JP2015166140A - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Abstract

A liquid ejecting head and a liquid ejecting apparatus are provided that can prevent liquid flowing out from a connecting portion of a flow path member from reaching a head substrate. A head body 150 for ejecting ink, a head substrate 170 for driving the head body 150, an ink supply port for supplying ink from the outside, and a flow path for supplying ink to the head body 150 are formed. The path member and the ink that has flowed out to the upper surface and the side surface of the flow path member are guided in the plane direction of the head substrate 170, and the ink guided in the plane direction is guided in the third direction Z that is the thickness direction of the flow path member. A guide groove 200 that can be guided, and the second guide groove that guides the guide groove 200 in the third direction Z is disposed outside the head substrate 170 in the planar direction of the head substrate 170, and A wall portion protruding toward the head substrate 170 is provided between the two guide grooves and the end portion of the head substrate 170. [Selection] Figure 7

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as a liquid.

  As a liquid ejecting head that ejects liquid droplets, an ink jet recording head that ejects ink is known as an example of a liquid. The ink jet recording head includes a head main body that ejects ink, and a flow path member that is provided with a flow path for supplying ink from a liquid storage unit such as an ink cartridge to the head main body. Specifically, a head main body is provided on the recording medium side of the flow path member, and a head substrate that supplies a drive signal to the head main body is provided on the opposite side of the flow path member from the recording medium.

  The flow path member is provided with a connection portion to which a tube for supplying ink to the flow path member is connected. When a tube or the like is attached or detached from the connection portion, the ink may overflow around the connection portion, and this ink droplet may flow into the head substrate along the surface of the flow path member.

  In view of this, there has been proposed a recording head provided with a groove for guiding ink in order to protect the head substrate and the like from such ink. For example, the groove provided in the flow path member is provided so as to guide ink to the outside of the flow path member, for example, a carriage, from the upper surface (the surface opposite to the recording medium) of the flow path member to the side surface. Such grooves suppress ink from reaching the head substrate.

JP 2003-72053 A

  However, there is a possibility that the ink guided by the groove travels on the bottom surface of the flow path member on the recording medium side and reaches the head substrate side, so that all possible measures are taken to protect the electronic circuit and electronic components of the head substrate from the ink. There is a need.

  Such a problem exists not only in an ink jet recording head but also in a liquid ejecting head that ejects liquid other than ink.

  In view of such circumstances, it is an object of the present invention to provide a liquid ejecting head and a liquid ejecting apparatus that can suppress the liquid flowing out from the connection portion of the flow path member from reaching the head substrate.

An aspect of the present invention that solves the above problems includes a head body that ejects liquid from a liquid ejection surface, a head substrate that is stacked on the head body and that drives the head body, and the head body is attached to the head substrate. A flow path member that is disposed on the side opposite to the disposed side and that has a connection portion to which a liquid is supplied from the outside, and a flow path for supplying the liquid from the connection portion to the head body; The liquid which is provided in the path member and flows out from the connection portion on the surface of the flow path member opposite to the head substrate and on the surface which is continuous with the surface and intersects the head substrate. A guide groove capable of guiding the liquid guided in the planar direction in the thickness direction of the flow path member, and guiding the guide groove in the thickness direction of the flow path member Is the plane direction of the head substrate The head substrate is disposed outside the head substrate, and the surface of the flow path member on the side where the head substrate is disposed is connected to the end of the head substrate from a portion that is guided in the thickness direction of the flow path member. In the liquid jet head, a wall portion protruding from the surface to the head substrate side is provided between the first portion and the second portion.
In this aspect, when the liquid flows out from the connecting portion, the liquid is guided to the guide groove along the surface of the flow path member, and further, the liquid is flow path member by a portion that is guided in the thickness direction of the guide groove. Reaches the bottom of the head substrate side. The liquid is suppressed from entering the head substrate side by providing the wall portion. Therefore, it is possible to suppress the liquid from coming into contact with the head substrate to cause a short circuit, and it is possible to suppress the liquid ejection failure and the head substrate destruction. Thereby, a liquid jet head with improved reliability is provided.

  Here, a concave portion surrounding the connection portion is provided on the surface of the flow channel member opposite to the head substrate, and a guide flow channel that opens to the concave portion and communicates with the guide groove is provided. preferable. According to this, the liquid which flowed out from the connection part can be guide | induced to a guide groove via a guide flow path. That is, the liquid can be prevented from overflowing the upper surface of the flow path member and guided to the guide groove.

  Further, it is preferable that the wall portion is extended in a direction intersecting a transport direction in which a recording medium ejecting liquid from the liquid ejecting surface relatively moves. According to this, it can suppress more reliably that a liquid gets over a wall part along a conveyance direction, and reaches | attains a head board | substrate.

  The connecting portion is provided on a surface of the flow path member opposite to the head substrate, and the guide groove is provided on a side surface that is continuous with the opposite surface of the flow path member and intersects the liquid ejection surface. A first guide groove that guides the liquid in a planar direction of the head substrate, and a second guide groove that guides the liquid in the thickness direction of the flow path member continuously to the first guide groove, The wall portion is preferably provided between the second guide groove and the end portion of the head substrate. According to this, the liquid can be guided so as not to enter the head substrate by the first guide groove and the second guide groove.

  Further, the guide channel opens to the concave portion of the channel member and the side surface of the channel member, and the opening of the side surface is more than the first guide groove or the second guide groove. It is preferable to open on the opposite surface side. According to this, the liquid can be reliably guided from the guide channel by the first guide groove and the second guide groove.

According to another aspect of the invention, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspect.
In such an aspect, there is provided a liquid ejecting apparatus capable of suppressing the liquid flowing out from the connection portion of the flow path member from reaching the head substrate.

3 is a perspective view of a recording head according to Embodiment 1. FIG. FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a plan view of a connection portion side of the recording head according to the first embodiment. FIG. 3 is a front view of the recording head according to the first embodiment. FIG. 3 is a side view of the recording head according to the first embodiment. FIG. 5 is a cross-sectional view taken along line A-A ′ of FIG. 4. FIG. 5 is a sectional view taken along line B-B ′ of FIG. 4. FIG. 5 is a sectional view taken along line C-C ′ of FIG. 4. It is a disassembled perspective view of a head main body. FIG. 4 is a plan view of the liquid ejection surface side of the head body. FIG. 12 is a sectional view taken along line DD ′ of FIG. 1 is a schematic diagram illustrating an example of an ink jet recording apparatus.

<Embodiment 1>
Hereinafter, the present invention will be described in detail based on embodiments. An ink jet recording head is an example of a liquid ejecting head, and is also simply referred to as a recording head.

  1 is a perspective view of a recording head according to Embodiment 1, FIG. 2 is an exploded perspective view of the recording head, FIG. 3 is an exploded perspective view of the recording head, and FIG. 4 is a connection side of the recording head. FIG. 5 is a front view of the recording head, FIG. 6 is a side view of the recording head, FIG. 7 is a cross-sectional view taken along line AA ′ of FIG. 4, and FIG. FIG. 9 is a cross-sectional view taken along line -B ′, and FIG. 9 is a cross-sectional view taken along line CC ′ of FIG.

  The recording head 1 includes a flow path member 130, a holding member 140 fixed to the flow path member 130, a plurality of head main bodies 150 fixed to the holding member 140, and a cover head that covers the liquid ejection surface side of the head main body 150. 160.

  First, the head main body 150 will be described in detail with reference to FIGS. 10 is an exploded perspective view of the head main body, FIG. 11 is a plan view of the liquid ejection surface side of the head main body, and FIG. 12 is a cross-sectional view taken along the line DD ′ of FIG.

  The head main body 150 of the present embodiment includes a plurality of members such as the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, the protective substrate 30, and the case member 40, and the plurality of members are joined together by an adhesive or the like. Yes.

  In the present embodiment, in the first direction X, one end side where a flow path member 130 described later in detail protrudes from the holding member 140 is referred to as the X2 side, and the other end side on the opposite side is referred to as the X1 side. The second direction Y is defined as a direction intersecting with the first direction X and in which head bodies described later are arranged in parallel. Furthermore, a direction that intersects both the first direction X and the second direction Y is referred to as a third direction Z. In this embodiment, the relationship between the directions (X, Y, Z) is orthogonal to facilitate understanding of the explanation, but the arrangement relationship of the components should not necessarily be limited to the orthogonal relationship. To mention.

For the flow path forming substrate 10, a metal such as stainless steel or Ni, a ceramic material typified by ZrO ₂ or Al ₂ O ₃ , a glass ceramic material, an oxide such as MgO, LaAlO ₃ , or the like can be used. In the present embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate. This flow path forming substrate 10 is anisotropically etched from one side so that the pressure generating chambers 12 partitioned by the plurality of partition walls are arranged in parallel with a plurality of nozzle openings 21 through which ink is ejected. Side by side. In the present embodiment, this direction is the first direction, which is also referred to as a parallel direction of the pressure generating chambers 12. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X, and in this embodiment, two rows. The row of the pressure generating chambers 12 in which the pressure generating chambers 12 are formed along the first direction X is the second direction.

  In the present embodiment, the two rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X have the first row of the pressure generation chambers 12 being the first row of the pressure generation chambers 12. It is arranged at a position shifted in the first direction X by half of the interval between the pressure generating chambers 12 adjacent in the direction X. As a result, the nozzle openings 21 to be described in detail later are similarly arranged so that two rows of the nozzle openings 21 are shifted in the first direction X by a half interval, thereby doubling the resolution in the first direction X. . Of course, different positions of the pressure generation chambers 12 in the first direction X may be set to the same position, and different inks may be supplied for each column of the pressure generation chambers 12.

  A communication plate 15 is bonded to one surface side of the flow path forming substrate 10 (in the stacking direction and the −Z direction). The communication plate 15 is joined to a nozzle plate 20 having a plurality of nozzle openings 21 communicating with the pressure generating chambers 12.

  The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generation chamber 12 and the nozzle opening 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. Thus, cost reduction can be achieved by making the area of the nozzle plate 20 relatively small.

  Further, the communication plate 15 is provided with a first manifold portion 17 that constitutes a part of the manifold 100 and a second manifold portion (throttle channel, orifice channel) 18.

  The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10).

  Further, the second manifold portion 18 is provided to open to the nozzle plate 20 side of the communication plate 15 without penetrating the communication plate 15 in the thickness direction.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion in the second direction Y of the pressure generation chamber 12 for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12.

  As the communication plate 15, a metal such as stainless steel or Ni, or a ceramic such as zirconium can be used. The communication plate 15 is preferably made of a material having the same linear expansion coefficient as the flow path forming substrate 10. That is, when a material having a linear expansion coefficient that is significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, warping due to a difference in linear expansion coefficient between the flow path forming substrate 10 and the communication plate 15 due to heating or cooling. Will occur. In this embodiment, by using the same material as the flow path forming substrate 10 as the communication plate 15, that is, a silicon single crystal substrate, it is possible to suppress the occurrence of warping due to heat, cracking due to heat, peeling, and the like.

  The nozzle plate 20 is formed with nozzle openings 21 communicating with the pressure generation chambers 12 via the nozzle communication passages 16. That is, the nozzle openings 21 that eject the same type of liquid (ink) are juxtaposed in the first direction X, and a row (nozzle row) of nozzle openings 21 juxtaposed in the first direction X is provided. Two rows are formed in the second direction Y. In the present embodiment, the surface on the side opposite to the pressure generation chamber 12 of the nozzle plate 20 from which ink droplets are ejected is the liquid ejection surface 20a. Further, the direction orthogonal to the liquid ejection surface 20a, that is, the third direction Z is a liquid ejection direction in which ink is ejected.

  As such a nozzle plate 20, for example, a metal such as stainless steel (SUS), an organic substance such as a polyimide resin, a silicon single crystal substrate, or the like can be used. In addition, by using a silicon single crystal substrate as the nozzle plate 20, the linear expansion coefficients of the nozzle plate 20 and the communication plate 15 are made equal, and the occurrence of warpage due to heating or cooling, cracks due to heat, peeling, and the like are suppressed. can do.

  On the other hand, a diaphragm 50 is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15. In the present embodiment, an elastic film 51 made of silicon oxide provided on the flow path forming substrate 10 side and an insulator film 52 made of zirconium oxide provided on the elastic film 51 are provided as the diaphragm 50. I made it. The liquid flow path such as the pressure generation chamber 12 is formed by anisotropically etching the flow path forming substrate 10 from one side (the side where the nozzle plate 20 is bonded). The other surface of the liquid flow path is defined by the elastic film 51.

  Further, on the insulator film 52 of the vibration plate 50, the first electrode 60, the piezoelectric layer 70, and the second electrode 80 are laminated and formed by film formation and lithography in this embodiment. 300. Here, the piezoelectric actuator 300 refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one electrode of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In addition, here, a portion that is configured by any one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric distortion is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the first electrode 60 is used as a common electrode for the piezoelectric actuator 300 and the second electrode 80 is used as an individual electrode for the piezoelectric actuator 300. However, there is no problem even if this is reversed for the convenience of the drive circuit and wiring. In the above-described example, since the first electrode 60 is continuously provided across the plurality of pressure generating chambers 12, the first electrode 60 functions as a part of the diaphragm, but of course, the present invention is not limited thereto. For example, only one of the first electrodes 60 may act as a diaphragm without providing one or both of the elastic film 51 and the insulator film 52 described above.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the piezoelectric actuator 300 side. The protective substrate 30 has a holding portion 31 that is a space for protecting and accommodating the piezoelectric actuator 300. Further, the protective substrate 30 is provided with a through hole 32 penetrating in the third direction Z which is the thickness direction. The other end portion of the lead electrode 90 opposite to the one end portion connected to the second electrode 80 is extended so as to be exposed in the through hole 32, and the lead electrode 90 and the drive circuit 120 such as a drive IC are connected. The mounted wiring member 121 is electrically connected in the through hole 32.

  Further, a case member 40 that defines the manifold 100 communicating with the plurality of pressure generating chambers 12 together with the head main body 150 is fixed to the head main body 150 having such a configuration. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15 described above. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. Thus, the third manifold portion 42 is defined by the case member 40 and the head main body 150 on the outer peripheral portion of the flow path forming substrate 10. The manifold 100 of the present embodiment is configured by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15, and the third manifold portion 42 defined by the case member 40 and the head main body 150. It is configured.

  In addition, as a material of case member 40, resin, a metal, etc. can be used, for example. Incidentally, the case member 40 can be mass-produced at low cost by molding a resin material.

  A compliance substrate 45 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 open. The compliance substrate 45 seals the openings of the first manifold portion 17 and the second manifold portion 18 on the liquid ejection surface 20a side.

  In this embodiment, the compliance substrate 45 includes a sealing film 46 and a fixed substrate 47. The sealing film 46 is made of a flexible thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS) or stainless steel (SUS)), and the fixed substrate 47 is made of stainless steel ( It is formed of a hard material such as a metal such as SUS. Since the region of the fixed substrate 47 facing the manifold 100 is an opening 48 that is completely removed in the thickness direction, one surface of the manifold 100 is sealed only with a flexible sealing film 46. The compliance portion 49 is a flexible portion.

  The case member 40 is provided with an introduction path 44 that communicates with the manifold 100 and supplies ink to each manifold 100. In the present embodiment, since two independent manifolds 100 are provided in one head main body 150, two introduction paths 44 are provided for each manifold 100, that is, a total of two introduction paths 44. The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring member 121 is inserted.

  In the head main body 150 having such a configuration, when ink is ejected, the ink is taken in from the introduction path 44 from the liquid storage means via the flow path member 130, and the inside of the flow path is reached from the manifold 100 to the nozzle opening 21. Fill with. Thereafter, according to a signal from the drive circuit 120, a voltage is applied to each piezoelectric actuator 300 corresponding to the pressure generating chamber 12, so that the diaphragm 50 is bent and deformed together with the piezoelectric actuator 300. As a result, the pressure in the pressure generating chamber 12 is increased and ink droplets are ejected from the predetermined nozzle openings 21.

  As shown in FIG. 3, four such head bodies 150 are fixed to the holding member 140 at a predetermined interval in the arrangement direction of the nozzle rows, that is, in the second direction Y. That is, the recording head 1 is provided with eight nozzle rows in which the nozzle openings 21 are arranged in parallel. In this way, by increasing the number of nozzle rows using a plurality of head main bodies 150, it is possible to prevent a decrease in yield as compared to forming a plurality of nozzle rows in one head main body 150. In addition, by using a plurality of head main bodies 150 in order to increase the number of nozzle arrays, the number of head main bodies 150 that can be formed from one silicon wafer can be increased, and a wasteful area of the silicon wafer can be reduced. This can reduce the manufacturing cost.

  The holding member 140 will be described in detail with reference to FIGS. 3 and 7. The holding member 140 is provided with a head main body holding portion 141 in which the head main body 150 is accommodated and held on one surface side (recording sheet S side) in the third direction Z. The head main body holding portion 141 has a concave shape that opens on the surface of the holding member 140 on the recording sheet S side. The head main body holding portion 141 is formed in a size that can accommodate the four head main bodies 150. In the head main body holding part 141, four head main bodies 150 are accommodated. The holding member 140 holds the head body 150 by fixing the surface opposite to the liquid ejection surface 20 a of the case member 40 of the head body 150 to the bottom surface of the head body holding portion 141.

  A cover head 160 that covers the opening of the head main body holding portion 141 is provided on the surface of the holding member 140 on the head main body holding portion 141 side.

  The cover head 160 is made of a plate-like member having an exposed opening 161 that exposes the liquid ejection surface 20a of the head body 150. Four exposure openings 161 are formed so as to expose the liquid ejection surfaces 20a of the head bodies 150 independently (see FIG. 3).

  Such a cover head 160 is bonded to the side of the compliance substrate 45 opposite to the communication plate 15 and suppresses ink from adhering to the compliance portion 49.

  Further, on the other surface side of the holding member 140 in the third direction Z, that is, on the flow path member 130 side, a wiring board holding portion 142 in which the head substrate 170 is housed is provided. In the wiring board holding unit 142, the head board 170 is disposed so that one side faces a surface on which the ink droplets of the recording sheet S land, that is, a so-called printing surface. The head substrate 170 is formed of a rigid substrate in the present embodiment, and is accommodated in the wiring substrate holding unit 142 so that the head substrate 170 is in a plane direction including the first direction X and the second direction Y.

  As will be described in detail later, the wiring board holding part 142 is sealed by the flow path member 130 at the opening opposite to the liquid ejection surface 20a in the third direction Z. As a result, the head substrate 170 is accommodated in the wiring substrate holding part 142 of the holding member 140. Thus, by accommodating the head substrate 170 in the holding member 140, it is possible to suppress a short circuit of wiring due to ink adhering to the head substrate 170, a failure of the mounted electronic component, or the like.

  The holding member 140 is provided with a connection channel 143 for supplying the ink supplied from the channel member 130 to the head main body 150. In the present embodiment, the connection channel 143 is provided for each introduction path 44 of the head body 150. That is, since two introduction paths 44 are provided in one head main body 150, a total of eight connection flow paths 143 are provided for the four head main bodies 150. Note that the connection flow path 143 is provided so that one end thereof is open to the end surface of the first protrusion 144 provided so as to protrude into the wiring board holding part 142. Further, the other end of the connection channel 143 is provided to be opened on the bottom surface of the head main body holding portion 141. One end that opens to the end surface of the first protrusion 144 is connected to the flow path member 130, and the other end that opens to the bottom surface of the head main body holding portion 141 is connected to the introduction path 44 of the head main body 150. As a result, the ink from the flow path member 130 is supplied to the head main body 150 via the connection flow path 143.

  Further, the holding member 140 has a wiring member insertion hole 145 for inserting the wiring member 121 between two connection flow paths 143 provided for each head body 150 in the first direction X. Is provided. The wiring member insertion hole 145 is inserted through the connection port 43 of the head main body 150 to insert the wiring member 121 from the head main body 150 side to the flow path member 130 side. Such a wiring member insertion hole 145 is provided with an opening having a width substantially the same as the width of the head body 150 in the first direction X.

  Further, the head substrate 170 is provided with a first insertion hole 171 through which the first protrusion 144 is inserted, and a second insertion hole 172 through which the wiring member 121 is inserted. The wiring member 121 inserted through the second insertion hole 172 is connected to the head substrate 170 on the surface opposite to the liquid ejection surface 20a. The connection method between the head substrate 170 and the wiring member 121 is not particularly limited. For example, brazing such as soldering or brazing, eutectic bonding, welding, or a conductive adhesive containing conductive particles (ACP, ACF), non-conductive adhesive (NCP, NCF) and the like.

  In addition, the head substrate 170 is provided with connectors 173 at both ends in the first direction X. In the present embodiment, the connector 173 is fixed on the opposite side of the head substrate 170 from the head body 150 in the third direction Z. The holding member 140 is provided with a connection hole 146 on the side wall facing the connector 173 so as to communicate the wiring board holding part 142 with the outside. The connector 173 is exposed to the outside through the connection hole 146. As a result, a flexible substrate such as an FPC or FFC is connected to the connector 173 from the outside of the recording head 1 (see FIG. 1). That is, the flexible substrate that is the external wiring connected to the connector 173 of the present embodiment is led out in the second direction Y of the recording head 1.

  As shown in FIGS. 1, 2, 7, and 8, the flow path member 130 is joined to the wiring board holding part 142 side of the holding member 140.

  As shown in the drawing, the flow path member 130 includes a case member 131, and a flow path forming member 135 and a supply member 136 accommodated in the case member 131.

  The case member 131 has a hollow box shape, and is configured by fixing two members divided into a first case member 132 and a second case member 133. Inside the case member 131, a housing portion 134 that is a space is formed, and the flow path forming member 135 is housed in the housing portion 134.

  The flow path forming member 135 accommodated in the case member 131 is not particularly shown, but for example, a filter that removes bubbles or foreign matters contained in the ink or a flow path that opens and closes according to the pressure of the ink in the flow path It is a functional member provided with each functional part, such as a valve body. Further, the flow path forming member 135 may be provided with heating means such as a heater.

  In such a flow path forming member 135, a flow path 1351 is provided, and one end of the flow path 1351 is provided open to the first case member 132 side, and a connection portion to which ink is supplied. The ink supply port 1352 is an example. The other end of the flow path 1351 is an ink discharge port 1353 that opens to the second case member 133 side.

  A first opening 1321 and a second opening 1322 are provided on the surface of the first case member 132 opposite to the head substrate 170 as a recess surrounding the ink supply port 1352, which is an example of a connection portion. .

  The first opening 1321 is provided through the first case member 132 in the third direction Z so that the ink supply port 1352 is exposed.

  The second opening 1322 is provided as a recess provided in the surface of the first case member 132. The second opening 1322 includes the first opening 1321 on the inner side and is larger than the first opening 1321.

  The ink supply port 1352 exposed by the first opening 1321 and the second opening 1322 is connected to a liquid storage unit such as an ink cartridge directly or via a supply pipe such as another flow path member or a tube. Is supplied. The ink supply port 1352 is an example of a connection part to which ink is supplied in this way, and is a part where a liquid storage unit, the supply pipe, and the like are attached and detached. During this attachment / detachment, ink may flow out from the liquid storage means, the supply pipe, or the ink supply port 1352. The ink flowing out from the ink supply port 1352 is guided to a guide groove 200 described later.

  The first case member 132 is provided with a first guide channel 1323, and the second case member 133 is provided with a second guide channel 1333.

  The first guide channel 1323 is formed as a through-hole penetrating the first case member 132 in the third direction Z. One opening is formed in the bottom surface of the second opening 1322, and the other opening is It is formed on the second case member 133 side.

  The second guide channel 1333 is formed as a recess that opens to the upper surface of the second case member 133 on the first case member 132 side and the side surface continuous with the upper surface. The first guide channel 1323 communicates with the second guide channel 1333 and forms one guide channel. In the present embodiment, two first guide channels 1323 and two second guide channels 1333 are provided at both ends of the second opening 1322 in the second direction Y, respectively.

  The guide channel composed of the first guide channel 1323 and the second guide channel 1333 is a channel that guides the ink that has flowed out from the ink supply port 1352 that is the connection portion to the guide groove 200 described later from the second opening 1322. is there.

  In the present embodiment, the guide channel is formed from the first guide channel 1323 and the second guide channel 1333, but the present invention is not limited to such a mode. For example, the second guide channel 1333 may be formed not as a recess, but as a channel opened on the upper surface of the second case member 133 on the first case member 132 side and the side surface continuous to the upper surface. In addition, the first guide channel 1323 is opened on the bottom surface of the second opening 1322, but may be opened on the inner surface of the first opening 1321.

  A supply member 136 is provided between the second case member 133 and the flow path forming member 135.

  The supply member 136 is provided with a first supply flow path 1361 that communicates with the flow path 1351 (see FIG. 2) of the flow path forming member 135 and communicates with the holding member 140. The first supply channel 1361 is provided with one end opened to the end surface of the second protrusion 1362 provided to protrude toward the channel forming member 135. Further, the other end of the first supply channel 1361 is opened to the second case member 133 side, and a first liquid reservoir portion 1362 having an enlarged inner diameter is provided on the second case member 133 side. Yes.

  A second supply channel 1331 is provided in the second case member 133. An opening portion of the second supply channel 1331 on the supply member 136 side is a second liquid reservoir portion 1332 that is widened corresponding to the first liquid reservoir portion 1362, and an opening portion of the second liquid reservoir portion 1332 ( Between the first liquid reservoir 1362 and the second liquid reservoir 1332), a filter 137 for removing bubbles and foreign matters contained in the ink is provided. Thereby, the ink supplied from the first supply channel 1361 is supplied to the second supply channel 1331 via the filter 137.

  Further, the second supply flow path 1331 is branched into two on the downstream side (holding member 140 side) from the second liquid reservoir portion 1332. That is, in the present embodiment, the supply member 136 is provided with four first supply channels 1361, and the second case member 133 is provided with eight second supply channels 1331.

  In this way, by reducing the number of first supply flow paths 1361 upstream of the filter 137, the flow path member 130 is prevented from increasing in size in order to secure a region for forming the first supply flow path 1361. be able to. Further, by providing one common filter 137 for two of the second supply flow paths 1331 downstream of the filter 137, the area where the filter 137 is joined and the adjacent first liquid reservoir 1362 (second It is possible to reduce the size of the flow path member 130 by reducing a space for providing a wall or the like that isolates the liquid reservoirs 1332) from each other.

  Such a flow path member 130 is fixed to the wiring board holding part 142 side of the holding member 140. Further, between the holding member 140 and the flow path member 130, a seal member 180 provided with a connection communication path 181 for connecting the connection flow path 143 and the second supply flow path 1331 is provided. The connection channel 143 and the second supply channel 1331 are connected in a sealed state by the seal member 180.

  The flow path member 130 has a width that is larger in the first direction X than the holding member 140. This is because, as described above, the flow path forming member 135 is a functional member in which each functional unit such as a filter, a valve body, and a heating means is provided, This is because a region for routing the flow path 1351 to the functional unit is necessary. That is, it is substantially difficult to reduce the width of the flow path member 130 in the first direction X to the same width as the holding member 140, and the holding member 140 side is the same as the flow path member 130 in the first direction. If the width is increased to X, the recording head 1 is increased in size, particularly the liquid ejecting surface 20a side. Therefore, the flow path member 130 of the present embodiment is provided so as to protrude from the X2 side in the first direction X with respect to the holding member 140.

  As described above, the head main body 150, the holding member 140, the head substrate 170, and the flow path member 130 are stacked along the third direction Z. A head substrate 170 is laminated on the head main body 150 held by the holding member 140. The term “lamination” as used herein means that the head substrate 170 is in direct contact with the head main body 150, and other components (the holding member 140 in this embodiment) are interposed between the head main body 150 and the head substrate 170. However, this includes cases where it is assembled indirectly. The flow path member 130 is disposed on the side opposite to the side on which the head main body 150 is disposed with respect to the head substrate 170. The term “lamination” as used herein means that the head substrate 170 is in direct contact with the flow path member 130 and other components (the seal member 180 in this embodiment) between the flow path member 130 and the head substrate 170. Including the case of being indirectly assembled.

  Here, the guide groove 200 and the wall portion 250 provided in the recording head 1 will be described in detail with reference to FIGS. 1, 2, 4 to 6 and 9.

  In the flow path member 130, the ink that flows out from the ink supply port 1352 to the surface of the flow path member 130 on the side opposite to the head substrate 170, and the surface that continues to the surface and intersects the head substrate 170 is supplied to the head substrate 170. The guide groove 200 is provided that can guide the ink guided in the planar direction of the head substrate 170 in the third direction Z that is the thickness direction of the flow path member 130.

  In the present embodiment, the flow path member 130 includes a first case member 132 and a second case member 133. Therefore, the surface of the flow path member 130 opposite to the head substrate 170 is the upper surface 1324 of the first case member 132 opposite to the head substrate 170. Further, the surface that continues to the upper surface 1324 and intersects with the head substrate 170 includes the first side surface 1325 that continues to the upper surface 1324 of the first case member 132 and intersects the head substrate 170, and the head of the second case member 133. The second side surface 1334 intersects the substrate 170. Here, the head substrate 170 is parallel to the first direction X and the second direction Y, and the first side surface 1325 and the second side surface 1334 are perpendicular to the head substrate 170, that is, in the third direction Z. It is parallel. Note that the first side surface 1325 and the second side surface 1334 are combined to form a side surface 1315.

  The ink that flows out from the ink supply port 1352 is stored in the first opening 1321 and the second opening 1322. Furthermore, in the present embodiment, the ink in the second opening 1322 is guided to the guide groove 200 via a first guide channel 1323 and a second guide channel 1333 which will be described later. Therefore, in principle, the ink supply port 1352 is prevented from flowing out to the upper surface 1324 and the side surface 1315 of the flow path member 130.

  However, depending on the volume and shape of the first opening 1321 and the second opening 1322, the ink may overflow from the second opening 1322 and flow out to the upper surface 1324 and the side surface 1315.

  The guide groove 200 guides the ink flowing out to the upper surface 1324 and the side surface 1315 in the plane direction of the head substrate 170, and further guides the ink guided in the plane direction in the third direction Z.

  The plane direction of the head substrate 170 includes not only a case parallel to the plane of the head substrate 170 but also a direction intersecting the plane. That is, the plane direction of the head substrate 170 includes directions other than perpendicular to the plane of the head substrate 170. The guide groove 200 guiding the ink in the third direction Z includes not only a direction parallel to the third direction Z but also a direction intersecting the third direction Z. That is, the direction other than the direction perpendicular to the third direction Z is included.

  The guide groove 200 according to the present embodiment includes a first guide groove 201 capable of guiding ink in the planar direction of the head substrate 170 and a second guide capable of guiding the ink in the third direction Z. A groove 202.

  On the second side surface 1334 of the second case member 133, a protruding portion 210 protruding sideways is formed. In the present embodiment, the protrusions 210 are formed on the two second side surfaces 1334 on both sides of the second case member 133 in the second direction Y. The first guide groove 201 is formed in the protrusion 210 as a groove that opens to the opposite side of the head substrate 170. Further, the first guide groove 201 is formed in a long shape along the second direction Y.

  According to such a first guide groove 201, it is possible to receive ink that has flowed to the second side surface 1334 and guide the ink in the plane direction of the head substrate 170.

  Here, as will be described later, the second direction Y is a direction in which the recording head 1 moves relative to the recording medium. Therefore, the ink that has flowed out to the upper surface 1324 of the first case member 132 tends to move along the second direction Y. Therefore, a large amount of ink on the upper surface 1324 flows out to the second side surfaces 1334 on both sides of the second case member 133 in the second direction Y.

  As described above, since the first guide groove 201 is provided on the second side surface 1334 from which a large amount of ink flows out, the ink can be more effectively collected by the first guide groove 201.

  In the present embodiment, the first guide grooves 201 are provided on the two second side surfaces 1334 as described above, but the present invention is not limited to such a mode. For example, the first guide groove 201 may be provided over the entire circumference of the second side surface 1334 of the second case member 133.

  The second guide groove 202 is formed as a groove continuous with the first guide groove 201 on the X2 side in the first direction X in the end portion of the protrusion 210. The second guide groove 202 is formed to guide the ink along the third direction Z. In the present embodiment, two second guide grooves 202 are respectively provided corresponding to the two first guide grooves 201.

  According to the second guide groove 202, the ink guided in the plane direction of the head substrate 170 by the first guide groove 201 can be further guided along the third direction Z. The length of the second guide groove 202 in the third direction Z is not particularly limited, but is preferably provided below the lower surface of the second case member 133 (the surface on the head substrate 170 side). .

  Such a guide groove constituted by the first guide groove 201 and the second guide groove 202 is configured so that ink flowing out from the ink supply port 1352 to the upper surface 1324 and the side surface 1315 along the third direction Z by the second guide groove 202. To a specific location.

  “The portion of the guide groove that guides in the thickness direction of the flow path member” described in the claims refers to a portion of the guide groove 200 that causes the ink to run along the third direction Z. The guide groove 202 corresponds.

  The second guide groove 202 is disposed outside the head substrate 170 in the planar direction of the head substrate 170. Specifically, as shown in FIG. 4, in the plan view of the head substrate 170, that is, in the plan view of the recording head 1, the second guide groove 202 is closer to the X2 side in the first direction X than the head substrate 170. Arranged on the outside. In other words, the head substrate 170 and the second guide groove 202 do not overlap in the plan view.

  The ink guided to the second guide groove 202 falls downward in the vertical direction (−Z side in the third direction Z). At this time, since the second guide groove 202 is disposed outside the head substrate 170, it is possible to prevent the dropped ink from being settled on the head substrate 170.

  The surface of the flow path member 130 on the side where the head substrate 170 is disposed, in this embodiment, the surface of the second case member 133 on the side of the head substrate 170 is the third direction Z from the surface to the head substrate 170 side. A wall portion 250 protruding to the −Z side is provided.

  The wall portion 250 is provided between the second guide groove 202 and the end portion of the head substrate 170. That is, as shown in FIGS. 4 and 6, the wall portion 250 is disposed between the second guide groove 202 and the end portion of the head substrate 170 (the end portion on the X2 side in the first direction X). In the present embodiment, the wall portion 250 extends along the second direction Y, and is wider than the width of the flow path member 130 in the second direction Y. Both ends of the wall 250 in the second direction Y protrude from the flow path member 130 and are integrated with the protrusion 210 that forms the bottom of the second guide groove 202 described above.

  According to such a wall portion 250, the ink guided to the head substrate 170 side of the second case member 133 by the second guide groove 202 is suppressed from entering the head substrate 170 side. Further, the wall portion 250 is provided along the first direction X so as to be long. The second direction Y is a direction in which the recording head 1 moves relative to the recording medium, as will be described later. When the recording head 1 moves along the second direction Y, the ink guided by the second guide groove 202 and adhering to the surface of the second case member 133 on the head substrate 170 side is along the second direction Y. Move. That is, since the ink moves along the wall portion 250, it is possible to more reliably suppress the wall portion 250 from getting over to the X1 side in the first direction X and reaching the head substrate 170.

  Note that the wall portion 250 only needs to be between the second guide groove 202 and the end portion of the head substrate 170, and need not be integral with the second guide groove 202 as in the present embodiment. Further, the height of the wall 250 on the −Z side in the third direction Z is not particularly limited. Furthermore, although the wall part 250 was along the 2nd direction Y, it is not limited to this, You may be extended in the direction which cross | intersects the 2nd direction Y.

  As shown in FIG. 9, the flow path member 130 according to the present embodiment is provided with a first guide flow path 1323 and a second guide flow path 1333. Ink that has flowed out from the ink supply port 1352, which is an example of a connecting portion, is stored in the first opening 1321 and the second opening 1322. Accordingly, if the amount of ink is small, it is possible to suppress the ink from entering the head substrate 170 through the upper surface 1324 and the side surface 1315 (see FIG. 1 and the like) of the flow path member 130.

  A first guide channel 1323 is opened in the second opening 1322. A second guide channel 1333 communicates with the first guide channel 1323, and the second guide channel 1333 is open on the opposite side of the head substrate 170 from the guide groove 200 on the second side surface 1334. .

  Therefore, the ink stored in the second opening 1322 is guided to the first guide groove 201 via the first guide channel 1323 and the second guide channel 1333 or the second case member 133. To the surface of the head substrate 170 side. In any case, the ink is guided outside the wall portion 250 of the head substrate 170.

  As described above, the ink flowing out from the ink supply port 1352 can be guided to the guide groove 200 through the first guide channel 1323 and the second guide channel 1333. That is, the ink can be prevented from overflowing the upper surface 1324 of the flow path member 130 and guided to the guide groove 200.

  As described above, by providing the guide flow path, the path of the ink flowing out from the ink supply port 1352 can be controlled. If such a guide channel is not provided, the ink overflows the upper surface 1324 of the channel member 130, but the upper surface 1324 is guided to guide the ink overflowing the upper surface 1324 to the intended guide groove 200. Grooves must be formed on the surface. According to the recording head according to the present embodiment, it is not necessary to form a groove on the upper surface 1324, and the ink can be reliably guided by the guide groove 200.

  In the case where the first guide channel 1323 and the second guide channel 1333 according to the present embodiment are formed, the upper surface 1324 does not overflow with much ink, and the X1 side of the first guide groove 201 in the first direction X is the X1 side. The ink is rarely collected at the end. However, when an amount of ink overflowing from the second opening 1322 is generated, the ink is collected by the first guide groove 201. That is, according to the first guide groove 201 according to the present embodiment, even if the ink overflows from the second opening 1322, it is possible to more reliably suppress the ink from reaching the head substrate 170. it can.

  As described above, according to the recording head 1 according to the present embodiment, when ink flows out from the ink supply port 1352 which is an example of the connection portion, the ink travels along the surface of the flow path member 130 and is guided to the first guide. It is collected in the groove 201 and guided to the second guide groove 202, or is guided to the second guide groove 202 through the first guide channel 1323 and the second guide channel 1333. The ink guided to the second guide groove 202 is prevented from entering the head substrate 170 side by the wall portion 250. Therefore, it is possible to suppress the ink from coming into contact with the head substrate 170 to cause a short circuit, and it is possible to suppress the ejection failure of the ink and the destruction of the head substrate 170. Thereby, the recording head 1 with improved reliability is provided.

  In the recording head 1 according to this embodiment, the connector 173 of the head substrate 170 does not face the wall portion 250. Even if the ink guided to the second guide groove 202 reaches the head substrate 170 side beyond the wall 250, the possibility of reaching the connector 173 is reduced even if it reaches the wall surface of the holding member 140. be able to.

<Other embodiments>
As mentioned above, although one Embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above.

  For example, in the recording head 1 according to the first embodiment, the guide groove 200 is provided on the side surface 1315 of the flow path member 130, but is not limited to such a mode. For example, a groove corresponding to the first guide groove 201 is provided on the upper surface 1324 of the flow path member 130, a groove corresponding to the second guide groove 202 is provided on the first side surface 1325 and the second side surface 1334, and these grooves are communicated. It is good also as a guide groove.

  In the first embodiment, the first opening 1321 and the second opening 1322 are provided as the recesses around the ink supply port 1352 which is an example of the connection unit. However, the present invention is not limited to such an embodiment. May not be provided. In this case, the ink supply port 1352 appears on the upper surface 1324 of the flow path member 130, but it is preferable to provide a groove for guiding ink on the side surface 1315 of the flow path member 130 on the upper surface 1324. By providing such a groove, the ink can be guided to the side surface 1315, recovered by the guide groove 200, and guided along the third direction Z.

  In the first embodiment, the first guide channel 1323 and the second guide channel 1333 are provided. However, the present invention is not limited to such a mode, and the guide channels need not be provided. That is, in the recording head 1 having the ink supply port 1352 appearing on the upper surface 1324 of the flow path member 130 or the first opening 1321 and the second opening 1322 on the upper surface 1324, and having the ink supply port 1352 appearing therein. There may be. In such a case, the ink is transferred from the upper surface 1324 to the side surface 1315 of the flow path member 130 without passing through the first guide flow path 1323 and the second guide flow path 1333, and is collected by the guide groove 200, and is then removed in the third direction Z. Can be guided along.

  Furthermore, in the first embodiment, the flow path member 130 is provided with the first opening 1321 and the second opening 1322 as a recess, and the ink supply port 1352 is provided therein. The ink supply port 1352 is closer to the head substrate 170 than the first opening 1321. That is, the ink supply port 1352 does not protrude from the first opening 1321 on the side opposite to the head substrate 170. However, the ink supply port 1352 may protrude to the opposite side of the head substrate 170 from the first opening 1321 and the upper surface 1324 of the flow path member 130. Even in this case, the ink overflowing from the ink supply port 1352 falls into the first opening 1321 and is stored.

  Further, in each of the embodiments described above, the thin film piezoelectric actuator 300 has been described as the pressure generating means for causing a pressure change in the pressure generating chamber 12, but the present invention is not particularly limited thereto. For example, a green sheet is attached. It is possible to use a thick film type piezoelectric actuator formed by such a method, a longitudinal vibration type piezoelectric actuator in which piezoelectric materials and electrode forming materials are alternately stacked and expanded and contracted in the axial direction. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  The recording head 1 of each of these embodiments constitutes a part of an ink jet recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on an ink jet recording apparatus. FIG. 13 is a schematic view showing an example of the ink jet recording apparatus.

  The ink jet recording apparatus I includes a carriage 3 on which a recording head 1 is mounted. The carriage 3 is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be movable in the axial direction.

  Then, the driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the recording head 1 is mounted is moved along the carriage shaft 5. A direction (main scanning direction) along the carriage shaft 5 in which the recording head 1 moves is a second direction Y. On the other hand, the apparatus main body 4 is provided with a conveyance roller 8 as a conveyance means, and a recording sheet S which is a recording medium such as paper is conveyed by the conveyance roller 8 in a sub-scanning direction (first direction) perpendicular to the main scanning direction. X: transport direction). Note that the conveyance means for conveying the recording sheet S is not limited to the conveyance roller, and may be a belt, a drum, or the like.

  Further, the ink jet recording apparatus I is provided with a liquid storing means 2 such as an ink tank fixed to the apparatus main body 4 and storing ink therein. A supply pipe 2 a that supplies ink to the recording head 1 is connected to the liquid storage unit 2. The recording head 1 is provided with four ink supply ports 1352, and one supply pipe 2 a is connected to each ink supply port 1352. In the figure, the two supply pipes 2a are not shown.

  The supply pipe 2a is made of a tubular member such as a flexible tube, and is provided with a supply path for supplying ink therein. Then, one end of the supply pipe 2 a (supply path) is connected to the ink supply port 1352 of the recording head 1, whereby the ink of the liquid storage unit 2 is supplied to the recording head 1.

  Although not particularly illustrated, a pressure filling mechanism such as a pressure pump or a suction pump is provided in the middle of the supply pipe 2a, and ink is recorded from the liquid storage means 2 by the pressure feeding of the pressure filling mechanism. Supplied to the head 1.

  Further, the ink jet recording apparatus I is provided with a control device 9 that controls the operation of the ink jet recording apparatus I. One end of a wiring board 400 such as COF is connected to the connector 173 of the recording head 1, and the other end of the wiring board 400 is connected to the control device 9.

  In the inkjet recording apparatus I described above, the recording head 1 is mounted on the carriage 3 and moved in the main scanning direction. However, the present invention is not particularly limited thereto. For example, the recording head 1 is fixed, The present invention can also be applied to a so-called line type recording apparatus that performs printing only by moving a recording sheet S such as paper in the sub-scanning direction.

  In the above-described example, the ink jet recording apparatus I has a configuration in which the liquid storage unit 2 such as a cartridge is not mounted on the carriage 3 and ink is indirectly supplied to the recording head 1. Not. For example, the liquid storage unit 2 may be mounted on the carriage 3 and ink may be supplied directly to the recording head 1. Further, the liquid storage means may not be mounted on the ink jet recording apparatus I.

  Furthermore, the present invention is intended for a wide range of liquid jet heads in general, for example, for manufacturing recording heads such as various ink jet recording heads used in image recording apparatuses such as printers, and color filters such as liquid crystal displays. The present invention can also be applied to a coloring material ejecting head, an organic EL display, an electrode material ejecting head used for forming electrodes such as an FED (field emission display), a bioorganic matter ejecting head used for biochip manufacturing, and the like.

  In addition, the present invention is intended for a wide wiring mounting structure in general and can be applied to devices other than the liquid jet head.

  I ink jet recording apparatus (liquid ejecting apparatus), 1 ink jet recording head (liquid ejecting head), 10 flow path forming substrate, 20 nozzle plate, 20a liquid ejecting surface, 21 nozzle opening, 100 manifold, 121 wiring member, 130 flow Road member, 131 case member, 1315 side surface, 132 first case member, 1321 first opening (recess), 1322 second opening (recess), 1323 first guide channel (guide channel), 133 second case Member, 1333 second guide channel (guide channel), 1352 ink supply port (connecting portion), 140 holding member, 150 head body, 170 head substrate, 173 connector, 200 guide groove, 201 first guide groove, 202 first 2 guide grooves, 250 walls

Claims (6)

A head body for ejecting liquid from the liquid ejection surface;
A head substrate stacked on the head body and driving the head body;
A flow path that is disposed on the opposite side of the head substrate from the side on which the head main body is disposed, has a connection portion to which a liquid is supplied from the outside, and supplies the liquid from the connection portion to the head main body. A formed channel member;
Liquid that is provided in the flow path member and flows out from the connection portion to a surface of the flow path member opposite to the head substrate and a surface that is continuous with the surface and intersects the head substrate. A guide groove capable of guiding in the plane direction and capable of guiding the liquid guided in the plane direction in the thickness direction of the flow path member,
The portion of the guide groove that is guided in the thickness direction of the flow path member is disposed outside the head substrate in the plane direction of the head substrate,
The surface of the flow path member on the side on which the head substrate is disposed is between the portion that guides in the thickness direction of the flow path member and the end of the head substrate, from the surface to the head substrate side. A liquid ejecting head comprising a protruding wall portion. The liquid ejecting head according to claim 1,
On the opposite surface side of the flow path member from the head substrate, a concave portion surrounding the connection portion is provided,
A liquid jet head comprising: a guide channel that opens to the recess and communicates with the guide groove. The liquid ejecting head according to claim 1 or 2,
The liquid ejecting head, wherein the wall portion is extended in a direction intersecting a transport direction in which a recording medium ejecting liquid from the liquid ejecting surface relatively moves. In the liquid jet head according to any one of claims 1 to 3,
The connection portion is provided on the opposite surface of the flow path member from the head substrate,
The guide groove is provided on a side surface that is continuous with the opposite surface of the flow path member and intersects the liquid ejecting surface, and guides liquid in a plane direction of the head substrate; and the first guide A second guide groove for guiding the liquid in the thickness direction of the flow path member continuously with the groove,
The liquid ejecting head, wherein the wall portion is provided between the second guide groove and an end portion of the head substrate. The liquid ejecting head according to claim 4,
The guide channel opens to the concave portion of the channel member and the side surface of the channel member, and the opening of the side surface is more than the first guide groove or the second guide groove of the channel member. A liquid ejecting head having an opening on the opposite surface side.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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