JP2013181865A - Inspection fixture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection fixture capable of accurately applying a compression force of an axial direction for distortion or deformation to the tip part and the rear part of a connection part at each probe of a probe connected body when a compression force of an axial direction is applied to the probe connected body.SOLUTION: In this inspection fixture 1, the two probes 21 and 22 of a probe connected body 11 are connected by a connection part 23, and the probes 21 and 23 are independently distorted and deformed nearer to the tip part and the rear end part than the connected part of the probes 21 and 22. The probe holding member 17 of the rear end side has a first rear end through-hole 171 through which the rear end side of the probe connected body 11 is inserted. The first small-diameter parts 171a and 171b of the first rear end through-hole 171 of the probe holding member 17 of the rear end side surround, in the loaded state of the probe connected part 11, a part where the connected part 23 of the probe connected body 11 is disposed to regulate deformation of the part in an axis perpendicular direction.

Description

  The present invention relates to an inspection jig provided in an inspection apparatus that inspects electrical characteristics of an inspection target.

  Depending on the inspection content, inspection method, etc., it is necessary to simultaneously contact a plurality of (for example, two) probes with one inspection point provided on a miniaturized wiring pattern as in the case of 4-terminal measurement. However, miniaturization of a wiring pattern or the like is progressing depending on a substrate or the like to be inspected, and it is a problem how to make a plurality of probes contact one inspection point accurately.

  As a prior art regarding such a subject, there exists a thing of patent document 1, for example. In the technique described in Patent Document 1, two probes are fixed by a holding member made of an adhesive or the like provided at an intermediate portion in the axial direction, and the upper and lower portions of the holding member of each probe can be bent and deformed. (See paragraph [0040], FIG. 5 etc.).

JP 2004-279133 A

  However, in the technique described in Patent Document 1 described above, in the configuration of the inspection jig in which two probes connected by the holding member are mounted, the movement with respect to the portion where the holding member to be a node for bending deformation of the probe is provided. There is no regulation. For this reason, when the tip of the probe is brought into contact with the object to be inspected at the time of inspection, and the axial compressive force is applied to the probe, the holding member of the probe is displaced in the direction perpendicular to the axis perpendicular to the axial direction. On one of the front end side and the rear end side, the axial compressive force that induces the bending deformation of the probe may not be transmitted well. For example, when the holding member is located on the rear end side with respect to the center of the probe in the axial direction, the portion on the rear end side of the probe holding member is difficult to bend, and the axial positions of the rear ends of the two probes The deviation is not sufficiently absorbed by the bending, and there is a possibility that poor contact between the probe and the electrode part occurs.

  Therefore, the problem to be solved by the present invention is that when an axial compressive force is applied to the probe connection body, the probe connection body is bent with respect to the front end side portion and the rear end side portion of each connection portion of each probe. An object of the present invention is to provide an inspection jig capable of reliably applying an axial compressive force for deformation.

  In order to solve the above problems, according to a first aspect of the present invention, there is provided an inspection jig provided in an inspection device for inspecting an electrical property of an inspection object, which is flexible and has a plurality of substantially needle-like shapes. Of the probes are connected to each other in a state of being insulated from each other and arranged in parallel, and the probes are independent of each other at the front end portion and the rear end side portion of the connection portion of each probe. A probe coupling body that can be bent and deformed, a distal-side probe holding member having a distal-side through hole through which a distal-end side that is in contact with an inspection target of the probe coupling body is inserted, and the distal-end-side probe holding member are spaced from each other A plurality of rear end side probe holding members having rear end side through holes through which the rear end side of the probe coupling body is inserted, and a plurality of the rear end portions of the plurality of probes of the probe coupling body abutting each other. of In the state where the electrode unit provided with the pole portion and the probe coupling body are held by the tip-side probe holding member and the rear-end side probe holding member, the portion of the probe coupling body where the coupling portion is provided is removed. And a restriction hole that restricts displacement in a direction perpendicular to the axis perpendicular to the axial direction of the probe connector of the portion.

  According to a second aspect of the present invention, in the inspection jig according to the first aspect, the connecting portion of the probe connecting body includes the tip connecting probe and the rear end probe. When held by the holding member, the probe connecting body is provided in a portion located in the rear end side through-hole of the rear end side probe holding member, and the rear end side penetration of the rear end side probe holding member is provided. The hole is provided in a portion of the rear end side through hole located on the inspection target side, and is positioned on the electrode portion side of the first small diameter portion functioning as the restriction hole portion and the rear end side through hole. A second small-diameter portion that is provided in the portion and surrounds a portion on the rear end side of the probe coupling body and restricts displacement of the portion in the direction perpendicular to the axis; and the first end of the rear end side through hole Provided between the small diameter portion and the second small diameter portion; Of the small-diameter portion and having said second inner diameter larger than the small diameter portion, having a buckling space forming part to permit the bending deformation of each probe of the probe coupling body.

  In the third aspect of the present invention, in the inspection jig according to the first or second aspect, the probe connection body is configured by connecting two probes at the connection portion, and the probe connection On the distal end side of the two probes of the body, a distal end that comes into contact with the inspection object is formed at a position closer to the other probe than the center axis of each probe, and on the rear end side of the two probes, A rear end that contacts the electrode portion is formed at a position opposite to the probe on the other side of the center axis of the probe.

  In the fourth aspect of the present invention, in the inspection jig according to the third aspect, one of the two probes of the probe assembly is an electric power for inspection with respect to an inspection point set as the inspection object. The other is a probe for supply, and the other is a probe for measuring the potential of the inspection point to be inspected.

  According to the inspection jig according to the first aspect of the present invention, in the state where the probe coupling body is held by the front end side probe holding member and the rear end side probe holding member, the coupling portion of the probe coupling body is formed by the restriction hole. The portion provided with is surrounded, and displacement in the direction perpendicular to the axis perpendicular to the axial direction of the probe coupling body in that portion is restricted. Therefore, when the tip of the probe connector is brought into contact with the object to be inspected at the time of inspection and an axial compressive force is applied to the probe connector, the portion provided with the connecting portion of each probe is displaced in the direction perpendicular to the axis. The axial compression force that induces the bending deformation of each probe can be reliably transmitted to both the tip side portion and the rear end side portion of the connecting portion in each probe. The bending deformation can be effectively induced. As a result, for example, even when the connecting portion is located closer to the rear end side or the front end side than the center of the probe connecting body in the axial direction, the rear end side or the front end side of the connecting portion in each probe This prevents the probe from becoming difficult to bend, absorbs the positional deviation of the rear end or tip of each probe in the axial direction, and ensures that the rear end or tip of each probe is in contact with the electrode section or inspection point. Can be made.

  According to the inspection jig according to the second aspect of the present invention, in the mounted state of the probe coupling body, the coupling portion is located in the portion located in the rear end side through hole of the probe coupling body rear end side probe holding member. A first small-diameter portion that functions as a restricting hole portion in the rear end side through-hole of the rear end side probe holding member that is provided and holds the rear end side of the probe connected body, and bending deformation of each probe of the probe connected body A buckling space forming part that allows Therefore, by simply changing the configuration of the rear end side through-hole of the rear end side probe holding member, which is an existing configuration, the probe connecting body can be introduced into the inspection jig, and the connecting portion of the probe connecting body is provided. There is no need to newly provide a dedicated member or the like for forming a restriction hole for restricting the above. As a result, it is possible to easily cope with coexistence of a probe assembly and a single probe installed as a single unit in an inspection jig.

  According to the inspection jig according to the third aspect of the present invention, the probe connection body is configured by connecting two probes at the connection portion, and at the tip side of the two probes, from the central axis of each probe. Also, the tip that contacts the object to be inspected is formed at a position near the probe on the other side, and the electrode part is in contact with the electrode on the rear end side of the two probes on the opposite side of the center axis of each probe. A rear end is formed. Therefore, at the distal end side of the probe coupling body, the distance between the two probe distal ends can be made small so that the two probe distal ends can be brought into contact with a fine inspection point without fail. On the end side, the distance between the rear ends of the two probes can be increased, and the electrical connection with the electrode portion can be performed without excessively reducing the interval between the adjacent electrode portions.

  According to the inspection jig according to the fourth aspect of the present invention, even when the inspection point to be brought into contact with the two probes is miniaturized, the inspection by the four-terminal measurement can be performed satisfactorily.

It is sectional drawing which shows a structure typically to the inspection jig which concerns on one Embodiment of this invention. It is a figure which shows the structure of the probe coupling body with which the inspection jig of FIG. 1 is equipped. It is a figure which shows the structure of the through-hole provided in the probe holding member of the inspection jig of FIG. It is a figure which shows the structure of the through-hole provided in the probe holding member of the inspection jig of FIG.

  An inspection jig according to an embodiment of the present invention will be described with reference to FIGS. The inspection jig 1 according to the present embodiment is provided in a substrate inspection apparatus (not shown) that inspects electrical characteristics of a wiring pattern provided on a substrate 2 to be inspected. The inspection contents include, for example, a continuity test related to the continuity of the wiring pattern, an insulation test related to the insulation between the wiring patterns, and the like.

  As shown in FIG. 1, the inspection jig 1 includes a head portion 13 including a plurality of probe coupling bodies 11 and single probes 12, and an electrode unit 14. The head unit 13 includes a plurality of probe coupling bodies 11 and a single probe 12, a front end side probe holding member 16, a rear end side probe holding member 17, and a plurality of coupling members 18. In the configuration shown in FIG. 1, only one probe coupling body 11 and one single probe 12 are shown in the inspection jig 1 for convenience, but a plurality of them are actually provided.

  As shown in FIG. 2, the probe coupling body 11 includes two probes 21 and 22 and a coupling portion 23. In this embodiment, two probes 21 and 22 are connected by the connecting portion 23 to configure the probe connecting body 11. However, three or more probes are connected by the connecting portion 23 to form the probe connecting body 11. Also good.

  The probes 21 and 22 are configured to include a conductive core wire 24 having a substantially needle shape and an insulating layer 25 made of an insulating resin or the like covering the outer periphery of the core wire 24, and have flexibility. doing. As the material of the core wire 24, for example, tungsten or the like is used. The insulating layer 25 is provided so as to cover the outer periphery of the intermediate portion excluding the front end portion and the rear end portion of the core wire 24.

  The connecting portion 23 is in a state where the two probes 21 and 22 are arranged in close contact with each other, and the two probes 21 and 22 are disposed at any portion between the front end portion 21a and the rear end portion 21b of the two probes 21 and 22. 22 are connected. In this connected state, the probes 21 and 22 are insulated from each other by the insulating layer 25. In addition, the probes 21 and 23 can be bent and deformed independently of each other at the front end side portion and the rear end side portion of the connection portions 23 of the probes 21 and 22. In addition, as the connection part 23, an adhesive agent, a crimping tool, etc. are used. In the present embodiment, for example, an adhesive is used as the connecting portion 23. In the present embodiment, the connecting portion 23 is provided at a position closer to the rear end side than the center of the probes 21 and 22 in the axial direction. In the following description, “axial direction” refers to the axial direction of the probe connector 11, the probes 21, 23, or the single probe 12.

  Further, the tip portions 21a and 22a of the core wires 24 of the probes 21 and 22 are provided with sharp tip portions 21c and 22c that are brought into contact with the inspection object, and electrode portions 141 to be described later are provided at the rear end portions 21b and 22b. , 142 are provided with sharp rear ends 21d, 22d. Here, the tips 21c and 22c of the probes 21 and 22 are formed so as to be located closer to the counterpart probes 21 and 22 than the center axes 21e and 22e of the probes 21 and 22 respectively. . Further, the sharp rear ends 21d and 22d of the probes 21 and 22 are positioned away from the counterpart probes 21 and 22 with respect to the central axes 21e and 22e (away from the counterpart probes 21 and 22). (Position).

  The single probe 12 is composed of one normal probe and has substantially the same configuration as the probe 21 or 22 of the probe connector 11.

  The distal-side probe holding member 16 has a substantially plate-like shape made of an insulating resin or the like, and a plurality of first and second ends through which the distal-end side that comes into contact with the inspection target of the probe coupling body 11 and the single probe 12 are respectively inserted. The distal end side through holes 161 and 162 are provided to hold the distal end sides of the probe connector 11 and the single probe 12. In this embodiment, the tip-side probe holding member 16 is configured by a single plate-like member, but the tip-side probe holding member 16 may be configured by stacking a plurality of plate-like members.

  In the present embodiment, a portion where the insulating layer 25 on the tip side of the probes 21 and 22 of the probe coupling body 11 is not provided is inserted into the first tip side through hole 161. Further, the portion where the insulating layer on the distal end side of the single probe 12 is not provided is inserted into the second distal end side through hole 162. The cross-sectional shape of the first front end side through hole 161 and the first rear end side through hole 171 described later will be described later.

  The rear end side probe holding member 17 has a substantially plate shape made of an insulating resin or the like, and is arranged at an interval in the axial direction from the front end side probe holding member 16, and is located behind the probe coupling body 11 and the single probe 12. A plurality of first and second rear end side through-holes 171 and 172 through which the end sides are respectively inserted are provided to hold the rear end sides of the probe connector 11 and the single probe 12. In the present embodiment, a plurality of (four in the example of FIG. 1) resin-made plate-like members 17a to 17d are stacked to constitute the rear end side probe holding member 17, but one plate The rear end side probe holding member 17 may be constituted by a shaped member.

  The plurality of connecting members 18 connect and fix the front end side probe holding member 16 and the rear end side probe holding member 17 in a state of being spaced apart in the axial direction.

  The electrode unit 14 includes an electrode part 141 to 143 and a base member 144 that holds the electrode part 141 to 143, and is disposed so as to face the surface of the head part 13 opposite to the inspection target. Thus, the head unit 13 is fixed. The base member 144 is a plate-like member made of an insulating resin or the like, and is provided with a plurality of through holes in which the electrode portions 141 to 143 are disposed. The rear ends 21b and 22b of the two probes 21 and 22 of the probe coupling body 11 are in contact with the electrode portions 141 and 142, respectively. The rear end portion 12 b of the single probe 12 is in contact with the electrode portion 143. A plurality of electrode portions 141 to 143 are provided in accordance with the number of probes 21, 22, and 12, respectively. The electrode portions 141 to 143 are connected to lead wires (not shown), and the probes 21 and 22 and the single probe 12 of the probe coupling body 11 are connected to the first to third electrode portions 141 to 143, lead wires, and the like. The board is connected to an inspection unit on the substrate inspection apparatus main body side (not shown).

  In the present embodiment, the connecting portion 23 of the probe connector 11 is configured such that when the probe connector 11 is held by the probe holding members 16, 17, the first end of the rear end side probe holding member 17 in the probe connector 11 is used. It is provided in a portion located in the rear end side through hole 171.

  The second rear end side through-hole 171 of the rear end side probe holding member 17 has first small diameter portions 171a and 171b, a second small diameter portion 171c, a buckling space forming portion 171d, and a rear end small diameter portion 171e. Is provided. In the present embodiment, the first small-diameter portions 171a and 171b are provided at two positions with an interval in the axial direction, but either one of the first small-diameter portions 171a and 171b may be omitted. .

  The first small-diameter portions 171a and 171b are provided at the end of the first rear end side through-hole 171 on the inspection target side, and play a role as restriction holes according to the present invention. Correspondingly, the connecting portion 23 of the probe connecting body 11 includes at least one of the first small diameter portions 171a and 171b in the probe connecting body 11 when the probe connecting body 11 is held by the probe holding members 16 and 17. It is provided in the part which opposes one. Then, in a state where the probe coupling body 11 is held by the probe holding members 16 and 17, the first small diameter portions 171a and 171b surround the portion where the coupling portion 23 of the probe coupling body 11 is provided. Displacement in the direction perpendicular to the axis perpendicular to the axis direction is restricted. Thus, as will be described later, when an axial compressive force is applied to the probe coupling body 11 at the time of inspection, shaking of the portion provided with the coupling body 23 in the direction perpendicular to the axis is suppressed, and each probe 21, The front end side and the rear end side portions of the connecting body 23 are surely bent and deformed.

  The second small diameter portion 171c is provided in a portion of the first rear end side through-hole 171 located on the electrode unit 14 side, surrounds the rear end portion of the probe connector 11, and is perpendicular to the axis of the portion. Regulate direction displacement. The second small diameter portion 171c and a rear end small diameter portion 171e described later position the electrode unit 14 at the rear end portion of each probe 21, 22 of the probe coupling body 11 with respect to the corresponding electrode portions 141, 141. In the present embodiment, the second small-diameter portion 171c surrounds the rear end portion of the probe connecting body 11 where the insulating layers 25 of the probes 21 and 22 are provided.

  The buckling space forming portion 171d is provided between the first small-diameter portions 171a and 171b and the second small-diameter portion 171c of the first rear end side through-hole 171, and each probe 21 and 22 of the probe coupling body 11 is provided. The inner diameter of the first small-diameter portions 171a and 171b and the second small-diameter portion 171c is set to be ten times larger than the inner diameter of the first small-diameter portions 171a and 171b. It should be noted that the portion of the probe coupling body 11 on the front end side with respect to the connection portion 23 of each probe 21, 22 is in the gap space between the front end side probe holding member 16 and the rear end side probe holding member 17. Since it is located, it can be freely bent and deformed in the gap space.

  The rear-end small-diameter portion 171e is provided at the rear-end side end portion of the first rear-end side through-hole 171 on the rear-end side from the second small-diameter portion 171c and at the rear-end-side end portion. The rear end small-diameter portion 171e is inserted with a portion where the insulating layer 25 is not provided at the rear ends of the probes 21 and 22 of the probe coupling body 11, and thereby the final ends of the rear ends of the probes 21 and 22 are inserted. Positioning is performed.

  In the present embodiment, when the probe connector 11 rotates in the through holes 161 and 171 of the probe holding members 16 and 17, the positional relationship between the rear end portions of the probes 21 and 22 and the electrode portions 141 and 142 is shifted. There is a fear. Therefore, in the present embodiment, the first front end side through hole 161 of the front end side probe holding member 16 and the first small diameter portion 171a of the first rear end side through hole 171 of the rear end side probe holding member 17 are provided. As shown in FIG. 3, at least one (preferably two or more) of 171b, the second small diameter portion 171c, and the rear end small diameter portion 171e has two circles, as shown in FIG. Has a cross-sectional shape 31 having a substantially glasses shape. Specifically, for example, the first front end side through hole 161 of the front end side probe holding member 16 and the rear end small diameter portion 171e of the first rear end side through hole 171 of the rear end side probe holding member 17 are substantially glasses. The cross-sectional shape 31 of the shape. The other part of the first rear end side through-hole 171 has a substantially circular cross-sectional shape 32 as shown in FIG.

  The inspection jig 1 configured as described above is provided in a substrate inspection apparatus, and is driven up and down by a jig lifting mechanism (not shown) so as to be moved toward and away from the inspection target substrate 2. . At the time of inspection, the inspection jig 1 is brought close to the board 2 to be inspected, and the tips 21 a and 22 a of the probes 21 and 22 of the probe coupling body 11 of the inspection jig 1 are placed on the wiring pattern of the board 2 to be inspected. Etc., contacted so as to be pressed against inspection points (for example, land portions, solder bumps, etc.) 2a. At the same time, the tip 12a of the single probe 12 is also brought into contact with the inspection point 2b of the substrate 2 to be inspected.

  When the tip portions 21a and 22a of the probes 21 and 22 of the probe coupling body 11 are pressed against the inspection point 2a, the probe coupling body 11 is pressed in the axial direction between the substrate 2 to be inspected and the electrode unit 14, The probe coupling body 11 is compressed in the axial direction, and the front end side portion and the rear end side portion of the connection portion 23 of each probe 21 and 22 are bent and deformed. Similarly, the single probe 12 is also deformed as its tip 12a is pressed against the inspection point 2b and is compressed in the axial direction between the substrate 2 to be inspected and the electrode unit 14 and compressed. It has become.

  At this time, the first small diameter portions 171a and 171b provided in the first rear end side through hole 171 of the rear end side probe holding member 17 are perpendicular to the portion where the connecting portion 23 of the probe connector 11 is provided. Since the displacement in the direction is regulated, the axial compression that induces the bending deformation of each probe 21, 22 with respect to both the tip side portion and the rear end side portion of the connecting portion 23 in each probe 21, 22. The force can be reliably transmitted, and the bending deformation of each of the probes 21 and 22 can be effectively induced.

  As a result, for example, even when the connecting portion 23 is located larger than the center in the axial direction of the probe connecting body 11 and closer to the rear end side as in the present embodiment, the rear end of the connecting portion in each probe. It is possible to prevent the side portion from becoming difficult to bend, to reliably absorb the positional deviation of the rear end of each probe in the axial direction, and to ensure that the rear end of each probe is in contact with the electrode portions 141 and 142. it can. Similarly, even if the connecting portion 23 is located larger than the center of the probe connecting body 11 in the axial direction and closer to the distal end side, the portion on the distal end side of the connecting portion in each probe becomes difficult to bend. By avoiding this, it is possible to reliably absorb the positional deviation in the axial direction of the tip of each probe by bending, and to reliably bring the tip of each probe into contact with the inspection point 2a.

  Further, in the present embodiment, as described above, when the probe connector 11 is mounted, the connecting portion 23 is in the first rear end side through-hole 171 of the probe end member 17 of the probe connector 11. The first small-diameter portions 171a and 171b, the second small-diameter portion 171c, and the back that are provided in the position and function as restriction holes in the first rear-end-side through hole 171 of the rear-end-side probe holding member 17. A ring space forming portion 171d is provided. Therefore, the probe coupling body 12 can be introduced into the inspection jig 1 only by changing the configuration of the first rear end side through-hole 171 of the rear end side probe holding member 17 which is an existing configuration. There is no need to newly provide a dedicated member or the like for forming a restriction hole for restricting the portion where the connecting portion 23 is provided. As a result, it is possible to easily cope with coexistence of the probe connector 11 and the single probe 12 installed as a normal single unit in the inspection jig 1.

  In the present embodiment, as described above, the probes 21 and 22 on the other side of the center axes 21e and 22e of the probes 21 and 22 are disposed on the distal ends of the two probes 21 and 22 constituting the probe coupling body 11. Sharp tips 21c and 22c are formed at positions closer to each other, and the rear ends of the two probes 21 and 22 are opposite to the counterpart probes 21 and 22 with respect to the center axes 21e and 22e of the probes 21 and 22, respectively. The sharp rear ends 21d and 22d are formed at the position of. Therefore, on the distal end side of the probe coupling body 11, the distance between the distal ends 21c and 22c of the two probes 21 and 22 is reduced, and the distal ends 21c and 21c of the two probes 21 and 22 are surely attached to the minute inspection point 2a. 22 c can be brought into contact with each other, and on the rear end side of the probe connector 11, the interval between the rear ends 21 d and 22 d of the two probes 21 and 22 is increased, and the interval between the adjacent electrode portions 141 and 142, etc. The electric connection with the electrode portions 141 and 142 can be performed without difficulty without forcibly reducing the above.

  In the present embodiment, the electrical characteristics of the wiring pattern of the substrate 2 to be inspected are measured by four-terminal measurement using the two probes 21 and 22 of the probe coupling body 11. Specifically, for example, when measuring the resistance value in connection with the continuity inspection of the wiring pattern of the substrate 2 to be inspected, one of the two probes 21 and 22 has the inspection power (for example, current) for the inspection target wiring pattern. The other is used for supplying, and the other is used for measuring a potential difference applied between wiring patterns to be inspected. Thereby, even if the inspection point 2a where the two probes 21 and 22 should be brought into contact with each other is miniaturized, the inspection by the four-terminal measurement can be performed satisfactorily.

  DESCRIPTION OF SYMBOLS 1 Inspection jig | tool, 2 to-be-inspected board, 2a, 2b Inspection point, 11 Probe coupling body, 12 Single probe, 13 Head part, 14 Electrode unit, 141-143 Electrode part, 144 Base member, 16 Tip side probe holding member , 161 First front end side through hole, 162 Second front end side through hole, 17 Rear end side probe holding member, 17a to 17d Plate member, 171 First rear end side through hole, 171a, 171b First Small-diameter portion, 171c Second small-diameter portion, 171d Buckling space forming portion, 171e Rear-end small-diameter portion, 172 Second rear-end side through-hole, 18 Connecting member, 21, 22 Probe, 21a, 22a Front-end portion, 21b, 21b rear end, 21c, 22c front end, 21d, 22d rear end, 21e, 22e central axis, 23 connecting portion, 24 core wire, 25 insulating layer.

Claims (4)

An inspection jig provided in an inspection apparatus for inspecting electrical characteristics of an inspection object,
A plurality of substantially needle-shaped probes having flexibility are connected to each other in a state where they are insulated from each other and arranged in parallel. In the portion on the side, a probe coupling body in which each probe can be bent and deformed independently of each other;
A tip-side probe holding member having a tip-side through-hole through which the tip-side that is in contact with the inspection target of the probe connector is inserted;
A rear end side probe holding member which is arranged at a distance from the front end side probe holding member and has a rear end side through-hole through which the rear end side of the probe coupling body is inserted;
An electrode unit provided with a plurality of electrode portions with which the rear end portions of the plurality of probes of the probe connector are respectively brought into contact;
In a state where the probe coupling body is held by the front end side probe holding member and the rear end side probe holding member, the probe coupling body is surrounded by a portion where the coupling portion is provided, and the probe coupling portion of the part is surrounded A restriction hole for restricting displacement in a direction perpendicular to the axis perpendicular to the axial direction of the body;
An inspection jig comprising: The inspection jig according to claim 1,
The connecting portion of the probe connector is configured such that when the probe connector is held by the tip-side probe holding member and the rear-end side probe holding member, the rear-end side probe holding member of the probe connector is Provided in the part located in the rear end side through-hole,
The rear end side through hole of the rear end side probe holding member is
A first small-diameter portion that is provided in a portion of the rear end side through-hole located on the inspection target side and functions as the restriction hole;
A second small diameter provided at a portion of the rear end side through-hole located on the electrode portion side, enclosing a portion of the probe connector on the rear end side and restricting displacement of the portion in the direction perpendicular to the axis And
The probe is provided between the first small diameter portion and the second small diameter portion of the rear end side through-hole, and has a larger inner diameter than the first small diameter portion and the second small diameter portion; A buckling space forming part that allows bending deformation of each probe of the coupling body;
An inspection jig characterized by comprising: In the inspection jig according to claim 1 or claim 2,
The probe connector is configured by connecting two probes at the connector.
On the distal end side of the two probes of the probe coupling body, a distal end that is in contact with the object to be inspected is formed at a position closer to the other probe than the central axis of each probe, and on the rear end side of the two probes An inspection jig, wherein a rear end that contacts the electrode portion is formed at a position opposite to the probe on the other side of the center axis of each probe. The inspection jig according to claim 3,
One of the two probes of the probe assembly is a probe for supplying power for inspection with respect to an inspection point set as the inspection object, and the other is a probe for measuring the potential of the inspection point of the inspection object. An inspection jig characterized by being.

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