JP2014063805A - Substrate processing apparatus and substrate transfer method - Google Patents

Abstract

Provided are a substrate processing apparatus and a substrate transfer method capable of preventing contact between a storage container and a transfer mechanism during transfer even when a sufficient transfer space cannot be secured.
A storage container transport mechanism for transporting a substrate storage container for storing a substrate, a storage container transfer section on which a substrate storage container transported from outside and inside the apparatus is placed, and a substrate is taken out. Alternatively, the storage container transporting mechanism may be configured to transport the substrate storage container between the storage container mounting units 9 and 11 on which the substrate storage container is mounted when inserting, and between the storage container transfer unit and the storage container mounting unit. Transport control means for controlling, and setting means for setting predetermined position information so as not to interfere when the storage container transport mechanism transports the substrate storage container, wherein the transport control means transports the substrate storage container. The position information is acquired from the setting means during operation, and the position indicated by the position information is set as a reference position for the operation of delivering the substrate storage container between the storage container transfer unit and the storage container transport mechanism.
[Selection] Figure 2

Description

  The present invention relates to a substrate processing apparatus and a substrate transfer method for performing processing such as oxidation processing, diffusion processing, and thin film generation on a substrate such as a wafer.

  As a processing apparatus for processing substrates, a vertical processing furnace, a boat that is a substrate holder for holding a predetermined number of substrates to be processed (hereinafter referred to as wafers) in a horizontal posture in multiple stages, and a plurality of wafers are stored. A storage container transfer mechanism for transferring the substrate storage container into and out of the processing apparatus via the storage container transfer section, and a substrate transfer device for transferring wafers from the storage container transfer mechanism to the boat. There is a batch type substrate processing apparatus that processes wafers in the processing furnace while holding the wafers in the boat.

  The substrate storage container is carried into the temporary storage unit such as a storage container storage shelf from the storage container transfer unit by the storage container transfer mechanism, and the storage container transfer unit from the temporary storage unit by the storage container transfer mechanism. It is carried out above.

  However, in recent years, it is necessary to minimize the area occupied by the substrate processing apparatus itself, despite the fact that the substrate storage container has become larger, so that the space between the storage container transfer unit and the storage container transport mechanism A sufficient transfer space required for the operation cannot be secured, and there is a possibility that the substrate storage container and the storage container transfer mechanism come into contact with each other when the substrate storage container is carried in or out.

  In view of such circumstances, the present invention provides a substrate processing apparatus and a substrate transport method that can prevent contact between a storage container and a transport mechanism during transport even when a sufficient transport space cannot be secured.

  The present invention relates to a storage container transport mechanism for transporting a substrate storage container for storing a substrate, a storage container transfer section on which the substrate storage container transported from the outside and inside the apparatus is placed, and when a substrate is taken out or inserted The storage container transport mechanism is controlled so as to transport the substrate storage container between the storage container mounting section on which the substrate storage container is mounted, the storage container transfer section, and the storage container mounting section. Transport control means, and setting means for setting position information determined in advance so as not to interfere when the storage container transport mechanism transports the substrate storage container, and the transport control means includes the substrate storage container. The position information is acquired from the setting means during the transfer operation, and the position indicated by the position information is set as a reference position for the operation of delivering the substrate storage container between the storage container transfer unit and the storage container transfer mechanism. Base Those of the processing apparatus.

  The present invention also includes a loading step of loading a substrate storage container storing a substrate into the apparatus from the storage container exchanging unit, and a predetermined process inside the apparatus, and then transferring the processed substrate to the substrate storage container. A substrate carrying method for carrying out the loading of the substrate storage container to the storage container delivery unit, so that the substrate loading container and the unloading process do not interfere with each other in carrying the substrate storage container in advance. The present invention relates to a substrate transfer method for acquiring set position information and transferring the substrate storage container using a position indicated by the position information as a reference position.

  According to the present invention, a storage container transport mechanism for transporting a substrate storage container for storing a substrate, a storage container transfer unit on which the substrate storage container transported from outside and inside the apparatus is placed, and a substrate is taken out or inserted The storage container transport mechanism is configured to transport the substrate storage container between the storage container mounting unit on which the substrate storage container is mounted, and between the storage container transfer unit and the storage container mounting unit. Transport control means for controlling, and setting means for setting position information determined in advance so as not to interfere when the storage container transport mechanism transports the substrate storage container. The transport control means includes the substrate storage The reference position of the operation of acquiring the position information from the setting means during the container transfer operation and delivering the substrate storage container between the storage container transfer section and the storage container transfer mechanism at the position indicated by the position information When Therefore, even when the storage container transport mechanism cannot secure a transport space sufficient to transport the substrate storage container, interference between the substrate storage container and the storage container transport mechanism can be prevented. Thus, it is not necessary to change the design of the storage container transport mechanism with the increase in the size of the substrate storage container, and the cost can be reduced.

  According to the invention, the substrate storing container storing the substrate is transported into the apparatus from the storage container exchanging section, and after the predetermined processing is performed inside the apparatus, the processed substrate is transferred to the substrate storing container. And carrying out the substrate storage container to the storage container exchanging part, and the substrate carrying method does not interfere with the carrying of the substrate storage container in the carry-in process and the carry-out process. Since the position information set in advance is acquired and the substrate storage container is transferred using the position indicated by the position information as a reference position, a transfer space sufficient for the storage container transfer mechanism to transfer the substrate storage container. Even if it cannot be ensured, there is no interference, there is no need to change the design of the storage container transport mechanism with the increase in size of the substrate storage container, and the cost can be reduced. Exert effect.

1 is a perspective view showing a substrate processing apparatus according to an embodiment of the present invention. It is sectional drawing which shows the substrate processing apparatus which concerns on the Example of this invention. It is a block diagram which shows the structure of the control apparatus of the substrate processing apparatus which concerns on the Example of this invention. It is explanatory drawing which shows the operation | movement order of the cassette conveying machine at the time of the carrying-in operation of the cassette which concerns on the Example of this invention. It is a flowchart explaining the carrying-in operation | movement of the cassette which concerns on the Example of this invention. It is explanatory drawing which shows the operation | movement order of the cassette conveying machine at the time of the carrying-out operation | movement of the cassette which concerns on the Example of this invention. It is a flowchart explaining the carrying-out operation | movement of the cassette which concerns on the Example of this invention. It is explanatory drawing explaining the relationship between the magnitude | size of the cassette based on the Example of this invention, and working space, (A) shows the case where working space is fully ensured, (B) secures working space enough. The case where the normal conveyance operation is performed in a state where the operation is not performed is illustrated, and (C) illustrates the case where the collision avoidance operation is performed in a state where the working space is not sufficiently secured.

  Embodiments of the present invention will be described below with reference to the drawings.

  First, a substrate processing apparatus 1 according to an embodiment of the present invention will be described with reference to FIGS.

  In the following description, a case will be described in which a vertical substrate processing apparatus including a vertical furnace that performs diffusion processing, CVD processing, or the like is applied to a substrate as the substrate processing apparatus.

  A closed-type substrate storage container (FOUP) (hereinafter referred to as cassette 3) containing a substrate such as a wafer 2 made of silicon or the like is carried into the housing 4 from the outside, and vice versa. An I / O stage (storage container exchanging part) 5 is provided on the front surface of the housing 4, and a plurality of cassettes 3 can be placed on the I / O stage 5. In addition, a cassette shelf (temporary storage unit) 6 for storing the cassette 3 loaded therein is provided in the housing 4.

  Further, an airtight chamber 8 serving as a loading / unloading space for a boat (substrate holder) 7 is provided in the housing 4 as a transfer area for the wafer 2. The boat 7 is formed with holding portions such as grooves at a predetermined pitch in the vertical direction, and a plurality of wafers 2 are held in the holding portion in multiple horizontal stages.

  The inside of the hermetic chamber 8 when processing the wafer 2 is filled with an inert gas such as N2 gas in order to prevent a natural oxide film on the wafer 2.

  As the cassette 3, the FOUP type is currently used in the mainstream, and the opening provided on one side of the cassette 3 is closed with a lid (not shown) to isolate the wafer 2 from the atmosphere. The wafer 2 can be transferred into and out of the cassette 3 by removing the lid. In order to remove the lid of the cassette 3 and connect the inside of the cassette 3 and the airtight chamber 8, cassette mounting stages 9 and 11 (storage container mounting portions) are provided on the front side of the airtight chamber 8. A plurality of sets (two sets on the top and bottom in the figure) are provided, and cassette openers 12 and 13 (opening / closing means) are provided on the cassette mounting stages 9 and 11 in the airtight chamber 8 opposite to each other. The cassette openers 12 and 13 can be driven independently, and the cassettes 3 placed on the cassette placement stages 9 and 11 can be individually opened and closed.

  The cassette 3 is transported between the cassette mounting stages 9 and 11, the cassette shelf 6, and the I / O stage 5 by a cassette transporter 14 that is a transverse container transport mechanism. The cassette transporter 14 includes a cassette elevator 15 that can be moved up and down, and a cassette transfer device 16 that is provided in the cassette elevator 15 and can be moved back and forth in the front-rear direction. The cassette elevator 15 and the cassette transfer device 16 The cassette 3 can be transported in a horizontal (CS axis) direction, a vertical (CZ axis) direction, and a front / rear (CX axis) direction.

  Air that has been purified by a clean unit (not shown) provided in the casing 4 is caused to flow into the transport space 17 of the cassette 3 by the cassette transporter 14.

  Inside the hermetic chamber 8, there is provided a substrate alignment device 18 for aligning the boat 7 and the position of the notch (or orientation flat) of the wafer 2 with an arbitrary position. A wafer transfer machine 19 for transferring the wafer 2 between the cassette 3 on the cassette mounting stages 9 and 11, the substrate alignment device 18 and the boat 7 is provided. Further, a processing furnace 21 for processing the wafer 2 is provided in the upper part of the hermetic chamber 8, and a furnace port which is a lower end opening of the processing furnace 21 is opened and closed by a furnace port gate valve 22. When the furnace gate valve 22 is open, the boat 7 is loaded into the processing furnace 21 or unloaded from the processing furnace 21 by a boat elevator (elevating means) 23, and the wafer 2 is transferred to the boat 7. The furnace gate valve 22 is closed.

  Further, the substrate processing apparatus 1 has a control device 24 for controlling driving of the cassette transfer device 14, the wafer transfer device 19, the boat elevator 23 and the like. Hereinafter, the control device 24 will be described with reference to FIG.

  The control device 24 mainly includes an arithmetic control unit 25 such as a CPU, a determination unit 26 as a determination unit, a processing control unit 20 as a processing control unit, a conveyance control unit 27 as a conveyance control unit, a memory, The storage unit 28 includes an HDD, an operation unit 29 such as a mouse and a keyboard, and a display unit 31 such as a monitor. The calculation control unit 25, the storage unit 28, the operation unit 29, and the display unit 31 constitute setting means capable of setting each piece of position information.

  The determination unit 26 determines whether position information of a CS axis (see FIG. 1) that is a horizontal (left-right) direction with respect to the housing 4 is defined as position information of an avoidance position according to a program instruction described later. It has a function to do.

  The processing control unit 20 is configured so that the wafer 2 loaded in the processing furnace 21 is subjected to temperature and pressure in the processing furnace 21 and a processing gas introduced into the processing furnace 21 so that predetermined processing is performed. Has a function of controlling the flow rate of the gas.

  The transfer control unit 27 has a function of controlling driving of transfer mechanisms such as the cassette transfer machine 14, the wafer transfer machine 19, and the boat elevator 23 via a drive motor (not shown). On the basis of the determination result 26, the cassette transporter 14 has a function of controlling the cassette 3 to be transported by either a normal transport operation or a collision avoidance operation described later.

  In the storage unit 28, a data storage area 32 for storing various data and a program storage area 33 for storing various programs are formed. The data storage area 32 includes information on a delivery position on the I / O stage 5 when the cassette 3 is carried into the housing 4 and when the cassette 3 is carried out of the housing 4. Information of pre-defined avoidance position, operation order when moving the cassette transporter 14 to the delivery position, operation order when moving the cassette transporter 14 from the delivery position, and the like are stored. . As the information on the operation order, two patterns of a normal transport operation and a collision avoidance operation are stored in the data storage area 32.

  The information on the avoidance position, the operation sequence when moving the cassette transporter 14 and the like can be set for each of the plurality of cassettes 3 placed on the I / O stage 5. Yes.

  In the collision avoidance operation, when the cassette 3 is loaded and unloaded, the cassette transfer device 16 is moved between the delivery position and the avoidance position, and the movement path of the cassette 3 is changed from the normal time. Thus, the transport operation is performed so that the cassette 3 and the cassette transporter 14 do not come into contact with each other. When the cassette 3 is transported by a normal transport operation, the avoidance position is when there is a contact portion 30 where the transport path of the cassette 3 overlaps the cassette transport machine 14 (hatching portion in FIG. 8B). For example, a location that is separated from the delivery position of the CS axis by several tens of mm is set so that the locus of the cassette 3 and the cassette transporter 14 do not interfere with each other (see FIG. 8C). As shown in FIG. 8A, when the size of the cassette 3 is small and the locus of the cassette 3 and the cassette transporter 14 do not interfere with each other, the avoidance position need not be defined.

  In the program storage area 33, various programs necessary for carrying in and out the cassette 3 are stored. For example, a collision avoidance operation determination program 34 for causing the determination unit 26 to determine whether or not an avoidance position is defined, and a collision avoidance for causing the transport control unit 27 to perform a collision avoidance operation based on the defined avoidance position A program such as the program 35 is stored.

  The substrate processing is performed according to the following procedure.

  When substrate processing is started, first, the cassette 3 transported from the outside of the housing 4 by an external transport device such as AGV (Automated Guided Vehicle) or OHT (Overhead Hoist Transport) is placed on the I / O stage 5. Placed on.

  The cassette 3 placed on the I / O stage 5 is carried into the casing 4 by the cassette carrier 14 and then directly carried onto the cassette placement stages 9 and 11; Alternatively, once stocked on the cassette shelf 6, it is transported onto the cassette mounting stages 9 and 11.

  At this time, in this embodiment, the transport control unit 27 causes the cassette 3 to be carried in by the cooperation of the cassette elevator 15 and the cassette transfer device 16. In the following description, depending on whether or not the transfer space 17 is sufficient for the size of the cassette 3 for each of the plurality of cassettes 3 mounted on the I / O stage 5. It is assumed that presence / absence of the avoidance position and position information of the avoidance position are set in advance. The cassette transporter 14 contacts the cassette 3 and the cassette transporter 14 by transporting the cassette 3 by either a normal transport operation or a collision avoidance operation based on the presence / absence of an avoidance position and position information. I try not to.

  Hereinafter, the cassette carrying-in operation of the cassette carrier 14 will be described with reference to the flowcharts of FIGS. 4 and 5 and FIG. FIG. 4 shows the operation sequence of the cassette transporter 14 when the cassette 3 is loaded on a three-dimensional coordinate system for the CX axis, CZ axis, and CS axis. 8A to 8C, the I / O stage 5 and the cassette transporter 14 are shown side by side, but the I / O stage 5 and the cassette transporter 14 are It is located at the same level in the CZ axis direction.

  In FIG. 4, reference numeral 36 denotes an origin, and the origin 36 is a home position on the CX axis, a pick position on the CZ axis, and a delivery position (delivery standard position) on the CS axis. In FIG. 4, 37 indicates a delivery position on the CX axis, 38 indicates a pick completion position on the CZ axis, and 39 indicates an avoidance position on the CS axis.

  STEP: 01 When the carry-in operation of the cassette 3 is started, the transport control unit 27 first starts the cassette elevator 15 with the cassette elevator 15 based on various position information and operation order information stored in the data storage area 32. The transfer machine 16 is lowered to the pick position 36 'on the CZ axis (I in FIG. 4). At the Pick position 36 ′, the cassette receiving surface of the cassette transfer device 16 is lower than the cassette mounting surface of the I / O stage 5.

  (Step 02) After lowering the cassette transfer device 16 to the Pick position 36 'by the cassette elevator 15, the transport control unit 27 causes the cassette transfer device 16 to traverse to the delivery position 36 of the CS axis (see FIG. II in 4).

  (Step 03) After the cassette transfer machine 16 has been traversed to the delivery position 36, the transport control unit 27 then advances the cassette transfer machine 16 to the delivery position 37 on the CX axis (in FIG. 4). III). At this time, since the cassette receiving surface is moved to the delivery position 36 on the CS axis and the delivery position 37 on the CX axis, respectively, the cassette receiving surface of the cassette transfer machine 16 is the object to be transported. It is located directly below a certain cassette 3.

  (Step 04) After the cassette transfer machine 16 is moved forward to the delivery position 37, the transfer control unit 27 raises the cassette elevator 15 and moves the cassette transfer machine 16 to the pick completion position 38 on the CZ axis. Move (IV in FIG. 4). At the Pick completion position 38, the cassette receiving surface of the cassette transfer device 16 is higher than the cassette mounting surface of the I / O stage 5, and the cassette transfer device 16 is The cassette 3 is lifted from the I / O stage 5 by the cassette transfer device 16 by being raised to the pick completion position 38.

  (Step 05) Next, the collision avoidance operation determination program 34 is activated, and the determination unit 26 determines whether an avoidance position is defined on the CS axis.

  STEP: 06 If it is determined in STEP: 05 that the avoidance position is not defined in the determination unit 26, the collision avoidance operation is not performed, and the normal transfer operation stored in the data storage area 32 is not performed. Based on the operation sequence information, the transport control unit 27 moves the cassette transfer machine 16 backward to the home position 36 ″ of the CX axis and transports the cassette 3 to the home position 36 ″ (in FIG. 4). V, see FIG. 8A), the loading operation of the cassette 3 is completed.

  STEP: 07 If it is determined in STEP 05 that the avoidance position is defined in the determination unit 26, the collision avoidance program 35 is then started and stored in the data storage area 32. The transport control unit 27 causes the cassette transporter 14 to perform a collision avoidance operation based on the avoidance position information and the information on the operation order during the collision avoidance operation.

  That is, the transfer control unit 27 moves the cassette transfer machine 16 back to the home position 36 ″ on the CX (V in FIG. 4), and simultaneously moves the cassette transfer machine 14 to the delivery position of the CS axis. The vehicle is traversed from 36 to an avoidance position 39 separated by δ (VI in FIG. 4). In the collision avoidance operation, the moving speed of the cassette transfer device 16 is controlled so that the moving time of the CX axis to the home position 36 ″ is equal to the moving time of the CS axis to the avoiding position 39. Is done. By controlling the moving speed of the cassette transfer device 16, the movement of the cassette transfer device 16 (V in FIG. 4 and VI in FIG. 4) is synthesized, and the cassette 3 is transferred to the cassette transfer device 14. In this case, the cassette 3 is transported obliquely toward the avoidance position 39 'without contact with the cassette 3 (see VII in FIG. 4 and FIG. 8C).

  When the cassette 3 is transported onto the cassette mounting stages 9 and 11 by the loading operation by the cassette transporter 14, the lid is removed by the cassette openers 12 and 13, and the internal atmosphere of the cassette 3 is It communicates with the atmosphere of the airtight chamber 8.

  Next, the wafer transfer device 19 takes out the wafer 2 from the cassette 3 that is in communication with the atmosphere of the hermetic chamber 8. The taken-out wafer 2 is aligned by the substrate alignment device 18 so that a notch at an arbitrary position is determined, and is transferred to the boat 7 after alignment.

  After the wafer 2 is transferred to the boat 7, the furnace gate gate valve 22 of the processing furnace 21 is opened, and the boat 7 holding the wafer 2 is moved into the processing furnace 21 by the boat elevator 23. Loading.

  The processing controller 20 heats the wafer 2 to a predetermined processing temperature in the processing furnace 21, introduces a processing gas, and performs a required processing on the wafer 2 while maintaining a predetermined pressure. After the processing, the boat 7 is unloaded from the processing furnace 21 by the boat elevator 23 and the processed wafers 2 are collected from the boat 7 to the cassette 3 in the reverse order.

  After the wafer 2 is collected in the cassette 3, the cassette 3 is transferred from the cassette mounting stages 9 and 11 to the I / O stage 5 by the cassette transfer device 14.

  At this time, similarly to the loading of the cassette 3, the transport control unit 27 causes the cassette elevator 15 and the cassette transfer machine 16 to cooperate to perform the unloading operation of the cassette 3. The cassette transporter 14 contacts the cassette 3 and the cassette transporter 14 by transporting the cassette 3 by either a normal transport operation or a collision avoidance operation based on the presence / absence of an avoidance position and position information. I try not to.

  Hereinafter, the cassette unloading operation of the cassette transporter 14 will be described with reference to the flowcharts of FIGS. In FIG. 6, the same components as those in FIG. 4 are denoted by the same reference numerals. In FIG. 6, the origin 36 on the CZ axis is a place completion position, and 41 is a place position on the CZ axis.

  STEP: 11 When the unloading operation of the cassette 3 is started, the transport control unit 27 first raises and lowers the cassette elevator 15 based on various position information and operation order information stored in the data storage area 32. Then, the cassette transfer device 16 is moved to the place position 41 of the CZ axis (I in FIG. 6). The Place position 41 in the unloading operation is equivalent to the Pick completion position 38 in the unloading operation, and the cassette receiving surface of the cassette transfer machine 16 is the cassette mounting surface of the I / O stage 5. Higher than.

  (Step 12) When the cassette transfer device 16 is moved up and down to the Place position 41 by the cassette elevator 15, the collision avoidance operation determination program 34 is activated, and the determination unit 26 defines an avoidance position 39 on the CS axis. It is determined whether it has been done.

  STEP: 13 When it is determined in STEP: 12 that the avoidance position 39 is not defined in the determination unit 26, the collision avoiding operation is not performed and the normal transfer operation stored in the data storage area 32 is performed. Based on the information on the operation sequence at that time, the transport control unit 27 moves the cassette transfer machine 16 to the CS axis delivery position 42 (II in FIG. 6).

  STEP: 14 When the cassette transporter 14 is traversed to the delivery position 42, the transport controller 27 then advances the cassette transfer machine 16 to the CX-axis delivery position 43 (III in FIG. 6). .

  STEP: 15 If it is determined in STEP 12 that the avoidance position 39 is defined in the determination unit 26, the transport control unit 27 sets the cassette transfer device 16 to CS based on the avoidance position information. The shaft is traversed from the delivery position 42 to the avoidance position 39 ′ separated by δ (IV in FIG. 6).

  STEP: 16 When the cassette transfer machine 16 is traversed to the avoidance position 39 ′, the collision avoidance program 35 is started next, and the operation sequence during the collision avoidance operation stored in the data storage area 32 is changed. Based on the information, the transport control unit 27 causes the cassette transporter 14 to perform a collision avoidance operation.

  That is, the transport control unit 27 advances the cassette transfer machine 16 to the delivery position 43 of the CX axis (III in FIG. 6) and simultaneously traverses to the delivery position 36 of the CS axis (FIG. 6). Inside V). In the collision avoidance operation, the moving speed of the cassette transfer device 16 is controlled so that the moving time of the CX axis to the delivery position 43 and the moving time of the CS axis to the delivery position 36 are equal. . By controlling the moving speed of the cassette transfer device 16, the movement of the cassette transfer device 16 (III in FIG. 6 and V in FIG. 6) is synthesized, and the cassette 3 is transferred to the cassette transfer device 14. The sheet is conveyed in an oblique direction toward the delivery position 43 without contacting (see VI in FIG. 6 and FIG. 8C).

  STEP: 17 After the cassette transfer machine 16 is moved to the delivery position 37 of the CX axis and CS axis by STEP: 13 and STEP: 14, and STEP: 15 and STEP: 16, the transport control unit 27 The cassette elevator 15 is lowered to lower the cassette transfer machine 16 to the place completion position 38 of the CZ axis (VII in FIG. 6). The place completion position 38 in the unloading operation is equivalent to the pick position 44 in the unloading operation, and the cassette receiving surface of the cassette transfer machine 16 is the cassette mounting surface of the I / O stage 5. Is lower than. Therefore, at the stage where STEP: 13 and STEP: 14, and STEP: 15 and STEP: 16 are completed, the cassette 3 is positioned immediately above the I / O stage 5, and the cassette elevator 15 is placed in place. The cassette 3 is placed on the I / O stage 5 by being lowered to the position 44.

  (Step 18) Finally, the transport control unit 27 moves the cassette transfer machine 16 backward from the delivery position 44 of the CX axis to the home position 36, thereby completing the unloading operation of the cassette 3 (FIG. 6). VIII).

  After the cassette 3 is transported onto the I / O stage 5 by the unloading operation, the cassette 3 is transported to the outside of the housing 4 by an external transport device (not shown), and the substrate processing is completed.

  As described above, in this embodiment, when the cassette 3 is carried into the housing 4 and when the cassette 3 is carried out of the housing 4, the cassette 3 is preliminarily set according to the size of the cassette 3. Since the position information of the avoidance position is defined and the cassette transporter 14 changes the moving path of the cassette 3 based on the defined avoidance position information, it is sufficient to transport the cassette 3. Even when the transport space 17 cannot be secured, the cassette 3 can be transported without colliding with the cassette transporter 14.

  Therefore, it is not necessary to change the mechanism of the substrate processing apparatus 1 for the enlargement of the cassette 3, and the cost can be reduced, and the substrate processing can be performed by reducing the transfer space 17 of the cassette transfer machine 14. The device 1 itself can be reduced in size.

  In addition, information on the avoidance position and information on the operation order when the cassette 3 is transported are defined for each of the plurality of cassettes 3 placed on the I / O stage 5, so Even different cassettes 3 can be processed simultaneously.

  In this embodiment, avoidance position information is defined in advance, and it is determined whether or not a collision avoidance operation is performed based on the defined position information. For example, the size of the cassette 3 is set in the cassette transfer device 16. It may be possible to provide a sensor for detecting the height and determine whether or not to perform the collision avoidance operation based on the detection result of the sensor.

  Note that the substrate processing apparatus of this embodiment is applicable not only to a semiconductor manufacturing apparatus but also to an apparatus for processing a glass substrate such as an LCD device.

  The film forming process using the substrate processing apparatus applied to this embodiment includes, for example, a process for forming a CVD, ALD, oxide film, nitride film, a process for forming a film containing a metal, etc. Needless to say, the present invention is also applicable to an exposure apparatus, a lithography apparatus, a coating apparatus, and a processing apparatus using plasma.

(Appendix)
The present invention includes the following embodiments.

  (Additional remark 1) The carrying-in process which carries in the board | substrate storage container which accommodated the board | substrate in the apparatus from the storage container transfer part, A board | substrate is transferred from the carried said board | substrate storage container to a board | substrate holder, and this board | substrate holder is processed into a processing furnace A processing step of loading the substrate into the substrate and processing the substrate; removing the substrate holder from the processing furnace after substrate processing; transferring the processed substrate to the substrate storage container; and storing the substrate storage container An unloading step for unloading to the container delivery unit, and in the unloading step and the unloading step, position information set in advance so as not to interfere when the transfer control means transfers the substrate storage container, A method of manufacturing a semiconductor device, comprising transporting the substrate storage container with a position indicated by information as a reference position.

  (Additional remark 2) It is determined whether the position information of the avoidance position is defined by the determination means, and when the avoidance position is defined, the transfer control means moves the substrate storage container to the avoidance position by the storage container transfer mechanism. A substrate storage container transfer program, wherein the substrate storage container is unloaded by moving the storage container transfer mechanism in an oblique direction from the avoidance position to the storage container transfer section of the substrate storage container.

  (Appendix 3) Storage container transport mechanism for transporting a substrate storage container for storing a substrate, a storage container transfer unit on which the substrate storage container transported from outside and inside the apparatus is placed, and when a substrate is taken out or inserted The storage container transport mechanism is controlled so as to transport the substrate storage container between the storage container mounting section on which the substrate storage container is mounted, the storage container transfer section, and the storage container mounting section. It comprises a conveyance control means and a storage unit, and the storage unit interferes with the position information of the delivery standard position for delivering the substrate storage container to the storage container transfer unit, and the conveyance at the delivery standard position. The position information of the avoidance position that is set when the position is set and is displaced by a predetermined amount in the horizontal direction from the delivery standard position is stored, and the transfer control means sets the transfer path of the substrate storage container based on the presence or absence of the position information of the avoidance information A substrate processing apparatus, characterized in that the-option.

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Wafer 3 Cassette 5 I / O stage 6 Cassette shelf 9, 11 Cassette mounting stage 14 Cassette transport machine 15 Cassette elevator 16 Cassette transfer machine 17 Transport space 24 Control apparatus 25 Computation control part 26 Judgment part 27 Transport Control unit 28 Storage unit

Claims (2)

  A storage container transport mechanism for transporting a substrate storage container for storing a substrate, a storage container transfer unit on which the substrate storage container transported from outside and inside the apparatus is placed, and the substrate storage when the substrate is taken out or inserted A storage container placement section on which the container is placed; and a transport control means for controlling the storage container transport mechanism so as to transport the substrate storage container between the storage container transfer section and the storage container placement section. Setting means for setting position information determined in advance so as not to interfere when the storage container transport mechanism transports the substrate storage container, and the transport control means is configured to transfer the substrate storage container during the transport operation of the substrate storage container. The position information is acquired from setting means, and the position indicated by the position information is set as a reference position for the operation of delivering the substrate storage container between the storage container transfer unit and the storage container transport mechanism. That the substrate processing apparatus.   A carrying-in process of carrying a substrate storage container containing a substrate into the apparatus from the storage container transfer unit, and after performing a predetermined process inside the apparatus, the processed substrate is transferred to the substrate storage container. A substrate transport method including a transporting step of transporting the storage container to the storage container transfer unit, wherein position information set in advance so as not to interfere when transporting the substrate storage container in the transporting process and the transporting process. And transporting the substrate storage container using the position indicated by the position information as a reference position.

Images