JP2013018617A - Carrying vehicle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrying vehicle that efficiently correct the positional deviation of a position of a carried object.SOLUTION: The carrying vehicle 1 includes: a travel truck 3; a turntable 9; a transfer device 11 on which a cassette W is placed and which is expanded and contracted along a predetermined expansion and contraction direction to take in/out the cassette W; a first position detection sensor 13 for detecting a first position of the cassette W in the expansion and contraction direction when the cassette W is placed on the transfer device 11; a third position detection sensor 17 for detecting a second position of the cassette W in a direction horizontally perpendicular to the expansion and contraction direction when the cassette W is placed on the transfer device 11; and a controller 19 that calculates a correction amount of the positional deviation of the cassette W by the time when the transfer device 11 reaches a direction to be transferred of the cassette W after taking in the cassette W, and sets a moving amount of the travel truck 3 to which the correction amount is added, a rotation amount of the turn table 9, and an expansion and contraction amount of the transfer device 11.

Description

  The present invention relates to a transport vehicle for transporting a transported object such as a cassette storing a plurality of substrates in a clean room, for example.

  2. Description of the Related Art Conventionally, a technique for correcting a positional deviation of a conveyed object is known. For example, the transfer device described in Patent Document 1 corrects the extension amount of the sensor that measures the distance along the depth direction of the object to be conveyed and the support unit that supports the object to be conveyed according to the distance measured by the sensor. And a controller for correcting the positional deviation of the object to be transferred and transferring the object to be transferred to an accurate position.

JP 2010-208816 A

  Since the positional deviation of the object to be conveyed is accumulated in the conveyance process and the amount of deviation increases, it is necessary to correct the positional deviation to a predetermined position as described above. On the other hand, in manufacturing processes of semiconductors, liquid crystals, and the like, it is also required to efficiently transport an object to be transported with little time loss. Therefore, it is desired to correct the positional deviation of the conveyed object efficiently.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a transport vehicle that can efficiently correct a positional deviation of a transported object.

  The present invention is a transporting vehicle that transports an object to be transported, and a main body that is provided so as to be able to travel along a predetermined direction, and a rotation that is provided so as to be rotatable about a vertical axis with respect to the main body A transfer device that is installed in the rotating section and places the object to be transported, expands and contracts along a predetermined expansion and contraction direction, and places the object to be transported in and out of the transfer device. First position detecting means for detecting the first position of the object to be conveyed in the expansion / contraction direction, and the object to be conveyed in a direction perpendicular to the expansion / contraction direction on the horizontal plane when the object to be conveyed is placed on the transfer device. A second position detecting means for detecting a second position of the object, and a first position detecting means and a second position detecting means from when the transferred object is taken in by the transfer device to when the transferred object is reached. The position of the conveyed object based on the first and second positions of the conveyed object detected by It calculates a correction amount of Les, characterized in that it comprises movement amount of the correction amount body part in consideration of a control unit for setting an extension of the rotation amount and the transfer apparatus of the rotary unit.

  In this transport vehicle, the amount of correction of misalignment of the transported object is calculated from when the transported object is taken in by the transfer device to the destination of the transported object, the amount of movement of the main body, and the rotation unit The amount of rotation and the amount of extension of the transfer device are set. Therefore, it is possible to correct the positional deviation of the conveyed object. Also, since the correction amount is calculated and the operation amount is set from the time when the transported object is taken in until the transport destination is reached, when the transported object is taken in or when the transported object is stored in the transport destination shelf Compared with the case of calculating the correction amount, the time can be shortened. Therefore, it is possible to efficiently correct the positional deviation of the conveyed object.

  The transfer device has a scalar arm that expands and contracts only in one direction, and the first position detecting means may be installed on the base side of the scalar arm and above the placement surface on which the object to be conveyed is placed. it can. In this embodiment, the first position can be accurately detected without moving the first position detecting means.

  The first position detecting means can be fixed to the base of the scalar arm. In this form, since the first position can be detected at a position close to the object to be conveyed, the first position can be detected more accurately.

  Two first position detection means are installed apart from the base of the scalar arm, and one second position detection means can be installed on the scalar arm. In this embodiment, the position of the conveyed object can be detected with high accuracy by the minimum number of position detecting means.

  The second position detection unit may be installed in the rotating unit. In this embodiment, since the second position can be detected at a position close to the conveyed object, the second position can be detected more accurately.

  According to the present invention, it is possible to efficiently correct the positional deviation of the conveyed object.

It is a perspective view which shows the conveyance vehicle which concerns on one Embodiment. (A) is the figure which looked at the transfer apparatus from the top, (b) is the figure which looked at the transfer apparatus from the side. It is a figure which shows the state which the scalar arm extended | stretched. It is a figure for demonstrating the detection of the position by a position detection sensor. It is a block diagram which shows the functional structure of a controller. It is a figure for demonstrating the procedure which correct | amends the shift | offset | difference of a cassette. It is a perspective view which shows the conveyance vehicle which concerns on other embodiment.

  Hereinafter, preferred embodiments will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted.

  FIG. 1 is a perspective view showing a transport vehicle according to an embodiment. 2A is a view of the transfer device as viewed from above, and FIG. 2B is a view of the transfer device as viewed from the side. FIG. 3 is a diagram illustrating a state where the scalar arm is extended.

  A transport vehicle 1 shown in each figure is a device that moves in a clean room in which a large number of shelves (not shown) are arranged and puts cassettes (conveyed objects) W in and out of each shelf. In the cassette W, for example, a plurality of glass substrates (not shown) used for a liquid crystal panel or a solar battery panel are stored.

  The transport vehicle 1 moves in a vertical direction with respect to a traveling carriage (main body part) 3 that moves in the clean room, two prop devices 5a and 5b that are erected on the traveling cart 3, and the prop devices 5a and 5b. Elevating platform 7, a turntable (rotating unit) 9 installed on the elevating platform 7, a transfer device 11 installed on the turntable 9, and a first position detection sensor (first position) (Detection means) 13, a second position detection sensor (first position detection means) 15, and a third position detection sensor (second position detection means) 17. The transport vehicle 1 also includes a controller (control unit) 19 (see FIG. 5) that controls the operation of the transport vehicle 1.

  The traveling carriage 3 is provided so as to be able to travel along a predetermined direction. The traveling carriage 3 has wheels 3a and moves linearly along the rail R laid in the clean room. The wheel 3a is rotationally driven by a motor (not shown). By this traveling carriage 3, the transport vehicle 1 is provided so as to be movable in the clean room.

  A pair of strut devices 5 a and 5 b are provided facing each other in the traveling direction of the traveling carriage 3. A guide rail 20 is provided along the vertical direction in the column devices 5a and 5b. The guide rail 20 is slidably provided with guides (not shown) of support frames 22 provided on both sides of the lifting platform 7. The lifting platform 7 is moved up and down along the guide rails 20 by the lifting drive means (not shown) in the vertical direction of the column devices 5a and 5b.

  The turntable 9 is provided so as to be rotatable about a vertical axis with respect to the traveling carriage 3. The turntable 9 is installed on the lifting platform 7 and is rotationally driven by a motor (not shown).

  The transfer device 11 includes a scalar arm 24 and a slide portion 26 on which the scalar arm 24 is installed. The scalar arm 24 includes a proximal arm 28, a distal arm 30, and a transfer arm 32. The base end side of the base end side arm 28 is rotatably provided on the base 25. The proximal end arm 28 and the distal end side arm 30 are provided so as to be rotatable with respect to each other, and constitute a free arm 33. Moreover, the front end side arm 30 and the transfer arm 32 are rotatably provided with respect to each other.

  The transfer arm 32 includes a base end portion (base portion) 32a and a pair of receiving arms 32b and 32c extending from the base end portion 32a to the front side in the transfer direction. The upper surfaces of the receiving arms 32b and 32c constitute a mounting surface on which the cassette W is mounted. In the scalar arm 24, the base 25 causes the base end side arm 28 to synchronously rotate in symmetry with the center line of the base 25 so that the transfer arm 32 is in one direction orthogonal to the traveling direction of the traveling carriage 3 (the cassette W is Move in a straight line in the direction of removal.

  The slide unit 26 moves straight in a direction orthogonal to the traveling direction of the traveling carriage 3 and slides the scalar arm 24. The slide part 26 is installed on the turntable 9. Thereby, the transfer apparatus 11 is provided rotatably from the direction of the tip of the transfer arm 32 shown in FIG. 1 to the direction opposite to 180 °.

  The first position detection sensor 13 and the second position detection sensor 15 are laser sensors that detect the position of the cassette W in the expansion / contraction direction of the scalar arm 24. The first and second position detection sensors 13 and 15 are installed in the scalar arm 24 so as to be separated from the base end portion 32a of the transfer arm 32 with the base end portion 32a interposed therebetween. As shown in FIG. 4, the first position detection sensor 13 is installed on one end side in the longitudinal direction of the base end portion 32 a of the transfer arm 32, and the second position detection sensor 15 is the base of the transfer arm 32. It is installed on the other end side in the longitudinal direction of the end portion 32a. The first and second position detection sensors 13 and 15 are installed above the upper surfaces (mounting surfaces) of the receiving arms 32b and 32c.

  The first and second position detection sensors 13, 15 have a light projecting / receiving unit (not shown) for projecting / receiving laser light, and projecting toward the distal end side of the scalar arm 24 as shown in FIG. The distance is measured based on the time until the received light is reflected by the frame F below the cassette W and received. The first and second position detection sensors 13 and 15 detect positions when the cassette W is placed on the receiving arms 32 b and 32 c of the transfer arm 32. The first and second position detection sensors 13 and 15 output first position information and second position information indicating the detected position of the cassette W to the controller 19.

  The third position detection sensor 17 is a laser sensor that detects the position of the cassette W in the direction orthogonal to the traveling direction of the traveling carriage 3, that is, the expansion / contraction direction of the scalar arm 24 in the horizontal plane. The third position detection sensor 17 is installed on one receiving arm 32 b of the transfer arm 32 in the scalar arm 24. The third position detection sensor 17 has a light projecting / receiving unit (not shown) that projects and receives laser light, and projects light in a direction perpendicular to the expansion / contraction direction of the scalar arm 24 as shown in FIG. The distance is measured based on the time until the light is reflected by the frame F below the cassette W and received. The third position detection sensor 17 detects the position when the cassette W is placed on the receiving arms 32 b and 32 c of the transfer arm 32. The third position detection sensor 17 outputs third position information indicating the detected position of the cassette W to the controller 19.

  FIG. 5 is a block diagram showing a functional configuration of the controller. As shown in FIG. 5, a first position detection sensor 13, a second position detection sensor 15, and a third position detection sensor 17 are connected to the controller 19. The controller 19 includes a CPU [Central Processing Unit], a ROM [Read Only Memory], a RAM [Random Access Memory], and the like, and various controls are executed by a program.

  The controller 19 includes a first correction amount calculation unit 190, a second correction amount calculation unit 191, and a third correction amount calculation unit 192.

  The first correction amount calculation unit 190 calculates the correction amount of the positional deviation of the cassette W in the expansion / contraction direction (Y direction in FIG. 4) of the scalar arm 24, and sets the expansion amount of the scalar arm 24. When the first correction amount calculation unit 190 receives the first and second position information output from the first and second position detection sensors 13 and 15, the first correction amount calculation unit 190 receives the first and second position information before reaching the transfer destination of the cassette W. 2. Based on the positional information, the correction amount of the positional deviation of the cassette W in the Y direction is calculated, and the expansion amount of the scalar arm 24 is set based on the correction amount. The first correction amount calculation unit 190 outputs extension amount information indicating the set extension amount to the actuator 34.

  The second correction amount calculation unit 191 calculates the correction amount of the positional deviation of the cassette W in the traveling direction of the traveling carriage 3, that is, the direction orthogonal to the Y direction (the X direction in FIG. 4), and the movement amount of the traveling carriage 3 is calculated. Set. When the second correction amount calculation unit 191 receives the first to third position information output from the first to third position detection sensors 13, 15, and 17, the first correction amount calculation unit 191 performs the first correction until the transfer destination of the cassette W is reached. A correction amount in the X direction of the cassette W is calculated based on the third position information, and a movement amount of the traveling carriage 3 (a stop position of the transport vehicle 1) is set based on the correction amount. The second correction amount calculation unit 191 outputs movement amount information indicating the set movement amount to the actuator 34.

  The third correction amount calculation unit 192 calculates the correction amount of the positional deviation in the rotation direction of the cassette W, and sets the rotation amount of the turntable 9. When the third correction amount calculation unit 192 receives the first and second position information output from the first and second position detection sensors 13 and 15 respectively, the third correction amount calculation unit 192 first and Based on the second position information, the rotation angle θ of the cassette W is calculated to calculate a correction amount of the positional deviation, and the rotation amount of the turntable 9 is set based on the correction amount. The third correction amount calculation unit 192 outputs rotation amount information indicating the set rotation amount to the actuator 34.

  The actuator 34 is a motor that drives the wheels 3 a of the traveling carriage 3, a motor that rotates the turntable 9, a motor that drives the transfer device 11, or the like. When the actuator 34 receives the expansion amount information, the movement amount information, and the rotation amount information output from the controller 19, the actuator 34 operates each device in accordance with each information including these correction amounts.

  Next, the operation of the transport vehicle 1 will be described. FIG. 6 is a diagram for explaining a procedure for correcting the deviation of the cassette. As shown in FIG. 6A, the transport vehicle 1 first moves in front of the shelf in which the cassette W is stored. Next, as shown in FIG. 6B, the transport vehicle 1 extends the transfer arm 32 of the scalar arm 24 of the transfer device 11, and inserts the scalar arm 24 below the cassette W stored in the shelf. Then lift.

  Subsequently, as shown in FIG. 6C, the transfer arm 32 is contracted and the cassette W is taken into the transport vehicle 1. At this time, the position of the cassette W with respect to the transfer arm 32 is detected by the first to third position detection sensors 13, 15, and 17. Then, the cassette W is transferred to the transfer destination shelf. The controller 19 calculates a misalignment correction amount for correcting the misalignment of the cassette W during the movement, and sets the expansion amount, the movement amount, and the rotation amount.

  Subsequently, the transport vehicle 1 is moved to the front of the shelf, with the traveling carriage 3 being controlled based on the movement amount including the correction amount. Then, the transport vehicle 1 extends the scalar arm 24 of the transfer device 11 and stores the cassette W in the shelf, as shown in FIG. At this time, the transfer device 11 and the turntable 9 are controlled based on the extension amount of the scalar arm 24 and the rotation amount of the turntable 9. As a result, the cassette W is stored with its displacement corrected with respect to the shelf, as shown in FIG.

  In the present embodiment, the controller 19 detects the cassette W detected by the first to third position detection sensors 13, 15, 17 after the transfer device 11 takes in the cassette W and reaches the transfer destination of the cassette W. Based on the position, the correction amount of the positional deviation of the cassette W is calculated, and the movement amount of the traveling carriage 3, the rotation amount of the turntable 9 and the extension amount of the scalar arm 24 are set in consideration of this correction amount. Therefore, it is possible to correct the positional deviation of the cassette W satisfactorily. In addition, since the amount of correction for misalignment is calculated and set for each operation amount from when the cassette W is taken to when it reaches the transfer destination, when the cassette W is taken in or when the cassette W is stored in the transfer destination shelf Compared with the case of calculating the correction amount, the time can be shortened. Therefore, the positional deviation of the cassette W can be corrected efficiently.

  Here, conventionally, when the cassette W is taken in, the scalar arm is temporarily stopped, the position of the cassette is detected, and the correction amount is calculated. Therefore, the operation of the transfer device is stopped for about 1 to 2 seconds. . On the other hand, in this embodiment, since the correction amount is calculated during the transfer of the cassette W, and the expansion / contraction amount, the movement amount, and the rotation amount are set in consideration of the correction amount, the following operations are possible. It becomes.

  That is, in the transport vehicle 1, it is not necessary to stop the operation of the transfer device 11 when the cassette W is taken in. Therefore, the expansion / contraction operation of the scalar arm 24 and the lift operation of the lifting platform 7 in the transfer device 11 are overlapped. be able to. Therefore, the transfer time can be shortened. Accordingly, it is possible to efficiently transport (transfer) the cassette W while correcting the positional deviation.

  In the present embodiment, the first and second position detection sensors 13 and 15 are fixed to the base end portion 32 a of the transfer arm 32. Therefore, the position of the cassette W can be detected in proximity. Thereby, the position of the cassette W can be detected with high accuracy.

  The present invention is not limited to the above embodiment. For example, in the above embodiment, the third position detection sensor 17 is attached to the receiving arm 32b of the scalar arm 24, but the attachment position of the third position detection sensor 17 is not limited to this. The 3rd position detection sensor 17 may be installed in the turntable 9, as shown in FIG. As shown in FIG. 7, in the transport vehicle 1 </ b> A, the third position detection sensor 17 </ b> A is attached to the turntable 9 by the support portion S. With such a configuration, the third position detection sensor 17 </ b> A detects the position of the frame F from the outside of the cassette W when the cassette W is taken into the transport vehicle 1.

  Moreover, in the said embodiment, although the laser sensor is illustrated as 1st-3rd position detection sensor 13,15,17, 1st-3rd position detection sensor 13,15,17 is an optical range-finding sensor. Alternatively, an ultrasonic wave or a magnetic wave may be used.

  DESCRIPTION OF SYMBOLS 1 ... Conveyance vehicle, 3 ... Traveling trolley (main part), 9 ... Turntable (rotating part), 11 ... Transfer equipment, 13 ... 1st position detection sensor (1st position detection means), 15 ... 2nd position detection Sensor (first position detecting means), 17 ... third position detecting sensor (second position detecting means), 19 ... controller (control unit), 24 ... scalar arm, W ... cassette (conveyed object).

Claims (5)

A transport vehicle for transporting a transported object,
A main body provided to be able to travel along a predetermined direction;
A rotating part provided to be rotatable about a vertical axis with respect to the main body part;
A transfer device that is installed in the rotating unit, places the object to be conveyed, and expands and contracts along a predetermined expansion and contraction direction;
A first position detecting means for detecting a first position of the transported object in the expansion / contraction direction when the transported object is placed on the transfer device;
A second position detecting means for detecting a second position of the transported object in a direction orthogonal to the expansion / contraction direction in a horizontal plane when the transported object is placed on the transfer device;
The first of the transported objects detected by the first position detecting means and the second position detecting means from the time when the transported object is taken in by the transfer device to the destination of the transported object. Based on the first and second positions, the amount of correction of the displacement of the conveyed object is calculated, and the amount of movement of the main body, the amount of rotation of the rotating unit, and the amount of extension of the transfer device are calculated in consideration of the correction amount. A control unit to be set;
A transport vehicle comprising: The transfer device has a scalar arm that expands and contracts only in one direction,
2. The transport vehicle according to claim 1, wherein the first position detection unit is installed on a base side of the scalar arm and above a mounting surface on which the transported object is mounted.   The transport vehicle according to claim 2, wherein the first position detection unit is fixed to the base portion of the scalar arm. Two first position detecting means are installed apart from the base of the scalar arm,
4. The transport vehicle according to claim 2, wherein one second position detection unit is installed on the scalar arm. 5. The said 2nd position detection means is installed in the said rotation part, The conveyance vehicle as described in any one of Claims 1-3 characterized by the above-mentioned.

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