JP2014200052A - Vibration piece, vibrator, oscillator, electronic apparatus and moving body - Google Patents

Abstract

Provided is a resonator element capable of suppressing vibration leakage and reducing a CI value even if the size is reduced, and also provides a vibrator, an oscillator, an electronic device, and a moving body including the resonator element. To do. A vibrating piece 1 includes a base 12 and a pair of vibrating arms that extend from one end of the base 12 along the Y-axis direction and are aligned along the X-axis direction orthogonal to the Y-axis direction. 20, 22, and the base 12 has reduced width parts 16, 18 whose width along the X-axis direction of the one end and the other end is gradually reduced with increasing distance from the center of the base 12, and the X-axis direction And the thickness along the Z-axis direction orthogonal to both the Y-axis direction is thicker than the end portion on the base 12 side of the vibrating arms 20 and 22, so that the thickness is larger than the end portion on the base 12 side of the vibrating arms 20 and 22. -The thick part 31 which has the protrusion part which protrudes in the Z-axis direction side is included. [Selection] Figure 3

Description

  The present invention relates to a resonator element, a vibrator, an oscillator, an electronic device, and a moving object.

Electronic devices such as vibrators and oscillators are used in small information devices such as HDDs (hard disk drives), mobile computers, and IC cards, and mobile communication devices such as mobile phones, car phones, and paging systems. Widely used.
An example of a resonator element conventionally used in an electronic device is shown in FIG.
A conventional vibrating piece 101 shown in FIG. 31 is formed in the illustrated outer shape by etching a piezoelectric material such as quartz. The vibrating piece 101 includes a rectangular base 112 fixed to a package (not shown) or the like, and a pair of vibrating arms 120 and 122 extending from the main body 114 of the base 112. Grooves 128 and 130 are formed on the main surfaces (front and back surfaces) of these vibrating arms 120 and 122, and necessary driving electrodes (not shown) are formed.
In such a vibrating piece 101, when a driving voltage is applied via a driving electrode, bending vibrations occur such that the tip portions of the vibrating arms 120 and 122 repeatedly approach and separate from each other in a substantially plane. As a result, a signal having a predetermined frequency is extracted.

By the way, such a vibrating piece 101 propagates to the base 112 side in accordance with the bending vibration of the vibrating arms 120 and 122, and a member (adhesive, metal bump, etc.) that fixes the vibrating piece from the base 112. ) May leak vibration. For this reason, the resonator element 101 has a problem in that the Q value is lowered and, as a result, the CI (crystal impedance) value is raised.
In order to deal with this problem, in the resonator element according to Patent Document 1, a cut is formed at a position closer to the vibrating arm than a portion where the base is fixed to the package or the like.
Further, in the resonator element according to Patent Document 2, a through groove is formed at a position closer to the vibrating arm than a portion where the base is fixed to the package or the like.

JP 2002-261575 A JP 2005-236563 A

In recent years, with the progress of miniaturization of various devices equipped with such a resonator element, it is required that the resonator element itself be miniaturized as much as possible.
However, in the resonator element according to Patent Document 1 or Patent Document 2, a notch or a through groove is provided in the base portion to lengthen the transmission path of vibration leakage from the vibrating arm side to the fixed portion. However, there is a problem that it is difficult to reduce the size.
An object of the present invention is to provide a resonator element that can reduce vibration leakage and keep the CI value low even when downsizing, and a vibrator, an oscillator, an electronic device, and a movement including the resonator element To provide a body.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The resonator element according to this application example includes a base portion having one end portion and the other end portion arranged along the first direction;
A pair of vibrating arms extending along the first direction from the one end of the base and aligned along a second direction orthogonal to the first direction;
The base is
A reduced width portion in which the width along the second direction of at least one of the one end portion and the other end portion gradually decreases as the distance from the central portion of the base portion increases;
A thickness along a third direction orthogonal to both the first direction and the second direction is thicker than an end of the vibrating arm on the base side, and more than an end of the vibrating arm on the base side. A thick portion including a protruding portion protruding to at least one side in the third direction;
It is characterized by including.

According to such a resonator element, even if the length of the base portion in the first direction is shortened, the pair of vibrating arms are substantially in-plane (surfaces formed in the first direction and the second direction). In the same manner, the deformation of the base due to the bending vibration approaching or separating from each other can be suppressed, and vibration leakage from the base to the outside can be reduced.
In addition, since the base portion has the protruding portion, for example, by using the distal end surface of the protruding portion as a fixing portion that fixes the package, the bending vibration of the pair of vibrating arms approaching or separating from each other in a substantially plane. Accordingly, the fixed portion can be moved away from the region where the base vibrates. Therefore, vibration leakage from the base portion to the package can be suppressed.
For this reason, the resonator element according to this application example can suppress vibration leakage and reduce the CI value even if the resonator element is downsized.

[Application Example 2]
In the resonator element according to this application example, the width of the reduced width portion along the second direction is
It is preferable that the width gradually decreases as the distance from the central portion of the base portion increases along the virtual line segment along the first direction through the center of the base portion.
Thereby, the deformation | transformation of the base accompanying the bending vibration which a pair of vibration arm approaches or separates mutually can be suppressed effectively.

[Application Example 3]
In the resonator element according to this application example, it is preferable that the thick portion is provided so as to include a central portion having a width along the second direction of the base portion in a plan view.
Thereby, it can suppress that a thick part vibrates with the bending vibration which a pair of vibration arm approaches or spaces apart.

[Application Example 4]
In the resonator element according to this application example, it is preferable that a width of the protruding portion along the second direction is smaller than a distance between the pair of vibrating arms.
Thereby, it can suppress that a thick part vibrates with the bending vibration which a pair of vibration arm approaches or spaces apart.

[Application Example 5]
In the resonator element according to this application example, it is preferable that the thick portion protrudes from both sides of the base portion along the third direction of the base portion.
Thereby, the mass of the base can be increased while reducing the length along the first direction and the second direction of the base. Therefore, it is possible to suppress the vibration of the base portion due to the bending vibration of the pair of vibrating arms approaching or separating from each other in a substantially plane while reducing the size of the vibrating piece.

[Application Example 6]
In the resonator element of this application example, the thick portion is
The thickness along the third direction is equal to the vibrating arm;
A first portion from which the vibrating arm extends;
A second portion joined to one surface of the first portion in the third direction;
It is preferable to contain.
Thereby, a thick part can be formed comparatively easily while making the dimensional accuracy of a vibrating arm excellent.

[Application Example 7]
The vibrator of this application example includes the resonator element of this application example,
A package containing the vibrating piece,
The front end surface of the projecting portion is fixed to the package.
Thereby, it is possible to provide a small-sized vibrator having excellent vibration characteristics.

[Application Example 8]
In the vibrator according to this application example, the front end surface of the protruding portion located on one side of the base in the third direction is connected to the package via two joining members arranged along the first direction. It is preferably fixed.
Thereby, the width | variety along the said 2nd direction of the fixing | fixed part of the said vibration piece and the said package can be made small. Therefore, vibration leakage from the base portion to the package can be suppressed. Further, when a conductive adhesive or a metal bump is used as the joining member, the resonator element can be driven by inputting a drive signal via the two joining members.

[Application Example 9]
In the vibrator according to this application example, a distal end surface of the projecting portion located on one side of the base in the third direction is fixed to the package via one joining member,
A pad electrode is provided on the other side surface of the base in the third direction,
The package is provided with a connection electrode,
It is preferable that the pad electrode and the connection electrode are connected via a wiring.
Thereby, the area of the fixing part between the vibrating piece and the package can be reduced. Therefore, vibration leakage from the base portion to the package can be suppressed. Further, when a conductive adhesive or a metal bump is used as the joining member, the resonator element can be driven by inputting a drive signal through the joining member and the wiring.

[Application Example 10]
The oscillator of this application example includes the resonator element of this application example,
And an oscillation circuit electrically connected to the vibration piece.
Thereby, a small-sized oscillator having excellent oscillation characteristics can be provided.
[Application Example 11]
The electronic apparatus according to this application example includes the resonator element according to this application example.
Thereby, an electronic device having excellent reliability can be provided.
[Application Example 12]
The moving body of this application example includes the resonator element of this application example.
Thereby, the mobile body which has the outstanding reliability can be provided.

FIG. 3 is a plan view showing the resonator element according to the first embodiment of the invention. It is the sectional view on the AA line in FIG. FIG. 2 is a rear view of the resonator element shown in FIG. 1. FIG. 5 is a sectional view taken along line BB in FIG. 3. (A) is a top view which shows typically the conventional vibration piece, (b) is a top view which shows the simplified model of the vibration piece shown to (a). It is a figure explaining the principle of the vibration leakage of the vibration piece shown in FIG. 5, Comprising: (a)-(d) is a figure explaining the effect | action of each part (1st-4th connection part) of a base. (A) is a plan view schematically showing the resonator element shown in FIG. 1 (a diagram considering only the reduced width portion on the vibrating arm side), and (b) is a simplified model of the resonator element shown in (a). FIG. It is a top view explaining the principle of the vibration leak suppression of the vibration piece shown in FIG. 7, Comprising: (a)-(d) is a figure explaining the effect | action of each part (1st-4th connection part) of a base. (A) is a plan view schematically showing the resonator element shown in FIG. 1 (a diagram considering only the reduced width portion opposite to the vibrating arm), and (b) is a simplification of the resonator element shown in (a). It is a top view which shows a model. It is a top view explaining the principle of the dynamic leak suppression of the vibration piece shown in FIG. 9, Comprising: (a)-(d) is a figure explaining the effect | action of each part (1st-4th connection part) of a base. It is a back view which shows the vibration piece which concerns on 2nd Embodiment of this invention. It is the BB sectional view taken on the line in FIG. FIG. 6 is a plan view showing a resonator element according to a third embodiment of the invention. FIG. 14 is a rear view of the resonator element shown in FIG. 13. It is the BB sectional view taken on the line in FIG. It is sectional drawing which shows the vibration piece which concerns on 4th Embodiment of this invention. FIG. 9 is a plan view showing a resonator element according to a fifth embodiment of the invention. FIG. 10 is a plan view illustrating a resonator element according to a sixth embodiment of the invention. FIG. 10 is a plan view showing a resonator element according to a seventh embodiment of the invention. It is a top view which shows the vibration piece which concerns on 8th Embodiment of this invention. It is a top view which shows the vibration piece which concerns on 9th Embodiment of this invention. It is a top view which shows the vibration piece which concerns on 10th Embodiment of this invention. (A) is a top view which shows the vibration piece which concerns on 11th Embodiment of this invention, (b) is a figure which shows the 1st modification of the vibration piece shown to (a), (c) is (a). It is a figure which shows the 2nd modification of the vibration piece shown to. It is a figure which shows schematic structure of the 1st example (vibrator provided with the vibration piece shown in FIG. 1) of the vibrator | oscillator of this invention, (a) is a top view, (b) is C in (a). FIG. It is a figure which shows schematic structure of the 2nd example (vibrator provided with the vibration piece shown in FIG. 11) of the vibrator | oscillator of this invention, Comprising: (a) is a top view, (b) is C in (a). FIG. It is sectional drawing which shows schematic structure of an example of the oscillator of this invention. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer that is a first example of an electronic apparatus according to the invention. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) which is the 2nd example of the electronic device of this invention. It is a perspective view which shows the structure of the digital camera which is the 3rd example of the electronic device of this invention. It is a perspective view which shows the structure of the motor vehicle which is an example of the mobile body of this invention. It is a top view which shows the structure of the conventional vibration piece.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Vibration piece)
<First Embodiment>
1 is a plan view showing a resonator element according to the first embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a rear view of the resonator element shown in FIG. 4 is a cross-sectional view taken along line B-B in FIG. 3.

  1 to 4, for convenience of explanation, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following description, the direction parallel to the X axis (second direction) is the “X axis direction”, the direction parallel to the Y axis (first direction) is the “Y axis direction”, and the direction parallel to the Z axis ( The third direction) is called the “Z-axis direction”, and the X-, Y-, and Z-axis arrows shown in each figure are indicated with “+ (plus)” on the tip side and “− (minus) on the base side. ) ". In the following description, for the sake of convenience of explanation, the plan view when viewed from the Z-axis direction is also simply referred to as “plan view”.

A vibrating piece 1 shown in FIG. 1 includes a vibrating substrate 10 having a base 12 and a pair of vibrating arms 20 and 22, and excitation electrodes 41a and 41b.
The vibration substrate 10 is made of, for example, quartz, particularly a Z-cut quartz plate. Thereby, the resonator element 1 can exhibit excellent vibration characteristics. A Z-cut quartz plate is a quartz substrate whose thickness direction is the Z axis (optical axis) of quartz. The Z axis preferably coincides with the thickness direction of the vibration substrate 10, but is slightly inclined (for example, less than about 15 °) with respect to the thickness direction from the viewpoint of reducing the frequency temperature change in the vicinity of room temperature. May be.

Wet etching can be used to form the outer shape of the vibration substrate 10 made of such crystal. In this case, the crystal plane of the crystal appears in the outline of the vibration substrate 10 and the shape symmetry of the resonator element 1 is deteriorated. However, in order to form a shape with reduced appearance of the crystal plane, the vibration substrate 10 The thickness is preferably 70 μm or less. In order to reduce the CI value, it is preferable to make the thickness of the vibration substrate 10 thicker than 70 μm and thinner than 300 μm from the viewpoint of increasing the driving region. Furthermore, in order to reduce the thickness of the crystal plane that is likely to appear, the outer shape is etched by twice the etching amount (etching time) penetrating in the thickness direction by wet etching. The etching amount (etching time) is preferably 30 times.
By such overetching that makes the etching amount (time) 2 to 30 times, the occurrence of fins appearing on the outer shape of the resonator element 1 due to the crystal plane of the crystal can be suppressed.

The vibration substrate 10 includes a base portion 12 and two vibrating arms 20 and 22 that extend from the base portion 12 in the + Y-axis direction and are arranged side by side in the X-axis direction. Such a vibration substrate 10 is formed to be symmetric with respect to a virtual center line Y1 (virtual line segment) parallel to the Y axis.
The base 12 extends along an XY plane parallel to a plane including the X axis and the Y axis, and has a substantially plate shape with the Z axis direction as the thickness direction.
Such a base 12 includes a main body 14, a reduced width portion 16 positioned on the + Y axis direction side with respect to the main body portion 14, and a reduced width portion 18 positioned on the −Y axis direction side with respect to the main body portion 14. have. In other words, the base 12 has the reduced width portion 16 (one end portion) and the reduced width portion 18 (the other end portion) arranged along the Y-axis direction via the main body portion 14.

The main body 14 has a substantially constant width (length in the X-axis direction) along the Y-axis direction. That is, the main body 14 has a substantially rectangular plan view shape.
The reduced width portion 16 is connected to the outer edge of the main body portion 14 on the + Y axis direction side. That is, the reduced width portion 16 is provided on the same side as the vibrating arms 20 and 22 with respect to the main body portion 14. On the other hand, a reduced width portion 18 is connected to the outer edge of the main body portion 14 on the −Y axis direction side.

  The widths of the reduced width portions 16 and 18 along the X-axis direction are gradually reduced toward the virtual center line Y1 passing through the center of the base portion 12 in parallel with the Y-axis as the distance from the center portion of the base portion 12 increases. Thereby, the deformation | transformation of the base 12 accompanying the bending vibration which mutually approaches or spaces apart in a substantially plane of a pair of vibrating arms 20 and 22 can be suppressed effectively. As a result, even if the length of the base portion 12 along the Y-axis direction is shortened, the deformation of the base portion 12 due to the bending vibration of the pair of vibrating arms 20 and 22 approaching or separating from each other in a substantially plane is suppressed. The vibration leakage from the base 12 to the outside can be suppressed. The principle of suppressing vibration leakage by the reduced width portions 16 and 18 will be described in detail later.

  In the present embodiment, the contour of the reduced width portion 16 is composed of a curved curved portion 17 in plan view. Accordingly, the width of the reduced width portion 16 along the X-axis direction continuously decreases as the distance from the center portion of the base portion 12 increases. The radius of curvature of the curved portion 17 decreases as the distance from the center of the base portion 12 increases. In a plan view, a curved line 17a shown by a broken line in FIG. 1 has a constant radius of curvature, and a virtual extension line extending from both ends of the curved line 17a passes over each corner of the main body portion 14 on the + Y axis direction side. . The effect of suppressing vibration leakage by the reduced width portion 16 is mainly due to the portion closer to the main body portion 14 than the curve 17a with the curved line 17a of the reduced width portion 16 as a virtual end surface.

  The outline of the reduced width portion 18 is composed of a curved curve portion 19 in plan view. Accordingly, the width of the reduced width portion 18 along the X-axis direction continuously decreases as the distance from the central portion of the base portion 12 increases. The radius of curvature of the curved portion 19 (curve 19a in plan view) is constant over the entire area. Then, both ends of the curved portion 19 are connected to each corner of the main body portion 14 on the −Y axis direction side.

  In addition, when the external shape of the vibration substrate 10 is formed by wet etching the crystal substrate, since the crystal plane of the crystal appears in the outline of the vibration substrate 10, when viewed microscopically, the curved portions 17 and 19 are Although it can be said that it is an assembly of short linear portions, such a case is also included in the “curve shape”. Further, in this case, additional wet etching is performed to the extent that the crystal plane does not appear on the inner side (the main body part 14 side) of the curved parts 17 and 19 that are aggregates of short linear parts. It may be formed.

As shown in FIGS. 3 and 4, the base 12 has a thick portion 31. The thickness T1 of the thick portion 31 along the Z-axis direction is thicker than the thickness T2 of the ends of the vibrating arms 20 and 22 on the base 12 side.
Such a thick portion 31 has a protruding portion 33 protruding in the −Z-axis direction from a portion 32 where the vibrating arms 20 and 22 extend. Here, the thickness of the portion 32 along the Z-axis direction is equal to the thickness T <b> 2 of the vibrating arms 20 and 22.

  The protruding portion 33 protrudes in the −Z-axis direction from the ends of the vibrating arms 20 and 22 on the base 12 side. Thereby, for example, by using the distal end surface (end surface on the −Z axis direction side) of the projecting portion 33 as a fixing portion for fixing to the package, the pair of vibrating arms 20 and 22 approach or separate from each other in a substantially plane. The fixed portion can be moved away from the region where the base 12 vibrates with the bending vibration. Therefore, vibration leakage from the base 12 to the package can be suppressed. 3 and 4, two joining members 35 for fixing the protruding portion 33 to the package are illustrated. The fixing of the projecting portion 33 to the package will be described in detail later together with the description of the first example of the vibrator described later.

  The thickness T3 (height) along the Z-axis direction of the protruding portion 33 is determined according to the dimensions of the vibrating arms 20 and 22 and the joining member 35, and is not particularly limited, but the thickness of the vibrating arms 20 and 22 is not limited. It is preferable that it is 0.1 or more and 1.5 or less with respect to the thickness T2. As a result, the base portion 12 can be reduced in size while the distal end surface of the projecting portion 33 is stably fixed to the package, and the pair of vibrating arms 20 and 22 are bent toward or away from each other in a substantially plane. The fixed portion can be moved away from the region where the base 12 vibrates with vibration.

  In the present embodiment, the protruding portion 33 is formed integrally with the portion 32. That is, the portion 32 and the protruding portion 33 are formed from the same substrate. Therefore, the mechanical strength of the thick portion 31 can be made relatively easy. In order to form such a projecting portion 33, a portion other than the portion corresponding to the thick portion 31 of the quartz substrate is formed on one surface before the outer shape of the vibration substrate 10 is formed by wet etching the quartz substrate. It can be thinned by processing from the side.

Further, the surface on the + Z-axis direction side of the thick portion 31 and the surface on the + Z-axis direction side of the end portions on the base 12 side of the vibrating arms 20 and 22 are located on the same plane. Thereby, when the quartz substrate is processed to form the vibration substrate 10, it is not necessary to process the surface opposite to the protruding portion 33 of the quartz substrate.
The thick portion 31 (projecting portion 33) is provided in the central portion of the base portion 12 in the X-axis direction. Thereby, it can suppress that the thick part 31 vibrates with the bending vibration which a pair of vibration arms 20 and 22 approach or separate mutually in a substantially plane.

  Further, the width W <b> 1 along the X-axis direction of the protruding portion 33 is smaller than the distance W <b> 2 between the pair of vibrating arms 20 and 21. Thereby, it can suppress that the thick part 31 vibrates with the bending vibration which a pair of vibrating arms 20 and 22 approach or separate mutually. Further, even if the protruding portion 33 is formed over the entire area in the Y-axis direction, the protruding portion 33 prevents the bending vibrations of the vibrating arms 20 and 22 from being hindered and unnecessary vibration modes from being increased. You can also.

The width W1 along the X-axis direction of the protruding portion 33 is not particularly limited as long as the area for installing the bonding member 35 can be secured, but it is preferable that W1 / W2 is 0.1 or more and 0.8 or less. Thereby, it is possible to prevent the protruding portion 33 from inhibiting the bending vibration of the vibrating arms 20 and 22 and increasing an unnecessary vibration mode while securing an area for installing the bonding member 35.
The width W1 along the X-axis direction of the protrusion 33 may be larger than the distance W2 between the pair of vibrating arms 20 and 21. By doing so, the rigidity of the base 12 is increased, so that the deformation of the base 12 due to the bending vibration of the vibrating arms 20 and 22 is reduced, and the thermoelastic loss generated in the base 12 is reduced.

Moreover, in this embodiment, the thick part 31 (projection part 33) is formed over the whole region in the Y-axis direction. Thereby, the length along the Y-axis direction of the protrusion part 33 can be enlarged. Therefore, even if the width W1 along the X-axis direction of the protrusion 33 is reduced, an area for installing the bonding member 35 on the tip surface of the protrusion can be secured.
In addition, the plan view shape of the protruding portion 33 is a shape having a constricted portion in the middle in the Y-axis direction in the drawing, but is not limited to this. For example, the X portion extends over the entire region in the Y-axis direction. The shape may have a constant width along the axial direction, may have a shape that protrudes outward in the middle of the Y-axis direction, or may be divided in the middle of the Y-axis direction. It may be a shape.

  The vibrating arms 20 and 22 are provided side by side in the X-axis direction, and each extend from the base 12 in the + Y-axis direction. In addition, the vibrating arms 20 and 22 are respectively provided with weight portions 24 and 26 having a width of 1.5 times or more of the width of the vibrating arms 20 and 22 in the X-axis direction at the tip thereof. Hammer head) is formed. By providing the weight portions 24 and 26, it is possible to reduce the size of the resonator element 1 and to reduce the frequency of flexural vibration of the vibrating arms 20 and 22. In the present embodiment, the weight portions 24 and 26 have a shape in which the width in the X-axis direction is 1.5 times or more the minimum width in the X-axis direction of the vibrating arms 20 and 22, but is not limited thereto. Instead, the weights 24 and 26 may be thicker in the Z-axis direction than the thickness of the vibrating arms 20 and 22 in the Z-axis direction. By making the protrusion in the Z-axis direction the same as the meat part 31 and the same thickness in the Z-axis direction, the machining process can be simplified. In particular, the XY plane can be further reduced in size by using the weight portions 24 and 26 having both of them.

A pair of projecting portions 25 projecting in the −Y axis direction is provided at both ends of the weight portion 24 in the X axis direction. Each of the protrusions 25 is separated in the X-axis direction with respect to portions (arm portions) of the vibrating arms 20 and 22 which are bent and deformed. Similarly, a pair of projecting portions 27 projecting in the −Y axis direction are provided at both ends of the weight portion 26 in the X axis direction. Such protrusions 25 and 27 can increase the mass of the weights 24 and 26 while shortening the length Lb of the vibrating arms 20 and 22. In addition, it is possible to ensure as long as possible the length of the portions (arm portions) of the vibrating arms 20 and 22 that are bent and deformed.
Note that the weight portions 24 and 26 may have a plurality of widths in the X-axis direction as necessary, or may be omitted.

Further, the vibrating arm 20 is formed with a bottomed groove 28a that opens to one main surface 20a and a bottomed groove 28b that opens to the other main surface 20b. Similarly, the vibrating arm 22 is formed with a bottomed groove 30a that opens to one main surface 22a and a bottomed groove 30b that opens to the other main surface 22b.
These grooves 28a, 28b, 30a, 30b extend along the Y-axis direction and have the same shape. By forming such grooves 28a, 28b, 30a, 30b, it becomes difficult for heat generated by bending vibration to diffuse (heat conduction), and the bending vibration frequency (mechanical bending vibration frequency) f is less than the thermal relaxation frequency f0. In the adiabatic region that is a large region (f> f0), thermoelastic loss can be suppressed. The grooves 28a, 28b, 30a, and 30b may be provided as necessary and may be omitted.

In addition, the depth of the grooves 28 a, 28 b, 30 a, 30 b is preferably 30% or more and less than 50% with respect to the thickness of the resonator element 1. Thereby, the above-described thermoelastic loss is reduced, and the CI value can be reduced by increasing the region sandwiched between the excitation electrodes 41a and 41b.
Further, the width of each side wall, which is an outer portion in the width direction with respect to the grooves 28a, 28b, 30a, 30b of the vibrating arms 20, 22, that is, the width of the vibrating arms 20, 22, the grooves 28a, 28b, 30a, It is preferable that half of the width obtained by subtracting the width of 30b be 20 μm or less. As a result, the electric field generated in the region sandwiched between the excitation electrodes 41a and 41b becomes strong, and the CI value can be reduced. Furthermore, the width of the side wall is more preferably in the range of 5 μm or more and 9 μm or less where the thermoelastic loss is most reduced.

As shown in FIG. 2, excitation electrodes 41 a and excitation electrodes 41 b are formed on the vibrating arms 20 and 22. Specifically, the excitation electrode 41 a is formed on the inner surfaces of the grooves 28 a and 28 b and both side surfaces of the vibrating arm 22, and the excitation electrode 41 b is formed on the inner surfaces of the grooves 30 a and 30 b and both side surfaces of the vibrating arm 20. .
When an alternating voltage is applied between the excitation electrode 41a and the excitation electrode 41b, the vibrating arms 20 and 22 vibrate at a predetermined frequency in the in-plane direction (XY plane direction) so as to repeatedly approach and separate from each other.

  The constituent materials of the excitation electrodes 41a and 41b are not particularly limited, but for example, gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (Cr), chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium (Zr) ) Or a conductive material such as indium tin oxide (ITO).

  In such a resonator element 1, the X anti-phase mode in which the two vibrating arms 20 and 22 vibrate away from or approach each other along the X-axis direction is different in resonance frequency from the other modes and all of its higher-order modes. The shape is designed as follows. Thereby, there is no possibility that the X anti-phase mode is strongly coupled to other modes, and it is possible to obtain a stable resonator element 1 having a small characteristic variation that does not deteriorate the frequency temperature characteristics and increase the vibration leakage due to the coupling.

  In addition, as another mode of the X reversed phase mode, the two vibrating arms 20 and 22 vibrate in the same direction along the Z axis, the Z common mode, and the two vibrating arms 20 and 22 move along the Z axis direction. Z anti-phase mode that vibrates in the separating direction, two vibrating arms 20 and 22 oscillate in the same direction along the X-axis direction, and two oscillating arms 20 and 22 each follow the Y-axis direction There is a torsional in-phase mode in which the rotational axis is rotated and deformed in the same direction around the central axis, and a torsional anti-phase mode in which the two vibrating arms 20 and 22 are rotationally deformed in the opposite directions around the central axis along the Y-axis direction.

(Principle of vibration leakage suppression by the reduced width part)
Here, based on FIGS. 5 to 10, the principle of suppression of vibration leakage by the reduced width portions 16 and 18 will be described.
5A is a plan view schematically showing a conventional resonator element, FIG. 5B is a plan view showing a simplified model of the resonator element shown in FIG. 5A, and FIG. FIG. 6A to FIG. 6D are views for explaining the operation of each part (first to fourth connecting parts) of the base part. 7A is a plan view schematically showing the resonator element shown in FIG. 1 (a diagram considering only the reduced width portion on the vibrating arm side), and FIG. 7B is a plan view of FIG. FIG. 8 is a plan view for explaining the principle of vibration leakage suppression of the vibrating piece shown in FIG. 7, and FIGS. 8A to 8D are views of the base part. It is a figure explaining the effect | action of each part (1st-4th connection part). FIG. 9A is a plan view schematically showing the resonator element shown in FIG. 1 (a view considering only the reduced width portion on the side opposite to the vibrating arm), and FIG. 10 is a plan view illustrating a simplified model of the resonator element shown in FIG. 10, FIG. 10 is a plan view illustrating the principle of suppression of dynamic leakage of the resonator element shown in FIG. 9, and FIGS. It is a figure explaining the effect | action of each part (1st-4th connection part).

<Vibration leakage of conventional resonator element>
First, vibration leakage in a conventional resonator element will be described.
As shown in FIG. 5 (b), the conventional resonator element having no reduced width portion at the base as shown in FIG. 5 (a) is a pseudo rigid body rotation in which elastic rods 151 are connected in the radial direction. It can be regarded as a model in which the body 154 and the pseudo rigid rotating body 156 to which the elastic rod 152 extends in the radial direction are connected via a simplified base 153.

In this model, the rotating body 154 has a predetermined radius R that rotates about the rotating shaft 155. Similarly, the rotating body 156 has a predetermined radius R that rotates about the rotating shaft 157.
As shown in FIG. 6, as a representative portion (connecting portion) for connecting the rotating bodies 154 and 156 of the base portion 153 of such a model, it is provided on the elastic rods 151 and 152 side with respect to the rotating shafts 155 and 157. The first connecting portion 158, the second connecting portion 159 provided between the rotating shafts 155 and 157, and the third connecting portion 160 provided on the opposite side of the rotating shafts 155 and 157 from the elastic rods 151 and 152. The fourth connecting portion 161 provided on the opposite side of the elastic rods 151 and 152 from the third connecting portion 160 is considered.

  When the two vibrating arms 20 and 22 are bent and deformed so as to be separated from each other, it is considered that the elastic bars 151 and 152 are bent and deformed so as to be separated from each other. In this case, a vortex of a displacement vector is formed at a predetermined location in the direction opposite to the tip direction of the vibrating arms 20 and 22 from the vicinity of the roots of the vibrating arms 20 and 22. The center of the vortex is often near the base of the vibrating arms 20 and 22 including the base 12X, but is formed in a virtual space that does not belong to the region of the vibrating arms 20 and 22 or the base 12X. There is also.

Here, for convenience of explanation, it is assumed that the center of this vortex belongs to the region of the base portion 12X, and the distance from the elastic rods 151 and 152 is equal, and the center of this vortex is the rotation axis in FIG. 155, 157.
The displacement in the tangential direction of the outer periphery of the pseudo rigid rotating bodies 154, 156 having the rotation axes 155, 157 as the centers of rotation and the radius R is the largest on the tip direction side of the elastic bars 151, 152, The elastic rods 151 and 152 are the smallest on the side opposite to the tip direction. For this reason, in the above, it is expressed as a “pseudo” rigid body.

As shown in FIG. 6A, when the elastic rods 151 and 152 are bent and deformed so as to be separated from each other, the first connecting portion 158 is stretched strongly by the rotational motion of the rotating bodies 154 and 156, and the elastic rods 151 and 152 It moves small in the direction of the tip of 152.
In this case, as shown in FIG. 6B, the second connecting portion 159 similarly moves in the distal direction of the elastic rods 151 and 152 while being extended by the rotational motion of the rotating bodies 154 and 156.

  Further, in this case, as shown in FIG. 6C, the third connecting portion 160 moves in the distal direction of the elastic bars 151 and 152 while being compressed by the rotational motion of the rotating bodies 154 and 156. At this time, due to the compressive force, the central periphery in the length direction of the third connecting portion 160 (the direction in which the elastic rods 151 and 152 are arranged) is the tip direction of the elastic rods 151 and 152 or the elastic rods 151 and 152. It has the potential to be deformed in either direction opposite to the tip direction.

  Further, in this case, as shown in FIG. 6D, the fourth connecting portion 161 has a radius R ′ larger than the radius R, and is a pseudo rigid body having the rotation axes 155 and 157 as the centers of rotation. If the rotating bodies 162 and 163 are newly considered, like the third connecting portion 160 described above, the rotating bodies 162 and 163 move small in the direction of the distal ends of the elastic bars 151 and 152 while being compressed by the rotational motion of the rotating bodies 162 and 163. At this time, due to the compressive force, the central periphery in the length direction of the fourth connecting portion 161 is either the tip direction of the elastic rods 151, 152 or the direction opposite to the tip direction of the elastic rods 151, 152. Has the potential to deform.

Here, as described above, since all of the first to fourth connecting portions 158, 159, 160, 161 move toward the distal ends of the elastic rods 151, 152, this movement and the above-described potential force combine, The four connecting portions 160 and 161 are deformed so as to be displaced toward the distal ends of the elastic rods 151 and 152.
For this reason, when the elastic bars 151 and 152 are bent and deformed so as to be separated from each other, the displacement of the base 153 in the direction connecting the rotation shaft 155 and the rotation shaft 157 is the first connection portion 158 and the second connection portion. The displacement due to the extension of the portion 159 and the displacement due to the compression of the third connecting portion 160 and the fourth connecting portion 161 act so as to cancel each other.

However, regarding the displacement of the base 153 in the length direction of the elastic rods 151 and 152, all of the first to fourth connecting portions 158, 159, 160 and 161 move (displace) in the distal direction of the elastic rods 151 and 152. The third and fourth connecting portions 160 and 161 are deformed so as to be displaced in the distal direction of the elastic rods 151 and 512. Therefore, vibration due to these movements and deformations occurs in the base 153.
For this reason, when a fixed portion is set in the base portion 153, vibration caused by displacement or deformation of the elastic rods 151 and 152 in the distal direction leaks to the outside through the fixed portion. This is a vibration leakage, and the Q value is degraded by an amount corresponding to the energy of the leaked vibration.

<Operation of the reduced width portion provided on the vibrating arm side>
Next, the operation of the reduced width portion 16 will be described.
As shown in FIG. 7B, the resonator element according to the present embodiment having the base 12 provided with the reduced width portion 16 on the vibrating arms 20 and 22 side as shown in FIG. Are connected via a simplified base 165 to a pseudo-rigid rotator 154 connected in a radial direction and a pseudo-rigid rotator 156 connected to an elastic rod 152 in a radial direction. Can be regarded as a model.

In this model, the rotating body 154 has a predetermined radius R that rotates about the rotating shaft 155. Similarly, the rotating body 156 has a predetermined radius R that rotates about the rotating shaft 157.
As a representative portion (connecting portion) for connecting the rotating bodies 154 and 156 in the base portion 165 of such a model, as shown in FIG. 8, it is provided on the elastic rods 151 and 152 side with respect to the rotating shafts 155 and 157. The first connecting portion 158, the second connecting portion 159 provided between the rotating shafts 155 and 157, and the third connecting portion 160 provided on the opposite side of the rotating shafts 155 and 157 from the elastic rods 151 and 152. The fourth connecting portion 166 provided on the distal end side of the elastic rods 151 and 152 with respect to the first connecting portion 158 is considered.

  When the two vibrating arms 20 and 22 are bent and deformed so as to approach each other, it is considered that the elastic bars 151 and 152 are bent and deformed so as to approach each other. In this case, a vortex of a displacement vector is formed at a predetermined location in the direction opposite to the tip direction of the vibrating arms 20 and 22 from the vicinity of the roots of the vibrating arms 20 and 22. The center of the vortex is often near the base of the vibrating arms 20 and 22 including the base 12, but is formed in a virtual space that does not belong to the area of the vibrating arms 20 and 22 or the base 12. There is also.

Here, for convenience of explanation, it is assumed that the center of the vortex belongs to the region of the base 12 and the distances from the elastic bars 151 and 152 are equal, and the center of the vortex is the rotation axis in FIG. 155, 157.
The displacement in the tangential direction of the outer periphery of the pseudo rigid rotating bodies 154, 156 having the rotation axes 155, 157 as the centers of rotation and the radius R is the largest on the tip direction side of the elastic bars 151, 152, The elastic rods 151 and 152 are the smallest on the side opposite to the tip direction. In this case, the direction of displacement is opposite to the case where the two vibrating arms 20 and 22 are separated from each other.

As shown in FIG. 8A, when the elastic bars 151 and 152 are bent and deformed so as to approach each other, the first connecting portion 158 is strongly compressed by the rotational motion of the rotating bodies 154 and 156, while being elastically compressed. It moves slightly in the direction opposite to the tip direction of 152. At this time, due to the compressive force, the central periphery in the length direction of the first connecting portion 158 is either the tip direction of the elastic rods 151, 152 or the direction opposite to the tip direction of the elastic rods 151, 152. Has the potential to deform.
In this case, as shown in FIG. 8B, the second connecting portion 159 similarly moves in the direction opposite to the tip direction of the elastic rods 151 and 152 while being extended by the rotational movement of the rotating bodies 154 and 156. To do.

Further, in this case, as shown in FIG. 8C, the third connecting portion 160 moves in the direction opposite to the distal end direction of the elastic rods 151 and 152 while being extended by the rotational motion of the rotating bodies 154 and 156. To do.
Further, in this case, as shown in FIG. 8D, the fourth connecting portion 166 is compressed by the rotational motion of the rotating bodies 154 and 156, but is hardly deformed due to the arch shape, and temporarily deformed. Even if it does, it deform | transforms so that the center periphery of the length direction of the 4th connection part 166 may displace to the front-end | tip direction of the elastic rods 151 and 152. FIG.

Therefore, when the elastic rods 151 and 152 are bent and deformed so as to approach each other, the displacement of the base 165 in the direction connecting the rotation shaft 155 and the rotation shaft 157 is the first connection portion 158 and the fourth connection portion. The displacement due to the compression of the portion 166 and the displacement due to the extension of the second connecting portion 159 and the third connecting portion 160 act so as to cancel each other.
And about the displacement of the base 165 in the length direction of the elastic rods 151 and 152, the first to third connecting portions 158, 159 and 160 are displaced in the direction opposite to the tip direction of the elastic rods 151 and 152. The fourth connecting portion 166 is difficult to be deformed and can be offset by deforming the fourth connecting portion 166 so that the vicinity of the center in the length direction is displaced in the distal direction of the elastic rods 151 and 152. .
Therefore, even if a fixed portion is set in the base portion 165, vibration leaking to the outside through the fixed portion, that is, vibration leakage can be reduced, and as a result, the energy of vibration leaking to the outside is reduced. Can be increased.

<Operation of the reduced width portion provided on the side opposite to the vibrating arm>
Next, the operation of the reduced width portion 18 will be described.
As shown in FIG. 9B, the resonator element according to the present embodiment having the base 12 provided with the reduced width portion 18 on the opposite side to the vibrating arms 20 and 22 as shown in FIG. A pseudo rigid body 154 having a rod 151 extending in the radial direction and connected thereto and a pseudo rigid body 156 having an elastic rod 152 extending in the radial direction via a simplified base 168. Can be regarded as a connected model.
In this model, the rotating body 154 has a predetermined radius R that rotates about the rotating shaft 155. Similarly, the rotating body 156 has a predetermined radius R that rotates about the rotating shaft 157.

  As a representative portion (connecting portion) for connecting the rotating bodies 154 and 156 in the base portion 168 of such a model, as shown in FIG. 10, it is provided closer to the elastic rods 151 and 152 than the rotating shafts 155 and 157. The first connecting portion 158, the second connecting portion 159 provided between the rotating shafts 155 and 157, and the third connecting portion 160 provided on the opposite side of the rotating shafts 155 and 157 from the elastic rods 151 and 152. The fourth connecting portion 169 provided on the opposite side of the distal end direction of the elastic rods 151 and 152 from the third connecting portion 160 is considered.

  When the two vibrating arms 20 and 22 are bent and deformed so as to be separated from each other, it is considered that the elastic bars 151 and 152 are bent and deformed so as to be separated from each other. In this case, a vortex of a displacement vector is formed at a predetermined location in the direction opposite to the tip direction of the vibrating arms 20 and 22 from the vicinity of the roots of the vibrating arms 20 and 21. The center of the vortex is often near the base of the vibrating arms 20 and 22 including the base 12, but is formed in a virtual space that does not belong to the area of the vibrating arms 20 and 22 or the base 12. There is also.

  Here, for convenience of explanation, it is assumed that the center of the vortex belongs to the region of the base 12 and the distances from the elastic bars 151 and 152 are equal, and the center of the vortex is the rotation axis in FIG. 155, 157. The displacement in the tangential direction of the outer periphery of the pseudo rigid rotating bodies 154, 156 having the rotation axes 155, 157 as the centers of rotation and the radius R is the largest on the tip direction side of the elastic bars 151, 152, The elastic rods 151 and 152 are the smallest on the side opposite to the tip direction.

As shown in FIG. 10A, when the elastic rods 151 and 152 are bent and deformed so as to be separated from each other, the first connecting portion 158 is stretched strongly by the rotational motion of the rotating bodies 154 and 156, while being elastically stretched. It moves small in the direction of the front end side of 152.
In this case, as shown in FIG. 10B, the second connecting portion 159 similarly moves in the direction toward the distal end side of the elastic rods 151 and 152 while being extended by the rotational motion of the rotating bodies 154 and 156.

Further, in this case, as shown in FIG. 10C, the third connecting portion 160 moves in the direction toward the distal end side of the elastic rods 151 and 152 while being compressed by the rotational motion of the rotating bodies 154 and 156. At this time, the central periphery in the length direction of the third connecting portion 160 is deformed either in the direction of the distal end side of the elastic rods 151, 152 or in the direction opposite to the distal end direction of the elastic rods 151, 152. Has the potential to try.
Further, in this case, as shown in FIG. 10 (d), the fourth connecting portion 169 is compressed by the rotational motion of the rotating bodies 154 and 156, but is hardly deformed due to the arch shape, and temporarily deformed. Even if it does, it deform | transforms so that the center periphery of the length direction of the 4th connection part 169 may displace to the direction opposite to the front-end | tip direction of the elastic rods 151 and 152. FIG.

Therefore, when the elastic rods 151 and 152 are bent and deformed so as to be separated from each other, the displacement of the base 168 in the direction connecting the rotation shaft 155 and the rotation shaft 157 is the first connection portion 158 and the second connection portion. The displacement due to the extension of the portion 159 and the displacement due to the compression of the third connecting portion 160 and the fourth connecting portion 169 act so as to cancel each other.
And about the displacement of the base part 168 in the length direction of the elastic rods 151 and 152, it is the fourth connection part 169 that the first to third connection parts 158, 159 and 160 are displaced in the distal direction of the elastic bars 151 and 152. The deformation of the fourth connecting portion 169 can be offset by being deformed so that the vicinity of the center in the length direction of the fourth connecting portion 169 is displaced in the direction opposite to the tip direction of the elastic rods 151 and 152.
Therefore, even if a fixed portion is set in the base portion 168, vibration leaking to the outside through the fixed portion, that is, vibration leakage can be reduced, and as a result, the energy of vibration leaking to the outside is reduced. Can be increased.

As described above, vibration leakage can be suppressed by the reduced width portions 16 and 18.
In addition to the effect of suppressing vibration leakage due to the reduced width portions 16 and 18 as described above, the vibration piece 1 can exhibit the effect of suppressing vibration leakage due to the thick portion 31 as described above. In addition, as a result of calculating | requiring the Q value which considered only the vibration leakage about each of the vibration piece 1 of this embodiment, and the vibration piece of the structure similar to the vibration piece 1 except the protrusion part 33 being omitted, this thickness was obtained. The effect of suppressing vibration leakage by the meat portion 31 (projecting portion 33) has been confirmed.

Second Embodiment
Next, a second embodiment of the present invention will be described.
FIG. 11 is a back view showing a resonator element according to the second embodiment of the invention, and FIG. 12 is a cross-sectional view taken along the line BB in FIG.
Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The second embodiment is substantially the same as the first embodiment except that the configuration (shape) of the thick portion is different. In FIG. 11 and FIG. 12, the same reference numerals are given to the same configurations as those in the above-described embodiment.

A base 12A included in the resonator element 1A illustrated in FIG. 11 includes a thick portion 31A as illustrated in FIG. The thickness T1 along the Z-axis direction of the thick portion 31A is thicker than the thickness T2 of the ends of the vibrating arms 20 and 22 on the base 12A side.
The thick portion 31A has a protruding portion 33A that protrudes from the portion 32 in the −Z-axis direction.
The protrusion 33A protrudes in the −Z-axis direction from the ends of the vibrating arms 20 and 22 on the base 12A side. Thereby, for example, by using the tip surface (end surface on the −Z axis direction side) of the projecting portion 33A as a fixing portion that fixes the package, the bending vibration of the pair of vibrating arms 20 and 22 approaching or separating from each other occurs. Thus, the fixed portion can be moved away from the region where the base portion 12A vibrates. 11 and 12, one joining member 35 for fixing the protruding portion 33A to the package is shown. The fixing of the projecting portion 33A to the package will be described in detail later together with the description of the second example of the vibrator to be described later.

The thick portion 31A (projecting portion 33A) is provided at the center of the base portion 12A in the X-axis direction and the Y-axis direction.
Further, the length of the protruding portion 33A along the Y-axis direction is shorter than the length of the base portion 12A along the Y-axis direction.
In addition, although the planar view shape of 33 A of protrusion parts is a regular hexagon, it is not limited to this, For example, other polygons, such as circular, an ellipse, a triangle, a quadrangle, and a pentagon, may be sufficient.
Even with the resonator element 1A according to the second embodiment as described above, even if the size is reduced, vibration leakage can be suppressed and the CI value can be suppressed low.

<Third Embodiment>
Next, a third embodiment of the present invention will be described.
13 is a plan view showing a resonator element according to the third embodiment of the invention, FIG. 14 is a back view of the resonator element shown in FIG. 13, and FIG. 15 is a sectional view taken along line BB in FIG. .
Hereinafter, the third embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The third embodiment is substantially the same as the first embodiment except that the configuration (shape) of the thick-walled portion is different. In FIGS. 13 to 15, the same reference numerals are given to the same configurations as those of the above-described embodiment.

The base 12B included in the resonator element 1B illustrated in FIGS. 13 and 14 includes a thick portion 31B as illustrated in FIG. The thickness T1 along the Z-axis direction of the thick portion 31B is thicker than the thickness T2 of the ends of the vibrating arms 20 and 22 on the base 12B side.
The thick portion 31A has a protruding portion 33A protruding from the portion 32 in the −Z-axis direction and a protrusion 34 protruding from the portion 32 in the + Z-axis direction.

As described above, the protrusions 33A and 34 are provided on both sides of the thick portion 31B in the Z-axis direction, so that the length of the base portion 12B along the Y-axis direction and the X-axis direction is reduced. The mass of 12B can be increased. Therefore, it is possible to suppress the vibration of the base 12B due to the bending vibration of the pair of vibrating arms 20 and 22 approaching or separating from each other while reducing the size of the vibrating piece 1B.
A thickness T4 (height) along the Z-axis direction of the projecting portion 34 is determined according to the dimensions of the vibrating arms 20 and 22 and is not particularly limited, but with respect to the thickness T2 of the vibrating arms 20 and 22 It is preferable that it is 0.1 to 1.5. Thereby, the mass of base 12B can be enlarged, aiming at size reduction of base 12B.

In the present embodiment, the protruding portion 34 is formed integrally with the portion 32. That is, the part 32 and the protrusion part 34 are formed from the same substrate. Therefore, the mechanical strength of the thick part 31B can be made relatively easy.
The protrusion 34 is provided at the center of the base 12B in the X-axis direction.
Further, the width of the protruding portion 34 along the X-axis direction is smaller than the distance W <b> 2 between the pair of vibrating arms 20 and 21. Thereby, even if the protrusion 34 is formed over the entire area in the Y-axis direction, the protrusion 34 prevents the bending vibration of the vibrating arms 20 and 22 from being obstructed and an unnecessary vibration mode from being increased. You can also
Further, the width along the X-axis direction of the protrusion 34 is equal to the width along the X-axis direction of the protrusion 33A. The width of the protrusion 34 along the X-axis direction may be smaller than the width of the protrusion 33A along the X-axis direction, or may be larger than the width of the protrusion 33A along the X-axis direction. Good.

The width along the X-axis direction of the protrusion 34 is not particularly limited, but is preferably 0.1 or more and 0.8 or less with respect to the distance W2 between the pair of vibrating arms 20 and 21. Thereby, it can also prevent that the protrusion part 33 inhibits the bending vibration of the vibrating arms 20 and 22 and an unnecessary vibration mode becomes large.
The width of the protrusion 34 along the X-axis direction may be larger than the distance W2 between the pair of vibrating arms 20 and 21. By doing so, the rigidity of the base 12B is increased, so that the deformation of the base 12B due to the bending vibration of the vibrating arms 20 and 22 is reduced, and the thermoelastic loss generated in the base 12B is reduced.
Moreover, in this embodiment, the protrusion part 34 is formed over the whole region in the Y-axis direction. Thereby, even if the width along the X-axis direction of the thick portion 31B is small, the mass of the base portion 12B can be effectively increased.

In addition, the plan view shape of the protruding portion 34 has a constant width along the X-axis direction over the entire region in the Y-axis direction in the drawing, but is not limited to this, for example, in the middle in the Y-axis direction. It may be a shape having a constricted portion inside, a shape having a portion protruding outward in the middle of the Y-axis direction, or a shape divided in the middle of the Y-axis direction. The shape may be the same as or similar to the planar view shape of the protruding portion 33A.
Even with the resonator element 1B according to the third embodiment as described above, even if the size is reduced, vibration leakage can be suppressed and the CI value can be suppressed low.

<Fourth embodiment>
Next, a fourth embodiment of the present invention will be described.
FIG. 16 is a cross-sectional view showing a resonator element according to the fourth embodiment of the invention.
Hereinafter, the fourth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The fourth embodiment is substantially the same as the first embodiment except that the configuration of the thick portion is different. In FIG. 16, the same reference numerals are given to the same components as those in the above-described embodiment.

A base 12C included in the resonator element 1C illustrated in FIG. 16 includes a thick portion 31C. The thickness T1 along the Z-axis direction of the thick portion 31C is thicker than the thickness T2 of the ends of the vibrating arms 20 and 22 on the base 12C side.
The thick portion 31C has a protruding portion 33C (second portion) protruding in the −Z-axis direction from the portion 32 (first portion).

  The protrusion 33C is joined to the surface of the portion 32 on the −Z axis direction side. This eliminates the need to thin the quartz substrate. Therefore, the thick portion 31C can be formed relatively easily while making the dimensional accuracy of the vibrating arms 20 and 22 excellent. The protrusion 33C may be bonded to the portion 32 before or after the step of forming the vibrating arms 20 and 22 and the portion 32 by etching the quartz substrate.

The constituent material of the projecting portion 33C is not particularly limited. However, when electrical conduction is achieved through the fixed portion, an insulating material such as quartz, silicon, a resin material, a ceramic material, a glass material, or the like is used. Is preferred.
The constituent material of the protrusion 33C may be the same as the constituent material (quartz) of the portion 32, but the characteristics of the protrusion 33C can be adjusted by making it different from the constituent material of the portion 32.
Moreover, it is preferable that the Young's modulus (longitudinal elastic modulus) of the protrusion 33C is lower than the Young's modulus of the portion 32 (quartz). Thereby, it can suppress that a vibration leaks outside from the part 32 via the protrusion part 33C.

Moreover, it is preferable that the thermal expansion coefficient of the constituent material of the protrusion 33 </ b> C is in a range of 0.5 to 2 times the thermal expansion coefficient of the constituent material of the portion 32. By doing so, the thermal stress generated at the interface between the projecting portion 33C and the portion 32 does not increase, so that stable vibration characteristics can be obtained.
The method for joining the protruding portion 33C and the portion 32 differs depending on the constituent material of the protruding portion 33C and the portion 32 and is not particularly limited. For example, a bonding method using an adhesive, anodic bonding, direct bonding, or the like can be used. .
Even with the resonator element 1 </ b> C according to the fourth embodiment as described above, even if the size is reduced, vibration leakage can be suppressed and the CI value can be suppressed low.

<Fifth Embodiment>
Next, a fifth embodiment of the present invention will be described.
FIG. 17 is a plan view showing a resonator element according to the fifth embodiment of the invention.
Hereinafter, the fifth embodiment will be described with a focus on differences from the first embodiment described above, and descriptions of similar matters will be omitted.
The fifth embodiment is substantially the same as the first embodiment except that the configuration (planar shape) of the reduced width portion is different. In FIG. 17, the same components as those in the first embodiment described above are denoted by the same reference numerals. Moreover, in FIG. 17, the shape is illustrated in a simplified manner for convenience of explanation.

The base 12D provided in the resonator element 1D illustrated in FIG. 17 is obtained by omitting the reduced width portion 18 in the resonator element 1 of the first embodiment described above. That is, the base portion 12 </ b> D has a main body portion 14 and a reduced width portion 16 located on the + Y axis direction side with respect to the main body portion 14.
Even with the resonator element 1D according to the fifth embodiment as described above, even when the size is reduced, vibration leakage can be suppressed and the CI value can be suppressed low.

<Sixth Embodiment>
Next, a sixth embodiment of the present invention will be described.
FIG. 18 is a plan view showing a resonator element according to the sixth embodiment of the invention.
Hereinafter, the sixth embodiment will be described with a focus on differences from the first embodiment described above, and descriptions of similar matters will be omitted.
The sixth embodiment is substantially the same as the first embodiment except that the configuration (planar shape) of the reduced width portion is different. In FIG. 18, the same components as those in the first embodiment described above are denoted by the same reference numerals. Moreover, in FIG. 18, the shape is simplified and shown for convenience of explanation.

The base 12E provided in the resonator element 1E shown in FIG. 18 is obtained by omitting the reduced width portion 16 in the resonator element 1 of the first embodiment described above. That is, the base portion 12E includes the main body portion 14 and the reduced width portion 18 located on the −Y axis direction side with respect to the main body portion 14.
Even with the resonator element 1E according to the sixth embodiment as described above, even if the size is reduced, vibration leakage can be suppressed and the CI value can be suppressed low.

<Seventh embodiment>
Next, a seventh embodiment of the present invention will be described.
FIG. 19 is a plan view showing a resonator element according to the seventh embodiment of the invention.
Hereinafter, the seventh embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.
The seventh embodiment is substantially the same as the first embodiment except that the configuration (planar shape) of the reduced width portion is different. In FIG. 19, the same components as those in the first embodiment described above are denoted by the same reference numerals. Moreover, in FIG. 19, for convenience of explanation, the shape is simplified and illustrated.

  In the base portion 12F provided in the resonator element 1F shown in FIG. The outline of the reduced width portion 16F is composed of linear inclined portions 17b and 17c that are inclined with respect to both the X-axis and the Y-axis in plan view. One ends (ends on the + Y-axis direction side) of these inclined portions 17b and 17c are connected on a virtual center line Y1 parallel to the Y-axis. Therefore, the reduced width portion 16F has a corner at the tip and is sharp. By forming the reduced width portion 16F in such a shape, vibration leakage can be effectively suppressed and the reduced width portion of the reduced width portion can be suppressed in the same manner as the reduced width portion 16 of the first embodiment is curved. The configuration can be simplified.

Further, the length L3 along the Y-axis direction of the reduced width portion 16F is set according to the angle θ1 formed by the inclined portions 17b and 17c and the X axis in plan view. The angle θ is not particularly limited, but is preferably about 5 ° or more and 70 ° or less, for example.
In addition, the inclined portions 17b and 17c are preferably parallel to the crystal plane of the crystal. For example, the inclined portions 17b and 17c are preferably parallel to the crystal plane inclined by 30 ° or 60 ° with respect to the X axis of the crystal. As a result, when the inclined portions 17b and 17c are formed by wet etching the quartz substrate, variations in the shapes of the inclined portions 17b and 17c are reduced, and the vibrating piece 1F can obtain stable performance.
In the fourth embodiment, the same effect as that of the first embodiment described above can be obtained.

<Eighth Embodiment>
Next, an eighth embodiment of the present invention will be described.
FIG. 20 is a plan view showing a resonator element according to the eighth embodiment of the invention.
Hereinafter, the eighth embodiment will be described with a focus on differences from the first embodiment described above, and descriptions of the same matters will be omitted.
The eighth embodiment is substantially the same as the first embodiment except that the configuration (planar shape) of the reduced width portion is different. In FIG. 20, the same reference numerals are given to the same components as those in the first embodiment described above. In FIG. 20, the shape is simplified for convenience of explanation.

  In the base portion 12G included in the resonator element 1G illustrated in FIG. 20, the reduced width portion 18G is disposed on the −Y axis direction side with respect to the main body portion 14. The outline of the reduced width portion 18G is composed of linear inclined portions 19b and 19c that are inclined with respect to both the X axis and the Y axis in plan view. One ends (ends on the −Y axis direction side) of these inclined portions 19b and 19c are connected on a virtual center line Y1 parallel to the Y axis. For this reason, the reduced width portion 18G has a corner at the tip and has a pointed shape, thereby effectively preventing vibration leakage as the reduced width portion 18 of the first embodiment is curved. In addition, the configuration of the reduced width portion can be simplified.

Further, the length L4 along the Y-axis direction of the reduced width portion 18G is set according to the angle θ2 formed by the inclined portions 19b and 19c and the X axis in plan view. The angle θ2 is not particularly limited, but is preferably 5 ° or more and 70 ° or less, for example, from the viewpoint of suppressing excessive enlargement of the reduced width portion 18G, and is 10 ° or more and 50 ° or less. Is more preferable.
The inclined portions 19b and 19c are preferably parallel to the crystal plane of the quartz crystal. For example, the inclined portions 19b and 19c are preferably parallel to the crystal plane inclined by 30 ° or 60 ° with respect to the X axis of the crystal. As a result, when the inclined portions 19b and 19c are formed by wet etching the quartz substrate, variations in the shapes of the inclined portions 19b and 19c are reduced, and the vibrating piece 1G can obtain stable performance.
In the eighth embodiment, the same effect as that of the first embodiment described above can be obtained.

<Ninth Embodiment>
Next, a ninth embodiment of the present invention will be described.
FIG. 21 is a plan view showing a resonator element according to the ninth embodiment of the invention.
Hereinafter, the ninth embodiment will be described focusing on the differences from the first embodiment described above, and description of similar matters will be omitted.
The ninth embodiment is substantially the same as the first embodiment except that the configuration (planar shape) of the reduced width portion is different. In FIG. 21, the same components as those in the first embodiment described above are denoted by the same reference numerals. Further, in FIG. 21, the shape is simplified for convenience of explanation.

A base 12H included in the resonator element 1H illustrated in FIG. 21 is located on the main body 14, the reduced width portion 16F located on the + Y axis direction side with respect to the main body 14, and on the −Y axis direction side with respect to the main body 14. And a reduced width portion 18G. In other words, the base portion 12H of the present embodiment has two reduced width portions 16F and 18G that are arranged to face each other with the main body portion 14 interposed therebetween.
In the ninth embodiment, the same effect as that of the first embodiment described above can be obtained.

<Tenth Embodiment>
Next, a tenth embodiment of the present invention will be described.
FIG. 22 is a plan view showing a resonator element according to the tenth embodiment of the invention.
Hereinafter, the tenth embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.
The tenth embodiment is substantially the same as the first embodiment except that the configuration (shape) of the reduced width portion is different. In FIG. 22, the same components as those of the first embodiment described above are denoted by the same reference numerals. In FIG. 22, the shape is simplified for convenience of explanation.

A base portion 12I provided in the resonator element 1I illustrated in FIG. 22 includes a reduced width portion 16I disposed on the + Y axis direction side with respect to the main body portion.
The reduced width portion 16I is directed to the virtual center line Y1 in a plan view, and the width along the X-axis direction is gradually reduced as the distance from the center of the base portion 12 increases.
The contour of the reduced width portion 16I has a stepped shape having a plurality of steps in plan view.

Providing such a reduced width portion 16I also reduces vibration leakage and exhibits excellent vibration characteristics.
In addition, the reduced width part which has such a step-like outline may be provided at both ends in the Y-axis direction of the base, or may be provided only at the end on the −Y-axis direction side of the base. Also good.
In the tenth embodiment, the same effects as those of the first embodiment described above can be obtained.

(Eleventh embodiment)
Next, an eleventh embodiment of the present invention will be described.
FIG. 23A is a plan view showing a resonator element according to the eleventh embodiment of the present invention, FIG. 23B is a diagram showing a first modification of the resonator element shown in FIG. FIG. 23C is a diagram illustrating a second modification of the resonator element illustrated in FIG.

Hereinafter, the eleventh embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.
The eleventh embodiment is substantially the same as the first embodiment except that the configuration (shape) of the reduced width portion is different. In FIG. 23, the same reference numerals are given to the same components as those in the first embodiment described above. Further, in FIG. 23, the shape is simplified for convenience of explanation.

The base 12J included in the resonator element 1J illustrated in FIG. 23A and the base 12L included in the resonator element 1L illustrated in FIG. 23C are respectively disposed on the + Y-axis direction side with respect to the main body 14. A width portion 16J is provided.
The outline of the reduced width portion 16J is linear or curved inclined portions 17d and 17e inclined with respect to both the X axis and the Y axis in a plan view, and the + Y axis direction side of the inclined portions 17d and 17e. And a connecting portion 17f parallel to the X axis for connecting the ends of the two.

Also, the base 12K included in the resonator element 1K illustrated in FIG. 23C and the base 12L included in the resonator element 1L illustrated in FIG. 23C are disposed on the −Y axis direction side with respect to the main body 14, respectively. The reduced width portion 18K is provided.
The outline of the reduced width portion 18K is, in plan view, linear or curved inclined portions 19d and 19e inclined with respect to both the X axis and the Y axis, and the −Y axis direction of the inclined portions 19d and 19e. And a connecting portion 19f parallel to the X-axis for connecting the ends on the side.
By providing such reduced width portions 16J and 18K, vibration leakage can be reduced and excellent vibration characteristics can be exhibited.
Also in the eleventh embodiment, the same effects as those of the first embodiment described above can be obtained.

(Vibrator)
Next, a vibrator to which the resonator element according to the invention is applied will be described.
<First example>
24 is a diagram showing a schematic configuration of a first example of the vibrator according to the present invention (vibrator including the resonator element shown in FIG. 1). FIG. 24 (a) is a plan view, and FIG. 24 (b). FIG. 25 is a cross-sectional view taken along the line CC in FIG. In FIG. 24A, the lid member is not shown for convenience of explanation.

The vibrator 3 includes the resonator element 1 according to the first embodiment described above, a package body 50 formed in a rectangular box shape, and a lid member 59 made of glass, ceramic, metal, or the like. . Here, the package body 50 and the lid member 59 constitute a package for housing the resonator element 1.
As shown in FIG. 24B, the package body 50 is formed by stacking a first substrate 51, a second substrate 52, and mounting terminals 45.

A plurality of mounting terminals 45 are formed on the outer surface (the surface on the −Z axis direction side) of the first substrate 51. In addition, on the inner surface (the surface on the + Z-axis direction side) of the first substrate 51, connection electrodes 47a and 47b that are electrically connected to the plurality of mounting terminals 45 through unillustrated through electrodes and interlayer wirings are provided. It is exposed in the cavity 70.
The second substrate 52 is an annular body from which the central portion is removed. Thereby, the cavity 70 which accommodates the vibration piece 1 is formed. The cavity 70 is a substantially vacuum decompression space.

  As described above, the first substrate 51 and the second substrate 52 of the package main body 50 described above are made of an insulating material. Such a material is not particularly limited, and various ceramics such as oxide ceramics, nitride ceramics, and carbide ceramics can be used. In addition, each connection electrode provided in the package body 50, or a wiring pattern or an in-layer wiring pattern for electrically connecting them is generally made of a metal wiring material such as tungsten (W) or molybdenum (Mo). It is formed by screen printing on an insulating material and firing, followed by plating with nickel (Ni), gold (Au), or the like.

  The lid member 59 is preferably made of a light-transmitting material, such as borosilicate glass, and is hermetically sealed with the sealant 68 by being joined thereto. Thereby, after the lid of the package body 50 is sealed, a laser beam is irradiated from the outside to the vicinity of the tip of the resonator element 1 through the lid member 59, and a part of the electrode provided here is evaporated, thereby reducing the mass. It is possible to adjust the frequency. When such frequency adjustment is not performed, the lid member 59 can be formed of a metal material such as a Kovar alloy.

The resonator element 1 includes pad electrodes 43a and 43b formed on the base 12, a wiring 42a (extraction electrode) that electrically connects the excitation electrode 41a and the pad electrode 43a, and the excitation electrode 41b and the pad electrode 43b. And a wiring 42b (extraction electrode) that is electrically connected to each other.
By applying a drive voltage (drive signal) from the pad electrodes 43a and 43b to the excitation electrodes 41a and 41b through the wirings 42a and 42b, the two vibrating arms 20 and 22 repeatedly approach and separate from each other. Thus, it vibrates at a predetermined frequency in the in-plane direction (XY plane direction).
The constituent materials of the excitation electrodes 41a and 41b, the wirings 42a and 42b, and the pad electrodes 43a and 43b are not particularly limited, and are gold (Au), gold alloy, platinum (Pt), silver (Ag), silver A metal material such as an alloy, chromium (Cr), or a chromium alloy can be used.

Here, the pad electrodes 43 a and 43 b are provided on the distal end surface of the protruding portion 33 located on the −Z-axis direction side of the base portion 12.
The pad electrodes 43a and 43b and the connection electrodes 47a and 47b are joined to each other via the joining member 35 in a state where they are aligned. Thereby, the front end surface of the protrusion 33 is fixed to the package body 50 via the two joining members 35. As the bonding member 35, for example, bumps (metal bumps) made of metal, solder, or the like, a conductive adhesive, or the like can be used.

Further, the front end surface of the protruding portion 33 is fixed to the package body 50 via two joining members 35 arranged along the Y-axis direction. Thereby, the width | variety along the X-axis direction of the fixing | fixed part of the vibration piece 1 and the package main body 50 can be made small. Therefore, vibration leakage from the base 12 to the package body 50 can be suppressed.
According to the vibrator 3 described above, the vibrator 3 is small and has excellent vibration characteristics.

<Second example>
FIG. 25 is a diagram showing a schematic configuration of a second example of the vibrator of the present invention (vibrator provided with the resonator element shown in FIG. 11), in which FIG. 25 (a) is a plan view and FIG. 25 (b). FIG. 26 is a cross-sectional view taken along the line CC in FIG. In FIG. 25A, the lid member is not shown for convenience of explanation. Hereinafter, the vibrator according to the second example will be described focusing on the differences from the vibrator according to the first example described above, and description of the same matters will be omitted. In FIG. 25, the same reference numerals are assigned to the same configurations as those of the vibrator of the first example described above.

The vibrator 3A is composed of the resonator element 1A according to the second embodiment described above, a package main body 50A formed in a rectangular box shape, and a lid member 59. Here, the package main body 50A and the lid member 59 constitute a package for housing the resonator element 1A.
As shown in FIG. 25B, the package body 50A is formed by laminating a first substrate 51A, a second substrate 52, and mounting terminals 45.

A plurality of mounting terminals 45 are formed on the outer surface (the surface on the −Z axis direction side) of the first substrate 51A. Further, on the inner surface (the surface on the + Z-axis direction side) of the first substrate 51A, connection electrodes 47c and 47d that are electrically connected to the plurality of mounting terminals 45 via through electrodes and interlayer wirings (not shown) are provided. It is exposed in the cavity 70.
The resonator element 1A includes pad electrodes 43c and 43d formed on the front and back of the base portion 12A, a wiring 42a (extraction electrode) that electrically connects the excitation electrode 41a and the pad electrode 43c, and the excitation electrode 41b and the pad. It has wiring 42b (leading electrode) that is electrically connected to the electrode 43d.

Here, the pad electrode 43c is provided on the surface on the + Z-axis direction side of the base portion 12A, while the pad electrode 43d is provided on the distal end surface of the protruding portion 33 located on the −Z-axis direction side of the base portion 12. .
Then, the pad electrode 43d and the connection electrode 47d are joined via the joining member 35 in a state where they are aligned. Thereby, the front end surface of the protruding portion 33 </ b> A is fixed to the package main body 50 </ b> A via the one joining member 35. On the other hand, the pad electrode 43c and the connection electrode 47c are electrically connected via a wiring 37 formed of a bonding wire.

  In such a vibrator 3 </ b> A, a conductive adhesive or a metal bump is used as the bonding member 35, and the resonator element 1 </ b> A can be driven by a drive voltage (drive signal) input via the bonding member 35 and the wiring 37. it can. In addition, since there is one fixing portion between the vibrating piece 1A and the package body 50A, the area of the fixing portion between the vibrating piece 1A and the package body 50A can be reduced. Therefore, vibration leakage from the base 12A to the package body 50 can be suppressed.

(Oscillator)
Next, an oscillator to which the resonator element according to the invention is applied will be described.
FIG. 26 is a cross-sectional view showing a schematic configuration of an example of the oscillator of the present invention.
Hereinafter, the oscillator will be described with a focus on differences from the above-described vibrator, and description of similar matters will be omitted. In FIG. 26, the same reference numerals are given to the same configurations as those of the vibrator described above.

The oscillator 4 shown in FIG. 26 includes the resonator element 1 according to the first embodiment described above, the package body 60, an IC chip (chip component) 62 for driving the resonator element 1, glass, ceramic, metal, and the like. And a lid member 59.
The package body 60 is formed by stacking a first substrate 51, a second substrate 52, a third substrate 53, a fourth substrate 54, and mounting terminals 46.

Each of the third substrate 53 and the fourth substrate 54 is an annular body from which the central portion is removed. Thereby, a cavity 72 for accommodating the IC chip 62 is formed.
The third substrate 53 has a portion located inside the inner periphery of the fourth substrate 54, and a plurality of connection electrodes 48 are provided on the surface of the portion on the fourth substrate 54 side. ing.
A plurality of mounting terminals 46 are provided on the surface of the fourth substrate 54 opposite to the third substrate 53.
The plurality of mounting terminals 46 are electrically connected to the connection electrodes 47a and 47b and the plurality of connection electrodes 48 through a through electrode and interlayer wiring (not shown).

The IC chip 62 is accommodated in the cavity 72 and bonded to the first substrate 51 via a bonding member 63 such as a brazing material or an adhesive.
Further, the IC chip 62 is electrically connected to the plurality of connection electrodes 48 via the plurality of wirings 65 formed of bonding wires.
The cavity 72 is filled with a resin material 64, and the IC chip 62 is sealed with the resin material 64.
The IC chip 62 has a drive circuit (oscillation circuit) for controlling the driving of the resonator element 1. When the resonator element 1 is driven by the IC chip 62, a signal having a predetermined frequency can be taken out.
The oscillator 4 as described above is small and has excellent oscillation characteristics.

(Electronics)
Next, electronic devices to which the resonator element according to the invention is applied will be described with reference to FIGS.
FIG. 27 is a perspective view showing the configuration of a mobile (or notebook) personal computer which is a first example of the electronic apparatus of the invention.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 has a built-in oscillator 4 (vibrating piece 1).

FIG. 28 is a perspective view showing a configuration of a mobile phone (including PHS) as a second example of the electronic apparatus of the invention.
In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 has a built-in oscillator 4 (vibrating piece 1).

FIG. 29 is a perspective view showing a configuration of a digital camera which is a third example of the electronic apparatus of the invention. In this figure, connection with an external device is also simply shown.
Here, an ordinary camera sensitizes a silver salt photographic film with a light image of a subject, whereas a digital camera 1300 captures a light image of a subject by photoelectrically converting it with an image sensor such as a CCD (Charge Coupled Device). A signal (image signal) is generated.

  A display unit 100 is provided on the back surface of a case (body) 1302 in the digital camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 100 displays a subject as an electronic image. Function as. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

When the photographer confirms the subject image displayed on the display unit 100 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer (PC) 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital camera 1300 incorporates an oscillator 4 (vibration piece 1).
The electronic device as described above has excellent reliability.

  Note that the electronic apparatus including the resonator element according to the invention includes, for example, an ink jet type ejection device (for example, an ink jet) in addition to the personal computer (mobile personal computer) in FIG. 27, the mobile phone in FIG. 28, and the digital camera in FIG. Printers), personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments (for example, Vehicle, aircraft, ship instrumentation), hula It can be applied to a door simulator.

(Moving body)
FIG. 30 is a perspective view showing a configuration of an automobile which is an example of the moving body of the present invention.
In this figure, an oscillator 4 (vibration piece 1) is built in an electronic control unit 2108 that controls a tire 2109 and is mounted on a vehicle body 2107.
The automobile 2106 is equipped with a vibrator and an oscillator including the resonator element according to the invention. For example, a keyless entry, an immobilizer, a car navigation system, a car air conditioner, an antilock brake system (ABS), an air The present invention can be widely applied to electronic control units (ECUs) 2108 such as backs, tire pressure monitoring systems (TPMS), engine controls, battery monitors for hybrid vehicles and electric vehicles, and vehicle body attitude control systems.
According to the moving body as described above, it has excellent reliability.

As described above, the resonator element, the vibrator, the oscillator, the electronic device, and the moving body of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part is the same. It can be replaced with any configuration having the above function. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.
Further, a protrusion or a depression (notch) may be formed in the outline of the reduced width portion of the above-described embodiment.

Further, for example, in the above-described embodiment and the modification, the case where crystal is used as the constituent material of the vibration substrate of the vibrating piece has been described as an example, but a piezoelectric material other than crystal is used as the constituent material of the vibration substrate of the vibrating piece be able to. Examples of the vibration substrate of the resonator element include aluminum nitride (AlN), lithium niobate (LiNbO ₃ ), lithium tantalate (LiTaO ₃ ), lead zirconate titanate (PZT), and lithium tetraborate (Li ₂ B). ₄ O ₇ ), Langasite (La ₃ Ga ₅ SiO ₁₄ ) and other oxide substrates, and glass substrates are laminated with piezoelectric materials such as aluminum nitride and tantalum pentoxide (Ta ₂ O ₅ ). A laminated piezoelectric substrate or piezoelectric ceramics can be used.

In addition, the resonator element can be formed using a material other than the piezoelectric material. For example, the resonator element can be formed using a silicon semiconductor material or the like. Further, the vibration (drive) method of the resonator element is not limited to piezoelectric drive. For example, in the present invention, as a driving method of the resonator element, in addition to the piezoelectric driving type using a piezoelectric substrate, an electrostatic driving type using electrostatic force, a Lorentz driving type using magnetic force, or the like may be used. .
Needless to say, the resonator element according to the present invention can be applied not only to a gyro sensor but also to various sensors such as a pressure sensor, an acceleration sensor, and an inclination sensor.

DESCRIPTION OF SYMBOLS 1 ... Vibration piece 1A ... Vibration piece 1B ... Vibration piece 1C ... Vibration piece 1D ... Vibration piece 1E ... Vibration piece 1F ... Vibration piece 1G ... Vibration piece 1H ... Vibration piece 1I ... Vibration piece 1J ... Vibration piece 1K ... Vibration piece 1L ... Vibration piece 3 ... Vibrator 3A ... Vibrator 4 ... Oscillator 10 ... Vibration board 12 ... Base 12A ... Base 12B ... Base 12C ... Base 12D ... Base 12E ... Base 12F ... Base 12G ... Base 12H ... Base 12I ... Base 12J ... Base 12K ... Base 12L ... Base 12X ... Base 12f ... Base 14 ... Body 16 …… Reduced width portion 16F ...... Reduced width portion 16I ...... Reduced width portion 16J ...... Reduced width portion 17 ...... Curved portion 17a ... Curve 17b · · Inclined portion 17c · · · Inclined portion 17d · · · Inclined portion 17e · · · Slope 17f ··· Connection portion 18 ··· Reduced width portion 18G ··· Reduced width portion 18K ··· Reduced width portion 19 ··· Curve portion 19a · · · Curve 19b · · · Inclined portion 19c · · · Inclined portion 19d · · · Inclined portion 19e ··· Inclined portion 19f ··· Connection portion 20 ··· Vibrating arm 20a ··· Main surface 20b ··· Main surface 22 · · · Vibrating arm 22a ··· Main surface 22b · · · Main surface 24 · · · Weight portion 25 ··· Projection portion 26 ··· Weight part 27 ... Projection part 28a ... Groove 28b ... Groove 30a ... Groove 30b ... Groove 31 ... Thick part 31A ... Thick part 31B ... Thick part 31C ... Thick part 32 ... Part (first part) 33 ... Projection part 33A ... Projection part 33C ... Projection part (second part) 34 ... Projection part 35 ... Joining member 37 ... Wiring 41a ... Excitation electrode 41b ... Excitation electrode 42a ... wiring 42b ... wiring 43a ... Pad electrode 43b ... Pad electrode 43c ... Pad electrode 43d ... Pad electrode 45 ... Mounting terminal 46 ... Mounting terminal 47a ... Connection electrode 47b ... Connection electrode 47c ... Connection electrode 47d ... Connection electrode 48 ... Connection electrode 50 ... Package main body 50A ... Package main body 51 ... First board 51A ... First board 52 ... Second board 53 ... Third board 54 ... Fourth board 59 ... Lid member 60 ... Package body 62 ... IC chip (oscillation circuit) 63 ... Bonding member 64 ... Resin material 65 ... Wiring 68 ... Sealing material 70 ... Cavity 72 ... Cavity 100 ... Display Part 101 ... Vibration piece 112 ... Base part 114 ... Body part 120 ... Vibration arm 122 ... Vibration arm 128 ... Groove 130 ... Groove 151 ... Elastic bar 152 ... Elastic bar 153 ... Base 154 ... Rotating body 155 ... Rotating shaft 156 ... Rotating body 157 ... Rotating shaft 158 ... First connecting portion 159 ... Second connecting portion 160 ... Third Connecting part 161 ... 4th connecting part 162 ... Rotating body 165 ... Base part 166 ... 4th connecting part 167 ... Base part 168 ... Base part 169 ... 4th connecting part 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main unit 1106 ... Display unit 1200 ... Mobile phone 1202 ... Operation buttons 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 Memory 1312 Video signal output terminal 1314 Input / output terminal Child 1430 ... Television monitor 1440 ... Personal computer 2106 ... Automobile 2107 ... Car body 2108 ... Electronic control unit 2109 ... Tire W1 ... Width W2 ... Distance Y1 ... Virtual center line θ ... Angle θ1 ... Angle θ2 ... Angle

Claims (12)

A base having one end and the other end aligned along the first direction;
A pair of vibrating arms extending along the first direction from the one end of the base and aligned along a second direction orthogonal to the first direction;
The base is
A reduced width portion in which the width along the second direction of at least one of the one end portion and the other end portion gradually decreases as the distance from the central portion of the base portion increases;
A thickness along a third direction orthogonal to both the first direction and the second direction is thicker than an end of the vibrating arm on the base side, and more than an end of the vibrating arm on the base side. A thick portion including a protruding portion protruding to at least one side in the third direction;
A vibrating piece comprising: The width along the second direction of the reduced width portion is:
2. The resonator element according to claim 1, wherein the resonator element gradually decreases along the imaginary line segment along the first direction as the distance from the center portion of the base portion increases.   3. The resonator element according to claim 1, wherein the thick portion is provided so as to include a central portion of a width along the second direction of the base portion in a plan view.   4. The resonator element according to claim 3, wherein a width of the protruding portion along the second direction is smaller than a distance between the pair of vibrating arms.   5. The resonator element according to claim 1, wherein the thick portion is provided so as to protrude from both sides of the base portion along the third direction of the base portion. The thick part is
The thickness along the third direction is equal to the vibrating arm;
A first portion from which the vibrating arm extends;
A second portion joined to one surface of the first portion in the third direction;
The resonator element according to claim 1, comprising: The vibrator element according to any one of claims 1 to 6,
A package containing the vibrating piece,
A vibrator, wherein a tip end surface of the projecting portion is fixed to the package.   8. The front end surface of the protruding portion located on one side of the base portion in the third direction is fixed to the package via two joining members arranged along the first direction. The vibrator described. The front end surface of the projecting portion located on one side of the base in the third direction is fixed to the package via one joining member,
A pad electrode is provided on the other side surface of the base in the third direction,
The package is provided with a connection electrode,
The vibrator according to claim 7, wherein the pad electrode and the connection electrode are connected via a wiring. The vibrator element according to any one of claims 1 to 6,
And an oscillation circuit electrically connected to the resonator element.   An electronic device comprising the resonator element according to claim 1.   A moving body comprising the resonator element according to claim 1.

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