JP2015218968A - Superheated steam processing method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a superheated steam processing method and a device of the same in which an oxygen amount existing in water supplied to a steam generator is reduced, and which has a preferable oxidation prevention characteristic, in superheated steam processing of a material which requires high-degree oxidation prevention.SOLUTION: In a superheated steam processing method in which steam generated in a steam generator 104 is heated in a superheating heat source, it is fed into a processing chamber 102 and processing is performed, oxygen dissolved in water 132 before being fed into the steam generator is replaced with a replacement gas in advance.

Description

  The present invention relates to a superheated steam treatment method and apparatus for use in food drying, sterilization, degreasing, waste plastic recycling and the like.

  In general, superheated steam is steam that has been heated to 100 ° C. or higher without pressurizing saturated steam evaporated at 100 ° C., and has recently been actively used for thawing or baking foods.

  The superheated steam treatment technology has good heat transfer characteristics and a small heat capacity, similar to saturated steam, compared to conventional heating with hot air or the like. In addition, oxygen is blocked and the object to be heated is less oxidized.

  At present, it is used in a wide range of fields such as mounting in a home microwave oven or industrially drying foods due to the above characteristics. Further, as disclosed in Patent Document 1, utilization of a composite material of a metal and a resin as a method for recovering the metal by thermally decomposing the resin has been studied.

  Hereinafter, a conventional general superheated steam treatment method and apparatus will be described with reference to FIG.

  FIG. 5 is a schematic diagram of a conventional general superheated steam treatment apparatus. The treatment chamber 502 is a container for heat-treating the article to be heated 501. In the processing chamber 502, a stage 503 for placing an object to be heated 501 is installed. In addition, a steam generator 504 is connected to the processing chamber 502 via a steam introduction pipe 506. The steam generator 504 generates steam. In general, an overheat source 505 is provided between the processing chamber 502 and the steam generator 504 to rapidly heat the steam to an overheated state.

  In order to perform the heat treatment of the object to be heated by the superheated steam processing apparatus as described above, first, the object to be heated 501 is placed on the stage 503 installed in the processing chamber 502. Next, water is supplied to the steam generator 504 (not shown), and water vapor generated from the steam generator 504 is introduced into the processing chamber 502 through the steam introduction pipe 506. At that time, the superheated steam treatment of the article to be heated 501 is started by the steam being superheated by the superheat source 505.

  Note that the processing completion is generally determined by controlling the processing time, but a method of monitoring the temperature of the object to be heated or the processing state by some means may be adopted.

  Further, in order to make the processing state of the object to be heated 501 more uniform, a method of rotating or moving the stage 503 on which the object to be heated 501 is placed by a rotation mechanism or a movement mechanism (not shown) may be adopted. is there.

  In the processing as described above, generally, the oxygen concentration in the water vapor introduced into the processing chamber 502 is approximately 1% or less, which is why oxidation of the object to be heated 501 in the superheated steam processing is reduced. .

Japanese Patent No. 3541269

  However, in the conventional configuration described above, oxygen (so-called dissolved oxygen) is present in the water supplied to the steam generator, so that slight oxidation of the object to be heated by oxygen present in the water vapor is suppressed. Is difficult, and has a problem that it is difficult to apply to the processing of materials that require a high degree of oxidation prevention.

  The present invention solves the above-mentioned conventional problems, and reduces the amount of oxygen present in the water supplied to the steam generator, and is excellent in heat treatment of an object to be heated that requires advanced oxidation prevention. It is an object of the present invention to provide a superheated steam treatment method and apparatus having antioxidant properties.

In order to achieve the above object, a superheated steam treatment method according to one aspect of the present invention is a superheated steam treatment method in which steam generated by a steam generator is heated by a superheat heat source and then sent to a treatment chamber for processing. ,
Supplying a replacement gas to the water before being sent to the steam generator, replacing oxygen dissolved in the water in advance with the replacement gas,
After the oxygen dissolved in the water is replaced with the replacement gas, water in which the replacement gas is dissolved is sent to the steam generator, and water vapor is generated by the steam generator.

  In the superheated steam treatment method according to another aspect of the present invention, when the replacement gas is supplied to the water before being fed into the steam generator, an inert gas may be supplied as the replacement gas.

  In the superheated steam treatment method according to another aspect of the present invention, when the replacement gas is supplied to the water before being fed into the steam generator, a gas containing hydrogen may be supplied as the replacement gas. .

  In the superheated steam treatment method according to another aspect of the present invention, the water in which the replacement gas is dissolved is fed into the steam generator, the steam is generated by the steam generator, and the steam generated by the steam generator is generated. When the gas is heated by the superheat source, a part of the replacement gas may be dissociated.

In the superheated steam treatment device according to one aspect of the present invention, water is supplied, and a steam generator that generates steam from the supplied water;
A superheat source for heating the water vapor generated by the steam generator;
A treatment chamber that is heated by the superheat source and the steam is fed to perform a superheated steam treatment of an object to be treated;
Further, the water supply pipe for supplying water to the steam generator is provided with a gas supply mechanism for supplying a replacement gas replaceable with oxygen dissolved in the water before being fed to the steam generator.

In the superheated steam treatment device according to another aspect of the present invention, a tank for storing the water is connected to the water supply pipe supplied to the steam generator, and the gas supply mechanism is disposed in the tank.
The replacement gas is supplied from the gas supply mechanism to the water in the tank before being sent to the steam generator, so that the replacement gas and oxygen dissolved in the water are replaced. You may make it do.

  In the superheated steam treatment apparatus according to another aspect of the present invention, the gas supply mechanism may have a bubble forming mechanism that supplies the replacement gas in a foam form to the water.

  In the superheated steam treatment device according to another aspect of the present invention, the water supply pipe to be supplied to the steam generator has a cross-sectional area larger than the cross-sectional area of the water supply pipe at the connection with the steam generator. You may make it have.

  In the superheated steam treatment apparatus according to another aspect of the present invention, a cross-sectional area of the water supply pipe supplied to the steam generator may have a portion that decreases toward the steam generator.

  In the superheated steam treatment apparatus according to another aspect of the present invention, the water supply pipe supplied to the steam generator may have at least one portion that is not horizontal.

  In the superheated steam treatment apparatus according to another aspect of the present invention, an energy generation source that imparts energy to the steam that is heated by the superheat source and supplied to the treatment chamber is installed downstream of the superheat source. You may do it.

  As described above, according to the superheated steam treatment method and apparatus therefor according to the above aspect of the present invention, the superheated steam treatment method having good antioxidant properties even in the heat treatment of an object to be heated that requires high oxidation prevention and The apparatus can be provided.

Schematic of the superheated steam treatment device in the first embodiment of the present invention The schematic enlarged view which shows the positional relationship of the steam generator of the superheated steam processing apparatus in 2nd Embodiment of this invention, the supply mechanism of water to this steam generator, and a gas supply pipe | tube. The schematic enlarged view which shows the positional relationship of the steam generator of the superheated steam processing apparatus in 3rd Embodiment of this invention, the supply mechanism of water to this steam generator, and a gas supply pipe | tube. Schematic which shows the positional relationship with the part to which the superheat heat source and steam introduction pipe | tube of the superheated steam processing apparatus in 4th Embodiment of this invention are connected to the process chamber. Schematic of conventional general superheated steam treatment equipment

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic cross-sectional view of a superheated steam treatment apparatus 100 in the first embodiment of the present invention.

  The superheated steam treatment method and the apparatus 100 according to the first embodiment are characterized in that in FIG. 1, the treatment chamber 102 is a container for heat-treating the article to be heated 101 (superheated steam treatment). In the processing chamber 102, a stage 103 for placing the article to be heated 101 is installed. In addition, a steam generator 104 is connected to the processing chamber 102 via a steam introduction pipe 106. The steam generator 104 generates water vapor from water. In addition, a superheat source 105 that heats water vapor using induction heating is installed in an intermediate portion of the steam introduction pipe 106 between the processing chamber 102 and the steam generator 104.

  Further, the steam generator 104 is provided with a tank 111 for storing water 132 via a water supply pipe 130 as a water supply mechanism 100a. For example, the water supply pipe 130 is provided with an on-off valve, and the on-off valve is opened and closed based on the result of the concentration measured by an oxygen concentration measuring device 113 described later, whereby the water 132 is removed from the tank 111 to the steam generator 104. Can be supplied intermittently. The tank 111 is provided with a water supply port (not shown).

  The tank 111 is provided with a gas supply pipe 112 as a gas supply mechanism 100b. A large number of bubble forming mechanisms are provided at the tip of the gas supply pipe 112 (the lower end of the gas supply pipe 112 in FIG. 1) 112a. A small hole is provided. A nitrogen gas supply source 131 as an example of a replacement gas supply source is connected to the other end of the gas supply pipe 112, and nitrogen gas is supplied from the nitrogen gas supply source 131 to the gas supply pipe 112. Furthermore, an oxygen concentration measuring device 113 is installed at the bottom of the tank 111 as necessary.

  In order to process the object to be heated 101 with the superheated steam processing apparatus 100 as described above, first, the object to be heated 101 is placed on the stage 103 installed in the processing chamber 102.

  Next, water 132 is supplied to a tank 111 connected to the steam generator 104 by a water supply pipe 130 (not shown), and nitrogen gas is supplied from the nitrogen gas supply source 131 through the gas supply pipe 112 to the tank 111. Introduce into water 132.

  When water is supplied to the steam generator 104 after the oxygen concentration in the water 132 falls below a predetermined concentration while measuring the oxygen concentration in the water 132 in the tank 111 with the oxygen concentration measuring device 113, the steam generator 104. The steam generated from the water is guided to the processing chamber 102 through the steam introduction pipe 106. At that time, the water vapor is rapidly heated by the superheat source 105 to form a so-called superheat state.

  As described above, the superheated steam treatment of the article to be heated 101 is started by introducing the superheated steam into the processing chamber 102.

  That is, in the first embodiment, the amount of oxygen dissolved in the water 132 in the tank 111 is reduced by the nitrogen gas introduced from the gas supply pipe 112. Since the amount of oxygen dissolved in the water 132 in the tank 111 is reduced in this way, the amount of oxygen in the superheated steam introduced into the processing chamber 102 via the steam introduction pipe 106 is also reduced, and the object to be heated Oxidation of 101 is suppressed.

  More specifically, the object to be heated 101 is, for example, a composite material composed of a hydrogen storage alloy mainly composed of a transition element such as titanium, manganese, or nickel, and an organic component such as a binder. Suppose there is. An example in which the treatment method according to the first embodiment is applied for the purpose of recovering only the hydrogen storage alloy from the composite material will be described.

  The heated object 101 having the above-described configuration was applied to the processing method according to the first embodiment as follows. As an example, when the object to be heated 101 was superheated in the treatment chamber 102 by the superheat source 105 for 5 minutes, the temperature of the superheated steam was 350 ° C. At this time, the organic component such as the binder contained in the article to be heated 101 is decomposed, and the oxygen concentration in the remaining hydrogen storage alloy is 0.5% compared to the oxygen concentration before the treatment. It was possible to effectively suppress oxidation promotion with the following increase.

  In the first embodiment, a large number of small holes are provided at the tip 112a of the gas supply pipe 112. However, if the gas can be supplied into the tank 111, the tip 112a of the gas supply pipe 112 is not necessary, and A large number of small holes may be provided in the middle of the gas supply pipe 112 immersed in the water 132.

  As an example of the superheated steam treatment apparatus 100 and its treatment method, a composite material of a hydrogen storage alloy and an organic substance such as a binder has been described. However, the same effect can be expected with other materials.

  According to the first embodiment, the oxygen dissolved in the water 132 before being sent to the steam generator 104 is replaced in advance with a replacement gas, so that it is satisfactory even in the heat treatment of the article to be heated 101 that requires a high degree of oxidation prevention. It can have antioxidant properties.

(Second Embodiment)
FIG. 2 is a schematic cross-sectional view showing the positional relationship between the steam generator 204 of the superheated steam treatment device 200 and the water supply mechanism 200a to the steam generator 204 and the gas supply pipe 212 in the second embodiment of the present invention. . Since the configuration of the entire superheated steam treatment apparatus and the components other than the water supply mechanism 200a and the gas supply mechanism 200b to the steam generator 204 are the same as those in FIG. 1 referred to in the description of the first embodiment, And description is abbreviate | omitted. The operation method is also substantially the same as that of the first embodiment except that the method of supplying water to the steam generator 204 is intermittent or continuous.

  The superheated steam treatment method and the apparatus 200 according to the second embodiment are characterized in that, in FIG. 2, a water supply pipe 221 that continuously supplies water 232 to the steam generator 204 is used as the water supply mechanism 200a. A connecting portion (first lateral connecting portion) 221a has a portion (second lateral connecting portion) 221c having a cross-sectional area larger than that of the water supply pipe 221. Further, as the gas supply mechanism 200b, a gas supply pipe 212 is installed in the water supply pipe 221 and a gas discharge valve 222 is installed in a portion (second lateral connection portion) 221c having a large cross-sectional area of the water supply pipe 221. There is in being.

  Specifically, as the water supply mechanism 200a, the water supply pipe 221 includes a first lateral connection part 221a whose one end is connected to the steam generator 204, and the other end of the first lateral connection part 221a connected to the lower end. And a substantially vertical portion 221b that is not horizontal, and a second lateral connection portion 221c having one end connected to the upper end of the substantially vertical portion 221b. As an example, the other end of the first lateral connection portion 221a and the lower end of the substantially vertical portion 221b are connected so as to be bent at right angles in an L shape. Furthermore, the upper end of the substantially vertical portion 221b and one end of the second lateral connection portion 221c are connected so as to be bent at right angles in an L shape as an example. One end of the first lateral connection portion 221a is connected to the steam generator 204, and the first lateral connection portion 221a is connected to the steam generator 204 along the lateral direction. The other end of the second lateral connection portion 221c is connected to a supply source (not shown) to which water 232 is continuously supplied, for example. The lower end 212a of the gas supply pipe 212 is inserted into the second lateral connection part 221c of the water supply pipe 221, and the water 232 in the second lateral connection part 221c is inserted into the small lateral holes 212a. The replacement gas is ejected in the form of fine bubbles. As described above, the replacement gas is ejected into the water 232 in the form of fine bubbles, whereby the contact area between the replacement gas and the water 232 is increased, and the replacement efficiency can be improved. The upper end of the gas supply pipe 212 is connected to a nitrogen gas supply source 231 as an example of a replacement gas supply source. Further, the inner diameter of the first lateral connection portion 221a connected to the steam generator 204 of the water supply pipe 221 is set to other portions (for example, the approximate vertical portion 221b and the second lateral connection portion 221c). On the other hand, it is getting smaller. In addition, a pressure-type gas discharge valve 222 is installed on the upper portion of one end side of the second lateral connection portion 221c of the water supply pipe 221 having an inner diameter larger than the inner diameter of the first lateral connection portion 221a. Therefore, as described above, in the cross-sectional area of the water supply pipe 221 that supplies water to the steam generator 204, the substantially vertical portion 221b and the second lateral connection portion 221c are connected to the steam generator 204 at the connection portion 221a. The cross-sectional area is larger than the cross-sectional area of the first lateral connection portion 221a. Thus, by having the approximate vertical portion 221b and the second lateral connection portion 221c having a cross-sectional area larger than the cross-sectional area of the first lateral connection portion 221a, the approximate vertical portion 221b and the second lateral connection portion 221c A space 221d through which the water 232 does not pass can be formed in the upper portion (actually, the upper portion of the second lateral connection portion 221c), and a space for storing the oxygen replaced with the replacement gas can be surely secured. It is possible to prevent the oxygen once substituted from trying to dissolve in water again.

  In the second embodiment, when the superheated steam treatment is performed as in the first embodiment, a space 221d through which the water 232 does not pass is formed in the upper part of the second lateral connection portion 221c of the water supply pipe 221. The When nitrogen gas as an example of replacement gas is introduced from the gas supply pipe 212 into the water 232 in the second lateral connection part 221c, replacement of dissolved oxygen and nitrogen gas in the water 232 is started, which is the first embodiment. Similarly, the oxygen concentration of the water 232 supplied to the steam generator 204 begins to decrease. Further, when the nitrogen gas is continuously supplied from the nitrogen gas supply source 231 through the gas supply pipe 212 at a desired pressure, the second lateral connection portion 221c of the water supply pipe 221 is passed through the space 221d through which the water 232 does not pass. Oxygen released from the water 232 is released to the outside of the water supply pipe 221 from the gas release valve 222 installed at, so that the oxygen concentration in the water 232 can be efficiently reduced.

  That is, the oxygen concentration in the continuously supplied water 232 can be reduced without temporarily retaining the water 232 when the water 232 is supplied to the steam generator 204, and as a result, It becomes possible to suppress the oxidation of the object 101 efficiently.

  Furthermore, in 2nd Embodiment, although demonstrated using the example in which the internal diameter in the 1st horizontal direction connection part 221a of the water supply pipe 221 becomes small compared with another part, the water supply pipe 221 is a water supply pipe. As long as it has a portion (second lateral connection portion) 221c having a cross-sectional area larger than the cross-sectional area of the connection portion 221a with the steam generator 204 of 221, any shape may be used. Further, the water supply pipe 221 does not necessarily have a cylindrical shape, and may be an arbitrary cylindrical member such as a rectangular cylindrical shape.

  Further, although the gas release valve 222 has been described using an example of a pressure type gas release valve, it goes without saying that the control method is not limited to the pressure type. Further, there may be a mechanism that can release the released oxygen to the outside without installing a valve.

  Furthermore, in 2nd Embodiment, although demonstrated using the example which has two 1st horizontal direction connection parts 221a, the 2nd horizontal direction connection part 221c, and one general | schematic vertical part 221b, several horizontal direction connection is demonstrated. There is no problem even if it has a portion and a substantially vertical portion, and by installing a plurality of portions, it is possible to improve the efficiency of releasing oxygen. Needless to say, it is not always necessary to have a lateral connection portion or a substantially vertical portion.

(Third embodiment)
FIG. 3 is a schematic cross-sectional view showing the positional relationship between the steam generator 304 of the superheated steam treatment apparatus 300 and the water supply mechanism 300a and the gas supply pipe 321 to the steam generator 304 in the third embodiment of the present invention. . Since the configuration of the entire superheated steam treatment apparatus and the components other than the water supply mechanism 300a and the gas supply mechanism 300b for the steam generator 304 are the same as those in FIG. 1 referred to in the description of the first embodiment, And description is abbreviate | omitted. Further, since the operation method is substantially the same as that of the first embodiment, description thereof is omitted.

  The superheated steam treatment method and the apparatus 300 according to the third embodiment are characterized in that, in FIG. 3, a water supply pipe 321 that supplies water 332 to the steam generator 304 has a constant cross-sectional area other than the large-diameter portion 321b. There exists in having the part (small diameter part) 321a whose cross-sectional area is small toward the steam generator 304. FIG. Further, the lower end 312 a of the gas supply pipe 312 is installed in the water supply pipe 321, and the gas discharge valve 322 is installed in the large diameter portion 321 b of the water supply pipe 321. The upper end of the gas supply pipe 312 is connected to a nitrogen gas supply source 331 as an example of a replacement gas supply source.

  Specifically, as the water supply mechanism 300a, the water supply pipe 321 includes a small diameter part 321a whose one end is connected to the steam generator 304 and a large diameter part 321b whose other end is connected to one end. It is prepared and configured. The inner diameter of the small diameter portion 321a is tapered so that it gradually decreases toward the steam generator 304. The other end of the large diameter part 321b is connected to a supply source (not shown) to which water 332 is continuously supplied, for example.

  Further, as the gas supply mechanism 300b, a lower end portion 312a from which a replacement gas is ejected from a large number of small holes of the gas supply pipe 312 in a fine bubble shape is arranged inside the large diameter portion 321b of the water supply pipe 321. . As described above, the replacement gas is ejected into the water 332 in the form of fine bubbles, whereby the contact area between the replacement gas and the water 332 is increased, and the replacement efficiency can be improved. In addition, a pressure-type gas discharge valve 322 is installed above the large-diameter portion 321 b of the water supply pipe 321.

  In the third embodiment, when the superheated steam treatment is performed as in the first embodiment, a space 321c through which water 332 does not pass is formed above the small diameter portion 321a and the large diameter portion 321b of the water supply pipe 321. . When nitrogen gas as an example of replacement gas is introduced from the nitrogen gas supply source 331 into the water 332 in the large-diameter portion 321b of the water supply pipe 321 through the gas supply pipe 312, steam is generated as in the first embodiment. The oxygen concentration of the water 332 supplied to the vessel 304 decreases. Further, when nitrogen gas is supplied from the nitrogen gas supply source 331 through the gas supply pipe 312 at a desired pressure, oxygen released from the water 332 is released from the gas release valve 322, and the oxygen concentration in the water 332 is efficiently reduced. It becomes possible to decrease to. That is, when water 332 is supplied to the steam generator 304, the oxygen concentration in the water 332 can be reduced even when the water 332 is continuously supplied without being temporarily retained. Thus, the oxidation of the article to be heated 101 can be efficiently suppressed. Thus, in addition to the large-diameter portion 321b, the water supply pipe 321 has a portion (small-diameter portion) 321a whose cross-sectional area decreases toward the steam generator 304, so that the water 332 does not pass therethrough. 321c becomes easier to form on the large diameter portion 321b side than the small diameter portion 321a, and a space for storing the oxygen replaced with the replacement gas can be ensured, and once the substituted oxygen enters the water again It is possible to prevent dissolution.

  Further, in the third embodiment, the water supply pipe 321 has been described using an example in which the inner diameter is small at the small diameter portion 321a in the vicinity of the steam generator 304. However, the water supply pipe 221 is not necessarily cylindrical in shape. It is not necessary to be any, and any cylindrical member such as a rectangular cylindrical shape may be used.

  Further, although the gas release valve 322 has been described using an example of a pressure type gas release valve, it is needless to say that the control method is not limited to the pressure type. Further, there may be a mechanism that can release the released oxygen to the outside without installing a valve.

(Fourth embodiment)
FIG. 4 is a schematic cross-sectional view showing the positional relationship between the superheat heat source of the superheated steam treatment device 400 and the portion where the steam introduction pipe 406 is connected to the process chamber 402 in the fourth embodiment of the present invention. Since the configuration of the entire superheated steam treatment apparatus and the components other than the steam introduction pipe 406 are the same as those in FIG. 1 referred to in the description of the first embodiment, their illustration and description are omitted. Further, since the operation method is substantially the same as that of the first embodiment, description thereof is omitted.

  The superheated steam treatment method and apparatus 400 according to the fourth embodiment is characterized in that a plasma generation source 431 as an example of an energy generation source is provided in a steam introduction pipe 406 between the superheat source 405 and the processing chamber 402 in FIG. Is that it is installed.

  In the fourth embodiment, plasma as an example of energy is generated by the plasma generation source 431, and the generated plasma is applied to water vapor and supplied to the processing chamber 402, while superheated water vapor treatment is performed in the same manner as in the first embodiment. The gas containing hydrogen is supplied into the water 132, 232, 332 supplied to the steam generators 104, 204, 304 from the nitrogen gas supply source 131, etc. via the gas supply pipe 112, etc. as a replacement gas. Thus, steam is generated by the steam generators 104, 204, and 304. If comprised in this way, it will be possible to dissociate a part of hydrogen contained in the water vapor | steam heated with the superheated heat source 405 during the superheated water vapor | steam process by the plasma provided to the said water vapor | steam, and to increase a reduction effect | action. Become. That is, not only the oxidation of the object to be heated 101 is suppressed, but also the object to be heated 101 can be efficiently reduced.

  In the fourth embodiment, the example in which the plasma generation source 431 is installed in the steam introduction pipe 406 between the superheat source 405 and the processing chamber 402 has been described. However, after the steam is heated by the superheat source 405, As long as the heated water vapor reaches the article to be heated 101, it may be installed in the processing chamber 402.

  In the fourth embodiment, the example using the plasma generation source 431 has been described. However, other devices may be used as long as the energy source has an action of dissociating hydrogen gas. Other examples of such energy include UV (ultraviolet) irradiation or heating (thermal energy).

  Moreover, it cannot be overemphasized that you may combine with the example shown in arbitrary embodiment of 1st-3rd embodiment.

  In addition, this invention is not limited to the said embodiment, It can implement in another various aspect.

  For example, in each of the above embodiments, the replacement gas introduced from the gas supply pipes 112, 212, and 312 is nitrogen gas as an example, but another example of the replacement gas is an inert gas such as argon gas. It doesn't matter.

  Further, if the replacement gas is a gas containing hydrogen, the metal oxidation can be further suppressed by the reducing action of hydrogen.

  Moreover, although the gas supply pipes 112, 212, and 312 are one, there may be a plurality of them.

  In addition, it can be made to show the effect which each has by combining arbitrary embodiment or modification of the said various embodiment or modification suitably.

  The superheated steam treatment method and apparatus of the present invention can reduce the oxygen concentration in steam in the heat treatment of an object to be heated that needs to be prevented from being oxidized. Therefore, a recycling process for extracting metal from a composite material of metal and organic matter or It can be used in heat treatment processes in various industrial fields such as treatment of functional materials.

100, 200, 300, 400 Superheated steam treatment apparatus 100a, 200a, 300a Water supply mechanism 100b, 200b, 300b Gas supply mechanism 101 Heated object 102, 402 Processing chamber 103 Stage 104, 204, 304 Steam generator 105, 405 Superheat Heat source 106, 406 Steam inlet pipe 111 Tank 112, 212, 312 Gas supply pipe 112a, 212a, 312a Lower end of gas supply pipe 113 Oxygen concentration measuring device 130, 221 and 321 Water supply pipe 131, 231, 331 Nitrogen gas supply source 132 232, 332 Water 221a First lateral connection part 221b Approximate vertical part 221c Second lateral connection part 221d Space through which water does not pass 222, 322 Gas discharge valve 321a Small diameter part 321b Large diameter part 321c Space through which water does not pass 431 Plastic Zuma source

Claims (11)

In the superheated steam treatment method in which the steam generated by the steam generator is heated by a superheat source and then sent to the processing chamber for processing.
Supplying a replacement gas to the water before being sent to the steam generator, replacing oxygen dissolved in the water in advance with the replacement gas,
A superheated steam treatment method in which after the oxygen dissolved in the water is replaced with the replacement gas, the water in which the replacement gas is dissolved is sent to the steam generator, and steam is generated by the steam generator.   The superheated steam treatment method according to claim 1, wherein an inert gas is supplied as the replacement gas when the replacement gas is supplied to the water before being fed into the steam generator.   The superheated steam treatment method according to claim 1, wherein when the replacement gas is supplied to the water before being fed to the steam generator, a gas containing hydrogen is supplied as the replacement gas.   When the water in which the replacement gas is dissolved is sent to the steam generator, the water vapor is generated by the steam generator, and the water vapor generated by the steam generator is heated by the superheat heat source, one of the replacement gases The superheated steam treatment method according to any one of claims 1 to 3, wherein the part is dissociated. A steam generator for supplying water and generating water vapor from the supplied water;
A superheat source for heating the water vapor generated by the steam generator;
A treatment chamber that is heated by the superheat source and the steam is fed to perform a superheated steam treatment of an object to be treated;
Furthermore, the superheated steam processing apparatus provided with the gas supply mechanism which supplies the replacement gas replaceable with the oxygen dissolved in the water before sending to the steam generator to the water supply pipe of the water supplied to the steam generator. A tank for storing the water is connected to the water supply pipe that supplies the steam generator, and the gas supply mechanism is disposed in the tank,
The replacement gas is supplied from the gas supply mechanism to the water in the tank before being sent to the steam generator, so that the replacement gas and oxygen dissolved in the water are replaced. The superheated steam treatment device according to claim 5.   The superheated steam treatment device according to claim 5 or 6, wherein the gas supply mechanism has a bubble formation mechanism that supplies the replacement gas in a bubble shape to the water.   The said water supply pipe supplied to the said steam generator has any one part of a cross-sectional area larger than the cross-sectional area of the said water supply pipe in the connection part with the said steam generator. The superheated steam treatment apparatus according to item.   The superheated steam processing apparatus according to claim 8, wherein a cross-sectional area of the water supply pipe supplied to the steam generator has a portion that decreases toward the steam generator.   The superheated steam treatment device according to claim 8 or 9, wherein the water supply pipe supplied to the steam generator has at least one portion that is not horizontal.   The superheat according to any one of claims 5 to 10, wherein an energy generation source that imparts energy to the water vapor that is heated by the superheat source and is supplied to the processing chamber is installed downstream of the superheat source. Steam treatment equipment.

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