JP2016042037A - Evaluation method and device, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an evaluation method for quantitatively acquiring the local distribution of electric resistance in an object to be measured with high reproducibility and making easy and accurately local electrical evaluation possible.SOLUTION: The present invention is an evaluation method for generating an absorption current while not in contact with a sample, the evaluation method executing: a step 11 for acquiring the two-dimensional distribution of calorific capacity of a sample; a step 12 for acquiring the two-dimensional distribution of absorption current values of the sample at a plurality of different temperatures; a step 14 for measuring the transient response of a temperature change at each coordinate of the sample; a step 15 for calculating a heat resistance value at each coordinate of the sample and acquiring the two-dimensional distribution of heat resistance values of the sample; and a step 17 for calculating an electric resistance value at each coordinate using the calculated heat resistance value at each coordinate and acquiring the two-dimensional distribution of electric resistance values of the sample.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an evaluation method and apparatus for an electronic component or the like to be measured, and a program.

  In the development and reliability evaluation of LSI mounting technology, electrical resistance monitoring of mounted products is routinely performed, but is generally limited to macro evaluation. The macro evaluation is an energization check of the entire semiconductor package, for example, an evaluation of a wiring chain including a large number of junction regions. Even if the failure that has occurred can be detected macroscopically, the cause is due to microscopic material changes (deformation and compound formation). For this reason, a micro evaluation is required to take countermeasures against failures.

  However, an effective local electrical method for evaluating a single bonding region such as a via or a bump in a semiconductor package has not yet been established. This is due to the fact that it is difficult to locally measure the electrical resistance of low resistance metal regions such as wiring and joints. As can be seen from Ohm's law (R = V / I), in order to measure a low resistance material, it is necessary to measure a minute voltage by IV measurement or to input a large current. However, in practice, measurement is difficult because there is no suitable measuring device or local heat generation occurs due to a large current. Therefore, a method is used in which an IV measurement is performed using a wiring chain including a large number of junction regions, and an average value is obtained by dividing by the number of junction regions.

JP 2002-350379 A JP-A-4-76446 JP-A-4-273144

  There is an absorption current method as a method for visualizing a conduction state in a local region of an LSI mounted product. This technique is a technique in which an electron beam is incident on an object to be measured (sample) using a scanning electron microscope (SEM) and electrons flowing in the wiring as an absorption current are visualized. When a conductive probe is brought into contact with one end of the wiring chain including the broken part, the current is amplified on the side connected to the current amplifier with the broken part as a boundary, and the current on the other side flows to the ground to form a contrast. An image is obtained. In this way, the disconnection region of the low resistance material such as wiring can be easily identified. However, this method only determines continuity or disconnection. The electrical resistance of the macroscopic material can be measured by IV measurement between the probes. However, since the probes are fixed, it is not possible to measure the local electric resistance or electric resistivity in an arbitrary region located between the probes.

  On the other hand, if the probe is movable, the electrical resistance distribution of the sample can be visualized. For example, in scanning probe microscopy (SPM) using a conductive probe of micrometer or less, the current flowing through the probe can be visualized while scanning. However, since this method performs scanning while bringing the probe into contact with the sample, fluctuations in contact resistance cannot be ignored and measurement errors are large. Further, as an essential problem, the contact pressure of the probe must be increased in order to reduce the contact resistance, and the damage to the sample is large. That is, it can be said that the SPM method is a method with poor quantitativeness and reproducibility.

  The present invention has been made in view of the above problems, and obtains a local electrical resistance distribution of an object to be measured quantitatively with high reproducibility, thereby realizing local electrical evaluation easily and accurately. An object of the present invention is to provide an evaluation method and apparatus, and a program that can be used.

  One aspect of the evaluation method is an evaluation method for generating an absorption current in the measurement target in a non-contact state with respect to the measurement target, the step of acquiring a two-dimensional distribution of the heat capacity of the measurement target; Obtaining a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures; measuring a temperature change at each coordinate of the measurement object; and thermal resistance at each coordinate of the measurement object Calculating a value, obtaining a two-dimensional distribution of the thermal resistance value of the object to be measured, and calculating an electric resistance value at each coordinate using the calculated thermal resistance value at each coordinate, Obtaining a two-dimensional distribution of the electrical resistance value of the object.

  One aspect of the evaluation apparatus is an evaluation apparatus that generates an absorption current in the measurement target in a non-contact state with respect to the measurement target, a temperature adjustment unit that adjusts the temperature of the measurement target, and the measurement target A temperature measurement unit that detects temperature as a two-dimensional distribution, a heat capacity acquisition unit that acquires a two-dimensional distribution of the heat capacity of the measurement target, and a two-dimensional distribution of absorption current values of the measurement target at a plurality of different temperatures An absorption current distribution acquisition unit that acquires a temperature change measurement unit that measures a temperature change at each coordinate of the measurement target, calculates a thermal resistance value at each coordinate of the measurement target, and calculates the heat of the measurement target An electrical resistance value at each coordinate is calculated using a thermal resistance distribution acquisition unit that acquires a two-dimensional distribution of resistance values, and the calculated thermal resistance value at each coordinate, and 2 of the electrical resistance value of the measurement target is calculated. Dimensional distribution To include an electrical resistance distribution obtaining unit.

  One aspect of the program is a program for causing a computer to execute an evaluation method for generating an absorption current in the measurement target in a non-contact state with respect to the measurement target, and obtaining a two-dimensional distribution of the heat capacity of the measurement target A step of acquiring a two-dimensional distribution of absorption current values of the measurement target at a plurality of different temperatures, a step of measuring a temperature change at each coordinate of the measurement target, Calculating a thermal resistance value at each coordinate, obtaining a two-dimensional distribution of the thermal resistance value of the measurement target, and calculating an electrical resistance value at each coordinate using the calculated thermal resistance value at each coordinate And obtaining a two-dimensional distribution of the electrical resistance value of the object to be measured.

  According to the above aspects, the local electrical resistance distribution of the measurement target can be acquired quantitatively with high reproducibility, and the local electrical evaluation can be realized easily and accurately.

It is a schematic diagram which shows schematic structure of the evaluation apparatus by this embodiment. It is a block diagram which shows each function which a general control part has. It is a flowchart which shows the evaluation method by this embodiment in order of a step. It is a characteristic view which shows an example of the two-dimensional distribution of the obtained absorption current value. It is a characteristic view which shows an example of the relationship between the obtained stage temperature and absorption current. It is a characteristic view which shows an example of the obtained transient response. It is an image figure which shows an example of the two-dimensional distribution image of the obtained thermal resistance value. It is an image figure which shows an example of the two-dimensional distribution image of the obtained electrical resistance value. It is an image figure which shows an example of the two-dimensional distribution image of the obtained electrical resistivity. It is a schematic diagram which shows the internal structure of a personal user terminal device.

  Hereinafter, an evaluation apparatus and an evaluation method for an electronic component or the like to be measured will be described in detail with reference to the drawings.

(Configuration of evaluation device)
FIG. 1 is a schematic diagram illustrating a schematic configuration of the evaluation apparatus according to the present embodiment.
This evaluation apparatus includes the SEM 1. The SEM 1 generates an absorption current in the sample 10 in a non-contact state with respect to the measurement target (sample) 10. The SEM control unit 2, the scan coil 3, the sample stage 4, the probe 5, the current amplifier 6 a, and the current A total 6b, a thermography 7, a general control unit 8, and a display unit 9 are provided.

The control unit 2 controls the scan coil 3, the electron beam irradiation amount, the irradiation time, and the like.
The scan coil 3 controls the irradiation position of the electron beam with which the sample 10 is irradiated.
The sample stage 4 has a sample 10 mounted thereon and has a heater 4a that is a temperature adjusting unit that adjusts the temperature of the sample 10, and a thermal switch 4b.
The probe 5 is a conductive one for measuring the absorption current generated in the sample 10.
The current amplifier 6 a amplifies the absorption current detected by the probe 5. The ammeter 6b is for measuring the absorption current amplified by the current amplifier 6a.
The thermography 7 is a temperature measurement unit that detects the temperature of the heat (infrared rays) of the sample 10 in a time-resolved manner and detects it as a two-dimensional distribution. For example, an enlargement mechanism such as an infrared zoom lens may be added to the thermography 7.
The overall control unit 8 includes a central processing unit (CPU) and the like, and comprehensively controls the SEM control unit 2, the heater 4a and the thermal switch 4b of the sample stage 4, the thermography 7, and the like.
The display unit 9 displays a two-dimensional distribution image of the thermal resistance value, a two-dimensional distribution image of the electrical resistance value, a two-dimensional distribution image of the electrical resistivity, and the like of the sample 10.

FIG. 2 is a block diagram showing each function of the overall control unit 8.
As shown in FIG. 2, the overall control unit 8 includes a heat capacity acquisition unit 11, an absorption current distribution acquisition unit 12, a relationship acquisition unit 13, a transient response measurement unit 14, a thermal resistance distribution acquisition unit 15, an electrical resistance distribution acquisition unit 16, An electrical resistivity distribution acquisition unit 17 is provided.

The heat capacity acquisition unit 11 acquires a two-dimensional distribution of the heat capacity of the sample 10 based on the two-dimensional distribution of the temperature detected by the thermography 7.
The absorption current distribution acquisition unit 12 acquires a two-dimensional distribution of absorption current values of the sample 10 detected by the probe 5 at a plurality of different temperatures.
The relationship acquisition unit 13 acquires the relationship between the temperature of the sample 10 detected by the thermography 7 and the absorption current of the sample 10 detected by the probe 5. The relationship acquisition unit 13 may acquire a relationship between the temperature of the sample 10 and the luminance of the two-dimensional distribution of the absorption current value.
The transient response measurement unit 14 is a temperature change measurement unit, and records the two-dimensional distribution of the temperature of the sample 10 detected by the thermography 7 in a time-resolved manner, and measures the transient response of the temperature change at each coordinate of the sample 10. To do.
The thermal resistance distribution acquisition unit 15 generates heat using the transient response of the temperature change at each coordinate of the sample 10 measured by the transient response measurement unit 14 and the heat capacity at each coordinate of the sample 10 obtained by the heat capacity acquisition unit 11. The resistance value is calculated, and a two-dimensional distribution of the thermal resistance value of the sample 10 is acquired.
The electrical resistance distribution acquisition unit 16 uses the absorption current value of the sample 10 detected by the probe 5, the temperature change amount of the sample 10, and the thermal resistance value of the sample 10 obtained by the thermal resistance distribution acquisition unit 15. The electrical resistance value at each coordinate is calculated, and a two-dimensional distribution of the electrical resistance value of the sample 10 is obtained.

  The electrical resistivity distribution acquisition unit 17 acquires the two-dimensional distribution of the electrical resistivity of the sample 10 using the two-dimensional distribution of the electrical resistance value of the sample 10. Specifically, the predicted value of the two-dimensional distribution of the electrical resistance value predicted from each constituent material of the sample 10 is compared with the calculated value of the two-dimensional distribution of the electrical resistance value obtained by the electrical resistance distribution acquisition unit 16. Then, the convergence calculation is repeated while changing the electrical resistivity of each constituent material until the two match. Thereby, a two-dimensional distribution of the electrical resistivity of the sample 10 is obtained.

(Evaluation method)
FIG. 3 is a flowchart showing the evaluation method according to this embodiment in the order of steps.
First, a two-dimensional distribution of the temperature of the sample 10 is acquired by the thermography 7. The heat capacity acquisition unit 11 acquires a two-dimensional distribution of the heat capacity of the sample 10 based on the two-dimensional distribution (step S1).
The heat capacity C is expressed as follows from the known heat amount ΔQ and the temperature change amount ΔT when the heat amount is applied.

  In equation (1), the amount of heat (ΔQ) is defined by the heater 4a, and the temperature rise (ΔT) is measured using the thermography 7 to detect heat as a two-dimensional distribution.

Subsequently, the absorption current distribution acquisition unit 12 acquires a two-dimensional distribution of the absorption current value of the sample 10 detected by the probe 5 at a plurality of different temperatures (temperature of the sample stage 4 (hereinafter referred to as stage temperature)). (Step S2).
An example of the two-dimensional distribution of the obtained absorption current value is shown in FIG. In FIG. 4, (a) is a two-dimensional distribution image with a stage temperature of 50 ° C., (b) is a two-dimensional distribution image with a stage temperature of 100 ° C., and (c) is a two-dimensional distribution with a stage temperature of 150 ° C. It is a statue.

Subsequently, the relationship acquisition unit 13 acquires the relationship between the stage temperature of the sample 10 detected by the thermography 7 and the absorption current of the sample 10 detected by the probe 5 (step S3).
An example of the relationship between the obtained stage temperature and the absorbed current is shown in FIG. In FIG. 5, the characteristic diagram which took the coordinate A of the sample 10 shown to (a) as an example is shown in (b). The relationship is acquired for all coordinates of the sample 10. A relationship in which the absorption current value on the vertical axis increases with increasing temperature on the horizontal axis is obtained. This relational expression is expressed by the following expression (2).

In the equation (2), I _Ab is an absorption current, θ is a thermal resistance, R ₀ is an electrical resistance at room temperature, α is a temperature coefficient, and ΔT is a temperature change amount. Here, the vertical axis of the characteristic diagram is the absorption current value, but it may be the luminance on the display of the absorption current image instead.

Subsequently, the transient response measuring unit 14 records the two-dimensional distribution of the temperature of the sample 10 detected by the thermography 7 in a time-resolved manner, and measures the transient response of the temperature change at each coordinate of the sample 10 (step S4). ).
The time change of the temperature T at each coordinate of the sample 10 is expressed as follows using the thermal time constant τ. The thermal time constant τ is expressed as follows using the thermal resistance θ and the thermal capacity C.

Here, t is time, and T ₀ is the reached temperature at each coordinate.
An example of the obtained transient response is shown in FIG. In FIG. 6, the coordinate A of the sample 10 shown in FIG. 6A is taken as an example, a characteristic diagram when a direct current is applied is shown in FIG. 6B, and a characteristic diagram when a pulse is applied is shown in FIG. The transient response is measured for all coordinates of the sample 10. In the case of pulse application, the temperature increases when the pulse is turned on and decreases when the pulse is turned off, which can be expressed by a common thermal time constant.

Subsequently, the thermal resistance distribution acquisition unit 15 calculates a thermal resistance value using the transient response obtained by the transient response measurement unit 14 and the heat capacity at each coordinate of the sample 10 obtained by the heat capacity acquisition unit 11, A two-dimensional distribution of the thermal resistance value of the sample 10 is acquired (step S5).
Specifically, the thermal time constant τ is obtained from the characteristic diagram (b) or (c), and the thermal resistance θ is determined by substituting the heat capacity C obtained by the equation (1). The display unit 9 displays the calculated thermal resistance value two-dimensionally. FIG. 7 shows an example of a two-dimensional distribution image of the obtained thermal resistance values.

Subsequently, the electrical resistance distribution acquisition unit 16 uses the absorption current value of the sample 10, the temperature change amount of the sample 10, and the thermal resistance value of the sample 10 obtained by the thermal resistance distribution acquisition unit 15 to The electric resistance value at the coordinates is calculated (steps S6 and S7).
The electrical resistance is expressed as follows from the definition equation of thermal resistance and power.

The measured temperature change amount ΔT, thermal resistance θ, and absorption current I _Ab are substituted into the equation (5) to determine the electrical resistance value of the sample 10. The display unit 9 displays the calculated electrical resistance value two-dimensionally. FIG. 8 shows an example of a two-dimensional distribution image of the obtained electrical resistance value. If it is not necessary to acquire the electrical resistivity distribution, the evaluation ends in this step S6.

Subsequently, in order to obtain the electrical resistivity distribution, a calculation model reflecting the material structure of the sample 10 is first constructed (step S8).
As a calculation model, a design drawing such as a CAD diagram may be used, or an X-ray transmission image or a 3D-SEM image (a technique for constructing an image by alternately repeating FIB processing and observation by SEM) may be used. good.

Subsequently, the electrical resistivity is set at each coordinate, and for example, using a useful element method (Finite Element Method: FEM), a current is applied in the calculation model to generate a two-dimensional distribution of the electrical resistance value or heat generation (temperature). A two-dimensional distribution is predicted and calculated (step S9).
At this time, since it is expected that the electrical resistivity will be substantially the same value for the same material, elemental analysis is performed in advance using EDX (Energy dispersive X-ray spectroscopy) or the like, and the component of the material structure of the sample 10 is determined. It is good to make it.

Subsequently, the electrical resistivity distribution acquisition unit 17 acquires the two-dimensional distribution of the electrical resistivity of the sample 10 using the two-dimensional distribution of the electrical resistance value of the sample 10 (steps S10 and S11).
Specifically, the predicted value of the two-dimensional distribution of the electrical resistance value predicted in step S9 and the calculated value of the two-dimensional distribution of the electrical resistance value obtained in step S7 (or the prediction of the two-dimensional distribution of heat generation). Compare the value with the calculated value). If the difference falls below the user-specified threshold (for example, Δ <0.01), the convergence calculation ends, and if not below, the process returns to step S9. By continuing the convergence calculation until the difference is minimized, a two-dimensional distribution of electrical resistivity is finally obtained. The display unit 9 displays the acquired electrical resistivity two-dimensionally. FIG. 9 shows an example of the obtained two-dimensional distribution image of electrical resistivity.

As described above, according to the present embodiment, the following effects can be obtained.
First, the local electrical resistance distribution of the sample can be obtained quantitatively with high reproducibility, and local electrical evaluation can be realized easily and accurately. For example, it is useful for detecting composition unevenness or defects during current path formation or alloy formation. Secondly, information related to heat generation important in alloy formation can be locally predicted from the thermal resistance distribution and the electrical resistivity distribution. The temperature at which multiple metals melt and form a new alloy is determined materialically, so when local heat generation can be predicted, the locality of the alloy in the design, process, and quality assurance areas It becomes easier to predict changes from a thermal point of view. Third, since time-resolved evaluation makes it possible to capture changes in temperature from time to time, it is possible to evaluate in-situ state changes and failure prediction over time. Fourth, since the SEM that enables measurement in a non-contact and vacuum manner is used in the present embodiment, it is possible to take into account the influence of contact resistance and outside air that are problematic in the measurement using the conventional SPM. This improves the quantitativeness and reproducibility of the measurement.

(Other embodiments)
The function of each component of the evaluation apparatus according to the present embodiment described above can be realized by operating a program stored in a RAM or ROM of a computer. As each component realized by the operation of the program, the heat capacity acquisition unit 11, the absorption current distribution acquisition unit 12, the relationship acquisition unit 13, the transient response measurement unit 14, and the thermal resistance distribution acquisition unit 15 in the overall control unit 8 of FIG. , Electrical resistance distribution acquisition unit 16, electrical resistivity distribution acquisition unit 17 and the like. Similarly, the program of each step of the evaluation method (steps S1 to S7, S9 to S11, etc. in FIG. 4) and a computer-readable storage medium storing the program are included in this embodiment.

  Specifically, the above program is recorded on a recording medium such as a CD-ROM, or provided to a computer via various transmission media. As a recording medium for recording the program, a flexible disk, a hard disk, a magnetic tape, a magneto-optical disk, a nonvolatile memory card, and the like can be used in addition to the CD-ROM. On the other hand, a communication medium in a computer network system for propagating and supplying program information as a carrier wave can be used as the program transmission medium. Here, the computer network is a WAN such as a LAN or the Internet, a wireless communication network, or the like, and the communication medium is a wired line such as an optical fiber or a wireless line.

  Further, the program included in the present embodiment is not limited to the one in which the functions of the present embodiment are realized by the computer executing the supplied program. For example, when the function of the present embodiment is realized in cooperation with an OS (operating system) running on a computer or other application software, the program is included in the present embodiment. Further, when all or part of the processing of the supplied program is performed by a function expansion board or a function expansion unit of the computer and the functions of the present embodiment are realized, the program is included in the present embodiment.

  For example, FIG. 10 is a schematic diagram illustrating an internal configuration of a personal user terminal device. In FIG. 10, reference numeral 100 denotes a personal computer (PC) having a CPU 101. The PC 100 executes device control software stored in the ROM 102 or the hard disk (HD) 111 or supplied from the flexible disk drive (FD) 112. The PC 200 generally controls each device connected to the system bus 104.

  Steps S1 to S7 and S9 to S11 in FIG. 10 of the present embodiment are realized by a program stored in the CPU 101, the ROM 102, or the hard disk (HD) 111 of the PC 100.

  Reference numeral 103 denotes a RAM which functions as a main memory, work area, and the like for the CPU 101. A keyboard controller (KBC) 105 controls instruction input from a keyboard (KB) 109, a device (not shown), or the like.

  Reference numeral 106 denotes a CRT controller (CRTC), which controls display on a CRT display (CRT) 110. Reference numeral 107 denotes a disk controller (DKC). The DKC 107 controls access to a hard disk (HD) 111 and a flexible disk (FD) 112 that store a boot program, a plurality of applications, an editing file, a user file, a network management program, and the like. Here, the boot program is a startup program: a program for starting execution (operation) of hardware and software of a personal computer.

A network interface card (NIC) 108 performs bidirectional data exchange with a network printer, another network device, or another PC via the LAN 120.
Instead of using the personal user terminal device, a predetermined computer specialized for the evaluation device may be used.

  Hereinafter, the evaluation method and apparatus, and various aspects of the program are collectively described as additional notes.

(Appendix 1) An evaluation method for generating an absorption current in the measurement target in a non-contact state with respect to the measurement target,
Obtaining a two-dimensional distribution of the heat capacity of the measurement object;
Obtaining a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures;
Measuring a temperature change at each coordinate of the measurement object;
Calculating a thermal resistance value at each coordinate of the measurement target, and obtaining a two-dimensional distribution of the thermal resistance value of the measurement target;
Calculating the electrical resistance value at each coordinate by using the calculated thermal resistance value at each coordinate, and obtaining a two-dimensional distribution of the electrical resistance value of the measurement object. .

  (Supplementary note 2) The evaluation according to supplementary note 1, further comprising the step of obtaining a two-dimensional distribution of the electrical resistivity of the measurement target using a two-dimensional distribution of the electrical resistance value of the measurement target. Method.

(Supplementary Note 3) The step of acquiring a two-dimensional distribution of the electrical resistivity of the measurement target includes:
The predicted value of the two-dimensional distribution of the electrical resistance value predicted from each constituent material of the measurement target is compared with the calculated value of the two-dimensional distribution of the electrical resistance value of the measurement target, and until the two match, The evaluation method according to appendix 2, wherein the convergence calculation is repeatedly performed while changing the electrical resistivity of each constituent material.

  (Supplementary note 4) When predicting a two-dimensional distribution of an electric resistance value from each constituent material of the measurement target, the elemental analysis of the measurement target is performed to make each of the constituent materials into components. Evaluation method described in 1.

  (Additional remark 5) The step which measures the temperature change in each coordinate of the said to-be-measured object carries out time-resolved measurement of the transient response of the temperature change in each said coordinate, Any one of additional marks 1-4 characterized by the above-mentioned. Evaluation method.

  (Supplementary note 6) The evaluation method according to any one of supplementary notes 1 to 5, further comprising a step of acquiring a relationship between a temperature of the measurement target and an absorption current value.

  (Supplementary note 7) The evaluation method according to any one of supplementary notes 1 to 5, further comprising a step of acquiring a relationship between the temperature of the measurement target and the luminance of the two-dimensional image of the absorption current value.

(Supplementary note 8) An evaluation apparatus for generating an absorption current in the measurement target in a non-contact state with respect to the measurement target,
A temperature adjusting unit for adjusting the temperature of the measurement object;
A temperature measuring unit for detecting the temperature of the measurement object as a two-dimensional distribution;
A heat capacity acquisition unit for acquiring a two-dimensional distribution of the heat capacity of the measurement target;
An absorption current distribution acquisition unit that acquires a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures;
A temperature change measuring unit for measuring a temperature change at each coordinate of the measurement target;
A thermal resistance distribution acquisition unit that calculates a thermal resistance value at each coordinate of the measurement target, and acquires a two-dimensional distribution of the thermal resistance value of the measurement target;
An electrical resistance distribution acquisition unit that calculates an electrical resistance value at each coordinate using the calculated thermal resistance value at each coordinate and acquires a two-dimensional distribution of the electrical resistance value of the measurement target; Evaluation device.

  (Additional remark 9) It further includes the electrical resistivity distribution acquisition part which acquires the two-dimensional distribution of the electrical resistivity of the said to-be-measured object using the two-dimensional distribution of the electrical resistance value of the to-be-measured object. 8. The evaluation apparatus according to 8.

  (Additional remark 10) The said electrical resistivity distribution acquisition part is the predicted value of the two-dimensional distribution of the electrical resistance value estimated from each constituent material of the said measurement object, and the two-dimensional distribution of the electrical resistance value of the said measurement object. The evaluation apparatus according to appendix 9, wherein the calculated value is compared, and the convergence calculation is repeatedly performed while changing the electrical resistivity of each of the constituent materials until they match.

  (Additional remark 11) The said temperature change measurement part measures the transient response of the temperature change in each said coordinate in time-resolved measurement, The evaluation apparatus of any one of Additional remark 8-10 characterized by the above-mentioned.

  (Supplementary note 12) The evaluation apparatus according to any one of supplementary notes 8 to 11, further comprising a relationship acquisition unit that acquires a relationship between a temperature of the measurement target and an absorption current value.

  (Supplementary note 13) The evaluation according to any one of supplementary notes 8 to 11, further comprising a relationship acquisition unit that acquires a relationship between the temperature of the measurement target and the luminance of the two-dimensional image of the absorption current value. apparatus.

(Supplementary note 14) A program for causing a computer to execute an evaluation method for generating an absorption current in the measurement target in a non-contact state with respect to the measurement target.
Obtaining a two-dimensional distribution of the heat capacity of the measurement object;
Obtaining a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures;
Measuring a temperature change at each coordinate of the measurement object;
Calculating a thermal resistance value at each coordinate of the measurement target, and obtaining a two-dimensional distribution of the thermal resistance value of the measurement target;
Calculating the electrical resistance value at each coordinate using the calculated thermal resistance value at each coordinate, and obtaining a two-dimensional distribution of the electrical resistance value of the object to be measured. .

  (Supplementary note 15) According to the supplementary note 14, the step of obtaining a two-dimensional distribution of the electrical resistivity of the measurement target using the two-dimensional distribution of the electrical resistance value of the measurement target is further executed. program.

(Supplementary Note 16) The step of acquiring a two-dimensional distribution of the electrical resistivity of the measurement object includes:
The predicted value of the two-dimensional distribution of the electrical resistance value predicted from each constituent material of the measurement target is compared with the calculated value of the two-dimensional distribution of the electrical resistance value of the measurement target, and until the two match, The program according to appendix 15, wherein the convergence calculation is repeatedly performed while changing the electrical resistivity of each constituent material.

  (Additional remark 17) The step which measures the temperature change in each coordinate of the said to-be-measured object carries out time-resolved measurement of the transient response of the temperature change in each said coordinate, It is any one of additional marks 14-16 characterized by the above-mentioned. Program.

  (Supplementary note 18) The program according to any one of supplementary notes 14 to 17, further comprising a step of acquiring a relationship between the temperature of the measurement target and an absorption current value.

  (Supplementary note 19) The program according to any one of supplementary notes 14 to 17, further comprising a step of acquiring a relationship between the temperature of the measurement target and the luminance of the two-dimensional image of the absorption current value.

1 SEM
2 SEM control unit 3 Scan coil 4 Sample stage 5 Probe 6a Current amplifier 6b Ammeter 7 Thermography 8 General control unit 9 Display unit 10 Sample 11 Heat capacity acquisition unit 12 Absorbed current distribution acquisition unit 13 Relationship acquisition unit 14 Transient response measurement unit 15 Heat Resistance distribution acquisition unit 16 Electrical resistance distribution acquisition unit 17 Electrical resistivity distribution acquisition unit

Claims (11)

An evaluation method for generating an absorption current in the measurement object in a non-contact state with respect to the measurement object,
Obtaining a two-dimensional distribution of the heat capacity of the measurement object;
Obtaining a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures;
Measuring a temperature change at each coordinate of the measurement object;
Calculating a thermal resistance value at each coordinate of the measurement target, and obtaining a two-dimensional distribution of the thermal resistance value of the measurement target;
Calculating the electrical resistance value at each coordinate by using the calculated thermal resistance value at each coordinate, and obtaining a two-dimensional distribution of the electrical resistance value of the measurement object. .   The evaluation method according to claim 1, further comprising: obtaining a two-dimensional distribution of the electrical resistivity of the measurement target using a two-dimensional distribution of the electrical resistance value of the measurement target. The step of obtaining a two-dimensional distribution of the electrical resistivity of the object to be measured includes
The predicted value of the two-dimensional distribution of the electrical resistance value predicted from each constituent material of the measurement target is compared with the calculated value of the two-dimensional distribution of the electrical resistance value of the measurement target, and until the two match, The evaluation method according to claim 2, wherein the convergence calculation is repeatedly performed while changing the electrical resistivity of each constituent material.   4. The component according to claim 3, wherein, when predicting a two-dimensional distribution of an electric resistance value from each constituent material of the measurement target, elemental analysis of the measurement target is performed to make each of the constituent materials into components. 5. Evaluation method.   5. The evaluation method according to claim 1, wherein the step of measuring a temperature change at each coordinate of the measurement target includes time-resolved measurement of a transient response of the temperature change at each coordinate. .   The evaluation method according to claim 1, further comprising a step of acquiring a relationship between a temperature of the measurement target and an absorption current value.   The evaluation method according to claim 1, further comprising a step of acquiring a relationship between the temperature of the measurement target and the luminance of the two-dimensional image of the absorption current value. An evaluation apparatus for generating an absorption current in the measurement object in a non-contact state with respect to the measurement object,
A temperature adjusting unit for adjusting the temperature of the measurement object;
A temperature measuring unit for detecting the temperature of the measurement object as a two-dimensional distribution;
A heat capacity acquisition unit for acquiring a two-dimensional distribution of the heat capacity of the measurement target;
An absorption current distribution acquisition unit that acquires a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures;
A temperature change measuring unit for measuring a temperature change at each coordinate of the measurement target;
A thermal resistance distribution acquisition unit that calculates a thermal resistance value at each coordinate of the measurement target, and acquires a two-dimensional distribution of the thermal resistance value of the measurement target;
An electrical resistance distribution acquisition unit that calculates an electrical resistance value at each coordinate using the calculated thermal resistance value at each coordinate and acquires a two-dimensional distribution of the electrical resistance value of the measurement target; Evaluation device.   9. The electrical resistivity distribution acquisition unit that acquires the two-dimensional distribution of the electrical resistivity of the measurement target using the two-dimensional distribution of the electrical resistance value of the measurement target. Evaluation device. A program for causing a computer to execute an evaluation method for generating an absorption current in the measurement object in a non-contact state with respect to the measurement object,
Obtaining a two-dimensional distribution of the heat capacity of the measurement object;
Obtaining a two-dimensional distribution of absorption current values of the measurement object at a plurality of different temperatures;
Measuring a temperature change at each coordinate of the measurement object;
Calculating a thermal resistance value at each coordinate of the measurement target, and obtaining a two-dimensional distribution of the thermal resistance value of the measurement target;
Calculating the electrical resistance value at each coordinate using the calculated thermal resistance value at each coordinate, and obtaining a two-dimensional distribution of the electrical resistance value of the object to be measured. .   The program according to claim 10, further comprising the step of acquiring a two-dimensional distribution of the electrical resistivity of the measurement target using a two-dimensional distribution of the electrical resistance value of the measurement target.