JP2014188630A - Groove processing tool and groove processing apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To extend the life of a groove processing tool.SOLUTION: A groove processing tool 2 includes a holding part 21 and a processing part 22. The holding part 21 is a portion held by a holder 41. The processing part is removably provided at the holding part.

Description

  The present invention relates to a grooving tool and a grooving apparatus using the same.

  A thin film solar cell is manufactured by the following method, for example. First, a lower electrode film made of a Mo film is formed on a substrate such as glass, and then a groove is formed in the lower electrode film so that the film is divided into strips. Next, a compound semiconductor film including a chalcopyrite structure compound semiconductor film such as a CIGS film is formed on the lower electrode film. Then, a part of these semiconductor films is removed in stripes by groove processing and divided into strips, and an upper electrode film is formed so as to cover them. Finally, a part of the upper electrode film is peeled off into stripes by groove processing and divided into strips.

  As one of the groove processing techniques in the process as described above, a mechanical scribing method is used in which a part of a thin film is removed with a mechanical tool such as diamond. In this mechanical scribing method, a method disclosed in Patent Document 1 has been proposed so that a groove having a stable width can be formed. In the method disclosed in Patent Document 1, a grooving tool and a peeling tool having a machining load adjusting mechanism for adjusting a machining load are used.

JP 2002-033498 A

  As the grooving tool is used, the blade is worn, and this wear deteriorates the machining quality. In order to prevent the degradation of the machining quality, it is necessary to replace the grooving tool used for a predetermined period with a new tool. However, from the viewpoint of cost reduction, there is a desire to reduce the cost of this grooving tool.

  An object of the present invention is to reduce the cost of a grooving tool.

(1) The grooving tool according to the first aspect of the present invention is a grooving tool for forming on the main surface of the substrate a groove that is held by a holder and moves with the holder and extends in the moving direction. This groove processing tool includes a holding portion and a processing portion. The holding part is a part held by the holder. The processing part is formed at the tip of the holding part and has a blade for grooving. _{The processing part is detachably provided with respect to the holding part} .

According to this configuration, since the _{processing portion is detachably provided with respect to the holding portion,} even if the blade is worn, it is only necessary to replace the processing portion, and the cost of the grooving tool can be reduced. it can.

  (2) Preferably, the blade is inclined with respect to the holding portion so that the tip thereof faces the moving direction. According to this configuration, when performing grooving with the grooving tool, the rake angle of the blade becomes positive, and thus chips generated by the grooving are easily discharged from the groove.

  (3) Preferably, in the posture when the grooving tool forms a groove, the rake angle formed by the rake surface which is the surface on the moving direction side of the blade and the normal line of the main surface is positive. According to this configuration, chips generated by the groove processing are easily discharged from the groove.

  (4) A grooving apparatus according to the second aspect of the present invention includes any of the grooving tools described above, a table for placing a substrate, a holder for holding the grooving tool, and the holder relative to the table. And a movement support mechanism for moving the robot.

  According to the present invention, the life of the grooving tool can be extended.

The perspective view of a groove processing apparatus. The front view of a holder assembly. The side view of a holder assembly. The perspective view of a groove processing tool. The partial front view of the groove processing tool before and behind abrasion. The fragmentary perspective view of the groove processing tool which concerns on the modification 1. FIG. The fragmentary perspective view of the groove processing tool which concerns on the modification 2. FIG. The partial front view of the groove processing tool which concerns on the modification 2. FIG. The partial front view of the groove processing tool which concerns on the modification 3. FIG. The partial front view of the groove processing tool which concerns on the modification 6. FIG. The partial front view of the groove processing tool which concerns on the modification 6. FIG.

  Hereinafter, embodiments of a grooving tool and a grooving apparatus using the same according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a grooving apparatus on which a grooving tool is mounted. In the following description, the “movement direction” indicates a direction in which the groove processing tool moves when forming a groove.

[Overall configuration of groove processing equipment]
As shown in FIG. 1, the groove processing apparatus 1 includes a table 12 on which a substrate (for example, a solar cell substrate) W is placed, a holder assembly 4 provided on the scribe head 3, two cameras 5, and a monitor. 6 are provided. The substrate W is arranged so that the main surface W1 faces upward.

  The table 12 is movable in the Y direction in FIG. 1 in a horizontal plane. The table 12 can be rotated at an arbitrary angle within a horizontal plane.

The scribing head 3 can be moved in the X and Y directions above the table 12 by the movement support mechanism 7. The X direction is a direction orthogonal to the Y direction in the horizontal plane, as shown in FIG. The movable support mechanism 7 includes a pair of support columns 71a and 71b and a pair of support columns 71a.
, 71b, and a motor 74 for driving a guide 73 formed on the guide bar 72. The scribe head 3 is movable in the X direction along the guide 73 as described above. The scribe head 3 is provided with an air cylinder (not shown), and the holder assembly 4 can be moved up and down along the linear guide by the air cylinder.

  The two cameras 5 are each fixed to a pedestal 8. Each base 8 is movable along a guide 10 provided in the support base 9 and extending in the X direction. The two cameras 5 can move up and down, and an image photographed by each camera 5 is displayed on the corresponding monitor 6. Here, an alignment mark for specifying a position is provided on the surface of the solar cell substrate W. The position of the alignment mark is specified by photographing the alignment mark with the two cameras 5. And the direction shift | offset | difference of the solar cell substrate W mounted in the table 12 is detected based on the position of the specified alignment mark.

[Holder assembly]
The holder assembly 4 is fixed to one surface of the scribe head 3 and can move in the X and Y directions together with the scribe head 3. The holder assembly 4 is movable in the vertical direction with respect to the scribe head 3. For example, the scribe head 3 has an elevating mechanism for moving the holder assembly 4 up and down, and the holder assembly 4 is fixed to the elevating mechanism. The holder assembly 4 is taken out and shown in FIGS. 2 is a front view of the holder assembly 4, and FIG. 3 is a side view thereof.

  As shown in FIGS. 2 and 3, the holder assembly 4 includes a holder 41 fixed to the scribe head 3, a groove processing tool 2 held by the holder 41, and a fixing plate 42. .

<Holder>
The holder 41 is a plate-like member and has a first main surface 411 attached to the scribe head 3 and a second main surface 412 on the opposite side. The holder 41 is formed with through holes 413 in the upper part and the lower part, and the holder 41 is fixed to the scribe head 3 by bolts 11 passing through the respective through holes 413. The holder 41 is formed with a groove 414 having a predetermined length from the lower end of the holder 41 upward. The groove 414 is formed in the second main surface 412 and has a rectangular shape having a predetermined depth. A stop surface 414a is formed on the upper portion of the groove 414. The upper end surface of the grooving tool 2 is in contact with the stop surface 414a. Thereby, the upward movement of the grooving tool 2 is restricted.

<Groove tool>
The groove processing tool 2 is inserted into the rectangular groove 414 of the holder 41, and the upper end surface of the groove processing tool 2 is in contact with the stop surface 414a of the rectangular groove 414 as described above. The groove processing tool 2 is formed of a hard material such as cemented carbide or sintered diamond, and includes a holding portion 21 and a processing portion 22.

  The holding portion 21 is a portion held by the holder 41 and is formed in a rectangular parallelepiped shape corresponding to the rectangular groove 414 of the holder 41. The processing portion 22 is a portion for performing groove processing on the substrate W, and is formed at the tip (lower end) of the holding portion 21. In addition, the holding | maintenance part 21 and the process part 22 are formed from one member, for example, are formed by cutting out from a rectangular parallelepiped member.

As shown in FIG. 3, the processing portion 22 has a smaller width (length in the left-right direction in FIG. 3) than the holding portion 21. The width of the groove formed in the substrate W is determined by the width of the processed portion 22, particularly the width of the blade 222 described later. In the present embodiment, the width of the processed portion 22 and the width of the blade 222 are the same. The width of the processed portion 22 is not particularly limited, but is, for example, about 20 μm or more and 100 μm or less.

  FIG. 4 is a perspective view of the groove machining tool 2. As illustrated in FIGS. 2 to 4, the processing unit 22 includes a base 221 and a blade 222 extending downward from the base 221. The base 221 is formed so as to extend downward from the tip of the holding portion 21. The base portion 221 has a tapered shape that becomes thinner as it goes downward in a front view, and specifically has a substantially triangular shape.

  The blade 222 is inclined with respect to the holding portion 21 so that the tip (lower end) faces the moving direction (the right direction in FIG. 2) in the posture when forming the groove. That is, the blade 222 is inclined with respect to the holding portion 21 so that the rake face (surface on the moving direction side) 222a of the blade 222 faces obliquely upward. Further, in the posture when the groove processing tool 2 forms a groove, the angle formed by the rake face 222a of the blade 222 and the normal line of the main surface W1, that is, the rake angle θ is a positive value, for example, 10 degrees or more. It can be about 30 degrees or less. When the rake face 222a of the blade 222 is tilted to the opposite side (left side) as shown in FIG. 2, that is, the rake face 222a is inclined so as to face upward (opposite side of the main surface W1). If it is, the rake angle θ is a positive value. Further, when the rake face 222a of the blade 222 is tilted in the traveling direction (right side), that is, when the rake face 222a is inclined downward (main surface W1 side), the rake angle θ is a negative value. Become. An escape portion 223 is defined between the rake face 222a of the blade 222 and the front surface (surface on the moving direction side) 221a of the base 221. The front view of the escape portion 223 has a triangular shape.

  In the posture when the groove processing tool 2 is attached to the holder 41 and the substrate W is processed, the front end surface (lower surface) 222b of the blade 222 is parallel to the main surface W1 of the substrate W. Further, in the posture when the groove processing tool 2 processes the substrate W, the cross-sectional shape of the blade 222 in a plane parallel to the main surface W1 of the substrate W is a Z direction (FIG. 2) which is a direction perpendicular to the main surface W1. It is constant along the vertical direction in FIG. The length of the blade 222 (the length in the left-right direction in FIG. 2) is not particularly limited, but is preferably about 50 μm or more and 200 μm or less. That is, the cross-sectional shape of the blade 222 in the plane parallel to the main surface W1 of the substrate W in the posture when the groove processing tool 2 processes the substrate W has a width (length in the Y direction) of about 20 μm or more and 100 μm or less. The length (the length in the X direction) is preferably about 50 μm or more and 200 μm or less. The height H of the blade 222 is preferably about 50 μm or more and 100 μm or less from the viewpoint of strength and life.

<Fixed plate>
The fixed plate 42 is formed with two through holes 421 arranged in the horizontal direction. The fixing plate 42 is fixed to the second main surface 412 of the holder 41 by two bolts 13 that pass through the respective through holes 421 and screw into the corresponding screw holes 415 of the holder 41. In this way, the fixing plate 42 covers approximately ３ above the groove processing tool 2 inserted into the rectangular groove 414 of the holder 41.

  The fixing plate 42 is formed with a threaded hole 422 that passes therethrough. The screw hole 422 is provided at a position facing the grooving tool 2 in a state where the fixing plate 42 is fixed to the holder 41. Then, by screwing the screw member 14 into the screw hole 422, the tip of the screw member 14 presses the groove processing tool 2 against the bottom surface of the rectangular groove 414. Thereby, it is prevented that the groove processing tool 2 falls from the rectangular groove 414.

[Operation]
The grooving tool 2 is set on the holder 41. Each time the table 12 is moved at a predetermined pitch in the Y direction, the holder assembly 4 is lowered and the lower surface 222b of the blade 222 of the grooving tool 2 is pressed against the main surface W1 of the substrate W. And the groove | channel along the X direction is formed in the main surface W1 of the board | substrate W by moving the scribe set 3 to which the holder assembly 4 was fixed to the X direction.

  FIG. 5 is a partial front view showing the grooving tool 2 before and after wear. 5A shows a state before wear, and FIG. 5B shows a state after wear. As shown in FIG. 5, the blade 222 is worn by repeated grooving, so that the blade 222 changes from the state shown in FIG. 5A to the state shown in FIG. 5B. Thus, even if the blade 222 is worn, the area where the tip surface 222b of the blade 222 contacts the main surface W1 of the substrate W does not change.

[Feature]
The grooving tool 2 according to this embodiment has the following characteristics.

  (1) Since the cross-sectional shape of the blade 222 in a plane parallel to the main surface W1 of the substrate W is constant along the Z direction, even if the blade 222 is worn, the blade 222 and the main surface W1 of the substrate W are The contact area is constant. For this reason, even if the blade 222 is worn, the machining quality does not deteriorate, and the life of the grooving tool 2 can be extended.

  (2) The blade 222 is inclined with respect to the holding portion 21 so that the tip thereof faces the moving direction. Further, the rake angle θ formed by the rake face 222a of the blade 222 and the normal line of the main surface W1 is positive. For this reason, chips generated by the groove processing are easily discharged from the groove.

[Modification]
As mentioned above, although embodiment of this invention was described, this invention is not limited to these, A various change is possible unless it deviates from the meaning of this invention.

Modification 1
In the above embodiment, the holding portion 21 and the processing portion 22 are integrally formed, but the present invention is not particularly limited to this. For example, as illustrated in FIG. 6, the processing unit 22 may be formed of a separate member from the holding unit 21 and may be removable from the holding unit 21. In this case, it is preferable that the base 221 of the processing portion 22 has a lower portion having the same shape as that of the above-described embodiment and an upper portion having a plate shape. The upper part of the base 221 has the same rectangular shape as the holding part 21 in plan view. Using the upper portion of the base portion 221, the processing portion 22 can be attached to the holding portion 21 with a bolt or the like.

Modification 2
Moreover, when the process part 22 is comprised with respect to the holding | maintenance part 21 so that removal is possible, it can also be set as the following structures. FIG. 7 is a partial perspective view of the groove processing tool 2 according to the second modification, and FIG. 8 is a front view of the groove processing tool 2 according to the second modification in a posture when the substrate W is processed. As illustrated in FIG. 7, the processing unit 22 includes a plate-like base 221 and a blade 222 that protrudes from the front surface 221 a of the base 221 toward the moving direction. As shown in FIG. 8, the tip surface 222 b of the blade 222 is parallel to the main surface W <b> 1 of the substrate W in the posture when the groove processing tool 2 processes the substrate W. In addition, the holding part 21 and the process part 22 may be comprised integrally. That is, the holding part 21 and the processing part 22 are formed of one member, and the processing part 22 may not be removable from the holding part 21.

Modification 3
In the above embodiment, the grooving tool 2 extends in the vertical direction as a whole in a state of being attached to the holder 41, but is not particularly limited thereto. For example, as shown in FIG. 9, the groove machining tool 2 may be set obliquely so as to fall down in the moving direction. The front end surface 222b of the blade 222 of the grooving tool 2 is formed to be parallel to the main surface W1 of the substrate W in the posture when the grooving tool 2 performs grooving. Further, the cross-sectional shape of the blade 222 in a plane parallel to the main surface W1 of the substrate W is formed to be constant along the Z direction.

Modification 4
The processing unit 22 may not have the base 221. That is, the blade 222 may extend downward from the tip of the holding portion 221.

Modification 5
In the above embodiment, the cross-sectional shape of the blade 22 in the plane parallel to the main surface W1 of the substrate W is a rectangular shape, but is not particularly limited thereto, and may be, for example, a circular shape, a triangular shape, or a polygonal shape. Good.

Modification 6
In the above embodiment, the processing unit 22 has one blade 222, but may have two blades 222 and 224 as shown in FIGS. That is, in addition to the first blade 222, a second blade 224 extending in the direction opposite to the moving direction (the left side in FIGS. 10 and 11) may be further formed. In this case, for example, the holder 41 is configured to be swingable. When the grooving tool 2 moves in the moving direction (the right side in FIGS. 10 and 11), the holder 41 swings in the clockwise direction to perform grooving with the first blade 222 as shown in FIG. . Further, when the grooving tool 2 moves in the direction opposite to the moving direction (the left side in FIGS. 10 and 11), the holder 41 swings counterclockwise and is grooved by the second blade 224 as shown in FIG. Processing. In the state shown in FIG. 10, the front end surface 222b of the first blade 222 is parallel to the main surface W1 of the substrate W, and the cross-sectional shape of the first blade 222 on the surface parallel to the main surface W1 of the substrate W is the same. , And formed constant along the Z direction. In addition, in the state of FIG. 11, the front end surface 224a of the second blade 224 is parallel to the main surface W1 of the substrate W, and the cross-sectional shape of the second blade 224 is a surface parallel to the main surface W1 of the substrate W. , And formed constant along the Z direction.

DESCRIPTION OF SYMBOLS 1 Groove processing apparatus 2 Groove processing tool 21 Holding part 22 Processing part 221 Base 222 Blade 41 Holder W Substrate W1 Main surface

Claims (4)

A groove processing tool for forming a groove on the main surface of the substrate that is held by a holder and moves with the holder and extends in the moving direction,
A holding portion held by the holder;
A processing part formed at the tip of the holding part and having a blade for grooving,
With
The processing part is a grooving tool provided to be detachable from the holding part.   The grooving tool according to claim 1, wherein the blade is inclined with respect to the holding portion such that a tip thereof faces the moving direction.   In the posture when the groove processing tool forms the groove, a rake angle formed by a rake surface which is a surface on the moving direction side of the blade and a normal line of the main surface is positive. The described grooving tool. A grooving tool according to any one of claims 1 to 3,
A table on which the substrate is placed;
The holder for holding the grooving tool;
A movement support mechanism for moving the holder relative to the table;
A groove processing apparatus comprising:

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