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JP2014081250A - Adsorption characteristic measurement instrument - Google Patents

Adsorption characteristic measurement instrument Download PDF

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JP2014081250A
JP2014081250A JP2012228528A JP2012228528A JP2014081250A JP 2014081250 A JP2014081250 A JP 2014081250A JP 2012228528 A JP2012228528 A JP 2012228528A JP 2012228528 A JP2012228528 A JP 2012228528A JP 2014081250 A JP2014081250 A JP 2014081250A
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adsorbate
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sample tube
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JP6037760B2 (en
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Kazuyuki Nakai
和之 仲井
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NIPPON BELL KK
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Abstract

【課題】吸着特性測定装置において、1つの試料についての吸着特性測定をしながら、次の試料についての吸着特性測定を行うことができるようにすることである。
【解決手段】吸着特性測定装置30は、試料管10等を取り付ける取付部50等と、吸着質を供給する第1吸着質ガス源38と、取付部50等のそれぞれと第1吸着質ガス源38と開閉弁を介して接続されるマニホールド44と、マニホールド44の圧力を検出する圧力計94と、試料管10等の圧力を検出する圧力計56等と、測定制御部100とを備え、測定制御部は、マニホールド44に吸着質を導入する導入処理手順104と、試料管10等に吸着質を供給する供給処理手順106とを繰り返し実行する。そして、吸着質が供給された試料管10等の内部の試料20等について、圧力計94と圧力計56等の検出値に基づいて吸着量を算出する。
【選択図】図1
An adsorption characteristic measuring apparatus is configured to perform adsorption characteristic measurement on the next sample while measuring adsorption characteristic on one sample.
An adsorption characteristic measuring device includes an attachment part for attaching a sample tube and the like, a first adsorbate gas source for supplying adsorbate, an attachment part and the like, and a first adsorbate gas source. 38, a pressure gauge 94 that detects the pressure of the manifold 44, a pressure gauge 56 that detects the pressure of the sample tube 10 and the like, and a measurement control unit 100. The control unit repeatedly executes an introduction processing procedure 104 for introducing the adsorbate into the manifold 44 and a supply processing procedure 106 for supplying the adsorbate to the sample tube 10 and the like. Then, the adsorption amount is calculated based on the detection values of the pressure gauge 94 and the pressure gauge 56 for the sample 20 and the like inside the sample tube 10 to which the adsorbate is supplied.
[Selection] Figure 1

Description

本発明は、吸着特性測定装置に係り、特に複数の試料についての吸着特性を測定する吸着特性測定装置に関する。   The present invention relates to an adsorption characteristic measuring apparatus, and more particularly to an adsorption characteristic measuring apparatus that measures adsorption characteristics for a plurality of samples.

吸着特性装置について、特許文献1には、ガスで満たされ、測定試料が内部に配置され、かつ一定の容積を有する容器の測定系において、温度T、圧力Pおよび吸着量nの間には、Δn=Δni−(V/RT)×ΔPの関係式が成立することが述べられている。ここで、Δnは、測定試料に対するガスの吸着量変化(mol)、Δniは、容器内に供給されるガス量または容器外に排出されるガス量(mol)、ΔPは、容器内の圧力変化(Torr)、Vは、容器の容積(cm3)、Rは気体定数で0.0624cm3・Torr/K・molの値、Tは容器内の温度(K)である。 Regarding the adsorption characteristic apparatus, Patent Document 1 discloses that in a measurement system of a container that is filled with a gas, a measurement sample is disposed inside, and has a certain volume, between the temperature T, the pressure P, and the adsorption amount n. It is stated that the relational expression Δn = Δn i − (V / RT) × ΔP holds. Here, Δn is a change in the amount of gas adsorbed to the measurement sample (mol), Δn i is an amount of gas supplied into or discharged from the container (mol), and ΔP is a pressure inside the container. Change (Torr), V is the volume (cm 3 ) of the container, R is a gas constant of 0.0624 cm 3 · Torr / K · mol, and T is the temperature (K) in the container.

特許文献2は、ガス吸着量の正確な測定には、容積の不明な試料が収容されている測定試料管の見かけ上の容積である死容積Vdの正確な値が必要であると述べている。そこで幾何学的容積VSが予め正確に測定してある基準容積部にヘリウムガスを入れその圧力をπとし、基準容積部のヘリウムガスを測定試料管に導入したときの圧力π’を求め、πVS=π’(VS+Vd)から死容積Vdを求めることが開示されている。 Patent Document 2 states that accurate measurement of the gas adsorption amount requires an accurate value of the dead volume V d , which is an apparent volume of a measurement sample tube in which a sample of unknown volume is accommodated. Yes. Therefore, helium gas is put into a reference volume part in which the geometric volume V S is accurately measured in advance, and its pressure is set to π, and the pressure π ′ when the helium gas in the reference volume part is introduced into the measurement sample tube is obtained, It is disclosed that the dead volume V d is obtained from πV S = π ′ (V S + V d ).

特開2011−112404号公報JP 2011-112404 A 特開平11−108733号公報JP 11-108733 A

特許文献1に述べられている原理に従って試料の吸着特性を得るには、容器の容積Vと温度Tを一定として、試料にΔniの吸着質を供給し、吸着前後の圧力変化ΔPを測定しなければならない。ここで、容器の容積Vと温度Tを一定として圧力変化ΔPが生じる程度の吸着を生じさせるにはかなりの長時間を要する。ΔPの測定ができるまで、吸着特性測定装置はその試料のために独占され、次の試料についての吸着特性測定を行うことができない。 In order to obtain the adsorption characteristics of the sample according to the principle described in Patent Document 1, the volume V and temperature T of the container are kept constant, Δn i adsorbate is supplied to the sample, and the pressure change ΔP before and after the adsorption is measured. There must be. Here, it takes a considerable amount of time to cause the adsorption to such an extent that the pressure change ΔP occurs with the volume V and temperature T of the container being constant. Until ΔP can be measured, the adsorption characteristic measurement apparatus is exclusively used for the sample, and the adsorption characteristic measurement cannot be performed on the next sample.

本発明の目的は、1つの試料についての吸着特性測定をしながら、次の試料についての吸着特性測定を行うことができる吸着特性測定装置を提供することである。   The objective of this invention is providing the adsorption | suction characteristic measuring apparatus which can perform the adsorption | suction characteristic measurement about the following sample, measuring the adsorption | suction characteristic about one sample.

本発明に係る吸着特性測定装置は、複数の試料管のそれぞれに収容される複数の試料に対し予め定められた吸着質を供給して吸着特性を測定する吸着特性測定装置であって、複数の試料管の開口部のそれぞれに設けられる複数の取付部と、吸着質を供給する吸着質供給部と、複数の取付部のそれぞれと試料管用の開閉弁を介し、吸着質供給部と吸着質用の開閉弁を介して接続されるマニホールドと、マニホールドの圧力を検出するマニホールド圧力計と、複数の試料管の内部圧力をそれぞれ独立に検出する複数の試料管圧力計と、測定制御部と、を備え、測定制御部は、複数の試料管用の開閉弁の全てを閉状態のままで吸着質用の開閉弁を閉状態から任意に定めた導入期間について開状態としてマニホールドに吸着質を導入する導入処理手順と、吸着質用の開閉弁を閉状態に戻した後、複数の試料管の中の任意の1つについて、その試料管用の開閉弁を閉状態から予め任意に定めた開弁期間について開状態としてその試料管に収容される試料に吸着質を供給する供給処理手順と、を繰り返し、導入期間と開弁期間の合計期間を繰り返し単位として、複数の試料管のそれぞれに順次吸着質を供給し、吸着質が供給されたそれぞれの試料管について、マニホールドの圧力とそれぞれの試料管の内部圧力とに基づいて吸着特性を測定することを特徴とする。   An adsorption characteristic measuring apparatus according to the present invention is an adsorption characteristic measuring apparatus that measures adsorption characteristics by supplying a predetermined adsorbate to a plurality of samples accommodated in each of a plurality of sample tubes. For the adsorbate supply section and the adsorbate via the plurality of attachment sections provided in each of the sample tube openings, the adsorbate supply section for supplying the adsorbate, each of the plurality of attachment sections, and the open / close valve for the sample tube A manifold connected via an on-off valve, a manifold pressure gauge for detecting the pressure of the manifold, a plurality of sample tube pressure gauges for independently detecting the internal pressures of the plurality of sample tubes, and a measurement control unit, The measurement control unit introduces the adsorbate into the manifold by opening the adsorbate on / off valve from the closed state to an open state arbitrarily determined from the closed state while all the plurality of sample tube on / off valves are closed. Procedure After the adsorbate opening / closing valve is returned to the closed state, the opening / closing valve for the sample tube is opened for any one of the plurality of sample tubes from the closed state to a predetermined opening period. The supply processing procedure for supplying the adsorbate to the sample accommodated in the sample tube is repeated, and the adsorbate is sequentially supplied to each of the plurality of sample tubes, with the total period of the introduction period and the valve opening period as a repeating unit. For each sample tube to which the adsorbate is supplied, the adsorption characteristic is measured based on the pressure of the manifold and the internal pressure of each sample tube.

また、本発明に係る吸着特性測定装置において、測定制御部は、複数の試料管用の開閉弁の全てを閉状態のままで吸着質用の開閉弁を閉状態から予め定めた導入期間について開状態としてマニホールドに吸着質を供給したときの導入期間終了時のマニホールドの圧力をPIiとして取得し、吸着質用の開閉弁を閉状態に戻した後、複数の試料管の任意の1つを測定対象試料管として、測定対象試料管用の開閉弁を閉状態から予め定めた開弁期間について開状態として測定対象試料管に収容される試料に吸着質を供給したときの開弁期間の終了時のマニホールドの圧力をPIi *として取得し、開弁期間終了後に測定対象試料管用の開閉弁を閉状態に戻し、測定対象試料管に対応する試料管圧力検出部が検出する圧力の時間変化を監視し、圧力低下が平衡状態となったときの測定対象試料管の内部圧力をPi *として取得し、マニホールドの温度をTSとし容積をVSとして、測定対象試料管の温度をTdとし死容積をVdiとして、気体定数Rを用いて、測定対象試料管の内部に導入された吸着質の導入量Δniを一般的には、Δni=(VS/RTS)×(PIi−PIi *)として算出し、測定対象試料管の死容積に残った吸着質残量ΔndiをΔndi=(Vdi/RTs)×Pi *として算出し、測定対象試料管の内部の試料に吸着した吸着質の量ViをVi=(Δni−Δndi)で求めることが好ましい。実際にはガスの非理想性を考慮したガスの実在気体状態方程式により計算することが好ましい。 Further, in the adsorption characteristic measuring apparatus according to the present invention, the measurement control unit is in an open state for a predetermined introduction period from the closed state to the open / close valve for the adsorbate while all of the plurality of sample tube open / close valves are closed. As a result, the manifold pressure at the end of the introduction period when the adsorbate is supplied to the manifold is obtained as P Ii , the adsorbate on / off valve is returned to the closed state, and any one of the plurality of sample tubes is measured. As the target sample tube, when the open / close valve for the measurement target sample tube is opened from the closed state for a predetermined opening period, the adsorbate is supplied to the sample accommodated in the measurement target sample tube at the end of the valve opening period. The pressure of the manifold is acquired as P Ii * , and the open / close valve for the measurement target sample tube is returned to the closed state after the valve opening period, and the time change of the pressure detected by the sample tube pressure detection unit corresponding to the measurement target sample tube is monitored. And pressure drop The internal pressure of the measurement target sample tube when it becomes an equilibrium state obtained as P i *, the temperature of the manifold were volume and T S as V S, the temperature of the measurement target sample tube T d urban death volume V di In general, the introduction amount Δn i of the adsorbate introduced into the measurement target sample tube using the gas constant R is generally Δn i = (V S / RT S ) × (P Ii −P Ii * ) And the remaining amount of adsorbate Δn di remaining in the dead volume of the sample tube to be measured is calculated as Δn di = (V di / RT s ) × P i * and is adsorbed to the sample inside the sample tube to be measured. The amount V i of the adsorbate thus obtained is preferably obtained by V i = (Δn i −Δn di ). Actually, it is preferable to calculate by the real gas equation of gas considering the non-ideality of the gas.

また、本発明に係る吸着特性測定装置において、複数の試料管について、それぞれの死容積Vdiを予め求めておくことが好ましい。 Further, in the adsorption characteristic measuring apparatus according to the present invention, it is preferable that the respective dead volumes V di are obtained in advance for a plurality of sample tubes.

また、本発明に係る吸着特性測定装置において、吸着平衡圧をあらかじめ決定された圧力で測定する吸着特性測定装置であって、マニホールドの温度をTSとし容積をVSとして、測定対象試料管の温度をTdとし死容積をVdiとして、気体定数Rを用いて、測定対象試料管の内部に導入された吸着質の導入量Δniを、Δni=(VS/RTS)×Σ(PIi n−PIi n*)として算出し、測定対象試料管の死容積に残った吸着質残量ΔndiをΔndi=(Vdi/RTS)×Pi *として算出し、測定対象試料管の内部の試料に吸着した吸着質の量ViをVi=(Δni−Δndi)で求めることが好ましい。 Further, in the adsorption characteristic measuring apparatus according to the present invention, the adsorption characteristic measuring apparatus measures the adsorption equilibrium pressure at a predetermined pressure, wherein the temperature of the manifold is T S and the volume is V S. the temperature T d city death volume as V di, using gas constant R, the introduction amount [Delta] n i of adsorbate that is introduced into the measured sample tube, Δn i = (V S / RT S) × Σ (P Ii n -P Ii n * ) is calculated as to calculate the adsorbate remaining [Delta] n di remaining dead volume of the measurement object sample tube as Δn di = (V di / RT S) × P i *, measured The amount of adsorbate V i adsorbed on the sample inside the target sample tube is preferably determined by V i = (Δn i −Δn di ).

上記構成により、吸着特性測定装置は、マニホールドに吸着質を導入する導入期間と、マニホールドから試料管に吸着質を供給する開弁期間の合計期間を繰り返し単位として、複数の試料管のそれぞれに順次吸着質を供給する。導入期間と開弁期間は吸着質を移す時間であるので、短時間で済み、各試料管に順次吸着質を供給した後、各試料管について吸着前後の圧力変化ΔPを測定する。各試料管には独立して試料管圧力検出部が設けられるので、ΔPの測定は時間がかかっても並行して行うことができる。このようにして、1台の吸着特性測定装置を用いて、1つの試料についての吸着特性測定をしながら、次の試料についての吸着特性測定を行うことができる。   With the above configuration, the adsorption characteristic measuring apparatus sequentially repeats each of the plurality of sample tubes, with the total period of the introduction period for introducing the adsorbate into the manifold and the valve opening period for supplying the adsorbate from the manifold to the sample tube as a repeating unit. Supply adsorbate. Since the introduction period and the valve opening period are times for transferring the adsorbate, the time is short, and after the adsorbate is sequentially supplied to each sample tube, the pressure change ΔP before and after the adsorption is measured for each sample tube. Since each sample tube is independently provided with a sample tube pressure detector, ΔP can be measured in parallel even if it takes time. In this way, the adsorption characteristic measurement for the next sample can be performed while the adsorption characteristic measurement for one sample is performed using one adsorption characteristic measurement apparatus.

また、吸着特性測定装置は、導入期間終了時のマニホールドの圧力をPIiとして取得し、開弁期間終了時のマニホールドの圧力をPIi *として取得し、測定対象試料管について吸着による圧力低下が平衡状態となったときの圧力をPi *として取得し、この3つの圧力から測定対象試料管の内部の試料に吸着した吸着質の量を求める。この3つの圧力の中でPIiとPIi *は1つの圧力計で測定するが、短時間で取得できるので、順次直列的に処理してもあまり時間がかからない。もう1つのPi *は長時間かかるがそれぞれの圧力計を用いるので、並列的に処理ができる。このようにして、1台の吸着特性測定装置を用いて、複数の試料についての吸着特性測定を効率的に行うことができる。 In addition, the adsorption characteristic measuring apparatus obtains the pressure of the manifold at the end of the introduction period as P Ii , obtains the pressure of the manifold at the end of the valve opening period as P Ii * , and the pressure drop due to adsorption occurs in the sample tube to be measured. The pressure at the equilibrium state is acquired as P i * , and the amount of adsorbate adsorbed on the sample inside the measurement target sample tube is obtained from these three pressures. Of these three pressures, P Ii and P Ii * are measured with a single pressure gauge, but can be acquired in a short time, so even if they are sequentially processed in series, it does not take much time. The other P i * takes a long time, but since each pressure gauge is used, it can be processed in parallel. In this way, it is possible to efficiently perform adsorption characteristic measurement for a plurality of samples using a single adsorption characteristic measurement apparatus.

また、吸着特性測定装置において、複数の試料管について、それぞれの死容積Vdiを予め求めておくので、1台の吸着特性測定装置を用いて順次測定を行っても、各試料についての吸着特性測定の精度の向上を図ることができる。 Further, in the adsorption characteristic measuring apparatus, the dead volume V di is obtained in advance for a plurality of sample tubes. Therefore, even if measurement is sequentially performed using one adsorption characteristic measuring apparatus, the adsorption characteristic for each sample is obtained. The measurement accuracy can be improved.

また吸着時、目的圧以下になった場合に、再度吸着質を導入することにより目的平衡圧に近い測定点を得ることができる。   In addition, when the pressure falls below the target pressure during adsorption, a measurement point close to the target equilibrium pressure can be obtained by introducing the adsorbate again.

また、吸着量が目的吸着量許容量を超えて変動した場合は、測定点を細かく測定するために、上記ステップを飛ばし、吸着量測定点が離れることなく均等に測定できる。   Further, when the adsorption amount fluctuates beyond the target adsorption amount allowable amount, in order to measure the measurement point finely, the above steps are skipped, and the adsorption amount measurement point can be measured uniformly without leaving.

また、吸着量測定時の試料のある死容積が試料管の開閉弁を閉とする事により低減する。これにより従来の測定装置に比較し死容積を小さくすることが可能であり、それにより吸着量測定精度を向上することができる。   Moreover, the dead volume with the sample at the time of measuring the adsorption amount is reduced by closing the open / close valve of the sample tube. As a result, the dead volume can be reduced as compared with the conventional measuring apparatus, and the adsorption amount measurement accuracy can be improved thereby.

複数の試料を同時に吸着特性測定ができることにより、吸着平衡に到達した試料から順次、次の測定点に移行できることによる測定全体時間の短縮ができる。   Since adsorption characteristics can be measured for a plurality of samples at the same time, the entire measurement time can be shortened by being able to shift to the next measurement point sequentially from the sample that has reached adsorption equilibrium.

本発明に係る実施の形態における吸着特性測定装置の構成図である。It is a block diagram of the adsorption | suction characteristic measuring apparatus in embodiment which concerns on this invention. 本発明に係る実施の形態の吸着特性測定装置における動作手順を示すフローチャートである。It is a flowchart which shows the operation | movement procedure in the adsorption | suction characteristic measuring apparatus of embodiment which concerns on this invention. 本発明に係る実施の形態の吸着特性測定装置において、各開閉弁の開閉タイミングと各圧力計の検出値の変化を示すタイムチャートである。In the adsorption characteristic measuring device of the embodiment concerning the present invention, it is a time chart which shows the change of the open / close timing of each on-off valve, and the detected value of each pressure gauge.

以下に図面を用いて本発明に係る実施の形態につき詳細に説明する。以下では、吸着質として窒素ガスを述べるが、これは例示であって、これ以外の物質であってもよい。また、死容積の算出には、特許文献2のように、窒素吸着温度においても試料に吸着しないヘリウムガスを用いて行うものとするが、予め試料管の容積と試料の容積を測定し、その差容積を死容積として用いてもよい。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following, nitrogen gas is described as an adsorbate, but this is an example, and other substances may be used. In addition, the dead volume is calculated using helium gas that is not adsorbed to the sample even at the nitrogen adsorption temperature as in Patent Document 2, and the volume of the sample tube and the volume of the sample are measured in advance. The differential volume may be used as the dead volume.

以下では、連続して測定できる試料管の数を3として説明するが、これは例示であって、複数の試料管であればよく、その数を2としてもよく、4以上としてもよい。   In the following, the number of sample tubes that can be measured continuously will be described as 3. However, this is an example, and a plurality of sample tubes may be used, and the number may be 2 or 4 or more.

以下で述べる形状、寸法、材質等は例示であって、吸着特性測定装置の仕様に応じ、適宜変更が可能である。   The shapes, dimensions, materials, and the like described below are examples, and can be appropriately changed according to the specifications of the adsorption characteristic measuring device.

以下では、全ての図面において、一または対応する要素には同一の符号を付し、重複する説明を省略する。   Hereinafter, in all the drawings, the same reference numerals are given to one or corresponding elements, and redundant description is omitted.

図1は、吸着特性測定装置30の構成図である。図1には、吸着特性測定装置30の構成要素ではないが、3つの試料管10,12,14と、これらの内部に収容されている試料20,22,24が示されている。吸着特性測定装置30は、これら3つの試料管10,12,14を取り付けた後は、1つの試料についての吸着特性測定をしながら、次の試料についての吸着特性測定を並行して行うことができる機能を有する。   FIG. 1 is a configuration diagram of the adsorption characteristic measuring device 30. FIG. 1 shows three sample tubes 10, 12, and 14, and samples 20, 22, and 24 accommodated therein, although they are not constituent elements of the adsorption characteristic measuring device 30. After attaching these three sample tubes 10, 12, and 14, the adsorption characteristic measuring device 30 can perform the adsorption characteristic measurement for the next sample in parallel while measuring the adsorption characteristic for one sample. It has a function that can.

吸着特性測定装置30は、3つの試料管10,12,14について吸着特性を測定するのに適した温度にするための冷媒32が満たされた冷媒容器34と、ヘリウムガス源36と、第1吸着質ガス源38と、第2吸着質ガス源40と、排気ポンプ42と、マニホールド44を含む配管部46と、測定制御部100を含んで構成される。   The adsorption characteristic measuring apparatus 30 includes a refrigerant container 34 filled with a refrigerant 32 for setting the temperature suitable for measuring the adsorption characteristics of the three sample tubes 10, 12, and 14, a helium gas source 36, An adsorbate gas source 38, a second adsorbate gas source 40, an exhaust pump 42, a piping unit 46 including a manifold 44, and a measurement control unit 100 are configured.

3つの試料管10,12,14と3つの試料20,22,24は、吸着特性の測定処理が別個に行われることを除けば、同じ構成を有するので、試料管10と試料20に代表させて説明を続ける。   The three sample tubes 10, 12, 14 and the three samples 20, 22, 24 have the same configuration except that the adsorption characteristic measurement process is performed separately. Continue to explain.

試料管10は、一方端に端部開口を有する細長い管で、他方端である底部の内部空間が試料20を収容することができる収容部となっている試料容器である。試料管10の一方端の端部開口は、配管部46を介して、ヘリウムガス源36または第1吸着質ガス源38または第2吸着質ガス源40または排気ポンプ42と接続される。   The sample tube 10 is an elongate tube having an end opening at one end, and is a sample container in which the inner space at the bottom, which is the other end, serves as a storage portion that can store the sample 20. The end opening at one end of the sample tube 10 is connected to the helium gas source 36, the first adsorbate gas source 38, the second adsorbate gas source 40, or the exhaust pump 42 via the piping unit 46.

かかる試料管10としては、一様な外径と内径を有するガラス製の試験管が用いられる。試料管10の寸法の一例を上げると、内径1cm、長さ20cmである。測定の目的によっては、石英製の試験管、金属製の試験容器を試料管として用いてもよい。形状も測定の目的に適したものとしてよい。例えば、端部開口の部分が細く、収容部の部分が太い形状のものを用いてもよい。寸法も測定の目的に適したものとしてよい。3つの試料管10,12,14について、それぞれの形状、寸法、材質が異なってもよい。   As the sample tube 10, a glass test tube having a uniform outer diameter and inner diameter is used. An example of the dimensions of the sample tube 10 is an inner diameter of 1 cm and a length of 20 cm. Depending on the purpose of the measurement, a quartz test tube or a metal test vessel may be used as the sample tube. The shape may also be suitable for measurement purposes. For example, the end opening portion may be thin and the accommodating portion may be thick. The dimensions may also be suitable for measurement purposes. The three sample tubes 10, 12, and 14 may have different shapes, dimensions, and materials.

試料20は、吸着特性測定の対象物となる粉体である。粉体の比表面積や細孔分布等を評価するために、吸着質がどの程度吸着するかの粉体の吸着特性を測定する。試料20は、吸着特性測定の対象物であるので、測定の目的によって様々なものとなる。粉体の粒度等も様々であってよく、粉体以外の固体であってもよく、固体が有孔であってもよい。3つの試料20,22,24は、それぞれが異なるものであってもよく、同じものであってもよい。吸着質は、配管部46を介して、第1吸着質ガス源38または第2吸着質ガス源40から供給される。以下では、第1吸着質ガス源38からの窒素ガスを吸着質として説明を続ける。   The sample 20 is a powder that is an object of adsorption characteristic measurement. In order to evaluate the specific surface area and pore distribution of the powder, the adsorption characteristics of the powder to determine how much adsorbate is adsorbed are measured. Since the sample 20 is an object for measuring adsorption characteristics, it varies depending on the purpose of the measurement. The particle size of the powder may vary, and it may be a solid other than the powder, or the solid may be porous. The three samples 20, 22, and 24 may be different from each other or the same. The adsorbate is supplied from the first adsorbate gas source 38 or the second adsorbate gas source 40 via the piping 46. Hereinafter, the description will be continued assuming that the nitrogen gas from the first adsorbate gas source 38 is an adsorbate.

冷媒容器34は、内部空間に試料管10,12,14を配置し、その周囲を冷媒32で満たすことで、試料管10,12,14を所定の温度Tdに維持するためのデュアー瓶である。冷媒32の種類は、吸着質によって選定されるが、吸着質が窒素ガスのときは、冷媒32を液体窒素とすることがある。この場合、所定の温度Tdは77Kである。 The refrigerant container 34 is a dewar for maintaining the sample tubes 10, 12, 14 at a predetermined temperature T d by arranging the sample tubes 10, 12, 14 in the internal space and filling the periphery with the refrigerant 32. is there. The type of the refrigerant 32 is selected depending on the adsorbate, but when the adsorbate is nitrogen gas, the refrigerant 32 may be liquid nitrogen. In this case, the predetermined temperature T d is 77K.

図1でHeと示されているヘリウムガス源36は、試料管10,12,14の死容積Vdを測定するためのヘリウムガスが充填されているガスボンベである。吸着質を窒素とした場合の死容積の測定には、試料20,22,24に窒素吸着温度においても吸着しない不活性物質を用いる必要があるが、ヘリウムガスはその目的に適したガスである。なお、死容積Vdは特許文献2で述べられている方法を用いて測定されるが、その詳細については後述する。 A helium gas source 36 indicated as He in FIG. 1 is a gas cylinder filled with helium gas for measuring the dead volume V d of the sample tubes 10, 12, and 14. In measuring the dead volume when the adsorbate is nitrogen, it is necessary to use an inert substance that does not adsorb at the nitrogen adsorption temperature for the samples 20, 22 and 24, but helium gas is a gas suitable for that purpose. . The dead volume Vd is measured using the method described in Patent Document 2, and details thereof will be described later.

第1吸着質ガス源38は、試料20,22,24に対する吸着特性を測定する対象物である吸着質を供給する吸着質供給部である。ここでは、吸着質は窒素ガスであるので、第1吸着質ガス源38は、窒素ガスボンベである。第2吸着質ガス源40は、予備の吸着質供給部であり、例えば、第1吸着質ガス源38とは異なる吸着質を供給するときに用いられる。   The first adsorbate gas source 38 is an adsorbate supply unit that supplies an adsorbate that is an object for measuring the adsorption characteristics of the samples 20, 22, and 24. Here, since the adsorbate is nitrogen gas, the first adsorbate gas source 38 is a nitrogen gas cylinder. The second adsorbate gas source 40 is a spare adsorbate supply unit, and is used, for example, when supplying an adsorbate different from the first adsorbate gas source 38.

排気ポンプ42は、試料管10,12,14のいずれか1とマニホールド44の内部を減圧するための排気装置である。排気ポンプ42としては、ロータリポンプを用いることができる。吸着特性測定の目的によっては、ターボ分子ポンプを用い、ロータリポンプを補助ポンプとして用いるものとしてよい。   The exhaust pump 42 is an exhaust device for depressurizing any one of the sample tubes 10, 12, and 14 and the inside of the manifold 44. As the exhaust pump 42, a rotary pump can be used. Depending on the purpose of the adsorption characteristic measurement, a turbo molecular pump may be used and a rotary pump may be used as an auxiliary pump.

配管部46は、マニホールド44を介して、3つの試料管10,12,14、ヘリウムガス源36、第1吸着質ガス源38、第2吸着質ガス源40、排気ポンプ42、飽和蒸気圧管48をそれぞれ互いに接続するために設けられる複数の配管である。配管部46には、測定制御部100の制御の下で作動する複数の開閉弁54,64,74,82,86,90,92,96が設けられる。   The piping unit 46 is connected to the three sample tubes 10, 12, 14, the helium gas source 36, the first adsorbate gas source 38, the second adsorbate gas source 40, the exhaust pump 42, and the saturated vapor pressure tube 48 via the manifold 44. Are a plurality of pipes provided to connect the two to each other. The piping unit 46 is provided with a plurality of on-off valves 54, 64, 74, 82, 86, 90, 92, and 96 that operate under the control of the measurement control unit 100.

配管部46のうち、3つの試料管10,12,14とマニホールド44の間に設けられる配管には、それぞれ開閉弁54,64,74が接続配置される。試料管10で説明すると、試料管10の端部開口に取り付けられる取付部50を一端側とし、マニホールド44に設けられる接続ポートを他端側として、一端側と他端側の間に開閉弁54が直列に接続配置されて試料管10のための配管となる。圧力計56は、取付部50と開閉弁54の間の配管に接続され、試料管10の内部圧力P1を検出する試料管圧力検出部である。 On / off valves 54, 64, and 74 are connected to the pipes provided between the three sample tubes 10, 12, and 14 and the manifold 44 in the pipe portion 46. In the case of the sample tube 10, the attachment portion 50 attached to the end opening of the sample tube 10 is one end side, the connection port provided in the manifold 44 is the other end side, and the open / close valve 54 is provided between the one end side and the other end side. Are connected in series to form a pipe for the sample tube 10. The pressure gauge 56 is a sample tube pressure detection unit that is connected to a pipe between the attachment unit 50 and the on-off valve 54 and detects the internal pressure P 1 of the sample tube 10.

同様に、試料管12の端部開口に取り付けられる取付部60とマニホールド44との間に、開閉弁64が直列に接続配置されて試料管12のための配管となる。圧力計66は、取付部60と開閉弁64の間の配管に接続され、試料管12の内部圧力P2を検出する試料管圧力検出部である。また、試料管14の端部開口に取り付けられる取付部70とマニホールド44との間に、開閉弁74が直列に接続配置されて試料管14のための配管となる。圧力計76は、取付部70と開閉弁74の間の配管に接続され、試料管14の内部圧力P3を検出する試料管圧力検出部である。 Similarly, an open / close valve 64 is connected in series between the attachment portion 60 attached to the end opening of the sample tube 12 and the manifold 44 to serve as a pipe for the sample tube 12. The pressure gauge 66 is a sample tube pressure detection unit that is connected to a pipe between the mounting portion 60 and the on-off valve 64 and detects the internal pressure P 2 of the sample tube 12. In addition, an open / close valve 74 is connected in series between the attachment portion 70 attached to the end opening of the sample tube 14 and the manifold 44 to serve as a pipe for the sample tube 14. The pressure gauge 76 is a sample tube pressure detection unit that is connected to a pipe between the attachment unit 70 and the on-off valve 74 and detects the internal pressure P 3 of the sample tube 14.

配管部46のうち、ヘリウムガス源36とマニホールド44の間には、流量調節弁80と開閉弁82が直列に接続配置される。同様に、第1吸着質ガス源38とマニホールド44の間には、流量調整弁84と開閉弁86が直列に接続配置される。また、第2吸着質ガス源40とマニホールド44の間には、流量調整弁88と開閉弁90が直列に接続配置される。また、排気ポンプ42とマニホールド44との間には、開閉弁92が配置される。   In the piping portion 46, a flow rate adjusting valve 80 and an on-off valve 82 are connected in series between the helium gas source 36 and the manifold 44. Similarly, a flow rate adjustment valve 84 and an on-off valve 86 are connected in series between the first adsorbate gas source 38 and the manifold 44. Between the second adsorbate gas source 40 and the manifold 44, a flow rate adjustment valve 88 and an on-off valve 90 are connected in series. An on-off valve 92 is disposed between the exhaust pump 42 and the manifold 44.

マニホールド44は、開閉弁54,64,74,82,86,90,92,96のそれぞれの一方端を互いに接続した流体管路である。圧力計94は、マニホールド44の内部圧力P0を検出するマニホールド圧力検出部である。図1では、マニホールド44は屈曲した管路で示されているが、開閉弁54,64,74,82,86,90,92,96の一方端が取り付けられた箱形状の容器を用いてもよい。 The manifold 44 is a fluid conduit in which one ends of the on-off valves 54, 64, 74, 82, 86, 90, 92, and 96 are connected to each other. The pressure gauge 94 is a manifold pressure detection unit that detects the internal pressure P 0 of the manifold 44. In FIG. 1, the manifold 44 is shown as a bent pipe, but a box-shaped container to which one end of the on-off valves 54, 64, 74, 82, 86, 90, 92, 96 is attached may be used. Good.

マニホールド44の管路は、死容積Vdiを測定するためにヘリウムガス源36からヘリウムガスを試料管10,12,14のいずれかに供給するときに、一旦ここに導入される空間として用いられる。また、マニホールド44の管路は、吸着特性を測定するために第1吸着質ガス源38から吸着質である窒素ガスを試料管10,12,14のいずれかに供給するときに、一旦ここに導入される空間として用いられる。すなわち、マニホールド44の管路の容積は、死容積の測定のためのヘリウムガス供給の際の基準容積VSであり、吸着特性測定のための窒素ガス供給の際の基準容積VSである。 The pipe line of the manifold 44 is used as a space once introduced here when helium gas is supplied from the helium gas source 36 to any of the sample tubes 10, 12, 14 in order to measure the dead volume V di. . Further, the pipe line of the manifold 44 is temporarily used when nitrogen gas as an adsorbate is supplied from the first adsorbate gas source 38 to any one of the sample tubes 10, 12, and 14 in order to measure adsorption characteristics. Used as a space to be introduced. That is, the volume of the conduit of the manifold 44 is the reference volume V S during the helium gas supply for the measurement of the dead volume is the reference volume V S during the nitrogen gas supply for the adsorption properties measured.

マニホールド44は、死容積の測定および吸着特性測定の際の基準容積VSを規定するので、マニホールド44を含む配管部46は、温度調整されたバスに収容され、所定の基準温度TSに維持される。温度調整が必要なのはマニホールド44と開閉弁54,64,74,82,86,90,92,96とその間を接続する配管であるので、場合によっては流量調整弁80,84,88を温度調整されるバスの外に出してもよい。 Since the manifold 44 defines a reference volume V S when measuring the dead volume and measuring the adsorption characteristics, the piping unit 46 including the manifold 44 is accommodated in a temperature-adjusted bath and maintained at a predetermined reference temperature T S. Is done. The temperature adjustment is necessary for the manifold 44 and the on-off valves 54, 64, 74, 82, 86, 90, 92, 96 and the pipes connecting between them. In some cases, the temperature adjustment valves 80, 84, 88 are temperature adjusted. You may leave the bus.

飽和蒸気圧管48は、一方端に端部開口を有する細長い管で、他方端が底部を有する容器である。飽和蒸気圧管48の端部開口とマニホールド44との間には飽和蒸気圧管用の開閉弁96が設けられており、さらに飽和蒸気圧管48の端部開口と飽和蒸気圧管用の開閉弁96との間には飽和蒸気圧管用の圧力計98が設けられている。   The saturated vapor pressure tube 48 is an elongated tube having an end opening at one end, and a container having a bottom at the other end. An opening / closing valve 96 for the saturated steam pressure pipe is provided between the end opening of the saturated steam pressure pipe 48 and the manifold 44, and an end opening of the saturated steam pressure pipe 48 and the opening / closing valve 96 for the saturation steam pressure pipe are provided. A pressure gauge 98 for a saturated vapor pressure pipe is provided between them.

飽和蒸気圧管48は、過剰の吸着質が収容され飽和蒸気圧管48を冷媒32に浸漬したときの吸着質の飽和蒸気圧を実測するために用いられる。ここでは吸着質は窒素である。図1では、飽和蒸気圧管48は試料管10より離れたところに配置されるが、実際は3本の試料管10、12,14に囲まれた中央部に置かれることが好適である。飽和蒸気圧管48の端部開口は配管部46を介して試料管10,12,14と、後述する第1,2吸着質ガス源38,40、排気ポンプ42と接続される。飽和蒸気圧管48は、内径2mmでその材質はステンレスとすることができる。   The saturated vapor pressure tube 48 is used to actually measure the saturated vapor pressure of the adsorbate when excess adsorbate is accommodated and the saturated vapor pressure tube 48 is immersed in the refrigerant 32. Here, the adsorbate is nitrogen. In FIG. 1, the saturated vapor pressure tube 48 is disposed away from the sample tube 10, but actually, it is preferable that the saturated vapor pressure tube 48 be disposed at the center surrounded by the three sample tubes 10, 12, and 14. The end opening of the saturated vapor pressure pipe 48 is connected to the sample pipes 10, 12, 14, first and second adsorbate gas sources 38, 40, and an exhaust pump 42, which will be described later, via a pipe part 46. The saturated vapor pressure pipe 48 has an inner diameter of 2 mm and can be made of stainless steel.

測定制御部100は、配管部46の開閉弁54,64,74,82,86,90,92,96の開閉を制御し、圧力計56,66,76,94,98の検出値を用いて、吸着特性測定を行う機能を有する制御装置である。かかる測定制御部100は、適当なコンピュータで構成することができる。   The measurement control unit 100 controls the opening / closing of the on-off valves 54, 64, 74, 82, 86, 90, 92, 96 of the piping unit 46, and uses the detected values of the pressure gauges 56, 66, 76, 94, 98. A control device having a function of measuring adsorption characteristics. The measurement control unit 100 can be configured by an appropriate computer.

測定制御部100は、死容積算出手順102と、吸着質をマニホールド44の基準容積VSに導入する導入処理手順104と、基準容積VSに導入された吸着質を試料管10,12,14に移す供給処理手順106と、試料20,22,24について吸着量を算出する吸着量算出手順108を実行する機能を有する。 The measurement control unit 100 includes a dead volume calculation procedure 102, an introduction processing procedure 104 for introducing the adsorbate into the reference volume V S of the manifold 44, and the adsorbate introduced into the reference volume V S as the sample tubes 10, 12, 14. And the adsorption amount calculation procedure 108 for calculating the adsorption amount for the samples 20, 22, and 24.

ここでは、1つのマニホールド44を用いて、試料管10について導入処理手順104と供給処理手順106を一組として実行し、引き続いて試料管12について導入処理手順104と供給処理手順106を一組として実行し、引き続き試料管14について導入処理手順104と供給処理手順106を一組として実行する。導入処理手順104と供給処理手順106の実行は、第1吸着質ガス源38からマニホールド44への吸着質の供給、マニホールド44から試料管10,12,14への吸着質の供給であるので、短時間で終了する。試料管10,12,14へ供給された吸着質の量は、マニホールド44に設けられた1つの圧力計94が検出する圧力に基づいて行われるが、これらの圧力検出は、短時間のうちに順次行うことができる。   Here, using one manifold 44, the introduction process procedure 104 and the supply process procedure 106 are executed as a set for the sample tube 10, and subsequently, the introduction process procedure 104 and the supply process procedure 106 are set as a set for the sample tube 12. The introduction process procedure 104 and the supply process procedure 106 are subsequently executed as a set for the sample tube 14. Since the introduction processing procedure 104 and the supply processing procedure 106 are the supply of the adsorbate from the first adsorbate gas source 38 to the manifold 44 and the supply of the adsorbate from the manifold 44 to the sample tubes 10, 12, 14. Finish in a short time. The amount of adsorbate supplied to the sample tubes 10, 12, and 14 is performed based on the pressure detected by one pressure gauge 94 provided in the manifold 44, and these pressure detections are performed within a short time. Can be done sequentially.

これに対し、吸着量算出手順108の実行は、試料20,22,24に吸着質が十分吸着して平衡状態となるまでの時間を要するので、終了には長時間を要する。そこで、吸着量算出手順108は、試料管10用の圧力計56、試料管12用の圧力計66、試料管14用の圧力計76を用いてそれぞれ並行して実行される。このようにして、1台の吸着特性測定装置30を用いて、1つの試料についての吸着特性測定をしながら、次の試料についての吸着特性測定を並行して行うことができる。   On the other hand, the execution of the adsorption amount calculation procedure 108 requires a long time to complete since the adsorbate is sufficiently adsorbed on the samples 20, 22, and 24 to reach an equilibrium state. Accordingly, the adsorption amount calculation procedure 108 is executed in parallel using the pressure gauge 56 for the sample tube 10, the pressure gauge 66 for the sample tube 12, and the pressure gauge 76 for the sample tube 14. In this way, the adsorption characteristic measurement for the next sample can be performed in parallel while the adsorption characteristic measurement for one sample is performed using one adsorption characteristic measurement device 30.

かかる機能は、ソフトウェアを実行することで実現できる。具体的には、多試料吸着特性測定プログラムを実行することで実現できる。これらの機能の一部をハードウェアで実行するものとしてもよい。   Such a function can be realized by executing software. Specifically, it can be realized by executing a multi-sample adsorption characteristic measurement program. Some of these functions may be executed by hardware.

上記構成の作用、特に、測定制御部100の各機能について、図2、図3を用いて詳細に説明する。図2は、吸着量測定のための動作手順を示すフローチャートである。図3は、吸着量測定のための各開閉弁の開閉タイミングと各圧力計の検出値の変化を示すタイムチャートである。   The operation of the above configuration, in particular, each function of the measurement control unit 100 will be described in detail with reference to FIGS. FIG. 2 is a flowchart showing an operation procedure for measuring the adsorption amount. FIG. 3 is a time chart showing the opening / closing timing of each on-off valve for the adsorption amount measurement and the change in the detected value of each pressure gauge.

図2、図3は、試料管10,12,14についての死容積Vdiが算出された後の処理についてのものであるので、これらの説明の前に、死容積Vdiの算出について説明する。 2 and 3, so is for processing after the dead volume V di for the sample tube 10, 12 is calculated, prior to these descriptions, describing calculation of dead volume V di .

まず、死容積Vdiの算出のために、基準容積VSにヘリウムガスを導入してその圧力をPSとし温度をTSとし、基準容積VSに導入されたヘリウムガスを温度Tdの試料管10に導入したときの圧力Pdiを求める。そしてこれらの値から、関係式PSS=Pdi(VS+Vdi)を用いて、死容積Vdiを求めることができる。死容積Vdiの算出処理は、試料管10,12,14のいずれについても同じであるので、以下では、試料管10に代表させて説明する。 First, in order to calculate the dead volume V di , helium gas is introduced into the reference volume V S , the pressure is P S , the temperature is T S, and the helium gas introduced into the reference volume V S is the temperature T d . The pressure P di when introduced into the sample tube 10 is obtained. From these values, the dead volume V di can be obtained by using the relational expression P S V S = P di (V S + V di ). Since the dead volume V di calculation process is the same for any of the sample tubes 10, 12, and 14, the sample tube 10 will be described below as a representative example.

試料管10についての死容積Vd1は、開閉弁54から試料管10の容積を言う。一般的には試料管10の一部は冷媒32により低温にし、吸着質が試料20に吸着する温度に保つ。しかし、低温部分と室温部分は明確に切り分けることが出来ず、温度勾配がある。ここで言う死容積とは、マニホールド44の吸着質が試料管10に導入された時の圧力減少から計算される体積であり、吸着質が吸着しなければ圧力減少は同じとなる。すなわち、ここで言う死容積とは、もし試料管10がマニホールド44と同じ温度であったとした時の見かけの体積となる。この死容積は吸着量計算時、試料管10の温度環境を一定にすることにより、測定時の見かけの体積は同じであるとする事が出来る。 The dead volume V d1 for the sample tube 10 refers to the volume of the sample tube 10 from the on-off valve 54. In general, a part of the sample tube 10 is cooled to a low temperature by the refrigerant 32 and kept at a temperature at which the adsorbate is adsorbed to the sample 20. However, the low temperature part and the room temperature part cannot be clearly separated and there is a temperature gradient. The dead volume referred to here is a volume calculated from a pressure decrease when the adsorbate of the manifold 44 is introduced into the sample tube 10, and the pressure decrease is the same if the adsorbate is not adsorbed. That is, the dead volume referred to here is an apparent volume when the sample tube 10 is at the same temperature as the manifold 44. This dead volume can be assumed to have the same apparent volume at the time of measurement by making the temperature environment of the sample tube 10 constant when calculating the adsorption amount.

図1において、初期状態は、試料20を内部に収容する試料管10の端部開口が取付部50に接続され、開閉弁54,64,74,82,86,90,92,96はすべて閉状態となっている。そして、冷媒容器34に冷媒32が満たされ、試料管10の温度はTd、マニホールド44の温度はTSとなっている。この状態で、開閉弁54と開閉弁92が開状態とされ、排気ポンプ42が作動される。これによって、マニホールド44と、試料管10の内部は十分な減圧され真空に近い状態となる。その後、開閉弁54と開閉弁92が閉状態とされ、排気ポンプ42の作動が停止される。 In FIG. 1, in the initial state, the end opening of the sample tube 10 that accommodates the sample 20 is connected to the mounting portion 50, and the on-off valves 54, 64, 74, 82, 86, 90, 92, and 96 are all closed. It is in a state. The refrigerant container 34 is filled with the refrigerant 32, the temperature of the sample tube 10 is T d , and the temperature of the manifold 44 is T S. In this state, the on-off valve 54 and the on-off valve 92 are opened, and the exhaust pump 42 is operated. As a result, the manifold 44 and the inside of the sample tube 10 are sufficiently depressurized and become nearly vacuum. Thereafter, the on-off valve 54 and the on-off valve 92 are closed, and the operation of the exhaust pump 42 is stopped.

次に、開閉弁82が開状態とされ、ヘリウムガス源36からヘリウムガスがマニホールド44に導入される。適当な時期に開閉弁82が閉状態とされ、そのときのマニホールド44の圧力が圧力計94で検出される。検出された圧力をPSとすると、マニホールド44に導入されたヘリウムガスは、温度TS、圧力PSで、その体積が基準容積VSである。 Next, the on-off valve 82 is opened, and helium gas is introduced from the helium gas source 36 into the manifold 44. The on-off valve 82 is closed at an appropriate time, and the pressure in the manifold 44 at that time is detected by the pressure gauge 94. Assuming that the detected pressure is P S , the helium gas introduced into the manifold 44 is at the temperature T S and the pressure P S , and the volume is the reference volume V S.

次に、開閉弁54を開状態とし、圧力計56または圧力計94で試料管10およびマニホールド44の圧力を検出する。検出された圧力をPd1とする。試料管10の温度はTdiであり、ヘリウムガスは窒素吸着温度以下においても試料20に吸着しないので、マニホールド44に導入されたヘリウムガスは、マニホールド44と試料管10にまたがって広がる。そこで、開閉弁54から試料20を内部に収容する試料管10についての死容積Vd1は、PSS=Pd1(VS+Vd1)の関係式を用いて算出される。 Next, the on-off valve 54 is opened, and the pressure in the sample tube 10 and the manifold 44 is detected by the pressure gauge 56 or the pressure gauge 94. Let the detected pressure be P d1 . Since the temperature of the sample tube 10 is T di and the helium gas is not adsorbed to the sample 20 even at a temperature lower than the nitrogen adsorption temperature, the helium gas introduced into the manifold 44 spreads over the manifold 44 and the sample tube 10. Therefore, the dead volume V d1 for the sample tube 10 that accommodates the sample 20 from the opening / closing valve 54 is calculated using the relational expression P S V S = P d1 (V S + V d1 ).

死容積Vd1が算出されると、開閉弁92が開状態とされ、排気ポンプ42が作動される。これによって、マニホールド44と、試料管10の内部からヘリウムガスが外部に排出され、十分に減圧され真空に近い状態となる。その後、開閉弁54と開閉弁92が閉状態とされ、排気ポンプ42の作動が停止される。 When the dead volume V d1 is calculated, the on-off valve 92 is opened and the exhaust pump 42 is operated. As a result, the helium gas is discharged from the inside of the manifold 44 and the sample tube 10, and the pressure is sufficiently reduced to a state close to a vacuum. Thereafter, the on-off valve 54 and the on-off valve 92 are closed, and the operation of the exhaust pump 42 is stopped.

同様にして、試料22を内部に収容する試料管12についての死容積Vd2と、試料24を内部に収容する試料管14についての死容積Vd3が算出される。死容積Vd1、死容積Vd2、死容積Vd3は、必ずしも同じ値ではない。死容積の算出は、測定制御部100の死容積算出手順102によって実行される。死容積算出の精度を向上させるため、数回の死容積算出を行ってその平均値を用いるものとすることができる。 Similarly, the dead volume V d2 for the sample tube 12 that houses the sample 22 and the dead volume V d3 for the sample tube 14 that houses the sample 24 are calculated. The dead volume V d1 , the dead volume V d2 , and the dead volume V d3 are not necessarily the same value. The dead volume is calculated by a dead volume calculation procedure 102 of the measurement control unit 100. In order to improve the accuracy of dead volume calculation, the dead volume is calculated several times and the average value can be used.

死容積Vd1、死容積Vd2、死容積Vd3が算出されると、次に、吸着特性測定のための処理が図2のフローチャート、図3のタイムチャートに従って行われる。 When the dead volume V d1 , dead volume V d2 , and dead volume V d3 are calculated, the process for measuring the adsorption characteristics is performed according to the flowchart of FIG. 2 and the time chart of FIG.

図2は、吸着特性測定のための手順を示すフローチャートで、各手順は、多試料吸着特性測定プログラムの各処理手順に対応する。図3は、図2に対応するタイムチャートで、横軸が時間、縦軸には、上段から下段に向かって、開閉弁86の開閉状態、開閉弁54の開閉状態、開閉弁64の開閉状態、開閉弁74の開閉状態、圧力計94が検出した圧力P0、圧力計56が検出した圧力P1、圧力計66が検出した圧力P2、圧力計76が検出した圧力P3がとられている。 FIG. 2 is a flowchart showing a procedure for measuring adsorption characteristics, and each procedure corresponds to each processing procedure of the multi-sample adsorption property measurement program. FIG. 3 is a time chart corresponding to FIG. The pressure P 0 detected by the pressure gauge 94, the pressure P 1 detected by the pressure gauge 56, the pressure P 2 detected by the pressure gauge 66, and the pressure P 3 detected by the pressure gauge 76 are taken. ing.

図2において、S10,S26,S28は測定対象試料管が複数の場合の繰り返し手順であることを示すものである。S10では、初期状態であることを示すために、繰り返しを計数するカウンタをi=1にセットする。このときの開閉弁54,64,74,82,86,90,92,96の状態はすべて閉状態、圧力計56,66,76,94が検出する圧力は、すべて十分に減圧され真空に近い圧力である。   In FIG. 2, S10, S26, and S28 indicate that the procedure is repeated when there are a plurality of sample tubes to be measured. In S10, a counter for counting repetitions is set to i = 1 to indicate the initial state. At this time, the on-off valves 54, 64, 74, 82, 86, 90, 92, and 96 are all closed, and the pressures detected by the pressure gauges 56, 66, 76, and 94 are all sufficiently reduced and close to vacuum. Pressure.

そして、試料管10について処理を始める。まず、導入処理が行われる(S12)。この処理手順は、測定制御部100の導入処理手順104によって実行される。導入処理は、開閉弁86が閉状態から開状態とされ、目標圧力到達後に再び閉状態に戻すことで行われる。   Then, the processing for the sample tube 10 is started. First, introduction processing is performed (S12). This processing procedure is executed by the introduction processing procedure 104 of the measurement control unit 100. The introduction process is performed by switching the on-off valve 86 from the closed state to the open state and returning it to the closed state again after reaching the target pressure.

図3では、時間t1で開閉弁86が閉状態から開状態とされるので、このときに導入処理が開始されたことになる。開閉弁86が開状態になると、第1吸着質ガス源38から吸着質である窒素ガスがマニホールド44に導入され、マニホールド44の内部圧力が上昇する。図3では、圧力計94が検出する圧力P0が真空に近い圧力からPI1 1に上昇したことが示される。その後、時間t2で開閉弁86が閉状態に戻される。この時間t2が導入期間の終了(S14)である。したがって、時間t1から時間t2の間の(t2−t1)の期間が導入期間である。導入期間において、試料管10に供給するための窒素ガスが、一旦、基準容積VSを有するマニホールド44に導入される。開閉弁86が開状態から閉状態とされた直後は圧力が揺らぐので数秒の待機時間を経て圧力計94によって圧力を検出させることが好ましい。導入期間において検出されたマニホールド44の内部圧力PI1 1は測定制御部100に伝送されて取得される(S16)。 In FIG. 3, since the on-off valve 86 is changed from the closed state to the open state at time t 1 , the introduction process is started at this time. When the on-off valve 86 is opened, nitrogen gas as an adsorbate is introduced into the manifold 44 from the first adsorbate gas source 38, and the internal pressure of the manifold 44 increases. FIG. 3 shows that the pressure P 0 detected by the pressure gauge 94 has increased from a pressure close to vacuum to P I1 1 . Thereafter, the opening and closing valve 86 is returned to the closed state at time t 2. The time t 2 is the end of the introduction period (S14). Therefore, the period (t 2 −t 1 ) between time t 1 and time t 2 is the introduction period. In the introduction period, nitrogen gas to be supplied to the sample tube 10 is once introduced into the manifold 44 having the reference volume V S. Since the pressure fluctuates immediately after the on-off valve 86 is changed from the open state to the closed state, it is preferable to detect the pressure by the pressure gauge 94 after a waiting time of several seconds. The internal pressure P I1 1 of the manifold 44 detected during the introduction period is transmitted to the measurement control unit 100 and acquired (S16).

時間t2の後、適当な待ち時間をおいて、供給処理が行われる(S18)。この処理手順は、測定制御部100の供給処理手順106によって実行される。供給処理は、マニホールド44に導入された窒素ガスを試料管10に移す処理で、開閉弁54が閉状態から開状態とされ、任意に定めた開弁時間の経過後に再び閉状態に戻すことで行われる。 After time t 2, at an appropriate waiting time, the supply process is executed (S18). This processing procedure is executed by the supply processing procedure 106 of the measurement control unit 100. The supply process is a process in which the nitrogen gas introduced into the manifold 44 is transferred to the sample tube 10, and the on-off valve 54 is changed from the closed state to the open state, and is returned to the closed state again after an arbitrarily determined valve opening time. Done.

図3では、時間t2から適当な時間が経過した時間t3において、開閉弁54が閉状態から開く状態とされるので、このときに供給処理が開始されたことになる。開閉弁54が開状態になると、マニホールド44の内部に密閉状態とされている窒素ガスがマニホールド44から試料管10に移され、マニホールド44の内部圧力が低下する。それと共に試料管12の内部圧力が上昇する。図3では、圧力計94が検出する圧力P0がPI1 1から低下し、圧力計56が検出する圧力P1が真空に近い圧力から上昇する様子が示される。その後、時間t4で開閉弁54が閉状態に戻される。この時間t4が開弁期間の終了(S20)である。したがって、時間t3から時間t4の間の(t4−t3)の期間が開弁期間である。 In FIG. 3, since the on-off valve 54 is opened from the closed state at a time t 3 when an appropriate time has elapsed from the time t 2 , the supply process is started at this time. When the on-off valve 54 is opened, the nitrogen gas sealed inside the manifold 44 is transferred from the manifold 44 to the sample tube 10, and the internal pressure of the manifold 44 decreases. At the same time, the internal pressure of the sample tube 12 increases. FIG. 3 shows a state in which the pressure P 0 detected by the pressure gauge 94 decreases from P I1 1 and the pressure P 1 detected by the pressure gauge 56 increases from a pressure close to vacuum. Thereafter, the on-off valve 54 is returned to the closed state at time t 4 . This time t 4 is the end of the opening period (S20). Therefore, the period of (t 4 −t 3 ) between time t 3 and time t 4 is the valve opening period.

開弁期間において、マニホールド44に導入された窒素ガスが試料管10に移されるが、マニホールド44の内部圧力が元の真空に近い圧力までは下がらないので、マニホールド44に導入された窒素ガスの全部が試料管10に移ったわけではない。マニホールド44に残った窒素ガスの量を示すものとして、開弁期間の終了時点のマニホールド44の内部圧力PI 1*が圧力計94によって検出され、測定制御部100に伝送されて取得される(S21)。 During the valve opening period, the nitrogen gas introduced into the manifold 44 is transferred to the sample tube 10, but since the internal pressure of the manifold 44 does not drop to a pressure close to the original vacuum, all of the nitrogen gas introduced into the manifold 44 is removed. Is not transferred to the sample tube 10. As an indication of the amount of nitrogen gas remaining in the manifold 44, the internal pressure P I 1 * of the manifold 44 at the end of the valve opening period is detected by the pressure gauge 94 and transmitted to the measurement control unit 100 for acquisition ( S21).

開弁期間が終了すると、開閉弁54が閉状態となるので、試料管10の内部は密閉状態となり、試料20に対し窒素ガスの吸着が始まる。窒素ガスの吸着と共に試料管10の内部圧力は低下を始めるが、吸着は時間をかけてゆっくりと進むので、その圧力変化は緩やかである。試料20に窒素ガスの吸着が十分に行われて試料管10の内部圧力が平衡状態になるには長時間を有し、平衡状態になったか否かは、継続的な圧力変化の監視が必要である。そこで、開弁期間が終了すると、圧力計56が検出する圧力P1の監視が開始する(S22)。検出された圧力P1は測定制御部100に伝送されて取得され、適当な記憶装置に逐時的に記憶される。圧力P1の取得間隔は、試料20の特性に応じてソフトウェアによって変更が可能である。試料20が吸着速度の大きい物質であるときは取得間隔を短くし、吸着速度が小さい物質であるときは取得間隔を長くする。 When the valve opening period ends, the on-off valve 54 is closed, so that the inside of the sample tube 10 is sealed, and adsorption of nitrogen gas to the sample 20 starts. Although the internal pressure of the sample tube 10 starts to decrease with the adsorption of the nitrogen gas, the adsorption proceeds slowly over time, so the pressure change is gentle. It takes a long time for nitrogen gas to be sufficiently adsorbed to the sample 20 and the internal pressure of the sample tube 10 to be in an equilibrium state, and whether the equilibrium state has been reached requires continuous monitoring of pressure changes. . Therefore, when the valve opening period ends, monitoring of the pressure P 1 detected by the pressure gauge 56 starts (S22). The detected pressure P 1 is transmitted to and acquired by the measurement control unit 100 and is stored in an appropriate storage device every time. The acquisition interval of the pressure P 1 can be changed by software according to the characteristics of the sample 20. When the sample 20 is a substance with a high adsorption rate, the acquisition interval is shortened, and when the sample 20 is a substance with a low adsorption rate, the acquisition interval is lengthened.

また、吸着目的平衡圧Ptより圧力計56の検出した圧力P1が著しく低いか否かが判断される(S24)。著しく低い場合には、吸着平衡を待たずに再度導入処理(S12)からPI取得(S16)までの処理を繰り返し、併せて供給処理(S18)からPi監視(S22)までを繰り返して行い、測定平衡圧を吸着目的平衡圧Ptに近づけることが出来る。 Further, it is determined whether or not the pressure P 1 detected by the pressure gauge 56 is significantly lower than the adsorption target equilibrium pressure P t (S24). If significantly low, repeat the process again from the introduction process (S12) without waiting for the adsorption equilibrium to P I acquired (S16), it performed Repeat together supply process (S18) to Pi monitoring (S22), measuring the equilibrium pressure can be brought close to the adsorption purpose equilibrium pressure P t.

図3においては、導入処理をPI1 1*からPI1 2*、PI1 3*と繰り返して行い、併せて開閉弁54の開閉を繰り返して試料管10の内部圧力P1を監視することが示されている。この操作により測定点を希望するあるいは均等に取得することが可能となりかつ測定時間を短縮することが可能である。また同様に、吸着目的量Vtより試料20についての吸着量Viの吸着量変化が大きいか否かの判断がなされ(S23)、大きいと判断がなされた場合には前述の処理(S24)をスキップし、均等な吸着量測定間隔を保つことが可能である。なお、図3では、試料管10の試料20に対して吸着質導入処理を3回繰り返すことで吸着目的平衡圧Ptに到達し、試料管12の試料22と試料管14の試料24とに対しては吸着質導入処理を1回行うことで吸着目的平衡圧Ptに到達することが示される。 In FIG. 3, the introduction process is repeated from P I1 1 * to P I1 2 * and P I1 3 *, and the on-off valve 54 is repeatedly opened and closed to monitor the internal pressure P 1 of the sample tube 10. It is shown. This operation makes it possible to obtain the measurement points as desired or evenly, and to shorten the measurement time. Similarly, it is determined whether the adsorption amount change of the adsorption amount V i for the sample 20 is greater than the adsorption target amount V t (S23). If it is determined that the adsorption amount V i is large, the above-described processing (S24) is performed. Can be skipped, and an even adsorption amount measurement interval can be maintained. In FIG. 3, the adsorption target introduction pressure P t is reached by repeating the adsorbate introduction process three times for the sample 20 of the sample tube 10, and the sample 22 of the sample tube 12 and the sample 24 of the sample tube 14 are reached. It is shown to reach the adsorption purposes equilibrium pressure P t by performing once adsorbate introduction treatment against.

1の監視は、密閉状態の試料管10に設けられる圧力計56が検出する圧力P1について行われるので、これとは無関係に配管部46における開閉弁54以外の開閉弁の開閉を実行することができる。 Monitoring of P 1, since the pressure gauge 56 provided in the sample tube 10 in the closed state is performed for the pressure P 1 to be detected to perform the opening and closing of the valve other than the on-off valve 54 in the independent pipe 46 from this be able to.

そこで、測定対象試料管が複数の場合には、繰り返しを計数するカウンタの計数値iを1つ繰り上げてi=i+1にセットする(S26)。S10でi=1であったので、i=i+1=2となる。次に、新しいiが繰り返し数の限度であるNを超えるか否かが判断される(S28)。ここでは、3つの試料管10,12,14について吸着特性を測定するので、N=3である。i=2であるので、S28の判断は否定され、S12に戻る。   Therefore, when there are a plurality of sample tubes to be measured, the count value i of the counter for counting repetition is incremented by 1 and set to i = i + 1 (S26). Since i = 1 in S10, i = i + 1 = 2. Next, it is determined whether or not the new i exceeds N, which is the limit of the number of repetitions (S28). Here, since the adsorption characteristics are measured for the three sample tubes 10, 12, and 14, N = 3. Since i = 2, the determination in S28 is negative and the process returns to S12.

i=i+1=2となってS12に戻ると、今度は試料管12について上記で述べた処理を繰り返す。図3で説明すると、時間t12で試料管10について導入処理と供給処理が終了したので、時間t12から適当な時間が経過した時間t13から試料管12についての導入処理が開始される。 When i = i + 1 = 2 and the process returns to S12, the process described above is repeated for the sample tube 12 this time. With reference to FIG 3, since the introduction process and supply process is completed for the sample tube 10 at time t 12, the introduction process for the sample tube 12 from the time t 13 elapses appropriate time from the time t 12 is started.

すなわち、時間t13で開閉弁86が閉状態から開状態とされ、第1吸着質ガス源38からマニホールド44に窒素ガスが導入される。これが試料管12についての導入処理の開始である(S12)。時間t14で導入期間が終了(S14)し、時間t14で開閉弁86が閉状態に戻され、圧力計94が検出する圧力PI2 1が取得されて測定制御部100に伝送される(S16)。試料管12のための導入期間(t14−t13)は、試料管10について行われた導入期間(t2−t1)と同じとしてもよく、異なっても構わない。試料管12のときの圧力計94が検出する圧力PI2は、試料管10のときの圧力計94が検出する圧力PI1と必ずしも同じではない。 That is, at time t 13 , the on-off valve 86 is changed from the closed state to the open state, and nitrogen gas is introduced from the first adsorbate gas source 38 into the manifold 44. This is the start of the introduction process for the sample tube 12 (S12). At time t 14 , the introduction period ends (S 14), and at time t 14 , the on-off valve 86 is returned to the closed state, and the pressure P I2 1 detected by the pressure gauge 94 is acquired and transmitted to the measurement control unit 100 ( S16). The introduction period (t 14 -t 13 ) for the sample tube 12 may be the same as or different from the introduction period (t 2 -t 1 ) performed for the sample tube 10. The pressure P I2 detected by the pressure gauge 94 for the sample tube 12 is not necessarily the same as the pressure P I1 detected by the pressure gauge 94 for the sample tube 10.

時間t14から適当な時間が経過した時間t15で開閉弁64が閉状態から開状態とされ、マニホールド44から窒素ガスが試料管12に移される。これが試料管12についての供給処理の開始である(S18)。時間t16で開弁期間が終了(S20)し、開閉弁64が閉状態に戻され、圧力計94が検出する圧力PI2 1*が取得されて測定制御部100に伝送される(S22)。試料管12のための開弁期間(t16−t15)は、試料管10について行われた開弁期間(t4−t3)と同じとしてもよく、異なっても構わない。試料管12のときの圧力計94が検出する圧力PI2 1*は、試料管10のときの圧力計94が検出する圧力PI1 1*と必ずしも同じ値ではない。そして、試料管12の圧力計66が検出する圧力P2の監視が開始する(S24)。 Off valve 64 at the time t 15 elapses appropriate time from the time t 14 is from the closed state to the open state, the nitrogen gas from the manifold 44 is transferred to the sample tube 12. This is the start of the supply process for the sample tube 12 (S18). At time t 16 , the valve opening period ends (S 20), the on-off valve 64 is returned to the closed state, and the pressure P I2 1 * detected by the pressure gauge 94 is acquired and transmitted to the measurement control unit 100 (S 22). . The valve opening period (t 16 -t 15 ) for the sample tube 12 may be the same as or different from the valve opening period (t 4 -t 3 ) performed for the sample tube 10. The pressure P I2 1 * detected by the pressure gauge 94 for the sample tube 12 is not necessarily the same value as the pressure P I1 1 * detected by the pressure gauge 94 for the sample tube 10. Then, monitoring of the pressure P 2 detected by the pressure gauge 66 of the sample tube 12 is started (S24).

そこで、繰り返しを計数するカウンタの計数値iを1つ繰り上げてi=i+1=3にセットし(S26)、新しいi=3が繰り返し数の限度であるN=3を超えるか否かが判断される(S28)。S28の判断は否定されるので、再びS12に戻る。   Therefore, the count value i of the counter for counting repetitions is incremented by 1 and set to i = i + 1 = 3 (S26), and it is determined whether or not the new i = 3 exceeds N = 3 which is the limit of the number of repetitions. (S28). Since the determination in S28 is negative, the process returns to S12 again.

i=i+1=3となってS12に戻ると、今度は試料管14について上記で述べた処理を繰り返す。図3で説明すると、時間t16で試料管12について導入処理と供給処理が終了したので、時間t16から適当な時間が経過した時間t17から試料管14についての導入処理が開始される。 When i = i + 1 = 3 and the process returns to S12, the process described above is repeated for the sample tube 14 this time. With reference to FIG. 3, the supply process and implementation process for the sample tube 12 is terminated at time t 16, the introduction process for the sample tube 14 from the time t 17 has passed the appropriate time from the time t 16 is started.

すなわち、時間t17で開閉弁86が閉状態から開状態とされ、第1吸着質ガス源38からマニホールド44に窒素ガスが導入される。これが試料管14についての導入処理の開始である(S12)。時間t18で導入期間が終了(S14)し、開閉弁86が閉状態に戻され、圧力計94が検出する圧力PI3 1*が取得されて測定制御部100に伝送される(S16)。試料管14のための導入期間(t18−t17)は、試料管10について行われた導入期間(t2−t1)、試料管12について行われた導入期間(t14−t13)と同じとしてもよく、異なっても構わない。試料管14のときの圧力計94が検出する圧力PI3は、試料管10,12のときの圧力計94が検出する圧力PI1,PI2と必ずしも同じ値ではない。 That is, at time t 17 , the on-off valve 86 is changed from the closed state to the open state, and nitrogen gas is introduced from the first adsorbate gas source 38 into the manifold 44. This is the start of the introduction process for the sample tube 14 (S12). Introduction period ends at time t 18 and (S14), on-off valve 86 is returned to the closed state, the pressure gauge 94 is transmitted to the pressure P I3 1 * measurement control section 100 is acquired to detect (S16). The introduction period (t 18 -t 17 ) for the sample tube 14 is the introduction period (t 2 -t 1 ) performed for the sample tube 10 and the introduction period (t 14 -t 13 ) performed for the sample tube 12. It may be the same as or different from. The pressure P I3 detected by the pressure gauge 94 in the case of the sample tube 14 is not necessarily the same value as the pressures P I1 and P I2 detected by the pressure gauge 94 in the case of the sample tubes 10 and 12.

時間t18から適当な時間が経過した時間t19で開閉弁74が閉状態から開状態とされ、マニホールド44から窒素ガスが試料管14に移される。これが試料管14についての供給処理の開始である(S18)。時間t20で開弁期間が終了(S20)し、開閉弁74が閉状態に戻され、圧力計94が検出する圧力PI3 1*が取得されて測定制御部100に伝送される(S22)。試料管14のための開弁期間(t20−t19)は、試料管10について行われた開弁期間(t4−t3)、試料管12について行われた開弁期間(t16−t15)と同じとしてもよく、異なっても構わない。試料管14のときの圧力計94が検出する圧力PI3 1*は、試料管10,12のときの圧力計94が検出する圧力PI1 1*,PI2 1*と必ずしも同じ値ではない。そして、試料管14の圧力計76が検出する圧力P3の監視が開始する(S24)。 Off valve 74 at time t 19 the appropriate time has elapsed from the time t 18 is from the closed state to the open state, the nitrogen gas from the manifold 44 is transferred to the sample tube 14. This is the start of the supply process for the sample tube 14 (S18). Valve opening period ends at time t 20 and (S20), on-off valve 74 is returned to the closed state, the pressure gauge 94 is transmitted to the pressure P I3 1 * measurement control section 100 is acquired to detect (S22) . The valve opening period (t 20 -t 19 ) for the sample tube 14 is the valve opening period (t 4 -t 3 ) performed for the sample tube 10 and the valve opening period (t 16 − for the sample tube 12). It may be the same as t 15 ) or may be different. The pressure P I3 1 * detected by the pressure gauge 94 for the sample tube 14 is not necessarily the same value as the pressures P I1 1 * and P I2 1 * detected by the pressure gauge 94 for the sample tubes 10 and 12. Then, monitoring of the pressure P 3 detected by the pressure gauge 76 of the sample tube 14 is started (S24).

そこで、繰り返しを計数するカウンタの計数値iを1つ繰り上げてi=i+1=4にセットし(S26)、新しいi=4が繰り返し数の限度であるN=3を超えるか否かが判断される(S28)。S28の判断は肯定されるので、S12には戻らず、マニホールド44に対する吸着質導入処理は終了する。   Therefore, the count value i of the counter for counting repetitions is incremented by 1 and set to i = i + 1 = 4 (S26), and it is determined whether or not the new i = 4 exceeds N = 3 which is the limit of the number of repetitions. (S28). Since the determination in S28 is affirmative, the process does not return to S12, and the adsorbate introduction process for the manifold 44 ends.

時間t20からは試料管10,12,14の圧力計56,66,76の変化を監視し、圧力変化が一定の基準値以下、すなわち吸着平衡に達した時(S29)、平衡圧力P1 *,P2 *,P3 *が取得され(S30)、吸着量が計算される(S36)。 Monitoring the change in the pressure gauge 56,66,76 of the sample tube 10, 12, 14 from the time t 20, when the pressure change is below a certain reference value, ie an adsorption equilibrium was reached (S29), the equilibrium pressure P 1 * , P 2 * , P 3 * are acquired (S30), and the amount of adsorption is calculated (S36).

このように、1つのマニホールド44を用いて、導入期間と開弁期間の合計期間を繰り返し単位として、複数の試料管のそれぞれに順次吸着質を供給することが行われる。   In this way, using one manifold 44, the adsorbate is sequentially supplied to each of the plurality of sample tubes with the total period of the introduction period and the valve opening period as a repeating unit.

2点目以降は、吸着平衡状態になったものから逐次窒素ガス導入処理に入っていくことが好ましい。これは測定が必ずしも試料管10,12,14の順に測定しなくてもよく、平衡終了した試料から逐次、次の測定点に移行し全体測定時間を短縮することが可能である。   From the second point onward, it is preferable to sequentially enter the nitrogen gas introduction process from the one in the adsorption equilibrium state. In this case, the measurement does not necessarily have to be performed in the order of the sample tubes 10, 12, and 14, and the entire measurement time can be shortened by sequentially shifting to the next measurement point from the sample that has been equilibrated.

この間に、各試料管10,12,14については、それぞれの圧力計56,66,76が検出する圧力P1,P2,P3の逐時的監視が継続される。そして、試料20,22,24に対する窒素ガスの吸着が十分に行われたか否かについて、圧力P1,P2,P3の低下が平衡状態に達したか否かに基づいて判断される。 During this time, the sample tubes 10, 12, and 14 are continuously monitored for the pressures P 1 , P 2 , and P 3 detected by the pressure gauges 56, 66, and 76, respectively. Then, whether the adsorption of nitrogen gas to the sample 20, 22 and 24 were sufficiently, the pressure drop P 1, P 2, P 3 is determined based on whether equilibrium is reached.

圧力P1,P2,P3の逐時的監視は、圧力計56,66,76が検出する圧力P1,P2,P3を予め定めた取得間隔で取得することで行われる。圧力P1,P2,P3の取得は、同じタイミングで3つの圧力P1,P2,P3を同時に取得することができる。例えば、取得間隔を10分として、10分経過毎に、圧力P1,P2,P3を同時に取得する。試料20,22,24の吸着特性がかなり異なるときには、P1,P2,P3の取得間隔を相互に異なるものとできる。例えば、吸着速度が大きい試料に対して圧力の取得間隔を短くし、吸着速度が小さい試料に対しては圧力の取得間隔を長くする。 逐時monitoring of pressure P 1, P 2, P 3 is performed by acquiring at a predetermined acquisition interval the pressure P 1, P 2, P 3 to the pressure gauge 56,66,76 is detected. Acquisition of the pressure P 1, P 2, P 3, the three at the same time the pressure P 1, the P 2, P 3 can be simultaneously acquired. For example, assuming that the acquisition interval is 10 minutes, the pressures P 1 , P 2 , and P 3 are simultaneously acquired every 10 minutes. When the adsorption characteristics of the samples 20, 22 and 24 are significantly different, the acquisition intervals of P 1 , P 2 and P 3 can be made different from each other. For example, the pressure acquisition interval is shortened for a sample with a high adsorption rate, and the pressure acquisition interval is increased for a sample with a low adsorption rate.

圧力P1,P2,P3の低下が平衡状態に達したか否か(S29)は、圧力の取得間隔における圧力値の変化が所定範囲以下となったか否かで判断することができる。例えば、圧力の取得間隔を判断間隔として、取得間隔が10分の場合、その10分間における圧力の変化率が1%以下となったときを平衡状態とすることができる。平衡状態に達したか否かに用いられる判断間隔および圧力の変化率は一例であって、試料20,22,24の特性に応じ、適宜変更することがよい。 Whether or not the decrease in the pressures P 1 , P 2 , and P 3 has reached an equilibrium state (S 29) can be determined based on whether or not the change in the pressure value during the pressure acquisition interval has become a predetermined range or less. For example, when the pressure acquisition interval is 10 minutes and the pressure acquisition interval is 10 minutes, the equilibrium state can be obtained when the pressure change rate in the 10 minutes is 1% or less. The determination interval and the rate of change in pressure used to determine whether or not the equilibrium state has been reached are examples, and may be appropriately changed according to the characteristics of the samples 20, 22, and 24.

図3では、試料管10の試料20については、時間t21において、圧力計56が検出する圧力P1の低下が平衡状態となってP1 *となったことが示される。同様に、試料管12の試料22については、時間t22において、圧力計66が検出する圧力P2の低下が平衡状態となってP2 *となったことが示される。試料管14の試料24については、時間t23において、圧力計76が検出する圧力P3の低下が平衡状態となってP3 *となったことが示される。なお、図3では、時間t21、時間t22、時間t23がこの順序となって、試料20の吸着特性測定が一番先に終了し、次に試料22の吸着特性測定が終了し、最後に試料24の吸着特性測定が終了することになっているが、試料20,22,24の特性によっては、この順序は前後することになる。 FIG. 3 shows that for the sample 20 of the sample tube 10, the drop in the pressure P 1 detected by the pressure gauge 56 becomes an equilibrium state and becomes P 1 * at time t 21 . Similarly, with respect to the sample 22 of the sample tube 12, it is indicated that the drop in the pressure P 2 detected by the pressure gauge 66 becomes an equilibrium state and becomes P 2 * at time t 22 . For the sample 24 of the sample tube 14, it is shown that the drop in the pressure P 3 detected by the pressure gauge 76 becomes an equilibrium state and becomes P 3 * at time t 23 . In FIG. 3, time t 21 , time t 22 , and time t 23 are in this order, and the adsorption characteristic measurement of the sample 20 ends first, and then the adsorption characteristic measurement of the sample 22 ends. Finally, the measurement of the adsorption characteristics of the sample 24 is to be completed, but this order may be changed depending on the characteristics of the samples 20, 22, and 24.

図2に戻り、平衡状態となった圧力P1 *,P2 *,P3 *は測定制御部100に伝送されて取得される(S30)。ここで、S16で取得されたPI1,PI2,PI3、S21で取得されたPI1 *,PI2 *,PI3 *、S30で取得されたP1 *,P2 *,P3 *に基づいて、試料20,22,24の吸着量が算出される。なお、PIi n,PIi n*におけるnの値は導入及び供給処理の繰り返し回数を示すものであって、ここでは、PI1 1,PI1 2,PI1 3をPI1として示した。また、PI2 1をPI2、PI3 1をPI3とした。 Returning to FIG. 2, the pressures P 1 * , P 2 * , and P 3 * in the equilibrium state are transmitted to the measurement control unit 100 and acquired (S30). Here, P I1 acquired in S16, P I2, P I3, S21 P obtained by I1 *, P I2 *, P I3 *, P 1 acquired in S30 *, P 2 *, P 3 * Based on the above, the adsorption amounts of the samples 20, 22, and 24 are calculated. The value of P Ii n, n in P Ii n *, there is shown a number of repetitions of introduction and supply process, wherein showed P I1 1, P I1 2, P I1 3 as P I1. Also, P I2 1 is P I2 and P I3 1 is P I3 .

試料20,22,24の吸着量の算出手順はいずれも同じであるので、試料20に代表させて説明する。マニホールド44の温度をTSとし容積をVSとして、試料20が収容されている試料管10の温度をTdとし死容積をVd1として、気体定数Rを用いて、試料管10の内部に導入された吸着質の導入量Δn1を、Δn1=(VS/RTS)×(PI1−PI1 *)として算出する(S32)。次に、試料管10の死容積Vd1に残った吸着質残量Δnd1をΔnd1=(Vd1/RTd)×P1 *として算出する(S34)。 Since the calculation procedures for the adsorption amounts of the samples 20, 22, and 24 are the same, the sample 20 will be described as a representative. The temperature of the manifold 44 is T S , the volume is V S , the temperature of the sample tube 10 in which the sample 20 is accommodated is T d, and the dead volume is V d1. The introduction amount Δn 1 of the introduced adsorbate is calculated as Δn 1 = (V S / RT S ) × (P I1 −P I1 * ) (S32). Next, the remaining amount of adsorbate Δn d1 remaining in the dead volume V d1 of the sample tube 10 is calculated as Δn d1 = (V d1 / RT d ) × P 1 * (S34).

また、吸着平衡圧を任意の圧力にて測定する為に、複数回の窒素ガス導入を行った場合は、マニホールド44の温度をTSとし容積をVSとして、試料20が収容されている試料管10の温度をTdとし死容積をVd1として、気体定数Rを用いて、試料管10の内部に導入された窒素ガスの導入量Δn1を、Δn1=(VS/RTS)×Σ(PI1 n−PI1 n*)として算出し、試料管10の死容積に残った窒素ガス残量Δnd1をΔnd1=(Vd1/RTS)×P1 *として算出し、試料管10の内部の試料20に吸着した窒素ガスの量V1をV1=(Δn1−Δnd1)として算出する。 Further, when nitrogen gas is introduced a plurality of times in order to measure the adsorption equilibrium pressure at an arbitrary pressure, the temperature of the manifold 44 is T S and the volume is V S. Using the gas constant R and the temperature of the tube 10 as T d and the dead volume as V d1 , the introduced amount Δn 1 of nitrogen gas introduced into the sample tube 10 is expressed as Δn 1 = (V S / RT S ) XΣ (P I1 n −P I1 n * ), and the remaining nitrogen gas amount Δn d1 remaining in the dead volume of the sample tube 10 is calculated as Δn d1 = (V d1 / RT S ) × P 1 * The amount of nitrogen gas V 1 adsorbed on the sample 20 inside the sample tube 10 is calculated as V 1 = (Δn 1 −Δn d1 ).

このようにして、試料管10の内部に導入された窒素ガスの導入量Δn1と、試料管10の死容積Vd1に残った窒素ガス残量Δnd1が求まると、試料管10の内部の試料20に吸着した窒素ガスの量V1は、V1=(Δn1−Δnd1)で算出される(S36)。この手順は、測定制御部100の吸着量算出手順108によって実行される。 In this way, when the introduction amount Δn 1 of nitrogen gas introduced into the sample tube 10 and the remaining nitrogen gas amount Δn d1 remaining in the dead volume V d1 of the sample tube 10 are obtained, the inside of the sample tube 10 is determined. The amount V 1 of nitrogen gas adsorbed on the sample 20 is calculated by V 1 = (Δn 1 −Δn d1 ) (S36). This procedure is executed by the adsorption amount calculation procedure 108 of the measurement control unit 100.

試料22の吸着量についても、試料管12の死容積Vd2、PI2、PI2 *、P2 *を用いて同様に算出される。試料24の吸着量についても、試料管14の死容積Vd3、PI3、PI3 *、P3 *を用いて同様に算出される。死容積Vdiは、試料20を収容した試料管10、試料22を収容した試料管12、試料24を収容した試料管14で必ずしも同じ値ではなく、PIiとPIi *も試料管10,12,14について必ずしも同じ値ではない。 The adsorption amount of the sample 22 is similarly calculated using the dead volumes V d2 , P I2 , P I2 * , and P 2 * of the sample tube 12. The adsorption amount of the sample 24 is similarly calculated using the dead volumes V d3 , P I3 , P I3 * , P 3 * of the sample tube 14. The dead volume V di is not necessarily the same value in the sample tube 10 containing the sample 20, the sample tube 12 containing the sample 22, and the sample tube 14 containing the sample 24, and P Ii and P Ii * are not necessarily the same. 12 and 14 are not necessarily the same value.

このように、吸着特性測定装置30は、マニホールド44に吸着質を導入する導入期間と、マニホールド44から試料管に吸着質を供給する開弁期間の合計期間を繰り返し単位として、各試料管10,12,14のそれぞれに順次吸着質を供給する。導入期間と開弁期間は吸着質を移す時間であるので、短時間で済み、各試料管10,12,14に順次吸着質を供給した後、各試料管10,12,14について吸着前後の圧力変化ΔPを測定する。各試料管10,12,14には独立して圧力計56,66,76が設けられるので、ΔPの測定は時間がかかっても並行して行える。このようにして、1台の吸着特性測定装置30を用いて、1つの試料についての吸着特性測定をしながら、次の試料についての吸着特性測定を行うことができる。   As described above, the adsorption characteristic measuring apparatus 30 repeats each sample tube 10, with the total period of the introduction period for introducing the adsorbate into the manifold 44 and the valve opening period for supplying the adsorbate from the manifold 44 to the sample tube as a repeating unit. Adsorbate is sequentially supplied to each of 12 and 14. Since the introduction period and the valve opening period are times for transferring the adsorbate, a short time is required. After the adsorbate is sequentially supplied to the sample tubes 10, 12, and 14, the sample tubes 10, 12, and 14 are subjected to before and after adsorption. The pressure change ΔP is measured. Since each of the sample tubes 10, 12, and 14 is independently provided with the pressure gauges 56, 66, and 76, ΔP can be measured in parallel even if time is required. In this way, the adsorption characteristic measurement for the next sample can be performed while the adsorption characteristic measurement for one sample is performed using one adsorption characteristic measurement device 30.

10,12,14 試料管、20,22,24 試料、30 吸着特性測定装置、32 冷媒、34 冷媒容器、36 ヘリウムガス源、38 第1吸着質ガス源、40 第2吸着質ガス源、42 排気ポンプ、44 マニホールド、46 配管部、48 飽和蒸気圧管、50,60,70 取付部、80,84,88 流量調整弁、54,64,74,82,86,90,92,96 開閉弁、56,66,76,94,98 圧力計、100 測定制御部、102 死容積算出手順、104 導入処理手順、106 供給処理手順、108 吸着量算出手順。   10, 12, 14 Sample tube, 20, 22, 24 Sample, 30 Adsorption characteristic measuring device, 32 Refrigerant, 34 Refrigerant container, 36 Helium gas source, 38 First adsorbate gas source, 40 Second adsorbate gas source, 42 Exhaust pump, 44 manifold, 46 piping section, 48 saturated vapor pressure pipe, 50, 60, 70 mounting section, 80, 84, 88 flow control valve, 54, 64, 74, 82, 86, 90, 92, 96 on-off valve, 56, 66, 76, 94, 98 Pressure gauge, 100 measurement control unit, 102 dead volume calculation procedure, 104 introduction processing procedure, 106 supply processing procedure, 108 adsorption amount calculation procedure.

Claims (4)

複数の試料管のそれぞれに収容される複数の試料に対し予め定められた吸着質を供給して吸着特性を測定する吸着特性測定装置であって、
複数の試料管の開口部のそれぞれに設けられる複数の取付部と、
吸着質を供給する吸着質供給部と、
複数の取付部のそれぞれと試料管用の開閉弁を介し、吸着質供給部と吸着質用の開閉弁を介して接続されるマニホールドと、
マニホールドの圧力を検出するマニホールド圧力計と、
複数の試料管の内部圧力をそれぞれ独立に検出する複数の試料管圧力計と、
測定制御部と、
を備え、
測定制御部は、
複数の試料管用の開閉弁の全てを閉状態のままで吸着質用の開閉弁を閉状態から任意に定めた導入期間について開状態としてマニホールドに吸着質を導入する導入処理手順と、
吸着質用の開閉弁を閉状態に戻した後、複数の試料管の中の任意の1つについて、その試料管用の開閉弁を閉状態から予め任意に定めた開弁期間について開状態としてその試料管に収容される試料に吸着質を供給する供給処理手順と、
を繰り返し、導入期間と開弁期間の合計期間を繰り返し単位として、複数の試料管のそれぞれに順次吸着質を供給し、
吸着質が供給されたそれぞれの試料管について、マニホールドの圧力とそれぞれの試料管の内部圧力とに基づいて吸着特性を測定することを特徴とする吸着特性測定装置。
An adsorption characteristic measuring device that measures adsorption characteristics by supplying a predetermined adsorbate to a plurality of samples accommodated in each of a plurality of sample tubes,
A plurality of attachment portions provided in each of the openings of the plurality of sample tubes;
An adsorbate supply unit for supplying adsorbate;
A manifold connected to each of the plurality of mounting parts via an on-off valve for the sample tube, and via an on-off valve for the adsorbate supply part and the adsorbate;
A manifold pressure gauge that detects the pressure of the manifold,
A plurality of sample tube pressure gauges that independently detect the internal pressures of the plurality of sample tubes;
A measurement controller;
With
The measurement control unit
An introduction processing procedure for introducing the adsorbate into the manifold in an open state for an introduction period arbitrarily determined from the closed state while the all open / close valves for the plurality of sample tubes are closed,
After returning the on / off valve for the adsorbate to the closed state, for any one of the plurality of sample tubes, the open / close valve for the sample tube is opened for a predetermined opening period from the closed state. A supply processing procedure for supplying adsorbate to a sample contained in a sample tube;
Repeatedly, the adsorbate is sequentially supplied to each of the plurality of sample tubes, with the total period of the introduction period and the valve opening period as a repeating unit,
An adsorption characteristic measuring apparatus for measuring adsorption characteristics of each sample tube supplied with adsorbate based on a manifold pressure and an internal pressure of each sample tube.
請求項1に記載の吸着特性測定装置において、
測定制御部は、
複数の試料管用の開閉弁の全てを閉状態のままで吸着質用の開閉弁を閉状態から予め定めた導入期間について開状態としてマニホールドに吸着質を供給したときの導入期間終了時のマニホールドの圧力をPIiとして取得し、
吸着質用の開閉弁を閉状態に戻した後、複数の試料管の任意の1つを測定対象試料管として、測定対象試料管用の開閉弁を閉状態から予め定めた開弁期間について開状態として測定対象試料管に収容される試料に吸着質を供給したときの開弁期間終了時のマニホールドの圧力をPIi *として取得し、
開弁期間終了後に測定対象試料管用の開閉弁を閉状態に戻し、測定対象試料管に対応する試料管圧力検出部が検出する圧力の時間変化を監視し、圧力低下が平衡状態となったときの測定対象試料管の内部圧力をPi *として取得し、
マニホールドの温度をTSとし容積をVSとして、測定対象試料管の温度をTdとし死容積をVdiとして、気体定数Rを用いて、測定対象試料管の内部に導入された吸着質の導入量Δniを、Δni=(VS/RTS)×(PIi−PIi *)として算出し、測定対象試料管の死容積に残った吸着質残量ΔndiをΔndi=(Vdi/RTs)×Pi *として算出し、測定対象試料管の内部の試料に吸着した吸着質の量ViをVi=(Δni−Δndi)で求めることを特徴とする吸着特性測定装置。
In the adsorption characteristic measuring device according to claim 1,
The measurement control unit
When the adsorbate is supplied to the manifold when the adsorbate on / off valve is in the open state for a predetermined introduction period from the closed state while all of the plurality of sample tube on / off valves are closed, the manifold at the end of the introduction period Get the pressure as P Ii ,
After returning the on / off valve for the adsorbate to the closed state, any one of the plurality of sample tubes is used as a measurement target sample tube, and the on / off valve for the measurement target sample tube is opened from the closed state for a predetermined valve opening period. As the pressure of the manifold at the end of the valve opening period when adsorbate is supplied to the sample accommodated in the sample tube to be measured as P Ii * ,
When the open / close valve for the sample tube to be measured is returned to the closed state after the valve opening period ends, and the time change of the pressure detected by the sample tube pressure detector corresponding to the sample tube to be measured is monitored, and the pressure drop is in an equilibrium state The internal pressure of the sample tube to be measured is acquired as P i * ,
The temperature of the manifold is T S , the volume is V S , the temperature of the sample tube to be measured is T d, the dead volume is V di , and the gas constant R is used to determine the adsorbate introduced into the sample tube to be measured. The introduction amount Δn i is calculated as Δn i = (V S / RT S ) × (P Ii −P Ii * ), and the remaining amount of adsorbate Δn di remaining in the dead volume of the sample tube to be measured is Δn di = ( V di / RT s ) × P i * , and the amount of adsorbate V i adsorbed to the sample inside the sample tube to be measured is obtained by V i = (Δn i −Δn di ). Characteristic measuring device.
請求項2に記載の吸着特性測定装置において、
複数の試料管について、それぞれの死容積Vdiを予め求めておくことを特徴とする吸着特性測定装置。
In the adsorption characteristic measuring device according to claim 2,
An adsorption characteristic measuring apparatus for obtaining a dead volume V di in advance for a plurality of sample tubes.
請求項1に記載の吸着特性測定装置において、
吸着平衡圧をあらかじめ決定された圧力で測定する吸着特性測定装置であって、
マニホールドの温度をTSとし容積をVSとして、測定対象試料管の温度をTdとし死容積をVdiとして、気体定数Rを用いて、測定対象試料管の内部に導入された吸着質の導入量Δniを、Δni=(VS/RTS)×Σ(PIi n−PIi n*)として算出し、測定対象試料管の死容積に残った吸着質残量ΔndiをΔndi=(Vdi/RTS)×Pi *として算出し、測定対象試料管の内部の試料に吸着した吸着質の量ViをVi=(Δni−Δndi)で求めることを特徴とする吸着特性測定装置。
In the adsorption characteristic measuring device according to claim 1,
An adsorption characteristic measuring device that measures adsorption equilibrium pressure at a predetermined pressure,
The temperature of the manifold is T S , the volume is V S , the temperature of the sample tube to be measured is T d, the dead volume is V di , and the gas constant R is used to determine the adsorbate introduced into the sample tube to be measured. the introduction amount Δn i, Δn i = (V S / RT S) × Σ (P Ii n -P Ii n *) is calculated as the adsorbate remaining [Delta] n di remaining dead volume of the measurement object sample tube [Delta] n It is calculated as di = (V di / RT S ) × P i * , and the amount V i of adsorbate adsorbed on the sample inside the sample tube to be measured is obtained by V i = (Δn i −Δn di ). Adsorption characteristic measuring device.
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