JP2013098367A - Substrate conveyance stage, drawing device, and drawing method - Google Patents

Abstract

Provided are a substrate transfer stage with high work position accuracy, a drawing apparatus including the same, and a drawing method using the same.
A substrate transport stage is mounted on a base, a Y-axis motor that performs scanning in the Y-axis direction as the main scanning axis direction, and a Y-axis table that serves as a mover of the Y-axis motor. An X-axis motor 15 that performs scanning in the X-axis direction as a sub-scanning axis direction that intersects the Y-axis direction, and an X-axis table 20 as a mover of the X-axis motor 15 are mounted on the Y-axis direction and the X-axis direction. A rotary motor 25 that rotates about an orthogonal axis orthogonal to the substrate, a substrate stage 30 as a movable element thereof, and a friction brake unit 18 as a locking means for locking the Y-axis table 10 and the substrate stage 30. ing.
[Selection] Figure 1

Description

  The present invention relates to a substrate transfer stage, a drawing apparatus having a substrate transfer stage, and a drawing method using the drawing device.

  2. Description of the Related Art Conventionally, a substrate transfer stage configured to perform a desired operation on a substrate by transporting a substrate as a work object in the X-axis direction, the Y-axis direction, and the θ-axis direction has been widely used. Yes. For example, a substrate transfer stage and a drawing head (functional droplet discharge head) for discharging a liquid material (for example, ink) are provided, and the substrate (work) placed on the substrate transfer stage and the drawing head are relatively 2. Description of the Related Art A drawing apparatus (droplet discharge apparatus) is known in which a liquid droplet is discharged from a drawing head onto a substrate while being moved to perform predetermined drawing (for example, Patent Document 1).

  The substrate transfer stage used in the drawing apparatus includes, for example, a base, a Y-axis linear motor that performs scanning in the Y-axis (main scanning axis) direction, and an X-axis linear motor that performs scanning in the X-axis (sub-scanning axis) direction. And a θ-axis rotary motor that rotates around an orthogonal axis orthogonal to the Y-axis direction and the X-axis direction. After the substrate placed on the mover (for example, substrate stage) of the θ-axis rotary motor is transported to a predetermined work start position, the difference between the actual substrate position at that time and the desired work start position of the substrate Is detected, the correction amount is calculated, the position is corrected to a desired work start position, and then the substrate is scanned in the Y-axis (main scanning axis) direction by a Y-axis (main scanning axis) linear motor. Perform drawing work.

JP 2004-130299 A

  However, in the drawing method using the conventional drawing apparatus described above, after the work start position is corrected, the sub-scanning axis linear motor can be moved by the force that acts during the initial operation at the start of scanning in the main scanning direction for the drawing work. There is a problem that there is a possibility that drawing may not be performed at a desired position due to deviations in the child or the mover of the θ-axis rotary motor.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A substrate transfer stage according to this application example includes a base, a main scanning axis linear motor that is placed on the base and performs scanning in the main scanning axis direction, and a mover of the main scanning axis linear motor. And a sub-scanning axis linear motor that performs scanning in the sub-scanning axis direction that intersects the main scanning axis direction, and a sub-scanning axis linear motor that is mounted on a movable element of the sub-scanning axis linear motor. A θ-axis rotary motor that rotates about an orthogonal axis that is orthogonal to the direction and a mover thereof, and a substrate placed on the mover of the θ-axis rotary motor is the sub-scanning axis linear motor and the mover After alignment with a predetermined work start position by a θ-axis rotary motor, a substrate transfer step for performing a predetermined work while scanning the substrate in the main scanning axis direction by the main scanning axis linear motor. A di, characterized by comprising locking means for locking the movable element of the main scanning axis linear motor mover and the θ-axis rotary motor.

  According to this application example, after the position of the substrate as the work target is corrected to the desired work start position, the mover of the main scanning axis linear motor and the mover of the θ-axis rotary motor are locked by the locking means. Then, a predetermined operation can be performed on the substrate while scanning the substrate in the main scanning axis direction. This prevents the positional deviation of the mover of the sub-scanning axis linear motor and the mover of the θ-axis rotary motor that may occur at the start of scanning in the main scanning axis direction, and maintains the desired work start position while maintaining the main scan. A desired operation can be performed by scanning the substrate in the axial direction.

  Application Example 2 A drawing apparatus according to this application example is mounted on a base, a main scanning axis linear motor that is placed on the base and performs scanning in the main scanning axis direction, and a movable element of the main scanning axis linear motor. And a sub-scanning axis linear motor that performs scanning in the sub-scanning axis direction that intersects with the main scanning axis direction, and is mounted on a mover of the sub-scanning axis linear motor, and the main scanning axis direction and the sub-scanning axis direction A substrate transfer stage for mounting a substrate as a drawing medium on the mover of the θ-axis rotary motor, and a θ-axis rotary motor that rotates around an orthogonal axis that is orthogonal to the mover; A drawing head unit that performs drawing by discharging a liquid material onto the substrate, and the substrate placed on the mover of the θ-axis rotary motor is the sub-scanning axis linear motor and the θ-axis rotary type By motor After the alignment to the drawing start position, the drawing is performed by discharging the liquid material from the drawing head unit to the substrate while scanning the substrate in the main scanning axis direction by the main scanning axis linear motor. In the apparatus, the substrate transfer stage includes a lock unit that locks the mover of the main scanning axis linear motor and the mover of the θ-axis rotary motor.

  According to this application example, after the substrate as the drawing medium is corrected to the desired work start position (drawing start position), the movable element of the main scanning axis linear motor and the movable element of the θ-axis rotary motor are locked. After locking by the means, drawing can be performed while the substrate is scanned in the main scanning axis direction by the main scanning axis linear motor. This prevents a positional deviation between the movable element of the sub-scanning axis linear motor and the movable element of the θ-axis rotary motor that may occur at the start of scanning in the main scanning axis direction. It is possible to provide a drawing apparatus capable of performing desired drawing on the substrate by scanning in the main scanning axis direction while maintaining the position in the θ-axis direction.

  Application Example 3 A drawing method according to this application example is mounted on a base, a main scanning axis linear motor that is placed on the base and performs scanning in the main scanning axis direction, and a movable element of the main scanning axis linear motor. And a sub-scanning axis linear motor that performs scanning in the sub-scanning axis direction that intersects with the main scanning axis direction, and is mounted on a mover of the sub-scanning axis linear motor, and the main scanning axis direction and the sub-scanning axis direction A substrate transfer stage for mounting a substrate as a drawing medium on the mover of the θ-axis rotary motor, and a θ-axis rotary motor that rotates around an orthogonal axis that is orthogonal to the mover; A drawing head unit that performs drawing by discharging a liquid material onto the substrate, and the substrate transport stage locks the mover of the main scanning axis linear motor and the mover of the θ-axis rotary motor Lock hand A drawing method using a drawing apparatus comprising: the substrate placed on the substrate transfer stage is driven to a drawing start position by driving the main scanning axis linear motor and the sub-scanning axis linear motor. The sub-scanning axis linear motor and the θ-axis rotary motor are operated to determine the difference between the substrate feeding step to be performed, the predetermined drawing start position, and the actual position of the substrate after the substrate feeding step. After the drawing start position correction step that falls within the allowable range and the disease start position correction step, the liquid material is removed from the drawing head unit while the substrate is scanned in the main scanning axis direction by the main scanning axis linear motor. A drawing step of performing desired drawing on the substrate by discharging, and before the drawing step, the main scanning axis linear motor is movable by the locking means And a step of locking the child and the mover of the θ-axis rotary motor.

  According to this application example, after the substrate is corrected to the desired work start position in the drawing start position correction step, and before the drawing operation is performed in the drawing step, the mover of the main scanning axis linear motor and the θ-axis rotary motor The movable element is locked by the locking means. This prevents the positional deviation of the mover of the sub-scanning axis linear motor and the mover of the θ-axis rotary motor that may occur at the start of scanning in the main scanning axis direction, and maintains the desired work start position while maintaining the main scan. A desired drawing can be performed on the substrate by scanning in the axial direction.

The perspective exploded view explaining one Embodiment of the conveyance stage for substrates of this invention. The locking means of the substrate transfer stage will be schematically described with reference to the cross section along line A-A in FIG. 1. FIG. FIG. The perspective view which illustrates typically schematic structure of the drawing apparatus provided with the conveyance stage for board | substrates. The flowchart which shows the drawing method using a drawing apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the scale of each layer and each member is made different from the actual scale so that each layer and each member can be recognized.

(First embodiment)
[Substrate transfer stage]
First, a schematic configuration of the substrate transfer stage according to the first embodiment will be described. FIG. 1 is an exploded perspective view illustrating an embodiment of a substrate transfer stage according to the present invention. FIG. 2 schematically illustrates the locking means of the substrate transfer stage in the AA line cross section of FIG. 1, wherein (a) is a state in which the locking means is off, and (b) It is a fragmentary sectional view which shows the state in which a locking means is each ON.
In FIG. 1, a substrate transfer stage 50 includes a base 1, a Y-axis motor 5 as a main scanning axis linear motor mounted on the base 1, and a Y-axis table 10 as a mover of the Y-axis motor 5. , An X-axis motor 15 as a sub-scanning axis linear motor placed on the Y-axis table 10, an X-axis table 20 as a mover of the X-axis motor 15, and a θ-axis placed on the X-axis table 20. A θ-axis rotary motor 25 as a rotary motor and a substrate stage (θ-axis table) 30 as a mover are provided.

  On the base 1, a Y-axis motor (movable coil linear motor) 5 placed along the Y-axis (main scanning axis) and a lower Y placed in parallel with both sides of the Y-axis motor 5. Shaft linear motor guides (linear motor guides) 3 and 3 are arranged. The Y-axis motor 5 serving as a stator travels movably in the Y-axis direction along the Y-axis motor 5 and serves as a three-phase coil serving as a connection with a Y-axis table 10 serving as a mover of the Y-axis motor 5. A shaft mover connecting portion 6 is provided.

Upper Y-axis linear motor guides 19, 19 corresponding to the lower Y-axis linear motor guides 3, 3 of the base 1 are provided on the bottom side facing the base 1 of the Y-axis table 10 disposed on the base 1. . In the present embodiment, the lower Y-axis linear motor guides 3 and 3 are rails having a rectangular cross section, whereas the upper Y-axis linear motor guide has a concave portion in which the lower Y-axis linear motor guide 3 can be fitted. It has a letter-shaped rail.
Further, on the bottom surface side of the Y-axis table 10, an attachment portion (not shown) to which the Y-axis movable element connection portion 6 of the base 1 is connected and fixed is provided. The Y-axis mover connecting portion 6 is connected and fixed to the mounting portion, and the upper Y-axis linear motor guides 19 and 19 are fitted to the lower Y-axis linear motor guides 3 and 3 so as to be movable in the Y-axis direction. Adapted. Thus, by driving the Y-axis motor 5, the Y-axis table 10 can scan the base 1 in the Y-axis direction.

On the Y-axis table 10, an X-axis motor (movable coil linear motor) 15 placed along the X-axis (sub-scanning axis) and a lower part placed in parallel on both sides of the X-axis motor 15. Side X-axis linear motor guides (linear motor guides) 13 and 13 are arranged. The X-axis motor 15 as a stator travels movably in the X-axis direction along the X-axis motor 15 and is used as a three-phase coil for connection with an X-axis table 20 as a mover of the X-axis motor 15. A shaft mover connecting portion 16 is provided.
Further, in a region where the motor shafts on the Y-axis table 10 are avoided, the friction brake unit 18 as a locking unit that locks the movement of the substrate stage 30 with respect to the Y-axis table 10 with the X-axis table 20 interposed therebetween. Is provided. The friction brake unit 18 may be provided at least in one place, but as in the present embodiment, the friction brake unit 18 may be provided at a plurality of places (minimum two places in the present embodiment) in a balanced arrangement with respect to the center of gravity of the substrate stage 30. It is preferable to provide it.
The details of the structure and operation of the friction brake unit 18 will be described later.

An upper X-axis linear motor guide 29 corresponding to the lower X-axis linear motor guides 13 and 13 of the Y-axis table 10 is disposed on the bottom surface side of the X-axis table 20 arranged on the Y-axis table 10 and facing the Y-axis table 10. 29 is provided. In the present embodiment, the lower X-axis linear motor guides 13 and 13 are rails having a rectangular cross section, whereas the upper X-axis linear motor guides 29 and 29 have recesses into which the lower X-axis linear motor guide 13 can be fitted. The rail has a U-shaped cross section.
Further, on the bottom surface side of the X-axis table 20, an attachment portion (not shown) to which the X-axis movable element connection portion 16 of the Y-axis table 10 is connected and fixed is provided. The X-axis mover connecting portion 16 is connected and fixed to the mounting portion, and the upper X-axis linear motor guides 29 and 29 are fitted to the lower X-axis linear motor guides 13 and 13 so as to be movable in the X-axis direction. Adapted. Thus, by driving the X-axis motor 15, the X-axis table 20 can scan the base 1 in the X-axis direction orthogonal to the Y-axis direction.

A θ-axis rotary motor 25 is placed in the center of the X-axis table 20 and a circular lower cross roller guide 23 is provided in plan view so as to surround the θ-axis rotary motor 25. ing. The rotation axis of the θ-axis rotary motor 25 is provided with a θ-axis mover connecting portion 26 for connection to the substrate stage 30 as a mover of the θ-axis rotary motor 25.
Further, through holes 27 for allowing the friction brake portion 18 of the Y-axis table 10 to come into contact with the substrate stage 30 are provided in areas where the motor shafts on the X-axis table 20 are avoided.

An upper cross roller guide (not shown) corresponding to the lower cross roller guide 23 of the X axis table 20 is provided on the bottom surface side of the substrate stage 30 disposed on the X axis table 20 facing the X axis table 20. ing.
Further, on the bottom surface side of the substrate stage 30, an attachment portion 26 a to which the θ-axis movable element connection portion 26 of the X-axis table 20 is connected and fixed is provided. The θ-axis movable element connecting portion 26 is coupled and fixed to the mounting portion 26a, and the upper cross roller guide 39 (not shown in FIG. 1, refer to FIG. 2) is attached to the lower cross roller guide 23 on the θ axis. The substrate stage 30 can be rotated in the θ-axis direction with respect to the base 1 by driving the θ-axis rotary motor 25 by being fitted in a state that is freely rotatable in the direction.
Although not shown, a fixing means capable of fixing a substrate (work) as a work object is provided on the upper surface side of the substrate stage 30 opposite to the bottom surface side. As the fixing means, for example, vacuum adsorption can be used. In this case, a plurality of vacuum suction holes are provided in the substrate placement region on the upper surface side of the substrate stage 30, and a vacuum generator is connected to the vacuum suction holes.

Next, details of the structure and operation of the friction brake unit 18 as a locking unit in the substrate transfer stage 50 of the present embodiment will be described.
As shown in FIG. 2, the friction brake unit 18 provided on the Y-axis table 10 can lift and lower the brake pad 18 a in the Z-axis direction (see FIG. 1) from the Y-axis table 10 side to the substrate stage 30 side. It has a structure.
FIG. 2A shows a state in which the friction brake unit 18 is off. In the off state, the brake pad 18a is lowered to the lower limit position and is located below the bottom surface of the X-axis table 20, and the X-axis table 20 and the substrate stage 30 are movable without any restriction. It is in a state.
FIG. 2B shows a state in which the friction brake unit 18 is on. When the brake pad 18a of the friction brake unit 18 is raised and pressed against the bottom surface of the substrate stage 30 through the through hole 27 of the X-axis table 20, the substrate stage 30 is moved against the Y-axis table 10 with the X-axis. The movement is locked together with the table 20.

According to the substrate transfer stage of the first embodiment, after correcting the position of the substrate as the work target to the desired work start position, the Y axis as the mover of the Y axis (main scanning axis) motor 5 is used. The table 10 and the substrate stage 30 as the mover of the θ-axis rotary motor 25 are locked by the friction brake unit 18 as the locking means, and then the substrate is scanned on the substrate in the Y-axis (main scanning axis) direction. Can be done. This prevents a positional deviation between the X-axis (sub-scanning axis) table 20 and the substrate stage 30 that may occur at the start of scanning in the Y-axis (main scanning axis) direction, and maintains the desired work start position while maintaining the desired Y-axis. A desired operation can be performed by scanning the substrate in the (main scanning axis) direction.
Moreover, in the said embodiment, the friction brake part 18 is applied as a locking means. The locking means is not limited to the friction brake unit 18, but other brake structures (lock structures) may be applied. However, the friction brake is relatively simple and can realize the lock structure at a low cost.
For example, a motor with a brake can be used as the locking means. However, when a motor with a brake is used, a motor with a brake that holds the position of the θ-axis is required, so that a strong holding force is required and adjustment is relatively difficult.

(Second Embodiment)
Next, a drawing apparatus provided with the substrate transfer stage 50 of the first embodiment and a drawing method using the same will be described.
[Drawing device]
First, a schematic configuration of a drawing apparatus according to the second embodiment will be described with reference to the drawings. FIG. 3 is a perspective view illustrating a schematic configuration of the drawing apparatus 100 according to the second embodiment. In addition, the same number is attached | subjected about the component same as the said 1st Embodiment, and the overlapping description is abbreviate | omitted.
In FIG. 3, the drawing apparatus 100 includes a liquid material on a substrate transfer stage 50 according to the first embodiment and a substrate W as a drawing medium placed on the substrate transfer stage 50 on a gantry 62. And a drawing head unit 80 that performs drawing by ejecting the ink by, for example, an inkjet method.

  In the drawing apparatus 100 of the present embodiment, the Y-axis table 10 of the substrate transfer stage 50 of the above-described embodiment disposed on the gantry 62 operates during a drawing scan in the Y-axis direction as the main scanning axis direction. The X-axis table 20 operates at the time of alignment position correction in the X-axis direction as the sub-scanning axis direction or at the time of drawing line feed (feed). Further, the substrate stage 30 as the θ-axis table operates in the θ-axis rotation direction when the alignment position is corrected.

In addition, a pair of support columns 65 are erected on the gantry 62, and a carriage conveyance device 70 is installed between the support columns 65. In the carriage transport device 70, a carriage 82 is disposed so as to be movable in the X-axis direction (sub-scanning axis direction). A drawing head unit 80 is attached to the carriage 82 via a Z-axis motor 83. The drawing head unit 80 can be moved in the X-axis direction (sub-scanning axis direction) with respect to the substrate W as a drawing medium by the carriage transport device 70, and can be moved in the Z-axis direction by the Z-axis motor 83. It has become.
An ink supply comprising an ink tank 87 for storing ink as a liquid material and an ink supply path 88 serving as a path for supplying the ink in the ink tank 87 to the drawing head, in the vicinity of the carriage conveying device 70 of the column 65. A device 85 is provided.

According to the drawing apparatus 100 having the above-described configuration, since the substrate transfer stage 50 according to the first embodiment is provided, after performing alignment for correcting the position of the substrate W as a drawing medium at a desired work start position. After the Y-axis table 10 as the mover of the Y-axis (main scanning axis) motor 5 and the substrate stage 30 as the mover of the θ-axis rotary motor 25 are locked by the friction brake unit 18 as the locking means. Drawing can be performed while the substrate W is scanned in the Y-axis (main scanning axis) direction by the Y-axis motor. As a result, the X-axis table 20 as the mover of the X-axis (sub-scanning axis) motor 15 that can occur at the start of scanning in the Y-axis (main scanning axis) direction, and the mover of the θ-axis rotary motor 25 as the mover. The substrate stage 30 is prevented from being displaced and the substrate is scanned in the Y-axis (main scanning axis) direction while maintaining the position of the drawing start position corrected in the X-axis (sub-scanning axis) direction and θ-axis direction. A drawing apparatus 100 capable of performing desired drawing on W can be provided.
Further, at the time of drawing, it is possible to prevent a deviation in the θ-axis direction at the time of acceleration and deceleration of the scanning of the substrate stage 30 in the Y-axis (main scanning axis) direction. Since the interval can be reduced, the ratio of the drawable area to the size of the drawing apparatus 100 can be increased.

[Drawing method]
Next, an embodiment of a drawing method using the drawing apparatus 100 will be described. FIG. 4 is a flowchart showing a drawing method according to the second embodiment. In the following description of the drawing method, refer to FIGS. 1 to 3 for the configuration of the drawing apparatus 100 and the substrate transport stage 50 provided in the drawing apparatus 100.
In the drawing method of the present embodiment, first, as shown in step S1 of FIG. 4, the substrate W is placed on the substrate stage 30 of the substrate transfer stage 50 of the drawing apparatus 100 and fixed by vacuum suction or the like, Substrate supply for supplying the substrate W to a predetermined drawing start position is performed by driving the Y-axis motor 5 and the X-axis motor 15 of the substrate transfer stage 50. At this time, the friction brake portion 18 as a locking means of the substrate transfer stage 50 is in an OFF state (see FIG. 2A).

  Next, as shown in step S2, a correction amount is calculated by detecting a deviation between the actual drawing start position of the substrate W after the substrate supply step (step S1) and the desired drawing start position, and the X axis By operating the motor 15 and the θ-axis rotary motor 25, the drawing start position is corrected so as to be within the allowable range of the drawing start position. Note that the deviation between the actual position (drawing start position) of the substrate W and the desired drawing start position after the substrate supply step (step S1) is the initial positional deviation of the substrate W placed on the substrate stage 30. Or due to misalignment caused by the mechanical accuracy of the substrate transfer stage 50.

After performing the drawing start position correcting step (step S2), next, as shown in step S3, the friction brake unit 18 as the locking means is turned on to turn on the Y-axis (main scanning axis) motor. The Y-axis table 10 as the mover 5 and the substrate stage 30 as the mover of the θ-axis rotary motor 25 are locked (see FIG. 2B).
Next, as shown in step S4, the Y-axis (main scanning axis) motor 5 is driven to move the Y-axis table 10 to scan the substrate W in the Y-axis (main scanning axis) direction, while drawing head unit 80. Then, drawing is performed by discharging ink droplets as a liquid material. That is, during drawing, the Y-axis table 10 and the substrate stage 30 are locked by the friction brake unit 18.

When drawing in one scan in the Y-axis (main scanning axis) direction is completed in the drawing step (step S4), the next drawing scan is performed by moving (feeding) to the next drawing row as shown in step S5. Decide whether to do it.
When performing the next drawing scan (YES in step S5), the friction brake unit 18 is turned off (see FIG. 2A), and the lock between the Y-axis table 10 and the substrate stage 30 is released. (Step S11), the X-axis (sub-scanning axis) motor 15 is driven to move the X-axis table 20 to feed the substrate W in the X-axis direction and move to the drawing start position of the next drawing row (Step S11). S12), returning to step S2, the operation from the correction of the pre-drawing substrate position at the next drawing start position is repeated.

  If it is determined in step S5 that drawing scanning of the next drawing row is not performed (NO in step S5), the friction brake unit 18 is turned off (see FIG. 2A), and the Y-axis table 10 is set. After unlocking the substrate stage 30 (step S6), the Y-axis motor 5 and the X-axis motor 15 of the substrate transfer stage 50 are driven to transfer the substrate W to a predetermined waste material position (step S6). S7) The drawing work is terminated.

  According to the drawing method of the above embodiment, after the position of the substrate W is corrected to the desired drawing start position by the drawing start position correction step (step S2), Y is performed before the drawing operation is performed in the drawing step (step S4). The Y-axis table as the mover of the axis (main scanning axis) motor 5 and the substrate stage 30 as the mover of the θ-axis rotary motor 25 are locked by the friction brake part as the locking means, and the substrate W is held in this state. Drawing is performed while scanning in the Y-axis (main scanning axis) direction. Thereby, the positional deviation of the X-axis table 20 as the mover of the X-axis (sub-scanning axis) motor and the substrate stage 30 as the mover of the θ-axis rotary motor 25 that can occur at the start of scanning in the Y-axis direction. Thus, desired drawing can be performed on the substrate W by scanning in the Y-axis (main scanning axis) direction while maintaining a desired work start position.

  DESCRIPTION OF SYMBOLS 1 ... Base, 3 ... Lower Y-axis linear motor guide, 5 ... Y-axis motor as a main scanning-axis linear motor, 6 ... Y-axis mover connection part, 10 ... Y-axis table as a mover of a main-scanning-axis linear motor DESCRIPTION OF SYMBOLS 13 ... Lower X-axis linear motor guide, 15 ... X-axis motor as a sub-scanning axis linear motor, 16 ... X-axis mover connection part, 18 ... Friction brake part as a locking means, 18a ... Brake pad, 19 ... Upper Y-axis linear motor guide, 20 ... X-axis table as a mover of the sub-scanning axis linear motor, 23 ... Lower cross roller guide, 25 ... θ-axis rotary motor, 26 ... θ-axis mover connecting portion, 26a ... Mounting portion , 27 ... Through-hole, 29 ... Upper X-axis linear guide, 30 ... Substrate table, 50 ... Substrate transfer stage, 62 ... Base, 65 ... Post, 70 ... Carry 80... Drawing head unit, 82... Carriage, 83... Z-axis motor, 85... Ink supply device, 87.

Claims (3)

Base and
A main scanning axis linear motor mounted on the base for scanning in the main scanning axis direction, and a scanning in the sub scanning axis direction which is mounted on a movable element of the main scanning axis linear motor and intersects the main scanning axis direction. A sub-scanning linear motor that performs the rotation, a θ-axis rotary motor that is mounted on a movable element of the sub-scanning linear motor and that rotates about an orthogonal axis that is orthogonal to the main scanning axis direction or the sub-scanning axis direction, and its movable A child,
After the substrate placed on the mover of the θ-axis rotary motor is aligned with a predetermined work start position by the sub-scanning axis linear motor and the θ-axis rotary motor, the substrate is moved by the main scanning axis linear motor. A substrate transport stage that performs a predetermined operation while scanning in the main scanning axis direction,
A substrate transfer stage comprising a lock means for locking the mover of the main scanning axis linear motor and the mover of the θ-axis rotary motor. A base, a main scanning axis linear motor mounted on the base for scanning in the main scanning axis direction, and a sub-scanning axis direction mounted on a movable element of the main scanning axis linear motor and intersecting the main scanning axis direction A sub-scanning axis linear motor that performs scanning of the above and a θ-axis rotary motor that is mounted on a mover of the sub-scanning axis linear motor and rotates about an orthogonal axis that is orthogonal to the main scanning axis direction or the sub-scanning axis direction And a mover thereof, and a substrate transfer stage for placing a substrate as a drawing medium on the mover of the θ-axis rotary motor,
A drawing head portion for drawing by discharging a liquid material onto the substrate;
After the substrate placed on the mover of the θ-axis rotary motor is aligned with a predetermined drawing start position by the sub-scanning axis linear motor and the θ-axis rotary motor, the main scanning axis linear motor causes the A drawing apparatus that performs predetermined drawing by discharging the liquid material from the drawing head unit to the substrate while scanning the substrate in the main scanning axis direction,
The drawing apparatus, wherein the substrate transfer stage includes a lock unit that locks the movable element of the main scanning axis linear motor and the movable element of the θ-axis rotary motor. A base, a main scanning axis linear motor mounted on the base for scanning in the main scanning axis direction, and a sub-scanning axis direction mounted on a movable element of the main scanning axis linear motor and intersecting the main scanning axis direction A sub-scanning axis linear motor that performs scanning of the above and a θ-axis rotary motor that is mounted on a mover of the sub-scanning axis linear motor and rotates about an orthogonal axis that is orthogonal to the main scanning axis direction or the sub-scanning axis direction And a mover thereof, and a substrate transfer stage for placing a substrate as a drawing medium on the mover of the θ-axis rotary motor,
A drawing head portion for drawing by discharging a liquid material onto the substrate;
The substrate transport stage is a drawing method using a drawing apparatus including a lock unit that locks the mover of the main scanning axis linear motor and the mover of the θ-axis rotary motor,
A substrate feeding step of feeding the substrate placed on the substrate transfer stage to the drawing start position by driving the main scanning axis linear motor and the sub scanning axis linear motor;
Start of drawing in which the difference between the predetermined drawing start position and the actual position of the substrate after the substrate supply step is within an allowable range by operating the sub-scanning linear motor and the θ-axis rotary motor A position correction step;
A drawing step of performing desired drawing on the substrate by discharging the liquid material from the drawing head unit while scanning the substrate in the main scanning axis direction by the main scanning axis linear motor after the drawing start position correcting step; Including,
Before the drawing step, the drawing method includes a step of locking the movable element of the main scanning axis linear motor and the movable element of the θ-axis rotary motor by the locking means.

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