JP2013019775A - Manufacturing method of physical amount detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a physical detector, which can improve physical amount detecting characteristics such as detection sensitivity and detection accuracy.SOLUTION: A manufacturing method of an acceleration detector 1 equipped with a base portion 10, a joint portion 11, a moving portion 12, and an acceleration detecting element 13 laid between the base portion 10 and the moving portion 12 over the joint portion 11, includes: an element supporting body (101) forming step for integrally forming the base portion 10, the joint portion 11, and the moving portion 12; an acceleration detecting element body (102) forming step for forming positioning portions 102a and 102b which position the acceleration detecting element 12 to the base portion 10 and the moving portion 12 integrally with the acceleration detecting element 13; an acceleration detecting element body fixing step for laying the acceleration detecting element 13 between the base portion 10 and the moving portion 12, and positioning the acceleration detecting element 13 by using the positioning portions 102a and 102b, and fixing the acceleration detecting element 13 to the base portion 10 and the moving portion 12; and a positioning portion removing step for removing the positioning portions 102a and 102b.

Description

  The present invention relates to a method for manufacturing a physical quantity detector.

  Conventionally, as a physical quantity detector, a fixed member that is not displaced by application of acceleration, an element support member that is supported by a beam on the fixed member and is displaced by application of acceleration, a stress sensitive unit, and a stress sensitive unit And a stress sensitive element having a fixed end integrated at each of both ends thereof, and an acceleration detection unit having a structure in which both fixed ends are supported by a fixed member and a movable member of the element support member, respectively. Is known (see, for example, Patent Document 1).

  When acceleration in the detection axis direction is applied, the acceleration detection unit generates stress corresponding to the degree of acceleration in, for example, a double tuning fork type piezoelectric vibrating piece as a stress sensitive element. Utilizing a phenomenon in which the resonance frequency changes, the acceleration applied to the acceleration detection unit is detected from the change in the resonance frequency.

JP 2010-43926 A

According to Patent Document 1, in the manufacturing process, the acceleration detection unit aligns the element support member and the stress-sensitive element by matching the outer contours (outer contours) of both.
However, in this method, there is a restriction that the outer size of the element support member of the acceleration detection unit and the outer size of the stress sensitive element must be the same.
As a result, for example, if the acceleration detection unit attempts to increase the element support member as a measure for increasing the mass for improving the detection sensitivity of acceleration, the stress sensitive element must be increased in conjunction with it, specifically, Therefore, both fixed ends of the stress sensitive element must be made larger than necessary.
As a result, the acceleration detection unit may cause spurious (unnecessary vibration) at both fixed ends where the stress sensitive element is larger than necessary.
Due to the occurrence of this spurious, the acceleration detection unit may change the resonance frequency of the stress sensitive element from its original value, and may deteriorate acceleration detection characteristics such as detection sensitivity and detection accuracy.

In addition, the acceleration detection unit inevitably widens the application range of, for example, an adhesive for fixing the fixed ends, which are larger than necessary for the stress sensitive element, to the element support member.
As a result, in the acceleration detection unit, thermal stress (stress generated inside the object when expansion or contraction due to temperature change is hindered by an external constraint) generated in the stress sensitive element and the element support member is increased.
Due to this increase in thermal stress, the acceleration detection unit increases the amount of change in the resonance frequency of the stress-sensitive element that accompanies a change in ambient temperature, which may degrade the temperature characteristics such as detection sensitivity and detection accuracy.

In addition, the acceleration detection unit has, for example, a space on the free end side of the movable member, which is the most effective place, as a measure for increasing the mass for improving detection sensitivity. Is occupied by a fixed end of
As a result, the acceleration detection unit has to be provided in a space surrounded by the stress sensitive part, the fixed end, and the beam, the weight part being away from the free end.
As a result, the acceleration detection unit may not be able to effectively implement the detection sensitivity improvement measure by the weight portion.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] A manufacturing method of a physical quantity detector according to this application example includes a flat base portion and a flat movable portion connected to the base portion via a joint portion. A method of manufacturing a physical quantity detector comprising a cantilever part, and a physical quantity detection element spanned across the joint part between the base part and the movable part, the cantilever part being prepared A step of preparing the physical quantity detection element having a positioning part that is integrally projected from the physical quantity detection element in plan view, and spans the physical quantity detection element between the base part and the movable part. In this state, the positioning unit is positioned with respect to the base unit and the movable unit and fixed to the base unit and the movable unit, and the physical quantity detection element is fixed to the base unit and the movable unit. After the position determination Removing the parts, and having a.

  According to this, the physical quantity detector manufacturing method is a cantilever in which a base part (corresponding to a fixed member), a joint part (corresponding to a beam), and a movable part (corresponding to a movable member) are integrally formed. A step of preparing a beam portion (corresponding to an element support member), a step of preparing a physical quantity detection element including a positioning part for positioning a physical quantity detection element (corresponding to a stress sensitive element) with respect to the base part and the movable part, A step of positioning the physical quantity detection element between the base part and the movable part using the positioning part and fixing the physical quantity detection element; and a process of removing the positioning part after fixing the physical quantity detection element.

As a result, the manufacturing method of the physical quantity detector removes the positioning portion after fixing the physical quantity detection element, so that the fixed portion (corresponding to the fixed end) of the physical quantity detection element does not have to be larger than necessary. Become.
As a result, the physical quantity detector manufacturing method can suppress, for example, spurious at the fixed portion of the physical quantity detection element.
Thereby, the manufacturing method of a physical quantity detector can improve physical quantity detection characteristics such as detection sensitivity and detection accuracy of the physical quantity detector.

Further, the manufacturing method of the physical quantity detector does not need to make the fixed part of the physical quantity detection element larger than necessary, so that the fixed part of the physical quantity detection element is fixed to the base part and the movable part, for example, The application range of an adhesive or the like can be narrower than the conventional configuration of Patent Document 1.
As a result, the physical quantity detector manufacturing method can suppress thermal stress generated in the physical quantity detection element, the base portion, and the movable portion.
Thereby, the manufacturing method of a physical quantity detector can improve temperature characteristics, such as the detection sensitivity of a physical quantity detector, and a detection accuracy.

Further, in the method of manufacturing a physical quantity detector, after the physical quantity detection element is fixed, the positioning part is removed, so that a space can be provided between the fixed part of the physical quantity detection element and the free end of the movable part.
Thereby, in the manufacturing method of the physical quantity detector, for example, when providing a weight portion as a measure for increasing the mass for improving detection sensitivity, the weight portion can be provided around the free end of the movable portion which is the most effective place. It becomes possible.
As a result, the physical quantity detector manufacturing method can effectively implement the detection sensitivity improvement measure by the weight portion of the physical quantity detector.

  Application Example 2 In the method of manufacturing a physical quantity detector according to the application example, the physical quantity detector further includes a weight part, and the weight part is disposed on the movable part after the positioning part is removed. It is preferable to further include a fixing step.

  According to this, the physical quantity detector manufacturing method has a step of placing and fixing the weight part to the movable part after removing the positioning part, and therefore, a measure for improving the detection sensitivity by the weight part of the physical quantity detector. It can be implemented by efficiently utilizing the space of the movable part.

  Application Example 3 In the physical quantity detector manufacturing method according to the application example described above, positioning of the physical quantity detection element with respect to the base portion and the movable portion is performed by using at least a part of an outline of the positioning portion, the base portion, and the It is preferable to carry out by matching at least a part of the outline of the movable part.

According to this, in the physical quantity detector manufacturing method, the positioning of the physical quantity detection element with respect to the base part and the movable part is made to coincide with a part of the outline of the positioning part and a part of the outline of the base part and the movable part. To do.
From this, the physical quantity detector manufacturing method includes, for example, a part of the outline of the positioning part, the outline of the base part and the movable part (hereinafter also referred to as a cantilever part including the joint part, and an element support). A physical quantity detection element integrated with the positioning unit (hereinafter also referred to as a physical quantity detection element body) and an element support are placed on top of each other by forming a part so as to coincide with each other. Thus, it becomes possible to use a simple positioning device in which a part of the outline matches and the both can be positioned.

  Application Example 4 In the method of manufacturing a physical quantity detector according to the application example, a part of the outline of the positioning unit and a part of the outline of the base part and the movable part are corner parts. Is preferred.

  According to this, since the physical quantity detector manufacturing method includes a part of the outline of the positioning part and a part of the outline of the base part and the movable part as corners, for example, the corner of the outline of the positioning part. By forming the physical quantity detection element body and the element support so as to overlap with each other, the corners of the outer periphery of the element support and the element support body are formed so as to coincide with each other. It is possible to use a simple positioning device that matches and can position the both more reliably.

  [Application Example 5] In the method of manufacturing a physical quantity detector according to the application example, the positioning unit is configured such that the outline of at least one of the base unit and the movable unit in the plan view overlapped with the base unit and the movable unit. It is preferable to have the protrusion part which protrudes outside.

  According to this, since the physical quantity detector manufacturing method has the protruding portion in the positioning portion, the removal operation of the positioning portion in the state where the physical quantity detecting element body and the element support overlap each other is performed, for example, by grasping the protruding portion. The positioning part can be easily lifted and folded.

  Application Example 6 In the method of manufacturing a physical quantity detector according to the application example described above, at least one of the base portion and the movable portion is cut inside the outline of the positioning portion in a plan view overlapped with the positioning portion. It is preferable to have a notched part.

  According to this, since the physical quantity detector manufacturing method has the cutout part in at least one of the base part and the movable part, the removal of the positioning part in a state where the physical quantity detection element body and the element support body overlap each other. The work can be easily performed, for example, by inserting a removal jig into the notch portion and lifting the positioning portion to fold it.

  Application Example 7 In the method of manufacturing a physical quantity detector according to the application example, the physical quantity detection element includes at least one vibration beam extending along a direction connecting the base portion and the movable portion. And a pair of bases connected to both ends of the physical quantity detection unit, and the positioning unit is preferably connected to opposite sides of the base opposite to each other.

According to this, the physical quantity detector manufacturing method includes a physical quantity detection element including a physical quantity detection unit having at least one vibration beam and a pair of bases connected to both ends of the physical quantity detection unit. Then, the positioning part is formed by being connected to the opposite side of the base part opposite to each other.
From this, the manufacturing method of the physical quantity detector is such that, for example, the vibrating beam expands and contracts according to the displacement of the movable part due to the applied acceleration, and the vibration frequency (resonance frequency) of the vibrating beam due to the tensile stress or compressive stress generated at this time A physical quantity detector with good detection sensitivity and detection accuracy can be manufactured with a simple configuration of converting the change into acceleration.
And since the manufacturing method of the physical quantity detector is formed by connecting the positioning part to the opposite side of the base part opposite to each other, for example, in the movable part, on the free end side after removing the positioning part. A weight portion can be provided in the empty space.
As a result, the physical quantity detector manufacturing method can provide a physical quantity detector with improved detection sensitivity.

  Application Example 8 In the method of manufacturing a physical quantity detector according to the application example, it is preferable that the positioning unit is integrated with the physical quantity detection element through a coupling part thinner than the positioning unit and the physical quantity detection element. .

  According to this, since the positioning unit is integrated with the physical quantity detection element via the coupling part thinner than the positioning unit and the physical quantity detection element, for example, the coupling unit is broken (cut). By doing so, the positioning part can be easily removed.

  Application Example 9 In the method of manufacturing a physical quantity detector according to the application example described above, it is preferable that the connection portion includes a constriction portion.

According to this, since the manufacturing method of the physical quantity detector includes the constricted portion in the connecting portion, the concatenating portion can be more easily folded (cut) by the constricted portion.
As a result, the physical quantity detector manufacturing method can more easily remove the positioning portion.

The partial expansion model perspective view which shows schematic structure of the acceleration detector as a physical quantity detector of this embodiment. It is a schematic diagram which shows schematic structure of the acceleration detector of this embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a schematic cross-sectional view for explaining the operation of the acceleration detector, (a) is a cross-sectional view showing a state in which the movable portion is displaced downward (-Z direction) on the paper surface, (b) is a cross-sectional view showing the movable portion above the paper surface (+ Z Sectional drawing which shows the state displaced to (direction). The flowchart which shows an example of the manufacturing process of an acceleration detector. It is a schematic diagram explaining an element support body formation process, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a schematic diagram explaining an acceleration detection element body formation process, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a schematic diagram explaining an acceleration detection element body fixing process, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a schematic diagram explaining a positioning part removal process, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a schematic diagram explaining the manufacturing method of the acceleration detector of the modification 1, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a schematic diagram explaining the manufacturing method of the acceleration detector of the modification 2, (a) is a top view, (b) is sectional drawing in the AA of (a).

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.

(Embodiment)
First, an example of the configuration of an acceleration detector as a physical quantity detector will be described.
FIG. 1 is a partially developed schematic perspective view showing a schematic configuration of the acceleration detector of the present embodiment. FIG. 2 is a schematic plan sectional view showing a schematic configuration of the acceleration detector of FIG. 2A is a plan view, and FIG. 2B is a cross-sectional view taken along line AA in FIG. 2A. For convenience of explanation, each wiring is omitted, and the dimensional ratio of each component is different from the actual one.

  As shown in FIGS. 1 and 2, the acceleration detector 1 includes a rectangular flat plate-shaped base portion 10 and a rectangular flat plate shape in which one end portion (fixed end) is connected to the base portion 10 via a joint portion 11. A movable portion 12 and an acceleration detection element 13 as a physical quantity detection element straddling the joint portion 11 across the base portion 10 and the movable portion 12. .

In the movable part 12, a pair of weight parts (mass parts) 15 are disposed on the other end part (free end) side of both main surfaces 12a, 12b corresponding to the front and back surfaces of the flat plate. The weight portion 15 is joined to the main surfaces 12 a and 12 b via the joining material 16.
The base portion 10, the joint portion 11, and the movable portion 12 are integrally formed in a substantially flat plate shape, for example, using a quartz substrate cut out from a quartz crystal or the like at a predetermined angle.
The outer shapes of the base portion 10, the joint portion 11, and the movable portion 12 are accurately formed using techniques such as photolithography and etching.

The joint portion 11 is configured so that the base portion 10 and the movable portion 12 are separated from each other by half-etching from both the main surfaces 12a and 12b side (the both main surfaces 10a and 10b side of the base portion) of the movable portion 12. A bottomed groove 11a is formed along a direction (X-axis direction) orthogonal to a direction (Y-axis direction) connecting the movable portion 12 and the movable portion 12.
The cross-sectional shape (shape of FIG. 2B) along the Y-axis direction of the joint portion 11 is formed in a substantially H shape by the groove portion 11a.
By this joint portion 11, the movable portion 12 intersects the main surface 12a with the joint portion 11 as a fulcrum (rotation axis) according to the acceleration applied in the direction (Z-axis direction) intersecting the main surface 12a (12b). It can be displaced (rotated) in the direction (Z-axis direction).

The weight portion 15 has a columnar (disc-shaped) convex portion 15a protruding toward the main surface 12a (12b) side of the movable portion 12, and the tip portion of the convex portion 15a is the main surface 12a ( 12b) is joined (fixed) via a joining material 16.
In addition, it is preferable that the convex part 15a makes plane size as small as possible, ensuring the area required for joining to the movable part 12, from a viewpoint of suppression of thermal stress. Moreover, it is preferable that the gravity center of the weight part 15 is settled in the convex part 15a in planar view from a viewpoint of the inclination avoidance at the time of joining.
In order to increase the plane size as much as possible in order to improve the sensitivity of the acceleration detector 1, the weight portion 15 avoids the acceleration detecting element 13 from the free end side opposite to the joint portion 11 side in the movable portion 12. It extends to the vicinity of the joint portion 11 in a shape, and is formed in a substantially U shape in plan view.
For the weight portion 15, for example, a material having a relatively large specific gravity represented by a metal such as Cu (copper) or Au (gold) is used. Note that the convex portion 15a of the weight portion 15 may not be provided as long as the application range of the bonding material 16 can be managed within a predetermined range.
For the bonding material 16, for example, a silicone thermosetting adhesive, which is an adhesive containing a silicone resin (such as a modified silicone resin) having excellent elasticity, is used.

The acceleration detection element 13 has at least one (two in this case) prismatic shape extending in the direction connecting the base portion 10 and the movable portion 12 (Y-axis direction), and exhibits bending vibration in the X-axis direction. An acceleration detector 13c having vibrating beams 13a and 13b, and a pair of bases 13d and 13e connected to both ends of the acceleration detector 13c.
The acceleration detecting element 13 uses a piezoelectric material to form two sets of tuning forks with the two vibrating beams 13a and 13b and the pair of base portions 13d and 13e, so that a double tuning fork type piezoelectric vibrating piece (a double tuning fork type piezoelectric vibrating element). Also called a double tuning fork element).
For example, the acceleration detection element 13 is formed of a quartz substrate cut out at a predetermined angle from a quartz crystal or the like, and the acceleration detection unit 13c and the bases 13d and 13e are integrally formed in a substantially flat plate shape. Further, the outer shape of the acceleration detecting element 13 is accurately formed by using techniques such as photolithography and etching.

In the acceleration detecting element 13, one base portion 13 d is fixed to the main surface 12 a side of the movable portion 12 via a bonding member 17 such as, for example, low melting point glass, eutectic-bondable Au / Sn alloy coating, or adhesive. The other base portion 13 e is fixed to the main surface 10 a side of the base portion 10 (the same side as the main surface 12 a of the movable portion 12) via the joining member 17.
In addition, between the acceleration detection element 13 and the main surface 10a of the base part 10 and the main surface 12a of the movable part 12, when the movable part 12 is displaced, the acceleration detection element 13, the base part 10 and the movable part 12 are mutually connected. A predetermined gap is provided to prevent contact. This gap is managed by the thickness of the joining member 17 in this embodiment.

The acceleration detection element 13 includes conductive electrodes such as a metal filler mixed with conductive electrodes such as metal fillers, which are extracted from excitation electrodes (drive electrodes) (not shown) of the vibration beams 13a and 13b to the base portion 13e. The connecting terminals 10 c and 10 d provided on the main surface 10 a of the base portion 10 are connected by an agent (for example, silicone-based conductive adhesive) 18.
Specifically, the extraction electrode 13f is connected to the connection terminal 10c, and the extraction electrode 13g is connected to the connection terminal 10d.
The connection terminals 10c and 10d of the base portion 10 are connected to an external connection terminal (not shown) provided on the main surface 10b opposite to the main surface 10a of the base portion 10 by a wiring (not shown). The excitation electrodes, lead electrodes 13f and 13g, connection terminals 10c and 10d, and external connection terminals have, for example, a structure in which Cr is a base layer and Au is stacked thereon.

Here, the operation of the acceleration detector 1 will be described.
FIG. 3 is a schematic cross-sectional view for explaining the operation of the acceleration detector. FIG. 3A shows a state where the movable part is displaced downward (−Z direction) in the drawing, and FIG. 3B shows a state where the movable part is displaced upward (+ Z direction) in the drawing.

As shown in FIG. 3A, the acceleration detector 1 is configured such that when the movable part 12 is displaced in the −Z direction with the joint part 11 as a fulcrum by the inertial force according to the acceleration + G applied in the Z-axis direction, A tensile force is applied to the acceleration detecting element 13 in the direction in which the base portion 13d and the base portion 13e are separated from each other in the Y-axis direction, and tensile stress is generated in the vibrating beams 13a and 13b of the acceleration detecting portion 13c.
Thereby, the acceleration detector 1 changes so that the vibration frequency (henceforth resonance frequency) of the vibration beams 13a and 13b of the acceleration detection part 13c becomes high like the string of the wound stringed instrument, for example.

On the other hand, as shown in FIG. 3B, in the acceleration detector 1, the movable part 12 is displaced in the + Z direction with the joint part 11 as a fulcrum by the inertial force corresponding to the acceleration −G applied in the Z-axis direction. In this case, the acceleration detecting element 13 is applied with a compressive force in a direction in which the base 13d and the base 13e approach each other in the Y-axis direction, and compressive stress is generated in the vibration beams 13a and 13b of the acceleration detecting unit 13c.
Thereby, the acceleration detector 1 changes so that the resonant frequency of the vibration beams 13a and 13b of the acceleration detection part 13c becomes low like the string of the rewinded stringed instrument, for example.

  The acceleration detector 1 is configured to be able to detect this change in resonance frequency. The acceleration (+ G, −G) applied in the Z-axis direction is derived by converting the acceleration (+ G, −G) into a numerical value determined by a lookup table or the like according to the detected change rate of the resonance frequency.

Next, an example of a method for manufacturing the acceleration detector 1 will be described.
FIG. 4 is a flowchart showing an example of the manufacturing process of the acceleration detector, and FIGS. 5 to 8 are schematic plan sectional views for explaining the main manufacturing processes.

  As shown in FIG. 4, the manufacturing method of the acceleration detector 1 includes an element support forming step S1 for preparing a cantilever portion, and an acceleration detecting element body forming step S2 for preparing an acceleration detecting element having a positioning portion. , Acceleration detecting element body fixing step S3, positioning portion removing step S4, and weight portion fixing step S5.

[Element Support Forming Step S1]
First, as shown in FIG. 5, for example, using a quartz substrate cut out from a quartz crystal or the like at a predetermined angle, a base portion 10, a joint portion 11, and a movable portion are movable by a technique such as photolithography and wet etching. The part 12 is formed integrally. For convenience of explanation, a cantilever portion in which the base portion 10, the joint portion 11, and the movable portion 12 are integrally formed is referred to as an element support 101.
Here, the element support 101 is formed in a rectangular shape having a length L1 and a width W1 in plan view. In addition, as an example of the thickness of each part of the element support body 101, the base part 10 and the movable part 12 are about 200 micrometers-400 micrometers, and the joint part 11 is about 20 micrometers. The joint portion 11 is formed by half-etching from both main surfaces 12a and 12b (both main surfaces 10a and 10b).

[Acceleration detecting element body forming step S2]
Next, as shown in FIG. 6, the acceleration detection element 13 and the acceleration detection element 13 are separated from each other by a technique such as photolithography and wet etching using a quartz substrate cut out from a rough crystal or the like at a predetermined angle. Positioning portions 102a and 102b, which have a protruding shape and position the acceleration detecting element 13 with respect to the base portion 10 and the movable portion 12 (element support body 101), are integrally formed.
More specifically, a rectangular positioning portion 102a that is long in the vertical direction on the paper surface is connected to the base portion 13d of the acceleration detecting element 13 by a beam-like connecting portion 102c that is thinner than the positioning portion 102a and the acceleration detecting element 13. And integrally formed.
On the other hand, a rectangular positioning portion 102b that is long in the vertical direction of the drawing is connected to the base portion 13e of the acceleration detecting element 13 by a beam-like connecting portion 102d that is thinner than the positioning portion 102b and the acceleration detecting element 13, and is integrated with the acceleration detecting element 13. Form with.
As a result, the positioning portions 102a and 102b are connected to the opposite sides of the base portions 13d and 13e opposite to each other.

A step D is provided between the positioning portions 102a and 102b and the base portions 13d and 13e. The step D is preferably the same as the predetermined thickness of the joining member 17 that fixes the base portions 13d and 13e. Thereby, the thickness management of the joining member 17 becomes easy.
In addition, it is preferable to form the constriction part 102e in the base part 13d vicinity in the connection part 102c, and to form the constriction part 102f in the base part 13e vicinity in the connection part 102d.
For convenience of explanation, an acceleration detection element in which the positioning portions 102a and 102b (including the coupling portions 102c and 102d) and the acceleration detection element 13 are integrally formed is referred to as an acceleration detection element body 102.

As shown in FIG. 6, the acceleration detecting element body 102 connects the upper side of the positioning unit 102a and the upper side of the positioning unit 102b with a straight line, and connects the lower side of the positioning unit 102a and the lower side of the positioning unit 102b with a straight line. The outer shape in plan view when they are connected is formed into a rectangle having a length L2 and a width W2.
Here, the length L2 of the acceleration detection element body 102 is the same as the length L1 of the element support body 101 (L2 = L1), and the width W2 of the acceleration detection element body 102 is equal to the width W1 of the element support body 101. They are the same (W2 = W1).
Thereby, when the element support body 101 and the acceleration detection element body 102 are overlapped with each other, at least a part of the outline of the element support body 101 (for example, four corners, in other words, four corners), the acceleration detection element body At least a part of the outline of 102 (for example, four corners, in other words, four corners) coincides.

[Acceleration detecting element body fixing step S3]
Next, as shown in FIG. 7, the element support 101 is placed on the placement surface 31 of the positioning device 30. At this time, the four corners of the element support 101 are positioned by the L-shaped (reverse L-shaped) positioning projections 32 of the positioning device 30. The positioning protrusions 32 are configured to be movable in the vertical direction on the paper surface and in the horizontal direction on the paper surface, respectively, and preferably can be finely adjusted according to variations in the size of the element support 101.
Here, the height of the positioning protrusion 32 is formed higher than the thickness of the element support 101 and is configured to be high enough to position the element support 101 and the acceleration detection element 102.

Next, the acceleration detection element body 102 is placed on the element support 101, and the acceleration detection element 13 is bridged between the base portion 10 and the movable portion 12 of the element support 101 and positioned by the positioning portions 102a and 102b. To do.
Here, as described above, the four corners of the element support 101 and the four corners of the acceleration detection element 102 are formed so as to coincide with each other when they are overlapped with each other. Therefore, by placing the acceleration detection element body 102 on the element support body 101 positioned by the positioning protrusion 32, the acceleration detection element body 102 is positioned by the positioning protrusion 32, and the four corners of the element support 101. And the four corners of the acceleration detecting element body 102 overlap each other and surely match.
As a result, the acceleration detecting element 13 is accurately positioned with respect to the base portion 10 and the movable portion 12.

Next, the acceleration detection element body 102 (acceleration detection element 13) is fixed to the element support body 101 (base portion 10 and movable portion 12).
Specifically, the base portion 13d of the acceleration detecting element 13 is fixed to the main surface 12a of the movable portion 12 via a joining member 17 such as, for example, low melting point glass, eutectic-bondable Au / Sn alloy coating, or adhesive. Then, the base portion 13e is fixed to the main surface 10a of the base portion 10 via the bonding member 17.

At this time, as described above, between the acceleration detecting element 13 and the main surface 10a of the base portion 10 and the main surface 12a of the movable portion 12, when the movable portion 12 is displaced, the acceleration detecting element 13 and the base portion 10 and It is necessary to provide a predetermined gap so that the movable part 12 does not contact each other. This gap is managed by the thickness of the joining member 17 in this embodiment.
Here, the acceleration detecting element body 102 is provided with a step D between the positioning portions 102a and 102b and the base portions 13d and 13e. The step D is the same as the predetermined thickness of the joining member 17 described above (the same as the predetermined gap).
Accordingly, the base member 13d and 13e are fixed by pressing the entire acceleration detection element body 102 against the element support body 101 so that the positioning parts 102a and 102b are in close contact with each other, thereby reducing the thickness of the joining member 17 to a predetermined thickness. It becomes possible to manage.

Subsequently, the lead electrodes 13f and 13g of the acceleration detecting element 13 are connected to the base portion 10 via a conductive adhesive (for example, a silicone-based conductive adhesive) 18 mixed with a conductive material such as a metal filler. Connection terminals 10c and 10d provided on main surface 10a are connected.
More specifically, first, the conductive adhesive 18 is applied so as to straddle the extraction electrode 13f and the connection terminal 10c, and the conductive adhesive 18 is applied so as to straddle the extraction electrode 13g and the connection terminal 10d.
Next, the conductive adhesive 18 is heated and cured, the lead electrode 13f and the connection terminal 10c are electrically connected, and the lead electrode 13g and the connection terminal 10d are electrically connected.
In this step, instead of the conductive adhesive 18, a metal wire may be used to electrically connect the extraction electrodes 13f and 13g and the connection terminals 10c and 10d by wire bonding.

[Positioning section removing step S4]
Next, as shown in FIG. 8, the positioning portions 102a and 102b of the acceleration detecting element body 102 are removed.
Specifically, the positioning portion 102a is removed by cutting (cutting) the connecting portion 102c with the constricted portion 102e, and the positioning portion 102b is removed by folding (cutting) the connecting portion 102d with the constricted portion 102f. .

[Weight fixing step S5]
Next, returning to FIG. 2, the weight portion 15 is fixed (bonded) to the empty space from which the positioning portion 102 a of the main surface 12 a of the movable portion 12 is removed via the bonding material 16. Similarly, the weight portion 15 is fixed to the main surface 12 b of the movable portion 12 via the bonding material 16.
Specifically, first, for example, a bonding using, for example, a silicone-based thermosetting adhesive that includes a silicone-based resin (such as a modified silicone resin) having excellent elasticity on the top surface of the convex portion 15a of the weight portion 15 is used. A predetermined amount of the material 16 is applied by an application device such as a dispenser.
Next, the weight portion 15 is aligned so that the convex portion 15 a is on the main surface 12 a (12 b) side of the movable portion 12, and is disposed on the movable portion 12.
Next, the bonding material 16 is heated and cured to fix the weight portion 15 to the main surface 12a (12b) of the movable portion 12. At this time, as described above, from the viewpoint of avoiding the inclination of the weight portion 15, the center of gravity of the weight portion 15 is preferably within the convex portion 15 a in plan view.

Through the above steps, the acceleration detector 1 as shown in FIGS. 1 and 2 is obtained.
In addition, you may replace the order of said each process suitably in the range which does not have trouble. For example, the element support body formation step S1 and the acceleration detection element body formation step S2 may be interchanged with each other, or may be performed simultaneously on separate lines.
Moreover, processes other than the above, such as a preparation process, an inspection process, and an adjustment process, are appropriately performed before and after each of the above processes.

  As described above, the method of manufacturing the acceleration detector 1 according to the present embodiment includes the element support forming step S1 in which the base portion 10, the joint portion 11, and the movable portion 12 are integrally formed, and the acceleration detecting element 13. The acceleration detecting element body forming step S2 in which positioning portions 102a and 102b for positioning the base plate 10 with respect to the base portion 10 and the movable portion 12 are integrally formed with the acceleration detecting element 13, and the acceleration detecting element 13 with the base portion 10 and the movable portion 12 are formed. An acceleration detecting element body fixing step S3 for positioning and fixing using the positioning portions 102a and 102b, and a positioning portion removing step S4 for removing the positioning portions 102a and 102b after fixing the acceleration detecting element 13, Have

Thereby, since the manufacturing method of the acceleration detector 1 removes the positioning parts 102a and 102b after fixing the acceleration detecting element 13, the base parts 13d and 13e (corresponding to a fixed part and a fixed end) of the acceleration detecting element 13 are used. It does not have to be larger than necessary.
As a result, the manufacturing method of the acceleration detector 1 can suppress, for example, spurious in the base portions 13d and 13e of the acceleration detection element 13.
Thereby, the manufacturing method of the acceleration detector 1 can improve acceleration detection characteristics such as detection sensitivity and detection accuracy of the acceleration detection element 13.

Moreover, since the manufacturing method of the acceleration detector 1 does not need to make the base parts 13d and 13e of the acceleration detection element 13 larger than necessary, the base parts 13d and 13e of the acceleration detection element 13 are replaced with the base part 10 and the movable part. The range of the joining member 17 for fixing to 12 can be made narrower than the conventional configuration of Patent Document 1.
As a result, the manufacturing method of the acceleration detector 1 can suppress the thermal stress generated in the acceleration detection element 13, the base portion 10, and the movable portion 12.
Thereby, the manufacturing method of the acceleration detector 1 can improve temperature characteristics, such as the detection sensitivity of the acceleration detection element 13, and a detection accuracy.

Further, in the method of manufacturing the acceleration detector 1, the positioning portions 102a and 102b are removed after the acceleration detecting element 13 is fixed, so that the base portions 13d and 13e of the acceleration detecting element 13 and the free end of the movable portion 12 are removed. Space can be provided.
Thereby, the manufacturing method of the acceleration detector 1 provides the weight part 15 around the free end of the movable part 12, which is the most effective place, when the weight part 15 is provided as a measure for increasing the mass for improving the detection sensitivity. It becomes possible.
As a result, the method of manufacturing the acceleration detector 1 can effectively implement a measure for improving the detection sensitivity by the weight portion 15 of the acceleration detection element 13.

  In addition, the method of manufacturing the acceleration detector 1 includes the weight portion fixing step S5 in which the weight portion 15 is disposed and fixed in the empty space of the movable portion 12 after the positioning portions 102a and 102b are removed. A measure for improving the detection sensitivity by the weight portion 15 of the element 13 can be implemented by efficiently utilizing the space.

Further, in the method of manufacturing the acceleration detector 1, the positioning of the acceleration detecting element 13 with respect to the base portion 10 and the movable portion 12 is performed by corner portions (four corners of the acceleration detecting element body 102) that are a part of the outline of the positioning portions 102a and 102b. And the corners (four corners of the element support 101) which are part of the outline of the base part 10 and the movable part 12 are matched.
From this, the manufacturing method of the acceleration detector 1 is such that the element support body 101 and the acceleration detection element body 102 are stacked and placed on the placement surface 31, and the positioning protrusions 32 are arranged so that the corners of the two coincide. By positioning both, it is possible to use a positioning device 30 having a simple configuration that can reliably position the acceleration detecting element 13 with respect to the base portion 10 and the movable portion 12.

  In addition, a part of the outlines of the positioning parts 102a and 102b and a part of the outlines of the base part 10 and the movable part 12 are not limited to the corners. For example, notches cut inward from the outer shape. The protrusion part which protruded outside from the external shape may be sufficient.

In the method of manufacturing the acceleration detector 1, the acceleration detection element 13 is connected to the acceleration detection unit 13c having at least one (two in this case) vibration beams 13a and 13b and both ends of the acceleration detection unit 13c. And a pair of base portions 13d and 13e. The positioning portions 102a and 102b are connected to opposite sides of the base portions 13d and 13e opposite to each other.
Accordingly, in the method of manufacturing the acceleration detector 1, for example, the vibrating beams 13a and 13b expand and contract according to the displacement of the movable part 12 due to the applied acceleration, and the vibrating beams 13a and 13b due to the tensile stress or the compressive stress generated at this time. The acceleration detector 1 with good detection sensitivity and detection accuracy can be manufactured with a simple configuration of converting the change in vibration frequency into acceleration.
In the manufacturing method of the acceleration detector 1, the positioning portions 102 a and 102 b are formed by connecting the base portions 13 d and 13 e to the opposite side to the opposite sides of the base portions 13 d and 13 e. The weight portion 15 can be provided in the space on the free end side after the removal.
As a result, the method of manufacturing the acceleration detector 1 can provide the acceleration detector 1 with improved detection sensitivity.

  Further, in the method of manufacturing the acceleration detector 1, the positioning portions 102 a and 102 b are formed integrally with the acceleration detecting element 13 via the connecting portions 102 c and 102 d thinner than the positioning portions 102 a and 102 b and the acceleration detecting element 13. For example, the positioning portions 102a and 102b can be easily removed by breaking the connecting portions 102c and 102d.

Moreover, since the manufacturing method of the acceleration detector 1 forms the constriction parts 102e and 102f in the connection parts 102c and 102d, the connection parts 102c and 102d can be more easily folded by the constriction parts 102e and 102f.
As a result, the method of manufacturing the acceleration detector 1 can more easily remove the positioning portions 102a and 102b.
In addition, in the method of manufacturing the acceleration detector 1, the constricted portions 102e and 102f are formed in the vicinity of the base portions 13d and 13e, so that the constricted portions 102e remaining on the base portions 13d and 13e side when the positioning portions 102a and 102b are removed. , 102f can be reduced.
Thereby, the manufacturing method of the acceleration detector 1 can avoid the interference between the remaining portions of the constricted portions 102e and 102f and other members.

The step D between the positioning portions 102a and 102b and the base portions 13d and 13e of the acceleration detecting element body 102 may be omitted. That is, the acceleration detecting element body 102 may be formed in a substantially flat plate shape.
Thereby, in the manufacturing method of the acceleration detector 1, the thickness management of the joining member 17 becomes important. For example, the base portion 10 and the movable portion 12 (element support body 101) and the acceleration detection element 13 (acceleration detection element body). 102), the base portion 10, the movable portion 12, and the acceleration detecting element 13 are fixed by the joining member 17 in a state where a spacer formed in a thickness corresponding to a predetermined gap is sandwiched between them, and the joining member 17 By removing the spacer after curing, the gap can be managed within a predetermined range.
In the method of manufacturing the acceleration detector 1, the constricted portions 102e and 102f do not have to be formed as long as there is no problem in cutting the connecting portions 102c and 102d.

Next, a modification of the above embodiment will be described.
(Modification 1)
FIG. 9 is a schematic diagram for explaining a method of manufacturing the acceleration detector according to the first modification. FIG. 9A is a plan view, and FIG. 9B is a cross-sectional view taken along the line AA in FIG. 9A.
As shown in FIG. 9, in the method of manufacturing the acceleration detector according to the first modification, the base portion 10 and the movable portion 12 are seen in a plan view in which the element support 101 is superimposed on the positioning portions 202 a and 202 b of the acceleration detection element body 202. Protruding portions 202g and 202h are formed to protrude outward from the outer shell.

According to this, in the method of manufacturing the acceleration detector according to the modified example 1, since the protruding portions 202g and 202h are formed in the positioning portions 202a and 202b, the acceleration detecting element body 202 and the element support body 101 are overlapped. The removal operation of the positioning portions 202a and 202b can be easily performed by, for example, grasping the projecting portions 202g and 202h, lifting the positioning portions 202a and 202b as indicated by arrows, and folding them at the constricted portions 102e and 102f.
Note that only one of the protrusions 202g and 202h may be provided.

(Modification 2)
FIG. 10 is a schematic diagram illustrating a method for manufacturing the acceleration detector according to the second modification. 10A is a plan view, and FIG. 10B is a cross-sectional view taken along the line AA in FIG. 10A.
As shown in FIG. 10, in the method of manufacturing the acceleration detector according to the second modification, the positioning unit 102 a and the base unit 310 and the movable unit 312 are positioned in the plan view in which the element support body 301 and the acceleration detection element body 102 are overlapped. For example, the cutout portions 310e and 312c cut in an arc shape are formed toward the inside of the outline of 102b.

According to this, in the method of manufacturing the acceleration detector according to the second modification, the cutout portions 310e and 312c are formed in the base portion 310 and the movable portion 312. Therefore, the acceleration detection element body 102, the element support body 301, The removal operation of the positioning portions 102a and 102b in the state where the two overlap each other is performed by, for example, inserting a removal jig into the notches 310e and 312c and lifting the positioning portions 102a and 102b as indicated by arrows, and using the constricted portions 102e and 102f. This can be done easily by folding.
Only one of the notches 310e and 312c may be provided. Further, the method of manufacturing the acceleration detector according to the second modification may be combined with the first modification.

In the above embodiment and each modification, the material of the element supports 101 and 301 is not limited to quartz, and may be a semiconductor material such as glass or silicon.
The material of the acceleration detection element bodies 102 and 202 is not limited to quartz, but lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), lithium niobate (LiNbO ₃ ), Semiconductor such as silicon provided with a piezoelectric material such as lead zirconate titanate (PZT), zinc oxide (ZnO), aluminum nitride (AlN), or a piezoelectric material such as zinc oxide (ZnO), aluminum nitride (AlN) as a coating It may be a material.

  The present invention has been described above by taking the acceleration detector as an example of the physical quantity detector. However, the present invention is not limited to this, and the present invention is also applicable to a physical quantity detector that detects force, speed, distance, etc. from the acceleration detection result. it can.

  DESCRIPTION OF SYMBOLS 1 ... Acceleration detector as a physical quantity detector, 10 ... Base part, 10a, 10b ... Main surface, 10c, 10d ... Connection terminal, 11 ... Joint part, 11a ... Groove part, 12 ... Movable part, 12a, 12b ... Main surface , 13 ... acceleration detecting element as a physical quantity detecting element, 13a, 13b ... vibrating beam, 13c ... acceleration detecting part as a physical quantity detecting part, 13d, 13e ... base, 13f, 13g ... extraction electrode, 15 ... weight part, 15a ... Convex part, 16 ... bonding material, 17 ... bonding member, 18 ... conductive adhesive, 30 ... positioning device, 31 ... mounting surface, 32 ... positioning protrusion, 101 ... element support, 102 ... acceleration detection element body, 102a, 102b ... positioning part, 102c, 102d ... connection part, 102e, 102f ... constriction part.

Claims (9)

A cantilever portion including a flat base portion, a flat movable portion connected to the base portion via a joint portion, and the joint portion to the base portion and the movable portion. A physical quantity detector spanning the physical quantity detector, and a manufacturing method of a physical quantity detector comprising:
Preparing the cantilever portion;
Preparing the physical quantity detection element including a positioning part having a shape protruding integrally from the physical quantity detection element in plan view;
Positioning the positioning unit relative to the base unit and the movable unit in a state where the physical quantity detection element is bridged between the base unit and the movable unit, and fixing the positioning unit to the base unit and the movable unit; ,
Removing the positioning part after fixing the physical quantity detection element to the base part and the movable part;
A method of manufacturing a physical quantity detector, comprising: In the manufacturing method of the physical quantity detector of Claim 1,
The physical quantity detector further comprises a weight portion,
A method of manufacturing a physical quantity detector, further comprising the step of placing and fixing the weight portion on the movable portion after removing the positioning portion. In the manufacturing method of the physical quantity detector of Claim 1 or Claim 2,
Positioning of the physical quantity detection element with respect to the base part and the movable part is performed by matching at least a part of the outline of the positioning part with at least a part of the outline of the base part and the movable part. A manufacturing method of a physical quantity detector. In the manufacturing method of the physical quantity detector according to claim 3,
A part of the outline of the positioning part and a part of the outline of the base part and the movable part are corner parts. In the manufacturing method of the physical quantity detector of Claim 3 or Claim 4,
In the physical quantity detector, the positioning unit has a protruding portion that protrudes to the outside of at least one of the base portion and the movable portion in a plan view superimposed on the base portion and the movable portion. Production method. In the manufacturing method of the physical quantity detector as described in any one of Claims 3 thru | or 5,
At least one of the base part and the movable part has a cutout part cut out inside the outline of the positioning part in a plan view superimposed on the positioning part. Method. In the manufacturing method of the physical quantity detector as described in any one of Claims 1 thru | or 6,
A physical quantity detection unit having at least one or more vibrating beams extending along a direction connecting the base part and the movable part, and a pair of bases connected to both ends of the physical quantity detection unit; Configured with
The method of manufacturing a physical quantity detector, wherein the positioning portion is connected to opposite sides of the base portion opposite to each other. In the manufacturing method of the physical quantity detector as described in any one of Claims 1 thru | or 7,
The method of manufacturing a physical quantity detector, wherein the positioning part is integrated with the physical quantity detection element via a connection part thinner than the positioning part and the physical quantity detection element. In the manufacturing method of the physical quantity detector according to claim 8,
A manufacturing method of a physical quantity detector, wherein a constriction part is provided in the connecting part.

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