JP2013076122A - Sn-plated material and method for manufacturing the same - Google Patents
Sn-plated material and method for manufacturing the same Download PDFInfo
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Abstract
【課題】摩擦係数が低く、はんだ濡れ性および接触信頼性に優れたSnめっき材およびそのSnめっき材の低コストで製造する方法を提供する。
【解決手段】銅または銅合金からなる基材上にCu−Sn化合物層が形成され、このCu−Sn化合物層上に純Sn層が形成されたSnめっき材において、純Sn層の厚さが0.3〜1.5μmであり、Snめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径が1.3μm以上であり且つSnめっき材の表面の算術平均粗さRaが0.15μm以上である。
【選択図】なしAn object of the present invention is to provide a Sn plated material having a low coefficient of friction and excellent solder wettability and contact reliability, and a method for producing the Sn plated material at a low cost.
In a Sn plating material in which a Cu-Sn compound layer is formed on a substrate made of copper or a copper alloy, and a pure Sn layer is formed on the Cu-Sn compound layer, the thickness of the pure Sn layer is 0.3 to 1.5 μm, the average crystal grain size of the Cu—Sn compound in a plane substantially parallel to the interface between the layers of the Sn plating material is 1.3 μm or more, and the arithmetic average roughness of the surface of the Sn plating material Ra is 0.15 μm or more.
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Description
本発明は、Snめっき材およびその製造方法に関し、特に、挿抜可能な接続端子などの材料として使用されるSnめっき材およびその製造方法に関する。 The present invention relates to an Sn plating material and a method for manufacturing the same, and more particularly, to an Sn plating material used as a material for a connection terminal that can be inserted and removed and a method for manufacturing the same.
従来、挿抜可能な接続端子の材料として、銅や銅合金などの導体素材の最外層にSnめっきを施したSnめっき材が使用されている。特に、Snめっき材は、接触抵抗が小さく、接触信頼性、耐食性、はんだ付け性、経済性などの観点から、自動車、携帯電話、パソコンなどの情報通信機器、ロボットなどの産業機器の制御基板、コネクタ、リードフレーム、リレー、スイッチなどの端子やバスバーの材料として使用されている。 Conventionally, an Sn plated material obtained by applying Sn plating to the outermost layer of a conductor material such as copper or copper alloy has been used as a material for a connection terminal that can be inserted and removed. In particular, Sn plating materials have low contact resistance, and from the viewpoints of contact reliability, corrosion resistance, solderability, economy, etc., control boards for industrial equipment such as automobiles, mobile phones, personal computers and other industrial equipment such as robots, Used as a material for terminals and bus bars of connectors, lead frames, relays, switches, etc.
一般に、このようなSnめっきは、電気めっきによって行われており、Snめっき材の内部応力を除去してウイスカの発生を抑制するために、電気めっきの直後にリフロー処理(Sn溶融処理)が行われている。このようにSnめっき後にリフロー処理を行うと、Snの一部が素材や下地成分に拡散して化合物層を形成し、この化合物層の上に柔らかい溶融凝固組織になったSn層(以下「純Sn層」という)が形成される。この純Sn層は、優れた接触信頼性、耐食性およびはんだ付け性を得るために極めて重要な役割を果たす。 In general, such Sn plating is performed by electroplating, and a reflow process (Sn melting process) is performed immediately after electroplating in order to remove internal stress of the Sn plating material and suppress the generation of whiskers. It has been broken. When the reflow treatment is performed after Sn plating in this way, a part of Sn diffuses into the material and the base component to form a compound layer, and a Sn layer (hereinafter referred to as “pure”) having a soft molten and solidified structure on this compound layer. Sn layer ") is formed. This pure Sn layer plays an extremely important role in order to obtain excellent contact reliability, corrosion resistance and solderability.
しかし、純Sn層は軟質で変形し易いため、リフロー処理を施したSnめっき材を挿抜可能な接続端子などの材料として使用すると、接続端子の挿入時に表面が削れて摩擦係数が高くなって挿入力が高くなるという問題がある。また、自動車などの接続端子では、端子の多極化が進んでおり、端子の数に比例して組立て時の挿入力が上昇し、作業負荷が問題になっている。 However, since the pure Sn layer is soft and easily deformed, if the Sn-plated material subjected to reflow processing is used as a material such as a connection terminal that can be inserted and removed, the surface is scraped when the connection terminal is inserted and the friction coefficient is increased. There is a problem that power becomes high. In connection terminals of automobiles and the like, the number of terminals is increasing, and the insertion force at the time of assembly increases in proportion to the number of terminals, and the work load becomes a problem.
このような問題を解消するため、リフロー処理を施したSnめっき材では、軟質層である純Sn層の膜厚を薄くして、リフロー処理により硬質なCu−Sn化合物層などの化合物層を下地に形成することによって、摩擦係数の低減を図っている。しかし、純Sn層を薄くすると、素材や下地の成分が経時変化により最表面に速く拡散して耐熱性や接触信頼性が低下する。そのため、Cu−Sn化合物層の下層に拡散抑制層としてNi層を挿入する方法が提案されている(例えば、特許文献1参照)。 In order to solve such problems, in the Sn plating material subjected to reflow treatment, the film thickness of the pure Sn layer, which is a soft layer, is reduced, and a compound layer such as a hard Cu—Sn compound layer is ground by reflow treatment. Thus, the friction coefficient is reduced. However, when the pure Sn layer is thinned, the material and the base component diffuse quickly to the outermost surface due to changes over time, and heat resistance and contact reliability are lowered. Therefore, a method of inserting a Ni layer as a diffusion suppressing layer under the Cu—Sn compound layer has been proposed (see, for example, Patent Document 1).
また、銅または銅合金の表面に、NiまたはNi合金からなる下地めっき層と、Cu−Sn合金からなる中間めっき層と、SnまたはSn合金からなる表面めっき層とをこの順で形成し、中間めっき層を形成するCu−Sn合金の平均結晶粒径を、このめっき層の断面を観察したときに、0.05μm以上で0.5μm未満とし、中間めっき層の表面の平均粗さRaを0.1〜0.5μmとすることにより、Snめっき材の耐熱性を向上させるとともに挿入力を低くする方法が提案されている(例えば、特許文献2参照)。 Further, a base plating layer made of Ni or Ni alloy, an intermediate plating layer made of Cu-Sn alloy, and a surface plating layer made of Sn or Sn alloy are formed in this order on the surface of copper or copper alloy, The average crystal grain size of the Cu—Sn alloy forming the plating layer is 0.05 μm or more and less than 0.5 μm when the cross section of this plating layer is observed, and the average roughness Ra of the surface of the intermediate plating layer is 0 A method of improving the heat resistance of the Sn plating material and reducing the insertion force by setting the thickness to 0.1 to 0.5 μm has been proposed (for example, see Patent Document 2).
さらに、0.3〜15質量%のNiを含有する銅合金からなる母材の表面に、リフローまたは溶融Snめっきにより、表層側の厚さ0.5μm以下のSn層と、その下層の平均断面径0.05〜1.0μmで平均縦横比1以上の柱状結晶のCu−Sn合金層とからなる、厚さ0.2〜2.0μmのSnめっき層を形成することにより、Snめっき銅合金材料の接触信頼性を維持しながら挿入力を低くする方法が提案されている(例えば、特許文献3参照)。 Furthermore, on the surface of the base material made of a copper alloy containing 0.3 to 15% by mass of Ni, the surface layer side Sn layer having a thickness of 0.5 μm or less and the average cross section of the lower layer by reflow or hot Sn plating By forming a Sn plating layer having a diameter of 0.05 to 1.0 μm and a columnar crystal Cu—Sn alloy layer having an average aspect ratio of 1 or more and having a thickness of 0.2 to 2.0 μm, an Sn plating copper alloy A method of reducing the insertion force while maintaining the contact reliability of the material has been proposed (see, for example, Patent Document 3).
しかし、特許文献1および2の方法では、Niめっきの工程の分だけ工程数が多くなり、めっきラインの管理コストやイニシャルコストが増大する。また、純Sn層を0.2μm以下の薄い層にすると、挿入力を低くすることができるものの、Cu−Sn化合物層が露出する部分が生じて、はんだ付け性や耐食性が劣化する。 However, in the methods of Patent Documents 1 and 2, the number of processes is increased by the Ni plating process, and the management cost and initial cost of the plating line are increased. Further, when the pure Sn layer is a thin layer having a thickness of 0.2 μm or less, the insertion force can be lowered, but a portion where the Cu—Sn compound layer is exposed is generated, and solderability and corrosion resistance are deteriorated.
また、特許文献3の方法では、基材の種類がNiを含有する銅合金に限定され、製造コストが高くなる。 Moreover, in the method of patent document 3, the kind of base material is limited to the copper alloy containing Ni, and manufacturing cost becomes high.
したがって、本発明は、このような従来の問題点に鑑み、摩擦係数が低く、はんだ濡れ性および接触信頼性に優れたSnめっき材およびそのSnめっき材の低コストで製造する方法を提供することを目的とする。 Therefore, in view of such conventional problems, the present invention provides a Sn plating material having a low coefficient of friction and excellent solder wettability and contact reliability, and a method for producing the Sn plating material at a low cost. With the goal.
本発明者らは、上記課題を解決するために鋭意研究した結果、銅または銅合金からなる基材上にCu−Sn化合物層(拡散層)が形成され、このCu−Sn化合物層上に純Sn層が形成されたSnめっき材において、純Sn層の厚さを0.3〜1.5μm、Snめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径を1.3μm以上、Snめっき材の表面の算術平均粗さRaを0.15μm以上にすることにより、摩擦係数が低く、はんだ濡れ性および接触信頼性に優れたSnめっき材を低コストで製造することができることを見出し、本発明を完成するに至った。 As a result of intensive studies to solve the above problems, the present inventors have formed a Cu—Sn compound layer (diffusion layer) on a substrate made of copper or a copper alloy, and pure Cu is formed on this Cu—Sn compound layer. In the Sn plating material on which the Sn layer is formed, the thickness of the pure Sn layer is 0.3 to 1.5 μm, and the average crystal grain size of the Cu—Sn compound in the plane substantially parallel to the interface between the layers of the Sn plating material is By making the arithmetic average roughness Ra of the surface of the Sn plating material 1.3 μm or more and 0.15 μm or more, a Sn plating material having a low friction coefficient and excellent solder wettability and contact reliability can be manufactured at a low cost. As a result, the present invention has been completed.
すなわち、本発明によるSnめっき材は、銅または銅合金からなる基材上にCu−Sn化合物層が形成され、このCu−Sn化合物層上に純Sn層が形成されたSnめっき材において、純Sn層の厚さが0.3〜1.5μmであり、Snめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径が1.3μm以上であり且つSnめっき材の表面の算術平均粗さRaが0.15μm以上であることを特徴とする。 In other words, the Sn plating material according to the present invention is a Sn plating material in which a Cu—Sn compound layer is formed on a base material made of copper or a copper alloy, and a pure Sn layer is formed on the Cu—Sn compound layer. The Sn layer has a thickness of 0.3 to 1.5 μm, the average crystal grain size of the Cu—Sn compound in a plane substantially parallel to the interface between the layers of the Sn plating material is 1.3 μm or more, and the Sn plating material The arithmetic average roughness Ra of the surface is 0.15 μm or more.
このSnめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径(Cu−Sn化合物の結晶粒の横の長さ)に対する、Snめっき材の各層間の界面と略垂直な断面におけるCu−Sn化合物の各々の結晶粒の最大の高さの平均値(Cu−Sn化合物の結晶粒の縦の長さ)の比率(縦の長さ/横の長さ)が0.5以下であるのが好ましい。 The interface between the layers of the Sn plating material and the average crystal grain size of the Cu—Sn compound (the lateral length of the crystal grains of the Cu—Sn compound) in a plane substantially parallel to the interface between the layers of the Sn plating material. The ratio (vertical length / horizontal length) of the average value (vertical length of the crystal grains of the Cu-Sn compound) of the maximum height of each crystal grain of the Cu-Sn compound in the vertical cross section is 0. .5 or less is preferable.
また、このSnめっき材の各層間の界面と略垂直な断面上の所定の領域において、Cu−Sn化合物の各々の結晶粒の幅(各層間の界面と略平行な方向の長さ)が0.7μm以下の微細結晶粒の個数をΣRx、1.3μm以上の粗大結晶粒の個数をΣRyとして、微細結晶粒と粗大結晶粒の和に対して粗大結晶粒が存在する割合ΣRy×100/(ΣRx+ΣRy)が25〜60%であるのが好ましい。 In addition, in a predetermined region on a cross section substantially perpendicular to the interface between the layers of the Sn plating material, the width of each crystal grain of the Cu—Sn compound (the length in a direction substantially parallel to the interface between the layers) is 0. The ratio of coarse crystal grains to the sum of fine crystal grains and coarse crystal grains is ΣRy × 100 / (, where ΣRx is the number of fine crystal grains of 0.7 μm or less and ΣRy is the number of coarse crystal grains of 1.3 μm or greater. (ΣRx + ΣRy) is preferably 25 to 60%.
さらに、このSnめっき材の純Sn層の表面に潤滑油が塗布されているのが好ましく、この潤滑油の塗布量が0.2mg/dm2以上であるのが好ましい。 Furthermore, it is preferable that lubricating oil is applied to the surface of the pure Sn layer of the Sn plating material, and the amount of the lubricating oil applied is preferably 0.2 mg / dm 2 or more.
また、本発明によるSnめっき材の製造方法は、電気めっきにより銅または銅合金からなる基材上にSn層を形成し、Sn層の表面を乾燥させた後、Sn層の表面を加熱してSnを溶融させた後に冷却することにより、基材上にCu−Sn化合物層を形成し、その上に純Sn層を形成する、Snめっき材の製造方法において、電気めっきを0.1g/L以上のSn酸化物を含むSnめっき浴を使用して行い、Snを溶融させた後の冷却を空冷保持した後に水冷することによって行い、基材と純Sn層との間に形成されるCu−Sn化合物層のSnめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径が1.3μm以上になり且つSnめっき材の表面の算術平均粗さRaが0.15μm以上になるように、電気めっきの電流密度と空冷保持時間を設定し、電気めっきにより基材上に形成されるSn層の厚さが0.8〜1.8μmになるように電気めっきの通電時間を設定することを特徴とする。 Moreover, the manufacturing method of the Sn plating material by this invention forms an Sn layer on the base material which consists of copper or a copper alloy by electroplating, and after drying the surface of Sn layer, the surface of Sn layer is heated. In the method for producing a Sn plating material, in which a Cu—Sn compound layer is formed on a base material by cooling after melting Sn, and a pure Sn layer is formed thereon, electroplating is performed at 0.1 g / L. Cu-- formed between the base material and the pure Sn layer is performed by using the Sn plating bath containing the above Sn oxide, performing cooling by cooling the air after it is melted and holding it by air cooling. The average crystal grain size of the Cu—Sn compound on the surface substantially parallel to the interface between the layers of the Sn plating layer of the Sn compound layer is 1.3 μm or more, and the arithmetic average roughness Ra of the surface of the Sn plating material is 0.15 μm. So that the electroplating The current density and the air cooling holding time are set, and the energization time of electroplating is set so that the thickness of the Sn layer formed on the substrate by electroplating is 0.8 to 1.8 μm. .
また、本発明によるSnめっき材の製造方法は、電気めっきにより銅または銅合金からなる基材上にSn層を形成し、Sn層の表面を乾燥させた後、Sn層の表面を加熱してSnを溶融させた後に冷却することにより、基材上にCu−Sn化合物層を形成し、その上に純Sn層を形成する、Snめっき材の製造方法において、電気めっきを0.1g/L以上のSn酸化物を含むSnめっき浴を使用して行い、Snを溶融させた後の冷却を空冷保持した後に水冷することによって行い、電気めっきの電流密度をa(A/dm2)、空冷保持時間b(秒)とすると、1≦a≦5、1≦b≦5、b≧a−1.5を満たすように電流密度および空冷保持時間を設定し、電気めっきにより基材上に形成されるSn層の厚さが0.8〜1.8μmになるように電気めっきの通電時間を設定することを特徴とする。 Moreover, the manufacturing method of the Sn plating material by this invention forms an Sn layer on the base material which consists of copper or a copper alloy by electroplating, and after drying the surface of Sn layer, the surface of Sn layer is heated. In the method for producing a Sn plating material, in which a Cu—Sn compound layer is formed on a base material by cooling after melting Sn, and a pure Sn layer is formed thereon, electroplating is performed at 0.1 g / L. The Sn plating bath containing the above Sn oxide is used, and the cooling after melting Sn is carried out by cooling with air and then water cooling, and the current density of electroplating is a (A / dm 2 ), air cooling. When holding time b (seconds), current density and air cooling holding time are set so as to satisfy 1 ≦ a ≦ 5, 1 ≦ b ≦ 5, and b ≧ a−1.5, and formed on the substrate by electroplating. The thickness of the Sn layer will be 0.8-1.8 μm Thus, the energization time of electroplating is set.
上記のSnめっき材の製造方法において、電気めっきにより基材上に形成されるSn層の厚さが0.9〜1.6μmになるように電気めっきの通電時間を設定するのが好ましい。また、Snを溶融させた後に冷却した後、表面に潤滑油を塗布するのが好ましく、その潤滑油の塗布量が0.2mg/dm2以上であるのが好ましい。 In the method for producing the Sn plating material, it is preferable to set the energization time for electroplating so that the thickness of the Sn layer formed on the substrate by electroplating is 0.9 to 1.6 μm. Moreover, it is preferable to apply a lubricating oil to the surface after cooling after melting Sn, and the application amount of the lubricating oil is preferably 0.2 mg / dm 2 or more.
本発明によれば、摩擦係数が低く、はんだ濡れ性および接触信頼性に優れたSnめっき材を低コストで製造することができる。 According to the present invention, an Sn plating material having a low friction coefficient and excellent solder wettability and contact reliability can be manufactured at low cost.
本発明によるSnめっき材の実施の形態では、銅または銅合金からなる基材上にCu−Sn化合物層(拡散層)が形成され、このCu−Sn化合物層上に純Sn層が形成されたSnめっき材において、純Sn層の厚さが0.3〜1.5μmであり、Snめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径が1.3μm以上であり且つSnめっき材の表面の算術平均粗さRaが0.15μm以上である。 In the embodiment of the Sn plating material according to the present invention, a Cu—Sn compound layer (diffusion layer) is formed on a base material made of copper or a copper alloy, and a pure Sn layer is formed on this Cu—Sn compound layer. In the Sn plating material, the thickness of the pure Sn layer is 0.3 to 1.5 μm, and the average crystal grain size of the Cu—Sn compound in a plane substantially parallel to the interface between the layers of the Sn plating material is 1.3 μm or more. And the arithmetic average roughness Ra of the surface of the Sn plating material is 0.15 μm or more.
このように、Cu−Sn化合物の平均結晶粒径を粗大に成長させると、摩擦係数を低減させる効果があり、Snめっき材を挿抜可能な接続端子の材料として使用した場合に、挿入時に純Sn層の表面が削られるのを抑制して、挿入力を低減させる効果が得られる。また、純Sn層を薄くする必要がないため、Snめっき材の耐熱性や接触信頼性も維持することができる。 Thus, when the average crystal grain size of the Cu—Sn compound is grown coarsely, there is an effect of reducing the friction coefficient. When the Sn plating material is used as a material for a connection terminal that can be inserted and removed, pure Sn at the time of insertion is used. The effect of reducing the insertion force by suppressing the surface of the layer from being cut can be obtained. Further, since it is not necessary to make the pure Sn layer thin, the heat resistance and contact reliability of the Sn plating material can be maintained.
Cu−Sn化合物の平均結晶粒径が1.3μm未満では、摩擦係数を低減させる効果が不十分になるため、Cu−Sn化合物の平均結晶粒径は1.3μm以上であり、1.3〜3μmであるのが好ましく、1.5〜2.0μmであるのがさらに好ましい。また、Snめっき材の表面の算術平均粗さRaが0.15μm未満では、表面の粗さが不十分で、摩擦係数を低減させる効果が不十分になるため、Snめっき材の表面の算術平均粗さRaは0.15μm以上であり、0.15〜0.3μmであるのが好ましい。 When the average crystal grain size of the Cu—Sn compound is less than 1.3 μm, the effect of reducing the friction coefficient becomes insufficient, so the average crystal grain size of the Cu—Sn compound is 1.3 μm or more, and 1.3 to It is preferably 3 μm, and more preferably 1.5 to 2.0 μm. Moreover, when the arithmetic average roughness Ra of the surface of the Sn plating material is less than 0.15 μm, the surface roughness is insufficient, and the effect of reducing the friction coefficient becomes insufficient. The roughness Ra is 0.15 μm or more, and preferably 0.15 to 0.3 μm.
また、Snめっき材の純Sn層の厚さが0.3μm未満であると、Snめっき材としての本来の特性を発揮できなくなり、1.5μmを超えると、Snめっき材の表面の算術平均粗さRaが0.15μm未満になって、表面の粗さが不十分で、摩擦係数を低減させる効果が不十分になるため、Snめっき材の純Sn層の厚さが0.3〜1.5μmであり、0.4〜1.2μmであるのが好ましい。 Moreover, when the thickness of the pure Sn layer of the Sn plating material is less than 0.3 μm, the original characteristics as the Sn plating material cannot be exhibited, and when it exceeds 1.5 μm, the arithmetic average roughness of the surface of the Sn plating material Since the surface roughness Ra is less than 0.15 μm, the surface roughness is insufficient, and the effect of reducing the friction coefficient is insufficient. Therefore, the thickness of the pure Sn layer of the Sn plating material is 0.3 to 1. 5 μm, preferably 0.4 to 1.2 μm.
このSnめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径(Cu−Sn化合物の結晶粒の横の長さ)に対する、Snめっき材の各層間の界面と略垂直な断面におけるCu−Sn化合物の各々の結晶粒の最大の高さの平均値(Cu−Sn化合物の結晶粒の縦の長さ)の比率(縦の長さ/横の長さ)が0.5以下であるのが好ましい。この比率が0.5を超えると、摩擦係数を低減させる効果が不十分になるため、0.5以下であるのが好ましい。 The interface between the layers of the Sn plating material and the average crystal grain size of the Cu—Sn compound (the lateral length of the crystal grains of the Cu—Sn compound) in a plane substantially parallel to the interface between the layers of the Sn plating material. The ratio (vertical length / horizontal length) of the average value (vertical length of the crystal grains of the Cu-Sn compound) of the maximum height of each crystal grain of the Cu-Sn compound in the vertical cross section is 0. .5 or less is preferable. If this ratio exceeds 0.5, the effect of reducing the friction coefficient becomes insufficient, and therefore it is preferably 0.5 or less.
また、このSnめっき材の各層間の界面と略垂直な断面上の所定の領域において、Cu−Sn化合物の各々の結晶粒の幅(各層間の界面と略平行な方向の長さ)が0.7μm以下の微細結晶粒の個数をΣRx、1.3μm以上の粗大結晶粒の個数をΣRyとして、微細結晶粒と粗大結晶粒の和に対して粗大結晶粒が存在する割合ΣRy×100/(ΣRx+ΣRy)が25〜60%であるのが好ましい。この粗大結晶粒の存在割合が25%未満の場合や60%を超える場合には、Cu−Sn化合物の結晶粒が略均一に配置されており、摩擦係数を低減させる効果が不十分であるため、粗大結晶粒の存在割合は25〜60%であるのが好ましく、30〜50%であるのがさらに好ましい。 In addition, in a predetermined region on a cross section substantially perpendicular to the interface between the layers of the Sn plating material, the width of each crystal grain of the Cu—Sn compound (the length in a direction substantially parallel to the interface between the layers) is 0. The ratio of coarse crystal grains to the sum of fine crystal grains and coarse crystal grains is ΣRy × 100 / (, where ΣRx is the number of fine crystal grains of 0.7 μm or less and ΣRy is the number of coarse crystal grains of 1.3 μm or greater. (ΣRx + ΣRy) is preferably 25 to 60%. When the presence ratio of the coarse crystal grains is less than 25% or exceeds 60%, the Cu—Sn compound crystal grains are arranged substantially uniformly, and the effect of reducing the friction coefficient is insufficient. The proportion of coarse crystal grains is preferably 25 to 60%, and more preferably 30 to 50%.
また、このSnめっき材の純Sn層の表面に潤滑油が塗布されているのが好ましく、この潤滑油の塗布量が0.2mg/dm2以上であるのが好ましい。このようにSnめっき材のSn層の表面に潤滑油が塗布すると、Snめっき材のCu−Sn化合物の結晶粒の粗大化により形成された純Sn層の表面の凹凸構造に潤滑油が保持されて、Snめっき材の摩擦係数をさらに低減する効果が得られるが、潤滑油の塗布量が0.2mg/dm2未満では、その効果を十分に発揮することができない。 Moreover, it is preferable that the lubricating oil is applied to the surface of the pure Sn layer of the Sn plating material, and the applied amount of the lubricating oil is preferably 0.2 mg / dm 2 or more. Thus, when lubricating oil is applied to the surface of the Sn layer of the Sn plating material, the lubricating oil is held in the concavo-convex structure on the surface of the pure Sn layer formed by the coarsening of the crystal grains of the Cu-Sn compound of the Sn plating material. Thus, although the effect of further reducing the friction coefficient of the Sn plating material can be obtained, the effect cannot be sufficiently exhibited when the amount of the lubricating oil applied is less than 0.2 mg / dm 2 .
また、本発明によるSnめっき材の製造方法の実施の形態では、電気めっきにより銅または銅合金からなる基材上にSn層を形成し、Sn層の表面を乾燥させた後、Sn層の表面を加熱してSnを溶融させた後に冷却することにより、基材上にCu−Sn化合物層を形成し、その上に純Sn層を形成する、Snめっき材の製造方法において、電気めっきを0.1g/L以上のSn酸化物を含むSnめっき浴を使用して行い、Snを溶融させた後の冷却を空冷保持した後に水冷することによって行い、基材と純Sn層との間に形成されるCu−Sn化合物層のSnめっき材の各層間の界面と略平行な面におけるCu−Sn化合物の平均結晶粒径が1.3μm以上になり且つSnめっき材の表面の算術平均粗さRaが0.15μm以上になるように、電気めっきの電流密度と空冷保持時間を設定し、電気めっきにより基材上に形成されるSn層の厚さ(Snめっき層の電析厚さ)が0.8〜1.8μmになるように電気めっきの通電時間を設定する。 Moreover, in embodiment of the manufacturing method of Sn plating material by this invention, after forming Sn layer on the base material which consists of copper or a copper alloy by electroplating, and drying the surface of Sn layer, the surface of Sn layer In the method for producing a Sn plating material, a Cu—Sn compound layer is formed on a base material and then a pure Sn layer is formed on the substrate by cooling Sn after melting Sn and electroplating. . Performed by using Sn plating bath containing Sn oxide of 1 g / L or more, and after cooling Sn after cooling with air and then cooling with water to form between substrate and pure Sn layer The average crystal grain size of the Cu-Sn compound in a surface substantially parallel to the interface between the layers of the Sn plating material of the Cu-Sn compound layer is 1.3 μm or more, and the arithmetic average roughness Ra of the surface of the Sn plating material To be over 0.15 μm The current density and air cooling holding time of electroplating are set, and the thickness of the Sn layer formed on the substrate by electroplating (the electrodeposition thickness of the Sn plating layer) is 0.8 to 1.8 μm. Set the energization time for electroplating.
具体的には、電気めっきにより銅または銅合金からなる基材上にSn層を形成し、Sn層の表面を乾燥させた後、Sn層の表面を加熱してSnを溶融させた後に冷却することにより、基材上にCu−Sn化合物層を形成し、その上に純Sn層を形成する、Snめっき材の製造方法において、電気めっきを0.1g/L以上のSn酸化物を含むSnめっき浴を使用して行い、Snを溶融させた後の冷却を空冷保持した後に水冷することによって行い、電気めっきの電流密度をa(A/dm2)、空冷保持時間b(秒)とすると、1≦a≦5、1≦b≦5、b≧a−1.5を満たすように電流密度および空冷保持時間を設定し、電気めっきにより基材上に形成されるSn層の厚さが0.8〜1.8μmになるように電気めっきの通電時間を設定する。 Specifically, an Sn layer is formed on a base material made of copper or a copper alloy by electroplating, the surface of the Sn layer is dried, the surface of the Sn layer is heated to melt Sn, and then cooled. In the manufacturing method of Sn plating material which forms a Cu-Sn compound layer on a base material and forms a pure Sn layer on it by this, electroplating is Sn containing 0.1 g / L or more of Sn oxide When using a plating bath, cooling after melting Sn is held by air cooling and then water cooling, and the current density of electroplating is a (A / dm 2 ) and air cooling holding time b (seconds). 1 ≦ a ≦ 5, 1 ≦ b ≦ 5, b ≧ a−1.5 so that the current density and air cooling holding time are set, and the thickness of the Sn layer formed on the substrate by electroplating is Set the electroplating energization time so that it becomes 0.8-1.8μm The
Snめっき浴は、0.1g/L以上のSn酸化物を含み、0.2g/L以上のSn酸化物を含むのが好ましい。Snめっき浴がSn酸化物を含むと、電気めっきの際にSn酸化物がSn結晶の内部、表面および粒界に巻き込まれ、また、Sn酸化物の存在によりSnの電析が阻害されて、Sn電析が不均一に核生成されるため、電析Snの結晶粒を粗大且つ不均一に生成させることができる。また、Snめっき浴が硫酸錫を含み、Snめっき浴に空気を吹き込んだり、Snめっき浴を攪拌または循環させて大気と接触させることによって、Sn酸化物がSnめっき浴中に生成されるのが好ましい。 The Sn plating bath contains 0.1 g / L or more of Sn oxide, and preferably contains 0.2 g / L or more of Sn oxide. When Sn plating bath contains Sn oxide, Sn oxide is involved in the inside, surface and grain boundary of Sn crystal during electroplating, and Sn electrodeposition is inhibited by the presence of Sn oxide, Since Sn electrodeposition is nucleated non-uniformly, crystal grains of electrodeposited Sn can be generated coarsely and non-uniformly. Further, the Sn plating bath contains tin sulfate, and Sn oxide is produced in the Sn plating bath by blowing air into the Sn plating bath or by stirring or circulating the Sn plating bath and contacting with the atmosphere. preferable.
電流密度が5A/dm2より高くなると、Sn電析が均一に核生成するため、電析Snの結晶粒が微細且つ均一に成長するが、電流密度を1〜5A/dm2、好ましくは1.5〜3A/dm2にすれば、Sn電析が不均一に核生成されるため、電析Snの結晶粒を粗大且つ不均一に生成させることができる。 When the current density is higher than 5 A / dm 2 , Sn electrodeposition is uniformly nucleated, so that the crystal grains of electrodeposited Sn grow finely and uniformly, but the current density is 1 to 5 A / dm 2 , preferably 1 If it is set to 0.5 to 3 A / dm 2 , Sn electrodeposition is nucleated non-uniformly, so that the crystal grains of electrodeposited Sn can be generated coarsely and non-uniformly.
また、空冷保持時間が5秒より長くなると、Cu−Sn化合物の結晶粒径が粗大化し過ぎて5μmを超え、粒界が減少してSnめっき材の表面粗さが小さくなり過ぎるとともに、粗大結晶粒が存在する割合が小さくなり過ぎて、摩擦係数を低減させる効果が不十分になるので、Cu−Sn化合物の結晶粒径を適度に粗大化させ且つ不均一に生成するために、空冷保持時間は1〜5秒であり、2〜4秒であるのが好ましい。 Further, when the air cooling holding time is longer than 5 seconds, the crystal grain size of the Cu—Sn compound becomes too coarse and exceeds 5 μm, the grain boundary is reduced and the surface roughness of the Sn plating material becomes too small. Since the ratio of the presence of grains becomes too small and the effect of reducing the friction coefficient becomes insufficient, the air-cooling holding time is used to appropriately coarsen the crystal grain size of the Cu-Sn compound and to generate it nonuniformly. Is 1-5 seconds, preferably 2-4 seconds.
なお、Snめっき材のリフロー処理(Sn溶融処理)は、Snめっき材を235〜280℃、好ましくは245〜270℃で10〜20秒間保持することによって行うことができる。 In addition, the reflow process (Sn melting process) of Sn plating material can be performed by hold | maintaining Sn plating material at 235-280 degreeC, Preferably it is 245-270 degreeC for 10 to 20 seconds.
上記のSnめっき材の製造方法において、電気めっきにより形成されるSn層の厚さ(電析厚さ)が1.8μmより厚くなると、電流密度や空冷保持時間を調整しても、Snめっき材の表面の算術平均粗さRaが0.15μm以上にすることができないため、電気めっきにより形成されるSn層の厚さを0.8〜1.8μmとし、0.9〜1.6μmにするのが好ましい。 In the above Sn plating material manufacturing method, when the thickness of the Sn layer formed by electroplating (electrodeposition thickness) is greater than 1.8 μm, the Sn plating material can be adjusted even if the current density and air cooling holding time are adjusted. Since the arithmetic average roughness Ra of the surface cannot be 0.15 μm or more, the thickness of the Sn layer formed by electroplating is set to 0.8 to 1.8 μm, and 0.9 to 1.6 μm. Is preferred.
また、上記のSnめっき材の製造方法の実施の形態において、Snを溶融させた後に冷却した後、表面に潤滑油を塗布するのが好ましく、潤滑油の塗布量が0.2mg/dm2以上であるのが好ましい。Snめっき材の摩擦係数をさらに低減させるために、Sn層の表面に潤滑油が塗布されているのが好ましいが、潤滑油の塗布量が0.2mg/dm2未満では、その効果を十分に発揮することができない。 Moreover, in embodiment of the manufacturing method of said Sn plating material, after making Sn cool, after cooling, it is preferable to apply | coat lubricating oil to the surface, and the application quantity of lubricating oil is 0.2 mg / dm < 2 > or more Is preferred. In order to further reduce the friction coefficient of the Sn plating material, it is preferable that the lubricating oil is applied to the surface of the Sn layer. However, when the applied amount of the lubricating oil is less than 0.2 mg / dm 2 , the effect is sufficiently obtained. I can't demonstrate it.
以下、本発明によるSnめっき材およびその製造方法の実施例について詳細に説明する。 Hereinafter, examples of the Sn plating material and the manufacturing method thereof according to the present invention will be described in detail.
[実施例1]
まず、素材(被めっき材)として、(ミツトヨ株式会社製のビッカース硬度計により試験荷重0.5kgfで測定した)ビッカース硬さが105で長さ100mm×幅60mm×厚さ0.4mmの純銅板(無酸素銅C1020)を用意し、前処理として、電解脱脂を行った後に水洗し、その後、酸洗した後に水洗した。
[Example 1]
First, as a material (material to be plated), a pure copper plate having a Vickers hardness of 105 (measured with a test load of 0.5 kgf using a Vickers hardness meter manufactured by Mitutoyo Corporation) and having a length of 100 mm × width of 60 mm × thickness of 0.4 mm (Oxygen-free copper C1020) was prepared and washed as a pretreatment after electrolytic degreasing and then pickled and then washed with water.
また、硫酸Sn(SnSO4)60g/Lと硫酸(H2SO4)75g/Lとクレゾールスルホン酸30g/Lとβナフトール1g/Lを含有する1Lの水溶液に空気を1L/分の流量で30分間吹き込んで0.2g/LのSn酸化物を生成させてSnめっき浴を作製した。なお、電子線マイクロアナライザ(EPMA)によって、生成した物質がSnと酸素(O)で構成される物質(SnOとSnO2の混合物)であることを確認した。また、Snめっき浴中のSn酸化物の生成量は、空気の吹き込み量(L/分)と吹き込み時間(分)を調整してSn酸化物を生成させた後に、ろ紙(ADVANTEC社製のGA−100(保留粒子径1.0mm))によりろ過して液中の固体分を採取し、扇風機で24時間乾燥させて重量を測定することによって定量した。 In addition, air is supplied at a flow rate of 1 L / min to 1 L of an aqueous solution containing Sn (SnSO 4 ) 60 g / L, 75 g / L sulfuric acid (H 2 SO 4 ), 30 g / L cresolsulfonic acid, and 1 g / L β-naphthol. An Sn plating bath was prepared by blowing for 30 minutes to produce 0.2 g / L of Sn oxide. Note that it was confirmed by an electron beam microanalyzer (EPMA) that the generated substance was a substance composed of Sn and oxygen (O) (a mixture of SnO and SnO 2 ). The amount of Sn oxide produced in the Sn plating bath is adjusted to the amount of air blown (L / min) and the time of blowing (min) to produce Sn oxide, and then filtered paper (GAV manufactured by ADVANTEC). The solid content in the liquid was collected by filtration through −100 (retained particle diameter: 1.0 mm), dried by a fan for 24 hours, and quantified by measuring the weight.
次に、前処理済の素材とSn板を100mm離間させて2Lビーカーに配置し、上記のSnめっき浴1Lをビーカーに入れ、ビーカー中のスターラーを300rpmで回転させてSnめっき浴を攪拌し、液温20℃に制御し、素材およびSn板をそれぞれ陰極および陽極として、電流密度3A/dm2で50秒間通電して、素材の両面のそれぞれ長さ50mm×幅60mmの領域にSnめっき層を形成した。 Next, the pre-processed material and the Sn plate are separated by 100 mm and placed in a 2 L beaker, the above Sn plating bath 1 L is placed in the beaker, the stirrer in the beaker is rotated at 300 rpm, and the Sn plating bath is stirred. The temperature of the liquid was controlled at 20 ° C., and the material and the Sn plate were respectively used as a cathode and an anode, and a current density of 3 A / dm 2 was applied for 50 seconds. Formed.
このように素材上にSnめっき層を形成したSnめっき材を水洗し、Snめっき材の表面を乾燥させた後、Snめっき材のリフロー処理(Sn溶融処理)を行った。このリフロー処理では、近赤外線ヒーター(ハイベック社製)によって、大気雰囲気においてSnめっき材を250℃で10秒間加熱してSnめっき層の表面を溶融させた後、近赤外線ヒーターを停止して2秒間大気雰囲気に保持することによって空冷保持し、その直後に温度20℃の水槽内に浸漬して冷却した。 The Sn plating material in which the Sn plating layer was formed on the material in this manner was washed with water and the surface of the Sn plating material was dried, and then the Sn plating material was reflowed (Sn melting treatment). In this reflow treatment, the Sn plating material is heated at 250 ° C. for 10 seconds in an air atmosphere by a near infrared heater (manufactured by HYBEC) to melt the surface of the Sn plating layer, and then the near infrared heater is stopped for 2 seconds. By maintaining in an air atmosphere, it was kept air-cooled, and immediately after that, it was immersed in a water bath at a temperature of 20 ° C. and cooled.
なお、リフロー処理前のSnめっき材について、Snめっき層の厚さ(電析厚さ)を測定し、電析Snの結晶粒度を求めた。Snめっき層の厚さ(電析厚さ)は、蛍光X線膜厚計(セイコーインスツル株式会社製)を用いて測定し、電析Snの結晶粒度は、電子線マイクロアナライザ(EPMA)により得られる二次電子像(SEI)を用いて、Snめっき層の表面を倍率5000倍に拡大して、JIS H0501の切断法に準じて求めた。その結果、電析厚さは1.0μm、電析Snの結晶粒度は1.3μmであった。 In addition, about the Sn plating material before a reflow process, the thickness (electrodeposition thickness) of Sn plating layer was measured and the crystal grain size of electrodeposition Sn was calculated | required. The thickness (electrodeposition thickness) of the Sn plating layer was measured using a fluorescent X-ray film thickness meter (manufactured by Seiko Instruments Inc.), and the crystal grain size of electrodeposited Sn was measured by an electron beam microanalyzer (EPMA). Using the obtained secondary electron image (SEI), the surface of the Sn plating layer was magnified 5000 times and determined according to the cutting method of JIS H0501. As a result, the electrodeposition thickness was 1.0 μm, and the crystal grain size of electrodeposited Sn was 1.3 μm.
このようにして作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき材のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。 Table 1 shows the manufacturing conditions for the Sn-plated material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn-plated layer of the Sn-plated material before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定した。純Sn層の厚さは、JIS H8501の電解式試験方法に準じて、電解式膜厚計(中央製作所製のTH11)を用いて測定した。また、Cu−Sn化合物層の厚さは、純Sn層と同様に電解式膜厚計を用いて測定し、純Sn層の厚さの測定後に再測定を行って計測表示される値をCu−Sn化合物層の厚さとした。その結果、純Sn層の厚さは0.7μm、Cu−Sn化合物層の厚さは0.8μmであった。なお、集束イオンビーム(FIB)を用いて、Snめっき材の表面と略垂直な断面(Snめっき材の各層間の界面と略垂直な断面)を露出させ、走査イオン顕微鏡(SIM)で断面観察を行ったところ、純Sn層およびCu−Sn化合物層の厚さはいずれも電解式膜厚計で測定した厚さと同じであった。 Moreover, about the Sn plating material after a reflow process, the thickness of the pure Sn layer and the thickness of the Cu-Sn compound layer were measured. The thickness of the pure Sn layer was measured using an electrolytic film thickness meter (TH11 manufactured by Chuo Seisakusho) according to the electrolytic test method of JIS H8501. Further, the thickness of the Cu—Sn compound layer is measured using an electrolytic film thickness meter in the same manner as the pure Sn layer, and the value displayed by measuring again after the measurement of the thickness of the pure Sn layer is expressed as Cu. -The thickness of the Sn compound layer. As a result, the thickness of the pure Sn layer was 0.7 μm, and the thickness of the Cu—Sn compound layer was 0.8 μm. A focused ion beam (FIB) is used to expose a cross section that is substantially perpendicular to the surface of the Sn plating material (a cross section that is substantially perpendicular to the interface between the layers of the Sn plating material) and to observe the cross section with a scanning ion microscope (SIM). As a result, the thicknesses of the pure Sn layer and the Cu—Sn compound layer were both the same as the thickness measured by the electrolytic film thickness meter.
また、リフロー処理後のSnめっき材について、上記の電解式膜厚計を用いて純Sn層を溶かすことによって、Snめっき材の表面と略平行な面(Snめっき材の各層間の界面と略平行な面)にCu−Sn化合物層を露出させ、走査イオン顕微鏡(SIM)で倍率5000倍に拡大して表面観察を行い、JIS H0501の切断法に準じてCu−Sn化合物の平均結晶粒径を求めた。その結果、Cu−Sn化合物の平均結晶粒径は1.6μmであった。 Further, for the Sn plating material after the reflow treatment, a surface substantially parallel to the surface of the Sn plating material (substantially the interface between each layer of the Sn plating material) by dissolving the pure Sn layer using the electrolytic film thickness meter. The Cu—Sn compound layer is exposed on a parallel plane, and the surface is observed with a scanning ion microscope (SIM) at a magnification of 5000 times, and the average crystal grain size of the Cu—Sn compound is determined according to the cutting method of JIS H0501. Asked. As a result, the average crystal grain size of the Cu—Sn compound was 1.6 μm.
また、リフロー処理後のSnめっき材について、集束イオンビーム(FIB)を用いて、Snめっき材の表面と略垂直な断面(Snめっき材の各層間の界面と略垂直な断面)を露出させ、走査イオン顕微鏡(SIM)で倍率2000倍に拡大して断面観察を行い、Snめっき材の各層間の界面と略平行な方向の長さ60μmの領域において、Cu−Sn化合物の各々の結晶粒の幅(各層間の界面と略平行な方向の長さ)を計測し、その幅が0.7μm以下の微細結晶粒の個数をΣRx、1.3μm以上の粗大結晶粒の個数をΣRyとして、微細結晶粒と粗大結晶粒の和に対して粗大結晶粒が存在する割合(%)をΣRy×100/(ΣRx+ΣRy)から算出した。その結果、ΣRxは39個、ΣRyは21個であり、Cu−Sn化合物の粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は35%であった。 Further, for the Sn plating material after the reflow treatment, a focused ion beam (FIB) is used to expose a cross section substantially perpendicular to the surface of the Sn plating material (a cross section substantially perpendicular to the interface between the layers of the Sn plating material), Cross-section observation is performed with a scanning ion microscope (SIM) at a magnification of 2000 times, and each crystal grain of the Cu—Sn compound is observed in a 60 μm long region in a direction substantially parallel to the interface between the layers of the Sn plating material. The width (the length in the direction substantially parallel to the interface between each layer) is measured, and the number of fine crystal grains whose width is 0.7 μm or less is ΣRx, and the number of coarse crystal grains of 1.3 μm or more is ΣRy. The ratio (%) of the presence of coarse crystal grains to the sum of crystal grains and coarse crystal grains was calculated from ΣRy × 100 / (ΣRx + ΣRy). As a result, 39 ΣRx and 21 ΣRy were present, and the abundance ratio ΣRy × 100 / (ΣRx + ΣRy) of the coarse crystal grains of the Cu—Sn compound was 35%.
また、リフロー処理後のSnめっき材について、集束イオンビーム(FIB)を用いて、Snめっき材の表面と略垂直な断面(Snめっき材の各層間の界面と略垂直な断面)を露出させ、走査イオン顕微鏡(SIM)で倍率5000倍に拡大して断面観察を行い、Snめっき材の各層間の界面と略平行な方向の長さ20μmの領域において、Snめっき材の各層間の界面と略垂直な方向のCu−Sn化合物の各々の結晶粒の最大の高さを計測し、全ての結晶粒の最大の高さの平均値をCu−Sn化合物の結晶粒の縦の長さとした。一方、リフロー処理後のSnめっき材について、Snめっき材の表面と略平行な面(Snめっき材の各層間の界面と略平行な面)にCu−Sn化合物層を露出させ、走査イオン顕微鏡(SIM)で倍率5000倍に拡大して表面観察を行い、JIS H0501の切断法に準じて求めた平均結晶粒径をCu−Sn化合物の結晶粒の横の長さとした。このようにして求めたCu−Sn化合物の結晶粒の縦の長さと横の長さから、Cu−Sn化合物の結晶粒の縦横比(縦の長さ/横の長さ)を算出したところ、0.35であった。 Further, for the Sn plating material after the reflow treatment, a focused ion beam (FIB) is used to expose a cross section substantially perpendicular to the surface of the Sn plating material (a cross section substantially perpendicular to the interface between the layers of the Sn plating material), The cross-section is observed with a scanning ion microscope (SIM) at a magnification of 5000 times, and in the region of 20 μm in length in a direction substantially parallel to the interface between the Sn plating materials, the interface between the Sn plating materials is approximately The maximum height of each crystal grain of the Cu—Sn compound in the vertical direction was measured, and the average value of the maximum heights of all the crystal grains was defined as the vertical length of the crystal grains of the Cu—Sn compound. On the other hand, with respect to the Sn plating material after the reflow treatment, the Cu—Sn compound layer is exposed on a surface substantially parallel to the surface of the Sn plating material (a surface substantially parallel to the interface between the layers of the Sn plating material), and a scanning ion microscope ( The surface was observed with a magnification of 5000 times by SIM), and the average crystal grain size determined according to the cutting method of JIS H0501 was defined as the lateral length of the Cu-Sn compound crystal grains. When the aspect ratio (vertical length / horizontal length) of the crystal grains of the Cu-Sn compound was calculated from the vertical length and the horizontal length of the Cu-Sn compound crystal grains thus determined, It was 0.35.
また、リフロー処理後のSnめっき材の表面粗さとして、超深度顕微鏡(KEYENCE社製のVK−8500)による測定結果から、JIS B0601に準じて(表面粗さを表すパラメータである)算術平均粗さRaを算出した。その結果、算術平均粗さRaは0.15μmであった。 Further, as the surface roughness of the Sn-plated material after the reflow treatment, the arithmetic average roughness (which is a parameter representing the surface roughness) according to JIS B0601 from the measurement result by an ultra-deep microscope (VK-8500 manufactured by KEYENCE). Ra was calculated. As a result, the arithmetic average roughness Ra was 0.15 μm.
これらの結果を表2に示す。
また、リフロー処理後のSnめっき材について、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。 Moreover, the surface friction coefficient was calculated about the Sn plating material after a reflow process, and the contact reliability after leaving at high temperature was evaluated.
摩擦係数(μ)は、リフロー処理後のSnめっき材から切り出した2枚の平板状の試験片の一方をインデント加工(R=1.5mm)して凸形状の圧子とするとともに、平板状の試験片をベース側の評価試料とし、ロードセルを使用して圧子を負荷荷重300gfで評価試料の表面に押し付けながら移動速度60mm/分で7mm滑らせ、摺動距離1mmから5mmまでの4mmの区間で水平方向にかかる力の平均値(F)を測定し、負荷荷重(N)で除して、μ=F/Nから算出した。その結果、摩擦係数は0.18であった。 The friction coefficient (μ) is obtained by indenting (R = 1.5 mm) one of the two flat test pieces cut out from the Sn-plated material after the reflow treatment to form a convex indenter. Using the test piece as the base-side evaluation sample, using a load cell, the indenter was slid 7 mm at a moving speed of 60 mm / min while pressing the indenter against the surface of the evaluation sample with a load of 300 gf. The average value (F) of the force applied in the horizontal direction was measured and divided by the applied load (N), and calculated from μ = F / N. As a result, the friction coefficient was 0.18.
はんだ濡れ性の評価は、リフロー処理後のSnめっき材からプレスで打ち抜いた幅10mm、長さ60mmの試験片を、ソルダーチェッカ(株式会社レスカ製のSAT−5200)を用いて、85℃で相対湿度85%の環境下に24時間放置した後に、非活性フラックスを塗布し、260℃に保持したPbフリーはんだ(Sn−3質量%Ag−0.5質量%Cu)槽に浸漬速度4mm/sで長さ4mmの部分を10秒間浸漬して、めっき面を外観観察することにより、試験片のはんだに浸漬した表面積に対するはんだで濡れた部分の面積(はんだ濡れ率)を求めることによって行った。その結果、はんだ濡れ率は98%であり、はんだ濡れ性は良好であった。 The evaluation of solder wettability was performed by using a tester having a width of 10 mm and a length of 60 mm punched out from the Sn-plated material after reflow treatment at 85 ° C. using a solder checker (SAT-5200 manufactured by Reska Co., Ltd.). After being left in an environment of 85% humidity for 24 hours, an inactive flux is applied and immersed in a Pb-free solder (Sn-3 mass% Ag-0.5 mass% Cu) bath at a rate of 4 mm / s. Then, by immersing a 4 mm long portion for 10 seconds and observing the appearance of the plated surface, the area of the portion wetted by the solder (solder wetting ratio) relative to the surface area immersed in the solder of the test piece was obtained. As a result, the solder wettability was 98% and the solder wettability was good.
高温放置後の接触信頼性の評価は、リフロー処理後のSnめっき材から切り出した試験片を大気雰囲気下において120℃の恒温槽内に120時間保持した後に恒温槽から取り出し、20℃の測定室において試験片の表面の接触抵抗値(高温放置後の接触抵抗値)を測定することによって行った。接触抵抗値の測定は、マイクロオームメータ(株式会社山崎精機研究所製)を使用して、開放電圧20mV、電流10mA、直径0.5mmのU型金線プローブ、最大荷重100gf、摺動有り(1mm/100gf)の条件で5回測定して、(最大荷重100gfが加えられたときの)平均値を求めた。その結果、高温放置後の接触抵抗値は1.2mΩであり、接触信頼性が良好であった。 Evaluation of contact reliability after leaving at high temperature is carried out by holding a test piece cut out from the Sn-plated material after the reflow treatment in a constant temperature bath at 120 ° C. for 120 hours in an air atmosphere and then taking it out from the constant temperature bath, and then measuring the chamber at 20 ° C. The contact resistance value on the surface of the test piece (contact resistance value after standing at high temperature) was measured. The contact resistance value was measured using a micro-ohm meter (manufactured by Yamazaki Seiki Laboratory Co., Ltd.), an open-circuit voltage of 20 mV, a current of 10 mA, a U-shaped wire probe with a diameter of 0.5 mm, a maximum load of 100 gf, and sliding ( Measurement was performed 5 times under the condition of 1 mm / 100 gf) to obtain an average value (when a maximum load of 100 gf was applied). As a result, the contact resistance value after standing at high temperature was 1.2 mΩ, and the contact reliability was good.
これらの結果を表3に示す。なお、表4において、はんだ濡れ率が90%以上ではんだ濡れ性が良好な場合を○、はんだ濡れ率が90%未満ではんだ濡れ性が良好でない場合を×で示し、高温放置後の接触抵抗値が2mΩ以下で接触信頼性が良好な場合を○、高温放置後の接触抵抗値が2mΩより高く接触信頼性が良好でない場合を×で示している。 These results are shown in Table 3. In Table 4, the case where the solder wettability is 90% or more and the solder wettability is good is indicated by ◯, the case where the solder wettability is less than 90% and the solder wettability is not good is indicated by x, and the contact resistance after being left at high temperature The case where the value is 2 mΩ or less and the contact reliability is good is indicated by ◯, and the case where the contact resistance value after standing at high temperature is higher than 2 mΩ and the contact reliability is not good is indicated by x.
[実施例2]
電流密度2A/dm2で75秒間通電し、Snめっき層を加熱溶融後の空冷保持時間を1秒とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.6μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Example 2]
A Sn plating material after reflow treatment was produced in the same manner as in Example 1 except that the current density was 2 seconds at a current density of 2 A / dm 2 and the air cooling holding time after heating and melting the Sn plating layer was 1 second. . In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.6 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.6μm、Cu−Sn化合物層の厚さは0.9μm、Cu−Sn化合物の平均結晶粒径は1.5μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは22、粗大結晶粒の個数ΣRyは22であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は50%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.45であり、Snめっき材の表面の算術平均粗さRaは0.21であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.6 μm, the thickness of the Cu—Sn compound layer was 0.9 μm, and the average crystal grain size of the Cu—Sn compound was 1.5 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 22, the number of coarse crystal grains ΣRy was 22, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 50%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.45, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.21. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.20であり、はんだ濡れ率が95%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が0.8mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.20, the solder wettability was 95%, the solder wettability was good, the contact resistance value after standing at high temperature was 0.8 mΩ, and the contact reliability was good. These results are shown in Table 3.
[実施例3]
硫酸Sn(SnSO4)60g/Lと硫酸(H2SO4)75g/Lとクレゾールスルホン酸30g/Lとβナフトール1g/Lを含有する1Lの水溶液に空気を1L/分の流量で150分間吹き込んで1.0g/LのSn酸化物を生成させてSnめっき浴を作製し、電流密度5A/dm2で30秒間通電し、Snめっき層を加熱溶融後の空冷保持時間を4秒とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.0μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Example 3]
Air is flown for 150 minutes at a flow rate of 1 L / min into a 1 L aqueous solution containing 60 g / L of Sn (SnSO 4 ) sulfate, 75 g / L of sulfuric acid (H 2 SO 4 ), 30 g / L of cresolsulfonic acid and 1 g / L of β-naphthol. A Sn plating bath was produced by blowing to produce 1.0 g / L of Sn oxide, energized for 30 seconds at a current density of 5 A / dm 2 , and the air cooling holding time after heating and melting the Sn plating layer was set to 4 seconds. Except for the above, an Sn plated material after the reflow treatment was produced in the same manner as in Example 1. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.0 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.5μm、Cu−Sn化合物層の厚さは1.1μm、Cu−Sn化合物の平均結晶粒径は2.1μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは42、粗大結晶粒の個数ΣRyは15であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は25%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.30であり、Snめっき材の表面の算術平均粗さRaは0.19であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.5 μm, the thickness of the Cu—Sn compound layer was 1.1 μm, and the average crystal grain size of the Cu—Sn compound was 2.1 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 42, the number of coarse crystal grains ΣRy was 15, and the presence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 25%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.30, and the arithmetic mean roughness Ra of the surface of the Sn plating material was 0.19. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.21であり、はんだ濡れ率が97%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.4mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.21, the solder wettability was 97%, and the solder wettability was good. The contact resistance value after standing at high temperature was 1.4 mΩ, and the contact reliability was good. These results are shown in Table 3.
[実施例4]
通電時間を75秒間とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.5μm、電析Snの結晶粒度は1.3μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Example 4]
A Sn-plated material after reflow treatment was produced in the same manner as in Example 1 except that the energization time was 75 seconds. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 5 μm and electrodeposited Sn was 1.3 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは1.0μm、Cu−Sn化合物層の厚さは1.0μm、Cu−Sn化合物の平均結晶粒径は1.6μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは37、粗大結晶粒の個数ΣRyは20であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は35%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.40であり、Snめっき材の表面の算術平均粗さRaは0.17であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 1.0 μm, the thickness of the Cu—Sn compound layer was 1.0 μm, and the average crystal grain size of the Cu—Sn compound was 1.6 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 37, the number of coarse crystal grains ΣRy was 20, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 35%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.40, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.17. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.18であり、はんだ濡れ率が94%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が0.8mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.18, the solder wettability was 94%, the solder wettability was good, the contact resistance value after standing at high temperature was 0.8 mΩ, and the contact reliability was good. These results are shown in Table 3.
[実施例5〜6]
リフロー処理後のSnめっき材の表面に、プレスや切断加工などの塑性加工に使用する潤滑油(JX日鉱日石エネルギー株式会社製のユニプレスPA5)を、それぞれ0.2mg/dm2(実施例5)および20mg/dm2(実施例6)塗布した以外は、実施例1と同様の方法により、リフロー処理および潤滑油塗布後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.3μmであった。このようにした作製したリフロー処理および潤滑油塗布後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Examples 5 to 6]
On the surface of the Sn plating material after the reflow treatment, lubricating oil (Unipress PA5 manufactured by JX Nippon Mining & Energy Co., Ltd.) used for plastic working such as pressing and cutting is 0.2 mg / dm 2 (Example 5). ) And 20 mg / dm 2 (Example 6) An Sn plated material after reflow treatment and lubricant application was produced by the same method as in Example 1 except that it was applied. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.3 μm. Table 1 shows the manufacturing conditions of the Sn-plated material after the reflow treatment and lubricant application thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理および潤滑油塗布後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.7μm、Cu−Sn化合物層の厚さは0.8μm、Cu−Sn化合物の平均結晶粒径は1.6μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは39、粗大結晶粒の個数ΣRyは21であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は15%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.35であり、Snめっき材の表面の算術平均粗さRaは0.15であった。これらの結果を表2に示す。 Further, with respect to the Sn plating material after the reflow treatment and the lubricant application, the thickness of the pure Sn layer and the thickness of the Cu—Sn compound layer were measured by the same method as in Example 1, and the average crystal of the Cu—Sn compound was measured. The grain size is obtained, the abundance ratio ΣRy × 100 / (ΣRx + ΣRy) of the coarse crystal grains is calculated from the number ΣRx of the fine crystal grains of the Cu—Sn compound and the number ΣRy of the coarse crystal grains. The ratio was calculated, and the arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.7 μm, the thickness of the Cu—Sn compound layer was 0.8 μm, and the average crystal grain size of the Cu—Sn compound was 1.6 μm. Further, the number of fine crystal grains ΣRx of the Cu—Sn compound was 39, the number of coarse crystal grains ΣRy was 21, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 15%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.35, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.15. These results are shown in Table 2.
また、リフロー処理および潤滑油塗布後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.12であり、はんだ濡れ率が93%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.3mΩで接触信頼性が良好であった。これらの結果を表3に示す。 For the Sn plating material after reflow treatment and lubricant application, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.12, the solder wettability was 93% and the solder wettability was good, the contact resistance value after standing at high temperature was 1.3 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例1]
通電時間を35秒間とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは0.7μm、電析Snの結晶粒度は1.3μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 1]
A Sn-plated material after the reflow treatment was produced in the same manner as in Example 1 except that the energization time was set to 35 seconds. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured by the same method as in Example 1 and the grain size of the electrodeposited Sn was determined, the electrodeposition thickness was 0. The crystal grain size of 7 μm and electrodeposited Sn was 1.3 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.1μm、Cu−Sn化合物層の厚さは0.8μm、Cu−Sn化合物の平均結晶粒径は1.6μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは42、粗大結晶粒の個数ΣRyは14であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は15%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.40であり、Snめっき材の表面の算術平均粗さRaは0.15であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.1 μm, the thickness of the Cu—Sn compound layer was 0.8 μm, and the average crystal grain size of the Cu—Sn compound was 1.6 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 42, the number of coarse crystal grains ΣRy was 14, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 15%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.40, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.15. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.18であり、はんだ濡れ率が85%ではんだ濡れ性は良好でなく、高温放置後の接触抵抗値が3.7mΩで接触信頼性が良好でなかった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.18, the solder wettability was 85%, the solder wettability was not good, the contact resistance value after standing at high temperature was 3.7 mΩ, and the contact reliability was not good. These results are shown in Table 3.
[比較例2]
電流密度5A/dm2で30秒間通電し、Snめっき層を加熱溶融後の空冷保持時間を1秒とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.0μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 2]
A Sn plating material after reflow treatment was produced in the same manner as in Example 1 except that the current density was 5 A / dm 2 and the current was passed for 30 seconds, and the air cooling holding time after heating and melting the Sn plating layer was 1 second. . In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.0 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.6μm、Cu−Sn化合物層の厚さは0.8μm、Cu−Sn化合物の平均結晶粒径は1.1μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは19、粗大結晶粒の個数ΣRyは1であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は5%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.65であり、Snめっき材の表面の算術平均粗さRaは0.08であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.6 μm, the thickness of the Cu—Sn compound layer was 0.8 μm, and the average crystal grain size of the Cu—Sn compound was 1.1 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 19, the number of coarse crystal grains ΣRy was 1, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 5%. Further, the aspect ratio of the crystal grains of the Cu—Sn compound was 0.65, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.08. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.36であり、はんだ濡れ率が75%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.5mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.36, the solder wettability was 75% and the solder wettability was good, the contact resistance value after standing at high temperature was 1.5 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例3]
電流密度4A/dm2で37秒間通電し、Snめっき層を加熱溶融後の空冷保持時間を1秒とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.3μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 3]
A Sn plating material after reflow treatment was produced in the same manner as in Example 1 except that the current density was 4 A / dm 2 for 37 seconds and the air cooling holding time after heating and melting the Sn plating layer was 1 second. . In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.3 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.7μm、Cu−Sn化合物層の厚さは1.0μm、Cu−Sn化合物の平均結晶粒径は1.5μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは39、粗大結晶粒の個数ΣRyは21であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は35%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.40であり、Snめっき材の表面の算術平均粗さRaは0.09であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.7 μm, the thickness of the Cu—Sn compound layer was 1.0 μm, and the average crystal grain size of the Cu—Sn compound was 1.5 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 39, the number of coarse crystal grains ΣRy was 21, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 35%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.40, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.09. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.35であり、はんだ濡れ率が95%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.5mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.35, the solder wettability was 95%, the solder wettability was good, the contact resistance value after standing at high temperature was 1.5 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例4]
通電時間を37秒間とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは2.0μm、電析Snの結晶粒度は1.3μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 4]
An Sn plated material after the reflow treatment was produced in the same manner as in Example 1 except that the energization time was 37 seconds. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 2. The crystal grain size of 0 μm and electrodeposited Sn was 1.3 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは1.4μm、Cu−Sn化合物層の厚さは1.2μm、Cu−Sn化合物の平均結晶粒径は1.6μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは37、粗大結晶粒の個数ΣRyは20であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は35%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.45であり、Snめっき材の表面の算術平均粗さRaは0.12であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 1.4 μm, the thickness of the Cu—Sn compound layer was 1.2 μm, and the average crystal grain size of the Cu—Sn compound was 1.6 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 37, the number of coarse crystal grains ΣRy was 20, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 35%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.45, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.12. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.40であり、はんだ濡れ率が94%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が0.7mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.40, the solder wettability was 94%, the solder wettability was good, the contact resistance value after standing at high temperature was 0.7 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例5]
Snめっき層を加熱溶融後の空冷保持時間を1秒とした以外は、実施例1と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.3μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 5]
An Sn-plated material after the reflow treatment was produced in the same manner as in Example 1 except that the air-cooled holding time after heating and melting the Sn plating layer was 1 second. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.3 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.7μm、Cu−Sn化合物層の厚さは0.8μm、Cu−Sn化合物の平均結晶粒径は1.1μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは38、粗大結晶粒の個数ΣRyは2であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は5%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.60であり、Snめっき材の表面の算術平均粗さRaは0.19であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.7 μm, the thickness of the Cu—Sn compound layer was 0.8 μm, and the average crystal grain size of the Cu—Sn compound was 1.1 μm. Further, the number of fine crystal grains ΣRx of the Cu—Sn compound was 38, the number of coarse crystal grains ΣRy was 2, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 5%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.60, and arithmetic mean roughness Ra of the surface of Sn plating material was 0.19. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.34であり、はんだ濡れ率が93%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.7mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.34, the solder wettability was 93% and the solder wettability was good, the contact resistance value after standing at high temperature was 1.7 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例6]
リフロー処理後のSnめっき材の表面に、プレスや切断加工などの塑性加工に使用する潤滑油(JX日鉱日石エネルギー株式会社製のユニプレスPA5)0.2mg/dm2を塗布した以外は、比較例2と同様の方法により、リフロー処理および潤滑油塗布後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.0μmであった。このようにした作製したリフロー処理および潤滑油塗布後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 6]
Except that the surface of the Sn-plated material after the reflow treatment was coated with 0.2 mg / dm 2 of lubricating oil (Unipress PA5 manufactured by JX Nippon Oil & Energy Corporation) used for plastic processing such as pressing and cutting. By the same method as in Example 2, a Sn plating material after reflow treatment and application of lubricating oil was produced. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.0 μm. Table 1 shows the manufacturing conditions of the Sn-plated material after the reflow treatment and lubricant application thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理および潤滑油塗布後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.6μm、Cu−Sn化合物層の厚さは0.8μm、Cu−Sn化合物の平均結晶粒径は1.1μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは19、粗大結晶粒の個数ΣRyは1であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は5%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.65であり、Snめっき材の表面の算術平均粗さRaは0.08であった。これらの結果を表2に示す。 Further, with respect to the Sn plating material after the reflow treatment and the lubricant application, the thickness of the pure Sn layer and the thickness of the Cu—Sn compound layer were measured by the same method as in Example 1, and the average crystal of the Cu—Sn compound was measured. The grain size is obtained, the abundance ratio ΣRy × 100 / (ΣRx + ΣRy) of the coarse crystal grains is calculated from the number ΣRx of the fine crystal grains of the Cu—Sn compound and the number ΣRy of the coarse crystal grains. The ratio was calculated, and the arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.6 μm, the thickness of the Cu—Sn compound layer was 0.8 μm, and the average crystal grain size of the Cu—Sn compound was 1.1 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 19, the number of coarse crystal grains ΣRy was 1, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 5%. Further, the aspect ratio of the crystal grains of the Cu—Sn compound was 0.65, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.08. These results are shown in Table 2.
また、リフロー処理および潤滑油塗布後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.26であり、はんだ濡れ率が95%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が0.9mΩで接触信頼性が良好であった。これらの結果を表3に示す。 For the Sn plating material after reflow treatment and lubricant application, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.26, the solder wettability was 95% and the solder wettability was good, the contact resistance value after standing at high temperature was 0.9 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例7]
Snめっき層を加熱溶融後の空冷保持時間を1秒とした以外は、実施例3と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.0μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 7]
An Sn-plated material after the reflow treatment was produced in the same manner as in Example 3 except that the air-cooled holding time after heating and melting the Sn plating layer was 1 second. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.0 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.7μm、Cu−Sn化合物層の厚さは0.9μm、Cu−Sn化合物の平均結晶粒径は1.3μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは10、粗大結晶粒の個数ΣRyは30であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は75%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.45であり、Snめっき材の表面の算術平均粗さRaは0.11であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.7 μm, the thickness of the Cu—Sn compound layer was 0.9 μm, and the average crystal grain size of the Cu—Sn compound was 1.3 μm. Further, the number of fine crystal grains ΣRx of the Cu—Sn compound was 10, the number of coarse crystal grains ΣRy was 30, and the presence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 75%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.45, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.11. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.31であり、はんだ濡れ率が91%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.2mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.31, the solder wettability was 91% and the solder wettability was good, the contact resistance value after standing at high temperature was 1.2 mΩ, and the contact reliability was good. These results are shown in Table 3.
[比較例8]
硫酸Sn(SnSO4)60g/Lと硫酸(H2SO4)75g/Lとクレゾールスルホン酸30g/Lとβナフトール1g/Lを含有する1Lの水溶液からなるSnめっき浴(Sn酸化物を含まないSnめっき浴)を使用した以外は、実施例3と同様の方法により、リフロー処理後のSnめっき材を作製した。なお、実施例1と同様の方法により、リフロー処理前のSnめっき材のSnめっき層の電析厚さを測定するとともに、電析Snの結晶粒度を求めたところ、電析厚さは1.0μm、電析Snの結晶粒度は1.1μmであった。このようにした作製したリフロー処理後のSnめっき材の製造条件と、リフロー処理前のSnめっき層の電析厚さおよび電析Snの結晶粒度を表1に示す。
[Comparative Example 8]
Sn plating bath (including Sn oxide) composed of 1 L aqueous solution containing sulfuric acid Sn (SnSO 4 ) 60 g / L, sulfuric acid (H 2 SO 4 ) 75 g / L, cresolsulfonic acid 30 g / L and β-naphthol 1 g / L An Sn plating material after the reflow treatment was prepared in the same manner as in Example 3 except that a non-Sn plating bath was used. In addition, when the electrodeposition thickness of the Sn plating layer of the Sn plating material before the reflow treatment was measured and the grain size of the electrodeposited Sn was determined by the same method as in Example 1, the electrodeposition thickness was 1. The crystal grain size of 0 μm and electrodeposited Sn was 1.1 μm. Table 1 shows the manufacturing conditions of the Sn plating material after the reflow treatment thus prepared, the electrodeposition thickness of the Sn plating layer before the reflow treatment, and the crystal grain size of the electrodeposited Sn.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、純Sn層の厚さおよびCu−Sn化合物層の厚さを測定し、Cu−Sn化合物の平均結晶粒径を求め、Cu−Sn化合物の微細結晶粒の個数ΣRxと粗大結晶粒の個数ΣRyから粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)を算出し、Cu−Sn化合物の結晶粒の縦横比を算出し、Snめっき材の表面の算術平均粗さRaを算出した。その結果、純Sn層の厚さは0.7μm、Cu−Sn化合物層の厚さは1.0μm、Cu−Sn化合物の平均結晶粒径は1.5μmであった。また、Cu−Sn化合物の微細結晶粒の個数ΣRxは8、粗大結晶粒の個数ΣRyは35であり、粗大結晶粒の存在割合ΣRy×100/(ΣRx+ΣRy)は81%であった。また、Cu−Sn化合物の結晶粒の縦横比は0.55であり、Snめっき材の表面の算術平均粗さRaは0.12であった。これらの結果を表2に示す。 Moreover, about the Sn plating material after a reflow process, the thickness of a pure Sn layer and the thickness of a Cu-Sn compound layer are measured by the method similar to Example 1, and the average crystal grain diameter of a Cu-Sn compound is calculated | required. The ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) is calculated from the number of fine crystal grains ΣRx and the number of coarse crystal grains ΣRy of the Cu—Sn compound, and the aspect ratio of the crystal grains of the Cu—Sn compound is calculated. The arithmetic average roughness Ra of the surface of the Sn plating material was calculated. As a result, the thickness of the pure Sn layer was 0.7 μm, the thickness of the Cu—Sn compound layer was 1.0 μm, and the average crystal grain size of the Cu—Sn compound was 1.5 μm. The number of fine crystal grains ΣRx of the Cu—Sn compound was 8, the number of coarse crystal grains ΣRy was 35, and the existence ratio of coarse crystal grains ΣRy × 100 / (ΣRx + ΣRy) was 81%. Moreover, the aspect ratio of the crystal grain of the Cu-Sn compound was 0.55, and the arithmetic average roughness Ra of the surface of the Sn plating material was 0.12. These results are shown in Table 2.
また、リフロー処理後のSnめっき材について、実施例1と同様の方法により、表面の摩擦係数を算出し、はんだ濡れ性および高温放置後の接触信頼性を評価した。その結果、摩擦係数は0.36であり、はんだ濡れ率が95%ではんだ濡れ性は良好であり、高温放置後の接触抵抗値が1.4mΩで接触信頼性が良好であった。これらの結果を表3に示す。 Further, for the Sn plated material after the reflow treatment, the surface friction coefficient was calculated by the same method as in Example 1, and the solder wettability and the contact reliability after being left at high temperature were evaluated. As a result, the coefficient of friction was 0.36, the solder wettability was 95%, the solder wettability was good, the contact resistance value after standing at high temperature was 1.4 mΩ, and the contact reliability was good. These results are shown in Table 3.
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| JP2003183882A (en) * | 2001-12-11 | 2003-07-03 | Kobe Steel Ltd | Tinned electronic material |
| JP2005139503A (en) * | 2003-11-06 | 2005-06-02 | Dowa Mining Co Ltd | Method for producing Sn-coated copper |
| JP2009097040A (en) * | 2007-10-17 | 2009-05-07 | Nikko Kinzoku Kk | Tin-plated copper or copper alloy strip with excellent tin plating wear resistance |
| JP2010168598A (en) * | 2009-01-20 | 2010-08-05 | Mitsubishi Shindoh Co Ltd | Conductive member and method for manufacturing the same |
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| JP2003183882A (en) * | 2001-12-11 | 2003-07-03 | Kobe Steel Ltd | Tinned electronic material |
| JP2005139503A (en) * | 2003-11-06 | 2005-06-02 | Dowa Mining Co Ltd | Method for producing Sn-coated copper |
| JP2009097040A (en) * | 2007-10-17 | 2009-05-07 | Nikko Kinzoku Kk | Tin-plated copper or copper alloy strip with excellent tin plating wear resistance |
| JP2010168598A (en) * | 2009-01-20 | 2010-08-05 | Mitsubishi Shindoh Co Ltd | Conductive member and method for manufacturing the same |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190007049A (en) | 2016-05-19 | 2019-01-21 | 도와 메탈테크 가부시키가이샤 | Sn plating material and manufacturing method thereof |
| DE112017002082T5 (en) | 2016-05-19 | 2019-01-24 | Dowa Metaltech Co., Ltd. | SPINNED PRODUCT AND METHOD FOR MANUFACTURING THEREOF |
| US10982345B2 (en) | 2016-05-19 | 2021-04-20 | Dowa Metaltech Co., Ltd. | Tin-plated product and method for producing same |
| JP2019123942A (en) * | 2019-02-06 | 2019-07-25 | Jx金属株式会社 | Plate stripe of copper or copper alloy and traverse coil, and manufacturing method thereof |
| JP7093317B2 (en) | 2019-02-06 | 2022-06-29 | Jx金属株式会社 | Traverse coil and its manufacturing method |
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|---|---|
| JP5714465B2 (en) | 2015-05-07 |
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