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JP2012132099A - Niobium-based alloy heat-resistant material - Google Patents

Niobium-based alloy heat-resistant material Download PDF

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JP2012132099A
JP2012132099A JP2012023563A JP2012023563A JP2012132099A JP 2012132099 A JP2012132099 A JP 2012132099A JP 2012023563 A JP2012023563 A JP 2012023563A JP 2012023563 A JP2012023563 A JP 2012023563A JP 2012132099 A JP2012132099 A JP 2012132099A
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niobium
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Toshio Narita
敏夫 成田
Shigenari Hayashi
重成 林
Tsunehisa Fukumoto
倫久 福本
Kazuyuki Sakamoto
和志 坂本
Akio Kasama
昭夫 笠間
Ryohei Tanaka
良平 田中
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
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    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft

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Abstract

PROBLEM TO BE SOLVED: To provide a niobium-based alloy heat-resistant material having an alloy film formed thereon which exhibits excellent intercepting performance to oxygen and is less susceptible to modification owing to diffusion.SOLUTION: The niobium-based alloy heat-resistant material includes a first alloy film having a composition represented by general formula ReMR(M is one or more elements of Cr and Si; R is one or more elements among Nb, Mo, W, Hf, Zr, and C; a and b are atom ratio of M and R), on the surface of a substrate, and a second alloy film having a composition represented by general formula QSi(Q is one or more elements among Mo, W and Nb; c is atom ratio of Si), on the surface of the first alloy film.

Description

本発明は、ガスタービン、ジェットエンジン等に用いられる耐熱材料に係り、とくにニオブ基合金の基材表面に高温酸化を抑制するための皮膜が形成されたニオブ基合金の耐熱材料に関する。   The present invention relates to a heat-resistant material used for a gas turbine, a jet engine, and the like, and more particularly to a heat-resistant material of a niobium-based alloy in which a coating for suppressing high-temperature oxidation is formed on the surface of a niobium-based alloy substrate.

近年、発電用ガスタービンの運転温度の一層の高温化が求められ、従来からタービン部材として多用されているNi基合金よりも、使用温度限界の高い新たな耐熱材料が必要となっている。このような材料の一つとして、ニオブ(Nb)系の耐熱材料、例えば固溶強化型又は析出強化型のNb合金やNb−Al系金属間化合物等(本発明では、これらをニオブ基合金という)が注目されている。   In recent years, there has been a demand for a further increase in the operating temperature of a gas turbine for power generation, and a new heat-resistant material having a higher operating temperature limit is required than Ni-based alloys that have been widely used as turbine members. One of such materials is a niobium (Nb) -based heat-resistant material such as a solid solution strengthened or precipitation strengthened Nb alloy or Nb-Al intermetallic compound (in the present invention, these are called niobium-based alloys). ) Is attracting attention.

これらのニオブ基合金は高温強度に優れるが、いずれも高温域例えば800℃以上の温度域ではきわめて酸化され易く、ガスタービンのような高温の酸化性雰囲気下でそのまま使用することは困難であり、耐酸化を目的とするコーティングについて種々の検討がなされている。   Although these niobium-based alloys are excellent in high-temperature strength, they are all easily oxidized in a high-temperature range, for example, a temperature range of 800 ° C. or higher, and are difficult to use as they are in a high-temperature oxidizing atmosphere such as a gas turbine. Various studies have been made on coatings aimed at oxidation resistance.

従来から、高温酸化性雰囲気下で使用する金属部材の耐熱・耐酸化被覆として、CrやAlの拡散層を形成する方法や、セラミックコーティングする方法が検討されている。とくにNi基合金においては、熱遮蔽コーティング(Thermal Ba-rrier Coating:TBC)と呼ばれる方法が主流になっている。これは基材表面に金属結合層と、その表面にセラミックスの遮熱層を積層してなるもので、金属結合層にはMCrAlY合金(M=Ni,Coなど)が、遮熱層にはZrO2を主成分とするセラミックスが用いられることが多い。 Conventionally, a method of forming a diffusion layer of Cr or Al or a method of ceramic coating has been studied as a heat-resistant / oxidation-resistant coating for a metal member used in a high-temperature oxidizing atmosphere. In particular, in Ni-based alloys, a method called thermal barrier coating (TBC) has become mainstream. This is formed by laminating a metal bond layer on the substrate surface and a ceramic heat shield layer on the surface. The metal bond layer is MCrAlY alloy (M = Ni, Co, etc.), and the heat shield layer is ZrO. Ceramics mainly composed of 2 are often used.

ニオブ基合金の耐酸化被覆としては、Irの表面被覆層、又はIrの表面被覆層とその下側にTa,Re,Wのうちの1種以上を主成分とする拡散防止層とが形成されたNb合金耐熱部材が開示されている(下記特許文献1報)。また、基材表面にIrを真空蒸着すると同時にAlイオン照射を行い、Ir−Al合金からなる被覆層を形成する耐酸化被覆層の製造方法が開示されている(下記特許文献2)。   As the oxidation-resistant coating of the niobium-based alloy, an Ir surface coating layer or an Ir surface coating layer and a diffusion prevention layer mainly composed of one or more of Ta, Re, and W are formed below the Ir surface coating layer. In addition, a heat-resistant Nb alloy member is disclosed (the following Patent Document 1). Also disclosed is a method for producing an oxidation-resistant coating layer in which Ir is vacuum-deposited on the surface of the substrate and simultaneously irradiated with Al ions to form a coating layer made of an Ir—Al alloy (Patent Document 2 below).

特開平10−140333号公報Japanese Patent Laid-Open No. 10-14333 特開平10−140347号公報Japanese Patent Laid-Open No. 10-140347

一般にセラミックスの皮膜は、それ自体の靭性や基材との密着性が不十分なため、熱応力により亀裂や剥離を生じることが多く、耐久性に問題が残されている。前述のTBCにおいても、酸素の遮断は主に金属結合層において行われている。したがって、耐酸化を目的とする皮膜は、基材との密着性の高い合金皮膜であって、上記の金属結合層と同様な酸素と窒素などの非金属成分の遮断性能を有するものであることが望ましい。   In general, a ceramic film is insufficient in its toughness and adhesiveness to a base material, and thus often cracks or peels off due to thermal stress, leaving a problem in durability. Also in the above-described TBC, oxygen is blocked mainly in the metal bonding layer. Therefore, the coating for the purpose of oxidation resistance is an alloy coating with high adhesion to the substrate, and has the same ability to block non-metallic components such as oxygen and nitrogen as the above-mentioned metal bonding layer. Is desirable.

さらに、本発明の対象であるNb基合金は、Ni基合金よりもかなり高い使用温度、例えば1400℃を越えるような温度での使用を目標とするものである。かかる高温域では、皮膜と基材間の元素の拡散が避けられず、そのため比較的短時間で皮膜が変質して、その本来の機能を失うことが多い。したがって、耐酸化皮膜の耐久性を確保するには、できる限り拡散を抑制するとともに、多少の拡散があっても、皮膜の変質が軽微な被覆構造にする必要がある。   Furthermore, the Nb-based alloy that is the subject of the present invention is intended to be used at a considerably higher operating temperature than that of the Ni-based alloy, for example, exceeding 1400 ° C. In such a high temperature range, the diffusion of elements between the film and the substrate is unavoidable, so the film is often altered in a relatively short time and loses its original function. Therefore, in order to ensure the durability of the oxidation-resistant film, it is necessary to suppress the diffusion as much as possible, and to form a coating structure with a slight alteration of the film even if there is some diffusion.

本発明は、上記の事情に鑑みてなされたものであって、ニオブ基合金の基材表面に、酸素の遮断性能に優れ、かつ拡散による変質が起りにくい合金皮膜が形成されたニオブ基合金の耐熱材料を提供することを目的とする。   The present invention has been made in view of the above circumstances, and is a niobium-based alloy in which an alloy film is formed on the surface of a base material of the niobium-based alloy that has excellent oxygen blocking performance and is unlikely to be altered by diffusion. An object is to provide a heat-resistant material.

上記課題を解決するための本発明は、
(1)ニオブ基合金の基材表面に、実質的に一般式Re1-a-bab(式中、MはCr,Siのうちの1種以上の元素、RはNb,Mo,W,Hf,Zr,Cのうちの1種以上の元素で、a,bはそれぞれM,Rの原子比である)で表される組成を有する第一層の合金皮膜が形成され、さらにその表面に実質的に一般式Q1-cSic(式中、QはMo,W,Nbのうちの1種以上の元素で、cはSiの原子比である)で表される組成を有する第二層の合金皮膜が形成されてなるニオブ基合金の耐熱材料である。
The present invention for solving the above problems is as follows.
(1) on the substrate surface of the niobium-based alloy, substantially formula Re 1-ab M a R b ( wherein, M represents Cr, 1 or more elements of Si, R is Nb, Mo, W , Hf, Zr, and C, wherein a and b are atomic ratios of M and R, respectively, and a first layer alloy film is formed. (wherein, Q is Mo, W, at least one element of Nb, c is a is atomic ratio of Si) substantially formula Q 1-c Si c to a having a composition represented by It is a heat-resistant material of a niobium-based alloy formed by forming a two-layer alloy film.

上記のニオブ基合金の耐熱材料において、原子比aは0.10以上、原子比bは0.01〜0.50、a+bは0.95以下であり、かつ原子比cは0.05〜0.95であることが好ましい。   In the heat-resistant material of the niobium-based alloy, the atomic ratio a is 0.10 or more, the atomic ratio b is 0.01 to 0.50, a + b is 0.95 or less, and the atomic ratio c is 0.05 to 0. .95 is preferred.

また、(2)前記ニオブ基合金が、Nbをベースとして少なくともMoとWのうちの1種以上とSiとを含有し、かつ必要に応じてCr,Hf,Zr,Cのうちの1種以上を含有する合金であり、前記第一層の合金皮膜中の元素MがSiである前項(1)記載のニオブ基合金の耐熱材料である。   (2) The niobium-based alloy contains Nb as a base and contains at least one of Mo and W and Si, and optionally one or more of Cr, Hf, Zr, and C. The niobium-based alloy heat-resistant material according to item (1), wherein the element M in the alloy film of the first layer is Si.

上記のニオブ基合金の耐熱材料において、第二層の合金皮膜中の元素Qは、MoとWのうちの1種以上であることが好ましい。   In the heat resistant material of the niobium-based alloy, the element Q in the alloy film of the second layer is preferably one or more of Mo and W.

上記のように、本発明によりニオブ基合金の基材表面に高温酸化を抑制する効果の大きい被覆が形成されたニオブ基合金耐熱材料を提供することが可能になった。この耐酸化被覆は、第二層皮膜中のSiの酸化により酸化物が再生して、雰囲気中の酸素や窒素等の非金属元素を遮断する作用を維持する自己補修の機能を有するとともに、第一層皮膜により元素の拡散を抑制するため、1200℃以上の高温域に長時間保持してもほとんど皮膜が変質せず、きわめて耐酸化性・耐久性に優れている。   As described above, according to the present invention, it is possible to provide a niobium-based alloy heat-resistant material in which a coating having a large effect of suppressing high-temperature oxidation is formed on the surface of a niobium-based alloy substrate. This oxidation-resistant coating has a self-repairing function that maintains the action of regenerating the oxide by the oxidation of Si in the second layer film and blocking non-metallic elements such as oxygen and nitrogen in the atmosphere. In order to suppress the diffusion of elements by a single layer coating, the coating hardly changes even when kept in a high temperature range of 1200 ° C. or higher for a long time, and is extremely excellent in oxidation resistance and durability.

図1は、本発明のニオブ基合金耐熱材料の耐酸化被覆の構造を示す断面模式図である。この耐酸化被覆は2層の合金皮膜からなり、第二層の合金皮膜3は、その表面に酸化物が生成することにより、雰囲気中の酸素や窒素等の非金属元素を遮断することを主な目的としている。同時に、合金皮膜3は酸化物のもとになる金属元素を含有していて、表面に生成した酸化物がはく離等により脱落を起こした場合は直ちにその金属元素が酸化することにより酸化物が再生して、雰囲気中の酸素や窒素等の非金属元素を遮断する作用を維持する自己補修の機能を果たす。一方、第一層の合金皮膜2は基材1と第二層の合金皮膜3間の拡散防止を主な目的とする。   FIG. 1 is a schematic cross-sectional view showing the structure of an oxidation-resistant coating of the niobium-based alloy heat-resistant material of the present invention. This oxidation resistant coating is composed of two layers of alloy film, and the second layer of alloy film 3 mainly blocks nonmetallic elements such as oxygen and nitrogen in the atmosphere by forming oxides on the surface thereof. With a purpose. At the same time, the alloy film 3 contains a metal element that becomes an oxide, and when the oxide generated on the surface falls off due to peeling or the like, the metal element is immediately oxidized to regenerate the oxide. Thus, it performs a self-repair function that maintains the action of blocking nonmetallic elements such as oxygen and nitrogen in the atmosphere. On the other hand, the first layer alloy film 2 is mainly intended to prevent diffusion between the base material 1 and the second layer alloy film 3.

まず、第二層皮膜3の構成物質とその機能について説明する。この皮膜は、一般式Q1-cSic(ここで、QはMo,W及びNbよりなる群から選ばれた1種又は2種以上の元素、Siはシリコンで、cはSiの原子比である。)で表される組成を有するものである。 First, the constituent materials and functions of the second layer coating 3 will be described. This coating has the general formula Q 1-c Si c (here, Q is Mo, 1 or two or more elements selected from the group consisting of W and Nb, Si is silicon, c is the atomic ratio of Si It has a composition represented by.

Siは、この耐熱材料が高温の酸化性雰囲気下で酸化された際に、緻密な酸化物皮膜を形成するために必要な元素である。Qは、Siとの間に高温で安定な相(合金又は金属間化合物)を形成する元素で、第二層皮膜の耐熱性・耐久性を確保する上で不可欠な元素である。すなわち、Mo,W,Nbのシリサイド又はこれらの混合物もしくは複合化合物は、いずれも融点が2,000℃以上の高温で安定な相であり、かつこの相が酸化されるとSiO2単体の緻密な酸化物皮膜が形成される。 Si is an element necessary for forming a dense oxide film when this heat-resistant material is oxidized in a high-temperature oxidizing atmosphere. Q is an element that forms a stable phase (alloy or intermetallic compound) with Si at high temperatures, and is an essential element for ensuring the heat resistance and durability of the second layer coating. That, Mo, W, silicides or mixtures or complex compounds of these Nb are both stable phase at a high temperature of at least 2,000 ° C. melting point, and this phase is oxidized SiO 2 single dense An oxide film is formed.

次に、第一層皮膜2の構成物質及び機能について説明する。この皮膜は一般式Re1-a-bab(ここで、Reはレニウムで、MはCr及びSiよりなる群から選ばれた1種以上の元素、RはNb,Mo,W,Hf,Zr,Cよりなる群から選ばれた1種又は2種以上の元素で、a,bはそれぞれM,Rの原子比である。)で表される組成を有する。 Next, constituent materials and functions of the first layer coating 2 will be described. The coating by the formula Re 1-ab M a R b ( where, Re is rhenium, M is at least one element selected from the group consisting of Cr and Si, R is Nb, Mo, W, Hf, 1 or 2 or more elements selected from the group consisting of Zr and C, wherein a and b are atomic ratios of M and R, respectively.

Reは拡散防止の主要な役割をする元素である。元素Mは、主に第一層皮膜と第二層皮膜に含まれ(一部基材中に含まれてもよい)、第一層皮膜と第二層皮膜間(及び第一層皮膜と基材間)の拡散を軽減する上で有効である。また、元素Rは、主に第一層皮膜と基材に含まれ(一部第二層皮膜中に含まれてもよい)、第一層皮膜と基材間(及び第一層皮膜と第二層皮膜間)の拡散を軽減する上で有効である。   Re is an element that plays a major role in preventing diffusion. The element M is mainly contained in the first layer coating and the second layer coating (some may be included in the base material), and between the first layer coating and the second layer coating (and the first layer coating and the base layer). This is effective in reducing the diffusion between materials. The element R is mainly contained in the first layer coating and the base material (some may be included in the second layer coating), and between the first layer coating and the base material (and the first layer coating and the first layer coating). This is effective in reducing the diffusion between the two-layer coatings.

また、元素M及びRは、いずれもReとの間に高温で安定な相を形成する元素であり、その相そのものが高い融点を持つことから第一層皮膜自体が分解したり拡散して失われることがなく、更に他の元素の拡散係数が小さいことから、拡散防止の機能を発揮する。   The elements M and R are elements that form a stable phase with Re at a high temperature. Since the phase itself has a high melting point, the first layer film itself is decomposed or diffused and lost. In addition, since the diffusion coefficient of other elements is small, the function of preventing diffusion is exhibited.

第一層皮膜を3元系以上の組成物で構成する理由は、第二層皮膜中の元素のみならず、基材中の元素も予め第一層皮膜に含ませておき、しかも成分ごとに各相における化学ポテンシャルを等しくしておくことによって、拡散が抑制され、耐酸化被覆の分解・変質を防ぐことで耐久性が向上するためである。   The reason why the first layer film is composed of a ternary or higher composition is that not only the elements in the second layer film but also the elements in the base material are included in the first layer film in advance, and for each component. This is because by making the chemical potentials equal in each phase, diffusion is suppressed, and durability is improved by preventing decomposition and alteration of the oxidation-resistant coating.

なお、第一層及び第二層の合金皮膜は、実質的に上記の組成を有するものであればよく、不可避的不純物元素を含むものであってもよい。   In addition, the alloy film of a 1st layer and a 2nd layer should just have said composition, and may contain an unavoidable impurity element.

図2は、本発明の耐熱材料を高温大気に曝露した後の皮膜の変化を示す断面模式図である。図に見られるように、第二層の合金皮膜3の表面に緻密な酸化物層4aが形成される。この酸化物層4aは、SiO2単体からなっており、層厚が小さくても、元素の遮断能は大きい。 FIG. 2 is a schematic cross-sectional view showing changes in the film after the heat-resistant material of the present invention is exposed to high-temperature air. As can be seen in the figure, a dense oxide layer 4a is formed on the surface of the alloy film 3 of the second layer. The oxide layer 4a is made of SiO 2 alone, and has a high element blocking ability even if the layer thickness is small.

この状態で継続して使用した時に、第一層皮膜2は、Reを含む高温できわめて安定な相であり、拡散を抑制する効果が大きい。そのため、第二層皮膜3の分解・変質を防止することができ、最表面の酸化物層4aに亀裂・剥離が生じても、第二層皮膜3表面に再び酸化物層が形成されるため、自己修復性を有する。こうして、耐酸化被覆の耐久性が確保される。   When continuously used in this state, the first layer film 2 is a very stable phase at a high temperature containing Re and has a great effect of suppressing diffusion. Therefore, decomposition / degeneration of the second layer coating 3 can be prevented, and even if the outermost oxide layer 4a is cracked or separated, an oxide layer is formed again on the surface of the second layer coating 3. Has self-healing properties. Thus, the durability of the oxidation resistant coating is ensured.

本発明において、第一層の合金皮膜中の元素Mの原子比aは0.10以上であることが好ましい。これ未満では、第二層皮膜から第一層皮膜への元素Mの拡散が多くなるためである。また、元素Rの原子比bは0.01〜0.50であることが好ましい。bが0.01未満では、基材から第一層皮膜への元素Rの拡散を抑制するという目的が達せられず、bが0.50を越えると、相対的に第一層皮膜中のRe及びMの含有量が少くなって好ましくないためである。さらに、a+bは0.95以下であることが好ましい。これを越えるとReの量が少な過ぎて、拡散防止機能が不十分となるためである。   In the present invention, the atomic ratio a of the element M in the alloy film of the first layer is preferably 0.10 or more. If it is less than this, the diffusion of the element M from the second layer coating to the first layer coating increases. The atomic ratio b of the element R is preferably 0.01 to 0.50. If b is less than 0.01, the purpose of suppressing the diffusion of element R from the base material to the first layer film cannot be achieved. If b exceeds 0.50, the Re This is because the content of M and M is not preferable. Further, a + b is preferably 0.95 or less. If this value is exceeded, the amount of Re is too small, and the diffusion preventing function becomes insufficient.

また、第二層の合金皮膜中のSiの原子比cは、0.05〜0.95であることが好ましい。これが0.05未満では、緻密な酸化物皮膜を形成するという機能が不十分となり、これが0.95を越えると、相対的に元素Qの量が少くなって、高温で安定な相を形成することができなくなるためである。   Moreover, it is preferable that the atomic ratio c of Si in the alloy film of the second layer is 0.05 to 0.95. If this is less than 0.05, the function of forming a dense oxide film becomes insufficient. If this exceeds 0.95, the amount of element Q is relatively small, and a stable phase is formed at high temperatures. It is because it becomes impossible.

本発明者らは、ニオブ基合金の機械的特性について検討し、Nb−Mo又はNb−Wの2元系合金やNb−Mo−Wの3元系合金が高温強度と靭性に優れ、タービン部材として好適なことを知見した。合金元素の含有量の適正範囲は、Moが1〜30at%、Wが1〜15at%である。   The present inventors have studied the mechanical properties of niobium-based alloys, and Nb—Mo or Nb—W binary alloys and Nb—Mo—W ternary alloys are excellent in high-temperature strength and toughness, and are turbine members. As a result, it was found that it is preferable. Appropriate ranges for the alloy element content are 1 to 30 at% for Mo and 1 to 15 at% for W.

また、本発明者らは、これらの2元系又は3元系合金の耐酸化被覆について種々検討し、ニオブ基合金がさらにSiを含有する場合に、第二層皮膜をMo,W,Nbのシリサイドで構成することにより、きわめて優れた耐酸化性を示すことを見出した。   In addition, the present inventors have studied various oxidation-resistant coatings of these binary or ternary alloys, and when the niobium-based alloy further contains Si, the second layer film is made of Mo, W, or Nb. It has been found that the composition is composed of silicide and exhibits extremely excellent oxidation resistance.

すなわちこの耐熱材料は、基材がNb−(Mo,Wのうちの1種以上)−Si系合金であり、第一層の合金皮膜が、実質的にReとSiと(Mo,W,Nb)のうちの1種以上とからなるものであり、かつ第二層の合金皮膜が、実質的にSiと(Mo,W,Nb)のうちの1種以上とからなるものである。その中でも、とくに第二層の合金皮膜が、実質的にSiと(Mo,W)のうちの1種以上とからなるものであることが好ましい。なお基材は、必要に応じてCr,Hf,Zr,Cのうちの1種以上を含有してもよい。   That is, in this heat-resistant material, the base material is an Nb- (one or more of Mo, W) -Si alloy, and the alloy film of the first layer is substantially composed of Re and Si (Mo, W, Nb). ) And the alloy film of the second layer substantially consists of Si and one or more of (Mo, W, Nb). Among these, it is preferable that the alloy film of the second layer is substantially composed of Si and one or more of (Mo, W). In addition, a base material may contain 1 or more types of Cr, Hf, Zr, and C as needed.

第一層皮膜中のReは10〜60at%,(Mo+W+Nb)は10〜60at%、Siは1〜50at%であることが好ましい。また第二層皮膜中の(Mo+W+Nb)は20〜60at%であることが好ましい。   The Re in the first layer film is preferably 10 to 60 at%, (Mo + W + Nb) is preferably 10 to 60 at%, and Si is preferably 1 to 50 at%. Further, (Mo + W + Nb) in the second layer film is preferably 20 to 60 at%.

本発明において、基材表面に合金皮膜を形成する方法は特に限定を要せず、例えばPVD法、CVD法、溶射法、電解被覆法等のいずれであってもよく、また、これらを組み合わせて用いてもよい。また、第一層及び第二層の合金皮膜の厚みについても特に限定を要しないが、通常は1〜100μm程度とする。皮膜厚みが過小であれば、耐酸化や拡散防止の機能が不十分になり、膜厚が過大であれば熱応力が大きくなるので、これらを勘案して適正な膜厚を選択すればよい。   In the present invention, the method for forming the alloy film on the surface of the substrate is not particularly limited, and may be any of PVD, CVD, thermal spraying, electrolytic coating, and the like. It may be used. Further, the thickness of the alloy film of the first layer and the second layer is not particularly limited, but is usually about 1 to 100 μm. If the film thickness is too small, the functions of oxidation resistance and diffusion prevention are insufficient, and if the film thickness is excessive, the thermal stress increases. Therefore, an appropriate film thickness may be selected in consideration of these.

Nb−5Mo−5W−5Cr−16Si(モル%)の組成を持つNb基合金をアーク溶解法によりAr雰囲気中で溶製した。原料としては、Nbについては99.99%、Mo、W、CrとSiについては99.9%の粉末あるいは粒状のものを用いた。溶製した合金を1気圧のAr気流中で、1700℃において48時間にわたって加熱して、均質化熱処理とした。そのあと、30×20×2(厚さ)mmの試験片母材を切り出して、次の被覆処理に供した。   An Nb-based alloy having a composition of Nb-5Mo-5W-5Cr-16Si (mol%) was melted in an Ar atmosphere by an arc melting method. As the raw material, 99.99% powder or granular material was used for Nb and 99.9% for Mo, W, Cr and Si. The melted alloy was heated at 1700 ° C. for 48 hours in an Ar stream of 1 atm to obtain a homogenization heat treatment. Thereafter, a test piece base material of 30 × 20 × 2 (thickness) mm was cut out and subjected to the next coating treatment.

まず、母材の表面に、塩化レニウムを含む溶融塩化物浴から厚さ5μmの金属Reを、電析させた。続いて、Ar雰囲気中において溶融した金属Si浴に浸漬したあと引き上げてSiめっきをした。このときのSi付着量は、めっき前後の重量変化から約60g/m2(約25μm相当)であった。続いてアルミナ粉末とともにアルミナ坩堝に埋め込み、1×10-3Paの真空中において1400℃で6時間保持することにより拡散処理を行い、さらに1100℃の静止大気中で9時間加熱して、酸化処理とした。 First, metal Re having a thickness of 5 μm was electrodeposited on the surface of the base material from a molten chloride bath containing rhenium chloride. Subsequently, the substrate was dipped in a molten metal Si bath in an Ar atmosphere and then pulled up to perform Si plating. The amount of Si deposited at this time was about 60 g / m 2 (corresponding to about 25 μm) from the weight change before and after plating. Subsequently, it is embedded in an alumina crucible together with alumina powder to perform diffusion treatment by holding at 1400 ° C. for 6 hours in a vacuum of 1 × 10 −3 Pa, and further heating for 9 hours in a static atmosphere at 1100 ° C. It was.

比較材としては、同様の方法で用意した試験片母材に対して、金属Reの電析は行わずに、Siめっき、拡散処理と酸化処理を本発明の試験片と同条件で実施したものを用意した。   As a comparative material, a specimen base material prepared in the same manner was subjected to Si plating, diffusion treatment and oxidation treatment under the same conditions as those of the specimen of the present invention without performing metal Re electrodeposition. Prepared.

その結果、本発明の試験片(本発明材)では、図2に示すように、基材1の表面に第一層皮膜2、第二層皮膜3が積層し、最表面に酸化物層(Si,O)4aが形成されたニオブ基合金耐熱材料が得られた。本発明材における各層の厚さや組成を表1に示す。   As a result, in the test piece of the present invention (the material of the present invention), as shown in FIG. 2, the first layer film 2 and the second layer film 3 are laminated on the surface of the substrate 1, and the oxide layer ( A niobium-based alloy heat-resistant material in which (Si, O) 4a was formed was obtained. Table 1 shows the thickness and composition of each layer in the material of the present invention.

Figure 2012132099
Figure 2012132099

母材表面に形成したReの電析層に、溶融Siめっきとそれに引き続いた真空中での拡散処理によってSiが浸透し、さらに母材からNbが拡散したことによって、Re電析層は主にRe−Si−Nbの3元系から成る第一層皮膜2に変化した。さらに過剰のSiは、Re電析層を通過したNbを固溶してSi−Nb合金層となって第二層皮膜3が形成された。また、酸化処理をすることによって、Si−Nb層の表層のみが酸化されて、SiO2からなる酸化物層(Si,O)4aが形成された。 The Re electrodeposited layer is mainly formed by Si penetration into the Re electrodeposited layer formed on the surface of the base metal by the molten Si plating and subsequent diffusion treatment in vacuum, and further diffusion of Nb from the base material. It changed into the 1st layer membrane | film | coat 2 which consists of a ternary system of Re-Si-Nb. Further, the excess Si solid-dissolved Nb that passed through the Re electrodeposition layer to form a Si—Nb alloy layer, and the second layer film 3 was formed. Further, by the oxidation treatment, only the surface layer of the Si—Nb layer was oxidized, and an oxide layer (Si, O) 4a made of SiO 2 was formed.

一方、拡散・酸化処理後の比較材では、図3に示すように、表面から順に、厚さ約1.5μmの酸化物層(Si,Nb,O)4b、その内側に厚さ約45μmの主にSiとNbからなる層(Si−Nb層5)が形成されていた。比較材における各層の厚さや組成を表2に示す。   On the other hand, in the comparative material after the diffusion / oxidation treatment, as shown in FIG. 3, in order from the surface, an oxide layer (Si, Nb, O) 4b having a thickness of about 1.5 μm and a thickness of about 45 μm on the inner side thereof. A layer mainly composed of Si and Nb (Si—Nb layer 5) was formed. Table 2 shows the thickness and composition of each layer in the comparative material.

Figure 2012132099
Figure 2012132099

このように用意した本発明材と比較材を、1200℃の静止大気中で等温連続加熱する耐酸化試験を行なって、耐酸化特性を比較した。本発明材については、加熱時間を168時間とした。比較材については外観変化が著しいので8時間とした。その結果を表3と表4に示す。   The oxidation resistance test was performed by isothermally heating the inventive material prepared in this way and the comparative material in a static atmosphere at 1200 ° C. to compare the oxidation resistance characteristics. For the inventive material, the heating time was 168 hours. Since the change in the appearance of the comparative material was remarkable, the time was 8 hours. The results are shown in Tables 3 and 4.

Figure 2012132099
Figure 2012132099

Figure 2012132099
Figure 2012132099

本発明材では、耐酸化試験後も被覆構造に大きな変化はなく、図2に示すような状態を維持していた。表3には、本発明材の168時間の耐酸化試験の前後における酸化物層4aの厚さの変化と、酸化物層4aの下にある第二層皮膜3中のSi濃度の変化を示している。168時間の酸化後も、第二層には69%のSi濃度が維持され、このことから、第一層には、第二層中のSiの内方拡散を防止する、すなわち拡散防止層の作用があることがわかる。   In the material of the present invention, there was no significant change in the coating structure even after the oxidation resistance test, and the state shown in FIG. 2 was maintained. Table 3 shows the change in the thickness of the oxide layer 4a before and after the 168 hour oxidation resistance test of the material of the present invention and the change in the Si concentration in the second layer coating 3 under the oxide layer 4a. ing. Even after 168 hours of oxidation, the Si concentration of 69% is maintained in the second layer, and therefore, the first layer prevents inward diffusion of Si in the second layer, that is, the diffusion preventing layer It turns out that there is an effect.

また、酸化物層4aは、X線回折によればSiO2であった。また、酸化物層が部材表面において極端な厚さの変化なしに維持されていることは、第二層のSi濃度がSi−Nb合金におけるSiO2形成能を発現できる濃度以上であることを現している。 The oxide layer 4a was SiO 2 according to X-ray diffraction. Further, the fact that the oxide layer is maintained on the surface of the member without an extreme change in thickness indicates that the Si concentration of the second layer is higher than the concentration at which the SiO 2 forming ability in the Si—Nb alloy can be expressed. ing.

一方、比較材の8時間の耐酸化試験後の断面構造を図4に、耐酸化試験前後における酸化物層の厚さの変化を表4に示す。耐酸化試験後には、表面側の酸化物層(Si,Nb,O)4bと下側の酸化物層(Nb,O)4cの2層になっていたが、酸化物層全体の厚さは120μmに達しており、その大部分(約100μm)はNbとOからなる層4cであって、母材のNb基合金が酸化されたことを示している。   On the other hand, FIG. 4 shows the cross-sectional structure of the comparative material after the oxidation resistance test for 8 hours, and Table 4 shows the change in the thickness of the oxide layer before and after the oxidation resistance test. After the oxidation resistance test, the oxide layer (Si, Nb, O) 4b on the surface side and the oxide layer (Nb, O) 4c on the lower side were two layers, but the total thickness of the oxide layer was Most of (about 100 μm) is the layer 4c made of Nb and O, which indicates that the Nb-based alloy of the base material has been oxidized.

本発明のニオブ基合金耐熱材料の耐酸化被覆の構造を示す断面模式図である。It is a cross-sectional schematic diagram which shows the structure of the oxidation resistant coating of the niobium-based alloy heat resistant material of the present invention. 本発明の耐熱材料を高温大気に曝露した後の皮膜の変化を示す断面模式図である。It is a cross-sectional schematic diagram which shows the change of the film | membrane after exposing the heat-resistant material of this invention to high temperature air | atmosphere. 本実施例の比較材における耐酸化試験前の被覆構造を示す断面模式図である。It is a cross-sectional schematic diagram which shows the coating | coated structure before the oxidation resistance test in the comparative material of a present Example. 本実施例の比較材における耐酸化試験後の断面構造を示す模式図である。It is a schematic diagram which shows the cross-sectional structure after the oxidation resistance test in the comparative material of a present Example.

1 基材
2 第一層皮膜
3 第二層皮膜
4a 酸化物層(Si,O)
4b 酸化物層(Si,Nb,O)
4c 酸化物層(Nb,O)
5 Si−Nb層
1 Base material 2 First layer coating 3 Second layer coating 4a Oxide layer (Si, O)
4b Oxide layer (Si, Nb, O)
4c Oxide layer (Nb, O)
5 Si-Nb layer

Claims (4)

ニオブ基合金の基材表面に、実質的に一般式Re1-a-bab(式中、MはCr,Siのうちの1種以上の元素、RはNb,Mo,W,Hf,Zr,Cのうちの1種以上の元素で、a,bはそれぞれM,Rの原子比である)で表される組成を有する第一層の合金皮膜が形成され、さらにその表面に実質的に一般式Q1-cSic(式中、QはMo,W,Nbのうちの1種以上の元素で、cはSiの原子比である)で表される組成を有する第二層の合金皮膜が形成されてなるニオブ基合金の耐熱材料。 The substrate surface of the niobium-based alloy, in substantially the general formula Re 1-ab M a R b ( wherein, M represents Cr, 1 or more elements of Si, R is Nb, Mo, W, Hf, Zr and C are one or more elements, and a and b are atomic ratios of M and R, respectively. Of the second layer having a composition represented by the general formula Q 1-c Si c (wherein Q is one or more elements of Mo, W, and Nb, and c is an atomic ratio of Si). Niobium-based alloy heat-resistant material formed with an alloy film. 前記原子比aが0.10以上、前記原子比bが0.01〜0.50、a+bが0.95以下であり、かつ前記原子比cが0.05〜0.95である請求項1記載のニオブ基合金の耐熱材料。 The atomic ratio a is 0.10 or more, the atomic ratio b is 0.01 to 0.50, a + b is 0.95 or less, and the atomic ratio c is 0.05 to 0.95. The heat-resistant material of the niobium-based alloy described. 前記ニオブ基合金が、Nbをベースとして少なくともMoとWのうちの1種以上とSiとを含有し、かつ必要に応じてCr,Hf,Zr,Cのうちの1種以上を含有する合金であり、前記第一層の合金皮膜中の元素MがSiである請求項1又は請求項2記載のニオブ基合金の耐熱材料。 The niobium-based alloy is an alloy containing Nb as a base and containing at least one of Mo and W and Si, and optionally containing one or more of Cr, Hf, Zr, and C. The heat resistant material for a niobium-based alloy according to claim 1 or 2, wherein the element M in the alloy film of the first layer is Si. 前記第二層の合金皮膜中の元素QがMoとWのうちの1種以上である請求項3記載のニオブ基合金の耐熱材料。 The heat resistant material for a niobium-based alloy according to claim 3, wherein the element Q in the alloy film of the second layer is one or more of Mo and W.
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