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JP2015001375A - Rotation angle detection device - Google Patents

Rotation angle detection device Download PDF

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JP2015001375A
JP2015001375A JP2013124239A JP2013124239A JP2015001375A JP 2015001375 A JP2015001375 A JP 2015001375A JP 2013124239 A JP2013124239 A JP 2013124239A JP 2013124239 A JP2013124239 A JP 2013124239A JP 2015001375 A JP2015001375 A JP 2015001375A
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rotation angle
distance
detection
inclined surface
rotating body
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哲男 神田
Tetsuo Kanda
哲男 神田
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DB LAB CO Ltd
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DB LAB CO Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a rotation angle detection device which miniaturizes the device and reduce an influence of a noise.SOLUTION: A magnetic type rotation angle detection device 1 for detecting an absolute rotation angle of a rotating body 2 includes: distance detection units 6 arranged at opposing positions on an inclined plane 4 of the rotating body 2 or a passive member 3 in a non-contact state, for detecting a distance to the inclined plane 4 which continuously changes according to a rotation of the rotating body 2; and an angle specifying unit 7 for specifying the absolute rotation angle of the rotating body 2 based on the detected distance by the distance detection units 6. The distance detection unit 6 each includes a detection coil 9 for detecting a distance to the inclined plane 4 as a change in inductance. The angle specifying unit 7 specifies the absolute rotation angle of the rotating body 2 based on a phase shift of an AC-exciting wave generated in response to the inductance change of the detection coil 9 while AC-exciting the detection coil 9 when the absolute rotation angle of the rotating body 2 is specified based on the inductance change of the detection coil 9.

Description

本発明は、回転体の絶対的な回転角度を検出する磁気式の回転角度検出装置に関する。   The present invention relates to a magnetic rotation angle detection device that detects an absolute rotation angle of a rotating body.

回転体の絶対的な回転角度を検出するアブソリュート型の回転角度検出装置として、永久磁石や磁気センサ(ホール素子、MR素子など)を使用しない磁気式の回転角度検出装置が知られている(例えば、特許文献1参照)。このような回転角度検出装置は、鉄粉などが侵入する惧れがある環境でも使用できるので、高い耐環境性が要求される車載用途などに広く採用されている。   As an absolute rotation angle detection device that detects an absolute rotation angle of a rotating body, a magnetic rotation angle detection device that does not use a permanent magnet or a magnetic sensor (such as a Hall element or an MR element) is known (for example, , See Patent Document 1). Since such a rotation angle detection device can be used even in an environment where iron powder or the like may enter, it is widely used for in-vehicle applications that require high environmental resistance.

例えば、特許文献1に示される磁気式の回転角度検出装置は、バリアブルリラクタンス型レゾルバ(VR型レゾルバ)であり、回転軸に設けられる非円形のロータと、該ロータの外周を囲むステータとを備え、ステータには、ロータの回転に伴う距離変動を検出する複数のコイルが巻装されている。このような回転角度検出装置によれば、従来方式のレゾルバと同様に、ロータの回転角度に応じた2相の角度検出信号が得られるので、既存のR/D変換器(専用IC)を用いて回転軸の回転角度を特定することができる。   For example, a magnetic rotation angle detection device disclosed in Patent Document 1 is a variable reluctance type resolver (VR type resolver), and includes a non-circular rotor provided on a rotary shaft and a stator surrounding the outer periphery of the rotor. The stator is wound with a plurality of coils for detecting distance fluctuations accompanying the rotation of the rotor. According to such a rotation angle detection device, a two-phase angle detection signal corresponding to the rotation angle of the rotor can be obtained in the same manner as in a conventional resolver, so that an existing R / D converter (dedicated IC) is used. Thus, the rotation angle of the rotation axis can be specified.

特開2013−53890号公報JP2013-53890A

しかしながら、特許文献1の回転角度検出装置では、ロータを囲むようにステータを配置する必要があるので、装置が大型になるだけでなく、設置上の制約を受け易いという問題がある。また、特許文献1の回転角度検出装置は、ロータとの距離変動に応じて検出信号の振幅を変化させる振幅変調方式であるため、ノイズの影響を受け易く、ノイズが多い環境では磁気シールドなどの対策が別途必要になり、装置がさらに大型化するという問題がある。   However, in the rotation angle detection device of Patent Document 1, since it is necessary to dispose the stator so as to surround the rotor, there is a problem that the device is not only large, but is also subject to installation restrictions. Further, since the rotation angle detection device of Patent Document 1 is an amplitude modulation method that changes the amplitude of a detection signal in accordance with a variation in the distance from the rotor, it is easily affected by noise, and in a noisy environment, such as a magnetic shield. There is a problem that a separate measure is required and the apparatus is further increased in size.

本発明は、上記の如き実情に鑑みこれらの課題を解決することを目的として創作されたものであって、回転体の絶対的な回転角度を検出する磁気式の回転角度検出装置であって、前記回転体の一端面、又は前記回転体の回転に応じて回転する受動部材の一端面に形成され、回転軸心の直交面に対して所定角度傾斜した傾斜面と、前記傾斜面の対向位置に非接触状態で配置され、前記回転体の回転に応じて連続的に変化する前記傾斜面との距離を検出する距離検出部と、前記距離検出部による検出距離にもとづいて前記回転体の絶対的な回転角度を特定する角度特定部とを備え、前記傾斜面は、磁界内で渦電流を発生させる導体からなり、前記距離検出部は、前記傾斜面との距離をインダクタンスの変化として検出する検出コイルを備え、前記角度特定部は、前記傾斜面の回転方向に所定の間隔を存して配置された複数の前記検出コイルのインダクタンス変化にもとづいて前記回転体の絶対的な回転角度を特定するにあたり、前記検出コイルを交流励磁しつつ、該検出コイルのインダクタンス変化に応じて交流励磁波に位相ズレを生じさせる交流励磁回路に接続され、前記交流励磁波の位相ズレにもとづいて、前記回転体の絶対的な回転角度を特定することを特徴とする。
また、前記角度特定部は、前記交流励磁波の位相ズレを時間的に蓄積し、該蓄積した位相ズレにもとづいて、前記回転体の絶対的な回転角度を特定することを特徴とする。
また、前記距離検出部は、前記検出コイルが巻装され、該検出コイルの交流励磁に応じて、前記傾斜面に向けてループ状の磁界を発生させるコアを備え、該コアが、傾斜面において特定の方向性を持たない磁界を発生させるポットコア形状であることを特徴とする。
また、前記距離検出部は、前記検出コイルが巻装され、該検出コイルの交流励磁に応じて、前記傾斜面に向けてループ状の磁界を発生させるコアを備え、該コアが、傾斜面において特定の方向性を持つ磁界を発生させるコ字形状であり、傾斜面の径方向に沿うように配置されることを特徴とする。
また、前記傾斜面の径方向に沿う複数のコアを一体化したことを特徴とする。
The present invention was created for the purpose of solving these problems in view of the above circumstances, and is a magnetic rotation angle detection device that detects the absolute rotation angle of a rotating body, An inclined surface that is formed on one end surface of the rotating body or one end surface of a passive member that rotates in accordance with the rotation of the rotating body and is inclined at a predetermined angle with respect to an orthogonal plane of the rotation axis, and an opposite position of the inclined surface A distance detecting unit that is arranged in a non-contact state and detects a distance from the inclined surface that continuously changes according to the rotation of the rotating body, and an absolute value of the rotating body based on a detection distance by the distance detecting unit An angle specifying unit for specifying a specific rotation angle, wherein the inclined surface is made of a conductor that generates an eddy current in a magnetic field, and the distance detecting unit detects a distance from the inclined surface as a change in inductance. Comprising a detection coil, The degree specifying unit determines the absolute rotation angle of the rotating body based on the inductance change of the plurality of detection coils arranged at predetermined intervals in the rotation direction of the inclined surface. Is connected to an AC excitation circuit that causes a phase shift in the AC excitation wave in accordance with a change in inductance of the detection coil, and the absolute rotation of the rotating body is based on the phase shift in the AC excitation wave. It is characterized by specifying an angle.
In addition, the angle specifying unit accumulates a phase shift of the AC excitation wave with time, and specifies an absolute rotation angle of the rotating body based on the accumulated phase shift.
The distance detection unit includes a core around which the detection coil is wound and generates a loop-shaped magnetic field toward the inclined surface in response to alternating current excitation of the detection coil. It has a pot core shape that generates a magnetic field having no specific directionality.
The distance detection unit includes a core around which the detection coil is wound and generates a loop-shaped magnetic field toward the inclined surface in response to alternating current excitation of the detection coil. It has a U-shape that generates a magnetic field having a specific directionality, and is arranged along the radial direction of the inclined surface.
In addition, a plurality of cores along the radial direction of the inclined surface are integrated.

請求項1の発明によれば、回転体又は受動部材の一端面に形成した傾斜面の対向位置に検出コイルを配置して傾斜面との距離変動を検出するので、回転体や受動部材(ロータなど)の外周側に検出コイルを配置する場合に比べ、装置を小型化できるだけでなく、設置の自由度を高めることができる。しかも、励磁コイルと検出コイルを分離することなく、検出コイルを交流励磁しつつ、該検出コイルのインダクタンス変化に応じた交流励磁波の位相ズレにもとづいて、回転体の絶対的な回転角度を特定する位相変調方式を適用したので、検出信号の振幅変化にもとづいて回転体の絶対的な回転角度を特定する振幅変調方式に比べ、ノイズの影響を低減することができる。
また、請求項2の発明によれば、交流励磁波の位相ズレを時間的に蓄積し、該蓄積した位相ズレにもとづいて回転体の絶対的な回転角度を特定するので、1波の位相ズレにもとづいて回転体の絶対的な回転角度を特定する場合に比べ、検出精度や安定性を向上させることができる。
また、請求項3の発明によれば、傾斜面に向けてループ状の磁界を発生させるコアを、傾斜面において特定の方向性を持たない磁界を発生させるポットコア形状としたので、外部磁界の影響を小さくし、耐環境性を高めることができる。
また、請求項4の発明によれば、傾斜面に向けてループ状の磁界を発生させるコアを、傾斜面において特定の方向性を持つ磁界を発生させるコ字形状とし、傾斜面の径方向に沿うように配置したので、距離検出部が発生させる磁界の幅(傾斜面の回転方向)を狭くすることができ、その結果、各距離検出部の距離検出精度を高めることが可能になる。
また、請求項5の発明によれば、請求項4と同様の効果が得られるがででなく、複数の距離検出部をコンパクトに配置し、回転角度検出装置の小型化が可能となる。
According to the first aspect of the present invention, since the detection coil is arranged at a position opposite to the inclined surface formed on the one end surface of the rotating body or the passive member to detect the variation in distance from the inclined surface, the rotating body or the passive member (rotor And the like, the apparatus can be downsized and the degree of freedom of installation can be increased. Moreover, the absolute rotation angle of the rotating body is specified based on the phase shift of the AC excitation wave according to the change in inductance of the detection coil while AC exciting the detection coil without separating the excitation coil and the detection coil. Since the phase modulation method is applied, the influence of noise can be reduced as compared with the amplitude modulation method that specifies the absolute rotation angle of the rotating body based on the amplitude change of the detection signal.
According to the second aspect of the present invention, the phase shift of the AC excitation wave is accumulated in terms of time, and the absolute rotation angle of the rotating body is specified based on the accumulated phase shift. As compared with the case where the absolute rotation angle of the rotating body is specified based on the above, the detection accuracy and stability can be improved.
According to the invention of claim 3, since the core that generates the loop-shaped magnetic field toward the inclined surface has a pot core shape that generates a magnetic field having no specific directionality on the inclined surface, the influence of the external magnetic field Can be reduced and the environmental resistance can be improved.
According to the invention of claim 4, the core that generates a loop-shaped magnetic field toward the inclined surface is formed into a U-shape that generates a magnetic field having a specific direction on the inclined surface, and is arranged in the radial direction of the inclined surface. Since it arrange | positions along, it can narrow the width | variety (rotation direction of an inclined surface) of the magnetic field which a distance detection part produces | generates, As a result, it becomes possible to raise the distance detection precision of each distance detection part.
According to the invention of claim 5, the same effect as that of claim 4 can be obtained, but a plurality of distance detectors can be arranged in a compact manner, and the rotation angle detector can be miniaturized.

本発明の実施形態に係る回転角度検出装置の構成を示すブロック図である。It is a block diagram which shows the structure of the rotation angle detection apparatus which concerns on embodiment of this invention. 本発明の実施形態に係る回転角度検出装置の距離検出部を示す図であり、(a)は距離検出部の正面図、(b)は距離検出部のX−X断面図である。It is a figure which shows the distance detection part of the rotation angle detection apparatus which concerns on embodiment of this invention, (a) is a front view of a distance detection part, (b) is XX sectional drawing of a distance detection part. 本発明の実施形態に係る回転角度検出装置の検出原理を示す側面図である。It is a side view which shows the detection principle of the rotation angle detection apparatus which concerns on embodiment of this invention. 本発明の実施形態に係る回転角度検出装置の回転角度と距離変動の関係を示すグラフ図である。It is a graph which shows the relationship between the rotation angle of the rotation angle detection apparatus which concerns on embodiment of this invention, and distance fluctuation | variation. 本発明の実施形態に係る回転角度検出装置の交流励磁回路を示す図であり、(a)は発振回路を示す回路図、(b)は共振回路を示す回路図である。It is a figure which shows the alternating current excitation circuit of the rotation angle detection apparatus which concerns on embodiment of this invention, (a) is a circuit diagram which shows an oscillation circuit, (b) is a circuit diagram which shows a resonance circuit. 本発明の実施形態に係る回転角度検出装置の回転角度検出処理手順を示すフローチャートである。It is a flowchart which shows the rotation angle detection process sequence of the rotation angle detection apparatus which concerns on embodiment of this invention. 本発明の実施形態に係る回転角度検出装置の距離検出処理手順を示すフローチャートである。It is a flowchart which shows the distance detection process sequence of the rotation angle detection apparatus which concerns on embodiment of this invention. 本発明の第2実施形態に係る回転角度検出装置の距離検出部を示す図であり、(a)は距離検出部の正面図、(b)は距離検出部のY−Y断面図である。It is a figure which shows the distance detection part of the rotation angle detection apparatus which concerns on 2nd Embodiment of this invention, (a) is a front view of a distance detection part, (b) is YY sectional drawing of a distance detection part. 本発明の第3実施形態に係る回転角度検出装置の距離検出部を示す図であり、(a)は距離検出部の正面図、(b)は距離検出部のZ−Z断面図である。It is a figure which shows the distance detection part of the rotation angle detection apparatus which concerns on 3rd Embodiment of this invention, (a) is a front view of a distance detection part, (b) is ZZ sectional drawing of a distance detection part.

以下、本発明の実施の形態について、図面に基づいて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1は、本発明の実施形態に係る回転角度検出装置の構成を示すブロック図である。
この図に示すように、本発明の実施形態に係る回転角度検出装置1は、永久磁石を用いることなく回転体2の絶対的な回転角度を検出するアブソリュート型の磁気式エンコーダであって、回転体2の一端面、又は回転体2の回転に応じて回転する受動部材3の一端面に形成される傾斜面4と、該傾斜面4の対向位置に非接触状態で配置される検出モジュール5とを備えて構成される。例えば、本実施形態の回転角度検出装置1では、回転軸心の直交面に対して所定角度θだけ傾斜した傾斜面4を備える受動部材3を回転体2(回転軸)の端部に一体的に取り付け、この受動部材3の傾斜面4と対向する位置に非接触状態で検出モジュール5を配置している。
FIG. 1 is a block diagram showing a configuration of a rotation angle detection device according to an embodiment of the present invention.
As shown in this figure, a rotation angle detection device 1 according to an embodiment of the present invention is an absolute type magnetic encoder that detects the absolute rotation angle of a rotating body 2 without using a permanent magnet, An inclined surface 4 formed on one end surface of the body 2 or one end surface of the passive member 3 that rotates in accordance with the rotation of the rotating body 2, and a detection module 5 that is disposed in a non-contact state at a position facing the inclined surface 4. And is configured. For example, in the rotation angle detection device 1 of the present embodiment, the passive member 3 including the inclined surface 4 that is inclined by a predetermined angle θ with respect to the orthogonal surface of the rotation axis is integrated with the end of the rotating body 2 (rotation shaft). The detection module 5 is disposed in a non-contact state at a position facing the inclined surface 4 of the passive member 3.

傾斜面4は、磁界内で渦電流を発生させる導体で形成される。例えば、本実施形態では、受動部材3に傾斜面4を形成するにあたり、受動部材3全体を導体であるアルミニウムで形成している。なお、回転体2や受動部材3が導体でない場合は、傾斜面4の表面部分のみを導体とすればよい。例えば、傾斜面4に板状の導体部材を貼り付けたり、傾斜面4に導体からなる薄膜をメッキや蒸着により成膜する。   The inclined surface 4 is formed of a conductor that generates an eddy current in a magnetic field. For example, in the present embodiment, when the inclined surface 4 is formed on the passive member 3, the entire passive member 3 is formed of aluminum as a conductor. If the rotating body 2 or the passive member 3 is not a conductor, only the surface portion of the inclined surface 4 may be a conductor. For example, a plate-like conductor member is attached to the inclined surface 4 or a thin film made of a conductor is formed on the inclined surface 4 by plating or vapor deposition.

本実施形態の検出モジュール5は、距離検出部6、角度特定部7及び交流励磁回路8を一体的に備える。例えば、傾斜面4と対向する基板の一面に距離検出部6を実装し、基板の他面に角度特定部7及び交流励磁回路8を実装すれば、距離検出部6、角度特定部7及び交流励磁回路8を一体的に備える検出モジュール5が構成される。   The detection module 5 of the present embodiment integrally includes a distance detection unit 6, an angle specification unit 7, and an AC excitation circuit 8. For example, if the distance detecting unit 6 is mounted on one surface of the substrate facing the inclined surface 4 and the angle specifying unit 7 and the AC excitation circuit 8 are mounted on the other surface of the substrate, the distance detecting unit 6, the angle specifying unit 7 and the AC A detection module 5 is integrally provided with the excitation circuit 8.

図2は、本発明の実施形態に係る回転角度検出装置の距離検出部を示す図であり、(a)は距離検出部の正面図、(b)は距離検出部のX−X断面図である。
この図に示すように、距離検出部6は、傾斜面4の対向位置に非接触状態で配置され、回転体2の回転に応じて連続的に変化する傾斜面4との距離を検出する部分であり、本実施形態の距離検出部6は、傾斜面4との距離をインダクタンスの変化として検出する検出コイル9と、該検出コイル9が巻装されるコア10とを備えて構成される。
2A and 2B are diagrams illustrating a distance detection unit of the rotation angle detection device according to the embodiment of the present invention, in which FIG. 2A is a front view of the distance detection unit, and FIG. 2B is an XX sectional view of the distance detection unit. is there.
As shown in this figure, the distance detection unit 6 is disposed in a non-contact state at a position facing the inclined surface 4 and detects a distance from the inclined surface 4 that continuously changes according to the rotation of the rotating body 2. In this embodiment, the distance detection unit 6 includes a detection coil 9 that detects a distance from the inclined surface 4 as a change in inductance, and a core 10 around which the detection coil 9 is wound.

コア10は、所望の磁路を形成するための部材であり、フェライト、パーマロイなどの磁性材料を用いて形成される。例えば、本実施形態では、傾斜面4に向けてループ状の磁界(磁束)を発生させるにあたり、磁束漏れを可及的に少なくするために、傾斜面4において特定の方向性を持たない磁界を発生させる、いわゆるポットコア形状のコア10を使用している。   The core 10 is a member for forming a desired magnetic path, and is formed using a magnetic material such as ferrite or permalloy. For example, in the present embodiment, when a loop-shaped magnetic field (magnetic flux) is generated toward the inclined surface 4, a magnetic field that does not have a specific direction on the inclined surface 4 is used in order to reduce magnetic flux leakage as much as possible. The so-called pot core-shaped core 10 to be generated is used.

検出モジュール5は、傾斜面4の回転方向に所定の間隔を存して配置される複数の距離検出部6を備える。例えば、本実施形態の検出モジュール5は、傾斜面4の回転軸心を中心とする円周に沿い、かつ120°の均等な間隔を存して並ぶ3つの距離検出部6を備える。ちなみに、本実施形態では、直径5.6mmのポットコアを用いて距離検出部6を形成し、これを直径20mmのホルダ部材11に形成した3つの嵌合孔11aで位置決め保持している。   The detection module 5 includes a plurality of distance detection units 6 arranged at a predetermined interval in the rotation direction of the inclined surface 4. For example, the detection module 5 of the present embodiment includes three distance detectors 6 arranged along a circumference centered on the rotation axis of the inclined surface 4 and arranged at equal intervals of 120 °. Incidentally, in this embodiment, the distance detection part 6 is formed using the pot core of diameter 5.6mm, and this is positioned and hold | maintained by the three fitting holes 11a formed in the holder member 11 of diameter 20mm.

図3は、本発明の実施形態に係る回転角度検出装置の検出原理を示す側面図、図4は、本発明の実施形態に係る回転角度検出装置の回転角度と距離変動の関係を示すグラフ図である。
図3に示すように、傾斜面4の対向位置に非接触状態で複数の距離検出部6を配置した状態で回転体2を回転させると、各距離検出部6と傾斜面4との間の距離が連続的に変動する。例えば、本実施形態のように、傾斜面4の回転軸心を中心とする円周に沿い、かつ120°の均等な間隔を存して並ぶ3つの距離検出部6を備える場合は、各距離検出部6と傾斜面4との間の距離が、図4に示す3相波形のように変動する。本発明の回転角度検出装置1は、このような距離変動を磁気的に検出するとともに、検出した距離にもとづいて回転体2の絶対的な回転角度を特定するものである。ちなみに、本実施形態では、距離検出部6と傾斜面4との間の最小距離を0.1mm、最大距離を0.6mm、距離変動幅を0.5mmとしているが、検出コイル9の巻き数、コア10の大きさなどにもとづいて磁束の到達距離を調整すれば、距離検出部6と傾斜面4との間の距離は、広い範囲で変更することが可能である。
FIG. 3 is a side view showing the detection principle of the rotation angle detection device according to the embodiment of the present invention, and FIG. 4 is a graph showing the relationship between the rotation angle and the distance variation of the rotation angle detection device according to the embodiment of the present invention. It is.
As shown in FIG. 3, when the rotating body 2 is rotated in a state where a plurality of distance detection units 6 are arranged in a non-contact state at a position opposite to the inclined surface 4, the distance between each distance detection unit 6 and the inclined surface 4 is set. The distance varies continuously. For example, when the three distance detectors 6 are arranged along the circumference centered on the rotation axis of the inclined surface 4 and arranged at equal intervals of 120 ° as in the present embodiment, each distance The distance between the detection unit 6 and the inclined surface 4 varies as a three-phase waveform shown in FIG. The rotation angle detection device 1 of the present invention magnetically detects such a variation in distance and specifies the absolute rotation angle of the rotating body 2 based on the detected distance. Incidentally, in this embodiment, the minimum distance between the distance detector 6 and the inclined surface 4 is 0.1 mm, the maximum distance is 0.6 mm, and the distance fluctuation width is 0.5 mm. If the reach distance of the magnetic flux is adjusted based on the size of the core 10 or the like, the distance between the distance detector 6 and the inclined surface 4 can be changed in a wide range.

図5は、本発明の実施形態に係る回転角度検出装置の交流励磁回路を示す図であり、(a)は発振回路を示す回路図、(b)は共振回路を示す回路図である。
この図に示すように、交流励磁回路8は、検出コイル9を交流励磁しつつ、該検出コイル9のインダクタンス変化に応じて交流励磁波に位相ズレを生じさせるように構成される。例えば、図5の(a)は、発振回路からなる交流励磁回路8を示しており、所定の周波数で発振する発振回路(例えば、シュミット発振回路)の帰還回路に検出コイル9を配置することにより、検出コイル9のインダクタンス変化に応じて発振波に位相ズレを生じさせる。また、図5の(b)は、共振回路からなる交流励磁回路8を示しており、検出コイル9とコンデンサCとを接続した共振回路(例えば、直列共振回路)に所定数の駆動パルスを入力した後の共振動作(減衰振動)で検出コイル9を交流励磁しつつ、検出コイル9のインダクタンス変化に応じて減衰振動波に位相ズレを生じさせる。
5A and 5B are diagrams showing an AC excitation circuit of the rotation angle detection device according to the embodiment of the present invention. FIG. 5A is a circuit diagram showing an oscillation circuit, and FIG. 5B is a circuit diagram showing a resonance circuit.
As shown in this figure, the AC excitation circuit 8 is configured to cause a phase shift in an AC excitation wave according to a change in inductance of the detection coil 9 while exciting the detection coil 9 with AC. For example, FIG. 5A shows an AC excitation circuit 8 composed of an oscillation circuit, and by arranging the detection coil 9 in a feedback circuit of an oscillation circuit (eg, a Schmitt oscillation circuit) that oscillates at a predetermined frequency. Then, a phase shift is generated in the oscillation wave according to the inductance change of the detection coil 9. FIG. 5B shows an AC excitation circuit 8 composed of a resonance circuit. A predetermined number of drive pulses are input to a resonance circuit (for example, a series resonance circuit) in which a detection coil 9 and a capacitor C are connected. While the detection coil 9 is AC-excited by the resonance operation (damped vibration) after this, a phase shift is generated in the damped vibration wave according to the inductance change of the detection coil 9.

角度特定部7は、傾斜面4の回転方向に所定の間隔を存して配置された複数の検出コイル9のインダクタンス変化にもとづいて回転体2の絶対的な回転角度を特定する。例えば、本実施形態の角度特定部7は、マイコン(マイクロコントローラ)で構成されており、該マイコンに書き込まれたプログラムやテーブルデータにもとづく処理により、交流励磁回路8から出力される交流励磁波の位相ズレを検出し、該位相ズレにもとづいて回転体2の絶対的な回転角度を特定する。   The angle specifying unit 7 specifies the absolute rotation angle of the rotating body 2 based on the inductance change of the plurality of detection coils 9 arranged at predetermined intervals in the rotation direction of the inclined surface 4. For example, the angle specifying unit 7 of the present embodiment is configured by a microcomputer (microcontroller), and the AC excitation wave output from the AC excitation circuit 8 is processed by a process based on a program or table data written in the microcomputer. A phase shift is detected, and an absolute rotation angle of the rotating body 2 is specified based on the phase shift.

角度特定部7は、交流励磁波の位相ズレを時間的に蓄積し、該蓄積した位相ズレにもとづいて回転体2の絶対的な回転角度を特定することが好ましい。その理由は、微小な位相ズレであっても、その微小な変化を時間的に蓄積して高精度に検出することが可能になるからである。例えば、蓄積された位相ズレは、交流励磁波の波数をカウントし、該カウント数が所定数になるまでの時間、または所定時間内におけるカウント数にもとづいて検出することができる。   It is preferable that the angle specifying unit 7 accumulates the phase shift of the AC excitation wave with respect to time and specifies the absolute rotation angle of the rotating body 2 based on the accumulated phase shift. The reason is that even a minute phase shift can be detected with high accuracy by accumulating the minute change over time. For example, the accumulated phase shift can be detected based on the time until the count reaches a predetermined number or the count within the predetermined time by counting the number of alternating excitation waves.

つぎに、角度特定部7の具体的な処理手順について、図6及び図7を参照して説明する。ただし、交流励磁回路8として共振回路を用いる場合の処理手順を示し、交流励磁回路8として発振回路を用いる場合の処理手順は省略する。   Next, a specific processing procedure of the angle specifying unit 7 will be described with reference to FIGS. 6 and 7. However, a processing procedure when a resonance circuit is used as the AC excitation circuit 8 is shown, and a processing procedure when an oscillation circuit is used as the AC excitation circuit 8 is omitted.

図6は、本発明の実施形態に係る回転角度検出装置の回転角度検出処理手順を示すフローチャートである。
この図に示すように、角度特定部7による回転角度検出処理では、第1の検出コイル9のインダクタンス変化に応じた位相ズレを検出する第1距離検出処理S1と、第2の検出コイル9のインダクタンス変化に応じた位相ズレを検出する第2距離検出処理S2と、第3の検出コイル9のインダクタンス変化に応じた位相ズレを検出する第3距離検出処理S3と、これらの処理(S1〜S3)で検出した距離にもとづいて回転体2の絶対的な回転角度を特定する回転角度特定処理S4と、特定した回転角度を所定形態の回転角度検出信号として出力する信号出力処理S5とを含み、これらの処理(S1〜S5)を繰り返すことにより、所定の応答速度で回転角度検出信号を出力する。
FIG. 6 is a flowchart showing a rotation angle detection processing procedure of the rotation angle detection device according to the embodiment of the present invention.
As shown in this figure, in the rotation angle detection process by the angle specifying unit 7, the first distance detection process S <b> 1 for detecting a phase shift according to the inductance change of the first detection coil 9 and the second detection coil 9. A second distance detection process S2 for detecting a phase shift according to an inductance change, a third distance detection process S3 for detecting a phase shift according to an inductance change of the third detection coil 9, and these processes (S1 to S3) A rotation angle specifying process S4 for specifying the absolute rotation angle of the rotating body 2 based on the distance detected in (1), and a signal output process S5 for outputting the specified rotation angle as a rotation angle detection signal of a predetermined form, By repeating these processes (S1 to S5), a rotation angle detection signal is output at a predetermined response speed.

図7は、本発明の実施形態に係る回転角度検出装置の距離検出処理手順を示すフローチャートである。
この図に示すように、第1〜第3距離検出処理(S1〜S3)では、まず、波数カウンタ及び時間計測カウンタをクリアした後(S11)、対応する交流励磁回路8に対して駆動パルスを出力する(S12)。交流励磁回路8に駆動パルスを出力すると、交流励磁回路8の共振作用によって減衰振動波が発生し、これが角度特定部7に入力される。交流励磁回路8が発生させる減衰振動波は、検出コイル9のインダクタンス変化(傾斜面4との距離変化)に応じて位相ズレが生じるので、距離検出処理では、この位相ズレを時間的に蓄積して検出する。つまり、交流励磁回路8に対して駆動パルスを出力した後(S12)、減衰振動波の波数をカウントするとともに(S13)、そのカウント数が予め設定された数に達したと判断したら(S14)、時間計測カウンタ値を取得し、これを距離検出値とする(S15)。
FIG. 7 is a flowchart showing a distance detection processing procedure of the rotation angle detection device according to the embodiment of the present invention.
As shown in this figure, in the first to third distance detection processing (S1 to S3), first, after clearing the wave number counter and the time measurement counter (S11), a drive pulse is applied to the corresponding AC excitation circuit 8. Output (S12). When a drive pulse is output to the AC excitation circuit 8, a damped vibration wave is generated by the resonance action of the AC excitation circuit 8 and is input to the angle specifying unit 7. The damped oscillatory wave generated by the AC excitation circuit 8 causes a phase shift according to the inductance change of the detection coil 9 (change in the distance to the inclined surface 4). Therefore, in the distance detection process, this phase shift is accumulated over time. To detect. That is, after outputting a drive pulse to the AC excitation circuit 8 (S12), the number of damped vibration waves is counted (S13), and if it is determined that the count reaches a preset number (S14). Then, a time measurement counter value is acquired and used as a distance detection value (S15).

第1〜第3距離検出処理(S1〜S3)は、同時に実行する場合と、所定の順序で順次実行する場合が考えられる。第1〜第3距離検出処理(S1〜S3)を同時に実行する場合は、各距離検出処理のタイミングにズレが生じないので、検出精度や応答速度の点で優位であるが、各距離検出部6間の磁気的な相互干渉を考慮する必要がある。一方、第1〜第3距離検出処理(S1〜S3)を順次実行する場合は、各距離検出処理のタイミングに僅かなズレが生じるので、前者に比べて検出精度や応答速度が低下する惧れがあるが、各距離検出部6間の磁気的な相互干渉を考慮する必要がないので、比較的低速で回転する回転体の回転角度検出においては後者が優位となる場合がある。   The first to third distance detection processes (S1 to S3) can be executed simultaneously or sequentially in a predetermined order. When the first to third distance detection processes (S1 to S3) are performed simultaneously, there is no deviation in the timing of each distance detection process, which is advantageous in terms of detection accuracy and response speed. It is necessary to consider the magnetic mutual interference between the six. On the other hand, when the first to third distance detection processes (S1 to S3) are sequentially executed, there is a slight deviation in the timing of each distance detection process, so that the detection accuracy and response speed may be reduced compared to the former. However, since there is no need to consider the magnetic mutual interference between the distance detectors 6, the latter may be superior in detecting the rotation angle of a rotating body that rotates at a relatively low speed.

詳細な処理手順の図示は省略するが、回転角度特定処理S4では、第1〜第3距離検出処理(S1〜S3)の距離検出値を取得し、これらの距離検出値にもとづいて回転体2の絶対的な回転角度を特定する。例えば、逆三角関数による演算処理や、予め書き込まれたルックアップテーブルの参照処理で回転体2の絶対的な回転角度を特定することができ、そして、特定した回転角度は、信号出力処理S5によって所定形態の出力信号に変換され、回転角度検出信号として出力される。   Although detailed illustration of the processing procedure is omitted, in the rotation angle specifying process S4, the distance detection values of the first to third distance detection processes (S1 to S3) are acquired, and the rotator 2 is based on these distance detection values. Specify the absolute rotation angle. For example, the absolute rotation angle of the rotating body 2 can be specified by a calculation process using an inverse trigonometric function or a reference process of a look-up table written in advance, and the specified rotation angle is determined by the signal output process S5. It is converted into an output signal in a predetermined form and output as a rotation angle detection signal.

なお、第1〜第3距離検出処理(S1〜S3)の距離検出値には、距離に応じて変化する検出成分と、距離に拘わらず一定のバイアス成分とが含まれており、回転角度の特定処理では、バイアス成分を除去してから演算処理やテーブル参照処理を行なうことが好ましい。例えば、3相の距離検出値が得られる本実施形態では、3相の検出成分の和が「0」になると想定し、下記の式を用いてバイアス成分を除去する。
バイアス成分=(3相分の距離検出値の和)/3
第1距離検出値の検出成分=第1距離検出値−バイアス成分
第2距離検出値の検出成分=第2距離検出値−バイアス成分
第3距離検出値の検出成分=第3距離検出値−バイアス成分
The distance detection values of the first to third distance detection processes (S1 to S3) include a detection component that changes according to the distance and a constant bias component regardless of the distance. In the specific process, it is preferable to perform the arithmetic process and the table reference process after removing the bias component. For example, in the present embodiment in which three-phase distance detection values are obtained, it is assumed that the sum of the three-phase detection components is “0”, and the bias component is removed using the following equation.
Bias component = (sum of distance detection values for three phases) / 3
Detection component of first distance detection value = first distance detection value−bias component Detection component of second distance detection value = second distance detection value−bias component Detection component of third distance detection value = third distance detection value−bias component

叙述の如く構成された本実施形態によれば、回転体2の絶対的な回転角度を検出する磁気式の回転角度検出装置1であって、回転体2の一端面、又は回転体2の回転に応じて回転する受動部材3の一端面に形成され、回転軸心の直交面に対して所定角度傾斜した傾斜面4と、傾斜面4の対向位置に非接触状態で配置され、回転体2の回転に応じて連続的に変化する傾斜面4との距離を検出する距離検出部6と、距離検出部6による検出距離にもとづいて回転体2の絶対的な回転角度を特定する角度特定部7とを備え、傾斜面4は、磁界内で渦電流を発生させる導体からなり、距離検出部6は、傾斜面4との距離をインダクタンスの変化として検出する検出コイル9を備え、角度特定部7は、傾斜面4の回転方向に所定の間隔を存して配置された複数の検出コイル9のインダクタンス変化にもとづいて回転体2の絶対的な回転角度を特定するにあたり、検出コイル9を交流励磁しつつ、該検出コイル9のインダクタンス変化に応じて交流励磁波に位相ズレを生じさせる交流励磁回路8に接続され、交流励磁波の位相ズレにもとづいて、回転体2の絶対的な回転角度を特定するので、回転体2又は受動部材3の一端面に傾斜面4を形成し、その対向位置に非接触状態で距離検出部6を配置するだけで、回転体2の全体的な回転角度を特定することが可能になり、その結果、回転体2や受動部材3の外周側に検出コイル9を配置する場合に比べ、装置を小型化できるだけでなく、設置の自由度を高めることができる。   According to the present embodiment configured as described, a magnetic rotation angle detection device 1 that detects an absolute rotation angle of the rotator 2, the one end surface of the rotator 2, or the rotation of the rotator 2. Is formed on one end surface of the passive member 3 that rotates in response to the inclined surface 4 and is inclined at a predetermined angle with respect to the orthogonal surface of the rotation axis, and is disposed in a non-contact state at a position opposite the inclined surface 4. A distance detection unit 6 that detects a distance from the inclined surface 4 that continuously changes according to the rotation of the angle detector, and an angle specification unit that specifies an absolute rotation angle of the rotating body 2 based on the detection distance by the distance detection unit 6 7, the inclined surface 4 is made of a conductor that generates an eddy current in a magnetic field, and the distance detection unit 6 includes a detection coil 9 that detects the distance from the inclined surface 4 as a change in inductance, and includes an angle specifying unit. 7 are arranged at predetermined intervals in the rotation direction of the inclined surface 4. In specifying the absolute rotation angle of the rotating body 2 based on the inductance change of the plurality of detection coils 9, the detection coil 9 is AC-excited, and the phase shift is caused to the AC excitation wave according to the inductance change of the detection coil 9. Since the absolute rotation angle of the rotating body 2 is specified based on the phase shift of the AC exciting wave, the inclined surface 4 is provided on one end surface of the rotating body 2 or the passive member 3. It is possible to specify the entire rotation angle of the rotator 2 by simply forming and disposing the distance detection unit 6 in a non-contact state at the opposite position. As a result, the rotator 2 and the passive member 3 Compared with the case where the detection coil 9 is arranged on the outer peripheral side, not only the apparatus can be miniaturized, but also the degree of freedom of installation can be increased.

しかも、励磁コイルと検出コイル9を分離することなく、検出コイル9を交流励磁しつつ、該検出コイル9のインダクタンス変化に応じた交流励磁波の位相ズレにもとづいて、回転体2の絶対的な回転角度を特定する位相変調方式を適用したので、検出信号の振幅変化にもとづいて回転体2の絶対的な回転角度を特定する振幅変調方式に比べ、ノイズの影響を低減することができる。   In addition, while the excitation coil and the detection coil 9 are not separated, the absolute value of the rotating body 2 is determined based on the phase shift of the AC excitation wave according to the inductance change of the detection coil 9 while the excitation excitation of the detection coil 9 is performed. Since the phase modulation method for specifying the rotation angle is applied, the influence of noise can be reduced compared to the amplitude modulation method for specifying the absolute rotation angle of the rotating body 2 based on the amplitude change of the detection signal.

また、本実施形態の角度特定部7は、交流励磁波の位相ズレを時間的に蓄積し、該蓄積した位相ズレにもとづいて、回転体2の絶対的な回転角度を特定するので、1波の位相ズレにもとづいて回転体2の絶対的な回転角度を特定する場合に比べ、検出精度や安定性を向上させることができる。   In addition, the angle specifying unit 7 of the present embodiment accumulates the phase shift of the AC excitation wave with time, and specifies the absolute rotation angle of the rotating body 2 based on the accumulated phase shift. As compared with the case where the absolute rotation angle of the rotating body 2 is specified based on the phase shift, the detection accuracy and stability can be improved.

また、本実施形態の距離検出部6は、検出コイル9が巻装され、該検出コイル9の交流励磁に応じて、傾斜面4に向けてループ状の磁界を発生させるコア10を備え、該コア10が、傾斜面4において特定の方向性を持たない磁界を発生させるポットコア形状としてあるので、外部磁界の影響を小さくし、耐環境性を高めることができる。   Further, the distance detection unit 6 of the present embodiment includes a core 10 around which a detection coil 9 is wound, and generates a loop-shaped magnetic field toward the inclined surface 4 in response to AC excitation of the detection coil 9. Since the core 10 has a pot core shape that generates a magnetic field having no specific direction on the inclined surface 4, the influence of the external magnetic field can be reduced and the environmental resistance can be improved.

つぎに、本発明の第2実施形態に係る回転角度検出装置について、図8を参照して説明する。   Next, a rotation angle detection device according to a second embodiment of the present invention will be described with reference to FIG.

図8は、本発明の第2実施形態に係る回転角度検出装置の距離検出部を示す図であり、(a)は距離検出部の正面図、(b)は距離検出部のY−Y断面図である。
この図に示すように、第2実施形態の回転角度検出装置は、距離検出部6を構成するコア10の形状及び配置が前記実施形態と相違している。具体的には、傾斜面4において特定の方向性を持つ磁界を発生させるコ字形状(冂字形状)のコア10を用いるとともに、該コ字状のコア10を、傾斜面4の径方向に沿うように配置している。このようにすると、距離検出部6が発生させる磁界の幅(傾斜面4の回転方向)を狭くすることができるので、各距離検出部6の距離検出精度を高めることが可能になる。
FIG. 8 is a diagram illustrating a distance detection unit of a rotation angle detection device according to the second embodiment of the present invention, where (a) is a front view of the distance detection unit, and (b) is a YY cross section of the distance detection unit. FIG.
As shown in this figure, in the rotation angle detection device of the second embodiment, the shape and arrangement of the core 10 constituting the distance detection unit 6 are different from those of the embodiment. Specifically, a U-shaped core 10 that generates a magnetic field having a specific direction on the inclined surface 4 is used, and the U-shaped core 10 is disposed in the radial direction of the inclined surface 4. It is arranged along. In this way, since the width of the magnetic field generated by the distance detection unit 6 (the rotation direction of the inclined surface 4) can be reduced, the distance detection accuracy of each distance detection unit 6 can be increased.

つぎに、本発明の第3実施形態に係る回転角度検出装置について、図9を参照して説明する。   Next, a rotation angle detection device according to a third embodiment of the present invention will be described with reference to FIG.

図9は、本発明の第3実施形態に係る回転角度検出装置の距離検出部を示す図であり、(a)は距離検出部の正面図、(b)は距離検出部のZ−Z断面図である。
この図に示すように、第3実施形態の回転角度検出装置は、3つのコ字状コアを一体化した形状のコア10を備える点が前記実施形態と相違している。具体的には、コ字状コアの一方の脚部を共通化するとともに、共通化された脚部を傾斜面4の中心線上に位置させる。このようなコア10によれば、第2実施形態と同様の効果が得られるがででなく、複数(3つ)の距離検出部6をコンパクトに配置し、回転角度検出装置の小型化が可能となる。なお、複数の距離検出部6のコア10を一体化する場合、前述した第1〜第3距離検出処理(S1〜S3)は、タイミングをずらして順次実行する必要がある。
FIG. 9 is a diagram illustrating a distance detection unit of a rotation angle detection device according to a third embodiment of the present invention, where (a) is a front view of the distance detection unit, and (b) is a ZZ cross section of the distance detection unit. FIG.
As shown in this figure, the rotation angle detection device of the third embodiment is different from the above embodiment in that it includes a core 10 having a shape in which three U-shaped cores are integrated. Specifically, one leg portion of the U-shaped core is made common, and the common leg portion is positioned on the center line of the inclined surface 4. According to such a core 10, the same effect as that of the second embodiment can be obtained, but a plurality (three) of distance detectors 6 can be arranged in a compact manner, and the rotation angle detector can be downsized. It becomes. In addition, when integrating the core 10 of the some distance detection part 6, it is necessary to perform the 1st-3rd distance detection process (S1-S3) mentioned above sequentially, shifting timing.

以上、本発明について、実施形態を示して説明したが、本発明は、上述した実施形態にのみ限定されるものではなく、特許請求の範囲内で種々の変更が可能であることは言うまでもない。例えば、距離検出部の個数、コアの大きさ、傾斜面と距離検出部の距離、距離の変動幅などは、使用する状況に応じて任意に変更することができる。   Although the present invention has been described with reference to the embodiment, it is needless to say that the present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the claims. For example, the number of distance detection units, the size of the core, the distance between the inclined surface and the distance detection unit, the fluctuation range of the distance, and the like can be arbitrarily changed according to the use situation.

また、前記実施形態では、傾斜面を一つの平面で構成し、一回転で一周期の距離変化を生じさせているが、傾斜面を複数の平面の組み合せで構成し、一回転で複数の周期で距離変化を生じさせてもよい。また、傾斜面は、平面に限らず、曲面とすることも可能である。   Moreover, in the said embodiment, although an inclined surface is comprised by one plane and the distance change of 1 period is produced by one rotation, an inclined surface is comprised by the combination of several planes, and it is several periods by 1 rotation. A change in distance may be generated. Further, the inclined surface is not limited to a flat surface, but may be a curved surface.

1 回転角度検出装置
2 回転体
3 受動部材
4 傾斜面
5 検出モジュール
6 距離検出部
7 角度特定部
8 交流励磁回路
9 検出コイル
10 コア
11 ホルダ部材
DESCRIPTION OF SYMBOLS 1 Rotation angle detection apparatus 2 Rotating body 3 Passive member 4 Inclined surface 5 Detection module 6 Distance detection part 7 Angle specification part 8 AC excitation circuit 9 Detection coil 10 Core 11 Holder member

Claims (5)

回転体の絶対的な回転角度を検出する磁気式の回転角度検出装置であって、
前記回転体の一端面、又は前記回転体の回転に応じて回転する受動部材の一端面に形成され、回転軸心の直交面に対して所定角度傾斜した傾斜面と、
前記傾斜面の対向位置に非接触状態で配置され、前記回転体の回転に応じて連続的に変化する前記傾斜面との距離を検出する距離検出部と、
前記距離検出部による検出距離にもとづいて前記回転体の絶対的な回転角度を特定する角度特定部とを備え、
前記傾斜面は、磁界内で渦電流を発生させる導体からなり、
前記距離検出部は、前記傾斜面との距離をインダクタンスの変化として検出する検出コイルを備え、
前記角度特定部は、
前記傾斜面の回転方向に所定の間隔を存して配置された複数の前記検出コイルのインダクタンス変化にもとづいて前記回転体の絶対的な回転角度を特定するにあたり、
前記検出コイルを交流励磁しつつ、該検出コイルのインダクタンス変化に応じて交流励磁波に位相ズレを生じさせる交流励磁回路に接続され、
前記交流励磁波の位相ズレにもとづいて、前記回転体の絶対的な回転角度を特定することを特徴とする回転角度検出装置。
A magnetic rotation angle detection device for detecting an absolute rotation angle of a rotating body,
An inclined surface that is formed on one end surface of the rotating body or one end surface of a passive member that rotates according to the rotation of the rotating body, and is inclined at a predetermined angle with respect to an orthogonal plane of the rotation axis;
A distance detection unit that is arranged in a non-contact state at a position opposite to the inclined surface and detects a distance from the inclined surface that continuously changes according to the rotation of the rotating body;
An angle specifying unit that specifies an absolute rotation angle of the rotating body based on a detection distance by the distance detection unit;
The inclined surface is made of a conductor that generates an eddy current in a magnetic field,
The distance detection unit includes a detection coil that detects a distance from the inclined surface as a change in inductance,
The angle specifying unit includes:
In specifying the absolute rotation angle of the rotating body based on the inductance change of the plurality of detection coils arranged at predetermined intervals in the rotation direction of the inclined surface,
While the detection coil is AC-excited, the detection coil is connected to an AC excitation circuit that causes a phase shift in an AC excitation wave according to an inductance change of the detection coil.
A rotation angle detection device that identifies an absolute rotation angle of the rotating body based on a phase shift of the AC excitation wave.
前記角度特定部は、前記交流励磁波の位相ズレを時間的に蓄積し、該蓄積した位相ズレにもとづいて、前記回転体の絶対的な回転角度を特定することを特徴とする請求項1に記載の回転角度検出装置。   The angle specifying unit accumulates a phase shift of the AC excitation wave with time, and specifies an absolute rotation angle of the rotating body based on the accumulated phase shift. The rotation angle detection device described. 前記距離検出部は、前記検出コイルが巻装され、該検出コイルの交流励磁に応じて、前記傾斜面に向けてループ状の磁界を発生させるコアを備え、該コアが、傾斜面において特定の方向性を持たない磁界を発生させるポットコア形状であることを特徴とする請求項1又は2に記載の回転角度検出装置。   The distance detection unit includes a core around which the detection coil is wound, and generates a loop-shaped magnetic field toward the inclined surface in response to alternating current excitation of the detection coil. The rotation angle detection device according to claim 1, wherein the rotation angle detection device has a pot core shape that generates a magnetic field having no directionality. 前記距離検出部は、前記検出コイルが巻装され、該検出コイルの交流励磁に応じて、前記傾斜面に向けてループ状の磁界を発生させるコアを備え、該コアが、傾斜面において特定の方向性を持つ磁界を発生させるコ字形状であり、傾斜面の径方向に沿うように配置されることを特徴とする請求項1又は2に記載の回転角度検出装置。   The distance detection unit includes a core around which the detection coil is wound, and generates a loop-shaped magnetic field toward the inclined surface in response to alternating current excitation of the detection coil. The rotation angle detection device according to claim 1, wherein the rotation angle detection device has a U shape that generates a magnetic field having directionality and is arranged along a radial direction of the inclined surface. 前記傾斜面の径方向に沿う複数のコアを一体化したことを特徴とする請求項4に記載の回転角度検出装置。   The rotation angle detection device according to claim 4, wherein a plurality of cores along the radial direction of the inclined surface are integrated.
JP2013124239A 2013-06-12 2013-06-12 Rotation angle detection device Pending JP2015001375A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018109612A (en) * 2016-12-02 2018-07-12 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung Position measuring device and method for operating the position measuring device
CN108779991A (en) * 2016-03-11 2018-11-09 罗伯特·博世有限公司 Tilt tolerance formula displacement sensor
WO2024024406A1 (en) * 2022-07-29 2024-02-01 株式会社三共製作所 Measurement system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108779991A (en) * 2016-03-11 2018-11-09 罗伯特·博世有限公司 Tilt tolerance formula displacement sensor
JP2019507884A (en) * 2016-03-11 2019-03-22 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh Tilt-resistant distance sensor
CN108779991B (en) * 2016-03-11 2021-05-28 罗伯特·博世有限公司 Tilt Tolerance Displacement Sensors
US11118940B2 (en) 2016-03-11 2021-09-14 Robert Bosch Gmbh Tilt-tolerant displacement sensor
JP2018109612A (en) * 2016-12-02 2018-07-12 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung Position measuring device and method for operating the position measuring device
WO2024024406A1 (en) * 2022-07-29 2024-02-01 株式会社三共製作所 Measurement system

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