JP2014005992A - Clean booth structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a clean booth structure capable of retaining an inner space in a clean environment and of satisfactorily performing pollution control even in a peripheral region.SOLUTION: A clean booth structure providing a local clean environment includes: a main booth 1 of which the inner space shall be retained in a clean environment; a sub-booth 3 that communicates with the main booth through a first opening 2 and communicates with the outside through a second opening 4; a fan filter unit 5 that cleans air suctioned from a suction port 5a to discharge it into the inside of the main booth from a discharge port 5b; and an air return passage 6 that guides air inside the sub-booth to the suction port of the fan filter unit.

Description

  The present invention relates to a clean booth structure. More particularly, the present invention relates to a clean booth structure that provides a local clean environment.

  Clean rooms and clean booths are used in the manufacturing processes for precision electronic equipment, food and medical products that require a clean environment in which pollution is to be controlled. In particular, the clean booth is widely used as a structure that can provide a local clean environment with low cost and high cleanliness. An opening is often provided at the entrance / exit of the clean booth, but in order to prevent external contaminants from entering the booth through this opening, the inside of the booth must be set to a positive pressure to allow clean air to flow out of the opening. There are many.

  In particular, in a configuration in which a continuous product carry-in / carry-out path is connected to a clean booth, an opening that is always open is required. In this case, a method in which a strong outflow airflow from the opening is always formed by the positive pressure in the booth is employed. Hereinafter, in the present specification, the opening in the normally open state is also simply referred to as “opening”.

  When installing a clean booth in a clean room, it is necessary to control contamination in the surrounding area adjacent to the booth. However, in the above-described conventional configuration, the clean air in the clean booth is caused to flow out from the opening, so that the airflow in the peripheral area of the booth is greatly disturbed, and the product in the peripheral area is caused by the disturbance of the airflow. There was a risk of contamination.

  On the other hand, if the inside of the clean booth is set to a negative pressure (negative pressure) in order to avoid outflow of clean air to the outside, pollutants will flow from the outside into the booth through the opening, causing contamination in the booth. End up. Since there is always pressure fluctuation in the manufacturing environment, air does not flow from the outside into the clean booth through the opening, and air does not flow out from the booth through the opening. It was difficult to control the pressure.

  The present invention has been made in view of the above-described problems, and provides a clean booth structure that can maintain an internal space in a clean environment and that can satisfactorily control contamination in a peripheral region. Objective.

In order to solve the above problems, in the present invention, in a clean booth structure that provides a local clean environment,
A main booth that should keep the interior space clean,
A sub-booth communicating with the main booth through the first opening and communicating with the outside through the second opening;
A fan filter unit that cleans the air sucked from the suction port and blows it out of the main booth from the blowout port;
A clean booth structure is provided, comprising a return air path for guiding the air inside the sub-booth to the suction port of the fan filter unit.

  In the clean booth structure according to one aspect of the present invention, the main booth that should keep the internal space in a clean environment, the sub-booth communicating through the opening, and the fan filter unit that cleans the sucked air and blows it into the main booth And a return air passage for recirculating the air in the sub-booth to the suction port. As a result, air does not flow into the main booth from the outside through the opening, and air does not flow out from the sub-booth through the opening to the outside, so that the interior space of the main booth is clean environment In addition, it is possible to satisfactorily control contamination in the peripheral area of the clean booth.

It is a figure which shows roughly the structure of the clean booth structure concerning 1st Embodiment of this invention. It is a figure explaining the inconvenience of the clean booth concerning a comparative example. It is a figure which shows schematically the structure of the clean booth structure concerning 2nd Embodiment of this invention. It is a figure which shows schematically the structure of the clean booth structure concerning 3rd Embodiment of this invention. It is a figure explaining the inconvenience of the clean booth concerning the 2nd comparative example.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a diagram schematically showing a configuration of a clean booth structure according to a first embodiment of the present invention. In each embodiment, the present invention is applied to a clean booth that is installed in a clean room and provides a local clean environment. Here, the clean environment refers to an environment that does not include dust in the air or an environment that does not include a specific gas.

  Referring to FIG. 1, the clean booth structure of the first embodiment includes a main booth 1 that should keep the internal space in a clean environment, and a sub-booth 3 that communicates with the main booth 1 through an opening 2. . The sub booth 3 communicates with the outside through the opening 4. The portions other than the openings 2 and 4 that are always open at the upper and side portions of the main booth 1 and the sub booth 3 are covered with, for example, a simple partition panel. Hereinafter, in each embodiment, the part except an opening part shall be covered with the simple partition panel in the upper part and side part of a booth.

  Also, the clean booth structure of the first embodiment is a fan filter unit 5 that cleans the air sucked from the suction port 5a and blows it out of the main booth 1 from the blower port 5b, and the fan filter unit 5 And a return air path (return air chamber) 6 for leading to the five suction ports 5a. The outlet 5b of the fan filter unit 5 is provided in the upper part of the main booth 1. The return air path 6 opens to the upper part of the sub booth 3.

  Prior to the description of the operational effects of the clean booth structure according to the first embodiment, the inconvenience of the conventional clean booth will be described with reference to FIG. In the clean booth according to the comparative example shown in FIG. 2, the fan filter unit 105 is provided at the upper part of the booth 101, and a configuration in which clean air is blown out from the outlet 105 b of the fan filter unit 105 into the booth 101 is employed. .

  Accordingly, the inside of the booth 101 becomes positive pressure due to the inflow of clean air from the fan filter unit 105, and the clean air in the booth 101 flows out from the opening 102 that is always open. As a result, external contaminants can be prevented from entering the booth 101 through the opening 102. However, since the clean air in the booth 101 flows out of the opening 102, the airflow in the peripheral area adjacent to the booth 101, particularly in the peripheral area adjacent to the opening 102, is greatly disturbed. As a result, there was a risk of contamination of the product in the surrounding area.

  On the other hand, in the clean booth structure of the first embodiment, as shown in FIG. 1, the sub booth 3 communicating with the main booth 1 via the opening 2 and the sucked air are cleaned and blown into the main booth 1. A return air path 6 for recirculating the air in the sub-booth 3 to the suction port 5a of the fan filter unit 5 is attached. In this case, the air flowing into the sub booth 3 from the main booth 1 through the opening 2 returns to the fan filter unit 5 through the return air path 6 without flowing out through the opening 4.

  Further, the air that has flowed into the sub booth 3 from the outside via the opening 4 returns to the fan filter unit 5 via the return air path 6 without flowing into the main booth 1 via the opening 2. As a result, entry of contaminants from the outside into the main booth 1 can be prevented, and as a result, a clean environment in the main booth 1 can be maintained. Moreover, since air is prevented from flowing out from the inside of the sub booth 3 through the opening 4, the airflow in the peripheral area is not disturbed, and the product is not contaminated in the peripheral area. In particular, when handling harmful substances that cannot be discharged outside in the main booth 1, even if harmful substances flow into the sub booth 3 from the main booth 1, the negative pressure in the sub booth 3 causes the opening 4 to pass through. Can prevent harmful substances from leaking outside.

  As described above, in the clean booth structure of the first embodiment, even if contaminants enter the sub booth 3 from the outside through the opening 4, the contaminants enter the main booth from the sub booth 3 through the opening 2. 1 does not flow into. Further, the air that flows into the sub booth 3 from the main booth 1 through the opening 2 does not flow out of the sub booth 3 through the opening 4. As a result, the internal space of the main booth 1 can be maintained in a clean environment, and contamination can be controlled well in the surrounding area.

  FIG. 3 is a diagram schematically showing the configuration of the clean booth structure according to the second embodiment of the present invention. The second embodiment has a configuration similar to that of the first embodiment of FIG. However, the second embodiment is different from the first embodiment in that a second main booth 7 communicating with the sub booth 3 is provided via the opening 4a. Therefore, in FIG. 3, the same reference numerals as those in FIG. 1 are given to elements having the same functions as the components shown in FIG. Hereinafter, the configuration and operation of the second embodiment will be described focusing on differences from the first embodiment.

  Referring to FIG. 3, the clean booth structure according to the second embodiment has a second main booth 7 that should keep the internal space in a clean environment, and the air sucked from the suction port 8a is cleaned to the second from the outlet port 8b. 2 A fan filter unit 8 that blows out into the main booth 7 and a second return air passage (return air chamber) 9 for guiding the air inside the sub booth 3 to the suction port 8a of the fan filter unit 8 are provided. The second main booth 7 communicates with the sub booth 3 through the opening 4a. The sub booth 3 communicates with the outside through the opening 4b that is always open.

  The opening 4b is formed in the side part of the back | inner side parallel to the paper surface of FIG. On the other hand, the opening 4a is formed in the right side perpendicular to the paper surface of FIG. 3 in the side of the sub booth 3 (or the side of the second main booth 7). The outlet 8 b of the fan filter unit 8 is provided in the upper part of the second main booth 7. The second return air path 9 opens at the top of the sub booth 3 and is formed integrally with the return air path 6 for the first main booth 1.

  In the second embodiment, the clean environment to be maintained by the first main booth 1 and the clean environment to be maintained by the second main booth 7 are different. Specifically, the required cleanliness is different in one clean environment and the other clean environment, or the gas used in one clean environment and the other clean environment is different. In addition, when the gas to be used is different, a chemical filter having required characteristics is attached to the fan filter units 5 and 8 as necessary.

  In the second embodiment, the air that has flowed into the sub booth 3 from the second main booth 7 through the opening 4a does not flow out to the outside through the opening 4b, but passes through the return air path 9 to the fan filter unit. Or to the fan filter unit 5 via the return air path 6. The air that has flowed into the sub booth 3 from the first main booth 1 through the opening 2 does not flow out through the opening 4b to the fan filter unit 5 through the return air path 6 or return air. It returns to the fan filter unit 8 through the path 9.

  Further, the air that has flowed into the sub booth 3 from the outside through the opening 4b does not flow into the second main booth 7 through the opening 4a, and the first main booth 1 through the opening 2 Without returning to the fan filter unit 8 via the return air path 9 or to the fan filter unit 5 via the return air path 6.

  As a result, in the clean booth structure according to the second embodiment, the internal space of the main booths 1 and 7 can be maintained in a clean environment, and contamination can be controlled well in the peripheral area. In particular, it is possible to connect the two main booths 1 and 7 through the sub booth 3 in a state where they are independent as different clean environments without causing cross contamination between the two main booths 1 and 7. it can.

  FIG. 4 is a diagram schematically showing the configuration of the clean booth structure according to the third embodiment of the present invention. The third embodiment has a configuration similar to that of the first embodiment of FIG. However, the third embodiment is different from the first embodiment in that a continuous product loading / unloading path 11 can be connected to the main booth 1 through the openings 2 and 4 that are always open. . Therefore, in FIG. 4, the same reference numerals as those in FIG. 1 are assigned to elements having the same functions as the components shown in FIG. Hereinafter, the configuration and operation of the third embodiment will be described focusing on differences from the first embodiment.

  4 (a) and 4 (b), in the clean booth structure of the third embodiment, suction fans 10a and 10b connected to the return air path 6 are attached to the upper and lower parts of the sub-booth 3, respectively. . This suction fan may be further attached to the side surface (not shown). In that case, a suction fan connected to the return air path 6 is attached to the sub booth 3 so as to surround the four circumferences of the opening. Will be. The air in the sub booth 3 sucked by the suction fan 10 a provided at the upper part of the sub booth 3 returns to the fan filter unit 5 through the return air path 6. The air in the sub booth 3 sucked by the suction fan 10b provided in the lower part of the sub booth 3 is also connected to the return air path 6 by a duct at a place not shown, and the fan filter unit 5 is connected via the return air path 6. To reflux.

  FIG. 4A shows a state where the loading / unloading path 11 is not connected to the clean booth structure. FIG. 4B shows a state in which a continuous product loading / unloading path 11 is connected to the main booth 1 via the clean booth structure via the openings 2 and 4 that are always open. 4 (a) and 4 (b), suction fans 10a and 10b are respectively attached to the upper and lower portions of the sub-booth 3, but they are also connected to the side of the sub-booth 3 with a return air path as necessary. A suction fan can also be provided.

  Prior to the description of the operational effects of the clean booth structure according to the third embodiment, the disadvantages of the clean booth according to the prior art will be described with reference to FIG. In the clean booth according to the comparative example shown in FIGS. 5A and 5B, the fan filter unit 105 is provided in the upper part of the booth 101, and clean air is supplied from the outlet 105 b of the fan filter unit 105 to the inside of the booth 101. The structure which blows out is adopted.

  In addition, a front chamber 103 that communicates with the booth 101 through the opening 102 and communicates with the outside through the opening 104, a blower fan 106 that is provided in the upper portion of the front chamber 103, and a lower portion of the front chamber 103. The suction fan 107 is provided. Therefore, the inside of the booth 101 becomes positive pressure due to the inflow of clean air from the fan filter unit 105, and the air in the booth 101 flows out from the opening 102 to the front chamber 103.

  On the other hand, in the front chamber 103, an air curtain is formed by the flow of air from the blower fan 106 to the suction fan 107. Therefore, as shown in FIG. 5 (a), in the state where the continuous product carry-in / carry-out path 11 is not connected, an external contaminant is opened by the action of the air curtain formed in the front chamber 103. Intrusion into the booth 101 via 102 and 104 can be avoided. In addition, the air curtain formed in the front chamber 103 prevents the air in the booth 101 from flowing out through the openings 102 and 104, so that the product is contaminated in the peripheral area adjacent to the opening 104. There is no.

  However, as shown in FIG. 5B, the air curtain formed in the front chamber 103 when the continuous product carry-in / carry-out path 11 is connected to the booth 101 via the openings 102 and 104. When the product passes through, the jet of the air curtain is disturbed by the product or the like, and it is impossible to expect a blocking effect by the so-called air curtain. In addition, turbulent jets could affect the surrounding environment and could cause contamination in the surrounding area.

  In contrast, in the clean booth structure of the third embodiment, as shown in FIG. 4A, when the continuous product carry-in / carry-out path 11 is not connected, the main booth 1 through the opening 2 is connected. Then, the air that has flowed into the sub booth 3 does not flow out through the opening 4 but returns to the fan filter unit 5 through the return air path 6 by the action of the suction fans 10a and 10b. In addition, the air that has flowed into the sub booth 3 from the outside via the opening 4 does not flow into the main booth 1 via the opening 2, but via the return air path 6 by the action of the suction fans 10 a and 10 b. Reflux to the fan filter unit 5.

  On the other hand, as shown in FIG. 4 (b), when the continuous product carry-in / carry-out path 11 is connected to the main booth 1 through the openings 2 and 4, the main booth 1 passes through the opening 2. The air flowing into the sub booth 3 does not flow out to the outside through the opening 4 even if it is somewhat disturbed by the product being carried in or out, and the return air path by the action of the suction fans 10a and 10b. 6 to the fan filter unit 5. In addition, air that has flowed into the sub booth 3 from the outside through the opening 4 does not flow into the main booth 1 through the opening 2 even if it is somewhat disturbed by the product being carried in or out. Then, the refrigerant flows back to the fan filter unit 5 through the return air path 6 by the action of the suction fans 10a and 10b.

  Thus, in the clean booth structure of the third embodiment, it is possible to prevent contaminants from entering the main booth 1 from the outside even if the continuous product loading / unloading path 11 is connected. As a result, the clean environment in the main booth 1 can be maintained. Moreover, since air is prevented from flowing out from the inside of the sub booth 3 through the opening 4, the airflow in the peripheral area is not disturbed, and the product is not contaminated in the peripheral area.

  In the above description, the portions of the booth other than the opening are covered with a simple partition panel at the upper and side portions. However, the present invention is not limited to this, and various modifications are possible for the material covering the top and sides of the booth. As an example, the structure which covers the upper part and side part of a booth with an antistatic vinyl sheet may be sufficient, for example.

  In the above description, the present invention is applied to a clean booth that is installed in a clean room and provides a local clean environment. However, the present invention is not limited to this, and the present invention may be applied to a clean booth that is installed in a place other than a clean room and provides a local clean environment.

1 and 7 Main booths 2 and 4 Opening 3 Sub booths 5 and 8 Fan filter units 6 and 9 Return path

Claims (6)

In a clean booth structure that provides a local clean environment,
A main booth that should keep the interior space clean,
A sub-booth communicating with the main booth through the first opening and communicating with the outside through the second opening;
A fan filter unit that cleans the air sucked from the suction port and blows it out of the main booth from the blowout port;
A clean booth structure comprising a return air path for guiding the air inside the sub-booth to the suction port of the fan filter unit. 2. The clean booth structure according to claim 1, wherein the outlet of the fan filter unit is provided at an upper portion of the main booth, and the return air path is opened at an upper portion of the sub-booth. The clean booth structure according to claim 2, wherein a suction fan connected to the return air path is provided at an upper part and a lower part of the sub-booth. A second main booth that communicates with the sub-booth through a third opening to maintain the internal space in a clean environment;
A second fan filter unit that purifies air sucked from the suction port and blows it out of the second main booth from the blowout port;
4. The apparatus according to claim 1, further comprising a second return air path for guiding the air inside the sub-booth to the suction port of the second fan filter unit. 5. Clean booth structure. The blowout port of the second fan filter unit is provided in an upper part of the second main booth, and the second return air passage is opened in an upper part of the sub-booth. Clean booth structure. The clean booth structure according to claim 5, wherein the second return air path is formed integrally with the return air path.

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