JP2016065780A - Plane scanning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact plane scanning device having high accuracy.SOLUTION: Four drive mechanisms are set having loading plates 11a, 11b, 11c and 11d loaded on and supported by scanning movement blocks for scanning a rectangular scanning object surface 13 so as to surround the same with the surface as a center and the movement block can be freely moved in at least one partitioned area of the scanning object surface in the case where the scanning object surface is equally partitioned into four areas in an X-axis direction and a Y-axis direction. The movement block of each of the drive mechanisms covers basically one area obtained by partitioning the scanning object surface into four areas vertically and horizontally, as a scanning object area.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a planar scanning device that performs circuit board inspection and the like, and more particularly to a planar scanning device that requires high-speed and precise positioning accuracy, such as an inspection device.

  3 and 4 show a conventional planar scanning device. A conventional flat scanning device includes two sets of a pair of X-axis drive mechanisms extending in the X-axis direction in parallel on the surface to be scanned. In this case, the X-axis drive mechanism is arranged in two stages, an upper stage and a lower stage, with respect to the scanning target plane. Further, this flat scanning device includes four Y-axis drive mechanisms extending in the Y-axis direction, which are supported by the upper and lower X-axis drive mechanisms. That is, each Y-axis drive mechanism is supported by the upper and lower X-axis drive mechanisms. The upper Y-axis drive mechanism supported by the pair of upper X-axis drive mechanisms is translated in the X-axis direction on the upper X-axis drive mechanism, and the lower Y-axis drive mechanism is translated in the X-axis direction on the lower X-axis drive mechanism. It can be done.

  Each of the upper X-axis drive mechanism and the lower X-axis drive mechanism includes upper placement plates 111a and 111b and lower placement plates 111c and 111d for placing a moving body that moves along the X-axis direction. . In this case, FIG. 3 is a front view of a conventional planar scanning device. 4 is a cross-sectional view taken along line A-A ′ of the planar scanning device shown in FIG. 3, and FIG. 5 is a cross-sectional view taken along line B-B ′ of the planar scanning device shown in FIG. 3. This flat scanning device includes an upper X-axis linear motion guide 101a, 101b and lower X-axis linear motion guides 101c, 101d extending in parallel with each other across a work area of the device, ie, a scanning target surface 113, and a pair of upper X-axis ball screws. The X-axis drive mechanism including the attached shafts 102a and 102b and the pair of lower X-axis ball screw shafts 102c and 102d includes a pair of upper Y-axis drive mechanisms 107a and 107b and a pair of lower Y-axis drive mechanisms 107c and 107d. It has a structure of orthogonal arrangement.

  As described above, in this conventional structure, the X-axis drive mechanism is configured in two stages with respect to the scanning target surface. That is, the lower X-axis linear motion guides 101c and 101d, the lower X-axis ball screw shafts 102c and 102d, and the lower Y-axis drive mechanisms 107c and 107d are located near the scanning target surface 113 outside the scanning target surface 113. The upper X-axis linear motion guides 101a and 101b, the upper X-axis ball screw shafts 102a and 102b, the upper Y-axis drive mechanism 107a, and the Y-axis drive mechanism 107b are arranged at positions far from the scanning target surface 113.

  As described above, the Y-axis drive mechanism is provided on each X-axis drive mechanism. That is, the Y-axis drive mechanism 107 is disposed between the moving blocks 105 of the X-axis linear motion guide 101 via the mounting plate 106 of the Y-axis drive mechanism.

  A motor 104 is installed at one end of the shaft 102 with the X-axis ball screw. Further, the threaded shaft of the shaft 102 with the X-axis ball screw and the rotating shaft (not shown) of the motor are connected via a coupling 103. The four Y-axis drive mechanisms 107 incorporate the same Y-axis ball screw shaft 108, a motor 110, and a coupling 112 as described above.

The operation in the X-axis direction in this plane scanning device will be described. When the X-axis motor 104 is driven, the rotational motion is converted into a linear motion by the shaft 102 with the X-axis ball screw, and the moving block incorporating the nut is moved along the Y-axis. As the moving block moves, the Y-axis drive mechanism mounting plate 106 having one end connected to the moving block also moves.
At this time, the Y-axis drive mechanism 107 moves together with the moving block 105 of the X-axis linear guide connected to the other end.

  Regarding the operation in the Y-axis direction, when the Y-axis motor 110 is driven, the rotational motion is converted into a linear motion by the Y-axis ball screw shaft 108 and the moving block 109 is moved. As the moving block 109 moves, the placement plate 111 placed on the moving block also moves.

  By placing the inspection probe on the mounting plate 111 and moving the inspection probe by a desired amount in the X-axis direction and the Y-axis direction, the inspection probe can be moved to a desired position.

  Similarly, another set of XY movement units provided at positions close to the scanning target surface 113 and two sets of XY movement units provided at positions far from the scanning target surface 113 can also perform XY movement in the same manner. It is.

  However, the structure of the planar scanning device as shown in FIG. 2 has a problem that the planar scanning device becomes large because the X-axis and the Y-axis have a two-stage structure. In addition, with the two-stage structure, there is a problem that the position accuracy of the XY axis that is far from the scan target surface 113 is worse than that of the XY axis that is close to the scan target surface 113.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above problems and to provide a small and highly accurate flat scanning device.

According to one aspect of the present invention, a first axis extending in a first direction within a scan target plane;
A second axis extending in a second direction perpendicular to the first direction, wherein one end is attached to the first axis and the other end is a free end in the first direction. A plane scanning mechanism having a second axis configured to be able to move in parallel and a movable body attached to the second axis and movable along the second axis;
There is provided a planar scanning device characterized in that the planar scanning mechanisms are arranged in the scanning target plane in a positional relationship facing each other.

  In a preferred aspect, a plurality of the second shafts each having the moving body are attached to the first shaft, and each of the second shafts translates on the respective first shaft. Each of the movable bodies can move along the second axis.

  The moving body can be precisely controlled within a predetermined range of the scanning target surface, and can move freely along the target surface. Various modes are conceivable for the moving body. For example, a radiation generating device that generates radiation on the target surface, and an X-ray sensor for inspecting a defect of a circuit board disposed on the scanning target surface can be provided. Furthermore, a light generation device, a light reception device, or the like can be configured or mounted. Further, it can function as an imaging device that captures an image on the scanning plane.

  Preferably, a first drive mechanism for translating the second axis along the first direction is provided on the first axis.

  Further, a second drive mechanism for moving the sensor in the second direction along the second axis is provided on the second axis.

  Preferably, the first and second drive mechanisms are provided with a rotary motor, and the first shaft and the second shaft are constituted by a shaft having a ball screw on the surface.

  Further, typically, the first axis extends in the X-axis direction and the second axis extends in the Y-axis direction with respect to the scanning target plane.

  Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

  A planar scanning device according to the present invention includes an X-axis drive mechanism including a base frame, an X-axis linear motion guide, an X-axis ball screw shaft, an X-axis motor, a coupling, and the like, a Y-axis drive mechanism mounting plate, and a Y-axis A Y-axis drive mechanism including a shaft with a ball screw, a Y-axis motor, a coupling, and the like are provided.

  The X-axis linear motion guide constituting the X-axis drive mechanism is attached to the base frame in parallel with the other X-axis linear motion guides and the shaft with the X-axis ball screw.

  The shaft with the X-axis ball screw is attached to the base frame, and the rotating shaft of the motor is connected to one end of the shaft with the X-axis ball screw through a coupling.

  The Y-axis drive mechanism mounting plate is constructed on a moving block of a pair of X-axis linear motion guides, and the Y-axis drive mechanism is mounted on the Y-axis drive mechanism mounting plate.

  The Y-axis drive mechanism is attached so as to be orthogonal to the X-axis linear motion guide and the X-axis ball screw shaft, and the Y-axis drive mechanism includes a ball screw shaft, a moving block, a motor, and a coupling. . A mounting plate is attached to the moving block of the Y-axis drive mechanism.

  The Y-axis drive mechanism is attached so that it has a fixed end fixed to the moving block of the X-axis linear motion guide and an open end not fixed to the movement block of the X-axis linear motion guide. The Y-axis drive mechanism is provided so as to have a positional relationship in which inspection or the like is performed in the open end side region.

  According to the planar scanning device of the present invention, the intervals between the plurality of moving bodies within the scanning target surface are the same, and there is no individual difference between the moving bodies. Further, unlike the conventional structure, each plane scanning mechanism is one stage, and the moving body scans and moves within a predetermined range of the scanning target surface under the same conditions, so that small and highly accurate scanning is performed. be able to.

It is a front view which shows the structure of the plane scanning apparatus by one embodiment of this invention. It is sectional drawing of A-A 'of the plane scanning apparatus shown in FIG. It is a front view which shows the structure of the conventional plane scanning apparatus. It is sectional drawing of A-A 'of the plane scanning apparatus shown in FIG. FIG. 4 is a cross-sectional view taken along line B-B ′ of the planar scanning device illustrated in FIG. 3.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings. The same symbols are assigned to the same members. The present invention is not limited to the present embodiment.

  FIG. 1 shows a front view of a structure diagram of a flat scanning device according to the present embodiment. 2 is a cross-sectional view taken along the line A-A ′ of the planar scanning device shown in FIG. 1.

  In the configuration of this example, four driving units having a mounting plate 11 that mounts and supports a scanning moving block for scanning the scanning target surface so as to surround the rectangular scanning target surface 13 in the middle. The mechanism is installed. Each of the four drive mechanisms has the same configuration, and the inside of at least one partition area of the scan target surface when the scan target surface is equally divided into four in the X-axis direction and the Y-axis direction. The moving block is configured to move freely. Therefore, the moving blocks of the respective driving mechanisms basically cover one area obtained by dividing the scanning target surface into four equal parts in the vertical and horizontal directions in FIG.

  In this case, the four moving blocks supported by the four driving mechanisms are arranged so as to have the same distance with respect to the scanning target surface. That is, in the apparatus of this example, since the four moving blocks have the same positional relationship with respect to the scanning target surface, the sensitivity of the four moving blocks to the scanning target surface can be made the same, and from the four moving blocks Can be managed in common.

  Each of the four drive mechanisms includes an X-axis drive mechanism and a Y-axis drive mechanism supported by the X-axis drive mechanism. Each of the four moving blocks is independently supported by a Y-axis drive mechanism. In this case, the pair of drive mechanisms are arranged in a left-right contrast position on the upper end side of the surface to be scanned in FIG. 1, and the Y-axis drive mechanism supported by the X-axis drive mechanism is supported at the upper end side, and X is directed downward. It extends in a direction perpendicular to the shaft drive mechanism (in the Y-axis direction) and its lower end is a free end.

  In addition, in FIG. 1, a pair of drive mechanisms are arranged at the lower end side of the scanning target surface in a vertical contrast relationship in the same manner as described above in FIG. 1 in a horizontal contrast position relationship and supported by the X-axis drive mechanism of the drive mechanism. The lower end of the shaft drive mechanism is supported, and extends upward in the direction perpendicular to the X-axis drive mechanism (in the Y-axis direction). The upper end is a free end.

  Each X-axis drive mechanism includes an X-axis linear motion guide, an X-axis ball screw shaft, an X-axis motor, and a coupling. The X-axis linear motion guide 1a includes other X-axis linear motion guides 1b, 1c, 1d, and The X-axis ball screw shafts 2a, 2b, 2c, and 2d are arranged in parallel to be attached to the base frame 20. Similarly, the X axis linear motion guides 1 b, 1 c, 1 d are also attached to the base frame 20.

  The shaft 2a with X-axis ball screw is attached to the base frame 20, and the rotating shaft of the motor 4a is connected to one end of the shaft 2a with X-axis ball screw via a coupling 3a. Similarly, shafts 2b, 2c, and 2d with X-axis ball screws are also attached to the base frame 20. One end of the shaft 2b with X-axis ball screws is attached to the rotating shaft of the motor 4b and X-axis ball screws via a coupling 3b. A rotating shaft of the motor 4c is connected to one end of the shaft 2c via a coupling 3c, and a rotating shaft of the motor 4d is connected to one end of the shaft 2d with an X-axis ball screw via a coupling 3d.

  A moving block (not shown) incorporating a nut (not shown) of the shaft 2a with X-axis ball screw is fixed to the Y-axis drive mechanism mounting plate 6a. Similarly, a moving block (not shown) incorporating a nut (not shown) of the shaft 2b with X-axis ball screw is attached to a nut (not shown) of the shaft 2c with X-axis ball screw on the Y-axis drive mechanism mounting plate 6b. ) In which a nut (not shown) of a shaft 2d with an X-axis ball screw is incorporated in the Y-axis drive mechanism mounting plate 6c. It is fixed to the drive mechanism mounting plate 6d.

  The Y-axis drive mechanism mounting plate 6a is installed on the moving blocks 5a and 5b of the pair of X-axis linear motion guides 1a and 1b, and the Y-axis drive mechanism 7a is mounted on the Y-axis drive mechanism mounting plate 6a. ing. Similarly, the Y-axis drive mechanism mounting plate 6b is installed on the moving blocks 5c and 5d of the pair of X-axis linear motion guides 1a and 1b, and the Y-axis drive mechanism 7b is mounted on the Y-axis drive mechanism mounting plate 6b. The Y-axis drive mechanism mounting plate 6c is installed on the moving blocks 5e and 5f of the pair of X-axis linear motion guides 1c and 1d, and the Y-axis drive mechanism 7c is mounted on the Y-axis drive mechanism mounting plate 6c. The shaft drive mechanism placement plate 6d is installed on the moving blocks 5g and 5h of the pair of X-axis linear motion guides 1c and 1d, and the Y-axis drive mechanism 7d is placed on the Y-axis drive mechanism placement plate 6d. Yes.

  The Y-axis drive mechanism 7a is attached so as to be orthogonal to the X-axis linear motion guides 1a, 1b, 1c and 1d and the X-axis ball screw shafts 2a, 2b, 2c and 2d. A shaft 8a with a ball screw, a moving block 9a, and a motor 10a are incorporated, and a mounting plate 11a is attached to the moving block 9a of the Y-axis drive mechanism 7a. Similarly, the Y-axis drive mechanism 7b is attached so as to be orthogonal to the X-axis linear motion guides 1a, 1b, 1c, and 1d and the X-axis ball screw shafts 2a, 2b, 2c, and 2d. 7b incorporates a shaft 8b with a ball screw, a moving block 9b, and a motor 10b. A mounting plate 11b is attached to the moving block 9b of the Y-axis drive mechanism 7b, and the Y-axis drive mechanism 7c moves linearly on the X-axis. The guides 1a, 1b, 1c, and 1d and the X-axis ball screw shafts 2a, 2b, 2c, and 2d are attached so as to be orthogonal to the Y-axis drive mechanism 7c. The ball screw shaft 8c, the moving block 9c, and the motor 10c is built in, and a mounting plate 11c is attached to the moving block 9c of the Y-axis drive mechanism 7c. The guides 1a, 1b, 1c, 1d and the X-axis ball screw shafts 2a, 2b, 2c, 2d are mounted so as to be orthogonal to the Y-axis drive mechanism 7d. 10d is built in, and a mounting plate 11d is attached to the moving block 9d of the Y-axis drive mechanism 7d.

Further, the mounting plate 11a on the moving block 9a of the Y-axis drive mechanism 7a is on the open end side (in FIG. 1, the X-axis linear motion) in relation to the X-axis linear motion guides 1a and 1b that are the fixed end side of the Y-axis drive mechanism 7a. It is provided in such a positional relationship that it is operated in an area above the guide 1b.
Similarly, the mounting plate 11b on the moving block 9b of the Y-axis drive mechanism 7b is disposed on the open end side (in FIG. 1, the X-axis linear movement guide 1a and 1b), which is the fixed end side of the Y-axis drive mechanism 7b. The mounting plate 11c on the moving block 9c of the Y-axis drive mechanism 7c is provided in a positional relationship such that it is operated in a region above the motion guide 1b). The X-axis is the fixed end side of the Y-axis drive mechanism 7c. Placed on the moving block 9d of the Y-axis drive mechanism 7d provided in a positional relationship such that it is operated in an area on the open end side (in FIG. 1, below the X-axis linear motion guide 1c) from the linear motion guides 1c and 1d. The plate 11d is in a positional relationship such that it is operated in the X-axis linear motion guides 1c and 1d, which are the fixed end side of the Y-axis drive mechanism 7d, in the open end side region (below the X-axis linear motion guide 1c in FIG. 1). Is provided.

  When the X-axis motor 4a is driven, the rotational motion is converted into linear motion by the X-axis ball screw shaft 2a, and the moving block incorporating the nut is moved. As the moving block moves, the Y-axis driving mechanism mounting plate 6a fixed to the moving block and the Y-axis driving mechanism 7a mounted on the Y-axis driving mechanism mounting plate 6a move in the X-axis direction. To do. Similarly, for the other X-axis motors 4b, 4c, and 4d, when the X-axis motor is driven, each Y-axis drive mechanism mounting plate or the Y-axis drive mechanism mounted on the Y-axis drive mechanism mounting plate is used. Moves in the X-axis direction.

  When the Y-axis motor 10a is driven, the rotational motion is converted into linear motion by the Y-axis ball screw shaft 8a, and the moving block 9a is moved in the Y-axis direction. As the moving block 9a moves, the placing plate 11a placed on the moving block 9a also moves in the Y-axis direction. Similarly, for the other Y-axis motors 10b, 10c, and 10d, when the Y-axis motor is driven, each moving block moves in the Y-axis direction, and the placement placed on the moving block as the moving block moves. The plate moves in the Y axis direction.

  When used as a planar scanning device of a movable probe type printed wiring board inspection device, an inspection probe is placed on a mounting plate, and an X-axis motor and a Y-axis motor are driven so that the inspection probe is a desired one. It is possible to move to the XY position. In addition to the above, the printed circuit board fixing unit, the probe Z-axis direction (perpendicular to the XY plane) moving mechanism unit, the measurement unit, the storage unit, and the control unit can be used.

  According to the present invention, the level of the scanning moving block supported by the plurality of driving mechanisms is set to one level with respect to the surface to be scanned, without using a structure in which the moving block driving mechanism has two upper and lower stages. As a result, it is possible to realize a planar scanning device that is smaller than the conventional one. In addition, since the distance from the scanning position is shorter than that of the two-stage configuration, highly accurate measurement, positioning, and the like are possible.

  The present invention can be used for an apparatus that requires high-speed and high-precision positioning such as a movable probe type printed wiring board inspection apparatus.

1a, 1b, 1c, 1d X-axis linear motion guides 2a, 2b, 2c, 2d X-axis ball screw shafts 3a, 3b, 3c, 3d Couplings 4a, 4b, 4c, 4d X-axis motors 5a, 5b, 5c, 5d 5e, 5f, 5g, 5h Moving block (X-axis linear motion guide)
6a, 6b, 6c, 6d Y-axis drive mechanism mounting plates 7a, 7b, 7c, 7d Y-axis drive mechanisms 8a, 8b, 8c, 8d Y-axis ball screw shafts 9a, 9b, 9c, 9d Moving block (Y-axis)
10a, 10b, 10c, 10d Y-axis motors 11a, 11b, 11c, 11d Mounting plates 12a, 12b, 12c, 12d Y-axis coupling 13 Scan target surface 20 Base frame 101a, 101b, 101c, 101d X-axis linear motion guide 102a, 102b, 102c, 102d X-axis ball screw shaft 103a, 103b X-axis coupling 104a, 104b X-axis motor 105a, 105b, 105c, 105d, 105e, 105f Moving block (X-axis linear motion guide)
106a, 106b, 106c, 106d Y-axis drive mechanism placement plates 107a, 107b, 107c, 107d Y-axis drive mechanisms 108a, 108b, 108c, 108d Y-axis ball screw shafts 109a, 109b, 109c, 109d Moving block (Y-axis)
110a, 110b, 110c, 110d Y-axis motors 111a, 111b, 111c, 111d Mounting plates 112a, 112b, 112c, 112d Y-axis coupling 113 Scan target surface 120 Base frame

Claims (7)

A first axis extending in a first direction in the scan target plane;
A second axis extending in a second direction perpendicular to the first direction, wherein one end is attached to the first axis and the other end is a free end in the first direction. A plane scanning mechanism having a second axis configured to be able to move in parallel and a movable body attached to the second axis and movable along the second axis;
A planar scanning device, wherein the planar scanning mechanisms are arranged in the scanning target plane in a positional relationship facing each other.   A plurality of the second shafts each having the moving body are attached to the first shaft, and each of the second shafts can be translated on the respective first shafts. The flat scanning apparatus according to claim 1, wherein each of the movable bodies is movable along the second axis.   The flat scanning apparatus according to claim 1, wherein the movable body is an inspection probe provided for circuit board inspection.   4. The device according to claim 1, wherein a first drive mechanism for translating the second shaft along the first direction is provided on the first shaft. 5. The flat scanning device according to item.   The second drive mechanism for moving the sensor in the second direction along the second axis is provided on the second axis. A flat scanning device according to claim.   The first and second drive mechanisms are each provided with a rotary motor, and the first shaft and the second shaft are constituted by a shaft having a ball screw on the surface thereof. The planar scanning device according to any one of claims.   The first axis according to any one of claims 1 to 6, wherein the first axis extends in the X-axis direction and the second axis extends in the Y-axis direction with respect to the scanning target plane. The flat scanning device described.

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