JP2016079494A - Can roll, long substrate processing apparatus, and long substrate processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a can roll which has a gas release mechanism with a simplified structure and a high cooling effect and can curb gas leak, and to provide a lengthy substrate processing device and a lengthy substrate processing method using the can roll.SOLUTION: A can roll comprises: an irrotational shaft 76; a can roll body 71 which has a cylindrical section with a gas release port 73 and is rotatably installed on the irrotational shaft; a cryogenic cooling panel 84 which is arranged close to an inner periphery of the cylindrical section in a region with a lengthy substrate wound around the same and supplied with a coolant through piping 80 installed on the irrotational shaft; a gas introduction pipe 81 which is installed on the irrotational shaft and releases gas into an inner space of the cylindrical section; gas release prevention member 72 which is arranged so as to contact the inner periphery of the cylindrical section in the region without the lengthy substrate wound around the same and closes the gas release port in an angle range corresponding to the region without the lengthy substrate wound around the same; and drive means which performs rotary drive of the can roll body.SELECTED DRAWING: Figure 1

Description

  In the present invention, a heat load such as ion beam treatment or sputtering film formation is applied in a state where a long substrate such as a long heat-resistant resin film conveyed by roll-to-roll in a vacuum chamber is wound around the outer surface of the can roll. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a long substrate processing apparatus that performs surface treatment, and in particular, has a simplified structure and has a gas discharge mechanism with a high cooling effect and can suppress gas leakage from an outer peripheral surface of a can roll on which no film is wound. The present invention relates to improvements in a roll, a long substrate processing apparatus and a long substrate processing method using the can roll.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and denser, and it has become even more important that the heat-resistant resin film with metal film itself is smooth and free of defects. Yes.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, a method of manufacturing by attaching a metal foil to a heat-resistant resin film with an adhesive (referred to as a manufacturing method of a three-layer substrate), heat-resistant to the metal foil By coating with a conductive resin solution and drying to manufacture (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method for producing a metal film on a heat-resistant resin film (referred to as a metallizing method) has been conventionally known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  As the metallizing method, Patent Document 1 discloses a method of forming a conductor layer on a polyimide insulating layer by sputtering copper on a polyimide insulating layer and then sputtering copper. Further, in Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are sequentially laminated on a polyimide film. A disclosed flexible circuit board material is disclosed. In order to form a vacuum film on a heat resistant resin film (substrate) such as a polyimide film, a sputtering web coater is generally used.

  In the vacuum film-forming method described above, the sputtering method is generally excellent in adhesion, but it is said that the heat load applied to the heat-resistant resin film is larger than that in the vacuum deposition method. It is also known that if a large heat load is applied to the heat resistant resin film during film formation, wrinkles are likely to occur in the film. In order to prevent the occurrence of wrinkles, a sputtering web coater, which is a manufacturing apparatus for heat-resistant resin film with metal film, is equipped with a can roll having a cooling function, and is rotated to convey the path defined on the outer peripheral surface. The system which cools the heat resistant resin film in sputtering process from the back surface side is wound by winding the heat resistant resin film conveyed by roll-to-roll.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus is equipped with a cooling roll that plays the role of the above-mentioned can roll, and further controls the film to be in close contact with the cooling roll by a sub-roll provided on at least the film carry-in side or the carry-out side of the cooling roll. Has been done.

  However, as described in Non-Patent Document 1, since the outer peripheral surface of the can roll is not flat when viewed microscopically, there is a vacuum between the can roll and the film conveyed in close contact with the outer peripheral surface. There is a gap portion (gap) that is separated through the space. For this reason, it cannot be said that the heat of the film generated during sputtering or vapor deposition is actually efficiently transferred from the film to the can roll, which causes the generation of film defects.

  Therefore, a technique has been proposed in which gas is introduced from the can roll side into the gap portion between the outer peripheral surface of the can roll and the film so that the thermal conductivity of the gap portion is higher than that of vacuum.

  As a specific method for introducing gas into the gap portion from the can roll side, for example, Patent Document 4 discloses a technique in which a large number of micro holes serving as gas discharge ports are provided on the outer surface of the can roll. 5 discloses a technique of providing a groove serving as a gas discharge port on the outer peripheral surface of the can roll. Also known is a method in which the can roll itself is composed of a porous body, and the micropores of the porous body itself are used as gas discharge ports.

  By the way, in the method of providing fine holes, grooves, or the like serving as gas discharge ports on the outer peripheral surface of the can roll, the region where the film is not wound around the outer peripheral surface of the can roll has a higher gas release than the region where the film is wound. The resistance at the outlet is reduced. For this reason, most of the gas supplied to the can roll is released from the gas discharge port in the area where the film is not wound into the space of the vacuum chamber, and as a result, the outer surface of the can roll and the coil are wound there. In some cases, the amount of gas to be originally introduced into the gap between the film and the film is not supplied, and the above-described effect of increasing the thermal conductivity cannot be obtained.

  For this problem, a valve that protrudes from the outer peripheral surface of the can roll is provided in the gas discharge port, and the gas discharge port is opened by pressing the valve on the film surface (Patent Document 5). The area of the surface where the film is not wound around the outer surface of the can roll starting from the unloading portion where the film is unloaded and the loading portion where the film is loaded as the end point (that is, the non-contacting area where the film does not contact the outer surface of the can roll) A method of attaching gas to the gap between the outer peripheral surface of the can roll and the film surface by preventing the gas from being released from the non-contact area to the space of the vacuum chamber by attaching a cover to the area (see Patent Document 6) ) Etc. have been proposed.

  However, the method of Patent Document 5 that opens the gas discharge port by pressing the valve protruding from the outer peripheral surface of the can roll with the film surface may cause slight scratches or dents on the film surface due to the contact of the valve. However, it has been difficult to adopt for the production of a flexible wiring board for use in an electronic device that is required. Moreover, the method of patent document 6 which attaches a cover to the non-contact area | region where a film does not contact among can roll outer peripheral surfaces WHEREIN: In the processing apparatus which forms into a film with a high degree of vacuum, gas is emitted from the clearance gap between a cover and a can roll outer peripheral surface. It was easy to leak and was difficult to adopt as in the method of Patent Document 5.

  Under such a technical background, Patent Document 7 includes a gas introduction mechanism and prevents gas from being released from the non-contact region by providing a structure that does not supply gas to the outer peripheral surface of the can roll on which no film is wound. A can roll is disclosed. That is, as shown in FIGS. 5 to 7, a plurality of gas introduction paths 14 are provided in the thick portion of the can roll 56, and each gas introduction path 14 is provided with a number of gas discharge holes 15. In addition, a can roll including a gas rotary joint 20 that supplies gas outside the vacuum chamber to each of the gas introduction paths 14 is disclosed. The gas rotary joint 20 is composed of a stationary ring unit 22 on the gas introduction side and a rotating ring unit 21 on the gas discharge side as shown in FIG. 7, and a large number of gas discharge holes 15 are formed as shown in FIG. The gas introduction path 14 provided communicates with a gas supply path 23 provided in the rotary ring unit 21, and the rotation opening 23a of the sliding contact surface 21a in the gas supply path 23 is as shown in FIG. In the sliding contact surface 22a of the fixing ring unit 22, the gas distribution passage 24 is configured to face the portion where the substantially C-shaped fixing opening 24a is provided and the portion where the fixing opening unit 24 is not provided. .

  Then, in the case of corresponding to the non-contact area of the can roll where the film is not wound around the outer surface of the can roll, the rotation opening 23a of the sliding contact surface 21a is fixed to the fixed opening 24a of the gas distribution path 24 as shown in FIG. The gas supply path 23 and the gas distribution path 24 are separated from each other so that the gas from the outside of the vacuum chamber 51 is not supplied to the gas supply path 23 so that the film is wound. No gas is released from the gas discharge holes 15 on the outer peripheral surface of the can roll that is not allowed. On the other hand, when it corresponds to the contact area of the can roll where the film is wound around the outer surface of the can roll, the rotation opening 23a of the sliding contact surface 21a is provided with the fixed opening 24a of the gas distribution path 24 as shown in FIG. The gas supply path 23 and the gas distribution path 24 are connected to each other, and the gas is discharged from the gas discharge holes 15 on the outer surface of the can roll to the gap portion between the outer surface of the can roll and the film. Gas is introduced.

  By the way, compared with the conventional can roll structure described in patent document 6 etc., the can roll of patent document 7 has the above-mentioned outstanding advantages, On the other hand, the can roll of patent document 7 is As shown in FIG. 6, a mechanism for cooling the can roll 56 is required. In the cooling method using water cooling, the refrigerant circulation section 11 in which a coolant such as cooling water circulates inside the gas release mechanism on the gas release can roll surface side is provided. It comes to form.

  The can roll cooled by the refrigerant (cooling water) has a complicated structure as shown in FIG. 6 because the refrigerant (cooling water) needs to be circulated inside the can roll. ) Resulting in an increase in rotational resistance of the can roll. Furthermore, since it is necessary to use a gun drill when providing a plurality of the gas introduction passages 14 in the thick part of the can roll 56, there is a problem that enormous labor and cost are required.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 PCT WO 2005/001157 A2 U.S. Pat. No. 3,414,048 PCT WO 02/070778 A1 JP 2012-132018 A

“Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data”, 2000 Society of Vacuum Coaters, 43rdAnnual Technical Conference Proceeding, Denver, April 15-20, 2000, p.335 “Improvement of Web Condition by the Deposition Drum Design”, 2000 Society of Vacuum Coaters, 50th Annual Technical Conference Proceeding (2007), p.749

  The present invention has been made paying attention to such problems, and the object of the present invention is to have a simplified structure, a gas release mechanism with a high cooling effect, and a film on which a film cannot be wound. An object of the present invention is to provide a can roll capable of suppressing gas leakage from the outer peripheral surface of the roll, and to provide a long substrate processing apparatus and a long substrate processing method using the can roll with a gas release mechanism.

  Therefore, as a result of intensive research conducted by the inventor in order to solve the above problems, the cooling panel or the cooling coil and the gas release preventing member are replaced inside the can roll instead of the conventional structure in which the cooling water circulation path is provided inside the can roll. Provided is a structure that cools the gas supplied to the inside of the can roll by the cooling panel or the cooling coil and the main body of the can roll and suppresses gas leakage from the outer surface of the can roll where the film is not wound by the gas release preventing member. I came to find that this could be solved.

That is, the first invention according to the present invention is:
In a can roll that cools a long substrate that is transported by roll-to-roll in a vacuum chamber around an outer peripheral surface,
A cylindrical non-rotating shaft;
A cylindrical portion provided with a plurality of gas discharge holes on the outer peripheral surface, and a pair of circular side portions closed at the open end of the cylindrical portion and provided with an opening at the center, and the non-rotating shaft A can roll body fitted into the opening of the circular side part and each circular side part rotatably mounted on the non-rotating shaft;
The inside of the cylindrical portion located in the contact area of the outer peripheral surface of the cylindrical portion starting from the carry-in portion into which the long substrate is carried into the outer peripheral surface of the cylindrical portion of the can roll main body and starting from the carry-out portion from which the long substrate is carried out A cooling panel or a cooling coil which is disposed in the vicinity of the peripheral surface and to which refrigerant is supplied from a refrigerator outside the vacuum chamber via a pipe provided in the cylinder of the non-rotating shaft;
A gas introduction pipe that is provided in the cylinder of the non-rotating shaft and discharges gas supplied from the outside of the vacuum chamber to the inner space of the cylindrical portion;
Arranged to contact the inner peripheral surface of the cylindrical portion located in the non-contact region of the outer peripheral surface of the cylindrical portion starting from the carry-out portion where the long substrate is carried out and starting from the carry-in portion where the long substrate is carried in And a gas discharge preventing member for closing the gas discharge hole of the cylindrical portion from the inside of the cylindrical portion,
Comprising driving means for rotationally driving the can roll body;
The cylindrical portion of the can roll body and the gas in the cylindrical portion are cooled by a cooling panel or a cooling coil.

Further, the second invention according to the present invention is:
A vacuum chamber, a transport mechanism that transports a long substrate by roll-to-roll in the vacuum chamber, a can roll that winds and cools the long substrate around the outer peripheral surface, and a long substrate wound around the outer peripheral surface of the can roll In a long substrate processing apparatus provided with a processing means for performing a surface treatment on which a thermal load is applied,
The can roll is configured by the can roll according to the first invention,
A third aspect of the invention relates to
A long substrate conveyed by roll-to-roll in a vacuum chamber is wound around the outer peripheral surface of the can roll, and a plurality of gas discharge holes provided in the outer peripheral surface of the can roll are interposed between the outer peripheral surface and the long substrate. In a long substrate processing method for performing a surface treatment that applies a thermal load to a long substrate while introducing a cooling gas,
The can roll includes a cylindrical non-rotating shaft, a cylindrical portion provided with a plurality of gas discharge holes on the outer peripheral surface, and a pair of circular shapes with the open end side of the cylindrical portion closed and an opening provided in the central portion. A can roll body having a side portion and the non-rotating shaft is fitted into the opening of each circular side portion, and each circular side portion is rotatably mounted on the non-rotating shaft; and a cylindrical portion outer peripheral surface of the can roll body Arranged in the vicinity of the inner peripheral surface of the cylindrical portion located in the contact area of the outer peripheral surface of the cylindrical portion starting from the carry-in portion where the long substrate is carried in and starting from the carry-out portion where the long substrate is carried out, and A cooling panel or cooling coil to which refrigerant is supplied from a refrigerator outside the vacuum chamber via a pipe provided in the cylinder of the rotary shaft, and provided from the outside of the vacuum chamber provided in the cylinder of the non-rotating shaft. Release gas into the space inside the cylinder On the inner peripheral surface of the cylindrical portion located in the non-contact region of the outer peripheral surface of the cylindrical portion starting from the unloading portion from which the long substrate is unloaded and starting from the unloading portion from which the long substrate is unloaded. A gas discharge preventing member disposed so as to abut and closing the gas discharge hole of the cylindrical portion from the inside of the cylindrical portion; and a driving means for rotationally driving the can roll body,
The cylindrical portion of the can roll main body and the gas in the cylindrical portion are subjected to a surface treatment that applies a thermal load to the long substrate wound around the outer surface of the can roll while being cooled by the cooling panel or the cooling coil. It is.

The can roll according to the present invention is
A cylindrical non-rotating shaft, a cylindrical portion provided with a plurality of gas discharge holes on the outer peripheral surface, and a pair of circular side portions closed at the open end of the cylindrical portion and provided with an opening at the central portion A can roll body in which the non-rotating shaft is inserted into the opening of each circular side portion and each circular side portion is rotatably mounted on the non-rotating shaft, and a long substrate is carried into the outer peripheral surface of the cylindrical portion of the can roll body. Is located in the vicinity of the inner peripheral surface of the cylindrical portion located in the contact area of the outer peripheral surface of the cylindrical portion with the carry-in portion as a starting point and the unloading portion from which the long substrate is unloaded as an end point, and in the cylinder of the non-rotating shaft A cooling panel or a cooling coil to which a refrigerant is supplied from a refrigerator outside the vacuum chamber via a pipe provided in the cylinder, and a gas provided in the cylinder of the non-rotating shaft and supplied from the outside of the vacuum chamber to the cylindrical portion. Gas introduction pipe that discharges to the inner space and long base Is disposed so as to contact the inner peripheral surface of the cylindrical portion located in the non-contact region of the outer peripheral surface of the cylindrical portion starting from the unloading portion from which the long substrate is loaded and ending at the loading portion from which the long substrate is loaded. Compared to the conventional can roll, which is composed of a gas discharge prevention member that closes the gas discharge hole of the cylindrical portion from the inside of the cylindrical portion and a driving means that rotationally drives the can roll main body, and has a cooling water circulation path or the like inside the can roll. Since the structure is simplified, it can be easily manufactured at low cost, and the gas discharge hole of the cylindrical portion of the can roll body is closed by the gas discharge prevention member, so that the long substrate is wound. There is an effect of suppressing gas leakage from the outer peripheral surface of the non-can roll.

  Further, by applying the can roll according to the present invention, there is an effect that it is possible to provide a long substrate processing apparatus or the like that is unlikely to cause wrinkles or scratches on a long substrate such as a long heat resistant resin film at a low cost.

Explanatory drawing which shows schematic structure of the can roll concerning this invention. The schematic sectional drawing of the can roll concerning this invention. The schematic sectional drawing of the can roll which concerns on the modification of this invention. Explanatory drawing which shows schematic structure of the elongate substrate processing apparatus (sputtering web coater) in which the can roll was integrated. The schematic perspective view which shows the conventional can roll in which the cooling water circulation path etc. were provided in the can roll inside. Explanatory drawing which shows schematic structure of the conventional can roll. The schematic exploded perspective view of the rotary joint which the conventional can roll comprises. The schematic perspective view of the gas introduction path provided in the thick part in the conventional can roll.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

(1) Long substrate processing equipment (sputtering web coater)
First, a long substrate vacuum film forming apparatus which is an example of a long substrate processing apparatus will be described.

  In addition, the case where a long heat resistant resin film is used for a long board | substrate as an example is demonstrated.

  In addition, a sputtering process will be described as an example of a surface treatment that is applied to a long substrate and is subjected to a thermal load.

  The film forming apparatus for a long heat resistant resin film shown in FIG. 4 is an apparatus called a sputtering web coater, which continuously and efficiently forms a film on the surface of a long heat resistant resin film conveyed by roll-to-roll. Used when applying.

  More specifically, a film forming apparatus (sputtering web coater) 50 for a long heat resistant resin film conveyed by roll-to-roll is provided in a vacuum chamber 51 as shown in FIG. A predetermined film forming process is performed on the long heat-resistant resin film F unwound from 52, and then wound up by a winding roll 64. A can roll 56 that is rotationally driven by a motor is disposed in the middle of the conveyance path from the unwind roll 52 to the take-up roll 64.

In the vacuum chamber 51, a pressure reduction of about 0.1 to 10 Pa is performed by reducing the pressure to an ultimate pressure of about 10 ⁻⁴ Pa and then introducing a sputtering gas for sputtering film formation. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand such a reduced pressure state, and various types can be used. As described above, in order to maintain the state by reducing the pressure in the vacuum chamber 51, the vacuum chamber 51 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  In the conveyance path from the unwinding roll 52 to the can roll 56, there are a free roll 53 for guiding the long heat resistant resin film F and a tension sensor roll 54 for measuring the tension of the long heat resistant resin film F. Arranged in order. The long heat-resistant resin film F fed from the tension sensor roll 54 toward the can roll 56 is adjusted with respect to the peripheral speed of the can roll 56 by a motor-driven feed roll 55 provided in the vicinity of the can roll 56. As a result, the long heat-resistant resin film F can be brought into close contact with the outer peripheral surface of the can roll 56.

  Similarly to the above, the transport path from the can roll 56 to the take-up roll 64 is a motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56, and a tension sensor that measures the tension of the long heat-resistant resin film F. A roll 62 and a free roll 63 for guiding the long heat-resistant resin film F are arranged in this order.

  In the unwinding roll 52 and the winding roll 64, the tension balance of the long heat-resistant resin film F is maintained by torque control using a powder clutch or the like. Further, the long heat resistant resin film F is unwound from the unwinding roll 52 by the rotation of the can roll 56 and the motor-driven feed rolls 55 and 61 that rotate in conjunction with the rotation of the can roll 56, and is wound around the winding roll 64. It is like that.

  In the vicinity of the can roll 56, a conveyance path defined by the outer peripheral surface of the can roll 56 (that is, as shown in FIG. 4, a carry-in portion in which a long heat-resistant resin film F is carried into the outer peripheral surface of the can roll 56. The length of the outer peripheral surface of the can roll 56 corresponding to the range of the angle A starting from a and starting from the outer peripheral surface of the can roll 56 with the carry-out portion b where the long heat-resistant resin film F is carried out being clockwise. Magnetron sputtering cathodes 57, 58, 59 and 60 as film forming means are provided at positions facing the contact region where the heat-resistant resin film F is wound around the can roll 56. Note that the angle A shown in FIG. 4 may be referred to as the “holding angle” of the long heat-resistant resin film F.

  In the case of sputtering a metal film, a plate-like target can be used as shown in FIG. 4, but when a plate-like target is used, nodules (growth of foreign matter) may occur on the target. is there. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency.

  In addition, since the film forming apparatus 50 for the long heat-resistant resin film F shown in FIG. 4 assumes a sputtering process as a surface process to which a thermal load is applied, a magnetron sputtering cathode is illustrated, but a thermal load is applied. If the surface treatment is other such as CVD (chemical vapor deposition), vapor deposition treatment, plasma treatment, ion beam treatment, etc., other vacuum film forming means is provided instead of the plate-like target.

  By the way, in the conventional method in which the long heat resistant resin film F is cooled by introducing gas from the gas discharge holes on the can roll 56 side into the gap between the outer peripheral surface of the can roll 56 and the long heat resistant resin film F, A region in which the long heat resistant resin film F is not wound around the outer peripheral surface of the roll 56 (that is, a range of an angle B having a carry-out portion b shown in FIG. 4 as a start point and a carry-in portion a as an end point in a clockwise direction, The non-contact area where the long heat resistant resin film F is not wound around the can roll 56 in the outer peripheral surface of the can roll 56 is a contact area where the long heat resistant resin film F is wound around the can roll 56 (shown in FIG. 4). Most of the gas from the non-contact area of the can roll 56 to the vacuum chamber space is lower than that in the area corresponding to the angle A). It would be released. For this reason, there arises a problem that the cooling gas is not introduced into the gap portion between the outer peripheral surface of the can roll 56 and the long heat-resistant resin film F.

(2) Conventional structure of can roll with gas release mechanism according to Patent Document 7 (2-1) Conventional structure of can roll with gas discharge mechanism Next, FIG. 5 to 7 will be described. A can roll 56 having a conventional structure shown in FIGS. 5 to 7 includes a cylindrical member 10 that is driven to rotate about a rotation center axis by a driving device (not shown). A conveyance path for conveying the long heat resistant resin film F around the outer surface of the cylindrical member 10 is defined. On the inner surface side of the cylindrical member 10, a coolant circulation portion 11 through which a coolant such as cooling water flows is formed in a jacket structure.

  Further, as shown in FIG. 6, the rotating shaft 12 positioned at the rotation center shaft portion of the cylindrical member 10 has a double piping structure, and is not shown provided outside the vacuum chamber 51 via the rotating shaft 12. The refrigerant circulates between the refrigerant cooling device and the refrigerant circulation unit 11, thereby enabling temperature adjustment of the outer surface of the can roll.

  That is, the refrigerant cooled by the refrigerant cooling device is sent to the refrigerant circulation portion 11 through the inner side of the inner pipe 12a, where the heat of the long heat-resistant resin film F is received and heated, and then the inner pipe 12a and It returns to the refrigerant cooling device again through the space between the outer pipe 12b. A bearing 13 that supports the rotating can roll 56 is provided outside the outer pipe 12b.

  The cylindrical member 10 of the can roll 56 is provided with a plurality of gas introduction paths 14 over the entire circumference at substantially equal intervals in the circumferential direction. Each of the plurality of gas introduction paths 14 is formed in the thick portion of the cylindrical member 10 so as to extend along the direction of the rotation center line 56 a of the can roll 56. FIG. 5 shows an example in which twelve gas introduction paths 14 are arranged over the entire circumference at equal intervals.

  Each gas introduction path 14 has a plurality of gas discharge holes 15 that open to the outer surface side of the cylindrical member 10 (that is, the outer peripheral surface side of the can roll 56). The plurality of gas discharge holes 15 are formed at substantially equal intervals along the direction of the rotation center line 56 a of the can roll 56. As shown in FIGS. 5 to 7, the gas is supplied from the outside of the vacuum chamber 51 to each gas introduction path 14 through the gas rotary joint 20 including the rotating ring unit 21 and the fixed ring unit 22. Thus, gas can be introduced into a gap portion (gap) formed between the outer peripheral surface of the can roll 56 and the long heat-resistant resin film F wound around the can roll 56.

Since the surface of the long heat-resistant resin film F and the can roll 56 is not a perfect plane as described above, the gap portion (gap) is insulated by vacuum to reduce the heat conduction efficiency, and the sputtering film formation is performed. This is a cause of wrinkling of the heat-resistant resin film F due to heat at the time. According to Non-Patent Document 2, when the introduced gas is argon gas, when the introduced gas pressure is 500 Pa and the gap distance is about 40 μm or less, the thermal conductivity between the gaps is 250 (W / m ² · K). . When the distance between the surface of the can roll 56 and the long heat resistant resin film F is about 40 μm, the amount of gas leaking from the gap can be exhausted by a vacuum pump provided in the long substrate vacuum film forming apparatus. If the gas introduced into the gap is a gas in the sputtering atmosphere, the sputtering atmosphere is not contaminated.

(2-2) Gas rotary joint The gas rotary joint 20 has a mechanism for distributing gas to a rotating object.

  As shown in FIG. 7, the gas rotary joint 20 is composed of a stationary ring unit 22 on the gas introduction side and a rotary ring unit 21 on the gas discharge side, and a number of gas discharge holes 15 are provided as shown in FIG. The gas introduction path 14 communicated with a gas supply path 23 provided in the rotary ring unit 21, and the rotation opening 23a of the sliding contact surface 21a in the gas supply path 23 is as shown in FIG. Of the slidable contact surface 22a of the fixed ring unit 22, a portion of the gas distribution path 24 where the substantially C-shaped fixed opening 24a is provided and a portion where the fixed opening 24a is not provided are opposed to each other. It is configured.

(2-2-1) Region Corresponding to Range of Angle A shown in FIG. 4 When corresponding to the contact region of the can roll where the film is wound around the outer peripheral surface of the can roll, the rotational opening 23a of the sliding contact surface 21a is The gas supply path 23 and the gas distribution path 24 are connected to face the portion where the fixed opening 24a of the gas distribution path 24 shown in FIG. 7 is provided, and from the gas discharge hole 15 on the outer surface of the can roll Gas is released and gas is introduced into the gap between the outer peripheral surface of the can roll and the film.

(2-2-2) Region Corresponding to Range of Angle B shown in FIG. 4 On the other hand, when it corresponds to a non-contact region of the can roll where the film is not wound around the outer peripheral surface of the can roll, rotation of the sliding contact surface 21a The opening 23a faces the portion of the gas distribution path 24 shown in FIG. 7 where the fixed opening 24a is not provided, and the gas supply path 23 and the gas distribution path 24 are separated from each other. Therefore, the gas is not released from the gas discharge holes 15 on the outer peripheral surface of the can roll where the film is not wound.

  In addition, the gas rotary joint 20 can be provided with a known gas sealing means to prevent gas leakage from the gas rotary joint 20.

(2-3) Problems of the conventional structure of the can roll with the gas release mechanism according to Patent Document 7 In the conventional structure of the can roll with the gas release mechanism, as described above, on the inner side of the gas release mechanism on the surface side of the can roll 56 Since it is necessary to form the refrigerant circulation part 11 through which a refrigerant such as cooling water circulates, there is a disadvantage that the structure of the roll body is complicated as shown in FIGS. 5 to 7 and the refrigerant to be circulated (cooling water) In addition to the disadvantage that the rotational resistance of the can roll 56 is increased, the gas rotary joint 20 for supplying gas from the outside of the vacuum chamber 51 is necessary.

  Further, as shown in FIG. 5, a plurality of gas introduction paths 14 are drilled using a gun drill in the thick portion 100 of the cylindrical member 10 so as to extend along the direction of the rotation center line 56 a of the can roll 56. (Refer to FIG. 8) Since it is necessary, it has a problem of enormous labor and cost.

(3) Can roll with gas release mechanism according to the present invention The can roll with gas discharge mechanism according to the present invention is replaced with a cooling panel or cooling coil and gas discharge instead of the conventional structure in which a cooling water circulation path is provided inside the can roll. Leakage from the outer peripheral surface of the can roll where a prevention member is provided inside the can roll, the gas supplied to the inside of the can roll by the cooling panel or cooling coil and the can roll main body are cooled, and the film is not wound by the gas release prevention member The structure which suppresses is employ | adopted.

  Hereinafter, a can roll with a gas release mechanism to which a cooling panel (cryo cooling panel) is applied will be described.

(3-1) Configuration of Can Roll with Gas Release Mechanism According to the Present Invention
As shown in FIG. 1, a cylindrical non-rotating shaft 76 that is attached by fitting both ends into the mounting opening of the vacuum chamber wall 70,
The non-rotating shaft 76 has a cylindrical portion provided with a plurality of gas discharge holes 73 on the outer peripheral surface, a pair of circular side portions closed at the open end side of the cylindrical portion and provided with an opening at the center portion. Is inserted into the opening of each circular side, and each circular side is rotatably mounted on the non-rotating shaft 76, a can roll body 71,
The carry-in portion where the long substrate (long heat-resistant resin film) is carried into the outer peripheral surface of the cylindrical portion of the can roll main body 71 is the starting point, and the carry-out portion where the long substrate (long heat-resistant resin film) is carried out is the end point. From a refrigerator outside the vacuum chamber via a pipe 80 disposed in the vicinity of the inner peripheral surface of the cylindrical portion located in the contact region of the outer peripheral surface of the cylindrical portion and provided in the cylinder of the non-rotating shaft 76 A cooling panel 84 to which a refrigerant is supplied;
A gas introduction pipe 81 that is provided in the cylinder of the non-rotating shaft 76 and that discharges the gas supplied from the outside of the vacuum chamber to the inner space of the cylindrical portion;
Non-contact of the outer peripheral surface of the cylindrical portion starting from the carry-out portion where the long substrate (long heat-resistant resin film) is carried out and starting from the carry-in portion where the long substrate (long heat-resistant resin film) is carried A gas discharge preventing member 72 disposed so as to contact the inner peripheral surface of the cylindrical portion located in the region and closing the gas discharge hole 73 of the cylindrical portion from the inside of the cylindrical portion;
Drive means for rotating the can roll main body 71 (comprising a gear 77 attached to one circular side of the can roll main body 71, a motor 79, and a gear 78 attached to the rotation shaft of the motor 79). It is characterized by this.

  In order to increase the cooling efficiency, as shown in FIG. 1, a pipe 85 is connected from a refrigerator outside the vacuum chamber to the outside of the cylindrical portion of the can roll body 71 and inside the vacuum chamber in a region facing the cooling panel 84. You may attach the 2nd cooling panel 86 to which a refrigerant | coolant is supplied through.

(3-2) Can roll cooling panel with gas release mechanism according to the present invention (cryo cooling panel)
A refrigerant having a temperature of −100 ° C. or lower flows inside the cooling panel 84 of the can roll with a gas release mechanism according to the present invention. The cooling panel 84 has a can roll 56 and a long heat-resistant resin film (long) due to the following two effects. Cooling the substrate).

  (A) Radiation cooling by the temperature difference of the cooling panel 84, the can roll 56, and the long heat resistant resin film (long substrate).

  (B) Gas cooling by spraying the gas cooled by the cooling panel 84 on the can roll 56 and the long heat-resistant resin film (long substrate).

  And in order to perform the said radiation cooling, it is so efficient that the temperature difference of the cooling panel 84, the can roll 56, and a long heat resistant resin film (long board | substrate) is high. Since the temperature of the can roll 56 at the time of sputtering film formation is preferably about 263K (−10 ° C.), a temperature difference between the cooling panel 84, the can roll 56 and the long heat-resistant resin film (long substrate) is obtained at least 200K. For this purpose, the cooling panel 84 may be 63K (−210 ° C.) or less.

  However, if the cooling panel 84 is extremely cooled, the gas introduced between the cooling panel 84, the can roll 56, and the long heat-resistant resin film (long substrate) may be condensed in the cooling panel 84. . The pressure of the cooling gas introduced between the cooling panel 84, the can roll 56, and the long heat-resistant resin film (long substrate) must be lower than the equilibrium vapor pressure at the cooling panel 84 temperature according to the equilibrium vapor pressure curve. In other words, the temperature of the cooling panel 84 must be higher than the temperature at which the gas condenses according to the gas's equilibrium vapor pressure curve under the pressure conditions of the introduced gas. That is, the temperature of the cooling panel 84 is determined by the pressure of the gas introduced between the cooling panel 84, the can roll 56, and the long heat-resistant resin film (long substrate). For example, if the argon gas pressure is 100 Pa, 55K ( −218 ° C.) or higher.

  Further, the gas introduced through the gas introduction pipe 81 includes hydrogen, helium, argon, oxygen, etc., which have good thermal conductivity, and affects the film formation when the gas diffuses from the gas discharge hole 73 into the vacuum chamber. The gas which does not give is good, and helium and argon are preferable.

  The can roll 56 is structured such that the entire can roll 56 is cooled by radiation cooling. Since the gas is introduced into the gas discharge hole 73 by the gas introduction pipe 81 provided in the cylinder of the non-rotating shaft 76, the can roll with the gas discharge mechanism of the conventional structure is drilled in the thick part 100 of the cylindrical member 10. There is no need to provide the provided gas introduction path 14 (see FIG. 8). Since the gas introduction path 14 is drilled using a gun drill, a great amount of labor and time have been spent.

  Further, the circular side portion of the can roll body 71 is supported by a bearing 74 as shown in FIG. 1 and is sealed by an O-ring 75, so that the driving force of the motor 79 is externally applied to the gear 78, the gear. 77, the can roll 56 is rotated.

  The number of the gas discharge holes 73 is appropriately determined according to the area of the area around which the long heat resistant resin film (long substrate) is wound on the outer peripheral surface of the can roll 56 and the amount of gas discharge. The diameter of each gas discharge hole 73 allows gas to be satisfactorily introduced into a gap portion (gap) formed between the outer peripheral surface of the can roll 56 and a long heat-resistant resin film (long substrate) wound around the can roll 56. Although it will not specifically limit if it is a magnitude | size, Generally 30 micrometers-about 1000 micrometers in diameter are preferable. In addition, it is preferable to provide a large number of gas discharge holes 73 having an extremely small inner diameter with a narrow pitch on the outer peripheral surface of the can roll 56 in that heat conductivity can be made uniform over the entire outer surface of the can roll. However, since a processing technique for providing a large number of holes having a very small inner diameter at a narrow pitch is difficult, it is practically preferable to provide small holes with an inner diameter of about 150 to 500 μm on the outer surface of the can roll at a pitch of 5 to 10 mm. .

(3-3) Gas Release Prevention Member of Can Roll with Gas Release Mechanism According to the Present Invention The gas release prevention member 72 of the can roll with gas release mechanism according to the present invention is a long heat-resistant resin film as shown in FIG. Starting from the unloading section (see symbol b in FIG. 4) from which the (long substrate) is unloaded, the loading portion (see symbol a in FIG. 4) into which the long heat-resistant resin film (long substrate) is loaded is clockwise. Is arranged so as to contact the inner peripheral surface of the cylindrical portion of the can roll body 71 located in the non-contact region (region corresponding to the range of angle B shown in FIG. 4) of the outer peripheral surface of the cylindrical portion of the can roll main body 71 as the end point. The gas discharge hole 73 of the cylindrical portion of the can roll main body 71 is closed from the inside of the cylindrical portion and has a function of preventing gas leakage from the outer peripheral surface of the can roll where the long heat resistant resin film (long substrate) is not wound. Things The

  As a specific example of the gas release preventing member 72, as shown in FIG. 2, a preventing member main body 91 having a substantially sectoral cross section in which a base end side is fixed to a cylindrical non-rotating shaft 90, and the preventing member main body 91 A seal member 92 which is provided on the distal end side of the can roll body and abuts against the inner peripheral surface of the cylindrical portion 94 of the can roll main body and has wear resistance, and is embedded in the distal end side of the prevention member main body 91 and which seals the seal member 92. What comprises the principal part with the elastic member (spring) 93 pressed toward the internal peripheral surface of the roll main body cylindrical part 94 is mentioned.

  Examples of the seal member 92 include graphite-containing polytetrafluoroethylene [Teflon (registered trademark)] having high wear resistance. Further, in order to prevent the seal member 92 from being worn, a portion of the inner surface of the cylindrical portion 94 in the can roll body that comes into contact with the seal member 92 is subjected to a mirror polishing process and a coating process [for example, DLC, It is desirable to apply Teflon (registered trademark).

  In addition, the structure shown in FIG. 2 is used in which the seal member 92 is in contact with the inner peripheral surface of the can roll main body cylindrical portion 94 in the non-contact region (region corresponding to the range of the angle B shown in FIG. 4). The structure shown in FIG. 3 in which the two seal members 98 and 99 abut on both end sides of the non-contact region may be employed. The structure shown in FIG. 3 in which the two sealing members 98 and 99 abut each other has an advantage that the rotational resistance can be reduced as compared with the structure shown in FIG. 2 because the contact area with the inner peripheral surface of the cylindrical portion 94 is reduced.

  2 and 3, reference numeral 95 denotes a gas introduction pipe, reference numeral 96 denotes a cooling panel, and reference numeral 97 denotes a second cooling panel.

(3-4) Advantages of the can roll with a gas release mechanism according to the present invention The can roll with a gas discharge mechanism according to the present invention is replaced with a cooling panel or a conventional structure in which a cooling water circulation path is provided inside the can roll. The outer periphery of the can roll in which the cooling coil and the gas release preventing member are provided inside the can roll, the gas supplied to the inside of the can roll by the cooling panel or the cooling coil and the can roll main body are cooled, and the film is not wound by the gas release preventing member. Since a structure that suppresses gas leakage from the surface is employed, the roll structure can be simplified (see FIGS. 1 and 6) compared to the conventional can roll with a gas release mechanism, and the cooling water circulation path In place of the structure in which the refrigerant circulation portion is provided, a cooling panel 96 is provided in the vicinity of the inner peripheral surface of the can roll main body cylindrical portion 94 as shown in FIG. Since the structure is arranged, the rotational resistance of the can roll can be reduced and the gas rotary joint is unnecessary.

  Further, unlike a conventional can roll with a gas release mechanism in which a gas introduction path is formed using a gun drill in a thick part of a cylindrical member, a can roll with a gas release mechanism according to the present invention is shown in FIG. Thus, since it has a simple structure in which the gas discharge hole 73 is provided on the outer peripheral surface of the cylindrical portion of the can roll main body 71, there is an advantage that the labor and cost required for manufacturing can be reduced.

(4) Long substrate As the long substrate, a resin film or the like can be used as well as a metal foil and a metal strip.

  Examples of the resin film include a resin film such as a polyethylene terephthalate (PET) film and a heat resistant resin film such as a polyimide film.

  If a heat resistant resin film is used for a long substrate and a metal film is formed by sputtering using a long substrate vacuum film forming apparatus (long substrate processing apparatus) according to the present invention, a heat resistant resin film with a metal film is produced. be able to. Specifically, by using the above-described long substrate processing apparatus (sputtering web coater), a long heat-resistant resin film with a metal film free from defects of film defects can be obtained by a metalizing method.

  Examples of the long heat-resistant resin film with a metal film include a structure in which a film made of a Ni-based alloy and a Cu film are laminated on the surface of the heat-resistant resin film. The heat-resistant resin film with a metal film having such a structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching. The film made of the Ni alloy or the like is called a seed layer, and its composition is selected according to desired characteristics such as electrical insulation and migration resistance of the heat-resistant resin film with a metal film. For the seed layer, various known alloys such as Ni—Cr alloy, Inconel, Cond Tantan, and Monel can be used.

  Moreover, when it is desired to further increase the thickness of the metal film (Cu film) of the long heat-resistant resin film with a metal film, the metal film may be formed using a wet plating method. In some cases, a metal film is formed only by electroplating, and in some cases electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. The wet plating process may employ various conditions of a conventional wet plating method.

  Examples of the heat-resistant resin film used for the heat-resistant resin film with a metal film include, for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, and a polyethylene naphthalate film. Or the resin film chosen from a liquid crystal polymer film is mentioned, and it is preferable from the point which has the soft insulation as a flexible substrate with a metal film, the intensity | strength required practically, and the electrical insulation suitable as a wiring material.

  In addition, as the heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. The film forming method of the present invention can be used for forming a material film, a nitride film, a carbide film, or the like.

(5) Long substrate processing apparatus Up to now, the long substrate processing apparatus has been mainly described as a long substrate processing apparatus. However, in the case of a long substrate processing apparatus, in a vacuum chamber under a reduced pressure atmosphere. In some cases, a long substrate is subjected to a surface treatment that is subjected to a thermal load such as plasma treatment or ion beam treatment instead of vacuum film formation such as sputtering. Although the surface of a long substrate can be modified by plasma treatment or ion beam treatment, a thermal load is applied to the long substrate. It is effective to use the can roll according to the present invention in order to suppress the generation of wrinkles on the long substrate due to thermal load, and it is also possible to prevent a large amount of introduced gas from leaking into the processing atmosphere.

  The plasma treatment is a known plasma treatment method, for example, by performing discharge in a reduced pressure atmosphere using a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen to generate oxygen plasma or nitrogen plasma to process a long substrate. be able to.

  For the ion beam treatment, a known ion beam source can be used. The ion beam treatment is a treatment in which a plasma discharge is generated in a magnetic field gap to which a strong magnetic field is applied, and a target (long substrate) is irradiated as an ion beam with positive ions in the plasma by electrolysis with an anode.

  Note that both plasma treatment and ion beam treatment are performed in a reduced pressure atmosphere.

  Examples of the present invention will be specifically described below with reference to comparative examples.

  Except for the difference in the structure of the built-in can roll with a gas release mechanism, Example 1 and Comparative Example 1 are film forming apparatuses for a long heat resistant resin film with a metal film shown in FIG. A long heat-resistant resin film F made of a heat-resistant polyimide film [Ube Industries, Ltd. Upilex (registered trademark)] having a width of 500 mm, a length of 800 m, and a thickness of 25 μm is used. ing.

[Example 1]
The can roll body 71 of the can roll 56 with a gas release mechanism shown in FIG. 1 incorporated in the film forming apparatus (sputtering web coater) 50 is made of aluminum having a diameter of 900 mm and a width of 750 mm, and has a hard surface on the surface of the roll body. Chrome plating is given.

  Further, the cooling panel 84 and the second cooling panel 86 shown in FIG. 1 use a refrigeration capacity of 100 to 200 W (77 K) class, and are respectively installed inside and outside the cylindrical portion of the can roll main body 71, and the can roll main body The distance between the 71 cylindrical portion and the cooling panel 84 and the second cooling panel 86 was 10 mm.

  Further, on the outer peripheral surface of the cylindrical portion of the can roll body 71, gas discharge holes having a diameter of 0.2 mm at intervals of 10 mm and 360 rows at an angle of 1 ° with a cylindrical non-rotating shaft (fixed shaft) 76 as the center. 47 are provided [the total number of gas discharge holes 73: (47 pieces / row) × 360 rows = 16920 pieces], and the above is formed on the outer peripheral surface of the cylindrical portion corresponding to the vicinity of both ends 20 mm of the long heat-resistant resin film F. The gas discharge hole 73 does not exist. Further, the can roll 56 was driven not via the gears (gears) 77 and 78 but via a timing belt (not shown).

  A region where the long heat resistant resin film F is not wound around the outer peripheral surface of the can roll 56 (the unloading portion b of the long heat resistant resin film F shown in FIG. 4 is the starting point, and the loading portion a is the clockwise end point. Since the angle B in the non-contact region of the long heat resistant resin film F corresponding to the range of the angle B is about 30 °, the central angle of the prevention member main body 91 shown in FIG. In addition, for the seal member 92 shown in FIG. 2, polytetrafluoroethylene [Teflon (registered trademark)] blended with graphite having high wear resistance was adopted.

  Further, as a metal film to be formed, a Cu film is formed on a Ni—Cr film as a seed layer, and a Ni—Cr target is used for the magnetron sputter target 57 shown in FIG. For 58, 59 and 60, a Cu target was used, and 300 sccm of argon gas was introduced, and film formation was performed with power control of 10 kW applied to each cathode. In addition, the tension | tensile_strength of the unwinding roll 51 and the winding roll 64 shown in FIG.

  Further, the cooling of the can roll 56 is controlled to −20 ° C. by radiation cooling of the cooling panel 84 and the second cooling panel 86, but the heat conduction efficiency between the long heat resistant resin film F and the can roll 56 is not good. And no cooling effect can be expected.

  Then, the long heat resistant resin film F was set on the unwinding roll 52, and the leading end portion of the long heat resistant resin film F was attached to the winding roll 64 via the can roll 56.

The vacuum chamber 51 was evacuated to 5 Pa with a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  And after setting the conveyance speed of the long heat resistant resin film F to 3 m / min, argon gas was introduce | transduced into each magnetron sputter cathode 57, 58, 59, 60, and electric power was applied, and Ni-Cr film | membrane was used. Formation of the seed layer and Cu film was started.

  Further, in order to keep the gas pressure at 500 Pa in the gap (gap) formed between the long heat-resistant resin film F and the can roll 56, the gas provided in the cylinder of the non-rotating shaft (fixed shaft) 76 100 sccm of argon gas was introduced into the introduction tube 81 using a mass flow controller. The gas introduced into the gap portion (gap) is not limited to argon gas, and the above-described hydrogen, helium, oxygen, nitrogen, neon, or the like can be used as long as sputtering film formation is not affected.

  A long heat resistant resin up to 600 m in which gas is introduced into the can roll from the observation window through which the surface of the long heat resistant resin film (heat resistant polyimide film) F on the can roll 56 can be observed during film formation. When the film (heat-resistant polyimide film) F was observed, the traveling direction of the long heat-resistant resin film (heat-resistant polyimide film) F immediately after film formation after passing through the film formation zones of the magnetron sputtering cathodes 57, 58, 59, 60 The float of the long heat-resistant resin film (heat-resistant polyimide film) F on the can roll 56 that causes wrinkles was not observed in the direction parallel to the surface.

  Then, when the long heat-resistant resin film F having a length of 600 m passed, power to the plasma in each plasma reaction chamber and each magnetron sputter cathode was stopped, and each gas introduction was also stopped.

  Finally, the conveyance of the long heat-resistant resin film F is stopped, and each pump is stopped and vented (released to the atmosphere), and the long heat-resistant resin film (heat-resistant polyimide film) F is fed from the unwinding roll 52. After removing the terminal portion, the entire long heat-resistant resin film (heat-resistant polyimide film) F was taken up on the take-up roll 64 and removed.

  After the film formation was completed, the long heat-resistant resin film (heat-resistant polyimide film) F wound around the take-up roll 64 was developed in the atmosphere and confirmed for wrinkles and scratches. No flaws or scratches were observed between 0 and 600 m when the gas was introduced into the roll 56.

[Comparative Example 1]
The cylindrical member 10 of the can roll 56 with a gas release mechanism shown in FIGS. 5 to 7 incorporated in the film forming apparatus (sputtering web coater) 50 is made of aluminum having a diameter of 900 mm and a width of 750 mm, and the cylindrical member 10. Hard chrome plating is applied to the surface of

  Further, 360 gas introduction passages 14 having a diameter of 4 mm are formed in the thick portion of the cylindrical member 10 having a jacket roll structure, and a gas having a diameter of 0.2 mm is provided for each gas introduction passage 14 at intervals of 10 mm. 47 discharge holes 15 [total of gas discharge holes 15: (47 / row) × 360 rows = 16920] are provided, and in the same manner as in Example 1, both ends of the long heat-resistant resin film F are near 20 mm. There is no gas discharge hole 15 on the outer peripheral surface of the corresponding cylindrical member 10. As shown in FIG. 6, the can roll 56 is a mechanism that rotates as a whole because the can roll 56 and the rotary shaft 12 are integrated.

  A region where the long heat resistant resin film F is not wound around the outer peripheral surface of the can roll 56 (an angle having the carry-out portion b of the long heat-resistant resin film F shown in FIG. 4 as the start point and the carry-in portion a as the end point in the clockwise direction) The angle B of the non-contact region corresponding to the range of B is about 30 °, and there are 30 gas introduction paths 14 in this angle range. For this reason, the angle of the substantially C-shaped fixing opening 24a provided in the fixing ring unit 22 on the gas introduction side in the gas rotary joint 20 shown in FIG. The region where the long heat-resistant resin film F is wound around the outer peripheral surface of the can roll 56 through the rotation opening 23a of the gas discharge side rotation ring unit 21 facing the portion where the portion 24a is provided (the long length shown in FIG. 4) The gap between the outer surface of the can roll and the long heat resistant resin film located in the contact area corresponding to the range of the angle A starting from the carry-in part a of the heat-resistant resin film F and starting from the carry-out part b in the clockwise direction. Gas is introduced into the part. Since it is difficult to directly connect the 360 gas introduction paths 14 of the can roll 56 to the gas rotary joint 20 shown in FIGS. 5 to 7, 10 gas introduction paths 14 are connected to a gas distribution pipe (not shown). ) And then connected to a gas introduction tube (not shown).

  Similarly to Example 1, the metal film to be formed is a Cu film formed on the Ni—Cr film that is the seed layer, and the magnetron sputter target 57 shown in FIG. The magnetron sputtering target 58, 59, 60 was used with a Cu target, and argon gas was introduced at 300 sccm, and the power applied to each cathode was controlled at 10 kW. In addition, the tension | tensile_strength of the unwinding roll 51 and the winding roll 64 shown in FIG.

  In addition, although a cooling medium whose temperature was controlled at −20 ° C. was circulated in the refrigerant circulation portion 11 of the can roll 56, the heat conduction between the long heat resistant resin film (heat resistant polyimide film) F and the can roll 56. If the efficiency is not good, the cooling effect cannot be expected.

  Then, the long heat resistant resin film F was set on the unwinding roll 52, and the leading end portion of the long heat resistant resin film F was attached to the winding roll 64 via the can roll 56.

The vacuum chamber 51 was evacuated to 5 Pa with a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  And after setting the conveyance speed of the long heat resistant resin film F to 3 m / min, argon gas was introduce | transduced into each magnetron sputter cathode 57, 58, 59, 60, and electric power was applied, and Ni-Cr film | membrane was used. Formation of the seed layer and Cu film was started.

  The gas rotary joint 20 attached to the can roll 56 has a mass flow controller in order to keep the gas pressure at 500 Pa in the gap (gap) formed between the long heat resistant resin film F and the can roll 56. Was used to introduce 100 sccm of argon gas. Note that this gas is not limited to argon gas, and oxygen, nitrogen, helium, neon, hydrogen, and the like can be used as long as they do not affect the sputtering film formation.

  Similarly to Example 1, gas is introduced into the can roll 56 through an observation window through which the surface of the long heat resistant resin film (heat resistant polyimide film) F on the can roll 56 can be observed during film formation. The long heat-resistant resin film (heat-resistant polyimide film) F is observed, and the long heat-resistant resin film (heat resistance) immediately after film formation after passing through the film formation zones of the magnetron sputtering cathodes 57, 58, 59, 60 is observed. The float of the long heat-resistant resin film (heat-resistant polyimide film) F on the can roll 56 that causes wrinkles was not observed in a direction parallel to the traveling direction of the polyimide film F).

  Then, when the long heat-resistant resin film F having a length of 600 m passed, power to the plasma in each plasma reaction chamber and each magnetron sputter cathode was stopped, and each gas introduction was also stopped.

  Finally, the conveyance of the long heat-resistant resin film F is stopped, and each pump is stopped and vented (released to the atmosphere), and the long heat-resistant resin film (heat-resistant polyimide film) F is fed from the unwinding roll 52. After removing the terminal portion, the entire long heat-resistant resin film (heat-resistant polyimide film) F was taken up on the take-up roll 64 and removed.

  After the film formation was completed, the long heat-resistant resin film (heat-resistant polyimide film) F wound around the take-up roll 64 was developed in the atmosphere and confirmed for wrinkles and scratches. No flaws or scratches were observed between 0 and 600 m when the gas was introduced into the roll 56.

[Confirmation]
Compared with the can roll with a gas release mechanism according to the first comparative example shown in FIGS. 5 to 7, the can roll with the gas discharge mechanism according to the first embodiment shown in FIG. Despite having a simplified structure that does not have 11, the production performance and cost of the can roll can be greatly reduced, and the can roll body is lightweight and compact. It is confirmed that the motor has an advantage that it can contribute to power saving.

  The can roll with a gas release mechanism according to the present invention can be provided at low cost because it has the same performance despite having a simplified structure as compared with a conventional can roll with a gas release mechanism. In addition, the present invention has industrial applicability applied as a manufacturing apparatus and manufacturing method for a copper-clad laminated resin film (heat-resistant resin film with a metal film) used for flexible wiring boards such as liquid crystal televisions and mobile phones.

DESCRIPTION OF SYMBOLS 10 Cylindrical member 11 Refrigerant circulation part 12 Rotating shaft 12a Inner piping 12b Outer piping 13 Bearing 14 Gas introduction path 15 Gas discharge hole 20 Gas rotary joint 21 Rotating ring unit 21a Sliding surface 22 Fixed ring unit 22a Sliding surface 23 Gas supply path 23a Rotating opening 24 Gas distribution path 24a Fixed opening 25 Connection pipe 26 Supply pipe 50 Film forming apparatus (sputtering web coater)
51 Vacuum Chamber 52 Unwinding Roll 53 Free Roll 54 Tension Sensor Roll 55 Feed Roll 56 Can Roll 56a Rotation Center Line 57 Magnetron Sputtering Cathode 58 Magnetron Sputtering Cathode 59 Magnetron Sputtering Cathode 60 Magnetron Sputtering Cathode 61 Feed Roll 62 Tension Sensor Roll 63 Free Roll 64 Winding roll 70 Vacuum chamber wall 71 Can roll body 72 Gas release prevention member 73 Gas release hole 74 Bearing
75 O-ring 76 Non-rotating shaft (fixed shaft)
77 Gear
78 Gear
79 Motor 80 Piping (refrigerant piping)
81 Gas introduction pipe 82 Seal member 83 Elastic member (spring)
84 Cooling panel (cryo cooling panel)
85 Piping (refrigerant piping)
86 Second cooling panel 90 Non-rotating shaft (fixed shaft)
91 Prevention member body 92 Seal member 93 Elastic member (spring)
94 Cylindrical part 95 Gas introduction pipe 96 Cooling panel 97 Second cooling panel 98 Seal member 99 Seal member 100 Thick part a Carry-in part b Carry-out part F Long heat-resistant resin film (long board)

Claims (11)

In a can roll that cools a long substrate that is transported by roll-to-roll in a vacuum chamber around an outer peripheral surface,
A cylindrical non-rotating shaft;
A cylindrical portion provided with a plurality of gas discharge holes on the outer peripheral surface, and a pair of circular side portions closed at the open end of the cylindrical portion and provided with an opening at the center, and the non-rotating shaft A can roll body fitted into the opening of the circular side part and each circular side part rotatably mounted on the non-rotating shaft;
The inside of the cylindrical portion located in the contact area of the outer peripheral surface of the cylindrical portion starting from the carry-in portion into which the long substrate is carried into the outer peripheral surface of the cylindrical portion of the can roll main body and starting from the carry-out portion from which the long substrate is carried out A cooling panel or a cooling coil which is disposed in the vicinity of the peripheral surface and to which refrigerant is supplied from a refrigerator outside the vacuum chamber via a pipe provided in the cylinder of the non-rotating shaft;
A gas introduction pipe that is provided in the cylinder of the non-rotating shaft and discharges gas supplied from the outside of the vacuum chamber to the inner space of the cylindrical portion;
Arranged to contact the inner peripheral surface of the cylindrical portion located in the non-contact region of the outer peripheral surface of the cylindrical portion starting from the carry-out portion where the long substrate is carried out and starting from the carry-in portion where the long substrate is carried in And a gas discharge preventing member for closing the gas discharge hole of the cylindrical portion from the inside of the cylindrical portion,
Comprising driving means for rotationally driving the can roll body;
A can roll characterized in that a cylindrical portion of the can roll main body and a gas in the cylindrical portion are cooled by a cooling panel or a cooling coil.   A preventive member main body having a substantially fan-shaped cross section whose proximal end is fixed to the non-rotating shaft, and a seal member provided on the front end side of the preventive member main body and in contact with the inner peripheral surface of the cylindrical portion and having wear resistance And the elastic member that is embedded in the distal end side of the main body of the preventive member and presses the seal member toward the inner peripheral surface of the cylindrical portion. Can roll according to.   A second cooling panel or cooling coil to which refrigerant is supplied from a refrigerator outside the vacuum chamber via a pipe is provided outside the cylindrical portion in the vacuum chamber and facing the cooling panel or cooling coil. The can roll according to claim 1 or 2. A vacuum chamber, a transport mechanism that transports a long substrate by roll-to-roll in the vacuum chamber, a can roll that winds and cools the long substrate around the outer peripheral surface, and a long substrate wound around the outer peripheral surface of the can roll In a long substrate processing apparatus provided with a processing means for performing a surface treatment on which a thermal load is applied,
The long substrate processing apparatus, wherein the can roll is configured by the can roll according to claim 1.   The long substrate processing apparatus according to claim 4, wherein the surface treatment to which the thermal load is applied is a vacuum film forming process.   The long substrate processing apparatus according to claim 5, wherein the vacuum film forming process is a sputtering process.   5. The long substrate processing apparatus according to claim 4, wherein the surface treatment to which the thermal load is applied is a plasma treatment or an ion beam treatment. A long substrate conveyed by roll-to-roll in a vacuum chamber is wound around the outer peripheral surface of the can roll, and a plurality of gas discharge holes provided in the outer peripheral surface of the can roll are interposed between the outer peripheral surface and the long substrate. In a long substrate processing method for performing a surface treatment that applies a thermal load to a long substrate while introducing a cooling gas,
The can roll includes a cylindrical non-rotating shaft, a cylindrical portion provided with a plurality of gas discharge holes on the outer peripheral surface, and a pair of circular shapes with the open end side of the cylindrical portion closed and an opening provided in the central portion. A can roll body having a side portion and the non-rotating shaft is fitted into the opening of each circular side portion, and each circular side portion is rotatably mounted on the non-rotating shaft; and a cylindrical portion outer peripheral surface of the can roll body Arranged in the vicinity of the inner peripheral surface of the cylindrical portion located in the contact area of the outer peripheral surface of the cylindrical portion starting from the carry-in portion where the long substrate is carried in and starting from the carry-out portion where the long substrate is carried out, and A cooling panel or cooling coil to which refrigerant is supplied from a refrigerator outside the vacuum chamber via a pipe provided in the cylinder of the rotary shaft, and provided from the outside of the vacuum chamber provided in the cylinder of the non-rotating shaft. Release gas into the space inside the cylinder On the inner peripheral surface of the cylindrical portion located in the non-contact region of the outer peripheral surface of the cylindrical portion starting from the unloading portion from which the long substrate is unloaded and starting from the unloading portion from which the long substrate is unloaded. A gas discharge preventing member disposed so as to abut and closing the gas discharge hole of the cylindrical portion from the inside of the cylindrical portion; and a driving means for rotationally driving the can roll body,
The surface of the cylindrical portion of the can roll body and the long substrate wound around the outer surface of the can roll while cooling the gas in the cylindrical portion by the cooling panel or the cooling coil is subjected to a heat treatment. Measure substrate processing method.   The long substrate processing method according to claim 8, wherein the heat treatment is a vacuum film formation process.   The long substrate processing method according to claim 9, wherein the vacuum film forming process is a sputtering process.   The long substrate processing method according to claim 8, wherein the surface treatment to which the thermal load is applied is a plasma treatment or an ion beam treatment.

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