JP2014531514A - ターゲット材、コーティング、及びコーティングされた物 - Google Patents
ターゲット材、コーティング、及びコーティングされた物 Download PDFInfo
- Publication number
- JP2014531514A JP2014531514A JP2014530287A JP2014530287A JP2014531514A JP 2014531514 A JP2014531514 A JP 2014531514A JP 2014530287 A JP2014530287 A JP 2014530287A JP 2014530287 A JP2014530287 A JP 2014530287A JP 2014531514 A JP2014531514 A JP 2014531514A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- dopant
- carbon nitride
- nitride
- coating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 302
- 239000013077 target material Substances 0.000 title description 26
- 239000011248 coating agent Substances 0.000 claims abstract description 240
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 claims abstract description 161
- 239000000463 material Substances 0.000 claims abstract description 101
- 239000002019 doping agent Substances 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 238000000608 laser ablation Methods 0.000 claims abstract description 26
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000002113 nanodiamond Substances 0.000 claims description 60
- 229910052582 BN Inorganic materials 0.000 claims description 44
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 43
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 43
- 229910052580 B4C Inorganic materials 0.000 claims description 30
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 21
- 229920002313 fluoropolymer Polymers 0.000 claims description 19
- 239000004811 fluoropolymer Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 19
- 239000001257 hydrogen Substances 0.000 claims description 17
- 229910052739 hydrogen Inorganic materials 0.000 claims description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 12
- 229910052796 boron Inorganic materials 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 10
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 10
- 150000002910 rare earth metals Chemical class 0.000 claims description 10
- 229910052783 alkali metal Inorganic materials 0.000 claims description 8
- 150000001340 alkali metals Chemical class 0.000 claims description 8
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 8
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 6
- 239000002296 pyrolytic carbon Substances 0.000 claims description 6
- 230000006911 nucleation Effects 0.000 claims description 3
- 238000002189 fluorescence spectrum Methods 0.000 claims 1
- 238000002679 ablation Methods 0.000 description 32
- 238000000034 method Methods 0.000 description 24
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 19
- 239000004810 polytetrafluoroethylene Substances 0.000 description 19
- 238000005424 photoluminescence Methods 0.000 description 17
- 150000001639 boron compounds Chemical class 0.000 description 16
- 238000005245 sintering Methods 0.000 description 15
- 239000013078 crystal Substances 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 238000002834 transmittance Methods 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- 230000004888 barrier function Effects 0.000 description 8
- 230000005855 radiation Effects 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 7
- -1 polytetrafluoroethylene Polymers 0.000 description 7
- 239000011164 primary particle Substances 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 238000004549 pulsed laser deposition Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 5
- 230000005670 electromagnetic radiation Effects 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000036961 partial effect Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- SPSSULHKWOKEEL-UHFFFAOYSA-N 2,4,6-trinitrotoluene Chemical compound CC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O SPSSULHKWOKEEL-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- 229910052693 Europium Inorganic materials 0.000 description 2
- 229910052689 Holmium Inorganic materials 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 2
- 229910052772 Samarium Inorganic materials 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 2
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 2
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 2
- 238000001513 hot isostatic pressing Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 2
- 238000002490 spark plasma sintering Methods 0.000 description 2
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000000015 trinitrotoluene Substances 0.000 description 2
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 2
- 229910000984 420 stainless steel Inorganic materials 0.000 description 1
- ZAVWGZPPWUNBAP-UHFFFAOYSA-N BCCN Chemical compound BCCN ZAVWGZPPWUNBAP-UHFFFAOYSA-N 0.000 description 1
- 241000237502 Ostreidae Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- DZVPMKQTULWACF-UHFFFAOYSA-N [B].[C].[N] Chemical compound [B].[C].[N] DZVPMKQTULWACF-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- XKMRRTOUMJRJIA-UHFFFAOYSA-N ammonia nh3 Chemical compound N.N XKMRRTOUMJRJIA-UHFFFAOYSA-N 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 230000003666 anti-fingerprint Effects 0.000 description 1
- 229910021398 atomic carbon Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005474 detonation Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012994 industrial processing Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000007734 materials engineering Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000002991 molded plastic Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 235000020636 oyster Nutrition 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
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- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000021 stimulant Substances 0.000 description 1
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- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C23C14/0658—Carbon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20115912 | 2011-09-16 | ||
| FI20115912A FI123883B (sv) | 2011-09-16 | 2011-09-16 | Målmaterial, beläggning och ett belagt föremål |
| PCT/FI2012/050897 WO2013038067A1 (en) | 2011-09-16 | 2012-09-17 | Coating material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2014531514A true JP2014531514A (ja) | 2014-11-27 |
Family
ID=44718818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014530287A Pending JP2014531514A (ja) | 2011-09-16 | 2012-09-17 | ターゲット材、コーティング、及びコーティングされた物 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2773790A1 (sv) |
| JP (1) | JP2014531514A (sv) |
| KR (1) | KR20140066762A (sv) |
| CN (1) | CN104204271A (sv) |
| FI (1) | FI123883B (sv) |
| WO (1) | WO2013038067A1 (sv) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101791983B1 (ko) * | 2016-02-04 | 2017-11-01 | 한국화학연구원 | 고경도 특성을 가지는 하드코팅막 및 이의 제조방법 |
| JPWO2021079912A1 (sv) * | 2019-10-23 | 2021-04-29 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015048414A (ja) * | 2013-09-02 | 2015-03-16 | 日東電工株式会社 | 絶縁性熱伝導シート |
| KR20170044170A (ko) * | 2014-08-21 | 2017-04-24 | 더 유니버시티 오브 리버풀 | 2차원적 카본 니트라이드 물질 및 이의 제조 방법 |
| US20160096967A1 (en) | 2014-10-03 | 2016-04-07 | C3Nano Inc. | Property enhancing fillers for transparent coatings and transparent conductive films |
| CN110231371A (zh) * | 2019-07-15 | 2019-09-13 | 新疆大学 | 一种Au/g-C3N4湿敏材料的制备方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6537429B2 (en) * | 2000-12-29 | 2003-03-25 | Lam Research Corporation | Diamond coatings on reactor wall and method of manufacturing thereof |
| JP4894103B2 (ja) * | 2001-07-24 | 2012-03-14 | 株式会社ブリヂストン | 透明導電フィルム及びタッチパネル |
| FI20060178A7 (sv) * | 2006-02-23 | 2007-08-24 | Picodeon Ltd Oy | Ytbeläggningsförfarande |
| JP5237124B2 (ja) * | 2006-02-23 | 2013-07-17 | ピコデオン エルティーディー オイ | 窒化炭素を用いたコーティングおよび窒化炭素をコーティングした製品 |
| CN101748370B (zh) * | 2008-12-19 | 2011-11-30 | 中国科学院兰州化学物理研究所 | 用于水润滑的织构化类金刚石复合薄膜的制备方法 |
-
2011
- 2011-09-16 FI FI20115912A patent/FI123883B/sv not_active IP Right Cessation
-
2012
- 2012-09-17 KR KR1020147010172A patent/KR20140066762A/ko not_active Withdrawn
- 2012-09-17 CN CN201280056594.7A patent/CN104204271A/zh active Pending
- 2012-09-17 EP EP12769695.3A patent/EP2773790A1/en not_active Withdrawn
- 2012-09-17 JP JP2014530287A patent/JP2014531514A/ja active Pending
- 2012-09-17 WO PCT/FI2012/050897 patent/WO2013038067A1/en not_active Ceased
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101791983B1 (ko) * | 2016-02-04 | 2017-11-01 | 한국화학연구원 | 고경도 특성을 가지는 하드코팅막 및 이의 제조방법 |
| JPWO2021079912A1 (sv) * | 2019-10-23 | 2021-04-29 | ||
| WO2021079912A1 (ja) * | 2019-10-23 | 2021-04-29 | デンカ株式会社 | 窒化ホウ素粉末及びその製造方法、炭窒化ホウ素粉末、並びに、複合材及び放熱部材 |
| JP7015971B2 (ja) | 2019-10-23 | 2022-02-03 | デンカ株式会社 | 窒化ホウ素粉末及びその製造方法、炭窒化ホウ素粉末、並びに、複合材及び放熱部材 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2773790A1 (en) | 2014-09-10 |
| CN104204271A (zh) | 2014-12-10 |
| FI20115912L (sv) | 2013-03-17 |
| FI20115912A0 (sv) | 2011-09-16 |
| WO2013038067A1 (en) | 2013-03-21 |
| KR20140066762A (ko) | 2014-06-02 |
| FI123883B (sv) | 2013-11-29 |
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| Publication | Publication Date | Title |
|---|---|---|
| JP2014531514A (ja) | ターゲット材、コーティング、及びコーティングされた物 | |
| US20130104461A1 (en) | Coating material, coating and coated object | |
| CN1969058B (zh) | 碳膜 | |
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