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JP2015011019A - DC voltage measuring device - Google Patents

DC voltage measuring device Download PDF

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JP2015011019A
JP2015011019A JP2013139154A JP2013139154A JP2015011019A JP 2015011019 A JP2015011019 A JP 2015011019A JP 2013139154 A JP2013139154 A JP 2013139154A JP 2013139154 A JP2013139154 A JP 2013139154A JP 2015011019 A JP2015011019 A JP 2015011019A
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light
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voltage
measuring device
infrared light
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高橋 正雄
Masao Takahashi
正雄 高橋
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Toshiba Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a direct-current voltage measurement device in which electric insulation is easily ensured.SOLUTION: A direct-current voltage measurement device according to an embodiment includes: an electro-optic crystal having first and second surfaces which are arranged on sides opposite to each other; first and second conductive layers being in close contact with the first and second surfaces, respectively, and transmitting infrared light; application means for applying a direct-current voltage across the first and second conductive layers; a light source for causing infrared light to be incident on the first conductive layer; and a light receiving part for receiving the infrared light incident on the first conductive layer, passing through the electro-optic crystal and emitted from the second conductive layer.

Description

本発明の実施形態は,変電所や発電所の電力機器および電力系統の電圧を測定する直流電圧測定装置に関する。   Embodiments described herein relate generally to a DC voltage measuring device that measures the voltage of power equipment and a power system of a substation or power plant.

絶縁への影響が小さい状態で,高電圧を高精度で測定するために,光を用いた電圧センサが開発されている。ここで,電圧には,交流と直流があるため,電圧センサには,交流計測用および直流計測用が必要となる。このうち,交流計測用の電圧センサは,既に,実用化され,発電所,変電所での電圧測定に用いられている(例えば,非特許文献1参照)。   In order to measure a high voltage with high accuracy with little influence on insulation, a voltage sensor using light has been developed. Here, since the voltage includes AC and DC, the voltage sensor is required for AC measurement and DC measurement. Among these, the voltage sensor for AC measurement has already been put into practical use and is used for voltage measurement at power plants and substations (for example, see Non-Patent Document 1).

一方,直流計測用の電圧センサは,未だ実用化されておらず,幾つかの論文が発表されているに留まる。その中で,チョッパー回路を用いる光電圧センサはフィールド試験まで実施されている(非特許文献2)。即ち,チョッパー回路を用いて,直流電圧を2kHzでON/OFFし,交流に変換してから測定している。   On the other hand, voltage sensors for DC measurement have not been put into practical use, and only a few papers have been published. Among them, an optical voltage sensor using a chopper circuit has been implemented up to a field test (Non-Patent Document 2). That is, using a chopper circuit, the DC voltage is turned ON / OFF at 2 kHz and converted to AC, and then measured.

しかしながら,この光電圧計測装置では,次のように,電気的絶縁性の確保が容易な光電圧センサの利点が損なわれる畏れがある。即ち,被測定電圧をチョッピングするため,電圧検出部にO/E変換器,チョッパー回路等の電子部品が必要となる。このため,高電圧のサージ等に曝される畏れのある電圧検出部と,計測された信号を用いる保護リレーや計測器などの電子部品との間の電気的絶縁の確保が困難となる。   However, in this optical voltage measuring device, the advantages of the optical voltage sensor that can easily ensure electrical insulation may be impaired as follows. That is, in order to chop the voltage to be measured, electronic components such as an O / E converter and a chopper circuit are required for the voltage detection unit. For this reason, it is difficult to ensure electrical insulation between a voltage detector that is likely to be exposed to a high-voltage surge or the like and an electronic component such as a protection relay or a measuring instrument that uses the measured signal.

平成6年開閉保護・高電圧合同研究会,SP−94−91,HV−94−162,中田・平田・米田・野田「1000kVGIS用計器用変成器の開発」1994 Joint Protection Committee on High Voltage Protection and High Voltage, SP-94-91, HV-94-162, Nakata, Hirata, Yoneda, Noda "Development of instrument transformer for 1000kVGIS" 渡辺渡他「直流光電圧変成器の開発」電気学会全国大会(1991)Watanabe et al. “Development of DC Photovoltage Transformer” The Institute of Electrical Engineers of Japan (1991)

本発明は,電気的絶縁の確保が容易な直流電圧測定装置を提供することを目的とする。   An object of this invention is to provide the direct-current voltage measuring apparatus which is easy to ensure electrical insulation.

実施形態の直流電圧測定装置は,互いに反対側に配置される第1,第2の面を有する電気光学結晶と,前記第1,第2の面それぞれに密着し,かつ赤外光を透過する第1,第2の導電層と,前記第1,第2の電極層間に直流電圧を印加する印加手段と,前記第1の導電層に赤外光を入射させる光源と,前記第1の導電層に入射し,前記電気光学結晶を通過して,前記第2の導電層から出射した赤外光を受光する受光部と,を具備する。   The direct-current voltage measuring apparatus according to the embodiment is in close contact with the electro-optic crystal having first and second surfaces arranged on opposite sides and to the first and second surfaces and transmits infrared light. First and second conductive layers; application means for applying a DC voltage between the first and second electrode layers; a light source for making infrared light incident on the first conductive layer; and the first conductive layer A light receiving portion that receives infrared light that is incident on the layer, passes through the electro-optic crystal, and is emitted from the second conductive layer.

実施形態に係る直流電圧測定装置を表す図である。It is a figure showing the DC voltage measuring device which concerns on embodiment. 電気光学素子を表す図である。It is a figure showing an electro-optical element. 電気光学素子の等価回路を表す図である。It is a figure showing the equivalent circuit of an electro-optical element. 電気光学素子の電界方向と光透過方向の関係を表す図である。It is a figure showing the relationship between the electric field direction of an electro-optic element, and a light transmissive direction.

以下,図面を参照して,実施形態を詳細に説明する。図1に示すように,実施形態に係る直流電圧測定装置20は,電気光学素子10,分圧器13,光源21,光ファイバー23a〜23c,送光コリメーター部24,偏光子25,1/4波長板26,検光子27,受光コリメーター部28a,28b,検出器29a,29b,電子回路30を有する。   Hereinafter, embodiments will be described in detail with reference to the drawings. As shown in FIG. 1, the DC voltage measuring device 20 according to the embodiment includes an electro-optic element 10, a voltage divider 13, a light source 21, optical fibers 23a to 23c, a light-sending collimator unit 24, a polarizer 25, and a quarter wavelength. A plate 26, an analyzer 27, light receiving collimator units 28a and 28b, detectors 29a and 29b, and an electronic circuit 30 are provided.

(電気光学素子10の詳細)
先に電気光学素子10の詳細を説明する。電気光学素子10は,電気光学結晶11,導電層12a,12bを有する。
(Details of electro-optical element 10)
First, the details of the electro-optical element 10 will be described. The electro-optic element 10 includes an electro-optic crystal 11 and conductive layers 12a and 12b.

電気光学結晶11は,電圧の印加により光学的特性が変化する(電気光学効果を発現する)結晶である。電気光学効果として,電圧の印加により,屈折率が変化する効果(ポッケルス効果等)を利用できる。ポッケルス効果は,屈折率が電界強度の1乗に比例して変化する効果である。ポッケルス効果を有する電気光学結晶11として,例えば,BGO(Bi12GeO20),LN(LiNbO:ニオブ酸リチュウム)を利用できる。 The electro-optic crystal 11 is a crystal whose optical characteristics change (appears an electro-optic effect) when a voltage is applied. As an electro-optic effect, an effect (Pockels effect or the like) in which the refractive index is changed by applying voltage can be used. The Pockels effect is an effect in which the refractive index changes in proportion to the first power of the electric field strength. As the electro-optic crystal 11 having the Pockels effect, for example, BGO (Bi 12 GeO 20 ) or LN (LiNbO 3 : lithium niobate) can be used.

導電層(電極層)12a,12bは,電気光学結晶11の互いに反対側(両端)の面に密着して形成される導電性の膜であり,電気光学結晶11に電圧を印加する電極として機能する。蒸着またはスパッタリングによって,電気光学結晶11に密着する導電層12a,12bを形成できる。導電層12a,12bの構成材料には,光源21からの赤外光を透過する材料,例えば,ゲルマニウム(Ge)やシリコン(Si)等が用いられる。   The conductive layers (electrode layers) 12a and 12b are conductive films formed in close contact with opposite surfaces (both ends) of the electro-optic crystal 11, and function as electrodes for applying a voltage to the electro-optic crystal 11. To do. Conductive layers 12a and 12b in close contact with the electro-optic crystal 11 can be formed by vapor deposition or sputtering. As a constituent material of the conductive layers 12a and 12b, a material that transmits infrared light from the light source 21, such as germanium (Ge) or silicon (Si), is used.

このように,電気光学結晶11の両端面に,密着するように,測定光(赤外光)を透過する導電層12a,12bが形成され,測定光は導電層12a,12bの両方を透過する。このようにすることで,導電層12a,12bに直流電圧を印加し,その電圧を測定することができる。以下,この理由を説明する。   Thus, the conductive layers 12a and 12b that transmit the measurement light (infrared light) are formed so as to be in close contact with both end faces of the electro-optic crystal 11, and the measurement light transmits both the conductive layers 12a and 12b. . In this way, a DC voltage can be applied to the conductive layers 12a and 12b and the voltage can be measured. The reason for this will be explained below.

図2は,電気光学結晶11での分極現象を表す図である。ここでは,導電層12a,12bが電気光学結晶11に密着しない状態としている。図3は,密着する導電層12a,12bを用いないときの電気光学結晶11の等価回路である。図4は,電界を印加する方向と光が透過する方向が一致および異なる場合での電気光学結晶11の特性を表す図である。   FIG. 2 is a diagram illustrating a polarization phenomenon in the electro-optic crystal 11. Here, the conductive layers 12 a and 12 b are not in close contact with the electro-optic crystal 11. FIG. 3 is an equivalent circuit of the electro-optic crystal 11 when the conductive layers 12a and 12b that are in close contact with each other are not used. FIG. 4 is a diagram illustrating the characteristics of the electro-optic crystal 11 in the case where the direction in which the electric field is applied and the direction in which light is transmitted match and are different.

従来,ポッケルス効果を用いて光測定が行えないとした理由の一つに分極の消失現象がある。即ち,直流電界によって,電気光学結晶11に分極Pが生じる(図2参照)。しかし,電気光学結晶11が若干の導電性(抵抗Rp)を有しているため,電流が流れ,分極が消失していく。   Conventionally, one of the reasons why optical measurement cannot be performed using the Pockels effect is the phenomenon of loss of polarization. That is, the polarization P is generated in the electro-optic crystal 11 by the DC electric field (see FIG. 2). However, since the electro-optic crystal 11 has some conductivity (resistance Rp), current flows and polarization disappears.

一般に,電気光学結晶11の抵抗Rpに対して,空気の抵抗は十分大きく無視できるので,電気光学素子10は,静電容量C1,C2とCR(静電容量Cp,抵抗Rp)の分圧回路となる(図3参照)。静電容量C1,C2はそれぞれ,電気光学結晶11と導電層12a,12b間(空気)の静電容量である。また,静電容量Cp,抵抗Rpはそれぞれ,電気光学結晶11自体の静電容量および抵抗である。   In general, since the resistance of air is sufficiently large and negligible with respect to the resistance Rp of the electro-optic crystal 11, the electro-optic element 10 is a voltage dividing circuit of capacitances C1, C2 and CR (capacitance Cp, resistance Rp). (See FIG. 3). Capacitances C1 and C2 are capacitances between the electro-optic crystal 11 and the conductive layers 12a and 12b (air), respectively. Further, the capacitance Cp and the resistance Rp are the capacitance and resistance of the electro-optic crystal 11 itself, respectively.

この回路にステップ状の電圧変化が加わった場合の応答を考えると,電界を印加するための電極(導電層12a,12b)に印加された電圧Vは,空気中の静電容量C1,C2と電気光学結晶11の静電容量Cpによって分圧される。また,Cp両端の電圧が,電気光学結晶11自体の抵抗Rpによって,Cp*Rpの時定数で減衰していく。   Considering the response when a step-like voltage change is applied to this circuit, the voltage V applied to the electrodes (conductive layers 12a, 12b) for applying an electric field is the capacitances C1, C2 in the air. The voltage is divided by the capacitance Cp of the electro-optic crystal 11. Further, the voltage across Cp is attenuated by the time constant of Cp * Rp by the resistance Rp of the electro-optic crystal 11 itself.

このことから,次のようなことが分かる。まず,直流測定の場合には,空間を通して,電気光学結晶11に電圧を印加することは,電気光学結晶11に印加される電圧が低下し,好ましくない。即ち,電気光学結晶11の表面に直接,被測定電圧を印加する必要がある。このため,電気光学結晶11の両端面には電極(導電層12a,12b)を取り付け,被測定電圧と電気的に接続して使用する。この場合,電気光学結晶11と電極(導電層12a,12b)の間の密着性が不十分な場合,被測定電圧を正確に測定し難くなる。即ち,交流測定に於いては,静電容量で接続され,測定への影響は比較的小さいが,直流測定の場合にはそれが例え1nm程度の僅かの隙間であっても,隙間部分の抵抗値が電気光学結晶11の抵抗に対して無視できないぐらいに大きくなる。このため,電極は,蒸着またはスパッタにより,電気光学結晶11に密着させている。   From this, the following can be understood. First, in the case of direct current measurement, it is not preferable to apply a voltage to the electro-optic crystal 11 through a space because the voltage applied to the electro-optic crystal 11 is lowered. That is, it is necessary to apply a voltage to be measured directly to the surface of the electro-optic crystal 11. For this reason, electrodes (conductive layers 12a and 12b) are attached to both end faces of the electro-optic crystal 11, and are used by being electrically connected to the voltage to be measured. In this case, when the adhesion between the electro-optic crystal 11 and the electrodes (conductive layers 12a and 12b) is insufficient, it is difficult to accurately measure the voltage to be measured. That is, in AC measurement, it is connected by capacitance, and the influence on the measurement is relatively small. However, in DC measurement, even if it is a slight gap of about 1 nm, the resistance of the gap portion is The value becomes so large that the resistance of the electro-optic crystal 11 cannot be ignored. For this reason, the electrode is brought into close contact with the electro-optic crystal 11 by vapor deposition or sputtering.

また,電気光学結晶11の抵抗に不均一が有ると,測定の誤差になる可能性がある(図4参照)。図4(A),(B)それぞれに,光軸Lと電界の方向が直交(横電界型),並行(縦電界型)の場合を表す。このとき,抵抗の不均一により,例えば,電極(導電層12a,12b)の近傍に電界が集中する可能性がある。ここでは,導電層12a,12bの近傍の電界E1,F5が,導電層12a,12bから離れたところでの電界E2〜E5より大きい。このため,光軸Lと直交する横電界型を採用した場合には,電気光学結晶11の中心を光が透過した場合(測定光が電界E3の影響を受ける場合)と,電気光学結晶11の端(電極より)に光が透過した場合(測定光が電界E1,E5の影響を受ける場合)で,感度が異なることとなり(図4(B)参照),誤差を生じる。
また,このような現象が生じないように,電気光学結晶11に対して,光軸Lを固定させても,例えば,結晶欠陥などで電荷がトラップされるようなことがあると,トラップされる前と後ではやはり,光の透過部分に加わっている電界が異なり,測定誤差となってしまう。
In addition, if the resistance of the electro-optic crystal 11 is non-uniform, there is a possibility of measurement error (see FIG. 4). 4A and 4B show cases where the optical axis L and the electric field direction are orthogonal (lateral electric field type) and parallel (vertical electric field type), respectively. At this time, there is a possibility that the electric field concentrates in the vicinity of the electrodes (conductive layers 12a and 12b) due to non-uniform resistance. Here, the electric fields E1 and F5 near the conductive layers 12a and 12b are larger than the electric fields E2 to E5 away from the conductive layers 12a and 12b. For this reason, when the lateral electric field type orthogonal to the optical axis L is adopted, when light is transmitted through the center of the electro-optic crystal 11 (when the measurement light is affected by the electric field E3), When light is transmitted to the end (from the electrode) (when the measurement light is affected by the electric fields E1 and E5), the sensitivity is different (see FIG. 4B), and an error occurs.
In order to prevent such a phenomenon from occurring, even if the optical axis L is fixed to the electro-optic crystal 11, for example, if charges are trapped due to crystal defects or the like, they are trapped. Before and after, the electric field applied to the light transmission part is different, resulting in a measurement error.

このような測定光の位置による誤差を防ぐためには,図4(A)のように,に示すように,光軸と印加する電界方向を一致させる縦電界とすればよい。電気光学結晶11内での電界の不均一が生じても,測定光は両電極間の電界の積分値,即ち,電極に印加された電圧に等しい位相差を受けることとなり,直流電圧を正確に測定する事が出来る。   In order to prevent such an error due to the position of the measurement light, as shown in FIG. 4A, a vertical electric field that matches the optical axis and the applied electric field direction may be used. Even if the electric field in the electro-optic crystal 11 is nonuniform, the measurement light receives an integrated value of the electric field between the two electrodes, that is, a phase difference equal to the voltage applied to the electrodes, and the DC voltage is accurately determined. It can be measured.

また,測定波長によって,分極の消失現象の時定数が異なる。この原因については,図3の等価回路に示す結晶の抵抗Rpが変化していると考えるのが妥当である。つまり,測定光によって,電気光学結晶11の抵抗Rpの値が変化したことが疑われる。このような現象は,光導電効果として知られており,光の照射によって,電気光学結晶11の抵抗値が小さくなる事がある。   Also, the time constant of the disappearance of polarization varies depending on the measurement wavelength. Regarding this cause, it is appropriate to consider that the resistance Rp of the crystal shown in the equivalent circuit of FIG. 3 has changed. That is, it is suspected that the value of the resistance Rp of the electro-optic crystal 11 is changed by the measurement light. Such a phenomenon is known as a photoconductive effect, and the resistance value of the electro-optic crystal 11 may be reduced by light irradiation.

この現象を避けるためには,測定光として,光導電効果を生じない程度に波長の長い光を用いれば良く,波長800nm以上の赤外光を用いることが有効である。具体的には,測定に用いる光の波長が685nmおよび1310nmの場合それぞれで,分極Pが消失する時間が,数秒〜数百秒程度,数時間以上と大きく異なる。   In order to avoid this phenomenon, light having a wavelength that is long enough not to cause a photoconductive effect may be used as measurement light, and it is effective to use infrared light having a wavelength of 800 nm or more. Specifically, when the wavelength of the light used for measurement is 685 nm and 1310 nm, the time for which the polarization P disappears varies greatly from several seconds to several hundred seconds and several hours or more.

また,周囲の光によっても,抵抗が変化する事となるので,電気光学結晶11の回りを遮光することが求められるが,測定光を通す部分は光を透過させる必要があり,測定光は通すが,波長800nm以下の可視域の光は透過させない材料を用いて電極(導電層12a,12b)を構成することで,電気光学結晶11への遮光を効果的に行えるようになる。具体的には,導電層12a,12bそれぞれでの可視光(波長800nm以下の可視域の光)の透過率が10%以下であることが好ましい。   In addition, since the resistance changes depending on the ambient light, it is required to shield the surroundings of the electro-optic crystal 11. However, the portion through which the measurement light passes needs to transmit light, and the measurement light passes therethrough. However, if the electrodes (conductive layers 12a and 12b) are made of a material that does not transmit visible light having a wavelength of 800 nm or less, the electro-optic crystal 11 can be effectively shielded from light. Specifically, the transmittance of visible light (visible light having a wavelength of 800 nm or less) in each of the conductive layers 12a and 12b is preferably 10% or less.

このとき,電極材料に求められる特性は,測定のための赤外光を透過し,可視光を遮光し,かつ,電極として十分な導電性を有していることが必要となり,例えばゲルマニウム(Ge)やシリコン(Si)等を用いることが出来る。導電層12a,12bの厚さは,例えば,0.1〜2μm(一例として,1μm)である。   At this time, the characteristics required for the electrode material are required to transmit infrared light for measurement, shield visible light, and have sufficient conductivity as an electrode. For example, germanium (Ge ), Silicon (Si), or the like can be used. The thickness of the conductive layers 12a and 12b is, for example, 0.1 to 2 μm (for example, 1 μm).

(電気光学素子10以外の構成)
以下,電気光学素子10以外の構成を説明する。
(Configuration other than electro-optical element 10)
Hereinafter, configurations other than the electro-optical element 10 will be described.

分圧器13は,直流電圧を分圧(低減)して,電気光学素子10(導電層12a,12b)に印加する。分圧器13は,直列に接続される抵抗R1,R2を有する。抵抗R1,R2に印加された直流電圧V0が抵抗R1で分圧され,電直流圧V1に変換される。   The voltage divider 13 divides (reduces) the DC voltage and applies it to the electro-optical element 10 (conductive layers 12a and 12b). The voltage divider 13 has resistors R1 and R2 connected in series. The DC voltage V0 applied to the resistors R1 and R2 is divided by the resistor R1 and converted to the electric DC voltage V1.

分圧器13は,導電層12a,12b間に直流電圧を印加する印加手段として機能する。分圧器13と導電層12a,12b間は,半田等で接続できる。なお,測定対象の電圧がある程度低ければ,分圧器13を介さず,測定対象の電圧を直接,導電層12a,12b間に印加しても良い。   The voltage divider 13 functions as an application unit that applies a DC voltage between the conductive layers 12a and 12b. The voltage divider 13 and the conductive layers 12a and 12b can be connected by solder or the like. If the voltage to be measured is low to some extent, the voltage to be measured may be applied directly between the conductive layers 12a and 12b without using the voltage divider 13.

光源21は,波長800nm以上の赤外光を出射する,例えば,発光ダイオードや半導体レーザである。光源21は,電気光学素子10(導電層12a)に赤外光を入射させる。
光源駆動装置22は,光源21を駆動し,赤外光を出射させる。
The light source 21 is, for example, a light emitting diode or a semiconductor laser that emits infrared light having a wavelength of 800 nm or more. The light source 21 causes infrared light to enter the electro-optical element 10 (conductive layer 12a).
The light source driving device 22 drives the light source 21 to emit infrared light.

光ファイバー23a〜23cは,光源21からの赤外光を導く。
送光コリメーター部24は,レンズ等を用いて,光ファイバー23aから出射する発散光を平行光に変換する。
The optical fibers 23 a to 23 c guide infrared light from the light source 21.
The light transmission collimator unit 24 converts divergent light emitted from the optical fiber 23a into parallel light using a lens or the like.

偏光子25は,光源21と導電層12aの間に配置され,送光コリメーター部24を通過した光を直線偏光に変換する光学素子である。
1/4波長板26は,偏光子25と導電層12aの間に配置され,偏光子25からの直線偏光を円偏光に変換する光学素子である。
The polarizer 25 is an optical element that is disposed between the light source 21 and the conductive layer 12a and converts light that has passed through the light transmission collimator unit 24 into linearly polarized light.
The quarter-wave plate 26 is an optical element that is disposed between the polarizer 25 and the conductive layer 12a and converts linearly polarized light from the polarizer 25 into circularly polarized light.

検光子27は,導電層12bと検出器29a,29b(受光部)の間に配置される,電気光学素子10を通過した赤外光を互いに直交する第1,第2の偏光状態の赤外光(第1,第2の成分の光)に分離する。   The analyzer 27 is disposed between the conductive layer 12b and the detectors 29a and 29b (light receiving portions), and infrared light having passed through the electro-optic element 10 is in the first and second polarization states orthogonal to each other. Separated into light (light of the first and second components).

受光コリメーター部28a,28bは,レンズ等を用いて,検光子27で分離された第1,第2の偏光を収束光に変換し,光ファイバー23b,23cに入射させる。   The light receiving collimator units 28a and 28b convert the first and second polarized light separated by the analyzer 27 into convergent light using a lens or the like, and enter the optical fibers 23b and 23c.

検出器(受光素子)29a,29bは,光ファイバー23b,23cから出射した第1,第2の成分の光の強度を測定する。検出器29a,29bは,導電層12aに入射し,電気光学結晶11を通過して,導電層12bから出射した赤外光を受光する受光部として機能する。   Detectors (light receiving elements) 29a and 29b measure the intensities of the first and second components emitted from the optical fibers 23b and 23c. The detectors 29a and 29b function as a light receiving unit that receives infrared light that is incident on the conductive layer 12a, passes through the electro-optic crystal 11, and is emitted from the conductive layer 12b.

電子回路30は,検出器29a,29bの測定結果に基づいて,電圧を算出する。即ち,電子回路30は,検出器29a,29bで測定される,第1,第2の偏光状態の赤外光の強度の比に基づき,電圧を算出する算出部として機能する。   The electronic circuit 30 calculates a voltage based on the measurement results of the detectors 29a and 29b. That is, the electronic circuit 30 functions as a calculation unit that calculates a voltage based on the ratio of the intensity of infrared light in the first and second polarization states measured by the detectors 29a and 29b.

(直流電圧測定装置20の動作)
次のように,直流電圧測定装置20は動作する。
光源駆動装置22によって駆動された光源21からの放射光は光ファイバー23aを介して送光コリメーター部24に入射する。送光コリメーター部24ではこの入射光を平行光束に変換して偏光子25に供給する。偏光子25は入射した平行光を直線偏光に変換し,1/4波長板26はこの直線偏光を円偏光に変換する。
(Operation of DC voltage measuring device 20)
The DC voltage measuring device 20 operates as follows.
Radiant light from the light source 21 driven by the light source driving device 22 enters the light transmission collimator unit 24 through the optical fiber 23a. The light transmission collimator unit 24 converts this incident light into a parallel light beam and supplies it to the polarizer 25. The polarizer 25 converts the incident parallel light into linearly polarized light, and the quarter wavelength plate 26 converts this linearly polarized light into circularly polarized light.

電気光学素子10は,1/4波長板14を介して入射した円偏光を電気光学素子10に印加した電界強度に応じた楕円偏光に変換する。電気光学素子10を出射した光は検光子27を透過し,一偏光成分のみの光が出射される。この光の光量は,電気光学素子10によって楕円偏光にされた楕円率によって,変化する(被測定電圧に応じた光量の光が出力される)。この光は受光コリメーター部28a,28bで光ファイバー23b,23cに導かれ検出器29a,29bに送られる。検出器29a,29bで光信号を電気信号に変換された後,電子回路30で被測定電圧が演算される。   The electro-optic element 10 converts the circularly polarized light incident through the quarter-wave plate 14 into elliptically polarized light according to the electric field strength applied to the electro-optic element 10. The light emitted from the electro-optic element 10 is transmitted through the analyzer 27 and light having only one polarization component is emitted. The amount of this light varies depending on the ellipticity that has been elliptically polarized by the electro-optic element 10 (a light amount corresponding to the voltage to be measured is output). The light is guided to the optical fibers 23b and 23c by the light receiving collimator units 28a and 28b and sent to the detectors 29a and 29b. After the optical signals are converted into electric signals by the detectors 29a and 29b, the voltage to be measured is calculated by the electronic circuit 30.

直流電圧測定装置20は,交流のみならず,直流の電圧測定も可能である。このため,直流の電圧測定はもちろんのこと,交流電線路の測定に於いても,例えば短絡事故時等の直流成分を含む過渡波形や,ダイオード負荷等の正負非対称な負荷による直流電圧成分の重畳した波形も正確に測定できる。   The DC voltage measuring device 20 can measure not only AC but also DC voltage. For this reason, not only DC voltage measurement, but also AC line measurement, for example, transient waveforms including DC components during short-circuit accidents, etc., and superposition of DC voltage components due to positive and negative asymmetric loads such as diode loads The measured waveform can be measured accurately.

本発明のいくつかの実施形態を説明したが,これらの実施形態は,例として提示したものであり,発明の範囲を限定することは意図していない。これら新規な実施形態は,その他の様々な形態で実施されることが可能であり,発明の要旨を逸脱しない範囲で,種々の省略,置き換え,変更を行うことができる。これら実施形態やその変形は,発明の範囲や要旨に含まれるとともに,特許請求の範囲に記載された発明とその均等の範囲に含まれる。   Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

10 電気光学素子
11 電気光学結晶
12a,12b 導電層
20 直流電圧測定装置
21 光源
22 光源駆動装置
23a-23c 光ファイバー
24 送光コリメーター部
25 偏光子
26 1/4波長板
27 検光子
28a,28b 受光コリメーター部
29a,29b 検出器
30 電子回路
DESCRIPTION OF SYMBOLS 10 Electro-optic element 11 Electro-optic crystal 12a, 12b Conductive layer 20 DC voltage measuring device 21 Light source 22 Light source driving device 23a-23c Optical fiber 24 Light transmission collimator part 25 Polarizer 26 1/4 wavelength plate 27 Analyzer 28a, 28b Light reception Collimator unit 29a, 29b Detector 30 Electronic circuit

Claims (8)

互いに反対側に配置される第1,第2の面を有する電気光学結晶と,
前記第1,第2の面それぞれに密着し,かつ赤外光を透過する第1,第2の導電層と,
前記第1,第2の導電層間に直流電圧を印加する印加手段と,
前記第1の導電層に赤外光を入射させる光源と,
前記第1の導電層に入射し,前記電気光学結晶を通過して,前記第2の導電層から出射した赤外光を受光する受光部と,
を具備する直流電圧測定装置。
An electro-optic crystal having first and second surfaces disposed on opposite sides;
First and second conductive layers in close contact with each of the first and second surfaces and transmitting infrared light;
Applying means for applying a DC voltage between the first and second conductive layers;
A light source for making infrared light incident on the first conductive layer;
A light receiving portion that receives the infrared light that is incident on the first conductive layer, passes through the electro-optic crystal, and is emitted from the second conductive layer;
DC voltage measuring device comprising:
前記第1,第2の導電層が,前記電気光学結晶への蒸着またはスパッタリングによって形成される,
請求項1記載の直流電圧測定装置。
The first and second conductive layers are formed by vapor deposition or sputtering on the electro-optic crystal;
The DC voltage measuring device according to claim 1.
前記赤外光の波長が800nm以上である
請求項1または2に記載の直流電圧測定装置。
The DC voltage measuring device according to claim 1 or 2, wherein the wavelength of the infrared light is 800 nm or more.
前記第1,第2の導電層それぞれでの可視光の透過率が10%以下である
請求項3記載の直流電圧測定装置。
The direct-current voltage measuring device according to claim 3, wherein the visible light transmittance in each of the first and second conductive layers is 10% or less.
前記第1,第2の導電層がGeまたはSiを含む
請求項4記載の直流電圧測定装置。
The DC voltage measuring device according to claim 4, wherein the first and second conductive layers contain Ge or Si.
前記光源と前記第1の導電層の間に配置される偏光子と,
前記第2の導電層と前記受光部の間に配置される検光子と,
をさらに具備する請求項1乃至5のいずれか1項に記載の直流電圧測定装置。
A polarizer disposed between the light source and the first conductive layer;
An analyzer disposed between the second conductive layer and the light receiving unit;
The direct-current voltage measuring device according to claim 1, further comprising:
前記偏光子と前記第1の導電層の間に配置される1/4波長板をさらに具備し,
前記検光子が,前記第1の導電層から出射された赤外光を第1,第2の偏光状態の赤外光に分離し,
前記受光部が,前記第1,第2の偏光状態の赤外光をそれぞれ受光する第1,第2の受光素子を有する,
請求項6記載の直流電圧測定装置。
A quarter wave plate disposed between the polarizer and the first conductive layer;
The analyzer separates infrared light emitted from the first conductive layer into infrared light in the first and second polarization states;
The light receiving unit includes first and second light receiving elements for receiving infrared light in the first and second polarization states,
The DC voltage measuring device according to claim 6.
前記第1,第2の受光素子で測定される,前記第1,第2の偏光状態の赤外光の強度の比に基づき,電圧を算出する算出部,
をさらに具備する請求項7記載の直流電圧測定装置。
A calculation unit for calculating a voltage based on a ratio of the intensity of infrared light in the first and second polarization states measured by the first and second light receiving elements;
The DC voltage measuring device according to claim 7, further comprising:
JP2013139154A 2013-07-02 2013-07-02 DC voltage measuring device Pending JP2015011019A (en)

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