JP2014052164A - Heat treatment device - Google Patents

Abstract

In a heat treatment apparatus, variation in coaxiality between a plurality of shafts for rotating a fan is further reduced. Further, the reduction in the coaxiality between the plurality of shafts for rotating the fan is further reduced.
A heat treatment apparatus includes a fan and a shaft unit. The fan is rotatable to agitate the gas in the tube. The shaft unit 48 is connected to the fan and transmits the output from the electric motor to the fan. The output is input to the first shaft 71 of the shaft unit 48. The second shaft 72 transmits the output to the fan. The first shaft 71 and the second shaft 72 are coupled to each other by taper fitting.
[Selection] Figure 6

Description

  The present invention relates to a heat treatment apparatus for processing an object to be processed in a heated atmosphere.

  2. Description of the Related Art A heat treatment apparatus for performing heat treatment on a material such as a glass substrate is known (for example, see Patent Document 1). As an example of the heat treatment apparatus, the vacuum furnace described in Patent Document 1 has a processing chamber in which materials are arranged. A motor is disposed outside the processing chamber. The rotation shaft of this motor is screwed to the cylindrical rotation shaft. Specifically, the rotating shaft of the motor has a male screw portion. Moreover, the cylindrical rotating shaft has a female screw portion that is screw-coupled to the male screw portion. Furthermore, a pin that penetrates the male screw portion and the female screw portion in the radial direction of the male screw portion is provided. The presence of this pin prevents loosening between the male screw portion of the rotating shaft of the motor and the female screw portion of the cylindrical rotating shaft.

  The cylindrical rotating shaft passes through the processing chamber and extends into the processing chamber. In the processing chamber, a fan is fixed to the cylindrical rotating shaft. The rotation of the fan stirs the gas heated in the processing chamber. Thereby, the temperature distribution of the gas in the processing chamber becomes more uniform.

Japanese Utility Model Publication No. 6-84299 ([0008] to [0010])

  In the configuration described in Patent Document 1, due to the processing accuracy in the male screw portion and the processing accuracy in the female screw portion, variation occurs in the coaxiality between the rotation shaft of the motor and the cylindrical rotation shaft. .

  Further, the cylindrical rotating shaft is exposed to a high temperature atmosphere in the processing chamber. As a result, thermal expansion occurs on the cylindrical rotating shaft and the rotating shaft of the motor. Due to this thermal expansion or the like, the cylindrical rotating shaft may be misaligned with respect to the rotating shaft of the motor when the fan rotates. That is, when the fan rotates, the coaxiality between the cylindrical rotating shaft and the rotating shaft of the motor may be reduced. In particular, as in the configuration described in Patent Document 1, when the material of the rotating shaft of the fan is different from the material of the cylindrical rotating shaft, the thermal expansion coefficients of these materials are different. As a result, the amount of thermal expansion of the rotating shaft of the fan is different from the amount of thermal expansion of the cylindrical rotating shaft. In this case, the above-described misalignment appears remarkably.

  In view of the above circumstances, an object of the present invention is to further reduce the variation in coaxiality between a plurality of shafts for rotating a fan in a heat treatment apparatus. Another object of the present invention is to further reduce the decrease in the coaxiality between a plurality of shafts for rotating a fan in a heat treatment apparatus.

  (1) In order to solve the above-described problem, a heat treatment apparatus according to an aspect of the present invention includes a storage container, a fan, and a shaft unit. The storage container is capable of storing the object to be processed in order to process the object to be processed in a heated atmosphere. The fan is rotatable about a predetermined rotation axis in order to stir the gas in the storage container. The shaft unit is connected to the fan and transmits an output from a power source to the fan. The shaft unit includes a first shaft and a second shaft coupled to each other by taper fitting.

  According to this configuration, the first shaft and the second shaft are coupled to each other by a taper fit. Thereby, in the operation | work which couple | bonds a 1st shaft and a 2nd shaft mutually, a 1st shaft and a 2nd shaft can be aligned (alignment). That is, when the first shaft and the second shaft are coupled to each other, the first shaft and the second shaft are relatively moved so that the central axis of the first shaft and the central axis of the second shaft are more coincident with each other. Can be displaced. As a result, the influence of the processing accuracy of the first shaft and the processing accuracy of the second shaft can be suppressed. Therefore, it is possible to suppress variations in the coaxiality between the first shaft and the second shaft.

  Further, as described above, the first shaft and the second shaft are taper-fitted. Therefore, even when the first shaft and the second shaft are rotating, the effect of aligning the first shaft and the second shaft is maintained. Therefore, even when the first shaft and the second shaft rotate in a thermally expanded state under a high-temperature atmosphere, the coaxiality can be prevented from decreasing.

  Therefore, according to the present invention, in the heat treatment apparatus, the variation in the coaxiality between the plurality of shafts for rotating the fan can be reduced. Further, according to the present invention, in the heat treatment apparatus, it is possible to reduce the decrease in the coaxiality between the plurality of shafts for rotating the fan.

  (2) Preferably, a hole is formed in the first shaft. A female taper is formed on the inner periphery of the hole. A male taper portion that fits with the female taper portion is formed on the outer periphery of the second shaft.

  According to this configuration, the first shaft and the second shaft can be easily taper-fitted by fitting the male taper portion to the female taper portion.

  (3) Preferably, the said heat processing apparatus is further provided with the pressurization mechanism for pressurizing the said male taper part and the said female taper part mutually along the direction parallel to the axial direction of the said shaft unit. .

  According to this configuration, the effect of aligning the central axis of the first shaft and the central axis of the second shaft obtained by fitting the male tapered portion and the female tapered portion can be more reliably maintained.

  (4) More preferably, the pressurizing mechanism includes a groove, a pressurizing member, and a fastening member. The groove is formed on the outer periphery of the second shaft. The pressurizing member has an insertion portion inserted into the groove portion, and is disposed along the first shaft. The fastening member fastens the pressurizing member to the first shaft by pressurizing the pressurizing member in a direction parallel to the axial direction.

  According to this configuration, the pressing member is pressed in the direction parallel to the axial direction of the shaft unit by the fastening member. Thereby, the 2nd shaft couple | bonded with the pressurization member receives the force from a pressurization member, and is pressurized by the 1st shaft. Thereby, the pressurization mechanism can pressurize the male taper part of the 2nd shaft to the female taper part of the 1st shaft. By the way, in the structure of patent document 1, the rotating shaft of a fan and the cylindrical rotating shaft are couple | bonded using the pin extended in the radial direction of these rotating shafts. In such a configuration, the pin receives a large load from the rotation shaft due to relative rotation between the rotation shaft of the fan and the cylindrical rotation shaft. As a result, the pin may be damaged. On the other hand, the pressurizing mechanism does not need to use a pin that penetrates the first shaft and the second shaft in the radial direction of the main shaft. As a result, the above-described situation of pin breakage does not occur. Therefore, damage to members in the heat treatment apparatus can be reduced.

  (5) Preferably, the said heat processing apparatus is further provided with the key member which connects the said 1st shaft and the said 2nd shaft so that integral rotation is possible.

  According to this structure, it can suppress more reliably that the 1st shaft idles with respect to the 2nd shaft.

  (6) Preferably, the said storage container has an opening part for allowing the said to-be-processed object to pass through. The heat treatment apparatus further includes a heat shield member disposed around the opening of the storage container. The first shaft and the second shaft are taper-fitted at a position surrounded by the heat shield member.

  According to this structure, it can suppress that the heat | fever in a storage container is transmitted to the exterior of a storage container by providing a heat-shielding member. In this way, the heat shield member is provided to block heat transfer. Therefore, the heat shield member becomes relatively large according to the temperature of the heat to be cut off. Thus, a part of the arrangement space for arranging the heat shield member having a certain size can be utilized as the arrangement space of the tapered fitting portion between the first shaft and the second shaft. Thereby, the heat treatment apparatus can be made more compact through effective use of the arrangement space.

  According to the present invention, in the heat treatment apparatus, the variation in the coaxiality between the plurality of shafts for rotating the fan can be further reduced. Moreover, it can reduce more that the coaxiality between the several shafts for rotating a fan falls.

It is sectional drawing which shows the state which cut | disconnected a part of heat processing apparatus which concerns on embodiment of this invention, and has shown the state which looked at the heat processing apparatus from the side. It is sectional drawing which shows the state which cut | disconnected a part of heat processing apparatus, and has shown the state which looked at the heat processing apparatus from diagonally. It is an enlarged view of the periphery of the obstruction | occlusion apparatus of FIG. It is an enlarged view of the periphery of a cooling device. It is sectional drawing which follows the IV-IV line of FIG. It is an enlarged view of the periphery of a fan apparatus. It is sectional drawing which follows the VII-VII line of FIG. It is sectional drawing which follows the VIII-VIII line of FIG. It is a figure which shows the principal part of the modification of the heat processing apparatus of this invention.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. Note that the present invention can be widely applied as a heat treatment apparatus for heat treating an object to be treated.

[Schematic configuration of heat treatment equipment]
FIG. 1 is a cross-sectional view showing a state in which a part of a heat treatment apparatus 1 according to an embodiment of the present invention is cut, and shows a state where the heat treatment apparatus 1 is viewed from the side. FIG. 2 is a cross-sectional view showing a state in which a part of the heat treatment apparatus 1 is cut, and shows a state in which the heat treatment apparatus is viewed from an oblique direction. In FIG. 2, a part of the heat treatment apparatus 1 is omitted.

  With reference to FIG.1 and FIG.2, the heat processing apparatus 1 is comprised so that the surface of the to-be-processed object 100 can be heat-processed. Examples of the heat treatment include CVD (Chemical Vapor Deposition) processing, diffusion processing, annealing processing, solar cell manufacturing processing, semiconductor device manufacturing processing, and the like. In the present embodiment, the workpiece 100 is a glass substrate. For example, the workpiece 100 is formed in a rectangular shape. The heat treatment apparatus 1 forms a thin film on the surface of the object 100 by heat-treating the object 100 under an atmosphere of reactive gas. The heat treatment apparatus 1 is a horizontal heat treatment apparatus. The workpiece 100 is displaced in the horizontal direction when being taken in and out of the heat treatment apparatus 1.

  The heat treatment apparatus 1 includes a tube (storage container) 2, a heater 3, a closing device 4, a heat shield unit 5, a fan device 6, and a protective cylinder (protective member) 7.

  The tube 2 is provided for storing the workpiece 100. Moreover, the tube 2 is provided in order to heat-process the to-be-processed object 100 accommodated in the tube 2 in the heated atmosphere. In this embodiment, the tube 2 is formed using quartz. The tube 2 is formed hollow. The thickness of the tube 2 is set to about several tens of mm.

  The tube 2 has a tube main body 8 and a closing portion 9.

  The tube body 8 is formed in a cylindrical shape and extends elongated. Hereinafter, the longitudinal direction L1 of the tube body 8 may be referred to as “longitudinal direction L1”. The lower part of the tube body 8 is supported by a support base (not shown). One end of the tube body 8 has an opening 11. The opening 11 is formed in a size that allows the workpiece 100 to pass therethrough. The workpiece 100 is taken in and out of the tube 2 through the opening 11. A workpiece 100 is disposed on the lower portion of the tube body 8. For example, the workpiece 100 is inserted into the tube main body 8 from the outside of the tube main body 8 through the opening 11 while being placed on the support base 12. In the support base 12, a plurality of workpieces 100 are arranged in a state extending in the vertical direction. The other end of the tube body 8 is continuous with the closing portion 9. The closing part 9 is formed in a swelled shape in the direction away from the tube body 8 along the longitudinal direction L1. The closing part 9 closes the other end of the tube body 8. The tube 2 having the above configuration is heated by the heater 3.

  The heater 3 is provided to heat the atmosphere in the tube 2. The heater 3 is, for example, an electric heater. The heater 3 is formed in a hollow box shape as a whole and accommodates most of the tube 2. The heater 3 is supported by a support base (not shown). The heater 3 can heat the atmosphere in the tube 2 to several hundred degrees.

  The heater 3 includes an upper heater 13, a lower heater 14, an end heater 15, and a side heater 16.

  The upper heater 13 is disposed above the tube body 8 and extends horizontally. In plan view, the upper heater 13 is formed in a rectangular shape. In plan view, the upper heater 13 covers a portion of the tube 2 other than the peripheral portion of the opening 11. A lower heater 14 is disposed below the upper heater 13.

  The lower heater 14 is disposed below the tube body 8 and extends horizontally. When viewed from the bottom, the lower heater 14 is formed in a rectangular shape. In the bottom view, the lower heater 14 covers a portion of the tube 2 other than the peripheral portion of the opening 11. An end heater 15 is disposed adjacent to the lower heater 14.

  The end heater 15 is arranged side by side with the closing portion 9 of the tube 2 in the longitudinal direction L1 and extends vertically. The end heater 15 is formed in a substantially rectangular shape. The end heater 15 covers the closed portion 9 of the tube 2 from the rear side of the tube 2. A side heater 16 is disposed adjacent to the end heater 15.

  The side heater 16 is disposed adjacent to the tube body 8 and the closing portion 9 of the tube 2 and extends vertically. The side heater 16 is formed in a substantially rectangular shape and extends in a direction parallel to the longitudinal direction L1. Although not shown, a side heater similar to the side heater 16 is disposed adjacent to the tube 2. A tube 2 is disposed between the pair of side heaters. As described above, the atmosphere in the tube 2 is heated by the heater 3 having the above configuration. While the atmosphere in the tube 2 is heated, the opening 11 of the tube 2 is closed by the closing device 4.

  FIG. 3 is an enlarged view of the periphery of the occlusion device 4 of FIG. Referring to FIG. 3, the closing device 4 includes a cooling member 19, a door device 20, a first seal member 21, and a seal device 23 having a second seal member 22.

  FIG. 4 is an enlarged view of the periphery of the cooling member 19. Referring to FIG. 4, the cooling member 19 is provided to cool the first seal member 21 and the second seal member 22. By providing the cooling member 19, the first seal member 21 and the second seal member 22 are prevented from being overheated by heat from the heater 3. As a result, deterioration of the first seal member 21 and the second seal member 22 can be suppressed. The cooling member 19 is disposed adjacent to the opening 11 of the tube 2. The cooling member 19 is disposed between the tube 2 and the door device 20 in the longitudinal direction L1. The cooling member 19 has a shape in which two cylindrical members are combined, and is arranged substantially coaxially with the tube 2. The cooling member 19 is formed using a metal material. This metal material is, for example, a stainless material.

  The cooling member 19 includes an inner cylinder 24, an outer cylinder 25, a first flange 26, a second flange 27, and a cooling water channel 28.

  The inner cylinder 24 is formed in a cylindrical shape. In the present embodiment, the inner diameter of the inner cylinder 24, that is, the diameter of the inner peripheral surface of the inner cylinder 24 is set smaller than the inner diameter of the tube body 8. An outer cylinder 25 is disposed so as to surround the inner cylinder 24.

  The outer cylinder 25 is formed in a cylindrical shape and is arranged coaxially with the inner cylinder 24. In the longitudinal direction L1, the position of the outer cylinder 25 and the position of the inner cylinder 24 are aligned. The outer cylinder 25 is fixed to a support member 29 (see FIG. 1). Thereby, the cooling member 19 is supported by the support member 29. One end portion 25 a of the outer cylinder 25 and one end portion 24 a of the inner cylinder 24 are fixed to the first flange 26.

  The first flange 26 is provided as a part of the door device 20 that comes into contact with a door 36 described later. The first flange 26 is formed in an annular shape and is arranged coaxially with the inner cylinder 24 and the outer cylinder 25. The first flange 26 is fixed to the inner cylinder 24 and the outer cylinder 25 by welding or the like. Thus, the first flange 26 closes the space between the one end 24a of the inner cylinder 24 and the one end 25a of the outer cylinder 25 from one side in the longitudinal direction L1. An annular groove 26 a is formed in a portion of the first flange 26 that faces the door device 20. The groove 26 a is open to the outer peripheral surface of the first flange 26. An annular plate 30 is accommodated in the groove 26a. The plate 30 is fixed to the first flange 26 using a screw member 31 as a fixing member. A first seal member 21 is disposed adjacent to the plate 30.

  The first sealing member 21 is provided to hermetically seal between the door 36 of the door device 20 and the cooling member 19. In the present embodiment, the first seal member 21 is an O-ring formed using synthetic rubber or the like, and has elasticity and flexibility. The first seal member 21 is formed in an annular shape. The first seal member 21 is fitted in the groove 26 a of the first flange 26, and is positioned between the first flange 26 and the plate 30. Thereby, the first seal member 21 is held by the first flange 26. A second flange 27 is disposed at a position separated from the first flange 26 in the longitudinal direction L1.

  The second flange 27 is provided as a portion adjacent to the tube 2. The second flange 27 is formed in an annular shape and is arranged coaxially with the inner cylinder 24 and the outer cylinder 25. The second flange 27 has one end surface 27a, the other end surface 27b, and a groove portion 27c.

  The one end surface 27a is fixed to the inner cylinder 24 and the outer cylinder 25 by welding or the like. Thus, the second flange 27 closes the space between the other end 24b of the inner cylinder 24 and the other end 25b of the outer cylinder 25 from the other side in the longitudinal direction L1. A part of the second flange 27 is arranged so as to protrude outward in the radial direction of the cooling member 19 with respect to the tube 2. That is, the outer diameter of the second flange 27 is larger than the outer diameter of the tube body 8. An annular groove 27 c is formed on the other end surface 27 b of the second flange 27 facing the tube 2. The groove 27 c is formed in the inner peripheral portion of the second flange 27. A receiving member 32 is disposed in the groove 27c.

  FIG. 5 is a cross-sectional view taken along line VV in FIG. With reference to FIGS. 4 and 5, the receiving member 32 is provided as a member interposed between the second flange 27 and the tube 2. Thereby, the 2nd flange 27 and the tube 2 are prevented from contacting directly. A plurality of receiving members 32 are provided. The plurality of receiving members 32 are arranged at equal intervals in the circumferential direction of the second flange 27. A gap CL1 is formed between the adjacent receiving members 32 and 32. The surface of each receiving member 32 is formed of a material for reducing frictional resistance. An example of such a material is a fluororesin material such as PTFE (PolyTetraFluoroEthylene).

  Each receiving member 32 is an arc-shaped member formed using a plate member having a thickness of about several millimeters. In FIG. 5, some of the receiving members 32 among the plurality of receiving members 32 are illustrated. Each receiving member 32 is fixed to the groove 27c by using a screw member 33 as a fixing member. Each receiving member 32 protrudes from the second flange 27 toward the tube 2 and is in contact with one end surface 8 a of the tube main body 8. With reference to FIG. 4, a cooling water passage 28 is formed by the second flange 27, the first flange 26, the inner cylinder 24 and the outer cylinder 25.

  The cooling water channel 28 is provided as a cylindrical water channel. The cooling water passage 28 is connected to a heat exchanger (not shown). The cooling water passage 28 is configured such that the cooling water cooled by the heat exchanger passes therethrough. As a result, the first seal member 21 and the second seal member 22 disposed adjacent to the cooling water channel 28 are cooled.

  The sealing device 23 having the second sealing member 22 is provided to seal between the tube 2 and the cooling member 19. The sealing device 23 is disposed so as to surround the opening 11 of the tube 2. The seal device 23 includes a second seal member 22 and a seal holding member 35.

  The second seal member 22 is provided to hermetically seal between the cooling member 19 and the tube 2. In the present embodiment, the second seal member 22 has the same configuration as the first seal member 21. That is, the second seal member 22 is an O-ring formed using synthetic rubber or the like, and has elasticity and flexibility. The second seal member 22 is formed in an annular shape. The second seal member 22 is fitted on the outer peripheral surface of the opening 11 of the tube body 8. The second seal member 22 is disposed adjacent to the one end surface 8 a of the tube body 8. The second seal member 22 is in contact with the other end surface 27 b of the second flange 27. As a result, the second seal member 22 closes the space between the opening 11 of the tube body 8 and the second flange 27 from the outside of the tube body 8. The second seal member 22 is held by a seal holding member 35.

  The seal holding member 35 is formed in an annular shape and is fixed to the second flange 27. The inner peripheral portion of the seal holding member 35 pressurizes the second seal member 22 toward the tube body 8 side. The door device 20 is disposed at a position separated from the sealing device 23 having the above-described configuration in the longitudinal direction L1.

  With reference to FIGS. 1 and 3, the door device 20 includes a door 36 and a door support device 37.

  The door 36 is provided to close the inner space of the first flange 26 of the cooling member 19 from one side in the longitudinal direction L1. In other words, the door 36 is provided to close the opening 11 of the tube 2 from one side in the longitudinal direction L1. The door 36 is formed using a metal plate, for example. In the present embodiment, the door 36 is formed in a disk shape. The outer peripheral portion 36 a of the door 36 is configured to be able to contact the first flange 26 of the cooling member 19. When the outer peripheral portion 36 a of the door 36 contacts the first flange 26, the space between the door 36 and the first flange 26 is hermetically sealed by the first seal member 21. The door 36 is supported by a door support device 37. The door support device 37 is provided to support the door 36 so as to be displaceable.

  The door support device 37 includes a support column 38 and a drive device 39.

  The support column 38 is provided as a member extending in the vertical direction Z1 (vertical direction). The column 38 is fixed to the door 36. The column 38 is connected to the drive device 39.

  The drive device 39 is provided to displace the support column 38 and the door 36. The drive device 39 is configured to be able to displace the support column 38 in the longitudinal direction L1. The drive device 39 is configured to be able to displace the column 38 in a direction orthogonal to the longitudinal direction L1. Accordingly, the drive device 39 can displace the door 36 so as to open the space surrounded by the first flange 26. That is, the drive device 39 can open and close the door 36. With the door 36 open, the workpiece 100 can be taken in and out of the tube 2. The door 36 holds the heat shield 5.

  The heat shield 5 is provided to prevent heat from the heater 3 from being transmitted to the second seal member 22, the cooling member 19, the first seal member 21, the door 36, and the like. The heat shield 5 is disposed around the opening 11 of the tube 2.

  With reference to FIG. 3, the heat shield 5 includes stays 41 and 42 and a heat shield member 43.

  The stays 41 and 42 are provided to support the heat shield member 43. Each stay 41, 42 is fixed to the door 36, and extends from the door 36 to the tube 2 side along the longitudinal direction L1. Each stay 41, 42 has a plurality of recesses 44 arranged in the longitudinal direction L1. The recess 44 is open upward, and the heat shield member 43 can be fitted into the recess 44.

  The heat shield member 43 is provided to form a thermal barrier. One or more heat shielding members 43 are provided. In the present embodiment, seven heat shield members 43 are provided. Each heat shield member 43 is formed in a disk shape. The plurality of heat shield members 43 are arranged apart from each other in the longitudinal direction L1. Each heat shield member 43 has a plurality of through holes. Corresponding stays 41 and 42 are inserted into these through holes. Further, the peripheral portions of these through holes are fitted into the recesses 44. Thereby, each heat shield member 43 is positioned in the longitudinal direction L1. Each heat shield member 43 is detachably fitted in the recess 44. Thereby, the position of each heat shield member 43 in the longitudinal direction L1 can be easily changed. Further, the number of the heat shield members 43 attached to the stays 41 and 42 can be easily changed. As a result, the degree to which the heat shield 5 blocks heat can be easily adjusted. A sub-heater 45 is disposed in the heat shield 5. The sub-heater 45 has a heating element and is configured to be able to heat the atmosphere in the tube 2.

  The sub-heater 45 has a pair of first portions 45a and 45a and a second portion 45b.

  Each of the first portions 45a and 45a is provided as a portion extending along the longitudinal direction L1. Each first portion 45 a, 45 a passes through a through hole formed in the door 36 and also passes through a through hole formed in each heat shield member 43. A second portion 45b is connected to the tip of each first portion 45a, 45a. The second portion 45b extends in the vertical direction Z1. The second portion 45 b is disposed on the back side (one side in the longitudinal direction L1) of the tube 2 with respect to each heat shield member 43. The second portion 45b has a heating element. The heating element of the second portion 45b is configured to generate heat when, for example, the temperature around the fan device 6 is lower than a predetermined value. The fan device 6 is disposed at a position adjacent to the sub-heater 45 and the heat shield 5 having the above-described configuration.

  The fan device 6 is supported by the door 36 and can be displaced together with the door 36. The fan device 6 is provided to generate an airflow A1 in the tube 2.

  The fan device 6 includes an electric motor (power source) 46, a transmission device 47, a shaft unit 48, a fan 49, and a bearing unit 50.

  The electric motor 46 is supported by the support column 38, for example. The output of the electric motor 46 is transmitted to the shaft unit 48 via the transmission device 47.

  The transmission device 47 is, for example, a pulley mechanism. The transmission device 47 includes a first pulley 51, a second pulley 52, and a belt 53. The first pulley 51 is connected to the output shaft of the electric motor 46 so as to be integrally rotatable. The second pulley 52 is coupled to the shaft unit 48 so as to be integrally rotatable. The belt 53 is wound around the first pulley 51 and the second pulley 52.

  The shaft unit 48 is provided as a rotation axis of the fan 49, and has a rotation axis S1. The rotation axis S <b> 1 is also the central axis of the shaft unit 48. The shaft unit 48 is connected to the fan 49, and transmits the output from the electric motor 46 to the fan 49. The shaft unit 48 passes through a through hole 36 b formed in the door 36, and extends from the outside of the door 36 into the tube 2. A second pulley 52 is fixed to one end 48 a of the shaft unit 48. The shaft unit 48 passes through the through holes 43 a formed in the respective heat shield members 43. A fan 49 is coaxially connected to the other end 48 b of the shaft unit 48.

  The fan 49 is configured to agitate the gas in the tube 2 by generating an airflow A1. Thereby, the concentration distribution of various gases in the tube 2 becomes more uniform, and the temperature in the tube 2 becomes more uniform. The fan 49 is disposed in the tube 2 and is rotatable about the rotation axis S1. The fan 49 is arranged so that each heat shield member 43 is arranged between the fan 49 and the door 36.

  The fan 49 has a boss portion 54 and a plurality of blades 55.

  The boss portion 54 is formed in a cylindrical shape and is fitted to the other end portion 48 b of the shaft unit 48. The plurality of blades 55 are fixed to the outer peripheral portion of the boss portion 54 and extend radially from the boss portion 54. With the above configuration, when the fan 49 rotates, an air flow A <b> 1 is generated from the fan 49 outward in the radial direction of the fan 49. The shaft unit 48 for rotating the fan 49 is rotatably supported by the bearing unit 50. The bearing unit 50 is disposed outside the door 36. That is, the bearing unit 50 is disposed on the one end surface 36 c side of the door 36.

  The bearing unit 50 includes a casing 56 and a flange portion 57.

  The casing 56 is formed in a cylindrical shape. The casing 56 is penetrated by the shaft unit 48. A bearing (not shown) is disposed in the casing 56. This bearing rotatably supports the shaft unit 48. A flange portion 57 is fixed to one end portion of the casing 56.

  The flange portion 57 is fixed to the seat portion 59 by a screw member 58 as a fixing member. The seat portion 59 is a cylindrical member fixed to the one end surface 36 c of the door 36. The seat portion 59 is penetrated by the shaft unit 48.

  With reference to FIGS. 3 and 4, in the fan device 6 having the above-described configuration, the fan 49 generates an airflow A <b> 1 that is directed radially outward of the fan 49. The gas in the airflow A1 is heated by the heater 3 and has a high temperature. For this reason, it is preferable that the heat from the airflow A1 is not transmitted to the second seal member 22 as much as possible. In the gas in the airflow A1, fine powder generated by a chemical reaction or the like in the tube 2 is present. It is preferable that the fine powder is prevented from colliding with the tube 2 with a strong momentum on the airflow A1. Therefore, a protective cylinder 7 is installed in the heat treatment apparatus 1.

  The protective cylinder 7 is provided to suppress heat from the air flow A <b> 1 generated by the fan 49 from being transmitted to the second seal member 22. The protective cylinder 7 is provided to prevent the airflow A1 from being applied to the tube 2 vigorously.

  The protective cylinder 7 is formed in a cylindrical shape as a whole. The protective cylinder 7 is a thin plate member having a thickness of several mm. The protective cylinder 7 is arranged around the opening 11 of the tube 2 and extends in parallel with the longitudinal direction L1 of the tube 2. One end portion 7 a of the protection cylinder 7 is fixed to the inner peripheral portion of the first flange 26 of the cooling member 19 by using a screw member 63 as a fixing member. The intermediate part 7 b of the protective cylinder 7 is fixed to the inner peripheral part of the second flange 27 of the cooling member 19 using a screw member 64 as a fixing member. The other end portion 7 c of the protective cylinder 7 is disposed in the tube 2 and is spaced apart from the tube body 8.

  The protective cylinder 7 has a gas supply port 61 and an exhaust port 62. The gas supply port 61 is connected to a gas supply pipe (not shown), and can supply a gas used for heat treatment of the workpiece 100 into the tube 2. The gas supply pipe extends so as to penetrate the cooling member 19. The exhaust port 62 is connected to an exhaust pipe (not shown), and is configured to suck the gas in the tube 2. The exhaust pipe extends through the cooling member 19 and is connected to a suction device such as a vacuum pump.

  The protective cylinder 7 surrounds the heat shield 5 and the sub heater 45. The protective cylinder 7 surrounds a part of the shaft unit 48 and the fan 49. Further, the protective cylinder 7 is arranged side by side with the second seal member 22 in the radial direction of the protective cylinder 7. With the above configuration, the airflow A1 from the fan 49 hits the protective cylinder 7, then changes direction in the direction parallel to the longitudinal direction L1 of the tube 2 and proceeds to the back side of the tube 2 (the closed portion 9 side).

[Main operations of heat treatment equipment]
With reference to FIG. 1, with the above configuration, when the heat treatment apparatus 1 heat-treats the workpiece 100, first, the door 36 is opened by the operation of the drive device 39. In this state, the workpiece 100 is stored in the tube 2. Next, the door 36 is closed by the operation of the driving device 39. That is, the door 36 blocks the space in the tube 2 from the space outside the heat treatment apparatus 1 by closing the opening of the cooling member 19.

  Next, when the air in the tube 2 is sucked through the exhaust port 62, the pressure in the tube 2 becomes negative. A reactive gas is supplied into the tube 2 through the gas supply port 61. In this state, the atmosphere in the tube 2 is heated by the heat from the heater 3. The fan 49 is rotated by the output of the electric motor 46. Thereby, airflow A1 arises in the tube 2, and the atmosphere in the tube 2 is stirred. In this state, the element adheres to the surface of the workpiece 100 and is diffused. At this time, the cooling water passes through the cooling water passage 28. Thereby, overheating of the 1st seal member 21 and the 2nd seal member 22 (refer to Drawing 4) is controlled. Further, the heat from the heater 3 is suppressed by the heat shield 5 from being transmitted to the seal members 21 and 22 and the door 36.

  After the thin film is formed on the workpiece 100, heating by the heater 3 is stopped. Thereafter, the door 36 is opened by the operation of the driving device 39. In this state, the object to be processed 100 in the tube 2 is taken out from the tube 2.

[Detailed configuration of fan unit shaft unit]
Next, a more detailed configuration of the shaft unit 48 of the fan device 6 will be described. FIG. 6 is an enlarged view of the periphery of the fan device 6. 3 and 6, the shaft unit 48 includes a first shaft 71, a second shaft 72, a third shaft 73, and a pressure mechanism 74.

  A third shaft 73, a first shaft 71, and a second shaft 72 are arranged in this order along the longitudinal direction L1. These shafts 73, 71, 72 are arranged coaxially. The third shaft 73 and the first shaft 71 are formed using a metal material such as a stainless material. On the other hand, the second shaft 72 is formed using a carbon fiber reinforced resin material, quartz, or the like. Thus, the first shaft 71 and the second shaft 72 are formed using different materials.

  The third shaft 73 is disposed so as to penetrate the through hole 36 b of the door 36. A third shaft 73 of the shaft unit 48 passes through the casing 56 of the bearing unit 50. One end of the third shaft 73 constitutes one end 48 a of the shaft unit 48. The other end portion of the third shaft 73 is disposed in the through hole of the seat portion 59. The other end of the third shaft 73 is formed in a bowl shape. Thereby, a flange portion 73 a is formed at the other end portion of the third shaft 73.

  A plurality of through holes 73b are formed in the flange portion 73a. The plurality of through holes 73 b are arranged at equal intervals in the circumferential direction C1 of the shaft unit 48. Each through-hole 73b is penetrated by the screw member 75 as a fixing member. The flange portion 73 a is fixed to the first shaft 71 by a screw member 75.

  The first shaft 71 is a shaft to which the output of the electric motor 46 is input. In the present embodiment, the first shaft 71 and the third shaft 73 are configured by separate members, but this need not be the case. For example, the first shaft 71 and the third shaft 73 may be integrally formed using a single material.

  The first shaft 71 is formed in a cylindrical shape. The first shaft 71 extends from the through hole 36b of the door 36 toward the tube 2 along the longitudinal direction L1. The first shaft 71 is surrounded by the heat shield member 43.

  The first shaft 71 has a screw hole 71a, a hole 71b, and a screw hole 71c.

  The screw hole 71 a is formed at one end of the first shaft 71. A plurality of screw holes 71a are provided. Each screw hole 71a is screw-coupled to the corresponding screw member 75. Thereby, the 1st shaft 71 is connected with the 3rd shaft 73 so that power transmission is possible.

  The hole 71b is formed to extend in a direction parallel to the axial direction L2 of the shaft unit 48. In the following, the axial direction L2 of the shaft unit 48 may be simply referred to as “axial direction L2”. Further, the circumferential direction C1 of the shaft unit 48 may be simply referred to as “circumferential direction C1”. Further, the radial direction R1 of the shaft unit 48 may be simply referred to as “radial direction R1”.

  The hole 71b is formed in at least a part of the first shaft 71 in the axial direction L2. The hole 71 b is open to the one end surface 71 d of the first shaft 71. A female taper portion 76 is formed on the inner peripheral portion of the hole 71b.

  The female taper portion 76 is provided in order to couple with a male taper portion 80 described later of the first shaft 71 by taper fitting. In the present embodiment, “taper fitting” means that a shaft-shaped male member formed in a tapered shape and a hole-shaped female member formed in a tapered shape are fitted together. In this embodiment, the female taper part 76 is formed in at least a part of the hole 71b in the axial direction L2. The female taper portion 76 is formed in a truncated cone shape. The female taper portion 76 has a continuously increasing diameter as it advances toward the second shaft 72 along a direction parallel to the axial direction L2.

  7 is a cross-sectional view taken along line VII-VII in FIG. As shown in FIGS. 3, 6, and 7, a key hole 77 is formed in the outer peripheral portion of the female taper portion 76. The key hole 77 is formed for inserting the key member 78. The key hole 77 extends between the inner peripheral surface of the first shaft 71 and the outer peripheral surface. A plate-like key member 78 is fitted in the key hole 77.

  The screw hole 71c is provided as a portion to which the fastening member 79 is fixed. The screw hole 71c is formed in one end surface 71d of the first shaft 71 and extends in a direction parallel to the axial direction L2. A plurality (for example, six) of screw holes 71c are provided, and are arranged at equal intervals in the circumferential direction C1. The 1st shaft 71 which has the above-mentioned composition is connected with the 2nd shaft 72 so that integral rotation is possible.

  The second shaft 72 is provided to transmit the output of the electric motor 46 to the fan 49. The second shaft 72 extends from the first shaft 71 toward the tube 2 along a direction parallel to the axial direction L2. The second shaft 72 passes through each through hole 43 a of the plurality of heat shield members 43.

  The second shaft 72 has a male taper portion 80, a second shaft main body 81, and a support portion 82.

  The male taper portion 80 is provided for taper fitting with the female taper portion 76. The male taper portion 80 is formed on the outer peripheral portion of the second shaft 72. The male taper part 80 is formed in the one end part and intermediate part of the 1st shaft 71, and is extended in the axial direction L2. The male taper portion 80 is formed in a truncated cone shape. The male taper portion 80 has a continuously increasing diameter as it approaches the fan 49 along the axial direction L2.

  In the present embodiment, the gradient of the outer peripheral surface of the male tapered portion 80 is set to be the same as the gradient of the inner peripheral surface of the female tapered portion 76. In other words, in this embodiment, the angle of the generatrix of the male taper part 80 with respect to the rotation axis S1 and the angle of the generatrix of the female taper part 76 with respect to the rotation axis S1 are set to be the same. As a result, the male taper portion 80 is in surface contact with the female taper portion 76. In the present embodiment, the entire region of the male tapered portion 80 is disposed in the female tapered portion 76. Further, the first shaft 71 and the second shaft 72 are coupled to each other by taper fitting at a position surrounded by the heat shield member 43.

  A key groove 83 is formed on the outer peripheral portion of the male taper portion 80. The key groove 83 is formed for inserting the key member 78. The key groove 83 faces the key hole 77 in the radial direction R1. A key member 78 is fitted in the key groove 83. The key member 78 is fitted in the key hole 77 and the key groove 83. Thereby, the key member 78 has connected the male taper part 80 and the female taper part 76 so that integral rotation is possible.

  3 and 6, the second shaft main body 81 is formed in a columnar shape. One end portion of the second shaft main body 81 is disposed adjacent to the female taper portion 76. The other end portion of the second shaft main body 81 is disposed at a position on the back side of the tube 2 with respect to the position of the heat shield member 43. The other end constitutes the other end 48 b of the shaft unit 48.

  The second shaft main body 81 has a groove portion 84 and a support portion 82.

  The groove portion 84 is provided as a portion that receives a load from a pressure member 86 described later. This load is a load for generating a load F <b> 1 that acts on the female taper portion 76 from the male taper portion 80. The groove portion 84 is formed on the outer peripheral portion of the second shaft main body 81. The groove portion 84 is adjacent to the root portion (the portion having the largest diameter) of the male taper portion 80. The groove portion 84 is formed in at least a part of the second shaft 72 in the circumferential direction C1. In this embodiment, the groove part 84 is formed over the whole region of the circumferential direction C1. The groove portion 84 is disposed outside the first shaft 71 and is exposed from the first shaft 71. A support portion 82 is disposed at a position separated from the groove portion 84 in the axial direction L2.

  The support portion 82 is provided as a portion that supports the fan 49 and is connected to the fan 49 so as to be integrally rotatable. The support portion 82 is disposed at the other end portion of the second shaft 72. That is, the support portion 82 is disposed at the other end portion 48 b of the shaft unit 48. The support portion 82 is fitted with the boss portion 54 of the fan 49. The support portion 82 is formed with a male screw portion, and a nut 85 is screwed to the male screw portion. Thereby, the support part 82 and the fan 49 are mutually fixed.

  The second shaft 72 having the above configuration is provided with a pressurizing mechanism 74. The pressurizing mechanism 74 is provided in order to pressurize the male taper part 80 and the female taper part 76 along a direction parallel to the axial direction L2.

  The pressurizing mechanism 74 includes the aforementioned groove portion 84, a pressurizing member 86, and a fastening member 79.

  8 is a cross-sectional view taken along line VIII-VIII in FIG. In addition, the figure cut | disconnected along the cutting line shown in FIG. 8 is shown by FIG. As shown in FIGS. 6 and 8, the pressing member 86 is provided to press the outer peripheral surface of the male tapered portion 80 to the inner peripheral surface of the female tapered portion 76. More specifically, the pressure member 86 is provided in order to apply a load F <b> 1 that acts on the female taper portion 76 from the male taper portion 80. The pressure member 86 is disposed along the first shaft 71. In the present embodiment, the pressurizing member 86 is formed in an annular shape as a whole.

  The pressing member 86 is formed in an annular shape by combining the first piece portion 87 and the second piece portion 88 and is attached to the groove 84.

  The first piece 87 is formed of a semicircular plate member. Screw holes 87a and 87a are formed in the pair of end portions in the circumferential direction C1 of the first piece 87, respectively. Each screw hole 87a, 87a extends in a direction orthogonal to the thickness direction of the first piece 87.

  The second piece 88 is formed of a semicircular plate member. In the second piece 88, through holes 88a and 88a are formed in a pair of ends in the circumferential direction C1, respectively. Each through-hole 88a, 88a is linearly aligned with the corresponding screw hole 87a, 87a. Screw members 89 and 89 as fixing members are inserted into the through holes 88a and 88a. Each screw member 89, 89 is screwed to the corresponding screw hole 87a, 87a. The heads of the screw members 89 and 89 are received by step portions formed in the through holes 88a and 88a. Thereby, the 1st piece part 87 and the 2nd piece part 88 are couple | bonded together, and the pressurization member 86 is comprised.

  The pressing member 86 has a main body 91 and an insertion portion 92.

  The main body 91 is formed of an annular plate member. The main body 91 surrounds the groove portion 84 of the second shaft 72 and is not in contact with the groove 84. The main body 91 is disposed adjacent to one end surface 71 d of the first shaft 71. A through hole 91 a is formed in the main body 91. The through hole 91a is provided as a hole through which the fastening member 79 passes. A plurality of (for example, six) through holes 91a are provided, and are arranged at equal intervals in the circumferential direction C1. Each through hole 91a is aligned with the corresponding screw hole 71c of the first shaft 71 in a direction parallel to the axial direction L2. An insertion portion 92 is provided on the inner peripheral portion of the main body 91.

  The insertion portion 92 is provided as a portion that fits into the groove portion 84 of the second shaft 72. In the present embodiment, the insertion portion 92 is formed in an annular shape. In the present embodiment, the length (thickness) of the insertion portion 92 is set to be smaller than the length (thickness) of the main body 91 with respect to the axial direction L2. The insertion portion 92 is inserted into the groove 84.

  The insertion portion 92 is in contact with one side surface 84 a of the groove portion 84. In this state, the main body 91 is disposed with a gap in the axial direction L2 from the first shaft 71, and is not in contact with the first shaft 71. The pressure member 86 having the above-described configuration is fastened to the first shaft 71 by a fastening member 79.

  The fastening member 79 is configured to fasten the pressing member 86 to the first shaft 71 by pressing the pressing member 86 in a direction parallel to the axial direction L2. In this embodiment, the fastening member 79 is formed using a screw member. A plurality of fastening members 79 are provided. The number of fastening members 79 is the same as the number of through holes 91 a of the insertion portion 92. Each fastening member 79 is inserted into the corresponding through hole 91a and screwed to the corresponding screw hole 71c. By this screw connection, the axial force of the fastening member 79 acts between the pressure member 86 and the first shaft 71 in a direction parallel to the axial direction L2. With this axial force, the pressing member 86 is fastened to the end of the first shaft 71 on the one end surface 71d side.

  With the above fastening, the insertion portion 92 of the pressure member 86 presses the groove portion 84 of the first shaft 71 toward the first shaft 71 along the direction parallel to the axial direction L2. By this pressurization, the male taper portion 80 applies a load F1 to the female taper portion 76. By the action of the load F1, the male taper portion 80 and the female taper portion 76 are pressed against each other while being in close contact with each other. As a result, the coaxiality between the second shaft 72 and the first shaft 71 is increased. Further, the insertion portion 92 of the pressure member 86 receives the groove portion 84 of the second shaft 72. Thereby, the second shaft 72 is restricted from coming off the first shaft 71.

  As described above, according to the heat treatment apparatus 1, the first shaft 71 and the second shaft 72 are coupled to each other by a taper fit. Thus, the first shaft 71 and the second shaft 72 can be aligned during the operation of coupling the first shaft 71 and the second shaft 72 to each other. That is, when the first shaft 71 and the second shaft 72 are coupled to each other, the first shaft 71 and the second shaft 72 are arranged so that the central axis of the first shaft 71 and the central axis of the second shaft 72 are more aligned. The two shafts 72 can be displaced relative to each other. As a result, the influence of the processing accuracy of the first shaft 71 and the processing accuracy of the second shaft 72 can be suppressed. Therefore, it is possible to suppress variations in the coaxiality between the first shaft 71 and the second shaft.

  Further, as described above, the first shaft 71 and the second shaft 72 are taper-fitted. Therefore, even when the first shaft 71 and the second shaft 72 are rotating, the effect of aligning the first shaft 71 and the second shaft 72 is maintained. Therefore, even when the first shaft 71 and the second shaft 72 rotate in a thermally expanded state in a high-temperature atmosphere, the coaxiality can be prevented from decreasing. In addition, even when the first shaft 71 and the second shaft 72 are formed of different materials, this effect can be exhibited.

  Therefore, in the heat treatment apparatus 1, the variation in the coaxiality between the plurality of shafts 71 and 72 for rotating the fan 49 can be reduced. Moreover, in the heat processing apparatus 1, it can reduce more that the coaxiality between the some shafts 71 and 72 for rotating the fan 49 falls.

  Further, according to the heat treatment apparatus 1, the first shaft 71 has the hole 71 b. A female taper portion 76 is formed on the inner peripheral portion of the hole 71b. A male taper portion 80 that fits with the female taper portion 76 is formed on the outer peripheral portion of the second shaft 72. With such a configuration, the first shaft 71 and the second shaft 72 can be easily taper-fitted by fitting the male taper portion 80 to the female taper portion 76.

  Further, according to the heat treatment apparatus 1, the pressurizing mechanism 74 is provided. Thereby, the effect of aligning the central axis of the first shaft 71 and the central axis of the second shaft 72 obtained by fitting the male tapered portion 80 and the female tapered portion 76 can be more reliably maintained.

  Further, according to the heat treatment apparatus 1, the pressurizing member 86 of the pressurizing mechanism 74 is pressurized in a direction parallel to the axial direction L <b> 2 by the fastening member 79 and fastened to the first shaft 71. As a result, the second shaft 72 coupled to the pressure member 86 receives pressure from the pressure member 86 and is pressurized to the first shaft 71. Thereby, the pressurizing mechanism 74 can pressurize the male tapered portion 80 of the second shaft 72 to the female tapered portion 76 of the first shaft 71.

  By the way, in the structure of patent document 1 mentioned above, the rotating shaft of a fan and the cylindrical rotating shaft are couple | bonded using the pin extended in the radial direction of these rotating shafts. In such a configuration, the pin receives a large load from the rotation shaft due to relative rotation between the rotation shaft of the fan and the cylindrical rotation shaft. As a result, the pin may be damaged.

  On the other hand, the pressurizing mechanism 74 does not need to use a pin that penetrates the first shaft 71 and the second shaft 72 in the radial direction R1 of the shaft unit 48. As a result, the above-described situation of pin breakage does not occur. Therefore, damage to members in the heat treatment apparatus 1 can be reduced.

  Moreover, according to the heat processing apparatus 1, the key member 78 which connects the 1st shaft 71 and the 2nd shaft 72 so that integral rotation is possible is provided. Thereby, it can suppress more reliably that the 1st shaft 71 idles with respect to the 2nd shaft 72. FIG.

  Further, according to the heat treatment apparatus 1, the heat shield member 43 is provided. Thereby, the heat in the tube 2 can be prevented from being transmitted to the outside of the tube 2. Thus, the heat shield member 43 is provided to block heat transfer. Therefore, the heat shield member 43 becomes relatively large according to the temperature of the heat to be cut off. In this way, a part of the arrangement space for arranging the heat shield member 43 having a certain size can be utilized as the arrangement space of the tapered fitting portion between the first shaft 71 and the second shaft 72. Thereby, the heat processing apparatus 1 can be made more compact through effective use of the arrangement space.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the above-mentioned embodiment. The present invention can be variously modified as long as it is described in the claims.

  (1) In the above embodiment, the first shaft 71 is a member to which an output from the electric motor 46 is input, and the second shaft 72 is a member that transmits the output to the fan 49 as an example. Explained. However, this need not be the case. For example, as shown in FIG. 9, the second shaft 72 </ b> A is a member that receives an output from the electric motor 46, and the first shaft 71 </ b> A is a member that transmits the output to the fan 49. Good. In addition, in the modification shown in FIG. 9, the same code | symbol is attached | subjected to a structure similar to embodiment shown in FIGS. 1-8, and description is abbreviate | omitted. The second shaft 72A is supported by the bearing unit 50 and connected to the second pulley 52 so as to be integrally rotatable. The first shaft 71 </ b> A is connected to the fan 49 so as to be rotatable together.

  (2) In the above embodiment, the first shaft 71 is formed using metal, and the second shaft 72 is formed using carbon fiber. However, this need not be the case. The material of each of the first shaft 71 and the second shaft 72 is not particularly limited.

  (3) In the above-described embodiment, the thermal expansion coefficient of the first shaft 71 and the thermal expansion of the second shaft are not particularly mentioned. However, the thermal expansion coefficient of the first shaft 71 and the thermal expansion of the second shaft may be defined. For example, the thermal expansion coefficient of the first shaft 71 may be set larger than the thermal expansion coefficient of the second shaft 72. According to this configuration, when the first shaft 71 and the second shaft 72 are thermally expanded, the thermal expansion amount of the female tapered portion 76 of the first shaft 71 is larger than the thermal expansion amount of the male tapered portion 80 of the second shaft 72. growing. Thereby, in the high temperature atmosphere, it is suppressed more reliably that the female taper part 76 contacts the male taper part 80 with an excessively large force. Thereby, it can suppress more reliably that damage arises in the male taper part 80 and the female taper part 76. FIG.

  (4) In the said embodiment, the 1st sealing member 21 and the 2nd sealing member 22 demonstrated each as an example the form which is an O-ring. However, this need not be the case. The first seal member 21 and the second seal member 22 may be solid seal members other than the O-ring.

  (5) In the said embodiment, the fastening member 79 demonstrated to the example the form which is a screw member. However, this need not be the case. The fastening member 79 may be, for example, a member that sandwiches a part of the first shaft 71 and a part of the second shaft 72 in a direction parallel to the axial direction L2.

  (6) In the said embodiment, the 2nd shaft main body 81 and the male taper part 80 demonstrated to the example the form formed integrally using a single material. However, this need not be the case. For example, the 2nd shaft main body 81 and the male taper part 80 may be comprised by another member, and these members may be fixed using a screw member etc.

  (7) In the said embodiment, the pressurization member 86 demonstrated the form which is annular | circular shaped as an example. However, this need not be the case. The pressurizing member 86 may be, for example, an arc shape, a rectangular plate shape, or another shape.

  The present invention can be widely applied as a heat treatment apparatus for processing an object to be processed in a heated atmosphere.

1 Heat treatment device 2 Tube (storage container)
11 Opening 43 Heat-shielding member 46 Electric motor (power source)
48 shaft unit 49 fan 71, 71A first shaft 71b hole 72, 72A second shaft 74 pressure mechanism 76 female taper portion 78 key member 79 fastening member 80 male taper portion 84 groove portion 86 pressure member 92 insertion portion 100 processed Item L2 Axial direction S1 Rotation axis

Claims (6)

A storage container capable of storing the object to be processed in order to process the object to be processed in a heated atmosphere;
A fan capable of rotating around a predetermined rotation axis in order to stir the gas in the storage container;
A shaft unit coupled to the fan and transmitting an output from a power source to the fan,
The heat treatment apparatus, wherein the shaft unit includes a first shaft and a second shaft coupled to each other by taper fitting. The heat treatment apparatus according to claim 1,
A hole is formed in the first shaft,
A female taper is formed on the inner periphery of the hole,
A heat treatment apparatus, wherein a male taper portion that fits into the female taper portion is formed on an outer peripheral portion of the second shaft. The heat treatment apparatus according to claim 2,
A heat treatment apparatus, further comprising a pressurizing mechanism for pressurizing the male taper portion and the female taper portion along a direction parallel to an axial direction of the shaft unit. The heat treatment apparatus according to claim 3,
The pressure mechanism is
A groove formed on the outer periphery of the second shaft;
A pressurizing member having an insertion part inserted into the groove part and arranged along the first shaft;
A fastening member that fastens the pressure member to the first shaft by pressing the pressure member in a direction parallel to the axial direction;
The heat processing apparatus characterized by including. The heat treatment apparatus according to any one of claims 1 to 4,
A heat treatment apparatus, further comprising a key member that connects the first shaft and the second shaft so as to be integrally rotatable. The heat treatment apparatus according to any one of claims 1 to 5,
The storage container has an opening for allowing the workpiece to pass through,
The heat treatment apparatus further includes a heat shield member disposed around the opening of the storage container,
The heat treatment apparatus, wherein the first shaft and the second shaft are taper-fitted at a position surrounded by the heat shield member.

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