JP2015024571A - Sheet manufacturing method and sheet manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet manufacturing method and a sheet manufacturing apparatus capable of efficiently manufacturing a sheet.SOLUTION: A sheet manufacturing method includes: a deposition process of performing a deposition treatment that deposits a sheet composition to a sheet 2 by batch; and a post-treatment process of performing a heat treatment to the sheet 2. Heat treatment time required for the heat treatment is set longer than film deposition time required for the deposition process. In the post-treatment process, the sheets 2 of a plurality of batches are simultaneously heat-treated.

Description

  The present invention relates to a sheet manufacturing method and a sheet manufacturing apparatus, and more particularly to a manufacturing method for manufacturing a sheet used for sealing an electronic element, and a sheet manufacturing apparatus used for the manufacturing method.

  A sheet used for an electronic device, for example, a sealing sheet for sealing an optical semiconductor device, is applied to a base material by applying a liquid composition that is a raw material of the sheet to each sheet (single sheet). A film is formed, and then the sheet is subjected to post-treatment such as heating to produce a semi-cured state or a cured state.

  And as a system which heat-processes and produces a sheet | seat continuously industrially, the belt conveyor system which conveys the film-formed sheet | seat sheet with a belt conveyor, and passes the inside of a heating oven is mentioned, for example.

  However, in this belt conveyor system, in order to sufficiently heat the sheet, it is necessary to increase the distance between the oven and the belt conveyor, which causes a problem that the entire apparatus is enlarged.

  On the other hand, in addition to the belt conveyor system, for example, a heating device provided with a hot plate provided inside the heating chamber and a cooling plate provided adjacent to the heating chamber, the hot plate and the cooling plate There has been proposed a heating device that moves a substrate between a hot plate and a cooling plate by discharging a gas from discharge holes provided in (see, for example, Patent Document 1).

JP 2007-184429 A

  However, in the sheet manufacturing method, the heat treatment time may be longer than the film formation time. In such a case, when a single sheet is continuously produced using the heating apparatus of Patent Document 1, a certain single sheet is formed and heated immediately before that. Until the heat treatment of the leaf sheet is completed, the heat treatment cannot be performed, and it is necessary to wait. Therefore, the malfunction that production efficiency is inferior arises.

  An object of the present invention is to provide a sheet manufacturing method and a sheet manufacturing apparatus that can efficiently manufacture a sheet.

  In order to achieve the above object, a sheet manufacturing method of the present invention includes a film forming process for forming a film composition on a single sheet for each batch, and a first film forming process for the single sheet. A post-processing step for performing post-processing, wherein a first post-processing time required for the first post-processing is set to be longer than a film-forming time required for the film-forming processing. The first post-processing is performed in parallel with a single sheet.

  According to this manufacturing method, the first post-processing can be performed in parallel with the single-wafer sheet formed immediately before the single-wafer sheet formed in the film-forming process. Therefore, the first post-processing can be performed on the formed sheet without waiting until the first post-processing of the single-sheet formed immediately before is completed.

  As a result, the manufacturing time of the sheet can be shortened, and the sheet can be efficiently manufactured.

  In the sheet manufacturing method of the present invention, it is preferable that in the post-processing step, the first post-processing is performed in a static region that is different for each batch.

  According to this manufacturing method, the first post-processing can be performed for each batch of the formed sheet sheets in different stationary regions for each batch. In parallel with the sheet, the first post-processing can be performed in different stationary regions. Therefore, the manufacturing time of a sheet can be shortened and a sheet can be manufactured efficiently.

  In addition, since the processing conditions can be set for each different still region, the first post-processing can be performed for each batch of the sheets for each batch under different conditions. Therefore, different types of single wafer sheets can be manufactured for each batch.

  In the sheet manufacturing method of the present invention, it is preferable that the first post-treatment is a heat treatment for heating the sheet.

  According to this manufacturing method, a heat-treated sheet can be manufactured.

  In the sheet manufacturing method of the present invention, it is preferable that in the post-processing step, the first post-processing is performed, and then the sheet is cooled.

  According to this manufacturing method, since the heat-treated single wafer sheet is cooled after the first post-treatment, an accurate heat history can be imparted to the single wafer sheet.

  In the sheet manufacturing method of the present invention, it is preferable that in the post-processing step, the sheet is defoamed before the first post-processing.

  According to this manufacturing method, since the sheet is defoamed before the first post-treatment, it is possible to produce a sheet with suppressed surface roughness caused by the first post-treatment.

  In addition, the sheet manufacturing apparatus of the present invention performs a film forming process for forming a sheet composition on a single sheet for each batch, and performs a first post-processing on the single sheet. A post-processing unit; and a control unit that controls the film-forming unit and the post-processing unit, wherein the control unit performs a first post-processing time for performing the first post-processing on the sheet. The sheet composition is set to be longer than the film formation time for forming the film on the single sheet, and the post-processing unit performs the first post-processing in parallel with a plurality of batches of the single-sheet sheets. It is configured as described above.

  According to this manufacturing apparatus, the first post-treatment can be performed in parallel with the single-wafer sheet formed immediately before the single-wafer sheet formed in the film-forming unit in the post-processing unit. . Therefore, the first post-processing can be performed on the formed sheet without waiting until the first post-processing of the single-sheet formed immediately before is completed.

  As a result, the manufacturing time of the sheet can be shortened, and the sheet can be efficiently manufactured.

  In the manufacturing apparatus of the present invention, it is preferable that the post-processing section includes a plurality of first post-processing areas in which the first post-processing is performed in different static areas for each batch.

  According to this manufacturing apparatus, since the first post-processing can be performed in different stationary regions for each batch of the formed sheet sheets, the formed sheet sheet is formed immediately before that In parallel with the sheet, the first post-processing can be performed in different stationary areas. Therefore, the manufacturing time of a sheet can be shortened and a sheet can be manufactured efficiently.

  In addition, since the processing conditions can be set for each different still region, the first post-processing can be performed for each batch of the sheets for each batch under different conditions. Therefore, different types of single wafer sheets can be manufactured for each batch.

  In the manufacturing apparatus of the present invention, it is preferable that the film forming unit and the first post-treatment regions are arranged in series.

  According to this manufacturing apparatus, the sheet can be smoothly moved from the film forming unit to the first post-processing region along the serial direction.

  In the manufacturing apparatus of the present invention, it is preferable that the first post-processing region includes a heating unit.

  According to this manufacturing apparatus, a heat-treated sheet can be manufactured.

  In the manufacturing apparatus of the present invention, it is preferable that the heating means is a hot plate.

  According to this manufacturing apparatus, a sheet can be reliably and efficiently heated.

  In the production apparatus of the present invention, it is preferable that the heating means is an oven.

  According to this manufacturing apparatus, the manufacturing apparatus can be easily designed, and the sheet can be manufactured at low cost.

  In the manufacturing apparatus of the present invention, it is preferable that the post-processing unit includes a cooling region that cools the single-wafer sheet on the side opposite to the film-forming unit with respect to the last first post-processing region. It is.

  According to this manufacturing apparatus, since the heat-treated single wafer sheet is cooled after the first post-treatment, an accurate heat history can be imparted to the single wafer sheet.

  In the manufacturing apparatus of the present invention, it is preferable that the post-processing unit includes a defoaming region for defoaming the single-wafer sheet between the film forming unit and the first first post-processing region. It is.

  According to this manufacturing apparatus, since the single sheet is defoamed, it is possible to manufacture a single sheet in which surface roughness caused by the first post-treatment is suppressed.

  In the manufacturing apparatus of the present invention, the post-processing unit includes n first post-processing areas, and the control unit sets the processing for performing the n batches of the first post-processing as one cycle, and the previous cycle. It is preferable to set the start timing of the current cycle based on the end timing of the first post-processing of the first batch.

  After finishing the first post-processing for the first batch of the previous cycle, the first post-processing can be started for the first batch of the current cycle without delay. Therefore, a sheet can be efficiently manufactured.

  According to the manufacturing method and the manufacturing apparatus of the present invention, the manufacturing time of a sheet can be shortened, and a sheet can be efficiently manufactured.

FIG. 1 shows a perspective view of an embodiment of the sheet manufacturing apparatus of the present invention. FIG. 2 shows a cross-sectional view of the defoaming region of the sheet manufacturing apparatus of FIG. FIG. 3 shows a cross-sectional view of the heating region of the sheet manufacturing apparatus of FIG. 4 shows a cross-sectional view of the cooling region of the sheet manufacturing apparatus of FIG. FIG. 5: shows the time chart showing the time which each process requires for every batch in one Embodiment of the manufacturing method of the sheet | seat of this invention. FIG. 6 shows a perspective view of another embodiment (embodiment in which the heating region is partitioned in the vertical direction) of the sheet manufacturing apparatus of the present invention. FIG. 7 shows a perspective view of another embodiment (embodiment in which the heating means is an oven) of the sheet manufacturing apparatus of the present invention. FIG. 8 shows a perspective view of another embodiment of the sheet manufacturing apparatus of the present invention (an embodiment in which the heating means is an oven and the heating region is partitioned in the vertical direction).

  In FIG. 1, the front-rear direction is the first direction, the front side is a downstream side in the sheet transport direction (first side), which will be described later, and the rear side is the upstream side in the sheet transport direction (first side). The other side in one direction). The direction orthogonal to the front-rear direction is the left-right direction (second direction), and the direction orthogonal to the front-rear direction and the left-right direction is the vertical direction (third direction). The directions in FIGS. 2 to 4 conform to the directions indicated by arrows in FIG.

1. Sheet Manufacturing Apparatus As shown in FIG. 1, the sheet manufacturing apparatus 1 manufactures a sheet 2 (see FIGS. 2 to 4) for use in sealing an optical semiconductor element as an electronic element from a sheet composition. It is a manufacturing apparatus for.

  The sheet manufacturing apparatus 1 includes a film forming unit 3 and a post-processing unit 4 disposed on the front side of the film forming unit 3. In the sheet manufacturing apparatus 1, a transport carrier accommodation unit (not shown) is arranged on the rear side of the film forming unit 3, and a collection unit (not shown) is arranged on the front side of the post-processing unit 4.

  In the sheet manufacturing apparatus 1, the film forming unit 3 and the post-processing unit 4 are arranged in series along the front-rear direction. In the sheet manufacturing apparatus 1, the sheet composition is formed into a film by the film forming unit 3, and the formed sheet 2 is conveyed from the rear to the front, and then post-processed by the post-processing unit 4. .

  The conveyance carrier accommodation unit is disposed on the rear side of the sheet manufacturing apparatus 1. The transport carrier accommodating unit accommodates a plurality of transport carriers 6 and is configured to be able to transport the transport carriers 6 to the film forming unit 3 one by one. The carrier carrier accommodating part is also a movable carriage.

  The conveyance carrier 6 is configured such that a release substrate 7 (described later) can be placed on the upper surface thereof. Specifically, the transport carrier 6 is formed in a flat plate having a substantially rectangular shape in plan view.

  The film forming unit 3 includes a film forming table 5 and a film forming apparatus 8.

  The film formation table 5 has a substantially rectangular shape in plan view extending in the front-rear direction, and is formed in a box shape.

  The film forming apparatus 8 is an apparatus for applying a sheet composition to the surface of a release substrate 7 (described later) disposed on the transport carrier 6, and includes a rail 9, a sliding member 10, a mounting table 11, and the like. The support member 12 and the application member 13 are provided.

  A pair of rails 9 is provided on the upper surface of the film forming table 5 with a space therebetween in the left-right direction, and each rail 9 is formed on a straight line so as to extend in the front-rear direction.

  The sliding member 10 is attached to the rail 9 and is configured to move the mounting table 11 in the front-rear direction. The sliding member 10 includes a pair of guides. Each guide is formed in a substantially U-shape that is open downward when viewed from the front, and is slidably attached to the rail 9.

  The mounting table 11 is fixed to the upper surface of the pair of sliding members 10 and is configured to be able to mount the transport carrier 6. Specifically, the mounting table 11 is formed in a substantially rectangular flat plate so as to include one transport carrier 6 in plan view.

  A through-hole penetrating the mounting table 11 in the front-rear direction is formed at the center in the left-right direction of the mounting table 11. A ball screw 48 is fitted in the through hole. The ball screw 48 is formed such that its axis extends in the front-rear direction, and is configured to be able to move the mounting table 11 in the front-rear direction. Specifically, a motor (not shown) is attached to the rear end of the ball screw 48 via a coupling (bearing) (not shown). A first control board 44 (CPU) that adjusts the position and speed of the mounting table 11 is connected to the motor. The first control board 44 is built in a control device 46 as control means.

  The support member 12 is disposed at the center in the front-rear direction on the upper surface of the film forming table 5 and has a substantially U-shape in front view that opens downward. The support member 12 is provided so as not to overlap the trajectory on which the mounting table 11 moves. The support member 12 extends upward from the upper surface of the film formation table 5, and is constructed so that a pair of support rods 17 disposed opposite to each other across the mounting table 11 in the left-right direction and the upper ends of the pair of support rods 17 are installed. And an erection rod 18 fixed to the frame. The installation rod 18 is provided with a motor (not shown) and a guide (not shown) for moving the connecting pipe 16 (described later) in the left-right direction.

  The application member 13 is attached to the erection rod 18 and includes a pump 14, a nozzle 15, and a connection pipe 16 that connects them.

  The pump 14 is disposed at the upper end of the application member 13. The pump 14 is connected to a hose (not shown) for supplying the sheet composition to the nozzle 15 from a tank (not shown) in which the sheet composition (varnish) is stored. The sheet composition is supplied to the nozzle 15.

  The nozzle 15 is disposed at the lower end of the application member 13. A nozzle opening (not shown) for discharging the sheet composition is formed at the lower end of the nozzle 15. The nozzle opening is formed in a slit shape extending in the left-right direction.

  The connection pipe 16 is formed to extend in the vertical direction, and has an upper end connected to the pump 14 and a lower end connected to the nozzle 15. The connecting pipe 16 is attached to the construction rod 18 so as to be movable up and down and left and right.

  In the sheet manufacturing apparatus 1, a first transfer robot (not shown) is provided between the transfer carrier storage unit and the film forming unit 3. The first transfer robot is configured to be able to transfer the transfer carrier 6 accommodated in the transfer carrier accommodating portion to the mounting table 11.

  The post-processing unit 4 includes a post-processing table 47 extending in the front-rear direction. Thereafter, on the upper surface of the processing table 47, a supply region 23, a defoaming region 24, a stationary region, and a heating region as a first post-processing region. 25, the cooling region 26, and the discharge region 27 are partitioned in series.

  The post-processing table 47 has a substantially rectangular shape in plan view and is formed in a box shape.

  The supply area 23 is partitioned on the upper surface of the rear part of the post-processing table 47. The supply area 23 is an adjustment area in which the sheet 2 formed by the film forming unit 3 is temporarily placed and the start timing of the defoaming process is adjusted. The supply area 23 is partitioned in a substantially rectangular shape so as to include one transport carrier 6 temporarily placed in plan view.

  The defoaming region 24 is continuously partitioned on the upper surface of the post-treatment table 47 on the front side of the supply region 23. The defoaming region 24 is partitioned into a substantially rectangular shape so as to include one transport carrier 6 to be defoamed in plan view. The defoaming region 24 is configured to be able to discharge bubbles contained in the inside of the sheet 2 and / or bubbles present at the interface between the sheet 2 and the release substrate 7. Specifically, the defoaming region 24 includes a first adsorption base plate 29 and a vacuum chamber 28 as shown in FIG.

  The first suction base plate 29 is formed in a substantially rectangular plate shape in plan view, and is configured so that the transport carrier 6 can be sucked onto the upper surface of the first suction base plate 29. Specifically, a plurality of holes 30 connected to the vacuum pump P are formed on the upper surface of the first suction base plate 29.

  The vacuum chamber 28 is formed so that a sealed space is created when the peripheral edge of the vacuum chamber 28 comes into contact with the first suction base plate 29. The vacuum chamber 28 has a substantially rectangular shape smaller than the first suction base plate 29 in plan view. In addition, it is substantially U-shaped in cross section. A vacuum pump P is also connected to the vacuum chamber 28 so that the sealed space can be set under vacuum (or reduced pressure).

  As shown in FIG. 1, the heating region 25 is divided into a plurality (three) on the upper surface of the post-treatment table 47. The plurality of heating regions 25 are continuously partitioned on the front side of the defoaming region 24 and are arranged in series in the front-rear direction. That is, the plurality of heating regions 25 include a first heating region 25a disposed adjacent to the front side of the defoaming region 24, a second heating region 25b disposed adjacent to the front side of the first heating region 25a, and the second heating region. A third heating region 25c is provided adjacent to the front side of 25b.

  Each heating region 25 (that is, each of the first heating region 25a, the second heating region 25b, and the third heating region 25c) has a substantially rectangular shape so as to include one transport carrier 6 in plan view. Is formed. A hot plate 31 as a heating unit is provided on the upper surface of the post-processing table 47 corresponding to each heating region 25, and is configured to heat the sheet 2. Specifically, as shown in FIG. 3, the heating region 25 includes a hot plate 31, a second adsorption base plate 33, and a heat retaining hood 32.

  The hot plate 31 is disposed so as to be in contact with the upper surface of the post-processing table 47. The hot plate 31 is formed in a substantially rectangular plate shape so as to include one transport carrier 6 in a plan view, and includes a heater 31 a so that the transport carrier 6 can be heated.

  The second suction base plate 33 is disposed so as to contact the upper surface of the hot plate 31. The second suction base plate 33 is formed in a substantially rectangular plate shape that is the same as the hot plate 31 in a plan view, and is configured so that the transport carrier 6 can be sucked onto the upper surface of the second suction base plate 33. Specifically, a plurality of holes 34 connected to the vacuum pump P are formed on the upper surface of the second suction base plate 33. The second adsorption base plate 33 is made of a heat conductive material, and examples of the heat conductive material include metals such as aluminum, iron, copper, stainless steel, alloys thereof, and ceramics.

  The heat insulating hood 32 is formed so that a sealed space (heat insulating space) is formed when the peripheral edge of the heat insulating hood 32 comes into contact with the second adsorption base plate 33, and has a substantially rectangular shape smaller than the second adsorption base plate 33 in plan view. In addition, the cross-sectional view is substantially U-shaped.

  The cooling region 26 is continuously partitioned on the upper surface of the post-treatment table 47 on the front side of the heating region 25. The cooling region 26 is configured in a rectangular shape so as to include one transport carrier 6 to be cooled in a plan view, and is configured to be able to cool the sheet 2. Specifically, as shown in FIG. 4, the cooling region 26 includes a cooling plate 36 and a third suction base plate 35.

  The cooling plate 36 is disposed so as to contact the upper surface of the post-processing table 47. The cooling plate 36 is formed in a substantially rectangular plate shape so as to include one transport carrier 6 to be cooled in a plan view. The cooling plate 36 has a built-in cooling circuit 36 a that circulates a coolant such as cooling water, and is configured to cool the transport carrier 6.

  The third suction base plate 35 is disposed so as to contact the upper surface of the cooling plate 36. The third suction base plate 35 is formed in the same shape as the cooling plate 36 in plan view, and is configured so that the transport carrier 6 can be sucked onto the upper surface of the third suction base plate 35. Specifically, a plurality of holes 37 connected to the vacuum pump P are formed on the upper surface of the third suction base plate 35. The third adsorption base plate 35 is made of a heat conductive material, and examples of the heat conductive material include metals such as aluminum, iron, copper, stainless steel, alloys thereof, and ceramics.

  As shown in FIG. 1, the discharge region 27 is partitioned continuously on the front side of the cooling region 26 on the upper surface of the post-treatment table 47. The discharge area 27 is an area where the sheet 2 cooled in the cooling area 26 is temporarily placed. The discharge area 27 is partitioned into a substantially rectangular shape so as to include one transport carrier 6 that is temporarily placed in a plan view.

  The post-processing table 47 is provided with a groove 39 and a first transport mechanism 38 at the left end thereof.

  The groove 39 is formed at the left end of the post-treatment table 47 so as to extend linearly in the front-rear direction from the supply region 23 to the discharge region 27. The groove 39 is formed so as to accommodate an arm support plate 41 (described later).

  The first transport mechanism 38 includes a pair of arms 40 and an arm support plate 41 that supports the pair of arms 40.

  The pair of arms 40 are opposed to each other with a space therebetween in the front-rear direction. Each arm 40 is formed to extend in the left-right direction, and the left end of each arm 40 is fixed to the upper end edge of the arm support plate 41. The length in the left-right direction of each arm 40 is formed to be longer than the length in the left-right direction of the transport carrier 6. Each arm 40 includes two suction pads 42.

  The suction pad 42 is configured to be able to adsorb and desorb the transport carrier 6. The two suction pads 42 are provided on the lower surface of the arm 40 with a space in the left-right direction. The interval is arranged to be slightly shorter than the length in the left-right direction of the transport carrier 6.

  The arm support plate 41 has a flat plate shape and is configured to be able to move the arm 40 in the vertical direction and the front-rear direction. The arm support plate 41 is accommodated in the groove 39 so that the upper end of the arm support plate 41 is exposed from the groove 39. The arm support plate 41 is connected to a cylinder mechanism (not shown) and a pulley mechanism (not shown) housed in the post-processing table 47.

  The cylinder mechanism includes an air cylinder that is connected to the arm support plate 41 and can be advanced and retracted in the vertical direction, and is configured to move the arm support plate 41 in the vertical direction.

  The pulley mechanism is provided along the front-rear direction below the groove 39. The pulley mechanism includes two pulleys that are spaced apart in the front-rear direction, and an endless belt that is looped between the two pulleys. The air cylinder of the cylinder mechanism is fixed to the endless belt.

  Connected to the first transport mechanism 38 is a second control board 45 (CPU) that controls the suction release operation of the suction pad 42 and the vertical movement of the arm support plate 41. The second control board 45 is built in the control device 46.

  In addition, the sheet manufacturing apparatus 1 includes a second transport mechanism 19 between the film forming unit 3 and the post-processing unit 4. The second transport mechanism 19 is configured to be able to transport the transport carrier 6 transported to the rear end of the film forming unit 3 to the supply region 23.

  The second transport mechanism 19 is fixed to a support frame (not shown) provided between the film forming unit 3 and the post-processing unit 4, and is attached to the rod 20 so as to be slidable in the front-rear direction. An air cylinder 22 that can be expanded and contracted in the vertical direction, and a suction moving plate 21 that is attached to the lower end of the air cylinder 22 and has a substantially rectangular plate shape in plan view. The suction moving plate 21 is provided with four suction pads 43 at its four corners.

  The collection unit is a cart configured to accommodate the post-processed sheet 2 in the post-processing unit 4.

  In the sheet manufacturing apparatus 1, a second transfer robot (not shown) is provided between the post-processing unit 4 and the collection unit. The second transfer robot is configured to be able to transfer the transfer carrier 6 placed in the discharge area 27 to the collection unit.

  The vacuum pump P connected to the defoaming region 24, the heating region 25, and the cooling region 26 is common.

2. Next, a method for continuously manufacturing the sheet 2 using the sheet manufacturing apparatus 1 will be described. In this manufacturing method, after a film forming process for forming a film composition on a single sheet 2 is performed for each batch, and a heat treatment as a first post-process is performed on the single sheet 2 A processing step. Specifically, in this manufacturing method, a film forming process, an adjusting process, a defoaming process, a heating process, and a cooling process are sequentially performed.

<Preparation process>
First, a preparatory process is implemented before a film-forming process and a post-processing process. The preparation process includes a composition preparation process for preparing a sheet composition, a storage process for storing the transport carrier 6 on which the release substrate 7 is placed on the upper surface, and a heating area 25 and a cooling area 26. The temperature adjustment process of adjusting the temperature of this to a predetermined temperature is provided.

(Composition preparation process)
In the composition preparation step, a sheet composition is prepared.

  The sheet composition contains a curable resin. Examples of the curable resin include a one-stage curable resin and a two-stage curable resin, and preferably a two-stage curable resin.

  A two-stage curable resin has a two-stage reaction mechanism, and is a curable resin that is B-staged (semi-cured) in the first-stage reaction and C-staged (fully cured) in the second-stage reaction. It is.

  The B stage is a state in which the two-stage curable resin is between the liquid A stage and the fully cured C stage, and the curing and gelation are slightly advanced, and the compression elastic modulus is the C stage. It is in a state smaller than the elastic modulus.

  As the two-stage curable resin, for example, a two-stage curable thermosetting resin that is cured by heating, for example, two-stage curable active energy beam curing that is cured by irradiation with active energy rays (for example, ultraviolet rays, electron beams, etc.). For example, a functional resin. Preferably, a two-stage curable thermosetting resin is used.

  Specifically, examples of the two-stage curable thermosetting resin include silicone resin, epoxy resin, polyimide resin, phenol resin, urea resin, melamine resin, and unsaturated polyester resin. Preferably, a silicone resin is used from the viewpoint of translucency and durability.

  Examples of the silicone resin include a condensation reaction / addition reaction curable silicone resin having two reaction systems of a condensation reaction and an addition reaction.

  The blending ratio of the curable resin is, for example, 30% by mass or more, preferably 40% by mass or more, more preferably 50% by mass or more, and, for example, 98% by mass or less with respect to the sheet composition. Preferably, it is 95 mass% or less, More preferably, it is 90 mass% or less.

  In addition, the sheet composition may contain a phosphor and / or a filler as necessary.

  The phosphor has a wavelength conversion function, and examples thereof include a yellow phosphor capable of converting blue light into yellow light, and a red phosphor capable of converting blue light into red light.

  The blending ratio of the phosphor is, for example, 0.1 parts by mass or more, preferably 0.5 parts by mass or more, for example, 80 parts by mass or less, preferably 50 parts by mass with respect to 100 parts by mass of the curable resin. It is also below the department.

  Examples of the filler include organic fine particles such as silicone particles, and inorganic fine particles such as silica, talc, alumina, aluminum nitride, and silicon nitride.

  The blending ratio of the filler is, for example, 0.1 parts by mass or more, preferably 0.5 parts by mass or more, and for example, 70 parts by mass or less, preferably 100 parts by mass of the curable resin. It is also 50 parts by mass or less.

  In order to prepare the sheet composition, specifically, the above-described components are blended in a tank (not shown) connected to the pump 14, and then they are mixed using a stirrer built in the tank. Mix.

The viscosity of the sheet composition at 25 ° C. and 1 atm is, for example, 1,000 mPa · s or more, preferably 4,000 mPa · s or more, and, for example, 1,000,000 mPa · s or less, Preferably, it is 100,000 mPa · s or less. The viscosity is measured at a rotational speed of 99 s ⁻¹ by adjusting the temperature of the sheet composition to 25 ° C. and using an E-type cone.

(Containment process)
In the storing step, the transport carrier 6 on which the release substrate 7 is placed on the upper surface is stored in the transport carrier storage unit.

  Examples of the material of the transport carrier 6 include aluminum, iron, copper, stainless steel, alloys thereof, metals such as ceramics, and resins such as acrylic resins, epoxy resins, and polyimide resins. From the viewpoint of heat conduction efficiency in the heat treatment and the cooling treatment, preferably, a metal is used, and more preferably, aluminum, stainless steel, copper, or an alloy or ceramic thereof is used.

  The transport carrier 6 has a substantially rectangular shape in plan view, and the length in the front-rear direction is, for example, 200 to 400 mm, and the length in the left-right direction is, for example, 200 to 400 mm.

  Specific examples of the release substrate 7 include polymer sheets such as polyethylene sheets, polyester sheets (PET, etc.), polystyrene sheets, polycarbonate sheets, polyimide sheets, ceramic sheets, such as metal foil, and the like. . The upper surface of the release substrate 7 can be subjected to a peeling treatment such as a fluorine treatment. The length in the front-rear direction and the length in the left-right direction of the release substrate 7 are set to be shorter than the length in the front-rear direction and the length in the left-right direction of the transport carrier 6.

  In the housing step, the release base material 7 is placed on the upper surface of the transport carrier 6, and then a plurality of them are stacked in the vertical direction in the housing portion.

(Temperature adjustment process)
In the temperature adjustment step, the temperature of the heating region 25 and the cooling region 26 is adjusted in advance to a predetermined temperature. Specifically, the hot plate 31 and the cooling plate 36 are set to a predetermined temperature in advance.

  When the curable resin is a two-stage curable resin, the temperature of the hot plate 31 is, for example, a temperature at which the liquid (A stage) sheet 2 can be semi-cured (B stage), For example, it is 80 ° C. or higher, preferably 130 ° C. or higher, and for example, 150 ° C. or lower, preferably 140 ° C. or lower.

  The temperature of the cooling plate 36 is a temperature at which the semi-cured sheet 2 heated by the heat treatment can be cooled. When the curable resin is a two-stage curable resin, the semi-cured state is It is the temperature which can be maintained, for example, 10 degreeC or more, Preferably it is 13 degreeC or more, for example, 20 degreeC or less, Preferably, it is 15 degreeC or less.

  Hereinafter, a method of performing the film forming process and the post-processing process for each batch, that is, for each transport carrier 6 will be described.

<Manufacturing method in the first batch>
Production of sheets in the first batch (first batch: first batch in one cycle) will be described.

(Conveyance from the conveyance carrier housing part to the mounting table 11: start of production of the first batch)
A first transport carrier 6 (hereinafter, also referred to as “transport carrier” or “first transport carrier”) on which the release substrate 7 is placed on the upper surface is placed from the transport carrier housing portion to the placement table 11. Convey to the top surface.

  Specifically, by moving the arm of the first transfer robot in the vertical direction and the front-rear direction, the transfer carrier 6 is gripped and transferred from the transfer carrier accommodation unit to the upper surface of the mounting table 11. The mounting table 11 is located at the rear end (home position) of the film forming unit 3.

The transport time A ₁ required for transporting the transport carrier 6 from the transport carrier accommodating unit to the mounting table 11 is, for example, 1 second or longer, for example, 30 seconds or shorter, preferably as shown in FIG. Is 10 seconds or less.

(Deposition process)
Next, a sheet composition is formed on the upper surface of the release substrate 7 to form the sheet 2.

  Specifically, first, the mounting table 11 is moved forward by rotating the ball screw 48 by driving a motor. As a result, the transport carrier 6 is transported forward.

  The sheet composition discharged from the nozzle 15 is applied onto the release substrate 7 when the transport carrier 6 passes below the installation rod 18. That is, when the transport carrier 6 passes through the installation rod 18, the nozzle 15 moves downward so as to be close to the release substrate 7 with a very small distance, and the pump 14 is operated from the nozzle opening. The sheet composition is discharged onto the release substrate 7. In addition, after discharging the sheet composition to the release substrate 7 from the nozzle opening, after transporting the transport carrier 6 forward by a predetermined distance (that is, the length of the target sheet 2 in the front-rear direction), While stopping the pump 14, the nozzle 15 is moved upward to separate the nozzle opening from the release substrate 7. Thereby, the single sheet 2 which consists of a sheet composition is formed into a film.

  When a plurality of single-sheets 2 are formed on the surface of one (single) release substrate 7, the pump 14 is activated and stopped, the nozzle 15 is moved vertically and horizontally, and the mounting table 11. Repeat the back and forth movement. In FIG. 1, two single-sheets 2 are formed on the upper surface of one release substrate 7.

  After the sheet 2 is deposited on the release substrate 7, the ball screw 48 is rotated to move the mounting table 11 to the front end of the deposition unit 3.

Deposition time A ₂ required for the deposition _process, i.e., the time A ₂ to conveying after placed on the mounting table 11 of the transport carrier 6, the mounting table 11 to the front end portion of the deposition section 3, for example 1 second or longer, and for example, 120 seconds or shorter, preferably 60 seconds or shorter.

(Conveyance of the conveyance carrier 6 from the front end part of the film-forming part 3 to the supply area | region 23)
Next, the transport carrier 6 is transported from the front end of the film forming unit 3 to the supply region 23.

  Specifically, the suction moving plate 21 is moved in advance above the rear end portion of the second transport mechanism 19, that is, above the front end portion of the film forming unit 3.

  Next, after the transport carrier 6 is transported to the front end of the film forming unit 3, the air cylinder 22 is extended, that is, the suction moving plate 21 is lowered, and the four suction pads 43 are placed on the upper surface of the transport carrier 6. Make contact with the four corners. Subsequently, the transport carrier 6 is sucked by the suction operation of the four suction pads 43.

  Subsequently, the air cylinder 22 is shortened, that is, the suction moving plate 21 is raised, and the transport carrier 6 is pulled up.

  Subsequently, the air cylinder 22 is moved along the rod 20 to the front end of the rod 20, that is, above the supply region 23.

Subsequently, the air cylinder 22 is extended, that is, the suction moving plate 21 is lowered, and the transport carrier 6 is pulled down.
Subsequently, after the suction moving plate 21 is lowered until the lower surface of the transport carrier 6 comes into contact with the supply region 23, the transport carrier 6 is placed on the upper surface of the supply region 23 by the suction release operation of the suction pad 43. .

The transport time A ₃ of the transport carrier 6 required for transport from the front end of the film forming unit 3 to the supply region 23 is, for example, 1 second or longer, and for example, 30 seconds or shorter, preferably 10 seconds or shorter. is there.

(Adjustment process in the supply area 23)
Next, the transport carrier 6 is kept waiting for a predetermined time in the supply area 23 (adjustment process).

Adjustment time _{A 4} of the transport carrier 6 in the supply region 23 is, for example, one second or more, and is, for example, 30 seconds or less, preferably 10 seconds or less.

(Conveyance of the conveyance carrier 6 from the supply area 23 to the defoaming area 24)
Next, the transport carrier 6 is transported from the supply region 23 to the defoaming region 24.

  First, the first transport mechanism 38 is moved to the supply area 23. Specifically, the arm 40 is moved to the upper side of the transport carrier 6 by the pulley mechanism.

  Subsequently, the arm support plate 41 is lowered by the cylinder mechanism, thereby lowering the pair of arms 40 and bringing the four suction pads 42 into contact with the four corners of the transport carrier 6.

  Subsequently, the transport carrier 6 is sucked by the suction operation of the suction pad 42.

  Subsequently, the arm support plate 41 is raised by the cylinder mechanism, thereby raising the arm 40 and pulling up the transport carrier 6.

  Subsequently, with the transport carrier 6 pulled up, the arm support plate 41 is moved forward by the pulley mechanism, thereby transporting the transport carrier 6 forward, and moving the transport carrier 6 above the defoaming region 24. To reach.

  Subsequently, the arm support plate 41 is lowered by the cylinder mechanism, whereby the arm 40 is lowered, and the transport carrier 6 is brought into contact with the upper surface of the defoaming region 24.

  Subsequently, the transport carrier 6 is placed on the upper surface of the defoaming region 24 by the suction release operation of the suction pad 42.

  Subsequently, the first transport mechanism 38 is moved forward or backward to retract from the defoaming region 24.

Transport time A ₅ required for the transport of the conveying carrier 6 to defoaming region 24 from the feed region 23, for example, not less than 1 second, and is, for example, 30 seconds or less, preferably 10 seconds or less.

(Defoaming process)
Next, a defoaming process for defoaming the sheet 2 is performed in the defoaming region 24.

  Specifically, the vacuum pump P is operated and the transport carrier 6 is adsorbed to the first adsorption base plate 29.

  Subsequently, as shown in FIG. 2, the vacuum chamber 28 is closed, and the defoaming region 24 is sealed by the vacuum chamber 28 and the first adsorption base plate 29 to form a sealed space.

  Subsequently, the vacuum pump P connected to the vacuum chamber 28 is operated, and the sealed space is evacuated (or decompressed).

  Thereby, bubbles contained in the inside of the sheet 2 and bubbles present at the interface between the sheet 2 and the release substrate 7 are removed.

  The degree of vacuum is, for example, 100 Pa or less, preferably 10 Pa or less.

Defoaming time _{A 6} required for the defoaming process may be, for example, 30 seconds or more, preferably, not less than 60 seconds, and is, for example, 180 seconds or less, preferably not more than 120 seconds.

(Conveyance of the carrier 6 from the defoaming region 24 to the first heating region 25a)
Next, the transport carrier 6 on which the defoamed sheet 2 is placed is transported from the defoaming region 24 to the first heating region 25a.

  Specifically, the decompression of the sealed space and the suction of the transport carrier 6 are released, and the vacuum chamber 28 is opened. Then, the 1st conveyance mechanism 38 is operated similarly to the conveyance from the supply area | region 23 to the defoaming area | region 24, and the conveyance carrier 6 is conveyed from the defoaming area | region 24 to the 1st heating area | region 25a.

The transfer time A ₇ required for transfer from the defoaming region 24 to the first heating region 25a is, for example, 1 second or longer, and is, for example, 30 seconds or shorter, preferably 10 seconds or shorter.

(Heat treatment)
Next, heat treatment for heating the sheet 2 is performed in the first heating region 25a.

  Specifically, the vacuum pump P is operated and the transport carrier 6 is sucked to the second suction base plate 33.

  Subsequently, as shown in FIG. 3, the heat retaining hood 32 is closed, and the first heating region 25 a is sealed by the heat retaining hood 32 and the second adsorption base plate 33 to form a sealed space.

  Thereby, the heat of the hot plate 31 is conducted through the second suction base plate 33 and the transport carrier 6 through the sheet 2, and as a result, the sheet 2 is heated. Further, the sheet 2 is also heated by the high-temperature air in the sealed space.

The control device 46 sets the conditions for the first control substrate 44 and the second control substrate 45 so that the heating time A ₈ required for the heat treatment of the transport carrier 6 is longer than the film formation time A ₂ .

The heating time A ₈ exceeds, for example, 1 time, preferably 2 times or more, for example, 12 times or less, preferably 10 times or less, with respect to the film formation time A ₂ . Further, it is particularly preferably (number of heating means (hot plate 31) +1) times or less, more preferably (number of heating means (hot plate 31)) times or less. Specifically, the heating time _{A 8,} for example, 120 seconds or more, preferably, not less than 180 seconds, and is, for example, 1500 seconds or less, preferably not more than 1200 seconds.

(Conveyance of the conveyance carrier 6 from the 1st heating area | region 25a to the cooling area | region 26)
Next, the transport carrier 6 on which the heat-treated sheet 2 is placed is transported from the first heating area 25 a to the cooling area 26.

  Specifically, the decompression of the sealed space and the suction of the transport carrier 6 are released, and the heat retaining hood 32 is opened. Then, the 1st conveyance mechanism 38 is operated similarly to the conveyance from the supply area | region 23 to the defoaming area | region 24, and the conveyance carrier 6 is conveyed to the cooling area | region 26 from the 1st heating area | region 25a.

Transport time A ₉ taken from the first heating region 25a to the transport of to the cooling region 26 is, for example, one second or more, and is, for example, 30 seconds or less, preferably 10 seconds or less.

(Cooling process)
Next, a cooling process for cooling the sheet 2 is performed in the cooling region 26.

  Specifically, as shown in FIG. 5, the vacuum pump P is operated and the transport carrier 6 is adsorbed to the third adsorption base plate 35. A refrigerant flows through the cooling plate 36 in the cooling circuit 36a.

  As a result, the cooling plate 36 cools the sheet 2 via the third suction base plate 35 and the transport carrier 6.

Cooling time _{A 10} required for the cooling process, for example, 30 seconds or more, preferably, not less than 45 seconds, and is, for example, 120 seconds or less, preferably 60 seconds or less.

(Conveyance of the conveyance carrier 6 from the cooling area 26 to the discharge area 27)
Next, the transport carrier 6 on which the cooled sheet 2 is placed is transported from the cooling region 26 to the discharge region 27.

  Specifically, the suction of the transport carrier 6 is released, and then the first transport mechanism 38 is operated in the same manner as the transport from the supply region 23 to the defoaming region 24, and the transport carrier 6 is moved from the cooling region 26. It is conveyed to the discharge area 27.

The transfer time A ₁₁ required for transfer from the cooling region 26 to the discharge region 27 is, for example, 1 second or longer, and is, for example, 30 seconds or shorter, preferably 10 seconds or shorter.

(Conveyance of the conveyance carrier 6 from the discharge area 27 to the collection unit)
Next, the transport carrier 6 is transported from the discharge area 27 to the collection unit.

  Specifically, the arm of the second transfer robot is moved in the vertical direction and the front-rear direction so that the transfer carrier 6 is gripped and transferred from the discharge area 27 to the collection unit. Thereafter, the collection unit collects the carrier 6 inside.

<Manufacturing method in the second batch>
In the manufacture of the sheet in the second batch (second batch), the second transport carrier 6 (second transport carrier) is used.

  In the production in the second batch, the second carrier is delayed from the first carrier by a predetermined time and conveyed from the carrier carrier accommodating portion, and the heat treatment is performed in the second heating region 25b. Otherwise, it is carried out in the same manner as the production of the first batch.

As shown in FIG. 5, the start of the second batch is the second batch delay time B ₀ (timing to start transport from the transport carrier accommodating portion in the first transport carrier from the start of the first batch (at time 0 second). To the timing at which the second carrier carrier starts to carry from the carrier carrier accommodating portion). Specifically, the start of the second batch is performed at the timing when the first transport carrier is defoamed in the defoaming region 24. In addition, the start of the second batch is performed immediately after the transport of the first transport carrier from the defoaming region 24 to the first heating region 25a (T ₄ ), and from the supply region 23 to the defoaming region 24 in the first batch. Is carried out so that the transport of the second transport carrier is started (that is, in FIG. 5, the transport time A ₇ and the transport time B ₅ are continuous on the time axis).

Each time A _{1 to} A ₁₁ in the first batch is applied to each time B _{1 to} B ₁₁ in the second batch.

In particular, the transport time B ₇ required for transport from the defoaming region 24 to the second heating region 25b in the second transport carrier is set longer than the transport time A ₇ , for example, 1 second or more, 30 seconds or less, preferably 10 seconds or less.

The transport time B ₉ required for transport from the second heating region 25b to the cooling region 26 in the second transport carrier is set to be shorter than the transport time A ₉ , and is, for example, 1 second or longer, for example, 30 seconds or shorter. Preferably, it is 10 seconds or less.

<Manufacturing method in the third batch>
In the manufacture of the sheet in the third batch (third batch: last batch in one cycle), the third transport carrier 6 (third transport carrier) is used.

  Manufacturing in the third batch is performed except that the third transport carrier is transported from the transport carrier accommodating portion with a predetermined time delay from the second transport carrier, and that the heat treatment is performed in the third heating region 25c. Is carried out in the same way as the production of the first batch.

As shown in FIG. 5, the third batch starts from the start of the first batch, to the third batch delay time C ₀ (from the timing at which the transport from the transport carrier container in the first transport carrier starts, to the third transport. This is carried out when a delay time until the start of transport from the transport carrier accommodating portion in the carrier elapses. Specifically, the start of the third batch is performed at a timing when the first transport carrier is heat-treated in the first heating region 25 a and the second transport carrier is defoamed in the defoaming region 24. The start of the third batch is the conveyance of the third conveyance carrier from the supply area 23 to the defoaming area 24 immediately after the conveyance of the second conveyance carrier from the defoaming area 24 to the second heating area 25b is completed. (That is, in FIG. 5, the conveyance time B ₇ and the conveyance time C ₅ are continued on the time axis).

The times A _{1 to} A ₁₁ in the first batch are applied to the times C _{1 to} C ₁₁ in the third batch.

The transport time C ₇ required for transport from the defoaming region 24 to the third heating region 25c in the third transport carrier is set longer than the transport time B ₇ , for example, 1 second or longer, 30 seconds or less, preferably 10 seconds or less.

The third in the transporting time C ₉ required for transporting from the third heating region 25c in the transport carrier to the cooling region 26 is set shorter than the transport time B _9, for example, not less than 1 second, and is, for example, 30 seconds Hereinafter, it is preferably 10 seconds or less.

<Manufacturing method in the fourth batch>
In the manufacture of the sheet in the fourth batch (fourth batch: the first batch in two cycles), the fourth transport carrier 6 (fourth transport carrier) is used.

  The manufacture in the fourth batch is performed in the same manner as in the manufacture of the first batch, except that the fourth transport carrier is transported from the transport carrier storage unit with a predetermined time delay from the third transport carrier.

As shown in FIG. 5, the fourth batch starts from the start of the first batch to the fourth batch delay time D ₀ (from the timing of starting the transfer from the transfer carrier storage unit in the first transfer carrier to the fourth transfer. This is carried out when a delay time until the start of transport from the transport carrier accommodating portion in the carrier elapses. Specifically, the start of the fourth batch is performed at the timing when the first transport carrier is heated in the first heating region 25a. The fourth batch of heat treatment is performed after the first batch of heat treatment. In addition, the fourth batch start is performed immediately after the conveyance of the first conveyance carrier from the first heating area 25a to the cooling area 26 is completed, and the conveyance of the fourth conveyance carrier from the defoaming area 24 to the first heating area 25a. Is started (that is, in FIG. 5, the transport time A ₉ and the transport time D ₇ are continuous on the time axis).

The times A _{1 to} A ₁₁ in the first batch are applied to the times D _{1 to} D ₁₁ in the fourth batch.

<Manufacturing method in the fifth batch>
In the manufacture of the sheet in the fifth batch (fifth batch: second batch in two cycles), the fifth transport carrier 6 (fifth transport carrier) is used.

  The manufacture in the fifth batch is performed in the same manner as in the manufacture of the second batch, except that the fifth transport carrier is transported from the transport carrier storage unit after a predetermined time delay from the fourth transport carrier.

As shown in FIG. 5, the fifth batch starts from the start of the first batch, to the fifth batch delay time E ₀ (from the timing of starting the transfer from the transfer carrier storage unit in the first transfer carrier to the fifth transfer. This is carried out when a delay time until the start of transport from the transport carrier accommodating portion in the carrier elapses. Specifically, the start of the fifth batch is performed at the timing when the fourth carrier is defoamed in the defoaming region 24. The heat treatment for the fifth batch is performed after the heat treatment for the second batch. In addition, the start of the fifth batch is the transfer of the fifth transport carrier from the supply region 23 to the defoaming region 24 immediately after the transport of the fourth transport carrier from the defoaming region 24 to the first heating region 25a is completed. (That is, in FIG. 5, the conveyance time D ₇ and the conveyance time E ₅ are continuous on the time axis). Furthermore, the start of the fifth batch is performed immediately after the transport of the second transport carrier from the second heating region 25b to the cooling region 26 is completed, and the fifth transport carrier from the defoaming region 24 to the second heating region 25b. Carrying is performed so that the conveyance is started (that is, in FIG. 5, the conveyance time B ₉ and the conveyance time E ₇ are continuous on the time axis).

The times B _{1 to} B ₁₁ in the second batch are applied to the times E _{1 to} E ₁₁ in the fifth batch.

<Manufacturing method in the sixth batch>
In the manufacture of the sheet in the sixth batch (sixth batch: the last batch in two cycles), the sixth transport carrier 6 (sixth transport carrier) is used.

  The manufacture in the sixth batch is carried out in the same manner as in the manufacture of the third batch except that the sixth transport carrier is transported from the transport carrier accommodating portion with a predetermined time delay from the fifth transport carrier.

As shown in FIG. 5, the sixth batch starts from the start of the first batch, from the start of the sixth batch delay time F ₀ (from the timing of starting the transfer from the transfer carrier container in the first transfer carrier, to the sixth batch. This is performed at the time when a delay time until the start of transport from the transport carrier accommodating portion in the transport carrier has elapsed. Specifically, the start of the sixth batch is performed at a timing when the fourth transport carrier is heat-treated in the first heating region 25 a and the fifth transport carrier is de-foamed in the defoaming region 24. The heat treatment for the sixth batch is performed after the heat treatment for the third batch. In addition, the start of the sixth batch is the transfer of the sixth transport carrier from the supply region 23 to the defoaming region 24 immediately after the transport of the fifth transport carrier from the defoaming region 24 to the second heating region 25b is completed. (That is, in FIG. 5, the transport time E ₇ and the transport time F ₅ are continuous on the time axis). Furthermore, the start of the sixth batch is performed immediately after the conveyance of the third conveyance carrier from the third heating area 25c to the cooling area 26 is completed, and the sixth conveyance carrier from the defoaming area 24 to the third heating area 25c. Carrying is performed so that the conveyance is started (that is, in FIG. 5, the conveyance time B ₉ and the conveyance time E ₇ are continuous on the time axis).

Each time _C 1 _{-C 11} in the third batch is applied to each time _F 1 _{to F 11} in the sixth batch.

<The manufacturing method in the batch after the seventh>
The seventh and subsequent sheet manufacturing methods are repeatedly performed in the same manner as the fourth to sixth transport carriers except for the batch start times.

<Manufacturing process of each carrier in heating area 25>
Next, focusing on the heating region 25, the manufacturing steps of the first to sixth transport carriers will be described.

First, the first transport carrier is transported from the defoaming region 24 in the first heating zone 25a, a heating process is started (time T ₁ of the FIG. 5). Thereafter, when the first batch of single sheets 2 (single sheets 2 placed on the first conveyance carrier) is being heated in the first heating region 25a, the second conveyance carrier is defoamed. It is conveyed from the region 24 to the second heating region 25b, and the heat treatment is started (T ₂ ). From T ₂ to T ₃ (described later), the first batch of sheet 2 and the second batch of sheet 2 are simultaneously heat-treated.

Thereafter, the third transport carrier is transported from the defoaming region 24 to the third heating region 25c, and the heat treatment is started (T ₃ ). From T ₃ to T ₄ (discussed below), the first batch of sheet 2, the second batch of sheet 2, and the third batch of sheet 2 are simultaneously heat-treated.

Thereafter, when the predetermined heating time (A ₈ ) of the first batch of sheet 2 is completed (T ₄ ), the first transport carrier is transported from the first heating region 25 a to the cooling region 26. Thereafter, the fourth transport carrier is transported from the defoaming region 24 to the first heating region 25a, and the heat treatment on the fourth batch of single wafer sheets is started (T ₅ ). From T ₄ to T ₅ , the first transport mechanism 38 completes the transport of the first transport carrier to the cooling region 26 and at the same time from the defoaming region 24 to the first transport region 25a of the fourth transport carrier. Start transporting. From T ₄ to T ₅ (described later), the second batch of sheet 2 and the third batch of sheet 2 are simultaneously heat-treated. Over from T ₅ to T _{6 (described} later), a second batch of single sheet and single sheet 2 of the third batch of single sheet 2 and the fourth batch is heat-treated simultaneously in parallel.

Thereafter, when the predetermined heating time (B ₈ ) of the second batch of sheet 2 is completed (T ₆ ), the second transport carrier is transported from the second heating area 25 b to the cooling area 26. Then, the fifth transport carrier is transported from the defoaming region 24 to second heating region 25b, heat treatment in single sheet 2 of the 5 batches is started (T _7). Note that, in the transport between the T ₆ of T _7, the first transport mechanism 38 and, at the same time to complete the conveyance of the cooling region 26 to the second transport carrier, a defoaming region 24 for the fifth transport carrier second The conveyance to the heating area | region 25b is started. A period from T ₆ to T _7, single sheet 2 of single sheet 2 and the fourth batch of third batch is heat-treated simultaneously in parallel. A period from T ₇ to T _{8 (described} later), a third batch of single sheet 2, single sheet 2 of the fourth batch of single sheet 2 and the fifth batch is heat-treated simultaneously in parallel.

Thereafter, when the predetermined heating time (C ₈ ) of the third batch of sheet 2 is completed (T ₈ ), the third transport carrier is transported from the third heating area 25 c to the cooling area 26. Thereafter, the sixth transport carrier is transported from the defoaming region 24 to the third heating region 25c, and the heat treatment on the sixth batch of the sheet 2 is started (T ₉ ). Note that, in the transport between the T ₈ of T _9, the first transport mechanism 38 and, at the same time to complete the conveyance of the cooling region 26 to the third transport carrier, third from degassing area 24 for the sixth transport carrier The conveyance to the heating area | region 25c is started. A period from T ₈ to T _9, single sheet 2 of the fourth batch of single sheet 2 and the fifth batch is heat-treated simultaneously in parallel. A period from T ₉ to T _{10 (described} later), single sheet 2 of the fourth batch, single sheet 2 of the fifth batch of single sheet 2 and the sixth batch is heat-treated simultaneously in parallel.

Thereafter, when the predetermined heating time (D ₈ ) of the fourth batch of sheet 2 is completed (T ₁₀ ), the fourth transport carrier is transported from the first heating region 25 a to the cooling region 26.

  Then, it repeats similarly to the said 4th-6th batch sheet | seat sheet 2 about the sheet | seat sheet 2 after the 7th batch.

From the above, the T ₂ later, at the same time parallel heating a single sheet 2 of a plurality batches it has been implemented. Specifically, from T ₂ to T ₃ , two batches of sheet 2 are heated, from T ₃ to T ₄ , three batches of sheet 2 are heated, and from T ₄ to T ₅ , A batch of sheet 2 is heated, from T ₅ to T ₆ three batches of sheet 2 are heated, from T ₆ to T ₇ two batches of sheet 2 are heated, and from T ₇ to T ₈ , three batches of sheet 2 are heated, T ₈ to T ₉ , two batches of sheet 2 are heated, and T ₉ to T ₁₀ , three batches of sheet 2 are heated. Yes.

<Batch start timing in this cycle>
The batch start timing in the current cycle will be described below using the batch start timing in the second cycle as an example with reference to FIGS.

  The sheet manufacturing apparatus 1 in FIG. 1 includes three (n) heating regions 25. Therefore, the control means (the control device 46) controls the sheet manufacturing with one cycle as the process of performing three batches corresponding to the number of the heating regions 25.

The batch start timing (T _D shown in FIG. 5) in the second cycle is the start timing of the fourth batch, that is, the start timing (T _D ) of transport from the transport carrier accommodating portion in the fourth transport carrier.

The start timing (T _D ) of the fourth transport carrier is set by the control device 46 with reference to the end timing (T ₄ ) of the heating process of the first transport carrier (first batch of the first cycle).

That is, after the heat treatment for the first transport carrier is completed (T ₄ ), the fourth transport is continuously performed when the transport from the first heating region 25a to the cooling region 26 in the first transport carrier is completed (T ₅ ). The start timing of the fourth transport carrier is determined so that transport from the defoaming region 24 to the first heating region 25a in the carrier is started.

  This can minimize the empty time in the first heating region 25a (that is, the time during which no carrier is placed on the first heating region 25a), and the heating time in the first heating region 25a. The maximum can be ensured. As a result, the sheet 2 can be efficiently manufactured.

  The thus obtained single wafer sheet 2 can be used for various industrial applications, for example, it can be used for electronic products such as liquid crystal panels, semiconductors, printed wiring boards, integrated circuits, and secondary battery containers. .

  More specifically, it is used as a sealing sheet for sealing an electronic element, and preferably used as a sealing sheet for sealing an optical semiconductor element such as a light emitting diode element.

  And according to this manufacturing method, the sheet | seat sheet 2 (n + 1 batch, for example, the sheet | seat sheet in a 2nd batch) formed into a film in the film-forming process is made into the sheet | seat sheet 2 ( The heat treatment can be performed in parallel with the n-th batch, for example, the sheet in the first batch. Therefore, the heat treatment can be performed on the formed sheet 2 without waiting until the heat treatment of the sheet formed immediately before is completed.

  As a result, the manufacturing time of the sheet 2 can be shortened, and the sheet 2 can be manufactured efficiently.

  Further, according to this manufacturing method, in the heat treatment step, the heat treatment is performed in the heating regions 25 that are different for each batch, that is, the first heating region 25a, the second heating region 25b, and the third heating region 25c. The sheet 2 formed in the film unit 3 is in parallel with the sheet 2 formed immediately before the different heating regions 25, that is, the first heating region 25a, the second heating region 25b, and Heat treatment can be performed in the third heating region 25c. Therefore, the manufacturing time of the sheet 2 can be shortened, and the sheet 2 can be manufactured efficiently.

  Moreover, according to this manufacturing method, since a process condition can be set for every different heating area | region 25, the sheet 2 can be heat-processed on a different condition for every batch. Therefore, different types of sheet 2 can be produced for each batch.

  Moreover, according to this sheet manufacturing method, since the first post-processing is a heating process for heating the single-wafer sheet 2, a heat-treated single-wafer sheet can be manufactured. As a result, if the sheet composition contains a thermosetting resin, the sheet 2 in a semi-cured state or a cured state can be manufactured.

  In addition, according to the sheet manufacturing apparatus 1, the sheet 2 formed in the film forming unit 3 (the n + 1th batch, for example, the sheet in the second batch) is immediately before the post-processing unit 4. Heat treatment can be performed in parallel with the film-formed sheet (n-th batch, for example, the sheet in the first batch) 2. Therefore, the heat treatment can be performed on the formed sheet 2 without waiting until the heat treatment of the sheet 2 formed immediately before is completed.

  As a result, the manufacturing time of the sheet 2 can be shortened, and the sheet 2 can be manufactured efficiently.

  Moreover, according to this sheet manufacturing apparatus 1, in the post-processing unit 4, a plurality of heating regions 25 in which heating processing is performed in different heating regions 25 for each batch, that is, the first heating region 25a and the second heating region 25b. And the third heating region 25c is provided, the film-formed sheet 2 can be subjected to a heat treatment in a different heating region 25 in parallel with the sheet 2 formed immediately before. . Therefore, the manufacturing time of the sheet 2 can be shortened, and the sheet 2 can be manufactured efficiently.

  Moreover, since the processing conditions can be set for each different heating region 25, the heat treatment can be performed on the single sheet 2 for each batch under different conditions. Therefore, different types of sheet 2 can be produced for each batch.

  Further, according to the sheet manufacturing apparatus 1, the heating region 25 includes the hot plate 31.

  Therefore, the heat-treated sheet 1 can be manufactured. As a result, if the sheet composition contains a thermosetting resin, the sheet 2 in a semi-cured state or a cured state can be manufactured.

Further, according to the sheet manufacturing apparatus 1, the post-processing unit 4 includes three heating regions 25, and the control device 46 sets a process of performing three batches of the heating process as one cycle, and the previous cycle (n cycle). , For example, the current cycle (n + 1 cycle, for example, second cycle) with reference to the end timing (for example, T ₄ ) of the heat treatment of the first batch (n-th batch, for example, first batch) of the first cycle) ) Start timing (eg, T _D ) can be set.

  Therefore, after finishing the heat treatment for the first batch (first batch) of the previous cycle (first cycle), for the first batch (fourth batch) of this cycle (second cycle) without delay The heat treatment can be started. Therefore, the sheet 2 can be manufactured efficiently.

<Modification>
A modification of the manufacturing apparatus will be described with reference to FIGS. 6 to 8, the same reference numerals are given to the same members as those in the above embodiment, and the description thereof is omitted.

  In the manufacturing apparatus of the embodiment of FIG. 1, the heating regions 25 (25a, 25b, 25c) are partitioned in series in the front-rear direction. For example, as shown in FIG. 6, the heating regions 25 (25a, 25b, 25c) can also be partitioned in the vertical direction.

  That is, in the embodiment of FIG. 6, a heating tower 50 formed in a box shape extending in the vertical direction is provided on the front side of the defoaming region 24, and a plurality of heating regions 25 (25 a) are provided inside the heating tower 50. 25b and 25c) are partitioned in the vertical direction at intervals. In addition, on the front side surface and the rear side surface of the heating tower 50, a carry-in port 51 and a carry-out port (not shown) for carrying the carry carrier 6 in and out of the heating region 25 correspond to the respective heating regions 25. Is formed.

  A lift (not shown) is provided on the front side and the rear side of the heating tower 50 to carry the carrier 6 into and out of the carry-in port 51 and the carry-out port of each heating region 25.

  In the manufacturing apparatus of the embodiment of FIG. 1, the heating unit includes a hot plate 31 that forms a stationary region (that is, does not move like a belt conveyor). For example, as shown in FIG. An oven 52 can be provided.

  In the embodiment of FIG. 7, a plurality (three) of ovens 52 are provided on the right side of each heating region 25 (25a, 25b, 25c). An oven opening 53 is formed on the left side surface of the oven 52 so that the carrier 6 can be carried in and out in the direction indicated by the arrow in FIG. 7 by an oven moving arm (not shown).

  In the embodiment of FIG. 1, the transport carrier 6 is securely fixed to the upper surface of the second suction base plate 33 disposed on the upper surface of the hot plate 31. Therefore, the stable heat of the hot plate 31 can be reliably conducted to the transport carrier 6. As a result, the sheet 2 can be reliably and efficiently heated.

  On the other hand, if it is embodiment of FIG. 7, since a manufacturing apparatus can be designed easily, the sheet 2 can be manufactured at low cost.

  In the embodiment of FIG. 7, a plurality of ovens 52 as heating means are provided in series in the front-rear direction. For example, as shown in FIG. The oven may be a shelf type oven 54 on which a plurality of transport carriers 6 can be placed in the vertical direction and heated.

  If it is embodiment of FIG. 8, since a manufacturing apparatus can be designed still more easily, the sheet 2 can be manufactured at low cost.

  In the manufacturing apparatus of the embodiment of FIG. 1, the post-processing unit 4 includes three heating regions 25 (that is, n is 3). For example, although not shown, the two heating regions 25 or four are provided. The above heating area | region 25 can also be provided.

  In this embodiment, two batches of sheet 2 or four or more batches of sheets 2 can be heated simultaneously in parallel.

  In addition, n (integer) is 2 or more, Preferably it is 3 or more, for example, is 12 or less, Preferably, it is 10 or less.

In the manufacturing method in the embodiment of FIGS. 1 and 5, the heating times A ₈ , B ₈ and C ₈ in each heating region 25 (first heating region 25a, second heating region 25b, and third heating region 25c) are respectively Although the same time is set, for example, although not shown, the heating times A ₈ , B ₈ and C ₈ can be set to different times.

  According to the embodiment in which the different times are set, the heat treatment can be performed on the single sheet 2 for each batch under different conditions. Therefore, different types of sheet 2 can be produced for each batch.

  In the manufacturing method in the embodiment of FIG. 1, the heating time is set longer than the film formation time, and a plurality of (three) batches of sheet-fed sheets are heated simultaneously in parallel. The defoaming treatment as the first post-treatment can be set longer than the film formation time, and a plurality (three) of batch sheets can be defoamed simultaneously in parallel.

  That is, in the sheet manufacturing apparatus 1 in the embodiment of FIG. 1, the control device 46 is set so that the defoaming time is longer than the film formation time, and the post-processing unit 4 is configured to simultaneously load a plurality of batches of sheet 2. It can comprise so that a defoaming process may be implemented in parallel. Specifically, although not shown, the post-processing unit 4 includes a plurality (three) of defoaming regions 24.

  Also according to this embodiment, the same effect as that of the embodiment of FIG. 1 can be obtained.

  In the manufacturing method in the embodiment of FIG. 1, the heat treatment is performed, and then the sheet is cooled. For example, although not illustrated, the sheet is not subjected to the cooling treatment after the heat treatment is performed. The sheet can be collected in the collection unit.

  That is, in the manufacturing apparatus in the embodiment of FIG. 1, the cooling region 26 is arranged on the front side of the third heating region 25 c, but although not shown, for example, without providing the cooling region 26, The discharge area 27 can be adjacently disposed on the front side.

  According to the embodiment of FIG. 1, the heat-treated sheet 2 can be cooled after the heat treatment, so that an accurate heat history can be imparted to the sheet 2.

  In the manufacturing method of the embodiment of FIG. 1, in the post-processing step, the sheet is defoamed before the heat treatment. For example, although not illustrated, the defoaming region 24 is not provided, After film formation, heat treatment can be performed without performing defoaming.

  That is, in the manufacturing apparatus of the embodiment of FIG. 1, the post-processing unit 4 includes a defoaming region 24 for defoaming the sheet 2 between the film forming unit 3 and the first heating region 25a. For example, although not shown, the first heating region 25 a can be disposed adjacent to the front side of the supply region 23.

  However, the deposited sheet 2 contains bubbles inside, or bubbles exist at the interface between the sheet 2, the sheet 2 and the release substrate 7. When the sheet 2 is heated, the sheet 2 is hardened in a state where the bubbles are expanded inside or at the interface of the sheet 2, so that the surface of the sheet 2 is roughened.

  On the other hand, according to the embodiment of FIG. 1, bubbles contained in the inside of the sheet 2 and / or bubbles present at the interface between the sheet 2 and the release substrate 7 are discharged prior to the heat treatment. can do. Therefore, generation | occurrence | production of the bubble at the time of heat processing can be suppressed, and the surface roughness of the sheet | seat sheet 2 can be suppressed.

  In the sheet manufacturing apparatus 1 of the embodiment of FIG. 1, the post-processing unit 4 includes the supply region 23. For example, although not illustrated, the post-processing unit 4 does not include the defoaming region 24 and the supply region 23. It can also be configured. That is, the transport carrier 6 can be directly transported from the film forming unit 3 to the defoaming region 24.

In the embodiment of FIG. 1, the transport carrier 6 can be kept waiting for a predetermined time in the supply region 23 prior to the defoaming process and the heating process. For this reason, the timing at which the transport carriers 6 of each batch use the first transport mechanism 38 can be shifted. That is, for example, as shown in FIG. 5, each transport time A ₅ , A ₇ , B ₅ , B ₇ , C ₅ , C ₇ , D ₅ , A ₉ , D ₇ , E ₅ , A ₁₁ , B ₉ , E ₇ , F ₅ , B ₁₁ , C ₉ , F ₇ , C ₁₁ , G ₅ , D ₉ , G ₇ , D ₁₁ can be shifted on the time axis. As a result, the waiting time until the transport carriers 6 of each batch are transported by the first transport mechanism 38 can be reduced.

  In the sheet manufacturing apparatus 1 of the embodiment of FIG. 1, one first transport mechanism 38 is provided in the post-processing unit 4. For example, although not illustrated, a plurality of first transport mechanisms 38 are provided in the post-processing unit 4. Can be provided.

  The plurality of first transport mechanisms 38 can be accommodated inside one groove 39. In addition, a second groove may be formed at the right end of the post-treatment table 47 so as to extend in the front-rear direction from the supply region 23 to the discharge region 27, and the first transport mechanism 38 may be accommodated in the second groove. it can.

  According to the sheet manufacturing apparatus 1 of the embodiment of FIG. 1, the film forming unit 3 and each heating region 25 (first heating region 25a, second heating region 25b, and third heating region 25c) are arranged in series. However, for example, although not shown, the heating regions 25 can be arranged in parallel. That is, the first heating area 25a, the second heating area 25b, and the third heating area 25c can be arranged on a straight line extending in the left-right direction.

  In the sheet manufacturing apparatus 1 of the embodiment of FIG. 1, the sheet 2 can be smoothly conveyed from the film forming unit 3 to the heating region 25 along the series direction.

  According to the sheet manufacturing apparatus 1 of the embodiment of FIG. 1, the space in the left-right direction can be saved by minimizing the width in the left-right direction.

  According to the sheet manufacturing apparatus 1 of the embodiment of FIG. 1, the supply region 23, the defoaming region 24, the first heating region 25 a, the second heating region 25 b, the third heating region 25 c, the cooling region 26 and the discharge region 27 are integrated. For example, although not shown, the supply region 23, the defoaming region 24, the first heating region 25a, the second heating region 25b, the third heating region 25c, the cooling region 26, and the discharge region 27 are Each can also be configured to be separable.

  According to the embodiment in which each region is configured to be separable, each processing step can be easily adjusted according to the purpose and application of the sheet 2, or heating can be performed according to the installation space of the sheet manufacturing apparatus 1. The size of the sheet manufacturing apparatus 1 can be easily changed by changing the number of regions 25 arranged.

DESCRIPTION OF SYMBOLS 1 Sheet manufacturing apparatus 2 Sheet | seat sheet 3 Film-forming part 4 Post-processing part 6 Conveyance carrier 24 Defoaming area | region 25 Heating area 25a 1st heating area 25b 2nd heating area 25c 3rd heating area 26 Cooling area 46 Control apparatus 52 Oven 54 Shelf oven

Claims (14)

A film forming process for carrying out a film forming process for forming a sheet composition on a sheet by batch;
A post-processing step of performing a first post-processing on the single wafer sheet,
The first post-processing time required for the first post-processing is set longer than the film-forming time required for the film-forming process;
In the post-processing step, the first post-processing is performed in parallel with a plurality of batches of single-wafer sheets simultaneously.   2. The sheet manufacturing method according to claim 1, wherein, in the post-processing step, the first post-processing is performed in a different stationary region for each batch.   The method for manufacturing a sheet according to claim 1, wherein the first post-treatment is a heat treatment for heating the sheet.   In the said post-processing process, the said 1st post-process is implemented, and the said sheet | seat sheet is cooled after that, The manufacturing method of the sheet | seat of Claim 3 characterized by the above-mentioned.   5. The sheet manufacturing method according to claim 1, wherein in the post-processing step, the single-wafer sheet is defoamed before the first post-processing. A film forming unit for performing a film forming process for forming a sheet composition on a single sheet for each batch;
A post-processing unit that performs a first post-processing on the sheet;
Control means for controlling the film forming unit and the post-processing unit,
The control means is set such that a first post-processing time for performing the first post-processing on the single-sheet is longer than a film-forming time for forming the sheet composition on the single-sheet. And
The sheet manufacturing apparatus, wherein the post-processing unit is configured to perform the first post-processing on a plurality of batches of sheets at the same time.   The sheet manufacturing apparatus according to claim 6, wherein the post-processing unit includes a plurality of first post-processing areas in which the first post-processing is performed in different stationary areas for each batch.   The manufacturing apparatus according to claim 7, wherein each of the first post-treatment regions is arranged in series with the film forming unit.   The sheet manufacturing apparatus according to claim 7, wherein the first post-processing region includes a heating unit.   The sheet manufacturing apparatus according to claim 9, wherein the heating unit is a hot plate.   The sheet manufacturing apparatus according to claim 9, wherein the heating unit is an oven.   The said post-processing part is provided with the cooling area | region which cools the said sheet | seat sheet on the opposite side to the said film-forming part with respect to the last 1st post-processing area | region. The sheet manufacturing apparatus according to any one of the above.   The said post-processing part is provided with the defoaming area | region which defoams the said sheet | seat sheet between the said film-forming part and the 1st 1st post-processing area | region, It is characterized by the above-mentioned. The sheet manufacturing apparatus as described in any one of Claims. The post-processing unit includes n first post-processing regions,
The control means sets the process of performing the first post-processing n batches as one cycle,
14. The sheet manufacturing according to claim 7, wherein the start timing of the current cycle is set based on the end timing of the first post-processing of the first batch of the previous cycle. apparatus.

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