JP2015008050A - Sample holder and charged particle device - Google Patents

Abstract

Kind Code: A1 An object of the present invention is to provide a sample holder with increased support rigidity in a direction of a second axis of a sample stage in order to reduce vibration of the sample stage in the direction of the second axis. SOLUTION: In view of the above problems, the following configuration is provided as one solution means of the present invention. In a sample holder having a sample stage for holding a sample and a frame for supporting the sample stage with a rotating shaft, an elastic body is arranged between the frame and the sample stage, and the elastic body moves the sample stage to the above-mentioned position. A sample holder characterized by being pressed against a frame. [Selection drawing] Fig. 1

Description

  The present invention relates to a sample holder and a charged particle device.

  A charged particle beam apparatus such as a transmission electron microscope uses a side entry type sample holder in which a sample is mounted on a sample holder and inserted into the charged particle beam apparatus. This sample holder has a structure that can move and tilt relative to the charged particle beam of the charged particle beam apparatus.

  As a background art of this technical field, there is Patent Document 1. In this publication, a sample holder that can be shared between a focused ion beam (FIB) apparatus and a transmission electron microscope (TEM) apparatus has only a uniaxial tilt method, and it has been difficult to prepare a TEM sample that can observe a lattice image. . An object of the present invention is to provide a sample holder that can easily create a high-quality TEM sample from which a lattice image can be observed. It is disclosed that the tilt angle can be 90 degrees or more and that a part of the sample stage is cut away in order to secure an incident area of the FIB used for TEM sample preparation.

JP-A-8-87972

  Patent Document 1 describes a mechanism of biaxial tilting of a sample holder. The two axes are the first axis of the entire sample holder and the two axes of the second axis which are different from each other and are substantially perpendicular to each other and connect the conical shapes (pivots) on both sides of the sample stage. is there. The sample stage is supported in a conical shape in the second axial direction.

  In the TEM observation, the resolution of the observed image decreases as the vibration of the sample stage increases. As a whole structure, the sample holder has relatively high rigidity in the first axial direction and small vibration, but has relatively low rigidity and large vibration in the second axial direction. With respect to the vibration of the entire sample holder, if the support rigidity from the sample holder is small, the amplification of vibration is large, and if the support rigidity is high, the amplification of vibration is small. Therefore, since the relative displacement of the sample stage relative to the sample holder can be reduced by supporting the sample stage so as to have higher rigidity than when supporting the sample stage in a conical shape, vibration amplification of the sample stage can be reduced.

  Accordingly, an object of the present invention is to provide a sample holder having an increased support rigidity in the direction of the second axis of the sample stage in order to reduce vibration in the second axis direction of the sample stage.

  In view of the above problems, the following configuration is provided as one solution of the present invention. In a sample holder having a sample stage for holding a sample and a frame for supporting the sample stage with a rotation shaft, an elastic body is disposed between the frame and the sample stage, and the elastic body is configured to hold the sample stage A sample holder that is pressed against a frame.

  In addition, the invention which solves the problem will be described using embodiments.

  ADVANTAGE OF THE INVENTION According to this invention, the sample holder which suppressed the vibration of the direction orthogonal to the axis | shaft of the whole sample holder of a sample stand can be provided.

2 is an example of a configuration diagram of a sample holder of Example 1. FIG. FIG. 3 is an exploded perspective view excluding the drive rod 6 of the sample holder of Example 1. 2 is an example of a frame 3 of the sample holder of Example 1. FIG. It is an example of the frame 31 and the elastic body 71 of the sample holder in Example 2. FIG. 10 is an example of a configuration diagram of a sample holder of Example 3. FIG. It is an example of the frame 32 of the sample holder of Example 3. It is an example with the through-hole 33aa in the frame 33 of the sample holder of Example 3. 10 is an example of a configuration diagram of a sample holder of Example 4. FIG.

  Hereinafter, examples will be described with reference to the drawings.

  [Example in which an elastic body is sandwiched between a frame and a sample stage] In this example, a method of supporting a sample stage using an elastic body will be described. In particular, by generating a reaction force on the elastic body between the frame on one side of the frame that holds the sample table and the sample table and pressing the sample table against the other frame, The example of the sample holder to support is demonstrated.

  FIG. 1 is an example of a configuration diagram of the sample holder of the present embodiment.

  FIG. 2 is an exploded perspective view excluding the drive rod 6 of the sample holder of the present embodiment.

  The sample holder 1 includes a holder outer cylinder 2, a frame body 3, a sample table 4, a coil spring 5, a drive rod 6, and an elastic body 7.

  The sample table 4 is configured such that the rotation shaft 4a fixed to the sample table 4 is inserted into the hole 3c of the frame 3, and the rotation shaft 4b fixed to the sample table 4 is inserted into the hole 3d. It is supported so that it can rotate around. The sample stage 4 is pushed in a direction toward the coil spring receiver 4c of the sample stage 4 by a coil spring 5 supported by a coil spring holding rod 5a fixed to the frame 3, and is rotated around the rotation axis 4a. Power is acting. The drive rod 6 is fixed to the holder inner tube 6a so as to be eccentric, and the holder inner tube 6a is connected to a drive mechanism (not shown) that is driven to rotate about the holder outer tube 2 by a concentric shaft. Corresponding to the rotation around the axis of the cylinder 6a, the cylinder 6a can be driven so as to draw a rotational trajectory eccentric with respect to the axis center of the holder outer cylinder 2. Since the spring constant of the coil spring 5 is smaller than the bending rigidity of the drive rod 6, the sample base 4 is pushed by the drive rod 6 in the direction toward the drive rod receiver 4 d, and thereby the force that is rotated by the coil spring 5 around the rotation shaft 4 a. Can be driven in the opposite direction. When the drive rod 6 is driven to move in the direction opposite to the drive rod receiver 4d, the sample stage 4 is rotated in the direction of the force by the force rotated by the coil spring 5 around the rotation shaft 4a. Thus, the sample stage 4 can adjust the angle around the rotating shaft 4 a by driving the drive rod 6.

  The sample table 4 is formed on the other frame 3b by the reaction force generated by the elastic deformation of the elastic body 7 between the frame 3a on one side of the frame 3 sandwiching the sample table 4 and the sample table 4. It is pressed in the axial direction. With respect to the axial direction of the rotating shaft 4a, the sample stage 4 comes into contact with the contact surface 4e facing the frame 3b, and the sample stage 4 is not separated from the frame 3b by the reaction force of the elastic body 7. It will behave in the same way as the body 3. Therefore, since the relative deformation of the sample table 4 and the frame 3 is suppressed, the amplification of the sample table 4 is suppressed with respect to the vibration of the frame 3.

  In this embodiment, the sample table 4 is driven around the rotation axis 4a by the coil spring 5 and the drive rod 6. However, the method for driving the sample table 4 around the rotation axis 4a is not limited to this example. The sample holder according to the embodiment is applicable as long as the sample holder 4 is sandwiched between the frames 3 and the supported sample stage 4 rotates around the support portion.

  FIG. 3 is an example of the frame 3 of the sample holder of the present embodiment.

  In this embodiment, a plate spring is used as the elastic body 7. However, the elastic body 7 can be applied as long as the sample table 4 can be pushed in the axial direction of the rotating shaft 4a. For example, a coil spring can also be applied. It is.

  In the sample holder according to the present embodiment, the frame body 3b and the sample stage 4 behave in the same manner. Therefore, when the frame body 3b is increased in rigidity, such as being thickened, the frame body 3ba is formed, and the vibration of the entire sample holder is reduced. The vibration of the sample stage 4 can be reduced.

  In the sample holder according to the present embodiment, since the frame 3b and the sample stage 4 behave in the same manner, the frame 3b in the plate thickness direction of the sample stage 4 is perpendicular to the axial direction of the entire sample holder and the direction of the rotation axis 4a. Even if the thickness is reduced, by increasing the width of the frame 3b in the direction of the rotation axis 4a, the bending rigidity of the frame 3b can be made equal to that before the thickness of the frame 3b is reduced. . Therefore, it is possible to reduce the thickness of the frame 3b while maintaining the vibration of the sample table 4 as well as the vibration of the entire sample holder.

  [Embodiment in which an elastic body having a displacement prevention function is sandwiched between a frame and a sample stage] In this embodiment, an example of a sample holder in which the elastic body 7 of the first embodiment is changed to an elastic body 71 having a displacement prevention function. Will be explained.

  FIG. 4 is an example of the frame 31 and the elastic body 71 of the sample holder in the second embodiment.

  In the second embodiment, the frame 3 is changed to the frame 31 and the elastic body 7 is changed to the elastic body 71 in the sample holder 1 of the first embodiment. Other configurations have the same functions as those of the configuration of the first embodiment described above, and thus the description thereof is omitted.

  The elastic body 71 is provided with slits 71 a so as to be fitted with ribs 31 e provided on the frame body 31 a sandwiching the elastic body 71 between the frame body 31 and the sample stage 4. The elastic body 71 is engaged with the slit 71a and the rib 31e, so that when the sample table 4 rotates around the rotation axis 4a, the elastic body 71 does not move even if a frictional force acts between the sample table 4 and the elastic body 71. There is no rotation around the rotation axis 4a with respect to the frame 31a. Therefore, since the elastic body 71 rotates around the rotation axis 4a with respect to the frame body 31a, the support state for generating the reaction force is not impaired, so that the reaction force of the elastic body 71 is always applied to the sample table 4. The configuration of this embodiment can always be maintained.

  In the sample holder according to the present embodiment, two sets of ribs 31e and slits 71 are provided, but the rotation of the elastic body 71 can be suppressed by providing one or more sets.

  In the sample holder according to the present embodiment, an example in which the rib 31e and the slit 71 are fitted as a configuration for suppressing the rotation of the elastic body 71 is shown, but the configuration for suppressing the rotation of the elastic body 71 is not limited thereto, If the relative displacement between the frame 31a and the elastic body 71 is constrained, for example, by bonding a part of the frame 31a and the elastic body 71 or by bringing the end of the elastic body 71 into contact with the inner corner of the groove of the frame 31a. Good.

  [Example in which one side of the frame is an elastic body] In this example, the sample stage is pressed against the other frame by a reaction force generated by elastically deforming the frame on one side of the frame sandwiching the sample stage. An example of the sample holder that supports the rigidity of the frame on the side on which the sample table is pressed will be described.

  FIG. 5 is an example of a configuration diagram of the sample holder of the present embodiment.

  FIG. 6 is an example of the frame 32 of the sample holder of the present embodiment.

  In the third embodiment, the frame body 3 is changed to the frame body 32 in the sample holder 1 of the first embodiment, and the elastic body 7 is provided with the function of the elastic body 7 so that the elastic body 7 is omitted. Other configurations have the same functions as those of the configuration of the first embodiment described above, and thus the description thereof is omitted.

  The sample table 4 is assembled so that the frame body 32a on one side of the frame body 32 sandwiching the sample table 4 is elastically deformed. The sample stage 4 is pressed against the opposite frame body 32b in the axial direction of the rotating shaft 4a by a reaction force generated by elastic deformation of the frame body 32a. Since the sample stage 4 is not separated from the frame body 32b with respect to the axial direction of the rotation shaft 4a, the sample stage 4 behaves in the same manner as the frame body 32. Therefore, since the relative deformation of the sample table 4 and the frame body 32 is suppressed, amplification of the sample table 4 is suppressed with respect to the vibration of the frame body 32.

  FIG. 7 shows an example in which the through hole 33aa is provided in the frame 33 of the sample holder of the present embodiment. In this configuration, the frame 33a portion swells toward the sample stage, and the frame 33a part functions as an elastic body by sandwiching the sample stage 4 between the frames. Alternatively, when the sample stage 4 is sandwiched between the frame bodies, the frame body 33a portion is recessed to work as an elastic body.

  In the sample holder according to the present embodiment, an example in which the width of the frame 33a is narrowed in order to elastically deform the frame 33a has been described. However, the configuration for elastically deforming the frame 33a is not limited thereto, and the frame 33a is not limited thereto. It is only necessary to reduce the rigidity of the frame 33a in the direction of the rotating shaft 4a, such as by providing a through hole 33aa in a direction perpendicular to the axial direction of the entire sample holder and the rotating shaft 4a.

  [Example in which an elastic portion is provided on the sample stage] In this example, the reaction force generated by elastically deforming the sample stage is pressed against the frame on one side by a frame that sandwiches the sample stage and the sample stage. An example of a sample holder that is supported by the rigidity of the frame on the side pressed is described.

  FIG. 8 is an example of a configuration diagram of the sample holder of the present embodiment.

  In the fourth embodiment, in the sample holder 1 of the first embodiment, the frame body 3 is changed to the frame body 34, and the function of the elastic body 7 is given to the sample stage 44, thereby eliminating the elastic body 7. Other configurations have the same functions as those of the configuration of the first embodiment described above, and thus the description thereof is omitted.

  The sample stage 44 is assembled so that the elastic portion 44 f is elastically deformed while being sandwiched between the frame bodies 34. The sample table 44 is pressed against the frame 34b on one side of the frame 34 sandwiching the sample table 44 in the axial direction of the rotating shaft by a reaction force generated by elastic deformation of the elastic portion 44f. Since the sample stage 44 is not separated from the frame body 34b in the axial direction of the rotating shaft, the sample stage 44 behaves in the same manner as the frame body 34. Therefore, since the relative deformation between the sample table 44 and the frame body 34 is suppressed, amplification of the sample table 44 is suppressed with respect to the vibration of the frame body 34.

  In the sample holder according to the present embodiment, the example in which the through hole is provided in the sample stage 44 is shown in order to elastically deform the elastic part 44f. However, the configuration for elastically deforming the elastic part 44f is not limited to this, and the sample stage 44 is not limited thereto. It is only necessary to reduce the rigidity of the sample stage 44 in the direction of the rotation axis, such as by providing a notch groove on the surface.

  In addition, this invention is not limited to an above-described Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

  Further, the configuration of the above embodiment may be arranged symmetrically with respect to the sample holder longitudinal direction of the sample stage.

    The sample holders of Examples 1 to 4 are inserted into a charged particle beam apparatus as a side entry type sample holder of a charged particle beam apparatus such as SEM, TEM, FIB or the like.

DESCRIPTION OF SYMBOLS 1 Sample holder 2 Holder outer cylinder 3, 31, 32, 33, 34 Frame 3a, 31a, 32a, 33a, 34a One side frame 3b, 31b, 32b, 33b, 34b The other frame 3c, 3d, 31d Hole 31e Rib 33aa Through-holes 4, 44 Sample stage 4a Rotating shaft 4b Fixed rotating shaft 4c Coil spring receiver 4d Drive rod receiver 4e Contact surface 44f Elastic portion 5 Coil spring 5a Coil spring holding rod 6 Drive rod 6a Holder inner cylinder 7, 71 Elastic body 71a Slit

Claims (6)

  In a sample holder having a sample stage for holding a sample and a frame for supporting the sample stage with a rotation shaft, an elastic body is disposed between the frame and the sample stage, and the elastic body is configured to hold the sample stage A sample holder that is pressed against a frame. The sample holder according to claim 1,
The sample holder according to claim 1, wherein the elastic body includes a displacement prevention unit that prevents displacement of the sample stage with respect to the frame.   In a sample holder having a sample stage for holding a sample and a frame for supporting the sample stage with a rotating shaft, a portion of the frame that contacts the sample stage is formed of an elastic body, and the elastic body is formed of the sample stage. A sample holder, wherein the sample holder is pressed against the frame. In a sample holder having a sample table for holding a sample and a frame for supporting the sample table by a rotating shaft,
A sample holder, wherein a through hole is provided in the frame body, and a portion having the through hole in contact with the sample table presses the sample table against the frame body as an elastic body. In a sample holder having a sample table for holding a sample and a frame for supporting the sample table by a rotating shaft,
A sample holder, wherein a through hole is provided in the sample stage, and a portion having the through hole that comes into contact with the frame body presses the sample stage against the frame body as an elastic body. In a charged particle beam apparatus having a sample holder for holding a sample and a sample holder having a frame for supporting the sample stage with a rotation shaft,
The charged particle beam apparatus according to claim 1, wherein the sample holder includes an elastic body disposed between the frame body and the sample stage, and the elastic body presses the sample stage against the frame body.