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JP2016039171A - Conductive wiring manufacturing method and conductive wiring - Google Patents

Conductive wiring manufacturing method and conductive wiring Download PDF

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Publication number
JP2016039171A
JP2016039171A JP2014159602A JP2014159602A JP2016039171A JP 2016039171 A JP2016039171 A JP 2016039171A JP 2014159602 A JP2014159602 A JP 2014159602A JP 2014159602 A JP2014159602 A JP 2014159602A JP 2016039171 A JP2016039171 A JP 2016039171A
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conductive
conductive wiring
insulating substrate
manufacturing
conductive powder
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村岡 貢治
Koji Muraoka
貢治 村岡
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Shuhou Co Ltd
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Shuhou Co Ltd
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Priority to JP2014159602A priority Critical patent/JP2016039171A/en
Priority to CN201480033522.XA priority patent/CN105393650B/en
Priority to US14/897,862 priority patent/US9585251B2/en
Priority to PCT/JP2014/078381 priority patent/WO2015145848A1/en
Priority to EP14887505.7A priority patent/EP2991463B1/en
Priority to KR1020157032601A priority patent/KR20150143742A/en
Priority to TW103137773A priority patent/TWI578867B/en
Publication of JP2016039171A publication Critical patent/JP2016039171A/en
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Abstract

【課題】導電ペーストをスクリーン印刷によって絶縁基板に供給することなく、絶縁基板上に所望の特性の導電配線を容易に形成することができる導電配線の製造方法を提供する。
【解決手段】導電配線の製造方法は、絶縁基板1に所定のパターンになるようにインキ2を印刷する工程(S1)と、印刷されたインキ2が乾燥する前に、インキ2(所定のパターンになっている)に導電性粉末3を載置(散布)する工程(S2)と、載置された導電性粉末3を絶縁基板1に押し付けて圧縮する工程(S3)と、圧縮された導電性粉末3を加熱して焼結させる工程(S4)と、を有し、かかる一連の工程(S1〜S4)によって、導電配線20が製造される。
【選択図】図1
Provided is a method for manufacturing a conductive wiring, which can easily form a conductive wiring having desired characteristics on an insulating substrate without supplying a conductive paste to the insulating substrate by screen printing.
A method of manufacturing a conductive wiring includes a step (S1) of printing an ink 2 so as to form a predetermined pattern on an insulating substrate 1, and an ink 2 (predetermined pattern) before the printed ink 2 is dried. The step (S2) of placing (spreading) the conductive powder 3 onto the insulating substrate 1, the step of pressing the placed conductive powder 3 against the insulating substrate 1 (S3), and the compressed conductive The conductive powder 3 is heated and sintered (S4), and the conductive wiring 20 is manufactured through the series of steps (S1 to S4).
[Selection] Figure 1

Description

本発明は導電配線の製造方法および導電配線、特に、導電性粉体によって形成された導電配線の製造方法および導電配線に関する。   The present invention relates to a method for manufacturing a conductive wiring and a conductive wiring, and more particularly to a method for manufacturing a conductive wiring and a conductive wiring formed of conductive powder.

従来、絶縁基材上に導電配線を形成する方法として、絶縁基材上に形成された銅箔をエッチングした後に焼結するフォトリソグラフィ工法や、絶縁基材上に導電ペーストをスクリーン印刷した後やインクジェット印刷した後に焼結する印刷工法がある。
そして、フォトリソグラフィ工法では工程数が多いという問題、また、印刷工法では導電ペーストに用いられている金属粒子が表面酸化し易いという問題を共に解消する目的で、ミクロンオーダの粒径を持つ金属材料である金属ミクロン粒子とナノメータオーダの粒径を持つ金属材料である金属ナノ粒子とが含まれた導電ペーストを使用する回路基板の製造方法が開示されている(例えば、特許文献1参照)。
Conventionally, as a method of forming a conductive wiring on an insulating substrate, a photolithography method in which a copper foil formed on an insulating substrate is etched and then sintered, or after a conductive paste is screen printed on an insulating substrate, There is a printing method that sinters after ink jet printing.
A metal material having a particle size on the order of microns for the purpose of solving both the problem that the number of steps in the photolithography method is large and the problem that the metal particles used in the conductive paste are easily oxidized in the printing method. A circuit board manufacturing method using a conductive paste containing metal microparticles and metal nanoparticles having a particle size of nanometer order is disclosed (for example, see Patent Document 1).

特開2007−53212号公報(第6頁、図1)JP 2007-53212 A (Page 6, FIG. 1)

特許文献1に開示された発明は、金属ミクロン粒子と金属ナノ粒子とが含まれた導電ペーストを、スクリーン印刷によって絶縁基板に供給し、低酸素雰囲気下で焼成して、金属ナノ粒子を焼結されるものである。このため、スクリーン印刷に好適な流動性の確保と、電気抵抗値の増大の抑制との両方を満足する導電ペーストの選定が困難であるという問題があった。すなわち、金属ミクロン粒子の材質および粒径、金属ナノ粒子の材質および粒径、溶媒の種類、およびそれぞれの量(導電ペーストに占めるそれぞれの割合)を、絶縁基板上に形成される導電配線の特性に応じて設定するには、多数の試験と長い時間とを要していた。   In the invention disclosed in Patent Document 1, a conductive paste containing metal micron particles and metal nanoparticles is supplied to an insulating substrate by screen printing, and fired in a low oxygen atmosphere to sinter the metal nanoparticles. It is what is done. For this reason, there has been a problem that it is difficult to select a conductive paste that satisfies both securing fluidity suitable for screen printing and suppressing increase in electrical resistance. That is, the material and particle size of metal micron particles, the material and particle size of metal nanoparticles, the type of solvent, and the amount of each (the proportion of each in the conductive paste) are the characteristics of the conductive wiring formed on the insulating substrate. It took a lot of tests and a long time to set according to the conditions.

本発明は上記問題を解消するものであって、導電ペーストをスクリーン印刷によって絶縁基板に供給することなく、絶縁基板上に所望の特性の導電配線を容易に形成することができる導電配線の製造方法、および該導電配線の製造方法によって形成された導電配線を提供することにある。   The present invention solves the above-described problem, and a method of manufacturing a conductive wiring capable of easily forming a conductive wiring having desired characteristics on an insulating substrate without supplying the conductive paste to the insulating substrate by screen printing. And providing a conductive wiring formed by the method of manufacturing the conductive wiring.

(1)本発明に係る導電配線の製造方法は、絶縁基板に所定のパターンになるようにインキを印刷する工程と、前記印刷されたインキが乾燥する前に、前記インキの上に導電性粉末を載置する工程と、前記載置された導電性粉末を前記絶縁基板に押し付けて圧縮する工程と、前記圧縮された導電性粉末を加熱して焼結させる工程と、を有する。
(2)また、前記加熱は、前記圧縮された導電性粉末に向けて紫外線またはレーザ光を照射して行う。
(3)また、前記絶縁基板は白色または透明で、前記レーザ光はYAGレーザ光である。
(4)さらに、本発明に係る導電配線は、前記(1)〜(3)の何れかに記載の導電配線の製造方法によって形成されている。
(1) A method for producing a conductive wiring according to the present invention includes a step of printing ink so as to form a predetermined pattern on an insulating substrate, and a conductive powder on the ink before the printed ink is dried. , A step of pressing the conductive powder placed on the insulating substrate and compressing the conductive powder, and a step of heating and sintering the compressed conductive powder.
(2) Moreover, the said heating is performed by irradiating an ultraviolet-ray or a laser beam toward the said compressed electroconductive powder.
(3) The insulating substrate is white or transparent, and the laser beam is a YAG laser beam.
(4) Furthermore, the conductive wiring which concerns on this invention is formed by the manufacturing method of the conductive wiring in any one of said (1)-(3).

(i)導電ペーストをスクリーン印刷等によって絶縁基板に供給するものでは、インキ内にある導電性粉末が印刷精度を悪化させるし、導電粉末の密度を上げることもできないのに対し、本発明に係る導電配線の製造方法は、所定のパターンの印刷に好適なインキを容易に選定することができるため、印刷精度を上げることができる。また、導電粉末の密度を上げることができ、導電性を良くすることができる上、従来のようなスクリーン印刷性および電気伝導性の両方を満足する導電ペーストを選定する手間がなくなり、作業が迅速になる。
(ii)また、紫外線またはレーザ光の照射によって焼結されるから、導電配線を安価に製造することができる。なお、導電性粉末の材質は限定するものではなく、銅や銅合金、あるいは銀や銀合金等である。
(iii)また、絶縁基板を白色または透明にして、白色または透明の基材を通過する性質を有するYAGレーザ光を、白色または透明の絶縁基板に照射するから、絶縁基板の発熱を抑えることができる。したがって、絶縁基板を、耐熱性を有する材料、例えばセラミック板等に限定する必要がなくなるため、絶縁基板の選択肢が拡がり、安価な絶縁基板を用いることによって、導電配線を安価に製造することができる。
(iv)また、本発明に係る導電配線は、前記(i)〜(iii)の何れかに記載の効果を有する導電配線の製造方法によって形成されているから、良好な導電率を有し、安価である。
(I) In the case where the conductive paste is supplied to the insulating substrate by screen printing or the like, the conductive powder in the ink deteriorates the printing accuracy and cannot increase the density of the conductive powder. Since the method for manufacturing the conductive wiring can easily select an ink suitable for printing a predetermined pattern, the printing accuracy can be increased. In addition, the density of the conductive powder can be increased, the conductivity can be improved, and there is no need to select a conductive paste that satisfies both screen printability and electrical conductivity as in the conventional case, and the work is quick. become.
(Ii) Moreover, since it sinters by irradiation of an ultraviolet-ray or a laser beam, a conductive wiring can be manufactured cheaply. The material of the conductive powder is not limited and is copper, copper alloy, silver, silver alloy, or the like.
(Iii) Since the insulating substrate is white or transparent and the white or transparent insulating substrate is irradiated with YAG laser light having a property of passing through the white or transparent base material, heat generation of the insulating substrate can be suppressed. it can. Therefore, it is not necessary to limit the insulating substrate to a heat-resistant material such as a ceramic plate, so that options for the insulating substrate are expanded, and the conductive wiring can be manufactured at low cost by using an inexpensive insulating substrate. .
(Iv) Moreover, since the conductive wiring according to the present invention is formed by the method for manufacturing a conductive wiring having the effect described in any one of (i) to (iii), the conductive wiring has good conductivity, Inexpensive.

本発明の実施の形態1に係る導電配線の製造方法を説明するフローチャート。The flowchart explaining the manufacturing method of the electrically conductive wiring which concerns on Embodiment 1 of this invention. 本発明の実施の形態1に係る導電配線の製造方法における各工程を模式的に示す側面視の断面図。Sectional drawing of the side view which shows typically each process in the manufacturing method of the electrically conductive wiring which concerns on Embodiment 1 of this invention. 本発明の実施の形態2に係る導電配線を模式的に示す側面視の断面図。Sectional drawing of the side view which shows typically the electrically conductive wiring which concerns on Embodiment 2 of this invention.

[実施の形態1]
図1および図2は本発明の実施の形態1に係る導電配線の製造方法と、かかる導電配線の製造方法によって製造された導電配線とを説明するものであって、図1はフローチャート、図2の(a)〜(e)は各工程を模式的に示す側面視の断面図である。なお、図2は、模式的に一部を誇張して示すものであって、本発明は、図示された形態(大きさや数量)に限定するものではない。
[Embodiment 1]
1 and 2 illustrate a method for manufacturing a conductive wiring according to Embodiment 1 of the present invention and a conductive wiring manufactured by the method for manufacturing the conductive wiring. FIG. 1 is a flowchart, FIG. (A)-(e) is sectional drawing of the side view which shows each process typically. FIG. 2 schematically shows a part in an exaggerated manner, and the present invention is not limited to the illustrated form (size and quantity).

図1および図2において、導電配線の製造方法は、絶縁基板1に所定のパターンになるようにインキ2を印刷する工程(S1)と、印刷されたインキ2が乾燥する前に、インキ2(所定のパターンになっている)に導電性粉末3を載置(散布)する工程(S2)と、載置された導電性粉末3を絶縁基板1に押し付けて圧縮する工程(S3)と、圧縮された導電性粉末3を加熱して焼結させる工程(S4)と、を有し、かかる一連の工程(S1〜S4)によって、導電配線20が製造される。
なお、本発明は、圧縮する工程(S3)と加熱して焼結させる工程(S4)とは、連続して行うものに限定するものではなく、同時に行ってもよい。
1 and 2, the conductive wiring manufacturing method includes a step (S1) of printing the ink 2 so as to form a predetermined pattern on the insulating substrate 1, and before the printed ink 2 is dried, the ink 2 ( A step (S2) of placing (dispersing) the conductive powder 3 in a predetermined pattern), a step of pressing the placed conductive powder 3 against the insulating substrate 1 and compressing (S3), and compression And heating the sintered conductive powder 3 to sinter (S4), and the conductive wiring 20 is manufactured through the series of steps (S1 to S4).
In the present invention, the compressing step (S3) and the heating and sintering step (S4) are not limited to those performed continuously, and may be performed simultaneously.

このとき、導電性粉末3は、例えば、銅や銅合金の細粒であって、例えば、平均粒径が1〜200μmであるが、本発明は導電性粉末3の平均粒径の範囲を限定するものではない。
そして、印刷されたインキ2が乾燥する前に、絶縁基板1に導電性粉末3を散布するから、導電性粉末3は乾燥する前のインキ2(単斜線にて示す)に付着し、インキ2に付着した導電性粉末3は所定のパターンを描くことになる。
また、前記加熱は、圧縮された導電性粉末3に向けてレーザ光(例えば、YAGレーザ光)30を照射して行う。
なお、レーザ光照射の前に、インキ2に付着した導電性粉末3は圧縮される(インキ2および導電性粉末3をまとめて複斜線にて示す)から、導電性粉末3同士の間隔(正確には、空孔(ポアー)の大きさ)が小さくなって密度が上がることによって、焼結が促進され、より低温でより迅速に加熱作業を実施することができる(焼結後の導電性粉末3を塗りつぶしにて示す)。なお、加熱は、レーザ光30に代えて、紫外線(キャノン光)を照射してもよい。
At this time, the conductive powder 3 is, for example, fine particles of copper or copper alloy, and has an average particle size of 1 to 200 μm, for example, but the present invention limits the range of the average particle size of the conductive powder 3. Not what you want.
Since the conductive powder 3 is sprayed on the insulating substrate 1 before the printed ink 2 dries, the conductive powder 3 adheres to the ink 2 (shown by a single oblique line) before drying, and the ink 2 The conductive powder 3 adhering to has a predetermined pattern.
The heating is performed by irradiating the compressed conductive powder 3 with a laser beam (for example, YAG laser beam) 30.
In addition, since the conductive powder 3 adhered to the ink 2 is compressed before the laser light irradiation (the ink 2 and the conductive powder 3 are collectively indicated by a double oblique line), the interval between the conductive powders 3 (accurately) The size of the pores (pores) is reduced and the density is increased, so that the sintering is promoted and the heating operation can be performed more quickly at a lower temperature (the conductive powder after sintering). 3 is shown as a solid fill). The heating may be performed by irradiating with ultraviolet rays (cannon light) instead of the laser light 30.

すなわち、導電配線の製造方法は、導電ペーストをスクリーン印刷等によって絶縁基板1に供給するものではないから、所定のパターンの印刷に好適なインキ2を容易に選定することができ、また、導電配線の特性に応じた導電性粉末3を容易に選定することができるため、印刷精度を上げ、導電粉末の密度を上げることができ、導電性を良くすることができる。また、従来のようなスクリーン印刷性および電気伝導性の両方を満足する導電ペーストを選定する手間がなくなり、作業が迅速になる。
また、導電性粉末3は細粒であって、紫外線またはレーザ光の照射によって焼結されるから、導電配線を安価に製造することができる。
In other words, the method for producing a conductive wiring does not supply the conductive paste to the insulating substrate 1 by screen printing or the like, so that the ink 2 suitable for printing a predetermined pattern can be easily selected. Therefore, it is possible to easily select the conductive powder 3 in accordance with the above characteristics, so that the printing accuracy can be increased, the density of the conductive powder can be increased, and the conductivity can be improved. Further, there is no need to select a conductive paste satisfying both screen printing properties and electrical conductivity as in the prior art, and the work is quickened.
Further, since the conductive powder 3 is fine and is sintered by irradiation with ultraviolet rays or laser light, the conductive wiring can be manufactured at low cost.

このとき、絶縁基板1を白色または透明にして、レーザ光としてYAGレーザ光を照射すれば、YAGレーザ光は白色または透明の基材を通過する性質を有することから、絶縁基板1の発熱を抑えることができる。したがって、絶縁基板1を、耐熱性を有する材料、例えばセラミック板等に限定する必要がなくなることから、絶縁基板の選択肢が拡がり、安価な絶縁基板を用いることによって、導電配線20を安価に製造することができる。
なお、図2の(d)において、複斜線を付した部分(インキ2および導電性粉末3)の上に、粒状の導電性粉末3が付着し、それぞれの厚さが略同じになっているが、本発明はこれに限定されるものではなく、それぞれの厚さは何れか厚くてもよく、また、複斜線を付した部分の上に付着した導電性粉末3は一層に限定されるものではない。さらに、複斜線を付した部分の上に付着した導電性粉末3がなく、複斜線を付した部分のみであってもよい。
At this time, if the insulating substrate 1 is made white or transparent and YAG laser light is irradiated as laser light, the YAG laser light has a property of passing through the white or transparent base material, so that heat generation of the insulating substrate 1 is suppressed. be able to. Accordingly, since it is not necessary to limit the insulating substrate 1 to a heat-resistant material, for example, a ceramic plate, the choice of the insulating substrate is expanded, and the conductive wiring 20 is manufactured at low cost by using an inexpensive insulating substrate. be able to.
In FIG. 2 (d), the granular conductive powder 3 adheres on the part with double diagonal lines (ink 2 and conductive powder 3), and the thicknesses thereof are substantially the same. However, the present invention is not limited to this, and each thickness may be any thickness, and the conductive powder 3 deposited on the portion with double diagonal lines is further limited. is not. Furthermore, there may be no conductive powder 3 attached on the part with double diagonal lines, and only the part with double diagonal lines may be provided.

[実施の形態2]
図3は本発明の実施の形態2に係る導電配線を示す側面視の断面図である。なお、図2と同じ部分には同じ符号を付し、一部の説明を省略する。
図3において、導電配線20は、絶縁基板1上に焼結した導電性粉末3によって描かれた所定のパターンを呈している。このとき、導電配線20は、導電配線の製造方法によって形成されたものであるから、良好な導電率を有し、安価である。
なお、絶縁基板1は平面に限定されるものではなく、曲面であってもよい。また、導電性粉末3によって描かれたパターンは限定されるものではなく、導電性粉末3の材質(成分)も限定するものではない。
[Embodiment 2]
FIG. 3 is a side sectional view showing the conductive wiring according to the second embodiment of the present invention. The same parts as those in FIG. 2 are denoted by the same reference numerals, and a part of the description is omitted.
In FIG. 3, the conductive wiring 20 has a predetermined pattern drawn by the conductive powder 3 sintered on the insulating substrate 1. At this time, since the conductive wiring 20 is formed by the conductive wiring manufacturing method, it has good conductivity and is inexpensive.
The insulating substrate 1 is not limited to a flat surface and may be a curved surface. Further, the pattern drawn by the conductive powder 3 is not limited, and the material (component) of the conductive powder 3 is not limited.

本発明によれば、所望のパターンの導電配線を容易かつ安価に製造することができるから、様々な形状の絶縁基板上に導電配線を製造する方法として広く利用することができる。   According to the present invention, since a conductive wiring having a desired pattern can be easily and inexpensively manufactured, it can be widely used as a method for manufacturing a conductive wiring on various shapes of insulating substrates.

1 絶縁基板
2 インキ
3 導電性粉末
20 導電配線
30 レーザ光
1 Insulating substrate 2 Ink 3 Conductive powder 20 Conductive wiring 30 Laser light

Claims (4)

絶縁基板に所定のパターンになるようにインキを印刷する工程と、
前記印刷されたインキが乾燥する前に、前記インキの上に導電性粉末を載置する工程と、
前記載置された導電性粉末を前記絶縁基板に押し付けて圧縮する工程と、
前記圧縮された導電性粉末を加熱して焼結させる工程と、
を有することを特徴とする導電配線の製造方法。
A step of printing ink so as to form a predetermined pattern on the insulating substrate;
Placing the conductive powder on the ink before the printed ink is dried; and
Pressing the conductive powder placed on the insulating substrate and compressing the conductive powder;
Heating and sintering the compressed conductive powder; and
A method for producing a conductive wiring, comprising:
前記加熱は、前記圧縮された導電性粉末に向けて、紫外線またはレーザ光を照射して行うことを特徴とする請求項1記載の導電配線の製造方法。   The method of manufacturing a conductive wiring according to claim 1, wherein the heating is performed by irradiating the compressed conductive powder with ultraviolet rays or laser light. 前記絶縁基板は白色または透明で、前記レーザ光はYAGレーザ光であることを特徴とする請求項2記載の導電配線の製造方法。   3. The method of manufacturing a conductive wiring according to claim 2, wherein the insulating substrate is white or transparent, and the laser beam is a YAG laser beam. 請求項1〜3の何れか一項に記載の導電配線の製造方法によって形成されたことを特徴とする導電配線。   A conductive wiring formed by the method for manufacturing a conductive wiring according to claim 1.
JP2014159602A 2014-03-28 2014-08-05 Conductive wiring manufacturing method and conductive wiring Pending JP2016039171A (en)

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JP2014159602A JP2016039171A (en) 2014-08-05 2014-08-05 Conductive wiring manufacturing method and conductive wiring
CN201480033522.XA CN105393650B (en) 2014-03-28 2014-10-24 The manufacture method and conducting wiring of conducting wiring
US14/897,862 US9585251B2 (en) 2014-03-28 2014-10-24 Method of manufacturing conductive wiring and conductive wiring
PCT/JP2014/078381 WO2015145848A1 (en) 2014-03-28 2014-10-24 Method for manufacturing conductive line and conductive line
EP14887505.7A EP2991463B1 (en) 2014-03-28 2014-10-24 Method for manufacturing conductive line and conductive line
KR1020157032601A KR20150143742A (en) 2014-03-28 2014-10-24 Method for manufacturing conductive line and conductive line
TW103137773A TWI578867B (en) 2014-03-28 2014-10-31 Method for manufacturing conductive wire, and conductive wire

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