as a substantially parallel beam 511 by the collimator lens 51, further converged by the condenser lens 53, and the thermal lens forming element as convergent light. 100 is incident. In the round beam type optical path switching device and method, the control light and the signal light are converged and incident on the control light absorption region of the thermal lens forming element 100, and the central points of the convergence regions of both the control light and the signal light are separated by about 30 μm. The optical system is finely adjusted so that it overlaps and is positioned in the vicinity of the signal light incident side of the control light absorption region. In this way, the control light that has converged and entered slightly away from the thermal lens forming element / control light absorption region in the vicinity of the signal light incident side proceeds while being absorbed in the control light absorption region, and the absorbed light energy is Instead of heat, it causes a decrease in density and a decrease in refractive index due to thermal expansion of the mixed organic solvent, and a thermal lens having a specific shape is formed in the traveling direction of light. Thus, if the signal light converged and incident at different convergence positions travels inside the thermal lens formed in the control light absorption region, the traveling direction is maintained while maintaining the energy distribution of the cross section of the Gaussian round beam at the time of incidence. Is polarized and the optical path is polarized several degrees from the straight direction when the control light is not irradiated, and is emitted from the thermal lens forming element 100. The outgoing signal light is received by the light receiving lens 54 and converted into a substantially parallel beam. When the control light is not irradiated, the signal light 521 travels straight, enters the coupling lens 56, is converged, and travels straight. The incident light enters the side signal light / optical fiber 520. On the other hand, when the control light is irradiated, the signal light 531 whose optical path is polarized as a round beam by the thermal lens effect is incident on the coupling lens 57 as the signal light 532 via the mirror 58 and is converged, and the optical path. The light enters the switching output side signal light / optical fiber 530.
制御光パワーを10.0、20.0、30.0、40.0mWとしたとき、熱レンズ効果によって丸ビームのまま偏向された信号光531の偏向角を、制御光が照射されていない場合に信号光が熱レンズ形成素子100を出射する点を原点とし、制御光が照射されていない場合の信号光出射方向を「0度」として測定した結果を図7に示す。この測定の際、図5に示す光学装置において、結合レンズ56,ミラー58などに替えて、ビームプロファイラーの受光面を載置し、光路切替信号光の偏向角をビームの受光位置から計算で算出した。制御光パワーを強くするにしたがい、偏向角は10.5度、13.0度、14.1、15.2度と大きくなった。本発明の熱レンズ形成素子100の制御光吸収領域すなわち制御光の波長の光を吸収する色素が内包された無機多孔質粒子から成る多孔質層が収束照射された制御光のビームウエスト近傍において吸収して発生した熱が、効率良く混合有機溶剤10に伝達され、混合有機溶剤10が熱膨張して収束照射された制御光のビームウエスト近傍において熱レンズを形成し、高い効率で信号光の光路偏向を実現することができた。 When the control light power is 10.0, 20.0, 30.0, and 40.0 mW, the deflection angle of the signal light 531 deflected as a round beam by the thermal lens effect is not irradiated with the control light. FIG. 7 shows the measurement results when the signal light exit direction is “0 degree” when the signal light exits the thermal lens forming element 100 at the origin and the control light is not irradiated. In this measurement, the light receiving surface of the beam profiler is placed in place of the coupling lens 56 and the mirror 58 in the optical apparatus shown in FIG. 5, and the deflection angle of the optical path switching signal light is calculated from the light receiving position of the beam. did. As the control light power was increased, the deflection angles increased to 10.5 degrees, 13.0 degrees, 14.1 and 15.2 degrees. Absorption of the control light absorption region of the thermal lens forming element 100 of the present invention, that is, in the vicinity of the beam waist of the control light irradiated with convergent porous layers composed of inorganic porous particles containing a dye that absorbs light having the wavelength of the control light. The generated heat is efficiently transmitted to the mixed organic solvent 10, and the mixed organic solvent 10 is thermally expanded to form a thermal lens in the vicinity of the beam waist of the control light that is converged and irradiated, and the optical path of the signal light with high efficiency The deflection could be realized.
本発明の熱レンズ形成素子は、3年以上の長期間使用に耐えることが確認された。現在、10年を超える実使用条件における耐久性の試験を進めている。 It has been confirmed that the thermal lens forming element of the present invention can withstand long-term use for 3 years or more. Currently, we are conducting durability tests under actual use conditions over 10 years.
本発明は、光通信分野および光情報処理分野において有効に用いることができる。 The present invention can be effectively used in the fields of optical communication and optical information processing.
1 角型断面中空管、2,25 無機多孔質粒子分散液、3 残留無機多孔質粒子分散液、4 空房、5 無機多孔質粒子塗工膜、6 無機多孔質粒子層、7 一端、8,9,24 送風空気、10 混合有機溶剤、11 気泡、12 他端、14,15 外側平面、16,17 内側平面、19 混合有機溶剤注入管、20 注入ヘッダー、21 角型断面中空管挿入孔、22 空気導入バルブ、23 分散液導入バルブ、26 空気余熱器、30 廃液受器、35 保温・加熱炉、40,41,50,51 コリメートレンズ、42,52 ダイクロミックミラー、43,53 集光レンズ、44,54 受光レンズ、45 穴付ミラー、46,47,56,57 結合レンズ、58 ミラー、100 熱レンズ形成素子、400 入力側信号光・光ファイバー、401 入射信号光(ビーム)、410 制御光・光ファイバー、411 入射制御光(ビーム)、420 直進出力側信号光・光ファイバー、421 直進信号光、430 光路切替出力側信号光・光ファイバー、431 光路切替信号光、500 入力側信号光・光ファイバー、501 入射信号光(ビーム)、510 制御光・光ファイバー、511 入射制御光(ビーム)、520 直進出力側信号光・光ファイバー、521 直進信号光、530 光路切替出力側信号光・光ファイバー、531,532 光路切替信号光。 DESCRIPTION OF SYMBOLS 1 Square cross-section hollow tube, 2,25 Inorganic porous particle dispersion liquid, 3 Residual inorganic porous particle dispersion liquid, 4 Air | hole, 5 Inorganic porous particle coating film, 6 Inorganic porous particle layer, 7 One end, 8 , 9, 24 Blowing air, 10 Mixed organic solvent, 11 Bubble, 12 Other end, 14, 15 Outer plane, 16, 17 Inner plane, 19 Mixed organic solvent injection tube, 20 Injection header, 21 Square section hollow tube insertion Hole, 22 Air introduction valve, 23 Dispersion liquid introduction valve, 26 Air residual heater, 30 Waste liquid receiver, 35 Insulation / heating furnace, 40, 41, 50, 51 Collimator lens, 42, 52 Dichroic mirror, 43, 53 Optical lens, 44, 54 Light-receiving lens, 45-hole mirror, 46, 47, 56, 57 Coupled lens, 58 mirror, 100 Thermal lens forming element, 400 Input side signal light / optical fiber, 4 01 Incident signal light (beam), 410 Control light / optical fiber, 411 Incident control light (beam), 420 Linear output signal light / optical fiber, 421 Linear signal light, 430 Optical path switching output signal / optical fiber, 431 Optical path switching signal Light, 500 Input signal light / optical fiber, 501 Incident signal light (beam), 510 Control light / optical fiber, 511 Incident control light (beam), 520 Straight output signal light / optical fiber, 521 Straight signal light, 530 Optical path switching output Side signal light / optical fiber, 531 532 light path switching signal light.
Claims (5)
前記制御光が照射されず熱レンズが形成されていない場合は前記収束された信号光が通常の開き角度と直進方向で出射する状態と、
前記制御光および前記信号光の各々の収束点の位置が同一になるよう制御光が照射されて熱レンズが形成される場合は前記収束された信号光が通常の開き角度よりも大きい開き角度で出射する状態、または、前記制御光および前記信号光の各々の収束点の位置が相異なるよう制御光が照射されて熱レンズが形成される場合は前記収束された信号光が通常の開き角度と異なる開き角度と直進方向とは異なる方向で出射する状態とを、
前記制御光の照射の有無に対応させて実現させること
を特徴とする請求項1に記載の熱レンズ形成素子。 A cross-sectional shape of the rectangular cross-section hollow tube in which the control light absorption region is formed is a square cross-section hollow tube having two outer planes and two inner planes parallel to each other with respect to four planes. Two parallel outer planes and two inner planes are both perpendicular to the optical axis when the control light is not irradiated and the signal light travels straight, and the two outer planes and two inner planes parallel to each other. The size of the plane is a size that is a plane in the region where the control light and the signal light are incident and the region where the signal light that goes straight or is optically switched passes and the both ends of the square cross-section hollow tube are The control light absorption region is melt-sealed at the melting point of the material, and the control light absorption region has a wavelength selected from the wavelength band absorbed by the control light absorption region and a wavelength that the control light absorption region does not absorb. Signal light having a wavelength selected from a region is converged and irradiated, and the control light and the signal light are irradiated so that the positions of the convergence points of the control light and the signal light are the same or different, and the control light absorption region is the control light A thermal lens is formed based on the refractive index distribution reversibly formed due to the temperature rise occurring in the light absorbing region and the surrounding region,
When the control light is not irradiated and a thermal lens is not formed, the converged signal light is emitted in a normal opening angle and a straight direction, and
When the control light is irradiated so that the positions of the convergence points of the control light and the signal light are the same to form a thermal lens, the converged signal light has an opening angle larger than a normal opening angle. When the control lens is irradiated with the control light and the thermal lens is formed so that the positions of the convergence points of the control light and the signal light are different from each other, the converged signal light has a normal opening angle. A different opening angle and a state of emitting in a direction different from the straight direction,
The thermal lens forming element according to claim 1, wherein the thermal lens forming element is realized corresponding to the presence or absence of irradiation of the control light.
前記塗工膜形成工程を繰り返し行い、所望の厚さの前記塗工膜を、前記底面の対向面との間に空房を挟んで形成する工程、
前記角型断面中空管に乾燥気体を送風し前記塗工膜中の水分を除去する工程、
前記角型断面中空管を500〜600℃に加熱し、前記角型断面中空管に500〜600℃の空気を送風して、前記水溶性高分子バインダーを焼成除去し、前記無機多孔質粒子から成る多孔質層を形成する工程、
前記角型断面中空管の一端を溶融封止する工程、
前記角型断面中空管の前記空房に、この空房を残して前記無機多孔質粒子と屈折率が同一になるよう調整された混合有機溶剤を充填し、前記多孔質層に前記混合有機溶剤を含浸させる工程、
前記空房を減圧しこの空房内に前記混合有機溶剤の蒸気を充満させる工程、
前記空房内に前記混合有機溶剤の蒸気および不活性気体を1気圧未満で充満させた状態で、前記角型断面中空管の他端を溶融封止する工程、
を有することを特徴とする熱レンズ形成素子の製造方法。 Inorganic polymer particles containing a dye that absorbs light of the control light wavelength without absorbing the light of the wavelength of the signal light inside the horizontally mounted square cross-section hollow tube in the polymer binder solution After injecting the dispersed liquid, a gas having a temperature of 100 ° C. or less is blown into the inside of the square cross-section hollow tube and dried, and the water of the inorganic porous particles is added to the bottom of the square cross-section hollow tube. Forming a conductive polymer binder coating film,
Repeatedly performing the coating film forming step, and forming the coating film of a desired thickness sandwiching vacancies between the opposing surface of the bottom surface,
A step of removing moisture in the coating film by blowing dry gas to the square cross-section hollow tube;
The square cross-section hollow tube is heated to 500 to 600 ° C., and air of 500 to 600 ° C. is blown to the square cross-section hollow tube to burn and remove the water-soluble polymer binder. Forming a porous layer of particles,
Melting and sealing one end of the square cross-section hollow tube,
Filled into the vacancies of the square cross-section hollow tube is a mixed organic solvent adjusted to have the same refractive index as that of the inorganic porous particles, leaving the vacancies, and the porous organic layer is filled with the mixed organic solvent. Impregnation step,
Depressurizing the empty chamber and filling the empty chamber with the vapor of the mixed organic solvent;
Melting and sealing the other end of the square cross-section hollow tube in a state where the mixed organic solvent vapor and inert gas are filled at less than 1 atm in the air chamber,
The manufacturing method of the thermal lens formation element characterized by having.
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