JP2012209293A - Manufacturing method of component for photoelectric conversion module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method in which a component for photoelectric conversion module can be obtained at low cost with high optical coupling efficiency.SOLUTION: The manufacturing method of a component 10 for photoelectric conversion module includes: a first process of preparing a substrate 20 having a top surface 21, a reverse surface 22, and a through hole 23, a photoelectric conversion element 40 having a light reception part or a light emission part 41, and a lens element 30 having a plurality of lens parts 32; a second process of attaching the lens element 30 to the substrate 20 from the side of the top surface 21 of the substrate 20 so that respective optical axes of the lens parts 32 face the through hole 23; and a third process of positioning the photoelectric conversion element 40 for the lens element 30 from the side of the reverse surface 22 of the substrate 20 so as to align the optical axes of the lens parts 32 with an optical axis of the light reception part or light emission part 41 of the photoelectric conversion element 40.

Description

  The present invention relates to a method for manufacturing a photoelectric conversion module component having multiple channels.

  As a photoelectric conversion module having multiple channels, a semiconductor laser element (photoelectric conversion element) that transmits and receives a plurality of optical signals is provided on a circuit board, and a lens array having a lens element so as to face the photoelectric conversion element A mounting structure in which a ferrule with an optical fiber inserted is connected to the lens array is known as Patent Document 1 or the like.

  In Patent Document 1, an optical element array in which a plurality of optical elements are arranged in parallel is flip-chip mounted on a holding substrate having a fitting hole, and the holding substrate is provided by connecting metal bumps to a circuit board. The protruding wall is fitted into the fitting hole. Thus, the lens array is positioned and fixed on the holding substrate, and the optical element and the lens array are optically coupled.

JP 2010-122312 A

  In a photoelectric conversion module component used in a photoelectric conversion module, it is necessary to accurately align the lens array and the plurality of photoelectric conversion elements in order to realize highly efficient optical coupling. Furthermore, in order to reduce the manufacturing cost of the photoelectric conversion module, it is required to reduce the member cost and the mounting cost.

  In the technique described in Patent Document 1, in a photoelectric conversion module component having a plurality of channels of optical paths, a photoelectric conversion element array having a plurality of photoelectric conversion elements is mounted on a lens array having a plurality of lens elements. Yes. However, in the form in which the projection wall of the lens array is fitted and aligned with the fitting hole of the holding substrate, it is necessary to process both the projection wall and the fitting hole with high accuracy. However, in order to process a ceramic substrate or a silicon substrate with high accuracy, a processing process such as etching or lithography is generally required, which increases the manufacturing cost.

  In addition, when manufacturing a photoelectric conversion module in which the distance between the photoelectric conversion elements is large, the number of photoelectric conversion elements per unit area of semiconductor wear decreases when a photoelectric conversion element array including a plurality of photoelectric conversion elements is used. However, the manufacturing efficiency is reduced and the member cost is increased. On the other hand, it is preferable to prepare a plurality of single photoelectric conversion elements and mount them on a substrate from the viewpoint of reducing the member cost because a semiconductor wafer on which the photoelectric conversion elements are formed can be used effectively.

  On the other hand, if such a manufacturing method is applied, a single photoelectric conversion element formed independently is mounted with high accuracy at a predetermined position on the substrate, and each photoelectric conversion element on the substrate is mounted. The lens array is mounted at a position corresponding to the above. Therefore, high positioning accuracy is required for the two steps of mounting the photoelectric conversion element on the substrate and mounting the lens array on the substrate, and the mounting cost increases. Therefore, the manufacturing cost of the photoelectric conversion module component is increased.

  Then, an object of this invention is to provide the manufacturing method which can obtain the components for photoelectric conversion modules with low cost and high optical coupling efficiency.

In order to achieve the above object, the present invention provides the following.
(1) A substrate having a front surface and a back surface and having a through-hole penetrating from the front surface to the back surface, a photoelectric conversion element having a light receiving portion or a light emitting portion, and a lens element having a plurality of lens portions are prepared. The first step;
A second step of attaching the lens element to the substrate from the surface side of the substrate such that each optical axis of the lens portion faces the through hole;
Positioning the photoelectric conversion element with respect to the lens element from the back side of the substrate so that the optical axis of the lens unit and the optical axis of the light receiving unit or the light emitting unit of the photoelectric conversion element coincide with each other. Process,
The manufacturing method of the components for photoelectric conversion modules characterized by including.
(2) In the first step, a second positioning portion is formed on the same side of the lens element formed on the back surface of the substrate and the light receiving portion or the light emitting portion for each lens portion. Prepared the photoelectric conversion element,
In the third step, the second positioning portion is brought into contact with the first positioning portion, and the light receiving portion or the light emitting portion of each of the photoelectric conversion elements is positioned with respect to the lens portion. The manufacturing method of the components for photoelectric conversion modules as described in (1).
(3) In the first step, the lens element on which the first metal layer is formed on the same side as the lens part or the second positioning part of the substrate, and the second side on the same side as the light receiving part or the light emitting part. Preparing the photoelectric conversion element on which a metal layer is formed,
In the third step, the photoelectric conversion element according to (1) or (2), wherein the photoelectric conversion element is fixed to the lens element by thermocompression bonding the first metal layer and the second metal layer. A method for manufacturing a conversion module component.
(4) The method for manufacturing a part for a photoelectric conversion module according to (3), wherein the first metal layer is insert-molded together with the lens element.
(5) The component of the photoelectric conversion module according to any one of (1) to (4), wherein the lens element is a lens array in which a plurality of the lens portions are arranged at equal intervals. Production method.
(6) The photoelectric conversion element includes a plurality of the light receiving units or light emitting units arranged in a row,
In the third step, the photoelectric conversion element is positioned with respect to the lens element from the back surface side of the substrate so that only the light receiving part or the light emitting part located at both ends of the row is aligned with the optical axis. (1) The manufacturing method of the component for photoelectric conversion modules as described in any one of (5) characterized by the above-mentioned.

(7) preparing a lens element having a plurality of lens portions and a first alignment portion on the same side, and a photoelectric conversion element having a light receiving portion or a light emitting portion and a second alignment portion on the same side; Process,
The second alignment unit is brought into contact with the first alignment unit so that the optical axis of the lens unit coincides with the optical axis of the light receiving unit or the light emitting unit of the photoelectric conversion element. A fifth step of aligning with the lens element;
The manufacturing method of the components for photoelectric conversion modules characterized by including.
(8) In the fourth step, the lens element and the photoelectric conversion element in which the first metal layer and the second metal layer are formed on the surfaces of the first alignment part and the second alignment part are prepared,
In the fifth step, the photoelectric conversion module component according to (7), wherein the photoelectric conversion element is fixed to the lens element by thermocompression bonding the first metal layer and the second metal layer. Production method.
(9) The method for manufacturing a component for a photoelectric conversion module according to (8), wherein the lens element is insert-molded together with the first metal layer in the fourth step.
(10) The component for a photoelectric conversion module according to any one of (7) to (9), wherein the lens element is a lens array in which a plurality of the lens portions are arranged at equal intervals. Production method.

  According to the method for manufacturing a component for a photoelectric conversion module according to the present invention, since the optical axis of the photoelectric conversion element is directly aligned with the lens element, high positioning accuracy is not required when the lens element is arranged on the substrate. Therefore, a photoelectric conversion module component having high optical coupling efficiency can be provided at a low cost.

1 is a perspective view of a photoelectric conversion module to which a photoelectric conversion module component according to a first embodiment of the present invention is applied. It is a sectional side view of the component for photoelectric conversion modules which concerns on 1st Embodiment of this invention. It is explanatory drawing which shows the manufacturing process of the components for photoelectric conversion modules which concern on 1st Embodiment of this invention. It is a sectional side view of the component for photoelectric conversion modules which concerns on 2nd Embodiment of this invention. It is explanatory drawing which shows the manufacturing process of the components for photoelectric conversion modules which concern on 2nd Embodiment of this invention.

  Hereinafter, a method for manufacturing a part for a photoelectric conversion module according to an embodiment of the present invention will be described with reference to the drawings.

<First Embodiment>
FIG. 1 is a perspective view showing a photoelectric conversion module 1 including a photoelectric conversion module component 10 manufactured by applying the photoelectric conversion module component manufacturing method according to the first embodiment of the present invention. The photoelectric conversion module 1 includes an optical connector 3 in which a plurality of optical fibers 2 (four in the illustrated example) are arranged in parallel, and a photoelectric conversion module component 10 that transmits and receives optical signals to and from the optical fiber 2. ing. The photoelectric conversion module component 10 transmits a light signal to the optical fiber 2 according to an electric signal, and a lens array (lens element) 30 fixed to the surface of the substrate 20 and optically connected to the optical fiber 2, or The photoelectric conversion element 40 (refer FIG. 2) which emits an electrical signal according to an optical signal is provided.

  The optical connector 3 is attached to the photoelectric conversion module component 10 so that the end faces of the optical fibers arranged in parallel face the fiber-side lens element 31 of the lens array 30. Although not shown, in order to make it easy to attach the optical connector 3 to the photoelectric conversion module component 10, a guide hole is provided on the surface of the lens array 30 facing the optical connector 3, and guide pins are provided to the optical connector 3. The optical fiber 2 and the lens array 30 may be easily optically connected by inserting a guide pin into the guide hole.

  FIG. 2 is a side sectional view of the photoelectric conversion module component 10. As shown in FIG. 2, the photoelectric conversion module component 10 includes a substrate 20 having a through hole 23 that penetrates from the front surface 21 to the back surface 22 on the opposite side, and a lens array 30 attached on the front surface 21 of the substrate 20. And a photoelectric conversion element 40 attached to the substrate 20 so that the light receiving surface or the light emitting surface 41 faces the lens array 30.

  The lens array 30 includes a plurality of fiber side lens portions 31 arranged so as to be optically connected to the optical fiber 2 and a plurality of element side lens elements (hereinafter abbreviated as lens portions) optically coupled to the photoelectric conversion element 40. ) 32, and a fiber side lens unit 31 and a reflection unit 33 that guides each other by changing the optical path between the lens unit 32. A substrate mounting portion 34 is formed around the lens portion 32 so as to protrude along the optical axis direction of the lens portion 32. The plurality of fiber side lens portions 31 and the lens portions 32 are preferably arranged at equal intervals. Such a lens array 30 is manufactured by, for example, resin injection molding.

  The surface of the lens array 30 around the opening of the through hole 23 of the substrate 20 so that the lens portion 32 of the lens array 30 is exposed to the back surface 22 side from the through hole 23 of the substrate 20 with respect to the substrate 20. 21 is adhered and fixed.

  The photoelectric conversion element 40 is a semiconductor element such as a light emitting element (surface emitting laser (VCSEL)) that emits an optical signal in response to an electric signal or a light receiving element (photodiode) that emits an electric signal in response to an optical signal. The photoelectric conversion element 40 is attached from the back surface 22 side of the substrate 20 so that the light emitting / receiving surface 41 faces the lens portion 32 of the lens array 30 so that the optical axis coincides.

  Note that a step portion 26 (first positioning portion) may be provided on the inner wall of the through hole 23 so that the inner wall 24 on the front surface 21 side has a smaller diameter than the inner wall 25 on the rear surface 22 side. When the outer dimension of the outer peripheral surface adjacent to the light emitting / receiving surface 41 of the photoelectric conversion element 40 is set smaller than the inner diameter dimension of the inner wall 25 and larger than the inner diameter dimension of the inner wall 24, the photoelectric conversion element 40 is placed inside the inner wall 25. Since the distance between the lens portion 32 and the light emitting / receiving surface 41 can be reduced, the optical coupling efficiency is good. Further, the photoelectric conversion element 40 can be fixed to the substrate 20 by bringing the mounting surface 24 of the light emitting / receiving surface 41 into contact with the step portion 26 of the substrate 20.

  In the photoelectric conversion module 1 configured as described above, for example, when the photoelectric conversion element 40 is a light emitting element, the light emitted from the light emitting surface 41 according to the electric signal is condensed by the lens unit 32 and the reflection unit 33. The optical signal is transmitted to the optical fiber 2 of the optical connector 3 by being reflected by the fiber side lens element 31.

  In the above-described example, the photoelectric conversion module component 10 including the lens array 30 including a plurality of lens pairs each including the fiber-side lens element 31 and the lens portion 32 has been described as an example. It is good also as the component 10 for photoelectric conversion modules provided with the lens body 30 provided with the single lens pair which consists of the lens element 31 and the single lens part 32. FIG.

  A method for manufacturing such a photoelectric conversion module component 10 will be described below with reference to FIG.

  First, a substrate having a front surface and a back surface and having a through-hole penetrating from the front surface to the back surface, a photoelectric conversion element having a light emitting / receiving surface (light receiving portion or light emitting portion) 41, and a lens array having a plurality of lens portions 32 (Lens element) 30 is prepared. As shown in FIG. 3A, a plurality of through holes 23 are formed in a row on the substrate 20 with the same interval as the interval between the optical fibers 2 of the optical connector 3. The through-hole 23 may be formed by drilling using a drill or the like when the substrate 20 is a glass epoxy substrate. When the substrate 20 is resin-molded, the through-hole 23 is simultaneously formed when the substrate 20 is molded by injection molding. It may be formed. When the substrate 20 is a semiconductor substrate, the through hole 23 can be formed by etching or the like. At this time, as described above, the step portion 26 may be provided on the inner wall of the through hole 23 so that the inner wall 24 on the front surface 21 side has a smaller diameter than the inner wall 25 on the rear surface 22 side.

  Note that a plurality of through holes 23 may be formed in accordance with the plurality of lens portions 32 of the lens array 30, or the lens portions so that the plurality of lens portions 32 are exposed from the same through hole 23 to the back surface 22 side. A single through-hole 23 may be formed along 32 arrangement directions.

  Next, as shown in FIG. 3B, the lens array 30 is attached to the surface 21 of the substrate 20 so that each optical axis Ax of the lens portion 32 of the lens array 30 faces the through hole 23.

  When positioning the lens array 30 at a predetermined position on the substrate 20, positioning concave portions and positioning convex portions are provided on the substrate 20 and the lens array 30, and these are brought into contact with each other, or are fitted. It can be exemplified that a reference mark is attached on the surface 21 and the lens array 30 is arranged with reference to this mark. In such a positioning step, it is sufficient that the optical axis Ax of the lens portion 32 passes through the through hole 23, which is lower than the positioning accuracy when the photoelectric conversion element 40 described later is attached. The positioning accuracy may be sufficient, and may be appropriately selected from the viewpoint of reducing the member cost and the mounting cost.

  The attachment of the lens array 30 to the substrate 20 can be exemplified by applying an adhesive to the contact surface of the substrate attachment portion 34 with the substrate 20 or fixing it by vibration welding of bumps. Alternatively, a metal layer (first metal layer, second metal layer) is provided on the surface of the substrate mounting portion 34 that contacts the substrate 20 and the surface of the substrate 20 that contacts the substrate mounting portion 34, and these metal layers are thermocompression bonded. May be.

  Next, the photoelectric conversion element 40 is positioned with respect to the lens part 32 so that the optical axis Ax of the lens part 32 and the optical axis Ay of the photoelectric conversion element 40 coincide with each other, and the lens array 30 is moved from the back surface 22 side of the substrate 20. It attaches and the photoelectric conversion module component 10 shown in FIG. 2 is obtained. As shown in FIG. 1, when the step portion 26 is provided in the through hole 23 of the substrate 20, the mounting surface 41 of the photoelectric conversion element 40 can be attached to the step portion 26.

  In order to position the photoelectric conversion element 40 with respect to the lens unit 32 by matching the optical axis Ax of the lens unit 32 and the optical axis Ay of the photoelectric conversion unit 40, the following method can be used.

  For example, when the photoelectric conversion element 40 is a light emitting element, the light emitting element 40 is caused to emit light, the intensity of light is observed from the fiber side lens element 31 side of the lens array 30, and the light emitting element 40 is located at the position where the light intensity is maximum. Is attached to the substrate 20. On the contrary, when the photoelectric conversion element 40 is a light receiving element, light is incident from the fiber side lens element 31, and the light emitting element 40 is placed at the position where the electric signal from the light receiving element 40 receiving the light becomes maximum. 20 may be attached.

  In addition to the above method, an image including the light emitting / receiving surface 41 of the photoelectric conversion element 40 is acquired from the fiber side lens element 31 of the lens array 30 by a camera or the like, and the light receiving / emitting surface 41 is located at the center of the lens. The photoelectric conversion element 40 can be attached to the substrate 20. In this method, the photoelectric conversion element 40 can be attached to the substrate 20 using the same method regardless of whether the photoelectric conversion element 40 is a light emitting element or a light receiving element.

  In the above process, for example, a step portion 26 is provided as a first positioning portion on the back surface 22 of the substrate 20 in advance, and a photoelectric conversion element 40 is used as a second positioning portion that contacts the first positioning portion 26 on the photoelectric conversion element 40. The contact surface 43 between the step 40 and the step portion 26 is preferably provided on the same side as the light emitting / receiving surface 41. After the second positioning portion 43 is brought into contact with the first positioning portion 26 and the respective positions are adjusted roughly, the light receiving / emitting surface 41 of the photoelectric conversion element 40 is positioned with respect to the lens portion 32 as described above. Can do.

  That is, since the first positioning portion 26 and the second positioning portion 43 for coarse adjustment do not require high-precision processing, it is possible to reduce the mounting cost while suppressing an increase in member cost. The degree of freedom in optimizing the process can be improved. The second positioning portion 43 is only required to be able to roughly adjust the positions of the lens array 30 and the photoelectric conversion element 40 by contacting the first positioning portion 26 and the stepped portion 26 and the contact surface 43 are inclined surfaces. It may be formed.

  Further, the attachment of the photoelectric conversion element 40 to the substrate 20 can be exemplified by applying an adhesive to the contact surfaces of both, or fixing by bump welding or the like. Alternatively, a metal layer (first metal layer, second metal layer) may be provided on the contact surfaces of the two, and the metal layers may be thermocompression bonded.

  In the case where the photoelectric conversion element 40 includes a plurality of light receiving and emitting surfaces 41, the step of matching the optical axis Ax of the lens unit 32 and the optical axis Ay of the photoelectric conversion element 40 described above is an array of the photoelectric conversion elements 40. If the photoelectric conversion element 40 is positioned with respect to the lens array 30 from the back surface 22 side of the substrate 20 so that the optical axes coincide only with respect to the light emitting / receiving surfaces 41 located at both ends of the light emitting / receiving surface 41 arranged at The optical axes of all the light emitting / receiving surfaces 41 can be matched at once. This is because the lens unit 32 and the photoelectric conversion element 40 are subjected to high-precision processing and employ a process of directly matching the optical axes of the two. In this way, the mounting cost can be further reduced as compared with the case where the optical axes are individually adjusted for all light receiving and emitting surfaces.

Second Embodiment
FIG. 4 is a side sectional view showing a photoelectric conversion module component 10a according to the second embodiment of the present invention. In the photoelectric conversion module component 10a according to the second embodiment, the through hole 23a of the substrate 20 is cylindrical, the alignment fitting portions 35 and 45 are provided in the lens array 30 and the photoelectric conversion element 40, and The photoelectric conversion element 40 is the same as the first embodiment except that the photoelectric conversion element 40 is directly attached to the lens array 30 except for the first embodiment. In addition, about the structure similar to 1st Embodiment, the detailed description is abbreviate | omitted using the code | symbol similar to 1st Embodiment.

  In the photoelectric conversion module component 10a according to the second embodiment, the photoelectric conversion element 40 is inserted into a cylindrical through-hole 23 provided with a stepless inner wall provided in the substrate 20, and the photoelectric conversion element 40 is aligned. The fitting portion 45 is fitted to the alignment fitting portion 35 of the lens array 30.

  A positioning fitting portion (first alignment portion) 35 is provided on the lens array 30 on the side where the lens portion 32 is formed. In the present embodiment, the alignment fitting portion 35 is formed as a tapered surface formed on the inner peripheral side of the substrate attachment portion 34 for each lens portion 32. The photoelectric conversion element 40 has a convex shape on the mounting surface 42 so that a region including the light emitting / receiving surface 41 is convex, and an alignment fitting portion 45 (second second) around the light emitting / receiving surface 41. A tapered surface is formed as an alignment portion. The alignment fitting portions 35 and 45 are provided so that the optical axis Ax of the lens portion 32 and the optical axis Ay of the photoelectric conversion element 40 coincide with each other when they are fitted together.

FIG. 5 is an explanatory view showing a method of manufacturing the photoelectric conversion module component 10a according to the second embodiment.
First, as shown in FIG. 5A, a substrate 20 having a through hole 23 having a single inner diameter is prepared. For example, the through hole 23 can be easily formed in the glass epoxy substrate 20 by drilling such as a drill.

  Next, as shown in FIG. 4B, the lens array 30 is attached to the surface 21 of the substrate 20 so that each optical axis Ax of the lens portion 32 of the lens array 30 faces the through hole 23. Similar to the manufacturing method of the first embodiment described above, this process does not require high positioning accuracy.

  Next, the photoelectric conversion element 40 is inserted into the through hole 23 of the substrate 20, and the alignment fitting of the photoelectric conversion element 40 is performed so that the optical axis Ax of the lens portion 32 and the optical axis Ay of the photoelectric conversion element 40 coincide. The joining portion 45 is brought into contact with and fitted to the alignment fitting portion 35 of the lens array 30, and the photoelectric conversion element 40 is aligned and fixed to the lens array 30.

  When the alignment fitting portion 35 is provided in the lens array 30, the alignment fitting is performed for each lens portion 32 at the time of injection molding of the lens array 30 with high positioning accuracy and dimensional accuracy using a precision mold or the like. The part 35 can be formed simultaneously. Further, when the alignment fitting portion 45 is provided in the photoelectric conversion element 40, it is high in the process of forming the light receiving / emitting surface 41 of the photoelectric conversion element 40 by a known masking, etching, etc. as a semiconductor thin film forming technique. It can be formed with positioning accuracy and dimensional accuracy. That is, the mounting cost can be reduced without increasing the member cost.

  Further, a metal layer is formed on the surfaces of the alignment fitting portion 35 of the lens array 30 and the alignment fitting portion 45 of the photoelectric conversion element 40, and heat and pressure are applied to these metal layers by applying heat and stress. It is preferable. By not interposing a bump, solder, or adhesive in the fitting portion, the photoelectric conversion element 40 can be attached to the lens array 30 with high accuracy without being affected by the bump protrusion height and the application amount of the solder or adhesive. In order to form such a metal layer on the lens array 30, it is preferable to manufacture the lens array 30 together with the metal layer by insert molding.

  In the photoelectric conversion module component 10a according to the second embodiment, the alignment fitting portions 35 and 45 are formed directly on the lens array 30 and the photoelectric conversion element 40 with high positioning accuracy and dimensional accuracy, respectively. Therefore, the photoelectric conversion element 40 can be easily and accurately aligned with the lens portion 32 by using the alignment fitting portions 35 and 45 formed with high positioning accuracy and dimensional accuracy.

  Therefore, it is not necessary to align the photoelectric conversion element 40 with respect to the lens array 30 while measuring the intensity of the optical signal or the intensity of the electric signal as in the first embodiment described above or photographing with the camera. That is, in addition to the process of attaching the lens array 30 that does not require positioning accuracy to the substrate 20, the process of attaching the photoelectric conversion element 40 to the lens array 30 eliminates the need for a complicated attachment method or attachment device, thereby reducing the manufacturing cost. Can do.

  Further, in the photoelectric conversion module component 10 a according to the second embodiment, the alignment fitting portions 45 and 35 are provided in the photoelectric conversion element 40 and the lens array 30, respectively, and the photoelectric conversion element 40 is directly attached to the lens array 30. It is attached. Therefore, compared with the case where the photoelectric conversion element 40 is attached to the lens array 30 via the substrate 20, the photoelectric conversion module component 10 a according to the second embodiment attaches the photoelectric conversion element 40 to the lens array 30 without the substrate 20. Since it is attached, dimensional errors and positioning errors do not accumulate, and alignment accuracy is improved.

  Moreover, since the step part 26 does not need to be provided in the inner wall of the through-hole 23 of the board | substrate 20, formation of the through-hole 23 becomes easy. Even in this case, the light emitting / receiving surface 41 can be brought closer to the lens portion 32, and the length of the protrusion of the photoelectric conversion element 40 opposite to the light receiving / emitting surface 41 from the back surface 22 of the substrate 20 is reduced. be able to.

  In the illustrated example, as the fitting portions 35 and 45, the alignment fitting portions 35 and 45 are formed so that the lens array 30 has a concave portion and the photoelectric conversion element 40 has a convex portion. The alignment fitting portions 35 and 45 may be formed so that a convex portion is provided in 30 and a concave portion is provided in the photoelectric conversion element 40. Further, the shape of the fitting portions 35 and 45 is not limited to the illustrated tapered shape, and may be a shape such as an unevenness.

1: photoelectric conversion module, 2: optical fiber, 3: optical connector, 10: parts for photoelectric conversion module, 20: substrate, 21: front surface, 22: back surface, 23: through hole, 24, 25: inner wall, 26: step Part (first positioning part), 30: lens array (lens body), 31: fiber side lens element, 32: element side lens element (lens part), 33: reflection part, 34: substrate mounting part, 35: first Alignment fitting part, Ax: Optical axis of lens part, 40: Photoelectric conversion element, 41: Light emitting / receiving surface, 42: Mounting surface, 45: Second alignment fitting part (second positioning part), Ay: Photoelectric Optical axis of conversion element

Claims (10)

A first step of preparing a substrate having a front surface and a back surface and having a through-hole penetrating from the front surface to the back surface, a photoelectric conversion element having a light receiving portion or a light emitting portion, and a lens element having a plurality of lens portions When,
A second step of attaching the lens element to the substrate from the surface side of the substrate such that each optical axis of the lens portion faces the through hole;
Positioning the photoelectric conversion element with respect to the lens element from the back side of the substrate so that the optical axis of the lens unit and the optical axis of the light receiving unit or the light emitting unit of the photoelectric conversion element coincide with each other. Process,
The manufacturing method of the components for photoelectric conversion modules characterized by including. In the first step, the second positioning portion is formed on the same side as the lens element in which the first positioning portion is formed on the back surface of the substrate and the light receiving portion or the light emitting portion for each lens portion. And a photoelectric conversion element,
In the third step, the second positioning portion is brought into contact with the first positioning portion, and the light receiving portion or the light emitting portion of each of the photoelectric conversion elements is positioned with respect to the lens portion. The manufacturing method of the components for photoelectric conversion modules of Claim 1. In the first step, the lens element in which a first metal layer is formed on the same side as the lens unit or the second positioning unit of the substrate, and a second metal layer on the same side as the light receiving unit or the light emitting unit. Prepared the photoelectric conversion element,
3. The photoelectric conversion module according to claim 1, wherein in the third step, the photoelectric conversion element is fixed to the lens element by thermocompression bonding the first metal layer and the second metal layer. Method of manufacturing parts.   The method for manufacturing a component for a photoelectric conversion module according to claim 3, wherein the first metal layer is insert-molded together with the lens element.   5. The method of manufacturing a component for a photoelectric conversion module according to claim 1, wherein the lens element is a lens array in which a plurality of the lens portions are arranged at equal intervals. The photoelectric conversion element includes a plurality of the light receiving units or light emitting units arranged in a row,
In the third step, the photoelectric conversion element is positioned with respect to the lens element from the back surface side of the substrate so that only the light receiving part or the light emitting part located at both ends of the row is aligned with the optical axis. The method for producing a component for a photoelectric conversion module according to claim 1, wherein: A fourth step of preparing a lens element having a plurality of lens portions and a first alignment portion on the same side, and a photoelectric conversion element having a light receiving portion or a light emitting portion and a second alignment portion on the same side;
The second alignment unit is brought into contact with the first alignment unit so that the optical axis of the lens unit coincides with the optical axis of the light receiving unit or the light emitting unit of the photoelectric conversion element. A fifth step of aligning with the lens element;
The manufacturing method of the components for photoelectric conversion modules characterized by including. In the fourth step, the lens element and the photoelectric conversion element in which the first metal layer and the second metal layer are formed on the surfaces of the first alignment unit and the second alignment unit are prepared,
The component for a photoelectric conversion module according to claim 7, wherein, in the fifth step, the first metal layer and the second metal layer are thermocompression bonded to fix the photoelectric conversion element to the lens element. Production method.   The method for manufacturing a component for a photoelectric conversion module according to claim 8, wherein in the fourth step, the lens element is insert-molded together with the first metal layer.   The method for manufacturing a component for a photoelectric conversion module according to claim 7, wherein the lens element is a lens array in which a plurality of the lens portions are arranged at equal intervals.

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