JP2013190298A - Sample reading apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten reading time of a sample which is an object to be inspected.SOLUTION: A biochip reading apparatus 10 includes: an excitation light source 12 having a substrate in which a plurality of surface-emitting type semiconductor laser elements arrayed in m rows×n columns are formed; driving means for driving the surface-emitting type semiconductor laser elements; a stage 18 for supporting a biochip BC in which a plurality of samples including a fluorescent label emitting fluorescence when excitation light is emitted to the fluorescent label are planarly arranged; optical systems 14 and 16 for making the biochip emit laser light emitted from the surface-emitting type semiconductor laser elements as the excitation light; and a light-receiving element 24 such as a CCD for converting fluorescence emitted from the sample into an electrical signal.

Description

  The present invention relates to a sample reading device.

  A biochip is used when performing biological analysis of genes and the like. A biochip is obtained by immobilizing a large number of biomolecules such as DNA and protein, and samples (samples) such as cells having these on a substrate, and is called a DNA chip, a protein chip, a cell chip, and the like. A typical DNA chip (gene chip) in gene analysis produces several thousand to several tens of thousands of probe DNA (single strand) on a substrate and labels the DNA that binds to the probe DNA with a fluorescent dye or the like. . By irradiating this DNA chip with excitation light, the fluorescence pattern emitted from the fluorescent dye is read, and the DNA is analyzed.

  A biochip reader using a laser beam as a light source is known as excitation light for exciting a fluorescent label on the biochip. In such a biochip reader, a laser beam emitted from a light source is irradiated to a predetermined cell position on the biochip via an optical system, and fluorescence emitted from the biochip is collected via an optical system to be collected. The emitted light is detected by a light detection unit such as a CCD. In a biochip reader, a microlens array rotated by a motor is interposed between a light source and a biochip, and the biochip is scanned with an excitation light beam focused by the microlens array, thereby improving the light utilization efficiency. (Patent Document 1, Patent Document 2). Also, in order to measure a large number of samples in a short time and to provide an inexpensive biosensor, a plurality of samples are mounted on one surface of the substrate, and a light emitting element and a light receiving element are mounted on the other surface of the substrate There is also (patent document 3).

JP 2005-181351 A JP 2010-139350 A Japanese Patent Laid-Open No. 2005-77287

  An object of the present invention is to provide a sample reading device that shortens the inspection time of a sample.

Claim 1 is arranged in m rows × n columns (m and n are natural numbers, provided that when m is 1, n is 2 or more, and when n is 1, m is 2 or more) A light source having a substrate on which a plurality of surface-emitting type semiconductor laser elements are formed, a driving means for driving the surface-emitting type semiconductor laser element, and a sample attached with a fluorescent label that emits fluorescence when irradiated with excitation light. Support means for supporting a plurality of inspection objects arranged in a plane, an optical system for irradiating the inspection object with laser light emitted from the surface emitting semiconductor laser element as excitation light, and fluorescence emitted from the sample And a photoelectric conversion means for converting the signal into an electrical signal.
2. The sample reading apparatus according to claim 1, wherein the sample reading apparatus further includes a scanning unit that scans the sample on the inspection object with a laser beam emitted from the surface emitting semiconductor laser element.
According to a third aspect of the present invention, when the surface emitting semiconductor laser element of m rows × n columns is driven by the driving means so as to be collectively turned on, the scanning means has a laser beam having a light emitting point of m rows × n columns The sample reading device according to claim 1, wherein the sample on the inspection object is scanned by the scanner.
According to a fourth aspect of the present invention, when the samples on the inspection target are arranged in p rows × q columns and m ≧ q, the scanning unit scans light emission points of m rows × n columns in the p direction. The sample reading device according to any one of 1 to 3.
In a fifth aspect of the present invention, when the samples on the inspection target are arranged in p rows × q columns and n ≧ p, the scanning unit scans light emission points of m rows × n columns in the q direction. The sample reading device according to any one of 1 to 3.
According to a sixth aspect of the present invention, the scanning unit includes a rotating optical system that receives a laser beam emitted from the surface-emitting type semiconductor laser element, and the sample on the inspection object is reflected by the laser beam reflected by the rotating optical system. The sample reading device according to any one of claims 1 to 5, wherein
According to a seventh aspect of the present invention, in the optical system according to the sixth aspect, the optical system includes a collimating lens disposed between the light source and the rotating optical system, and an fθ lens that receives light reflected from the rotating optical system. The sample reading apparatus described.
According to an eighth aspect of the present invention, the scanning unit includes a moving mechanism that moves the support unit in a plane thereof, and the sample on the inspection object is scanned with a laser beam by moving the support unit. 5. The sample reader according to any one of 5.
The substrate of the light source is disposed so as to be parallel to the substrate to be inspected, and the scanning unit moves either the substrate of the light source or the substrate to be inspected. The sample reading apparatus according to any one of 1 to 5.
The sample reading device according to claim 6, wherein the rotating optical system is a polygon mirror.
11. The sample reading apparatus according to claim 6, wherein the scanning unit is a digital mirror device in which mirrors that reflect light and are rotatable are arranged in a plane.
12. The sample reading device according to claim 1, wherein the photoelectric conversion unit includes an image sensor that captures a two-dimensional image of the sample on the inspection target.
In a thirteenth aspect of the present invention, the inspection target is a biochip, as set forth in any one of the first to twelfth aspects.

According to the first and third aspects, compared with a case where a single surface emitting semiconductor laser element is used as a light source, the reading time of the sample can be shortened.
According to the second and eighth aspects, it is possible to read a sample having a larger number than m × n light emitting points.
According to the fourth and fifth aspects, the scanning time can be shortened.
According to the sixth, seventh, tenth, and eleventh aspects, it is possible to make the sample reading device more compact than to move the inspection object.
According to the ninth aspect, the sample reading device can be made compact.
According to the twelfth aspect, the fluorescence pattern of the sample can be imaged.
According to the thirteenth aspect, the time for analysis of DNA or the like can be shortened.

It is a figure which shows schematic structure of the biochip reader which concerns on 1st Example of this invention. It is a top view which shows an example of the VCSEL array used for the biochip reader of this invention. It is typical sectional drawing of the VCSEL element which comprises a VCSEL array. It is a figure explaining the example which scans by moving the stage which mounts a biochip. It is a figure which shows schematic structure of the biochip reader which concerns on 2nd Example of this invention. It is a top view which shows an example of a digital mirror device. It is a figure which shows schematic structure of the biochip reader which concerns on 3rd Example of this invention. It is a figure which shows schematic structure of the biochip reader which concerns on the 4th Example of this invention. It is a figure which shows schematic structure of the biochip reader which concerns on the 5th Example of this invention. It is a figure which shows schematic structure of the biochip reader which concerns on the 6th Example of this invention. It is a figure which shows schematic structure of the biochip reader which concerns on the 7th Example of this invention.

  Although a lamp or the like can be used as the light source of the biochip reader, an optical system such as a filter for cutting a specific wavelength is required to excite the fluorescent label, which increases costs. Further, since a certain level of light output is required to excite the fluorescent label, laser light is used as the light source.

  In addition, the cells fixed on the biochip may have a pitch of several microns to several tens of microns and about tens of thousands or more. Scanning a biochip in which a large number of cells are arranged at a narrow pitch in this way using a single laser beam or laser beam leads to an increase in inspection time. In the present invention, a laser array is used in which elements can be arranged two-dimensionally or linearly at intervals close to the cell pitch of the biochip. As such a laser array, a surface emitting semiconductor laser (Vertical Cavity Surface Emitting Laser: hereinafter referred to as VCSEL) is suitable.

  The fact that the pitch of the sample on the biochip and the pitch of the elements on the VCSEL array are close to each other has an advantage that an optical system such as light collection and collimation (parallelization) can be simplified. In addition, by simultaneously irradiating a plurality of cells on the biochip with a plurality of laser beams or laser beams emitted from the VCSEL array, the plurality of cells can be excited collectively. Further, it is possible to drive so that all the elements of the VCSEL array are sequentially lighted without being lighted all at once. Further, the VCSEL element may be directly switched on / off to sequentially excite a plurality of cells in a specific region. Furthermore, it is possible not to irradiate a specific cell or to adjust the light output for each VCSEL element.

  In the sample reading device of the present invention, a plurality of cells (for example, several tens to several thousand cells) are collectively irradiated, or a plurality of cells in a specific region (several tens to several thousand cells) are sequentially irradiated. This enables a combination of a light source and an optical system.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a biochip reader according to a first embodiment of the present invention. The biochip reader 10 according to the present embodiment includes an excitation light source 12 including a VCSEL array capable of emitting a plurality of laser beams or laser beams as excitation light, and a plurality of laser beams La emitted from the excitation light source 12 as parallel light. The collimating optical system 14, the condensing lens 16 for condensing the laser light La that has passed through the optical system 14, and irradiating the sample on the biochip BC with the condensed laser light La, and the biochip BC are mounted. The stage 18, the optical system 20 that condenses the fluorescence Lb emitted from the sample of the biochip BC, the optical system 22 that condenses the fluorescence Lb from the optical system 20 onto the light receiving element 24, and the fluorescence Lb are received. And a light receiving element 24 for converting the signal into an electric signal.

  The excitation light source 12 includes a VCSEL array in which a plurality of VCSEL elements arranged in m rows × n columns are formed. Here, m and n are natural numbers, and the VCSEL array may be a two-dimensional array of VCSEL elements or a linear array of VCSEL elements. The pitch and arrangement of the VCSEL elements are appropriately selected according to the pitch and arrangement of the sample on the biochip BC and the optical systems 14 and 16. When the VCSEL elements are arranged two-dimensionally, the overall planar shape is not particularly limited, and may be any of a rectangular shape, a parallelogram shape, or a circular shape.

  FIG. 2A is a plan view of the VCSEL array of the first embodiment. The VCSEL array 30 is configured by monolithically forming a plurality of light emitting units on a single semiconductor substrate 32. Here, an example in which each light emitting unit is defined by the mesa M is shown, but other than this, each light emitting unit may have its region defined by injecting proton ions or the like. On the surface of the semiconductor substrate 32, a plurality of cylindrical mesas M (shown by circles in the figure) arranged in m rows × n columns are formed, and each mesa M has a constant pitch, for example, several μm to several It is formed with 10 μm.

  In the first mode, each mesa M is connected to a p-side electrode 36 (shown by a rectangle in the drawing) one-to-one by individual electrode wiring 34. Further, an n-side electrode 38 (see FIG. 3A) common to each mesa M is formed on the back surface of the semiconductor substrate 32. By applying a forward drive current to the p-side electrode 36 and the n-side electrode 38, a single transverse mode laser beam is emitted from the top of the mesa M in a direction substantially perpendicular to the substrate. In the VCSEL array 30 shown in FIG. 2 (A), both VCSEL elements can be driven to be turned on simultaneously, or each VCSEL element can be driven to be turned on individually. it can.

  FIG. 2B is a plan view of the VCSEL array of the second aspect. In this VCSEL array 30A, each mesa has a configuration in which the p-side electrode 36 is electrically connected through a common electrode wiring 34, and all the VCSEL elements in m rows × n columns are turned on simultaneously.

  FIG. 3 shows a cross section of a typical VCSEL device. In FIG. 3A, a distributed Bragg reflector (hereinafter referred to as DBR) in which a plurality of pairs of n-type AlGaAs layers having different Al compositions are stacked on an n-type GaAs semiconductor substrate 32. 40) An active region 42 including a quantum well active layer and an upper DBR 44 in which a plurality of pairs of p-type AlGaAs layers having different Al compositions are stacked are formed between the lower spacer layer and the upper spacer layer. A current confinement layer 46 made of p-type AlAs is formed in the upper DBR 44. Preferably, the uppermost layer of the upper DBR 44 is composed of a contact layer made of p-type GaAs having a high impurity concentration.

  By etching the semiconductor layer, a cylindrical mesa M is formed so as to reach at least the current confinement layer 46. In the current confinement layer 46, an annular oxidized region 46A and an oxidized region selectively oxidized from the mesa side surface are formed. A conductive region 46B (non-oxidized region) surrounded by 46A is formed. Preferably, the diameter of the conductive region 46B is selected so that the laser beam of single transverse mode oscillation is emitted. An annular upper electrode 48 electrically connected to the upper DBR 44 is formed on the top of the mesa M, and the central opening serves as a laser light emission window. An interlayer insulating film 50 is formed so as to cover the bottom, side and top edges of the mesa M, and the upper electrode 48 exposed by the interlayer insulating film 50 is connected to the corresponding electrode wiring 34. An n-side electrode 38 common to the VCSEL elements is formed on the back surface of the substrate 32.

  In the VCSEL array shown in FIG. 3B, the n-side electrode 38 is not formed on the back surface of the substrate, but on the substrate surface. Preferably, a contact hole that exposes the lower DBR 40 is formed in the interlayer insulating film 50 at the bottom of the mesa M, and an electrical connection is made between the n-side electrode 38 and the lower DBR 40 through the contact hole. Also good.

  The biochip BC has a transparent substrate made of, for example, glass or plastic, and a plurality of samples (cells) with fluorescent labels are arranged on the surface of the substrate in a known manner. The cell is formed on the substrate by, for example, an ink jet or a micro spotter.

  The light receiving element 24 can be a photodiode, a phototransistor, a CCD sensor, or a CMOS sensor. When each VCSEL element is turned on collectively, the sample on the biochip BC is irradiated in a two-dimensional area, and two-dimensional fluorescence is emitted therefrom. For this reason, the light receiving element 24 is desirably a CCD sensor or a CMOS sensor capable of capturing a two-dimensional fluorescent image. On the other hand, when the VCSEL elements are sequentially turned on, a photodiode or a phototransistor can be used as the light receiving element 24. In this case, if light is received in accordance with the lighting timing of the element, the fluorescence of which cell Can be identified. The electronic signal obtained by the light receiving element 24 is provided to a fluorescence pattern analysis unit (not shown), where DNA is analyzed.

  When a plurality of laser beams La are emitted from the excitation light source 12, the plurality of laser beams La are collimated by the optical system 14, and then irradiate a predetermined plurality of cells on the biochip BC by the condenser lens 16. To do. One laser beam emitted from the VCSEL array is irradiated corresponding to one cell (sample with a fluorescent label) on the biochip BC. Therefore, when m rows × n columns of VCSEL elements are simultaneously turned on, m × n cells on the biochip BC are irradiated at once, and fluorescence Lb is emitted in response to the irradiation. Compared to scanning a sample on a biochip using a single laser beam, the configuration as described above enables batch irradiation with a plurality of laser beams, which requires probing of all samples on the biochip. Time can be shortened.

  Usually, a large number of cells are arranged on the biochip BC, and when the number of cells is larger than the number of elements of the VCSEL array, a plurality of laser beams emitted from the VCSEL array are used. Need to be scanned. As a preferable mode in this case, scanning is performed by moving the stage 18 shown in FIG. 1 in the X direction and / or the Y direction within the plane.

  FIG. 4 shows an example in which scanning is performed by moving the stage. In the figure, MP indicates a multi-spot irradiation area when VCSEL elements of m rows × n columns are turned on collectively. By moving the stage 18 in the −X direction, scanning 1 by the multi-spot irradiation area MP is performed. Next, scanning 2 is performed by moving the stage 18 in the X direction after moving in the -Y sub-scanning direction. Thereafter, similarly, the stage 18 is moved in the X and Y directions until all the cells on the biochip BC are scanned. In this way, an image of the fluorescence pattern when all the cells on the biochip BC are scanned is picked up by the light receiving element 24. Although not described in detail here, the biochip reader is synchronized with the drive circuit that drives the VCSEL array, the drive circuit that moves the stage 18 in synchronization with the drive of the VCSEL array, and the scanning of the sample on the biochip BC. Thus, a control circuit for controlling imaging by the light receiving element 24 and the like are included, and the sample is accurately read by appropriately designing these circuits.

  Next, a biochip reader according to a second embodiment of the present invention will be described. In the first embodiment, an example in which scanning on the biochip is performed by moving the stage is shown, but in the second embodiment, scanning is performed by reflecting the laser light from the excitation light source 12 with a rotating mirror or the like. Is to do. FIG. 5 shows a schematic configuration of a biochip reader 10A according to the second embodiment, and the same components as those in FIG. 1 are denoted by the same reference numerals. As shown in the figure, a polygon mirror 25 and an fθ lens 17 are provided between the excitation light source 12 and the biochip BC. The plurality of laser beams La emitted from the VCSEL array are collimated by the optical system 14 and are incident on the polygon mirror 25. The polygon mirror 25 is rotated at a constant speed by a motor (not shown), and reflects incident light at a constant spread angle. The fθ lens 17 receives the laser light from the polygon mirror 25 and irradiates the biochip BC with light having an image height corresponding to the incident angle.

  When each element of the VCSEL array is turned on collectively, a plurality of cell regions on the biochip BC are irradiated by matching the light emission timing of the VCSEL element with the rotation speed of the polygon mirror 25 that determines the scanning speed, Scanning is performed in the X direction or Y direction in units of cell regions. By using the scanning by the polygon mirror 25, the stage 18 on which the biochip BC is mounted does not need to move in at least one of the X and Y directions. For this reason, the moving mechanism of the stage 18 is simplified, and the size and cost of the biochip reader 10A can be reduced. Also in the second embodiment, scanning by the polygon mirror 25 may be performed while sequentially driving each element of the VCSEL array.

In the above example, the polygon mirror 25 is used as the rotating optical system, but a DMD (digital mirror device) may be used instead. FIG. 6 is a plan view showing an example of a DMD. A typical DMD 70 has a plurality of mirrors 72 arranged in a two-dimensional array on a silicon substrate. The surface of each mirror 72 functions as a mirror and reflects incident light. Each mirror 72 is rotatably supported by, for example, a hinge, and each mirror 72 can be tilted, for example, by ± 12 degrees (on / off). Can be performed several thousand times per second.
Preferably, the DMD 70 includes M rows × N columns of mirrors 72 so as to reflect the laser beams emitted from m rows × n columns of the VCSEL array. When the elements of the VCSEL array are driven so as to be turned on collectively, all the laser beams are reflected by the mirrors of the DMD 70 so that a plurality of cell regions on the biochip BC are scanned in units of the regions. In addition, when the elements of the VCSEL array are driven so as to be sequentially turned on, the corresponding mirror 72 of the DMD 70 is sequentially rotated and the cell is scanned.

  Next, a biochip reader according to a third embodiment of the present invention is shown in FIG. In the figure, the same components as those in the first and second embodiments are designated by the same reference numerals and description thereof is omitted. In the biochip reader 10B of the third embodiment, the stage 18 does not need to be moved when the VCSEL array irradiates the length of the short side of the biochip BC.

  When the light emitting elements of the VCSEL array are composed of m rows × n columns, the cells S on the biochip BC are composed of p rows × q columns as shown in FIG. 7B. Here, if m rows of VCSEL elements are equal to or greater than the q column of the cell S, the entire biochip BC can be obtained by scanning the multi-spot laser light of the VCSEL array in the p direction of the cell. Cell p × q is irradiated. By performing this scanning with the polygon mirror 25 or the DMD 70, the stage 18 does not need to be moved in either the X direction or the Y direction. As shown in FIG. 7, a line-shaped mirror 26 or the like may be provided after the fθ lens 17 to change the direction of the light beam and scan the cell on the biochip BC. The system may also be freely arranged according to the spatial restrictions of the present apparatus.

  Next, a biochip reader according to a fourth embodiment of the present invention is shown in FIG. In the figure, the same components as those in the first to third embodiments are designated by the same reference numerals and the description thereof is omitted. In the biochip reader 10C of the third embodiment, the excitation light source 12 is mounted on the stage 18 so that the substrate of the VCSEL array is parallel to the substrate of the biochip BC and both face each other in close proximity. At this time, the arrangement of the elements of the VCSEL array is the same as or similar to the arrangement of the cells on the biochip BC. The laser light emitted from the VCSEL array passes through the substrate of the biochip BC, excites the fluorescent label attached to the sample on the surface, and in response, the fluorescence Lb is emitted. When the irradiation area by the VCSEL array corresponds to the entire cell area of the biochip BC, neither the moving mechanism of the stage 18 nor the scanning mechanism of the laser light is required. On the other hand, when the irradiation area of the VCSEL array cannot cover the entire cell area of the biochip BC, scanning is performed by moving the stage 18. Also in this case, compared with the case where scanning is performed using a single laser beam, scanning is significantly speeded up, and the time required for inspection is shortened. Also in the fourth embodiment, each element of the VCSEL array may be driven so as to be lit up collectively or may be driven so as to be lit up sequentially.

  Next, FIG. 9 shows a biochip reader according to a fifth embodiment of the present invention. In the figure, the same components as those in the first to fourth embodiments are designated by the same reference numerals and description thereof is omitted. In the biochip reader 10D of the fifth embodiment, the excitation light source 12 is fixed at a predetermined position, and the biochip BC is mounted on the stage 18. A space (or a transmission region) for transmitting the laser beam La from the excitation light source 12 is formed on the stage 18, and the laser beam La is transmitted from the back side of the transparent substrate of the biochip BC through the space. The fluorescent label of the sample incident and immobilized on the surface is excited. Also in this embodiment, the stage 18 can move in the X direction and the Y direction, and by moving the stage 18, a plurality of cell regions on the biochip BC are scanned with the laser light La.

  Next, FIG. 10 shows a biochip reader according to a sixth embodiment of the present invention. In the figure, the same components as those in the first to fifth embodiments are designated by the same reference numerals and description thereof is omitted. In the biochip reader 10E according to the sixth embodiment, as in the case of the fourth embodiment, the substrate of the VCSEL array is parallel to the substrate of the biochip BC, and both are close to each other, Further, a light receiving element 24, which is a two-dimensional imaging element such as a CCD camera, is attached to the opposite side of the VCSEL array from the excitation light source 22 so as to be parallel to the biochip BC. The imaging area of the CCD camera is equal to or larger than the area of the VCSEL array. Further, the stage 18 on which the excitation light source 12 is mounted can move in the X direction and the Y direction, so that the cells on the biochip BC can be scanned. In the sixth embodiment, the optical system through which the fluorescence Lb passes becomes unnecessary, and the entire apparatus can be made compact. Further, the inspection time can be remarkably shortened compared with the case where a single laser beam is used. The fluorescence Lb is often weaker than the excitation light La, and the VCSEL array is preferably placed on the back side of the transparent biochip BC. However, the mounting position of the VCSEL array (excitation light source 12) and the light receiving element 24 is determined. The reverse is also acceptable.

  Next, FIG. 11 shows a biochip reader according to a seventh embodiment of the present invention. The biochip reader 10F according to the seventh embodiment is to insert a collimating lens 14 between the excitation light source 12 and the biochip BC. Preferably, the collimating lens 14 includes a microlens array in which a plurality of microlenses are arranged, and the position of the microlens corresponds to the position of the VCSEL element. The VCSEL element emits laser light in a basic transverse mode (single mode), but the laser light has a spread angle even in the single mode. For this reason, by suppressing the spread angle of the laser beam by the collimating lens 14, cells arranged on the biochip BC at a narrow pitch can be handled.

  In the sixth and seventh embodiments, an example in which the excitation light source 12 on the stage 18 is moved is shown. However, as in the fifth embodiment shown in FIG. 9, the excitation light source 12 is fixed and the biochip BC is fixed. May be moved on the biochip side by fixing on the stage.

  In each of the above embodiments, the wavelength of the laser light emitted from the VCSEL element is set in accordance with the excitation wavelength of the fluorescent label. Further, the excitation wavelength may be a VCSEL array in which a plurality of types are mixed.

  The preferred embodiment of the present invention has been described in detail above, but the present invention is not limited to the specific embodiment, and various modifications can be made within the scope of the present invention described in the claims. Deformation / change is possible.

10, 10A, 10B, 10C, 10D, 10E, 10F: Biochip reader 12: Excitation light source 14: Optical system 16: Condensing lens 17: fθ lens 18: Stage 20: Optical system 22: Condensing lens 24: Light reception Element 25: Polygon mirror 26: Mirror 30, 30A: VCSEL array 32: Semiconductor substrate 34: Electrode wiring 36: P-side electrode 38: N-side electrode 70: DMD

Claims (13)

A plurality of surface-emitting types arranged in m rows × n columns (m and n are natural numbers, where n is 2 or more when m is 1 and m is 2 or more when n is 1) A light source having a substrate on which a semiconductor laser element is formed;
Driving means for driving the surface emitting semiconductor laser element;
A supporting means for supporting a test object in which a plurality of samples with a fluorescent label that emits fluorescence when irradiated with excitation light are arranged in a plane;
An optical system for irradiating the inspection object as excitation light with laser light emitted from the surface emitting semiconductor laser element;
Photoelectric conversion means for converting the fluorescence emitted from the sample into an electrical signal;
A sample reader. The sample reading apparatus according to claim 1, further comprising a scanning unit that scans the sample on the inspection target with a laser beam emitted from the surface-emitting type semiconductor laser element. When the surface emitting semiconductor laser element of m rows × n columns is driven by the driving means so as to be turned on collectively, the scanning means is irradiated with laser light having a light emitting point of m rows × n columns on the inspection target. The sample reader according to claim 1, wherein the sample is scanned. 4. The scanning device according to claim 1, wherein when the samples on the inspection target are arranged in p rows × q columns and m ≧ q, the scanning unit scans light emission points of m rows × n columns in the p direction. The sample reading apparatus according to one. 4. The scanning device according to claim 1, wherein when the samples on the inspection target are arranged in p rows × q columns and n ≧ p, the scanning unit scans light emission points of m rows × n columns in the q direction. The sample reading apparatus according to one. The scanning means includes a rotating optical system for entering laser light emitted from the surface emitting semiconductor laser element, and the sample on the inspection object is scanned by reflecting the laser light by the rotating optical system. The sample reading device according to claim 1. The sample reading apparatus according to claim 6, wherein the optical system includes a collimating lens disposed between the light source and the rotating optical system, and an fθ lens that receives light reflected from the rotating optical system. . The scanning unit includes a moving mechanism that moves the support unit in a plane thereof, and the sample on the inspection object is scanned with a laser beam by moving the support unit. 2. The sample reader according to 1. The substrate of the light source is arranged so as to be parallel to the substrate to be inspected, and the scanning unit moves either the substrate of the light source or the substrate to be inspected. The sample reading apparatus according to one. The sample reading apparatus according to claim 6, wherein the rotating optical system is a polygon mirror. The sample reading apparatus according to claim 6, wherein the scanning unit is a digital mirror device in which mirrors that reflect light and are rotatable are arranged in a plane. The sample reading device according to claim 1, wherein the photoelectric conversion unit includes an image sensor that captures a two-dimensional image of the sample on the inspection target. The sample reader according to claim 1, wherein the inspection target is a biochip.

Images