JP2012108164A - Actuator, optical scanner and image formation device - Google Patents

Abstract

An optical scanner and an image forming apparatus capable of stably rotating a movable plate around two axes orthogonal to each other.
An optical scanner includes a support unit, a movable plate provided with a light reflecting unit, drive units provided so as to be displaceable with respect to the support unit, a drive unit, and a drive unit. 41, 51, 61, 71 and four connecting parts 4, 5, 6, 7 comprising first shaft parts 42, 52, 62, 72 for connecting the movable plate 2 and the movable plate 2 to the support part 3 Displacement means 8 for displacing with respect to each other, each connecting portion 4, 5, 6, 7 is provided with each drive portion 41, 51, 61, 71 being displaceable in the Z-axis direction. The shaft portions 42, 52, 62, 72 are configured to bend and deform in the Z-axis direction in accordance with the displacement of the drive portions 41, 51, 61, 71, and the displacing means 8 includes the drive portions 41, 51. , 61, 71 are displaced in the Z-axis direction.
[Selection] Figure 1

Description

  The present invention relates to an actuator, an optical scanner, and an image forming apparatus.

For example, an optical scanner using a torsional vibration type actuator is known as an optical scanner for performing drawing by optical scanning with a laser printer or the like (see, for example, Patent Document 1).
Patent Document 1 discloses an actuator having an insulating substrate provided with a pair of permanent magnets and a scanner body supported by the insulating substrate so as to be positioned between the pair of permanent magnets. The scanner body includes a frame-shaped support portion, a frame-shaped outer movable plate provided inside the support portion, and an inner movable plate (mirror) provided inside the outer movable plate. . The outer movable plate is connected to the support portion via a pair of first torsion bars extending in the X-axis direction, and the inner movable plate extends in the Y-axis direction orthogonal to the X-axis direction. It is connected to the outer movable plate via two torsion bars. The outer movable plate and the inner movable plate are each provided with a coil.

In the actuator having such a configuration, by applying a magnetic field generated from each coil by energization and a magnetic field generated between a pair of permanent magnets, the outer movable plate and the inner movable plate are used as the central axis of the first torsion bar. The inner movable plate rotates about the Y axis about the second torsion bar as the central axis.
As described above, in the actuator of Patent Document 1, the mechanism for rotating the inner movable plate around the X axis is different from the mechanism for rotating around the Y axis. Therefore, the inner movable plate cannot be rotated around the X axis and the Y axis under the same conditions. In the actuator of Patent Document 1, the magnetic field generated from the coil provided on the outer movable plate interferes with the magnetic field generated from the coil provided on the inner movable plate, and the inner movable plate is moved along the X axis and the Y axis. It cannot be rotated independently about each axis. Therefore, the actuator of Patent Document 1 has a problem that the inner movable plate cannot be stably rotated around the X axis and the Y axis.

JP-A-8-322227

  An object of the present invention is to provide an actuator, an optical scanner, and an image forming apparatus capable of stably rotating a movable plate around two axes orthogonal to each other.

Such an object is achieved by the present invention described below.
The actuator of the present invention includes a support portion,
A movable plate including a light reflecting portion having light reflectivity;
A drive unit provided to be displaceable with respect to the support unit, and a shaft unit that connects the drive unit and the movable plate, and three units that connect the movable plate to the support unit in a displaceable manner. Or four connecting parts,
Displacement means for displacing the movable plate with respect to the support portion;
When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
Each connecting portion is provided along a plane parallel to both the X-axis and the Y-axis,
Each drive unit is provided to be displaceable in a direction parallel to the Z-axis,
Each of the shaft portions is configured to bend and deform in a direction parallel to the Z-axis in accordance with the displacement of the driving unit,
The displacing means displaces the movable plate by displacing each driving unit in a direction parallel to the Z-axis.
According to the actuator having such a configuration, the movable plate can be independently rotated around one of the two axes orthogonal to each other and rotated around the other axis. Therefore, the movable plate can be stably rotated around two axes orthogonal to each other.

In the actuator according to the aspect of the invention, it is preferable that the three or four connecting portions are provided at equiangular intervals in the circumferential direction along the outer periphery of the movable plate when viewed from a direction parallel to the Z axis. .
Accordingly, the movable plate can be stably rotated around two axes orthogonal to each other while facilitating control.

In the actuator of the present invention, the four connecting portions are provided,
Two of the four connecting portions face each other in the direction parallel to the X axis via the movable plate, and the two connecting portions connect the driving unit and the support unit, respectively. A pair of beams extending in a direction parallel to the Y axis,
The other two connecting portions of the four connecting portions are opposed to each other in the direction parallel to the Y axis via the movable plate, and the other two connecting portions are respectively the driving portion and the support. It is preferable to provide a pair of beam portions that are connected to each other and extend in a direction parallel to the X axis.
Thereby, the drive part can be displaced in a direction parallel to the Z axis while bending each beam part.

In the actuator according to the aspect of the invention, it is preferable that the displacement unit includes a permanent magnet provided in each driving unit and a coil that generates a magnetic field acting on the permanent magnet.
Electromagnetic driving can generate a large driving force. Therefore, the movable plate can be rotated with a large swing angle while saving power.
In the actuator of the present invention, it is preferable that each permanent magnet is magnetized in a direction parallel to the Z axis, and each coil generates a magnetic field in a direction parallel to the Z axis.
Thereby, the distance between a permanent magnet and a coil can be made small. As a result, the deflection angle of the movable plate can be increased while saving power.

In the actuator according to the aspect of the invention, it is preferable that the center of the permanent magnet and the center of the beam portion are respectively located on the axis of the coil when viewed from the extending direction of the beam portion.
Thereby, the drive part can be displaced in a direction parallel to the Z axis while bending each beam part while suppressing the rotation of the drive part.

In the actuator of the present invention, a slit-like through hole extending in a direction orthogonal to the extending direction of the beam portion is formed in the vicinity of the connection portion of each driving portion with each beam portion. preferable.
Thereby, when bending each beam part in the direction parallel to a Z-axis, the connection part with each beam part of a drive part can be torsionally deformed. Therefore, it is possible to prevent stress concentration from occurring at the connecting portion between the driving portion and each beam portion due to the displacement of the driving portion in the direction parallel to the Z-axis. As a result, the length of the beam portion is shortened. Can be designed. On the other hand, when such a slit-like through hole is not provided in the drive unit, the connection part with each beam part of the drive unit is difficult to be deformed, so that the drive unit is driven by displacement in a direction parallel to the Z axis. Stress concentration occurs at the connection portion of each portion with each beam portion.

In the actuator of the present invention, each of the shaft portions includes a stress relaxation portion provided between the movable plate and the drive portion, a movable plate-side shaft portion that connects the stress relaxation portion and the movable plate, It is preferable to have a drive part side shaft part connecting the stress relaxation part and the drive part, and to bend at the stress relaxation part.
Thereby, the stress which a movable plate side axial part receives can be relieve | moderated by a stress relaxation part, and it can prevent or suppress that the stress is transmitted to a drive part side axial part. Therefore, each shaft portion can be bent while preventing or suppressing each shaft portion from being affected by the bending of other shaft portions.

In the actuator of the present invention, each of the stress relaxation portions extends in a direction orthogonal to the extending direction of the movable plate side shaft portion and the drive portion side shaft portion when viewed from a direction parallel to the Z axis. It is preferable to have a deforming portion that twists and deforms around the central axis.
Thereby, the stress applied to the first shaft portion due to the torsional deformation of the deformable portion can be effectively relaxed.

In the actuator of the present invention, each of the stress relaxation portions has a pair of the deformation portions,
It is preferable that one of the pair of deformation portions is connected to the movable plate side shaft portion, and the other deformation portion is connected to the drive portion side shaft portion.
Thereby, the stress applied to the first shaft portion due to the torsional deformation of the deformable portion can be effectively relaxed.

In the actuator of the present invention, each of the stress relaxation portions is provided between the pair of deformation portions, extends in a direction parallel to the extending direction of the deformation portions, and does not twist and deform around the central axis. It is preferable to have a deformation part.
Thereby, in each connection part, a 1st axial part can be bent centering on a non-deformation part. Therefore, the first shaft portion of each connecting portion can be bent easily and reliably, and the movable plate can be stably displaced.

In the actuator according to the aspect of the invention, it is preferable that each of the stress relaxation portions has portions that meander and alternately extend in a direction parallel to the X axis and a direction parallel to the Y axis.
Thereby, the stress which a movable plate side axial part receives can be relieve | moderated by a stress relaxation part, and it can prevent or suppress transmitting to a drive part side axial part.
The optical scanner of the present invention includes a support portion,
A movable plate including a light reflecting portion having light reflectivity;
A drive unit provided to be displaceable with respect to the support unit, and a shaft unit that connects the drive unit and the movable plate, and three units that connect the movable plate to the support unit in a displaceable manner. Or four connecting parts,
Displacement means for displacing the movable plate with respect to the support portion;
When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
Each connecting portion is provided along a plane parallel to both the X-axis and the Y-axis,
Each drive unit is provided to be displaceable in a direction parallel to the Z-axis,
Each of the shaft portions is configured to bend and deform in a direction parallel to the Z-axis in accordance with the displacement of the driving unit,
The displacing means displaces the movable plate by displacing each driving unit in a direction parallel to the Z-axis.
Accordingly, it is possible to provide an optical scanner that can stably rotate the movable plate around each of two axes orthogonal to each other.

An image forming apparatus of the present invention includes a light source,
An optical scanner that scans the light from the light source;
The optical scanner is
A support part;
A movable plate including a light reflecting portion having light reflectivity;
A drive unit provided to be displaceable with respect to the support unit, and a shaft unit that connects the drive unit and the movable plate, and three units that connect the movable plate to the support unit in a displaceable manner. Or four connecting parts,
Displacement means for displacing the movable plate with respect to the support portion;
When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
Each connecting portion is provided along a plane parallel to both the X-axis and the Y-axis,
Each drive unit is provided to be displaceable in a direction parallel to the Z-axis,
Each of the shaft portions is configured to bend and deform in a direction parallel to the Z-axis in accordance with the displacement of the driving unit,
The displacing means displaces the movable plate by displacing each driving unit in a direction parallel to the Z-axis.
Accordingly, it is possible to provide an image forming apparatus that can stably rotate the movable plate around each of two axes orthogonal to each other.

It is a top view which shows 1st Embodiment of the optical scanner of this invention. 2 is a sectional view of the optical scanner shown in FIG. 1 (a sectional view taken along line AA in FIG. 1). It is a perspective view of the connection part which the optical scanner shown in FIG. 1 has. It is sectional drawing explaining the manufacturing method of the vibration structure which the optical scanner shown in FIG. 1 has. It is sectional drawing explaining the manufacturing method of the vibration structure which the optical scanner shown in FIG. 1 has. It is a figure explaining the displacement means which the optical scanner shown in FIG. 1 has. It is a figure explaining the drive of the optical scanner shown in FIG. It is a figure explaining the displacement means of 2nd Embodiment of the optical scanner of this invention. It is a figure explaining the displacement means of 3rd Embodiment of the optical scanner of this invention. It is a figure explaining the displacement means of 4th Embodiment of the optical scanner of this invention. It is a figure explaining the displacement means of 5th Embodiment of the optical scanner of this invention. It is a figure explaining the displacement means of 6th Embodiment of the optical scanner of this invention. It is a figure explaining the displacement means of 7th Embodiment of the optical scanner of this invention. It is a figure explaining the connection part of 8th Embodiment of the optical scanner of this invention. It is a figure explaining the vibration structure of 9th Embodiment of the optical scanner of this invention. It is a figure (plan view) explaining the vibration structure of 10th Embodiment of the optical scanner of this invention. It is an expansion perspective view of the connection part which the optical scanner shown in FIG. 16 has. It is a figure (top view) explaining the vibration structure of 11th Embodiment of the optical scanner of this invention. 1 is a diagram showing an outline of an image forming apparatus of the present invention. FIG. 20 is a diagram illustrating an example of drawing using the image forming apparatus illustrated in FIG. 19.

  Hereinafter, preferred embodiments of an actuator, an optical scanner, and an image forming apparatus of the present invention will be described with reference to the accompanying drawings. In the following, the case where the actuator of the present invention is applied to an optical scanner will be described as an example. However, the actuator of the present invention can also be applied to optical devices other than an optical scanner such as an optical switch and an optical attenuator. .

<First Embodiment>
First, a first embodiment of the present invention will be described.
1 is a plan view showing a first embodiment of the optical scanner of the present invention, FIG. 2 is a cross-sectional view of the optical scanner shown in FIG. 1 (a cross-sectional view taken along line AA in FIG. 1), and FIG. 4 is a perspective view of a connecting portion of the optical scanner shown in FIG. 4, FIG. 4 is a cross-sectional view for explaining a method of manufacturing a vibrating structure of the optical scanner shown in FIG. 1, and FIG. 5 is a vibrating structure of the optical scanner shown in FIG. FIG. 6 is a cross-sectional view for explaining a method for manufacturing a body, FIG. 6 is a view for explaining displacement means of the optical scanner shown in FIG. 1, and FIG. 7 is a view for explaining driving of the optical scanner shown in FIG.

In the following, for convenience of explanation, the left side in FIG. 1 is referred to as “left”, the right side is referred to as “right”, the upper side in FIGS. 2 to 7 is referred to as “upper”, and the lower side is referred to as “lower”. In FIGS. 1 to 3 and FIG. 6, for convenience of explanation, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other. Hereinafter, a direction parallel to the X axis is referred to as an “X axis direction”, a direction parallel to the Y axis is referred to as a “Y axis direction”, and a direction parallel to the Z axis direction is referred to as a “Z axis direction”. . Further, in FIG. 1, for convenience of explanation, illustration of coils 812 b, 822 b, 832 b, 842 b and a mounting member 13 of the displacement means 8 described later is omitted.
An optical scanner 1 shown in FIGS. 1 and 2 includes a vibration structure 11 including a movable plate 2, a support portion 3, and four connection portions 4, 5, 6, and 7, and a base that supports the vibration structure 11. 12 and a displacement means 8 for displacing the movable plate 2. Hereinafter, each configuration of the optical scanner 1 will be sequentially described in detail.

1-1. Vibration structure 11
In the present embodiment, the vibrating structure 11 (that is, the movable plate 2, the support portion 3, and the four connecting portions 4, 5, 6, 7) is used for various etching methods such as dry etching and wet etching for unnecessary portions of the SOI substrate. It is formed integrally by removing by. The method for manufacturing the vibration structure 11 will be described in detail later.

The support part 3 has a function of supporting the movable plate 2. Specifically, the support portion 3 supports the movable plate 2 via the four connection portions 4, 5, 6, and 7.
Such a support portion 3 has a frame shape and is provided so as to surround the periphery of the movable plate 2. The shape of the support portion 3 is not particularly limited as long as the movable plate 2 can be supported. For example, the shape may be divided into four for each of the connecting portions 4, 5, 6, and 7.

A movable plate 2 is provided inside the support portion 3. The movable plate 2 has a flat plate shape, and a light reflecting portion 22 having light reflectivity is formed on one surface (the surface opposite to the base 12). The light reflecting portion 22 is obtained by forming a metal film such as gold, silver, or aluminum by vapor deposition or the like.
In the present embodiment, the planar view shape of the movable plate 2 is circular, but the planar view shape of the movable plate 2 is not particularly limited, and may be, for example, a polygon such as a rectangle or a square, or an ellipse. May be.

  Such a movable plate 2 is connected to the support portion 3 by four connecting portions 4, 5, 6, and 7. Each connecting portion 4, 5, 6, 7 is provided along a plane (virtual plane) parallel to both the X axis and the Y axis. Specifically, the four connecting portions 4, 5, 6, and 7 are equiangular intervals in the circumferential direction along the outer periphery of the movable plate 2 in a plan view of the movable plate 2 (when viewed from the Z-axis direction). That is, they are arranged at intervals of 90 degrees.

  Of the four connecting parts 4, 5, 6, 7, the connecting parts 4, 6 are opposed to the X-axis direction via the movable plate 2 and are formed symmetrically with respect to the movable plate 2, The connecting portions 5 and 7 are opposed to the Y-axis direction via the movable plate 2 and are formed symmetrically with respect to the movable plate 2. By supporting the movable plate 2 by such connecting portions 4, 5, 6, 7, the movable plate 2 can be supported in a stable state. Further, the movable plate 2 can be stably rotated around two axes orthogonal to each other while facilitating the control.

More specifically, the connecting portion (first connecting portion) 4 includes a driving portion 41, a first shaft portion (shaft portion) 42 that connects the driving portion 41 and the movable plate 2, and the driving portion 41. And a pair of second shaft portions (beam portions) 43 that connect the support portion 3 to each other. Similarly, the connecting portion (third connecting portion) 5 includes a driving portion 51, a first shaft portion (shaft portion) 52 that connects the driving portion 51 and the movable plate 2, and the driving portion 51 and the support portion 3. And a pair of second shaft portions (beam portions) 53. The connecting portion (second connecting portion) 6 includes a driving portion 61, a first shaft portion (shaft portion) 62 that connects the driving portion 61 and the movable plate 2, the driving portion 61 and the support portion 3. And a pair of second shaft portions (beam portions) 63. The connecting portion (fourth connecting portion) 7 includes a driving portion 71, a first shaft portion (shaft portion) 72 that connects the driving portion 71 and the movable plate 2, the driving portion 71 and the support portion 3. And a pair of second shaft portions (beam portions) 73.
By configuring each of the connecting portions 4, 5, 6, and 7 as described above, the configuration of the connecting portion is simplified, and rotation of the movable plate 2 around the rotation center axes X 1 and Y 1 as will be described later. Can be done smoothly.

  Hereinafter, the connecting portion 4 will be described in detail. In addition, since the structure of the connection parts 4, 5, 6, and 7 is mutually the same, the description about the other connection parts 5, 6, and 7 is abbreviate | omitted. However, the connecting portions 5 and 7 are arranged in a state of being rotated 90 degrees with respect to the connecting portion 4 in a plan view of the movable plate 2. Therefore, the connecting portions 5 and 7 are described by appropriately replacing “Y-axis direction” and “X-axis direction” with “Y-axis direction” in the description of the connecting portion 4 below. Can do.

  As shown in FIG. 3, the pair of second shaft portions 43 are disposed to face each other in the Y-axis direction via the drive portion 41 and support the drive portion 41 at both ends. Further, each of the pair of second shaft portions 43 has a rod shape extending in the Y-axis direction. Such a pair of second shaft portions 43 can be bent and deformed in the Z-axis direction. Thereby, the drive unit 41 can be displaced in the Z-axis direction. Further, the pair of second shaft portions 43 can be twisted and deformed around the central axis. The pair of second shaft portions 43 are provided coaxially, and the pair of second shaft portions 43 are twisted around this shaft (hereinafter also referred to as “rotation center axis Y2”). Torsional deformation. Thereby, the drive part 41 can be rotated.

  The drive unit 41 is provided away from the movable plate 2 in the X-axis direction. Further, the drive unit 41 is supported at both ends by the pair of second shaft portions 43 as described above. A through hole 411 is formed in such a drive unit 41, and a permanent magnet 811 is inserted and fixed in the through hole. The permanent magnet 811 is fixed to the drive unit 41 by, for example, fitting (press fitting) or an adhesive. This permanent magnet 811 constitutes a part of the displacement means 8. The details of the permanent magnet 811 will be described later together with the description of the displacement means 8.

  Further, in the vicinity of the connection portion of the drive unit 41 with each second shaft portion 43, there is a slit-like through-hole 412 extending in a direction (that is, orthogonal to the extending direction of each second shaft portion 43). Is formed. As a result, the beam portions 413 extending in the X-axis direction are formed at both ends of the drive portion 41 in the Y-axis direction (connection portions with the respective second shaft portions 43 of the drive portion 41). The beam portion 413 can be twisted and deformed about an axis extending in the X-axis direction. Therefore, when each second shaft portion 43 is bent and deformed in the Z-axis direction, the connection portion (each beam portion 413) of the drive portion 41 with each second shaft portion 43 can be torsionally deformed. Therefore, it is possible to prevent stress concentration from occurring at the connecting portion between the driving portion 41 and each shaft portion 43 due to the displacement of the driving portion 41 in the Z-axis direction. As a result, the length of each shaft portion 43 can be prevented. Can be designed short. On the other hand, when the slit-shaped through-hole 412 is not provided in the drive unit 41, the connection portion of the drive unit 41 with each beam portion 413 is difficult to be deformed, so that the drive unit 41 is displaced in the Z-axis direction. As a result, stress concentration occurs at the connecting portion between the driving portion 41 and each shaft portion 43.

  Further, in the present embodiment, the plan view shape (outer shape in plan view) of the drive unit 41 is a rectangle with the Y-axis direction as the longitudinal direction. By making the drive part 41 into such a shape, the width (length in the X-axis direction) of the drive part 41 can be suppressed while securing a space for fixing the permanent magnet 811. By suppressing the width of the drive unit 41, the moment of inertia generated when the drive unit 41 rotates about the rotation center axis Y2 can be suppressed, the reactivity of the drive unit 41 is increased, and faster rotation is achieved. Is possible. In addition, when the reactivity of the drive unit 41 is increased, it is possible to suppress the occurrence of unintentional vibration due to the rotation of the drive unit 41 (particularly when switching the rotation direction is switched). Therefore, the optical scanner 1 can be driven stably.

Note that the shape of the drive unit 41 in plan view is not particularly limited, and may be, for example, a square, a polygon that is a pentagon or more, or a circle.
Such a drive unit 41 is connected to the movable plate 2 by the first shaft portion 42. The first shaft portion 42 is provided so as to extend as a whole in the X-axis direction. Such a first shaft portion 42 includes a stress relaxation portion 421 provided between the drive portion 41 and the movable plate 2, and a movable plate side shaft portion 422 that connects the stress relaxation portion 421 and the movable plate 2. And a driving unit side shaft portion (driving unit side shaft portion) 423 for connecting the stress relaxation portion 421 and the driving portion 41.

  The movable plate side shaft portion 422 and the drive portion side shaft portion 423 each have a rod shape extending in the X axis direction. The movable plate side shaft portion 422 and the drive portion side shaft portion 423 are provided coaxially. In the present embodiment, the movable plate side shaft portion 422 has a cross sectional area smaller than that of the drive unit side shaft portion 423. In other words, the drive unit side shaft portion 423 has a larger cross-sectional area than that of the movable plate side shaft portion 422.

  Of these two shaft portions, the drive portion side shaft portion 423 is preferably set to a hardness that does not cause significant deformation when the optical scanner 1 is driven, and is set to a hardness that does not substantially deform. And more preferred. On the other hand, the movable plate side shaft portion 422 can be twisted and deformed around its central axis. In this way, the first shaft portion 42 has a hard portion that does not substantially deform and a torsionally deformable portion located on the distal end side thereof, so that the movable plate 2 can be moved in the X axis and Y direction as will be described later. The shaft can be stably rotated around each axis. The term “does not deform” means that bending or bending in the Z-axis direction and torsional deformation around the central axis do not occur substantially.

The movable plate side shaft portion 422 and the drive portion side shaft portion 423 are connected via the stress relaxation portion 421. The stress relieving part 421 relieves (absorbs) a function that becomes a node when the first shaft part 42 is bent and torsionally deforms the movable plate side shaft part 422, and the torque is driven. It has a function of preventing or suppressing transmission to the part side shaft part 423.
As shown in FIG. 3, the stress relaxation part 421 includes a pair of deformation parts 4211 and 4212, a non-deformation part 4213 provided therebetween, and a pair of connection parts that connect the deformation part 4211 to the non-deformation part 4213. 4214 and a pair of connection portions 4215 that connect the deformable portion 4212 to the non-deformed portion 4213.

  The non-deformable portion 4213 has a rod shape extending in the Y-axis direction. In the present embodiment, the cross-sectional area of the non-deformed portion 4213 is larger than the cross-sectional areas of the respective deformable portions 4211 and 4212 described above. Such a non-deformation portion 4213 is set to a hardness that does not substantially deform when the optical scanner 1 is driven. Thereby, as will be described later, the first shaft portion 42 can be bent around the central axis Y4 of the non-deformable portion 4213, and the stress relaxation portion 421 can reliably exhibit the function as a node. The optical scanner 1 can be driven stably.

  A pair of deformable portions 4211 and 4212 are arranged symmetrically with respect to such a non-deformed portion 4213. The deformable portions 4211 and 4212 each have a rod shape extending in the Y-axis direction. Further, the deforming parts 4211 and 4212 are arranged in parallel with being spaced apart from each other in the X-axis direction. Each of the deforming portions 4211 and 4212 can be twisted and deformed around the central axis.

  The deformable portion 4211 located on the movable plate 2 side is connected to one end of the movable plate side shaft portion 422 at substantially the center in the longitudinal direction, and is not deformed via a pair of connection portions 4214 at both ends thereof. It is connected to the portion 4213. Similarly, the deformable portion 4212 located on the drive portion 41 side is connected to one end of the drive portion side shaft portion 423 at substantially the center in the longitudinal direction, and at both ends via a pair of connection portions 4215. Are connected to the non-deformable portion 4213.

One connection portion of the pair of connection portions 4214 connects one end portions of the deformation portion 4211 and the non-deformation portion 4213, and the other connection portion connects the other end portions of the deformation portion 4211 and the non-deformation portion 4213. ing. In addition, one connection portion of the pair of connection portions 4215 connects one end portions of the deformation portion 4212 and the non-deformation portion 4213, and the other connection portion connects the other end portions of the deformation portion 4212 and the non-deformation portion 4213. It is connected.
Each of such connection portions 4214 and 4215 has a rod shape extending in the X-axis direction. Each of the connection portions 4214 and 4215 can be bent in the Z-axis direction and can be twisted and deformed around its central axis.
The configuration of the vibration structure 11 has been specifically described above.

As described above, the vibration structure 11 having such a configuration is integrally formed from an SOI substrate. Thereby, formation of the vibration structure 11 becomes easy. Specifically, as described above, the vibration structure 11 includes a portion that is positively deformed and a portion that is not deformed (not desired to be deformed). On the other hand, the SOI substrate is a substrate in which a first Si layer, a SiO ₂ layer, and a second Si layer are stacked in this order. Therefore, the portion not to be deformed is composed of all of the three layers, and the portion to be actively deformed is composed of only the second Si layer, that is, the thickness of the SOI substrate is changed. It is possible to easily form the vibration structure 11 in which a part to be deformed and a part not to be deformed are mixed. In addition, the site | part actively deform | transformed may be comprised by ₂ layers of the 2nd Si layer and SiO2 layer.

The “parts to be deformed” include the second shaft parts 43, 53, 63, 73, the movable plate side shaft parts 422, 522, 622, 722, the deformation parts 4211, 4212, 5211, 5212, 6211, 6212, 7211. , 7212 and connection portions 4214, 4215, 5214, 5215, 6214, 6215, 7214, 7215 are included.
On the other hand, the “parts not to be deformed” include the movable plate 2, the support portion 3, the drive portions 41, 51, 61, 71, the drive portion side shaft portions 423, 523, 623, 723 and the non-deformation portions 4213, 5213, 6213. , 7213 are included.

Hereinafter, an example of a method for manufacturing the vibration structure 11 will be briefly described with reference to FIGS. 4 and 5. 4 and 5 are cross-sectional views corresponding to the cross-sectional view taken along the line AA in FIG. Moreover, the manufacturing method of the vibration structure 11 is not limited to this.
First, as shown in FIG. 4A, an SOI substrate (silicon substrate) 100 in which a first Si layer 110, a SiO ₂ layer 120, and a second Si layer 130 are laminated in this order from the upper side. Prepare.

Next, as shown in FIG. 4B, SiO ₂ films M 1 and M 2 are formed on both surfaces of the SOI substrate 100. Then, as shown in FIG. 4 (c), by etching the SiO ₂ film M2, the movable plate 2, together with the patterning of the plan view shape of the support portion 3 and the connecting portion 4, 5, 6, 7, SiO ₂ By etching the film M1, the movable plate 2, the support part 3, the drive parts 41, 51, 61, 71, the drive part side shaft parts 423, 523, 623, 723, and the non-deformation parts 4213, 5213, 6213, 7123 are formed. Pattern into the corresponding shape.

Next, as shown in FIG. 5A, the SOI substrate 100 is etched through the SiO ₂ film M1. At this time, the SiO ₂ layer 120 as an intermediate layer of the SOI substrate 100 functions as a stop layer for the etching. After this etching is completed, this time, the SOI substrate 100 is etched through the SiO ₂ film M2. Also at this time, the SiO ₂ layer 120 as an intermediate layer of the SOI substrate 100 functions as a stop layer for the etching.

  The etching method is not particularly limited. For example, one of a physical etching method such as plasma etching, reactive ion etching, beam etching, and optically assisted etching, a chemical etching method such as wet etching, or the like. Two or more kinds can be used in combination. Note that the same method can be used for etching in the following steps.

Next, as shown in FIG. 5B, the exposed portions of the SiO ₂ films M1, M2 and the SiO ₂ layer 120 are removed by etching with BHF (buffered hydrofluoric acid) or the like, so that the movable plate 2, The outer shape of the support part 3 and the connection parts 4, 5, 6, 7 is processed.
Further, as shown in FIG. 5C, a metal film is formed on the upper surface 21 of the movable plate 2 to form a light reflecting portion 22. The metal film (light reflecting portion 22) can be formed by vacuum plating, sputtering (low temperature sputtering), dry plating methods such as ion plating, wet plating methods such as electrolytic plating and electroless plating, thermal spraying methods, Joining etc. are mentioned.
In this way, the vibration structure 11 is obtained.

1-2. Base 12
As shown in FIG. 2, the base 12 has a flat plate-like base 121 and a frame 122 provided along the edge of the base 121, and has a box shape that opens upward. . Such a base 12 is joined to the lower surface of the support portion 3 of the vibration structure 11 at the frame portion 122. Thereby, the vibration structure 11 is supported by the base 12. Such a base 12 is composed of, for example, glass or silicon as a main material. In addition, it does not specifically limit as a joining method of the base 12 and the support part 3, For example, you may join using an adhesive agent and may use various joining methods, such as anodic bonding.

1-3. Displacement means 8
As shown in FIG. 1, the displacement means 8 includes a first displacement means 81 having a permanent magnet 811, coils 812 (812 a, 812 b) and a power supply 813, a permanent magnet 821, coils 822 (822 a, 822 b) and a power supply 823. A second displacement means 82 having a permanent magnet 831, a coil 832 (832a, 832b) and a power source 833, a permanent magnet 841, a coil 842 (842a, 842b) and a power source 843. And fourth displacement means 84.

The first displacement means 81 is provided corresponding to the connecting portion 4, the second displacement means 82 is provided corresponding to the connecting portion 5, and the third displacement means 83 is The fourth displacement means 84 is provided corresponding to the connecting portion 7.
According to such a structure, the structure of the displacement means 8 becomes simple. Moreover, by making the displacement means 8 electromagnetically drive, a comparatively big driving force can be generated and the movable plate 2 can be rotated more reliably. Moreover, since one displacement means is provided in each connection part 4,5,6,7, each connection part 4,5,6,7 can be deformed independently. Therefore, as described later, the movable plate 2 can be displaced in various ways.

  Hereinafter, the first displacement means 81 will be described in detail as a representative. Since the second displacement means 82, the third displacement means 83, and the fourth displacement means 84 have the same configuration as the first displacement means 81, the description thereof is omitted. However, the second displacing means 82 and the fourth displacing means 84 are arranged in a state of being rotated 90 degrees with respect to the first displacing means 81 in a plan view of the movable plate 2. Therefore, for the second displacement means 82 and the fourth displacement means 84, “Y-axis direction” in the following description of the first displacement means 81 is “X-axis direction”, and “X-axis direction” is “Y”. This can be explained by appropriately reading “axial direction”.

  As shown in FIG. 6, the permanent magnet 811 has a rod shape and is magnetized in the longitudinal direction. That is, the permanent magnet 811 has one end side in the longitudinal direction (lower side in the present embodiment) as an S pole, and the other end side (upper side in the present embodiment) has an N pole. Such a permanent magnet 811 is inserted through a through-hole 411 formed in the drive unit 41 and is fixed to the drive unit 41 at substantially the center in the longitudinal direction. And the permanent magnet 811 protrudes by the same length up and down of the drive part 41, and S pole and N pole oppose through the drive part 41 (rotation center axis Y2). Thereby, the movable plate 2 can be displaced stably as will be described later. The upper side of the permanent magnet 811 may be the S pole and the lower side may be the N pole.

The permanent magnet 811 is provided such that the longitudinal direction thereof is orthogonal to the surface direction of the drive unit 41. Further, the permanent magnet 811 is provided such that its central axis intersects the rotation central axis Y2.
In particular, in the present embodiment, the center (center of gravity) G1 of the permanent magnet 811 when viewed from the extending direction of the second shaft portion 43 (ie, the Y-axis direction) is the rotation center axis Y2 (ie, the drive portion 41). The center of the second shaft portion 43) is shifted from the movable plate 2 side. When the center G1 of the permanent magnet 811 and the rotation central axis of the drive unit 41 are displaced to the coil 812a side described later, the drive unit 41 is displaced to the coil 812a side and the drive unit 41 is moved. It can be rotated around the rotation center axis Y2. In this way, in addition to the displacement of the drive unit 41 in the Z-axis direction, the drive unit 41 can be rotated while the second shaft portions 43 are twisted and deformed. The first shaft portion 42 can be bent and deformed as the driving portion 41 rotates. Therefore, the movable plate 2 can be rotated efficiently and smoothly.

Even if the center of the permanent magnet 811 is shifted to the opposite side of the movable plate 2 with respect to the center of the second shaft portion 43, the drive unit 41 is moved to the coil 812a side when attracted to the coil 812a side. While being displaced, the drive part 41 can be rotated around the rotation center axis Y2.
The permanent magnet 811 is not particularly limited, and for example, a magnet made of a hard magnetic material such as a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, or a bonded magnet can be suitably used.
The coil 812 generates a magnetic field that acts on the permanent magnet 811.

In the present embodiment, the coil 812 includes a coil 812 a provided below the drive unit 41 (hereinafter also referred to as a “lower coil”) and a coil provided above the drive unit 41 (“ 812b). Such a pair of coils 812 a and 812 b are opposed to each other in the Z-axis direction via the drive unit 41. The coil 812 a is provided on the upper surface of the base 121 of the base 12, and the coil 812 b is attached to the attachment member 13 fixed to the upper surface of the support portion 3 of the vibration structure 11.
Such coils 812a and 812b are provided so as to generate a magnetic field in the Z-axis direction, respectively.

That is, when the coil 812a is energized, the magnetic field in which the permanent magnet 811 side of the coil 812a is N pole and the opposite side is S pole, or the permanent magnet 811 side of the coil 812a is S pole and the opposite side is N pole. Is provided. Similarly, when the coil 812b is energized, the permanent magnet 811 side of the coil 812b becomes the N pole and the opposite side becomes the S pole, or the permanent magnet 811 side of the coil 812b becomes the S pole and the opposite side becomes the N pole. It is provided to generate a magnetic field.
More specifically, each of the coils 812a and 812b has a cylindrical shape, the axis of which extends in the Z-axis direction, and the axes of the coils 812a and 812b are provided on the same line segment (axis Z1). It has been.

The coil 812 a is provided so as to surround the lower end portion of the permanent magnet 811, and the coil 812 b is provided so as to surround the upper end portion of the permanent magnet 811. In other words, the permanent magnet 811 is provided so as to face the inner side of the lower end portion coil 812a, and the upper end portion of the permanent magnet 811 is provided so as to face the inner side of the coil 812b.
In addition, the coils 812a and 812b are configured to generate a magnetic field as described above independently of each other.

In particular, in this embodiment, as shown in FIG. 6, when viewed from the Y-axis direction, the axis Z1 of the coils 812a and 812b is shifted to the opposite side of the movable plate 2 with respect to the center G1 of the permanent magnet 811. . Thereby, when not driven, the space on the opposite side of the movable plate between the permanent magnet 811 and the coil 812a becomes wider than the space on the movable plate side. Therefore, when the drive part 41 and the permanent magnet 811 rotate around the rotation center axis Y2, it is possible to prevent the permanent magnet 811 from contacting the coil 812a.
In this way, when the permanent magnet 811 is magnetized in the Z-axis direction and the coils 812a and 812b are configured to generate a magnetic field in the Z-axis direction, the distance between the permanent magnet 811 and the coils 812a and 812b is increased. Can be small. As a result, the deflection angle of the movable plate 2 can be increased while saving power.

  The power supply 813 is electrically connected to the coils 812a and 812b, respectively. Then, by applying desired voltages from the power supply 813 to the coils 812a and 812b, the above-described magnetic fields can be generated from the coils 812a and 812b, respectively. In the present embodiment, the power source 813 can select and apply an alternating voltage and a DC voltage. Further, the power supply 813 can change the strength and frequency when applying an alternating voltage to the coils 812a and 812b, and can also superimpose an offset voltage (DC voltage). ing.

2. Operation of Optical Scanner 1 Next, the operation of the optical scanner will be described. In the following description, for convenience of explanation, a configuration in which the permanent magnets 811, 821, 831, and 841 are all arranged with the N pole on the upper side will be described as a representative.
<Rotation around the rotation center axis Y1>
As shown in FIG. 7, in order to rotate the movable plate 2 counterclockwise about the rotation center axis Y1, the permanent magnet 811 side of the coil 812a becomes the N pole, and the permanent magnet 831 side of the coil 832b becomes the S pole. A voltage is applied from the power supplies 813 and 833 to the coils 812a and 832b so as to be in the first state (hereinafter, also simply referred to as “first state”). In this first state, no voltage is applied from the power supplies 813 and 833 to the coils 812b and 832a so that the coils 812b and 832a do not generate a magnetic field.

  In the first state, since the south pole of the permanent magnet 811 is attracted to the coil 812a, the drive unit 41 is displaced downward while bending the pair of second shaft portions 43. Further, as described above, since the center G1 of the permanent magnet 811 is shifted to the movable plate 2 side with respect to the rotation center axis Y2 of the drive unit 41, when the south pole of the permanent magnet 811 is attracted to the coil 812a, 1 While twisting and deforming the pair of second shaft portions 43, the drive portion 41 rotates clockwise around the rotation center axis Y2 in FIG.

Similarly, in the first state, the drive unit 61 is displaced upward while bending and deforming the pair of second shaft portions 63. In addition, since the center of the permanent magnet 831 is displaced toward the movable plate 2 with respect to the rotation center axis Y3 of the drive unit 61, when the N pole of the permanent magnet 831 is attracted to the coil 832b, a pair of second magnets While twisting and deforming the shaft portion 63, the drive portion 61 rotates clockwise in FIG. 7 about the rotation center axis Y3.
Thus, in the first state, the drive unit 41 is displaced downward while rotating about the rotation center axis Y2, and the drive unit 61 is displaced upward while rotating about the rotation center axis Y3. .

With the rotation and displacement (vertical movement) of the drive units 41 and 61, the drive unit side shaft portion 423 is inclined so that the end on the movable plate 2 side faces downward, and the drive unit side shaft portion 623 is movable. It inclines so that the edge at the side of the plate 2 faces upward. As a result, the ends on the movable plate 2 side of the drive unit side shaft portions 423 and 623 are shifted in the Z-axis direction.
Then, when the ends on the movable plate 2 side of the drive unit side shaft portions 423 and 623 are displaced in the Z-axis direction, the deformable portions 4211, 4212, 6211, and 6212 are twisted and deformed around the central axis and each connection is made. The movable plate side shaft portions 422 and 622 and the movable plate 2 are integrally inclined counterclockwise in FIG. 7 while the portions 4214, 4215, 6214 and 6215 are curved and deformed.

  As described above, in the first state, the first shaft portion 42 of the connecting portion 4 is bent and deformed (first deformation) into a downwardly convex V shape by the stress relaxation portion 421 in the middle thereof. The first shaft portion 62 of the connecting portion 6 is bent and deformed in a V-shape convex upward (second deformation) at the stress relaxation portion 621 in the middle thereof, with the rotation center axis Y1 as the center. The movable plate 2 is inclined counterclockwise in FIG.

  On the other hand, in order to rotate the movable plate 2 clockwise about the rotation center axis Y1, the state opposite to the first state described above, that is, the permanent magnet 811 side of the coil 812b is the S pole, and the coil 832a. A voltage is applied from the power sources 813 and 833 to the coils 812b and 832a so that the permanent magnet 831 side becomes the second state where the N pole is N pole (hereinafter also simply referred to as “second state”). In this second state, voltage is not applied from the power sources 813 and 833 to the coils 812a and 832b so that the coils 812a and 832b do not generate a magnetic field.

In the second state, deformation opposite to that in the first state described above occurs. That is, in the second state, the first shaft portion 42 of the connecting portion 4 is bent and deformed (second deformation) into a V-shape convex upward at the stress relaxation portion 421 and the first portion of the connecting portion 6 is also deformed. The shaft portion 62 is bent and deformed into a V-shape projecting downward (first deformation) at the stress relaxation portion 621. As a result, the movable plate 2 is tilted clockwise in FIG. 7 around the rotation center axis Y1.
By alternately switching between the first state and the second state, the movable plate 2 can be rotated around the rotation center axis Y1. Note that the rotation of the movable plate 2 around the rotation center axis Y1 is permitted by the torsional deformation of the movable plate side shaft portions 522 and 722 included in the connecting portions 5 and 7 around the center axis.

  Further, for example, when an alternating voltage is applied from the power sources 813 and 833 to the coils 812a, 812b, 832a, and 832b so that the first state and the second state are alternately and periodically switched, the movable plate 2 is rotated. The reciprocating rotation can be periodically performed around the moving center axis Y1. In this case, the alternating voltages applied to the coils 812a, 812b, 832a, and 832b from the power supplies 813 and 833 preferably have the same waveform (the same strength and frequency).

  The frequency of the alternating voltage applied to the coils 812a, 812b, 832a, 832b is not particularly limited, and may be equal to the resonance frequency of the vibration system configured by the movable plate 2 and the connecting portions 4, 5, 6, 7. It may be different, but is preferably different from the resonance frequency. That is, it is preferable to drive the optical scanner 1 in a non-resonant manner. As a result, the optical scanner 1 can be driven more stably.

<Rotation around the rotation center axis X1>
Similar to the rotation of the movable plate 2 around the rotation center axis Y1, the movable plate 2 can be rotated about the rotation center axis X1. Note that the rotation of the movable plate 2 around the rotation center axis X1 is permitted by the torsional deformation of the movable plate side shaft portions 422 and 622 of the connecting portions 4 and 6 around the central axis.

In addition, for example, when an alternating voltage is applied from the power sources 823 and 843 to the coils 822 and 842 in the same manner as the rotation of the movable plate 2 around the rotation center axis Y1, the movable plate 2 is moved around the rotation center axis X1. It can be reciprocated periodically. In this case, the alternating voltages applied to the coils 822 and 842 from the power supplies 823 and 843 preferably have the same waveform.
The frequency of the alternating voltage applied to the coils 822 and 842 is not particularly limited, and may be equal to or different from the resonance frequency of the vibration system configured by the movable plate 2 and the connecting portions 4, 5, 6, and 7. Although it is good, it is preferably different from the resonance frequency. That is, it is preferable to drive the optical scanner 1 in a non-resonant manner. As a result, the optical scanner 1 can be driven more stably.

<Rotation around the rotation center axis X1 and the rotation center axis Y1>
By simultaneously performing the rotation about the rotation center axis X1 and the rotation about the rotation center axis Y1 as described above, the movable plate 2 is moved to the rotation center axis Y1 and the rotation center axis X1. It can be rotated around two-dimensionally. As described above, the rotation of the movable plate 2 around the rotation central axis Y1 is permitted by the torsional deformation of the movable plate side shaft portions 522 and 722 around the central axis. The rotation around the central axis X1 is allowed by the torsional deformation of the movable plate side shaft portions 422 and 622 around the central axis.

  Further, the frequency of the alternating voltage applied to the coils 812 and 832 for rotating the movable plate 2 around the rotation center axis Y1, and the coils 822 and 842 for rotating the movable plate 2 around the rotation center axis X1. The frequency of the alternating voltage applied to may be the same or different. For example, when it is desired to rotate the movable plate 2 around the rotation center axis Y1 faster than the rotation center axis X1, the frequency of the alternating voltage applied to the coils 812 and 832 is changed to the alternating voltage applied to the coils 822 and 842. What is necessary is just to set higher than the frequency of a voltage.

  Further, the strength of the alternating voltage applied to the coils 812 and 832 and the strength of the alternating voltage applied to the coils 822 and 842 may be equal or different. For example, when it is desired to rotate the movable plate 2 around the rotation center axis Y1 larger than the rotation center axis X1, the strength of the alternating voltage applied to the coils 812 and 832 is applied to the coils 822 and 842. What is necessary is just to make it stronger than the strength of an alternating voltage.

  In addition, when an alternating voltage is applied to the coils 812, 822, 832, and 842, the alternating voltage applied to the upper coil or the lower coil of the coils 812, 822, 832, and 842 from the power supplies 813, 823, 833, and 843 An offset voltage (DC voltage) of (+) or (−) may be superimposed. In other words, the strength with which the N poles of the permanent magnets 811, 821, 831, 841 are attracted to the coils 812, 822, 832, 842 (hereinafter also simply referred to as “N pole attracting strength”) and the permanent magnets 811, 821. , 831 and 841 may be made different in strength to be attracted to the coils 812, 822, 832 and 842 (hereinafter also simply referred to as “S pole attracting strength”).

  This offset voltage may be the same or different between the upper and lower coils of the coils 812, 822, 832, and 842. In this way, by rotating the offset voltage on the alternating voltage applied to the coils 812, 822, 832, and 842 from the power supplies 813, 823, 833, and 843, the rotation center axes X1 and Y1 of the movable plate 2 are made the Z axis. Can be shifted in the direction. Thereby, for example, when the optical scanner 1 is incorporated in an image forming apparatus such as a projector, the optical path length of the light emitted from the light source to the movable plate 2 is adjusted even after the image forming apparatus is assembled. Can do. That is, when the image forming apparatus is assembled, the light source and the movable plate 2 are precisely positioned. However, even if these positions deviate from the set values, the positions of the light source and the movable plate 2 are not changed after assembly. Can be corrected.

Further, the movable plate 2 can be displaced irregularly continuously or stepwise by changing the strength of the DC voltage applied to the coils 812, 822, 832, and 842 independently and with time. You can also. Such a driving method is particularly effective when, for example, vector scanning is performed on the light reflected by the light reflecting unit 22.
The driving of the optical scanner 1 has been described in detail above.

  In such an optical scanner 1, the rotation of the movable plate 2 about the rotation center axis Y1 and the rotation about the rotation center axis X1 can be performed by the same mechanism. Further, in the optical scanner 1, the rotation of the movable plate 2 about the rotation center axis Y1 and the rotation about the rotation center axis X1 can be performed independently. That is, in the optical scanner 1, the rotation of the rotation center axis Y1 is not affected by the rotation about the rotation center axis X1, and conversely, the rotation of the rotation center axis X1 is also about the rotation center axis Y1. Unaffected by rotation. Therefore, according to the optical scanner 1, the movable plate 2 can be stably rotated around each of the rotation center axis Y1 and the movable center axis X1.

  Further, as described above, in the optical scanner 1, the rotation of the movable plate 2 around the rotation central axis Y1 is allowed by the torsional deformation of the movable plate side shaft portions 522 and 722 around the central axis. Rotation of the movable plate 2 around the rotation central axis X1 is permitted by the torsional deformation of the movable plate side shaft portions 422 and 622 around the central axis. As described above, each of the connecting portions 4, 5, 6, and 7 has the movable plate side shaft portions 422, 522, 622, and 722 that can be torsionally deformed around the central axis, so that the movable plate 2 is rotated It can be smoothly rotated around the central axes Y1 and X1.

Furthermore, in the optical scanner 1, since the movable plate side shaft portions 422, 522, 622, and 722 are directly connected to the movable plate 2, the movable plate 2 can be moved more smoothly around the rotation center axes Y1 and X1, respectively. Can be rotated around the axis, or can be vibrated in the Z-axis direction.
In the optical scanner 1, in the connecting portion 4, the stress relaxation portion 421 is provided between the movable plate side shaft portion 422 that twists and deforms as described above and the drive portion side shaft portion 423 that is not desired to be deformed. . Therefore, the stress generated by the above-described torsional deformation is absorbed and relaxed by the deformation of the deformation portions 4211 and 4212 and the connection portions 4214 and 4215 of the stress relaxation portion 421 and is not transmitted to the drive portion side shaft portion 423. That is, by providing the stress relieving portion 421, it is possible to reliably prevent the drive portion side shaft portion 423 from being twisted and deformed around its central axis while the movable plate 2 is rotating. The same applies to the connecting parts 5, 6 and 7 other than the connecting part 4. Therefore, the movable plate 2 can be smoothly rotated around each of the rotation center axes Y1 and X1.

  Furthermore, destruction of each drive part side shaft part 423, 523, 623, 723 is effectively prevented. In other words, in a rod-shaped member, the fracture when the stress in the Z-axis direction is applied from the state in which torsional deformation around the central axis occurs rather than the fracture strength when the stress in the Z-axis direction is applied from the natural state. It is technically clear that the strength is lower. Therefore, as described above, the stress relaxation portions 421, 521, 621, and 721 are provided, and the drive portion side shaft portion 423, by preventing the drive portion side shaft portions 423, 523, 623, and 723 from being twisted and deformed. The destruction of 523, 623, and 723 can be effectively prevented.

  Further, in the connecting portion 4, since the driving portion side shaft portion 423 is not substantially deformed, the stress generated by the turning of the driving portion 41 can be efficiently used for the turning of the movable plate 2. The same applies to the connecting portions 5, 6, and 7. Therefore, the movable plate 2 can be rotated with a large rotation angle and power saving, or can be vibrated in the Z-axis direction with a large amplitude.

  Moreover, in the connection part 4, since the stress relaxation part 421 has the non-deformation part 4213, the 1st axial part 42 can be bent centering on this non-deformation part 4213. FIG. The same applies to the connecting portions 5, 6, and 7. Therefore, the first shaft portions 42, 52, 62, 72 of the connecting portions 4, 5, 6, 7 can be bent easily and reliably, and the movable plate 2 can be stably rotated and vibrated. it can.

  Further, the connecting portion 4 includes a deforming portion 4211 where the stress relaxation portion 421 is connected to the movable plate side shaft portion 422, and a deforming portion 4212 connected to the driving portion side shaft portion 423. At the time of bending, the deformation portions 4211 and 4212 are torsionally deformed around the central axis, thereby effectively relieving the stress generated by the bending. The same applies to the connecting portions 5, 6, and 7. Therefore, the first shaft portions 42, 52, 62, and 72 of the connecting portions 4, 5, 6, and 7 can be reliably bent, and the first shaft portions 42, 52, 62, and 72 can be destroyed. Can be prevented. That is, the optical scanner 1 can be driven stably.

  Moreover, in the connection part 4, since the stress relaxation part 421 has a pair of deformation | transformation parts 4211 and 4212, the following effects can also be exhibited. That is, for example, the thermal expansion of the movable plate side shaft portion 422 and the drive portion side shaft portion 423 due to heat generated from the coil 812 by energization or heat generated by light applied to the light reflecting portion 22 is caused by deformation portions 4211 and 4212. Can be tolerated by deformation. The same applies to the connecting portions 5, 6, and 7. Therefore, the optical scanner 1 can prevent or suppress the stress from remaining in the vibration structure 11, and can exhibit desired vibration characteristics regardless of the temperature.

  Here, returning to the description of the configuration of the optical scanner 1, with respect to the connecting portions 4 and 6, the separation distance between the rotation center axis Y 1 and the center axis Y 4 of the non-deformation portion 4213 and the rotation center axis Y 1 and the non-deformation portion 6213. When the distance between the center axis Y5 is L1, the distance between the center axis Y5 and the rotation center axis Y2 and the distance between the center axis Y5 and the rotation center axis Y3 are L2, respectively, the magnitude relationship between L1 and L2 is There is no particular limitation, and the relationship L1> L2 may be satisfied, the relationship L1 = L2 may be satisfied, or the relationship L1 <L2 may be satisfied.

In the case of L1> L2, the rotation angle of the movable plate 2 is smaller than in the case of L1 = L2, but the posture of the movable plate 2 can be controlled with higher accuracy. The same applies to the connecting portion 6. Therefore, the rotation angle of the movable plate 2 becomes small with respect to the rotation angle of the drive units 41 and 61. Thereby, the rotation angle of the movable plate 2 and the inclination when stationary can be controlled with high accuracy.
Further, in the case of L1> L2, it is preferable that the deformable portion 4212 is configured to be torsionally deformed more easily than the deformable portion 4211. Specifically, for example, it is preferable to make the width of the deformable portion 4212 thinner than the width of the twisted deformable portion 4211. As described above, since the connecting portion 4 is formed by etching the SOI substrate 100 in the thickness direction, the control of the width that matches the surface direction of the SOI substrate 100 is simple, and the process is performed. This is because it can be performed without increasing. The same applies to the connecting portion 6.

In the case of L1 <L2, the rotation angle of the movable plate 2 can be increased compared to the case of L1 = L2. The same applies to the connecting portion 6. Therefore, the rotation angle of the movable plate 2 is increased with respect to the rotation angle of the drive units 41 and 61. Thereby, the rotation angle of the movable plate 2 and the inclination at the time of stationary can be enlarged.
In the case of L1 <L2, it is preferable that the deforming portion 4211 is more easily twisted and deformed than the deforming portion 4212, contrary to the case of L1> L2. The same applies to the connecting portion 6.

  Although the connecting portions 4 and 6 have been described above, the same applies to the connecting portions 5 and 7. That is, the separation distance between the rotation center axis X1 and the center axis X4 of the non-deformation part 5213 and the separation distance between the rotation center axis X1 and the center axis X5 of the non-deformation part 7213 are L3, respectively. When the separation distance of X2 and the separation distance of the center axis X5 and the rotation center axis X3 are L4, the magnitude relationship between L3 and L4 is not particularly limited, and the relationship of L3> L4 may be satisfied, L3 = The relationship of L4 may be satisfied, and the relationship of L3 <L4 may be satisfied. The effects when L3> L4, L3 = L4, and L3 <L4 are the same as the effects when L1> L2, L1 = L2, and L1 <L2, respectively, and the description thereof is omitted.

The relationship between L1 and L2 and the relationship between L3 and L4 may or may not match. That is, L1 = L2 and L3 = L4, L1> L2 and L3> L4, L1 <L2 and L3 <L4, L1 = L2 and L3> L4, L1> L2 and L3 = L4, L1> L2 and L3 <L4 etc. may be sufficient. Further, L1 and L3 and L2 and L4 may be equal to or different from each other.
Thus, the optical scanner 1 can exhibit different effects by changing the lengths and relationships of L1, L2, L3, and L4. Therefore, the optical scanner 1 has excellent convenience. L Note that the lengths and relationships of 1, L2, L3, and L4 may be set as appropriate based on the intended use (required characteristics) of the optical scanner 1.

Second Embodiment
Next, a second embodiment of the present invention will be described.
FIG. 8 is a diagram for explaining the displacing means of the second embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner of the second embodiment will be described focusing on the differences from the optical scanner of the above-described embodiment, and the description of the same matters will be omitted.

  The optical scanner of the second embodiment is substantially the same as the optical scanner 1 of the first embodiment, except that the positional relationship between the drive unit and the permanent magnet and the positional relationship between the coil and the permanent magnet are different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above. Although not shown, the optical scanner of this embodiment also has four connecting portions and first to fourth displacement means corresponding thereto. In the following, since they have the same configuration, one connecting portion and the corresponding displacement means 8A (first displacement means 81A) will be representatively described.

The optical scanner 1A of the present embodiment includes a drive unit 41A instead of the drive unit 41 in the optical scanner 1 of the first embodiment described above.
The drive unit 41A is provided with a permanent magnet 811. The center G1 of the permanent magnet 811 and the rotation center axis Y2 of the drive unit 41A are aligned in the X-axis direction.
Further, when viewed from the extending direction of the second shaft portion 43 (that is, the Y-axis direction), the center G1 of the permanent magnet 811 is shifted to the opposite side to the movable plate 2 with respect to the axis Z1 of the coils 812a and 812b. Are arranged. That is, the coils 812a and 812b have the axis Z1 positioned on the movable plate 2 side with respect to the center G1 of the permanent magnet 811 and the rotation center axis Y2 of the drive unit 41A.

  By having such a positional relationship between the center G1 of the permanent magnet 811, the rotation center axis Y2 of the drive unit 41A, and the axis Z1 of the coils 812a and 812b, the permanent magnet 811 is located on the movable plate 2 side of the coils 812a and 812b. It becomes more susceptible to the influence of the magnetic force of the part on the opposite side than the part. Therefore, when the permanent magnet 811 is attracted to the coil 812a side by the magnetic force of the coil 812a, the lower end portion of the permanent magnet 811 is displaced to the side opposite to the movable plate 2 as shown by a two-dot chain line in FIG. Accordingly, the drive unit 41A is displaced downward and rotates clockwise in FIG.

Similarly, when the permanent magnet 811 is attracted to the coil 812b side by the magnetic force of the coil 812b, the upper end portion of the permanent magnet 811 is displaced to the side opposite to the movable plate 2. Accordingly, the drive unit 41A is displaced upward and rotates counterclockwise in FIG.
In this manner, the drive unit 41 can be rotated while the second shaft portions 43 are twisted and deformed. It should be noted that the center G1 of the permanent magnet 811 may be shifted to the movable plate 2 side with respect to the axis Z1 of the coils 812a and 812b. Even in this case, the drive unit 41 can be rotated while twisting and deforming each second shaft portion 43.

Therefore, even if the position in the X-axis direction of the center G1 of the permanent magnet 811 and the rotation center axis Y2 of the drive unit 41A coincides, the drive unit 41 is displaced in the Z-axis direction by the magnetic force of the coils 812a and 812b. At the same time, it can be rotated around the rotation center axis Y1.
Also by such 2nd Embodiment, the effect similar to 1st Embodiment can be exhibited.

<Third Embodiment>
Next, a third embodiment of the present invention will be described.
FIG. 9 is a diagram for explaining the displacement means of the third embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner of the third embodiment will be described focusing on the differences from the optical scanner of the above-described embodiment, and the description of the same matters will be omitted.

  The optical scanner of the third embodiment is substantially the same as the optical scanner 1 of the first embodiment except that the positional relationship between the drive unit, the permanent magnet, and the coil is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above. Although not shown, the optical scanner of this embodiment also has four connecting portions and first to fourth displacement means corresponding thereto. In the following, since they have the same configuration, one connecting portion and the corresponding displacement means 8B (first displacement means 81B) will be representatively described.

In the optical scanner 1B of the present embodiment, the center G1 of the permanent magnet 811 is positioned on the movable plate 2 side with respect to the rotation center axis Y2 of the drive unit 41, and the center G1 of the permanent magnet 811 is the axis of the coils 812a and 812b. Located on Z1.
By having such a positional relationship between the center G1 of the permanent magnet 811, the rotation center axis Y2 of the drive unit 41, and the axis Z1 of the coils 812a and 812b, the center of the permanent magnet 811 is the same as in the first embodiment described above. Since G1 is displaced in the X-axis direction with respect to the rotation center axis Y2 of the drive unit 41, the permanent magnet 811 rotates around the rotation center axis Y1 as it is displaced downward. In addition, as in the second embodiment described above, the permanent magnet 811 is more susceptible to the influence of the magnetic force on the opposite side of the coil 812a, 812b than on the movable plate 2 side. Therefore, when the permanent magnet 811 is attracted to the coil 812a side by the magnetic force of the coil 812a, the lower end portion of the permanent magnet 811 is displaced to the side opposite to the movable plate 2 as shown by a two-dot chain line in FIG. Accordingly, the drive unit 41 is displaced downward and rotates clockwise in FIG.

Similarly, when the permanent magnet 811 is attracted to the coil 812b side by the magnetic force of the coil 812b, the upper end portion of the permanent magnet 811 is displaced to the side opposite to the movable plate 2. Accordingly, the drive unit 41 is displaced upward and rotates counterclockwise in FIG.
Therefore, the drive unit 41 can be displaced in the Z-axis direction by the magnetic force of the coils 812a and 812b and can be smoothly rotated around the rotation center axis Y1. In particular, in the present embodiment, since the center G1 of the permanent magnet 811 is located on the axis Z1 of the coils 812a and 812b, the drive unit 41 can be efficiently displaced in the vertical direction (Z-axis direction). In addition, the center G1 of the permanent magnet 811 may be shifted from the axis Z1 of the coils 812a and 812b to the movable plate 2 side or the opposite side.
According to the third embodiment, the same effect as that of the first embodiment can be exhibited.

<Fourth embodiment>
Next, a fourth embodiment of the present invention will be described.
FIG. 10 is a diagram for explaining the displacing means of the fourth embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner according to the fourth embodiment will be described with a focus on differences from the optical scanner according to the above-described embodiment, and description of similar matters will be omitted.

  The optical scanner 1G of the fourth embodiment is substantially the same as the optical scanner 1 of the first embodiment except that the positional relationship between the permanent magnet, the drive unit, and the coil is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above. Although not shown, the optical scanner of this embodiment also has four connecting portions and first to fourth displacement means corresponding thereto. Below, since these are the structures which are mutually the same, one connection part and the displacement means 8C (1st displacement means 81C) corresponding to this are demonstrated typically.

The optical scanner 1C according to the present embodiment includes a drive unit 41A instead of the drive unit 41 in the optical scanner 1 according to the first embodiment described above.
The drive unit 41A is provided with a permanent magnet 811. The center G1 of the permanent magnet 811 and the rotation center axis Y2 of the drive unit 41A are aligned in the X-axis direction.
Further, when viewed from the extending direction of the second shaft portion 43 (that is, the Y-axis direction), the center G1 of the permanent magnet 811 and the center of the second shaft portion 43 (the rotation center axis Y2 of the drive portion 41A) are , Located on the axis Z1 of the coils 812a and 812b, respectively. That is, the coils 812a and 812b are provided such that the axis Z1 passes through the center G1 of the permanent magnet 811 and the rotation center axis Y2 of the drive unit 41A.

  By having such a positional relationship between the center G1 of the permanent magnet 811, the rotation center axis Y2 of the drive unit 41A, and the axis Z1 of the coils 812a and 812b, the permanent magnet 811 is attracted to the coil 812a side by the magnetic force of the coil 812a. In this case, as indicated by a two-dot chain line in FIG. 10, the permanent magnet 811 and the drive unit 41A can be displaced downward while preventing or suppressing the permanent magnet 811 and the drive unit 41A from tilting.

Similarly, when the permanent magnet 811 is attracted to the coil 812b side by the magnetic force of the coil 812b, the permanent magnet 811 and the drive unit 41A are displaced upward while preventing or suppressing the tilting of the permanent magnet 811 and the drive unit 41A. be able to.
In this way, it is possible to displace the drive unit 41A in the Z-axis direction while bending and deforming each second shaft portion 43 while suppressing the rotation of the drive unit 41A.

Thus, by preventing or suppressing the tilt when the permanent magnet 811 and the drive unit 41A are displaced up and down, the relationship between the displacement amount of the permanent magnet 811 and the drive unit 41A and the rotation angle of the movable plate 2 is simplified. Therefore, the control of the displacement means 8 can be simplified.
According to the fourth embodiment, the same effect as that of the first embodiment can be exhibited.

<Fifth Embodiment>
Next, a fifth embodiment of the present invention will be described.
FIG. 11 is a diagram for explaining the displacing means of the fifth embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner of the fifth embodiment will be described focusing on the differences from the optical scanner of the above-described embodiment, and the description of the same matters will be omitted.

  The optical scanner of the fifth embodiment is substantially the same as the optical scanner 1 of the first embodiment except that the positional relationship between the permanent magnet, the drive unit, and the coil is different, and the upper coil is omitted. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above. Although not shown, the optical scanner of this embodiment also has four connecting portions and first to fourth displacement means corresponding thereto. Below, since these are the structures which are mutually the same, one connection part and the displacement means 8D (1st displacement means 81D) corresponding to this are demonstrated typically.

The optical scanner 1D of this embodiment includes a drive unit 41D instead of the drive unit 41 in the optical scanner 1 of the first embodiment described above.
A recess 411D is formed on the lower surface of the drive unit 41D, and a permanent magnet 811D is inserted into the recess 411D. The positions in the X-axis direction of the center G1 of the permanent magnet 811D and the rotation center axis Y2 of the drive unit 41D are the same.

The coil 812a is provided such that its axis Z1 passes through the center G1 of the permanent magnet 811D and the rotation center axis Y2 of the drive unit 41D.
By having such a positional relationship between the center G1 of the permanent magnet 811D, the rotation center axis Y2 of the drive unit 41D, and the axis Z1 of the coil 812a, the permanent magnet 811D and the drive unit 41D are the same as in the fourth embodiment described above. Can prevent or suppress the tilt when the is displaced up and down.

Moreover, in this embodiment, since a coil and a permanent magnet are not installed above the drive part 41D, there exists an advantage that an apparatus structure becomes simple.
In addition, since the permanent magnet 811D is positioned by the concave portion 411D formed in the drive unit 41D, the permanent magnet 811D can be easily and reliably installed at a desired position during manufacturing.
According to the fifth embodiment, the same effect as that of the first embodiment can be exhibited.

<Sixth Embodiment>
Next, a sixth embodiment of the present invention will be described.
FIG. 12 is a diagram for explaining the displacing means of the sixth embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner according to the sixth embodiment will be described focusing on the differences from the optical scanner according to the above-described embodiment, and description of similar matters will be omitted.

  The optical scanner of the sixth embodiment is substantially the same as the optical scanner 1 of the first embodiment except that the positional relationship between the permanent magnet, the drive unit, and the coil is different, and the upper coil is omitted. The optical scanner of the sixth embodiment is the same as the optical scanner of the fifth embodiment described above, except that the permanent magnet is installed in a different manner from the drive unit. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above. Although not shown, the optical scanner of this embodiment also has four connecting portions and first to fourth displacement means corresponding thereto. Below, since these are the structures which are mutually the same, one connection part and the displacement means 8E (1st displacement means 81E) corresponding to this are demonstrated typically.

In the optical scanner 1E of the present embodiment, a handle layer 411E is provided on the lower surface of the drive unit 41. A permanent magnet 811E is provided on the lower surface of the handle layer 411E.
Further, the positions in the X-axis direction of the center G1 of the permanent magnet 811E and the rotation center axis Y2 of the drive unit 41 are the same.

The coil 812a is provided such that its axis Z1 passes through the center G1 of the permanent magnet 811E and the rotation center axis Y2 of the drive unit 41.
By having such a positional relationship between the center G1 of the permanent magnet 811E, the rotation center axis Y2 of the drive unit 41, and the axis Z1 of the coil 812a, the permanent magnet 811E and the drive unit 41 are the same as in the fourth embodiment described above. Can prevent or suppress the tilt when the is displaced up and down.

Moreover, in this embodiment, since a coil and a permanent magnet are not installed above the drive part 41, there exists an advantage that an apparatus structure becomes simple.
In addition, the handle layer 411E formed on the lower surface of the drive unit 41 has a function of positioning the permanent magnet 811E with respect to the drive unit 41. Also by providing such a handle layer 411E in the drive unit 41, the permanent magnet 811E can be easily and reliably installed at a desired position during manufacturing.

The handle layer 411E is formed in a shape and size corresponding to the installation position and installation range of the permanent magnet 811E.
The constituent material of the handle layer 411E is not particularly limited, and examples thereof include a silicon material, a resin material, and a metal material. The method for forming the handle layer 411E is not particularly limited. For example, dry deposition methods such as vacuum deposition, sputtering (low temperature sputtering), and ion plating, wet plating methods such as electrolytic plating and electroless plating, thermal spraying methods, Examples include thin film bonding.
Also according to the sixth embodiment, the same effect as that of the first embodiment can be exhibited.

<Seventh embodiment>
Next, a seventh embodiment of the present invention will be described.
FIG. 13 is a diagram for explaining the displacing means of the seventh embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner of the seventh embodiment will be described focusing on differences from the optical scanner of the above-described embodiment, and description of similar matters will be omitted.

  The optical scanner according to the seventh embodiment is substantially the same as the optical scanner 1 according to the first embodiment except that the permanent magnet has a different form and a magnetic core is provided. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above. Although not shown, the optical scanner of this embodiment also has four connecting portions and first to fourth displacement means corresponding thereto. In the following, since these components have the same configuration, one connecting portion and the corresponding displacement means 8F (first displacement means 81F) will be representatively described.

The optical scanner 1 </ b> F of the present embodiment includes a permanent magnet 811 a provided on the lower surface of the drive unit 41 and a permanent magnet 811 b provided on the upper surface of the drive unit 41.
The permanent magnets 811a and 811b each have a plate shape and are magnetized in the thickness direction (that is, the Z-axis direction). The direction of magnetization of the permanent magnet 811a and the direction of magnetization of the permanent magnet 811b may be the same direction or opposite directions.

A magnetic core 85a is fixedly provided on the base 12, and a coil 812a is provided so as to wind around the outer periphery of the magnetic core 85a.
Similarly, a magnetic core 85b is fixedly provided on the attachment member 13, and a coil 812b is provided so as to wind the outer periphery of the magnetic core 85b.
By providing such magnetic cores 85a and 85b, the magnetic flux density by the coils 812a and 812b in the vicinity of the permanent magnets 811a and 811b can be increased. Therefore, the drive part 41 can be displaced efficiently.
Also according to the seventh embodiment, the same effect as that of the first embodiment can be exhibited.

<Eighth Embodiment>
Next, an eighth embodiment of the present invention will be described.
FIG. 14 is a view for explaining a connecting portion of the eighth embodiment of the optical scanner of the present invention.
Hereinafter, the optical scanner of the eighth embodiment will be described focusing on the differences from the optical scanner of the above-described embodiment, and the description of the same matters will be omitted.

  The optical scanner according to the eighth embodiment is substantially the same as the optical scanner described above, except that the configuration of the non-deformable portion of the stress relaxation portion of each connecting portion is different. In addition, in this embodiment, since the structure of the non-deformation part in each connection part 4,5,6,7 is mutually the same, it demonstrates on behalf of the connection part 4, and about connection part 5,6,7, The description is omitted. The same reference numerals are given to the same components as those in the first embodiment described above.

As shown in FIG. 14, in the stress relaxation part 421G of the connection part 4G, a pair of non-deformation parts 4213G are provided. The pair of non-deformable portions 4213G are separated from each other in the Y-axis direction and are located on one axis parallel to the Y-axis. Even in the connecting portion 4G having such a configuration, the first shaft portion 42G can be locally bent with the line segment connecting the pair of non-deformed portions 4213G as an axis.
Also according to the eighth embodiment, the same effect as that of the first embodiment can be exhibited.

<Ninth Embodiment>
Next, a ninth embodiment of the present invention will be described.
FIG. 15 is a diagram for explaining the vibration structure according to the ninth embodiment of the optical scanner of the invention.
Hereinafter, the optical scanner according to the ninth embodiment will be described focusing on the differences from the optical scanner according to the above-described embodiment, and description of similar matters will be omitted.

The optical scanner according to the ninth embodiment is substantially the same as the optical scanner described above except that the orientation of the vibrating structure and the configuration of the movable plate are different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 15, in the optical scanner 1H of the present embodiment, the vibrating structure 11 is reversed with respect to the above-described embodiment. That is, the surface located on the base 12 side in the above-described embodiment is located on the side opposite to the base 12 and the surface located on the side opposite to the base 12 is located on the base 12 side. Is provided.

  In the present embodiment, the movable plate 2H includes a base portion 23H that is connected to each of the connecting portions 4, 5, 6, and 7, and a light reflecting plate 25H that is fixed to the base portion 23H via the column portion 24H. Yes. In such a movable plate 2H, the light reflecting portion 22 is provided on the upper surface of the light reflecting plate 25H. By adopting such a configuration for the movable plate 2H, it is possible to increase the area of the light reflecting portion 22 while preventing an increase in the size of the optical scanner 1H. Thereby, the light reflecting portion 22 can reflect light with a larger luminous flux. Further, it is possible to make it difficult to transmit heat generated by light reflection at the light reflecting portion 22 to each of the connecting portions 4, 5, 6, 7, and to suppress thermal expansion of the connecting portions 4, 5, 6, 7. Can do. From the viewpoint of preventing heat transfer to each of the connecting portions 4, 5, 6, and 7, the column portion 24D may be made of a material having excellent heat insulation.

  The light reflecting plate 25H may have any shape and size as long as the driving of the optical scanner 1H is not hindered. For example, the light reflecting plate 25H is fit between the pair of non-deformable portions 4213 and 6213 in the X-axis direction. It is preferable that the shape and the size fit between the pair of non-deformable portions 5213 and 7213 in the Y-axis direction. Thus, when the first shaft portions 42, 52, 62, 72 of the connecting portions 4, 5, 6, 7 are bent, any one of the drive portion side shaft portions 423, 523, 623, 723 and the light reflecting plate 25H. Can be reliably prevented.

Specifically, the planar shape of the light reflecting plate 25H is preferably, for example, a circular shape having a diameter smaller than the distance between the pair of non-deformed portions 4213 and 6213. It is also preferable that the length in the X-axis direction is shorter than the distance between the pair of non-deformed portions 4213 and 6213 and the length in the Y-axis direction is shorter than the distance between the pair of non-deformed portions 5213 and 7213.
According to the ninth embodiment, the same effect as that of the first embodiment can be exhibited.

<Tenth Embodiment>
Next, a tenth embodiment of the present invention will be described.
FIG. 16 is a diagram (plan view) illustrating a vibrating structure according to a tenth embodiment of the optical scanner of the present invention, and FIG. 17 is an enlarged perspective view of a connecting portion of the optical scanner shown in FIG.
Hereinafter, the optical scanner according to the tenth embodiment will be described with a focus on differences from the optical scanner according to the above-described embodiment, and description of similar matters will be omitted.

The optical scanner according to the tenth embodiment is substantially the same as the optical scanner described above except that the configuration of the stress relaxation portion is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.
As shown in FIG. 16, in the optical scanner 1I of this embodiment, the stress relaxation portions 421I, 521I, 621I, and 721I included in the connecting portions 4I, 5I, 6I, and 7I are respectively in the X-axis direction and the Y-axis direction. The meander structure meanders so as to extend alternately. Since these stress relaxation portions 421I, 521I, 621I, and 721I have the same configuration, the stress relaxation portion 421I will be described as a representative, and the other stress relaxation portions 521I, 621I, and 721I will be described. Is omitted.

  As shown in FIG. 17, the stress relaxation portion 421I is connected to the movable plate side shaft portion 422, and extends from the first extending portion 4211I extending in the X-axis direction and the end portion of the first extending portion 4211I. A second extension portion 4212I extending in the Y-axis direction, a third extension portion 4213I extending in the X-axis direction from the end of the second extension portion 4212I, and a third A fourth extending portion 4214I extending in the Y-axis direction from the end portion of the extending portion 4213I, and a fifth extending portion extending in the X-axis direction from the end portion of the fourth extending portion 4214I 4215I, a sixth extending portion 4216I extending in the Y-axis direction from the end portion of the fifth extending portion 4215I, and a driving portion side extending in the X-axis direction from the end portion of the sixth extending portion 4216I And a seventh extending portion 4217I connected to the shaft portion 423.

  Of the four extending portions 4211I, 4213I, 4215I, and 4217I extending in the X-axis direction, the first extending portions 4211I and 4217I are provided on the rotation center axis X1 in the XY plan view, respectively. The third extending portion 4213I and the fifth extending portion 4215I are provided on opposite sides with respect to the rotation center axis X1 in the XY plan view (plan view in FIG. 16). In addition, it is preferable that the separation distance with the rotation center axis | shaft X1 of the 3rd extension part 4213I and the 5th extension part 4215I is mutually equal.

On the other hand, the fourth extending portion 4214I of the three extending portions 4212I, 4214I, and 4216I extending in the Y-axis direction is provided across the rotational movement central axis X1 in the XY plan view. The second extending portion 4212I and the sixth extending portion 4216I are provided on opposite sides to the rotation center axis X1 in the XY plan view. Note that these three extending portions 4212I, 4214I, and 4216I are preferably arranged at an equal pitch in the X-axis direction. That is, it is preferable that the separation distance between the second extension portion 4212I and the fourth extension portion 4214I is equal to the separation distance between the fourth extension portion 4214I and the sixth extension portion 4216I.
Each of the seven extending portions 4211I to 4217I described above can be torsionally deformed around its central axis and can be curvedly deformed. For example, these seven extending portions 4211I to 4217I are each configured by the second Si layer 130 shown in FIGS. 4 and 5 of the first embodiment described above.

In such a stress relaxation portion 421I, each of the extending portions 4211I to 4217I deforms at least one of torsional deformation and curved deformation, so that the first shaft portion is centered on the fourth extending portion 4214I. 42I can be bent, and stress generated by torsional deformation of the movable plate side shaft portion 422 can be relieved.
The stress relaxation part 421I has been described above.

  In this embodiment, the stress relaxation portions 721I, 521I, and 621I are configured by rotating the stress relaxation portions 421I by 90 °, 180 °, and 270 ° clockwise in FIG. That is, the stress relaxation portions 421I and 621I that face each other via the movable plate 2 are rotationally symmetric with respect to the movable plate 2, and the stress relaxation portions 521I and 721I that face each other via the movable plate 2 rotate with respect to the movable plate 2. Symmetric.

The stress relaxation portion 421I has a configuration in which seven extending portions extend alternately in the X-axis direction and the Y-axis direction, but the number of extending portions is not limited to this, and for example, 11 or 15 may be sufficient. However, among the plurality of extending portions extending in the X-axis direction, the number of extending portions on one side with respect to the rotation center axis X1 may be equal to the number of extending portions on the other side. preferable.
Also according to the tenth embodiment, the same effects as those of the first embodiment can be exhibited.

<Eleventh embodiment>
Next, an eleventh embodiment of the present invention will be described.
FIG. 18 is a diagram (plan view) for explaining the vibration structure according to the eleventh embodiment of the optical scanner of the invention.
Hereinafter, the optical scanner according to the eleventh embodiment will be described with a focus on differences from the optical scanner according to the above-described embodiment, and description of similar matters will be omitted.
The optical scanner 1J according to the eleventh embodiment is substantially the same as the optical scanner 1 according to the first embodiment except that the number and arrangement of the connecting portions are different and the configuration of the displacement means associated therewith is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

The optical scanner 1J of the present embodiment omits the connecting portion 7 and the fourth displacing means 84 in the optical scanner 1 of the first embodiment described above, and the connecting portion 4 is centered on the movable plate 2 in FIG. The structure is similar to the structure in which the connecting portion 6 is rotated 30 ° counterclockwise about the movable plate 2 in FIG.
Such an optical scanner 1J includes three connecting portions 4J, 5J, and 6J that rotatably support the movable plate 2 with respect to the support portion 3J, and a displacement means 8J that displaces the movable plate 2. .

The three connecting portions 4J, 5J, and 6J are arranged at equal angular intervals of 120 ° with the movable plate 2 as the center in plan view.
The connecting portions 4J, 5J, and 6J have the same configuration except for the disposition (orientation) as described above.
The displacement means 8J is provided corresponding to the first displacement means 81J provided corresponding to the connecting portion 4J, the second displacement means 82J provided corresponding to the connecting portion 5J, and the connecting portion 6J. Third displacement means 83J.

The first displacing means 81J includes a permanent magnet 811 provided in the connecting portion 4J, a coil 812 provided corresponding to the permanent magnet 811, and a power source 813J that applies a predetermined voltage to the coil 812.
Similarly, the second displacing means 82J includes a permanent magnet 821 provided in the connecting portion 5J, a coil 822 provided corresponding to the permanent magnet 821, and a power source 823J that applies a predetermined voltage to the coil 822. Have. The third displacing means 83J includes a permanent magnet 831 provided in the connecting portion 6J, a coil 832 provided corresponding to the permanent magnet 831, and a power source 833J that applies a predetermined voltage to the coil 832. .

  In such a displacement means 8J, for example, in order to rotate the movable plate 2 around an axis parallel to the X axis, the drive unit 41 is displaced upward and the drive units 51 and 61 are displaced downward. The state in which the drive unit 41 is displaced downward and the drive units 51 and 61 are displaced upward may be switched alternately. Further, in order to rotate the movable plate 2 around an axis parallel to the Y axis, the drive unit 41 is displaced upward and the drive unit 61 is moved downward without displacing the drive unit 51 in the vertical direction. The state to be displaced and the state in which the drive unit 41 is displaced downward and the drive unit 51 is displaced upward may be switched alternately.

Also according to the eleventh embodiment, the same effects as those of the first embodiment can be exhibited.
The optical scanner as described above can be suitably applied to an image forming apparatus such as a projector, a laser printer, an imaging display, a barcode reader, and a scanning confocal microscope. As a result, an image forming apparatus having excellent drawing characteristics can be provided.

Specifically, a projector 200 as shown in FIG. 19 will be described. For convenience of explanation, the longitudinal direction of the screen S is referred to as “lateral direction”, and the direction perpendicular to the longitudinal direction is referred to as “vertical direction”.
The projector 200 includes a light source device 210 that emits light such as a laser, a plurality of dichroic mirrors 220, 220, and 220, and the optical scanner 1.

The light source device 210 includes a red light source device 211 that emits red light, a blue light source device 212 that emits blue light, and a green light source device 213 that emits green light. Each dichroic mirror 220 is an optical element that combines light emitted from each of the red light source device 211, the blue light source device 212, and the green light source device 213.
Such a projector 200 combines light emitted from the light source device 210 (red light source device 211, blue light source device 212, green light source device 213) by a dichroic mirror 220 based on image information from a host computer (not shown). The combined light is two-dimensionally scanned by the optical scanner 1 to form a color image on the screen S.

During the two-dimensional scanning, the light reflected by the light reflecting portion 22 by the rotation of the movable plate 2 of the optical scanner 1 around the rotation central axis Y1 is scanned in the horizontal direction of the screen S (main scanning). On the other hand, the light reflected by the light reflecting portion 22 by the rotation of the movable plate 2 of the optical scanner 1 around the rotation center axis X1 is scanned (sub-scanned) in the vertical direction of the screen S.
The light scanning by the optical scanner 1 may be performed by raster scanning as described above, or may be performed by vector scanning. In particular, since the optical scanner 1 is suitable for vector scanning because of its configuration, it is preferable to scan light by vector scanning.

  The vector scan is a method of scanning the light emitted from the light source device 210 with respect to the screen S so as to sequentially form line segments connecting two different points on the screen S. In other words, this is a method of forming a desired image on the screen S by collecting minute straight lines. As described above, the optical scanner 1 is particularly suitable for such vector scanning because the movable plate 2 can be irregularly and continuously displaced.

  More specifically, when a set of characters as shown in FIG. 20 is drawn by vector scanning, the light emitted from the light source device 210 is scanned so as to write each character. At this time, the light is irregularly controlled by controlling the posture (rotation) around the rotation center axis X1 and the posture (rotation) around the rotation center axis Y1 of the movable plate 2 of the optical scanner 1. It is possible to scan and draw a character as shown in FIG. According to such a vector scan, it is not necessary to scan the entire surface of the screen S like the raster scan, so that an image can be efficiently drawn.

In FIG. 19, the light synthesized by the dichroic mirror 220 is scanned two-dimensionally by the optical scanner 1, and then the light is reflected by the fixed mirror 250 and then an image is formed on the screen S. However, the fixed mirror 250 may be omitted, and the screen S may be directly irradiated with light two-dimensionally scanned by the optical scanner 1.
Although the actuator, optical scanner, and image forming apparatus of the present invention have been described based on the illustrated embodiment, the present invention is not limited to this. For example, in the actuator, the optical scanner, and the image forming apparatus of the present invention, the configuration of each unit can be replaced with an arbitrary configuration that exhibits the same function, and an arbitrary configuration can be added. For example, in the optical scanner of this invention, you may combine embodiment mentioned above suitably.

  In the above-described embodiment, the configuration in which electromagnetic driving using a permanent magnet and an electromagnetic coil is adopted as the configuration of the displacement means has been described. However, the configuration is limited to this as long as the movable plate can be displaced as described above. Instead, for example, electrostatic driving or piezoelectric driving may be employed as the displacement means. Further, for example, a moving coil type electromagnetic drive in which a coil is provided in the drive unit and a permanent magnet is provided on the base can be employed.

In the above-described embodiment, the configuration in which the first shaft portion of each connecting portion has the stress relaxation portion is described. However, the configuration is not limited to this, and the stress relaxation portion may be omitted. That is, as for the 1st axial part of each connection part, the movable plate side axial part and the drive part side axial part may be directly connected.
In the above-described embodiment, the configuration has been described in which the driving unit side shaft portion of each connecting portion is not substantially deformed when the optical scanner is driven. However, the present invention is not limited to this, and for example, bending deformation in the Z-axis direction ( (Bending deformation).

  Further, in the above-described embodiment, by changing the thickness of the SOI substrate, the parts to be deformed (second shaft part, movable plate side shaft part, deformed part and connecting part) and parts not to be deformed (driving) by changing the thickness of the SOI substrate. However, the present invention is not limited to this. For example, by changing the width, the part to be deformed and the part not to be deformed may be made separately.

DESCRIPTION OF SYMBOLS 1, 1G ... Optical scanner 11 ... Vibrating structure 12 ... Base 13 ... Mounting member 121 ... Base 122 ... Frame part 2, 2H ... Movable plate 21 ... Upper surface 22 ... Light reflection part 23H …… Base 24H …… Pillar 25H …… Light reflector 3 …… Supporting part 4, 4G, 4I, 4J, 5, 5J, 6, 6J, 7 …… Connecting part 41, 51, 61, 71 …… Drive Part 41A, 41D ...... Drive part 411, 412 ... Through hole 411D ... Concavity 411E ... Handle layer 413 ... Beam part 42, 42C, 52, 62, 72 ... First shaft part 421, 421C, 421G , 421I, 421E, 521, 521E, 521I, 621, 621E, 621I, 721, 721I, 721E... Stress relieving part 4211, 4212, 5211, 5212, 6211, 6212, 7211, 721 2... Deformation part 4213, 4213C, 5213, 6213, 7213 ... Non-deformation part 4214, 4215, 5214, 5215, 6214, 6215, 7214, 7215 ... Connection part 4211E, 4211I ... First extension part 4212E , 4212I... 2nd extending portion 4213E, 4213I... 3rd extending portion 4214E... 4th extending portion 4215E, 4215I... 5th extending portion 4216E. 4217E, 4217I ...... Seventh extension part 422, 522, 622, 722 ... Movable plate side shaft part 423,523,623,723 ... Drive part side shaft part 43,53,63,73 ... Second Shaft portion 8, 8J ... displacement means 81A to 81J ... first displacement means 82, 82J ... second displacement means 83 ... third displacement means 84 ... fourth displacement Steps 811, 811a, 811b, 811B, 811D, 811E, 821, 831, 841 ... Permanent magnets 812, 812a, 812b, 822, 832, 832a, 832b, 842 ... Coils 813, 813B, 813J, 823, 823J, 833, 833J, 843 …… Power supply 85, 85A …… Coil fixing portion 85a, 85b …… Magnetic core 851 …… Protruding portion 852A …… Main body portion 100 …… SOI substrate 110 …… First Si layer 120 …… SiO ₂ Layer 130 ... Second Si layer 200 ... Projector 210 ... Light source device 211 ... Red light source device 212 ... Blue light source device 213 ... Green light source device 220 ... Dichroic mirror 250 ... Fixed mirror G1 ... Center M1, M2... SiO ₂ film X1 to X3, Y1 to Y3... X4, X5, Y4, Y5 …… Center axis Z1 …… Axis line

Claims (14)

A support part;
A movable plate including a light reflecting portion having light reflectivity;
A drive unit provided to be displaceable with respect to the support unit, and a shaft unit that connects the drive unit and the movable plate, and three units that connect the movable plate to the support unit in a displaceable manner. Or four connecting parts,
Displacement means for displacing the movable plate with respect to the support portion;
When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
Each connecting portion is provided along a plane parallel to both the X-axis and the Y-axis,
Each drive unit is provided to be displaceable in a direction parallel to the Z-axis,
Each of the shaft portions is configured to bend and deform in a direction parallel to the Z-axis in accordance with the displacement of the driving unit,
The actuator is characterized in that the displacement means displaces the movable plate by displacing each drive unit in a direction parallel to the Z-axis.   2. The actuator according to claim 1, wherein the three or four connecting portions are provided at equiangular intervals in the circumferential direction along the outer periphery of the movable plate when viewed from a direction parallel to the Z-axis. Four connecting portions are provided,
Two of the four connecting portions face each other in the direction parallel to the X axis via the movable plate, and the two connecting portions connect the driving unit and the support unit, respectively. A pair of beams extending in a direction parallel to the Y axis,
The other two connecting portions of the four connecting portions are opposed to each other in the direction parallel to the Y axis via the movable plate, and the other two connecting portions are respectively the driving portion and the support. The actuator according to claim 2, further comprising a pair of beam portions connected to each other and extending in a direction parallel to the X axis.   The actuator according to claim 3, wherein the displacing unit includes a permanent magnet provided in each driving unit and a coil that generates a magnetic field that acts on the permanent magnet.   5. The actuator according to claim 4, wherein each of the permanent magnets is magnetized in a direction parallel to the Z axis, and each of the coils generates a magnetic field in a direction parallel to the Z axis.   The actuator according to claim 5, wherein the center of the permanent magnet and the center of the beam portion are respectively located on the axis of the coil when viewed from the extending direction of the beam portion.   The slit-like through-hole extended in the direction orthogonal to the extension direction of the said beam part is formed in the vicinity of the connection part with each said beam part of each said drive part. The actuator described in 1.   Each of the shaft portions includes a stress relaxation portion provided between the movable plate and the drive portion, a movable plate side shaft portion connecting the stress relaxation portion and the movable plate, the stress relaxation portion, and the drive. The actuator according to claim 1, further comprising: a drive unit side shaft portion that couples the first portion to the second portion, wherein the actuator is bent at the stress relaxation portion.   Each stress relaxation portion extends in a direction perpendicular to the extending direction of the movable plate side shaft portion and the drive portion side shaft portion when viewed from a direction parallel to the Z axis, and is twisted around a central axis. The actuator according to claim 8, further comprising a deformable portion that is twisted. Each of the stress relaxation parts has a pair of the deformation parts,
10. The actuator according to claim 9, wherein one of the pair of deformation portions is connected to the movable plate side shaft portion, and the other deformation portion is connected to the drive portion side shaft portion.   Each of the stress relieving portions is provided between the pair of deforming portions, extends in a direction parallel to the extending direction of the deforming portions, and has a non-deforming portion that does not twist and deform around a central axis. The actuator according to claim 10.   9. The actuator according to claim 8, wherein each of the stress relieving portions has a meandering portion that alternately extends in a direction parallel to the X axis and a direction parallel to the Y axis. A support part;
A movable plate including a light reflecting portion having light reflectivity;
A drive unit provided to be displaceable with respect to the support unit, and a shaft unit that connects the drive unit and the movable plate, and three units that connect the movable plate to the support unit in a displaceable manner. Or four connecting parts,
Displacement means for displacing the movable plate with respect to the support portion;
When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
Each connecting portion is provided along a plane parallel to both the X-axis and the Y-axis,
Each drive unit is provided to be displaceable in a direction parallel to the Z-axis,
Each of the shaft portions is configured to bend and deform in a direction parallel to the Z-axis in accordance with the displacement of the driving unit,
The optical scanner is characterized in that the displacement means displaces the movable plate by displacing the driving units in a direction parallel to the Z-axis. A light source;
An optical scanner that scans the light from the light source;
The optical scanner is
A support part;
A movable plate including a light reflecting portion having light reflectivity;
A drive unit provided to be displaceable with respect to the support unit, and a shaft unit that connects the drive unit and the movable plate, and three units that connect the movable plate to the support unit in a displaceable manner. Or four connecting parts,
Displacement means for displacing the movable plate with respect to the support portion;
When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
Each connecting portion is provided along a plane parallel to both the X-axis and the Y-axis,
Each drive unit is provided to be displaceable in a direction parallel to the Z-axis,
Each of the shaft portions is configured to bend and deform in a direction parallel to the Z-axis in accordance with the displacement of the driving unit,
The image forming apparatus according to claim 1, wherein the displacement unit displaces the movable plate by displacing the driving units in a direction parallel to the Z-axis.

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