JP2013082459A - Substrate holding member - Google Patents

Abstract

A substrate holding member for use in a substrate tray for transporting and storing a substrate made of a plate-like material having a functional layer on its surface, such as a liquid crystal display panel member, without using a fixing jig. Provided is a substrate holding member that can be easily and stably installed.
The substrate is supported by a frame portion that holds the substrate from the lower side in the frame inner region of the tray frame portion, with the surface direction of the substrate 111 made of a rectangular and rigid plate-like material as the horizontal direction. In the substrate tray 11 provided with the substrate support portion 13, the substrate holding member 14 is fixed to the substrate support portion and holds the substrate, and the fitting portion is fitted without using a fixing jig. It can be fixed or fixed by fitting.
[Selection] Figure 1

Description

  The present invention relates to the frame portion that holds the substrate from the lower side in a frame inner region of the tray frame portion, with the surface direction of the substrate made of a rectangular and rigid plate-like object as a horizontal direction. The present invention relates to a substrate holding member for holding a substrate, which is fixed to the substrate supporting portion and controls the swinging of the substrate and prevents scratches and dirt in a substrate tray having a supported substrate supporting portion. .

It is important to transport or store a substrate made of a plate-like material with a functional layer on its surface, such as a flat panel member such as a plasma display panel or a liquid crystal display panel, without damaging or contaminating the functional layer on the surface. It is.
Conventionally, when transporting and storing such substrates, in order to protect the substrate surfaces from scratches and damage, box-shaped storage containers that can be stored in parallel at predetermined intervals so that the surfaces do not contact each other have been used.
Under these circumstances, in particular, in the flat panel for liquid crystal display, it is required to manufacture a larger color filter forming substrate, and the transportation cost due to the further improvement of the transportation efficiency for transportation and storage. There is a need for saving and space saving.
However, in the transport using the storage container as described above, it is very difficult to reduce the thickness of the substrate because the substrate is likely to jump due to vibration during transport, and cracks and scratches are likely to occur.

  Many studies have been made to prevent cracks and scratches on the substrate, to prevent contamination of the substrate, and to carry and store the substrate at a higher density.

  For example, in JP-A-2006-168749 (Patent Document 1), JP-A-2010-120690 (Patent Document 2), and JP-A-2005-178839 (Patent Document 3), the stacked substrates are held. A retainer is disclosed. In Japanese Patent Laid-Open No. 2006-168749 (Patent Document 1), a fixing jig such as a screw is used for the mounting method of the holder, and the mounting work becomes complicated. In JP2010-120690A (Patent Document 2), the attachment method of the holder is unstable because it is held between the protrusions of the frame portion but is not fixed. Japanese Patent Laid-Open No. 2005-178839 (Patent Document 3) does not specify a fixing method.

JP 2006-168749 A JP 2010-120690 A JP 2005-178839 A

The present invention holds the plate-like object in a bent state with the surface direction of the rigid square plate-like object as the horizontal direction, and conveys the plate-like object in a plurality of stacked or loaded state. Regarding trays for transportation or storage used for storage, in particular, various plate-like materials (for example, glass and plastic) or members for flat display panels that bend due to their own weight, or metal, rare metal, silicon It is related to trays suitable for transport and storage of plate-like objects such as plate-like materials and plate-like processing members that have been processed to them, and is efficiently transported and stored without damaging or contaminating the surface. A substrate holding member used for a substrate tray that can be fixed to the storage tray easily and stably without using a fixing jig such as a screw. And to provide a a substrate holding member.

  The board | substrate holding member of this invention solves said subject by the means as described in each following aspect.

  The first aspect of the present invention is to hold the substrate from the lower side in the frame inner region of the tray frame portion with the surface direction of the substrate made of a rectangular and rigid plate as the horizontal direction. The substrate tray includes a substrate support portion supported by the frame portion, and is a substrate holding member that is fixed to the substrate support portion and holds the substrate, wherein the substrate holding member is A plurality of trays in a state in which the substrate holding portion is fixed to protrude upward from the upper surface of the substrate supporting portion and is fixed to protrude downward from the lower surface of the substrate supporting portion. The substrate is supported by a vibration control unit having a surface that comes into contact with the substrate only when vertical substrate vibration occurs on the substrate supported one step below in a stacked state, and further restricts horizontal movement of the substrate. Before having a protrusion A substrate holding member, wherein the substrate holding portion and the vibration control portion are separately formed, and a fitting portion is formed in each of the substrate holding portion and the vibration control portion, and the substrate holding portion is formed from above the substrate support portion. The vibration control unit is fixed by fitting the fitting unit into a hole or a notch provided in the substrate support unit from below.

  According to a second aspect of the present invention, the substrate is held in the frame inner region of the tray frame portion from the lower side, with the surface direction of the substrate made of a rectangular and rigid plate-like material as the horizontal direction. The substrate tray includes a substrate support portion supported by the frame portion, and is a substrate holding member that is fixed to the substrate support portion and holds the substrate, wherein the substrate holding member is A plurality of trays in a state in which the substrate holding portion is fixed to protrude upward from the upper surface of the substrate supporting portion and is fixed to protrude downward from the lower surface of the substrate supporting portion. The substrate is supported by a vibration control unit having a surface that comes into contact with the substrate only when vertical substrate vibration occurs on the substrate supported one step below in a stacked state, and further restricts horizontal movement of the substrate. Before having a protrusion A substrate holding member in which the substrate holding portion and the vibration control portion are integrally formed, and the substrate holding member is fitted into a hole or a notch provided in the substrate supporting portion. It is fixed by inserting.

  According to a third aspect of the present invention, the substrate is held in the frame inner region of the tray frame portion, and the substrate is held from the lower side, with the surface direction of the substrate made of a rectangular and rigid plate-like object as the horizontal direction. The substrate tray includes a substrate support portion supported by the frame portion, and is a substrate holding member that is fixed to the substrate support portion and holds the substrate, wherein the substrate holding member is A plurality of trays in a state in which the substrate holding portion is fixed to protrude upward from the upper surface of the substrate supporting portion and is fixed to protrude downward from the lower surface of the substrate supporting portion. The substrate is supported by a vibration control unit having a surface that comes into contact with the substrate only when vertical substrate vibration occurs on the substrate supported one step below in a stacked state, and further restricts horizontal movement of the substrate. Before having a protrusion A substrate holding member, wherein the substrate holding portion and the vibration control portion are integrally formed, wherein the substrate holding portion and the vibration control portion are integrated via a flexible hinge portion. The board holding part and the vibration control part are molded and have a fitting part in each of the board holding part and the vibration control part, and the board holding part and the vibration control part have a hinge part into a hole or notch provided in the board support part. While being bent, the fitting part is fixed by fitting.

  A fourth aspect of the present invention is the substrate holding member according to any one of the first aspect or the third aspect, wherein the substrate holding part and the vibration control part have a fitting part, and the substrate The holding member has a position fixing portion.

The substrate holding member according to any one of the first to fourth aspects of the present invention, wherein the substrate holding member is made of a thermoplastic resin.

  According to the first aspect of the present invention, the substrate is a frame inner region of the tray frame portion, and the substrate is the lower side thereof, with the surface direction of the substrate made of a rectangular and rigid plate-like object as the horizontal direction. The substrate tray is a substrate holding member that includes the substrate support portion supported by the frame portion, is fixed to the substrate support portion, and holds the substrate, and is configured to hold the substrate. The member is protruded and fixed above the upper surface of the substrate support portion, fixed to the substrate holding portion that supports the substrate, and protruded downward from the lower surface of the substrate support portion, and the tray is mounted on the tray. And a vibration control unit having a surface that comes into contact with the substrate only when vertical substrate vibration occurs on the substrate supported one step below in a stacked state, and further, the substrate is moved in the horizontal direction. Has a protrusion to regulate The substrate holding member, wherein the substrate holding portion and the vibration control portion are separately formed, and a fitting portion is formed in each of the substrate holding portion and the vibration control portion, and the upper side of the substrate support portion The substrate holding part can be fixed by fitting the fitting part into the hole or notch provided in the substrate support part from the lower side by fitting the fitting part to the tray. The substrate support member can be installed without using a fixing jig, and the installation of the substrate support member can be simplified.

  According to the second aspect of the present invention, the substrate is formed in a frame inner region of the tray frame portion, and the substrate is disposed on the lower side thereof, with the surface direction of the substrate made of a rectangular and rigid plate-like object as the horizontal direction. The substrate tray is a substrate holding member that includes the substrate support portion supported by the frame portion, is fixed to the substrate support portion, and holds the substrate, and is configured to hold the substrate. The member is protruded and fixed above the upper surface of the substrate support portion, fixed to the substrate holding portion that supports the substrate, and protruded downward from the lower surface of the substrate support portion, and the tray is mounted on the tray. And a vibration control unit having a surface that comes into contact with the substrate only when vertical substrate vibration occurs on the substrate supported one step below in a stacked state, and further, the substrate is moved in the horizontal direction. Has a protrusion to regulate The substrate holding member is a substrate holding member in which the substrate holding portion and the vibration control portion are integrally formed, and the substrate holding member is inserted into a hole or a notch provided in the substrate supporting portion. By being able to be fixed by fitting, the substrate support member can be installed on the tray without using a fixing jig, and the installation of the substrate support member can be simplified. Is possible.

According to the third aspect of the present invention, the substrate is formed in a frame inner region of the tray frame portion, and the substrate is disposed on the lower side thereof, with the surface direction of the substrate made of a rectangular and rigid plate-like object as the horizontal direction. The substrate tray is a substrate holding member that includes the substrate support portion supported by the frame portion, is fixed to the substrate support portion, and holds the substrate, and is configured to hold the substrate. The member is protruded and fixed above the upper surface of the substrate support portion, fixed to the substrate holding portion that supports the substrate, and protruded downward from the lower surface of the substrate support portion, and the tray is mounted on the tray. And a vibration control unit having a surface that comes into contact with the substrate only when vertical substrate vibration occurs on the substrate supported one step below in a stacked state, and further, the substrate is moved in the horizontal direction. Has a protrusion to regulate The substrate holding member is a substrate holding member in which the substrate holding portion and the vibration control portion are integrally formed, and the substrate holding portion and the vibration control portion are interposed via a flexible hinge portion. The board holding part and the vibration control part have a fitting part respectively, and the board holding part and the vibration control part are hinged to a hole or a notch provided in the board support part. The substrate support member can be installed on the tray without using a fixing jig by bending the portion and fixing the fitting portion by fitting. It becomes possible to simplify the installation of the support member.

  According to a fourth aspect of the present invention, in the substrate holding member according to any one of the first aspect or the third aspect, the substrate holding part and the vibration control part have a fitting part. Since the substrate holding member has the position fixing portion, the movement of the substrate holding member after being fixed to the hole or notch provided in the substrate supporting portion can be suppressed. Further, the position fixing portion may have a fitting portion having a function.

The substrate holding member according to any one of the first to fourth aspects of the present invention is used for the purpose of holding the substrate, and the substrate holding member is formed of a material made of resin. There is an effect of preventing the substrate from being damaged when the substrate is transported or stored. Further, by being made of a thermoplastic resin, it becomes possible to produce a large amount at low cost by a method such as injection molding.

1A and 1B are schematic views of an example of an embodiment of a substrate holding member of the present invention, and FIG. 1C is a diagram of FIGS. 1A and 1B. It is the schematic of the top view which looked at the tray for substrates which has the board | substrate holding member of this invention from upper direction. 2A and 2B are schematic views of an example in which substrate trays having the substrate holding member of the present invention are stacked. FIG. 3A is a schematic diagram of an example of a cross section of FIG. 1A taken along the line AA ′ of the substrate tray having the substrate holding member of the present invention, and FIG. It is the schematic of an example of the tray for board | substrates which has a member of FIG.1 (b) DD 'cross section. FIG. 4A is a schematic diagram of an example of a cross section of FIG. 1A taken along the line AA ′ of the substrate tray having the substrate holding member of the present invention, and FIG. It is the schematic of an example of the tray for board | substrates which has a member of FIG.1 (b) DD 'cross section. FIG. 4 is a schematic view of an example of a method for attaching the substrate holding member to the substrate support portion in the substrate tray having the substrate holding member of the present invention. FIG. 6 is a schematic view of a part of the substrate support portion of the substrate tray having the substrate holding member of the present invention as seen from above. FIG. 6A shows a case where a hole is provided, and FIG. FIG. 6C is a schematic diagram in the case where the notch portion and the substrate holding member fixing protrusion are provided, and FIG. 7A and 7B are schematic views of an example of a substrate tray having the substrate holding member of the present invention. FIGS. 8A and 8B are schematic views in which a substrate is loaded on a substrate tray having a substrate holding member of the present invention. FIGS. 9A and 9B are schematic views in which a substrate is loaded on a substrate tray having a substrate holding member of the present invention. FIG. 4 is a schematic view of an example of a method for attaching the substrate holding member to the substrate support portion in the substrate tray having the substrate holding member of the present invention. FIG. 4 is a schematic view of an example of a method for attaching the substrate holding member to the substrate support portion in the substrate tray having the substrate holding member of the present invention. FIG. 4 is a schematic view of an example of a method for attaching the substrate holding member to the substrate support portion in the substrate tray having the substrate holding member of the present invention. FIG. 4 is a schematic view of an example of a method for attaching the substrate holding member to the substrate support portion in the substrate tray having the substrate holding member of the present invention. It is the schematic of one example of the board | substrate holding member of this invention. It is the schematic of one example of the board | substrate holding member of this invention. It is the schematic of one example of the board | substrate holding member of this invention. It is the schematic of one example of the board | substrate holding member of this invention.

  In the present invention, the substrate 111 is held in the frame inner region of the tray frame portion 12 from the lower side, with the surface direction of the substrate 111 made of a rectangular and rigid plate-like material as the horizontal direction. In the substrate tray 11, the substrate tray 11 includes a substrate support portion 13 supported by the frame portion 12, and is a substrate holding member 14 that is fixed to the substrate support portion 13 and holds the substrate 111. The invention relates to a substrate holding member 14 that includes a substrate support portion 13 supported by the frame portion 12, is fixed to the substrate support portion 13, and holds the substrate 111. This makes it possible to easily fix the substrate holding member 14 to the substrate support portion 13 without performing a complicated operation.

The substrate tray 11 is a tray that holds the substrate 111 in a frame inner region of the tray frame portion 12 with the surface direction of the substrate 111 made of a rectangular and rigid plate-like material as a horizontal direction, A substrate support portion 13 supported by the frame portion 12 is provided. The substrate holding member 14 is fixed to the substrate support portion 13 and holds the substrate 111 on the upper surface thereof from below. The substrate tray 11 holds a substrate 111 on the substrate holding member 14 as shown in FIGS.
In addition, the substrate tray 11 is used in a multi-tiered manner on the transportation platform 103 as shown in FIGS. 2A and 2B in order to store and transport the substrate 111. .

FIG. 1 shows an outline of an example of how the substrate tray 111 is used. FIG. 1A is a schematic diagram of an example of an embodiment of a substrate tray in which the substrate support portion 13 supported on the four sides of the frame portion 12 supports the end portion of the substrate 111 linearly. In FIG. 1B, the substrate support portion 13 fixed to one opposite two sides of the four sides of the frame portion 12 supports both ends of the substrate 111 in a straight line, and the other of the four sides of the frame portion 12. It is the schematic of one example of embodiment of the board | substrate tray 11 which bends the board | substrate support part 13 fixed to two opposing sides to a perpendicular direction lower side, and supports the both ends of the board | substrate 111. Although not shown, the substrate tray 11 is formed by bending the substrate support portion 13 fixed to the four sides downward in the vertical direction in order to hold the substrate stably, so that the four sides of the substrate 111 are bent. The substrate tray 11 to be supported may be used. Further, when only the substrate support portion 13 is bent downward in the vertical direction, the frame portion 12 that supports the bent substrate support portion 13 may be a straight line and bends according to the bending of the substrate support portion 13. It may be a curved shape. The shape of the bending may be an arc shape or a parabola, and the difference in height of the center portion of the bent substrate is appropriately designed according to the substrate size.
The substrate tray 11 having the substrate holding member of the present invention is disclosed in, for example, Japanese Patent Application Laid-Open No. 2006-168749 (Patent Document 1) in order to keep the relative positional relationship between the upper and lower trays constant. Such a fitting portion is provided so that the relative positional relationship between the trays positioned above and below becomes constant when a plurality of sheets are stacked. The shape of the fitting portion may have any shape as long as the relative positional relationship between the trays positioned above and below can be kept constant. Furthermore, you may have parts, such as a handle part for using for machine conveyance.
Moreover, since many frame parts 12 of the board | substrate tray 11 of FIG. 1 are laminated | stacked and used at the time of conveyance or storage, intensity | strength is required and generally a metal material is used. Although a material formed from glass fiber, carbon fiber and resin may be used, it is preferable that the material is metallic because scratches are likely to occur at the time of lamination, transportation, and the like and cause a foreign matter problem. In particular, it is preferable to use an aluminum alloy such as duralumin having both strength and lightness in order to reduce the weight at the time of multilayer lamination. Further, the substrate support portion 13 supported by the frame portion 12 may be joined to the frame portion 12 by welding or the like. However, in view of strength, ease of manufacture, etc., the frame portion is formed by extrusion molding or the like. It is preferable to make it simultaneously with Twelve.

  3 and 4 are schematic views of the A-A ′ cross section and the D-D ′ cross section of FIG. 1. In addition, the B-B 'cross section and C-C' cross section of FIG. 1 are the same as A-A '. As shown in FIGS. 3 and 4, the substrate holding member 14 of the present invention is fixed to protrude upward from the upper surface of the substrate support portion 13 and supports the substrate 111 upward, and the substrate A surface that protrudes downward from the lower surface of the support portion 13 and comes into contact with the substrate 111 only when a substrate vibration in the vertical direction occurs on the substrate 111 supported one step below with a plurality of the substrate trays 12 stacked. And a protrusion 15 that restricts the movement of the substrate 111 in the horizontal direction.

Further, as shown in FIGS. 3 and 4, the substrate holding portion 14 b and the vibration control portion 14 a of the substrate holding member 14 hold the substrate, so that the contact surface with the substrate is smooth. The vibration control unit 14a includes a thick portion 21, a thickness changing portion 22, and a thin portion from the side of the frame portion 12 to which the vibration control portion 14a is fixed toward the inside of the substrate tray 11. 23. The protrusion 15 is formed at the end of the vibration control unit 14a on the frame 12 side as shown in FIG. 3, and may protrude downward, or as shown in FIG. 4, the substrate holding part 14b. It may be formed at the end of the frame portion 12 and protrude upward.
Further, as shown in FIG. 1, a plurality of the substrate holding members 14 may be provided for each side of the frame portion 12 of the substrate tray 11.

  8 and 9 are schematic views showing a state in which a plurality of substrates 111 are stacked on the substrate tray 11 and stacked. The thick portion 21 comes into contact with the end portion of the substrate 111 or the surface in the vicinity of the end portion only when a substrate vibration in the vertical direction occurs on the substrate 111 supported one step below in a state where a plurality of substrate trays 11 are stacked. , Suppress the generated vibration. In general, the substrate 111 has a non-effective area in the vicinity of the end, the width of the non-effective area is about 10 mm, and the vicinity of the end is in contact with the vibration control unit 14a. However, no problem occurs. The thin portion 23 is formed thinner than the thick portion 21 and does not come into contact with the substrate 111. When sudden and vigorous vibration is generated, the substrate comes into contact with the metal substrate support portion 13 to prevent the substrate 111 from being damaged. The thickness changing portion 22 has a function as a connecting portion for connecting the thick portion 21 and the thin portion 23 without forming a corner portion having a convex shape on the outside. Further, it is formed at the end of the vibration control unit 14a on the frame 12 side, and is formed at the projecting portion 15 protruding downward, or at the end of the side of the frame 12 of the substrate holding unit 14b. The protrusions 15 protruding upward are designed so that the gap between the upper and lower substrate support portions 13 is less than or equal to the thickness of the substrate when the plurality of substrate trays 11 are stacked. When the substrate vibration is generated on the substrate held between the support portions 13, particularly when the horizontal substrate vibration is generated, the movement of the substrate in the horizontal direction (the surface direction of the substrate 111) is limited. .

  FIG. 7 is a schematic view showing a state in which the substrate holding member 14 is fixed to the substrate support portion 13. A substrate holding member is fixed along the substrate support portion 13 to the planar substrate support portion 13 (FIG. 7A) and the curved substrate support portion 13 (FIG. 7B).

  Further, the substrate support portion 13 is provided with holes 61 or notches 62 and 63 for fixing the substrate holding member 14. FIG. 6 illustrates an example of the hole or notch. FIG. 6A is a schematic view in which a hole 61 for fixing the substrate holding member 14 is provided in the substrate support portion 13. The shape of the hole 61 is not limited to the illustrated shape as long as the substrate holding member 14 can be stably fixed. FIG. 6B is a schematic view in which a notch 62 for fixing the substrate holding member 14 is provided. A substrate holding member fixing protrusion 64 is provided at an end of the notch 62. The shape of the notch 62 is not limited to the illustrated shape as long as the substrate holding member 14 can be stably fixed. Further, the shape and position of the substrate holding member fixing protrusion 64 are not limited to the shape and position shown in the figure, but are similar to the substrate holding member fixing protrusion 65 shown by a broken line in FIG. Further, it may be a protrusion having no corner portion, and may be formed other than the end portion of the notch portion 62. FIG. 6C is a schematic view in which a notch 63 for fixing the substrate holding member 14 is provided, in which the substrate holding member fixing protrusion 64 is not formed. In addition to the notch, a substrate holding member fixing hole 66 is provided. The shape of the notch 63 and the shape of the substrate holding member fixing hole 66 are not limited to the illustrated shapes as long as the substrate holding member 14 can be stably fixed.

  In FIG. 1, the substrate holding members 14 are described as one example of the substrate trays 11 fixed to each side of the frame portion 12 of the substrate tray 11, but the number of substrate holding members 14 is one. However, a large number may be fixed. In accordance with the size of the substrate 111 supported by the substrate tray 11 having the substrate holding member of the present invention, the substrate holding member 14 is designed in consideration of the size, ease of manufacture, ease of replacement, and the like. The length of the substrate holding member in the AA ′ direction in FIG. 2A is preferably about 3 cm to 10 cm in consideration of the ease of manufacture, the ease of replacement, and the like, and FIG. 2A of the substrate holding member. The length in the plane direction perpendicular to the AA ′ direction is preferably about 15 cm to 30 cm in view of ease of production, ease of replacement, and the like. Further, when a plurality of the substrate holding members 14 are fixed, the generation of foreign matter due to rubbing between the substrate holding members is prevented, the base material does not contact the metal substrate support portion during vibration between the substrate holding members, etc. In consideration of this, the distance between adjacent substrate holding members is preferably about 0.2 cm-10 cm. For example, in the case of a substrate tray for a G6 size substrate (1,500 mm × 1,800 mm) for liquid crystal, it is preferable to design with about 8 on the long side and about 7 on the short side. Further, in FIG. 1, the substrate holding member 14 is fixed to the substrate support portion 13 supported on each side of the frame portion 12 of the substrate tray 11, but at least a pair of opposing two sides of the frame portion 12. It only has to be fixed to. Further, the substrate holding member 14 is fixed to the substrate support portion 13 of the substrate tray 11, and as shown schematically in FIG. 7, both the straight portion and the curved portion follow the shape of the substrate support portion 13. Fixed.

  FIG. 5A is a schematic view of the substrate holding member 14 according to the first aspect of the present invention. The substrate holding part 14b and the vibration control part 14a of the substrate holding member 14 are separately formed. The vibration control unit 14 a includes the thick part 21, the thickness changing part 22, the thin part 23, and the protruding part 15. Further, the substrate holding portion 14b and the vibration control portion 14a are formed with fitting portions 161a and 161b, respectively, as shown in FIG. 5, in order to fit the substrate holding portion 14b and the vibration control portion 14a. Has been. The shapes of the fitting portions 161a and 161b shown in FIG. 5 are only examples, and the substrate holding portion 14b and the vibration control portion 14a can be stably fixed to the substrate support portion 13. What is necessary is just to design the shape of the said fitting parts 161a and 161b suitably. Further, as illustrated in FIG. 5A, the substrate holding member 14 including the vibration holding portion 14 a and the substrate holding portion 14 b may have a positioning portion 162. The positioning portion 162 has a hole 61 or a notch for fixing the substrate holding member 14 in order to prevent movement of the substrate holding member 14 fixed to the substrate support portion 13 by the fitting portions 161a and 161b. For example, when formed in a rectangular shape at the ends of 62 and 63, it is formed so as to contact four sides or four corners. When it is formed in a rectangular shape, it is formed so as to partially contact four sides or four corners. If the movement of the substrate holding member 14 can be suppressed by the positioning unit 162, the position and shape are not limited. In the positioning part 162, the fitting parts 161a and 161b may also function.

An outline of fixing the substrate holding member 14 to the substrate support portion 13 is shown in FIGS. In FIG. 10, the fitting parts 161 a and 161 b schematically show that the substrate holding member 14 formed with the fitting part and positioning part 151 that also serves as the positioning part 162 is fixed to the substrate support part 13. As shown in the drawing, the substrate holding member 14 can be easily and stably fixed to the substrate support portion 13 without using a fixing component.

  11, 12, 14, 15, and 16 are schematic views of the substrate holding member 14 according to the second aspect of the present invention. The substrate holding portion 14b and the vibration control portion 14a of the substrate holding member 14 are integrally formed. The vibration control unit 14 a includes the thick part 21, the thickness changing part 22, the thin part 23, and the protruding part 15.

  11, 14, and 15 are schematic views of the substrate holding member 14 that fits and fixes the integrally formed substrate holding member 14 to the substrate supporting portion 13 from above the substrate supporting portion 13. is there. The substrate holding member 14 of FIGS. 11 and 14 has a fitting portion 141 between the substrate holding portion 14b and the vibration control portion 14a. The outer shape of the fitting portion 141 is the substrate holding member 14. A shape similar to the hole 61 or the notches 62 and 63 for fixing the substrate, or a shape having the positioning portion 162 along the hole 61 or the notches 62 and 63 for fixing the substrate holding member 14. doing. The substrate holding part 14b is formed in a shape that is larger than the hole 61 or the notch parts 62, 63 for fixing the substrate holding member 14, and does not drop downward from the hole 61 or the notch parts 62, 63. . The vibration control unit 14a can be fitted into the hole 61 or the notches 62 and 63 for fixing the substrate holding member 14, and has a shape that does not come off from the hole 61 or the notches 62 and 63 after the fitting. Created with. The vibration control unit 14a may be formed smaller than the hole 61 or the notches 62 and 63 for fixing the substrate holding member 14, and may form a fixing claw 142 (FIG. 15). FIG. 11 schematically shows that the integrally formed substrate holding member 14 is fitted and fixed to the substrate support portion 13 from above the substrate support portion 13. As shown in the drawing, by fitting the substrate holding member 14 into the substrate support portion 13, it is possible to fix the substrate easily and stably without using a fixing component.

  12 and 16 show that the substrate holding member 14 integrally molded is fixed to the substrate support portion 13 by being fitted into the notches 62 and 63 of the substrate support portion 13 from the side. 6 is a schematic of the holding member 14. As shown in FIGS. 6B and 12A, the substrate holding member 14 is fixed by being fitted into the substrate support portion 13 from the side of the notch 62 of the substrate support portion 13. In this case, a substrate holding member fixing protrusion 64 for fixing the substrate holding member 14 is provided at an end of the notch 62. The shape and position of the substrate holding member fixing protrusion 64 are not limited to the shape and position shown in the drawing, but like the substrate holding member fixing protrusion 65 shown by a broken line in FIG. The protrusion may not have a corner, and may be formed other than the end of the notch 62. The substrate holding member fixing protrusion 64 can prevent the substrate holding member 14 fitted from the side of the substrate support portion 13 from falling off.

  Further, as shown in FIGS. 6C and 12B, the substrate holding member 14 is moved to the substrate supporting portion 13 without forming the substrate holding member fixing protrusion 64, and the substrate. When fitting and fixing to the notch 63 of the support 13 from the side, as shown in FIG. 6C, in order to fix the substrate holding member 14, in addition to the notch 63, A substrate holding member fixing hole 66 is provided. In this case, since the substrate holding member 14 is fitted and fixed to the substrate support portion 13 and the notch portion 63 of the substrate support portion 13 from the lateral side, it is adjusted according to the position of the substrate holding member fixing hole 66. A protrusion is formed on both or one of the substrate holding part 14b and the vibration control part 14a. The substrate holding member fixing hole 66 and the protrusion can prevent the substrate holding member 14 fitted from the side of the substrate support portion 13 from falling off.

  The shapes of the notches 62 and 63 and the substrate holding member fixing hole 66 are not limited to the illustrated shapes as long as the substrate holding member 14 can be stably fixed.

  As described above, the substrate holding member 14 can be easily and stably installed without using a fixing part as shown in FIG. 12 by being fitted and fixed to the substrate support portion 13. Is possible.

  FIGS. 5B, 13 and 17 are schematic views of the substrate holding member 14 according to the third aspect of the present invention. The substrate holding portion 14b and the vibration control portion 14a of the substrate holding member 14 are integrally formed through a hinge portion 171 having flexibility. The vibration control unit 14 a includes the thick part 21, the thickness changing part 22, the thin part 23, and the protruding part 15. Further, the substrate holding portion 14b and the vibration control portion 14a are formed with fitting portions 161a and 161b, respectively, as shown in FIG. 5, in order to fit the substrate holding portion 14b and the vibration control portion 14a. Has been. The shapes of the fitting portions 161a and 161b shown in FIG. 5 are only examples, and the substrate holding portion 14b and the vibration control portion 14a can be stably fixed to the substrate support portion 13. What is necessary is just to design the shape of the said fitting parts 161a and 161b suitably. Further, as illustrated in FIG. 5B, the substrate holding member 14 including the vibration holding portion 14 a and the substrate holding portion 14 b may have a positioning portion 162. The positioning portion 162 has a hole 61 or a notch for fixing the substrate holding member 14 in order to prevent movement of the substrate holding member 14 fixed to the substrate support portion 13 by the fitting portions 161a and 161b. For example, when formed in a rectangular shape at the ends of 62 and 63, it is formed so as to contact four sides or four corners. When it is formed in a rectangular shape, it is formed so as to partially contact four sides or four corners. If the movement of the substrate holding member 14 can be suppressed by the positioning unit 162, the position and shape are not limited. In the positioning part 162, the fitting parts 161a and 161b may also function.

An outline of fixing the substrate holding member 14 to the substrate support portion 13 is shown in FIGS. In FIG. 13, the fitting parts 161a and 161b schematically show that the substrate holding member 14 on which the fitting part / positioning part 151 serving also as the positioning part 162 is formed is fixed to the substrate support part 13. As shown in the figure, the substrate holding member 14 is fixed to the substrate support portion 13 by bending the hinge portion 171 and fitting the fitting portions 161a and 161b, without using a fixing component. The substrate holding member 14 can be easily and stably fixed to the substrate support portion 13.

The substrate holding member 14 is made of a thermoplastic resin in consideration of ease of molding, a function as a vibration buffering material, a small amount of foreign matter, contamination of the substrate 111, and the like. Furthermore, among the thermoplastic resins, polyamide resins such as polyethylene (PE), polypropylene (PP), nylon 66 and nylon 610, polyether ether ketone (PEEK) and polyimide are particularly desirable. In addition, as long as it has the same function, the material of the board | substrate holding member 14 is not limited to these.

The present invention is a substrate holding member that is used in a tray that horizontally supports a surface of a substrate made of a rectangular and rigid plate, with the surface direction of the substrate being placed on the upper side thereof, and is a flat display Transport of various plate-shaped materials (for example, glass and plastic) or members for panels, or substrates made of plates such as metals, rare metals, and silicon, and plate-shaped processing members that have been processed Available for storage.

DESCRIPTION OF SYMBOLS 11 Board | substrate tray 12 Frame part 13 Board | substrate support part 14 Substrate holding member 14a Vibration control part 14b Substrate holding part 15 Protrusion part 21 Thick part 22 Thickness change part 23 Thin part 61 Hole part 62 Notch part 63 Notch part 64 Substrate holding member fixing projection 65 Substrate holding member fixing projection 66 Substrate holding member fixing hole 103 Transport platform 111 Substrate 141 Fitting portion 142 Fixing claw 161a Fitting portion 161b Fitting portion 162 Positioning portion 171 Hinge portion

Claims (5)

In the tray for a substrate that holds the substrate from the lower side in the frame inner region of the tray frame portion with the plane direction of the substrate made of a rectangular and rigid plate as a horizontal direction, for the substrate The tray includes a substrate support portion supported by the frame portion, and is a substrate holding member that is fixed to the substrate support portion and holds the substrate,
The substrate holding member is
A substrate holding portion that protrudes and is fixed above the upper surface of the substrate support portion and supports the substrate;
The substrate is supported by protruding downward from the lower surface of the substrate support portion, and is in contact with the substrate only when vertical substrate vibration is generated on the substrate mounted on the substrate and supported one step below with a plurality of trays stacked. And a vibration control unit having a surface to be
Further, the substrate holding member having a protrusion that restricts the horizontal movement of the substrate,
The substrate holding part and the vibration control part are separately molded,
A fitting part is formed in each of the substrate holding part and the vibration control part,
The substrate holding portion is fixed from above the substrate support portion, and the vibration control portion from below is fixed by fitting the fitting portion into a hole or notch provided in the substrate support portion. A substrate holding member. In the tray for a substrate that holds the substrate from the lower side in the frame inner region of the tray frame portion with the plane direction of the substrate made of a rectangular and rigid plate as a horizontal direction, for the substrate The tray includes a substrate support portion supported by the frame portion, and is a substrate holding member that is fixed to the substrate support portion and holds the substrate,
The substrate holding member is
A substrate holding portion that protrudes and is fixed above the upper surface of the substrate support portion and supports the substrate;
The substrate is supported by protruding downward from the lower surface of the substrate support portion, and is in contact with the substrate only when vertical substrate vibration is generated on the substrate mounted on the substrate and supported one step below with a plurality of trays stacked. And a vibration control unit having a surface to be
Further, the substrate holding member having a protrusion that restricts the horizontal movement of the substrate,
A substrate holding member in which the substrate holding portion and the vibration control portion are integrally formed,
A substrate holding member, wherein the substrate holding member is fixed by being fitted into a hole or a notch provided in the substrate support portion. In the tray for a substrate that holds the substrate from the lower side in the frame inner region of the tray frame portion with the plane direction of the substrate made of a rectangular and rigid plate as a horizontal direction, for the substrate The tray includes a substrate support portion supported by the frame portion, and is a substrate holding member that is fixed to the substrate support portion and holds the substrate,
The substrate holding member is
A substrate holding portion that protrudes and is fixed above the upper surface of the substrate support portion and supports the substrate;
The substrate is supported by protruding downward from the lower surface of the substrate support portion, and is in contact with the substrate only when vertical substrate vibration is generated on the substrate mounted on the substrate and supported one step below with a plurality of trays stacked. And a vibration control unit having a surface to be
Further, the substrate holding member having a protrusion that restricts the horizontal movement of the substrate,
A substrate holding member in which the substrate holding portion and the vibration control portion are integrally formed,
The substrate holding part and the vibration control part are integrally formed through a flexible hinge part,
Each of the substrate holding part and the vibration control part has a fitting part,
To the hole or notch provided in the substrate support part,
The substrate holding member, wherein the substrate holding portion and the vibration control portion are fixed by bending a hinge portion and fitting the fitting portion. A substrate holding member according to any one of claims 1 and 3,
While the substrate holding part and the vibration control part have a fitting part,
A substrate holding member having a position fixing portion. The substrate holding member according to any one of claims 1 to 4,
The substrate holding member is made of a thermoplastic resin.

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