JP2014015930A - Pump module and positive displacement pump - Google Patents

Abstract

The present invention relates to a pump module having a casing that defines at least one flow passage, and provides a pump module for precise conveyance with a simple structure at the same time.
Actuators are housed in a casing 14, wherein the actuators, which are positioned opposite to each other on both sides of a flow passage 17, form actuator stages A1 to A6, respectively. Actuator stages are provided continuously in series in the flow direction. Furthermore, the pumping device is configured as an elastic thin film 18 which has one part belonging to each of the individual actuator stages A1 to A6 under the control of one actuator. , One of each of the at least one flow passages 17 can be brought into contact with the surrounding portion to which it belongs.
[Selection] Figure 2

Description

The present invention
A pump module having a casing that defines at least one flow passage, wherein:
The at least one flow passage couples at least one inlet with at least one outlet; and
Each contains one pumping device positioned in a flow direction,
This pumping device can be partially offset via individually controllable actuators, and
The medium to be transported can be enclosed inside at least one transport chamber (Forderraumes);
The transfer chamber can be closed in capsule form between the pumping device part and the surrounding part belonging to each of the at least one flow passage by sequential control of these actuators. Yes, and
The present invention relates to the pump module in a manner that is movable between the at least one inlet and the at least one outlet in a series of transport movements.
The invention further relates to a positive displacement pump for conveying fluid, in which case at least one of the pump modules is used.

In the case of positive displacement pumps, the medium that normally flows through the inlet into the inner chamber of the pump is gecapsulated in the transfer chamber and is subsequently pushed away into the outlet.
In order to prevent this medium from flowing back into the inlet in the case of this displacement, and to prevent reverse suction of the already displaced medium,
At least one inflow and outflow control is performed via a pressure controlled valve or other structural configuration.
This, however, increases the required number of structural members and in addition makes it difficult to achieve a low final pressure. This is because these valves are in most cases differential pressure controlled and, at low pressures, no sufficiently high pressing force is formed in the region of the valve.
Depending on the structure and manner of introduction of each transport movement, friction losses and vibrations occur in addition. By the way, the positive displacement pump is partially constituted by a pump module. In the case of these pump modules, the number of structural members is reduced, and the transfer movement can be implemented as easily as possible.

A pump module can be read from Patent Document 1, and this pump module has a casing that partitions a rectangular parallelepiped flow passage. This flow channel then combines the inlet with the outlet and itself contains the pumping device.
The pumping device is then oriented in the flow direction and is formed by a number of piezoelectric actuator parts (Piezoaktorenabschnitte),
In a state where these piezoelectric actuator partial pieces are arranged in parallel so as to be in contact with each other, a kind of thin piece body located inside the flow passage is formed.
By control of these individual piezoelectric actuator pieces, the lamellae is partially absclenged, in which case the lamellae are then positioned around the respective piece. The medium to be abutted against the casing and to be transported is confined inside the transport chamber formed thereby. If these piezoelectric actuators are now controlled sequentially, the medium confined in the respective transport chamber is moved from the inlet to the outlet in a series of peristaltic transport movements.

Japanese Patent Laid-Open No. 3-81585

  Therefore, starting from this known technique, the object of the present invention is to provide a pump module for use, in which case the transfer movement is introduced in a simple structure at the same time in a precise structure and manner. Is possible.

This problem is solved in combination with typical features of claim 1 given the superordinate concept of claim 1.
The dependent claims dependent on claim 1 each provide advantageous further configurations of the invention. A positive displacement pump in which at least one pump module according to the invention is used is clear from the further claims 8-10.

In accordance with the present invention,
The pump module
Having a casing defining at least one flow passage,
The at least one flow passage couples at least one inlet with at least one outlet and, by itself, accommodates one pumping device positioned in each direction of flow. ing.
This pumping device can be partially displaced via individually controllable actuators, and in this case
The medium to be transported can be confined inside at least one transport chamber;
The transfer chamber can be closed in a capsule form between a portion of the pumping device and a peripheral portion belonging to each of the at least one flow passage by sequential control of these actuators, and ,
In a series of transfer movements, the transfer is possible between the at least one inlet and the at least one outlet.

In the sense of the present invention, the pumping device is configured in particular as a disc-like, plate-like or similar structural member, and the individual segments are under the influence of the actuator, It can be partially displaced in such a way that it is moved perpendicular to the longitudinal extension of the pumping device. In this case, depending on the number of parts of the pumping device that are displaced, one or a number of transfer chambers are confined with one or a number of surrounding portions of the flow passage, in which case , Each containing one medium to be transported.
In the sense of the present invention, this medium is a fluid, ie a gas or a gas mixture, or a liquid or liquid mixture.
With sequential control of the actuator, the at least one transfer chamber, which is then partitioned, moves between the at least one inlet and the at least one outlet of the pump module, and thus Similarly, the confined medium to be transported is transported between the inlet and the outlet. This transport movement is then analogous to the peristaltic movement of the pumping device, in particular in the appropriate control of these actuators.

The present invention is here:
The actuators are accommodated by a casing and, in this case, the actuators, which are located opposite to each other on both sides of the flow passage, form actuator stages, which are in the flow direction. It is provided continuously before and after,
Furthermore, the pumping device is configured as an elastic thin film, the thin film being one part of each of the individual actuator stages under the control of one actuator. Each of which has a technical teaching that it can abut against the surrounding part to which it belongs.
In other words, therefore, these actuators are positioned in the surrounding casing, through which the pumping device located in the flow passage can be partially displaced,
These actuators are in this case integrated into actuator stages in pairs, in which each actuator belongs to a respective one of the flow passages, so that one One actuator of the actuator stage is positioned above the flow path and the other actuator of the actuator stage is positioned below the flow path.
In general, these actuator stages are then provided one after the other in the flow direction, so that in the case of movement along the flow direction, the individual actuator stages are therefore in turn. Passed through.
The pumping device, formed as an elastic thin film,
Each one actuator of the individual actuator stage is controlled and in this case one part of the membrane located between the actuators of this actuator stage is deflected and there in the flow passage In the way that it touches the surrounding part,
In that case, it can be partially offset.

The pump module according to the invention is then characterized by a simple functional structure in a reliable functional manner.
Thus, depending on the positioning of the actuators in the casing, which is stopped by itself, these actuators can be controlled in a simple structure and manner via the conductors (Leitungen) that extend in the casing. The conductors are then spatially separated from the flow path and the medium conveyed in the flow path.
Based on this mode of transport movement, no further valves on the inlet and outlet sides are required. This is because the medium to be transported is partly encapsulated between the membrane itself and the periphery of the flow channel by elastic membrane deflection. This membrane is then the only movable structural member, so that with a suitable optimization, a long service life of the pump module according to the invention can be achieved.
In addition, the thin film can be precisely displaced as an elastic structural member and can be brought into contact with the periphery of the flow passage, whereby the respective transfer chambers are accurately formed, And can be sealed as well.
Furthermore, the pumping frequency of the pump module as well as the pumping sequence, ie the setting of the size of the at least one transfer chamber, can be freely adjusted via these actuators, so that the pump module according to the invention In addition, depending on the desired mode of transport, the control of these actuators can be varied in a wide range to accommodate different usage situations.
Overall, the pump module according to the present invention is characterized by a simple construction with low manufacturing engineering effort and little noise generation.

Unlike the above, in the case of the pump module of Patent Document 1, it is difficult to control the pumping device located in the flow passage. This is because, due to the partial displacement, the piezoelectric element piece provided on the thin plate-like structural member must be energized accordingly.
For this purpose, corresponding contacts must be provided, or conductors must be introduced into these deflectable pumping devices, which complicates the structure of the pump module accordingly. In addition, as a result, the manufacturing technical labor is increased. Furthermore, the thin plate with the piezoelectric element is slightly more flexible than the thin film, and in particular, the setting of the transfer chamber (Definition) is stronger in accordance with the arrangement and size of the piezoelectric element partial pieces. It is set in advance.
In response to the above, the pumping sequence cannot be individually adapted to individual usage situations. Similarly, the adhesion of this lamina to the periphery of the flow passage is less accurate than in the case of an elastic thin film.

In accordance with an advantageous embodiment of the invention, the actuator is formed by a magnet coil.
Each of these magnet coils is in particular surrounded by a highly permeable material, such as iron, for example, and forms a corresponding magnetic field when energized, via this magnetic field. The elastic thin film is displaced by the part belonging to each of the thin films.
In order to achieve a partial deflection of the thin film in a magnetic field,
The thin film according to yet another embodiment of the invention consists of a magneto-rheological stretchable synthetic resin material or is ferromagnetic in each of the thin film portions belonging to the actuator stage. It is made of a stretchable synthetic resin material mixed with the material.
Magnetorheological stretchable synthetic resin material
A synthetic material made of a flexible stretchable synthetic resin matrix (Elastomermatrix) having magnetically polarizable fine particles provided therein, and can act on these fine particles via a magnetic field.
In the case of an embodiment of a thin film composed of a stretchable synthetic resin material having a ferromagnetic material mixed therein, in the sense of the present invention, in particular, the periphery is cast with a thin metal plate segment having a stretchable synthetic resin material. Rarely, ummossen, and therefore a binding system is constructed.

According to an alternative embodiment of the invention, the actuator is formed by an electrode. In the respective energization of these electrodes, in that case, an electric field is formed in each case, through which the elastic thin film can likewise be partially displaced.
For this purpose, the elastic thin film consists in particular of an electrorheological stretchable synthetic resin material, in which case the electrorheological stretchable synthetic resin material comprises Formed of stretchable synthetic resin having fine particles mixed therein, and these fine particles are pulled in the direction of the respective energized electrodes in the electric field, and in accordance with the above, the elastic A partial displacement of the thin film.

In accordance with a further embodiment of the present invention, the casing comprises at least two casing members, wherein the casing members and the thin film located in the middle are formed as an annular disc. Furthermore, the at least one inlet is provided radially outward and is coupled to the at least one outlet via a flow passage, the outlet being positioned centrally in the radial direction. ing.
In this case, the pump module thus has an annular structure, in which the medium to be transported is transported from the radially outer side to the radially inner outlet. In the sense of the present invention, however, it is equally well possible that the inlet can likewise be centrally positioned and that at least one outlet can be located radially outward. is there.
With this annular structure of the pump module, without any problems, a large number of pump modules
Individual annular pump modules are stacked one above the other in the axial direction, and parallel supply of individual inflows is implemented depending on the desired connection, or at least one outlet of one module is later In the manner of being connected according to the mode of series connection with at least one inlet of the subsequent module,
It can be connected before and after.
In the case of an annular structure of the pump module consisting of an annular disc, the actuator can correspondingly be formed in a ring shape, for example as a ring-shaped coil or a ring-shaped electrode. Can be formed. As an alternative to this annular structure, however, in principle, a rectangular structure of the pump module is also possible.

In a further configuration of the invention, the actuator stages are positioned relative to each other at equal intervals or at different intervals in the flow direction.
Depending on the shape of the pump module and the type of medium to be transported, the at least one transport chamber is in this case in movement of this transport chamber between at least one inlet and at least one outlet. However, it can be held constant in volume, or can be varied, however.
Thus, the medium in the form of a gas or gas mixture is transported in such a way that, in the case of the annular structure of the pump module, the spacing between these actuators is chosen in the flow direction at equal intervals. Compressed from at least one inlet to at least one outlet;
Thus, the at least one transfer chamber is continuously moved on the basis of the smaller ring area between these actuator stages as it moves from the radially outer inlet to the central outlet. And therefore compression of the gas takes place.
Similarly, in the case of a rectangular structure, a continuous reduction of at least one transfer chamber is formed by the different spacing between the actuator stages.

In contrast to the above, if the medium to be transported is a liquid, it is usually not desirable to reduce the volume of at least one transport chamber based on the incompressible properties of this liquid.
This volume is determined upon movement from at least one inlet to at least one outlet.
In the case of one annular pump module, the individual actuator stages are positioned with respect to each other in the flow direction with different spacings to realize an equal ring area, or
In the case of the rectangular structure of the pump module, the constant spacing between the actuator stages is selected and kept constant.
If at least one inlet is provided in the center in the flow direction and at least one outlet is located radially outward, finally, the liquid transfer is likewise effected by the annular shape of the pump module. And in the case of actuator stages positioned at equal intervals relative to each other, the volume of at least one transfer chamber is thus increased during the movement from the inlet to the outlet. The

The variable or unchanging volume of the transfer chamber can however also be set by appropriate adjustment of the pumping sequence as well. Since the capsule-like closure and movement of the respective transfer chambers is controlled by the control of the corresponding actuator stages, the size and change of the transfer chambers can be adjusted almost freely by changing the operation of these actuator stages. .
Otherwise, based on the distance between the actuator stages and by the structure of the pump module, the compression of the medium that takes place in the case of movement of the transfer chamber can therefore be increased or decreased by the above. Could be
Thus, on the outlet side, the pressure level that is to be achieved for each of the media is achievable.

In accordance with the present invention, the positive displacement pump has at least one pump module formed in accordance with one of the variations described above. This positive displacement pump is in this case formed in particular as a vacuum pump and is used for transporting the fluid.
Advantageously, in addition, a number of pump modules are provided in the pump casing in series connection and / or in parallel connection, so that the fluid passes through these individual pump modules, In parallel or in succession (abfoldend), they are transported into a common outlet.

In accordance with yet another advantageous embodiment of the invention, the actuator of at least one pump module is controllable via power electronics.
Through this type of power electronics, there is no problem at this time, different pumping frequencies, and likewise pumping sequences, can be implemented by corresponding control of the actuator, in which case Similarly, adapted control of multiple pump modules can be performed.
Apart from one of the power electronics belonging to this or these pump modules, it is equally important that other suitable pumps, for example turbomolecular pumps, or one suitable electronic device of another system are also important elements. It is.

A positive displacement pump formed in accordance with one embodiment of the above-described variant embodiment, in accordance with the present invention, in particular in a vacuum chamber, when achieving a low or medium vacuum (Grob-order Feinvacuums) Used as a pump.
In addition to it,
The positive displacement pump formed according to the invention as a vacuum pump is likewise a high vacuum pump and / or a super high vacuum pump (Hoch-und / order Ultrahochvacumpumpe), in particular a turbomolecular pump (Turbomolecularkumpump) reserve pump (Vorpumpe) Used as.

The invention is not limited to the presented combinations of parallel or dependent claims. Furthermore, these individual features may likewise be combined within the scope of the invention with the individual features that can be read from the claims, from the description of the embodiments of the invention described below, or from the drawings. Is given.
The association of claims to the drawings, through the use of reference signs, should not limit the scope of protection of these claims.

  Advantageous embodiments of the invention are described in detail below with reference to the drawings.

1 is a schematic view of a positive displacement pump according to a first advantageous embodiment of the invention; FIG. FIG. 2 is a schematic view of a pump module of the positive displacement pump of FIG. 1 according to the possibilities of the first embodiment. FIG. 3 is a diagram of an individual switching sequence of the pump module of FIG. 2. FIG. 2 is a schematic view of a pump module of the positive displacement pump of FIG. 1, corresponding to the possibility of an alternative embodiment. FIG. 2 is a schematic view of the pump module of the positive displacement pump of FIG. 1 in accordance with the potential of yet another alternative embodiment of the present invention. FIG. 6 is a schematic view of a positive displacement pump according to the possibility of the second embodiment of the present invention.

From FIG. 1, the general appearance of a positive displacement pump according to the first embodiment of the invention can be seen, in which case the positive displacement pump is in particular a vacuum pump and in this case more advantageously. Is an auxiliary pump of a turbomolecular pump.
In this case, the positive displacement pump is equipped with a pump casing 1, and in this pump casing, between the inlet side 2 provided on the side of the pump casing 1 and the outlet side 3 on the end face side. A number of identically configured pump modules 4, 5 and 6 are provided.
These pump modules 4 to 6 are each configured as an annular rotationally symmetric module in this case,
These pump modules are connected to the inlet side 2 via a ring-shaped inlet 7, 8, or 9, respectively, one at the center. It is commonly sent to the discharge port side 3 through the discharge port 10, 11, or 12 (foredern).
These pump modules 4 to 6 are consequently accommodated in the pump casing 1 in a parallel connection, and in this case in particular the fluid in the form of an air mixture from the inlet side 2 to the outlet side. Carry to 3. In addition, a further electronic power device 13 is accommodated in the pump casing 1, through which the individual pump modules 4, 5 and 6 can be controlled.

From FIG. 2, it can now be seen that a schematic individual appearance of the pump module 4, which pump module corresponds in structure and also to the pump modules 5 and 6.
As can be appreciated, the pump module 4 is equipped with a casing 14, which is composed of two casing members 15, 16,
Each of these casing members is formed as a disc having an annular cross-section, and in the manner that these casing members are provided relative to each other at a certain interval, an intermediate flow passage 17 is provided. It is partitioned.
This flow passage 17 then combines the ring-shaped inlet 7 which is merely suggested in the present embodiment with the outlet 10 located in the center, in which case in FIG. In the radial direction, only half of this pump module 4 is shown. Through this flow passage 17 and thus the fluid starting from the inlet 7 flows radially through the casing 14 and passes through the outlet 10 in the axial direction and can be seen in FIG. It reaches the outlet side 3.

A thin film 18 is further accommodated by the flow passage 17, and this thin film is provided at the center between the casing member 15 and the casing member 16 in the stationary position shown in FIG. 2. . For this purpose, the membrane 18 is fixed in tension between the casing member 15 and the casing member 16 in a suitable manner, for example in the region of the ring-shaped inlet 7.
In this embodiment, the thin film 18 is similarly formed as a disk having an annular cross section, and is made of a stretchable synthetic resin material. In the stretchable synthetic resin material, A large number of metal thin plate-like rings B1 to B6 concentrically located around the discharge port 10 are integrated together.

Furthermore, as can be seen from FIG. 2, in the radial direction, a number of actuator stages A1 to A6 are further provided at the height of the individual thin metal plate rings B1 to B6. In the flow direction from the inflow port 7 to the discharge port 10, they are provided continuously in succession.
Each of the actuator stages A1 to A6 is in this case made up of two actuators, which are arranged on both sides of the flow passage 17 and likewise on the respective sheet metal rings B1 to B6. Are provided on both sides of one of the thin metal ring.
The actuators of these actuator stages A1 to A6 are formed by magnet coils M1.1 to M6.2, which are then positioned relative to each other, and these magnet coils are each surrounded by iron. In addition, the actuator stages A1 to A6 are formed in a state of being integrated into a pair state.
By means of each actuator stage of these actuator stages A1 to A6, then via the power electronics 13
Magnet coils M1.1 or M1.2, or M2.1 or M2.2, or M3.1 or M3.2, or M4.1 or M4.2, or M5.1 or M5 integrated in pairs .2 or M6.1 or M6.2 can be energized by one magnet coil, and accordingly, a magnetic field is formed by each magnet coil, and a thin metal plate ring B1 positioned in the middle of each magnet coil. Alternatively, B2, or B3, or B4, or B5, or B6 is pulled into the respective coil, and thus the membrane 18 is partially displaced.
In this case, this thin film 18 abuts on each casing member 15 or 16 and thus on the surrounding part of the flow passage 17 in each part, at which time individual magnet coils M1.1 to M6.2 are brought into contact. By appropriate control, a transfer chamber can be formed between the thin film 18 and the casing members 15 and 16.

In FIG. 3, a complete exemplary switching sequence for the pump module 4 of FIG. 2 is illustrated. As can be seen in this case, the transport movement from the inlet 7 to the outlet 10 is shown in five individual sequences I to V, in which case this individual sequence V is It corresponds to an individual sequence I.
The individual actuator stages A1 to A6 then control one magnet coil in each of the magnet coils M1.1 to M6.2, thus
The thin film 18 located in the middle is displaced in the direction of one of the casing members 15 or 16 with the part to which it belongs, and subsequently abuts against this casing member.
In general, via the six actuator stages A1 to A6, the conveying chambers 19 and 19 'are on the one hand between the thin film 18 and the casing member 15 and on the other hand between the thin film 18 and the casing member 16. Transfer chambers 20 and 20 'can be formed;
Each of these transfer chambers is moved from the inlet 7 to the outlet 10 in the course of the pumping sequence.

This transfer movement, which is similar to a peristaltic movement, will now be described by way of example, based on the transfer chamber 19, over the respective individual sequences I to V, under the integrated point of view of FIGS. Do:
First of all, in the first individual sequence I, the transfer chamber 19 is closed in a capsule form by energization of the magnet coils M1.1, M2.2, M3.2 and M4.1, and A suitable amount of fluid is confined between the membrane 18 and the casing member 15.
In this case, the transfer chamber 19 is in the actuator stage A2.
Instead of magnet coil M2.2, magnet coil M2.1 and in actuator stage A4, magnet coil M4.2 instead of magnet coil M4.1, and in actuator stage A5, magnet coil M5. In the way that 1 is energized,
In the individual sequence II, it is further moved in the direction of the discharge port 10.
For the transition to a further individual sequence III, in that case compared to the individual sequence II,
In the actuator stage A3, the magnet coil M3.1 is controlled instead of the magnet coil M3.2, and in the actuator stage A5, the magnet coil M5.2 is controlled instead of the magnet coil M5.1. In addition, in the actuator stage A6, the magnet coil M6.1 should be energized.
In short, in the individual sequence IV compared to the individual sequence III,
In actuator stage A4, magnet coil M4.1 is operated instead of magnet coil M4.2, and in actuator stage A6, magnet coil M6.2 is operated instead of magnet coil M6.1.
The fluid existing in the transfer chamber 19 is transferred into the discharge port 10.
In a separate sequence V, a new cycle starts under the capsule-like closure of the transfer chamber 19 '.

From FIG. 2 it can be seen that in this case the actuator stages A1 to A6 are positioned relative to one another at equal intervals.
In combination with the casing members 15 and 16 and also the annular structure of the thin film 18, the transfer chambers 19, 19 ', 20, 20' are continuously moved in the transfer chamber in the radial direction. Reduced in volume. This is because the ring-shaped volume formed between the actuator stages A <b> 1 to A <b> 6 continuously becomes smaller to the discharge port 10. This results in the fluid present in the respective transfer chamber 19, 19 ′, 20, or 20 ′ being compressed during transfer from the inlet 7 to the outlet 10.

In order to keep the pressure fluctuations in the transfer chambers 19, 19 ′, 20 and 20 ′ as small as possible when moving to the outlet 10,
A rapid switching should be carried out via the power electronics 13 in each of the actuator stages A1 to A6 and likewise between the actuator stages A1 to A6. .

From FIG. 4, the possibility of an alternative embodiment of the pump module 4 ′ can be read and this pump module can be used in the positive displacement pump in FIG. 1 instead of the pump modules 4-6.
2 is different from the pump module 4 in FIG. 2 in that the thin film 21 is formed of a magneto-rheological stretchable synthetic resin material. It is made of a stretchable synthetic resin having nanoscale fine particles mixed therein. In this case, a single force acts on the microparticles in one magnetic field, and this also applies to the thin film in order to implement a deviation similar to the transport movement described in FIG. 21 desired partial deviations can be implemented.
In other respects, the pump module 4 'illustrated in FIG. 4 corresponds to the pump module 4 of FIG.

Furthermore, from FIG. 5, the possibility of a further alternative embodiment of the pump module 4 ″ can be read, which pump module 4 ″ is likewise replaced by the volume in FIG. 1 instead of the pump modules 4-6. Can be used in shape pumps.
In contrast to the embodiment of FIG. 2, the actuator stages A1 to A6 are in this case formed by electrodes E1.1 to E6.2 which are integrated in pairs and located oppositely. These electrodes E1.1 to E6.2 can also be controlled individually via the power electronics 13 in order to implement a dynamic transport movement.
In order to induce partial displacement of the thin film 22 in the electric field induced by the individual electrodes E1.1 to E6.2, this thin film is, in this example, made from an electrorheological stretchable synthetic resin material. This electrorheological stretchable synthetic resin material is formed of a stretchable synthetic resin having nanoscale fine particles mixed therein. Under the action of one electric field, a force is then applied to the microparticle, which in turn can induce a partial displacement of the thin film 22.
Otherwise, this pump module 4 ″ in FIG. 5 corresponds to the pump module 4 of FIG.

In summary, further in FIG. 6, the schematic appearance of a positive displacement pump according to a second embodiment of the invention is illustrated.
In the difference from the embodiment of FIG. 1, the pump modules 4 to 6 are in this case not provided in parallel connection, but rather are located one after the other in the flow direction according to the mode of series connection. Is positioned. For this purpose, the inlet 7 of the pump module 4 is connected to the inlet side 2 of the positive displacement pump, whereas the outlet 10 of this pump module 4 is connected to the inlet of the pump module 5. It is connected to the inlet 8.
Similarly, the outlet 11 of the pump module 5 is connected to the inlet 9 of the pump module 6, and the outlet 12 of the pump module 6 is connected to the outlet side 3 of the positive displacement pump. Yes. In this case, each outlet 10, 11, or 12 should only be provided only above the respective pump module 4, 5, or 6, i.e. the casing member 15 located above each one. Only should be penetrated with a through bore that is axially oriented in the center.
In other respects, the positive displacement pump embodiment of FIG. 6 however corresponds to the embodiment according to FIG.

With the individual embodiments of the pump modules 4-6, or 4 'or 4 ", the transport of the media is possible in a simple structure and at the same time a reliable functional aspect. Can be connected to each other for positive displacement pump embodiments in any suitable manner.
In this case, in particular, the use in the region of the auxiliary pump or auxiliary pump stage of the turbomolecular pump is worth considering.

DESCRIPTION OF SYMBOLS 1 Pump casing 2 Inlet side 3 Outlet side 4, 4 ', 4 "Pump module 5 Pump module 6 Pump module 7 Inlet 8 Inlet 9 Inlet 10 Outlet 11 Outlet 12 Outlet 13 Electric power device 14 Casing 15 Casing member 16 Casing member 17 Flow passage 18 Thin film 19, 19 'Transfer chamber 20, 20' Transfer chamber 21 Thin film 22 Thin film 23 Electrorheological stretchable synthetic resin material A1-A6 Actuator stage B1-B6 Metal thin plate ring M1.1 to M6.2 Magnet coil E1.1 to E6.2 Electrode

Claims (12)

A pump module (4, 5, 6; 4 '; 4 ") having a casing (14) defining at least one flow passage (17),
The at least one flow passage couples at least one inlet (7, 8, 9) with at least one outlet (10, 11, 12); and
Each contains one pumping device positioned in a flow direction,
This pumping device can be partially displaced via individually controllable actuators, and
The medium to be transported can be confined inside at least one transport chamber (19, 20);
The transfer chamber can be closed in the form of a capsule between a portion of the pumping device and a peripheral portion belonging to each of the at least one flow passage (17) by sequential control of these actuators. Yes, and
In the pump module of the type that is movable between the at least one inlet (7, 8, 9) and the at least one outlet (10, 11, 12) in a series of transport movements,
The actuators are accommodated by the casing (14), and the actuators (A1 to A6) that are located opposite to each other on both sides of the flow passage (17) respectively. Form the
These actuator stages are provided continuously in succession in the flow direction,
The pumping device is configured as an elastic thin film (18; 21; 22);
Each of these thin films is controlled by one actuator in each of the individual actuator stages (A1 to A6), with one part belonging to each.
One each of said at least one flow passage (17) being able to abut against the surrounding part to which it belongs,
Pump module characterized by (4, 5, 6; 4 '; 4 ").   The pump module (4, 5, 6; 4 ') according to claim 1, characterized in that the actuator is formed by a magnet coil (M1.1 to M6.2).   The thin film (18; 21) is made of a magneto-rheological stretchable synthetic resin material, or a ferromagnetic material is mixed in each part belonging to the actuator stage (A1 to A6). The pump module (4, 5, 6; 4 ') according to claim 2, wherein the pump module is made of a stretchable synthetic resin material.   Pump module (4 ") according to claim 1, characterized in that the actuator is formed by electrodes (E1.1 to E6.2).   The pump module (4 ") according to claim 4, wherein the thin film (22) is made of an electrorheological stretchable synthetic resin material (23). The casing (14) comprises at least two casing members (15, 16);
The casing members (15, 16) and the thin film (18; 21; 22) located in the middle are formed as a disc having an annular cross section; and
At least one inlet (7, 8, 9) is provided radially outward and is coupled to at least one outlet (10, 11, 12) via a flow passage (17). Yes, this outlet is positioned in the center in the radial direction,
The pump module (4, 5, 6; 4 '; 4 ") according to claim 1, characterized in that   Pump module (4, 5, 6; 4 'according to claim 1, characterized in that the actuator stages (A1 to A6) are positioned relative to one another in the flow direction at equal intervals or at different intervals. ).   8. A positive displacement pump, in particular a vacuum pump, for conveying fluid, comprising at least one pump module (4, 5, 6; 4 '; 4 ") according to any one of the preceding claims.   The volume according to claim 8, characterized in that in the pump casing (1), a large number of pump modules (4, 5, 6) are provided in series connection and / or in parallel connection. Shape pump. The actuator of at least one pump module (4, 5, 6; 4 '; 4 ") is
9. The displacement pump according to claim 8, wherein the displacement pump is controllable via a power electronics (13). A method for achieving a low or medium vacuum in a vacuum chamber comprising:
In this case, a positive displacement pump according to any one of claims 8 to 10, configured as a vacuum pump, is used to achieve the low or medium vacuum.   Use of a positive displacement pump according to claim 8 as a vacuum pump and as a pre-pump for a high vacuum pump and / or an ultra-high vacuum pump, in particular a turbomolecular pump.

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