JP2016001670A - Semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To soften the current waveform of a high-speed diode at the time of reverse recovery operation.SOLUTION: In a diode having a PiN-type diode structure which flows the current in a longitudinal direction, a carrier residual layer (crystal defect layer) which generates carriers when reverse bias is applied, is locally arranged in a region of a drift layer outside of a depletion region which is formed when reverse bias is applied. Carriers (electrons) are supplied by the layer at the time of switching operation and thereby the current flows; therefore carriers do not rapidly disappear and the current waveform at the time of reverse recovery operation can be made soft. Because no carrier residual layer (crystal defect layer) is provided on a rear surface of the diode, the current waveform can be made soft without increasing Vf.

Description

    The present invention relates to a diode having soft switching characteristics in a current waveform during reverse recovery operation.

In recent years, there has been a demand for higher speed switching diodes used for high-frequency rectification. In order to increase the speed of the diode, it is necessary to adjust the carrier lifetime in the semiconductor element to be short to shorten the reverse recovery time, and the gold (which works as a lifetime killer so that the carrier disappears rapidly) Pt), platinum (Pt), etc. may be introduced.

Japanese Patent Laid-Open No. 2-170471 Fuji Electric

    However, when the speed of the diode is increased by the conventional technique, the rising slope of the waveform (1 in FIG. 1) when the reverse current approaches the 0 current value during the reverse recovery operation (1 in FIG. 1) becomes large (hard waveform). There is a problem that noise called ringing occurs when the current value converges to 0 current value.

An object of the present invention is to solve the above-described problems and reduce the rising gradient of the reverse current waveform (see 1 in FIG. 2: soft waveform).

In order to solve the above-described problems, the present invention has the following configurations.
The semiconductor device of the present invention is a PiN structure diode that allows current to flow in the vertical direction, and drifts below the channel stopper outside the depletion layer region (inactive region) formed inside the semiconductor when reverse bias is applied. In the region of the layer, there is a carrier remaining layer (crystal defect layer) that locally generates carriers.

The density of the carrier remaining layer (crystal defect layer) is between 8E11 atoms / cm3 and 5E15 atoms / cm3.

The width of the carrier remaining layer (FIG. 4Wb) is smaller than the width of the channel stopper (FIG. 4Wa). As a result, the current waveform during the reverse recovery operation can be softened without changing the characteristics of the channel stopper.

  According to the present invention, the current waveform during the reverse recovery operation of the high-speed diode can be softened, and ringing can be suppressed.

It is a current waveform at the time of reverse recovery operation of a conventional diode. 6 is a current waveform during reverse recovery operation of the diode according to Example 1 of the present invention. It is sectional drawing of the conventional diode chip. It is sectional drawing of the diode chip which concerns on Example 1 of this invention.

Hereinafter, the structure which becomes embodiment of this invention is demonstrated.

    The structure of the diode according to Example 1 will be described. As shown in FIG. 4, the diode of the present invention has a carrier remaining layer (crystal defect layer) inside the drift layer in the outer peripheral region (inactive region) outside the depletion layer region and below the channel stopper. Yes.

1. Ramp of reverse current rising during reverse recovery operation 2. Anode electrode 3. P + diffusion layer 4. N- diffusion layer (drift layer)
5, N + diffusion layer (back contact layer)
6, cathode electrode 7, EQR
8, insulating film 9, channel stopper 10, depletion layer 11, carrier remaining layer (crystal defect layer)

Claims (2)

A carrier remaining layer (crystal defect layer) that has a PiN-type diode structure that allows current to flow in the vertical direction and generates carriers in the outer peripheral region (inactive region) outside the depletion layer that is formed when a reverse bias is applied. A semiconductor device characterized by having a structure. The semiconductor device according to claim 1, wherein the carrier remaining layer (crystal defect layer) is formed in a drift layer under a channel stopper.

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