JP2014181974A - Measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement device capable of preventing damage caused by interference in a specimen of a lens barrel portion.SOLUTION: A mirror barrel portion 42 side and a camera portion 26 side of a 3D scanner optical head 12 are separated, and the mirror barrel portion 42 is supported on the camera unit 26 side through a collision retreat mechanism 41. Accordingly, when external force is exerted on the mirror barrel portion 42, relative movement of the mirror barrel portion 42 with respect to the camera portion 26 is allowed by the collision retreat mechanism 41, and damage to the 3D scanner optical head 12 caused by input of external force is previously prevented.

Description

  The present invention relates to a measuring apparatus for measuring the inner surface of a test object.

  Conventionally, a shape measuring device is known as a device for measuring the inner surface of a test object (for example, Patent Document 1).

  As this shape measuring apparatus, one having a 3D scanner optical head 801 as shown in FIG. 8 is known, and the 3D scanner optical head 801 emits measurement light to the inner surface 803 of a hollow object 802. While irradiating, the image of the measurement light irradiated to the said test object 802 is acquired, and the shape of the inner surface 803 of the said test object 802 can be measured.

  The 3D scanner optical head 801 has a lens barrel portion 811 inserted into the test object 802 and a light output for irradiating the inner surface 803 of the test object 802 via the lens barrel portion 811 with a line-shaped measurement light. Unit 812 and a camera unit 813 that acquires an image of the measurement light irradiated on the inner surface 803 via the lens barrel unit 811, and the controller 814 outputs the image obtained by the camera unit 813 By analyzing by the cutting method, the inner surface 803 can be measured three-dimensionally.

JP 2012-220341 A

  However, in such a measuring apparatus, the lens barrel portion 811 of the 3D scanner optical head 801 may interfere with the object 802 during measurement.

  In this case, the 3D scanner optical head 801 may be damaged by the impact.

  The present invention has been made in view of such a conventional problem, and an object of the present invention is to provide a measuring apparatus that can prevent damage to the object to be inspected due to interference in the lens barrel. Is.

  In order to solve the above-mentioned problem, in the measuring apparatus according to claim 1 of the present invention, a lens barrel portion inserted into a test object, and a camera portion for capturing an image obtained through the lens barrel portion, In the measuring device provided in the measuring head, the lens barrel portion side and the camera portion side of the measuring head are separated, and when the lens barrel portion receives an external force, The lens barrel portion was supported on the camera portion side via a retracting mechanism that allowed relative movement with respect to the camera portion.

  That is, when measuring the inner surface of the test object, the measuring head is moved, and the lens barrel provided on the measuring head is inserted into the test object. At this time, the lens barrel portion may interfere with the test object, and in this case, an external force is input to the lens barrel portion.

  Here, the lens barrel part side and the camera part side of the measuring head are separated, and the lens barrel part is supported on the camera part side via a retracting mechanism. For this reason, when the lens barrel portion receives an external force, the retraction mechanism allows the lens barrel portion to move relative to the camera portion.

  As a result, the lens barrel can be retracted, and damage to the measuring head due to the input of the external force is prevented.

  Further, in the measuring apparatus according to claim 2, the relative movement includes a relative movement in an axial direction of the lens barrel portion and a lateral direction with respect to an optical axis between the camera portion and an optical system provided in the lens barrel portion. The relative movement to is performed simultaneously.

  That is, when the lens barrel part receives external force, the lens barrel part side and the camera part side move relative to each other in the axial direction of the lens barrel part, and at the same time, are provided in the camera part and the lens barrel part. The optical system moves relative to the optical axis in the lateral direction.

  For this reason, the damage due to the vertical input to the lens barrel portion is avoided by the relative movement of the lens barrel portion in the axial direction.

  Further, by causing relative movement in the lateral direction with respect to the optical axis of the camera unit and the optical system provided in the lens barrel unit, damage due to lateral input to the lens barrel unit is avoided.

  Furthermore, in the measuring apparatus according to claim 3, the retraction mechanism includes a substantially flat camera side base provided on the camera unit side and a substantially flat lens barrel side base provided on the lens barrel side. And a biasing member that biases the camera side base and the lens barrel side base in a contact direction, and a guide groove is formed on one side of the camera side base and the lens barrel side base. In addition, a guided portion guided by the guide groove is provided on the other side of the camera side base and the lens barrel side base, and the guided portion is guided by the guide groove to perform the relative movement. Allow.

  That is, a substantially flat camera side base is provided on the camera unit side, and a substantially flat lens side base is provided on the lens barrel side. The camera side base and the lens barrel side base are urged by the urging member in a direction in contact with each other.

  In addition, a guide groove is provided on one side of the camera side base and the lens barrel side base, and a guided portion guided by the guide groove is provided on the other side. The relative movement is allowed by guiding the guide portion in the guide groove.

  Thereby, the retracting mechanism is configured.

  In addition, in the measuring apparatus according to claim 4, the guide groove is set to have a substantially wedge-shaped cross-sectional shape, and the guided portion is guided along the inclined surface of the guide groove, whereby the mirror The relative movement in the axial direction of the tube portion and the relative movement in the lateral direction with respect to the optical axis of the camera portion are simultaneously performed.

  That is, the guide groove is set to have a substantially wedge-shaped cross section, and an inclined surface is formed in the guide groove. For this reason, the guided portion is guided along the inclined surface of the guide groove, so that the relative movement in the axial direction of the lens barrel portion and the optics provided in the camera portion and the lens barrel portion are performed. The relative movement in the lateral direction with respect to the optical axis with the system is simultaneously performed.

  According to a fifth aspect of the present invention, there is provided a detection device that detects that the camera unit and the lens barrel unit have moved relative to each other, and the camera unit and the lens barrel unit are more than a predetermined allowable amount. When the detection device detects the movement, the movement of the measuring head is stopped.

  That is, when the camera part and the lens barrel part move relative to each other beyond a predetermined allowable amount, this is detected by the detection device, and the movement of the measurement head is stopped.

  For this reason, when a relative movement that exceeds the limit by which the lens barrel can be retracted by the retraction mechanism, the measurement head is reliably prevented from being damaged by stopping the movement of the measurement head. Is done.

  Furthermore, in the measuring device according to claim 6, the detection device is constituted by a light blocking sensor.

  That is, the detection device is composed of a light blocking sensor.

  For this reason, the relative movement of the camera part and the lens barrel part exceeding the allowable amount is detected without contact.

  As described above, in the measuring apparatus according to the first aspect of the present invention, when the lens barrel part receives an external force, the retraction mechanism allows the relative movement of the lens barrel part with respect to the camera part. The tube portion can be retracted.

  Thereby, it is possible to prevent damage to the measurement head due to the input of external force.

  Further, in the measuring apparatus according to claim 2, when the lens barrel part receives an external force, the lens barrel part side and the camera part side relatively move in the axial direction of the lens barrel part and at the same time, the camera Relative to the optical axis of the optical system provided in the lens part and the optical system provided in the lens barrel part.

  For this reason, it is possible to prevent damage due to the vertical input to the lens barrel portion by the relative movement of the lens barrel portion in the axial direction.

  Further, by causing relative movement in the horizontal direction with respect to the optical axis of the camera unit and the optical system provided in the lens barrel unit, it is possible to prevent damage due to lateral input to the lens barrel unit.

  Furthermore, in the measuring apparatus according to claim 3, a substantially flat camera side base is provided on the camera unit side, a substantially flat lens side base is provided on the lens barrel side, and the camera side base is provided. And the said lens-barrel side base is urged | biased in the direction contact | abutted mutually by an urging member.

  In addition, a guide groove is provided on one side of the camera side base and the lens barrel side base, and a guided portion guided by the guide groove is provided on the other side, and the guided portion is the guide groove. The retraction mechanism that allows the relative movement can be configured by being guided.

  In addition, in the measuring apparatus according to claim 4, by setting the guide groove to a substantially wedge-shaped cross-sectional shape, an inclined surface can be formed in the guide groove.

  Thereby, the guided portion is guided along the inclined surface of the guide groove, so that the relative movement in the axial direction of the lens barrel portion and the optics provided in the camera portion and the lens barrel portion are performed. The relative movement in the lateral direction relative to the optical axis with the system can be realized simultaneously.

  Further, in the measurement apparatus according to claim 5, when the camera unit and the lens barrel unit move relative to each other by a predetermined allowable amount or more, the detection unit detects this and stops the movement of the measurement head. be able to.

  For this reason, when the relative movement that exceeds the limit by which the lens barrel can be retracted by the retracting mechanism, the measurement head is reliably prevented from being damaged by stopping the driving of the measuring head. can do.

  Furthermore, in the measuring device according to claim 6, by configuring the detection device with a light-blocking sensor, it is possible to detect a relative movement between the camera unit and the lens barrel unit more than an allowable amount in a non-contact manner. .

  For this reason, mechanical operation errors can be eliminated as compared with the contact type detection device.

It is a perspective view which shows one embodiment of this invention. It is a figure which shows the cross section of the principal part which shows the embodiment. It is sectional drawing which shows the front-end | tip part of the lens-barrel part of the embodiment. It is a perspective view which shows the collision evacuation mechanism of the embodiment. It is a perspective view which shows the main body side of the collision evacuation mechanism of the embodiment. It is a perspective view which shows the head side of the collision evacuation mechanism of the embodiment. It is explanatory drawing which shows operation | movement of the collision evacuation mechanism of the embodiment. It is a front view which shows the conventional 3D scanner optical head.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram showing a measuring apparatus 1 according to the present embodiment. As shown in FIG. 2, the measuring device 1 is used when measuring the distance of the inner surface 4 of the hole 3 provided in the test object 2. As the measurement, for example, the inner surface of the control valve is used. Measurement.

  In the present embodiment, the case where the hole 3 of the specimen 2 is measured will be described as an example. However, the present invention is not limited to this. For example, the measurement is performed on the inner surface of a cylindrical member. Or can be used for measuring the inner surface of a member having a C-shaped cross-section with one side opening.

  In addition, it is also widely known that it is used for the purpose of inspecting defects such as the shape and adhesion of foreign matter after measuring the distance of the hole 3 of the test object 2.

  As shown in FIG. 1, the measuring apparatus 1 includes a movable arm 11 extending from the apparatus main body (not shown), and a 3D scanner optical head 12 as a measuring head is provided at the tip of the movable arm 11. Is fixed. The movable arm 11 is configured to be driven and controlled by a control device of the apparatus main body, and is configured to be able to move the 3D scanner optical head 12 fixed to the tip in the Z direction (vertical direction). Yes.

  The test object 2 is supported by an XY table and is configured to be moved in the XY direction by the control device. Thus, the test object 2 can be moved relative to the 3D scanner optical head 12 in the XYZ directions.

  As shown in FIG. 2, a CCD camera 24 is fixed to the upper end of the base plate 22 constituting the main body 21 of the 3D scanner optical head 12 fixed to the movable arm 11 via a camera bracket 23. The CCD camera 24 is arranged so that the lens 25 faces downward. The CCD camera 24 constitutes a camera unit 26 in the 3D scanner optical head 12.

  A first laser device 32 and a second laser device 33 are fixed to the side portion of the CCD camera 24 via laser brackets 31 and 31, and both the laser devices 32 and 33 are fixed obliquely downward. ing. Accordingly, the laser devices 32 and 33 are arranged so as to irradiate laser slit light obliquely downward, and the laser unit 34 is provided in the 3D scanner optical head 12 by the laser devices 32 and 33. Is configured.

  A lens barrel 42 is supported at the lower end of the base plate 22 via a collision evacuation mechanism 41, and the main body 21 including the camera 26 and the laser 34 and the lens barrel 42 side. Is separated through the collision evacuation mechanism 41 and is relatively movable. And the said lens-barrel part 42 is comprised so that the lower end part may be inserted in the said hole 3 of the said test object 2 at the time of a measurement.

  As shown in FIG. 2, the lens barrel portion 42 includes a rectangular lens barrel 51, and laser slit light from the laser devices 32 and 33 is transmitted to the side surface of the lens barrel 51. Then, a transmission window 52 is provided for guiding the tip of the lens barrel. As shown in FIG. 3, the side surface of the lens barrel 51 located on the opposite side of the transmission window 52 is opened to form a side surface opening 53, and the laser slit light reflected in the lens barrel 51 is formed. It is comprised so that it can permeate | transmit.

  A first irradiation-side optical body 62 that bends the first laser slit light 61 irradiated from the first laser device 32 obliquely downward is disposed obliquely at the tip of the lens barrel 51. The first irradiation side optical body 62 is constituted by a small plate-like mirror.

  The first irradiation-side optical body 62 causes the first laser slit light 61 reflected by the first irradiation-side optical body 62 to pass through the side opening 53 of the lens barrel 51 and the test object 2. The inner surface 4 can be irradiated.

  A first incident side optical body 71 that forms a pair with the first irradiation side optical body 62 is provided obliquely below the first irradiation side optical body 62. Is also composed of a plate-like mirror.

  The first incident-side optical body 71 is disposed at an angle different from that of the first irradiation-side optical body 62, and the irradiation position of the inner surface 4 irradiated with the first laser slit light 61 is determined as the first incident-side optical body 71. The CCD camera 24 arranged right above the side optical body 71 is configured to be able to take an image.

  As a result, the first light receiving path 81 to the CCD camera 24 is moved to the first position so that the irradiation position of the inner surface 4 irradiated with the first laser slit light 61 is located within the imaging range of the CCD camera 24. It is configured to be bent by the one incident side optical body 71.

  Between the first irradiation side optical body 62 and the first incident side optical body 71, the second laser slit light 101 irradiated from the second laser device 33 is bent obliquely upward. The second irradiation side optical body 102 is disposed obliquely, and the second irradiation side optical body 102 is constituted by a small plate-like mirror.

  The second irradiation side optical body 102 transmits the second laser slit light 101 reflected by the second irradiation side optical body 102 through the side opening 53 of the lens barrel 51 to the object 2 to be inspected. The inner surface 4 can be irradiated.

  Further, a second incident side optical body 111 that forms a pair with the second irradiation side optical body 102 is provided obliquely above the first irradiation side optical body 62, and the second incident side optical body 111 is also provided. It consists of a plate-like mirror.

  The second incident-side optical body 111 is disposed at an angle different from that of the second irradiation-side optical body 102, and the irradiation position of the inner surface 4 irradiated with the second laser slit light 101 is set as the second incident-side optical body 111. The CCD camera 24 disposed above the side optical body 111 is configured to be able to take an image.

  As a result, the second light receiving path 121 to the CCD camera 24 is moved to the second light receiving path 121 so that the irradiation position of the inner surface 4 irradiated with the second laser slit light 101 is located within the imaging range of the CCD camera 24. The second incident side optical body 111 is configured to be bent.

  At this time, the first light receiving path 81 is configured to reach one side with the center of the lens 25 of the CCD camera 24 as a boundary, and the second light receiving path 121 is configured to reach the other side. Has been. Thereby, the irradiation position of the inner surface 4 irradiated with the first laser slit light 61 is configured to be imaged on one side with the center of the image of the CCD camera 24 as a boundary. The irradiation position of the inner surface 4 irradiated with the two-laser slit light 101 is configured to be picked up on the other side with the center of the image of the CCD camera 24 as a boundary.

  As shown in FIG. 4, the collision retreat mechanism 41 includes a camera side base 131 provided on the camera unit 26 side (see FIG. 5) and a lens barrel side base provided on the lens barrel unit 42 side. And a stage 132 (see FIG. 6). When the lens barrel part 42 interferes with the test object 2 and receives external force, for example, the lens barrel part 42 is allowed to move relative to the camera part 26. Is configured to do. As this relative movement, a relative movement in the axial direction of the lens barrel part 42 and a lateral direction with respect to the optical axis of the camera unit 26 and the optical system (71, 111) provided in the lens barrel part 42 are performed. The relative movement is performed at the same time.

  In this embodiment, the relative movement in the lateral direction with respect to the optical axis between the camera unit 26 and the optical system provided in the lens barrel unit 42 will be described. If it is provided, it is assumed that the camera unit 26 and the lens provided in the lens barrel unit 42 are moved relative to each other in the lateral direction with respect to the optical axis.

  That is, as shown in FIG. 5, the camera side base 131 is provided below the base plate 22 of the 3D scanner optical head 12, and the camera side base 131 is provided on the base plate 22. It is comprised with the rectangular-shaped flat plate which stood up with respect to. The distal end side of the camera side base 131 is supported by the base plate 22 via a pair of support portions 141 and 141.

  A rectangular insertion hole 151 is formed in the center of the camera side base 131 so that the lens barrel 42 can be inserted. A guide groove is formed on the outer periphery of the insertion hole 151. The guide groove is constituted by first to third V-shaped grooves 152 to 154 arranged at equal intervals of 120 degrees with the center of the insertion hole 151 as the center.

  The first V-shaped groove 152 extends from the insertion hole 151 along the length direction of the camera-side base 131 and is provided on the left side in FIG. 5 where the CCD camera 24 is disposed. . The second V-shaped groove 153 is provided at a position rotated clockwise by 120 degrees from the first V-shaped groove 152 with the center of the insertion hole 151 as the center, and the base plate 22 side from the insertion hole 151. It is extended diagonally toward. The third V-shaped groove 154 is provided at a position rotated counterclockwise by 120 degrees from the first V-shaped groove 152 with the center of the insertion hole 151 as a center. The base 131 extends obliquely toward the tip side.

  Each of the V-shaped grooves 152 to 154 is formed in a substantially wedge shape in cross section, and a pair of inclined surfaces 161 and 161 are formed in each of the V-shaped grooves 152 to 154. In addition, a concave groove 162 having a U-shaped cross section is formed along the length direction at the intersection of the inclined surfaces 161 and 161.

  On the other hand, the lens barrel side base 132 is provided at the upper end of the lens barrel portion 42 as shown in FIG. The lens barrel side base 132 is also formed of a rectangular flat plate, and extended portions 132a and 132a extending from both long sides to the side are integrally formed at a portion on the right side in FIG. Yes. Accordingly, the lens barrel side base 132 is formed in a cross shape and is sized so as to be arranged on the camera side base 131 as shown in FIG.

  As shown in FIG. 6, the lens barrel side base 132 is provided with a rectangular mounting hole 181 extending in the length direction, and the lens barrel portion 42 is formed in the mounting hole 181. It is fixed with the upper end of the inserted. In this attached state, side opening portions 182 and 182 formed by opening both end portions of the attachment hole 181 are formed on both side portions of the lens barrel portion 42.

  A first to third spherical surface support 193 as a guided portion projecting to the lower surface side is provided at the left portion of the mounting hole 181 in FIG. 6 and the extending portions 132a and 132a (first guide). Only the trispherical support 193 is shown) The first spherical support is arranged in the first V-shaped groove 152 in a state where the lens barrel side base 132 is arranged on the camera side base 131. The second spherical support is configured to be disposed in the second V-shaped groove 153. The third spherical support 191 is configured to be disposed in the third V-shaped groove 154.

  Each spherical support 193 includes a cylindrical body 193a and a hemispherical spherical surface 193b provided at the tip of the body 193a. Each spherical support 193 is configured to be guided to the bottom by the inclined surfaces 161 and 161 of the corresponding V-shaped grooves 152 to 154.

  In the present embodiment, the case where the tip of each spherical support 193 is formed of a hemispherical spherical portion 193b and the guide groove is formed of V-shaped grooves 152 to 154 is described, but the present invention is not limited thereto. For example, it may be configured by a tapered or conical convex portion and a hole shape matching this.

  As shown in FIGS. 2 and 4, a spring fixing bracket 171 is fixed to the end of the lens barrel side base 132. As shown in FIG. 2, the spring fixing bracket 171 is formed with a fixing piece 172 fixed in a state of being in contact with the lens barrel side base 132 and an upright piece 173 standing up from the fixing piece 172. An extending piece 174 extending to the side is formed at both ends of the upright piece 173 (only one is shown). One end of a coil spring 175 as an urging member is locked to each extending piece 174 (only one is shown), and the other end of each coil spring 175 is located at a corresponding portion of the camera side base 131. It is supported.

  Accordingly, the lens barrel side base 132 is biased toward the camera side base 131 by the two coil springs 175, and the lens barrel side base 132 is normally in the camera side base 131. It is comprised so that it may contact | abut.

  Further, when an external force is applied to the lens barrel portion 42 and an upward force is applied, the coil springs 175 and 175 are directed toward the camera-side base 131 as shown in FIG. The lens barrel side base 132 urged in this manner moves the spherical surface portion 193b of the spherical support 193 along the inclined surfaces 161 and 161 of the corresponding V-shaped grooves, and the lens barrel. The unit 42 is relatively moved with respect to the camera unit 26, that is, a relative movement that moves up in the axial direction of the lens barrel unit 42, and an optical system provided in the camera unit 26 and the lens barrel unit 42. And relative movement in the lateral direction with respect to the optical axis.

  Now, referring to FIG. 7 in detail, as shown in FIG. 7A, when the test tube 2 comes into contact with the lens barrel portion 42, an impact is applied. The two bases 131 and 132 are separated from each other by overcoming the spring force of the coil springs 175 and 175 with which 132 is in contact.

  At that time, the main body portion 21 and the lens barrel portion 42 move relative to each other in the axial direction of the lens barrel 51, but a hemispherical shape provided on each spherical support 193 of the lens barrel side base 132. The spherical surface portion 193b slides along the inclined surfaces 161 and 161 of the V-shaped grooves 152 to 154 having a substantially wedge cross-sectional shape of the camera side base 131, whereby the bases 131 and 132 are separated from each other. At the same time, the optical axes of the lens barrel 51 and the camera unit 26 are shifted.

  When the input of the impact is lost, as shown in FIG. 7B, the relative positions of the lens barrel 51 and the camera unit 26 in the axial direction due to the substantially wedge cross-sectional shapes of the V-shaped grooves 152 to 154, respectively. Since the optical axis returns to the original position, measurement can be continued again in the case of a relatively slight impact.

  The base plate 22 is provided with an L-shaped light-emitting element support bracket 201 on the left side in FIG. 4 (right side in FIG. 2). The light-emitting element support bracket 201 includes a light-emitting element 202. Provided (see FIG. 2). The base plate 22 is provided with a light receiving element support bracket 203 on the right side in FIG. 4 (left side in FIG. 2) so as to face the light emitting element support bracket 201. 203 is provided with a light receiving element 204 as a detection device. The light emitting element 202 is configured to project light toward the light receiving element 204, and the light receiving element 204 is configured to transmit a light receiving state of the light to the control device.

  As shown in FIGS. 2 and 4, an L-shaped collision detection light-blocking plate 211 is provided between the light-emitting element 202 and the light-receiving element 204. It is fixed to the lens barrel side base 132. Further, the standing piece 173 of the spring fixing bracket 171 is arranged between the light emitting element 202 and the light receiving element 204.

  As shown in FIG. 4, the collision detection light-blocking plate 211 is provided with a light-blocking plate small hole 221 that transmits light from the light emitting element 202, and the upright piece 173 includes a light-blocking plate small hole 221 shown in FIG. 7. As described above, a bracket small hole 222 that transmits light from the light emitting element 202 is formed. The small holes 221 and 222 are provided when an external force is input to the lens barrel portion 42 and the lens barrel side base 132 moves relative to the camera side base side 131 by a predetermined allowable amount or more, that is, the camera. When the portion 26 and the lens barrel portion 42 are moved relative to each other by a predetermined allowable amount or more, the light projection from the light emitting element 202 to the light receiving element 204 through the small holes 221 and 222 can be blocked. Is set.

  Thereby, in the control device that inputs a signal from the light receiving element 204, the camera unit 26 and the lens barrel unit 42 are more than a predetermined allowable amount by detecting a light receiving state in the light receiving element 204. The controller is configured to detect relative movement, and when detecting this, the control device stops driving the movable arm 11 and drives the XY table that supports the test object 2. By stopping, the 3D scanner optical head 12 is prevented from being damaged by an impact.

  In the present embodiment, the relative movement in the axial direction between the main body 21 and the lens barrel 42 is mechanically blocked by a mechanical stopper, and the relative position immediately before mechanical blocking is It is desirable to set so that the light receiving element 204 detects light blocking.

  In this embodiment, a non-contact photoelectric sensor is used as a collision detection sensor. However, the present invention is not limited to this, and a contact sensor may be used.

  In the present embodiment according to the above configuration, when measuring the inner surface 4 of the test object 2, the 3D scanner optical head 12 as the measurement head is moved to move the mirror provided on the 3D scanner optical head 12 The cylindrical portion 42 is inserted into the test object 2. At this time, the lens barrel portion 42 may interfere with the test object 2, and in this case, an external force is input to the lens barrel portion 42.

  Here, the lens barrel portion 42 side and the camera portion 26 side of the 3D scanner optical head 12 are separated from each other, and the lens barrel portion 42 is supported on the camera portion 26 side via a collision retracting mechanism 41. Has been. For this reason, when the lens barrel portion 42 receives an external force, the collision retraction mechanism 41 allows the lens barrel portion 42 to move relative to the camera portion 26.

  Thereby, since the lens barrel 42 can be retracted, it is possible to prevent damage to the 3D scanner optical head 12 due to the input of the external force.

  When the lens barrel 42 receives an external force, the lens barrel 42 side and the camera unit 26 side move relative to each other in the axial direction of the lens barrel 42, and at the same time, It moves relative to the optical axis with respect to the optical system provided in the lens barrel 42 in the lateral direction.

  For this reason, it is possible to prevent damage due to the vertical input to the lens barrel portion 42 by the relative movement of the lens barrel portion 42 in the axial direction.

  Further, by causing relative movement in the lateral direction with respect to the optical axis of the camera unit 26 and the optical system provided in the lens barrel unit 42, damage due to lateral input to the lens barrel unit 42 is prevented. Can do.

  Further, a substantially flat camera side base 131 is provided on the camera unit 26 side, a substantially flat lens barrel side base 132 is provided on the lens barrel part 42 side, and the camera side base 131 and the mirror are provided. The cylinder side base 132 is urged by coil springs 175 and 175 in a direction in which they abut against each other.

  The camera side base 131 is provided with V-shaped grooves 152 to 154 as guide grooves, and the lens barrel side base 132 is supported by a spherical surface as a guided portion guided by the V-shaped grooves 152 to 154. The collision evacuation mechanism 41 that allows the relative movement can be configured by providing a body 198 and guiding the spherical support 193 to the V-shaped grooves 152 to 154.

  The V-shaped grooves 152 to 154 are set to have a substantially wedge-shaped cross section, and inclined surfaces 161 and 161 are formed in the V-shaped grooves 152 to 154. For this reason, the spherical support 193 is guided along the inclined surfaces 161 and 161 of the V-shaped grooves 152 to 154, so that the relative movement in the axial direction of the lens barrel portion 42 and the camera portion are performed. The relative movement in the horizontal direction with respect to the optical axis between the optical system 26 and the optical system provided in the lens barrel portion 42 can be realized simultaneously.

  Further, when the camera unit 26 and the lens barrel unit 42 move relative to each other by a predetermined allowable amount or more, this is detected by the light receiving element 204, and the movement of the 3D scanner optical head 12 and the test object 2 are detected. The supporting XY table can be stopped.

  For this reason, when a relative movement that exceeds the limit at which the lens barrel portion 42 can be retracted by the collision retracting mechanism 41 occurs, the driving of the 3D scanner optical head 12 and the XY table is stopped. Damage to the 3D scanner optical head 12 can be reliably prevented.

  Furthermore, by configuring the light receiving element 204 with a light blocking sensor, it is possible to detect a relative movement of the camera unit 26 and the lens barrel unit 42 that is more than an allowable amount in a non-contact manner.

  For this reason, mechanical operation errors can be eliminated as compared with the contact type detection device.

DESCRIPTION OF SYMBOLS 1 Measuring apparatus 2 Test object 12 3D scanner optical head 26 Camera part 41 Collision evacuation mechanism 42 Lens barrel part 131 Camera side base 132 Lens tube side base 152 First V-shaped groove 153 Second V-shaped groove 154 Third V Character groove 161 Inclined surface 175 Coil spring 193 Third spherical surface support 204 Light receiving element

Claims (6)

In a measurement apparatus in which a lens barrel portion inserted into a test object and a camera portion that captures an image obtained through the lens barrel portion are provided in a measurement head,
Via a retraction mechanism that separates the lens barrel side of the measuring head from the camera unit side and allows the lens barrel to move relative to the camera when the lens barrel receives an external force. And the lens barrel portion is supported on the camera portion side.   In the relative movement, the relative movement in the axial direction of the lens barrel and the relative movement in the lateral direction with respect to the optical axis of the camera unit and the optical system provided in the lens barrel are simultaneously performed. The measuring apparatus according to claim 1. The retraction mechanism includes a substantially flat camera side base provided on the camera unit side, a substantially flat lens barrel side base provided on the lens barrel side, the camera side base, and the It is composed of a biasing member that biases in the direction in which the lens barrel side base comes into contact,
A guide groove is provided on one side of the camera side base and the lens barrel side base, and a guided portion guided by the guide groove is provided on the other side of the camera side base and the lens barrel side base. The measuring apparatus according to claim 1, wherein the relative movement is allowed by the guided portion being guided by the guide groove.   The guide groove is set to have a substantially wedge-shaped cross section, and the guided portion is guided along the inclined surface of the guide groove, so that the relative movement in the axial direction of the lens barrel portion and the camera are performed. 4. The measuring apparatus according to claim 3, wherein the relative movement in the lateral direction with respect to the optical axis of the unit is performed simultaneously.   When a detection device that detects relative movement between the camera unit and the lens barrel unit is provided and the detection device detects that the camera unit and the lens barrel unit have moved relative to each other by a predetermined allowable amount or more. 5. The measuring apparatus according to claim 1, wherein the movement of the measuring head is stopped.   6. The measuring apparatus according to claim 5, wherein the detecting device is constituted by a light blocking sensor.

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