JP2013152129A - Force detector, pressure detector, electronic apparatus and robot - Google Patents

Abstract

To provide a force detector having high measurement resolution and good measurement sensitivity, a pressure detection device, an electronic device, and a robot provided with the force detector.
A force detector includes a first electrode wiring, a second electrode wiring, a shape support body, and a pressure sensor serving as a plurality of detection units. The pressure sensor 12 is provided at the intersection of the first electrode wiring 211 and the second electrode wiring 212, and the second electrode wiring 212 is disposed closer to the detection surface than the first electrode wiring 211. The second electrode wiring 212 has a protrusion 212 a that bends along the shape support 214 in a region outside the pressure sensor 12. The force applied to one pressure sensor 12 is dispersed by the protrusion 212a and can be prevented from propagating to the adjacent pressure sensor 12 via the second electrode wiring 212, and the force P applied to the detection surface can be accurately measured. Can be measured.
[Selection] Figure 1

Description

  The present invention relates to a force detector, a pressure detection device including the force detector, an electronic apparatus, and a robot.

As the detection device, there is known a tactile sensor including a displaceable contact and a pressure-sensitive element that is provided on the surface and detects and outputs the displacement of the contact at a detection point (Patent Document 1). . Three or more contacts are provided on the surface of the pressure sensitive element, and three or more detection points of the pressure sensitive element are provided for each contact. Thus, it is possible to detect a load as a physical quantity acting on the contact and to detect a moment indicating in which direction the load is applied on the surface of the pressure sensitive element.
FIGS. 17A to 17C are schematic diagrams illustrating the configuration of the pressure-sensitive element disclosed in Patent Document 1. FIG. In Patent Document 1, as shown in FIGS. 17A to 17C, a pressure-sensitive conductive sheet 414, a plurality of first electrodes 411 provided on one surface side of the pressure-sensitive conductive sheet 414, A second electrode 412 provided so as to intersect the first electrode 411 on the other surface side of the piezoelectric conductive sheet 414 is provided, and a region where the first electrode 411 and the second electrode 412 intersect is defined as a detection point 413. An example of a functioning pressure sensitive element 400 is shown. That is, the pressure sensitive element 400 detects the electrical resistance between the first electrode 411 and the second electrode 412 via the pressure sensitive conductive sheet 414. Therefore, the tactile sensor obtains the load based on the change in electrical resistance detected by the pressure sensitive element 400.

JP 2008-164557 A

  In Patent Document 1, as shown in FIG. 17B, for example, adjacent detection points 413 in the direction (RR ′ direction) intersecting the extending direction (CC ′ direction) of the second electrode 412. Even if a load F is applied between the two detection points 413, the load F is difficult to be transmitted to the second electrodes 412 extending further outside the adjacent detection points 413. Therefore, in the direction intersecting the extending direction of the second electrodes 412 The measurement resolution of the load F can be ensured. However, as shown in FIG. 17C, in the extending direction (C-C ′ direction) of the second electrode 412, the applied load F is propagated and dispersed in the extending direction of the second electrode 412. Therefore, the measurement resolution and measurement sensitivity in the extending direction are reduced as compared with the direction intersecting the extending direction of the second electrode 412, and the load and the moment of the load applied to the contact cannot be accurately measured. was there.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A force detector according to this application example includes a first substrate, a flexible second substrate, and a pressure-sensitive material disposed between the first substrate and the second substrate. The first substrate includes a plurality of first electrode wirings spaced from each other on the side facing the pressure-sensitive material, and the second substrate is disposed on the side facing the pressure-sensitive material. A region including the second electrode wiring intersecting with the electrode wiring, where the first electrode wiring and the second electrode wiring intersect with each other is a detection portion, and the second electrode wiring is bent toward the pressure-sensitive material side between the adjacent detection portions. Or it has the protrusion part which curves.

  According to this application example, since the force applied to one detection unit is dispersed by the protrusion, it is possible to suppress the applied force from propagating to the adjacent detection unit via the second electrode wiring. Accordingly, it is possible to suppress a decrease in measurement resolution and detection sensitivity in the direction along the second electrode wiring. That is, the force applied to the detection surface can be accurately measured. In other words, a force detector with high measurement resolution and good measurement sensitivity can be provided.

  Application Example 2 In the force detector according to the application example described above, the second substrate has a shape support that supports the second electrode wiring between the adjacent detection units and bends or curves toward the pressure-sensitive material side. Features.

  According to this application example, the second electrode wiring can be formed along the shape support, and the protruding portion of the second electrode wiring can be formed in a desired shape.

  [Application Example 3] In the force detector according to the application example described above, a plurality of second electrode wirings are provided at a distance from each other, and the shape supports are arranged apart from each other between adjacent second electrode wirings. It is characterized by being.

  According to this application example, since the shape support, that is, the protrusions are arranged apart from each other, the force applied to one detection unit is dispersed by the plurality of protrusions. Propagation to the adjacent detection unit via the two-electrode wiring can be further suppressed.

  Application Example 4 In the force detector according to the application example described above, a plurality of second electrode wirings are provided spaced apart from each other, and the shape support body has a larger elastic coefficient than the second substrate and is adjacent to the first electrode. A plurality of second electrode wirings are arranged between the wirings.

  According to this application example, since the elastic modulus of the shape support is larger than the elastic coefficient of the second substrate, the force applied to one detection unit is applied to the adjacent detection unit via the shape support, that is, the protrusion. Propagation can be suppressed. Accordingly, it is possible to further suppress a decrease in measurement resolution and detection sensitivity in the direction along the second electrode wiring. In addition, since the shape support is disposed across the plurality of second electrode wires between the adjacent first electrode wires, the shape support can be easily formed.

  Application Example 5 In the force detector according to the application example described above, the shape support is integrally formed with the second substrate.

  According to this application example, since the shape support is integrally formed on the second substrate, the strength and durability of the shape support can be improved. Moreover, high production efficiency can be obtained.

  Application Example 6 The force detector according to the application example described above is characterized in that an insulating layer is provided between the second electrode wiring and the pressure-sensitive material and covers at least the protruding portion of the second electrode wiring.

  According to this application example, since the protruding portion of the second electrode wiring is covered with the insulating layer, force detection between the protruding portion of the second electrode wiring and the first electrode wiring can be prevented. That is, only a region where the first electrode wiring and the second electrode wiring intersect can be used as the detection unit, and more accurate force detection is possible.

  Application Example 7 In the force detector according to the application example described above, the pressure-sensitive material is a pressure-sensitive conductive elastic body.

  According to this application example, it is possible to suppress the force applied to one detection unit from propagating to the adjacent detection unit via the second electrode wiring. Therefore, it is possible to suppress an external force acting on a certain detection unit from being erroneously detected by a resistance type pressure sensor made of a pressure-sensitive conductive elastic body disposed in a detection unit adjacent to the detection unit.

  Application Example 8 In the force detector according to the application example described above, the pressure-sensitive material is a dielectric substance having elasticity.

  According to this application example, it is possible to suppress the force applied to one detection unit from propagating to the adjacent detection unit via the second electrode wiring. Therefore, it is possible to suppress an external force acting on a certain detection unit from being erroneously detected by a dielectric pressure sensor made of a dielectric material disposed in a detection unit adjacent to the detection unit.

  Application Example 9 In the force detector according to the application example described above, the pressure-sensitive material is a pressure-sensitive switch.

  According to this application example, it is possible to suppress the force applied to one detection unit from propagating to the adjacent detection unit via the second electrode wiring. Therefore, it can suppress that the external force which acted on a certain detection part is misdetected by the pressure sensor which consists of a pressure switch arrange | positioned at the detection part adjacent to the said detection part.

  Application Example 10 A pressure detection device according to this application example is a pressure detection device that detects the magnitude and direction of an external force, and the force detector according to the application example described above and an elastic protrusion on one surface side. The third substrate is disposed opposite to the force detector so that the tip of the elastic protrusion is in contact with the surface of the second substrate opposite to the side facing the pressure-sensitive material. It is characterized by being.

  According to this application example, the tactile sensor disclosed in Patent Document 1 can be deformed in a sliding direction (a direction parallel to the pressure detection device) in a state where the tip of the elastic protrusion is in contact with the second substrate. As compared with the above, the detection accuracy of the magnitude and direction of the external force can be increased. When an external force is applied to the surface of the third substrate, the elastic protrusion is compressed and deformed with the tip portion in contact with the second substrate. At this time, if there is a sliding force component in a predetermined direction in the plane, the deformation of the elastic protrusion is biased. That is, the center of gravity of the elastic protrusion moves in a predetermined direction (sliding direction). As a result, the proportion of the plurality of pressure sensors in the force detector that overlap with the portion where the center of gravity of the elastic protrusion has moved becomes relatively large. That is, different pressure values are detected by each pressure sensor. Specifically, a relatively large pressure value is detected by the pressure sensor at a position overlapping with the center of gravity of the elastic protrusion, and a relatively small pressure value is detected by a pressure sensor at a position not overlapping with the center of gravity of the elastic protrusion. It will be a thing. Therefore, the calculation device can calculate the difference between the pressure values detected by the pressure sensors, and can determine the direction and magnitude in which the external force is applied based on the difference. Further, since the sensitivity and resolution of the force detector are excellent, it is possible to provide a pressure detection device that detects the magnitude and direction of the external force with high accuracy.

  Application Example 11 In the pressure detection device according to the application example described above, a region where the first electrode wiring and the second electrode wiring intersect is a detection unit, a reference point is defined on the first substrate, and the detection unit is A plurality of third substrates are provided around the reference point, and the third substrate is disposed opposite to the force detector so that the center of gravity of the elastic protrusion overlaps with the reference point and the tip of the elastic protrusion is in contact with the reference point. It is characterized by.

  According to this application example, when an external force is applied to the surface of the third substrate, the elastic protrusion is compressed and deformed in a state where the tip portion is in contact with the second substrate. At this time, if there is a sliding force component in a predetermined direction in the plane, the deformation of the elastic protrusion is biased. That is, the center of gravity of the elastic protrusion is displaced from the reference point and moves in a predetermined direction (sliding direction). As a result, the ratio of the plurality of detection units provided around the reference point, that is, the plurality of pressure sensors, overlapping with the portion where the center of gravity of the elastic protrusion moves is relatively large. That is, different pressure values are detected by each pressure sensor. Specifically, a relatively large pressure value is detected by the pressure sensor at a position overlapping with the center of gravity of the elastic protrusion, and a relatively small pressure value is detected by a pressure sensor at a position not overlapping with the center of gravity of the elastic protrusion. It will be a thing. Therefore, the calculation device can calculate the difference between the pressure values detected by the pressure sensors, and can determine the direction and magnitude in which the external force is applied based on the difference. Further, since the sensitivity and resolution of the force detector are excellent, it is possible to provide a pressure detection device that detects the magnitude and direction of the external force with high accuracy.

  Application Example 12 In the pressure detection device according to the application example described above, the elastic protrusions are elastically deformed by an external force, and are detected by detection units arbitrarily combined among the pressure values detected by the plurality of detection units. You may provide the calculating device which calculates the difference of a pressure value, and calculates the direction and magnitude | size of an external force based on the difference.

  Application Example 13 An electronic apparatus according to this application example includes the pressure detection device according to the application example.

  According to this configuration, since the pressure detection device described above is provided, it is possible to provide an electronic device capable of detecting the direction and magnitude of the external force with high accuracy.

  Application Example 14 A robot according to this application example includes the pressure detection device according to the application example.

  According to this configuration, since the pressure detecting device described above is provided, a robot capable of detecting the direction and magnitude of the external force with high accuracy can be provided.

(A) And (b) is a figure which shows schematic structure of the force detector which concerns on Embodiment 1. FIG. 1 is an exploded perspective view showing a schematic configuration of a pressure detection device according to Embodiment 1. FIG. (A)-(c) is sectional drawing which shows the change of the cross-sectional shape by the pressure sensor which concerns on Embodiment 1. FIG. (A)-(c) is a top view which shows the change of the pressure value by the pressure sensor which concerns on Embodiment 1. FIG. FIG. 3 is a diagram illustrating a coordinate system of a sensing area according to the first embodiment. The figure which shows the pressure distribution of the perpendicular direction by the pressure sensor which concerns on Embodiment 1. FIG. FIG. 5 is a diagram illustrating a calculation example of a sliding direction by the pressure sensor according to the first embodiment. FIG. 4 is an exploded perspective view illustrating a schematic configuration of a pressure detection device according to a second embodiment. (A)-(c) is sectional drawing which shows the change of the cross-sectional shape by the pressure sensor which concerns on Embodiment 2. FIG. (A)-(c) is a top view which shows the change of the pressure value by the pressure sensor which concerns on Embodiment 2. FIG. FIG. 6 is a diagram illustrating a coordinate system of a sensing area according to the second embodiment. The figure which shows the planar shape of the shape support body in the modification 1. FIG. (A)-(d) is a figure which shows the cross-sectional shape of the shape support body in the modification 2. FIG. The figure explaining the cross-sectional shape of the force detector in the modification 3. (A) And (b) is a schematic diagram which shows schematic structure of an example portable information terminal of an electronic device. (A) And (b) is a schematic diagram which shows schematic structure of an example robot hand of a robot. (A)-(c) is a schematic diagram which shows the structure of the pressure sensitive element shown by patent document 1. FIG.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings. Note that the drawings to be used are appropriately enlarged or reduced so that the part to be described can be recognized. In the following description, the XYZ orthogonal coordinate system shown in FIG. 1 is set, and each member will be described with reference to this XYZ orthogonal coordinate system. In the XYZ orthogonal coordinate system, the X axis and the Y axis are set in a direction parallel to the first substrate 10, and the XY plane (z = 0) is set as the detection surface (the surface side of the second substrate 20 in FIG. 1B). ). Further, the Z axis is set in a direction perpendicular to the first substrate 10 (normal direction of the detection surface).

  In the following embodiments, for example, when “on the substrate” is described, the substrate is disposed so as to be in contact with the substrate, or is disposed on the substrate via another component, or the substrate. It is assumed that a part is arranged so as to be in contact with each other and a part is arranged via another component.

(Embodiment 1)
<Force detector>
The force detector of this embodiment will be described with reference to FIG.
1A and 1B are diagrams illustrating a schematic configuration of a force detector according to the first embodiment, in which FIG. 1A is a plan view and FIG. 1B is a cross-sectional view taken along line AA ′ in FIG.
The force detector 2 of the present embodiment includes a first substrate 10, a second substrate 20, and a pressure sensitive material 15, as shown in FIG. In the present embodiment, the pressure sensitive material 15 is a pressure sensitive conductive elastic body. The pressure sensitive material 15 is sandwiched between the front surface of the first substrate 10 and the back surface of the second substrate 20, and the front surface side of the second substrate 20 is a detection surface. The force detector 2 detects the force applied to this detection surface. In addition, as for the 1st board | substrate 10 and the 2nd board | substrate 20, one surface is called the surface, and the other other surface is called the back surface. In this specification, the direction facing the positive direction of the Z-axis (upward in FIG. 1B) is referred to as the front surface, and the direction facing the negative direction of the Z-axis (downward in FIG. 1B) is the back surface. Called.

  The force detector 2 further includes a first electrode wiring 211 and a second electrode wiring 212, the first electrode wiring 211 is formed on the front surface of the first substrate 10, and the second electrode wiring 212 is formed on the back surface of the second substrate 20. Is formed. Therefore, a pressure-sensitive conductive elastic body as the pressure-sensitive material 15 is provided between the first electrode wiring 211 and the second electrode wiring 212. Since the detection surface of the force detector 2 is on the surface side of the second substrate 20, the second electrode wiring 212 is arranged on the detection surface side of the first electrode wiring 211 in a cross-sectional view. On the other hand, in plan view, as shown in FIG. 1A, the first electrode wiring 211 and the second electrode wiring 212 are arranged so as to cross each other, and the first electrode wiring 211 and the second electrode are arranged. A region where the wiring 212 intersects is a detection unit, and the pressure sensor 12 is provided in the detection unit. In other words, the force detector 2 includes a plurality of pressure sensors 12 of a pressure sensitive resistance type.

  Furthermore, the back surface of the second substrate 20 has a shape support 214 that protrudes toward the pressure-sensitive material 15, and the second electrode wiring 212 is formed along the shape of the shape support 214. That is, between the pressure sensors 12 adjacent to each other along the second electrode wiring 212, the second electrode wiring 212 has a protruding portion 212a that bends toward the pressure-sensitive material 15 side. The shape supporting bodies 214 having a triangular cross section are disposed so as to be separated from each other between the adjacent second electrode wirings 212.

  The first substrate 10 is a rectangular plate made of a material such as glass, quartz, and plastic, for example, and the size (size in plan view) of the first substrate 10 is, for example, about 20 mm long × 20 mm wide. . The second substrate 20 is made of a flexible plastic film such as a polyimide film or a polyester film. The pressure-sensitive material 15 may be a dielectric material, and the force detector 2 is connected to the pressure sensor 12 having a capacitance type having a dielectric material between the first electrode wiring 211 and the second electrode wiring 212. It may be configured. Further, the pressure sensitive material 15 may be a pressure sensitive switch in which electrical switching is caused by an applied pressure.

  The shape support 214 is preferably made of an insulating member having an elastic coefficient larger than that of the second substrate 20, but the same member as the member constituting the second substrate 20 described above may be used. . According to this, the 2nd board | substrate 20 and the shape support body 214 can also be integrally molded.

<Pressure detection device>
Next, a pressure detection apparatus using the above-described force detector 2 will be described with reference to FIG. FIG. 2 is an exploded perspective view illustrating a schematic configuration of the pressure detection device according to the first embodiment. In FIG. 2, reference symbol P indicates a reference point, and reference symbol S indicates a unit detection region detected by a plurality of pressure sensors 12 arranged corresponding to one elastic protrusion 32. In FIG. 1A, the unit detection region S and the reference point P are drawn corresponding to FIG.

  The pressure detection apparatus 1 according to the present embodiment is a pressure sensor type touch pad that detects the direction and magnitude of an external force applied to a reference point P, and is used as a pointing device instead of a mouse in an electronic device such as a notebook computer. It is used. Alternatively, it is attached to a finger of a robot hand and used as a tactile sensor. The “reference point” is a point at which the center of the elastic protrusion 32 is located when no sliding force is applied.

  As shown in FIG. 2, the pressure detection device 1 includes a force detector 2 having a plurality of pressure sensors 12 arranged around a reference point P, a center of gravity located at a position overlapping the reference point P, and a tip by external force. And a third substrate 30 on which elastic protrusions 32 that are elastically deformed in a state where the portion is in contact with the force detector 2 are provided.

  The pressure detection device 1 calculates the difference between the pressure values detected by the pressure sensors 12 that are arbitrarily combined among the pressure values detected by the plurality of pressure sensors 12 when the elastic protrusion 32 is elastically deformed by an external force. And an arithmetic unit (not shown) that calculates the direction and magnitude in which the external force is applied based on the difference.

  The plurality of pressure sensors 12 are arranged point-symmetrically with respect to the reference point P. For example, the plurality of pressure sensors 12 are arranged in a matrix in two directions (X direction and Y direction) orthogonal to each other. Thereby, since the distance between the reference point P and each pressure sensor 12 becomes equal to each other, the relationship between the deformation of the elastic protrusion 32 and the pressure value detected by each pressure sensor 12 becomes equal to each other. Therefore, it becomes easy to calculate the difference between the pressure values detected by the pressure sensors 12 arbitrarily combined among the pressure values of the pressure sensors 12. A method for calculating the difference between the pressure values will be described later.

  A plurality of pressure sensors 12 are arranged in a total of four rows and two columns per unit detection area S. The center of the four pressure sensors 12 (the center of the unit detection region S) is the reference point P. For example, the size of the unit detection region S (size in plan view) is about 4 mm long × 4 mm wide. Further, the areas of the four pressure sensors 12 are substantially equal. The pressure sensor 12 detects a pressure applied when an external force is applied to the contact surface as a change in resistance and converts it into an electrical signal. However, the method of the pressure sensor 12 is not particularly limited, and for example, the above-described capacitance method can be used.

  The third substrate 30 includes a rectangular plate-shaped third substrate body 31 and a plurality of elastic protrusions 32 disposed on the third substrate body 31. The third substrate body 31 is a portion that receives an external force. The third substrate body 31 can be made of a material such as glass, quartz, and plastic, or can be made of a resin material such as a urethane foam resin or a silicone resin. In the present embodiment, a resin material is used as a material for forming the third substrate body 31 and the elastic protrusions 32, and the third substrate body 31 and the elastic protrusions 32 are integrally formed with a mold.

  The plurality of elastic protrusions 32 are arranged in a matrix in the X direction and the Y direction on the third substrate body 31. The tip of the elastic protrusion 32 has a spherical weight shape and is in contact with the force detector 2. The center of gravity of the elastic protrusion 32 is initially arranged at a position overlapping the reference point P. Further, the plurality of elastic body protrusions 32 are spaced apart from each other. For this reason, it is possible to allow a deformation amount in a direction parallel to the surface of the third substrate body 31 when the elastic protrusion 32 is elastically deformed.

  The size of the elastic protrusion 32 can be arbitrarily set. Here, the diameter of the base of the elastic protrusion 32 (the diameter of the portion where the elastic protrusion 32 contacts the third substrate body 31) is about 5 mm. The height of the elastic protrusion 32 (the distance in the Z direction of the elastic protrusion 32) is about 5 mm. The spacing between adjacent elastic protrusions 32 is about 2.5 mm. The durometer hardness of the elastic projection 32 (type A, measured by a durometer conforming to ISO7619) is about 30.

  Next, a method for detecting the direction and magnitude of the external force acting on the reference point P will be described with reference to FIGS. 3A to 3C are cross-sectional views showing structural changes of the pressure detection device according to the first embodiment. FIGS. 4A to 4C are plan views showing changes in the pressure value of the pressure detection device according to the first embodiment, corresponding to FIGS. 3A to 3C. 3A and 4A show a state before an external force is applied to the surface of the third substrate 30 (when no external force is applied). FIG. 3B and FIG. 4B show a state in which an external force in a vertical direction (a state without a sliding force) is applied to the surface of the third substrate 30. 3C and 4C show a state in which an external force in an oblique direction (with a sliding force) is applied to the surface of the third substrate 30. FIG. 4A to 4C, the symbol G indicates the center of gravity (pressure center) of the elastic protrusion 32.

  As shown in FIGS. 3A and 4A, the elastic protrusion 32 is not deformed before an external force is applied to the surface of the pressure detection device 1. Thereby, the distance between the force detector 2 and the third substrate 30 is kept constant. At this time, the gravity center G of the elastic protrusion 32 is arranged at a position overlapping the reference point P. The pressure value of each pressure sensor 12 at this time is stored in a memory (not shown), for example. The direction and magnitude of the external force acting are obtained based on the pressure value of each pressure sensor 12 stored in the memory.

  As shown in FIGS. 3B and 4B, when a vertical external force is applied to the surface of the pressure detection device 1, the elastic protrusion 32 has a plurality of tips arranged on the force detector 2. The pressure sensor 12 is compressed and deformed in the Z direction in contact with the pressure sensor 12. Thereby, the 2nd board | substrate 20 bends in -Z direction, and the distance between the force detector 2 and the 3rd board | substrate 30 becomes small compared with the case where there is no effect | action of an external force. The pressure value of the pressure sensor 12 at this time becomes larger than when there is no external force. The amount of change is substantially the same for each pressure sensor 12.

  As shown in FIGS. 3C and 4C, when an external force in an oblique direction is applied to the surface of the pressure detection device 1, the elastic protrusion 32 has a plurality of tips arranged on the force detector 2. In a state where the pressure sensor 12 is in contact with the pressure sensor 12, it is inclined and compressed and deformed. Thereby, the 2nd board | substrate 20 bends in -Z direction, and the distance between the force detector 2 and the 3rd board | substrate 30 becomes small compared with the case where there is no effect | action of an external force. At this time, the center of gravity G of the elastic protrusion 32 is shifted from the reference point P in the + X direction and the + Y direction. In this case, the area where the tip of the elastic protrusion 32 and the four pressure sensors 12 overlap each other changes. Specifically, the pressure disposed in the + X direction and the + Y direction rather than the area overlapping the tip of the elastic protrusion 32 and the pressure sensor 12 disposed in the −X direction and the −Y direction among the four pressure sensors 12. The area overlapping the sensor 12 is larger.

  The elastic protrusion 32 is biased in deformation by an external force in an oblique direction. That is, the center of gravity G of the elastic protrusion 32 deviates from the reference point P and moves in the sliding direction (X direction and Y direction). Then, each pressure sensor 12 detects a different pressure value. Specifically, a relatively large pressure value is detected by the pressure sensor 12 at a position that overlaps the gravity center G of the elastic protrusion 32, and is relatively small by the pressure sensor 12 at a position that does not overlap the gravity center G of the elastic protrusion 32. The pressure value will be detected. And the direction and magnitude | size to which external force was applied are calculated | required based on the calculation method of the difference mentioned later.

  FIG. 5 is a diagram illustrating a coordinate system of the sensing area according to the first embodiment. FIG. 6 is a diagram illustrating a vertical pressure distribution by the pressure sensor according to the first embodiment. FIG. 7 is a diagram illustrating a calculation example of the slip direction by the pressure sensor according to the first embodiment.

As shown in FIG. 5, a plurality of pressure sensors S1 (12) to S4 (12) are arranged in a total of four per unit detection area S in two rows and two columns. Here, when the pressure values (detected values) detected by the pressure sensors S1 (12) to S4 (12) are P _S1 , P _S2 , P _S3 , and P _S4 , respectively, and the area of each pressure sensor 12 is A, The X direction component Fx of the external force (a component force acting in the X direction among the in-plane direction components of the external force) is expressed by the following equation (1).

  Further, the Y direction component Fy of the external force (the component force acting in the Y direction among the in-plane direction components of the external force) is expressed by the following equation (2).

  Note that f in the equations (1) and (2) is a proportionality constant inherent to the pressure detection device 1 and has a unit of force. The Z direction component Fz of the external force (vertical direction component of the external force) is expressed by the following formula (3).

In this embodiment, when detecting the component of the external force, the equation (3) is used for the normal component Fz, and the equations (1) and (2) are used for the sliding force. The following steps are taken for the sliding force.
First, a first axis (for example, X axis) and a second axis (for example, Y axis) are defined on the detection surface. In order to detect the component of the sliding force along the first axis, the pressure sensor 12 (for example, the pressure sensor S2 (12) and the pressure sensor S4 (12)) positioned in the positive direction of the first axis from the reference point P is used. The sum of the pressure values detected by the pressure sensor 12 (for example, the pressure sensor S1 (12) and the pressure sensor S3 (12)) located in the negative direction of the first axis is subtracted from the sum of the detected pressure values (1 This is obtained by performing a predetermined calculation using this numerical value (one-axis difference). Similarly, in order to detect the component of the sliding force along the second axis, the pressure sensor 12 (for example, the pressure sensor S1 (12) and the pressure sensor S2 (12) positioned in the positive direction of the second axis from the reference point P is used. )), The sum of the pressure values detected by the pressure sensor 12 (for example, the pressure sensor S3 (12) and the pressure sensor S4 (12)) located in the negative direction of the second axis. Subtraction (referred to as a two-axis difference), and a predetermined calculation is performed using this numerical value (two-axis difference). As an example of the predetermined calculation, the sum of the pressure values detected by all the pressure sensors 12 (for example, the pressure sensors S1 (12) to S4 (12)) is used as the previous numerical value (one-axis difference or two-axis difference). Is multiplied by a proportionality constant f unique to the pressure detection device 1.

  As shown in the equation (1), in the X direction component Fx of the external force, the pressure sensor S2 (12 arranged in the + X direction among the pressure values detected by the four pressure sensors S1 (12) to S4 (12). ) And the value detected by the pressure sensor S4 (12) are combined, and the values detected by the pressure sensor S1 (12) and the pressure sensor S3 (12) arranged in the −X direction are combined. In this way, the pressure value by the combination of the pressure sensor S2 (12) and the pressure sensor S4 (12) arranged in the + X direction and the pressure sensor S1 (12) and the pressure sensor S3 (12) arranged in the -X direction. The X direction component of the external force is obtained based on the difference from the pressure value by the combination.

  As shown in Expression (2), in the Y direction component Fy of the external force, the pressure sensor S1 (12) arranged in the + Y direction among the pressure values detected by the four pressure sensors S1 (12) to S4 (12). ) And the value detected by the pressure sensor S2 (12) are combined, and the value detected by the pressure sensor S3 (12) and the pressure sensor S4 (12) arranged in the −Y direction are combined. Thus, the pressure value by the combination of the pressure sensor S1 (12) and the pressure sensor S2 (12) arranged in the + Y direction and the pressure sensor S3 (12) and the pressure sensor S4 (12) arranged in the -Y direction. The Y direction component of the external force is obtained based on the difference from the pressure value by the combination.

  As shown in Expression (3), the Z direction component Fz of the external force is obtained by a resultant force obtained by adding the pressure values of the four pressure sensors S1 (12) to S4 (12). However, the Z direction component Fz of the external force tends to be detected with a larger detection value than the X direction component Fx of the external force and the Y direction component Fy (component force) of the external force. For example, when a hard material is used as the material of the elastic protrusion 32 or the shape of the tip is sharpened, the detection sensitivity of the Z-direction component Fz of the external force increases. However, if a hard material is used as the material of the elastic protrusion 32, the elastic protrusion 32 is not easily deformed, and the detected value of the external force in the in-plane direction becomes small. Further, when the shape of the tip of the elastic protrusion 32 is sharpened, a strong sensitivity (uncomfortable feeling) may be given to the touch feeling when the contact surface is touched with a finger. Therefore, in order to align the detected value of the Z direction component Fz of the external force with the detected value of the X direction component Fx of the external force and the detected value of the Y direction component Fy of the external force, it is determined by the material and shape of the elastic protrusion 32. It is necessary to appropriately correct the detected value with the correction coefficient.

  FIG. 6 shows an example in which the pressure detection devices 1 are arranged in a matrix of 15 rows and 15 columns (225 in total) to form a touch pad. Each pressure detection device 1 includes pressure sensors S1 (12) to 12 in a unit detection region S. A total of four S4 (12) are arranged in two rows and two columns. In FIG. 6, the position on the upper left side of the center of the detection surface of the touchpad is pushed diagonally with a finger. At this time, the pressure in the vertical direction (Z direction) of the external force is greatest at the center of the portion where the external force is applied (the output voltage of the pressure sensor 12 is about 90 mV to 120 mV). In addition, the pressure in the vertical direction (Z direction) of the external force is the central part, the peripheral part (the output voltage of the pressure sensor 12 is about 60 mV to 90 mV), and the outermost peripheral part (the output voltage of the pressure sensor 12 is about 30 mV to 60 mV). ) In order of decreasing. Moreover, the output voltage of the pressure sensor 12 is about 0 mV to 30 mV in the region not pressed by the finger.

  Consider a method of calculating the in-plane direction component (sliding direction) of the external force when the upper left position of the touchpad detection surface shown in FIG. FIG. 7 shows an example of calculating the external force. In the example of FIG. 7, the finger pressing force (external force) acts on a portion arranged in 3 rows × 3 columns in the pressure detection device 1 arranged in 15 rows × 15 columns. . The pressure in the vertical direction of the external force is the largest (110 mV) at the center of 3 rows and 3 columns where the external force is applied, as in FIG. Each pressure detection device 1 has four pressure sensors S1 (12) to S4 (12), respectively, and the sum of the outputs from the four pressure sensors S1 (12) to S4 (12) is a normal line of the external force. It becomes a component (the above-mentioned formula (3)). For example, in the pressure detection device 1 in the central part, the sum of the outputs from the pressure sensors 12 is 54 mV + 28 mV + 18 mV + 10 mV = 110 mV.

  On the other hand, the difference between the pressure values detected by the pressure sensors arbitrarily combined among the pressure values detected by the pressure sensors S1 (12) to S4 (12) is calculated, and an external force is applied based on the difference. The calculated direction (direction of sliding force) is calculated. That is, in each pressure detection device 1, the X direction component Fx of the external force and the Y direction component Fy of the external force are calculated based on the above-described formulas (1) and (2). For example, in the pressure detection device 1 at the center, Fx = (28 + 10−54−18) /110f=−0.31f and Fy = (54 + 28−18−10) /110f=0.49f. Therefore, tan θ = −0.49 / 0.31 = −1.58, and the direction of the sliding force is θ = 122 °. Thus, when taking the average of the direction of the sliding force detected by the nine pressure detectors 1, it can be seen that an external force acts in a direction of about 123 ° counterclockwise with respect to the + X direction. In calculating the direction in which the external force acts, in addition to the method of obtaining the average value of the results calculated from the plurality of pressure detection devices 1 as performed here, for example, the plurality of pressure detection devices 1 It is possible to use a method that employs the maximum value of the results calculated from the above, a method that employs a detection value larger than a predetermined threshold, and the like.

  According to the force detector 2 of the present embodiment, since the protruding portion 212a is provided in the second electrode wiring 212 between the adjacent pressure sensors 12, the force applied to one pressure sensor 12 is the second electrode wiring. Propagation to the adjacent pressure sensor 12 via 212 can be suppressed. Therefore, it is possible to suppress a decrease in measurement resolution and detection sensitivity in the direction along the second electrode wiring 212. That is, the force applied to the detection surface can be accurately measured. In other words, the force detector 2 having high measurement resolution and good measurement sensitivity can be provided. In addition, since the first electrode wiring 211 has a straight band shape, the manufacturing process is easy and a plurality of pressure sensors 12 can be arranged in a matrix.

  According to the pressure detection device 1 of the present embodiment, in the sliding direction (direction parallel to the surface of the pressure sensor 12) with the tip of the elastic protrusion 32 in contact with the force detector 2 (the plurality of pressure sensors 12). Since it can be deformed, the detection accuracy of the direction and magnitude of the external force can be increased as compared with the tactile sensor of Patent Document 1. When an external force is applied to the surface of the pressure detection device 1, the elastic protrusion 32 is compressed and deformed in a state where the tip portion is in contact with the plurality of pressure sensors 12 arranged in the force detector 2. At this time, when there is a sliding force component in a predetermined direction in the surface, the elastic protrusion 32 is biased in deformation. That is, the center of gravity of the elastic protrusion 32 is shifted from the reference point P and moves in a predetermined direction (sliding direction). As a result, the ratio of the plurality of pressure sensors 12 overlapping the portion where the center of gravity of the elastic protrusion 32 has moved becomes relatively large. That is, different pressure values are detected by the pressure sensors S1 (12) to S4 (12). Specifically, a relatively large pressure value is detected by the pressure sensor 12 at a position overlapping the gravity center of the elastic protrusion 32, and a relatively small pressure value is detected by the pressure sensor 12 at a position not overlapping with the gravity center of the elastic protrusion 32. Will be detected. Therefore, the calculation device can calculate the difference between the pressure values detected by the pressure sensors S1 (12) to S4 (12), and can determine the direction and magnitude in which the external force is applied based on the difference. Therefore, it is possible to provide the pressure detection device 1 capable of detecting the direction and magnitude of the external force with high accuracy.

  According to the present embodiment, since the plurality of pressure sensors 12 are arranged point-symmetrically with respect to the reference point P, the distances between the reference point P and each pressure sensor 12 are equal to each other. For this reason, the relationship between the deformation amount of the elastic protrusion 32 and the pressure values detected by the pressure sensors S1 (12) to S4 (12) are equal to each other. For example, when the plurality of pressure sensors 12 are arranged at different distances from the reference point P, the pressure values detected by the pressure sensors 12 are different from each other even if the deformation amount of the elastic protrusion 32 is the same. Become. For this reason, when calculating the difference between the detection values, a correction coefficient corresponding to the arrangement position of each of the pressure sensors S1 (12) to S4 (12) is required. However, according to the present embodiment, the relationship between the deformation amount of the elastic protrusion 32 and the pressure value detected by each of the pressure sensors S1 (12) to S4 (12) is equal to each other, and thus the correction coefficient is not necessary. . Therefore, it becomes easy to calculate the direction and magnitude of the external force from the difference between the pressure values of the pressure sensors S1 (12) to S4 (12), and the external force can be detected efficiently.

  According to the present embodiment, since the plurality of pressure sensors 12 are arranged in a matrix in two directions orthogonal to each other, any pressure value detected by each of the pressure sensors S1 (12) to S4 (12) is arbitrarily selected. It becomes easy to calculate the direction and magnitude of the external force from the difference between the pressure values detected by the combined pressure sensors 12. For example, when the X direction component of the in-plane direction component is calculated, the pressure sensor S2 (relatively arranged in the + X direction is compared with the case where the plurality of pressure sensors 12 are randomly arranged in a plurality of directions. 12) and the combination of the pressure sensor S4 (12) and the combination of the pressure sensor S1 (12) and the pressure sensor S3 (12) arranged in the -X direction are easily distinguished and selected. Therefore, the external force can be detected efficiently.

  According to this embodiment, since the plurality of elastic protrusions 32 are arranged on the third substrate body 31 so as to be separated from each other, the in-plane of the third substrate body 31 when the elastic protrusion 32 is elastically deformed. The amount of deformation in the direction parallel to can be allowed. For example, when one elastic protrusion 32 is deformed, it is possible to suppress the deformation of the other elastic protrusion 32. For this reason, external force can be correctly transmitted to each pressure sensor S1 (12) -S4 (12) compared with the case where a plurality of elastic body protrusions 32 are arranged in contact with each other. Therefore, the direction and magnitude of the external force can be detected with high accuracy.

  In the present embodiment, an example in which a total of four pressure sensors 12 are arranged in two vertical rows and two horizontal columns per unit detection region S has been described. However, the present invention is not limited to this. Three or more pressure sensors 12 may be disposed per unit detection region S.

(Embodiment 2)
<Other pressure detection devices>
Next, the pressure detection apparatus of Embodiment 2 is demonstrated with reference to FIGS.
FIG. 8 is an exploded perspective view showing a schematic configuration of the pressure detection device according to the second embodiment of the present invention, corresponding to FIG. In FIG. 8, reference symbol P indicates a reference point, and reference symbol S indicates a unit detection region detected by a plurality of pressure sensors 112 arranged corresponding to one elastic protrusion 32. The pressure detection device 4 of the present embodiment is the same as the pressure detection device 1 described in the above-described first embodiment in that a plurality of pressure sensors 112 are arranged in at least four rows and four columns in two directions orthogonal to each other. Different. 8, the same components as those in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted. In FIG. 8, for the sake of convenience, a plurality of pressure sensors 112 are arranged in four rows and four columns per unit detection area S, but actually, as shown in FIGS. However, the unit detection area S may be arranged in four rows and four columns or more.

  As shown in FIG. 8, the pressure detection device 4 includes a force detector 3 having a plurality of pressure sensors 112 arranged around the reference point P, a center of gravity located at a position overlapping the reference point P, and a tip by external force. And a third substrate 30 formed with an elastic protrusion 32 that is elastically deformed in a state where the portion is in contact with the force detector 3.

  A plurality of pressure sensors 112 are arranged in a total of 16 in at least four rows and four columns in two directions (X direction and Y direction) orthogonal to each other. Specifically, a plurality of pressure sensors 112 are arranged in a total of 16 per unit detection region S in at least 4 rows and 4 columns. The center of these 16 pressure sensors 112 (the center of the unit detection region S) is the reference point P.

  9A to 9C are cross-sectional views showing changes in the structure of the pressure detection device 4 according to the second embodiment, corresponding to FIGS. 3A to 3C. FIGS. 10A to 10C are plan views showing changes in the pressure value of the pressure detection device 4 according to the second embodiment, corresponding to FIGS. 9A to 9C. 9A and 10A show a state before an external force is applied to the surface of the pressure detection device 4 (when no external force is applied). FIG. 9B and FIG. 10B show a state in which a vertical external force is applied to the surface of the pressure detection device 4. FIG. 9C and FIG. 10C show a state in which an external force in an oblique direction is applied to the surface of the pressure detection device 4. Further, in FIGS. 10A to 10C, the symbol G indicates the center of gravity of the elastic protrusion 32. 9 and 10, the same reference numerals are given to the same components as those in FIGS. 3 and 4, and detailed description thereof is omitted.

As shown in FIGS. 9A and 10A, the elastic protrusion 32 is not deformed before an external force is applied to the surface of the pressure detection device 4. Thereby, the distance between the force detector 3 and the third substrate 30 is kept constant. At this time, the gravity center G of the elastic protrusion 32 is arranged at a position overlapping the reference point P. The pressure value of each pressure sensor 112 at this time is stored in a memory (not shown), for example. The direction and magnitude of the external force acting are obtained based on the pressure value of each pressure sensor 112 stored in the memory.
The force detector 3 includes a first substrate 110 having a first electrode wiring 311, a second substrate 120 having a second electrode wiring 312 arranged in a direction intersecting the first electrode wiring 311, The pressure sensitive material 15 is sandwiched between the substrates. The material configuration of the first substrate 110 and the second substrate 120 is the same as that of the first embodiment.

  As shown in FIG. 9B and FIG. 10B, when a vertical external force is applied to the surface of the pressure detection device 4, the elastic protrusion 32 has its tip portion disposed on the surface of the force detector 3. In addition, it is compressed and deformed in the Z direction in contact with the plurality of pressure sensors 112. As a result, the second substrate 120 bends in the −Z direction, and the distance between the force detector 3 and the third substrate 30 becomes smaller than when there is no external force. The pressure value detected by the pressure sensor 112 at this time becomes larger than when there is no external force.

  As shown in FIGS. 9C and 10C, when an external force in an oblique direction is applied to the surface of the pressure detection device 4, the tip of the elastic protrusion 32 is disposed on the surface of the force detector 3. In a state where the pressure sensor 112 is in contact with the plurality of pressure sensors 112, the pressure sensor 112 is inclined and compressed and deformed. As a result, the second substrate 120 bends in the −Z direction, and the distance between the force detector 3 and the third substrate 30 becomes smaller than when there is no external force. Further, the amount of deflection of the second substrate 120 is greater in the + X direction component than in the −X direction component. At this time, the center of gravity G of the elastic protrusion 32 is shifted from the reference point P in the + X direction and the + Y direction. In this case, the ratio of the area where the tip of the elastic protrusion 32 overlaps with the plurality of pressure sensors 112 is arranged in the + X direction and the + Y direction rather than the area overlapping the portion arranged in the −X direction and the −Y direction. The ratio of the area that overlaps with the portion is larger.

  FIG. 11 is a diagram illustrating a coordinate system of the sensing area according to the second embodiment, corresponding to FIG. In FIG. 11, a plurality of pressure sensors Si (112) (100) are arranged in a matrix, and 25 of these pressure sensors Si (112) are partitioned in the −X direction and the + Y direction, respectively. It is arranged in a region, a region partitioned in the + X direction and the + Y direction, a region partitioned in the −X direction and the −Y direction, and a region partitioned in the + X direction and the −Y direction. In FIG. 11, for convenience, 100 pressure sensors Si (112) are illustrated, but the number of pressure sensors Si (112) is not limited to this, and can be arbitrarily changed.

  As shown in FIG. 11, the plurality of pressure sensors Si (112) are arranged in a total of 100 per unit detection area S in 10 rows and 10 columns. Here, the pressure value (detection value) detected by each pressure sensor Si (112) is Pi (i = 1 to 100), and the in-plane direction of the distance between the reference point P and each pressure sensor Si (112). Let the component be ri (i = 1 to 100). Further, when the X direction component of the in-plane direction component is rxi (i = 1 to 100) and the Y direction component of the in-plane direction component is ryi (i = 1 to 100), the X direction component Fx (external force) of the external force Of the in-plane direction component) is expressed by the following formula (4).

  Further, the Y direction component Fy of the external force (a component force acting in the Y direction among the in-plane direction components of the external force) is expressed by the following equation (5).

  In the equations (4) and (5), g is a proportionality constant inherent to the pressure detection device 4 and has a unit of force / length. Further, the Z direction component Fz of the external force (vertical direction component of the external force) is expressed by the following formula (6). A in Expression (6) is the area of one pressure sensor 112.

  In this embodiment, when detecting the component of the external force, the equation (6) is used for the normal component Fz, and the equations (4) and (5) are used for the sliding force. The following steps are taken to detect slip force. First, a first axis (for example, X axis) and a second axis (for example, Y axis) are defined on the detection surface. In order to detect the component of the sliding force along the first axis, the pressure value detected by each pressure sensor 112 is weighted by the first axis component of the distance, and these weighted pressure values (referred to as first moments). It is obtained by performing a predetermined calculation using the sum of. Similarly, in order to detect the component of the sliding force along the second axis, the pressure value detected by each pressure sensor 112 is weighted by the second axis component of the distance, and these weighted pressure values (second moments) are detected. Is obtained by performing a predetermined calculation using the sum of As an example of the predetermined calculation, the sum of the weighted pressure values is divided by the sum of the pressure values detected by all the pressure sensors 112 and multiplied by a proportional constant g unique to the pressure detection device 4.

  As shown in the equation (4), in order to obtain the X-direction component Fx of the external force with the first axis as the X-axis, 100 pressure values detected by the 100 pressure sensors Si (112) are used. One moment is obtained, divided by the sum of the pressure values detected by all the pressure sensors 112, and multiplied by a proportional constant g unique to the pressure detection device 4.

  Similarly, as shown in Expression (5), in order to obtain the Y-direction component Fy of the external force with the second axis as the Y-axis, 100 pressure values of the 100 pressure sensors Si (112) are used. Two moments are obtained, divided by the sum of the pressure values detected by all the pressure sensors 112, and multiplied by a proportional constant g inherent to the pressure detection device 4.

  As shown in the equation (6), in order to obtain the Z-direction component Fz of the external force, the pressure values detected by the 100 pressure sensors Si (112) are added, and the area A of one pressure sensor 112 is added thereto. Take a ride. However, the detected value of the Z direction component Fz of the external force tends to be detected larger than the X direction component Fx of the external force and the Y direction component Fy of the external force. Therefore, in order to align the detected value of the Z direction component Fz of the external force with the detected value of the X direction component Fx of the external force and the detected value of the Y direction component Fy of the external force, it is determined by the material and shape of the elastic protrusion 32. It is necessary to appropriately correct the detected value with the correction coefficient.

  According to the pressure detection device 4 of the present embodiment, since the plurality of pressure sensors 112 are arranged in at least 4 rows and 4 columns in two directions orthogonal to each other, the pressure sensors 112 arranged as compared to the first embodiment. The number of will increase. For this reason, based on the pressure values detected by the multiple pressure sensors 112, the direction and magnitude of the external force can be obtained more accurately.

  The present invention is not limited to the above-described embodiment, and various changes and improvements can be added to the above-described embodiment. A modification will be described below.

(Modification 1)
FIG. 12 is a diagram for explaining the planar shape of the shape support in the first modification. Hereinafter, Modification 1 will be described with reference to FIG. In the first embodiment, the shape supports 214 are arranged apart from each other between the adjacent second electrode wirings 212. However, the shape supports 214 have a larger elastic coefficient than the second substrate 20, and the adjacent first electrodes The electrode wirings 211 may be arranged across the plurality of second electrode wirings 212.

  As shown in this modification, since the elastic coefficient of the shape support 214 is larger than the elastic coefficient of the second substrate 20, the force applied to one pressure sensor 12 passes through the shape support 214 to the adjacent pressure. Propagation to the sensor 12 can be suppressed. Accordingly, it is possible to suppress a decrease in measurement resolution and detection sensitivity in the direction along the second electrode wiring 212. That is, the force applied to the detection surface can be accurately measured. In other words, a force detector with high measurement resolution and good measurement sensitivity can be provided. In addition, since the shape support 214 is disposed across the plurality of second electrode wires 212 between the adjacent first electrode wires 211, the shape support 214 can be easily formed.

(Modification 2)
FIG. 13 is a diagram illustrating a cross-sectional shape of the shape support in Modification 2. Hereinafter, Modification 2 will be described with reference to FIG. In Embodiment 1, the cross-sectional shape of the shape support body 214 is a triangle, and the protrusion 212a provided along the second electrode wiring 212 has three bending points. However, the number of bending points is as follows. However, the present invention is not limited to this, and it is sufficient that there is one or more, or it may be curved. As shown in FIG. 13A, the second electrode wiring 212 has a protruding portion 212b provided so as to follow the rectangular shape support body 214. As shown in FIG. 13B, the second electrode wiring 212 has a protruding portion 212c provided so as to follow the trapezoidal shape support body 214 having a cross-sectional shape. Therefore, in FIG. 13 (a) and (b), it has four bending points. As shown in FIG. 13C, the second electrode wiring 212 has a plurality of (two) protrusions 212a provided so as to follow a plurality of (two) shape supports 214 having a triangular cross-sectional shape. Yes. Therefore, in FIG. 13C, there are six bending points. As shown in FIG. 13D, the second electrode wiring 212 has a protruding portion 212d provided so as to follow the shape support body 214 having a semicircular cross section. In FIG. 13D, the protruding portion 212d is curved. That is, the protrusion provided in the second electrode wiring 212 can adopt a cross-sectional shape having a plurality of bending points or bending points.

  In particular, as shown in FIG. 13C, when the second electrode wiring 212 has a plurality of protruding portions 212a having bending points in the region outside the pressure sensor 12, the number of bending portions increases. 12 can be more reliably suppressed from propagating to the adjacent pressure sensor 12 via the second electrode wiring 212. That is, a decrease in measurement resolution and detection sensitivity in the direction along the second electrode wiring 212 can be more reliably suppressed.

(Modification 3)
FIG. 14 is a diagram illustrating a cross-sectional shape of the force detector in the third modification. Hereinafter, Modification 3 will be described with reference to FIG. In the first embodiment, the protruding portion 212a bent or curved toward the pressure sensitive material 15 along the shape support 214 is in direct contact with the pressure sensitive material 15, whereas in the third modification, the protrusion 212a is along the shape support 214. The insulating layer 215 is provided on the protruding portion 212a of the second electrode wiring 212 protruding to the pressure-sensitive material 15 side, and the second electrode wiring 212 and the pressure-sensitive material 15 are insulated at the protruding portion 212a. The insulating layer 215 may be provided so as not to cover a region where the first electrode wiring 211 and the second electrode wiring 212 intersect.

  As shown in this modification, when the second electrode wiring 212 and the pressure-sensitive material 15 are insulated at the protruding portion 212a, the second electrode wiring 212 and the first electrode wiring 211 protruding toward the pressure-sensitive material 15 side are used. Can be prevented. That is, only a region where the first electrode wiring 211 and the second electrode wiring 212 intersect can be used as a detection unit, and more accurate force detection is possible.

<Electronic equipment>
FIG. 15A shows a schematic configuration of a cellular phone 1000 as an electronic device to which the pressure detection devices 1 and 4 according to the embodiment or the pressure detection devices 1 and 4 using the force detector according to the modification are applied. It is a schematic diagram which shows. A cellular phone 1000 includes a plurality of operation buttons 1003, scroll buttons 1002, and a liquid crystal panel 1001 to which the pressure detection device as a display unit is applied. By operating the scroll button 1002, the screen displayed on the liquid crystal panel 1001 is scrolled. A menu button (not shown) is displayed on the liquid crystal panel 1001. For example, when a menu button is touched with a finger, a phone book is displayed or the phone number of the mobile phone 1000 is displayed.

  FIG. 15B shows a personal digital assistant (PDA) as an electronic device to which the pressure detection devices 1 and 4 according to the embodiment or the pressure detection devices 1 and 4 using the force detector according to the modification are applied. 1 is a schematic diagram showing a schematic configuration of a Personal Digital Assistants) 2000. FIG. The portable information terminal 2000 includes a plurality of operation buttons 2002, a power switch 2003, and a liquid crystal panel 2001 to which the pressure detection device as a display unit is applied. When the power switch 2003 is operated, a menu button (not shown) is displayed on the liquid crystal panel 2001. For example, when a menu button (not shown) is touched with a finger, an address book is displayed or a schedule book is displayed.

  According to such an electronic device, since the pressure detecting device described above is provided, an electronic device capable of detecting the direction and magnitude of the external force with high accuracy can be provided.

  Other electronic devices include personal computers, video camera monitors, car navigation devices, pagers, electronic notebooks, calculators, word processors, workstations, videophones, POS terminals, digital still cameras, and touch panels. Equipment and the like. The pressure detection device according to the present invention can also be applied to these electronic devices.

<Robot>
FIG. 16 is a schematic diagram illustrating a schematic configuration of a robot hand 3000 to which the pressure detection devices 1 and 4 according to the embodiment or the pressure detection devices 1 and 4 using the force detector according to the modification are applied. As shown in FIG. 16A, the robot hand 3000 includes a main body 3003, a pair of arms 3002, and a grip 3001 to which the pressure detection device is applied. For example, when a drive signal is transmitted to the arm unit 3002 by a control device such as a remote controller, the pair of arm units 3002 open and close.

  As shown in FIG. 16B, consider a case where the robot hand 3000 holds an object 3010 such as a cup. At this time, the force acting on the object 3010 is detected as a pressure by the grip portion 3001. Since the robot hand 3000 includes the above-described pressure detection device as the gripping unit 3001, a force in a direction sliding with gravity Mg in addition to a force perpendicular to the surface (contact surface) of the object 3010 (slip force component) ) Can be detected. For example, it can be held while adjusting the force according to the texture of the object 3010 so as not to deform a soft object or drop a slippery object.

  According to this robot hand 3000, since the pressure detecting device described above is provided, it is possible to provide the robot hand 3000 capable of detecting the direction and magnitude of the external force with high accuracy.

  DESCRIPTION OF SYMBOLS 1 ... Pressure detection apparatus, 2 ... Force detector, 3 ... Force detector, 4 ... Pressure detection apparatus, 10 ... 1st board | substrate, 12 ... Pressure sensor, 15 ... Pressure sensitive material, 20 ... 2nd board | substrate, 30 ... 1st 3 substrate 31, third substrate body, 32 elastic member projection, 110 first substrate, 112 pressure sensor, 120 second substrate, 211 first electrode wiring, 212 second electrode wiring, 212 a and 212 b , 212c, 212d ... projection, 214 ... shape support, 311 ... first electrode wiring, 312 ... second electrode wiring, 1000 ... mobile phone, 2000 ... mobile information terminal, 3000 ... robot hand, 3001 ... gripping part, 3010 …Object.

Claims (14)

A first substrate;
A second substrate having flexibility;
A pressure sensitive material disposed between the first substrate and the second substrate,
The first substrate includes a plurality of first electrode wirings provided at intervals on the side facing the pressure-sensitive material,
The second substrate includes a second electrode wiring provided on a side facing the pressure-sensitive material and intersecting the plurality of first electrode wirings,
A region where the first electrode wiring and the second electrode wiring intersect is a detection unit,
The second electrode wiring has a protrusion that is bent or curved toward the pressure-sensitive material between the adjacent detectors.   2. The force detection according to claim 1, wherein the second substrate includes a shape support body that supports the second electrode wiring between the adjacent detection units and is bent or curved toward the pressure-sensitive material side. vessel. A plurality of the second electrode wirings are provided at intervals from each other,
3. The force detector according to claim 2, wherein the shape supporting bodies are arranged apart from each other between the adjacent second electrode wirings. A plurality of the second electrode wirings are provided at intervals from each other,
3. The shape support body according to claim 2, wherein the shape support body has a larger elastic coefficient than the second substrate, and is disposed across the plurality of second electrode wirings between the adjacent first electrode wirings. Force detector.   The force detector according to any one of claims 2 to 4, wherein the shape support is integrally formed with the second substrate.   The insulating layer that is provided between the second electrode wiring and the pressure-sensitive material and covers at least the projecting portion of the second electrode wiring is provided. The force detector described.   The force detector according to any one of claims 1 to 6, wherein the pressure-sensitive material is a pressure-sensitive conductive elastic body.   The force detector according to any one of claims 1 to 6, wherein the pressure-sensitive material is a dielectric substance having elasticity.   The force detector according to claim 1, wherein the pressure-sensitive material is a pressure-sensitive switch. A force detector according to any one of claims 1 to 9,
A third substrate having an elastic protrusion on one surface side,
The third substrate is disposed so as to face the force detector so that the tip of the elastic protrusion is in contact with the surface of the second substrate opposite to the side facing the pressure-sensitive material. A pressure detection device. In the force detector, a region where the first electrode wiring and the second electrode wiring intersect is a detection unit,
A reference point is defined on the first substrate, and a plurality of the detection units are provided around the reference point.
The third substrate is disposed opposite to the force detector so that the center of gravity of the elastic protrusion overlaps the reference point and the tip of the elastic protrusion is in contact with the reference point. The pressure detection device according to claim 10.   The elastic protrusion is elastically deformed by an external force to calculate a difference between the pressure values detected by the detection units arbitrarily combined among the pressure values detected by the plurality of detection units, and based on the difference The pressure detection device according to claim 11, further comprising a calculation device that calculates a direction in which the external force is applied and a magnitude of the external force.   An electronic apparatus comprising the pressure detection device according to any one of claims 10 to 12.   A robot comprising the pressure detection device according to any one of claims 10 to 12.

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