JP2013185623A - Direct levitation device - Google Patents

Abstract

A linear motion levitating device capable of realizing linear guidance with higher accuracy is provided.
An air slide device (1) has a prismatic slide shaft (2) and a frame-shaped slider (3) having planar static pressure gas bearing surfaces (31A to 31D) facing each support object (21) of the slide shaft (2). ing. The slider 3 includes an air supply path including an air supply groove having a pattern along the edge of each support target surface 21 of the slide shaft 2 on the back side of the porous layers 32A to 32D forming the static pressure gas bearing surfaces 31A to 31D. 33A to 33D.
[Selection] Figure 1

Description

  The present invention relates to a direct acting levitation device that uses a static pressure gas bearing to move a slider from a slide shaft in a non-contact manner in the axial direction relative to the slide shaft. The present invention relates to a structure of an air supply path capable of realizing straight line guidance.

  As an air slide device (linearly levitated device) that guides a slider (moving body) arranged so as to surround the outer peripheral surface of the slide shaft along the axial direction of the prismatic slide shaft (fixed body) A guide device described in Patent Document 1 used for transporting semiconductors and the like in a chamber is known.

  This guide device has a prismatic slide shaft having four planar guide surfaces on the outer periphery, and a cylindrical slider having a motion surface on the inner periphery facing each guide surface of the slide shaft. .

  Each of the four guide surfaces of the slide shaft is provided with an air pad along the axial direction (slider moving direction) of the slide shaft, and a common compressed gas connected to all the air pads is provided inside the slide shaft. A supply flow path is provided. In addition, annular recovery grooves for recovering the supplied compressed gas are formed on the four guide surfaces of the slide shaft so as to surround the air pad, respectively. An exhaust passage leading to the groove is provided.

  In such a configuration, when compressed gas is supplied to the supply flow path of the slide shaft, the compressed gas is ejected from the air pads of the four guide surfaces of the slide shaft with the same pressure, and the outer peripheral surface of the slide shaft (four guide surfaces) ) And the inner peripheral surface (four motion surfaces) of the slider, and the slider can move along the axial direction of the slide shaft in a state where it floats from the slide shaft. In addition, the compressed gas ejected from the air pad on each guide surface of the slide shaft is recovered by the recovery groove surrounding each air pad, so that it does not leak from between the guide surface of the slide shaft and the moving surface of the slider, It is exhausted to the outside of the vacuum chamber through an exhaust path in the slide shaft.

JP 2011-247405 A

  On the guide surface of the slide shaft of the guide device described in Patent Document 1, an air pad is attached only in the vicinity of the central region including the center line along the axial direction of the slide shaft, and the end of the slide shaft in the width direction is attached. It is not attached near the section. For this reason, there is a possibility that the compressed gas does not spread to the vicinity of both ends in the width direction of the guide surface of the slide shaft and the moving surface of the slider. Therefore, the pressure in the gap between the slide shaft guide surface and the slider motion surface may decrease in the width direction of the slide shaft as it approaches the both ends of the slide shaft motion surface from the central region where the air pad is located. . When such a pressure gradient occurs, for example, when the slide shaft or the slider receives a load fluctuation such as an impact, there is a possibility that the slider and the slide shaft swing relatively around the axis of the slide shaft. is there.

  Further, in the guide device described in Patent Document 1, there is a possibility that the compressed gas does not spread to the vicinity of both end portions in the axial direction of the guide surface of the slide shaft and the moving surface of the slider due to the structure. For this reason, when the slide shaft receives a bending load, the slide shaft may bend, and the straightness of the slider may be reduced.

  This invention is made | formed in view of the said situation, The objective is to provide the linear motion levitating apparatus which can implement | achieve more highly accurate linear guidance.

In order to solve the above-described problems, an air slide device according to the present invention includes:
A prismatic slide shaft having a plurality of side surfaces along the axial direction;
A slider that surrounds the slide shaft around the axis of the slide shaft, has an inner wall surface facing each side surface of the slide shaft, and moves relative to the slide shaft along the axial direction And comprising
One of the side surface of the slide shaft and the inner wall surface of the slider includes a hydrostatic gas bearing surface that supports the other surface facing the surface in a non-contact manner as a support target surface,
Of the slide shaft and the slider, one part having the static pressure gas bearing surface is
A pattern along the edge of the static pressure gas bearing surface is provided with an air supply groove that is directed to each support target surface side and is supplied with compressed gas that is ejected from the static pressure gas bearing surface toward the support target surface. A base material having a groove forming surface formed in
A porous layer laminated on the groove forming surface of the base material and forming the static pressure gas bearing surface.

  According to the present invention, each side surface of the prismatic slide shaft or the inner wall surface facing each side surface of the slider slide shaft receives sufficient buoyancy in its outer peripheral region, so that While swinging can be prevented, the moment rigidity of the slide shaft can be improved. For this reason, more accurate linear guidance can be realized.

1A is an external view of an air slide device 1 according to an embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along line AA of the air slide device 1 shown in FIG. It is. 2A is an external view of the slider 3, and FIG. 2B is a cross-sectional view taken along the line BB of the slider 3 shown in FIG. 3 (A) and 3 (B) are a front view and a bottom view of two plates 30B and 30D arranged to face each other in the slider 3, and FIG. 3 (C) and FIG. 3 (D) are diagrams. It is CC sectional drawing and DD sectional drawing of the plates 30B and 30D shown to 3 (A). 4 (A) and 4 (B) are a front view and a rear view of one of the other two plates 30A and 30C arranged opposite to each other in the slider 3, and FIG. 4 (C). 4D and 4E are an EE cross-sectional view, a FF cross-sectional view, and a GG cross-sectional view of the plate 30A shown in FIG. 4A. FIG. 5 (A) is a front view of the other plate 30C among the other two plates 30A and 30C arranged opposite to each other in the slider 3, and FIG. 5 (B), FIG. 5 (C) and FIG. (D) is HH sectional drawing, II sectional drawing, and JJ sectional drawing of the plate 30A shown to FIG. 5 (A). FIG. 6 is a diagram for explaining the buoyancy that the slide shaft 2 receives.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  First, the configuration of the air slide device 1 according to the present embodiment will be described. Here, an air slide device 1 used as a Z-axis movable mechanism of a high-precision positioning device such as a semiconductor mounting device that requires high-precision positioning is taken as an example, and a slide shaft 2 is moved in the longitudinal direction by a fixed slider 3. A configuration that is guided linearly will be described.

  FIG. 1A is an external view of the air slide device 1 according to the present embodiment, and FIG. 1B is a cross-sectional view of the air slide device 1 taken along line AA. 2A is an external view of the slider 3 constituting the air slide device 1, and FIG. 2B is a cross-sectional view of the slider 3 taken along the line BB. For convenience, in FIG. 1A, an orthogonal coordinate system is defined in which the longitudinal direction of the slide shaft 2 is z, and the horizontal and vertical directions of the slide shaft 2 are x and y. This coordinate system is used as appropriate.

  As shown in the figure, an air slide device 1 according to this embodiment includes a slider 3 fixed to a Z-axis or the like of a high-precision positioning device, and an outer periphery 21 supported by the slider 3 in a non-contact manner. And a slide shaft 2 guided along Z (that is, in the z direction).

  The slide shaft 2 has a quadrangular prism shape having a length corresponding to a required moving distance, and four side surfaces 21 (of which two surfaces are not shown) along the axis Z of the slider 3 are sliders. A surface 21 (hereinafter referred to as a support target surface) 21 that is supported in a non-contact manner and guided by 3 is formed. Further, depending on the application of the high-accuracy positioning device, for example, a screw hole 25 for fixing a holder for a suction collet that chucks a workpiece, and the inside of the suction collet are decompressed on one end surface 22 of the slide shaft 2. An opening or the like of the suction path 24 for passing the suction pipe from the vacuum pump is formed.

  On the other hand, the slider 3 has a frame shape having planar inner wall surfaces 31 </ b> A to 31 </ b> D facing the respective support target surfaces 21 of the slide shaft 2 so as to surround the slide shaft 2 around the axis Z of the slide shaft 2. The inner wall surfaces 31A to 31D form planar static pressure gas bearing surfaces 31A to 31D that face the support target surface 21 of the slide shaft 2 with a predetermined gap d through the gas layer. This slider 3 includes the following two plates (total of four plates) 30A to 30D each having a porous layer 32A to 32D having air permeability and air supply passages 33A to 33D located on the back side thereof. The porous layers (32A and 32C, 32B and 32D) of the plates are combined so as to face each other and fixed with a plurality of hexagon socket bolts 37.

  Of the two sets of plates 30 </ b> A to 30 </ b> D, the two plates 30 </ b> B and 30 </ b> D constituting one set have the same structure, and are opposed to each other with an interval corresponding to the width of the slide shaft 2. The 3 (A) and 3 (B) are a front view and a bottom view of two plates 30B and 30D arranged to face each other, and FIG. 3 (C) and FIG. 3 (D) are shown in FIG. It is CC sectional drawing and DD sectional drawing of plates 30B and 30D shown to (A).

  As shown in the drawing, the plates 30B and 30D are each formed of a back metal (base material) 34 formed into a square shape and a porous material laminated on one surface (porous layer forming surface) 343 of the back metal 34, respectively. Layers 32B and 32D.

  The back metal 34 is formed with a plurality of bolt insertion holes 342 penetrating the side surfaces 341 on both sides directed toward the other two plates 30A and 30C facing each other. In these bolt insertion holes 342, hexagon socket head bolts 37 are inserted through bolt holes 359 described later of the plate 30A.

  In addition, on the porous layer forming surface 343 of the back metal 34, air supply paths 33B and 33D located on the back side of the porous layers 32B and 32D are formed. The air supply paths 33B and 33D have a symmetrical pattern with respect to the symmetry lines (z-direction symmetry line O1 and y-direction symmetry line O2) of the back metal outer shape, and the porous layer forming surface 343 of the back metal 34 is formed. An air supply groove 331 that passes through the four corner regions 3431 and a ventilation groove 332 that is connected to the air supply groove 331 and that is open on the side surfaces 341 on both sides in the y direction are included. In the present embodiment, the air supply groove 331 has an outer peripheral region 3433 (back surface) surrounding the central region 3432 of the porous layer forming surface 343 of the back metal 34 along the outer edge of the porous layer forming surface 343 of the back metal 34. The metal 34 is formed within a band-like region having a predetermined width from the edge of the metal 34 (that is, formed along the edge of the surface 21 to be supported of the opposed slide shaft 2), and the ventilation groove 332 is provided with this supply groove. It is formed on the y-direction symmetry line O2 of the back metal outer shape so as to intersect with the air groove 331.

  By laminating the porous layers 32B and 32D on the entire porous layer forming surface 343 of the back metal 34, on the back side of the porous layers 32B and 32D, from the opening of the ventilation groove 332 on the side surface 341 side, A compressed gas flow path is formed through the air supply groove 331 along the outer edge of the porous layer forming surface 343 of the back metal 34 to the opening of the ventilation groove 332 on the other side surface 341 side. And the surfaces 31B and 31D of the porous layers 32B and 32D form the static pressure gas bearing surfaces 31B and 31D that eject the compressed gas supplied through this flow path.

  Of the two sets of plates 30A to 30D, the two plates 30A and 30C constituting the other set are arranged vertically with respect to the slide shaft 2 so as to sandwich the one set of plates 30B and 30D from the side surfaces 341 on both sides thereof. Opposing to each other with an interval corresponding to the width dimension.

  4 (A) and 4 (B) are a front view and a rear view of one plate 30A among the other two plates 30A and 30C arranged to face each other, and FIG. 4D and 4E are an EE sectional view, an FF sectional view, and a GG sectional view of the plate 30A shown in FIG. 4A.

  As shown in the figure, of the other two plates 30A, 30C, one plate 30A has a back metal (base material) 35 such as a steel plate formed in a square shape, and one surface of the back metal 35 ( Porous layer 32A laminated on (porous layer forming surface) 353.

  A recess 355 is formed on the porous layer forming surface 353 of the back metal 35, leaving a band-like region (plate attachment region) 354 of approximately the plate thickness of each of the plates 30 </ b> B and 30 </ b> D from both edges 351 along the z direction. Yes. The porous layer 32A is arranged in the concave portion 355, and one side surface 341 of one pair of plates 30B and 30D arranged opposite to each other is positioned in the plate attachment regions 354 on both sides of the concave portion 355.

  An air supply path 33A located on the back side of the porous layer 32A is formed on the bottom surface of the recess 355. This air supply path 33A has a symmetrical pattern with respect to the symmetry lines (z-direction symmetry line O3 and x-direction symmetry line O4) of the back metal outline, and passes through four corner regions 3551 of the bottom surface 3554 of the recess 355. The air supply groove 333 is connected to the air supply groove 333 and extends in the x direction to reach the plate attachment region 354. In the present embodiment, the air supply groove 333 is formed in a belt-like shape having a predetermined width from the outer peripheral region 3553 surrounding the central region 3552 of the bottom surface 3554 of the concave portion 355 along the contour of the bottom surface of the concave portion 355. Area) (that is, formed along the edge of the surface 21 to be supported of the opposed slide shaft 2), and the ventilation groove 334 has a back metal outer shape so as to intersect the supply groove 333. It is formed on the x-direction symmetry line O4.

  An air supply port 357 connected to the air supply groove 333 through the air supply groove 334 is formed on the other surface 356 of the back metal 35.

  By laminating the porous layer 32A in the concave portion 355 on the porous layer forming surface 353 side of the back metal 35, the back side of the porous layer 32A is positioned at the center of the other surface 356 of the back metal 35. A compressed gas flow path is formed from the air supply port 357 to the ventilation groove end portion 3341 in the plate attachment region 354 through the air supply groove 333 along the bottom surface shape of the recess 355 of the back metal 35. The surface 31A of the porous layer 32A forms a static pressure gas bearing surface 31A that ejects the compressed gas supplied through this flow path.

  Further, on the other surface 356 of the back metal 35, bolt holes 359 are formed at positions corresponding to the bolt insertion holes 342 on the one side surface 341 of the plates 30 </ b> B and 30 </ b> D positioned in the plate attachment region 354.

  FIG. 5A is a front view of the other plate 30C among the other plates 30A and 30C arranged to face each other, and FIG. 5B, FIG. 5C, and FIG. FIG. 6 is an HH sectional view, an II sectional view, and a JJ sectional view of the plate 30C shown in FIG.

  As shown in the drawing, of the other two plates 30A, 30C, the other plate 30C is a back metal (base material) 36 such as a steel plate formed in a square shape, and one surface of the back metal 36 ( Porous layer 32C laminated on the porous layer forming surface 363.

  The porous layer forming surface 363 of the back metal 36 has the same surface shape as the one plate 30A. Specifically, on the porous layer forming surface 363 of the back metal 36, the band-like regions (plate attachment regions) 364 of the plate thicknesses of the plates 30B and 30D are respectively left from the edges 361 on both sides along the z direction, A recess 365 in which the porous layer 32C is disposed is formed, and an air supply path 33C located on the back side of the porous layer 32C is formed on the bottom surface of the recess 365. The air supply path 33C has a symmetrical pattern with respect to the symmetry lines (z-direction symmetry line O5 and x-direction symmetry line O6) of the back metal outline, and the supply air that passes through the four corner regions on the bottom surface of the recess 365. It includes a groove 335 and a ventilation groove 336 that is connected to the air supply groove 335 and reaches the plate attachment region 364. In the present embodiment, the air supply groove 335 extends along the outer shape of the bottom surface of the recess 365 of the porous layer forming surface 363 of the back metal 36 and the outer peripheral region 3653 (recessed portion) surrounding the central region 3652 of the bottom surface 3655 of the recess 365. 365 is formed within a belt-like region having a predetermined width from the contour line of the bottom surface 3655 (that is, formed along the edge of the surface 21 to be supported of the opposed slide shaft 2). It is formed on the back metal outer shape on the x-direction symmetry line O6 so as to cross the air supply groove 335.

  By laminating the porous layer 32C in the concave portion 365 on the porous layer forming surface 363 side of the back metal 36, the back metal 36 is formed on the back side of the porous layer 32C from the ventilation groove end portion 3361 of the plate attachment region 364. A compressed gas flow path is formed which leads to the air supply groove 336 along the outer shape of the bottom surface of the recess 365. And the surface 31C of the porous layer 32C forms the static pressure gas bearing surface 31C which ejects the compressed gas supplied through this flow path.

  A plurality of screw holes 369 are formed in the plate mounting region 364 of the back metal 36 at positions corresponding to the bolt insertion holes 342 on the other side surface 341 of the plates 30B and 30D positioned in the plate mounting region 364. ing.

  The slider 3 is created by assembling such four plates 30A to 30D as follows.

  The two plates 30B and 30D are arranged one by one on the plate attachment regions 364 on both sides of the plate 30C with the porous layers 32B and 32D facing each other so as to face each other. At this time, the bolt insertion hole 342 on the other side surface 341 of the plates 30B and 30D is aligned with the screw hole 369 of the plate attachment region 364 of the plate 30C, thereby forming the ventilation groove 332 on the other side surface 341 of the plates 30B and 30D. The opening is connected to the ventilation groove end portion 3361 of the plate attachment region 364 of the plate 30C.

  Further, the plate 30A is disposed on one side surface 341 of the two plates 30B and 30D so that the plate attachment region 354 contacts the other side surface 341 of the two plates 30B and 30D. At this time, by aligning the bolt holes 359 of the plate mounting regions 354 on both sides of the plate 30A with the bolt insertion holes 342 on one side 341 of the plates 30B and 30D, the ventilation grooves on one side 341 of the plates 30B and 30D are aligned. The opening 332 is connected to the ventilation groove end 3341 of the plate attachment region 354 of the plate 30D.

  As a result, the air supply paths 33A to 33D of the four plates 30A to 30D are connected to each other as indicated by broken lines in FIG. In this state, the hexagon socket head bolts 37 are respectively inserted into the bolt insertion holes 342 of the plates 30B and 30D from the bolt holes 359 of the plate 30A, and the screw portions of these hexagon socket head bolts 37 are fastened to the screw holes 369 of the plate 30C. To do. Thereby, the four plates 30A to 30D are fixed in a frame shape, and the slider 3 is completed. The air slide device 1 capable of preventing the rotation of the slide shaft 2 around the axis Z of the slider 3 is manufactured by combining the frame-shaped slider 3 and the quadrangular prism-shaped slide shaft 2 thus manufactured. .

  And according to such a slider 3, when compressed gas is supplied from the air supply pipe of the pump connected to the air supply port 357 of one plate 30A, the compressed gas is transferred to the four plates 30A to 30D. It spreads over the entire air supply passages 33A to 33D on the back side of the porous layers 32A to 32D, and is ejected from the entire hydrostatic air bearing surfaces 31A to 31D through the pores in the porous layers 32A to 32D of the four plates 30A to 30D. To do.

  Here, since air supply grooves 331, 333, and 335 having patterns along the edges of the respective support target surfaces 21 of the slide shaft 2 exist on the back side of the porous layers 32 </ b> A to 32 </ b> D, the static pressure air of the slider 3 is present. The pressure in the gap between the bearing surfaces 31 </ b> A to 31 </ b> D and each support target surface 21 of the slide shaft 2 inserted into the slider 3 is higher than the region where the air supply grooves 331, 333 and 335 are not present. 333, 335, that is, in the outer peripheral region of the support target surface 21 of the slide shaft 2. For this reason, as shown in FIG. 6A, in the xy plane, both ends of the support target surface 21 of the slide shaft 2 (both ends of the horizontal and vertical widths of the slide shaft 2) are supported by sufficient buoyancy. The For this reason, even when the slide shaft 2 is subjected to a load fluctuation such as an impact, swinging around the axis of the slide shaft 2 can be prevented. Further, as shown in FIG. 6 (B), the slide shaft 2 receives sufficient buoyancy in the belt-like regions 60 and 61 over the entire outer periphery of the slide shaft 2 at two positions on the axis of the slide shaft 2. The moment rigidity is improved. For this reason, it is possible to prevent a decrease in the straightness of the slide shaft 2. Further, since the compressed gas is ejected from the entire static pressure gas bearing surfaces 31A to 31D, the pressure distribution in the gaps between the respective support target surfaces 21 of the slide shaft 2 and the static pressure gas bearing surfaces 31A to 31D of the slider 3 slides. This is more uniform than the conventional guide device in which the air pad is provided only in the central region of the guide surface of the shaft. For this reason, the floating stability of the slide shaft 2 is improved. Therefore, according to the air slide device 1 according to the present embodiment, it is possible to realize a more precise linear guide of the slide shaft 2.

  In addition, since the four plates 30A to 30D are assembled, the air supply grooves 331, 333, and 335 on the back side of the porous layers 32A to 32D of the four plates 30A to 30D are connected to each other by the ventilation grooves 332, 334, and 336. It is sufficient that the air supply port 357 for supplying the compressed gas is provided at one place on one plate 30A. For this reason, since it is not necessary to pull a plurality of air supply pipes from the pump, interference between the air supply pipes and other parts is unlikely to occur, and adjustment during assembly is facilitated.

  In this embodiment, the case where the slider 3 is fixed and the slide shaft 2 is guided along the axis Z is described. However, the slide shaft 2 is fixed and the slider 3 is guided in the longitudinal direction z. You may make it do. In such a case, highly accurate linear guidance of the slider 3 can be realized.

  Moreover, although the air slide apparatus 1 used as a Z axis | shaft movable mechanism of high precision positioning devices, such as a semiconductor mounting apparatus, was mentioned as an example, the use of the air slide apparatus 1 which concerns on this Embodiment is not restricted to this. For example, the present invention can also be applied as a moving mechanism for other apparatuses that require high-precision linear guidance, such as a stage moving mechanism such as an inspection apparatus.

  In the present embodiment, the air supply groove 331 is formed in the outer peripheral region of the porous layer forming surface 343 of the back metal 34 of the two plates 30B and 30D, but depending on the size of the slider 3, An air supply groove connected to the air supply groove 331 or the ventilation groove 332 may be further formed in the central region surrounded by the air groove 331. The same applies to the other two plates 30A and 30C.

  Further, in the present embodiment, the ventilation layer 332 intersects with the air supply groove 331 on the porous layer forming surface 343 of the back metal 34 of the two plates 30B and 30D and opens on the side surfaces 341 on both sides of the back metal 34. However, instead of the ventilation groove 332, a through hole that intersects the supply groove 331 may be formed from one side surface 341 of the back metal 34 toward the other side surface 341. Even if a slight misalignment occurs, the through holes are formed in the side surfaces 341 on both sides of the plates 30B and 30D so as to connect to the through holes and later-described vent groove end portions 3341 and 3361 of the other two plates 30A and 30C. A groove having an appropriate length that passes through the opening may be formed, or the plate attachment regions 354 and 364 of the other two plates 30A and 30D may be combined with the ventilation groove end portions 3341 and 3361 in the z direction. You may form a groove | channel of length.

  Further, in the present embodiment, the quadrangular prism-shaped slide shaft 2 having the four side surfaces 21 as the surfaces to be supported is used, but the slide shaft 2 has a polygonal column shape having a cross section of a polygon other than a quadrangle. May be. In this case, the shape of the slider 3 surrounding the slide shaft 2 may be a frame shape corresponding to the cross-sectional shape of the slide shaft 2.

  In the present embodiment, each side surface 21 of the slide shaft 2 is a surface to be supported, and the inner wall surfaces 31 </ b> A to 31 </ b> D of the frame-shaped slider 3 surrounding the slide shaft 2 around the axis Z of the slide shaft 2 are static pressures. In contrast to this, the side surfaces 21 of the slide shaft 2 may be static pressure gas bearing surfaces, and the four inner wall surfaces 31A to 31D of the slider 3 may be the support target surfaces. Specifically, similarly to the slider 3 described above, the air supply groove of the pattern along the edges of the opposing support target surfaces 31A to 31D and the air supply groove of the adjacent side surface 21 are formed on each side surface 21 of the slide shaft 2. A ventilation groove to be connected may be formed, and a porous layer may be laminated thereon. As a result, the outer peripheral regions of the respective support target surfaces 31A to 31D of the slider 3 are supported by sufficient buoyancy, so that the swing around the axis of the slider 3 is prevented and the moment rigidity of the slide shaft 2 is improved. As in the case of, a highly accurate linear guide of the slider 3 can be realized. In this case, the slide shaft 2 may be configured by assembling a plurality of plates having the same structure as the plates 30A to 30D used for the slider 3 so that the porous layer faces outward.

  In the above, the porous layers 32 </ b> A to 32 </ b> D may be formed of any material as long as it has air permeability such as a porous metal or ceramic. For example, when the porous layers 32 </ b> A to 32 </ b> D are porous metal sintered layers, for example, Oiles # 2000 from Oiles Industries Co., Ltd. can be used as the plates 30 </ b> A to 30 </ b> D.

1: air slide device, 2: slide shaft, 3: slider, 21: support target surface (side surface, outer periphery) of slide shaft, 22: end surface of slide shaft, 24: suction path, 25: screw hole, 30A to 30D: Plate, 31A to 31D: Static pressure air bearing surface of porous layer (surface of porous layer, inner wall surface of slider), 32A to 32D: Porous layer, 33A to 33D: Air supply path, 34 to 36: Back metal , 37: Hexagon socket head cap screw, 331, 333, 335: Air supply groove, 332, 334, 336: Ventilation groove, 341: Side surface of back metal, 342: Bolt insertion hole, 343, 353, 363: One of back metal Surface (porous layer forming surface), 351, 361: both edges of the porous layer forming surface of the back metal, 354, 364: plate mounting region, 355, 365: recess, 356: the other of the back metal Surface, 357: supply port, 359: bolt hole, 369: screw hole, 3341,3361: vent groove end

Claims (3)

A prismatic slide shaft having a plurality of side surfaces along the axial direction;
A slider that surrounds the slide shaft around the axis of the slide shaft, has an inner wall surface facing each side surface of the slide shaft, and moves relative to the slide shaft along the axial direction And comprising
One of the side surface of the slide shaft and the inner wall surface of the slider includes a hydrostatic gas bearing surface that supports the other surface facing the surface in a non-contact manner as a support target surface,
Of the slide shaft and the slider, one part having the static pressure gas bearing surface is
A pattern along the edge of the static pressure gas bearing surface is provided with an air supply groove that is directed to each support target surface side and is supplied with compressed gas that is ejected from the static pressure gas bearing surface toward the support target surface. A base material having a groove forming surface formed in
And a porous layer that is laminated on the groove forming surface of the base material and forms the static pressure gas bearing surface. The direct acting levitation device according to claim 1,
Each of the sliders includes the base material and the porous layer, and includes a plurality of plates assembled with the porous layer facing the surface to be supported of the slide shaft,
The base material of each plate further includes an air passage that intersects with the air supply groove formed in the base material and leads to the air passage of the base material of the other plate adjacent to the plate. ,
Of the plurality of plates, the base material of one of the plates is formed with an air supply port connected to the air supply groove formed in the base material on a surface opposite to the groove forming surface. A linear levitation device characterized by the fact that The direct acting levitation device according to claim 1 or 2,
The above-mentioned porous layer is a ceramic or a porous metal sintered layer.

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