JP2013181898A - Leakage quantity measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure gas leakage quantity in a seal portion with higher accuracy.SOLUTION: A leakage quantity measuring instrument for measuring leakage quantity of gas G from an isolated high pressure space 3a1 to a low pressure space 3a2 through a seal portion X includes gas supply means 2 for supplying the gas G to the high pressure space 3a1, condensation means 5 for condensing the gas G leaked to the low pressure space 3a2 to liquefy the gas, a flowmeter 7 for measuring the flow rate of liquefied gas L, and arithmetic processing means 9 for calculating leakage quantity of the gas G on the basis of a measurement result of the flowmeter 7.

Description

  The present invention relates to a leakage amount measuring apparatus.

  For example, industrial heat pumps adopt a structure in which condensable gas is circulated through a circulation path in which a compressor and an expansion valve are installed, and heat is transferred by repeating compression by the compressor and expansion by the expansion valve. doing. In this compressor, the condensable gas is compressed by rotating the impeller connected to the shaft, but in order to realize a highly efficient operation, the compressed condensable gas is compressed to a high pressure. It is necessary to suppress leakage to the low pressure side along the shaft. For this reason, it is conceivable to install a dry gas seal device in the compressor to minimize leakage of condensable gas.

  Such a dry gas sealing device is in close contact with the peripheral surface of the shaft when the shaft is stopped, and closes to the shaft with a minimum clearance when the shaft is rotating, thereby inhibiting the rotation of the shaft. Thus, the amount of condensable gas leakage is minimized. However, even when such a dry gas sealing device is used, a small amount of condensable gas leaks because a slight gap is created around the shaft when the shaft is rotated.

  In order to evaluate the performance of such a dry gas sealing device, it is necessary to measure the amount of condensable gas leakage in the dry gas sealing device. For example, Patent Literature 1 and Patent Literature 2 disclose apparatuses for measuring the amount of gas leakage. For this reason, it is conceivable to measure the leakage amount of the condensable gas in the dry gas seal device using the inventions disclosed in Patent Document 1 and Patent Document 2.

JP 2006-170918 A JP 2001-66216 A

  However, the condensable gas used in the heat pump as described above is in a high temperature and high pressure state. For this reason, if it is going to measure the amount of condensable gas leakage in a dry gas seal device appropriately, it is necessary to measure at the same high temperature and high pressure as in actual use. However, not only the condensable gas used in the heat pump, but generally, the gas is greatly affected by temperature and pressure, and the volume changes greatly due to slight changes in temperature and pressure. For this reason, when the measurement is performed at a high temperature and a high pressure, the volume of the condensable gas changes greatly due to a slight change in temperature or pressure environment at the time of measurement, and the measurement error increases.

  It should be noted that not only condensable gas used in heat pumps, but any gas, due to slight changes in temperature and pressure when trying to measure the amount of leakage from a seal part such as a dry gas seal device. Since the volume changes greatly, the measurement error increases.

  The present invention has been made in view of the above-described problems, and an object thereof is to measure the amount of gas leakage at a seal portion with higher accuracy.

  The present invention adopts the following configuration as means for solving the above-described problems.

  A first invention is a leakage amount measuring apparatus for measuring a leakage amount of gas from a high pressure space isolated via a seal portion to a low pressure space, the gas supply means for supplying the gas to the high pressure space, Condensing means for condensing and liquefying the gas leaked into the low-pressure space, a flow meter for measuring the flow rate of the gas in the liquefied state, and a calculation process for obtaining the leak amount of the gas based on the measurement result of the flow meter The configuration of providing means is employed.

  According to a second invention, in the first invention, the gas supply means adjusts the internal temperature of the first tank for storing the liquefied gas, and the internal temperature of the first tank to adjust the temperature in the high pressure space. A configuration is adopted in which a first heater for adjusting the gas pressure is provided.

  In a third aspect based on the second aspect, the gas supply means is installed in a flow path between the first tank and the high pressure space, and the flow path is set higher than the condensation temperature of the gas. A configuration is adopted in which a second heater for heating is provided.

  According to a fourth invention, in the second or third invention, the gas supply means includes a third heater that adjusts a temperature of the gas in the high-pressure space by adjusting a temperature of the high-pressure space. Adopt the configuration.

  According to a fifth invention, in any one of the second to fourth inventions, the second tank that collects and stores the liquefied gas that has passed through the flow meter, and the first tank to the second tank A configuration is adopted in which a vacuum pump for evacuating is provided.

  A sixth invention adopts a configuration in which, in the fifth invention, a fourth heater is provided for adjusting the internal temperature of the second tank to a temperature lower than the internal temperature of the first tank.

  According to the present invention, the gas leaked from the high pressure space to the low pressure space through the seal portion is condensed by the condensing means, the flow rate of the liquefied gas is measured, and the amount of gas leakage is obtained from the measurement result. That is, according to the present invention, the flow rate of a liquefied gas that is less affected by changes in volume due to temperature and pressure compared to a gas in a gaseous state is measured, and the amount of gas leakage is obtained from the measurement result. For this reason, even when the seal portion is in a high-temperature and high-pressure state as in the actual use state, the amount of gas leakage can be accurately obtained. Therefore, according to the present invention, the amount of gas leakage at the seal portion can be measured with higher accuracy.

It is a system flow figure showing a schematic structure of a verification test device in one embodiment of the present invention. It is a flowchart for demonstrating the measurement preparation which is a part of operation | movement of the verification test apparatus in one Embodiment of this invention.

  Hereinafter, an embodiment of a leakage amount measuring apparatus according to the present invention will be described with reference to the drawings. In the following drawings, the scale of each member is appropriately changed in order to make each member a recognizable size.

  Further, in the following description, as an example of the leakage amount measuring device of the present invention, the leakage amount in the dry gas sealing device of the condensable gas used in the heat pump is measured, and the dry gas sealing device is based on the leakage amount. A description will be given with reference to a test apparatus for performing the test. The condensable gas is a gas that evaporates into a gaseous state when heated in a circulation path of the heat pump, and is condensed into a liquid state when cooled, and is used as a heat medium in the heat pump. Is done. The condensable gas is not particularly limited. For example, alternative fluorocarbons such as hydrofluorocarbons and hydrofluoroethers, or hydrocarbon-based natural refrigerants are used.

  FIG. 1 is a system flow diagram showing a schematic configuration of a verification test apparatus 1 of the present embodiment. As shown in this figure, the verification test apparatus 1 (leakage amount measuring apparatus) of the present embodiment includes a gas supply unit 2 (gas supply means), a leak experiment apparatus 3, a recovery unit 4, and a condensing unit 5 (condensation). Means), a first flow meter 6, a second flow meter 7 (flow meter), a vacuum pump 8, and a control processing device 9 (arithmetic processing means).

  The gas supply unit 2 includes a flow path 2a, a first tank 2b, and a first heater 2c, and a liquefied compressible gas (hereinafter referred to as liquefied gas L) stored in the first tank 2b. Is heated and evaporated by the first heater 2c, and a compressible gas in a gaseous state (hereinafter referred to as gas G) is supplied to the leakage experiment apparatus 3 through the flow path 2a. In addition, the gas supply unit 2 includes a liquid level gauge 2d, a second heater 2e, a third heater 2f, a liquefied gas filling valve 2g, a liquefied gas recovery valve 2h, an intake / exhaust valve 2i, a gas A supply flow rate adjusting valve 2j, a safety valve 2k, a first pressure thermometer 21, a second pressure thermometer 2m, and a third pressure thermometer 2n are provided.

  The flow path 2a is a pipe to which the first tank 2b, the second heater 2e, the liquefied gas filling valve 2g, the liquefied gas recovery valve 2h, the intake / exhaust valve 2i, and the gas supply flow rate adjusting valve 2j are connected. Alternatively, the gas G is guided. The downstream end of the flow path 2 a is connected to the high-pressure space 3 a 1 of the leakage experiment apparatus 3.

  The first tank 2b is a container for storing the liquefied gas L, and has a much larger capacity than the high-pressure space 3a1. The first heater 2c is installed in the first tank 2b and adjusts the internal temperature of the first tank 2b. The system from the gas supply unit 2 to the recovery unit 4 shown in FIG. 1 is isolated from the outside, and is filled only with the liquefied gas L or gas G. Moreover, the liquefied gas L exists in the 1st tank 2b. For this reason, the internal pressure of the first tank 2b becomes the saturated vapor pressure of the gas G determined by the temperature set by the first heater 2c. In addition, the pressure in the high-pressure space 3a1 is governed by the pressure in the internal space of the first tank 2b having a large capacity relative to itself. Further, the saturated vapor pressure of the gas G varies depending on the internal temperature of the first tank 2b. Therefore, by adjusting the internal temperature of the first tank 2b by the first heater 2c, the internal temperature of the first tank 2b and further the pressure of the high-pressure space 3a1 can be adjusted. That is, the first heater 2c adjusts the pressure of the gas G in the high-pressure space 3a1 by adjusting the internal temperature of the first tank 2b.

  The liquid level gauge 2d is connected to the first tank 2b and detects the liquid level of the liquefied gas L stored in the first tank 2b, that is, the storage amount of the liquefied gas L. The second heater 2e is disposed between the first tank 2b and the high-pressure space 3a1, and the flow path 2a prevents the gas G discharged from the first tank 2b from condensing and liquefying in the flow path 2a. Heat. That is, the second heater 2e heats the flow path 2a higher than the condensation temperature of the gas G between the first tank 2b and the high-pressure space 3a1.

  The third heater 2f is installed inside the high-pressure space 3a1, and adjusts the temperature of the high-pressure space 3a1. In addition, since the liquefied gas L does not exist in the high pressure space 3a1, even when the high pressure space 3a1 is heated, the pressure in the high pressure space 3a1 does not vary, but only the temperature varies. For this reason, by adjusting the temperature of the high pressure space 3a1 by the third heater 2f, the temperature of the gas G can be adjusted without changing the pressure of the high pressure space 3a1. In other words, the third heater 2f adjusts the temperature of the gas G without changing the pressure of the high-pressure space 3a1 by adjusting the temperature of the high-pressure space 3a1.

  The liquefied gas filling valve 2g is connected to the first tank 2b and is opened when the liquefied gas L is filled in the first tank 2b. The liquefied gas recovery valve 2h is connected to the first tank 2b and is opened when the liquefied gas L is recovered from the first tank 2b. The intake / exhaust valve 2i is connected to the first tank 2b, and is opened when the first tank 2b is evacuated and when the first tank 2b is opened to the atmosphere. The gas supply flow rate adjusting valve 2j is connected to the high pressure space 3a1, and adjusts the flow rate of the gas G supplied to the high pressure space 3a1 by adjusting the opening ratio.

  The safety valve 2k is a check valve connected to the first tank 2b. When the internal pressure of the first tank 2b exceeds a fixed value determined for safety of the first tank 2b, the safety valve 2k Damage to the first tank 2b is prevented by allowing the gas G to escape to the outside. The first pressure thermometer 21 is installed in the first tank 2b, and detects and outputs the pressure and temperature inside the first tank 2b. The 2nd pressure thermometer 2m is installed in the upstream of the 1st flow meter 6 installed in the middle part of channel 2a, and detects the pressure and temperature of gas G supplied to the 1st flow meter 6 Output. The third pressure thermometer 2n is installed on the downstream side of the first flow meter 6, and detects and outputs the pressure and temperature of the gas G that has passed through the first flow meter 6.

  Subsequently, the leakage experiment apparatus 3 will be described. The leakage experiment apparatus 3 includes a chamber 3a having a high-pressure space 3a1 and a low-pressure space 3a2 that are isolated via a dry gas sealing device X (seal part), and is supplied from the gas supply part 2 to the high-pressure space 3a1. The gas G is leaked into the low pressure space 3a2. The leakage experiment apparatus 3 includes a rotation device 3b, a fourth pressure thermometer 3c, and a fifth pressure thermometer 3d in addition to the chamber 3a.

  Here, the configuration of the dry gas sealing device X will be briefly described. The dry gas sealing device X includes a rotating ring X1 attached to a shaft 3b2 (described later) included in the rotating device 3b, and a stationary ring X2 fixed to the chamber 3a. The surface of the rotating ring X1 on the stationary ring X2 side takes in a surrounding gas G when the rotating ring X1 rotates, and forms a plurality of gas G thin film layers between the rotating ring X1 and the stationary ring X2. Grooves are formed. In such a dry gas sealing device X, when the rotary ring X1 is not rotating, the rotary ring X1 and the fixed ring X2 come into contact with each other to seal between the high pressure space 3a1 and the low pressure space 3a2. Further, the dry gas seal device X reduces the amount of gas leakage from the high pressure space 3a1 to the low pressure space 3a2 while leaving a minimal gap between the rotation ring X1 and the stationary ring X2 when the rotation ring X1 is rotating. To do.

  Returning to the description of the leakage experiment apparatus 3, the chamber 3a is a container that accommodates the dry gas seal apparatus X therein, and includes a partition plate 3a3 that divides the internal space into the high-pressure space 3a1 and the low-pressure space 3a2. The high pressure space 3 a 1 is connected to the gas supply unit 2. The low-pressure space 3a2 is connected to the recovery unit 4. As will be described later, the recovery unit 4 has a lower pressure than the gas supply unit 2. That is, the high pressure space 3a1 is connected to the high pressure gas supply unit 2 to be high pressure, and the low pressure space 3a2 is connected to the low pressure recovery unit 4 to be low pressure. The partition plate 3a3 partitions the internal space of the chamber 3a and supports the stationary ring X2 of the dry gas seal device X.

  The rotating device 3b includes a motor 3b1, a shaft 3b2, and a magnetic coupling 3b3. The rotating power generated by the motor 3b1 is transmitted to the shaft 3b2 via the magnetic coupling 3b3 to rotate the shaft 3b2. To drive. The motor 3b1 is installed outside the chamber 3a. The shaft 3b2 is horizontally disposed over the high-pressure space 3a1 and the low-pressure space 3a2, and the rotary ring X1 of the dry gas seal device X is fixed to the tip portion on the high-pressure space 3a1 side. The magnetic coupling 3b3 connects the drive shaft of the motor 3b1 and the shaft 3b2 using magnetic force. In such a rotating device 3b, the motor 3b1 can be disposed outside the chamber 3a by using the magnetic coupling 3b3. For this reason, the chamber 3a can be reduced in size, the maintenance of the motor 3b1 can be facilitated, and the wiring connected to the motor 3b1 can be easily routed.

  The fourth pressure thermometer 3c and the fifth pressure thermometer 3d are installed in the chamber 3a. The fourth pressure thermometer 3c detects and outputs the pressure and temperature of the gas G in the high pressure space 3a1. The fifth pressure thermometer 3d detects and outputs the pressure and temperature of the gas G in the low pressure space 3a2.

  Next, the collection unit 4 will be described. The recovery unit 4 includes a flow path 4a and a second tank 4b. The liquefied gas L that is condensed by the condensing unit 5 and discharged from the leakage experiment apparatus 3 through the flow path 4a is stored in the second tank 4b. It is collected by storing. In addition, the recovery unit 4 includes a liquid level gauge 4c, a fourth heater 4d, a maintenance valve 4e, an intake / exhaust valve 4f, a liquefied gas recovery valve 4g, a sixth pressure thermometer 4h, and a seventh pressure. And a thermometer 4i.

  The flow path 4a is a pipe to which the second tank 4b, the maintenance valve 4e, the intake / exhaust valve 4f, and the liquefied gas recovery valve 4g are connected, and guides the liquefied gas L. The upstream end of the flow path 4 a is connected to the low pressure space 3 a 2 of the leakage experiment apparatus 3.

  The second tank 4b is a container for storing the liquefied gas L, and has a much larger capacity than the low-pressure space 3a2. The 4th heater 4d is installed in the 2nd tank 4b, and adjusts the internal temperature of the 2nd tank 4b. As described above, the system from the gas supply unit 2 to the recovery unit 4 shown in FIG. 1 is isolated from the outside, and only the liquefied gas L or gas G is filled. Moreover, the liquefied gas L exists in the inside of the 2nd tank 4b. For this reason, the internal pressure of the second tank 4b becomes the saturated vapor pressure of the gas G determined by the temperature set by the fourth heater 4d. Further, the pressure in the low pressure space 3a2 is governed by the pressure in the internal space of the second tank 4b having a larger capacity than itself. The saturated vapor pressure of the gas G varies depending on the internal temperature of the second tank 4b. Therefore, by adjusting the internal temperature of the second tank 4b by the fourth heater 4d, the internal temperature of the second tank 4b and further the pressure of the low pressure space 3a2 can be adjusted. That is, the fourth heater 4d adjusts the pressure of the gas G in the low pressure space 3a2 by adjusting the internal temperature of the second tank 4b.

  The fourth heater 4d sets the internal temperature of the second tank 4b to be lower than that of the first tank 2b. That is, the 4th heater 4d adjusts the temperature of the 2nd tank 4b so that the pressure of the 2nd tank 4b may become lower than the 1st tank 2b. As a result, the recovery unit 4 is set to a lower pressure than the gas supply unit 2. Thus, the recovery unit 4 is set at a lower pressure than the gas supply unit 2, and the gas G flows from the gas supply unit 2 toward the recovery unit 4 due to the differential pressure. That is, by adjusting the internal temperature of the second tank 4b to be lower than that of the first tank 2b by the fourth heater 4d, the gas G can be flowed without installing a fan.

  The level gauge 4c is connected to the second tank 4b, and detects the liquid level of the liquefied gas L stored in the second tank 4b, that is, the storage amount of the liquefied gas L. The maintenance valve 4e is installed on the upstream side of the second tank 4b and is closed when the second tank 4b is maintained. The intake / exhaust valve 4f is connected to the second tank 4b, and is opened when the second tank 4b is evacuated and when the second tank 4b is opened to the atmosphere. The liquefied gas recovery valve 4g is connected to the second tank 4b and is opened when the liquefied gas L is recovered from the second tank 4b. The sixth pressure thermometer 4 h is installed on the upstream side of the second flow meter 7, and detects and outputs the pressure and temperature of the liquefied gas L supplied to the second flow meter 7. The seventh pressure thermometer 4i is installed in the second tank 4b, and detects and outputs the pressure and temperature inside the second tank 4b.

  Next, the condensing unit 5 will be described. The condensing unit 5 includes a heat exchanger 5a installed in the low pressure space 3a2 of the chamber 3a, and condenses and liquefies the gas G leaked into the low pressure space 3a2. In addition to the heat exchanger 5a, the condensing unit 5 includes a circulation channel 5b, a third tank 5c, a pump 5d, a flow meter 5e, and a fifth heater 5f.

  The heat exchanger 5a is installed in the low pressure space 3a2. The heat exchanger 5a is connected to the circulation flow path 5b, and exchanges heat between the refrigerant supplied from the circulation flow path 5b and the gas G leaked from the dry gas seal device X to the low pressure space 3a2. Cool and condense. As this heat exchanger 5a, for example, a fin type or a pipe type can be used.

  The circulation channel 5b is a pipe connected to the heat exchanger 5a, the third tank 5c, the pump 5d, and the flow meter 5e, and circulates the refrigerant. The 3rd tank 5c is a container which stores a refrigerant. The pump 5d forcibly causes the refrigerant to flow in the circulation flow path 5b. The flow meter 5e detects and outputs the flow rate of the refrigerant flowing through the circulation channel 5b. The 5th heater 5f is installed in the 3rd tank 5c, and maintains the temperature inside the container of the 3rd tank 5c to the temperature where the refrigerant heated by heat exchange is cooled.

  Next, the first flow meter 6 will be described. The first flow meter 6 is installed between the second heater 2e of the gas supply unit 2 and the gas supply flow rate adjustment valve 2j. The first flow meter 6 is a volume flow meter that measures and outputs the flow rate of the gas G supplied to the high-pressure space 3a1. As shown in FIG. 1, the first flow meter 6 is integrated with the gas supply unit 2 so as to enter the gas supply unit 2. However, functionally, the first flow meter 6 is a component of the gas supply unit 2. The measuring instrument is independent from the gas supply unit 2.

  Next, the second flow meter 7 will be described. The second flow meter 7 is installed between the low pressure space 3a2 and the maintenance valve 4e. The second flow meter 7 is a volume flow meter that measures and outputs the flow rate of the liquefied gas L discharged from the low pressure space 3a2. As such a second flow meter, an orifice type or electromagnetic type may be used. As shown in FIG. 1, the second flow meter 7 is integrated with the recovery unit 4 so as to enter the recovery unit 4, but functionally, it is not a component of the recovery unit 4 but a recovery unit. 4 is an independent measuring instrument.

  Next, the vacuum pump 8 will be described. The vacuum pump 8 is connected to the second tank 4b via the intake / exhaust valve 4f. The vacuum pump 8 evacuates the first tank 2b to the second tank 4b when the test apparatus 1 is activated. The vacuum pump 8 is detachable and can be connected to the first tank 2b via the intake / exhaust valve 2i. For this reason, when the vacuum pump 8 is connected to the second tank 4b and the air on the first tank 2b side cannot be sufficiently sucked out, the vacuum pump 8 is connected to the first tank 2b and the first tank 2b is connected. 1 tank 2b side air is sucked out. Such a vacuum pump 8 makes the first tank 2b to the second tank 4b in a vacuum state of about 0.4 kPa (abs), for example. A vacuum pump 8 may be provided for each of the first tank 2b and the second tank 4b.

  Next, the control processing device 9 will be described. The control processing device 9 controls the entire verification test device 1 based on a program stored in advance, and includes, for example, a personal computer or a workstation. For example, the control processing device 9 is electrically connected to the first heater 2c, the second heater 2e, the third heater 2f, the fourth heater 4d, and the fifth heater 5f, and based on a program stored in advance, Control heat generation. The control processing device 9 is electrically connected to the motor 3b1 and controls the rotation speed of the motor 3b1. The control processing device 9 is electrically connected to the pump 5d, and controls the amount of refrigerant sent out by the pump 5d.

  Further, the control processing device 9 uses the gas G supplied to the high-pressure space 3a1 from the measurement result of the first flow meter 6, the output result of the second pressure thermometer 2m, and the output result of the third pressure thermometer 2n. The mass flow rate of is calculated. The control processing device 9 calculates the mass flow rate of the liquefied gas L discharged from the low pressure space 3a2 from the measurement result of the second flow meter 7 and the output result of the seventh pressure thermometer 4i. The control processing device 9 calculates the amount of leakage in the dry gas seal device X from these mass flow rates, and determines whether the dry gas seal device X is good or defective by comparing it with a reference value stored in advance. Output as test result.

  In addition, the control processing device 9 is electrically connected to the first pressure thermometer 21, the fourth pressure thermometer 3c, the fifth pressure thermometer 3d, and the sixth pressure thermometer 4h. Based on this, the pressure and temperature at the location where each pressure thermometer is installed are monitored.

  Next, the operation of the verification test apparatus 1 of the present embodiment configured as described above will be described.

  First, make initial preparations. In this initial preparation, the first tank 2b is filled with the liquefied gas L via the liquefied gas filling valve 2g, and the vacuum pump 8 performs evacuation from the first tank 2b to the second tank 4b. By connecting the vacuum pump 8 to the second tank 4b and starting the vacuum pump 8, the air contained from the first tank 2b to the second tank 4b is drawn out. Here, when sufficient air cannot be drawn out from the first tank 2b side, the vacuum pump 8 is connected to the first tank 2b to perform evacuation.

  In this way, when air is discharged from between the first tank 2b and the second tank 4b, the control processing device 9 then transfers the inside of the first tank 2b to the first heater 2c of the gas supply unit 2. Is heated, the refrigerant is forced to flow through the pump 5d of the condensing unit 5, and the motor 3b1 of the leakage experiment apparatus 3 is driven to rotate the shaft 3b2. As a result, the liquefied gas L stored in the first tank 2b evaporates and gas G is generated. When the gas G is generated, the internal pressure of the first tank 2b increases, and the gas G flows toward the low-pressure recovery unit 4.

  The gas G flows in the order of the high-pressure space 3a1, the dry gas seal device X, and the low-pressure space 3a2, and returns to the liquefied gas L by being cooled and condensed in the heat exchanger 5a disposed in the low-pressure space 3a2. In the initial stage, the liquefied gas L generated in the heat exchanger 5a adheres to the surface of the heat exchanger 5a and does not drop. For this reason, the entire surface of the heat exchanger 5a is covered with the liquid film of the liquefied gas L, and the supply of the gas G to the low pressure space 3a2 is continued until the liquefied gas L is dropped. When the surface of the heat exchanger 5a is covered with the liquid film of the liquefied gas L, the ratio between the flow rate of the liquefied gas L dropped from the heat exchanger 5a and the flow rate of the gas G flowing into the low pressure space 3a2 becomes constant. . That is, the amount of the liquefied gas L corresponding to the flow rate of the gas G flowing into the low pressure space 3a2 is dropped from the heat exchanger 5a and discharged to the outside of the chamber 3a.

  The liquefied gas L dropped from the heat exchanger 5a flows into the second tank 4b of the recovery unit 4 and is stored in the second tank 4b. The initial preparation is completed when a predetermined amount of the liquefied gas L is stored in the second tank 4b. Note that the initial preparation period can be shortened by storing the liquefied gas L in the second tank 4b in advance. For this reason, you may install the liquefied gas filling valve for supplying the liquefied gas L to the 2nd tank 4b.

  When such initial preparation is completed, measurement preparation for performing the verification of the dry gas seal device X is subsequently performed by the control processing device 9. This measurement preparation will be described with reference to the flowchart of FIG.

  First, the temperature Ts and the pressure Ps on the high pressure side (high pressure space 3a1) of the dry gas sealing device X are input to the control processing device 9 (step S1). These temperature Ts and pressure Ps are input manually by an operator or via a network, for example.

  Subsequently, the control processing device 9 sets the temperature T1 of the first heater 2c based on the pressure Ps input in step S1 (step S2). As described above, the temperature T1 of the first heater 2c (that is, the internal temperature of the first tank 2b) defines the saturated vapor pressure inside the first tank 2b and defines the pressure of the high-pressure space 3a1. That is, the control processing device 9 sets the pressure of the high-pressure space 3a1 by setting the temperature T1 of the first heater 2c.

  Subsequently, the control processing device 9 sets the temperature T2 of the third heater 2f to the temperature Ts input in step S1 (step S3). As described above, the temperature T2 of the third heater 2f defines the temperature of the high-pressure space 3a1. That is, the control processing device 9 sets the temperature of the high-pressure space 3a1 by setting the temperature T2 of the third heater 2f.

  Then, the control processing device 9 heats the first heater 2c based on the temperature T1 set in step S2 (step S4), and heats the third heater 2f based on the temperature T2 set in step S3 (step S5). ). Although not shown in the flowchart of FIG. 2, the control processing device 9 heats the second heater 2e so that the gas G generated in the first tank 2b is not condensed in the flow path 2a. In addition, the control processing device 9 heats the fourth heater 4d so that a differential pressure sufficient for the gas G to flow between the gas supply unit 2 and the recovery unit 4 is generated. Further, the control processing device 9 adjusts the temperature of the fifth heater 5f so that the refrigerant is maintained at a temperature necessary for the gas G to aggregate.

  Subsequently, the control processing device 9 determines whether or not the output temperature of the fourth pressure thermometer 3c is the temperature Ts (step S6). Here, when the output temperature of the fourth pressure thermometer 3c is not equal to the temperature Ts, the control processing device 9 adjusts the set temperature of the third heater 2f (step S7), and then the adjusted setting. The third heater 2f is heated again based on the temperature (step S5). For example, when the output temperature of the fourth pressure thermometer 3c is lower than the temperature Ts, the control processing device 9 increases the temperature of the third heater 2f. On the other hand, when the output temperature of the fourth pressure thermometer 3c is higher than the temperature Ts, the control processing device 9 decreases the temperature of the third heater 2f.

  In step S6, when the output temperature of the fourth pressure thermometer 3c is the temperature Ts, the control processing device 9 determines whether the output pressure of the fourth pressure thermometer 3c is the pressure Ps. (Step S8). Here, when the output pressure of the fourth pressure thermometer 3c is not equal to the pressure Ps, the control processing device 9 adjusts the set temperature of the first heater 2c (step S9), and then the adjusted setting. The first heater 2c is heated again based on the temperature (step S4). For example, when the output pressure of the fourth pressure thermometer 3c is lower than the pressure Ps, the control processing device 9 increases the temperature of the first heater 2c. On the other hand, when the output temperature of the fourth pressure thermometer 3c is higher than the temperature Ps, the control processing device 9 decreases the temperature of the first heater 2c.

  And in step S8, when the output pressure of the 4th pressure thermometer 3c is the pressure Ps, the control processing apparatus 9 completes a measurement preparation. That is, the control processing device 9 repeats the first heater 2c and the first heater 2c until the output temperature and output pressure of the fourth pressure thermometer 3c (that is, the pressure and temperature of the high pressure space 3a1) become the input temperature Ts and pressure Ps. The temperature of the three heaters 2f is adjusted, and the measurement preparation is completed when the temperature adjustment is completed.

  When such measurement preparation is completed, the control processing device 9 performs the verification of the dry gas seal device X. Then, the verification process of such a dry gas seal apparatus X is demonstrated. In the state where the measurement preparation is completed as described above, the gas G generated in the first tank 2b passes through the second heater 2e, the first flow meter 6 and the gas supply flow rate adjustment valve 2j as shown in FIG. It is supplied to the high-pressure space 3a1. A part of the gas G supplied to the high-pressure space 3a1 passes through the dry gas sealing device X and leaks to the low-pressure space 3a2. The gas G leaked into the low-pressure space 3a2 is cooled and aggregated by the heat exchanger 5a of the condensing unit 5 to become a liquefied gas L. Such liquefied gas L flows into the flow path 4a connected to the bottom of the low pressure space 3a2, and then flows into the second tank 4b through the second flow meter 7 and the maintenance valve 4e.

  Thus, when the gas G and the liquefied gas L flow, the 1st flow meter 6, the 2nd flow meter 7, the 1st pressure thermometer 21, the 2nd pressure thermometer 2m, the 3rd pressure thermometer 2n, the 4th pressure Detection results are output from the thermometer 3c, the fifth pressure thermometer 3d, the sixth pressure thermometer 4h, and the seventh pressure thermometer 4i. Here, the control processing device 9 uses the detection result of the first flow meter 6, the detection result of the second pressure thermometer 2 m, and the detection result of the third pressure thermometer 2 n of the gas G flowing into the high pressure space 3 a 1. Calculate the mass flow rate. Further, the control processing device 9 calculates the mass flow rate of the liquefied gas L discharged from the low pressure space 3a2 from the detection result of the second flow meter 7 and the detection result of the sixth pressure thermometer 4h. Then, the control processing device 9 calculates the difference between the mass flow rate of the gas G flowing into the high pressure space 3a1 calculated as described above and the mass flow rate of the liquefied gas L discharged from the low pressure space 3a2 in the dry gas seal device X. Calculate as a quantity. The control processing device 9 compares the leak amount in the dry gas seal device X calculated in this way with a reference value stored in advance, and determines that the dry gas seal device X is good if the leak amount falls below the reference value. If the leakage amount exceeds the reference value, it is determined that the dry gas seal device X is defective, and this result is output as a test result.

  In the verification test apparatus 1 of the present embodiment as described above, the gas G leaked from the high-pressure space 3a1 to the low-pressure space 3a2 via the dry gas seal device X is condensed by the condensing unit 5 and liquefied gas (liquefied gas) The flow rate of L) is measured, and the leakage amount of gas G is obtained from the measurement result. That is, according to the verification test apparatus 1 of the present embodiment, the flow rate of the liquefied gas (liquefied gas L) that is less affected by the volume change due to temperature and pressure than the gas G is measured. The amount of leakage of gas G is obtained from the result. For this reason, even when the space where the dry gas seal device X is installed is in a high temperature and high pressure state as in the actual use state, the amount of leakage of the gas G can be accurately obtained. Therefore, according to the verification test apparatus 1 of the present embodiment, the leakage amount of the gas G in the dry gas seal apparatus X can be measured with higher accuracy. Therefore, even if the leakage amount is extremely small, the leakage amount can be accurately measured.

  Moreover, in the verification test apparatus 1 of the present embodiment, the gas supply unit 2 has a high pressure by adjusting the internal temperature of the first tank 2b storing the liquefied gas (liquefied gas L) and the first tank 2b. And a first heater 2c that adjusts the pressure of the gas G in the space 3a1. For this reason, it is possible to easily adjust the pressure of the high-pressure space 3a1 by adjusting the output of the first heater 2c.

  Further, in the verification test apparatus 1 of the present embodiment, the gas supply unit 2 is installed in the flow path 2a between the first tank 2b and the high-pressure space 3a1, and the flow path 2a is connected to the condensation temperature of the gas G. A second heater 2e that heats high is provided. For this reason, it is possible to prevent the gas G generated in the first tank 2b from aggregating and returning to the liquefied gas L before reaching the high-pressure space 3a1.

  In the verification test apparatus 1 of the present embodiment, the gas supply unit 2 includes a third heater 2f that adjusts the temperature of the gas G in the high-pressure space 3a1 by adjusting the temperature of the high-pressure space 3a1. For this reason, the temperature adjustment of the gas G in the high-pressure space 3a1 can be performed more accurately.

  Further, in the verification test apparatus 1 of the present embodiment, the second tank 4b that collects and stores the liquefied gas (liquefied gas L) that has passed through the second flow meter 7, and the first tank 2b to the second tank. And a vacuum pump 8 for evacuating up to 4b. For this reason, the air between the first tank 2b and the second tank 4b can be discharged, and the pressure and temperature in the high-pressure space 3a1 can be adjusted more accurately.

  In addition, the verification test apparatus 1 of the present embodiment includes a fourth heater 4d that adjusts the internal temperature of the second tank 4b to a temperature lower than the internal temperature of the first tank 2b. For this reason, the pressure of the recovery unit 4 can be made lower than the pressure of the gas supply unit 2, and the gas G can easily flow with this differential pressure.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the said embodiment. Various shapes, combinations, and the like of the constituent members shown in the above-described embodiments are examples, and various modifications can be made based on design requirements and the like without departing from the spirit of the present invention.

  For example, in the above-described embodiment, the example in which the seal portion of the present invention is the dry gas seal device X has been described. However, the present invention is not limited to this, and the seal portion may be other than the dry gas seal device.

  Moreover, in the said embodiment, the example whose gas G is a condensable gas used for a heat pump was demonstrated. However, the present invention is not limited to this, and it is possible to more accurately measure the amount of leakage at the seal portion for any gas.

  Moreover, in the said embodiment, the example performed until the test | inspection of the dry gas seal apparatus X was demonstrated. However, the present invention is not limited to this, and only the leakage amount may be calculated and output.

  DESCRIPTION OF SYMBOLS 1 ... Test | inspection test apparatus (leakage amount measuring apparatus), 2 ... Gas supply part (gas supply means), 2a ... Flow path, 2b ... 1st tank, 2c ... 1st heater, 2d ... Liquid level Total, 2e ... second heater, 2f ... third heater, 2g ... liquefied gas filling valve, 2h ... liquefied gas recovery valve, 2i ... intake / exhaust valve, 2j ... gas supply flow rate adjustment valve, 2k …… Safety valve, 2l …… first pressure thermometer, 2m …… second pressure thermometer, 2n …… third pressure thermometer, 3 …… leakage experiment device, 3a …… chamber, 3a1 …… high pressure space, 3a2 …… Low pressure space, 3a3 …… Partition plate, 3b …… Rotating device, 3b1 …… Motor, 3b2 …… Shaft, 3b3 …… Magnetic coupling, 3c …… Fourth pressure thermometer, 3c …… Pressure thermometer, 3d: 5th pressure thermometer, 4 ... recovery part, 4a ... flow path, 4b ... 2 tanks, 4c ... liquid level gauge, 4d ... 4th heater, 4e ... maintenance valve, 4f ... intake / exhaust valve, 4g ... liquefied gas recovery valve, 4h ... 6th pressure thermometer, 4i ... ... 7th pressure thermometer, 5 ... Condensing part (condensing means), 5a ... Heat exchanger, 5b ... Circulating flow path, 5c ... Third tank, 5d ... Pump, 5e ... Flow meter, 5f ... 5th heater, 6 ... 1st flow meter, 7 ... 2nd flow meter (flow meter), 8 ... Vacuum pump, 9 ... Control processing device (arithmetic processing means), G ... Gas, L ... Liquid gas, X ... Dry gas seal device (seal part), X1 ... Rotary ring, X2 ... Fixed ring

Claims (6)

A leak amount measuring device for measuring a leak amount of gas from a high pressure space isolated through a seal portion to a low pressure space,
Gas supply means for supplying the gas to the high-pressure space;
Condensing means for condensing and liquefying the gas leaked into the low pressure space;
A flow meter for measuring the flow rate of the gas in a liquefied state;
A leakage amount measuring apparatus comprising: an arithmetic processing unit that obtains the leakage amount of the gas based on a measurement result of the flow meter. The gas supply means includes
A first tank for storing the gas in a liquefied state;
The leak amount measuring apparatus according to claim 1, further comprising: a first heater that adjusts a pressure of the gas in the high-pressure space by adjusting an internal temperature of the first tank. The gas supply means includes
The leakage amount according to claim 2, further comprising a second heater that is installed in a flow path between the first tank and the high-pressure space and that heats the flow path higher than a condensation temperature of the gas. measuring device. The gas supply means includes
The leakage amount measuring apparatus according to claim 2, further comprising a third heater that adjusts a temperature of the gas in the high-pressure space by adjusting a temperature of the high-pressure space. A second tank for collecting and storing the liquefied gas that has passed through the flow meter;
The leak amount measuring apparatus according to claim 2, further comprising: a vacuum pump that evacuates the first tank to the second tank.   6. The leakage amount measuring device according to claim 5, further comprising a fourth heater for adjusting the internal temperature of the second tank to a temperature lower than the internal temperature of the first tank.

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