JP2014011303A - Flash lamp instantaneous heating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flash lamp instantaneous heating device capable of variously controlling a waveform of light emission intensity of a flash lamp and realizing an optimum heating according to a heating target.
SOLUTION: A flash lamp F1, a plurality of capacitors C1 to Cn arranged in parallel with the flash lamp F1, and between each capacitor C1 to Cn and the flash lamp F1, or a predetermined capacitor C1 to Cn and the flash lamp F1. Switching elements S1 to Sn, charging circuits E1 to En for charging the capacitor, and a control circuit 2 for controlling the timing of the on operation of the switching elements.
[Selection] Figure 1

Description

  The present invention relates to a flash lamp instantaneous heating apparatus used for heat treatment of a semiconductor substrate or the like by using radiant energy of a flash lamp.

Conventionally, an instantaneous heating device using a flash lamp has been used as a heat treatment technique in a manufacturing process of a semiconductor substrate or printed electronics.
Such heat treatment requires different heating conditions depending on the heating target. For example, when modifying a semiconductor substrate by heat treatment, it is necessary to raise the temperature to the target temperature, and depending on the material and size of the semiconductor substrate, etc., to prevent cracking and destruction due to sudden temperature rise and fall. Condition setting is required.
Further, when baking and sintering the metal ink on the surface of the substrate, heating conditions are required so that the substrate is not altered or destroyed.

  Specifically, a capacitor is connected to the electrode of the flash lamp via a switching element, and the discharge current from the capacitor is controlled by controlling the switching element, and the flash lamp is caused to emit light by this discharge current. ing. Then, in order to make the light emission intensity of the flash lamp that emits light with the discharge current from the capacitor in accordance with the purpose of the heat treatment, the waveform of the discharge current and the like are controlled while controlling the switching element.

For example, in the heating device shown in Patent Document 1, the waveform of the discharge current supplied to the flash lamp is controlled by a switching element in order to achieve the target light emission intensity.
That is, an analog signal corresponding to the target waveform is input to the switching element, and the internal impedance of the switching element is changed by the analog signal. As a result, a discharge current having a waveform corresponding to the analog signal is caused to flow to the flash lamp via a switching element having an impedance for controlling the current. Therefore, while a discharge current is flowing through the flash lamp, the current continues to flow through the switching element having an impedance for current control.

  Moreover, the apparatus of patent document 2 controls on / off of the said switching element with a pulse signal, and controls the electric current value which flows into a flash lamp. In such an apparatus, the time of the discharge current flowing through the switching element is controlled by changing the pulse width of the pulse signal and the number of repetitions thereof, and the light emission intensity and the light emission time of the flash lamp are controlled. . Under such a device, the switching element must be frequently turned on and off.

JP 2010-045093 A JP 2010-192692 A

As described above, in the device described in Patent Document 1, since the switching element is controlled by an analog signal, if the light emission intensity of the flash lamp is increased and the light emission time is kept long, a high voltage is applied. The current continues to flow through the switching element having an impedance for controlling the current for a long time corresponding to the light emission time of the flash lamp.
If the current continues to flow through the switching element having the impedance for controlling the current for a long time, the loss power increases, the switching element generates heat, and the life of the switching element is shortened. It was.

On the other hand, even in the control using the pulse signal of Patent Document 2, since one switching element is repeatedly turned on / off, there is a problem that the loss power at the time of turning on / off is large and the switching element is also damaged.
As described above, in any of the conventional devices described above, since the load on the switching element is large, it is difficult to keep the light emission time long or to frequently perform on / off control. Therefore, the problem that it becomes difficult to cope with various heating conditions could not be solved.

  An object of the present invention is to provide a flash lamp instantaneous heating device that can control the waveform of the emission intensity of the flash lamp in various ways without increasing the burden on the switching element, and can realize optimum heating according to the heating target. is there.

  The first invention is provided in either a flash lamp, a plurality of capacitors in parallel with the flash lamp, and between each of the capacitors and the flash lamp or between a predetermined capacitor and the flash lamp. A discharge circuit comprising a switching element and a charging circuit for charging the capacitor is provided, and a control circuit for controlling the timing of the ON operation of the switching element is connected to the discharge circuit.

  The second invention is provided in either a flash lamp, a plurality of capacitors in parallel with the flash lamp, and between each of the capacitors and the flash lamp or between a predetermined capacitor and the flash lamp. A plurality of discharge circuits comprising a switching element and a charging circuit for charging the capacitor are provided, and a control circuit for controlling the timing of the ON operation of the switching element is connected to the plurality of discharge circuits. To do.

    The third invention is characterized in that the charging circuit is individually provided for each capacitor.

  The fourth invention is characterized in that an inductance element is provided at any position between the capacitor and the flash lamp.

  The fifth invention is characterized in that an inductance element is provided corresponding to each of the capacitors.

According to the first invention, it is possible to cope with various light emission conditions by arbitrarily combining the discharge currents discharged from a plurality of capacitors connected in parallel to one flash lamp.
In particular, if the number of sets of capacitors and switching elements is increased and discharged sequentially, only an instantaneous discharge current due to one ON operation flows through each switching element. Loss power decreases and does not become high temperature. In addition, if each capacitor is discharged continuously, the flash lamp emission time can be easily extended. Even if the light emission time of the flash lamp is increased, since only an instantaneous discharge current due to one ON operation flows through each switching element as described above, the damage to the switching element is not increased. .
Further, since the loss power of each switching element is reduced as described above, the amount of heat generation is also reduced accordingly. Therefore, the apparatus for dissipating heat from the switching element does not increase in size.

According to the second invention, by providing a plurality of discharge circuits, it is possible to simultaneously emit light from the respective flash lamps provided in each of the discharge circuits, thereby increasing the light irradiation area.
In addition, the light emission pattern of each flash lamp can be variously changed just by controlling the ON operation timing of the switching element, as in the first invention.
Therefore, it is possible to cope with various heating conditions even on a large irradiation surface while reducing damage to the switching element.

  According to the third invention, since the charging voltage of each capacitor can be individually controlled, the charging amount is changed by changing the charging voltage of the capacitor for each charging circuit, and the peak value of the discharging current of the capacitor is changed. You can also. As described above, if the peak value of one discharge current can be controlled, the waveform of the light emission current can be more finely controlled by combining with the discharge current of the other capacitor to cope with various heating conditions.

According to the fourth and fifth inventions, the rise of the discharge current can be changed by the inductance element, and the peak value can be changed accordingly. For example, the rise of the discharge current can be made gentle and the heating temperature can be made gentle. As a result, it is possible to suppress a rapid temperature increase of the heating target, and to prevent, for example, cracking due to thermal expansion of the heating target or destruction.
Furthermore, if the rise of the discharge current is made gentle, it is possible to prevent the flash lamp from suddenly flowing a large current, so that the life of the flash lamp can be extended.

  In particular, according to the fifth aspect of the invention, since the rise of the discharge current corresponding to each capacitor can be individually changed, the waveform of the light emission current formed by combining the discharge current of each capacitor can be controlled more finely. Can do.

FIG. 1 is a circuit diagram of the first embodiment. FIG. 2 is a diagram showing the light emission intensity of the flash lamp of the first embodiment. FIG. 3 is a diagram showing the light emission intensity of the flash lamp when the voltage of each charging circuit of the first embodiment is changed. FIG. 4 is a diagram for explaining the function of the inductance element. FIG. 5 is a circuit diagram of the second embodiment. FIG. 6 is a circuit diagram of the third embodiment. FIG. 7 is a circuit diagram of the fourth embodiment. FIG. 8 is a diagram showing a connection example of inductance different from that of the first embodiment. FIG. 9 is a diagram showing a connection example of inductance different from FIG. FIG. 10 is a circuit diagram of the fifth embodiment.

The flash lamp instantaneous heating apparatus according to the first embodiment of the present invention includes a discharge circuit 1 shown in FIG.
The discharge circuit 1 includes one flash lamp F1, and n capacitors C1 to Cn are connected in parallel to the flash lamp F1. The capacitors C1 to Cn are individually connected to charging power sources E1 to En that are charging circuits of the present invention.

In addition, inductance elements L1 to Ln and thyristors S1 to Sn as switching elements are provided between the capacitors C1 to Cn and the flash lamp F1, respectively, and are configured by the one charging power source, the capacitor, the inductance element, and the thyristor. The circuit to be used is one channel.
In the first embodiment shown in FIG. 1, a circuit composed of a charging power source E1, a capacitor C1, an inductance element L1, and a thyristor S1 is a first channel 1CH, a charging power source E2, a capacitor C2, A circuit composed of the inductance element L2 and the thyristor S2 is a second channel 2CH,... A circuit composed of the charging power source En, the capacitor Cn, the inductance element Ln, and the thyristor Sn. The discharge circuit 1 of the flash lamp instantaneous heating device in the first embodiment is constituted by the channel nCH, and these channels 1CH to nCH.

The control circuit 2 is connected to the thyristors S1 to Sn of each channel. The control circuit 2 has a function of controlling the on operation of the thyristors S1 to Sn, and controls the operation timing of each of the thyristors S1 to Sn when a light emission command is input from the outside.
Specifically, when a light emission command signal is input, a trigger signal is input to the thyristors S1 to Sn of each channel according to a preset procedure, and the switch functions of the thyristors S1 to Sn are sequentially turned on.

Before the light emission command is input to the control circuit 2, the capacitors C1 to Cn are charged in advance by the corresponding charging circuits E1 to En, and the output from the charging power supply is stopped. When any of the thyristors S1 to Sn is turned on in a state where the charging is completed in this way, the discharge current from the capacitor corresponding to the thyristor is supplied to the flash lamp F1.
The thyristors S1 to Sn are turned on by a trigger signal input from the control circuit 2 and flow the discharge current from the capacitors C1 to Cn, but automatically when the discharge ends and the discharge current stops flowing. Turns off.

A trigger driving circuit 3 is connected to the control circuit 2.
The trigger driving circuit 3 is a circuit for supplying a high voltage trigger pulse to the flash lamp F1. By supplying this high voltage trigger pulse to activate the molecules in the flash lamp F1, the flash lamp F1 emits light reliably by the discharge current flowing through the thyristors S1 to Sn.
Therefore, the control circuit 2 controls the trigger driving circuit 3 so that a trigger pulse is output in accordance with the timings at which the plurality of thyristors S1 to Sn are turned on.

The operation of the heating apparatus configured as described above and the light emission pattern that can be realized by this apparatus will be described.
Here, in order to simplify the description, an example in which the discharge circuit 1 of FIG. 1 includes four channels CH1 to CH4 will be described.
In the first embodiment, the capacitors C1 to C4 have the same capacity, and the charging amounts charged by the charging power sources E1 to E4 are also equal. The inductance elements L1 to L4 are also the same.

  First, in the off state of all the thyristors S1 to S4 of the heating device, the corresponding capacitors C1 to C4 are charged by the charging power sources E1 to E4. The charging power sources E1 to E4 may be configured to be controlled by the control circuit 2, or may be controlled by another control circuit (not shown). In any case, the charging power sources E1 to E4 start charging when the thyristors S1 to S4 connected to the capacitors C1 to C4 are in the off state, and before the light emission command is input to the control circuit 2 The charging is controlled to end.

  The thyristors S1 to S4 are turned on when a trigger signal is supplied from the control circuit 2 to flow a discharge current. When the discharge current stops flowing, the thyristors S1 to S4 are automatically turned off. That is, the on / off state of the thyristors S1 to S4 can be determined by whether or not a discharge current is flowing. Accordingly, it is possible to control the charging power sources E1 to E4 so that the discharging current is detected in each channel and charging is started after the detected value becomes zero.

  Further, since each thyristor S1 to S4 is controlled according to a preset procedure, the time from the input of the light emission command to the end of the discharge of each capacitor C1 to C4 can be set in advance. Therefore, when a predetermined time has elapsed from the input of the light emission command, it may be determined that each of the thyristors S1 to S4 is in an off state and charging is started.

When a light emission command is input to the control circuit 2 with the capacitors C1 to C4 being charged, the control circuit 2 turns on the thyristor S1 of the first channel 1CH and turns on the trigger drive circuit 3. Control to output a trigger pulse.
Thereby, the flash lamp F1 is supplied with the discharge current flowing through the thyristor S1 together with the trigger pulse from the trigger drive circuit 3, and the flash lamp F1 emits light. The emission intensity at this time is shown in FIG. 2A, and the waveform of the emission intensity of 1CH corresponds to the waveform of the discharge current of the capacitor C1. That is, the emission intensity rises with the thyristor S1 being turned on and becomes zero when the capacitor C1 is discharged.

  The control circuit 2 sequentially turns on the thyristors S1 to S4 at a predetermined timing from the time point t1 (FIG. 2A) when the light emission command is input, and also performs the trigger driving in accordance with the timing of each on operation. The circuit 3 is controlled. That is, the trigger driving circuit 3 operates every time the thyristors S1 to S4 are turned on, and supplies a trigger pulse to the flash lamp F1 to emit light.

In the first embodiment, the charge amounts of all the capacitors C1 to C4 and the inductance elements L1 to L4 are made equal. Therefore, the waveforms of the discharge currents corresponding to the charge amounts of the capacitors C1 to C4 are the same, and the magnitude and discharge time are the same.
Therefore, the waveform of the light emission intensity corresponding to the discharge current of each channel is also equal.
That is, if the thyristors S1 to S4 are sequentially turned on at a predetermined interval, the flash lamp F1 repeatedly emits light for the same time with the same light emission intensity. If light emission from the first to fourth channels 1CH to 4CH based on one light emission command is one light emission cycle, light emission is performed four times per cycle.
In the figure, 1CH, 2CH,... Indicate which channel emits light by each discharge current.

And if the said control circuit 2 controls largely the space | interval of ON operation of each thyristor S1-S4, as shown to Fig.2 (a), the time of the said 1 cycle will become long and heating time will become long. As a result, the temperature of the heating target can be raised gradually.
On the other hand, if the interval between the ON operations of the thyristors S1 to S4 of each channel is shortened, as shown in FIG. 2B, each light emission interval is shortened, and accordingly, one cycle time is also shortened. Therefore, it is possible to raise the temperature of the heating target in a shorter time than in the case of FIG.

  Further, if the interval between the ON operations of the thyristors S1 to S4 is further shortened, as shown in FIG. 2C, the light emission due to the discharge of each channel overlaps and the flash lamp F1 emits light continuously. In FIG. 2C, the light emission intensity due to the discharge of one channel is indicated by a broken line, and the light emission intensity as a whole is indicated by a solid line. That is, when the light emission intensity having the waveform shown by the solid line is necessary, the thyristors S1 to S4 of the first to fourth channels 1CH to 4CH may be sequentially turned on.

Furthermore, if the thyristors S1 to S4 in a plurality of channels are simultaneously turned on, a large light emission intensity can be realized as shown in FIG.
As described above, the heating device of the first embodiment can realize the light emission patterns shown in FIGS. 2A to 2D only by controlling the ON operation timings of the thyristors S1 to S4. By combining the light emission patterns, various heating conditions can be handled.

In each thyristor S1 to S4, only a discharge current flows almost instantaneously by one ON operation, so that the loss power is small and the damage is small.
Further, when it is desired to continuously emit light as shown in FIG. 2C or when it is desired to realize a large emission intensity at once as shown in FIG. 2D, the currents flowing through the individual thyristors S1 to S4 are shown in FIG. This is the same as in the case of one channel 2 (a), and control that suppresses damage and power loss of individual switching elements becomes possible.

Furthermore, when it is desired to realize long-time light emission, if the number of channels used in one cycle is increased, a long heating time can be maintained without damaging a specific switching element.
Therefore, in the heating apparatus of the first embodiment, the timing for turning on the thyristors S1 to Sn can be set variously in the control circuit 2 according to the application, and can cope with various heating conditions.

  In the first embodiment, the trigger driving circuit 3 supplies the trigger pulse to the flash lamp F1 in accordance with the light emission timing of each channel. However, FIGS. 2 (b), 2 (c), ( When the intervals of the light emission timings approach or coincide with each other to some extent as shown in d), the trigger driving circuit 3 may supply the trigger pulse only once and omit the rest. This is because when the emission timing is approaching, the molecules in the flash lamp F1 are activated by the previous emission.

  Further, in order to reliably and stabilize the discharge of the flash lamp F1, a simmer circuit that continuously continues a small arc discharge can be used instead of providing the trigger drive circuit 3. In this case, the flash lamp F1 can surely emit light at any timing.

Further, in the first embodiment, the charging voltages of all the charging power sources E1 to E4 and the capacities of the capacitors C1 to C4 are made the same, and the charging amounts of the capacitors C1 to C4 are made equal. If the charge amount of .about.C4 is changed, the discharge current amount can be changed for each channel.
For example, if the charging voltage of each of the charging power sources E1 to E4 is changed and the charging amount of the capacitors C1 to C4 is increased in the order of the first to fourth channels 1CH to 4CH, the emission intensity due to each discharging current is as shown in FIG. As shown in FIG. If the thyristors S1 to S4 corresponding to the capacitors C1 to C4 whose charge amount is changed in this way are turned on at predetermined timings t1, t2, t3, and t4, the emission intensity gradually increases in one cycle. can do.

Further, if the operation order and operation timing of the thyristors S1 to S4 corresponding to the capacitors C1 to C4 whose charge amounts are changed as shown in FIG. 3 are changed, a more complicated waveform can be realized, and variously according to various light emission patterns. A simple heating pattern.
Although the example which changes the charge amount of each capacitor | condenser C1-C4 by making the magnitude | size of the charging voltage of each charging power supply E1-E4 into a different value was demonstrated above, by changing the capacity | capacitance of capacitor | condenser C1-C4 The charge amount of the capacitor can also be changed.

Further, in the first embodiment, in each channel 1CH to nCH, the inductance elements L1 to Ln are provided between the capacitors C1 to Cn and the thyristors S1 to Sn. These inductance elements L1 to Ln moderate the rise of the discharge currents of the capacitors C1 to Cn and change their waveforms.
For example, when the rise of the discharge current is moderated by the inductance elements L1 to Ln, the waveform of the emission intensity indicated by the solid line is indicated by the broken line as shown in FIG. That is, to make the rise of the discharge current gentle means that the peak value of the discharge current is lowered and the wave width is increased. As described above, by using the inductance elements L1 to Ln, it is possible to adjust the waveform of one emission intensity and control the peak value and the emission time.

Using the inductance elements L1 to Ln, if the rise of the first discharge current is made gentle, the rise in the heating temperature according to the rise of the emission intensity becomes gentle, and the temperature of the heating target is not rapidly raised, Generation of cracks and the like can be prevented.
Further, if the rise of the supplied discharge current is slow, there is an advantage that the life of the flash lamp F1 can be extended.

In the first embodiment, since the charging power sources E1 to E4 are individually connected to the capacitors C1 to C4 of the channels 1CH to 4CH, charging of the capacitors C1 to C4 is started at individual timings. can do.
In other words, if the capacitor discharge is completed and the corresponding thyristor is in the off state, even if another capacitor is discharging or there is a capacitor in which the thyristor is in the off state and the charge amount is maintained, It is possible to start charging the capacitor after discharging.

Therefore, even during one cycle in which the thyristors S1 to S4 are sequentially turned on to discharge the capacitors C1 to C4, charging of the capacitor that has been discharged first is started and the next discharge, that is, the next light emission. The start of the cycle can be made earlier.
It is also possible to lengthen the one cycle by recharging the capacitor once discharged and re-discharging during the same cycle.

The second embodiment shown in FIG. 5 is a heating device including a discharge circuit 7 composed of first to n-th channels, and the same reference numerals as those in FIG. 1 are used for the same constituent elements as those in the first embodiment. .
This second embodiment is also the same as the first embodiment in that each channel 1CH to nCH includes capacitors C1 to Cn, inductance elements L1 to Ln, and thyristors S1 to Sn, respectively.
The operation of the control circuit 2 for controlling the ON operation timing of the thyristors S1 to Sn and supplying the discharge current from the corresponding capacitors C1 to Cn to the flash lamp F1 is the same as that of the first embodiment. .

However, in this second embodiment, a common charging power source E0 is connected to all channels, and all capacitors C1 to Cn are charged by this charging power source.
Further, diodes D1 to Dn are connected to each channel.
The diodes D1 to Dn are provided to prevent current from flowing from other channels. If the diode D1 is not provided, when only the thyristor S1 of the channel 1CH is turned on and the capacitor C1 is discharged, the capacitor of the other channel, for example, the capacitor C2 is discharged and the discharge current is supplied to the capacitor C1. In order to prevent this, the diodes D1 to Dn are provided.

Also in the second embodiment, the control circuit 2 controls the trigger drive circuit 3 and turns on the thyristor S1 of the first channel 1CH at the time when the light emission command is input, and thereafter, for the thyristors S2 to Sn. In addition, the ON operation is sequentially performed at a predetermined timing to realize a target light emission pattern.
Also in the heating device of the second embodiment, the control circuit 2 controls the timing of the on operation of the thyristors S1 to Sn, thereby realizing various light emission patterns by combining the discharge currents of a plurality of channels, and various heating conditions. It can correspond to.

In the overheating device of the second embodiment, since one charging power source E0 is for charging all the capacitors C1 to Cn, the charging power source E0 is controlled to charge the individual capacitors C1 to Cn. Cannot be changed. However, the charge amount can be changed by changing the capacities of the individual capacitors C1 to Cn.
Thus, since the discharge circuit 7 of the second embodiment has one charging power source E0, the charging voltage cannot be changed for each capacitor, but the entire heating device is compared with the case where the charging power source is provided for each capacitor. There is an advantage that can be downsized.

In the second embodiment, since one charging power source E0 is shared by a plurality of capacitors C1 to Cn, it is necessary to charge all the capacitors C1 to Cn at the same timing. For this reason, in one cycle of discharge corresponding to one light emission command, charging is started after all necessary channels are discharged and all thyristors S1 to Sn are turned off.
The on / off state of the thyristors S1 to Sn can be determined by whether or not a discharge current is flowing. Therefore, it is possible to detect the discharge current in the vicinity of the flash lamp F1, and to control the charging power source E0 so that charging is started after the detected value becomes zero.

  Further, since each thyristor S1 to Sn is controlled according to a preset procedure, the time from the input of the light emission command to the end of the total discharge can be set in advance. Therefore, when a predetermined time has elapsed from the input of the light emission command, it may be determined that the thyristors S1 to Sn are in the off state and charging is started.

  The third embodiment shown in FIG. 6 is a heating device provided with a discharge circuit 8, and is provided with a diode D1 instead of the thyristor S1 in the discharge circuit 1 of the first embodiment shown in FIG. The discharge circuit 8 has the same configuration as that of the first embodiment except that a diode D1 is provided instead of the thyristor S1.

  In the third embodiment, the channel that first supplies the discharge current to the flash lamp F1 in one cycle of light emission is determined as the first channel 1CH. The discharge current of the capacitor C1 of the channel 1CH is made to flow through the diode D1 at the timing when the trigger pulse is supplied from the trigger driving circuit 3 instead of controlling the switching element.

The discharge currents of the channels other than the first channel 1CH are supplied to the flash lamp F1 when the control circuit 2 turns on the thyristors S2 to Sn at a predetermined timing, as in the first embodiment. The
Therefore, also in the third embodiment, the supply timing of the discharge current from the capacitors C1 to Cn of each channel is controlled by the control circuit 2, and light emission patterns corresponding to various heating conditions can be realized.
In the third embodiment, a capacitor that supplies a discharge current first and that is a capacitor other than the capacitor C1 to which the diode D1 is connected is a predetermined capacitor of the present invention in which a switching element is provided between the flash lamp F1. become.

As described above, when the diode D1 is used in place of the thyristor S1, it is unnecessary to control the control circuit 2 to input a trigger signal to the thyristor S1 to turn it on, and a diode cheaper than the thyristor S1 is used. There is an advantage that you can.
Note that the first channel for supplying the discharge current to the flash lamp F1 is not limited to the first channel.
When it is determined that discharge currents are supplied simultaneously from a plurality of channels first, diodes can be used instead of thyristors in the plurality of channels.

The fourth embodiment shown in FIG. 7 includes N flash lamps F1 to FN, and each flash lamp includes a discharge circuit similar to the discharge circuit 1 shown in FIG.
That is, each discharge circuit includes channels CH1 to CHn each including a plurality of capacitors C1 to Cn, inductance elements L1 to Ln, and thyristors S1 to Sn, similarly to the discharge circuit 1 of FIG.

  The first charging power source E1 is used as a common charging power source for charging the capacitor C1 of the first channel 1CH in all the discharging circuits, and the second charging power source E2 is used in the first discharging power source in all the discharging circuits. This is a charging power source for charging the capacitor C2 of the second channel 2CH. Similarly, for the other channels, a charging power source for charging the capacitor of the same channel is shared by all the discharge circuits.

Further, all the thyristors S1 to Sn provided in the same channel of each discharge circuit are connected to the control circuit 2 through the same signal circuit. That is, the control circuit 2 is configured to simultaneously turn on all thyristors provided in a specific channel in the plurality of discharge circuits.
Further, the trigger driving circuit 3 connected to the control circuit 2 supplies trigger pulses to the flash lamps F1 to FN simultaneously.

Therefore, the control circuit 2 turns on the thyristors S1 to Sn in the discharge circuits at the same timing, and the flash lamps F1 to FN all emit light in the same pattern.
Each of the flash lamps F1 to FN can realize various light emission patterns by controlling the timing of the on operations of the thyristors S1 to Sn, as in the first embodiment.
In the fourth embodiment, since the plurality of flash lamps F1 to FN can emit light at the same time, it is possible to increase the irradiation area of light emission corresponding to various heating conditions.
That is, in the fourth embodiment, heating corresponding to a target heating condition can be realized even for a large heating target.

In the fourth embodiment, if the channel to be discharged first is determined as a specific channel, for example, the first channel 1CH, the thyristor S1 of that channel can be changed to the diode D1. As the number of discharge circuits increases as in the fourth embodiment, the advantage of reducing the component cost by using the diode D1 instead of the thyristor S1 increases.
Further, in the apparatus for simultaneously controlling a plurality of discharge circuits as in the fourth embodiment, all the discharge circuits need not be configured identically. For example, a charging power supply for a specific discharge circuit is separated from other discharge circuits, and the charge voltage of the capacitor of the discharge circuit is set higher than that of the other discharge circuits, so that the flash lamp emission intensity of the circuit is changed. It is possible to make it stronger than other flash lamps.

  In the first to fourth embodiments described above, the inductances L1 to Ln are provided in each channel and all of them are made equal. However, by making the inductance elements L1 to Ln different, the discharge time constant in each channel can be set. It is also possible to change the waveform of the discharge current.

The inductance elements L1 to Ln function in the same manner regardless of where they are provided between the capacitors C1 to Cn and the flash lamp F1.
Therefore, by connecting one inductance element L1 at the most downstream side of the discharge circuit as shown in FIG. 8, the same function as when the inductance elements L1 to Ln are provided in all the channels as shown in FIG. 1 is realized. You can also.
However, in the present invention, the inductance elements L1 to Ln are not essential components. Therefore, all the inductance elements L1 to Ln in the discharge circuit can be omitted.

In addition, for example, when there is a light emission timing at which the rise of the discharge current is desired to be slow, as in the first discharge, an inductance element may be provided only in a channel corresponding to the timing.
Further, in order to select whether or not an inductance element is required, the switch 4 is switched between terminals 5 and 6 as shown in FIG. 9, and either the circuit provided with the inductance element L1 or the short circuit may be selected. .
Alternatively, different inductance elements may be switched by a switch to select an inductance element according to the purpose.

In addition, a plurality of capacitors are provided in one channel, a specific capacitor is selected from these by switching, the capacity of the capacitor of that channel is changed according to the purpose, and the discharge amount from that channel is controlled. You can also.
For example, the fifth embodiment shown in FIG. 10 is provided with four capacitors c and four switches s instead of the capacitor C1 of the first channel 1CH of the first embodiment shown in FIG. One or a plurality of capacitors c can be selected by setting any one of the four switches s to the ON state, and the capacitance of the capacitor C1 can be set. In particular, if the capacitors c have different capacities, various capacities can be realized depending on the combination.

  Furthermore, in the said 1st-5th embodiment, although the thyristor is used as a switching element, the switching element of this invention is not restricted to a thyristor. Any switching element may be used as long as measures are taken to prevent the discharge current from flowing back to the capacitor side. For example, a switching element itself having a backflow prevention function, such as the thyristor, or a diode connected with a means for preventing backflow such as a diode can be used as the switching element of the present invention.

  The thyristor used as a switching element in the above embodiment is automatically turned off when the discharge current stops flowing if only the ON operation timing is controlled by the input of the trigger signal. Therefore, when a thyristor is used, there is no need to control switching of the switching element to the OFF state, and there is an advantage that the control can be simplified.

In other words, when a thyristor is used, the timing for turning off the switching element cannot be controlled.
If a switching element capable of controlling the off operation is used, it is possible to control the emission intensity by stopping the flow of the discharge current by controlling the switching element in the off state during the discharge from the capacitor.
When a semiconductor switch such as an insulated gate bipolar transistor (IGBT) is used as the switching element that can be turned off, it is possible to control the amount of discharge by controlling the off operation during discharge. Then, after the on-operation is performed, the control must be performed to turn it off before starting the next charging.

The number of channels in the one discharge circuit may be any number.
Further, depending on the heating conditions, it is not necessary to discharge from all the channels of the discharge circuit during the discharge one-cycle operation.

  The flash lamp instantaneous heating apparatus according to the present invention is useful for an examination experiment for optimum heating conditions in various sintering / firing processes and manufacturing processes for a plurality of types having different heating conditions.

C1,..., Cn capacitors c Capacitors S1,..., Sn (switching elements) thyristors L1,..., Ln Inductance elements 1, 7, 8 Discharge circuit 2 Control circuit

Claims (5)

A flash lamp,
A plurality of capacitors in parallel with the flash lamp;
A switching element provided between each of the capacitors and the flash lamp or between a predetermined capacitor and the flash lamp;
A discharge circuit comprising a charging circuit for charging the capacitor;
A flash lamp instantaneous heating device in which a control circuit for controlling the timing of the ON operation of the switching element is connected to the discharge circuit. A flash lamp,
A plurality of capacitors in parallel with the flash lamp;
A switching element provided between each of the capacitors and the flash lamp or between a predetermined capacitor and the flash lamp;
With a plurality of discharge circuits comprising a charging circuit for charging the capacitor,
A flash lamp instantaneous heating device in which a control circuit for controlling the timing of an ON operation of the switching element is connected to the plurality of discharge circuits.   The flash lamp instantaneous heating device according to claim 1 or 2, wherein the charging circuit is individually provided for each capacitor.   The flash lamp instantaneous heating device according to claim 1, wherein an inductance element is provided at any position between the capacitor and the flash lamp.   The flash lamp instantaneous heating device according to claim 4, wherein an inductance element is provided corresponding to each of the capacitors.

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