JP2015088762A - Vibrator, oscillator, electronic device, and moving object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrator which can realize a reduction in thickness while improving impact resistance.SOLUTION: A vibrator comprises: a base substrate 40 for supporting a vibration substrate 20 including a tuning-fork type crystal vibration piece 30; a lid 10 disposed so as to cover the vibration substrate 20; first magnetic layers 53 and 54 provided in the lid 10 at positions where the lid 10 overlaps with the vibration substrate 20 and second magnetic layers 57 and 58 provided in the base substrate 40 at positions where the base substrate 40 overlaps with the vibration substrate 20 as viewed in a plan view from the lid 10 side; and front side magnetic layers 51 and 52 and rear side magnetic layers 55 and 56 which are provided in the tuning-fork type crystal vibration piece 30 among the first magnetic layers 53 and 54 and the second magnetic layers 57 and 58 and serve as third magnetic layers. The front side magnetic layers 51 and 52 of a side facing the first magnetic layers 53 and 54 have the same polarity as that of the first magnetic layers 53 and 54 of a side facing the front side magnetic layers 51 and 52. The third magnetic layers of a side facing the rear side magnetic layers 55 and 56 have the same polarity as that of the rear side magnetic layers 55 and 56 of a side facing the third magnetic layers.

Description

  The present invention relates to a vibrator, an oscillator, an electronic device, and a moving object.

  Thin vibrators and oscillators are widely used in small information devices such as HDDs (hard disk drives), mobile computers, and IC cards, and mobile communication devices such as mobile phones, car phones, and paging systems. It is used. For example, in the piezoelectric vibrator disclosed in Patent Document 1, a tuning fork type crystal vibrating piece as a vibrating element is mounted with a vibrating arm floating in a package including a thin box-shaped base substrate portion and a thin lid portion. (It is connected. In addition, in the crystal resonator disclosed in Patent Document 2, the resonator substrate including the tuning fork type crystal resonator element, the base substrate, and the lid substrate (lid body) are each composed of a flat substrate. A configuration in which the substrate is sandwiched between the base substrate and the lid substrate is used, and the gap between the vibrator substrate and the base substrate or the lid substrate can be managed to be small.

JP 2008-22413 A JP 2000-223996 A

  However, in the piezoelectric vibrator disclosed in Patent Document 1 and the crystal vibrator disclosed in Patent Document 2, when an impact or the like is applied from the outside, the vibration of the tuning-fork type crystal vibrating piece is caused by the impact. There is a possibility that the arm bends, the tip of the vibrating arm contacts the inner bottom surface of the package, and the vibrating arm is damaged.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A vibrator according to this application example includes a vibration substrate including a vibration element, a base substrate to which the vibration substrate is attached, a lid disposed so as to cover the vibration substrate, The first magnetic layer provided in a position overlapping the vibration element of the lid in a plan view as viewed from the lid body side, and provided in a position overlapping with the vibration element of the base substrate in the plan view. A second magnetic layer; and a third magnetic layer provided between the first magnetic layer and the second magnetic layer of the vibration element, on the side facing the first magnetic layer The surface of the third magnetic layer and the surface of the first magnetic layer on the side facing the third magnetic layer have the same polarity, and the surface on the side facing the second magnetic layer The surface of the 3 magnetic layer is the same as the surface of the second magnetic layer facing the third magnetic layer. Characterized in that it is a sex.

  According to this application example, the polarity of the first magnetic layer provided on the lid and the polarity of the third magnetic layer provided on the vibration element on the side facing the first magnetic layer are the same polarity. ing. The polarity of the second magnetic layer provided on the base substrate is the same as the polarity of the third magnetic layer provided on the vibration element on the side facing the second magnetic layer. Since such a magnetic field is provided, the vibrating element has a force that repels the lid and the base substrate. This repulsive force acts as a force for reducing the bending of the vibration element when an impact is applied to the vibration element from the outside due to, for example, dropping of the vibrator, and the vibration element is difficult to contact the lid or the base substrate. As a result, it is possible to prevent the vibration element from being damaged when an impact is applied. In addition, since the deflection of the vibration element when an impact is applied to the vibration element can be reduced, the gap between the vibration element and the lid or the base substrate can be reduced, and the vibrator can be made thinner. Can do.

  Application Example 2 In the vibrator according to the application example described above, the third magnetic layer is formed on a side surface connecting the first main surface and the second main surface of the vibration element that are in a front-back relationship. It is preferable to be provided.

  According to this application example, the third magnetic layer can be provided without increasing the thickness of the vibration element, and the vibrator can be thinned.

  Application Example 3 In the vibrator according to the application example described above, it is preferable that the third magnetic layer is provided on each of the main surface of the base and the second main surface of the vibration element.

  According to this application example, the area of the third magnetic layer can be increased, and the magnetic force (repulsive force) can be increased. As a result, the amount of bending of the vibration element can be further reduced, and the vibrator can be thinned.

  Application Example 4 In the vibrator according to the application example described above, it is preferable that the third magnetic layer is provided at an end portion in the extending direction of the vibration element.

  According to this application example, the repulsive force can be used more effectively by providing the third magnetic layer at the end of the vibration element where the amount of deflection is large. As a result, the amount of bending of the vibration element can be further reduced, and the vibrator can be thinned.

  Application Example 5 In the vibrator according to the application example described above, the first magnetic layer and the second magnetic layer are composed of magnets having an N pole and an S pole, and the third magnetic layer is a paramagnetic material. Or it is preferable to comprise with a diamagnetic body.

  According to this application example, the paramagnetic material or the diamagnetic material has the same polarity as the opposite polarity, and the magnetic force increases as the magnetic layers approach each other. Therefore, the repulsive force can be increased as the vibration element is bent. It becomes possible.

  Application Example 6 In the vibrator according to the application example described above, it is preferable that the first magnetic layer, the second magnetic layer, and the third magnetic layer are composed of magnets having an N pole and an S pole. preferable.

  According to this application example, it is possible to always have a repulsive force between the vibration element, the lid, and the base substrate.

  Application Example 7 In the vibrator according to the application example described above, the first magnetic layer and the second magnetic layer are disposed in a recess provided in each of the base substrate and the lid. It is preferable.

  According to this application example, since the first magnetic layer and the second magnetic layer are disposed in the recesses provided in the base substrate and the lid, the first magnetic layer and the second magnetic layer are formed without increasing the thickness of the lid and the base substrate. The first magnetic layer and the second magnetic layer can be provided, and the vibrator can be thinned.

  Application Example 8 An oscillator according to this application example includes the vibrator according to any one of the application examples described above and a circuit unit electrically connected to the vibrator. .

  According to this application example, since the vibrator and the circuit unit that are excellent in impact resistance and can be thinned are provided, a small and thin oscillator having excellent impact resistance can be provided.

  Application Example 9 An electronic apparatus according to this application example includes the vibrator according to any one of the application examples described above.

  According to this application example, since the vibrator that has excellent impact resistance and can be thinned is used, it is possible to provide an electronic device that realizes improved reliability and downsizing.

  Application Example 10 A moving object according to this application example includes the vibrator according to any one of the application examples described above.

  According to this application example, since the vibrator having excellent impact resistance and capable of being thinned is used, it is possible to provide a moving body that achieves improved reliability and downsizing.

The schematic structure of the vibrator | oscillator which concerns on 1st Embodiment of a vibrator | oscillator is shown, (a) is a perspective view which shows the state by which the vibrator | oscillator was divided | segmented, (b) is AA sectional drawing of (a). The vibration board and base board which are used for the vibrator concerning a 1st embodiment are shown, (a) is a top view (inside view) of a vibration board, and (b) is a top view (top view) of a base board. ). The schematic structure of the vibrator | oscillator which concerns on 2nd Embodiment of a vibrator | oscillator is shown, (a) is a perspective view which shows the state by which the vibrator | oscillator was divided | segmented, (b) is AA sectional drawing of (a). The vibration board and base board which are used for the vibrator concerning a 2nd embodiment are shown, (a) is a top view (inner view) of a vibration board, and (b) is a top view (top view) of a base board. ). It is a figure which illustrates the polarity of each magnetic layer, (a) is P view of FIG. 2 (a) which shows the structure of 1st Embodiment, (b) is FIG. 4 (FIG. 4) which shows the structure of 2nd Embodiment. P view of a). The schematic structure of the modification of a vibrator | oscillator is shown, Fig.6 (a) is a top view, (b) is a front sectional view. The perspective view which shows the structure of the mobile type personal computer as an example of an electronic device. The perspective view which shows the structure of the mobile telephone as an example of an electronic device. The perspective view which shows the structure of the digital still camera as an example of an electronic device. The perspective view which shows the structure of the motor vehicle as an example of a mobile body.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the embodiments and drawings are only for the purpose of illustrating the best mode of the present invention and are not intended to limit the present invention. The present invention can be implemented by adding various changes and modifications to the following embodiments within the technical scope thereof.

(First embodiment)
A vibrator according to a first embodiment of the vibrator of the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 is a diagram showing an outline of a vibrator according to a first embodiment of the vibrator of the present invention, and FIG. 1A is a perspective view of the divided vibrator as viewed from the lid part side. . FIG.1 (b) is AA sectional drawing of Fig.1 (a). FIG. 2 shows a vibration substrate and a base substrate used in the vibrator according to the first embodiment. FIG. 2A is a plan view (inner view) of the vibration substrate, and FIG. It is a top view (top view) of a base substrate.

  As shown in FIGS. 1A and 1B, the vibrator 1 includes an uppermost lid 10 (lid), a vibration substrate 20, and a base substrate 40. The lid 10 and the base substrate 40 are made of a quartz material. The vibration substrate 20 has a tuning fork type crystal vibrating piece 30 formed by etching and an outer frame portion 29 formed so as to surround the tuning fork type crystal vibrating piece 30. In the present embodiment, the vibration substrate 20 having the tuning fork type crystal vibrating piece 30 is formed of quartz, but various piezoelectric single crystal materials such as lithium tantalate and lithium niobate can be used in addition to quartz.

  In the vibrator 1, the lid 10 is bonded on the vibration substrate 20 around the vibration substrate 20 including the tuning fork type crystal vibrating piece 30 as a vibration element, and the base substrate 40 is bonded below the vibration substrate 20. The The outer frame portion 29, the lid 10 and the base substrate 40 form a package 80. That is, the lid 10 is bonded to the vibration substrate 20 and the base substrate 40 is bonded to the vibration substrate 20 under the siloxane bond (Si—O—Si). In addition to the siloxane bond, this bonding can be performed by anodic bonding or resin bonding depending on the forming material of the lid 10, the vibration substrate 20, and the base substrate 40.

  The vibration substrate 20 has a tuning fork type crystal vibrating piece 30 at the center thereof, and a space 22 is formed between the tuning fork type crystal vibrating piece 30 and the outer frame part 29. The space 22 that defines the outer shape of the tuning-fork type crystal vibrating piece 30 is formed by wet etching. The tuning fork type crystal vibrating piece 30 is connected to the outer frame portion 29 through the support arm 26. In this embodiment, the tuning fork type crystal vibrating piece 30 is formed with the same thickness as the outer frame portion 29. The tuning fork type crystal vibrating piece 30 may be formed to be slightly thinner than the outer frame portion 29.

  As shown in FIGS. 1A and 1B, the tuning fork type crystal vibrating piece 30 includes a base portion 23, a pair of vibrating arms 21 extending from the base portion 23, and a support arm 26. The base 23, the vibrating arm 21, and the support arm 26 are formed by forming a space 22 that defines the outer shape of the tuning-fork type crystal vibrating piece 30 by crystal etching.

  The vibration substrate 20 includes a first extraction electrode 31 and a second extraction electrode 32 on the outer frame portion 29, the base portion 23, and the support arm 26. The first extraction electrode 31 includes a first A extraction electrode 31A and a first B extraction electrode 31B, and the second extraction electrode 32 includes a second A extraction electrode 32A and a second B extraction electrode 32B. The vibration substrate 20 includes a first connection terminal 35 and a second connection terminal 36 in the outer frame portion 29. The first A extraction electrode 31A, the first B extraction electrode 31B, the second A extraction electrode 32A, the second B extraction electrode 32B, the first connection terminal 35, and the second connection terminal 36 are formed on both surfaces of the vibration substrate 20.

  The lid 10 includes a lid-side recess 17 on the vibration substrate 20 side. Further, the lid 10 includes first magnetic layers 53 and 54 provided in the lid-side concave portion 17 so as to face a position where a vibration arm 21 described later is disposed. The first magnetic layers 53 and 54 are composed of magnets having N poles and S poles. The first magnetic layers 53 and 54 are provided so that the polarities on the opposing sides thereof are the same as those of the front magnetic layers 51 and 52 as third magnetic layers provided on the vibrating arm 21 described later. In this example, the polarity of the surface side of the first magnetic layers 53 and 54, in other words, the side facing the front magnetic layers 51 and 52 of the vibrating arm 21 is the N pole (see FIG. 5A). Provided. As described above, since the first magnetic layers 53 and 54 are provided in the lid-side concave portion 17, the first magnetic layers 53 and 54 can be provided without increasing the thickness of the lid 10. Thinning can be achieved.

  The base substrate 40 includes a base substrate side recess 47 on the vibration substrate 20 side. The base substrate 40 is formed with a first through hole 41 and a second through hole 43 penetrating therethrough and a stepped portion 49. A first connection electrode 42 and a second connection electrode 44 that are connected to the first through hole 41 and the second through hole 43 are formed in the stepped portion 49. The base substrate 40 includes a first external electrode 45 and a second external electrode 46 that are metalized on the bottom surface. Furthermore, the base substrate 40 includes second magnetic layers 57 and 58 provided in the base substrate side recess 47 so as to face a position where a vibration arm 21 described later is disposed. The second magnetic layers 57 and 58 are composed of magnets having N poles and S poles. The second magnetic layers 57 and 58 are provided so that the polarities on the opposite sides thereof are the same as the back side magnetic layers 55 and 56 as third magnetic layers provided on the vibrating arm 21 described later. In this example, the polarity of the surface side of the second magnetic layers 57 and 58, in other words, the side facing the back side magnetic layers 55 and 56 of the vibrating arm 21 is the N pole (see FIG. 5A). Provided. As described above, since the second magnetic layers 57 and 58 are provided in the base substrate-side recess 47, the second magnetic layers 57 and 58 can be provided without increasing the thickness of the base substrate 40. 1 can be reduced in thickness.

  The first through hole 41 and the second through hole 43 have a through hole wiring 15 (metal film) formed on the inner surface thereof. The first connection electrode 42 is electrically connected to the first external electrode 45 provided on the base substrate 40 through the through-hole wiring 15 of the first through-hole 41. The second connection electrode 44 is electrically connected to the second external electrode 46 provided on the base substrate 40 through the through-hole wiring 15 of the second through-hole 43.

  In the vibrator 1, the first B extraction electrode 31 </ b> B is connected to the first connection electrode 42 via the first connection terminal 35. The first connection electrode 42 is connected to the through hole wiring 15 of the first through hole 41, and the through hole wiring 15 is connected to the first external electrode 45 of the base substrate 40. The second B extraction electrode 32 </ b> B is connected to the second connection electrode 44 via the second connection terminal 36. The second connection electrode 44 is connected to the through-hole wiring 15 of the second through-hole 43, and the through-hole wiring 15 is connected to the second external electrode 46 of the base substrate 40.

  As shown in FIG. 1, the first connection terminal 35 connected to the first connection electrode 42 is on the short side (X direction) of the outer frame portion 29 so as to correspond to the formation position of the first connection electrode 42. Is formed. The first B extraction electrode 31B is formed on the long side (Y direction). The second connection terminal 36 connected to the second connection electrode 44 is formed on the short side (X direction) of the outer frame portion 29 so as to correspond to the formation position of the second connection electrode 44. The second B extraction electrode 32B is formed on the long side (Y direction).

  Between the first A extraction electrode 31 </ b> A and the first B extraction electrode 31 </ b> B, an underlayer region 50 including only an underlayer is formed. In addition, a base layer region 50 made only of the base layer is also formed between the second A extraction electrode 32A and the second B extraction electrode 32B. The underlayer region 50 interrupts metal diffusion or absorption when the eutectic metal ball 70 described below melts. Thereby, the vibrator 1 maintains a stable frequency.

  In the vibrator 1, the eutectic metal ball 70 is disposed in the first through hole 41 and the second through hole 43 after the package 80 is formed by the siloxane bonding technique, and the eutectic metal is heated in a vacuum reflow furnace for a predetermined time. The ball 70 is melted and sealed. For example, a gold-germanium alloy is used for the eutectic metal ball 70 used for sealing. The eutectic gold-germanium alloy has a melting temperature of 356 ° C.

  As shown in FIG. 2A, the tuning-fork type crystal vibrating piece 30 includes a first excitation electrode 33 and a second excitation electrode 34 formed on the first main surface and the second main surface. The first excitation electrode 33 is connected to a first A extraction electrode 31 </ b> A formed on the base 23 and the support arm 26. The second excitation electrode 34 is connected to the second A extraction electrode 32 </ b> A formed on the base 23 and the support arm 26.

  The pair of vibrating arms 21 extends in the Y direction from one end of the base portion 23, and groove portions 27 are formed on both front and back surfaces of the vibrating arm 21. For example, one groove portion 27 is formed on the surface of one vibrating arm 21, and one groove portion 27 is similarly formed on the back side of the vibrating arm 21. That is, four groove portions 27 are formed in the pair of vibrating arms 21. The cross section of the groove portion 27 is formed in a substantially H shape, and the groove portion 27 has an effect of reducing the CI value of the tuning fork type crystal vibrating piece 30. The tuning fork type crystal vibrating piece 30 has two groove portions 27 formed on the front and back sides of one vibrating arm 21. However, even if a plurality of groove portions 27 are formed, there is an effect of reducing the CI value.

  Front-side magnetic layers 51 and 52 as third magnetic layers and a weight portion 28 are formed from the tip side at the tip portion in the extending direction of the vibrating arm 21 on one main surface side of the tuning-fork type crystal vibrating piece 30. . In addition, back side magnetic layers 55 and 56 as third magnetic layers are formed at the distal end portion of the vibrating arm 21 on the other main surface side that is in front and back relation with one main surface of the tuning fork type crystal vibrating piece 30. Is formed. As described above, the front-side magnetic layers 51 and 52 or the back-side magnetic layers 55 and 56 are provided at the front end portion of the vibrating arm 21 in the extending direction, so that the bending amount in the tuning-fork type crystal vibrating piece 30 is large. Magnetic force is applied to the part, and the repulsive force can be used more effectively. In addition, the front side magnetic layers 51 and 52 and the back side magnetic layers 55 and 56 are provided on the front and back surfaces of the vibrating arm 21 of the tuning fork type crystal vibrating piece 30, whereby the area of the third magnetic layer can be increased. Yes, the magnetic force (repulsive force) can be increased. As a result, the amount of bending of the tuning-fork type crystal vibrating piece 30 can be further reduced, and the vibrator 1 can be thinned. The first extraction electrode 31, the second extraction electrode 32, the first excitation electrode 33, the second excitation electrode 34, and the weight portion 28 are simultaneously formed by a photolithography process. When a voltage is applied to the first excitation electrode 33 and the second excitation electrode 34, the tuning fork type crystal vibrating piece 30 vibrates at a predetermined frequency. The weight portion 28 is a weight for facilitating the vibration arm 21 of the tuning-fork type crystal vibrating piece 30 to vibrate, and is formed for stable vibration.

  The front magnetic layers 51 and 52 as the third magnetic layer can be composed of a magnet, a paramagnetic material (such as manganese or platinum), or a diamagnetic material (such as copper, silver, gold, aluminum, or carbon). When a magnet is used, as shown in FIG. 5A, the polarity on the side of the first magnetic layers 53 and 54 provided in the lid-side recess 17 facing the vibrating arm 21 and the first magnetic layer of the magnet are used. The magnets are arranged so that the polarity on the side facing the layers 53 and 54 has the same polarity. Further, the back side magnetic layers 55 and 56 as the third magnetic layers are magnets, paramagnetic materials (manganese, platinum, etc.), or diamagnetic materials (copper, silver, gold, aluminum) as in the case of the front side magnetic layers 51 and 52. , Carbon, etc.). In the case of using a magnet, as shown in FIG. 5A, the polarity of the second magnetic layers 57 and 58 provided in the aforementioned base substrate side recess 47 on the side facing the vibrating arm 21 and the second magnet The magnets are arranged so that the polarities on the side facing the magnetic layers 57 and 58 are the same. Thus, by using magnets for the front side magnetic layers 51 and 52, the back side magnetic layers 55 and 56, the first magnetic layers 53 and 54, and the second magnetic layers 57 and 58, the tuning fork type crystal vibrating piece 30 and the lid 10 and the base substrate 40 can always have a repulsive force.

  In addition, paramagnetic material (manganese, platinum, etc.) or diamagnetic material (copper, silver, gold, aluminum, carbon, etc.) is added to the front side magnetic layers 51, 52 or the back side magnetic layers 55, 56 as the third magnetic layer. Is used, the first magnetic layers 53 and 54 and the second magnetic layers 57 and 58 are composed of magnets having N and S poles. In this case, due to the nature of the paramagnetic material or diamagnetic material that is magnetized in the opposite direction to the ferromagnetic material (the first magnetic layers 53 and 54 or the second magnetic layers 57 and 58), The polarities of the first magnetic layers 53 and 54 and the front magnetic layers 51 and 52 and the polarities of the opposing second magnetic layers 57 and 58 and the back magnetic layers 55 and 56 are the same. In such a configuration, since the magnetic force becomes stronger as the distance between the magnetic layers becomes closer, the repulsive force can be increased as the tuning-fork type crystal vibrating piece 30 is bent, and the amount of bending can be further reduced. it can.

  The first A extraction electrode 31A, the second A extraction electrode 32A, the first excitation electrode 33, and the second excitation electrode 34 are composed of two metal layers. The underlayer is a chromium (Cr) layer of 15 nm (nanometer) to 70 nm, and a gold (Au) layer of 100 nm to 200 nm is formed on the underlayer. A nickel (Ni) layer or a titanium (Ti) layer may be used instead of the chromium (Cr) layer, and a silver (Ag) layer may be used instead of the gold (Au) layer.

  The first B extraction electrode 31B, the second B extraction electrode 32B, the first connection terminal 35, the second connection terminal 36, the first connection electrode 42, and the second connection electrode 44 are composed of two metal layers. The underlayer is a chromium (Cr) layer of 15 nm to 70 nm, and a gold / germanium alloy layer made of the same component as the sealing material of 100 nm to 200 nm is formed on the underlayer.

  The lid 10, the vibration substrate 20, and the base substrate 40 are kept in a clean state by irradiating short wavelength ultraviolet rays in an oxygen-containing atmosphere with a bonded surface in a mirror state for siloxane bonding. The siloxane bonding temperature at this time is 100 ° C. to 250 ° C. Siloxane bonds cause poor bonding even with electrode thickness (300 nm to 400 nm). For this reason, the surface facing the first connection terminal 35 and the second connection terminal 36 formed on the back surface of the outer frame portion 29 needs to form a stepped portion 49 about the thickness of the wiring electrode.

  An underlayer region 50 is formed between the first A extraction electrode 31A and the first B extraction electrode 31B. Similarly, a base layer region 50 is formed between the second A extraction electrode 32A and the second B extraction electrode 32B. These underlayer regions 50 are chromium (Cr) layers of 15 nm to 70 nm, and no gold (Au) layer or gold / germanium alloy layer is formed in the underlayer region 50.

  As shown in FIG. 2B, the stepped portion 49 is formed on the surface of the base substrate 40, and the first connection electrode 42 and the second connection electrode 44 are formed with a depth corresponding to the thickness of the connection electrode. . That is, the first connection electrode 42 and the second connection electrode 44 are formed in the stepped portion 49 so as not to inhibit the siloxane bond on the bonding surface.

  The height of the stepped portion 49 provided on the base substrate 40 is 250 nm to 300 nm by wet etching or the like. The thickness of the first connection terminal 35 and the second connection terminal 36 formed on the outer frame portion 29 is also 150 nm to 200 nm. The thickness of the first connection electrode 42 and the second connection electrode 44 formed on the base substrate 40 is also 150 nm to 200 nm. That is, the sum of the thickness of the first connection electrode 42 formed on the outer frame portion 29 and the thickness of the second connection electrode 44 formed on the base substrate 40 is 300 nm to 400 nm.

  When the base substrate 40 and the outer frame portion 29 are to be joined, the first connection terminal 35, the first connection electrode 42, the second connection terminal 36, and the second connection electrode 44 are first contacted. At this time, the gap between the bottom surface of the outer frame portion 29 and the upper surface of the base substrate 40 is about 50 nm to 100 nm. When quartz siloxane bonding is performed in this state, the gold / germanium alloy layer of the first connection terminal 35 and the second connection terminal 36 and the gold / germanium alloy layer of the first connection electrode 42 and the second connection electrode 44 are bonded to each other. To do.

As another embodiment in which the bonding surface is made into a mirror surface and cleaned to siloxane bond the lid 10, the vibration substrate 20, and the base substrate 40, for example, a SWP (Surface) suitable for processing a large area such as a wafer. Wave Plasma) RIE type plasma processing apparatus can be used. This plasma processing apparatus utilizes surface waves that propagate along the interface between a dielectric and plasma. With this plasma processing apparatus, for example, plasma is generated using microwaves of 13.56 MHz to 2.45 GHz, and the reaction gas introduced into the processing chamber is excited. Ar, O ₂ and a mixed gas of O ₂ and N ₂ are used as the reaction gas. Wafers exposed to the excited reaction gas are uniformly activated. Wafers on which the bonding surfaces of the lid 10, the vibration substrate 20 and the base substrate 40 are activated are aligned and overlapped, and the siloxane bond is strong by pressing in a state of being heated from room temperature to a relatively low temperature of about 100 ° C. To join.

  In another embodiment, the bonding surface of the lid 10, the vibration substrate 20, and the base substrate 40 can be activated by irradiating an ion beam instead of the plasma treatment. In this ion beam treatment, the bonding surface is activated by irradiating the bonding surface of the lid 10, the vibration substrate 20, and the base substrate 40 that are maintained in a vacuum atmosphere with an Ar ion beam. Wafers surface-activated by ion beam processing are aligned and overlapped, and are bonded firmly by a siloxane bond by pressing in a state heated to a relatively low temperature of about 200 ° C.

  In the vibrator 1, after the package 80 is formed by the siloxane bonding technique, the eutectic metal balls 70 (see FIG. 1) are disposed in the first through hole 41 and the second through hole 43, and are placed in a vacuum or in an inert gas atmosphere. Sealing is performed by heating for a certain time in a vacuum reflow furnace.

  According to the vibrator 1 according to the first embodiment described above, the front-side magnetic layers 51 and 52 of the first magnetic layers 53 and 54 of the lid 10 are provided so as to face each other as shown in FIG. Side polarity and the first magnetism of the front side magnetic layers 51 and 52 as the third magnetic layer provided at the distal end portion in the extending direction of the vibrating arm 21 on one side (surface) side of the tuning-fork type crystal vibrating piece 30 The polarities of the layers 53 and 54 are the same N pole. Further, the polarity on the back side magnetic layers 55 and 56 side of the second magnetic layers 57 and 58 of the base substrate 40 and the vibrating arm 21 on the other side (back side) side of the tuning fork type crystal vibrating piece 30 are provided so as to face each other. The polarities on the second magnetic layers 57 and 58 side of the back side magnetic layers 55 and 56 as the third magnetic layer provided at the front end portion in the extending direction are the same S pole. By providing such a magnetic field, the tuning fork type crystal vibrating piece 30 as a vibrating element is subjected to a force repelling the lid 10 and the base substrate 40 as a lid. This repulsive force acts as a force for reducing the bending of the tuning-fork type crystal vibrating piece 30 when an impact is applied to the vibrator 1 from the outside, for example, when the vibrator 1 as a vibrator is dropped, so-called shock absorber ( The tuning fork type crystal vibrating piece 30 is less likely to come into contact with the lid 10 or the base substrate 40 by acting as a function of the shock absorber. As a result, it is possible to prevent the tuning-fork type crystal vibrating piece 30 from being damaged when an impact is applied. Further, since the bending of the tuning fork type crystal vibrating piece 30 when an impact is applied to the tuning fork type crystal vibrating piece 30 can be reduced, the gap between the tuning fork type crystal vibrating piece 30 and the lid 10 or the base substrate 40 is reduced. Accordingly, the vibrator 1 can be thinned.

(Second Embodiment)
Next, a vibrator according to a second embodiment of the vibrator of the present invention will be described with reference to FIGS. 3 and 4. FIG. 3 is a diagram showing an outline of the vibrator according to the second embodiment of the vibrator of the present invention, and FIG. 3A is a perspective view of the divided vibrator as seen from the lid portion side. . FIG.3 (b) is AA sectional drawing of Fig.3 (a). 4A and 4B show a vibration substrate and a base substrate used in the vibrator according to the second embodiment. FIG. 4A is a plan view (inner view) of the vibration substrate, and FIG. It is a top view (top view) of a base substrate. In the second embodiment, the same components as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 3A and FIG. 3B, the vibrator 1A includes the uppermost lid 10 (lid body), the vibration substrate 20A, and the base substrate 40. Since the lid 10 and the base substrate 40 have the same configuration as that of the first embodiment described above, detailed description thereof will be omitted. The vibration substrate 20A includes a tuning fork type crystal vibrating piece 30A formed by etching and an outer frame portion 29 formed so as to surround the tuning fork type crystal vibrating piece 30A. The vibration substrate 20A is formed of quartz, but various piezoelectric single crystal materials such as lithium tantalate and lithium niobate can be used in addition to quartz.

  In the vibrator 1A, a lid 10 is bonded on the vibration substrate 20A with a tuning fork type crystal vibrating piece 30A as a vibration element as a center, and a base substrate 40 is bonded below the vibration substrate 20A. The Since such a configuration is the same as that of the first embodiment described above, a detailed description thereof will be omitted.

  The vibration substrate 20 </ b> A has a tuning fork type crystal vibrating piece 30 </ b> A at the center thereof, and a space 22 is formed between the tuning fork type crystal vibrating piece 30 </ b> A and the outer frame portion 29. The space 22 that defines the outer shape of the tuning-fork type crystal vibrating piece 30A is formed by wet etching. The tuning fork type crystal vibrating piece 30 </ b> A is connected to the outer frame portion 29 through the support arm 26. In this embodiment, the tuning fork type crystal vibrating piece 30 </ b> A is formed with the same thickness as the outer frame portion 29. The tuning fork type crystal vibrating piece 30 </ b> A may be formed to be slightly thinner than the outer frame portion 29.

  As shown in FIGS. 3A and 3B, the tuning fork type crystal vibrating piece 30 </ b> A includes a base portion 23, a pair of vibrating arms 21 extending from the base portion 23, and a support arm 26. The base 23, the vibrating arm 21, and the support arm 26 are formed by forming a space 22 that defines the outer shape of the tuning-fork type crystal vibrating piece 30A by crystal etching.

  The configuration of the vibration substrate 20A different from the vibration substrate 20 (see FIGS. 1 and 2) of the first embodiment is changed to the front side magnetic layers 51 and 52 and the back side magnetic layers 55 and 56, and the pair of vibration arms 21 is extended. That is, side magnetic layers 61 and 62 as third magnetic layers provided at the leading ends in the direction are provided. Since the other configuration of the vibration substrate 20A is the same as that of the vibration substrate 20 of the first embodiment, a detailed description thereof will be omitted. The details of the side magnetic layers 61 and 62 as the third magnetic layer will be described later.

  The lid 10 includes a lid-side recess 17 on the vibration substrate 20A side. Further, the lid 10 includes first magnetic layers 53 and 54 provided in the lid-side concave portion 17 so as to face a position where a vibration arm 21 described later is disposed. Since the configuration of the lid 10 is the same as that of the first embodiment, detailed description thereof is omitted.

  The base substrate 40 includes a base substrate-side recess 47 on the vibration substrate 20A side. The base substrate side recess 47 includes second magnetic layers 57 and 58. Since the configuration of the base substrate 40 is the same as that of the first embodiment, detailed description thereof is omitted.

  Side magnetic layers 61 and 62 serving as third magnetic layers are formed on the side surfaces connecting one main surface and the other main surface at the leading ends in the extending direction of the pair of vibrating arms 21 of the tuning-fork type crystal vibrating piece 30A. Is formed. The side magnetic layers 61 and 62 as the third magnetic layer can be made of a magnet, a paramagnetic material (such as manganese or platinum), or a diamagnetic material (such as copper, silver, gold, aluminum, or carbon). When magnets are used for the side magnetic layers 61 and 62, as shown in FIG. 5B, the polarity on the side facing the vibrating arm 21 of the first magnetic layers 53 and 54 provided in the lid-side recess 17 described above is used. The magnet (side magnetic layers 61, 62) has the same polarity as the polarity (N pole) of the magnet (side magnetic layers 61, 62) facing the first magnetic layers 53, 54 of the magnet (side magnetic layers 61, 62). ) Is arranged. In addition, the polarity (S pole) of the second magnetic layers 57 and 58 provided in the base substrate side concave portion 47 on the side facing the vibrating arm 21 and the second magnetic layers 57 and 58 of the magnets (side magnetic layers 61 and 62). The magnets (side magnetic layers 61 and 62) are arranged so that the polarity on the side facing 58 (S pole) has the same polarity. By using magnets for the side magnetic layers 61 and 62, the first magnetic layers 53 and 54, and the second magnetic layers 57 and 58 in such an arrangement, the tuning-fork type crystal vibrating piece 30A, the lid 10 and the base substrate 40 are used. It is possible to always have a repulsive force.

  When paramagnetic materials (manganese, platinum, etc.) or diamagnetic materials (copper, silver, gold, aluminum, carbon, etc.) are used for the side magnetic layers 61, 62 as the third magnetic layer, the first magnetic layer is used. The layers 53 and 54 and the second magnetic layers 57 and 58 are composed of magnets having an N pole and an S pole. In this case, due to the nature of the paramagnetic material or diamagnetic material that is magnetized in the opposite direction to the ferromagnetic material (the first magnetic layers 53 and 54 or the second magnetic layers 57 and 58), The polarities of the first magnetic layers 53 and 54 and the side magnetic layers 61 and 62 and the opposite second magnetic layers 57 and 58 and the side magnetic layers 61 and 62 have the same polarity. In such a configuration, since the magnetic force becomes stronger as the distance between the magnetic layers becomes closer, the repulsive force can be increased as the tuning fork type quartz vibrating piece 30A is bent, and the amount of bending can be further reduced. it can.

  According to the vibrator 1A according to the second embodiment described above, the first magnetic layers 53 and 54 provided on the lid 10 are opposed to each other as shown in FIG. Side magnetic layers 61 and 62 as third magnetic layers provided on the side surfaces of the side magnetic layers 61 and 62 and the side surfaces of the ends of the pair of vibrating arms 21 of the tuning fork type crystal vibrating piece 30A in the extending direction. The polarities on the first magnetic layers 53 and 54 side are the same N pole. The polarities of the second magnetic layers 57 and 58 of the base substrate 40 on the side magnetic layers 61 and 62 facing each other and the polarities of the second magnetic layers 57 and 58 on the side magnetic layers 61 and 62 side are both It is the same S pole. By providing such a magnetic field, a force repelling the lid 10 and the base substrate 40 as the lid works on the tuning-fork type crystal vibrating piece 30A as the vibration element. This repulsive force acts as a force for reducing the bending of the tuning-fork type crystal vibrating piece 30A when an impact is applied to the vibrator 1A from the outside, for example, when the vibrator 1A as a vibrator falls, and the tuning-fork type crystal vibration It becomes difficult for the piece 30 </ b> A to contact the lid 10 and the base substrate 40. Thereby, it is possible to prevent the tuning-fork type crystal vibrating piece 30A from being damaged when an impact is applied.

  Further, since the side magnetic layers 61 and 62 are provided on the side surface of the tuning fork type crystal vibrating piece 30A, the side magnetic layers 61 and 62 as the third magnetic layer are not increased without increasing the thickness of the tuning fork type crystal vibrating piece 30A. Therefore, the vibrator 1A can be thinned. Further, since the bending of the tuning fork type crystal vibrating piece 30A when an impact is applied to the tuning fork type crystal vibrating piece 30A can be reduced, the gap between the tuning fork type crystal vibrating piece 30A and the lid 10 or the base substrate 40 is reduced. This makes it possible to further reduce the thickness of the vibrator 1A.

(Application examples)
In the vibrator 1 according to the first embodiment described above, the polarity of the first magnetic layers 53 and 54 of the lid 10 on the front side magnetic layers 51 and 52 side of the lid 10 and the tuning-fork type crystal vibrating piece 30 are provided to face each other. The polarities on the first magnetic layers 53 and 54 side of the front magnetic layers 51 and 52 provided on the vibrating arm 21 on the direction (surface) side are the same N pole. Further, the polarity on the back side magnetic layers 55 and 56 side of the second magnetic layers 57 and 58 of the base substrate 40 and the vibrating arm 21 on the other side (back side) side of the tuning fork type crystal vibrating piece 30 are provided so as to face each other. Both of the polarities on the second magnetic layers 57 and 58 side of the back side magnetic layers 55 and 56 provided on the same side are the same S pole. By using the force repelled by the vibrating arm 21 caused by such a magnetic field as the force for suppressing the vibration of the vibrating arm 21, the resonance frequency of the tuning-fork type crystal vibrating piece 30 can be adjusted.

  When used for adjustment of the resonance frequency, as an example, the lid 10 is made of a transparent member, and the resonance frequency of the tuning-fork type crystal vibrating piece 30 is measured, and the first provided on the lid 10 made of a transparent member. The magnetic layers 53 and 54 are heated by, for example, irradiating a laser beam to change the magnetic force. By changing the magnetic force, the repulsive force of the vibrating arm 21 can be changed, and the resonance frequency of the tuning fork type quartz vibrating piece 30 can be adjusted. Similarly, in the configuration of the second embodiment described above, the resonance force of the tuning-fork type crystal vibrating piece 30 </ b> A is obtained by using the force repelled by the vibrating arm 21 caused by the magnetic field as the force for suppressing the vibration of the vibrating arm 21. It can be used for frequency adjustment.

  According to the adjustment of the resonance frequency of the tuning fork type crystal vibrating pieces 30 and 30A, the magnetic force is changed only by heating from the outside, so that the gas generated in the package housing the tuning fork type crystal vibrating pieces 30 and 30A. As a result, no melted and scattered matter is generated, and the characteristic deterioration of the vibrators 1 and 1A can be reduced.

  In the above-described embodiment, each magnetic layer (the first magnetic layers 53 and 54, the second magnetic layers 57 and 58, the front magnetic layers 51 and 52, the back magnetic layers 55 and 56, and the side magnetic layers 61 and 62) is provided. The magnet used may be a sheet magnet (magnet sheet).

(Deformation example of vibrator)
In the above-described embodiment, the lid 10 is bonded to the vibration substrate 20 around the vibration substrate 20 including the tuning-fork type crystal vibrating piece 30 as the vibration element, and the base substrate 40 is disposed below the vibration substrate 20. Although the vibrators 1 and 1A having a so-called CSP (Chip Size Package) type configuration are described, the configuration of the vibrator is not limited thereto. A modification which is another configuration of the vibrator will be described below with reference to FIG.

  FIG. 6 shows a schematic configuration of a modification of the vibrator, FIG. 6 (a) is a plan view, and FIG. 6 (b) is a front sectional view. FIG. 6 is a schematic view showing the structure of the vibrator according to the modified example, but FIG. 6A shows the state where the lid member is removed for convenience of explaining the internal configuration of the vibrator. Yes. As shown in FIG. 6, the vibrator 3 includes a vibrating piece 102 on which an electrode (not shown) is formed, a package main body 160 formed in a rectangular box shape to accommodate the vibrating piece 102, a metal A lid 159 as a lid formed of a plate or the like. Note that the inside of the cavity 170 that accommodates the resonator element 102 is a substantially vacuum decompression space.

  As shown in FIG. 6B, the package body 160 is formed by laminating a first substrate 161 as a base substrate and a second substrate 162. A plurality of internal terminals (not shown) are provided at predetermined positions on the upper surface, which is one surface of the first substrate 161. The second substrate 162 is an annular body from which the central portion is removed, and a cavity 170 that accommodates the resonator element 102 together with the first substrate 161 is formed. The first substrate 161 and the second substrate 162 of the package body 160 are made of an insulating material. Such a material is not particularly limited, and various ceramics such as oxide ceramics, nitride ceramics, and carbide ceramics can be used. The lid 159 as a lid is formed of a metal material such as a Kovar alloy, for example, and is hermetically sealed with the sealant 168 to be hermetically sealed. For example, a seam welding method can be used for joining the package body 160 and the lid 159.

  The vibration substrate 110 includes a tuning fork type crystal vibrating piece 102 and a pair of support arms 130 and 132 extending from the tuning fork type crystal vibrating piece 102 at the center thereof. The tuning-fork type crystal vibrating piece 102 in this modification is formed with the same thickness as the support arms 130 and 132. The tuning fork type crystal vibrating piece 102 may be formed to be slightly thinner than the support arms 130 and 132. The tuning fork type crystal vibrating piece 102 includes a base portion 112 and a pair of vibrating arms 120 and 122 extending from the base portion 112. The vibration substrate 110 is connected to the first substrate 161 via a conductive adhesive 135 as a bonding material at a support portion provided on the support arms 130 and 132.

  The lid 159 includes first magnetic layers 153 and 154 provided to face positions where vibrating arms 120 and 122 described later are disposed. The first magnetic layers 153 and 154 are composed of magnets having N poles and S poles. The first magnetic layers 153 and 154 are provided so that the polarities on the opposite sides thereof are the same as the front magnetic layers 151 and 152 as third magnetic layers provided on the vibrating arms 120 and 122 described later. In this example, the polarity of the surface side of the first magnetic layers 153 and 154, in other words, the side facing the front side magnetic layers 151 and 152 of the vibrating arms 120 and 122 is the N pole (see FIG. 5A). It is provided as follows.

  The first substrate 161 as a base substrate includes a base substrate-side recess 147 on the vibration substrate 110 side. The first substrate 161 includes second magnetic layers 157 and 158 provided in the base substrate-side recess 147 so as to face positions where vibrating arms 120 and 122 described later are disposed. The second magnetic layers 157 and 158 are composed of magnets having N poles and S poles. The second magnetic layers 157 and 158 are provided so that the polarities on the opposite sides thereof are the same as the back side magnetic layers 155 and 156 as third magnetic layers provided on the vibrating arms 120 and 122 described later. In this example, the polarity of the surface side of the second magnetic layers 157 and 158, in other words, the side facing the back magnetic layers 55 and 56 of the vibrating arms 120 and 122 is the N pole (see FIG. 5A). It is provided as follows. As described above, since the second magnetic layers 157 and 158 are provided in the concave portion 147 on the base substrate side, the second magnetic layers 157 and 158 can be provided without increasing the thickness of the first substrate 161, and vibrations can be obtained. The child 1 can be thinned.

  Front side magnetic layers 151 and 152 as third magnetic layers are formed from the tip side at the tip part in the extending direction of the vibrating arms 120 and 122 on one side of the tuning fork type crystal vibrating piece 102. Further, back-side magnetic layers 155 and 156 as third magnetic layers are formed at the leading ends in the extending direction of the vibrating arms 120 and 122 on the other surface side of the tuning-fork type crystal vibrating piece 102. As described above, the front-side magnetic layers 151 and 152 or the back-side magnetic layers 155 and 156 are provided at the leading ends in the extending direction of the vibrating arms 120 and 122, so that the amount of bending in the tuning-fork type crystal vibrating piece 102 is reduced. Magnetic force is applied to the large end, and the repulsive force can be used more effectively. Further, the front magnetic layers 151 and 152 and the back magnetic layers 155 and 156 are provided on the front and back surfaces of the vibrating arms 120 and 122 of the tuning fork type crystal vibrating piece 102, so that the area of the third magnetic layer can be increased. It is possible and the magnetic force (repulsive force) can be increased. Accordingly, the amount of bending of the tuning fork type crystal vibrating piece 102 can be further reduced, and the vibrator 103 can be thinned.

  The front side magnetic layers 151 and 152 as the third magnetic layer can be composed of a magnet, a paramagnetic material (such as manganese or platinum), or a diamagnetic material (such as copper, silver, gold, aluminum, or carbon). When a magnet is used, as shown in FIG. 5A, the polarity on the side of the first magnetic layers 153 and 154 provided on the lid 159 facing the vibrating arms 120 and 122 and the first magnetic layer of the magnet are used. The magnets are arranged so that the polarity on the side facing the layers 153 and 154 has the same polarity. Further, the back side magnetic layers 155 and 156 as the third magnetic layer are magnets, paramagnetic materials (manganese, platinum, etc.), or diamagnetic materials (copper, silver, gold, aluminum) as in the case of the front side magnetic layers 151, 152. , Carbon, etc.). When a magnet is used, as shown in FIG. 5A, the polarity of the second magnetic layers 157 and 158 provided in the aforementioned base substrate side recess 47 on the side facing the vibrating arms 120 and 122, and the magnet The magnets are arranged so that the polarities on the side facing the second magnetic layers 157 and 158 have the same polarity. Thus, by using magnets for the front-side magnetic layers 151 and 152, the back-side magnetic layers 155 and 156, the first magnetic layers 153 and 154, and the second magnetic layers 157 and 158, the tuning-fork type crystal vibrating piece 102 and the lid 159 and the first substrate 161 as the base substrate can always have a repulsive force.

  In addition, paramagnetic material (manganese, platinum, etc.) or diamagnetic material (copper, silver, gold, aluminum, carbon, etc.) is added to the front side magnetic layers 151, 152 or the back side magnetic layers 155, 156 as the third magnetic layer. Is used, the first magnetic layers 153 and 154 and the second magnetic layers 157 and 158 are composed of magnets having N and S poles. In this case, due to the nature of the paramagnetic material or diamagnetic material that is magnetized in the opposite direction to the ferromagnetic material (first magnetic layer 153, 54 or second magnetic layer 157, 58), The polarities of the first magnetic layers 153 and 154 and the front magnetic layers 151 and 152 and the polarities of the second magnetic layers 157 and 158 and the back magnetic layers 155 and 156 on the opposite side are the same. In such a configuration, the magnetic force becomes stronger as the distance between the magnetic layers becomes closer, so that the repulsive force can be increased as the tuning-fork type quartz vibrating piece 102 is bent, and the amount of bending can be further reduced. it can.

  Also in this modified example, as in the second embodiment described above, one main surface and the other main surface of the tuning fork-type quartz crystal vibrating piece 102 at the front ends in the extending direction of the pair of vibrating arms 120 and 122 A configuration in which a side magnetic layer as a third magnetic layer is formed on the side surface connecting the two can also be applied.

  The vibrator 103 in the modified example of the configuration described above also has the same effect as that of the above-described embodiment.

  In the above-described embodiment, the vibrators 1 and 1A including the tuning-fork type crystal vibrating pieces 30 and 30A have been described. However, the present invention is not limited thereto. For example, the present invention can also be applied to a so-called double T-type gyro element, a gyro sensor using a tuning-fork type gyro element, or a timing device (quartz crystal resonator) using a thickness-shearing crystal vibrating piece.

  In addition, the vibrators 1 and 1A described above include the vibrators 1 and 1A and a circuit unit that has at least a function of oscillating the vibrators 1 and 1A and is electrically connected to the vibrators 1 and 1A. The present invention can also be applied to an oscillator housed in a package. The vibrators 1 and 1A and the circuit unit are not necessarily housed in the package. For example, the vibrators 1 and 1A and the circuit part packaged on the substrate are provided. But you can. According to such a configuration, since the vibrator and the circuit unit that have excellent impact resistance and can be thinned are provided, a small and thin oscillator having excellent shock resistance can be provided.

[Electronics]
Next, electronic devices to which the vibrators 1, 1 </ b> A, and 103 are applied as electronic devices according to an embodiment of the present invention will be described in detail based on FIGS. 7 to 9. In the description, an example in which the vibrator 1 including the tuning fork type crystal vibrating piece 30 is applied is shown.

  FIG. 7 is a perspective view schematically illustrating a configuration of a mobile (or notebook) personal computer as an electronic apparatus including the vibrator 1 as an electronic device according to an embodiment of the present invention. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1101. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates the vibrator 1.

  FIG. 8 is a perspective view schematically illustrating a configuration of a mobile phone (including PHS) as an electronic apparatus including the vibrator 1 as an electronic device according to an embodiment of the present invention. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates the vibrator 1.

  FIG. 9 is a perspective view schematically illustrating a configuration of a digital still camera as an electronic apparatus including the vibrator 1 as an electronic device according to an embodiment of the present invention. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 100 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit 100 displays an object as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 100 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates the vibrator 1.

  The vibrator 1 according to an embodiment of the present invention includes, for example, an ink jet type ejection device in addition to the personal computer (mobile personal computer) in FIG. 7, the mobile phone in FIG. 8, and the digital still camera in FIG. 9. (For example, inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations , Video phone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (eg, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices , Instruments (eg, vehicles, aircraft, ships) Of instruments), it can be applied to electronic equipment such as a flight simulator.

[Moving object]
FIG. 10 is a perspective view schematically showing an automobile as an example of a moving body. The automobile 506 is equipped with the vibrator 1 as an electronic device according to the present invention. For example, as shown in the figure, an automobile 506 as a moving body has an electronic control unit 508 that incorporates the vibrator 1 and controls a tire 509 and the like mounted on a vehicle body 507. The vibrator 1 also includes keyless entry, immobilizer, car navigation system, car air conditioner, anti-lock brake system (ABS), air bag, tire pressure monitoring system (TPMS), engine The present invention can be widely applied to electronic control units (ECUs) such as controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle body attitude control systems.

  DESCRIPTION OF SYMBOLS 1,1A, 103 ... Vibrator, 10 ... Lid, 15 ... Through-hole wiring, 17 ... Lid side recessed part, 20, 20A ... Vibrating substrate, 21 ... Vibrating arm, 22 ... Space part, 23 ... Base part, 26 ... Support arm 28 ... weight part, 29 ... outer frame part, 30, 30A ... tuning-fork type crystal vibrating piece, 31 ... first extraction electrode (31A ... first A extraction electrode, 31B ... first B extraction electrode), 32 ... second extraction electrode (32A ... 2A extraction electrode, 32 ... 2B extraction electrode), 33 ... first excitation electrode, 34 ... second excitation electrode, 35 ... first connection terminal, 36 ... second connection terminal, 40 ... base substrate, 41: first through hole, 43: second through hole, 42: first connection electrode, 44: second connection electrode, 45: first external electrode, 46: second external electrode, 47: recess on the base substrate side, 49 ... Step part, 50 ... Underlayer area, 51,52 ... Third magnetic layer All front side magnetic layers 53, 54 ... first magnetic layer, 55, 56 ... back side magnetic layer as third magnetic layer, 57, 58 ... second magnetic layer, 61, 62 ... side magnetic as third magnetic layer Layer: 70 ... Eutectic metal ball, 80 ... Package, 506 ... Automobile as mobile body, 1100 ... Mobile personal computer as electronic device, 1200 ... Mobile phone as electronic device, 1300 ... Digital steel as electronic device camera.

Claims (10)

A vibration substrate including a vibration element;
A base substrate to which the vibration substrate is attached;
A lid disposed so as to cover the vibration substrate;
A first magnetic layer provided at a position overlapping the vibration element of the lid in a plan view as viewed from the lid;
A second magnetic layer provided at a position overlapping the vibration element of the base substrate in the plan view;
A third magnetic layer provided between the first magnetic layer and the second magnetic layer of the vibration element,
The surface of the third magnetic layer on the side facing the first magnetic layer and the surface of the first magnetic layer on the side facing the third magnetic layer have the same polarity,
The surface of the third magnetic layer on the side facing the second magnetic layer and the surface of the second magnetic layer on the side facing the third magnetic layer have the same polarity. The vibrator.   The said 3rd magnetic layer is provided in the side surface which has connected the 1st main surface and 2nd main surface which have the relationship of the front and back of the said vibration element. Vibrator.   The vibrator according to claim 1, wherein the third magnetic layer is provided on each of the first surface and the second surface of the vibration element.   4. The vibrator according to claim 1, wherein the third magnetic layer is provided at an end portion in an extending direction of the vibration element. 5. The first magnetic layer and the second magnetic layer are composed of magnets having an N pole and an S pole,
5. The vibrator according to claim 1, wherein the third magnetic layer is made of a paramagnetic material or a diamagnetic material.   The said 1st magnetic layer, the said 2nd magnetic layer, and the said 3rd magnetic layer are comprised with the magnet which has a north-pole and a south pole, The any one of Claim 1 thru | or 4 characterized by the above-mentioned. The vibrator described in 1.   The said 1st magnetic layer and the said 2nd magnetic layer are arrange | positioned by the recessed part provided in each of the said base substrate and the said cover body, The any one of Claim 1 thru | or 6 characterized by the above-mentioned. The vibrator according to one item. A vibrator according to any one of claims 1 to 7,
An oscillator comprising: a circuit portion electrically connected to the vibrator.   An electronic apparatus comprising the vibrator according to any one of claims 1 to 7.     A moving body comprising the vibrator according to claim 1.

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