JP2016036228A - Table device, positioning device, and precision machine - Google Patents

Abstract

Provided are a table device, a positioning device, and a precision machine that can suppress a manufacturing cost and appropriately prevent a decrease in the life of a table due to the weight of a load.
A table device (1) includes a base (10), a pair of guide rails (31) extending on a front surface (10a) of the base (10), and a pair of slide rails installed on the guide rail (31). The slider 32 is provided on the back surface 20b and the table 20 moves linearly with respect to the base 10. The back surface 10b of the base 10 is provided with a stator 41. The table 20 is provided with a magnetic field for the stator 41. A support portion 50 provided with the movable element 42 is provided so that the direction of the suction force is opposite to the gravity of the load 90 placed on the table 20.
[Selection] Figure 1

Description

  The present invention relates to a table device having a moving coil type linear motor, a positioning device using the table device, and a precision machine.

Conventionally, a technique disclosed in Patent Document 1 is known as a technique related to this type of table device.
As shown in FIG. 5, the table device 100 disclosed in Patent Document 1 fixes a stator 131 of a linear motor 130 to the upper surface of a base 110 at the center and both left and right sides so as to sandwich the stator 131. The guide rails 141 and 141 of the pair of linear motion guide portions (linear guides) 140 are fixed in parallel with the guide rails 141 and 141.

Sliders 142 and 142 are mounted on the guide rails 141 and 141 for each of the guide rails 141 and 141. A table 120 whose lower surface is supported by the sliders 142 and 142 is attached to the sliders 142 and 142.
A mover 132 of the linear motor 130 is fixedly attached to the lower surface of the table 120 by means such as bolting.
The coil of the mover 132 is arranged such that the winding direction thereof is perpendicular to the extending direction of the permanent magnet (not shown) of the stator 131, and a minimum necessary air gap is provided between the surfaces of the permanent magnet. Arranged through.

  A pair of magnetic repulsion members (for example, permanent magnets) 151 and 152 are provided on the upper surface of the base 110 and the back surface of the table 120 so as to be opposed to each other and repel each other. By providing the magnetic repulsion members 151 and 152, it is possible to appropriately prevent a decrease in the life of the table 120 with respect to the base 110 due to the weight of the load 190 placed on the table 120.

JP 2001-298951 A

However, the technique disclosed in Patent Document 1 is configured so that a repulsive force is generated by adding a magnetic repulsion member separately from the linear motor. As a result, a large number of expensive magnetic repulsion members are required, thereby reducing the cost. There was room for improvement in that it was difficult.
In addition, by providing a large number of ferromagnetic magnetic repulsion members, dust (particularly magnetic foreign matter) is likely to adhere to these magnetic repulsion members, and as a result, the life of the table may be reduced. There was room for improvement.

In addition, during assembly adjustment work, in consideration of safety in that a magnetic material such as a tool is attracted to the magnetic repulsion member, a measure such as providing a cover or the like on the magnetic repulsion member may be required.
The present invention has been made paying attention to the above problems, and provides a table device, a positioning device, and a precision machine that can suppress the manufacturing cost and appropriately prevent a decrease in the life of the table due to the weight of the load. The task is to do.

A certain aspect of the table device for solving the above-mentioned problem is a base,
A pair of guide rails extending on the front surface along the longitudinal direction of the base;
A slider that is slidably installed with respect to each of the guide rails, and a table that moves linearly with respect to the base with a slider on the back surface;
On the back surface of the base is provided with a stator composed of a plurality of permanent magnets arranged side by side so that the polarities of adjacent magnetic poles are different,
A movable element having a plurality of armature coils provided on the table so as to be opposed to the stator and provided with a movement propulsion force in cooperation with the permanent magnet of the stator is attached to the stator. A support portion is provided so that the direction of the magnetic attractive force is in the direction against the gravity of the load placed on the table.

Further, in the table device, the base comprises a top plate portion and a pair of leg portions so as to form an open U-shaped cross-sectional shape on the back surface,
A pair of first through grooves are provided between the guide rails of the top plate portion along the moving direction of the table so as to sandwich the stator,
A base with the mover installed on the front surface;
It is preferable that the support portion is constituted by an arm portion that passes through the first through groove and connects the back surface of the table and the base portion.

Further, in the table device, the base comprises a top plate portion and a pair of leg portions so as to form an open U-shaped cross-sectional shape on the back surface,
A second through groove is provided in each of the pair of legs along the moving direction of the table,
A base that is installed on the front surface of the mover and penetrates the second through groove;
It is preferable that the support portion is composed of an arm portion connecting the back surface of the table and the base portion so as to sandwich the pair of linear motion guide portions.

In the table device, a linear scale is provided at an end of the base in a direction orthogonal to the moving direction of the table,
An encoder head is provided at an end of the table in a direction orthogonal to the moving direction of the table so as to face the linear scale;
It is preferable that a linear encoder is constituted by the linear scale and the encoder head.

Further, in the table device, a linear scale is provided on the base between the linear motion guide portions or between the arm portions,
An encoder head is provided on the table between the linear motion guide portions or between the arm portions so as to face the linear scale,
It is preferable that a linear encoder is constituted by the linear scale and the encoder head.

An aspect of a positioning device for solving the above problem includes a table device,
The table device includes a base,
A pair of guide rails extending on the front surface along the longitudinal direction of the base;
A slider that is slidably installed with respect to each of the guide rails, and a table that moves linearly with respect to the base with a slider on the back surface;
On the back surface of the base is provided with a stator composed of a plurality of permanent magnets arranged side by side so that the polarities of adjacent magnetic poles are different,
A movable element having a plurality of armature coils provided on the table so as to be opposed to the stator and provided with a movement propulsion force in cooperation with the permanent magnet of the stator is attached to the stator. A support portion is provided so that the direction of the magnetic attractive force is in the direction against the gravity of the load placed on the table.

Further, in the positioning device, the base comprises a top plate portion and a pair of leg portions so as to form an open U-shaped cross-sectional shape on the back surface,
A pair of first through grooves are provided between the guide rails of the top plate portion along the moving direction of the table so as to sandwich the stator,
A base with the mover installed on the front surface;
It is preferable that the support portion is constituted by an arm portion that passes through the first through groove and connects the back surface of the table and the base portion.

Further, in the positioning device, the base comprises a top plate portion and a pair of leg portions so as to form an open U-shaped cross-sectional shape on the back surface,
A second through groove is provided in each of the pair of legs along the moving direction of the table,
A base that is installed on the front surface of the mover and penetrates the second through groove;
It is preferable that the support portion is composed of an arm portion connecting the back surface of the table and the base portion so as to sandwich the pair of linear motion guide portions.

In the positioning device, a linear scale is provided at an end of the base in a direction orthogonal to the moving direction of the table.
An encoder head is provided at an end of the table in a direction orthogonal to the moving direction of the table so as to face the linear scale;
It is preferable that a linear encoder is constituted by the linear scale and the encoder head.

Further, in the positioning device, a linear scale is provided on the base between the linear motion guide portions or between the arm portions,
An encoder head is provided on the table between the linear motion guide portions or between the arm portions so as to face the linear scale,
It is preferable that a linear encoder is constituted by the linear scale and the encoder head.

An aspect of a precision machine for solving the above problem includes a table device,
The table device includes a base,
A pair of guide rails extending on the front surface along the longitudinal direction of the base;
A slider that is slidably installed with respect to each of the guide rails, and a table that moves linearly with respect to the base with a slider on the back surface;
On the back surface of the base is provided with a stator composed of a plurality of permanent magnets arranged side by side so that the polarities of adjacent magnetic poles are different,
A movable element having a plurality of armature coils provided on the table so as to be opposed to the stator and provided with a movement propulsion force in cooperation with the permanent magnet of the stator is attached to the stator. A support portion is provided so that the direction of the magnetic attractive force is in the direction against the gravity of the load placed on the table.

Further, in the precision machine, the base comprises a top plate portion and a pair of leg portions so as to form an open U-shaped cross-sectional shape on the back surface,
A pair of first through grooves are provided between the guide rails of the top plate portion along the moving direction of the table so as to sandwich the stator,
A base with the mover installed on the front surface;
It is preferable that the support portion is constituted by an arm portion that passes through the first through groove and connects the back surface of the table and the base portion.

Further, in the precision machine, the base comprises a top plate portion and a pair of leg portions so as to form an open U-shaped cross-sectional shape on the back surface,
A second through groove is provided in each of the pair of legs along the moving direction of the table,
A base that is installed on the front surface of the mover and penetrates the second through groove;
It is preferable that the support portion is composed of an arm portion connecting the back surface of the table and the base portion so as to sandwich the pair of linear motion guide portions.

In the precision machine, a linear scale is provided at an end of the base in a direction orthogonal to the moving direction of the table,
An encoder head is provided at an end of the table in a direction orthogonal to the moving direction of the table so as to face the linear scale;
It is preferable that a linear encoder is constituted by the linear scale and the encoder head.

Further, in the precision machine, a linear scale is provided on the base between the linear motion guide portions or between the arm portions,
An encoder head is provided on the table between the linear motion guide portions or between the arm portions so as to face the linear scale,
It is preferable that a linear encoder is constituted by the linear scale and the encoder head.

  According to the present invention, it is possible to provide a table device, a positioning device, and a precision machine that can suppress the manufacturing cost and appropriately prevent a decrease in the life of the table due to the weight of the load.

It is sectional drawing which shows the structure of 1st Embodiment of a table apparatus. It is sectional drawing which shows the structure of 2nd Embodiment of a table apparatus. It is sectional drawing which shows the structure of 3rd Embodiment of a table apparatus. It is sectional drawing which shows the structure of 4th Embodiment of a table apparatus. It is sectional drawing which shows the conventional structure of a table apparatus.

  Hereinafter, embodiments of a table device, a positioning device, and a precision machine according to the present invention will be described with reference to the drawings. Here, examples of the table device of the present invention include a table device used for manufacturing, inspection and the like of semiconductor devices, liquid crystal display devices and the like. In addition, examples of the positioning device of the present invention include a positioning device that performs positioning by numerical control using the table device. Furthermore, examples of the precision machine of the present invention include a machine tool, a measuring machine, a precision processing machine, a precision inspection apparatus, a precision scanning apparatus, a flat panel display manufacturing apparatus, and a semiconductor device manufacturing apparatus using the table device. Can be mentioned.

Hereinafter, the table device will be mainly described. In the following description, each surface facing one direction of “Z direction” in each figure is described as “front surface”, and each surface facing the other direction of “Z direction” is described as “back surface”. To do.
(First embodiment)
FIG. 1 is a cross-sectional view showing the configuration of the first embodiment of the table device. Here, FIG. 1 is a cross-sectional view along a direction orthogonal to the drive direction (movement direction) of the table 20 with respect to the base 10.

<Configuration>
As shown in FIG. 1, the table device 1 of the present embodiment includes a base 10, a table 20, a linear motion guide unit (linear guide) 30, a linear motor 40, a support unit 50, and a linear encoder 60. Have
[Linear motion guide]
A pair of guide rails 31, 31 are extended on the front surface (upper surface) 10 a of the base 10 along the longitudinal direction of the base 10 (the Y direction in FIG. 1). Each of the pair of guide rails 31 is provided on the front surface 10a of the base 10 with an equal interval in the X direction in FIG.
Further, sliders 32 and 32 are installed on the back surface (lower surface) 20b of the table 20 so as to be slidable in the Y direction in FIG. 1 with respect to the guide rails 31 and 31, respectively. The guide rail 31 and the slider 32 constitute the linear motion guide portion 30, and the slider 20 slides relative to the guide rail 31, so that the table 20 moves linearly in the Y direction in FIG. 1 with respect to the base 10. Exercise.

[Linear motor]
A back surface (lower surface) 10b of the base 10 is provided with a stator 41 composed of a plurality of permanent magnets arranged side by side in the Y direction in FIG. 1 so that the polarities of adjacent magnetic poles are different.
Further, the table 20 is provided with a mover 42 having a plurality of armature coils to which movement propulsive force is applied in cooperation with a permanent magnet of the stator 41 via a support portion 50 described later. The stator 41 and the mover 42 are provided to face each other in the Z direction in FIG.

[Supporting part]
Support portion 50, so that the orientation of the magnetic attraction force F _M of the movable element 42 becomes in a direction against the force of gravity F of the payload 90 placed on the front surface (upper surface) 20a of the table 20 relative to the stator 41 Installed. That is, the direction of the magnetic attractive force F _M is the Z direction in FIG. 1, a direction opposite to the direction of gravity F.
Here, the base 10 has a top plate portion 10A and a pair of legs erected on both ends in the X direction of the top plate portion 10A so as to form an open U-shaped cross-sectional shape on the back surface 10b. It consists of parts 10B and 10B.

Then, a pair of guide rails of the top plate portion 10A along the moving direction (Y direction in FIG. 1) of the table 20 so as to sandwich the stator 41 installed on the back surface 10b of the base 10 (top plate portion 10A). A pair of first through grooves 11, 11 are provided between 31, 31.
These first through-grooves 11 and 11 are groove-shaped through-holes (through the top plate portion 10A in the Z direction in FIG. 1) along the moving direction (Y direction in FIG. 1) of the table 20, respectively. Slit, opening).
The support portion 50 is connected to the base portion 52 provided on the front surface (upper surface) 52a of the movable element 42 and the first through grooves 11 and 11 to connect the back surface 20b of the table 20 and the base portion 52. It is composed of a pair of arm portions 51 and 52.

[Linear encoder]
The table device 1 is provided with a linear encoder 60 as position detecting means for detecting the relative position between the permanent magnet of the stator 41 and the mover 42. Specifically, as shown in FIG. 1, the linear encoder 60 includes a linear scale 61 and an encoder head 62. The linear scale 61 is provided at the end of the base 10 in a direction orthogonal to the moving direction of the table 20. The linear scale 61 extends in the Y direction in FIG. 1 and is fixed to the front surface 10a of the base 10 in parallel with the guide rail 31 of the linear motion guide unit 30. On the other hand, an encoder head 62 extends in the Y direction in FIG. 1 at the end of the table 20 in a direction orthogonal to the moving direction of the table 20 so as to face the linear scale 61.
With this configuration, the linear encoder 60 obtains current position information of the mover 42, and feedback-controls energization of the coil via a motor driving driver (not shown). It can be moved freely and can be arbitrarily positioned and stopped.

<Operation>
Next, the operation of the table device 1 of the present embodiment will be described. When a drive current is passed through the coil of the mover 42, a relative thrust acts between the mover 42 and the stator 41 due to the interaction between the current and the magnetic flux of the permanent magnet of the stator 41. Starts to move in the Y direction in FIG. Accordingly, the table 20 moves in the forward direction in the Y direction in FIG. 1 while being guided by the guide rail 31 via the slider 32 of the linear motion guide unit 30. On the other hand, when a current in the reverse direction is passed through the coil of the mover 42, a driving force in the opposite direction acts on the mover 42, so that the mover 42 is in the opposite direction in the Y direction in FIG. Start moving. Thus, if the intensity of the current to the coil of the mover 42 and the direction of the current are appropriately selected, the mover 42, that is, the table 20 is freely moved to a predetermined position in the Y direction in FIG. be able to.

  As described above, in the table apparatus 1 of the present embodiment, the arrangement of the stator 41 and the mover 42 of the linear motor 40 is changed by the support unit 50, and the magnetic attraction force of the linear motor 40 is applied to the load 90. It was configured to work in the direction opposite to the direction of gravity. As a result, the magnetic attraction force of the linear motor 40 is converted to a force that pushes the table 20 from the back surface 20b toward the front surface 20a. Therefore, it is not necessary to separately provide an expensive magnetic repulsion member or the like, and the manufacturing cost can be reduced. be able to. Further, in order to offset the load (twist, distortion, etc.) of the table 20 due to the gravity of the load 90 and greatly reduce the motion performance of the linear motion guide portion 30, the performance inherent in the linear motion guide portion 30 is sufficiently exhibited. There is an effect that can be made.

In addition, since the arrangement of the stator 41 and the mover 42 of the linear motor 40 is changed by the support portion 50, the base 10 also serves as a cover, and there is an effect that it is less necessary to provide a cover again. Play.
Thus, according to the table apparatus 1 of the present embodiment, the load in the direction of gravity of the load 90 on the table 20 is reduced, so that the life of the linear motion guide unit 30 can be extended.

Further, since the table 20 is not greatly deformed by the weight of the mounted object 90 and the gap between the stator 41 and the movable element 42 constituting the linear motor 40 is stabilized, the driving thrust of the table 20 is stabilized and the mounted object 90 is stabilized. The effect of deformation and the like is reduced.
Therefore, the table device 1 of the present embodiment can suppress the manufacturing cost and appropriately prevent the life of the table 20 from being reduced due to the weight of the load 90.
In addition, with respect to a positioning device and a precision machine using such a table device, the manufacturing cost can be suppressed, and a reduction in the life can be appropriately prevented.

(Second Embodiment)
FIG. 2 is a cross-sectional view along the direction orthogonal to the longitudinal direction showing the configuration of the second embodiment of the table device according to the present invention. In addition, since the table apparatus of this embodiment is different from the first embodiment described above only in the installation mode of the linear encoder, the same reference numerals are attached to the drawings for members that overlap or correspond to the first embodiment. Description is omitted.
As shown in FIG. 2, the table device 1 of the present embodiment is arranged between the arm portions 51 and 51, that is, on the front surface 10 a of the base 10 between the first through grooves 11 and 11 in the Y direction in FIG. 2. A linear scale 61 is provided along the line. Further, an encoder head 61 is provided along the Y direction in FIG. 2 on the back surface 20 b of the table 20 between the arm portions 51, 51 so as to face the linear scale 61.

  Thus, in this embodiment, the linear encoder 60 comprised by the linear scale 61 and the encoder head 62 is installed between the arm parts 51 and 51 in the X direction in FIG. Therefore, the dimension in the width direction of the table device 1 (direction orthogonal to the moving direction of the table 20 (X direction in FIG. 2)) can be reduced, and space saving can be realized. In addition, since the linear encoder 60 is installed surrounded by the base 10, the table 20, and the linear motion guide unit 30, foreign matter is less likely to be present in the linear encoder 60. As a result, the position detection accuracy of the linear encoder 60 is improved, and the controllability of the linear motor 40 is improved.

(Third embodiment)
FIG. 3 is a cross-sectional view along a direction orthogonal to the longitudinal direction showing the configuration of the third embodiment of the table device according to the present invention. Note that the table device of the present embodiment is different from the first embodiment described above only in the configuration of the support portion, and therefore, the same reference numerals are given to the drawings for members that overlap or correspond to the first embodiment. Is omitted.
As shown in FIG. 3, the table apparatus 1 of this embodiment is similar to the first embodiment in that the base 10 has a top plate portion 10A so that the back surface 10b has an open U-shaped cross-sectional shape. It consists of a pair of legs 10B.

In the present embodiment, the second through-grooves 12 and 12 are provided in the pair of leg portions 10B and 10B, respectively, along the moving direction of the table 20.
These second through grooves 12 and 12 respectively penetrate the pair of leg portions 10B and 10B in the X direction in FIG. 3 along the moving direction of the table 20 (Y direction in FIG. 3). It is a groove-shaped through hole (slit, opening).
In these second through grooves 12, 12, a base portion 52 of the support portion 50 is provided so as to penetrate in the X direction in FIG. 3. A mover 42 is installed on the front surface 52 a of the base 52 so as to face the stator 41.
Further, in the X direction in FIG. 3, the arm portions 51 and 51 connect the back surface 20 a and the base portion 52 of the table 20 so as to sandwich the pair of linear motion guide portions 30 and 30 and the linear encoder 60.

(Fourth embodiment)
FIG. 4 is a cross-sectional view along the direction orthogonal to the longitudinal direction showing the configuration of the fourth embodiment of the table device according to the present invention. In addition, since the table apparatus of this embodiment is different from the third embodiment described above only in the installation mode of the linear encoder, members that are the same as or similar to those in the third embodiment are denoted by the same reference numerals. Description is omitted.
As shown in FIG. 4, the table device 1 of the present embodiment is arranged on the front surface 10a of the base 10 between the arm portions 51 and 51 (between the linear motion guide portions 30 and 30) in the X direction in FIG. A linear scale 61 is provided. Further, an encoder head 61 is provided on the back surface 20b of the table 20 between the arm portions 51 and 51 (between the linear motion guide portions 30 and 30) in the X direction in FIG. 4 so as to face the linear scale 61.

Thus, in this embodiment, the linear encoder 60 comprised by the linear scale 61 and the encoder head 62 is installed between the linear motion guide parts 30 and 30 in the X direction in FIG. Therefore, the dimension of the table apparatus 1 in the width direction (direction orthogonal to the moving direction of the table 20 (X direction in FIG. 4)) can be reduced, and space saving can be realized. In addition, since the linear encoder 60 is installed surrounded by the base 10, the table 20, and the linear motion guide unit 30, foreign matter is less likely to be present in the linear encoder 60. As a result, the position detection accuracy of the linear encoder 60 is improved, and the controllability of the linear motor 40 is improved.
The embodiments of the table device, the positioning device, and the precision machine have been described above. However, the table device, the positioning device, and the precision machine according to the present invention are not limited to the above-described embodiment, and the gist of the present invention. Various modifications are possible without departing.

DESCRIPTION OF SYMBOLS 1 Table apparatus 10 Base 10a Front surface 10b Back surface 11 1st penetration groove 12 2nd penetration groove 20 Table 20a Front surface 20b Back surface 30 Linear motion guide part 31 Guide rail 32 Slider 40 Linear motor 41 Stator 42 Movable Child 50 Support portion 51 Arm portion 52 Base portion 60 Linear encoder 61 Linear scale 62 Encoder head 90 Mounted object

Claims (7)

The base,
A pair of guide rails extending on the front surface along the longitudinal direction of the base;
A slider that is slidably installed with respect to each of the guide rails, and a table that moves linearly with respect to the base with a slider on the back surface;
The back of the base is provided with a stator composed of a plurality of permanent magnets arranged side by side so that the polarities of adjacent magnetic poles are different,
A movable element having a plurality of armature coils provided on the table so as to be opposed to the stator and provided with a movement propulsion force in cooperation with the permanent magnet of the stator is attached to the stator. A table device provided with a support portion installed so that the direction of the magnetic attractive force is in a direction against the gravity of the load placed on the table. The base consists of a top plate and a pair of legs so as to form an open U-shaped cross-sectional shape on the back surface,
A pair of first through grooves are provided between the guide rails of the top plate portion along the moving direction of the table so as to sandwich the stator,
A base having the mover installed on the front surface;
The table apparatus according to claim 1, wherein the support portion is configured by an arm portion that passes through the first through groove and connects the back surface of the table and the base portion. The base consists of a top plate and a pair of legs so as to form an open U-shaped cross-sectional shape on the back surface,
A second through groove is provided in each of the pair of legs along the moving direction of the table,
A base that is installed on the front surface of the mover and penetrates the second through groove;
The table apparatus according to claim 1, wherein the support portion is configured by an arm portion connecting the back surface of the table and the base portion so as to sandwich the pair of linear motion guide portions. A linear scale is provided at an end of the base in a direction perpendicular to the moving direction of the table;
An encoder head is provided at an end of the table in a direction orthogonal to the moving direction of the table so as to face the linear scale;
The table apparatus according to claim 1, wherein a linear encoder is configured by the linear scale and the encoder head. A linear scale is provided on the base between the linear motion guide portions or between the arm portions,
An encoder head is provided on the table between the linear motion guide portions or between the arm portions so as to face the linear scale,
The table apparatus according to claim 1, wherein a linear encoder is configured by the linear scale and the encoder head.   A positioning device comprising the table device according to claim 1.   A precision machine comprising the table device according to any one of claims 1 to 5.

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