JP2014089101A - Physical quantity sensor, electronic apparatus and dynamic body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a physical quantity sensor suppressing damage due to contact of a movable electrode with a fixed electrode.SOLUTION: The physical quantity sensor includes: a movable weight; a plurality of movable electrodes extended from the movable weight in a line; and fixed electrodes inserted into each gap between the plurality of movable electrodes. At least one of the fixed electrodes includes a stopper portion extended toward each movable electrode disposed in both sides, and an interval between an end portion of the stopper portion and the movable electrode is smaller than an interval between the movable electrode and the fixed electrode.

Description

  The present invention relates to a physical quantity sensor, an electronic device, and a moving object.

Conventionally, as a physical quantity sensor for detecting a physical quantity such as acceleration and angular velocity, a fixed electrode and a movable electrode provided on a movable weight that is provided side by side with a distance to the fixed electrode and that can be displaced in a certain direction, Structures having are known.
In such a physical quantity sensor, the distance between the fixed electrode and the movable electrode provided on the movable weight changes with the displacement of the movable weight, and a change occurs between the fixed electrode and the movable electrode. By detecting changes in capacitance, changes in physical quantities such as acceleration and angular velocity are detected.
For example, Patent Document 1 discloses a physical quantity sensor having a structure in which a plurality of protrusions are provided on a fixed electrode and the movable electrode and the fixed electrode are prevented from adhering when the movable electrode is displaced.

JP 2001-330623 A

  However, since a large number of protrusions are provided on the fixed electrode, there is a possibility that the capacitance generated between the movable electrode and the fixed electrode at the time of acceleration detection is reduced, and the detection sensitivity is weakened.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
A physical quantity sensor according to this application example includes a movable weight, a plurality of movable electrodes extending side by side from the movable weight, and a fixed electrode inserted between each of the plurality of movable electrodes. At least one includes a stopper portion extending toward each of the movable electrodes arranged on both sides, and the interval between the end of the stopper portion and the movable electrode is the interval between the movable electrode and the fixed electrode. It is characterized by being narrow compared to.

According to such a physical quantity sensor, a movable weight, a plurality of movable electrodes extending from the movable weight, and a fixed electrode are provided between the plurality of movable electrodes. Further, at least one fixed electrode is provided with a stopper portion extending toward the movable electrode provided on both sides of the fixed electrode, and an interval (gap) between the end portion of the stopper portion and the movable electrode is set to the movable electrode. And the space between the fixed electrodes is narrower. In addition, it is possible to suppress a decrease in capacitance that occurs between the movable electrode and the fixed electrode.
As a result, when the movable weight is excessively displaced due to acceleration or the like, the physical quantity sensor can bring the movable electrode and the stopper portion into contact with each other before the movable electrode and the fixed electrode come into contact with each other.
Accordingly, it is possible to suppress damage of each electrode due to contact between the movable electrode and the fixed electrode.

[Application Example 2]
In the physical quantity sensor according to the application example described above, it is preferable that two fixed electrodes are inserted between each of the plurality of movable electrodes.

According to such a physical quantity sensor, two fixed electrodes are inserted and provided between each of the plurality of movable electrodes. Thereby, when the movable weight is displaced in one direction due to acceleration or the like, the physical quantity sensor is generated between the one fixed electrode and the movable electrode and the other fixed electrode and the movable electrode. The capacitance changes in the opposite direction to the capacitance. In other words, with the movable electrode as a reference, an antiphase (reverse polarity) capacitance is generated between the movable electrode and the two fixed electrodes. Further, when the movable weight is displaced in one direction, the distance between the first movable electrode and the fixed electrode and the distance between the second movable electrode and the second fixed electrode are in a differential relationship.
Therefore, since the change in the electrostatic capacity due to the displacement of the movable weight due to the acceleration or the like is detected by the two fixed electrodes, the detection accuracy of the acceleration or the like can be improved.

[Application Example 3]
In the physical quantity sensor according to the application example described above, the plurality of movable electrodes extend in opposite directions from both sides of the movable weight and are arranged side by side along the displacement direction of the movable weight, and are provided with a stopper portion. The electrodes are preferably disposed on both sides of the movable weight.

Such a physical quantity sensor is provided with a plurality of movable electrodes arranged along the direction in which the movable weight is displaced. Further, the physical quantity sensor is provided with movable electrodes extending in opposite directions from both sides of the movable weight. Moreover, the fixed electrode provided with the stopper part is provided on each side of the movable weight.
Thereby, the physical quantity sensor is provided with the fixed electrode and the movable electrode on both sides along the direction in which the movable weight is displaced. Therefore, when the physical quantity sensor comes into contact with the stopper portion and the movable electrode, Excessive displacement can be suppressed. Therefore, damage to the movable electrode and the fixed electrode due to the displacement of the movable weight in the rotation axis direction can be suppressed.

[Application Example 4]
In the physical quantity sensor according to the application example, it is preferable that a fixed electrode provided with a stopper portion is provided at a point-symmetrical position with respect to the center of the movable weight in plan view.
It is characterized by.

Such a physical quantity sensor is provided with a movable electrode portion, a fixed electrode portion, and a stopper portion at respective positions that are point-symmetric with respect to the center of the movable weight.
As a result, since the physical quantity sensor is provided with a plurality of stopper portions at point-symmetrical positions with respect to the center of the movable weight, when the stopper portion and the movable electrode are brought into contact with each other, an excessive amount of rotation in the rotational axis direction generated in the movable weight is caused. Can be further suppressed. Therefore, damage to the movable electrode and the fixed electrode due to the displacement of the movable weight in the rotation axis direction can be suppressed.

[Application Example 5]
The physical quantity sensor according to the application example described above preferably includes an insulating portion that is electrically insulated at an end portion of the stopper portion.

According to such a physical quantity sensor, the insulating portion is provided at the end portion of the stopper portion at the portion in contact with the movable electrode. As a result, when the stopper portion and the movable electrode come into contact with each other and the displacement of the movable weight is restricted, the fixed electrode provided with the stopper portion and the movable electrode can be prevented from being electrically connected. That is, a short circuit between the movable electrode and the fixed electrode can be suppressed.
Therefore, even when the movable electrode and the stopper portion are in contact with each other, it is possible to suppress an influence on the capacitance generated between the movable electrode and the fixed electrode provided with the stopper portion.

[Application Example 6]
The electronic device according to this application example includes any of the physical quantity sensors described above.

  According to such an electronic device, by mounting any of the physical quantity sensors described above, even when an impact is applied to the electronic device, it is possible to suppress damage to the physical quantity sensor and continuously detect the physical quantity. A highly reliable electronic device can be obtained.

[Application Example 7]
The moving body according to this application example includes any of the physical quantity sensors described above.

  According to such a moving body, by mounting any of the physical quantity sensors described above, damage to the physical quantity sensor due to an impact from the moving body can be suppressed, and the physical quantity can be continuously detected. You can get a body.

The perspective view which shows typically the physical quantity sensor which concerns on 1st Embodiment. The top view which shows typically the physical quantity sensor which concerns on 1st Embodiment. Sectional drawing which shows typically the physical quantity sensor which concerns on 1st Embodiment. The enlarged view which expands and shows a part of physical quantity sensor which concerns on 1st Embodiment. The top view which shows typically the physical quantity sensor which concerns on 2nd Embodiment. The top view which shows typically the physical quantity sensor which concerns on 3rd Embodiment. The top view which shows typically the physical quantity sensor which concerns on 3rd Embodiment. FIG. 10 is a diagram schematically illustrating an electronic apparatus according to an example. FIG. 10 is a diagram schematically illustrating an electronic apparatus according to an example. FIG. 10 is a diagram schematically illustrating an electronic apparatus according to an example. The figure which shows the mobile body which concerns on an Example typically.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each figure shown below, the size and ratio of each component may be described differently from the actual component in order to make each component large enough to be recognized on the drawing. is there.

(First embodiment)
The physical quantity sensor according to the first embodiment will be described with reference to FIGS.
FIG. 1 is a perspective view illustrating an outline of the physical quantity sensor according to the first embodiment. FIG. 2 is a plan view schematically showing the physical quantity sensor shown in FIG. FIG. 3 is a cross-sectional view schematically showing a cross section of a portion indicated by a line segment AA ′ in FIG. 2. FIG. 4 is an enlarged view of a portion indicated by a symbol B in FIG. For convenience of explanation, the lid 5 is not shown in FIG. 1 to 4, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other, and the Z axis is an axis that indicates the direction in which gravity acts.

(Structure of physical quantity sensor)
A physical quantity sensor 1 a shown in FIG. 1 includes a substrate 2, an element piece 3 connected and supported to the substrate 2, a conductor pattern 4 electrically connected to the element piece 3, and an element piece 3. And a lid 5 provided so as to cover. Hereinafter, each part which comprises the physical quantity sensor 1a is demonstrated in detail sequentially.

(substrate)
The substrate 2 is provided to support the element piece 3. The board | substrate 2 comprises plate shape and the cavity part 21 is provided in the 1st surface 2a. The hollow portion 21 is provided so as to include a movable weight 33, movable electrode portions 36 and 37, and connecting portions 34 and 35 of the element piece 3 to be described later when the substrate 2 is viewed in plan from the first surface 2a side. It has been. The cavity 21 has an inner bottom 21a. Such a cavity portion 21 constitutes a space that suppresses the movable weight 33, the movable electrode portions 36 and 37, and the coupling portions 34 and 35 of the element piece 3 from coming into contact with the substrate 2, in other words, a clearance portion. Thereby, the displacement of the movable weight 33 of the element piece 3 can be permitted.
Note that this space may be provided as an opening that penetrates the substrate 2 in the thickness direction (Z-axis direction) instead of the hollow portion 21 (concave portion). Further, in the present embodiment, the shape of the hollow portion 21 when viewed from the side of the first surface 2a is rectangular, but is not limited thereto.

  In addition, on the first surface 2 a of the substrate 2, wiring groove portions 22, 23, and 24 are provided along the outer periphery of the cavity portion 21 described above. The wiring groove portions 22, 23, 24 have a shape corresponding to the conductor pattern 4 when viewed in plan from the first surface 2a side. Specifically, the wiring groove portion 22 has a shape corresponding to the wiring 41 and the electrode 44 of the conductor pattern 4 described later. Further, the wiring groove portion 23 has a shape corresponding to a wiring 42 and an electrode 45 of the conductor pattern 4 described later. Further, the wiring groove portion 24 has a shape corresponding to a wiring 43 and an electrode 46 of the conductor pattern 4 described later.

As a material constituting such a substrate 2, for example, a material such as silicon or glass is preferably used. Moreover, when the element piece 3 is comprised by using silicon material as a main material, it is more preferable that the board | substrate 2 uses borosilicate glass, for example.
The constituent material of the substrate 2 preferably has a linear expansion coefficient as small as possible with the constituent material of the element piece 3. Thus, by using borosilicate glass for the substrate 2 and silicon for the element piece 3, the difference in linear expansion coefficient between the substrate 2 and the element piece 3 is reduced, and distortion due to thermal expansion can be suppressed.

(Element piece)
The element piece 3 includes fixed portions 31 and 32, a movable weight 33, connecting portions 34 and 35, movable electrode portions 36 and 37, and fixed electrode portions 38 and 39.
Such an element piece 3 has an X-axis direction (+ X) while the movable weight 33 and the movable electrode portions 36 and 37 elastically deform the connecting portions 34 and 35 in accordance with changes in physical quantities such as acceleration and angular velocity. Axial direction or -X axis direction). With such displacement, the distance between the movable electrode part 36 and the fixed electrode part 38 and the distance between the movable electrode part 37 and the fixed electrode part 39 change. That is, with such a displacement, the capacitance between the movable electrode portion 36 and the fixed electrode portion 38 and the capacitance between the movable electrode portion 37 and the fixed electrode portion 39 are respectively reduced. Change. Therefore, physical quantities such as acceleration and angular velocity can be detected based on these capacitances.

  The fixed portions 31 and 32, the movable weight 33, the connecting portions 34 and 35, and the movable electrode portions 36 and 37 are integrally formed. The fixing portions 31 and 32 are respectively connected to the first surface 2a of the substrate 2 described above. Specifically, the fixing portion 31 is connected to a portion on the −X axis direction side with respect to the cavity portion 21 of the first surface 2 a of the substrate 2, and the fixing portion 32 is connected to the first surface 2 a of the substrate 2. The cavity portion 21 is connected to a portion on the + X axis direction side. In addition, the fixing portions 31 and 32 are provided so as to straddle the outer peripheral edge of the cavity portion 21 when viewed in plan from the first surface 2a side.

  The positions and shapes of the fixing portions 31 and 32 are determined according to the positions and shapes of the connecting portions 34 and 35, the conductor pattern 4, etc., and are not limited to those described above.

  A movable weight 33 is provided between the two fixed portions 31 and 32. In the present embodiment, the movable weight 33 has a longitudinal shape extending in the X-axis direction. The shape of the movable weight 33 is determined according to the shape, size, and the like of each part constituting the element piece 3 and is not limited to the above.

(Movable weight)
Such a movable weight 33 is connected to the fixed portion 31 via the connecting portion 34 and is connected to the fixed portion 32 via the connecting portion 35. More specifically, the end portion of the movable weight 33 on the −X axis direction side is connected to the fixed portion 31 via the connection portion 34, and the end portion of the movable weight 33 in the + X axis direction is connected via the connection portion 35. Connected to the fixed portion 32.
The connecting portions 34 and 35 are connected to the fixed portions 31 and 32 so that the movable weight 33 can move. In the present embodiment, the connecting portions 34 and 35 are configured such that the movable weight 33 can be displaced (moved) in the + X axis direction and the −X axis direction, as indicated by an arrow a in FIG.

Specifically, the connecting portion 34 is composed of a plurality of beams 341 and 342. Each of the beams 341 and 342 has a shape extending in the X-axis direction while meandering in the Y-axis direction.
Similarly, the connecting portion 35 is composed of a plurality of beams 351 and 352 having a shape extending in the X-axis direction while meandering in the Y-axis direction.
The connecting portions 34 and 35 are not limited to those described above as long as they support the movable weight 33 so that it can be displaced with respect to the substrate 2. It may be composed of a pair of beams extending in the −Y direction.

(Movable electrode)
A movable electrode portion 36 is provided on the + Y-axis direction side that is the width direction of the movable weight 33 supported so as to be able to be displaced in the X-axis direction with respect to the substrate 2, and on the −Y-axis direction side that is the opposite side. Is provided with a movable electrode portion 37. The movable electrode portion 36 includes a plurality of movable electrodes 361, 362, 363, 364, and 365 that protrude in the + Y direction from the movable weight 33 and are arranged in a comb-teeth shape. The movable electrodes 361, 362, 363, 364, 365 are arranged in this order from the −X axis direction side to the + X axis direction side. In other words, the movable electrodes 361, 362, 363, 364, and 365 are provided in this order from the fixed portion 31 side to the fixed portion 32 side.

  Similarly, the movable electrode portion 37 includes movable electrodes 371, 372, 373, 374, and 375 that protrude from the movable weight 33 in the −Y-axis direction and are arranged in a comb shape. The movable electrodes 371, 372, 373, 374, and 375 are provided side by side in this order from the −X axis direction side to the + X axis direction side. In other words, the movable electrodes 371, 372, 373, 374, and 375 are arranged in this order from the fixed portion 31 side to the fixed portion 32 side.

Thus, the plurality of movable electrodes 361 to 365 and the plurality of movable electrodes 371 to 375 are provided side by side in the Y-axis direction (the direction of arrow a shown in FIG. 2) in which the movable weight 33 is movable. In other words, the movable electrode 33 is provided with the movable electrode portions 36 and 37 so as to be arranged along the X-axis direction, which is the direction in which the movable weight 33 is displaced, and to extend on both sides in the Y-axis direction intersecting the displacing direction. .
As a result, the capacitance between the fixed electrodes 382, 384, 386, and 388, which will be described later, and the movable electrode portion 36, and the capacitance between the fixed electrodes 381, 383, 385, 387, and the movable electrode portion 36 are reduced. It can be changed according to the displacement of the movable weight 33.

(Fixed electrode)
The fixed electrode unit 38 includes a plurality of fixed electrodes 381 to 388 arranged in a comb-tooth shape having a gap with respect to the plurality of movable electrodes 361 to 365 of the movable electrode unit 36 described above.
The ends of the plurality of fixed electrodes 381 to 388 on the side opposite to the movable weight 33 are connected to the + Y-axis direction side of the cavity 21 of the first surface 2a of the substrate 2, respectively. . The plurality of fixed electrodes 381 to 388 have one end on the fixed side as a fixed end, and the free ends extend in the −Y axis direction.

The plurality of fixed electrodes 381 to 388 are arranged in this order from the −X axis direction side to the + X axis direction side. In other words, the plurality of fixed electrodes 381 to 388 are provided in this order from the fixed portion 31 side to the fixed portion 32 side.
The fixed electrodes 381, 382, the fixed electrodes 383, 384, the fixed electrodes 385, 386, and the fixed electrodes 387, 388 are respectively paired as the movable electrodes 361, 362, the movable electrodes 362, 363, the movable electrode 363, respectively. 364 and movable electrodes 364 and 365, respectively.

Here, each of the fixed electrodes 382, 384, 386, and 388 is provided as a first fixed electrode. The fixed electrodes 381, 383, 385, and 387 are provided as second fixed electrodes, respectively.
The second fixed electrode is arranged side by side with a distance from the first fixed electrode. As described above, the plurality of fixed electrodes 381 to 388 are configured by first fixed electrodes (fixed electrodes 382, 384, 386, and 388) and second fixed electrodes (fixed electrodes 381, 383, 385, and 387) that are alternately arranged. ing. In other words, the first fixed electrode (fixed electrodes 382, 384, 386, 388) is disposed on one side of the movable electrode portion 36, and the second fixed electrode (fixed electrodes 381, 383, 385, 387) is disposed on the other side. Is arranged.

The fixed electrodes 382, 384, 386, and 388 as the first fixed electrodes and the fixed electrodes 381, 383, 385, and 387 as the second fixed electrodes are separated from each other on the first surface 2a of the substrate 2. ing. In other words, the fixed electrodes 382, 384, 386, 388 and the fixed electrodes 381, 383, 385, 387 are not connected to each other on the first surface 2a of the substrate 2 and are isolated in an island shape.
Thereby, the fixed electrodes 382, 384, 386, and 388 serving as the first fixed electrodes and the fixed electrodes 381, 383, 385, and 387 serving as the second fixed electrodes can be electrically insulated. Therefore, the capacitance between the fixed electrodes 382, 384, 386, and 388 and the movable electrode portion 36 and the capacitance between the fixed electrodes 381, 383, 385, and 387 and the movable electrode portion 36 are separated. The physical quantity can be detected based on the measurement results.

  The fixed electrode portion 39 is a plurality of fixed electrodes 391 that are arranged in a comb-tooth shape that is engaged with the plurality of movable electrodes 371 to 375 of the movable electrode portion 37 at intervals, like the fixed electrode portion 38 described above. ˜398. The ends of the plurality of fixed electrodes 391 to 398 on the side opposite to the movable weight 33 are respectively connected to portions on the −Y axis direction side with respect to the cavity 21 on the first surface 2 a of the substrate 2. ing. The plurality of fixed electrodes 391 to 398 have their fixed ends as fixed ends, and free ends extend in the + Y-axis direction.

The plurality of fixed electrodes 391 to 398 are arranged in this order from the −X axis direction side to the + X axis direction side. In other words, the plurality of fixed electrodes 391 to 398 are provided in this order from the fixed portion 31 side to the fixed portion 32 side.
The fixed electrodes 391, 392, the fixed electrodes 393, 394, the fixed electrodes 395, 396, and the fixed electrodes 397, 398 are respectively paired as the movable electrodes 371, 372, the movable electrodes 372, 373, the movable electrode 373, respectively. 374 and movable electrodes 374 and 375, respectively.

Here, the fixed electrodes 392, 394, 396, and 398 are provided as third fixed electrodes, respectively. The fixed electrodes 391, 393, 395, and 397 are provided as fourth fixed electrodes, respectively.
The fourth fixed electrode is arranged side by side with a distance from the third fixed electrode. As described above, the plurality of fixed electrodes 391 to 398 are configured by third fixed electrodes (fixed electrodes 392, 394, 396, 398) and fourth fixed electrodes (fixed electrodes 391, 393, 395, 397) arranged alternately. ing. In other words, the third fixed electrode (fixed electrodes 392, 394, 396, 398) is disposed on one side of the movable electrode portion 37, and the fourth fixed electrode (fixed electrodes 391, 393, 395, 397) is disposed on the other side. Is arranged.

Incidentally, as shown in FIGS. 1 to 3, a stopper portion 60 is provided on the free end side of the fixed electrode 391 (on the + Y-axis direction side on the movable weight 33 side). A portion surrounded by a broken line and marked with a reference sign B in FIG. 2 is schematically enlarged and shown in FIG.
In the physical quantity sensor 1a of the present embodiment, the stopper portion 60 is provided with a stopper base portion 611. The stopper base portion 611 is in the direction of displacement (movable) of the movable weight 33 on the free end side of the fixed electrode 391 (arrow shown in FIG. 2). It extends in the direction of a in the X-axis direction).
In other words, the stopper portion 60 is provided with a stopper base 611 extending in a direction intersecting with the fixed electrode 391 on the free end side of the fixed electrode 391.
In addition, the stopper base 611 is disposed in the space between the movable electrode 371 as the first movable electrode and the movable electrode 372 as the second movable electrode, from the free end of the fixed electrode 391 to the −X axial direction side and + X The ends 611a and 611b are provided on both sides on the axial direction side and provided with movable electrodes 371 and 372 and gaps D and D ′.

  Specifically, the stopper base 611 has a tip 611 a at the end on the −X axis direction side that extends in the displacement direction of the movable weight 33. The stopper base 611 has a gap D between the tip 611a and the movable electrode 371. The stopper base 611 has a tip 611b at the end on the + X-axis direction side that extends in the displacement direction of the movable weight 33. The stopper base 611 has a gap D ′ between the tip 611 b and the movable electrode 371.

  The stopper base portion 611 of the stopper portion 60 is provided to prevent the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 from coming into contact with each other and being damaged when the movable weight 33 is excessively displaced. It has been. In other words, it is provided to restrict the displacement (movability) when the movable weight 33 is excessively displaced.

Therefore, when the movable weight 33 is excessively displaced, the stopper base 611 is brought into contact with the movable electrode portion 37 to suppress contact (contact) between the movable electrode portion 37 and the fixed electrode portions 38 and 39. Desired.
Therefore, the stopper base 611 has a smaller gap D between the movable electrode 371 (37) and the tip 611a than the distance (gap) C between the movable electrode 371 (37) and the fixed electrode 391 (39). Is provided. Further, the stopper base is set so that the gap D between the movable electrode 372 (37) and the tip 611a is narrower than the distance (gap) C ′ between the movable electrode 372 (37) and the fixed electrode 392 (39). 611 is provided.
In other words, the distances (widths) of the gaps C, C ′ and the gaps D, D ′ are represented by C, C ′> D, D ′ (C> D, C ′> D ′).

Returning to FIG. 2, the description of the fixed electrode portion 39 is continued.
The third fixed electrode (fixed electrodes 392, 394, 396, and 398) and the fourth fixed electrode (fixed electrodes 391, 393, 395, and 397) are formed on the substrate in the same manner as the fixed electrode portion 38 described above. They are separated from each other on the first surface 2a. Thereby, the electrostatic capacitance between the third fixed electrode (fixed electrodes 392, 394, 396, 398) and the movable electrode portion 37, and the fourth fixed electrode (fixed electrodes 391, 393, 395, 397) and the movable electrode The capacitance between the unit 37 and the unit 37 can be measured separately, and the physical quantity can be detected based on the measurement results.

The above-described element piece 3 (fixed portions 31, 32, movable weight 33, connecting portions 34, 35, a plurality of fixed electrodes 381-388, a plurality of fixed electrodes 391-398, a plurality of movable electrodes 361-365, a plurality of The movable electrodes 371 to 375 and the stopper portion 60) are integrally provided by etching one substrate.
Thereby, the stopper part 60 can be simply and integrally formed with the other structural parts constituting the element piece 3.

  In addition, the constituent material of the element piece 3 is not particularly limited as long as it is a material whose capacitance changes based on a change in the distance (gap) between the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39. A semiconductor material is preferable. Specifically, for example, a silicon material such as single crystal silicon or polysilicon is preferably used. That is, the fixed portions 31 and 32, the movable weight 33, the connecting portions 34 and 35, the plurality of fixed electrodes 381 to 388 and 391 to 398, and the plurality of movable electrodes 361 to 365 and 371 to 375 constituting the element piece 3, Each of them is preferably composed mainly of silicon.

  Further, as described above, the element piece 3 is supported by the substrate 2 by connecting the fixed portions 31 and 32 and the fixed electrode portions 38 and 39 to the upper surface of the substrate 2.

(Conductor pattern)
The conductor pattern 4 is provided on the first surface 2a of the substrate 2 described above.
The conductor pattern 4 is composed of wirings 41, 42, 43 and electrodes 44, 45, 46.

The wiring 41 is provided outside the cavity portion 21 of the substrate 2 described above, and is formed along the outer periphery of the cavity portion 21. One end of the wiring 41 is connected to the electrode 44 on the outer peripheral edge of the first surface 2 a of the substrate 2 (the outer portion of the lid 5 on the first surface 2 a of the substrate 2).
Such wiring 41 is electrically connected to the fixed electrodes 382, 384, 386, and 388 as the first fixed electrodes of the element piece 3 and the fixed electrodes 392, 394, 396, and 398 as the third fixed electrodes. Has been.

The wiring 42 is provided along the outer peripheral edge inside the wiring 41 described above and outside the hollow portion 21 of the substrate 2 described above. One end of the wiring 42 is connected to the electrode 45 on the outer peripheral edge of the first surface 2a of the substrate 2 (the portion outside the lid 5 on the first surface 2a of the substrate 2).
Such a wiring 42 is electrically connected to the fixed electrodes 381, 383, 385, 387 as the second fixed electrodes of the element piece 3 and the fixed electrodes 391, 393, 395, 397 as the fourth fixed electrodes. ing.

  The wiring 43 extends from the fixed portion 31 on the substrate 2 to the outer peripheral portion (the portion outside the lid 5 on the substrate 2) on the first surface 2 a of the substrate 2. One end of the wiring 43 opposite to the fixing portion 31 is connected to the electrode 46 on the first surface 2a of the substrate 2 (a portion outside the lid 5 on the substrate 2).

  Further, the wiring 41 and the electrode 44 are provided in the wiring groove portion 22 (concave portion) of the substrate 2 described above. The wiring 42 and the electrode 45 are provided in the wiring groove 23 (recessed portion) of the substrate 2 described above. Further, the wiring 43 and the electrode 46 are provided in the wiring groove portion 24 (concave portion) of the substrate 2 described above.

  The material constituting the wirings 41 to 43 is not particularly limited as long as it has conductivity. Examples thereof include ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), gold (Au), platinum (Pt), silver (Ag), copper (Cu), aluminum (Al), and alloys containing these. , One or more of these can be used in combination.

Moreover, as a material which comprises the electrodes 44-46, similarly to the wiring 41-43 mentioned above, if it has electroconductivity, it will not specifically limit.
In the present embodiment, the same material as that of protrusions 471, 472, 481, and 482 described later is used as the material that configures the electrodes 44 to 46.
By providing such wirings 41 and 42 on the first surface 2 a of the substrate 2, the first fixed electrode (fixed electrodes 382, 384, 386 and 388), the movable electrode part 36, and the like are connected via the wiring 41. And the capacitance between the third fixed electrode (fixed electrodes 392, 394, 396, and 398) and the movable electrode portion 37 can be measured.
The capacitance between the second fixed electrode (fixed electrodes 381, 383, 385, 387) and the movable electrode part 36 and the fourth fixed electrode (fixed electrodes 391, 393, 395, 397) via the wiring 42 The capacitance between the movable electrode portion 37 and the movable electrode portion 37 can be measured.

In the present embodiment, by using the electrode 44 and the electrode 46, the capacitance between the first fixed electrode (fixed electrodes 382, 384, 386, 388) and the movable electrode portion 36 and the third fixed electrode (fixed) The electrostatic capacitance between the electrodes 392, 394, 396, and 398) and the movable electrode portion 37 can be output to the outside of the physical quantity sensor 1a.
Further, by using the electrode 45 and the electrode 46, the capacitance between the second fixed electrode (fixed electrodes 381, 383, 385, 387) and the movable electrode portion 36 and the fourth fixed electrode (fixed electrode 391, 393, 395, 397) and the movable electrode portion 37 can be output to the outside of the physical quantity sensor 1a.

  On the wiring 41, a plurality of conductive protrusions 481 and a plurality of protrusions 482 are provided. The plurality of protrusions 481 are provided corresponding to the fixed electrodes 382, 384, 386, and 388 as first fixed electrodes, and the plurality of protrusions 482 are provided on the fixed electrodes 392, 394, 396, and 398 as third fixed electrodes. Correspondingly provided.

The first fixed electrode (fixed electrodes 382, 384, 386, and 388) and the wiring 41 are electrically connected through the plurality of protrusions 481, and the third fixed terminal is connected through the plurality of protrusions 482. The fixed electrode (fixed electrodes 392, 394, 396, 398) and the wiring 41 are electrically connected.
Thereby, the wiring 41 and the fixed electrodes 382, 384, 386, 388, 392, 394, 396, and 398 can be electrically connected.

  Similar to the wiring 41, a plurality of conductive protrusions 471 and a plurality of protrusions 472 are provided on the wiring 42. The plurality of protrusions 471 are provided corresponding to the fixed electrodes 381, 383, 385, and 387 as the second fixed electrodes, and the plurality of protrusions 472 are provided on the fixed electrodes 391, 393, 395, and 397 as the fourth fixed electrodes. Correspondingly provided.

The third fixed electrode (fixed electrodes 381, 383, 385, 387) and the wiring 42 are electrically connected via the plurality of protrusions 471, and the fourth fixed electrode (via the plurality of protrusions 472). The fixed electrodes 391, 393, 395, 397) and the wiring 42 are electrically connected.
Thereby, the wiring 42 can be electrically connected to the fixed electrodes 381, 383, 385, 387, 391, 393, 395, 397.

  The material constituting the protrusions 471, 472, 481, 482 is not particularly limited as long as it has conductivity. For example, gold (Au), platinum (Pt), silver (Ag), copper (Cu), aluminum (Al), or an alloy containing these may be used, and one or more of these may be used in combination. be able to. By forming the protrusions 471, 472, 481, 482 using such a metal, the contact resistance between the wirings 41, 42 and the fixed electrode portions 38, 39 can be reduced.

(Lid)
The lid 5 is provided to protect the element piece 3 described above.
The lid 5 has a plate shape, and a concave portion 51 is provided on one surface (lower surface) thereof. The recess 51 is formed to allow displacement of the movable weight 33 and the movable electrode portions 36 and 37 of the element piece 3.

And the part outside the recessed part 51 of the lower surface of the cover body 5 is connected to the 1st surface 2a of the board | substrate 2 mentioned above.
The connection method between the lid 5 and the substrate 2 is not particularly limited, and for example, a connection method using an adhesive, an anodic bonding (connection) method, or the like can be used.
The material constituting the lid 5 is not particularly limited as long as it is a material suitable for the connection method. For example, a silicon material is used in the case of connection using an adhesive, and a glass material is used in the case of connection using an anodic bonding method. Etc. can be used.

According to the first embodiment described above, the following effects can be obtained.
When the movable weight 33 is excessively displaced due to acceleration applied to the physical quantity sensor 1a or the like, the movable electrode 371, the stopper portion 60, and the movable electrode portions 371 and the fixed electrode portions 38 and 39 are brought into contact with each other before the movable electrode portions 36 and 37 come into contact with each other. Can be brought into contact with each other. Therefore, the contact of the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 can prevent the respective electrodes from being damaged.

Further, when the movable weight 33 is displaced in one direction due to applied acceleration or the like, the electrostatic capacitance generated between the fixed electrode 391 and the movable electrode 371 and the electrostatic capacitance generated between the fixed electrode 392 and the movable electrode 372 are generated. Capacitance is the opposite capacitance change. In other words, with respect to the movable electrode portion 37, an electrostatic capacitance having an opposite phase (reverse charge) is generated between the movable electrode portion 37 and the two movable electrodes 371 and 372. When the movable weight 33 is displaced in one direction, the distance between the movable electrode 371 and the fixed electrode 391 and the distance between the movable electrode 372 and the fixed electrode 392 are in a differential relationship.
Therefore, since the change in the electrostatic capacity accompanying the displacement of the movable weight 33 due to acceleration or the like is detected by the two fixed electrodes 391 and 392, the detection accuracy and detection sensitivity of the acceleration and the like can be improved.

  In the above-described embodiment, the physical quantity sensor 1 is provided with the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 on both sides (both sides) along the direction in which the movable weight 33 is displaced. For example, the movable electrode portion 37 and the fixed electrode portion 39 may be provided on one side in the direction of displacement, and the stopper portion 60 may be provided on any one of the fixed electrode portions 39.

(Second Embodiment)
FIG. 5 is a plan view schematically showing a physical quantity sensor according to the second embodiment.
In FIG. 5, illustration of the lid 5 is omitted. In FIG. 5, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other, and the Z axis is an axis indicating a direction in which gravity acts.
The physical quantity sensor according to the second embodiment is different from the physical quantity sensor of the first embodiment in that a stopper is also provided on the second fixed electrode and the fourth fixed electrode side. In other words, a plurality of stopper portions are provided symmetrically with respect to the movable weight. Since other configurations are the same as those of the first embodiment, differences will be described, and description of similar parts will be simplified or omitted.

  As shown in FIG. 5, the physical quantity sensor 1b of the present embodiment includes a fixed electrode 391 having a stopper 60 provided between the movable electrodes 371 and 372 and a fixed electrode 387 provided between the movable electrodes 364 and 365. Is provided. In other words, each of the fixed electrodes 391 and 387 provided symmetrically about a point on a virtual line (not shown) passing through the center of the movable weight 33 in the direction in which the movable weight 33 is displaced (X-axis direction). The stopper part 60 is provided in this.

In the physical quantity sensor 1b of the present embodiment, the stopper portion 60 is provided with a stopper base portion 621, and the stopper base portion 621 is displaced in the direction in which the movable weight 33 is displaced on the free end side of the fixed electrode 387 (indicated by the arrow a in FIG. 5). In the direction of the X axis).
In other words, the stopper portion 60 is provided with a stopper base portion 621 extending in a direction intersecting with the fixed electrode 387 on the free end side of the fixed electrode 387.
In addition, the stopper base 621 extends from the free end of the fixed electrode 387 to the −X axis direction side and the + X axis direction side in the space between the movable electrode 364 and the movable electrode 365, and the distal end portions 621 a and 621 b thereof. Are provided with a gap between the movable electrodes 364 and 365.

  Specifically, the stopper base 621 has a tip 621 a at the end on the −X axis direction side that extends in the displacement direction of the movable weight 33. The stopper base 621 has a gap D (not shown) between the tip 621a and the movable electrode 371. The stopper base 621 has a tip 621b at the end on the + X-axis direction side that extends in the displacement direction of the movable weight 33. The stopper base 621 has a gap D ′ (not shown) between the tip 621 b and the movable electrode 365.

  The stopper base portion 621 of the stopper portion 60 is provided to prevent the movable electrode portions 36, 37 and the fixed electrode portions 38, 39 from coming into contact with each other and being damaged when the movable weight 33 is excessively displaced. It has been. In other words, it is provided to restrict the displacement when the movable weight 33 moves excessively.

Therefore, when the movable weight 33 is excessively displaced, it is required to bring the stopper base 621 into contact with the movable electrode portion 37 and suppress the contact (contact) between the movable electrode portion 37 and the fixed electrode portion 38. .
Therefore, the gap D (not shown) between the movable electrode 364 (36) and the distal end portion 621a is compared with the distance (gap) C (not shown) between the movable electrode 364 (36) and the fixed electrode 387 (38). A stopper base 621 is provided so as to be narrow. Further, compared to the distance (gap) C ′ (not shown) between the movable electrode 365 (36) and the fixed electrode 388 (38), the gap D (not shown) between the movable electrode 365 (36) and the tip 621b. The stopper base 621 is provided so as to be narrow.
In other words, the distances C and C ′ and the gaps D and D ′ are represented by the relationships C, C ′> D, D ′ (C> D, C ′> D ′). It is provided to become. Note that this is the same as the stopper portion 60 (stopper base portion 611) provided between the movable electrodes 371 and 372 described in the first embodiment.

  In the present embodiment, the two stopper portions 60 are provided between the movable electrodes 364 and 365 on the first fixed electrode and the second fixed electrode side and between the movable electrodes 371 and 372 on the third fixed electrode and the fourth fixed electrode side. And is provided. However, the present invention is not limited to this, and the two stopper portions 60 may be provided at point-symmetric positions. By providing the stopper portion 60 at a point-symmetrical position, it is possible to suppress the movement in the rotation axis direction around the Z axis generated in the movable weight 33 when the stopper portion 60 contacts the movable electrode portion 37. Further, it is possible to suppress damage due to the contact between the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 due to the movement in the rotation axis direction.

  Other configurations are the same as those of the physical quantity sensor 1a described in the first embodiment, and thus description thereof is omitted.

According to the second embodiment described above, the following effects can be obtained.
In such a physical quantity sensor 1b, a stopper portion 60 having a stopper base portion 621 is provided between movable electrodes 364 and 365 extending from the movable weight 33. A stopper portion 60 having a stopper base 611 is provided between the movable electrodes 371 and 372 extending from the movable weight 33 at a point-symmetrical position via the movable weight 33.
Accordingly, since a plurality of stopper portions 60 are provided at point-symmetrical positions via the movable weight 33, the rotation axis (Z-axis) direction generated in the movable weight 33 when contacting the movable electrode portions 36 and 37. Can suppress the movement. Accordingly, it is possible to suppress damage of the respective electrodes due to the contact between the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 due to the movement in the rotation axis direction.

(Third embodiment)
FIG. 6 is a plan view schematically showing a physical quantity sensor according to the third embodiment. FIG. 7 is an enlarged view of a physical quantity sensor at a portion indicated by a symbol E in FIG.
For convenience of explanation, the lid 5 is not shown in FIG. 6 and 7, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other, and the Z axis is an axis indicating a direction in which gravity acts.

The physical quantity sensor 1c according to the third embodiment shown in FIG. 6 and FIG. 7 is the first in the fixed electrode unit 38 compared to the physical quantity sensors 1a and 1b described in the first embodiment and the second embodiment. Of the fixed electrodes 382, 384, 386, and 388 as fixed electrodes and the fixed electrode portion 39, the fixed electrodes 392, 394, 396, and 398 as third fixed electrodes are not provided.
In other words, the physical quantity sensor 1c of the present embodiment is provided with fixed electrodes 381, 383, 385, 387, 391, 393, 395, 397 among the fixed electrode portions 38, 39.
The configuration of the other physical quantity sensor 1c is the same as that of the physical quantity sensors 1a and 1b described in the first embodiment and the second embodiment. Therefore, differences will be described, and description of similar parts will be simplified or omitted.

  In the physical quantity sensor 1c of the present embodiment, a stopper portion 60 is provided between the movable electrodes 371 and 372 of the movable electrode portion 37, similarly to the physical quantity sensor 1a described in the first embodiment. In the physical quantity sensor 1c, the stopper portion 60 is provided between the movable electrodes 371 and 372 and on the free end side of the fixed electrode 391 (on the movable weight 33 side + Y-axis direction side). In the physical quantity sensor 1c of the present embodiment, the stopper portion 60 is provided with a stopper base portion 611. The stopper base portion 611 moves in the direction in which the movable weight 33 is displaced on the free end side of the fixed electrode 391 (indicated by the arrow a in FIG. 6). In the direction of the X axis). In FIG. 6, a portion surrounded by a broken line and attached with a reference symbol E is schematically enlarged and shown in FIG. 7, and the stopper portion 60 will be described.

  In the physical quantity sensor 1c, the stopper portion 60 is provided with a stopper base 611 extending in the direction intersecting with the fixed electrode 391 on the free end side of the fixed electrode 387, similarly to the physical quantity sensor 1a. The stopper base 611 extends from the free end of the fixed electrode 391 to the −X-axis direction side and the + X-axis direction side in the space between the movable electrode 371 and the movable electrode 372, and the tip portions 611a and 611b thereof. Is provided with movable electrodes 371 and 372 and gaps D and D ′.

In the physical quantity sensor 1c, when the movable weight 33 is excessively displaced, the movable electrode parts 36 and 37 and the fixed electrode parts 38 and 39 come into contact (contact) with each other, as in the physical quantity sensor 1a. Is provided in order to suppress the damage.
Therefore, compared to the distance (gap) C between the movable electrode 371 and the fixed electrode 391, the gap D between the movable electrode 371 (37) and the tip 621a and the movable electrode 372 (37) and the tip 611b. A stopper base 611 is provided so that the gap D ′ is narrowed.
In other words, the distance (width) relationship between the distance C and the gaps D and D ′ is expressed by the relationship between C,> D, D ′ (C> D, C> D ′). It is provided to be.

  In the physical quantity sensor 1c, the stopper unit 60 may be provided point-symmetrically as described in the second embodiment. For example, the stopper 60 can be provided between the movable electrodes 371 and 372 and the movable electrodes 364 and 365 that are point-symmetrical positions. By providing the stopper portion 60 at a point-symmetrical position, it is possible to suppress the movement in the rotation axis direction around the Z axis that occurs in the movable weight 33 when the stopper portion 60 contacts the movable electrode portion 37. Further, it is possible to suppress damage due to the contact between the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 due to the movement in the rotation axis direction.

  Other configurations are the same as those of the physical quantity sensor 1a described in the first embodiment and the physical quantity sensor 1b described in the second embodiment, and thus description thereof is omitted.

According to the third embodiment described above, the following effects can be obtained.
When the movable weight 33 is excessively displaced by acceleration or the like, the movable electrode 371 and the stopper portion 60 can be brought into contact with each other before the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 are brought into contact with each other. Accordingly, it is possible to prevent the electrodes from being damaged by the contact between the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39.

  In the physical quantity sensors 1a, 1b, and 1c described in the first to third embodiments, the distal ends 611a, 611b, 621a, and 621b of the stopper base 60 have movable electrode portions 36 and 37, respectively. You may provide an electrical insulation part (illustration omitted) in the part which opposes.

By providing the insulating portion, when the stopper portion 60 and the movable electrode portions 36 and 37 come into contact with each other to restrict the displacement of the movable weight 33, the fixed electrode portions 38 and 39 provided with the stopper portion 60, and the movable electrode A short circuit with the parts 36 and 37 can be suppressed.
Therefore, even when the stopper portion 60 and the movable electrode portions 36 and 37 come into contact with each other, the capacitance generated between the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 provided with the stopper portion 60. Loss can be suppressed.

  Further, in the physical quantity sensors 1a, 1b, and 1c described in the first to third embodiments, the movable electrode portions 36 and 37 and the fixed electrode portions 38 and 39 are not limited to the number provided, and the detected acceleration and the like. It may be provided according to the conditions. Further, in the physical quantity sensors 1a, 1b, and 1c described in the first to third embodiments, one or two stopper portions are provided. However, the number is not limited to this, and the number provided is more than this. Also good.

(Example)
Next, an embodiment to which any of the physical quantity sensors 1a, 1b, 1c (hereinafter collectively referred to as the physical quantity sensor 1) according to an embodiment of the present invention is applied will be described with reference to FIGS. To do.

[Electronics]
First, an electronic apparatus to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIGS.

  FIG. 8 is a perspective view schematically illustrating a configuration of a notebook (or mobile) personal computer as an electronic apparatus including the physical quantity sensor according to the embodiment of the invention. In this figure, a notebook personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1008. The display unit 1106 is connected to the main body portion 1104 via a hinge structure portion. And is rotatably supported. Such a notebook personal computer 1100 incorporates a physical quantity sensor 1 that functions as an acceleration sensor or the like for detecting acceleration or the like applied to the notebook personal computer 1100 and displaying the acceleration or the like on the display unit 1106. Yes.

  FIG. 10 is a perspective view schematically illustrating a configuration of a mobile phone (including PHS) as an electronic apparatus including the physical quantity sensor according to the embodiment of the invention. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a physical quantity sensor 1 that functions as an acceleration sensor or the like for detecting the acceleration applied to the cellular phone 1200 and assisting the operation of the cellular phone 1200.

FIG. 10 is a perspective view schematically illustrating a configuration of a digital still camera as an electronic apparatus including the physical quantity sensor 1 according to an embodiment of the present invention. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
A display unit 1308 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1308 displays an object as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.
When the photographer confirms the subject image displayed on the display unit 1308 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1310. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown, a liquid crystal display 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1310 is output to the liquid crystal display 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates a physical quantity sensor 1 that functions as an acceleration sensor that detects acceleration due to falling in order to operate a function for protecting the digital still camera 1300 from falling.

  The physical quantity sensor 1 according to an embodiment of the present invention is not limited to the personal computer (mobile personal computer) in FIG. 8, the mobile phone in FIG. 9, and the digital still camera in FIG. (For example, inkjet printers), TVs, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, and crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments (for example, Vehicle, aircraft, ship instrumentation), flight simulation It can be applied to electronic devices coater or the like.

[Moving object]
FIG. 11 is a perspective view schematically showing an automobile as an example of a moving body. The automobile 1500 includes the physical quantity sensor 1 according to the present invention. For example, as shown in the figure, an automobile 1500 as a moving body has an electronic control unit (ECU) that includes a physical quantity sensor 1 that detects the acceleration of the automobile 1500 and controls the output of the engine. It is mounted on the vehicle body 1507. In addition, the physical quantity sensor 1 can be widely applied to a vehicle body attitude control unit, an anti-lock brake system (ABS), an air bag, and a tire pressure monitoring system (TPMS).

  DESCRIPTION OF SYMBOLS 1a, 1b, 1c ... Physical quantity sensor, 2 ... Board | substrate, 2a ... 1st surface, 3 ... Element piece, 4 ... Conductor pattern, 5 ... Cover body, 21 ... Hollow part, 22, 23, 24 ... Wiring groove part 31, 32 ... fixed part, 33 ... movable weight, 34, 35 ... coupling part, 36, 37 ... movable electrode part, 38, 39 ... fixed electrode part, 41, 42, 43 ... wiring, 44, 45, 46 ... electrode, 51 ... Recess, 60 ... Stopper part, 611,621 ... Stopper base part, 1100 ... Notebook personal computer, 1300 ... Digital still camera, 1500 ... Automobile.

Claims (7)

A movable weight;
A plurality of movable electrodes extending side by side from the movable weight;
A fixed electrode inserted between each of the plurality of movable electrodes,
At least one of the fixed electrodes includes a stopper portion extending toward each of the movable electrodes disposed on both sides,
The physical quantity sensor characterized in that an interval between the end of the stopper and the movable electrode is narrower than an interval between the movable electrode and the fixed electrode. The physical quantity sensor according to claim 1,
A physical quantity sensor, wherein two fixed electrodes are inserted between each of the plurality of movable electrodes. The physical quantity sensor according to claim 1 or 2,
The plurality of movable electrodes extend in opposite directions from both sides of the movable weight, and are arranged side by side along the displacement direction of the movable weight,
The physical quantity sensor, wherein the fixed electrode provided with the stopper portion is disposed on each side of the movable weight. The physical quantity sensor according to claim 3,
A physical quantity sensor, wherein the fixed electrode having the stopper portion is provided at a point-symmetrical position with respect to the center of the movable weight in plan view. The physical quantity sensor according to any one of claims 1 to 4,
A physical quantity sensor comprising an insulating portion that is electrically insulated at the end of the stopper portion.   An electronic device on which the physical quantity sensor according to any one of claims 1 to 5 is mounted.   A moving body on which the physical quantity sensor according to any one of claims 1 to 5 is mounted.

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