JP2015011260A - Alignment device, alignment method, and sticking device - Google Patents

Abstract

An object of the present invention is to provide an alignment apparatus capable of suitably aligning even a translucent plate-like object held via a screen mesh. An embodiment of the present invention is an alignment apparatus for aligning a translucent plate-like object having translucency, and a holding mechanism that holds the translucent plate-like object via a screen mesh. An alignment camera disposed on a side of the screen mesh that holds the translucent plate, a reflective illumination disposed on a side of the screen mesh that retains the translucent plate, and the screen An alignment apparatus comprising: a transmission illumination disposed on a side opposite to a side of the mesh that holds the translucent plate-like object. [Selection] Figure 4

Description

  The present invention relates to an alignment apparatus that performs alignment of a translucent plate-shaped object, an alignment method that uses the alignment apparatus, and a bonding apparatus that incorporates the alignment apparatus.

  In recent years, a translucent plate-like object having translucency such as a thin plastic film has been bonded, and high positioning accuracy and bonding accuracy are required depending on applications. For example, in manufacturing a display device, a plastic film having various functions is bonded to the surface of a display panel.

  For example, in a state where the object to be bonded and the object to be bonded are adsorbed and held in parallel on separate adsorption stages, the alignment is performed, and after completion of the alignment, the respective stages are opposed to the object to be bonded and the object to be bonded. After making it move to a relationship, the bonding apparatus which bonds is proposed (refer patent document 1).

  In such a bonding apparatus, it has been proposed to hold a plate-like object via a screen mesh.

  For example, a bonding apparatus that adsorbs a plate-like object through a screen mesh that can be freely ventilated has been proposed (see Patent Document 2).

JP 2009-294551A JP 2012-003037 A

  However, when a translucent plate-like object is held via a screen mesh, it has been difficult to detect highly accurate position information using an alignment camera. This is because when the alignment is performed, the depth of field of the alignment camera is wider than the thickness of the translucent plate, so that the mesh of the screen mesh is imaged so as to overlap the alignment mark of the translucent plate, This is because the edge detection accuracy of the alignment mark is lowered.

  Therefore, the present invention has been made to solve the above-described problems, and provides an alignment apparatus that can perform alignment appropriately even for a translucent plate-like object held via a screen mesh. The purpose is to do.

  One embodiment of the present invention is an alignment apparatus that performs alignment of a translucent plate-like object having translucency, a holding mechanism that holds the translucent plate-like object via a screen mesh, and the screen An alignment camera disposed on a side of the mesh holding the translucent plate, a reflective illumination disposed on the side of the screen mesh holding the translucent plate, and the transparent of the screen mesh. An alignment apparatus comprising: a transmission illumination disposed on a side opposite to a side holding a light plate-like object.

  In one embodiment of the present invention, the above alignment apparatus is characterized in that light is emitted from both the reflected illumination and the transmitted illumination when the translucent plate-shaped object is imaged by the alignment camera. This is the alignment method used.

  Moreover, one Embodiment of this invention is a bonding apparatus which bonds the translucent plate-shaped object and translucent plate-shaped object which have translucency, Comprising: The said translucent plate-shaped object through a screen mesh A holding mechanism for holding the screen, an alignment camera arranged on the side of the screen mesh holding the translucent plate, and a reflection arranged on the side of the screen mesh holding the translucent plate Illumination, transmitted illumination arranged on the opposite side of the screen mesh to the side that holds the translucent plate-like object, and plate-like object holding that holds the laminated plate-like object at a position facing the holding mechanism X, Y, Z, θ adjustment mechanism for adjusting the relative position of the mechanism, the holding mechanism and the plate-like object holding mechanism, and the relative position of the translucent plate-like object and the laminated plate-like object A roller stage moving mechanism that moves both while holding A roller pressurizing mechanism that pressurizes and transfers the translucent plate-like object and the bonded plate-like object by applying pressure from the translucent plate-like object side with a roller. It is a combined device.

  Moreover, the above-mentioned bonding apparatus WHEREIN: It is preferable that the said holding mechanism is a holding mechanism provided with the adsorption | suction stage which has a some suction hole.

  The alignment apparatus of the present invention irradiates light from both reflected illumination and transmitted illumination when imaging a translucent plate-like object with an alignment camera. Thereby, the shadow of the screen mesh generated by the reflected illumination can be made thinner by the light of the transmitted illumination, and the influence of the mesh of the screen mesh reflected on the alignment camera can be suppressed.

It is the schematic which shows the image imaged using the general alignment apparatus. It is the schematic which shows the image imaged using the alignment apparatus of this invention. It is a schematic diagram which shows the internal stress by the bonding operation | movement of the bonding apparatus of this invention. It is a schematic perspective view which shows the bonding apparatus of this invention. It is a schematic sectional drawing which shows the bonding apparatus of this invention. It is a schematic sectional drawing which shows the bonding apparatus of this invention. It is a schematic perspective view which shows an example of the roller of the bonding apparatus of this invention. It is a schematic sectional drawing which shows the bonding operation | movement of the bonding apparatus of this invention.

  In an alignment apparatus using a general alignment camera, one of transmitted illumination and reflected illumination is used for imaging an object with the alignment camera. However, when the alignment mark is imaged using the alignment camera while the translucent plate is held on the screen mesh, the depth of field of the alignment camera is wider than the thickness of the translucent plate. In addition, it is difficult to image the alignment mark of the translucent plate-like object.

  FIG. 1 shows, as a reference example, an image obtained by imaging an alignment mark of a translucent plate using an alignment camera in a state where only reflected illumination is irradiated. In FIG. 1, the patterning 17 formed on the translucent plate 2 is used as the alignment mark. In FIG. 1, the mesh of the screen mesh 4 holding the translucent plate-like object 2 is simultaneously imaged. At this time, since the edge of the patterning 17 overlaps with the shadow of the screen mesh 4, the edge detection accuracy of the patterning 17 decreases from the image captured by the alignment camera, and the position information of the translucent plate-like object 2 is detected with high accuracy. It becomes difficult.

  The alignment apparatus of the present invention irradiates light from both the reflected illumination and the transmitted illumination when imaging a translucent plate-like object with an alignment camera. Thereby, the shadow of the screen mesh generated by the reflected illumination can be made thinner by the light of the transmitted illumination, and the influence of the mesh of the screen mesh reflected on the alignment camera can be suppressed.

  In FIG. 2, the image which imaged the alignment mark of the translucent plate-shaped object using the alignment apparatus of this invention is shown. In FIG. 2, the patterning 17 formed on the translucent plate 2 is used as the alignment mark. In FIG. 2, when the patterning 17 on the translucent plate-like object 2 is imaged with the alignment camera, light is irradiated from both the reflected illumination and the transmitted illumination. At this time, the shadow of the screen mesh 4 projected by the transmitted illumination can be thinned by irradiating light from the reflected illumination. Therefore, it is possible to detect the edge of the patterning 17 from the image captured by the alignment camera.

  Hereinafter, the alignment apparatus of the present invention will be specifically described.

  The holding mechanism of the alignment apparatus of the present invention is a holding mechanism that holds via a screen mesh. By holding the light-transmitting plate-like material via the screen mesh, it is possible to perform pressure transfer using a roller over the screen mesh in the bonding described later. When pressure is transferred using a roller over a screen mesh, the shear stress inside the translucent plate that is generated by pressure transfer can be dispersed, and the elongation of the translucent plate due to bonding is reduced. And high-precision bonding without elongation strain can be performed.

  FIG. 3 is a schematic diagram showing shear stress when pressure is transferred using a roller through a screen mesh. FIG. 3A is a diagram showing the shear stress 26 when the translucent plate-like object 2 and the laminated plate-like object 3 are pressure-transferred directly by the roller 12 without using a screen mesh. FIG. 3B is a diagram showing the shear stress 26 when the translucent plate-like object 2 and the bonded plate-like object 3 are pressure-transferred directly by the roller 12 through the screen mesh 4. When the roller 12 moves in the laminating direction 26, the shear stress 26 inside the translucent plate 2 is compared between FIG. 3 (a) and FIG. 3 (b), and FIG. 3 (b) is more transparent. The shear stress 26 inside the light plate 2 is small. This is because the shear stress 26 in FIG. 3B is dispersed inside the translucent plate 2 and inside the screen mesh 4.

  The screen mesh is preferably a screen mesh having a metallic luster. The screen mesh provided with metallic luster suitably reflects the light of the reflected illumination on the screen mesh, so that the shadow of the screen mesh due to the transmitted illumination can be suitably erased.

  Further, the holding mechanism is preferably a holding mechanism including a suction stage having a plurality of suction holes. The suction stage having a plurality of suction holes can control the area where suction is performed on the suction surface with the translucent plate by controlling the opening and closing of each suction hole. Can be controlled. For this reason, when bonding a translucent plate-shaped object and a to-be-bonded plate-shaped object, controlling the area which adsorb | sucks suitably according to the quantity by which the translucent plate-shaped object was bonded to the to-be-bonded plate-shaped object. The translucent plate can be suitably held during the bonding.

  As the alignment camera, a known alignment camera may be appropriately selected and used according to conditions such as resolution suitable for observation of the target light-transmitting plate-like object.

  As the reflected illumination and the transmitted illumination, a known light source may be appropriately selected and used according to conditions such as a light amount suitable for observing the target translucent plate.

  Hereinafter, as an example, a bonding apparatus incorporating the alignment apparatus of the present invention will be described. In addition, the following bonding apparatuses assume the bonding apparatus used for manufacture of the display panel which used the plastic film as a translucent plate-shaped object, and the color filter as a to-be-bonded plate-shaped object.

  In FIG. 4, an example of the bonding apparatus of this invention is shown with a schematic perspective view. The bonding apparatus shown in FIG. 4 includes a holding mechanism 5 that holds the translucent plate 2 via the screen mesh 4 and an alignment that is arranged on the side of the screen mesh 4 that holds the translucent plate 2. The camera 7, the reflective illumination 9 disposed on the side of the screen mesh 4 that holds the translucent plate 2, and the side of the screen mesh 4 that is opposite to the side that holds the translucent plate 2 The relative positions of the transmitted light 8, the plate-like object holding mechanism (not shown) that holds the bonded plate-like object 3 at a position facing the holding mechanism 5, and the holding mechanism 5 and the plate-like object holding mechanism. An X / Y / Z / θ adjusting mechanism 11 to be adjusted, a roller / stage moving mechanism 20 for moving the translucent plate-like object 2 and the laminated plate-like object 3 while maintaining the relative positions thereof, By applying pressure with the roller 12 from the conductive plate-like object 2 side, the translucent plate-like object 2 and the object to be covered It comprises a roller pressurizing mechanism for pressurizing transferring a plywood-like material 3.

  Hereinafter, the bonding operation of the bonding apparatus of the present invention will be specifically described.

  First, a translucent plate-like object is held by the holding mechanism, and a laminated plate-like object is held by the plate-like object holding mechanism. The holding mechanism and the plate-like object holding mechanism may be appropriately selected from known holding mechanisms in consideration of the shape and thickness of the target light-transmitting plate-like object and the laminated plate-like object. At this time, the translucent plate-like object is held via the screen mesh. The holding mechanism and the plate-like object holding mechanism hold the light-transmitting plate-like object and the plate-like object to be bonded so that the application surfaces of the plate-like objects to be held face each other.

  Next, an alignment camera and reflected illumination are arranged between the translucent plate and the laminated plate held opposite to each other, and the translucent plate is sandwiched and transmitted to the opposite side of the reflected illumination. An alignment mark (formed on the translucent plate-like object) using an alignment camera while illuminating and irradiating light toward the translucent plate-like object from reflected illumination and transmitted illumination. (Including patterning pattern).

  FIG. 5 is a diagram in which an alignment camera and reflected illumination are arranged between the translucent plate-like object and the laminated plate-like object held facing each other. In FIG. 5, the translucent plate-like object 2 adsorbed and held by the holding mechanism 5 and the bonded plate-like object 3 adsorbed and held by the plate-like object holding mechanism 6 are opposed to each other on the bonding surfaces. Is held by. The alignment camera 7 and the reflected illumination 9 are inserted between the adsorbed and held translucent plate-like object 2 and the laminated plate-like object 3, and when the alignment camera 7 images the translucent plate-like object 2, The translucent plate-like object 2 can be illuminated with both the reflection illumination 9 and the transmission illumination 8.

  Next, the position information of the translucent plate-like object is fed back from the image captured by the alignment camera, and the translucent plate-like object and the laminated plate-like object are bonded by the X / Y / Z / θ adjusting mechanism. Perform alignment.

  Next, the alignment camera and the reflected illumination are retracted from between the translucent plate and the laminated plate held opposite to each other, and the translucent plate and the laminated plate are adsorbed to the panel. The stage mechanism is brought close to a predetermined distance, and both the translucent plate-like object and the laminated plate-like object are fed in one direction by the roller stage moving mechanism.

  FIG. 6 is a diagram showing that the alignment camera and the reflected illumination are retracted, approached by the panel suction stage mechanism, and both the translucent plate and the laminated plate are sent in one direction by the roller stage moving mechanism. It is. In FIG. 6, the alignment camera 7 is retracted from between the adsorbed and held translucent plate-like object 2 and the laminated plate-like object 3, and the translucent plate-like object 2 and the adherend are adhered using the stage elevating mechanism 16. The plywood 3 is brought close to each other and sent in one direction by the translucent plate 2, the bonded plate 3 and the roller / stage moving mechanism 20 held by suction.

  5 and 6, the translucent plate-like object 2 and the laminated plate-like object 3 are held by the holding mechanism 5 and the plate-like object holding mechanism 6 having a plurality of suction holes. The translucent plate 2 is adsorbed and held by the holding mechanism 5 via the screen mesh 4. The holding mechanism 5 has a plurality of suction holes on the film suction surface, and controls the suction force of the translucent plate-like object 2 by the film side blower 13, the film side decompression regulator 14, and the film side valve 15. Further, the plate-like object 3 to be bonded is sucked and held by the plate-like object holding mechanism 6. The plate-like object holding mechanism 6 has a plurality of suction holes on the holding adsorption surface with the plate-like object 3 to be bonded, and the translucent plate-like object 2 by the panel side blower 21, the panel side decompression regulator 22, and the panel side valve 23. The adsorption power is controlled.

  Next, in a state where the translucent plate-like object and the laminated plate-like object are brought close to a predetermined distance by the panel suction stage mechanism, the translucent plate-like object is pressurized with a roller through the screen mesh, Both the optical plate-like material and the laminated plate-like material are bonded.

  Next, in a state where the pressure is applied by the roller, the roller and the holding mechanism are moved in one direction by using the roller / stage moving mechanism, and the entire surface of the light-transmitting plate-like object and the plate-like object to be bonded is pressure bonded. Do.

  At this time, as shown in FIGS. 5 and 6, the holding mechanism 5 uses the film decompression regulator 14 capable of linear pressure adjustment and the plurality of film-side valves 15 to individually suck the plurality of suction holes. By controlling, it is preferable to control the area where adsorption is performed on the adsorption surface with the translucent plate-like object 2. When the light-transmitting plate-like object 2 starts to be bonded from the end of the object-to-be-bonded plate-like object 3, the suction hole in the area where the light-transmitting plate-like object 2 is sent is opened, and the light-transmitting plate-like object The force to hold 2 is weakened. For this reason, the end part of the translucent plate-like object 2 is caused by the stiffness or static electricity of the translucent plate-like object 2 before the entire surface of the translucent plate-like object 2 and the laminated plate-like object 3 is bonded. There is a case in which a pasting phenomenon occurs in which the pasting is performed on the pasted plate-like object 3 first, and air can be caught between the translucent plate-like object 2 and the pasted plate-like object 3. The film-side valve 15 corresponding to the suction hole in the area where the translucent plate-like object 2 is sent is sequentially formed by using a holding mechanism capable of controlling the area to be adsorbed on the adsorption surface with the translucent plate-like object. By closing, the translucent plate-like object 2 can always be adsorbed and held on the screen mesh 4 while the translucent plate-like article 2 and the laminated plate-like article 3 are pressure-bonded to the entire surface. The occurrence of the phenomenon can be prevented.

  Moreover, it is preferable that the roller is movable in the axial direction. By making the roller movable in the axial direction, when the roller is pressure bonded in the direction of the bonding direction, the roller does not depend on the movement accuracy (parallelism) of the roller / stage moving mechanism, and the panel suction stage and The roller can travel in a form depending on the surface of the object to be bonded. For this reason, it becomes possible to reduce the load of the axial direction of bonding pressure, and it becomes possible to bond a translucent plate-shaped object to a to-be-bonded plate-shaped object without distortion.

  FIG. 7 shows the roller that is movable in the axial direction. The roller 12 shown in FIG. 7 is movable in the axial direction 24 when the translucent plate-like material is sent in the bonding direction 25.

  In FIG. 8, the cross-sectional schematic diagram which shows the bonding operation | movement of the bonding apparatus of this invention is shown. FIG. 8A shows a case where a laminated plate-like object 3 and a translucent plate-like object 2 held via a screen mesh 4 are arranged with a predetermined gap 18 and are translucent. A mode that the roller 12 was arrange | positioned to the screen mesh 4 arrangement | positioning side of the plate-shaped object 2 is shown. In FIG. 8B, by pushing up the roller 12 using the roller lifting mechanism 19, the translucent plate-like object 2 and the laminated plate-like object 3 are brought into contact with each other via the screen mesh 4, and the bonding is started. It shows how to do. FIG. 8 (c) shows that the roller 12 and the holding mechanism 5 start moving toward the other end integrally by a roller stage moving mechanism (not shown), and pressure bonding is performed on the entire surface. The state of performing is shown.

  The alignment apparatus of the present invention is expected to be widely used in the field where the position control of the translucent plate-shaped object is required, and particularly useful in the field of attaching the translucent plate-shaped object. Examples include, but are not limited to, applications such as display panel manufacture, optical element manufacture, and packaging industry.

DESCRIPTION OF SYMBOLS 1 ... Laminating apparatus 2 ... Translucent plate-shaped object 3 ... Laminated plate-like object 4 ... Screen mesh 5 ... Holding mechanism 6 ... Plate-like object holding mechanism 7 ... Alignment camera 8 ... Transmitted illumination 9 ... Reflected illumination 11 ... X, Y, Z, and θ adjustment mechanism 12 ... Roller 13 ... Film side blower 14 ... Film side decompression regulator 15 ... Film side valve 16 ... Stage lifting mechanism 17 ... ... Pattern 18 ... Gap 19 ... Roller lift mechanism 20 ... Roller stage moving mechanism 21 ... Panel side blower 22 ... Panel side pressure regulator 23 ... Panel side valve 24 ... Axial direction 25 ... Lamination direction 26 …… Shear stress

Claims (4)

An alignment apparatus for aligning a translucent plate having translucency,
A holding mechanism for holding the translucent plate-like object via a screen mesh;
An alignment camera disposed on the side of the screen mesh that holds the translucent plate,
Reflected illumination disposed on the side of the screen mesh that holds the light-transmitting plate-like object,
Transmitted illumination arranged on the opposite side of the screen mesh from the side holding the light-transmissive plate,
An alignment apparatus comprising: 2. The alignment method using the alignment apparatus according to claim 1, wherein when the translucent plate-like object is imaged by the alignment camera, light is irradiated from both the reflected illumination and the transmitted illumination. A laminating apparatus for laminating a translucent plate-like material and a laminated plate-like material having translucency,
A holding mechanism for holding the translucent plate-like object via a screen mesh;
An alignment camera disposed on the side of the screen mesh that holds the translucent plate,
Reflected illumination disposed on the side of the screen mesh that holds the light-transmitting plate-like object,
Transmitted illumination arranged on the opposite side of the screen mesh from the side holding the light-transmissive plate,
A plate-like object holding mechanism for holding a laminated plate-like object at a position facing the holding mechanism;
An X, Y, Z, and θ adjustment mechanism that adjusts the relative position of the holding mechanism and the plate-like object holding mechanism;
A roller stage moving mechanism that moves both while maintaining the relative position of the translucent plate and the laminated plate,
A pressurizing mechanism that pressurizes and transfers the translucent plate and the laminated plate by pressing with a roller from the translucent plate side;
A bonding apparatus characterized by comprising: The bonding apparatus according to claim 3, wherein the holding mechanism is a holding mechanism including a suction stage having a plurality of suction holes.

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