JP2015039700A - Laser processing device with dust collection mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To generate an air stream going from the side of the surface to be processed of a workpiece into an upper side opening part so that dusts floating between a dust suction part and the workpiece go into the upper side opening part, and generate an air stream going from the processing head side into a lower side opening part so that the dusts do not drop from the lower side opening part, to prevent deposition of the dusts on the surface to be processed of the workpiece and on the processing head.SOLUTION: A laser processing device in which processing is implemented by irradiating the surface to be processed of a workpiece with laser light positioned by a galvano-mirror unit includes a processing head which is mounted below the workpiece and irradiates the surface to be processed of the workpiece with the laser light from the lower side, and a dust suction part which is mounted as movable up and down between the workpiece and the processing head and includes a rectangular upper side opening part and a rectangular lower side opening part at the position at which the laser light passes through the upper and the lower surfaces. The distance between the dust suction part and the workpiece is set so that an air stream which goes from the side of the surface to be processed of the workpiece into the upper side opening part is generated.

Description

  The present invention relates to a laser processing apparatus having a dust collection mechanism for collecting dust generated by processing.

  When a workpiece such as a glass substrate with a thin film formed on it (hereinafter referred to as a glass substrate with a film) is processed by irradiating it with laser light, a large amount of dust is generated, and the dust is re-applied to the work surface of the workpiece. If it adheres, a problem due to residual dust occurs in a later process, and therefore laser processing apparatuses equipped with various dust collection mechanisms have been developed.

  In order to prevent the generated dust from reattaching to the work surface of the workpiece, it is preferable that the work surface of the work is faced down and processed from below so that the generated dust does not easily return to the work surface. As such an example, in Patent Document 1, an objective lens that irradiates laser light is arranged below the workpiece, and a window port whose inner wall surface is a combination of a mortar and a cylinder is provided between the objective lens and the workpiece. From the outer periphery of the workpiece, an opening having a diameter of 0.5 mm for inhaling fine particles at a position directly below the laser irradiation portion of the window port and a plurality of spiral-shaped protrusions formed on the upper surface of the rectangular window port An air flow toward the laser irradiation part is formed while winding the vortex, and the fine particles caught in the air flow are sucked into the window port from the opening, thereby suppressing the reattachment of the fine particles to the workpiece. It is disclosed.

  When processing in such a downward direction, it is necessary to prevent the inhaled fine particles from adhering to the surface of the objective lens. In this example, the fine particles sucked into the window port are blown toward the outer peripheral side by a spiral flow that increases downward, sucked into the suction port located on the outer peripheral side, and discharged through the suction gas outlet. In this way, the fine particles are prevented from adhering to the surface of the objective lens immediately below the laser irradiation portion.

  However, if the window port is not small, a spiral flow does not occur. Therefore, as in the present application, when a large-diameter and rectangular window port of a galvanomirror / fθ lens system must be used, a spiral flow is required. Can not be produced, it falls by gravity without being blown to the outer peripheral side, and there is a problem that adhesion to the objective lens surface cannot be avoided.

JP 2002-62637 A

  An object of the present invention is to provide a laser processing apparatus capable of preventing dust from adhering to a workpiece surface and an fθ lens when a large-diameter window port such as a galvanomirror / fθ lens system is required. To do.

  Means for solving the above problems will be described with reference to FIGS. In the laser processing apparatus (1) in which processing is performed by irradiating the processing surface of the work (7) with the laser beam (10) positioned by the galvano mirror unit (11), And a machining head (14) that irradiates the work surface of the workpiece (7) with a laser beam (10) from below, and is moved up and down between the workpiece (7) and the machining head (14). A dust collection suction part (3) having a rectangular upper opening part (31) and a lower opening part (32) at a position through which the upper and lower laser beams (10) pass. The distance (h) between the dust suction part (3) and the work (7) is set so that an air flow (A) is generated from the processed surface side of the work (7) into the upper opening (31). Occurred in the rectangular machining area of the workpiece (7) Since dust (9) rides on the flow of airflow (A) and is sucked into the rectangular upper opening (31), dust (9) can be prevented from adhering to the work surface of the workpiece (7). It becomes.

  In addition, the opening size (S2) of the lower opening (32) is set so that an air flow (B) from the processing head (14) side into the lower opening (32) is generated. The dust (9) that has entered the dust collection suction part (3) is pushed up by the flow of the airflow (B) and does not fall by gravity from the lower opening (32). It is possible to prevent dust (9) from adhering to the head (14).

  Furthermore, since the opening dimensions S1 and S2 of the rectangular openings (31, 32) are set in accordance with the size of the rectangular processing area, it is possible to cope with laser processing of a galvanometer mirror / fθ lens system.

  In addition, although the code | symbol in said parenthesis is for contrast with drawing, it does not have any influence on description of a claim by this.

  According to the present invention, in a laser processing apparatus that requires a large-diameter window port, such as a galvanomirror / fθ lens system, the work flow is adjusted by adjusting the airflow in the vertical direction using the dust collection suction part having the upper and lower openings. Can prevent dust from adhering to the surface to be processed and the fθ lens.

It is a front view which shows the laser processing apparatus which concerns on this invention. It is detailed explanatory drawing of the dust collection mechanism which concerns on this invention. It is a figure which shows the shape of the upper side opening part or lower side opening part of the dust collection suction part of this invention. It is explanatory drawing which shows the flow of the airflow in the dust collection suction part of this invention.

  Hereinafter, embodiments of the present invention will be described.

  First, the structure of the laser processing apparatus of this invention is demonstrated.

  FIG. 1 is a front view showing a laser processing apparatus according to the present invention. The laser processing apparatus 1 includes a ball screw drive XY positioning unit 6, a suction unit 8, a galvano mirror unit 11, an fθ lens 14, a Z-axis motor 16, and a column 17. An XY positioning unit 6 and a Z-axis motor 16 for positioning the work 7 are supported by a column 17, and a suction unit 8 for vacuum-sucking and fixing the work 7 is provided below the XY positioning unit 6. It has been. The galvanometer mirror unit 11 and the fθ lens 14 are installed on the lower side of the work 7 and irradiate the processing surface of the work 7 with the laser beam 10 from the lower side. A dust collection suction part 3 is installed between the work 7 and the fθ lens 14 and is connected to the dust collector 5 through the dust collection hose 4. The dust collection suction part 3 can be moved up and down between the workpiece 7 and the fθ lens 14 by the vertical movement mechanism 13.

  The vertical movement mechanism 13 includes, for example, a lift cylinder (not shown) and a vertical guide mechanism, and moves the dust collection suction part 3 up and down between the work 7 and the fθ lens 14 so that the dust collection suction part 3 and the work are moved. The distance h from 7 can be changed.

  FIG. 2 is a detailed explanatory view of the dust collecting mechanism according to the present invention. Openings (31, 32) for allowing the laser beam 10 to pass through and sucking the dust 9 are provided on the upper and lower surfaces of the dust collection suction part 3. The upper opening 31 on the upper surface and the lower opening 32 on the lower surface can be individually adjusted by the opening size adjusting mechanism 15.

  FIG. 3 is a view showing the shape of the upper opening 31 or the lower opening 32 of the dust collection suction part 3. The shape of the upper opening 31 and the lower opening 32 is rectangular, the length of one side of the square of the upper opening 31 is the upper opening dimension S1, and the length of one side of the square of the lower opening 32 is the opening. Assuming that the dimension is S2, the opening dimension adjusting mechanism 15 adjusts the opening dimension S1 or S2 by moving, for example, a plate material provided in the opening, and fixing by screwing.

  Next, the operation will be described.

  In accordance with a positioning command from a CNC (computer numerical control) (not shown), the XY positioning unit 6 is used to move an arbitrary processing point of the work 7 into a processing area determined by the galvanometer mirror unit 11 and the fθ lens 14.

  A laser beam 10 emitted from a laser source (not shown) is positioned by a galvanometer mirror unit 11, collected by an fθ lens 14, and passes through a lower opening 32 and an upper opening 31 of the dust collection suction portion 3. When the work surface of the workpiece 7 is irradiated from below, dust 9 is generated and falls due to gravity.

  FIG. 4 is an explanatory diagram showing the flow of airflow in the dust collection suction portion of the present invention. The distance h between the dust collection suction part 3 and the work 7 is adjusted in accordance with the opening dimension (the length of one side of the square) S1 of the upper opening 31, and the inside of the upper opening 31 from the work surface side of the work 7 is adjusted. It is set so that the airflow A is generated and the dust 9 is sucked into the dust collecting suction portion 3. If the distance h between the dust collection suction part 3 and the work 7 is too small, an appropriate air volume cannot be obtained, and if it is too large, an appropriate wind speed cannot be obtained, so that the dust 9 is scattered outside the processing area. There is a possibility that the dust 9 may adhere to the work surface of the workpiece 7.

  Further, by adjusting the opening dimension (the length of one side of the square) S2 of the lower opening 32 in accordance with the opening dimension (the length of one side of the square) S1 of the upper opening 31, the fθ lens 14 side is adjusted. The air velocity B of the airflow B flowing from the workpiece 7 to the lower opening 32 is made larger than the air velocity of the airflow A flowing from the work surface side of the workpiece 7 into the upper opening 31, and the dust 9 entering the dust collection suction portion 3 is obtained. Is set to prevent falling from the lower opening 32. If the air velocity of the air flow B is low, the dust 9 may fall from the lower opening 32 and adhere to the fθ lens 14.

  When the film surface of the film-coated glass substrate 7 having a plate thickness t = 0.5 to 1.0 mm is processed by irradiating the laser beam 10 from the lower side, a large amount of powdery chips 9 of about several μm are obtained. It occurs and falls due to gravity.

  In accordance with the dimension S = 120 mm square of the processing area determined by the galvanometer mirror unit 11 and the fθ lens 14, the opening dimension (length of one side of the square) S <b> 1 of the upper opening 31 is set by the opening dimension adjusting mechanism 15 to S <b> 1 = 120 mm. In the case where the angle is set, if the distance h between the dust collection suction portion 3 and the workpiece 7 is set to h = 10 to 13 mm by the vertical movement mechanism 13, the airflow A from the processing surface side of the workpiece 7 toward the upper opening 31 is set. And the chips 9 riding on the airflow A are sucked into the upper opening 31. The distance h between the dust collection suction portion 3 and the work 7 is the distance from the upper surface of the opening size adjusting mechanism 15 to the work surface of the work 7 and does not include the thickness of the opening size adjusting mechanism 15. To do.

  Since the dust collection suction part 3 is connected to the dust collector 5 and is in a negative pressure state of about -3 kPa, the chips 9 sucked from the upper opening 31 are collected by the dust collector 5 through the dust collection hose 4. Is done.

  When the opening dimension (length of one side of the square) S1 of the upper opening 31 is S1 = 120 mm square, the opening dimension (length of one side of the square) S2 of the lower opening 32 is set to the opening dimension adjusting mechanism 15. Is set to S2 = 120 to 130 mm square, the wind speed of the airflow B from the fθ lens 14 side into the lower opening 32 is higher than the wind speed of the airflow A from the work surface side of the work 7 into the upper opening 31. Therefore, the chips 9 that have entered the dust collection suction part 3 from the upper opening 31 are collected by the dust collector 5 through the dust collection hose 4 without falling from the lower opening 32.

  By providing the configuration as in this embodiment, it is possible to reduce the occurrence of defects due to dust remaining on the workpiece, and to provide a laser processing apparatus capable of suppressing a decrease in processing accuracy due to dust adhering to the fθ lens. Is possible.

DESCRIPTION OF SYMBOLS 1 Laser processing apparatus 3 Dust collection suction part 4 Dust collection hose 5 Dust collector 6 XY positioning unit 7 Work piece 8 Adsorption unit 9 Dust 10 Laser beam 11 Galvano mirror unit 13 Vertical movement mechanism 14 f (theta) lens (processing head)
15 Opening Dimension Adjustment Mechanism 16 Z-axis Motor 17 Column 31 Upper Opening 32 Lower Opening h Distance between Dust Collection Suction Part and Work S1 Opening Dimension of Upper Opening (Length of One Side of Square)
S2 Opening size of the lower opening (length of one side of the square)
A Airflow from the work surface side of the workpiece into the upper opening B B Airflow from the fθ lens side into the lower opening

Claims (2)

In a laser processing apparatus in which processing is performed by irradiating a processing surface of a workpiece with laser light positioned by a galvanometer mirror unit,
A machining head installed on the lower side of the workpiece and irradiating the workpiece surface of the workpiece with a laser beam from below;
A dust collecting suction portion provided between the workpiece and the processing head so as to be movable up and down, and having a rectangular upper opening and a lower opening at a position where the upper and lower laser beams pass;
Have
The laser processing apparatus, wherein the distance between the dust collection suction part and the work is set so that an air flow from the work surface side of the work into the upper opening is generated. 2. The laser processing apparatus according to claim 1, wherein an opening size of the lower opening is set so that an airflow is generated from the processing head side into the lower opening. 3.

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