JP2013058694A - Shutter device and shutter device aggregate - Google Patents

Abstract

An object of the present invention is to provide a shutter and a shutter assembly that can be reduced in size.
A shutter device 1 can be switched between an open state and a closed state. Such a shutter device 1 includes core materials 311 and 321 made of a magnetic material, and electromagnets 31 and 32 including coils 312 and 322 wound around the core materials 311 and 321, and outside the coils 312 and 322. Are moved so as to face the electromagnets 31 and 32 or move away from the electromagnets 31 and 32 by the action of magnetic force generated from the electromagnets 31 and 32. The body 2 and the shutter 4 supported by the moving body 2 and extending in the moving direction of the moving body 2, and the cross sections of the core members 311 and 321 have a short axis in the width direction of the shutter 4. It has a flat shape.
[Selection] Figure 3

Description

  The present invention relates to a shutter device and a shutter device assembly.

  For example, as a method of adjusting (changing) the resonance frequency of the vibrator, a method of changing (increasing or decreasing) the mass of the vibrator is known. Such a method is provided, for example, between an oscillator, an ion gun that removes part of the oscillator by irradiating the ion beam to the oscillator to reduce the mass of the oscillator, and the oscillator and the ion gun. This is performed using an apparatus having a shutter (see Patent Document 1).

  In the apparatus described in Patent Document 1, a plurality of shutter plates are pivotally supported on an iron core, and each shutter plate is rotatable about the iron core. Each shutter plate is configured to rotate by driving a corresponding solenoid. In the apparatus described in Patent Document 1, the shutter can be opened or closed by using such rotation of the shutter plate.

  In such an apparatus, the shutter is opened while the ion beam is emitted from the ion gun. Thereby, the ion beam passes through the shutter and is irradiated to the vibrator, and a part of the vibrator is removed, whereby the resonance frequency of the vibrator changes (decreases). Then, by closing the shutter when the frequency of the vibrator reaches a predetermined frequency, irradiation of the ion beam to the vibrator is prevented. By such a method, the resonance frequency of the vibrator is adjusted.

  However, in the shutter described in Patent Document 1, a plurality of solenoids that drive each shutter plate are provided at positions shifted laterally from the shutter plate and overlapped in the height direction. Invitation When the size of the shutter is increased, the chamber and the like must be enlarged correspondingly, and the frequency adjustment efficiency of the vibrator is reduced.

JP 2008-118156 A

  An object of the present invention is to provide a shutter device and a shutter device assembly that can be reduced in size.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The shutter device of the present invention is a shutter device capable of switching between an open state and a closed state,
An electromagnet comprising a core made of a magnetic material and a coil wound around the core;
A moving body that is disposed outside the coil and facing one end of the core member, and moves in a direction approaching the electromagnet or a direction away from the electromagnet by the action of a magnetic force generated from the electromagnet; ,
A shutter unit supported by the moving body and extending in a moving direction of the moving body,
The cross section of the core material has a flat shape having a minor axis in the width direction of the shutter portion.
Thereby, the shutter device which can achieve size reduction can be provided.

[Application Example 2]
In the shutter device of the present invention, the moving body is made of a soft magnetic material,
It is preferable that a pair of the electromagnets are provided with the moving body interposed therebetween.
As a result, the opening / closing of the shutter device can be freely controlled and the size of the shutter device can be reduced.

[Application Example 3]
In the shutter device according to the aspect of the invention, it is preferable that the core member has a base portion around which the coil is wound and an extension portion that extends toward the movable body at the tip of the base portion.
Thereby, the moving distance of the moving body can be kept constant.
[Application Example 4]
In the shutter device according to the aspect of the invention, it is preferable that the core member and the moving body include an insulating layer made of a resin material.
Thereby, it is possible to prevent or suppress the moving body from being separated from the core material by the magnetic force remaining in the core material. That is, unintentional adsorption of the moving body to the core material is prevented or suppressed, and the movement of the moving body can be freely controlled.

[Application Example 5]
In the shutter device of the present invention, it is preferable that the insulating layer is formed on a surface of the core material.
This simplifies the formation of the insulating layer.
[Application Example 6]
In the shutter device of the present invention, it is preferable that the flat shape is an ellipse or an oval.
Thereby, since a coil can be made to follow the surface of a base and it can wind, it can control that a crevice will be formed between a coil and a base. Therefore, the width of the electromagnet can be further shortened, and accordingly, the entire width of the shutter device is further shortened. Thereby, the size of the shutter device can be further reduced.

[Application Example 7]
In the shutter device assembly of the present invention, it is preferable that a plurality of the shutter devices of the present invention are juxtaposed in the width direction of the shutter portion.
Thereby, it is possible to provide a shutter device assembly that can be miniaturized.

[Application Example 8]
In the shutter device assembly of the present invention, it is preferable that a magnetic shielding material is provided between a pair of adjacent shutter devices.
Thereby, the moving body which each shutter apparatus has hardly receives the influence of the magnetic field which generate | occur | produces from the electromagnet of an adjacent shutter apparatus. Therefore, malfunction of each shutter device can be prevented, and each shutter device can be driven more accurately and reliably.

[Application Example 9]
In the shutter device assembly according to the present invention, it is preferable that the electromagnets included in a pair of adjacent shutter devices are arranged so as to be shifted in the moving direction of the moving body.
Thereby, the moving body which each shutter apparatus has hardly receives the influence of the magnetic field which generate | occur | produces from the electromagnet of an adjacent shutter apparatus. Therefore, malfunction of each shutter device can be prevented, and each shutter device can be driven more accurately and reliably.
[Application Example 10]
In the shutter device assembly of the present invention, the shutter device assembly is preferably a shutter device for mass adjustment of a vibration device.
Thereby, the frequency adjustment of a vibration device can be performed efficiently.

It is the schematic of the frequency adjusting device to which the shutter apparatus assembly | assembly concerning 1st Embodiment of this invention is applied. It is a top view (top view) which shows the shutter apparatus aggregate | assembly concerning 1st Embodiment of this invention. FIG. 3 is a cross-sectional view (a cross-sectional view taken along line AA in FIG. 2) of the shutter device included in the shutter device assembly illustrated in FIG. 2. It is sectional drawing (perspective view) of the core material which the shutter apparatus shown in FIG. 3 has. It is a figure for demonstrating operation | movement of the shutter apparatus shown in FIG. It is sectional drawing of the shutter apparatus which the shutter apparatus aggregate | assembly concerning 2nd Embodiment of this invention has. It is sectional drawing of the shutter apparatus which the shutter apparatus aggregate | assembly concerning 3rd Embodiment of this invention has. It is sectional drawing which shows the shutter apparatus which the shutter apparatus aggregate | assembly concerning 4th Embodiment of this invention has. It is a top view (top view) of a shutter device assembly according to a fifth embodiment of the present invention. It is an exploded view of the support stand which the shutter device aggregate concerning a 6th embodiment of the present invention has.

Hereinafter, a shutter device assembly (shutter device assembly of the present invention) to which the shutter device of the present invention is applied will be described in detail based on preferred embodiments shown in the accompanying drawings.
<First Embodiment>
FIG. 1 is a schematic view of a frequency adjusting device to which the shutter device assembly according to the first embodiment of the present invention is applied. FIG. 2 is a plan view (upper surface) showing the shutter device assembly according to the first embodiment of the present invention. 3) is a cross-sectional view of the shutter device included in the shutter device assembly shown in FIG. 2 (cross-sectional view taken along line AA in FIG. 2), and FIG. 4 is a cross-sectional view of the core material of the shutter device shown in FIG. FIG. 5 (perspective view) and FIG. 5 are diagrams for explaining the operation of the shutter device shown in FIG. In the following description, for convenience of explanation, the upper side in FIGS. 1 to 5 will be described as “upper”, the lower side as “lower”, the right side as “right”, and the left side as “left”. Also, as shown in FIG. 1, three axes orthogonal to each other are defined as an x-axis, a y-axis, and a z-axis.
Below, the case where the shutter device assembly of the present invention is applied to a frequency adjusting device 100 for adjusting the resonance frequency of a vibrator (for example, a crystal vibrator) 9 will be described. However, the application of the shutter device of the present invention is not limited to this.

1. 1 is a chamber 110 in which the inside can be set to a desired environment, a shutter device assembly 1 ′ in which a plurality of shutter devices 1 are arranged in parallel, an ion gun 120, And a shielding plate 130.
The ion gun 120 emits an ion beam by applying an electric field to an inert gas such as Ar or Ne and accelerating it, and constitutes a mass changing unit that changes the mass of the vibrator 9. is there. Such an ion gun 120 is positioned below the shutter device assembly 1 ′ in the chamber 110, and irradiates the ion beam IB upward.

The shielding plate 130 is positioned above the shutter device assembly 1 ′ in the chamber 110, and blocks the ion beam IB leaking upward from between the adjacent shutter devices 1 (gap).
The plurality of shutter devices 1 are independently controlled in drive, and can be switched between an open state that allows passage of the ion beam IB and a closed state that blocks the ion beam IB.

  In such a frequency adjusting device 100, one vibrator 9 is disposed above one shutter device 1, the ion beam IB is emitted from the ion gun 120, and the shutter device 1 is opened, whereby the vibrator 9 is irradiated with the ion beam IB, and a part of the vibrator 9 (for example, a part of the electrode) is removed. Thereby, the mass of the vibrator 9 is reduced and the resonance frequency thereof is adjusted. When the resonance frequency of the vibrator 9 reaches a predetermined value due to the irradiation of the ion beam IB, the shutter device 1 is immediately closed to prevent the ion beam IB from being further irradiated onto the vibrator 9. According to the frequency adjusting device 100, the resonance frequency of the vibrator 9 can be adjusted in this way. A method for adjusting the frequency of the vibrator 9 using the frequency adjusting device 100 will be described in detail later.

Next, the shutter device assembly 1 ′ will be described in detail.
As shown in FIG. 2, the shutter device assembly 1 ′ has a support base 8 and a plurality of shutter devices 1 supported by the support base 8. By having the plurality of shutter devices 1, the resonance frequencies of the vibrators 9 can be adjusted at the same time, that is, the number of the shutter devices 1 at the maximum. Therefore, the resonance frequency of more vibrators 9 can be adjusted within a predetermined time, and the efficiency of the frequency adjustment device 100 is improved. The number of shutter devices 1 is not particularly limited, and can be, for example, about 10 to 30.

  The support base 8 has a block shape or a plate shape. Such a support base 8 is formed with a plurality of grooves 81 opened on the upper surface thereof. The plurality of grooves 81 are arranged in parallel at equal intervals along the y-axis direction. Each of the plurality of grooves 81 extends in the x-axis direction, and is open to the side surface of the support base 8 at both ends thereof. Each of the plurality of grooves 81 functions as a storage portion S that stores the shutter device 1.

Here, it is preferable that each of the plurality of protrusions 82 positioned between the pair of adjacent grooves 81 has a magnetic shield (a property of blocking the transmission of magnetic flux). In other words, each of the plurality of projecting portions 82 preferably functions as a magnetic shield (magnetic shield material).
As will be described later, in each groove 81, electromagnets 31 and 32 and a moving body 2 that moves by the action of a magnetic field from the electromagnets 31 and 32 are arranged. When the protrusion 82 functions as a magnetic shield, the moving body 2 of each shutter device 1 is hardly affected by the magnetic field generated from the electromagnets 31 and 32 of the adjacent shutter devices 1. Therefore, malfunction of each shutter device 1 can be prevented, and each shutter device 1 can be driven more accurately and reliably.

In the case of imparting magnetic shielding to the projecting portion 82, the constituent material of the projecting portion 82 is not particularly limited as long as it is a material having the above properties, but it is a non-magnetic material having high conductivity and low magnetic permeability such as aluminum. It is preferable to use the body. Thereby, the induction heating of the protrusion part 82 is suppressed, and the unintentional heat generation of the shutter device assembly 1 ′ can be prevented or suppressed.
A pair of shutter support portions 83 extending in the y-axis direction are fixed to both ends of the support base 8 in the x-axis direction so as to cross the grooves 81. The pair of shutter support portions 83 are members for slidably supporting a later-described shutter portion 4 included in the shutter device 1. By providing such a shutter support portion 83, the shutter device 1 can be driven smoothly and accurately.

Hereinafter, the shutter device 1 will be described. Since each of the plurality of shutter devices 1 has the same configuration, only one shutter device 1 will be described below, and the other shutter devices 1 will be described. Omitted.
As shown in FIG. 3, the shutter device 1 includes a pair of electromagnets 31 and 32 that are spaced apart from each other in the x-axis direction, a moving body 2 that is provided between the electromagnets 31 and 32, and a connecting portion 6. And a voltage applying means 5 for applying a voltage to the electromagnets 31 and 32. With the shutter device 1 having such a configuration, as described later, the opening and closing of the shutter device 1 can be freely controlled and the size of the shutter device 1 can be reduced.

The pair of electromagnets 31 and 32 are provided in the groove 81 and are separated from each other in the x-axis direction.
The electromagnet 31 includes a core material 311 and a coil 312 wound around the core material 311. The core material 311 extends in the x-axis direction and extends from the base 311a around which the coil 312 is wound and the end of the base 311a on the moving body 2 side (the left end in FIG. 3) to both sides in the z-axis direction. It is comprised by the extension part (protrusion part) 311b which extends. That is, the core material 311 has a substantially “T” shape.

  In addition, the coil 312 is not wound around the extending portion 311b, and the extending portion 311b is positioned (protruded) outside the coil 312. Such an extension portion 311b also functions as a movement restricting portion that restricts further movement of the moving body 2 by contacting (contacting) the moving body 2. Thereby, the moving distance of the mobile body 2 between the pair of electromagnets 31 and 32 can be kept constant. If the moving distance of the moving body 2 changes, a time until the shutter device 1 is changed from the open state to the closed state, more specifically, a command (signal) for closing the shutter device 1 is issued. The time from the time until the shutter device 1 is actually completely closed changes. When the time for closing the shutter device 1 changes in this way, the irradiation time of the ion beam IB to the vibrator 9 changes accordingly, and the mass of the vibrator 9 decreases more than necessary or decreases to the target value. The resonance frequency of the vibrator 9 may deviate from a predetermined frequency. That is, if the moving distance of the moving body 2 changes, the resonance frequency of the vibrator 9 may not be adjusted with high accuracy.

  Further, as shown in FIG. 4, the cross section of the core material 311 (yz plane perpendicular to the x axis) has a flat shape having a minor axis in the y axis direction and a major axis in the z axis direction. . In other words, the core material 311 has a plate shape whose thickness direction is the y-axis direction. Thereby, since the width of the electromagnet 31 in the y-axis direction can be shortened, the entire width of the shutter device 1 is shortened accordingly. Therefore, the size of the shutter device 1 can be reduced, and a plurality of shutter devices 1 can be arranged in parallel in the y-axis direction at a narrower pitch.

  In addition, the cross-sectional shape of the base 311a of the core material 311 is not particularly limited, but is preferably elliptical or oval. For example, the shape which rounded each corner | angular part of the rectangle may be sufficient. With such a shape having no corners, the coil 312 can be wound to follow the surface of the base 311a, so that a gap can be prevented from being formed between the coil 312 and the base 311a. Therefore, the width of the electromagnet 31 in the y-axis direction can be further shortened, and accordingly, the entire width of the shutter device 1 is further shortened. Thereby, the size of the shutter device 1 can be further reduced, and a plurality of shutter devices 1 can be arranged in parallel in the y-axis direction at a narrower pitch.

  The size of the core material 311 is not particularly limited. For example, [length in the x-axis direction] × [length in the y-axis direction] × [length in the z-axis direction] of the base 311a is set. 30 mm × 0.7 mm × 1.5 mm, and [length in the x-axis direction] × [length in the y-axis direction] × [length in the z-axis direction] of the extension 311 b is 2 mm × 0. It can be about 7 mm × 10 mm. By setting it as such a size, the effect mentioned above can fully be exhibited, ensuring the intensity | strength of the core material 311. FIG.

  As a constituent material of the core material 311, various ferromagnetic materials can be used. In particular, among the ferromagnetic materials, a soft magnetic material having a small coercive force (a reverse magnetic field that must be applied to reverse the magnetization polarity) is preferable. Specifically, a material having a holding power of about 5 Ga or less is preferable, and examples of such a material include pure iron and iron mixed with impurities such as silicon iron. By configuring the core material 311 with such a material, the core material 311 functions as a magnet when a voltage is applied to the coil 312, and the core material 311 is quickly magnetized when the voltage application to the coil 312 is stopped. As a result, the electromagnet 31 loses its function. Thereby, as will be described later, it is possible to effectively prevent or suppress the movement of the moving body 2 from being hindered by the magnetic force remaining in the core material 311, and to smoothly and reliably open and close the shutter device 1. Can be done.

  In the present embodiment, an insulating layer 313 is formed on the surface of the core material 311 facing the moving body 2. The insulating layer 313 has a function of preventing the moving body 2 from being separated from the core material 311 by the magnetic force remaining in the core material 311. Thereby, unintentional adsorption | suction to the core material 311 of the mobile body 2 is prevented, the movement of the mobile body 2 can be controlled freely, and the opening / closing operation | movement of the shutter apparatus 1 can be performed smoothly and reliably. . Further, by providing the insulating layer 313 on the core material 311, the insulating layer 313 can be easily formed.

Further, the insulating layer 313 is softer than the core material 311 (the Young's modulus of the material is low), and also functions as a buffer layer when the moving body 2 contacts the core material 311. Thereby, damage to the shutter device 1 can be effectively prevented or suppressed.
The constituent material of the insulating layer 313 is not particularly limited as long as it has insulating properties. For example, an epoxy resin, a phenol resin, a urea resin, a melamine resin, an unsaturated polyester, a silicone resin, a polyurethane, and the like are used. A resin material can be used.

Note that the insulating layer 313 only needs to be positioned between the core material 311 and the moving body 2 when they are in contact with each other. For example, the insulating layer 313 is formed on the surface of the moving body 2 facing the core material 311. Alternatively, it may be formed on both the surface of the core 311 facing the moving body 2 and the surface of the moving body 2 facing the core 311.
The configuration of the electromagnet 31 has been described in detail above. Similar to the electromagnet 31, the electromagnet 32 includes a core material 321 and a coil 322 wound around the core material 321. An insulating layer 323 is formed on the surface of the core member 321 facing the moving body 2. The core material 321, the coil 322, and the insulating layer 323 have the same configuration as the core material 311, the coil 312, and the insulating layer 313 of the electromagnet 31, and thus the description thereof is omitted.

  The moving body 2 is provided in the groove 81 and between the pair of electromagnets 31 and 32. The moving body 2 is provided so as to be movable in the x-axis direction between the electromagnets 31 and 32 while sliding with the bottom surface of the groove 81. Such a moving body 2 has a flat shape in the y-axis direction (that is, the width direction of the shutter unit 4). In other words, the moving body 2 has a plate shape whose thickness direction is the y-axis direction. Thereby, since the width | variety of the y-axis direction of the mobile body 2 can be shortened, the full width of the shutter apparatus 1 becomes short in connection with this. Therefore, the size of the shutter device 1 can be reduced, and a plurality of shutter devices 1 can be arranged in parallel in the y-axis direction at a narrower pitch.

The cross-sectional shape of the moving body 2 is not particularly limited, and in the present embodiment, it is a rectangle (a rectangle extending in the z-axis direction).
As the constituent material of the moving body 2, various ferromagnetic materials can be used as in the core material 311. In particular, among the ferromagnetic materials, a soft magnetic material having a small coercive force is preferable. Specifically, a material having a holding power of about 5 Ga or less is preferable, and examples of such a material include pure iron and iron mixed with impurities such as silicon iron. By configuring the moving body 2 with such a material, the moving body 2 becomes a magnet when the magnetic field from the electromagnets 31 and 32 acts, and when the magnetic field disappears, the function as the magnet is quickly lost. Therefore, it is possible to effectively prevent or suppress the movement of the moving body 2 from being hindered by the magnetic force remaining in the moving body 2, and the opening / closing operation of the shutter device 1 can be performed smoothly and reliably.

  In the present embodiment, a coating layer 84 that can reduce friction is formed on the bottom surface of the groove 81 in order to improve the slidability with the groove 81 of the moving body 2. Thereby, the mobile body 2 can be moved more smoothly. The covering layer 84 may be formed on the lower surface of the moving body 2, for example, or may be formed on both the bottom surface of the groove 81 and the lower surface of the moving body 2.

  Such a coating layer 84 can be formed, for example, on electroless nickel plating containing a fluororesin. Electroless nickel plating containing this fluororesin is excellent in slidability (sliding property) and wear resistance. Therefore, according to the coating layer 84 having such a configuration, the above functions can be more effectively exhibited. Further, since the coating layer 84 having such a configuration is excellent in wear resistance, it is possible to suppress a change with time of the slidability of the moving body 2, and as a result, the moving speed of the moving body 2 can be reduced. Changes over time can be suppressed.

  If the friction of the coating layer 84 increases due to aging and the moving speed of the moving body 2 decreases, the time until the shutter device 1 is changed from the open state to the closed state, more specifically, the shutter device 1 is changed. The time from when the command (signal) for making the closed state is issued until the shutter device 1 is actually completely closed becomes longer. When the time for closing the shutter device 1 becomes longer in this way, the irradiation time of the ion beam IB to the vibrator 9 becomes longer, and the mass of the vibrator 9 is unnecessarily reduced. The resonance frequency becomes higher than a predetermined frequency. That is, if the moving speed of the moving body 2 changes with time, the resonance frequency of the vibrator 9 may not be adjusted with high accuracy.

  In addition, the structure of the coating layer 84 is not limited to said structure, For example, polyolefin, such as polyethylene and a polypropylene, polyvinyl chloride, polyester (PET, PBT etc.), polyamide, a polyimide, a polyurethane, a polystyrene, a polycarbonate, a silicone resin , Fluorine-based resins (PTFE, ETFE, etc.), silicone rubber, other various elastomers (for example, thermoplastic elastomers such as polyamide-based and polyester-based) or composite materials thereof.

  Although the electromagnets 31 and 32 and the moving body 2 have been described above, they protrude from both sides in the y-axis direction (width direction) of the shutter unit 4 in a plan view (xy plan view) when the shutter device 1 is viewed from above. Preferably not. Thereby, since the full width of the shutter device 1 is shortened, the shutter device 1 can be reduced in size, and a plurality of shutter devices 1 can be arranged in parallel in the y-axis direction at a narrower pitch.

The shutter part (shutter plate) 4 is supported by the moving body 2 via a connecting part 6. The connecting portion 6 is fixed to the moving body 2. The connecting portion 6 includes a pair of protrusions 61 and 62 that are separated in the x-axis direction and protrude in the z-axis direction.
The constituent material of the connecting portion 6 is not particularly limited, and for example, various metals such as iron, nickel, cobalt, copper, aluminum, magnesium, zinc, or an alloy or metal containing at least one of them. Intermetallic compounds, and oxides, nitrides, carbides, and the like of these metals can be used. Among these, as the alloy, for example, stainless steel, Inconel, and other various aluminum alloys such as duralumin can be used.

  The shutter unit 4 has a long shape extending in the x-axis direction. Such a shutter portion 4 is formed with a pair of through holes 41 and 42 that are spaced apart in the x-axis direction. Then, the through holes 41 and 42 are engaged with the protrusions 61 and 62 of the connecting portion 6, so that the shutter portion 4 is supported by the moving body 2 through the connecting portion 6. The shutter unit 4 is detachable from the connecting unit 6. Thereby, the replacement of the shutter unit 4 which is a consumable can be easily performed.

  Such a shutter unit 4 is made of, for example, carbon, titanium or the like having excellent sputtering resistance as a constituent material. Thereby, damage of the shutter part 4 by the ion beam IB can be suppressed effectively. Moreover, by comprising with such a material, the shutter part 4 can be reduced in weight and the reactivity and moving speed of the shutter part 4 can be improved.

  In addition, the shutter part 4 is, for example, various metals such as iron, nickel, cobalt, copper, manganese, aluminum, and magnesium, or an alloy or intermetallic compound including at least one of these, and further, these metals. A structure in which a DLC (diamond-like carbon) film excellent in sputtering resistance is formed on the surface of a main body made of oxide, nitride, carbide, or the like can also be used.

The voltage application means 5 has a function of applying a voltage to the coils 312 and 322 of the electromagnets 31 and 32. Such a voltage applying means 5 has a DC power source 51 and a switch element 52.
As shown in FIG. 3, the switch element 52 includes a switch 521 having one end connected to the (+) side of the DC power supply 51 and two contacts (terminals) 522 and 523 that can be contacted by the switch 521. Yes. The contact 522 is connected to one end of the coil 312, and the contact 523 is connected to one end of the coil 322. In such a switch element 52, the first state in which the switch 521 contacts the contact 522, the second state in which the switch 521 contacts the contact 523, and the third state in which the switch 521 does not contact any of the contacts 522 and 523 are selected. can do. On the other hand, the other ends of the coils 312 and 322 are connected to the (−) side of the DC power supply 51 after joining on the way.

According to such a voltage applying means 5, if the switch element 52 is in the first state, only the electromagnet 31 can function as a magnet. Conversely, if the switch element 52 is in the second state, only the electromagnet 32 is allowed to function. It can function as a magnet. Moreover, if the switch element 52 is in the third state, neither of the electromagnets 31 and 32 can function as a magnet.
The configuration of the shutter device 1 has been described in detail above. Such a shutter device 1 is driven as follows.

In the shutter device 1, the state in which the moving body 2 moves to the electromagnet 31 side (that is, the state shown in FIG. 5A) is a closed state in which irradiation of the ion beam IB to the vibrator 9 is blocked. The state in which is moved to the electromagnet 32 side (that is, the state shown in FIG. 5B) is an open state in which irradiation of the ion beam IB to the vibrator 9 is permitted.
First, the operation from the open state to the closed state will be described. When the shutter device 1 is in the open state, when the switch element 52 is set to the first state and a voltage is applied to the coil 312 by the DC power source 51, the electromagnet 31 functions as a magnet. As a result, the moving body 2 moves toward the electromagnet 31 so that the moving body 2 is attracted to the electromagnet 31, and the shutter unit 4 also moves with the movement. As a result, the shutter device 1 changes from the open state to the closed state.

  Note that, after the open state is changed to the closed state, it is preferable that the voltage application from the DC power source 51 to the coil 312 is stopped or the switch element 52 is set to the third state. Thereby, excessive heat generation of the coil 312 due to energization can be prevented, and the environment in the chamber 110 can be kept substantially constant. However, when it is desired to reliably maintain the closed state, the voltage application to the coil 312 may be continued even after the open state is changed to the closed state.

  Next, the operation from the closed state to the open state will be described. When the shutter device 1 is in the closed state, when the switch element 52 is set to the second state and a voltage is applied to the coil 322 by the DC power source 51, the electromagnet 32 functions as a magnet. Thereby, the moving body 2 moves to the electromagnet 32 side so that it is attracted to the electromagnet 32, and the shutter unit 4 also moves along with the movement. As a result, the shutter device 1 changes from the closed state to the open state.

  Note that, after the closed state is changed to the open state, it is preferable that the voltage application from the DC power source 51 to the coil 322 is stopped or the switch element 52 is set to the third state. Thereby, excessive heat generation of the coil 322 due to energization can be prevented, and the environment in the chamber 110 can be kept substantially constant. However, when it is desired to maintain the open state with certainty, the voltage application to the coil 322 may be continued after the closed state is changed to the open state.

Thus, by controlling the opening and closing of the shutter device 1 using the magnetic force generated from the electromagnets 31 and 32, the following effects can be exhibited.
That is, according to the electromagnet 31 (the same applies to the electromagnet 32), since the time until the electromagnet 31 functions as a magnet after applying a voltage to the coil 312 is shorter, a command to close the shutter device 1 is issued. The time difference between the issued time and the time when the shutter device 1 is actually closed can be further shortened. Therefore, the frequency of the vibrator 9 can be adjusted to a predetermined value with higher accuracy.

  In addition, according to the electromagnet 31, since the time from when the voltage is applied to the coil 312 to when the electromagnet 31 functions as a magnet is almost constant every time, the time when the instruction to close the shutter device 1 is issued. The time difference from the time when the shutter device 1 is actually closed can be made almost constant every time. Therefore, when the time difference is corrected, the correction can be easily performed.

2. Frequency Adjustment Method Next, a frequency adjustment method of the vibrator 9 using the frequency adjustment device 100 will be described.
The frequency adjustment of the vibrator 9 by the frequency adjusting device 100 is performed by arranging a plurality of vibrators 9 in the chamber 110 so that one vibrator 9 is positioned immediately above one shutter device 1 and reducing the pressure in the chamber 110. It is performed in a state (preferably a vacuum state). Further, the detection is performed while intermittently detecting the resonance frequency of the vibrator 9, and the detection result is sent to a control means (not shown) in real time.

  The plurality of vibrators 9 are each supported by a plate-like or sheet-like carrier. In this state, the frequency of the vibrator 9 is adjusted as follows. Since the method of adjusting the frequency of each vibrator 9 is the same as each other, a method for adjusting the frequency of one vibrator 9 will be described below, and a method for adjusting the frequency of another vibrator 9 will be described. Description is omitted.

  First, the shutter device 1 is closed. Next, the ion gun 120 is turned on, and the ion beam IB is emitted upward. Then, the shutter device 1 is left in a closed state until the ion beam IB is stabilized. Next, the shutter device 1 is opened. When the shutter device 1 is opened, the vibrator 9 is irradiated with the ion beam IB, and a part of the vibrator 9, more specifically, a part of the electrode is removed, and the mass of the vibrator 9 is reduced accordingly. As a result, the resonance frequency of the vibrator 9 gradually increases. Next, when the resonance frequency of the vibrator 9 reaches a predetermined frequency, the shutter device 1 is closed. The adjustment of the resonance frequency of the vibrator 9 is completed through the above steps.

Second Embodiment
Next, a second embodiment of the shutter device assembly of the present invention will be described.
FIG. 6 is a cross-sectional view of the shutter device included in the shutter device assembly according to the second embodiment of the present invention.
Hereinafter, the shutter device assembly according to the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The shutter device assembly according to the second embodiment of the present invention is the same as that of the first embodiment described above except that the means for changing each shutter device from the closed state to the open state is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 6, in the shutter device 1A of the present embodiment, an urging means 34 is provided instead of the electromagnet 32 described in the first embodiment. The urging means 34 urges the moving body 2 to the side opposite to the electromagnet 31 (left side in FIG. 6). Such a biasing means 34 has a long shape extending in the x-axis direction, and connects the support base 8 and the moving body 2 at both ends thereof. The biasing means 34 is not particularly limited as long as it can exert the above function, and can be constituted by an elastic body such as rubber or a coil spring, for example. By using rubber or the like, the biasing means 34 can be made small, so that it can be easily arranged in the groove 81.

The urging force of the urging means 34 is set smaller than the attracting force of the moving body 2 by the electromagnet 31. Accordingly, the moving body 2 can be moved to the electromagnet 31 side when the electromagnet 31 is caused to function as a magnet against the urging force of the urging means 34.
The urging force of the urging means 34 is smaller than the attracting force of the moving body 2 by the electromagnet 31, and when the electromagnet 31 is not functioning as a magnet (a state where no voltage is applied to the coil 312). If the movable body 2 can be moved to the left side in FIG. Thereby, when the electromagnet 31 is made to function as a magnet, the moving speed and the reactivity of the moving body 2 toward the electromagnet 31 become higher.

The voltage application unit 5 </ b> A includes a DC power source 51 that applies a voltage to the coil 312.
The shutter device 1A having such a configuration is driven as follows.
In the shutter device 1A, the state in which the moving body 2 has moved to the electromagnet 31 side is a closed state in which irradiation of the ion beam IB to the vibrator 9 is blocked, and the state in which the moving body 2 has moved to the side opposite to the electromagnet 31 is an ion. This is an open state in which irradiation of the beam IB to the vibrator 9 is allowed.

  First, an operation for changing the shutter device 1A from the open state to the closed state will be described. When a voltage is applied to the coil 312 by the DC power source 51 when the shutter device 1 is in the open state, the electromagnet 31 functions as a magnet. As a result, the moving body 2 moves toward the electromagnet 31 so that the moving body 2 is attracted to the electromagnet 31, and the shutter unit 4 also moves along with the movement. As a result, the shutter device 1 changes from the open state to the closed state.

Next, an operation for changing the shutter device 1A from the closed state to the open state will be described. When the application of voltage from the DC power supply 51 to the coil 312 is stopped when the shutter device 1 is in the closed state, the electromagnet 31 loses its function as a magnet. Move to. As a result, the shutter device 1 changes from the closed state to the open state.
In this embodiment, the magnetic force of the electromagnet 31 is used to change the shutter device 1A from the open state to the closed state, and the urging force of the urging means 34 is used to change the shutter device 1A from the closed state to the open state. Conversely, the magnetic force of the electromagnet 31 may be used to change the shutter device 1A from the closed state to the open state, and the urging force of the urging means 34 may be used to change the shutter device 1A from the open state to the closed state. However, the configuration of the present embodiment is preferable for the reason described below.

That is, in the frequency adjusting device 100, as described above, it is preferable that the shutter device 1A can be quickly closed, and the time when a command (signal) for closing the shutter device 1A is issued and the shutter device 1 It is preferable to make the time difference from the time when it actually closes almost constant each time.
From this point of view, the moving body 2 is moved by the urging means 34 (spring or the like) due to the aging of the urging means 34 (deformation of the spring or decrease in elasticity due to hardening). It decreases or becomes less reactive. Therefore, if the urging force of the urging means 34 is used to change the shutter device 1A from the open state to the closed state, the time when the shutter device 1A is instructed to close and the shutter device 1 There is a possibility that the time difference from the time when the closed state is actually changed over time.

On the other hand, in the case of the electromagnet 31 as described above, there is no problem like the biasing means 34. Therefore, by using the magnetic force of the electromagnet 31 to change the shutter device 1A from the open state to the closed state, the frequency of the vibrator 9 can be adjusted with higher accuracy.
According to the second embodiment as described above, the same effect as that of the first embodiment described above can be exhibited.

<Third Embodiment>
Next, a third embodiment of the shutter device assembly of the present invention will be described.
FIG. 7 is a cross-sectional view of the shutter device included in the shutter device assembly according to the third embodiment of the present invention.
Hereinafter, the shutter device assembly according to the third embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

The shutter device assembly according to the third embodiment of the present invention is the same as that of the first embodiment described above except that the means for changing the shutter device from the closed state to the open state is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 7, the electromagnet 32 described in the first embodiment is omitted in the shutter device 1 </ b> B included in the shutter device assembly of the present embodiment. In addition, the shutter device 1B is provided so as to be inclined so that the left portion of the shutter device 1B is positioned below the right portion. A stopper 86 that restricts the movement of the moving body 2 is provided in the groove 81 of the support base 8 on the left side of the moving body 2.

The voltage applying unit 5B has a DC power source 51 that applies a voltage to the coil 312.
The shutter device 1B having such a configuration is driven as follows.
In the shutter device 1B, the state in which the moving body 2 moves to the electromagnet 31 side is a closed state in which irradiation of the ion beam IB to the vibrator 9 is blocked, and the state in which the moving body 2 moves to the side opposite to the electromagnet 31 is an ion. This is an open state in which irradiation of the beam IB to the vibrator 9 is allowed.

  First, the operation of changing the shutter device 1B from the open state to the closed state will be described. When a voltage is applied to the coil 312 by the DC power source 51 when the shutter device 1B is in the open state, the electromagnet 31 functions as a magnet. As a result, the moving body 2 moves toward the electromagnet 31 so that the moving body 2 is attracted to the electromagnet 31, and the shutter unit 4 also moves along with the movement. As a result, the shutter device 1B changes from the open state to the closed state.

Next, an operation for changing the shutter device 1B from the closed state to the open state will be described. When the application of voltage from the DC power source 51 to the coil 312 is stopped when the shutter device 1 is in the closed state, the electromagnet 31 loses its function as a magnet, so the moving body 2 moves to the left in FIG. The movement comes to an end when it comes into contact with the stopper 86. As a result, the shutter device 1B changes from the closed state to the open state.
According to the third embodiment as described above, the same effects as those of the first embodiment described above can be exhibited.

<Fourth embodiment>
Next, a fourth embodiment of the shutter device assembly of the present invention will be described.
FIG. 8 is a cross-sectional view showing a shutter included in the shutter device assembly according to the fourth embodiment of the present invention.
Hereinafter, the shutter device assembly according to the fourth embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.

The shutter device assembly according to the fourth embodiment of the present invention is the same as that of the first embodiment described above except that the means for changing the shutter device from the closed state to the open state is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 8, in the shutter device 1 </ b> C included in the shutter device assembly of the present embodiment, a pair of moving bodies 21 and 22 are provided on both sides of the electromagnet 31. These moving bodies 21 and 22 are connected by a connecting portion 6. Such moving bodies 21 and 22 are permanent magnets (thin magnetized hard magnetic bodies) such as neodymium magnets, ferrite magnets, samarium cobalt magnets, and alnico magnets, respectively. Further, the moving body 21 is magnetized (magnetized) so that the left side in FIG. 8 is the S pole and the right side is the N pole, and the moving body 22 is the N pole on the left side in FIG. It is magnetized to become.

  An electromagnet 33 is provided between the moving bodies 21 and 22. The electromagnet 33 includes a core member 331 and a coil 332 wound around the core member 331. The core member 331 includes a base portion 331a extending in the x-axis direction and wound with a coil 332, and a pair of extending portions 331b and 331c extending from both ends of the base portion 331a toward both sides in the z-axis direction. ing.

The voltage applying means 5C includes a DC power source 51 and a switch element 53 that can reverse the polarity of the voltage applied to the coil 332. The switch element 53 has a first state in which the potential on one end side (for example, the portion 332a) of the coil 332 is higher than the potential on the other end side (for example, the portion 332b), and the potential on one end side from the potential on the other end side. It is possible to switch to the second state, which becomes lower.
The shutter device 1C having such a configuration is driven as follows.

  In the shutter device 1 </ b> C, the moving body 21 moves to the electromagnet 33 side and the moving body 22 moves to the side opposite to the electromagnet 33 is a closed state that blocks irradiation of the ion beam IB to the vibrator 9. The moving body 21 moves to the side opposite to the electromagnet 33 and the moving body 22 moves to the electromagnet 33 side is an open state that allows irradiation of the ion beam IB to the vibrator 9.

  First, the operation of changing the shutter device 1C from the open state to the closed state will be described. When the shutter device 1C is in the open state, when the switch element 53 is set to the first state and a voltage is applied to the coil 332 by the DC power source 51, the electromagnet 33 functions as a magnet, and the left side of the electromagnet 33 is the S pole and the right side. Becomes the N pole. Therefore, the moving body 21 attracts the electromagnet 33 and the moving body 22 repels the electromagnet 33 so that the moving body 21 and the electromagnet 33 are in contact with each other. As a result, the shutter device 1C changes from the open state to the closed state.

  Next, an operation for changing the shutter device 1C from the closed state to the open state will be described. When the shutter device 1C is in the closed state, when the switch element 53 is set to the second state and a voltage is applied to the coil 332 by the DC power source 51, the electromagnet 33 functions as a magnet, and the left side of the electromagnet 33 is the N pole, Becomes the S pole. Therefore, the moving body 21 repels the electromagnet 33, the moving body 22 attracts the electromagnet 33, and the moving body 22 and the electromagnet 33 are in contact with each other. As a result, the shutter device 1C changes from the closed state to the open state.

According to such a configuration, since the attractive force and repulsive force of the magnet are used, the shutter unit 4 can be moved at a higher speed.
According to the fourth embodiment as described above, the same effects as those of the first embodiment described above can be exhibited.
In the present embodiment, the pair of moving bodies 21 and 22 arranged to face each other via the electromagnet 33 is used, but either one of the moving bodies 21 and 22 may be omitted.

<Fifth Embodiment>
Next, a fifth embodiment of the shutter device assembly of the present invention will be described.
FIG. 9 is a plan view (top view) of the shutter device assembly according to the fifth embodiment of the present invention. In FIG. 9, for convenience of explanation, illustration of the shutter portion and the connecting portion is omitted.
Hereinafter, the shutter device assembly according to the fifth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The shutter device assembly according to the fifth embodiment of the present invention is the same as that of the first embodiment described above except that the arrangement of adjacent shutters is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 9, in the shutter device assembly 1D ′ of the present embodiment, the positions of the electromagnets 31 and 32 of the adjacent shutter device 1D are shifted in the x-axis direction. More specifically, if the line segment that intersects the intermediate point P in the separation direction of the electromagnets 31 and 32 in the even-numbered shutter device 1D and extends in the y-axis direction is L, the odd-numbered shutter device 1D is The central portion of the electromagnet 32 (the central portion of the base portion 321a) is disposed on the line segment L. With such an arrangement, the moving body 2 included in each shutter device 1D is hardly affected by the magnetic field generated from the electromagnets 31 and 32 of the adjacent shutter device 1D. This is because the moving body 2 moves away from the ends of the electromagnets 31 and 32. Therefore, malfunction of each shutter device 1D can be prevented, and each shutter device 1D can be driven more accurately and reliably.
According to the fifth embodiment as described above, the same effect as that of the first embodiment described above can be exhibited.

<Sixth Embodiment>
Next, a sixth embodiment of the shutter device assembly of the present invention will be described.
FIG. 10 is an exploded view of the support base included in the shutter device assembly according to the sixth embodiment of the present invention.
Hereinafter, the shutter device assembly according to the sixth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The shutter device assembly according to the sixth embodiment of the present invention is the same as that of the first embodiment described above except that the means for changing the shutter device from the closed state to the open state is different except for the configuration of the support base. It is. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 10, the support base 8 </ b> E included in the shutter device assembly of the present embodiment has a plurality of individual pieces 8 </ b> E ′ arranged and fixed in the y-axis direction. The plurality of individual pieces 8E ′ are formed by joining two plate members 81E ′ and 82E ′ each extending in the x-axis direction and having the thickness direction in the y-axis direction. Further, the plate member 82E ′ projects upward from the plate member 81E ′.

In such a support base 8E, the space between the plate member 82E ′ included in the predetermined piece 8E ′ and the plate member 82E ′ included in the adjacent piece 8E ′ is a moving body of the shutter device 1. 2 and the electromagnets 31 and 32 are configured. Further, a portion of the plate member 82E ′ protruding from the plate member 81E ′ constitutes a protruding portion 82. If the support base 8E has such a configuration, the support base 8E having the number of storage portions S corresponding to the number of shutter devices 1 to be arranged can be easily changed by changing the number of pieces 8E '. Can be obtained.
According to the sixth embodiment as described above, the same effect as that of the first embodiment described above can be exhibited.

As described above, the shutter and the shutter assembly of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part is an arbitrary configuration having the same function. Can be substituted. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.
In the above-described embodiment, the method of changing the resonance frequency of the vibrator by reducing the mass of the vibrator by the ion beam has been described. However, the present invention is not limited to this. For example, metal particles are attached to the vibrator by vapor deposition. The resonance frequency of the vibrator may be changed by increasing the mass of the vibrator.

  DESCRIPTION OF SYMBOLS 1 ... Shutter apparatus 1 '... Shutter apparatus aggregate 100 ... Frequency adjustment apparatus 110 ... Chamber 120 ... Ion gun 130 ... Shielding plate 1A ... Shutter apparatus 1B ... Shutter apparatus 1C ... Shutter apparatus 1D ... Shutter apparatus 1D' ... Shutter apparatus aggregate 2 ... moving body 21 ... moving body 22 ... moving body 31 ... electromagnet 311 ... core material 311a ... base 311b ... extension part 312 ... coil 313 ... insulating layer 32 ... electromagnet 321 ... core material 321a ... base 322 ... coil 323 ... insulating layer 33 ... Electromagnet 331 ... Core material 331a ... Base part 331b ... Extension part 331c ... Extension part 332 ... Coil 332a ... Part 332b ... Part 34 ... Energizing means 4 ... Shutter part 41 ... Through hole 42 ... Through hole 5 ... Voltage application Means 51 ... DC power supply 52 ... Switch Element 521 ... Switch 522 ... Contact 523 ... Contact 53 ... Switch element 5A ... Voltage application means 5B ... Voltage application means 5C ... Voltage application means 6 ... Connecting portion 61 ... Protrusion 62 ... Protrusion 8 ... Support base 81 ... Groove 81E '... Plate Member 82 ... Projection part 82E '... Plate member 83 ... Shutter support part 84 ... Cover layer 86 ... Stopper 8E' ... Single piece part 8E ... Support base 9 ... Vibrator IB ... Ion beam L ... Line segment P ... Intermediate point

Claims (10)

A shutter device capable of switching between an open state and a closed state,
An electromagnet comprising a core made of a magnetic material and a coil wound around the core;
A moving body that is disposed outside the coil and facing one end of the core member, and moves in a direction approaching the electromagnet or a direction away from the electromagnet by the action of a magnetic force generated from the electromagnet; ,
A shutter unit supported by the moving body and extending in a moving direction of the moving body,
The shutter device according to claim 1, wherein a cross section of the core member has a flat shape having a minor axis in the width direction of the shutter portion. The moving body is made of a soft magnetic material,
The shutter device according to claim 1, wherein a pair of the electromagnets are provided with the moving body interposed therebetween.   3. The shutter device according to claim 1, wherein the core member has a base portion around which the coil is wound, and an extending portion that extends toward the moving body at the tip of the base portion.   The shutter device according to claim 3, wherein the core member and the movable body include an insulating layer made of a resin material.   The shutter device according to claim 4, wherein the insulating layer is formed on a surface of the core member.   The shutter device according to claim 1, wherein the flat shape is an ellipse or an oval.   7. A shutter device assembly comprising a plurality of the shutter devices according to claim 1 arranged in the width direction of the shutter portion.   The shutter device assembly according to claim 7, wherein a magnetic shielding material is provided between a pair of adjacent shutter devices.   The shutter device assembly according to claim 7 or 8, wherein the electromagnets included in a pair of adjacent shutter devices are shifted in a moving direction of the moving body.   The shutter device assembly according to any one of claims 7 to 9, wherein the shutter device assembly is a mass adjustment shutter device of a vibration device.

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