JP2015152530A - Inspecting apparatus and inspecting method for single-layer inspection object - Google Patents

Abstract

An inspection apparatus for inspecting a single-layer type inspection object suppresses an increase in inspection circuits and provides a configuration capable of inspecting efficiently.
A sensor panel, which is an inspection object of a sensor panel inspection apparatus, includes a plurality of first electrodes and a plurality of second electrodes arranged in the same layer in the thickness direction. . The first electrodes 51 are arranged in a straight line. Each of the first electrodes 51 has an elongated portion 3 that is elongated in a direction perpendicular to the direction in which the first electrodes 51 are arranged. The second electrodes 52 are arranged in a matrix in the direction in which the first electrodes 51 are arranged and the direction along the elongated portion 3. The sensor panel inspection apparatus 1 includes a wired OR part 39 and a current detection part 41. The wired OR section 39 synthesizes the signal outputs of the corresponding ones of the second electrodes 52 in the direction in which the first electrodes 51 are arranged at the time of inspection. The current detection unit 41 detects the output of the wired OR unit 39.
[Selection] Figure 2

Description

  The present invention mainly relates to a panel-shaped inspection object inspection apparatus called a single layer type.

  2. Description of the Related Art Conventionally, a so-called capacitive type is known as a kind of touch panel device that detects a touch position. The sensor panel of the capacitive touch panel device has a structure in which a first pattern transparent conductive layer and a second pattern transparent conductive layer are provided on a transparent substrate formed of glass or the like, for example. ing. This patterned transparent conductive layer can be formed by forming a film using, for example, indium tin oxide (ITO).

  Each of the patterned transparent conductive layers functions as an electrode. Hereinafter, the first and second patterned transparent conductive layers may be referred to as a first electrode and a second electrode.

  There are various configurations of capacitive touch panels, but it is well known that M first electrodes are arranged in a straight line, and N second electrodes are arranged in a direction perpendicular to the first electrodes. In addition, the first electrode and the second electrode may be opposed to each other with a gap in the thickness direction of the sensor panel interposed therebetween and perpendicularly intersect each other. In this specification, a touch panel having this structure may be referred to as a “stacked type”.

  In a laminated touch panel, a kind of capacitor is formed at the intersection of the first electrode and the second electrode, and the capacitance of the capacitor changes when a conductive object (for example, a human body) approaches or contacts. . The touch panel device can detect the position touched by the sensor panel by detecting the change in capacitance. This method is called a so-called projected capacitance method, and is excellent in that the touch position can be detected with high accuracy.

  By the way, it is extremely important for the manufacturer of the touch panel device to inspect the sensor panel in order to avoid the introduction of defective products and ensure the quality of the product. In view of this, an apparatus for inspecting the above capacitive touch panel has been proposed (see, for example, Patent Document 1).

  Patent Document 1 discloses an inspection device for a laminated capacitive touch panel. In the inspection apparatus of this patent document 1, the voltage between both ends of the electrostatic capacitance between the electrode to be measured to be inspected and a specific counter electrode among the counter electrodes opposed to the electrode to be measured is a capacitance detection circuit. And the state of the electrode under measurement is determined based on the monitoring result. According to this apparatus, according to this apparatus, the sensor surface of a touch panel is directly inspected by an inspection apparatus by measuring a minute change in capacitance that occurs when a measured electrode and a counter electrode act as a kind of capacitor. Suppose that the state (for example, a fracture | rupture or a short circuit) of the to-be-measured electrode in a capacitive touch panel can be determined without touching.

International Publication No. 2011-121862 Pamphlet

  As described above, in the capacitive touch panel, a configuration in which electrodes that intersect perpendicularly to each other are arranged to face each other with a gap in the thickness direction of the sensor panel interposed therebetween is mainstream. However, it is difficult to reduce the thickness in this stacked configuration, and there is a limit to meet the demand for thinner and lighter smartphones and tablet PCs that are increasing in recent years.

  Therefore, a so-called single layer type touch panel has been proposed in which all electrodes (pattern transparent conductive layers) are arranged in one layer. Hereinafter, an example of this single layer type touch panel will be described with reference to FIG.

  In the sensor panel 50 of the touch panel device shown in FIG. 1, a plurality (M pieces) of first electrodes 51 are arranged in a straight line (in the horizontal direction in FIG. 1). Each of the first electrodes 51 has an elongated portion 3 elongated in a direction (vertical direction in FIG. 1) perpendicular to the direction in which the first electrodes 51 are arranged. In the sensor panel 50, the plurality of second electrodes 52 are arranged in a matrix (M × N) in the direction in which the first electrodes 51 are arranged and in the direction along the elongated portion 3. ing.

  Each of the second electrodes 52 includes a pair of (two) conductive portions 4 and 4 arranged so as to correspond in a direction perpendicular to the direction in which the first electrodes 51 are arranged. Therefore, it can be said that the sensor panel 50 has M conductive portions 4 arranged in the horizontal direction and 2 × N conductive portions 4 in the vertical direction. Each conductive part 4 is configured in a rectangular shape.

  The first electrode 51 is formed with a plurality of protruding portions 5 that protrude vertically from one side in the width direction of the elongated portion 3 so as to separate the arranged 2 × N conductive portions 4. . As a result, the first electrode 51 is configured in a comb-like shape as a whole having a large number of recesses, and has a layout in which the conductive portions 4 are arranged inside each recess. Each of the second electrodes 52 and 52 includes a lead portion 6, and the lead portion 6 electrically connects the two conductive portions 4 and 4 belonging to the same second electrode 52 to each other. The first electrode 51 is drawn toward the edge of the sensor panel 50 in a direction perpendicular to the direction in which the first electrodes 51 are arranged (a direction along the long portion 3, a vertical direction).

  With this configuration, a kind of capacitor is formed in a portion where the first electrode 51 and the second electrodes 52 and 52 are close to each other, and the capacitance of the capacitor is such that a conductive object (for example, a human body) approaches or contacts. It changes with. Thereby, the touch position can be detected.

  The first tab wiring portions 7 are individually connected to the plurality of first electrodes 51, respectively. Each of the first tab wiring portions 7 is connected to one end of the elongated portion 3 included in the first electrode 51. The second tab wiring portions 8 are also individually connected to the plurality of second electrodes 52. Each of the second tab wiring portions 8 is connected to one end of the lead portion 6 included in the second electrode 52.

  Since the sensor panel 50 shown in FIG. 1 does not have a place where the first electrode 51 and the second electrode 52 intersect, the two electrodes can be physically arranged in a single layer, and the touch device can be thinned. Therefore, simplification of the configuration can be realized.

  By the way, also about such a single layer type touch panel, the importance of the inspection described above is not different from other touch panels. Therefore, it is conceivable to inspect the sensor panel 50 shown in FIG. 1 using the inspection apparatus disclosed in Patent Document 1 described above.

  However, the single-layer type touch panel has a significantly increased number of electrodes, unlike the above-described laminated touch panel. More specifically, when an M × N matrix is formed, the number of first electrodes is M and the number of second electrodes is N for a stacked touch panel. There are M electrodes and M × N second electrodes. Therefore, in order to inspect the capacitance between the electrodes in the single-layer type touch panel, a large number of circuits are required, causing the configuration of the inspection apparatus to be complicated and costly. In addition, the inspection takes a long time, and there is still room for improvement from the viewpoint of shortening the tact time.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an inspection apparatus for inspecting a single-layer type inspection object, which can suppress an increase in inspection circuits and can efficiently inspect the structure. It is in.

Means and effects for solving the problems

  The problems to be solved by the present invention are as described above. Next, means for solving the problems and the effects thereof will be described.

  According to a first aspect of the present invention, an inspection apparatus having the following configuration is provided. That is, this inspection apparatus inspects a panel-shaped inspection object having the following configuration in which a plurality of first conductors and a plurality of second conductors are arranged in the same layer in the thickness direction. . The first conductors are arranged in a straight line. Each of the first conductors has an elongated portion elongated in a direction perpendicular to the direction in which the first conductors are arranged. The second conductors are arranged in a matrix in a direction in which the first conductors are arranged and a direction along the elongated portion. And this inspection apparatus is provided with an OR part and a detection part. The OR section synthesizes the signal outputs of the corresponding second conductors in the direction in which the first conductors are arranged at the time of inspection. The detection unit detects an output of the OR unit.

  That is, in the single layer type inspection object configured as described above, due to the feature on the pattern, the corresponding ones of the second conductors in the direction in which the first conductors are arranged do not short-circuit each other. Can be considered. Therefore, even in a single layer type inspection in which the number of electrodes is large, sufficient inspection can be performed with a small number of inspection circuits by combining the signal outputs as in the present invention. As a result, the inspection apparatus can be significantly simplified and reduced in cost, and the inspection efficiency can be improved.

  The inspection apparatus preferably has the following configuration. That is, this inspection apparatus includes a plurality of first wiring bodies and a plurality of second wiring bodies. The first wiring body can be electrically connected to each of the first conductors. The second wiring body can be electrically connected to each of the second conductors. When the second conductors in a matrix form are grouped according to the corresponding ones in the direction in which the first conductors are arranged, the OR portion is provided for each of the second conductors belonging to the same group. It is a wired OR part which carries out wired OR connection of the said 2nd wiring body connected.

  Thereby, it is possible to simply and rationally combine the signal outputs of the second conductors belonging to the same group.

  The inspection apparatus preferably has the following configuration. That is, this inspection apparatus includes a plurality of sensor units and a measurement unit. The sensor units are arranged in a direction perpendicular to a direction in which the first conductors are arranged. The measurement unit detects an output of the sensor unit. Each of the sensor portions is formed to be elongated in the direction in which the first conductors are arranged so as to be capacitively coupled to the plurality of second conductors.

  Thereby, not only the quality / defectiveness of the electrode pattern of the inspection object can be inspected, but also the pattern defect location can be easily identified based on the signal output of the sensor unit. In addition, since the sensor unit is configured to be elongated so that it can be capacitively coupled with a plurality of second conductors arranged in a matrix, a defective portion can be sufficiently identified with a sensor unit having a simple configuration.

  The inspection apparatus preferably has the following configuration. That is, in the inspection object, each of the second conductors includes conductive portions arranged in pairs so as to correspond in a direction perpendicular to the direction in which the first conductors are arranged. The sensor part is provided so as to correspond to one and the other of the pair of conductive parts.

  Thereby, a pattern defect location can be specified in detail.

  According to the second aspect of the present invention, the following inspection method is provided. That is, this inspection method inspects a panel-shaped inspection object having the following configuration in which a plurality of first conductors and a plurality of second conductors are arranged in the same layer in the thickness direction. Is. The first conductors are arranged in a straight line. Each of the first conductors has an elongated portion elongated in a direction perpendicular to the direction in which the first conductors are arranged. The second conductors are arranged in a matrix with a direction in which the first conductors are arranged and a direction perpendicular thereto. In the inspection method, the signal outputs of the second conductors corresponding to the direction in which the first conductors are arranged are combined at the OR portion, and then the combined signal output is inspected.

  That is, in the single layer type inspection object configured as described above, due to the feature on the pattern, the corresponding ones of the second conductors in the direction in which the first conductors are arranged do not short-circuit each other. Can be considered. Therefore, even in a single layer type inspection in which the number of electrodes is large, sufficient inspection can be performed with a small number of inspection circuits by combining the signal outputs as in the present invention. As a result, the inspection apparatus can be significantly simplified and reduced in cost, and the inspection efficiency can be improved.

The top view which shows typically the electrode pattern in the sensor panel of a single layer type touchscreen apparatus. The conceptual diagram which shows the whole structure of the sensor panel inspection apparatus which concerns on 1st Embodiment of this invention. The figure which shows the formation circuit in case a sensor panel test | inspection apparatus test | inspects the position (1, 4) in a sensor panel. The figure which represented the formation circuit simply. The conceptual diagram which shows the whole structure of the sensor panel inspection apparatus of 2nd Embodiment.

  Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view schematically showing an electrode pattern in a sensor panel 50 of a single layer type touch panel device. FIG. 2 is a conceptual diagram showing an overall configuration of the sensor panel inspection apparatus 1 according to an embodiment of the present invention.

  The sensor panel inspection apparatus 1 according to the first embodiment shown in FIG. 2 is configured to inspect the sensor panel 50 shown in FIG. FIG. 2 shows a state in which the sensor panel 50 shown in FIG. 1 is set in the inspection apparatus.

  The sensor panel 50 as an inspection object is a main component of the touch panel device, and has a first electrode (first conductor) 51 and a second electrode (second conductivity) on a transparent substrate made of glass or the like. The body) 52 is provided. The sensor panel 50 is configured as the single layer type described above.

  Since the configuration of the sensor panel 50 in the single-layer touch panel device has already been described with reference to FIG. 1, it will be briefly described here. M first electrodes 51 are arranged side by side at equal intervals in the horizontal direction of FIG. The second electrodes 52 are provided side by side in the horizontal direction in FIG. 1 with M pieces at equal intervals and N pieces at equal intervals in the vertical direction. As a result, an M × N matrix is formed by the two electrodes 51 and 52. In the following description, the direction in which the first electrodes 51 are arranged may be referred to as the x direction, and the direction perpendicular thereto may be referred to as the y direction.

  As a result, either the first electrode 51 or the second electrode 52 covers almost the entire region where the touch position can be detected (hereinafter, sometimes referred to as a touch region).

  In the touch area, a sensor coordinate system is set based on the relationship between the first electrode 51 and the second electrode 52 arranged in a matrix. This coordinate system can be expressed by the coordinates in the x and y directions. Specifically, the corresponding portions of the conductive portions 4 and 4 of the second electrode 52 at the lower left corner of the touch area in FIGS. 1 and 2 are (1, 1), and the corresponding portions at the upper right corner are (M, N). Is set to

  In the sensor panel 50 of FIGS. 1 and 2, the number of the first electrodes 51 and the second electrodes 52 arranged horizontally is four (M = 4), and the number of the second electrodes 52 arranged vertically is Although it is four (N = 4), it is not limited to this example and can be increased or decreased as appropriate. Further, the shapes of the first electrode 51 and the second electrode 52 are not limited to the above, and can be changed to various shapes depending on circumstances.

  The 1st electrode 51 and the 2nd electrode 52 are comprised by forming a pattern transparent conductive layer using well-known methods, such as sputtering and vapor deposition, using the above-mentioned ITO. However, the electrode material is not limited to using ITO, and various materials such as indium zinc oxide (IZO) can be used.

  The first tab wiring portion 7 and the second tab wiring portion 8 are formed on the substrate so as to be connected to the first electrode 51 and the second electrode 52. The first tab wiring portion 7 and the second tab wiring portion 8 are formed at positions avoiding the touch area, and include the first electrode 51 and the second electrode 52 and a driver circuit (not shown) of the touch panel device. It is configured so that it can be electrically connected.

  In the present embodiment, the first tab wiring portion 7 and the second tab wiring portion 8 are formed by screen printing using a conductive paste material (specifically, a silver paste). However, the present invention is not limited to this configuration. For example, a copper paste may be used instead of the silver paste, or another printing method such as inkjet printing may be used instead of the screen printing. Moreover, the pattern of the 1st tab wiring part 7 and the 2nd tab wiring part 8 can also be formed by performing selective etching after vapor-depositing various metal films.

  The sensor panel inspection apparatus 1 of the present embodiment shown in FIG. 2 inspects whether or not the capacitance at the electrode proximity portion in the sensor panel 50 is as designed, and the electrodes 51 and 52 are accurately formed. Used to check whether or not. The sensor panel inspection apparatus 1 includes a first cable (first wiring body) 37, a second cable (second wiring body) 38, a signal unit 11, a signal supply switching unit 31, a detection switching unit 32, A current detection unit (detection unit) 41 and a controller unit (control unit) 45 are provided as main components.

  The 1st cable 37 and the 2nd cable 38 are comprised with the electric wire which has electroconductivity. When the sensor panel 50 is set in the sensor panel inspection apparatus 1, the first cable 37 is electrically connected to the first electrode 51 via the first tab wiring portion 7 of the sensor panel 50, and the second cable 38 is connected to the sensor. It is electrically connected to the second electrode 52 through the second tab wiring portion 8 of the panel 50.

  Since M first electrodes 51 are arranged, M first cables 37 are also provided correspondingly. On the other hand, since M × N second electrodes 52 are arranged, M × N second cables 38 are also provided.

  However, in this embodiment, N groups are set so that M × N arranged second electrodes 52 are divided into corresponding M pieces in the direction (x direction) in which the first electrodes 51 are arranged. Has been. In other words, the second electrodes 52 are grouped for each y coordinate, such as a group of y = 1, a group of y = 2, and so on. And the 2nd cables 38 corresponding to the 2nd electrode 52 which belongs to the same group are connected by the wired OR part 39 as an OR part.

  The signal unit 11 is configured as an AC power source that supplies an AC signal having a predetermined voltage. The AC signal supplied by the signal unit 11 can be set so that, for example, the frequency is in the range of 10 kHz to 1000 kHz and the effective value of the voltage is in the range of 1V to 10V. One end of the signal unit 11 is grounded, and the other end is electrically connected to the signal supply switching unit 31.

  The signal unit 11 is connected to the controller unit 45 and can generate an AC signal based on a control command from the controller unit 45.

  The signal supply switching unit 31 can select all or part of the plurality of first electrodes 51 and electrically connect the selected first electrode 51 and the signal unit 11. The signal supply switching unit 31 includes a plurality of switches that respectively correspond to the first electrodes 51. In the drawing, numbers “1” to “4” are assigned to the respective switches, and these numbers correspond to the x coordinate in the sensor coordinate system. Each switch is configured to be capable of ON / OFF operation, and is electrically connected to the corresponding first electrode 51 via the first cable 37 and the first tab wiring portion 7.

  The signal supply switching unit 31 is connected to the controller unit 45 and can switch ON / OFF of the switch based on a control command from the controller unit 45.

  The detection switching unit 32 selects all or a part of the group of the selected second electrodes 52 when the M × N arranged second electrodes 52 are grouped as described above. And the current detection unit 41 can be electrically connected. The detection switching unit 32 has a plurality of switches respectively corresponding to the group of the second electrodes 52. In the drawing, numbers “1” to “4” are assigned to the respective switches, and these numbers correspond to the y coordinate in the sensor coordinate system. These switches are configured to be capable of ON / OFF operation, and are electrically connected to the corresponding group of second electrodes 52 via the first cable 37 and the first tab wiring portion 7.

  Similarly to the signal supply switching unit 31, the detection switching unit 32 is connected to the controller unit 45, and the switch can be turned on / off based on a control command from the controller unit 45.

  The current detection unit 41 has a plurality of ammeters arranged so as to correspond to the plurality of first electrodes 51, respectively. Each ammeter transmits the detected current value to the controller unit 45.

  The controller unit 45 is configured as a microcomputer and includes a CPU (not shown) as a calculation unit and ROM, RAM, and the like as storage units. A program for operating the sensor panel inspection apparatus 1 is stored in the ROM of the controller unit 45. Then, the hardware and the software operate in cooperation with each other so that the controller unit 45 can function as the inspection unit 47.

  The inspection unit 47 controls the signal unit 11, the signal supply switching unit 31, the detection switching unit 32, and the current detection unit 41 by sending control signals in a state where the sensor panel 50 is set in the sensor panel inspection apparatus 1. The sensor panel 50 is inspected.

  Next, the inspection of the sensor panel 50 will be described. FIG. 4 is a diagram showing a forming circuit when the sensor panel inspection apparatus 1 inspects the position (1, 4) in the sensor panel 50. FIG. 5 is a diagram simply showing the formation circuit.

  First, the concept of inspection will be described with reference to FIG. The sensor panel inspection apparatus 1 according to the present embodiment can measure the capacitance in the vicinity of the first electrode 51 and the second electrode 52. Further, the sensor panel inspection apparatus 1 determines the shape of the first electrode 51 and the second electrode 52 based on the resistance values of the first electrode 51 and the second electrode 52 (or values that change according to the resistance value). It is configured to be able to inspect uniformity. This corresponds to the growing need for appropriate inspection not only for electrode conduction / short-circuiting but also for electrode thickness / thinning.

  Hereinafter, the inspection of the resistance value will be described in detail. The first electrode 51 and the second electrode 52 arranged on the sensor panel 50 are close to each other at M × N locations. As described above, since a gap is formed between the first electrode 51 and the second electrode 52, it can be considered that capacitors are respectively formed in the electrode proximity portions.

  Further, the first electrode 51 and the second electrode 52 are formed of the ITO conductive film as described above, and this ITO exhibits an excellent low resistivity in relation to other transparent electrode materials, but has an appropriate electric resistance. Indicates the value. Therefore, as long as the first electrode 51 and the second electrode 52 are not abnormal in shape (for example, the above-mentioned electrode thickness / thinning) and the pattern is formed uniformly, the first electrode 51, the electrode proximity portion, the second electrode The resistance of a circuit that passes through the electrode 52 (hereinafter sometimes referred to as a forming circuit) is such that the electrode proximity portion is farther from the tab wiring portions 7 and 8 (the y coordinate of the sensor coordinate system is larger). It should increase because it has to go through a long path formed of ITO conductive film. On the other hand, since the first electrode 51 and the second electrode 52 have a configuration in which the same shape pattern is simply repeated in the x direction, as long as the pattern is uniformly formed, the resistance of the formation circuit is as follows. Even if the x coordinate of the sensor coordinate system in the vicinity of the electrode changes, it should be the same. In the sensor panel inspection apparatus 1 of the present embodiment, the sensor panel 50 is inspected based on the above concept.

  Hereinafter, the specific operation of the sensor panel inspection apparatus 1 will be described by taking as an example the case of inspecting (1, 4) in the sensor coordinate system. The inspection unit 47 selects the first electrode 51 corresponding to the x-coordinate of the inspection target from the four first electrodes 51, and the y-coordinate of the inspection target from the group of the four second electrodes 52 existing. And the signal supply switching unit 31 and the detection switching unit 32 are controlled so that these electrodes are to be inspected. In this example, the inspection unit 47 turns on the “1” switch in the signal supply switching unit 31 and turns on the “4” switch in the detection switching unit 32.

  Thereby, the signal unit 11 and the ammeter of the current detection unit 41 are connected by a circuit indicated by a thick line in FIG. The circuit drawn by the thick line is connected to the second electrode 52 from the connection portion between the first electrode 51 and the first tab wiring portion 7 via the electrode intersection portion represented by (1, 4). The connection portion with the second tab wiring portion 8 is reached.

  FIG. 4 schematically shows a state in which the forming circuit in the sensor panel 50 is connected to the sensor panel inspection apparatus 1. The alternating current i flowing through this circuit is measured by the ammeter of the current detector 41. As shown in FIG. 4, the circuit corresponding to the coordinates (1, 4) includes a resistor of an appropriate size and a capacitor formed in the electrode proximity portion.

  Note that, as described above, since the formation circuit varies depending on the coordinates (x, y) of the position to be inspected, the resistance value also varies. In consideration of this, the inspection unit 47 calculates the resistance value of the forming circuit with respect to an arbitrary coordinate (x, y) in advance and stores it in the RAM or the like.

  The inspection unit 47 performs phase detection on the output of the ammeter of the current detection unit 41 in a state where an AC signal is generated in the signal unit 11, thereby calculating the capacitance in the formation circuit and the formation circuit. The resistance value (formed circuit measurement value) is acquired. The capacitance acquired in this way is compared with a predetermined determination reference value, and when it is outside the allowable range, it is determined as a defective product. Moreover, the acquired resistance value is compared with a predetermined determination reference value, and when the resistance value is out of the allowable range, it is determined that the electrode 51 or 52 has a defective shape.

  The acquisition of the capacitance and the resistance value of the forming circuit, and the determination of whether or not it is a defective product are performed by setting the coordinates of the position to be inspected to (1, 1), (1, 2),. ), (M, N), and so on for all coordinates. Thus, the inspection of the sensor panel 50 is completed. However, the order of the coordinates to be inspected is not limited to the above, and can be changed as appropriate.

  Here, as described above, in the present embodiment, the first cables 37 connected to the second electrodes 52 of the same group after the M × N arranged second electrodes 52 are grouped for each y coordinate. Are connected to each other at the wired OR portion 39.

  The reason for this is as follows. That is, when attention is paid to any two electrodes having the same y-coordinate among the second electrodes 52 arranged in a matrix of M × N, the second electrode 52, 52 must be between the two second electrodes 52, 52. One or more first electrodes 51 (elongated portions 3) are arranged so as to partition the entire matrix arrangement region of the two electrodes 52. Due to the characteristics of the electrode pattern, it is very unlikely that the two second electrodes 52 are short-circuited (directly).

  Therefore, in the present embodiment, the second electrodes 52 having the same y coordinate are regarded as not short-circuiting each other, and the inspection circuit (specifically, the ammeter of the current detection unit 41) is used by using the wired OR unit 39 described above. Is practically common. As a result, the number of inspection circuits (channels) can be reduced, and the inspection apparatus can be simplified and reduced in cost. Further, since the number of inspections can be reduced, the inspection efficiency can be improved.

  Hereinafter, the reduction effect of the inspection circuit will be specifically described. That is, as shown in FIG. 1, when it is intended to inspect a touch panel in which M first electrodes and M × N second electrodes are arranged side by side, the number of inspection circuits that are usually required is the number of both electrodes. Thus, M + M × N = M × (1 + N). On the other hand, when connecting with the wired OR portion 39 as described above, the inspection circuit is only necessary for the M pieces of the first electrodes 51 and the N groups of the second electrodes 52, respectively. The required number of circuits is M + N. Therefore, it is clear that the effect of the inspection circuit reduction by the configuration of the present embodiment is high, and particularly remarkable for a large panel in which M and N are large.

  As described above, the sensor panel inspection apparatus 1 according to the present embodiment inspects the sensor panel 50 of the single layer type touch panel device. The sensor panel 50 which is an inspection object is configured by arranging a plurality of first electrodes 51 and a plurality of second electrodes 52 in the same layer in the thickness direction. The first electrodes 51 are arranged in a straight line. Each of the first electrodes 51 has an elongated portion 3 that is elongated in a direction perpendicular to the direction in which the first electrodes 51 are arranged. The second electrodes 52 are arranged in a matrix in the direction in which the first electrodes 51 are arranged and the direction along the elongated portion 3. The sensor panel inspection apparatus 1 includes a wired OR part 39 and a current detection part 41. The wired OR section 39 synthesizes the signal outputs of the corresponding ones of the second electrodes 52 in the direction in which the first electrodes 51 are arranged at the time of inspection. The current detection unit 41 detects the output of the wired OR unit 39.

  That is, in the sensor panel 50 of the single layer type touch panel configured as described above, due to the feature on the pattern, corresponding ones of the second electrodes 52 in the direction in which the first electrodes 51 are arranged do not short-circuit each other. It can be regarded as a thing. Therefore, even in a single layer type inspection in which the number of electrodes is large, sufficient inspection can be performed with a small number of inspection circuits by combining the signal outputs as in the present embodiment. As a result, the sensor panel inspection apparatus 1 can be significantly simplified and reduced in cost, and the inspection efficiency can be improved.

  In addition, the sensor panel inspection apparatus 1 of this embodiment includes a first cable 37 and a second cable 38. A plurality of first cables 37 are provided so as to be electrically connected to each of the first electrodes 51. A plurality of second electrodes 52 are provided so as to be electrically connected to each of the second electrodes 52. Then, when the matrix-like second electrodes 52 are grouped into corresponding ones in the direction in which the first electrodes 51 are arranged, the wired OR portion 39 is connected to each of the second electrodes 52 belonging to the same group. The second cable 38 is connected by wired OR.

  Thereby, it is possible to simply and rationally combine the signal outputs of the second electrodes 52 belonging to the same group.

  Next, the sensor panel inspection apparatus 1 of 2nd Embodiment is demonstrated. FIG. 5 is a conceptual diagram showing an overall configuration of the sensor panel inspection apparatus 1 of the second embodiment. In the description of the present embodiment, the same or similar members as those of the above-described embodiment may be denoted by the same reference numerals in the drawings, and description thereof may be omitted.

  The sensor panel inspection apparatus 1 according to the second embodiment includes a plurality of sensor units 48 for taking out an electric signal from the conductive unit 4 of the second electrode 52 in a direction perpendicular to the direction in which the first electrodes 51 are arranged. Yes. When the sensor panel 50 is set in the sensor panel inspection apparatus 1, the sensor unit 48 is arranged to face the sensor panel 50 with an appropriate gap. In the present embodiment, the sensor unit 48 is configured by a conductive plate-like member, and has a size that can at least face the entire surface of the conductive unit 4 that is a component of the second electrode 52.

  The sensor portions 48 are arranged at equal intervals in correspondence with the arrangement intervals of the matrix-like second electrodes 52. More specifically, the sensors are arranged side by side so as to correspond to each of the conductive parts 4 arranged in pairs to form the second electrode 52.

  Each sensor unit 48 is electrically connected to a measurement unit 49 (specifically, an ammeter) for measuring current. The measurement result of the measurement unit 49 is transmitted to the controller unit 45.

  With the above configuration, each sensor unit 48 is capacitively coupled to the conductive unit 4 to take out an electrical signal, and the electrical signal is measured by the measurement unit 49, so that a failure occurs when the electrodes 51 and 52 are disconnected. The location can be easily identified.

  By the way, in recent years, a so-called on-cell type touch panel in which a transparent electrode pattern is formed between a liquid crystal color filter substrate and a polarizing plate has been put into practical use. In the future, a single layer type touch panel as shown in FIG. However, it is thought that the shift to the on-cell type will progress. However, since the on-cell type touch panel is expensive, there is a demand for repairing a defective portion without using it even when a defect is found by inspection. In this respect, the sensor panel inspection apparatus 1 according to the present embodiment not only inspects the sensor panel 50 but also can easily identify a detected defective portion. Therefore, the subsequent repair work can be performed quickly and accurately.

  As described above, the sensor panel inspection apparatus 1 according to the present embodiment includes the plurality of sensor units 48 arranged in a direction perpendicular to the direction in which the first electrodes 51 are arranged. Each sensor unit 48 is formed to be elongated in the direction in which the first electrodes 51 are arranged.

  Thereby, not only the quality / defectiveness of the electrode pattern of the sensor panel 50 can be inspected, but also a pattern defect location can be easily identified based on the signal output of the sensor unit 48. In addition, since the sensor unit 48 is configured to be elongated so that it can be capacitively coupled to a plurality of the second electrodes 52 arranged in a matrix, it is possible to sufficiently identify a defective portion with the sensor unit 48 having a simple configuration. it can.

  Moreover, in the sensor panel inspection apparatus 1 of this embodiment, each 2nd electrode 52 is provided with the electroconductive parts 4 and 4 arrange | positioned in a pair so that it may respond | correspond in the direction perpendicular | vertical to the direction where the 1st electrode 51 is arranged. . The sensor part 48 is provided so as to correspond to one and the other of the pair of the conductive parts 4.

  Thereby, a pattern defect location can be specified in detail.

  The preferred embodiment of the present invention has been described above, but the above configuration can be modified as follows, for example.

  In the above embodiment, the second cable 38 connected to the second electrode 52 of the same group is connected by the wired OR portion 39. However, the present invention is not limited to this connection form, and any connection can be used as long as the signal output of the second electrode 52 of the same group can be substantially ORed.

  The wired OR unit 39 may be configured by, for example, an FPGA, and may be configured to be able to switch the presence or absence of wired OR connection under the control of the controller unit 45. Thereby, the versatility of the inspection of the sensor panel inspection apparatus 1 can be increased.

  In the above embodiment, the sensor panel 50 and the signal supply switching unit 31 are connected by the first cable 37 that is an electric wire, and the sensor panel 50 and the detection switching unit 32 are connected by the second cable 38 that is an electric wire. Yes. However, the electrical connection is not limited to an electric wire, and electrical connection may be performed by, for example, pattern wiring on a circuit board.

  The inspection apparatus and the inspection method of the present invention are not limited to the sensor panel of the touch panel device, and a wide range of inspection objects can be used for so-called single layer type inspection objects.

1 Sensor panel inspection device (inspection device)
3 long portion 4 conductive portion 37 first cable (first wiring body)
38 Second cable (second wiring body)
39 Wired OR part (or part)
48 Sensor unit 50 Sensor panel of single layer type touch panel device (inspection object)
51 1st electrode (1st conductor)
52 Second electrode (second conductor)

Claims (5)

A plurality of first conductors and a plurality of second conductors are panel-like inspection objects arranged in the same layer in the thickness direction,
The first conductors are arranged in a straight line,
Each of the first conductors has an elongated portion elongated in a direction perpendicular to the direction in which the first conductors are arranged,
The second conductor is an inspection apparatus for inspection objects arranged in a matrix in a direction in which the first conductors are arranged and in a direction along the elongated portion,
At the time of inspection, an OR portion that synthesizes signal outputs of corresponding ones of the second conductors in the direction in which the first conductors are arranged, and
A detection unit for detecting an output of the OR unit;
An inspection apparatus comprising: The inspection apparatus according to claim 1,
A plurality of first wiring bodies electrically connectable to each of the first conductors;
A plurality of second wiring bodies that can be electrically connected to each of the second conductors;
With
When the second conductors in a matrix form are grouped according to the corresponding ones in the direction in which the first conductors are arranged, the OR portion is provided for each of the second conductors belonging to the same group. An inspection apparatus that is a wired OR part that connects the second wiring bodies connected to each other by wired OR. The inspection apparatus according to claim 1 or 2,
A plurality of sensor units arranged in a direction perpendicular to a direction in which the first conductors are arranged;
A measurement unit for detecting the output of the sensor unit;
With
Each of the sensor units is formed in an elongated shape in a direction in which the first conductors are arranged so as to be capacitively coupled to the plurality of second conductors. The inspection apparatus according to claim 3,
In the inspection object, each of the second conductors includes conductive portions arranged in pairs so as to correspond in a direction perpendicular to a direction in which the first conductors are arranged.
The inspection device according to claim 1, wherein the sensor unit is provided so as to correspond to one and the other of the pair of the conductive units. A plurality of first conductors and a plurality of second conductors are panel-like inspection objects arranged in the same layer in the thickness direction,
The first conductors are arranged in a straight line,
Each of the first conductors has an elongated portion elongated in a direction perpendicular to the direction in which the first conductors are arranged,
The second conductor is an inspection method for an inspection object arranged in a matrix in a direction in which the first conductors are arranged and a direction perpendicular to the first conductor,
An inspection method comprising: combining signal outputs of the second conductors corresponding to the direction in which the first conductors are arranged in an OR portion, and then inspecting the combined signal output.

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