JP2015042399A - Fluid mixer - Google Patents

Abstract

An object of the present invention is to provide a fluid mixer in which the durability of a substrate is increased against externally applied stress.
A first seal member is disposed between one surface 11a of a first housing 11 and one main surface 13a of a substrate 13. The first seal member 21 is made of an annular elastic member. A second seal member 22 and a third seal member 23 are disposed between the one surface 12 a of the second housing 12 and the other main surface 13 b of the substrate 13. The second seal member 22 and the third seal member 23 are made of an elastic member having an annular shape.
[Selection] Figure 1

Description

  The present invention relates to a fluid mixer for mixing a plurality of types of fluids in a minute space.

  Microchemical processes that perform chemical processes such as mixing, reaction, extraction, separation, heating, and cooling in minute channels and in minute spaces have been proposed, and research on micromixers that enable highly efficient mixing in minute spaces has been conducted. Has been made.

The micromixer is a device that performs mixing in a minute space of, for example, several hundred μm or less, and can reduce the distance between fluids to be mixed, so that the mixing efficiency can be greatly improved. As an example, a microemulsifier and an emulsification method capable of generating an emulsion without using a surfactant are known (Patent Document 1).
Also known is a micromixer in which liquid flowing in from a plurality of inlets is divided and mixed repeatedly in a three-dimensional flow path formed by a combination of substrates with grooves cut by precision processing. (Non-Patent Document 1).

In such a micromixer, when a micromixer is configured by stacking a plurality of substrates with grooves, it is necessary to clamp the entire substrate with a screw or the like along the thickness direction.
However, when the substrate is made of a material that is easily damaged, such as glass, a strong stress may be applied to a specific portion of the substrate when clamping a plurality of stacked substrates. For this reason, there is a possibility that stress concentrates on a specific portion of the substrate constituting the micromixer and cracks and chips occur.

JP 2004-81924 A

Savemation Review August 2005, pages 60-63

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a fluid mixer in which the durability of a substrate is enhanced against externally applied stress.

In order to solve the above problems, some embodiments of the present invention provide a fluid mixer as follows. That is, the fluid mixer of the present invention is a fluid mixer in which a substrate is disposed between a first housing and a second housing,
A ring-shaped first seal member disposed between one surface of the first housing and one main surface of the substrate, and between one surface of the second housing and the other main surface of the substrate A ring-shaped second seal member, a ring-shaped third seal member disposed between one surface of the second housing and the other main surface of the substrate, and surrounding the second seal member; A first space constituted by the first seal member, one surface of the first housing, and one main surface of the substrate, the second seal member, one surface of the second housing, and the substrate. A second space constituted by the other main surface; and a third space constituted by the second seal member, the third seal member, one surface of the second casing, and the other main surface of the substrate. Each of the substrates has a microscopic hole for communicating between the first space and the second space; And a fine hole that allows communication between the first space and the third space, and the first housing has a lead-out hole that allows the first space to communicate with the outside of the fluid mixer, The second casing is formed with a first introduction hole for communicating the second space with the outside of the fluid mixer and a second introduction hole for communicating the third space with the outside of the fluid mixer. It is characterized by.

  The ring-shaped first seal member and the second seal member are in positions that overlap with each other with the substrate interposed therebetween.

  A dummy seal member is arranged at a position overlapping with at least one of the second seal member and the third seal member inside or outside surrounded by the first seal member.

  The dummy seal member is disposed at a position overlapping the third seal member.

The fluid mixer of the present invention is a fluid mixer in which a substrate is disposed between a first housing and a second housing,
A ring-shaped first seal member disposed between one surface of the first housing and one main surface of the substrate, and between one surface of the second housing and the other main surface of the substrate A ring-shaped second seal member and a plurality of fourth seal members arranged around the second seal member, the first seal member, one surface of the first housing, and the substrate A first space constituted by one main surface, a second space constituted by the second seal member, one surface of the second casing and the other main surface of the substrate, and the fourth seal members. And a plurality of third spaces each constituted by one surface of the second casing and the other main surface of the substrate, and the substrate communicates between the first space and the second space. The micropores and the first space and the plurality of fourth spaces are communicated with each other. The first housing has a plurality of fine holes, and a lead-out hole that communicates the first space with the outside of the fluid mixer is formed in the first housing. A first introduction hole that communicates with the outside of the fluid mixer and a second introduction hole that communicates the third space with the outside of the fluid mixer are formed.

  In the fluid mixer according to the present invention, the substrate is sandwiched between the first housing and the second housing, the first seal member is disposed between the substrate and the first housing, and the substrate and the second housing are disposed. The second seal member and the third seal member are respectively sandwiched between the two. As a result, the substrate does not directly contact the first housing or the second housing. Further, the first seal member and the second seal member are arranged so as to overlap with each other when viewed from the first space side. Therefore, even if the stress which pinches | interposes a board | substrate is added by the 1st housing | casing and the 2nd housing | casing, it can prevent that damage, such as a crack and a chip | tip, arises in a board | substrate. In particular, the first seal member, the second seal member, and the third seal member are O-rings made of an elastic member such as rubber, so that the stress applied to the substrate can be effectively reduced and the first casing and The substrate can be held between the two housings without being displaced.

  Further, by sandwiching the first seal member between the substrate and the first housing and the second seal member and the third seal member between the substrate and the second housing, respectively, the first space, Since the space and the third space are respectively formed, it is not necessary to form a wide depression or the like in the substrate in order to form these spaces. Therefore, it is possible to simplify a troublesome process such as forming a microhole in the recess after forming a recess in the substrate, and it becomes possible to easily manufacture a fluid mixer at a lower cost. .

It is a fracture perspective view of the fluid mixer which is the first embodiment of the present invention. It is sectional drawing of the fluid mixer which is 1st embodiment of this invention. It is a top view of the fluid mixer which is 1st embodiment of this invention. It is a fracture | rupture perspective view which shows the example of a shape of O-ring which comprises a sealing member. Sectional drawing which shows the example which formed the groove | channel which distributes an O-ring in a sealing member. It is sectional drawing of the fluid mixer which is a modification of 1st embodiment of this invention. It is sectional drawing of the fluid mixer which is 2nd embodiment of this invention. It is a top view of the fluid mixer which is 2nd embodiment of this invention. It is sectional drawing of the fluid mixer which is 3rd embodiment of this invention. It is a top view of the fluid mixer which is 3rd embodiment of this invention. It is sectional drawing of the fluid mixer which is 4th embodiment of this invention. It is a top view of the fluid mixer which is 4th embodiment of this invention. It is sectional drawing of the fluid mixer which is 5th embodiment of this invention. It is a top view of the fluid mixer which is 5th embodiment of this invention.

Hereinafter, an embodiment of a fluid mixer according to the present invention will be described with reference to the drawings. The following embodiments are specifically described for better understanding of the gist of the invention, and do not limit the present invention unless otherwise specified.
In addition, in the drawings used in the following description, in order to make the features of the present invention easier to understand, there is a case where a main part is shown in an enlarged manner for the sake of convenience. Not necessarily.

(First embodiment)
FIG. 1 is a perspective view showing a state in which the fluid mixer of the present embodiment is broken at the center. FIG. 2 is a cross-sectional view of the fluid mixer of the present embodiment, and FIG. 3 is a plan view of the substrate viewed from the other side with the second casing of the fluid mixer removed.
Hereinafter, a first embodiment according to the present invention will be described with reference to FIGS.

The fluid mixer 10 is roughly composed of a first housing 11 and a second housing 12 that are arranged to face each other, and a substrate 13 that is supported between the first housing 11 and the second housing 12. It is configured.
The first housing 11 is a substantially rectangular member made entirely of, for example, glass or corrosion-resistant metal. The first housing 11 is opposed to the one main surface 13a of the substrate 13 at a predetermined interval. Further, on the first surface 11 a side of the first housing 11, a protruding portion 11 </ b> T formed so as to protrude to a portion where the peripheral region is flush with the other surface 13 of the substrate 13 and to cover the peripheral edge of the substrate 13 is integrally formed. Has been.

  The second housing 12 is a substantially rectangular member made entirely of, for example, glass or corrosion-resistant metal. The second housing 12 has one surface 12 a facing the other main surface 13 b of the substrate 13 with a predetermined distance.

  The board | substrate 13 is a substantially plate-shaped member comprised entirely from glass etc., for example. The substrate 13 is arranged such that one main surface 13 a faces the one surface 11 a of the first housing 11 and the other main surface 13 b faces the one surface 12 a of the second housing 12. When the fluid mixer 10 is viewed from the outside, the substrate 13 is disposed between the first housing 11 and the second housing 12.

A first seal member 21 is disposed between one surface 11 a of the first housing 11 and one main surface 13 a of the substrate 13. The first seal member 21 is made of an annular elastic member. Specifically, the first seal member 21 may be an O-ring made of, for example, a corrosion-resistant rubber material. The first seal member 21 maintains a predetermined distance between the one surface 11 a of the first housing 11 and the one main surface 13 a of the substrate 13.
Alternatively, the first seal member 21 is pushed into a rectangular groove in FIG. 5 described later, and the one surface 11a of the first housing 11 and one main surface 13a of the substrate 13 are in contact with each other. There is also.
A first space E1 (mixed space) is defined between the inside of the annular first seal member 21 and the one surface 11a of the first housing 11 and one main surface 13a of the substrate 13. The first space E1 is, for example, a substantially cylindrical space with a low height.

A second seal member 22 and a third seal member 23 are disposed between the one surface 12 a of the second housing 12 and the other main surface 13 b of the substrate 13. The second seal member 22 and the third seal member 23 are made of an elastic member having an annular shape. Specifically, the second seal member 22 and the third seal member 23 may be O-rings made of, for example, a corrosion-resistant rubber material. The third seal member 23 is larger in diameter than the second seal member 22 and surrounds the periphery of the second seal member 22 disposed on the center side of the other main surface 13b of the substrate 13 with a predetermined interval. A third seal member 23 is disposed.
Alternatively, the second seal member 22 is pushed into a rectangular groove in FIG. 5 described later, and the one surface 12a of the second housing 12 and the other main surface 13b of the substrate 13 are in contact with each other. There is also.

  The second seal member 22 and the third seal member 23 maintain a predetermined distance between the one surface 12 a of the second housing 12 and the other main surface 13 b of the substrate 13. A second space E <b> 2 is defined between the inner side of the annular second seal member 22 and the one surface 12 a of the second housing 12 and the other main surface 13 b of the substrate 13. The second space E2 is, for example, a substantially cylindrical space with a low height. Further, the third space E3 is formed between the inner side of the annular third seal member 23, the outer side of the second seal member 22, and the one surface 12a of the second housing 12 and the other main surface 13b of the substrate 13. Partitioned. The third space E3 is, for example, a donut-shaped space that spreads outside the second space E2.

  The first housing 11 is formed with a lead-out hole 15 that penetrates between the one surface 11a side and the other surface 11b side and communicates the first space E1 to the outside. The lead-out hole 15 may be a cylindrical hole, for example.

  A first introduction hole 16 is formed in the center of the second housing 12 so as to penetrate between the one surface 12a side and the other surface 12b side and to communicate the second space E2 to the outside. The first introduction hole 16 may be, for example, a cylindrical hole. The second housing 12 is formed with four second introduction holes 17, 17... That pass through between the one surface 12a side and the other surface 12b side and communicate the third space E3 to the outside. The lead-out holes 17, 17... Only need to be formed at regular intervals around the first introduction hole 16, for example.

  The first housing 11 and the second housing 12 are tightened so as to sandwich the substrate 13 with screws or clips, for example. At this time, the first seal member 21 made of an elastic body is elastically deformed and is in close contact with the one surface 11 a of the first housing 11 and the one main surface 13 a of the substrate 13. Similarly, the second seal member 22 and the third seal member 23 are also elastically deformed and are in close contact with the one surface 12a of the second housing 12 and the other main surface 13b of the substrate 13.

  When viewed in plan from the one surface 11a side of the first housing 11, the first seal member 21 and the second seal member 22 are arranged at positions that overlap each other. That is, the central axis of each of the first seal member 21 and the second seal member 22 is an O-ring having the same diameter arranged so as to be coaxial with the axis S passing through the center of the outlet hole 16. Thereby, the first space E1 and the second space E2 form a space overlapping each other when viewed from the side of the first surface 11a of the first housing 11.

  A plurality of fine holes 25, 25,..., 26, 26... Are formed in the substrate 13 so as to communicate one main surface 13a side with the other main surface 13b side. Among the plurality of fine holes 25, 25,..., 26, 26, the three-dimensional flow path group α constituting the fine holes 25, 25... Is a first space E1 on the one main surface 13a side of the substrate 13. And the second space E2 on the other main surface 13b side.

  Specifically, the fine holes 25, 25... Linearly penetrate the substrate 13 along the thickness direction, one opening surface is exposed to the first space E1 of one main surface 13a, and the other opening. The surface is exposed in the second space E2 of the other main surface 13b. These fine holes 25, 25,..., 26, 26... Serve as guide spaces for guiding the fluids from the fluid supply sources toward the first space E1 (mixing space) where the fluids are mixed. It functions.

  Further, the three-dimensional flow path group β constituting the micro holes 26, 26... Is formed between the first space E1 on the one main surface 13a side of the substrate 13 and the third space E3 on the other main surface 13b side. Communicate between them. Specifically, the fine holes 26, 26... Are exposed in the first space E1 of the one main surface 13a and linearly extend from there to an arbitrary position of the thickness of the substrate 13, from there. It bends along the surface direction of the substrate 13 and extends in the peripheral direction of the substrate 13. Furthermore, it bends again along the thickness direction of the board | substrate 13, and the other opening surface is exposed to the 3rd space E3 of the other main surface 13b. In this way, the fine holes 26, 26... Are formed in a crank shape bent at two places in the middle. In the present embodiment, the inflow side of the flow path group β is formed at a position corresponding to each of the four second introduction holes 17, 17.

The major axis of the micropores 25, 25,..., 26, 26... Is preferably in the order of, for example, a micrometer or a nanometer. Moreover, it is preferable that the space | interval of the micropores 25, 25 ..., 26, 26 ... adjacent to each other is set to the order of, for example, a micrometer or a nanometer.
Moreover, you may coat the material which has corrosion resistance with respect to the fluid which passes through this micropore 25,25 ..., 26,26 ... on the inner surface of micropore 25,25 ..., 26,26 ....

  In the present embodiment, the flow path group α is composed of four micro holes 25, 25... Arranged in the central portion of the substrate 13. However, the present invention is not limited to this, and the flow path group α is arbitrary. What is necessary is just to be comprised from these several micropore. In the present embodiment, the flow path group β is composed of four fine holes 26, 26... That communicate the four peripheral portions of the substrate 13 with the central portion of the substrate 13. However, the present invention is not limited to this, and each flow path group β only needs to be composed of a plurality of arbitrary fine holes. In FIG. 1 and FIG. 2, some of the fine holes 25 and 26 are simply expressed by omitting the illustration inside the substrate 13. A plurality of them are formed in parallel independently of each other.

The operation of the fluid mixer of the present invention having the above configuration will be described.
When the fluid mixer 10 is used to mix a plurality of types of fluids, for example, the fluid A and the fluid B to obtain the mixed fluid C, first, a predetermined amount is given from the first introduction hole 16 toward the second space E2. Fluid A is introduced at a pressure of At the same time, the fluid B is caused to flow from the second introduction hole 17 toward the third space E3 at a predetermined pressure. The inflow pressure of the fluid A and the fluid B may be determined in consideration of the viscosity and fluidity of each fluid, the opening diameters of the fine holes 25 and 26, and the like.

  The fluid A that has reached the second space E2 flows into the micro holes 25, 25. Then, the fluid A flows out into the first space (mixing space) E1 through the fine holes 25, 25. Further, the fluid B that has reached the third space E3 flows into the micro holes 26, 26. Then, the fluid B flows out into the first space E1 through the fine holes 26, 26. Thus, the fluid A and the fluid B introduced individually flow out into the first space E1, which is a common space, and are mixed with each other in the first space E1. And the mixed fluid C which the fluid A and the fluid B mixed in the 1st space E1 is formed.

  The fluid A flowing through the fine holes 25, 25,... Constituting the flow path group α and the fluid B flowing through the fine holes 26, 26,... Constituting the flow path group β are divided by the first seal member 21. The space E1 flows out in a state in which the spread of streamlines is suppressed and the mutual diffusion distance is shortened. As a result, the mixing properties of the fluid A and the fluid B that have flowed out are improved, and a plurality of types of fluids are efficiently mixed. The formed mixed fluid C flows out of the fluid mixer 10 through the outlet hole 16.

  In the fluid mixer 10 having such a configuration, the substrate 13 is sandwiched between the first housing 11 and the second housing 12, and the first seal member 21 is disposed between the substrate 13 and the first housing 11. A second seal member 22 and a third seal member 23 are sandwiched between the substrate 13 and the second housing 12, respectively. Accordingly, the substrate 13 made of a material that is easily damaged, such as glass, does not directly contact the first housing 11 or the second housing 12. Therefore, even if a stress that sandwiches the substrate 13 is applied by the first housing 11 and the second housing 12, it is possible to prevent the substrate 13 from being damaged such as a crack or a chip. In particular, the first seal member 21, the second seal member 22, and the third seal member 23 are O-rings made of an elastic member such as rubber, so that the stress applied to the substrate 13 can be reduced and the first casing 11 can be relaxed. The substrate 13 can be sandwiched between the second housing 12 and the second housing 12 without being displaced.

  Further, when the first seal member 21 and the second seal member 22 are arranged so as to overlap each other when seen in a plan view from the one surface 11a side of the first housing 11, a direction in which stress is applied to sandwich the substrate 13, and The overlapping directions of the first seal member 21 and the second seal member 22 coincide. As a result, a stress in one direction is applied to a specific part on the one main surface 13a side of the substrate 13, or a stress in only one direction is applied to a specific part on the other main surface 13b side of the substrate 13. There is no. Therefore, it is possible to more effectively prevent the substrate 13 from being damaged such as cracks or chips.

  Further, the first seal member 21 is sandwiched between the substrate 13 and the first housing 11, and the second seal member 22 and the third seal member 23 are sandwiched between the substrate 13 and the second housing 12, respectively. Since the first space E1, the second space E2, and the third space E3 are formed, it is not necessary to form a wide depression or the like in the substrate 13 in order to form these spaces. Therefore, it is possible to simplify a time-consuming process such as forming a microhole in the recess after forming a recess in the substrate 13, and the fluid mixer 10 can be easily manufactured at a lower cost. become.

  In the first embodiment described above, one end of each of the micro holes 25, 25... And one end of each of the micro holes 26, 26... Are formed so as to be gathered in one place every four in the first space E1. Yes. However, for example, the flow of the micro holes 25 and the micro holes 26 in the substrate 13 is such that one end of one micro hole 25 and one end of the one micro hole 26 are adjacently mixed and exposed. A path may be formed. This makes it possible to more efficiently and uniformly mix the fluid A flowing through the fine holes 25, 25 ... and the fluid B flowing through the fine holes 26, 26 ... in the first space E1.

  In the first embodiment described above, an O-ring having a circular cross section perpendicular to the longitudinal direction is used as the first seal member 21, the second seal member 22, and the third seal member 23. However, the O-ring used for the first seal member 21 to the third seal member 23 is not limited to such a shape. For example, as shown in FIG. 4A, an O-ring C1 having a square cross section may be used. For example, as shown in FIG. 4B, an O-ring C2 having an elliptical cross section may be used. Further, for example, as shown in FIG. 4C, an O-ring C3 having a hexagonal cross section may be used.

  1 to 3, the cross-sectional shape of the O-ring used as the first seal member 21, the second seal member 22, and the third seal member 23 is expressed as a circle. However, actually, since the first housing 11 and the second housing 12 are urged toward each other so as to sandwich the substrate 13, the cross-sectional shape of the O-ring made of an elastic material is It is slightly crushed and has an elliptical cross section.

  In the first embodiment described above, an O-ring having an annular outer shape is used as the first seal member 21, the second seal member 22, and the third seal member 23. Thereby, the disk-shaped first space E1, the second space E2, and the third space E3 are partitioned. However, as the first seal member 21, the second seal member 22, and the third seal member 23, it is also preferable to use, for example, a square annular packing. Accordingly, for example, a rectangular first space, a second space, and a third space can be formed in accordance with a square plate-like substrate.

  In the first embodiment described above, the O-rings used as the first seal member 21, the second seal member 22, and the third seal member 23 are on a flat surface, that is, one main surface 13 a, 13 b of the substrate 13, They are placed on one surface 11a of the housing 11 and one surface 12a of the second housing 12, respectively. However, for example, as shown in FIG. 5, by forming a rectangular groove 28 on one surface 11 a of the first housing 11 and one surface 12 a of the second housing 12, when the fluid mixer 10 is manufactured, Positioning when arranging O-rings used as one seal member 21, second seal member 22, and third seal member 23 is facilitated. Further, it is possible to prevent the O-ring from being displaced from a predetermined arrangement position during use.

  As a modification of the first embodiment described above, as shown in FIG. 6, between the one surface 11 a of the first housing 11 and the one main surface 13 a of the substrate 13, from the one surface 11 a side of the first housing 11. The dummy seal member 29 may be disposed at a position overlapping the third seal member 23 in plan view. By providing the dummy seal member 29, it is possible to prevent the substrate 13 from being damaged such as cracking or chipping even when a stress that sandwiches the substrate 13 between the first housing 11 and the second housing 12 is applied.

(Second embodiment)
FIG. 7 is a cross-sectional view of the fluid mixer in the second embodiment, and FIG. 8 is a plan view when the substrate is viewed from the other side with the second housing of the fluid mixer removed.
The fluid mixer 40 of the present embodiment includes a first housing 41 and a second housing 42 that are arranged to face each other, and a substrate 43 that is supported between the first housing 41 and the second housing 42. And is roughly composed of the following.

  The first seal member 21 is disposed between one surface 41 a of the first housing 41 and one main surface 43 a of the substrate 43. A first space E <b> 1 (mixed space) that is a disk-shaped space is defined between the inside of the first seal member 21 and one surface 41 a of the first housing 41 and one main surface 43 a of the substrate 43. A dummy seal member 29 is disposed outside the first seal member 21.

  Between the one surface 42 a of the second housing 42 and the other main surface 43 b of the substrate 43, for example, the second seal member 22 made of an O-ring is disposed. A third seal member 23 is disposed outside the second seal member 22. For example, the third seal member 23 is disposed at a position overlapping the dummy seal member 29.

  A second space E <b> 2 is defined between the inner side of the annular second seal member 23 and the one surface 42 a of the second housing 42 and the other main surface 43 b of the substrate 43. Such a second space E2 is, for example, a disk-shaped space. A third space E3 is defined between the outer side of the second seal member 23b and the inner side of the annular third seal member 23, the one surface 42a of the second housing 42, and the other main surface 43b of the substrate 43. The The third space E3 is, for example, a donut-shaped space that spreads outside the second space E2.

  The first housing 41 is formed with four lead-out holes 45, 45... That allow the first space E1 to communicate with the outside. The second casing 42 has four first introduction holes 46, 46... For communicating the second space E2 to the outside, and four second introduction holes 47, 47. Are formed respectively.

  A plurality of fine holes 25, 25,..., 26, 26... Are formed in the substrate 43 so that the one main surface 43a side communicates with the other main surface 43b side. Among the plurality of fine holes 25, 25, 26, 26..., The three-dimensional flow path group α constituting the fine holes 25, 25, is a first space E 1 on the one main surface 43 a side of the substrate 43. And the second space E2 on the other main surface 43b side. Further, the three-dimensional channel group β constituting the micro holes 26, 26... Is formed between the first space E1 on the one main surface 43a side of the substrate 43 and the third space E3 on the other main surface 43b side. Communicate between them.

  In the present embodiment, the one surface 41a of the first housing 41 and the substrate so as to overlap the second seal member 22 disposed between the one surface 42a of the second housing 42 and the other main surface 43b of the substrate 43. The first seal member 21 is disposed between one main surface 43 a of 43. Thereby, the inner diameter of the first seal member 21 can be increased. Therefore, the volume of the first space E1 is increased, and fluid can be efficiently mixed at a higher flow rate.

(Third embodiment)
FIG. 9 is a cross-sectional view of the fluid mixer in the third embodiment, and FIG. 10 is a plan view when the substrate is viewed from the other side with the second casing of the fluid mixer removed.
The fluid mixer 50 of the present embodiment includes a first casing 51 and a second casing 52 that are arranged to face each other, and a substrate 53 that is supported between the first casing 51 and the second casing 52. And is roughly composed of the following.

  Between the one surface 51 a of the first housing 51 and one main surface 53 a of the substrate 53, the first seal member 21 made of an O-ring is disposed. A disk member (dummy seal member) 26 is disposed inside the first seal member 21. For example, the disk member 26 may be a solid disk-shaped elastic member having the same thickness as the diameter of the O-ring constituting the first seal member 21. A first space E1 (mixed space) that is a donut-shaped space between the inside of the first seal member 21a and the periphery of the disk member 26, the one surface 51a of the first housing 51, and one main surface 53a of the substrate 53. ) Is sectioned. A dummy seal member 29 having a diameter larger than that of the first seal member 21 is disposed outside the first seal member 21.

  Between the one surface 52a of the second casing 52 and the other main surface 53b of the substrate 53, for example, a second seal member 22a made of two O-rings with different diameters arranged at a predetermined interval from each other. , 22b are arranged. A third seal member 23 is disposed outside the second seal member 22b.

  A second space E2 is formed between the outer side of the annular second seal member 22a, the inner side of the second seal member 23b, and the one surface 52a of the second housing 52 and the other main surface 53b of the substrate 53. Partitioned. Such second space E2 forms, for example, a donut-shaped space. A third space E3 is defined between the outside of the second seal member 23b and the inside of the annular third seal member 23, the one surface 52a of the second housing 52, and the other main surface 53b of the substrate 53. The The third space E3 is, for example, a donut-shaped space that spreads outside the second space E2.

  The first housing 51 is formed with four lead-out holes 55, 55... For communicating the first space E1 to the outside. The second casing 52 has four first introduction holes 56, 56... Communicating the second space E 2 to the outside, and four second introduction holes 57 57, 57 communicating the third space E 3 to the outside. Are formed respectively.

  A plurality of fine holes 25, 25,..., 26, 26... Are formed in the substrate 53 so that the one main surface 53a side communicates with the other main surface 53b side. Among the plurality of fine holes 25, 25, 26, 26, the three-dimensional flow path group α constituting the fine holes 25, 25... Is a first space E 1 on the one main surface 53 a side of the substrate 53. And the second space E2 on the other main surface 53b side. Further, the three-dimensional channel group β constituting the micro holes 26, 26... Is formed between the first space E1 on the one main surface 53a side of the substrate 53 and the third space E3 on the other main surface 53b side. Communicate between them.

  In the present embodiment, the first casing 41 and the second casing 42 are clamped by using a disk member 26 made of a solid disk-shaped elastic member instead of an O-ring inside the first seal member 21. At this time, a portion for receiving the stress applied to the substrate 53 becomes large. Accordingly, excessive deformation of the first seal member 21 can be prevented, and an interval between the one surface 51 a of the first housing 51 and the one main surface 53 a of the substrate 53 can be appropriately maintained. Further, since the four outlet holes 55, 55... Are formed, the flow rate of the fluid to be mixed can be further increased as compared with the case of one outlet hole as in the first embodiment.

(Fourth embodiment)
FIG. 11 is a cross-sectional view of the fluid mixer in the fourth embodiment, and FIG. 12 is a plan view of the substrate as seen from the other surface side with the second housing of the fluid mixer removed.
The fluid mixer 60 of the present embodiment includes a first casing 61 and a second casing 62 that are arranged to face each other, and a substrate 63 that is supported between the first casing 61 and the second casing 62. And is roughly composed of the following.

  Between the one surface 61a of the first housing 61 and one main surface 63a of the substrate 63, first seal members 21a and 21b made of two O-rings having different diameters arranged at a predetermined interval from each other. Is arranged. A first space E1 (a donut-shaped space) between the outside of the first seal member 21a and the inside of the first seal member 21b, the one surface 61a of the first housing 61 and the one main surface 63a of the substrate 63. A mixing space) is defined. A dummy seal member 29 having a diameter larger than that of the first seal member 21b is disposed outside the first seal member 21b.

  Between the one surface 62a of the second casing 62 and the other main surface 63b of the substrate 63, for example, a second seal member 22a made of two O-rings with different diameters arranged at a predetermined interval from each other. , 22b are arranged. A third seal member 23 is disposed outside the second seal member 22b.

  A second space E2 is formed between the outer side of the annular second seal member 22a, the inner side of the second seal member 23b, and the one surface 62a of the second housing 62 and the other main surface 63b of the substrate 63. Partitioned. Such second space E2 forms, for example, a donut-shaped space. A third space E3 is defined between the outside of the second seal member 23b and the inside of the annular third seal member 23, the one surface 62a of the second housing 62, and the other main surface 63b of the substrate 63. The The third space E3 is, for example, a donut-shaped space that spreads outside the second space E2.

  The first housing 61 is formed with four lead-out holes 65, 65... For communicating the first space E1 to the outside. The second casing 62 has two first introduction holes 66 and 66 that allow the second space E2 to communicate with the outside, and two second introduction holes 67 and 67 that allow the third space E3 to communicate with the outside. Is formed. One first introduction hole 66 and one second introduction hole 67 are arranged in close proximity to each other.

  A plurality of fine holes 25, 25,..., 26, 26... Are formed in the substrate 63 so that the one main surface 63a side communicates with the other main surface 63b side. Among the plurality of fine holes 25, 25,..., 26, 26, the three-dimensional flow path group α constituting the fine holes 25, 25... Is a first space E1 on the one main surface 63a side of the substrate 63. And the second space E2 on the other main surface 63b side. Further, the three-dimensional flow path group β constituting the micro holes 26, 26... Is formed between the first space E1 on the one main surface 63a side of the substrate 63 and the third space E3 on the other main surface 63b side. Communicate between them.

  As in the present embodiment, the flow path group α and the flow path group β can be concentrated and arranged close to each other with respect to the second space E2 and the third space E3 forming the donut-shaped space.

(Fifth embodiment)
FIG. 14 is a cross-sectional view of the fluid mixer in the fifth embodiment, and FIG. 15 is a plan view of the substrate as viewed from the other side with the second housing of the fluid mixer removed.
The fluid mixer 70 of the present embodiment includes a first casing 71 and a second casing 72 that are arranged to face each other, and a substrate 73 that is supported between the first casing 71 and the second casing 72. And is roughly composed of the following.

  Between the one surface 71 a of the first housing 71 and one main surface 73 a of the substrate 73, the first seal member 21 made of an O-ring is disposed. A first space E <b> 1 (mixed space) that is a donut-shaped space is defined between the inside of the first seal member 21 and the one surface 71 a of the first casing 71 and one main surface 73 a of the substrate 73. .

  Between the one surface 72a of the second housing 72 and the other main surface 73b of the substrate 73, for example, the second seal member 22 made of an O-ring is disposed. A second space E <b> 2 is defined between the inside of the annular second seal member 22 and the one surface 72 a of the second housing 72 and the other main surface 73 b of the substrate 73.

  And the 4th seal member 81, 81 ... is distribute | arranged to the outer periphery of the 2nd seal member 22 so that it may become mutually equidistant around the 2nd space E2. Four independent fourth spaces E4, E4,... Are defined between the inside of each of the fourth seal members 81, 81, and the one surface 72a of the second casing 72 and the other main surface 73b of the substrate 73. Is done.

  Further, the four dummy seal members 89, 89,... Are arranged at equal intervals around the first seal member 21 between the one surface 71a of the first casing 71 and one main surface 73a of the substrate 73. Is arranged. Each dummy seal member 89 has the same shape as the fourth seal member 81, and is preferably disposed at a position overlapping the formation position of the fourth seal members 81, 81.

  The first casing 71 is formed with a lead-out hole 75 that allows the first space E1 to communicate with the outside. Further, the second casing 52 has a first introduction hole 76 for communicating the second space E2 to the outside and four fourth introduction holes 87, 87... For individually communicating the respective fourth spaces E4 to the outside. Is formed.

  A plurality of micro holes 25, 25,..., 88, 88,... Are formed in the substrate 73 so that the one main surface 73a side communicates with the other main surface 73b side. Among the plurality of micro holes 25, 25,..., 88, 88, the three-dimensional flow path group α that constitutes the micro holes 25, 25... Is a first space E1 on the one main surface 73a side of the substrate 73. And the second space E2 on the other main surface 73b side. Further, the three-dimensional flow path group γ constituting the fine holes 88, 88... Is composed of a first space E1 on the one surface 83a side of the substrate 83 and four fourth spaces E4, E4. Communicate with each other.

  In the present embodiment, four fourth seal members 81, 81... Are arranged outside the second seal member 22 to form four independent fourth spaces E4, E4. It is possible to form a mixed fluid obtained by mixing the four fluids in the first space E1 by introducing the fluids from the four fourth introduction holes 87, 87.

  In the present embodiment, four independent fourth spaces E4, E4,... Are divided around the second space E2 by the four fourth seal members 81, 81,. The present invention is not limited to this, and an arbitrary number of fourth spaces can be formed by arranging an arbitrary number of fourth seal members around the second space E2.

DESCRIPTION OF SYMBOLS 10 ... Fluid mixer, 11 ... First housing, 12 ... Second housing, 13 ... Substrate, 21 ... First sealing member, 22 ... Second sealing member, 23 ... Third sealing member, 25, 26 ... Fine Hole, E1 ... first space, E2 ... second space, E3 ... third space, E4 ... fourth space.

Claims (5)

A fluid mixer comprising a substrate disposed between a first housing and a second housing,
A ring-shaped first seal member disposed between one surface of the first housing and one main surface of the substrate, and between one surface of the second housing and the other main surface of the substrate A ring-shaped second seal member, a ring-shaped third seal member disposed between one surface of the second housing and the other main surface of the substrate, and surrounding the second seal member; With
A first space constituted by the first seal member, one surface of the first housing, and one main surface of the substrate; and a second space of the second seal member, one surface of the second housing, and the other main surface of the substrate. A second space constituted by a surface, and a third space constituted by the second seal member, the third seal member, one surface of the second housing and the other main surface of the substrate, respectively. ,
The substrate has fine holes for communicating between the first space and the second space, and fine holes for communicating between the first space and the third space;
A lead-out hole is formed in the first casing to communicate the first space with the outside of the fluid mixer, and the second casing is communicated with the outside of the fluid mixer. A fluid mixer characterized in that a first introduction hole and a second introduction hole for communicating the third space with the outside of the fluid mixer are formed.   2. The fluid mixer according to claim 1, wherein the ring-shaped first seal member and the second seal member are positioned so as to overlap each other with the substrate interposed therebetween.   The dummy seal member is disposed at a position overlapping with at least one of the second seal member and the third seal member inside or outside surrounded by the first seal member. Or the fluid mixer of 2.   The fluid mixer according to claim 3, wherein the dummy seal member is disposed at a position overlapping the third seal member. A fluid mixer comprising a substrate disposed between a first housing and a second housing,
A ring-shaped first seal member disposed between one surface of the first housing and one main surface of the substrate, and between one surface of the second housing and the other main surface of the substrate A ring-shaped second seal member arranged, and a plurality of fourth seal members arranged around the second seal member,
A first space constituted by the first seal member, one surface of the first housing, and one main surface of the substrate; and a second space of the second seal member, one surface of the second housing, and the other main surface of the substrate. Each having a second space constituted by a surface and a plurality of third spaces constituted by each of the fourth seal member, one surface of the second housing and the other main surface of the substrate,
The substrate has a plurality of micro holes that communicate between the first space and the second space, and a plurality of micro holes that communicate between the first space and the plurality of fourth spaces, respectively.
A lead-out hole is formed in the first casing to communicate the first space with the outside of the fluid mixer, and the second casing is communicated with the outside of the fluid mixer. A fluid mixer characterized in that a first introduction hole and a second introduction hole for communicating the third space with the outside of the fluid mixer are formed.

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