JP2014060883A - Linear motor - Google Patents

Abstract

[PROBLEMS] To fix a mover iron core and a movable stage with the same coupling force as in the past and reduce the processing cost for arranging a cooling pipe more than in the past even if the bolt tightening force is loosened more than in the past. A linear motor is provided.
A movable stage plate 12 of a movable element 2 is formed with a through hole 40 penetrating from a cavity 54 to a contact surface 45. The cavity 54 is filled with the resin 25 and the coil 5 is sealed with the resin 25, and the resin 25 filling the cavity 54 and the resin 25 sealing the coil 5 are integrally molded through the through hole 40. Thus, the mover core 6 and the movable stage plate 12 are fixed.
[Selection] Figure 1

Description

  The present invention relates to a linear motor used in industrial machines such as machine tools.

  3, 4, and 5 show a three-phase inductor type synchronous linear motor 110 described in Patent Document 1 below. 3 is a top view of the linear motor 110, FIG. 4 is a side sectional view, and FIG. 5 is a front sectional view. 3 shows the linear motor 110 with the movable stage plate 112 removed. The linear motor 110 is a so-called magnetic attractive force canceling type linear motor in which the magnetic attractive forces in the Y-axis direction of SIDE-A and SIDE-B shown in FIG. 3 are canceled. The linear motor 110 includes a stator 1 and a mover 2.

  In the stator 1, a plurality of sets of inductor teeth 3 opposed via a gap are arranged along the movement axis (X-axis direction in FIG. 3) of the mover 2. The mover 2 includes a mover iron core 6, a coil 5, and a movable stage plate 112.

  The armature core 6 is disposed in the gap between the opposing inductor teeth 3 in a non-contact manner with the inductor teeth 3 of the stator 1. The mover core 6 includes a base member 8 and teeth 20, 21, and 22. The base member 8 extends along the movement axis (X axis). Further, as shown in FIG. 5, the base member 8 has a bolt hole into which the bolt 13 is screwed (screwed) in an area where the base member 8 comes into contact with the contact surface 45 of the movable stage plate 112.

  Returning to FIG. 3, the teeth 20, 21, and 22 extend toward the inductor teeth 3 of the opposing stator 1. Further, as shown in FIG. 4, permanent magnets 4 are alternately placed on the surfaces of the teeth 20, 21, 22 facing the inductor teeth 3 of the stator 1 alternately with N poles and S poles along the movement axis. It is attached.

  The coil 5 is wound around each of the teeth 20, 21, 22 around the extending axis (Y axis) of the teeth 20, 21, 22.

  As shown in FIG. 5, the movable stage plate 112 is movable along the Z-axis direction perpendicular to the moving axis (X axis) of the mover 2 and the extending axis (Y axis) of the teeth 20, 21, 22. It is fixed to the base member 8 of the core 6. The movable stage plate 112 includes a contact surface 45 that contacts the base member 8 of the mover core 6. The contact surface 45 is formed with a bolt hole corresponding to the bolt hole of the base member 8 and into which the bolt 13 is screwed. The bolt 13 is screwed into the bolt hole of the mover iron core 6 and the movable stage plate 112, so that the mover iron core 6 and the movable stage plate 112 are fixed. The bolt 13 is firmly tightened so as to withstand the thrust generated when the mover 2 moves.

  The linear motor 110 is provided with a cooling mechanism. When a current flows through the coil 5 of the mover 2, heat is generated by the winding resistance. If this heat is transmitted to the unillustrated industrial machine side mounted on the movable stage plate 112 via the movable stage plate 112, thermal displacement or thermal deformation may occur, which may reduce the processing accuracy of the industrial machine. . For this reason, in FIGS. 3, 4, and 5, a cooling pipe 15 as disclosed in Patent Document 2 below is arranged on the movable stage plate 112.

  The movable stage plate 112 is divided (up and down) along the Z direction in FIG. Furthermore, the insertion groove of the cooling pipe 15 is formed in each division surface. The insertion groove is formed in a U-shape as shown in 16 of FIG. 3, for example, and after the cooling pipe 15 formed in the U-shape is sandwiched in the insertion groove, the upper and lower movable parts divided by the bolts 14 or the like are arranged. The stage plate 112 is fixed.

  In Patent Document 3 below, as shown in FIG. 5, the linear motor 110 is cooled by embedding a cooling pipe 17 in a resin 25 that seals the coil 5. However, since this cooling pipe 17 is disposed in the vicinity of the coil 5, the heat generated in the coil 5 is transmitted to the movable stage plate 112 via the mover core 6 and is transmitted to the industrial machine side. Therefore, it is preferable to install the cooling pipe on the movable stage plate 112 from the viewpoint of heat insulation.

JP-A-11-027927 JP 2004-304932 A JP 2002-44928 A

  By the way, if the mover core 6 and the movable stage plate 112 are strongly tightened with the bolt 13 so as to withstand high thrust, the mover core 6 may be distorted. For example, when the mover iron core 6 is composed of a laminate of a plurality of electromagnetic steel plates, the electromagnetic steel plate is deformed by the tightening force of the bolts 13, and as a result, the mover iron core 6 is distorted. Then, when the mover 2 is assembled, the gap (gap) between the SIDE-A and SIDE-B of FIG. 3 with respect to the stator 1 becomes unbalanced, and the magnetic attractive force is canceled by SIDE-A and SIDE-B become unable. As a result, a force in the Y direction is applied to the table, so that the straightness of the mover 2 deteriorates, or the gap changes and a predetermined thrust cannot be obtained. Furthermore, the mover iron core 6 composed of a laminate of electromagnetic steel sheets has a feature that the bolt is easy to loosen even after the bolt is tightened, and the bolt loosens and the mover iron core 6 is displaced from the movable stage plate 112. There was a problem.

  Further, when the movable stage plate 112 is divided into upper and lower parts in order to arrange the cooling pipe 15, processing of grooves formed in the movable stage plate 112 to fit the cooling pipe 15 is performed on each of the divided upper and lower movable stage plates 112. Therefore, there is a problem that it leads to cost increase.

  Accordingly, the present invention fixes the mover core and the movable stage with the same coupling force as before, even if the tightening force of the bolt is loosened more than before, and reduces the processing cost for arranging the cooling pipe than before. An object of the present invention is to provide a linear motor that can be suppressed.

  A linear motor according to the present invention is a stator core disposed along a moving axis and opposed via a gap, and a mover iron core disposed in the gap in a non-contact manner with the stator. A base member extending along the arm, a mover core provided with teeth extending from the base member toward each of the opposing stators, and a winding around the teeth extending shaft. A movable element including a rotated coil and a movable stage plate fixed to the base member so that the extending shaft and the moving shaft are perpendicular to each other. The movable stage plate includes a placement surface to be transported and a contact surface to the base member that faces the placement surface. A cavity for accommodating the cooling pipe is formed on the mounting surface. A through hole penetrating from the cavity to the contact surface is formed in the movable stage plate. The cavity is filled with resin and the coil is sealed with the resin, and the resin filling the cavity and the resin sealing the coil are integrally molded through the through hole. The movable core and the movable stage plate are fixed.

  In the above invention, it is preferable that a plurality of the teeth are provided along the extending direction of the base member, and the through hole of the movable stage plate is disposed in a gap between the adjacent teeth.

  According to the present invention, even if the bolt tightening force is loosened more than before, the mover core and the movable stage are fixed with the same coupling force as before, and the processing cost for arranging the cooling pipe is higher than before. It becomes possible to suppress.

It is a front sectional view which illustrates the linear motor concerning this embodiment. It is side surface sectional drawing which illustrates the linear motor which concerns on this embodiment. It is the top view of the conventional linear motor, and is the figure which removed the movable stage board 112. It is side surface sectional drawing of the conventional linear motor. It is front sectional drawing of the conventional linear motor.

  FIG. 1 illustrates a linear motor 100 according to the present embodiment. The linear motor 100 includes a stator 1 and a mover 2.

  In the stator 1, a plurality of sets of magnetic poles opposed via a gap are arranged along the movement axis (X-axis direction in FIG. 1) of the mover 2. The stator 1 is attached to a stator support 10. The stator support base 10 is fixed to a fixed base 11, and the fixed base 11 is further fixed to a bed of an industrial machine (not shown). The stator 1 is formed, for example, by laminating electromagnetic steel plates obtained by pressing inductor teeth 3 that are magnetic poles.

  The mover 2 places a transport target such as an industrial machine (not shown) on the movable stage plate 12 and moves the transport target to a desired position along the movement axis by a magnetic action with the stator 1. The mover 2 includes a mover iron core 6, a coil 5, a movable stage plate 12 and a cooling pipe 15.

  The armature core 6 is disposed in the gap between the opposing inductor teeth 3 in a non-contact manner with the inductor teeth 3 of the stator 1. The mover core 6 has substantially the same structure as that shown in FIG. 3, and includes a base member 8 and teeth 20, 21, 22 as shown in FIG. The base member 8 and the teeth 20, 21, and 22 are integrally formed. For example, by laminating electromagnetic steel plates in which the shapes of the base member 8 and the teeth 20, 21, and 22 are stamped by press working, the mover iron core 6 is formed. Is formed.

  The base member 8 extends along the movement axis (X axis). Further, the base member 8 has a bolt hole 58 into which the bolt 13 is screwed in an area where the base member 8 comes into contact with the contact surface 45 of the movable stage plate 12.

  The teeth 20, 21, and 22 extend from the base member 8 toward the inductor teeth 3 of the opposing stator 1. Further, as shown in FIG. 2, permanent magnets 4 are alternately placed on the surfaces of the teeth 20, 21, 22 facing the inductor teeth 3 of the stator 1 alternately along the moving axis. It is attached.

  The coil 5 is wound around each of the teeth 20, 21, and 22 around the extending axis (Y axis in FIG. 1) of the teeth 20, 21, and 22. The coil 5 is composed of, for example, a three-phase AC winding. The coil 5 is entirely sealed with a resin 25a.

  When a sine wave current is passed through each phase winding of the coil 5 which is a three-phase AC winding, one magnetic pole of the permanent magnet 4 in which N poles and S poles are alternately arranged is strengthened, and the other magnetic pole is weakened. Therefore, the permanent magnet 4 of each of the teeth 20, 21, 22 is excited like a salient pole of either the N pole or the S pole. A magnetic flux is generated between the excited permanent magnet 4 and the inductor teeth 3 of the stator 1 so that an attractive force is exerted, and the mover 2 moves linearly in the movement direction (X-axis direction).

  Returning to FIG. 1, the movable stage plate 12 has a movable iron core along the Z-axis direction perpendicular to the moving axis (X axis) of the movable element 2 and the extending axis (Y axis) of the teeth 20, 21, 22. 6 is fixed to the base member 8. The movable stage plate 12 includes a placement surface 52 on which an object to be transported such as an industrial machine is placed, and a contact surface 45 that faces the placement surface 52 and contacts the base member 8 of the mover core 6. The contact surface 45 is formed with a bolt hole 60 into which the bolt 13 is screwed while being aligned with the bolt hole 58 of the base member 8. The bolt 13 is screwed into the bolt hole 58 of the movable core 6 and the bolt hole 60 of the movable stage plate 12, whereby the movable core 6 and the movable stage plate 12 are fixed. As will be described later, in the present embodiment, the armature core 6 and the movable stage plate 12 are fixed not only by the bolt 13 but also by the resins 25a to 25c. 13 may be loosened as compared with the case where the movable core 6 and the movable stage plate 12 are fixed. Even if it does in this way, the same coupling | bonding force as the case where the needle | mover core 6 and the movable stage board 12 are fixed only with the volt | bolt 13 can be obtained. Since the tightening force of the bolt 13 is loosened, the deformation of the mover core 6 accompanying the tightening of the bolt 13 is suppressed, and as a result, the disturbance of the magnetic attractive force between the stator 1 and the mover 2 is suppressed.

  The cooling pipe 15 is accommodated in the cavity 54 of the movable stage plate 12, blocks the heat generated by the winding resistance of the coil 5, and transmits it to the table side of the industrial machine mounted on the movable stage plate 12. To prevent. A coolant such as cooling water is supplied into the cooling pipe 15. The cooling pipe 15 is extended along the movement axis, for example. The cooling pipe 15 is made of a material having good thermal conductivity such as a copper pipe.

  A cavity 54 in which the cooling pipe 15 is accommodated is formed on the mounting surface 52 of the movable stage plate 12. The cavity 54 is formed by removing a part of the mounting surface 52, for example. The cavity 54 may be provided over, for example, two opposing sides of the placement surface 52 along the movement axis. The cavity 54 is formed with a deep groove portion 54a that is dug deeper than the diameter of the cooling pipe 15 and in which the cooling pipe 15 is disposed, and a shallow groove portion 54b that is dug shallower than the deep groove portion 54a. The cavity 54 is filled with the resin 25b. As will be described later, by filling the resin 25b, the cavity 54 is filled, and the mounting surface 52 can be made a uniform plane.

  Further, the movable stage plate 12 is formed with a through hole 40 penetrating from the cavity 54 to the contact surface 45. The through hole 40 is formed to connect the resin 25 b filled in the cavity 54 and the resin 25 a that seals the coil 5. In the present embodiment, the resin 25 b filled in the cavity 54 and the resin 25 a that seals the coil 5 are integrally molded through the through hole 40. Specifically, the resin 25c is filled in the through hole 40, and the resin 25a for sealing the coil 5, the resin 25b filled in the cavity 54, and the resin 25c filled in the through hole 40 are integrally molded. The Thereby, the armature core 6 and the movable stage plate 12 are fixed to the resins 25a to 25c.

  In addition, since the effect which hold | maintains the needle | mover core 6 and the movable stage board 12 becomes higher when the filling amount of the resin 25 is larger, the through hole 40 is a portion where the filling amount of the resin 25 is relatively increased. It is suitable to be provided. Specifically, as shown in FIG. 2, it is preferable that a through hole 40 is disposed in a gap between adjacent teeth 20, 21, 22.

  Next, a method for integrally molding the resin 25b filled in the cavity 54 and the resin 25a for sealing the coil 5 will be described. First, the cooling pipe 15 is disposed in the deep groove portion 54 a of the cavity 54 of the movable stage plate 12. Next, a flat plate is fixed to the mounting surface 52 of the movable stage plate 12 so as to cover the cavity 54. Here, it is preferable to apply a release agent to the surface of the flat plate in contact with the mounting surface 52. Next, the mover 2 is positioned so that the mounting surface 52 is the bottom surface, and a square cylindrical mold penetrating in the Z direction is placed on the mover iron core 6, and the resin 25 is poured from the coil 5 side. The resin 25 poured from the coil 5 side fills the cavity 54 via the through hole 40. When the resin 25 is filled in the cavity 54, the resin 25 is filled in the through hole 40 next. Further, the resin 25 seals the coil 5. Thereafter, the resin 25 is cured by heat treatment or the like. Thereby, the armature core 6 and the movable stage plate 12 are fixed by the resin 25. Further, the resin 25 filled in the cavity 54 is cured, so that the cooling pipe 15 in the cavity 54 is fixed. Further, when the flat plate covering the placement surface 52 is removed after the resin 25 is cured, the placement surface 52 becomes a smooth surface by the resin 25 filled in the cavity 54.

  In addition, although the present Example demonstrated the three-phase inductor type | mold synchronous linear motor, the linear motor of the other principle, for example, the surface magnet type linear to which the permanent magnet was arrange | positioned at the stator side like the said patent document 2 Even if it is a motor etc., if the structure which fixes the needle | mover core which arrange | positioned the coil | winding to the teeth part with respect to a stator to a movable stage board is the same, the same effect can be acquired.

  Further, in the above embodiment, the two through holes 40 of the movable stage plate 12 are provided, and the legs of the movable stage plate 12 are provided from the center of the movable stage plate 12 and both sides as shown in the sectional view of FIG. Although it descends and is in contact with the mover core 6, the legs on both sides may be separate parts or part of a jig. For example, the resin 25 may be removed after molding.

  DESCRIPTION OF SYMBOLS 1 Stator, 2 Movable element, 3 Inductor teeth, 4 Permanent magnet, 5 Coil, 6 Movable iron core, 8 Base member, 10 Stator support base, 11 Fixed base, 12 Movable stage plate, 13 bolt, 15 Cooling piping 20, 21 and 22 teeth, 25 resin, 40 through-hole, 45 contact surface of movable stage plate, 52 mounting surface of movable stage plate, 54 cavity, 54a deep groove portion of cavity, 54b shallow groove portion of cavity, 58, 60 bolt holes, 100, 110 linear motor.

Claims (2)

A stator arranged along the movement axis and facing through a gap;
A mover iron core disposed in the gap in a non-contact manner with the stator, and a base member extending along the movement axis, and from the base member toward each of the opposing stators. The armature core having the teeth extended, the coil wound around the teeth around the extending shaft of the teeth, and the extending shaft and the moving shaft are fixed to the base member vertically. A movable stage plate, and a movable element comprising:
A linear motor with
The movable stage plate includes a placement surface to be transported and a contact surface to the base member facing the placement surface.
A cavity for accommodating the cooling pipe is formed on the mounting surface,
The movable stage plate is formed with a through-hole penetrating from the cavity to the contact surface,
The cavity is filled with resin and the coil is sealed with the resin, and the resin filling the cavity and the resin sealing the coil are integrally molded through the through hole. The linear motor is characterized in that the movable core and the movable stage plate are fixed. The linear motor according to claim 1,
A plurality of the teeth are provided along the extending direction of the base member,
The linear motor according to claim 1, wherein the through hole of the movable stage plate is disposed in a gap between the adjacent teeth.

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