JP2014026435A - Processing device - Google Patents

Abstract

A machining apparatus capable of easily installing a special program when a predetermined condition is satisfied for a machining apparatus introduced by a user.
A holding means for holding a workpiece, a processing means for processing the workpiece held by the holding means, a control means having a program storage unit storing a program for operating the processing means, an external Reading means for reading the command information, and the control means has a special program storage unit storing a special program and an installation execution unit for installing the special program, and the installation execution unit is a special program The command information recording unit in which the command information associated with the command information is recorded, the command information read by the reading unit, and the command information recorded in advance in the command information recording unit are compared with each other, And a command information determination unit that permits the processing.
[Selection] Figure 4

Description

  The present invention relates to a machining apparatus having a program installation method as one feature.

  Conventionally, for example, various processing apparatuses such as a cutting apparatus, a grinding apparatus, a polishing apparatus, and a laser processing apparatus are installed with programs for processing a workpiece by the processing apparatus, and the programs are used in normal operations. To be used.

  In addition to the so-called “normal program” used in such normal operations, the manufacturers of processing equipment have various “specialties” for the purpose of performing processing more suitable for the workpiece and improving productivity. "Program" is produced and provided.

  As an example of a special program, for example, a program for performing a process of dividing a multilayer work piece having no alignment mark for specifying a region to be cut on a surface such as a multilayer capacitor into individual chips. (For example, refer to Patent Document 1), even when the work is cracked or chipped, a program for accurately grasping the shape of the work (for example, refer to Patent Document 2), street (division Even when the parallel accuracy of the planned line) is low or the street is wavy, there is a program (for example, see Patent Document 3) that performs alignment corresponding to this and performs high-precision and efficient cutting. is there.

JP 2000-252241 A Japanese Patent Application Laid-Open No. 0-125765 JP 2002-033295 A

  The above-described special program may need to be installed according to the user's request after the user (customer) has introduced the processing device and used the processing device for a while.

  When such a need arises, an engineer of the manufacturer of the processing apparatus has to visit the user and install a special program each time.

  However, there is a problem that sending a manufacturer engineer to a user (customer) each time is troublesome and expensive, and is not economical.

  On the other hand, if a special program is installed on the user side without any limitation, there is a concern that unexpected problems such as adversely affecting the startup of the normal program may occur. In anticipation of such problems, manufacturers must take measures to manage the installation of special programs.

  The present invention has been made in view of the above problems, and the object of the present invention is to easily install a special program when a predetermined condition is satisfied for a processing apparatus introduced to a user. It is to provide a processing apparatus.

  According to the first aspect of the present invention, the holding means for holding the workpiece, the processing means for processing the workpiece held by the holding means, and the program storage unit storing the program for operating the processing means. Control means having a reading means for reading external command information, the control means has a special program storage unit storing a special program and an installation execution unit for installing the special program, and is installed The execution unit compares the command information recording unit in which the command information associated with the special program is recorded, the command information read by the reading unit, and the command information recorded in advance in the command information recording unit. There is provided a processing device including a command information determination unit that permits installation.

  According to the present invention, there is provided a machining apparatus capable of easily installing a special program in a machining apparatus introduced to a user when a predetermined condition is satisfied.

  Specifically, the control means of the processing apparatus of the present invention includes a special program storage unit that stores a special program that can be accessed when a predetermined condition is satisfied, and an installation execution unit that installs the special program. The installation execution unit has a command information recording unit in which command information associated with the special program is recorded, command information read by the reading unit, and command information recorded in advance in the command information recording unit, A command information determination unit that permits installation when there is matching command information.

  As a result, if the manufacturer sends specific instruction information to the user, for example, attached to a manual, the user can have the special program installed, and the effort and expense of dispatching the manufacturer's engineer Reduction.

  On the user side, as long as specific command information is obtained from the manufacturer, the special program can be easily installed without requiring support from the manufacturer. In addition, since the special program to be installed is limited by the command information, an artificial problem of installing an erroneous special program on the user side is solved, and the occurrence of an unexpected problem can be prevented.

It is a perspective view of the processing apparatus (cutting apparatus) suitable for implementation of this invention. It is a block diagram shown about the structure of a control apparatus. It is a perspective view shown about the composition of a reading device and an ID card. It is a functional block diagram explaining the function which performs installation etc. of a special program.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. As an example of the processing apparatus, an external perspective view of a semiconductor wafer cutting apparatus 2 is shown in FIG. The cutting device 2 includes a processing device main body 4 in which processing means such as a cutting unit 10 having a cutting blade is accommodated in a housing 8, a display monitor 6 mounted on the housing 8 of the processing device main body 4, and the like. Is done.

  A chuck table 12 is disposed adjacent to the cutting unit 10 so as to be movable in the X-axis direction. Reference numeral 14 denotes a cassette mounting table (elevator) on which a cassette 24 capable of accommodating a plurality of wafers 22 is mounted, and is configured to be movable in the vertical direction. As a holding means for holding the wafer 22 during processing, it is conceivable that a holding means using an edge clamp (a form in which the end is clamped) is used in addition to a table such as the chuck table 12.

  Reference numeral 50 denotes a reading device for reading the identification code 54 recorded (recorded by display or magnetism) in the manual 52 of the special program. It is assumed that the operator operates the cutting device 2 after holding the manual 52 over the reading device 50.

  As shown in the schematic diagram of FIG. 2, the cutting device 2 is provided with a control device 30 for automatically controlling the cutting device 2. The control device 30 is constituted by, for example, a microcomputer, and a CPU (Central Processing Unit) 31 that performs arithmetic processing according to a control program, a ROM (Read Only Memory) 32 that stores control programs, various databases, and the like, and arithmetic results Are provided with a readable / writable RAM (random access memory) 33 and an input / output interface 34.

  The ROM 32 stores a control program for automatically controlling the cutting unit 10 and the like and various databases assumed to be read by the control program.

  The RAM 33 reads a control program and various data, and temporarily stores machining conditions input by an operator.

  The input / output interface 34 is connected to a display monitor 6 (see FIG. 1) that functions as an input means for inputting machining conditions and also functions as a display means for displaying various information.

  The input / output interface 34 is connected to a reading device 50 for reading the identification code 54 (see FIG. 3) recorded (recorded by display, magnetism, etc.) in the manual 52 of the special program.

  Various drive devices such as a motor that rotates the cutting unit 10 and a motor that moves the chuck table 12 are connected to the input / output interface 34, and various drive devices are machined based on the calculation results obtained by executing the control program. It is driven according to conditions.

  As shown in FIG. 3, the reading device 50 is configured to read an identification code 54 recorded in a manual 52 or the like. In this embodiment, the reading device 50 is configured in a substantially U shape having an insertion groove 51, and the identification code 54 is recognized in a non-contact manner by inserting a manual 52 into the insertion groove 51. It is configured.

  According to such a form, the identification code 54 can be attached to the manual 52 that is supposed to be provided to the user from the manufacturer when the special program needs to be installed. For example, the identification code 54 It is no longer necessary to provide another article displaying the symbol. Further, by adopting a non-contact recognizable configuration, the identification code 54 can be easily recognized simply by holding the manual 52, and a configuration with excellent workability can be realized.

  The identification code 54 includes command information for enabling the installation of the special program. As will be described in detail later, whether the installation is possible or not is determined according to the content of the command information.

  For example, the identification code 54 is displayed on the surface of the manual 52 in the form of a two-dimensional barcode as in the present embodiment so that it can be visually recognized, and is stored in the manual 52 in an invisible manner by magnetism. It may be a thing. The identification code 54 may be directly stored in the manual 52, or may be affixed to the manual 52 by a seal or the like.

  In addition to the embodiment of the reading device 50 and the manual 52 described above, a form of a card reader that allows a magnetic card to pass through a groove, a form of recognizing the identification code 54 by an uneven shape, and the like are also conceivable. In addition, a form in which an identification code 54 (for example, a character string such as a number or a symbol) is input to the reading device 50 by an operator is also conceivable. That is, the reading device 50 only needs to be able to recognize the information stored in the identification code 54, and the form of recognition is not particularly limited.

  Further, the identification code 54 is provided in the form of a document attached to the manual 52. For example, the information transmitted by the e-mail from the manufacturer is printed out by the user, and the identification code 54 is printed on the paper surface. May be provided to the user.

  FIG. 4 is a functional block diagram for explaining characteristic functions in the present invention. In FIG. 4, the reading device 50, the control device 30, and the display monitor 6 are shown.

  As shown in FIG. 4, in the control device 30, the CPU 31, ROM 32, and RAM 34 shown in FIG. 2, the program storage unit 35, the special program storage unit 36, the installation execution unit 37, and the command information recording unit 38. And various functional units that function as the command information determination unit 39, respectively.

  The program storage unit 35 stores a “normal program” that is activated when normal machining is performed by the cutting unit 10 serving as a machining means. Here, the “normal program” is a program used when a normal operation is performed by the user.

  Note that the normal operation is, for example, when processing a wafer having an alignment mark for specifying a region to be cut (division planned line) on the surface, when processing a standard-shaped wafer without damage, For example, when processing a wafer in which lines to be divided are arranged linearly at a pitch.

  The special program storage unit 36 stores a “special program” that is activated when special machining is performed by the cutting unit 10 serving as a machining means. Here, the “special program” is a program used when a special operation is performed by the user, and is defined in contrast to the “normal program”. In addition, for example, it is assumed that this special program is stored by a manufacturer at the time of shipment of the apparatus, and later installed according to the user's needs.

  The special operation means that, for example, when processing a laminated workpiece that does not have an alignment mark for identifying the area to be cut (division planned line) on the surface, the standard shape is lost due to damage or chipping. In the case of processing a wafer, it is conceivable that the division lines are not arranged at a constant pitch, or if a wavy workpiece is processed. In the present embodiment, a plurality of special programs A to C are stored assuming such a plurality of cases.

  The installation execution unit 37 functions to individually install the special programs A to C stored in the special program storage unit 36 so that the special program can be activated.

  In the installation execution unit 37, a command information recording unit 38 is configured. The command information recording unit 38 stores command information ac associated with the special programs A to C on a one-to-one basis.

  Further, the installation execution unit 37 includes a command information determination unit 39. The command information determination unit 39 compares the command information a included in the identification code 54 read by the reading device 50 with the command information ac stored in advance in the command information recording unit 38.

  In the present embodiment, the command information a is included in the identification code 54 of the manual 52, and the command information a matches the command information a stored in advance in the command information recording unit 38. In this case, the command information determination unit 39 functions to allow installation of the special program A that has a one-to-one correspondence with the command information a. Specifically, it is assumed that the installation execution unit 37 can access the special program storage unit 36 and the special program A can be installed.

  In this way, the command information determination unit 39 restricts the installation of the special program unless the command information input from the outside matches the command information stored in advance. That is, the user cannot install the special program unless a predetermined condition such as obtaining a specific manual 52 (identification code 54) from the manufacturer is satisfied. In other words, the user can install the special program only by obtaining a specific manual 52 (identification code 54) from the manufacturer.

  The present invention can be implemented as described above. That is, a chuck table (holding means) 12 for holding a wafer 22 as a workpiece, a cutting unit (processing means) 10 for processing the wafer 22 held by the chuck table 12, and a program for operating the cutting unit 10 And a reading device (reading unit) 50 for reading external command information, and the control device 30 stores special programs A to C. A special program storage unit 35 and an installation execution unit 37 for installing the special program. The installation execution unit 37 includes a command information recording unit 38 in which command information ac associated with the special program is recorded. The command information a read by the reading device 50 and the command information a recorded in advance in the command information recording unit 38 Compared it is c, if there is a matching command information includes a command information determining unit 39 to allow the installation, and a cutting device (processing device) 2.

  According to the above configuration, if the manufacturer sends specific instruction information attached to a user's manual, for example, to a user manual, the user can install a special program. The effort and cost of dispatching can be reduced.

  Furthermore, as long as the user obtains specific command information from the manufacturer, the special program can be easily installed without the support of the manufacturer. In addition, since the special program to be installed is limited by the command information, an artificial problem of installing an erroneous special program on the user side is solved, and the occurrence of an unexpected problem can be prevented.

  In addition, although the above embodiment demonstrated using the cutting apparatus 2 as a processing apparatus, in addition to this, implementing this invention in various processing apparatuses, such as a grinding apparatus, a polishing apparatus, a laser processing apparatus, and a washing | cleaning apparatus. Is possible.

DESCRIPTION OF SYMBOLS 2 Cutting apparatus 6 Display monitor 10 Cutting unit 12 Chuck table 22 Wafer 30 Control apparatus 35 Program storage part 35 Special program storage part 36 Special program storage part 37 Installation execution part 38 Command information recording part 39 Command information determination part 50 Reading apparatus 52 Description 54 Identification code

Claims (1)

A processing device for processing a workpiece,
Holding means for holding the workpiece;
Processing means for processing the workpiece held by the holding means;
Control means having a program storage unit storing a program for operating the processing means;
Reading means for reading external command information,
The control means includes
A special program storage unit storing special programs; and
An installation execution unit for installing the special program;
The installation execution unit
A command information recording unit in which command information associated with the special program is recorded;
Comparing the command information read by the reading means with the command information recorded in advance in the command information recording unit, and when there is matching command information, a command information determination unit that permits installation apparatus.

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